Electrostatic motor and manufacturing method for the same

Abstract

To improve an insulation withstand voltage of rotor electrodes 50A, 50B.SOLUTION: In an electrostatic motor 2, multiple rotor electrodes 50A, 50B are configured to be displaceable relative to multiple stator electrodes 60A, 60B by electrostatic force. The rotor electrodes 50A, 50B are formed in the form of a thin film made of metal material to form a surface that is exposed on the outside and include a plating layer 59 that generates an electrostatic force between the stator electrodes 60A, 60B. Therefore, the rotor electrodes 50A, 50B are composed of the plating layer 59. As a result, the surface roughness of the rotor electrodes 50A, 50B is reduced.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to electrostatic motors and methods of manufacturing electrostatic motors. [Background technology]

[0002] Conventionally, an electrostatic motor has been proposed which includes a mover electrode and a stator electrode, and is configured so that the rotor electrode can rotate relative to the stator electrode by electrostatic force between the mover electrode and the stator electrode (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2007-336735 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present inventors have investigated ways of improving the dielectric strength of the mover electrodes and stator electrodes of the electrostatic motor.

[0005] In view of the above, an object of the present disclosure is to provide an electrostatic motor having improved dielectric strength, and a method for manufacturing the electrostatic motor. [Means for solving the problem]

[0006] According to one aspect of the present disclosure, a movable electrode (50A, 50B) and a stator electrode (60A, 60B) arranged at a distance from the mover electrode; 1. An electrostatic motor configured such that a mover electrode can be displaced relative to a stator electrode by an electrostatic force between the mover electrode and the stator electrode, Either the mover electrode or the stator electrode is The rotor is provided with a plating layer (59, 69) which is made of a metal material and has a surface exposed to the outside, and which generates an electrostatic force between the other electrode other than one of the mover electrode and the stator electrode.

[0007] Therefore, the surface of the one electrode is formed of a plating layer. The plating layer has a smaller surface roughness than a metal part formed by machining. Therefore, the surface roughness of the one electrode is smaller than the surface roughness of the metal part formed by machining, and therefore the dielectric strength of the one electrode can be improved. Therefore, it is possible to provide an electrostatic motor with improved dielectric strength.

[0008] According to two aspects of the present disclosure, there is provided a method for manufacturing an electrostatic motor, comprising the steps of: A mover electrode (50A, 50B), a stator electrode (60A, 60B) arranged at a distance from the mover electrode; A method of manufacturing an electrostatic motor configured such that the mover electrodes are displaceable relative to the stator electrodes by electrostatic forces between the mover electrodes and the stator electrodes, When one of the mover electrode and the stator electrode is defined as one electrode, and the other electrode of the mover electrode and the stator electrode is defined as the other electrode, Providing a substrate (62, 72); and forming one of the electrodes by plating a plating layer (59, 69) that is formed from a metal material in a film shape that covers the periphery of the base material, forms a surface that is exposed to the outside, and generates an electrostatic force between the one of the electrodes and the other electrode.

[0009] Therefore, it is possible to provide a manufacturing method for an electrostatic motor that improves the withstand voltage.

[0010] According to three aspects of the present disclosure, there is provided a method for manufacturing an electrostatic motor, comprising the steps of: A mover electrode (50A, 50B), a stator electrode (60A, 60B) arranged at a distance from the mover electrode; A method of manufacturing an electrostatic motor configured such that the mover electrodes are displaceable relative to the stator electrodes by electrostatic forces between the mover electrodes and the stator electrodes, When one of the mover electrode and the stator electrode is defined as one electrode, and the other electrode of the mover electrode and the stator electrode is defined as the other electrode, Providing a substrate (62, 72); providing a plating layer (59, 69) by plating, the plating layer (59, 69) being formed in a film shape that covers the periphery of the base material and forms a surface that is exposed to the outside, and generating an electrostatic force between the other electrode; forming one electrode by removing the base material from inside the plating layer to form the plating layer in a shell shape; An electrostatic motor including:

[0011] Therefore, it is possible to provide a manufacturing method for an electrostatic motor that improves the withstand voltage.

[0012] Note that the reference symbols in parentheses attached to each component indicate an example of the correspondence between the component and specific components described in the embodiments described below. [Brief description of the drawings]

[0013] [Figure 1] 1 is a perspective view showing an entire electrostatic motor according to a first embodiment of the present disclosure; [Diagram 2] FIG. 2 is a schematic perspective view showing the internal configuration of the electrostatic motor in the first embodiment of FIG. 1, and is a diagram for assisting in the description of the rotating shaft, bearings, rotor electrodes, and stator electrodes that constitute the electrostatic motor. [Diagram 3] FIG. 2 is a diagram of a bearing on one axial side of the electrostatic motor in the first embodiment of FIG. 1, as viewed from one axial side, and is for assisting in the description of the structure of the bearing, with rotor electrodes and stator electrodes not shown. [Figure 4]FIG. 2 is a diagram of the bearing on the other axial side of the electrostatic motor in the first embodiment of FIG. 1, as viewed from the other axial side, for assisting in the description of the structure of the bearing with rotor electrodes and stator electrodes omitted. [Diagram 5] 2 is a front view of a pair of rotor electrodes and a pair of stator electrodes in the electrostatic motor according to the first embodiment of FIG. 1, as viewed from the direction of rotation. FIG. [Figure 6] FIG. 6 is an enlarged view of a portion VI in FIG. [Figure 7] FIG. 6 is an enlarged view of part VII in FIG. [Figure 8] 8 is a cross-sectional view of the rotor electrode and the stator electrode cut by a virtual plane perpendicular to the direction of rotation in FIG. 7, and is a diagram to assist in explaining the internal structure of each of the rotor electrode and the stator electrode. FIG. [Figure 9] 4 is a flowchart showing a manufacturing process of the rotor electrodes and the stator electrodes of the electrostatic motor in the first embodiment of FIG. 1. [Figure 10] FIG. 10 is a cross-sectional view of an electrostatic motor according to a second embodiment of the present disclosure, for assisting in the description of the internal structures of the rotor electrodes and the stator electrodes, and corresponds to FIG. 8. [Figure 11] 11 is a flowchart showing a manufacturing process of the rotor electrodes and the stator electrodes of the electrostatic motor according to the second embodiment of FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the following embodiments, the same or equivalent parts are denoted by the same reference numerals in the drawings for the sake of simplicity of description.

