Microscope objective lens

Abstract

To provide a microscope objective lens which offers good optical performance and meets the design requirement of low aberrations.SOLUTION: A microscope objective lens comprises a total of twelve lenses consisting of first through twelfth lenses arranged in order from the exit side to the object side. The microscope objective lens satisfies the following relational expressions: 0.09≤f1-4 / f≤0.15, -1.35≤f78 / (d13+d14+d15)≤-0.95, -7.00≤R21 / R22≤-02.00, 0.20≤NA*f / WD≤0.26, where f represents a focal length of the microscope objective lens, NA represents a numerical aperture, WD represents a working distance, f1-4 represents a focal length of a lens group consisting of first through fourth lenses, f78 represents a composite focal length of the seventh lens and eighth lens, d13 and d15 respectively represent axial thicknesses of the seventh lens and the eighth lens, d14 represents an axial distance from the seventh lens to the eighth lens, and R21 and R22 respectively represent central curvature radii of exit-side and object-side surfaces of the eleventh lens.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to the field of optical lenses, and in particular to microscope objective lenses suitable for instruments such as microscopes. [Background technology]

[0002] In recent years, the demand for microscope lenses has been increasing, but in general microscope lenses, due to the constraints of the optical structure, aberration occurs in the microscopic range. On the other hand, since a microscope lens is composed of multiple lenses, its length is inevitably affected. In addition, the structure of the microscope lens is long, which shortens the working distance, and the magnification resolution is also affected by the working distance, which is disadvantageous for the operator.

[0003] With the development of technology and the diversification of user needs, the requirements for the observation quality of microscope lenses in scientific research are becoming increasingly higher, and there is a strong demand for microscope lenses with excellent optical properties, low aberration, and long working distance. Summary of the Invention

[0004] In view of the above problems, an object of the present invention is to provide a microscope objective lens that has good optical performance and can satisfy the design requirement of low aberration.

[0005] In order to solve the above technical problems, one embodiment of the present invention provides a microscope objective lens, which includes, in order from the exit side to the object side, a first lens having positive refractive power, a second lens having positive refractive power, a third lens having negative refractive power, a fourth lens having negative refractive power, a fifth lens having positive refractive power, a sixth lens having negative refractive power, a seventh lens having negative refractive power, an eighth lens having negative refractive power, a ninth lens having positive refractive power, a tenth lens having negative refractive power, an eleventh lens having positive refractive power, and a twelfth lens having positive refractive power; Here, the focal length of the microscope objective lens is f, the focal length of a lens group consisting of the 9th lens, the 10th lens, the 11th lens, and the 12th lens is f9-12, the composite focal length of the 7th lens and the 8th lens is f78, the axial thickness of the 7th lens is d13, the axial thickness of the 8th lens is d15, the axial distance from the object side surface of the 7th lens to the exit surface side of the 8th lens is d14, the central radius of curvature of the exit surface of the 11th lens is R21, the central radius of curvature of the object side surface of the 11th lens is R22, the numerical aperture of the microscope objective lens is NA, and the working distance of the microscope objective lens is WD, which satisfy the following relational expressions. 0.09≦F9-12 / F≦0.15 -1.35≦f78 / (d13+d14+d15)≦-0.95 -7.00 ≤ R21 / R22 ≤ -2.00; 0.20≦NA*f / WD≦0.26

[0006] Preferably, the central radius of curvature of the exit surface of the fifth lens is R9, the focal length of the fifth lens is f5, and the following relational expression is satisfied: 0.90≦R9 / f5≦3.00

[0007] Preferably, an exit surface of the first lens is a convex surface at a paraxial position, and an object side surface of the first lens is a convex surface at a paraxial position, The focal length of the first lens is f1, the central radius of curvature of the exit surface of the first lens is R1, the central radius of curvature of the object side surface of the first lens is R2, the axial thickness of the first lens is d1, and the total optical length of the microscope objective lens is TTL, satisfying the following relational expression: 0.08≦f1 / f≦0.27 -1.83≦(R1+R2) / (R1-R2)≦-0.56 0.01≦d1 / TTL≦0.03

[0008] Preferably, an exit surface of the second lens is a convex surface at a paraxial position, and an object side surface of the second lens is a convex surface at a paraxial position, The focal length of the second lens is f2, the central radius of curvature of the exit surface of the second lens is R3, the central radius of curvature of the object side surface of the second lens is R4, the axial thickness of the second lens is d3, and the total optical length of the microscope objective lens is TTL, satisfying the following relational expression: 0.09≦f2 / f≦0.30 -1.09≦(R3+R4) / (R3-R4)≦-0.02 0.01≦d3 / TTL≦0.03

[0009] Preferably, an exit surface of the third lens is concave at a paraxial position, and an object side surface of the third lens is concave at a paraxial position, The focal length of the third lens is f3, the central radius of curvature of the exit side of the third lens is R5, the central radius of curvature of the object side surface of the third lens is R6, the axial thickness of the third lens is d5, and the total optical length of the microscope objective lens is TTL, satisfying the following relational expressions: -0.23≦f3 / f≦-0.07 -0.26≦(R5+R6) / (R5-R6)≦0.53 0.00 <d5 / TTL≦0.01

[0010] Preferably, the object side surface of the fourth lens is concave at a paraxial position, The focal length of the fourth lens is f4, the central radius of curvature of the exit surface of the fourth lens is R7, the central radius of curvature of the object side surface of the fourth lens is R8, the axial thickness of the third lens is d7, and the total optical length of the microscope objective lens is TTL, satisfying the following relational expressions: -0.28≦f4 / f≦-0.05 0.09≦(R7+R8) / (R7-R8)≦4.94 0.00 <d7 / TTL≦0.02

[0011] Preferably, an exit surface of the fifth lens is a convex surface at a paraxial position, and an object side surface of the fifth lens is a convex surface at a paraxial position, The focal length of the fifth lens is f5, the central radius of curvature of the exit surface of the fifth lens is R9, the central radius of curvature of the object side surface of the fifth lens is R10, the axial thickness of the fifth lens is d9, and the total optical length of the microscope objective lens is TTL, satisfying the following relational expressions: 0.03≦f5 / f≦0.10 -0.65≦(R9+R10) / (R9-R10)≦0.89 0.01≦d9 / TTL≦0.04

[0012] Preferably, the exit surface of the sixth lens is concave at a paraxial position, The focal length of the sixth lens is f6, the central radius of curvature of the exit surface of the sixth lens is R11, the central radius of curvature of the object side surface of the sixth lens is R12, the axial thickness of the sixth lens is d11, and the total optical length of the microscope objective lens is TTL, which satisfy the following relational expressions: -0.22≦f6 / f≦-0.04 -5.23≦(R11+R12) / (R11-R12)≦-0.13 0.00 <d11 / TTL≦0.01

