Sheets for vapor chambers, vapor chambers and electronic equipment

Abstract

To provide a body sheet for a vapor chamber which enables improvement of heat radiation performance, and to provide a vapor chamber and an electronic device.SOLUTION: A body sheet for a vapor chamber includes: a first body surface; a second body surface located at the opposite side of the first body surface; a plurality of first land parts extending in an elongated form in a plan view; a land connection body 101 connected to the first land parts; wicks respectively provided at the first land parts; a plurality of through holes penetrating through the land connection body; and a plurality of grooves provided on the first body surface side of the land connection body and communicating with the wicks.SELECTED DRAWING: Figure 62

Description

[Technical field]

[0001] The present disclosure relates to a main body sheet for a vapor chamber, a vapor chamber, and an electronic device. [Background technology]

[0002] Electronic devices such as mobile terminals use electronic devices that generate heat. Examples of such electronic devices include central processing units (CPUs), light-emitting diodes (LEDs), and power semiconductors. Examples of mobile terminals include mobile terminals and tablet terminals.

[0003] Such electronic devices are cooled by heat dissipation devices such as heat pipes (see, for example, Patent Document 1). In recent years, there has been a demand for thinner heat dissipation devices in order to make electronic devices thinner. Vapor chambers, which are thinner than heat pipes, have been developed as heat dissipation devices. Vapor chambers cool electronic devices by absorbing heat from the electronic device and diffusing it inside the sealed working fluid.

[0004] More specifically, the working fluid in the vapor chamber receives heat from the electronic device at a portion (evaporation portion) close to the electronic device. The working fluid that receives the heat evaporates to become working vapor. The working vapor diffuses in a direction away from the evaporation portion in a vapor flow path portion formed in the vapor chamber. The diffused working vapor is cooled and condensed to become working fluid. A liquid flow path portion having a capillary structure (wick) is provided in the vapor chamber. The working fluid flows through the liquid flow path portion and is transported toward the evaporation portion. Then, the working fluid transported to the evaporation portion receives heat again in the evaporation portion and evaporates. In this way, the working fluid circulates through the vapor chamber while repeating phase changes, that is, evaporation and condensation, and diffuses and releases the heat of the electronic device. In a vapor chamber configured in this way, improvement of heat dissipation performance is required. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] International Publication No. 2018 / 221369 Summary of the Invention [Problem to be solved by the invention]

[0006] The present disclosure aims to provide a main body sheet for a vapor chamber, a vapor chamber, and an electronic device that can improve heat dissipation performance. [Means for solving the problem]

[0007] [1] This disclosure: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a first main groove located in the first main body surface of the first land portion, the first main groove communicating with the space portion and extending in the first direction; a second land portion around which the space portion is located, the second land portion extending from the first main body surface to the second main body surface and extending in a second direction different from the first direction in a plan view; a second main groove located on the first main body surface of the second land portion, the second main groove communicating with the space portion and extending in the second direction; a land intersection portion where the first land portion and the second land portion intersect, At the land intersection portion, the first main groove and the second main groove communicate with each other, the space includes first space dividing portions located on both sides of the second land portion in the second direction, A second land recess is located on the second main body surface of the second land portion, the second land recess connecting the first space dividing portions located on both sides. It may also be a main body sheet for a vapor chamber.

[0008] [2] This disclosure: the first land portion extends in the first direction beyond the land intersection portion, The second land portion extends in the second direction beyond the land intersection portion. It may be a main body sheet for a vapor chamber as described in [1].

[0009] [3] This disclosure: the land intersection portion extends from the first body surface to the second body surface; It may be a main body sheet for a vapor chamber according to [1] or [2].

[0010] [4] This disclosure: the second land recesses are located on both sides of the land intersection portion in the second direction; It may be a main body sheet for a vapor chamber as described in [3].

[0011] [5] This disclosure: the second land recess extends through the land intersection from a portion located on one side of the land intersection to a portion located on the other side in the second direction. It may be a main body sheet for a vapor chamber according to [1] or [2].

[0012] [6] This disclosure: a second protruding portion extending in the first direction and protruding toward the second main body surface is located on a bottom surface of the second land recess; The main body sheet for a vapor chamber according to any one of [1] to [5] may be used.

[0013] [7] This disclosure: The second protrusion is spaced inwardly from an extension of the second body surface. It may be a main body sheet for a vapor chamber as described in [6].