[0015] (First embodiment) 1 and 2 show a first embodiment of an electrostatic motor system 1 according to the present disclosure. Fig. 1 is a perspective view showing an entire electrostatic motor 2 in the electrostatic motor system 1 of the present embodiment, and Fig. 1 shows the external appearance of the electrostatic motor 2. Fig. 2 is a schematic diagram showing the internal structure of the electrostatic motor 2 of the present embodiment.

[0016] The electrostatic motor system 1 of this embodiment is applied to various types of mobility such as aircraft, drones, and spacecraft.

[0017] Specifically, as shown in Figures 1 and 2, the electrostatic motor 2 includes a rotating shaft 10, bearings 20A, 20B, a cover portion 40, a housing 30, a plurality of rotor electrodes 50A, a plurality of rotor electrodes 50B, a plurality of stator electrodes 60A, and a plurality of stator electrodes 60B.

[0018] The rotating shaft 10 is formed in an elongated cylindrical shape extending in an axial direction Za centered on an axis B. The rotating shaft 10 is configured to be rotatable in a rotation direction Ka centered on the axis B. The axial direction Za is the direction in which the axis B extends.

[0019] The rotating shaft 10 is disposed in the housing 30. The rotating shaft 10 penetrates the cover portion 40 on one side in the axial direction Za. The housing 30 is formed in a cylindrical shape with the axis B as its center.

[0020] The housing 30 has an opening that is open on one side in the axial direction Za. The lid portion 40 is fitted into the opening of the housing 30. A bottom portion 31 is provided on the other side of the housing 30 in the axial direction Za.

[0021] The housing 30 accommodates the rotating shaft 10, as well as bearings 20A and 20B, a plurality of rotor electrodes 50A, a plurality of rotor electrodes 50B, a plurality of stator electrodes 60A, and a plurality of stator electrodes 60B.

[0022] 2 and 3, the bearing 20A is a ball bearing that supports one side of the rotating shaft 10 in the axial direction Za so as to be rotatable about the axis B. Specifically, the bearing 20A includes an inner ring 21a, an outer ring 22a, and a plurality of balls 23a.

[0023] The inner ring 21a is disposed on one side in the axial direction Za of the rotating shaft 10. The inner ring 21a is formed in a ring shape centered on the axis B. The inner ring 21a is disposed on the outer side in the radial direction Zb with respect to the rotating shaft 10. The radial direction Zb is a radial direction centered on the axis B.

[0024] The inner ring 21a is fixed to the outer circumferential surface of the rotating shaft 10. The outer ring 22a is formed in a ring shape centered on the axis B. The outer ring 22a is disposed radially outwardly of the inner ring 21a in the radial direction Zb. The outer ring 22a is supported by the lid portion 40.

[0025] The plurality of balls 23a are disposed between the inner ring 21a and the outer ring 22a. The plurality of balls 23a are arranged in a circumferential direction about the axis B while being in contact with the inner ring 21a and the outer ring 22a. In this embodiment, the inner ring 21a, the outer ring 22a, and the plurality of balls 23a are each made of a conductive metal material.

[0026] In this embodiment, the balls 23a electrically connect the inner ring 21a and the outer ring 22a. Therefore, the bearing 20A serves to electrically connect the rotor electrodes 50A and the positive electrode of the DC power supply 300, as described below.

[0027] 2 and 4, the bearing 20B is a ball bearing that rotatably supports the other side in the axial direction Za of the rotating shaft 10. Specifically, it includes an inner ring 21b, an outer ring 22b, and a plurality of balls 23b.

[0028] The inner ring 21b is disposed on the other side of the rotating shaft 10 in the axial direction Za. The inner ring 21b is formed in a ring shape centered on the axis B. The inner ring 21b is disposed on the outer side in the radial direction Zb with respect to the rotating shaft 10. The inner ring 21b is fixed to the outer circumferential surface of the rotating shaft 10.

[0029] The outer ring 22b is formed in a ring shape centered on the axis B. The outer ring 22b is disposed radially outwardly of the inner ring 21b in the radial direction Zb. The outer ring 22b is supported by the bottom portion 31.

[0030] The plurality of balls 23b are disposed between the inner ring 21b and the outer ring 22b. The plurality of balls 23b are arranged in a circumferential direction about the axis B in a state in contact with the inner ring 21b and the outer ring 22b. In this embodiment, the inner ring 21b, the outer ring 22b, and the plurality of balls 23b are each made of a conductive metal material.

[0031] In this embodiment, the balls 23b electrically connect the inner ring 21b and the outer ring 22b. Therefore, the bearing 20B serves to electrically connect the rotor electrodes 50B and the negative electrode of the DC power supply 300, as described below.

[0032] The multiple rotor electrodes 50A and the multiple rotor electrodes 50B are arranged alternately in the circumferential direction centered on the axis B. The multiple rotor electrodes 50A and the multiple rotor electrodes 50B are each disposed on the outside of the rotating shaft 10 in the radial direction Zb centered on the axis B.

[0033] Hereinafter, for convenience of explanation, the plurality of rotor electrodes 50A and the plurality of rotor electrodes 50B will also be collectively referred to as the plurality of rotor electrodes 50A, 50B.

[0034] Each of the rotor electrodes 50A, 50B is a mover electrode formed in a comb-teeth shape.