[0013] Preferably, the object side surface of the seventh lens is concave at a paraxial position, The focal length of the seventh lens is f7, the central radius of curvature of the exit surface of the seventh lens is R13, the central radius of curvature of the object side surface of the seventh lens is R14, the axial thickness of the seventh lens is d13, and the total optical length of the microscope objective lens is TTL, satisfying the following relational expressions: -1.04≦f7 / f≦-0.14 0.38≦(R13+R14) / (R13-R14)≦6.21 0.00 <d13 / TTL≦0.02

[0014] Preferably, an exit surface of the eighth lens is concave at a paraxial position, and an object side surface of the eighth lens is concave at a paraxial position, The focal length of the eighth lens is f8, the central radius of curvature of the exit side of the eighth lens is R15, the central radius of curvature of the object side surface of the eighth lens is R16, the axial thickness of the eighth lens is d15, and the total optical length of the microscope objective lens is TTL, satisfying the following relational expressions: -0.27≦f8 / f≦-0.04 -1.72≦(R15+R16) / (R15-R16)≦-0.52 0.00 <d15 / TTL≦0.01

[0015] Preferably, the exit surface of the ninth lens is convex at a paraxial position, The focal length of the 9th lens is f9, the central radius of curvature of the exit side of the 9th lens is R17, the central radius of curvature of the object side surface of the 9th lens is R18, the axial thickness of the 9th lens is d17, and the total optical length of the microscope objective lens is TTL, satisfying the following relational expressions: 0.10≦f9 / f≦2.22 -22.38≦(R17+R18) / (R17-R18)≦0.75 0.01≦d17 / TTL≦0.05

[0016] Preferably, the object side surface of the tenth lens is concave at a paraxial position, The focal length of the 10th lens is f10, the central radius of curvature of the exit surface of the 10th lens is R19, the central radius of curvature of the object side surface of the 10th lens is R20, the axial thickness of the 10th lens is d19, and the total optical length of the microscope objective lens is TTL, satisfying the following relational expressions: -0.90≦f10 / f≦-0.23 0.50≦(R19+R20) / (R19-R20)≦6.77 0.00 <d19 / TTL≦0.01

[0017] Preferably, an exit surface of the eleventh lens is a convex surface at a paraxial position, and an object side surface of the eleventh lens is a convex surface at a paraxial position, The focal length of the 11 lens is f11, the central radius of curvature of the exit side of the 11 lens is R21, the central radius of curvature of the object side surface of the 11 lens is R22, the axial thickness of the 11 lens is d21, and the total optical length of the microscope objective lens is TTL, which satisfy the following relational expressions. 0.07≦f11 / f≦0.24 0.17≦(R21+R22) / (R21-R22)≦1.12 0.03≦d21 / TTL≦0.10

[0018] Preferably, the exit surface of the twelfth lens is a concave surface at a paraxial position, and the object side surface of the twelfth lens is a convex surface at a paraxial position, The focal length of the 12th lens is f12, the central radius of curvature of the exit side of the 12th lens is R23, and the central radius of curvature of the object side surface of the 12th lens is R24, which satisfy the following relational expressions. 0.16≦f12 / f≦0.63 0.59≦(R23+R24) / (R23-R24)≦3.06 0.01≦d23 / TTL≦0.05

[0019] Preferably, the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens, the seventh lens, the eighth lens, the ninth lens, the tenth lens, the eleventh lens, and the twelfth lens are all made of a glass material. The beneficial effect of the present invention is that the microscope objective according to the present invention has excellent optical properties, low aberration properties, and is particularly suitable for optical microscope objectives. [Brief description of the drawings]

[0020] In order to more clearly describe the technical solutions in the embodiments of the present invention, the following briefly describes the drawings that need to be used in the description of the embodiments. It should be noted that the drawings in the following description are only some embodiments of the present invention. Those skilled in the art can obtain other drawings based on these drawings without creative work.

[0021] [Figure 1] 1 is a schematic diagram illustrating the configuration of a microscope objective lens according to a first embodiment of the present invention. [Diagram 2] FIG. 2 is a schematic diagram of axial aberration of the microscope objective lens shown in FIG. [Diagram 3] 2 is a schematic diagram of magnification aberration of the microscope objective lens shown in FIG. 1. [Figure 4] 2 is a schematic diagram of the field curvature and distortion of the microscope objective lens shown in FIG. 1. [Diagram 5] FIG. 5 is a schematic diagram showing the configuration of a microscope objective lens according to a second embodiment of the present invention. [Figure 6] FIG. 6 is a schematic diagram of axial aberration of the microscope objective lens shown in FIG. 5. [Figure 7] FIG. 6 is a schematic diagram of magnification aberration of the microscope objective lens shown in FIG. 5. [Figure 8] 6 is a schematic diagram of the field curvature and distortion of the microscope objective lens shown in FIG. 5. [Figure 9] FIG. 11 is a schematic diagram showing the configuration of a microscope objective lens according to a third embodiment of the present invention. [Figure 10] FIG. 10 is a schematic diagram of axial aberration of the microscope objective lens shown in FIG. [Figure 11] FIG. 10 is a schematic diagram of magnification aberration of the microscope objective lens shown in FIG. [Figure 12] 10 is a schematic diagram of the field curvature and distortion of the microscope objective lens shown in FIG. 9. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] In order to make the objectives, technical means and advantages of the present invention clearer, various embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be noted that those skilled in the art can understand that many technical details are proposed in various embodiments of the present invention to allow readers to better understand the present invention. However, even without these technical details and various modifications and changes based on the following embodiments, the technical solution claimed to be protected by the present invention can be realized.

[0023] (First embodiment) Referring to the accompanying drawings, the present invention provides a microscope objective lens 10. Fig. 1 shows a microscope objective lens 10 according to a first embodiment of the present invention, which includes 12 lenses arranged in order from the exit side to the object side. Specifically, the microscope objective lens 10 includes, in order from the exit side to the image side, a first lens L1, a second lens L2, a third lens L3, an aperture ST, a fourth lens L4, a fifth lens L5, a sixth lens L6, a seventh lens L7, an eighth lens L8, a ninth lens L9, a tenth lens L10, an eleventh lens L11, a twelfth lens L12, and an object surface OB.

[0024] In this embodiment, the first lens L1 is made of a glass material, the second lens L2 is made of a glass material, the third lens L3 is made of a glass material, the fourth lens L4 is made of a glass material, the fifth lens L5 is made of a glass material, the sixth lens L6 is made of a glass material, the seventh lens L7 is made of a glass material, the eighth lens L8 is made of a glass material, the ninth lens L9 is made of a glass material, the tenth lens L10 is made of a glass material, the eleventh lens L11 is made of a glass material, and the twelfth lens L12 is made of a glass material.