[0014] [8] This disclosure: the space includes second space dividing portions located on both sides of the first land portion in the first direction, A first land recess is located on the second main body surface of the first land portion, the first land recess connecting the second space dividing portions located on both sides. It may be a main body sheet for a vapor chamber as described in [3] or [4].

[0015] [9] This disclosure: the first land recess is located on both sides of the land intersection in the first direction; It may be a main body sheet for a vapor chamber as described in [8].

[0016]

[10] This disclosure relates to: the space includes second space dividing portions located on both sides of the first land portion in the first direction, a first land recess is located on the second main body surface of the first land portion, the first land recess connecting the second space dividing portions located on both sides; the first land recess extends through the land intersection from a portion located on one side of the land intersection to a portion located on the other side in the first direction; The main body sheet for a vapor chamber according to any one of [1], [2], [5] and [6] may be used.

[0017]

[11] This disclosure relates to: a first protruding portion extending in the second direction and protruding toward the second main body surface is located on a bottom surface of the first land recess; The main body sheet for a vapor chamber according to any one of [8] to

[10] may be used.

[0018]

[12] This disclosure relates to: The first protrusion is spaced inwardly from an extension of the second body surface. It may be a main body sheet for a vapor chamber as described in

[11] .

[0019]

[13] This disclosure relates to: a third land portion around which the space portion is located, the third land portion being located from the first main body surface to the second main body surface and extending in a third direction different from each of the first direction and the second direction in a plan view; a third main groove located in the first main body surface of the third land portion, the third main groove communicating with the space portion and extending in the third direction, the first land portion, the second land portion, and the third land portion intersect at the land intersection portion, At the land intersection portion, the first main groove, the second main groove, and the third main groove communicate with each other, the space portion includes third space dividing portions located on both sides of the third land portion in the third direction, a third land recess that connects the third space dividing portions located on both sides is located on the second main body surface of the third land portion; It may be a main body sheet for a vapor chamber as described in [1].

[0020]

[14] This disclosure relates to: In the main body sheet for a vapor chamber according to the first solving means described above, the space includes second space dividing portions located on both sides of the first land portion in the first direction, A first land recess is located on the second main body surface of the first land portion, the first land recess connecting the second space dividing portions located on both sides. It may be a main body sheet for a vapor chamber as described in

[13] .

[0021]

[15] This disclosure relates to: the first land portion, the second land portion, and the third land portion terminate at the land intersection portion; It may be a main body sheet for a vapor chamber as described in

[13] or

[14] .

[0022]

[16] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a first main groove located in the first main body surface of the first land portion, the first main groove communicating with the space portion and extending in the first direction; a plurality of second land portions around which the space portion is located, the plurality of second land portions extending from the first main body surface to the second main body surface and extending in a second direction different from the first direction in a plan view; a second main groove located in the first main body surface of the second land portion, the second main groove communicating with the space portion and extending in the second direction; a plurality of land intersections at which the first land portions and the second land portions intersect, each of the first land portions is aligned in the second direction and extends in the first direction beyond the corresponding land intersection portion; each of the second land portions is aligned in the first direction and extends in the second direction beyond the corresponding land intersection portion; In each of the land intersections, the first main groove located in the corresponding first land portion and the second main groove located in the corresponding second land portion are in communication with each other. It may also be a main body sheet for a vapor chamber.

[0023]

[17] This disclosure relates to: The second direction is perpendicular to the first direction. It may be a main body sheet for a vapor chamber as described in

[16] .

[0024]

[18] This disclosure relates to: The present invention may be a main body sheet for a vapor chamber as described in

[16] or

[17] , wherein a plurality of the land intersection portions are located in an evaporation region where the liquid of the working fluid evaporates.

[0025]

[19] This disclosure relates to: The present invention may be a main body sheet for a vapor chamber according to any one of

[16] to

[18] , wherein a plurality of the land intersections are located in a condensation region where the vapor of the working fluid is condensed.