[0035] Each of the tooth portions 61 is a first tooth portion formed to extend in a radial direction Zb centered on the axis B. Each of the tooth portions 61 is arranged at intervals in the axial direction Za. Each of the tooth portions 61 is formed in a thin and long cylindrical shape. A tip portion 161 on the outer side in the radial direction Zb of each of the tooth portions 61 is formed in a hemispherical shape that is convex outward in the radial direction Zb.

[0036] The support portion 62 is a first support portion that is arranged on the outer side in the radial direction Zb centered on the axis B with respect to the rotating shaft 10. The support portion 62 is arranged on the inner side in the radial direction Zb centered on the axis B with respect to the multiple tooth portions 61. The support portion 62 is formed to extend in the axial direction Za. The support portion 62 is connected to the inner side in the radial direction Zb centered on the axis B among the multiple tooth portions 61.

[0037] Specifically, the support portion 62 includes a middle support portion 62a, a one-side support portion 62b, and an other-side support portion 62c. The middle support portion 62a supports the plurality of teeth portions 61 that are on the center side in the axial direction Za among the plurality of teeth portions 61.

[0038] The one-side support portion 62b is disposed on one side in the axial direction Za with respect to the intermediate support portion 62a. The one-side support portion 62b is disposed outward in the radial direction Zb centered on the axis B with respect to the intermediate support portion 62a. The one-side support portion 62b is connected to one side of the intermediate support portion 62a in the axial direction Za. The one-side support portion 62b supports three tooth portions 61 on one side in the axial direction Za among the multiple tooth portions 61.

[0039] The other-side support portion 62c is disposed on the other side in the axial direction Za with respect to the intermediate support portion 62a. The other-side support portion 62c is disposed on the outside in the radial direction Zb centered on the axis B with respect to the intermediate support portion 62a. The other-side support portion 62c is connected to the other side in the axial direction Za of the intermediate support portion 62a. The other-side support portion 62c supports three tooth portions 61 on the other side in the axial direction Za of the multiple tooth portions 61.

[0040] Mounting portions 63, 64 are provided on the support portion 62 on the inner side in the radial direction Zb centered on the axis B. The mounting portions 63, 64 are arranged at intervals in the axial direction Za.

[0041] The mounting portion 63 is connected to one side of the intermediate support portion 62a in the axial direction Za. The mounting portion 64 is connected to the other side of the intermediate support portion 62a in the axial direction Za. The mounting portions 63 and 64 are formed so as to protrude inward in the radial direction Zb from the support portion 62.

[0042] The mounting portions 63, 64 are provided with through holes 65, 66 that penetrate in the circumferential direction centered on the axis B. The mounting portions 63, 64 are used to mount the rotor electrodes 50A, 50B to the rotating shaft 10.

[0043] In this embodiment, the teeth 61, the support 62, and the mounting portions 63 and 64 form an integrated component. That is, the rotor electrodes 50A and 50B each form a single integrated part.

[0044] The rotor electrodes 50A are each connected to the inner ring 21a of the bearing 20A, so that the outer ring 22a is electrically connected to the rotor electrodes 50A through the balls 23a and the inner ring 21a.

[0045] The rotor electrodes 50B are each connected to the inner ring 21b of the bearing 20B, so that the outer ring 22b is electrically connected to the rotor electrodes 50B through the balls 23b and the inner ring 21b.

[0046] For ease of explanation, the multiple stator electrodes 60A and the multiple stator electrodes 60B will be hereinafter collectively referred to as multiple stator electrodes 60A, 60B. The multiple stator electrodes 60A, 60B are arranged on the outside in the radial direction Zb centered on the axis B with a gap between them and the rotor electrodes 50A, 50B. The multiple stator electrodes 60A, 60B are arranged on the outside in the radial direction Zb centered on the axis B with respect to the respective support portions 62 of the rotor electrodes 50A, 50B.

[0047] The multiple stator electrodes 60A, 60B are each arranged radially outwardly of the rotating shaft 10, centered on the axis B. The multiple stator electrodes 60A, 60B are alternately arranged one by one in the circumferential direction centered on the axis B.

[0048] Each of the stator electrodes 60A, 60B includes a plurality of teeth 71 and a support portion 72. Each of the teeth 71 is a second tooth formed so as to extend in a radial direction Zb centered on the axis B.

[0049] The tooth portions 71 are arranged at intervals in the axial direction Za. Each of the tooth portions 71 is formed in a thin and long cylindrical shape. As shown in Fig. 7, a tip portion 171 is provided as a second tip portion at an inner end portion in the radial direction Zb of each of the tooth portions 71. The tip portion 171 is formed in a hemispherical shape that is convex inward in the radial direction Zb.

[0050] The support portion 72 is a second support portion that is disposed on the outer side in the radial direction Zb centered on the axis B with respect to the rotating shaft 10. The support portion 72 is disposed on the outer side in the radial direction Zb with respect to the respective support portions 62 of the multiple rotor electrodes 50A, 50B.

[0051] The support portion 72 is disposed on the outer side in the radial direction Zb centered on the axis B with respect to the plurality of tooth portions 71. The support portion 72 is formed to extend in the axial direction Za. The support portion 72 is connected to the outer side in the radial direction Zb centered on the axis B among the plurality of tooth portions 71.

[0052] Mounting portions 73, 74 are provided on the outer side of the support portion 72 in the radial direction Zb centered on the axis B. The mounting portions 73, 74 are arranged at an interval in the axial direction Za.

[0053] The mounting portion 73 is connected to one side in the axial direction Za of the support portion 72. The mounting portion 74 is connected to the other side in the axial direction Za of the support portion 72. The mounting portions 73 and 74 are formed so as to protrude outward in the radial direction Zb from the support portion 72.

[0054] The mounting portions 73, 74 are provided with through holes 75, 76 which penetrate in the circumferential direction about the axis B.

[0055] In this embodiment, the teeth 71, the support 72, and the mounting portions 73 and 64 form an integrated structure. That is, the stator electrodes 60A and 60B each form an integrated part. Furthermore, the stator electrodes 60A and 60B are supported by the housing 30.