[0025] In this embodiment, the focal length of the microscope objective lens 10 is defined as f, and the focal length of the lens group consisting of the ninth lens L9, the tenth lens L10, the eleventh lens L11, and the twelfth lens L12 is defined as f9-12, and the following relational expression is satisfied: 0.09≦f9-12 / f≦0.15. By defining the range of the ratio between the focal length of the lens group consisting of the ninth lens L9, the tenth lens L10, the eleventh lens L11, and the twelfth lens L12 at the object side end and the focal length of the optical system, sufficient convergence of the incident light can be ensured.

[0026] The composite focal length of the seventh lens L7 and the eighth lens L8 is defined as f78, the axial thickness of the seventh lens L7 as d13, the axial thickness of the eighth lens L8 as d15, and the axial distance from the object side of the seventh lens L7 to the exit surface of the eighth lens L8 as d14, and the following relational expression is satisfied: -1.35≦f78 / (d13+d14+d15)≦-0.95. In addition, by defining the range of the ratio of the focal length and thickness of the combined lens consisting of the seventh lens L7 and the eighth lens L8, it is possible to maintain an appropriate thickness while ensuring sufficient refractive power, which is advantageous in correcting the aberration to |Distortion|≦0.5%.

[0027] The central radius of curvature of the exit surface of the eleventh lens L11 is defined as R21, and the central radius of curvature of the object side surface of the eleventh lens L11 is defined as R22, and the following relational expression is satisfied: -7.00≦R21 / R22≦-2.00. By defining the shape of the eleventh lens L11, it is possible to alleviate the degree of uneven distribution of light rays passing through the lens within the range of the conditional expression, which is effective in reducing spherical aberration and correcting chromatic aberration, and the chromatic aberration can be set to |LC|≦2.4 μm.

[0028] The numerical aperture of the microscope objective lens 10 is defined as NA, the working distance of the microscope objective lens 10 (the axial distance from the object side surface of the twelfth lens L12 to the object surface OB) is defined as WD, and the focal length of the microscope objective lens 10 is defined as f, and the following relational expression is satisfied: 0.20≦NA*f / WD≦0.26. By specifying the conditions that the numerical aperture and resolution of the microscope objective lens 10 satisfy, within the range, the numerical aperture of the microscope objective lens 10 is relatively large, and a stronger resolution is realized.

[0029] The central radius of curvature of the exit surface of the fifth lens L5 is R9, and the focal length of the fifth lens L5 is f5, which satisfies the following relation: 0.90≦R9 / f5≦3.00. The reasonable allocation of the focal lengths of the lenses and the control of the shape of the exit surface of the light beam are favorable for the smooth transition of the light beam between the lens groups, and the aberration can be corrected to achieve high resolution, while reducing tolerance sensitivity problems such as tilt / decentering that occur during the lens assembly process.

[0030] In this embodiment, the exit surface of the first lens L1 is a convex surface at the paraxial position, the object side surface of the first lens L1 is a convex surface at the paraxial position, and the first lens L1 has positive refractive power.

[0031] The focal length of the microscope objective lens 10 is defined as f, and the focal length of the first lens is defined as f1, and the following relational expression is satisfied: 0.08≦f1 / f≦0.27. The positive refractive power of the first lens L1 is specified, which is advantageous for rational control of the total optical length of the microscope objective lens 10. In addition, it is preferable that the relational expression is satisfied: 0.12≦f1 / f≦0.21.

[0032] The radius of curvature of the center of the exit surface of the first lens L1 is defined as R1, and the radius of curvature of the center of the object side surface of the first lens L1 is defined as R2, and the following relation is satisfied: -1.83≦(R1+R2) / (R1-R2)≦-0.56. The shape of the first lens L1 is reasonably controlled so that the first lens L1 can effectively correct the spherical aberration in a systematic manner. Preferably, the following relation is satisfied: -1.14≦(R3+R4) / (R3-R4)≦-0.70.

[0033] The axial thickness of the first lens L1 is defined as d1, and the total optical length of the microscope objective lens 10 is defined as TTL, which satisfies the following relation: 0.01≦d1 / TTL≦0.03. This is advantageous for rationally controlling the total optical length of the microscope objective lens 10.

[0034] In this embodiment, the exit surface of the second lens L2 is a convex surface at the paraxial position, the object side surface of the second lens L2 is a convex surface at the paraxial position, and the second lens L2 has positive refractive power.

[0035] The focal length of the microscope objective lens 10 is defined as f, and the focal length of the second lens L2 is defined as f2, and the following relational expression is satisfied: 0.09≦f2 / f≦0.30. By controlling the positive diopter (focal power) of the second lens L2 within an appropriate range, it is advantageous to correct the aberration of the optical system. In addition, it is preferable to satisfy 0.14≦f2 / f≦0.24.

[0036] The radius of curvature of the center of the exit surface of the second lens L2 is defined as R3, and the radius of curvature of the center of the object side surface of the second lens L2 is defined as R4, and the following relational expression is satisfied: -1.09≦(R3+R4) / (R3-R4)≦-0.02. By defining the shape of the second lens L2, it is advantageous to correct the problem of axial chromatic aberration within the range. In addition, it is preferable to satisfy -0.68≦(R3+R4) / (R3-R4)≦-0.03.

[0037] The axial thickness of the second lens L2 is d3, and the total optical length of the microscope objective lens 10 is TTL, and the following relational expression is satisfied: 0.01≦d3 / TTL≦0.03. This is advantageous for rationally controlling the total optical length of the microscope objective lens 10. In addition, it is preferable to satisfy 0.01≦d3 / TTL≦0.02.

[0038] In this embodiment, the exit surface of the third lens L3 is concave at the paraxial position, the object side surface is concave at the paraxial position, and the third lens L3 has negative refractive power.

[0039] The focal length of the microscope objective lens 10 is defined as f, and the focal length of the third lens L3 is defined as f3, and the following relationship is satisfied: -0.23≦f3 / f≦-0.07. With a proper distribution of diopters, the system has better imaging quality and low sensitivity. Also, preferably, -0.14≦f3 / f≦-0.09 is satisfied.

[0040] The radius of curvature of the center of the exit surface of the third lens L3 is R5, and the radius of curvature of the center of the object side surface of the third lens L3 is R6, and the following relational expression is satisfied: -0.26≦(R5+R6) / (R5-R6)≦0.53. This makes it possible to effectively control the shape of the third lens L3, which is advantageous for molding the third lens L3, and makes it possible to avoid molding defects caused by the surface curvature of the third lens L3 becoming excessively large. In addition, it is preferable to satisfy -0.16≦(R5+R6) / (R5-R6)≦0.42.

[0041] Let the on-axis thickness of the third lens L3 be d5, define the overall optical length of the microscope objective lens 10 as TTL, and satisfy the following relational expression: 0.00 < d5 / TTL ≤ 0.01. Thereby, it is within the range of the conditional expression, and the overall optical length of the microscope objective lens 10 can be reasonably controlled.