[0026]

[20] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a plurality of first main grooves located in the first main body surface of the first land portion, the first main grooves communicating with the space portion and extending in the first direction; a second land portion around which the space portion is located, the second land portion extending from the first body surface to the second body surface and extending in a second direction different from the first direction in a plan view; a plurality of second main grooves located on the first body surface of the second land portion, the plurality of second main grooves communicating with the space portion and extending in the second direction; a land intersection portion where the first land portion and the second land portion intersect, the first land portion extends in the first direction beyond the land intersection portion, The second land portion extends in the second direction beyond the land intersection portion, a groove connection portion is located at the land intersection portion, the groove connection portion being connected to each of the first mainstream grooves on both sides in the first direction and connected to each of the second mainstream grooves on both sides in the second direction; It may also be a main body sheet for a vapor chamber.

[0027]

[21] This disclosure relates to: the groove connection portion includes a plurality of first intersection grooves extending on an extension of the corresponding first main grooves and a plurality of second intersection grooves extending on an extension of the corresponding second main grooves, Each of the first intersection grooves and each of the second intersection grooves intersect with each other. It may be a main body sheet for a vapor chamber as described in

[20] .

[0028]

[22] This disclosure relates to: the groove connection portion includes an intersection recess located on the first main body surface, the intersection recess being connected to each of the first mainstream grooves and connected to each of the second mainstream grooves; It may be a main body sheet for a vapor chamber as described in

[20] .

[0029]

[23] This disclosure relates to: A plurality of intersection protrusions are arranged on a bottom surface of the intersection recess, the intersection protrusions being aligned in the first direction and the second direction and protruding toward the first main body surface. It may be a main body sheet for a vapor chamber as described in

[22] .

[0030]

[24] This disclosure relates to: The intersection protrusion is spaced inwardly from an extension of the first body surface. It may be a main body sheet for a vapor chamber as described in

[23] .

[0031]

[25] This disclosure relates to: the groove connection portion includes a plurality of first intersection grooves extending in the first direction and a plurality of second intersection grooves extending in the second direction, a width of the first intersection groove is greater than a width of the first main groove, The width of the second intersection groove is greater than the width of the second main groove. It may be a main body sheet for a vapor chamber as described in

[20] .

[0032]

[26] This disclosure relates to: the number of the first intersection grooves is less than the number of the first main grooves located in the first land portion, the number of the second intersection grooves is less than the number of the second main grooves located in the second land portion; It may be a main body sheet for a vapor chamber as described in

[25] .

[0033]

[27] This disclosure relates to: the groove connection portion includes a first division groove located on one side in the first direction, a second division groove located on the other side in the first direction and located on an extension of the first division groove, a third division groove located on one side in the second direction, and a fourth division groove located on the other side in the second direction and located on an extension of the third division groove, The first division groove and the third division groove are connected at a groove intersection portion, The second divided groove is not connected to the groove intersection portion. It may be a main body sheet for a vapor chamber as described in

[20] .

[0034]

[28] This disclosure relates to: The fourth divided groove is not connected to the groove intersection portion. It may be a main body sheet for a vapor chamber as described in

[27] .

[0035]

[29] This disclosure relates to: A plurality of edge side connecting grooves and a plurality of intermediate connecting grooves are located on the first main body surface of the first land portion, the edge side connecting groove connects the space portion and the first main groove adjacent to the space portion, the edge side connecting groove extends in the second direction and is aligned in the first direction, the intermediate connecting groove connects two adjacent first main grooves, The intermediate grooves extend in the second direction and are aligned in the first direction, The interval between the two adjacent edge side connecting grooves is smaller than the interval between the two adjacent intermediate connecting grooves. It may be a main body sheet for a vapor chamber as described in

[20] .

[0036]

[30] This disclosure relates to: A plurality of first connecting grooves are located on the first main body surface of the first land portion, The first connecting groove extends in the second direction beyond the first main groove. It may be a main body sheet for a vapor chamber as described in

[20] or

[21] .

[0037]

[31] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a land connection area connected to the first land portion, The land connection area is a plurality of first intersection land portions extending from the first main body surface to the second main body surface and extending in the first direction in a plan view; a plurality of first main grooves located in the first main body surface of the first intersection land portion, the first main grooves communicating with the space portion and extending in the first direction; a plurality of second intersection land portions extending from the first main body surface to the second main body surface and extending in a second direction different from the first direction in a plan view; a plurality of second main grooves located in the first main body surface of the second intersection land portion, the second main grooves communicating with the space portion and extending in the second direction; a plurality of land intersection portions at which each of the first intersection land portions and each of the second intersection land portions intersect, At least one of the first intersection land portions is connected to the first land portion, At each of the land intersections, the first main groove and the second main groove are in communication with each other. It may also be a main body sheet for a vapor chamber.