[0056] The cover 40 is disposed on one side in the axial direction Za with respect to the rotor electrodes 50A, 50B and the stator electrodes 60A, 60B. The bottom 31 of the housing 30 is disposed on the other side in the axial direction Za with respect to the rotor electrodes 50A, 50B and the stator electrodes 60A, 60B.

[0057] Next, the electrical configuration of the electrostatic motor system 1 of this embodiment will be described with reference to Fig. 2. Fig. 2 shows a specific example of an electrostatic motor 2 including two rotor electrodes 50A, two stator electrodes 60A, two rotor electrodes 50B, and two stator electrodes 60B.

[0058] The electrostatic motor system 1 of this embodiment includes a drive circuit 200 for driving the electrostatic motor 2, and a control circuit 250. The drive circuit 200 includes transistors 210a, 210b, 210c, and 210d.

[0059] The transistors 210a and 210b are connected in series between the positive bus bar 200a and the negative bus bar 200b. The transistors 210c and 210d are connected in series between the positive bus bar 200a and the negative bus bar 200b.

[0060] As the transistors 210a, 210b, 210c, and 210d, for example, n-channel field effect transistors are used.

[0061] The positive busbar 200a is connected to a positive electrode of the DC power supply 300. The negative busbar 200b is connected to a negative electrode of the DC power supply 300. The positive electrode of the DC power supply 300 is connected to the outer ring 22a of the bearing 20A.

[0062] The support portions 62 of the rotor electrodes 50A are connected to the inner ring 21a of the bearing 20A, so that the rotor electrodes 50A are connected to the positive electrode of the DC power supply 300 through the bearing 20A.

[0063] The negative electrode of the DC power supply 300 is connected to the outer ring 22a of the bearing 20B. The support parts 62 of each of the rotor electrodes 50B are connected to the inner ring 21b of the bearing 20B. As a result, the rotor electrodes 50B are connected to the negative electrode of the DC power supply 300 through the bearing 20B.

[0064] For convenience of the following description, the common connection terminal to which the transistors 210a and 210b are commonly connected is referred to as the common connection terminal 220, and the common connection terminal to which the transistors 210c and 210d are commonly connected is referred to as the common connection terminal 221. The common connection terminal 220 is electrically connected to each of the multiple stator electrodes 60A. The common connection terminal 221 is electrically connected to each of the multiple stator electrodes 60B.

[0065] The control circuit 250 is composed of a microcomputer or the like, and turns on and off the transistors 210a, 210b, 210c, and 210d, respectively.

[0066] Next, a specific operation of the electrostatic motor system 1 of this embodiment will be described.

[0067] First, the teeth 71 of the stator electrodes 60A are each meshed with the teeth 61 of a corresponding one of the rotor electrodes 50A at intervals. The teeth 71 of the stator electrodes 60B are each meshed with the teeth 61 of a corresponding one of the rotor electrodes 50B at intervals.

[0068] As described above, the rotor electrodes 50A are electrically connected to the positive electrode of the DC power supply 300 through the bearing 20A. As described above, the rotor electrodes 50B are electrically connected to the negative electrode of the DC power supply 300 through the bearing 20B.

[0069] At this time, due to the voltage between the positive and negative electrodes of the DC power supply 300, a positive charge is generated on the surface of each of the plurality of rotor electrodes 50A, and a negative charge is generated on the surface of each of the plurality of rotor electrodes 50B.

[0070] Next, the control circuit 250 turns on the transistors 210a and 210d of the drive circuit 200 and turns off the transistors 210b and 210c. As a result, a current flows from the positive electrode of the DC power supply 300 to the multiple stator electrodes 60A through the transistor 210a and the common connection terminal 220. A current flows from the multiple stator electrodes 60B to the negative electrode of the DC power supply 300 through the common connection terminal 221 and the transistor 210d.

[0071] Therefore, due to the voltage between the positive and negative electrodes of the DC power supply 300, a positive charge is generated on the surface of each of the multiple stator electrodes 60A, and a negative charge is generated on the surface of each of the multiple stator electrodes 60B.

[0072] A reaction force due to static electricity is generated between the plurality of stator electrodes 60A and the plurality of rotor electrodes 50A. A reaction force due to static electricity is generated between the plurality of stator electrodes 60B and the plurality of rotor electrodes 50B.

[0073] As a result, a torque is generated between the multiple rotor electrodes 50A, 50B and the multiple stator electrodes 60A, 60B, centering on the axis B. Therefore, the multiple rotor electrodes 50A, 50B, together with the rotating shaft 10, generate a torque in the rotation direction Ka relative to the multiple stator electrodes 60A, 60B.

[0074] Accordingly, each of the rotor electrodes 50A approaches a corresponding one of the stator electrodes 60B. Each of the rotor electrodes 50B approaches a corresponding one of the stator electrodes 60A.

[0075] At this time, an attractive force due to static electricity is generated between the plurality of rotor electrodes 50A and the plurality of stator electrodes 60B. An attractive force due to static electricity is generated between the plurality of rotor electrodes 50B and the plurality of stator electrodes 60A.

[0076] Therefore, the teeth 71 of the stator electrodes 60A are each meshed with the teeth 61 of a corresponding one of the rotor electrodes 50B at intervals. Furthermore, the teeth 71 of the stator electrodes 60B are each meshed with the teeth 61 of a corresponding one of the rotor electrodes 50A at intervals.

[0077] Next, the control circuit 250 turns off the transistors 210a and 210d of the drive circuit 200 and turns on the transistors 210b and 210c. As a result, a current flows from the positive electrode of the DC power supply 300 to the multiple stator electrodes 60B through the transistor 210c and the common connection terminal 221. A current flows from the multiple stator electrodes 60A to the negative electrode of the DC power supply 300 through the common connection terminal 220 and the transistor 210b.