[0042] In this embodiment, the exit surface of the fourth lens L4 is convex at the paraxial position, the object side surface of the fourth lens L4 is concave at the paraxial position, and the fourth lens L4 has a negative refractive power. In any other embodiment, the exit surface and the object side surface of the fourth lens L4 may be arranged with other concave or convex distributions.

[0043] Let the focal length of the microscope objective lens 10 be f, define the focal length of the fourth lens L4 as f4, and satisfy the following relational expression: -0.28 ≤ f4 / f ≤ -0.05. By a reasonable distribution of the diopter, the system has better imaging quality and low sensitivity. Also preferably, -0.18 ≤ f4 / f ≤ -0.07 is satisfied.

[0044] Let the central radius of curvature of the exit surface of the fourth lens L4 be R7, define the central radius of curvature of the object side surface of the fourth lens L4 as R8, and satisfy the following relational expression: 0.09 ≤ (R7 + R8) / (R7 - R8) ≤ 4.94. By defining the shape of the fourth lens L4, when it is within the range, while aiming for miniaturization, it is advantageous for aberration correction of the off-axis field angle, etc. Also preferably, 0.14 ≤ (R7 + R8) / (R7 - R8) ≤ 3.95 is satisfied.

[0045] Let the on-axis thickness of the fourth lens L4 be d7, and the overall optical length of the microscope objective lens 10 be TTL, and satisfy the following relational expression: 0.00 < d7 / TTL ≤ 0.02. If it is within the range of the conditional expression, it contributes to reasonably controlling the overall optical length of the microscope objective lens 10. Also preferably, d7 / TTL = 0.01 is satisfied.

[0046] In this embodiment, the exit surface of the fifth lens L5 is a convex surface at the paraxial position, the object side surface of the fifth lens L5 is a convex surface at the paraxial position, and the fifth lens L5 has positive refractive power.

[0047] The focal length of the microscope objective lens 10 is defined as f, and the focal length of the fifth lens L5 is defined as f5, and the following relational expression is satisfied: 0.03≦f5 / f≦0.10. The restriction on the fifth lens L5 is effective in making the optical angle of the microscope objective lens 10 gentle and reducing the tolerance sensitivity. In addition, it is preferable that 0.04≦f5 / f≦0.08 is satisfied.

[0048] The radius of curvature of the center of the exit surface of the fifth lens L5 is R9, and the radius of curvature of the center of the object side surface of the fifth lens L5 is R10, and the following relational expression is satisfied: -0.65≦(R9+R10) / (R9-R10)≦0.89. By defining the shape of the fifth lens L5, it is advantageous to correct problems such as aberrations of off-axis angles of view if the condition is within the range. In addition, it is preferable to satisfy -0.41≦(R9+R10) / (R9-R10)≦0.71.

[0049] The axial thickness of the fifth lens L5 is defined as d9, and the total optical length of the microscope objective lens 10 is defined as TTL, and the following relational expression is satisfied: 0.01≦d9 / TTL≦0.04. This is within the range of the conditional expression, and the total optical length of the microscope objective lens 10 can be reasonably controlled. In addition, it is preferable to satisfy 0.02≦d9 / TTL≦0.03.

[0050] In this embodiment, the exit surface of the sixth lens L6 is concave at the paraxial position, the object side surface is concave at the paraxial position, and the sixth lens L6 has negative refractive power. In any other embodiment, the exit surface and the object side surface of the sixth lens L6 may be arranged in other concave or convex distributions.

[0051] Let the focal length of the microscope objective lens 10 be f, and define the focal length of the sixth lens L6 as f6. The following relational expression is satisfied: -0.22 ≤ f6 / f ≤ -0.04. Through a reasonable distribution of diopters, the system has better imaging quality and low sensitivity. Also preferably, -0.14 ≤ f6 / f ≤ -0.04 is satisfied.

[0052] Let the central radius of curvature on the exit side of the sixth lens L6 be R11, and the central radius of curvature on the object side surface of the sixth lens L6 be R12. The following relational expression is satisfied: -5.23 ≤ (R11 + R12) / (R11 - R12) ≤ -0.13. By defining the shape of the sixth lens L6, when it is within the range of the conditions, it is advantageous for correcting problems such as off-axis aberration. Also preferably, -3.27 ≤ (R11 + R12) / (R11 - R12) ≤ -0.16 is satisfied.

[0053] Let the on-axis thickness of the sixth lens L6 be d11, and define the overall optical length of the microscope objective lens 10 as TTL. The following relational expression is satisfied: 0.00 < d11 / TTL ≤ 0.01. Thereby, it is within the range of the conditional formula and is advantageous for reasonably controlling the overall optical length of the microscope objective lens 10. Also preferably, d11 / TTL = 0.01 is satisfied.

[0054] In this embodiment, the exit surface of the seventh lens L7 is concave at the paraxial position, the object side surface of the seventh lens L7 is concave at the paraxial position, and the seventh lens L7 has a negative refractive power. In any other embodiment, the exit surface and the object side surface of the seventh lens L7 may be arranged with other concave or convex distributions.

[0055] Let the focal length of the microscope objective lens 10 be f, and define the focal length of the seventh lens L7 as f7. The following relational expression is satisfied: -1.04 ≤ f7 / f ≤ -0.14. Through a reasonable distribution of diopters, a system with better imaging quality and low sensitivity is obtained. Also preferably, -0.65 ≤ f7 / f ≤ -0.18 is satisfied.

[0056] Let the radius of curvature of the center of the exit surface of the seventh lens L7 be R13, and the radius of curvature of the center of the object side surface of the seventh lens L7 be R14. The following relational expression is satisfied: 0.38 ≤ (R13 + R14) / (R13 - R14) ≤ 6.21. By defining the shape of the seventh lens L7, when it is within the range of the conditions, it is advantageous for miniaturization while correcting problems such as off-axis field angle aberration. Also, preferably, 0.60 ≤ (R13 + R14) / (R13 - R14) ≤ 4.97 is satisfied.

[0057] Let the on-axis thickness of the seventh lens L7 be d13, and the overall optical length of the microscope objective lens 10 be TTL. The following relational expression is satisfied: 0.00 < d13 / TTL ≤ 0.02. Being within the range of the conditional expression contributes to reasonably controlling the overall optical length of the microscope objective lens 10. Also, preferably, d13 / TTL = 0.01 is satisfied.

[0058] In this embodiment, the exit surface of the eighth lens L8 is concave at the paraxial position, the object side surface of the eighth lens L8 is concave at the paraxial position, and the eighth lens L8 has a negative refractive power.