[0038]

[32] This disclosure relates to: The width of the first intersection land portion is different from the width of the first land portion. It may be a main body sheet for a vapor chamber as described in

[31] .

[0039]

[33] This disclosure relates to: the space includes first space dividing portions located on both sides of the second intersection land portion in the second direction, A second land recess is located on the second main body surface of the second intersection land portion, the second land recess connecting the first space dividing portions located on both sides. It may be a main body sheet for a vapor chamber according to

[31] or

[32] .

[0040]

[34] This disclosure relates to: The main body sheet for a vapor chamber described in

[31] or

[32] may be such that the dimension in the second direction of the first space dividing portion located within the land connection area is smaller than the dimension in the second direction of the first space dividing portion located outside the land connection area.

[0041]

[35] This disclosure relates to: a first through hole communicating with the second land recess is provided in the land connection region, and the first through hole is located at a position different from the first space dividing portion in a plan view; The main body sheet for a vapor chamber according to any one of

[31] to

[34] may be used.

[0042]

[36] This disclosure relates to: a land intersection space constituting the space portion is formed on the opposite side of the land intersection portion from the first main body surface, the land intersection space communicates with the second land recess, the first through hole is formed in the land intersection portion and communicates with the land intersection space; The main body sheet for a vapor chamber according to any one of

[31] to

[35] may be used.

[0043]

[37] This disclosure relates to: The first through hole is formed in the second intersection land portion. The main body sheet for a vapor chamber according to any one of

[31] to

[36] may be used.

[0044]

[38] This disclosure relates to: A blocking portion is provided between two adjacent first intersection land portions and between two adjacent second intersection land portions, A closed space constituting the space portion is located on the opposite side of the first main body surface of the closing portion. The main body sheet for a vapor chamber according to any one of

[31] to

[37] may be used.

[0045]

[39] This disclosure relates to: In a part of a peripheral portion of the land connection area, a column portion extending to the second main body surface is located between two adjacent land intersection portions. The main body sheet for a vapor chamber according to any one of

[31] to

[38] may be used.

[0046]

[40] This disclosure relates to: the space includes second space dividing portions located on both sides of the first intersection land portion in the first direction, a second land recess is located on the second main body surface of the first intersection land portion, the second land recess connecting the second space dividing portions located on both sides; a depth of the first land recess is different from a depth of the second land recess; The main body sheet for a vapor chamber according to any one of

[31] to

[39] may be used.

[0047]

[41] This disclosure relates to: the land intersection portion extends from the first body surface toward the second body surface, A liquid storage portion is provided on the second main body surface of the land intersection portion. The main body sheet for a vapor chamber according to any one of

[31] to

[40] may be used.

[0048]

[42] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a plurality of first main grooves located in the first main body surface of the first land portion, the first main grooves communicating with the space portion and extending in the first direction; a land connector located on the first body surface and connected to the first land portion; a land connection space that constitutes the space portion and is located on the opposite side of the first main body surface of the land connection body; a plurality of second through holes penetrating the land connection body, the second through holes communicating with the first main groove and communicating with the land connection space; and a column portion extending from the land connector to the second body surface. It may also be a main body sheet for a vapor chamber.

[0049]

[43] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a plurality of first main grooves located in the first main body surface of the first land portion, the first main grooves communicating with the space portion and extending in the first direction; a land connector located on the first body surface and connected to the first land portion; a land connection space that constitutes the space portion and is located on the opposite side of the first main body surface of the land connection body; a plurality of second through holes penetrating the land connection body, the second through holes communicating with the first main groove and communicating with the land connection space, the land connecting body includes a first hole region including a plurality of the second through holes formed by a first unit circumferential length, and a second hole region including a plurality of the second through holes formed by a second unit circumferential length, the first unit perimeter is a total value per unit area of ​​the perimeters of the second through holes located in the first hole region, the second unit perimeter is a total value per unit area of ​​the perimeters of the second through holes located in the second hole region, The second unit perimeter is greater than the first unit perimeter. It may also be a main body sheet for a vapor chamber.

[0050]

[44] This disclosure relates to: The second hole region is located inside the first hole region. It may be a main body sheet for a vapor chamber as described in

[43] .