[0078] As a result, a negative charge is generated on the surface of each of the multiple stator electrodes 60A, and a positive charge is generated on the surface of each of the multiple stator electrodes 60B. A reaction force due to static electricity is generated between the multiple stator electrodes 60A and the multiple rotor electrodes 50B. A reaction force due to static electricity is generated between the multiple stator electrodes 60B and the multiple rotor electrodes 50A.

[0079] Therefore, a rotational force is generated between the multiple rotor electrodes 50A, 50B and the multiple stator electrodes 60A, 60B about the axis B. Therefore, the multiple rotor electrodes 50A, 50B, together with the rotating shaft 10, generate a rotational force against the multiple stator electrodes 60A, 60B.

[0080] Accordingly, each of the rotor electrodes 50A approaches a corresponding one of the stator electrodes 60A, and each of the rotor electrodes 50B approaches a corresponding one of the stator electrodes 60B.

[0081] An attractive force due to electrostatic electricity is generated between the plurality of stator electrodes 60A and the plurality of rotor electrodes 50A. An attractive force due to electrostatic electricity is generated between the plurality of stator electrodes 60B and the plurality of rotor electrodes 50B.

[0082] Therefore, the teeth 71 of the stator electrodes 60A are each spaced apart and meshed with the teeth 61 of a corresponding one of the rotor electrodes 50A. Furthermore, the teeth 71 of the stator electrodes 60B are each spaced apart and meshed with the teeth 61 of a corresponding one of the rotor electrodes 50B.

[0083] Next, the control circuit 250 turns on the transistors 210a and 210d of the drive circuit 200 and turns off the transistors 210b and 210c. As a result, a current flows from the positive electrode of the DC power supply 300 to the multiple stator electrodes 60A through the transistor 210a and the common connection terminal 220. A current flows from the multiple stator electrodes 60B to the negative electrode of the DC power supply 300 through the common connection terminal 221 and the transistor 210d.

[0084] Therefore, similarly to the above, a reaction force due to static electricity is generated between the multiple stator electrodes 60A and the multiple rotor electrodes 50A. A reaction force due to static electricity is generated between the multiple stator electrodes 60B and the multiple rotor electrodes 50B.

[0085] Therefore, a rotational force is generated between the multiple rotor electrodes 50A, 50B and the multiple stator electrodes 60A, 60B about the axis B. Therefore, the multiple rotor electrodes 50A, 50B, together with the rotating shaft 10, generate a rotational force against the multiple stator electrodes 60A, 60B.

[0086] Thereafter, the control circuit 250 alternates between a state in which the transistors 210a and 210d are turned on and the transistors 210b and 210c are turned off, and a state in which the transistors 210a and 210d are turned off and the transistors 210b and 210c are turned on.

[0087] Therefore, a torque is generated around the axis B by the electrostatic force of the rotor electrodes 50A, 50B relative to the stator electrodes 60A, 60B. Therefore, the rotor electrodes 50A, 50B, together with the rotating shaft 10, generate a torque relative to the stator electrodes 60A, 60B.

[0088] Next, the structures of the plurality of stator electrodes 60A, 60B and the plurality of rotor electrodes 50A, 50B of this embodiment will be described with reference to FIG.

[0089] As shown in Fig. 8, each of the stator electrodes 60A, 60B includes a base material 68 and a plating layer 69. The base material 68 is formed in a comb-like shape. The base material 68 is made of a light alloy including aluminum or the like. Alternatively, the base material 68 is made of a resin material.

[0090] The plating layer 69 is formed as a thin film that covers the entire surface of the base material 68. The plating layer 69 forms a surface that is exposed to the outside. Therefore, the surface of the plating layer 69 is exposed to a vacuum.

[0091] In this embodiment, when the plating layer 69 is placed in a vacuum, the plating layer 69 is formed from a metal material (for example, chromium or stainless steel) that has a high dielectric strength.

[0092] Similar to the stator electrodes 60A, 60B, the rotor electrodes 50A, 50B each include a base material 58 and a plating layer 59. The base material 58 is formed in a comb-like shape. The base material 58 is made of a light alloy containing aluminum or the like. Alternatively, the base material 58 is made of a resin material. The plating layer 59 is formed in a thin film shape that covers the entire surface of the base material 58.

[0093] The plating layer 59 forms a surface exposed to the outside. That is, the surface of the plating layer 59 is exposed to a vacuum. In this embodiment, when the plating layer 59 is placed in a vacuum, the plating layer 59 is formed of a metal material (e.g., chromium or stainless steel) having a high dielectric strength.

[0094] Next, a method for manufacturing the rotor electrodes 50A, 50B of this embodiment will be described with reference to FIG.

[0095] First, in step S100, base material 58 is prepared by molding base material 58 by injection molding using a light alloy or a resin material. In the next step S110, plating layer 59 is formed on the surface of base material 58 by a method such as electroplating. This completes the manufacture of rotor electrodes 50A and 50B.

[0096] Next, a method for manufacturing the plurality of stator electrodes 60A, 60B of this embodiment will be described with reference to FIG.

[0097] First, in step S100, the substrate 68 is prepared by molding the substrate 68 by injection molding using a light alloy or a resin material. In the next step S110, a plating layer 69 is formed on the surface of the substrate 68 by a method such as electroplating. This completes the manufacture of the stator electrodes 60A, 60B.

[0098] According to the present embodiment described above, the electrostatic motor 2 includes a plurality of rotor electrodes 50A, 50B, and a plurality of stator electrodes 60A, 60B that are arranged at intervals relative to the plurality of rotor electrodes 50A, 50B.

[0099] The rotor electrodes 50A, 50B are configured to be displaceable in the rotational direction Ka relative to the stator electrodes 60A, 60B by electrostatic forces between the rotor electrodes 50A, 50B and the stator electrodes 60A, 60B.