[0059] Let the focal length of the microscope objective lens 10 be f, and the focal length of the eighth lens L8 be f8. The following relational expression is satisfied: -0.27 ≤ f8 / f ≤ -0.04. By a reasonable distribution of the diopters, a system with better imaging quality and low sensitivity is obtained. Also, preferably, -0.17 ≤ f8 / f ≤ -0.05 is satisfied.

[0060] Let the radius of curvature of the center of the exit surface of the eighth lens L8 be R15, and the radius of curvature of the center of the object side surface of the eighth lens L8 be R16. The following relational expression is satisfied: -1.72 ≤ (R15 + R16) / (R15 - R16) ≤ -0.52. By defining the shape of the eighth lens L8, when it is within the range of the conditions, it is advantageous for miniaturization while correcting problems such as off-axis field angle aberration. Also, preferably, -1.08 ≤ (R15 + R16) / (R15 - R16) ≤ -0.65 is satisfied.

[0061] Let the on-axis thickness of the eighth lens L8 be d15, and the overall optical length of the microscope objective lens 10 be TTL. The following relational expression is satisfied: 0.00 < d15 / TTL ≤ 0.01. Being within the range of the conditional expression is advantageous for reasonably controlling the overall optical length of the microscope objective lens 10.

[0062] In this embodiment, the exit surface of the ninth lens L9 is convex at the paraxial position, the object side surface of the ninth lens L9 is convex at the paraxial position, and the ninth lens L9 has a positive refractive power. Also, in any other embodiment, the exit surface and the object side surface of the ninth lens L9 may be arranged with other concave or convex distributions.

[0063] Let the focal length of the microscope objective lens 10 be f, and the focal length of the ninth lens L9 be f9. The following relational expression is satisfied: 0.10 ≤ f9 / f ≤ 2.22. By a reasonable distribution of diopters, a system with better imaging quality and low sensitivity is obtained. Also, preferably, 0.17 ≤ f9 / f ≤ 1.78 is satisfied.

[0064] Let the radius of curvature at the center of the exit surface of the ninth lens L9 be R17, and the radius of curvature at the center of the object side surface of the ninth lens L9 be R18. The following relational expression is satisfied: -22.38 ≤ (R17 + R18) / (R17 - R18) ≤ 0.75. By defining the shape of the ninth lens L9, when it is within the range of the conditions, it is advantageous for miniaturization while correcting problems such as off-axis field angle aberrations. Also, preferably, -13.99 ≤ (R17 + R18) / (R17 - R18) ≤ 0.60 is satisfied.

[0065] Let the on-axis thickness of the ninth lens L9 be d17, and the overall optical length of the microscope objective lens 10 be TTL. The following relational expression is satisfied: 0.01 ≤ d17 / TTL ≤ 0.05. Thereby, being within the range of the conditional expression is advantageous for reasonably controlling the overall optical length of the microscope objective lens 10. Also, preferably, 0.01 ≤ d17 / TTL ≤ 0.04 is satisfied.

[0066] In this embodiment, the exit surface of the 10th lens L10 is concave at the paraxial position, the object side surface of the 10th lens L10 is concave at the paraxial position, and the 10th lens L10 has a negative refractive power. Also, in any other embodiment, the exit surface and the object side surface of the 10th lens L10 may be arranged with other concave or convex distributions.

[0067] Let the focal length of the microscope objective lens 10 be f and the focal length of the 10th lens L10 be f10. The following relational expression is satisfied: -0.90 ≤ f10 / f ≤ -0.23. By a reasonable distribution of diopters, a system with better imaging quality and low sensitivity is obtained. Also preferably, -0.56 ≤ f10 / f ≤ -0.29 is satisfied.

[0068] Let the central radius of curvature of the exit surface of the 10th lens L10 be R19 and the central radius of curvature of the object side surface of the 10th lens L10 be R20. The following relational expression is satisfied: 0.50 ≤ (R19 + R20) / (R19 - R20) ≤ 6.77. By defining the shape of the 10th lens L10, when within the range of conditions, it is advantageous for miniaturization while correcting problems such as off-axis field angle aberration. Also preferably, 0.80 ≤ (R19 + R20) / (R19 - R20) ≤ 5.42 is satisfied.

[0069] Let the on-axis thickness of the 10th lens L10 be d19 and the overall optical length of the microscope objective lens 10 be TTL. The following relational expression is satisfied: 0.00 < d19 / TTL ≤ 0.01. Thereby, within the range of the conditional expression, it is advantageous for reasonably controlling the overall optical length of the microscope objective lens 10.

[0070] In this embodiment, the exit surface of the 11th lens L11 is convex at the paraxial position, the object side surface of the 11th lens L11 is convex at the paraxial position, and the 11th lens L11 has a positive refractive power.

[0071] The focal length of the microscope objective lens 10 is defined as f, and the focal length of the eleventh lens L11 is defined as f11, and the following relation is satisfied: 0.07≦f11 / f≦0.24. A system with better image quality and low sensitivity can be obtained by a reasonable allocation of diopters. In addition, it is preferable to satisfy 0.12≦f11 / f≦0.19.

[0072] The radius of curvature of the center of the exit surface of the eleventh lens L11 is R21, and the radius of curvature of the center of the object side surface of the eleventh lens L11 is R22, and the following relational expression is satisfied: 0.17≦(R21+R22) / (R21-R22)≦1.12. By specifying the shape of the eleventh lens L11, if it is within the range of the condition, it is advantageous to correct problems such as aberration of the off-axis angle of view while achieving compactness. In addition, it is preferable to satisfy 0.27≦(R21+R22) / (R21-R22)≦0.90.

[0073] The axial thickness of the eleventh lens L11 is d21, and the total optical length of the microscope objective lens 10 is TTL, and the following relational expression is satisfied: 0.03≦d21 / TTL≦0.10. This is within the range of the conditional expression and is advantageous for rationally controlling the total optical length of the microscope objective lens 10. In addition, it is preferable to satisfy 0.05≦d21 / TTL≦0.08.

[0074] In this embodiment, the exit surface of the twelfth lens L12 is a concave surface at the paraxial position, the object side surface of the twelfth lens L12 is a convex surface at the paraxial position, and the twelfth lens L12 has positive refractive power.

[0075] The focal length of the microscope objective lens 10 is defined as f, and the focal length of the twelfth lens L12 is defined as f12, and the following relation is satisfied: 0.16≦f12 / f≦0.63. A reasonable allocation of diopters makes the system have better imaging quality and low sensitivity. It is also preferable to satisfy 0.25≦f12 / f≦0.50.

[0076] The radius of curvature of the center of the exit surface of the 12th lens L12 is R23, and the radius of curvature of the center of the object side surface of the 12th lens L12 is R24, and the following relational expression is satisfied: 0.59≦(R23+R24) / (R23-R24)≦3.06. By defining the shape of the 12th lens L12, if it is within the range of the condition, it is advantageous to correct problems such as aberration of the off-axis angle of view while achieving compactness. In addition, it is preferable to satisfy 0.95≦(R23+R24) / (R23-R24)≦2.44.