[0100] The rotor electrodes 50A, 50B are provided with a plating layer 59 which is formed as a thin film made of a metallic material and forms a surface exposed to the outside, generating an electrostatic force between the rotor electrodes 50A, 50B and the stator electrodes 60A, 60B.

[0101] Therefore, the surfaces of rotor electrodes 50A, 50B are formed by plating layer 59. Plated layer 59 has a smaller surface roughness than metal parts formed by machining. Therefore, rotor electrodes 50A, 50B have a smaller surface roughness than rotor electrodes formed by machining. This makes it possible to improve the dielectric strength of rotor electrodes 50A, 50B.

[0102] Furthermore, the stator electrodes 60A, 60B are provided with a plating layer 69 which is formed in the form of a thin film made of a metallic material and forms a surface exposed to the outside, generating an electrostatic force between the stator electrodes 60A, 60B and the rotor electrodes 50A, 50B.

[0103] Therefore, the surfaces of the stator electrodes 60A, 60B are formed by the plating layer 69. The plating layer 69 has a smaller surface roughness than a metal part formed by machining. Therefore, the stator electrodes 60A, 60B have a smaller surface roughness than a stator electrode formed by machining. This makes it possible to improve the dielectric strength of the stator electrodes 60A, 60B.

[0104] The manufacturing method of the electrostatic motor 2 of this embodiment includes a step S100 of preparing a base material 58. The manufacturing method of the electrostatic motor 2 includes a step S110 of forming rotor electrodes 50A, 50B by forming a plating layer 59 made of a metal material in a film shape that covers the periphery of the base material 58 and generates an electrostatic force between the rotor electrodes 50A, 50B and the stator electrodes 60A, 60B.

[0105] This makes it possible to provide a manufacturing method for the electrostatic motor 2 that improves the withstand voltage.

[0106] Furthermore, the manufacturing method of the electrostatic motor 2 of this embodiment includes a process of step S100 of preparing a base material 68. The manufacturing method of the electrostatic motor 2 includes a process of step S110 of forming the stator electrodes 60A, 60B by forming a plating layer 69 made of a metal material in a film shape that covers the periphery of the base material 68 and generates an electrostatic force between the rotor electrodes 50A, 50B.

[0107] This makes it possible to provide a manufacturing method suitable for the electrostatic motor 2 with improved dielectric strength.

[0108] In this embodiment configured as above, the following advantageous effects (a), (b), (c), (d), (e), (f), (g), (h), and (i) can be obtained.

[0109] (a) Each of the rotor electrodes 50A, 50B includes a base material 58, and the plating layer 59 is formed so as to cover the periphery of the base material 58. Therefore, by using the base material 58, the mechanical strength of the rotor electrodes 50A, 50B can be increased.

[0110] (b) Each of the multiple stator electrodes 60A, 60B includes a base material 68, and the plating layer 69 is formed so as to cover the periphery of the base material 68. Therefore, by using the base material 68, the mechanical strength of the multiple stator electrodes 60A, 60B can be increased.

[0111] (c) The metal material constituting the plating layers 59, 69 is chromium. Therefore, when the plating layers 59, 69 are exposed to a vacuum, the dielectric strength of the rotor electrodes 50A, 50B and the stator electrodes 60A, 60B can be improved.

[0112] (d) When the base materials 58, 68 are made of a light alloy, the mechanical strength of the rotor electrodes 50A, 50B and the stator electrodes 60A, 60B can be increased while reducing their weight.

[0113] (e) When the base materials 58, 68 are made of a resin material, the weight of the rotor electrodes 50A, 50B and the weight of the stator electrodes 60A, 60B can be reduced.

[0114] (f) The rotor electrodes 50A, 50B are configured to be displaceable by electrostatic force in a rotational direction Ka about the axis B relative to the stator electrodes 60A, 60B. The rotor electrodes 50A, 50B are formed to extend in a radial direction Zb about the axis B and include a plurality of teeth 61 arranged in the axial direction Za.

[0115] The rotor electrodes 50A, 50B include a support portion 62 that is disposed on the inside of the teeth 61 in the radial direction Zb and is connected to the teeth 61. The teeth 61 and the support portion 62 form an integrated component. This makes it possible to reduce the number of parts that constitute the rotor electrodes 50A, 50B.

[0116] For the multiple rotor electrodes 50A, 50B, the positions of the teeth 61 are automatically determined by determining the positions of the support portions 62. Therefore, when adjusting the gap between the rotor electrodes 50A, 50B and the stator electrodes 60A, 60B, by determining the positions of the support portions 62, adjustment of the positions of the teeth 61 is not required.

[0117] (g) In the rotor electrodes 50A, 50B, the radially outer end of each of the teeth 61 is provided with a tip 161 as a first tip formed in a hemispherical shape that is convex outward in the radial direction. This makes it possible to suppress a decrease in the dielectric strength at the tips of the teeth 61 due to electric field concentration.

[0118] (h) Each of the multiple stator electrodes 60A, 60B is disposed radially outwardly of the support portion 62 in the radial direction Zb, is formed to extend in the radial direction Zb, and further includes multiple teeth 71 aligned in the axial direction Za.

[0119] Each of the stator electrodes 60A, 60B includes a support portion 72 that is disposed radially outward of the teeth 71 in the radial direction Zb and is connected to the teeth 71. The teeth 71 and the support portion 72 form an integrated component. This allows the number of parts that constitute the stator electrodes 60A, 60B to be reduced.

[0120] For the multiple stator electrodes 60A, 60B, the positions of the teeth 71 are automatically determined by determining the positions of the support portions 72. Therefore, when adjusting the gap between the rotor electrodes 50A, 50B and the stator electrodes 60A, 60B, by determining the positions of the support portions 72, it is not necessary to adjust the positions of the teeth 71.

[0121] (i) In the multiple stator electrodes 60A, 60B, a tip portion 171 formed in a hemispherical shape that is convex inward in the radial direction Zb is provided at the radially inner end portion of each of the multiple tooth portions 71. Therefore, at the tip portions of the multiple tooth portions 71, a decrease in the dielectric strength voltage due to electric field concentration can be suppressed.

[0122] Second embodiment In the above first embodiment, an example in which the rotor electrodes 50A, 50B are formed by the base material 58 and the plating layer 59 has been described.

[0123] However, instead of this, a second embodiment of the electrostatic motor 2 in which a plurality of rotor electrodes 50A, 50B are formed by a hollow portion 58X instead of the base material 58 and a plating layer 59 will be described with reference to FIG.

[0124] Each of the rotor electrodes 50A, 50B of the electrostatic motor 2 of this embodiment is configured with a hollow portion 58X in place of the base material 58 and a plating layer 59. That is, in the rotor electrodes 50A, 50B of the electrostatic motor 2 of this embodiment, the base material 58 is eliminated, and the hollow portion 58X is provided inside the plating layer 59.

[0125] Each of the multiple stator electrodes 60A, 60B of the electrostatic motor 2 of this embodiment is configured with a hollow portion 68X in place of the base material 68 and a plating layer 69. That is, in the multiple stator electrodes 60A, 60B of the electrostatic motor 2 of this embodiment, the base material 68 is eliminated, and the hollow portion 68X is provided inside the plating layer 69.

[0126] In the electrostatic motor 2 of this embodiment, the configuration other than the plurality of rotor electrodes 50A, 50B and the plurality of stator electrodes 60A, 60B is similar to that of the electrostatic motor 2 of the above-described first embodiment, and therefore a description thereof will be omitted.

[0127] Next, a manufacturing method for the rotor electrodes 50A and 50B of this embodiment will be described with reference to FIG.

[0128] First, in the process of step S100, the base material 58 is prepared. The base material 58 is the same material as the base material 58 in the first embodiment.

[0129] In the next step S110, a plating layer 59 is formed on the surface of the base material 58 by a technique such as electroplating.

[0130] In the next step S110, the base material 58 is removed from inside the plating layer 59. Specifically, a through hole is provided in the plating layer 59, and a molten liquid is poured into the through hole to melt the base material 58 inside the plating layer 59. Thereafter, the melted liquid base material is discharged from the plating layer 59. As a result, a hollow portion 58X is formed inside the plating layer 59. That is, the plating layer 59 is formed in a shell shape that covers the hollow portion 58X.

[0131] In this manner, the manufacture of rotor electrodes 50A, 50B composed of shell-shaped plating layer 59 is completed.

[0132] Next, a method for manufacturing the stator electrodes 60A and 60B of this embodiment will be described with reference to FIG.

[0133] First, in step S100, a substrate 68 is prepared. The substrate 68 is the same material as the substrate 68 in the first embodiment.

[0134] In the next step S110, a plating layer 69 is formed on the surface of the base material 68 by a technique such as electroplating.

[0135] In the next step S110, the base material 68 is removed from inside the plating layer 69. Specifically, a through hole is provided through the plating layer 69, and a molten liquid is poured into the through hole to melt the base material 68 inside the plating layer 69. The molten base material is then discharged from the plating layer 69 in a liquid state. As a result, a hollow portion 68X is formed inside the plating layer 69. That is, the plating layer 69 is formed in a shell shape that covers the hollow portion 68X.

[0136] In this manner, the manufacture of the stator electrodes 60A, 60B composed of the shell-shaped plating layer 69 is completed.

[0137] According to the present embodiment described above, in the plurality of rotor electrodes 50A, 50B of the present embodiment, the hollow portion 58X is provided inside the plating layer 59 in place of the base material 58. This makes it possible to reduce the weight of the plurality of rotor electrodes 50A, 50B.

[0138] In the plurality of stator electrodes 60A, 60B of this embodiment, a hollow portion 68X is provided inside the plating layer 69 in place of the base material 68. This makes it possible to reduce the weight of the plurality of stator electrodes 60A, 60B.

[0139] The manufacturing method of the electrostatic motor 2 of this embodiment includes a step S100 of preparing a base material 58. The manufacturing method of the electrostatic motor 2 includes a step S110 of forming rotor electrodes 50A, 50B by forming a plating layer 59 made of a metal material in a film shape that covers the periphery of the base material 58 and generates an electrostatic force between the rotor electrodes 50A, 50B and the stator electrodes 60A, 60B.

[0140] Furthermore, the manufacturing method of the electrostatic motor 2 includes a step S120 of forming the rotor electrodes 50A, 50B by removing the base material 58 from the inside of the plating layer 59 and forming the plating layer 59 into a shell shape.

[0141] As a result, it is possible to provide a manufacturing method suitable for the electrostatic motor 2 having improved dielectric strength.

[0142] The manufacturing method of the electrostatic motor 2 of this embodiment includes a step S100 of preparing a base material. The manufacturing method of the electrostatic motor 2 includes a step S110 of forming the rotor electrodes 50A, 50B by forming a plating layer 69, which is formed in a film shape of a metal material that covers the periphery of the base material and generates an electrostatic force between the stator electrodes 60A, 60B and the rotor electrodes 50A, 50B.

[0143] Furthermore, the manufacturing method of the electrostatic motor 2 includes a step S120 of forming the stator electrodes 60A, 60B by removing the base material 58 from the inside of the plating layer 59 and forming the plating layer 59 into a shell shape.

[0144] As a result, it is possible to provide a manufacturing method suitable for the electrostatic motor 2 having improved dielectric strength.

[0145] (Other embodiments)

[0146] (1) In the first and second embodiments described above, the rotor electrodes 50A, 50B rotate about the axis B relative to the stator electrodes 60A, 60B.

[0147] However, instead of this, the electrostatic motor 2 may be configured as a linear motor in which the rotor electrodes 50A, 50B are linearly displaced relative to the stator electrodes 60A, 60B.