[0077] The axial thickness of the twelfth lens L12 is d23, and the total optical length of the microscope objective lens 10 is TTL, and the following relational expression is satisfied: 0.01≦d23 / TTL≦0.05. This is within the range of the conditional expression and is advantageous for rationally controlling the total optical length of the microscope objective lens 10. In addition, it is preferable to satisfy 0.02≦d23 / TTL≦0.04.

[0078] In this embodiment, the first lens L1, the second lens L2, the third lens L3, the fourth lens L4, the fifth lens L5, the sixth lens L6, the seventh lens L7, the eighth lens L8, the ninth lens L9, the tenth lens L10, the eleventh lens L11, and the twelfth lens L12 are all made of glass.

[0079] The microscope objective lens 10 has good optical performance and can meet the design requirements of miniaturization and low distortion. Due to the characteristics of the microscope objective lens 10, the microscope objective lens 10 is particularly suitable for a microscope objective lens with high pixel count.

[0080] When using the microscope objective lens 10, the light rays from the object enter the microscope objective lens 10 at the object plane OB and exit as parallel light from the left side. In the case of optical design, the light path is reversed, with parallel light entering from the left side and being focused on the right side (object plane OB) to form an image.

[0081] The microscope objective lens 10 of the present invention will be described below with reference to examples. The focal length, axial distance, central radius of curvature, and axial thickness are all in mm.

[0082] TTL: total optical length (the axial distance from the exit surface of the first lens L1 to the object surface OB), in mm;

[0083] WD: Working distance (the axial distance from the object side of the twelfth lens L12 to the object plane OB).

[0084] Tables 1 and 2 are tables showing design data of the microscope objective lens 10 according to the first embodiment of the present invention.

[0085] JPEG2025000532000002.jpg183160

[0086] Here, the meanings of the symbols are as follows: ST: aperture; Gn: nth lens; R: radius of curvature at the center of the optical surface; R1: the central curvature radius of the exit surface of the first lens L1; R2: the central radius of curvature of the object side of the first lens L1; R3: the central curvature radius of the exit surface of the second lens L2; R4: the central radius of curvature of the object side of the second lens L2; R5: central curvature radius of the exit surface of the third lens L3; R6: the central radius of curvature of the object side of the third lens L3; R7: central curvature radius of the exit surface of the fourth lens L4; R8: the central radius of curvature of the object side of the fourth lens L4; R9: central curvature radius of the exit surface of the fifth lens L5; R10: the central radius of curvature of the object side of the fifth lens L5; R11: the central curvature radius of the exit surface of the sixth lens L6; R12: the central radius of curvature of the object side of the sixth lens L6; R13: the central curvature radius of the exit surface of the seventh lens L7; R14: the central radius of curvature of the object side of the seventh lens L7; R15: the central curvature radius of the exit surface of the eighth lens L8; R16: the central radius of curvature of the object side of the eighth lens L8; R17: the central curvature radius of the exit surface of the ninth lens L9; R18: the central radius of curvature of the object side of the ninth lens L9; R19: the central curvature radius of the exit surface of the tenth lens L10; R20: the central radius of curvature of the object side of the tenth lens L10; R21: central radius of curvature of the exit surface of the eleventh lens L11; R22: the central radius of curvature of the object side of the eleventh lens L11; R23: the central curvature radius of the exit surface of the twelfth lens L12; R24: the central radius of curvature of the object side of the twelfth lens L12; d: Axial thickness of lens, axial distance between lenses; d1: axial thickness of the first lens L1; d2: the axial distance from the object side surface of the first lens L1 to the exit surface of the second lens L2; d3: axial thickness of the second lens L2; d4: the axial distance from the object side surface of the second lens L2 to the exit surface of the third lens L3; d5: Axial thickness of the third lens L3; d6: the axial distance from the object side surface of the third lens L3 to the exit surface of the aperture stop ST; dST-4: the axial distance from the object side surface of the aperture ST to the exit surface of the fourth lens L4; d7: Axial thickness of the fourth lens L4; d8: the axial distance from the object side surface of the fourth lens L4 to the exit surface of the fifth lens L5; d9: Axial thickness of the fifth lens L5; d10: the axial distance from the object side surface of the fifth lens L5 to the exit surface of the sixth lens L6; d11: Axial thickness of the sixth lens L6; d12: the axial distance from the object side surface of the sixth lens L6 to the exit surface of the seventh lens L7; d13: Axial thickness of the seventh lens L7; d14: the axial distance from the object side surface of the seventh lens L7 to the exit side surface of the eighth lens L8; d15: Axial thickness of the eighth lens L8; d16: the axial distance from the object side surface of the eighth lens L8 to the exit side surface of the ninth lens L9; d17: Axial thickness of the ninth lens L9; d18: the axial distance from the object side surface of the ninth lens L9 to the exit surface of the tenth lens L10; d19: Axial thickness of the tenth lens L10; d20: the axial distance from the object side surface of the tenth lens L10 to the exit surface of the eleventh lens L11; d21: Axial thickness of the eleventh lens L11; d22: the axial distance from the object side surface of the eleventh lens L11 to the exit surface of the twelfth lens L12; d23: Axial thickness of the twelfth lens L12; d24: the axial distance from the object side of the twelfth lens L12 to the object plane OB; nd: refractive index of d line; nd1: refractive index of the first lens L1 at the d line; nd2: refractive index of the second lens L2 at the d line; nd3: refractive index of the third lens L3 at the d line; nd4: refractive index of the d line of the fourth lens L4; nd5: refractive index of the d line of the fifth lens L5; nd6: refractive index of the d line of the sixth lens L6; nd7: refractive index of the seventh lens L7 at the d line; nd8: refractive index of the d line of the eighth lens L8; nd9: refractive index of the 9th lens L9 at the d line; nd10: refractive index of the d line of the tenth lens L10; nd11: refractive index of the 11th lens L11 at the d line; nd12: refractive index of the twelfth lens L12 at the d line; vd: Abbe number; v1: Abbe number of the first lens L1; v2: Abbe number of the second lens L2; v3: Abbe number of the third lens L3; v4: Abbe number of the fourth lens L4; v5: Abbe number of the fifth lens L5; v6: Abbe number of the sixth lens L6; v7: Abbe number of the seventh lens L7; v8: Abbe number of the eighth lens L8; v9: Abbe number of the ninth lens L9; v10: Abbe number of the tenth lens L10; v11: Abbe number of the 11th lens L11; v12: Abbe number of the 12th lens L12.