[0148] (2) In the first and second embodiments described above, the rotor electrodes 50A, 50B are disposed radially inwardly of the stator electrodes 60A, 60B in the radial direction Zb.

[0149] However, instead of this, the rotor electrodes 50A, 50B may be disposed radially outwardly of the stator electrodes 60A, 60B in the radial direction Zb.

[0150] (3) In the first and second embodiments, examples have been described in which ball bearings are provided as the bearings 20A and 20B. However, instead of this, various types of bearings other than ball bearings may be used as the bearings 20A and 20B.

[0151] (4) In the above first and second embodiments, the electrostatic motor 2 is disposed in a vacuum. However, instead of this, the electrostatic motor 2 may be disposed in the atmosphere. That is, the plating layers 69 of the rotor electrodes 50A, 50B and the plating layers 59 of the stator electrodes 60A, 60B may be disposed in the atmosphere. (5) Note that the present disclosure is not limited to the above-described embodiments, and can be appropriately modified within the scope of the claims. The above-described embodiments are not unrelated to each other, and can be appropriately combined, except when the combination is clearly impossible. In the above-described embodiments, it goes without saying that the elements constituting the embodiments are not necessarily essential, except when they are specifically stated to be essential or when they are clearly considered to be essential in principle. In the above-described embodiments, when the numbers, values, amounts, ranges, etc. of the components of the embodiments are mentioned, they are not limited to the specific numbers, except when they are specifically stated to be essential or when they are clearly limited to a specific number in principle. In the above-described embodiments, when the shapes, positional relationships, etc. of the components are mentioned, they are not limited to the shapes, positional relationships, etc., except when they are specifically stated to be essential or when they are clearly limited to a specific shape, positional relationship, etc. in principle. [Explanation of symbols]

[0152] 2. Electrostatic Motor 10 Rotation axis 20A, 20B bearings 50A rotor electrode 50B Rotor electrode 60A Stator Electrode 60B stator electrode

Claims

1. A mover electrode (50A, 50B), a stator electrode (60A, 60B) disposed at a distance from the mover electrode; An electrostatic motor configured such that the mover electrode is displaceable relative to the stator electrode by an electrostatic force between the mover electrode and the stator electrode, Either the mover electrode or the stator electrode is An electrostatic motor comprising a plating layer (59, 69) formed in a film shape made of a metal material, forming a surface exposed to the outside, and generating the electrostatic force between the other electrode other than the one of the mover electrode and the stator electrode.

2. The one electrode comprises a substrate (58, 68); The electrostatic motor according to claim 1 , wherein the plating layer is formed so as to cover the periphery of the base material.

3. The one electrode forms a hollow portion (58X, 68X), 2. The electrostatic motor according to claim 1, wherein the plating layer is formed in a shell shape that covers the hollow portion.

4. 4. The electrostatic motor according to claim 1, wherein the metal material constituting the plating layer is chromium.

5. 3. The electrostatic motor according to claim 2, wherein the substrate is made of a light alloy.

6. The electrostatic motor according to claim 2 , wherein the base material is made of a resin material.

7. The electrostatic force is configured to enable the movable electrode to be displaced relative to the stator electrode in a rotational direction (Ka) around an axis (B), When the direction in which the axis extends is defined as the axial direction (Za), The one electrode is formed so as to extend in a radial direction (Zb) centered on the axis and has a plurality of teeth (61) arranged in the axial direction; a support portion (62) disposed radially inside the plurality of teeth portions and connected to the plurality of teeth portions, 2. The electrostatic motor of claim 1, wherein the plurality of teeth and the support are integrally formed into a single unitary structure.

8. 8. The electrostatic motor according to claim 7, wherein each of the plurality of teeth has a tip portion (161) formed in a hemispherical shape that is convex outward in the radial direction at an outer end portion in the radial direction.

9. When the tooth portion is a first tooth portion and the support portion is a first support portion, The other electrode is A plurality of second teeth (71) are disposed radially outward from the first support portion, are formed to extend in the radial direction, and are further arranged in the axial direction; a second support portion (72) disposed radially outward of the second tooth portions and connected to the second tooth portions, 9. The electrostatic motor of claim 8, wherein the second teeth and the second support are integrally formed into a single unitary structure.

10. 10. The electrostatic motor according to claim 9, wherein when the tip portion is defined as a first tip portion, a second tip portion (171) formed in a hemispherical shape that is convex toward the inside in the radial direction is provided at an inner end portion in the radial direction of each of the second tooth portions.

11. A mover electrode (50A, 50B), a stator electrode (60A, 60B) disposed at a distance from the mover electrode; a method of manufacturing an electrostatic motor configured such that the mover electrode is displaceable relative to the stator electrode by electrostatic forces between the mover electrode and the stator electrode, When one of the mover electrode and the stator electrode is defined as one electrode, and the other of the mover electrode and the stator electrode is defined as the other electrode, Providing a substrate (62, 72); forming the one electrode by providing a plating layer (59, 69) by plating, the plating layer (59, 69) being formed in a film shape covering the periphery of the base material and forming a surface exposed to the outside, and generating the electrostatic force between the one electrode and the other electrode; A method for manufacturing an electrostatic motor comprising the steps of:

12. A mover electrode (50A, 50B), a stator electrode (60A, 60B) disposed at a distance from the mover electrode; a method of manufacturing an electrostatic motor configured such that the mover electrode is displaceable relative to the stator electrode by electrostatic forces between the mover electrode and the stator electrode, When one of the mover electrode and the stator electrode is defined as one electrode, and the other of the mover electrode and the stator electrode is defined as the other electrode, Providing a substrate (62, 72); providing a plating layer (59, 69) by plating, the plating layer (59, 69) being formed in a film shape covering the periphery of the base material and forming a surface exposed to the outside, and generating the electrostatic force between the other electrode; removing the base material from inside the plating layer to form the plating layer in a shell shape, thereby forming the one electrode; A method for manufacturing an electrostatic motor comprising the steps of:

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