[0087] 2 and 3 are schematic diagrams showing axial aberration and lateral chromatic aberration after light of wavelengths 656 nm, 588 nm, and 486 nm passes through the microscope objective lens 10 of the first embodiment. Fig. 4 is a schematic diagram showing field curvature and distortion after light of wavelength 588 nm passes through the microscope objective lens 10 of the first embodiment. In Fig. 4, field curvature S is the field curvature in the axial direction, and T is the field curvature in the meridian direction.

[0088] Table 4, which will be shown later, shows various numerical values ​​in each of Examples 1, 2, and 3, and values ​​corresponding to parameters defined by conditional expressions.

[0089] As shown in Table 4, the first embodiment satisfies each of the conditional expressions.

[0090] In this embodiment, the microscope objective lens 10 has an entrance pupil diameter ENDP of 8.508 mm, a full-field image height IH of 12.000 mm, a numerical aperture NA of 0.022 mm, and a diagonal field angle FOV of 7.26°. The microscope objective lens 10 meets the design requirements for low distortion, and has excellent optical characteristics with sufficiently corrected axial and off-axial chromatic aberrations.

[0091] Second embodiment The second embodiment is basically the same as the first embodiment, and the reference symbols have the same meanings as in the first embodiment, so only the differences will be listed below.

[0092] In this embodiment, the exit surface of the fourth lens L4 is concave at the paraxial position, the object side surface of the sixth lens L6 is convex at the paraxial position, the exit surface of the seventh lens L7 is convex at the paraxial position, the object side surface of the ninth lens L9 is concave at the paraxial position, and the exit surface of the tenth lens L10 is convex at the paraxial position.

[0093] FIG. 5 is a diagram showing a microscope objective lens 20 according to a second embodiment of the present invention.

[0094] Table 2 shows design data of the microscope objective lens 20 according to the second embodiment of the present invention.

[0095] JPEG2025000532000003.jpg177162

[0096] 6 and 7 are schematic diagrams showing axial aberration and lateral chromatic aberration after light of wavelengths 656 nm, 588 nm, and 486 nm passes through the microscope objective lens 20 of the second embodiment. Fig. 8 is a schematic diagram showing field curvature and distortion after light of wavelength 588 nm passes through the microscope objective lens 20 of the second embodiment. In Fig. 8, field curvature S is the field curvature in the axial direction, and T is the field curvature in the meridian direction.

[0097] As shown in Table 4, the second embodiment satisfies each of the conditional expressions.

[0098] In this embodiment, the microscope objective lens 20 has an entrance pupil diameter ENDP of 9.780 mm, a full-field image height IH of 12.000 mm, a numerical aperture NA of 0.025 mm, and a diagonal field of view angle FOV of 7.26°. The microscope objective lens 20 meets the design requirements for low distortion, and has excellent optical characteristics with sufficiently corrected axial and off-axial chromatic aberrations.

[0099] (Third embodiment) The third embodiment is basically the same as the first embodiment, and the reference symbols have the same meanings as in the first embodiment, so only the differences will be listed below.

[0100] In this embodiment, the exit surface of the fourth lens L4 is concave at the paraxial position, the object side surface of the sixth lens L6 is convex at the paraxial position, the exit surface of the seventh lens L7 is convex at the paraxial position, the object side surface of the ninth lens L9 is concave at the paraxial position, and the exit surface of the tenth lens L10 is convex at the paraxial position.

[0101] FIG. 9 is a diagram showing a microscope objective lens 30 according to a third embodiment of the present invention.

[0102] Table 3 shows design data of the microscope objective lens 30 according to the third embodiment of the present invention.

[0103] JPEG2025000532000004.jpg171162

[0104] Fig. 10 and Fig. 11 are schematic diagrams showing axial aberration and lateral chromatic aberration after light of wavelengths 656 nm, 588 nm, and 486 nm passes through the microscope objective lens 30 of the third embodiment. Fig. 12 is a schematic diagram showing field curvature and distortion after light of wavelength 588 nm passes through the microscope objective lens 30 of the third embodiment. In Fig. 12, field curvature S is the field curvature in the axial direction, and T is the field curvature in the meridian direction.

[0105] Below, Table 4 shows values ​​corresponding to each conditional expression in this embodiment according to the above conditional expressions. It is clear that the microscope objective lens 40 according to this embodiment satisfies the above conditional expressions.

[0106] In this embodiment, the microscope objective lens 40 has an entrance pupil diameter ENDP of 11.033 mm, a full-field image height IH of 12.000 mm, a numerical aperture NA of 0.028 mm, and a diagonal field angle FOV of 7.26°. The microscope objective lens 40 meets the design requirements for low distortion, and has excellent optical characteristics with sufficiently corrected axial and off-axial chromatic aberrations.

[0107] JPEG2025000532000005.jpg164165

[0108] The above-described embodiments are specific embodiments for realizing the present invention, and it will be understood by those skilled in the art that various changes in form and details can be made in practical application without departing from the spirit and scope of the present invention.

Claims

1. 1. A microscope objective lens, comprising: The microscope objective lens includes, in order from the exit side to the object side, a first lens having positive refractive power, a second lens having positive refractive power, a third lens having negative refractive power, a fourth lens having negative refractive power, a fifth lens having positive refractive power, a sixth lens having negative refractive power, a seventh lens having negative refractive power, an eighth lens having negative refractive power, a ninth lens having positive refractive power, a tenth lens having negative refractive power, an eleventh lens having positive refractive power, and a twelfth lens having positive refractive power, Here, the microscope objective lens is characterized in that the focal length of the microscope objective lens is f, the focal length of a lens group consisting of the ninth lens, the tenth lens, the eleventh lens, and the twelfth lens is f9-12, the composite focal length of the seventh lens and the eighth lens is f78, the axial thickness of the seventh lens is d13, the axial thickness of the eighth lens is d15, the axial distance from the object side surface of the seventh lens to the exit surface side of the eighth lens is d14, the central radius of curvature of the exit surface of the eleventh lens is R21, the central radius of curvature of the object side surface of the eleventh lens is R22, the numerical aperture of the microscope objective lens is NA, the working distance of the microscope objective lens is WD, and the following relational expressions are satisfied. 0.09≦F9-12 / F≦0.15 -1.35≦f78 / (d13+d14+d15)≦-0.95 −7.00≦R21 / R22≦−2.00; 0.20≦NA*f / WD≦0.26

2. 2. The microscope objective lens according to claim 1, wherein the central radius of curvature of the exit surface of the fifth lens is R9, the focal length of the fifth lens is f5, and the following relation is satisfied: 0.90≦R9 / f5≦3.00

3. an exit surface of the first lens is a convex surface at a paraxial position, and an object side surface of the first lens is a convex surface at a paraxial position, The microscope objective lens described in claim 1, characterized in that the focal length of the first lens is f1, the central radius of curvature of the exit surface of the first lens is R1, the central radius of curvature of the object side surface of the first lens is R2, the axial thickness of the first lens is d1, and the total optical length of the microscope objective lens is TTL, satisfying the following relationship. 0.08≦f1 / f≦0.27 -1.83≦(R1+R2) / (R1-R2)≦-0.56 0.01≦d1 / TTL≦0.03

4. an exit surface of the second lens is a convex surface at a paraxial position, and an object side surface of the second lens is a convex surface at a paraxial position, The microscope objective lens described in claim 1, characterized in that the focal length of the second lens is f2, the central radius of curvature of the exit surface of the second lens is R3, the central radius of curvature of the object side surface of the second lens is R4, the axial thickness of the second lens is d3, and the total optical length of the microscope objective lens is TTL, satisfying the following relationship. 0.09≦f2 / f≦0.30 -1.09≦(R3+R4) / (R3-R4)≦-0.02 0.01≦d3 / TTL≦0.03

5. an exit surface of the third lens is concave at a paraxial position, and an object side surface of the third lens is concave at a paraxial position; The microscope objective lens described in claim 1, characterized in that the focal length of the third lens is f3, the central radius of curvature of the exit side of the third lens is R5, the central radius of curvature of the object side surface of the third lens is R6, the axial thickness of the third lens is d5, and the total optical length of the microscope objective lens is TTL, satisfying the following relationship. −0.23≦f3 / f≦−0.07 -0.26≦(R5+R6) / (R5-R6)≦0.53 0.00<d5 / TTL≦0.01

6. the object side surface of the fourth lens is concave at a paraxial position; The microscope objective lens described in claim 1, characterized in that the focal length of the fourth lens is f4, the central radius of curvature of the exit surface of the fourth lens is R7, the central radius of curvature of the object side surface of the fourth lens is R8, the axial thickness of the third lens is d7, and the total optical length of the microscope objective lens is TTL, satisfying the following relationship. −0.28≦f4 / f≦−0.05 0.09≦(R7+R8) / (R7-R8)≦4.94 0.00<d7 / TTL≦0.02

7. an exit surface of the fifth lens is a convex surface at a paraxial position, and an object side surface of the fifth lens is a convex surface at a paraxial position, The microscope objective lens described in claim 1, characterized in that the focal length of the fifth lens is f5, the central radius of curvature of the exit surface of the fifth lens is R9, the central radius of curvature of the object side surface of the fifth lens is R10, the axial thickness of the fifth lens is d9, and the total optical length of the microscope objective lens is TTL, satisfying the following relationship. 0.03≦f5 / f≦0.10 -0.65≦(R9+R10) / (R9-R10)≦0.89 0.01≦d9 / TTL≦0.04

8. the exit surface of the sixth lens is concave at a paraxial position; The microscope objective lens described in claim 1, characterized in that the focal length of the sixth lens is f6, the central radius of curvature of the exit surface of the sixth lens is R11, the central radius of curvature of the object side surface of the sixth lens is R12, the axial thickness of the sixth lens is d11, and the total optical length of the microscope objective lens is TTL, satisfying the following relationship. −0.22≦f6 / f≦−0.04 -5.23≦(R11+R12) / (R11-R12)≦-0.13 0.00<d11 / TTL≦0.01

9. the seventh lens has an object side surface that is concave at a paraxial position; The microscope objective lens described in claim 1, characterized in that the focal length of the seventh lens is f7, the central radius of curvature of the exit surface of the seventh lens is R13, the central radius of curvature of the object side surface of the seventh lens is R14, the axial thickness of the seventh lens is d13, and the total optical length of the microscope objective lens is TTL, satisfying the following relationship. −1.04≦f7 / f≦−0.14 0.38≦(R13+R14) / (R13-R14)≦6.21 0.00<d13 / TTL≦0.02

10. an exit surface of the eighth lens is a concave surface at a paraxial position, and an object side surface of the eighth lens is a concave surface at a paraxial position; The microscope objective lens described in claim 1, characterized in that the focal length of the 8th lens is f8, the central radius of curvature of the exit side of the 8th lens is R15, the central radius of curvature of the 8th lens on the object side is R16, the axial thickness of the 8th lens is d15, and the total optical length of the microscope objective lens is TTL, and the following relationship is satisfied. −0.27≦f8 / f≦−0.04 -1.72≦(R15+R16) / (R15-R16)≦-0.52 0.00<d15 / TTL≦0.01

11. the exit surface of the ninth lens is convex at a paraxial position; The microscope objective lens described in claim 1, characterized in that the focal length of the 9th lens is f9, the central radius of curvature of the exit side of the 9th lens is R17, the central radius of curvature of the object side surface of the 9th lens is R18, the axial thickness of the 9th lens is d17, and the total optical length of the microscope objective lens is TTL, satisfying the following relationship. 0.10≦f9 / f≦2.22 -22.38≦(R17+R18) / (R17-R18)≦0.75 0.01≦d17 / TTL≦0.05

12. the object side surface of the tenth lens is concave at a paraxial position; The microscope objective lens described in claim 1, characterized in that the focal length of the 10th lens is f10, the central radius of curvature of the exit surface of the 10th lens is R19, the central radius of curvature of the object side surface of the 10th lens is R20, the axial thickness of the 10th lens is d19, and the total optical length of the microscope objective lens is TTL, satisfying the following relationship. −0.90≦f10 / f≦−0.23 0.50≦(R19+R20) / (R19-R20)≦6.77 0.00<d19 / TTL≦0.01

13. an exit surface of the eleventh lens is a convex surface at a paraxial position, and an object side surface of the eleventh lens is a convex surface at a paraxial position, The microscope objective lens described in claim 1, characterized in that the focal length of the 11 lens is f11, the central radius of curvature of the exit side of the 11 lens is R21, the central radius of curvature of the object side surface of the 11 lens is R22, the axial thickness of the 11 lens is d21, and the total optical length of the microscope objective lens is TTL, satisfying the following relationship. 0.07≦f11 / f≦0.24 0.17≦(R21+R22) / (R21-R22)≦1.12 0.03≦d21 / TTL≦0.10

14. an exit surface of the 12th lens is a concave surface at a paraxial position, and an object side surface of the 12th lens is a convex surface at a paraxial position; The microscope objective lens of claim 1, characterized in that the focal length of the 12 lens is f12, the central radius of curvature of the exit side of the 12 lens is R23, and the central radius of curvature of the object side of the 12 lens is R24, satisfying the following relationship: 0.16≦f12 / f≦0.63 0.59≦(R23+R24) / (R23-R24)≦3.06 0.01≦d23 / TTL≦0.05

15. 2. The microscope objective lens of claim 1, wherein the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens, the seventh lens, the eighth lens, the ninth lens, the tenth lens, the eleventh lens, and the twelfth lens are all made of glass.

Images