[0051]

[45] This disclosure relates to: Further comprising a column portion extending from the land connector to the second body surface. It may be a main body sheet for a vapor chamber as described in

[43] or

[44] .

[0052]

[46] This disclosure relates to: a groove connecting portion connected to the first mainstream groove and the second mainstream groove and communicating with the second through hole is located on the first main body surface of the land connector; The main body sheet for a vapor chamber according to any one of

[43] to

[45] may be used.

[0053]

[47] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a plurality of first main grooves located in the first main body surface of the first land portion, the first main grooves communicating with the space portion and extending in the first direction; a land connector located on the first body surface and connected to the first land portion; a land connection space that constitutes the space portion and is located on the opposite side of the first main body surface of the land connection body; a plurality of second through holes penetrating the land connection body, the second through holes communicating with the first main groove and communicating with the land connection space, the land connection body includes a first hole region including a plurality of the second through holes formed with a first unit longitudinal dimension, and a second hole region including a plurality of the second through holes formed with a second unit longitudinal dimension, the first unit longitudinal dimension is a sum of longitudinal dimensions of the second through holes located in the first hole region per unit area, the second unit longitudinal dimension is a total value per unit area of ​​longitudinal dimensions of the second through holes located in the second hole region, The second unit longitudinal dimension is greater than the first unit longitudinal dimension; It may also be a main body sheet for a vapor chamber.

[0054]

[48] ​​This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a plurality of first main grooves located in the first main body surface of the first land portion, the first main grooves communicating with the space portion and extending in the first direction; a land connector located on the first body surface and connected to the first land portion; a land connection space that constitutes the space portion and is located on the opposite side of the first main body surface of the land connection body; a plurality of second through holes penetrating the land connection body, the second through holes communicating with the first main groove and communicating with the land connection space, the land connection body includes a first hole region including a plurality of the second through holes formed with a first occupancy rate, and the second hole region including a plurality of the second through holes formed with a second occupancy rate, The second occupancy rate is greater than the first occupancy rate. It may also be a main body sheet for a vapor chamber.

[0055]

[49] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a plurality of first main grooves located in the first main body surface of the first land portion, the first main grooves communicating with the space portion and extending in the first direction; a land connector located on the first body surface and connected to the first land portion; a land connection space that constitutes the space portion and is located on the opposite side of the first main body surface of the land connection body; a plurality of second through holes penetrating the land connection body, the second through holes communicating with the first mainstream groove and the second mainstream groove and communicating with the land connection space, the land connector includes a first hole region including a plurality of the second through holes formed in a first unit number, and a second hole region including a plurality of the second through holes formed in a second unit number, the first unit number is the number of the second through holes located in the first hole region per unit area, the second unit number is the number of the second through holes located in the second hole region per unit area, The second number of units is greater than the first number of units. It may also be a main body sheet for a vapor chamber.

[0056]

[50] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a plurality of first main grooves located in the first main body surface of the first land portion, the first main grooves communicating with the space portion and extending in the first direction; a plurality of second land portions around which the space portion is located, the plurality of second land portions extending from the first main body surface to the second main body surface and extending in a second direction different from the first direction in a plan view; a plurality of second main grooves located in the first main body surface of the second land portion, the second main grooves communicating with the space portion and extending in the second direction; a land connection area connected to the first land portion and the second land portion, the land connection region includes: a land connection body located on the first body surface and connected to the first land portion and the second land portion; a land connection space located on the opposite side of the land connection body to the first body surface and constituting the spatial portion; a plurality of second through holes penetrating the land connection body and communicating with the land connection space; and a plurality of intersection grooves located on the first body surface of the land connection body and communicating the first mainstream groove and the second mainstream groove with the second through hole, Each of the first main grooves is connected to the intersection groove at a first connection position, Each of the second main grooves is connected to the intersection groove at a second connection position, A plurality of the intersection grooves are connected to each of the second through holes at third connection positions; The main body sheet may be for a vapor chamber, wherein a total mainstream groove cross-sectional area obtained by adding together a sum of a flow path cross-sectional area of ​​the first mainstream grooves at each of the first connection positions and a sum of a flow path cross-sectional area of ​​the second mainstream grooves at each of the second connection positions is greater than a sum of a flow path cross-sectional area of ​​the intersection grooves at each of the third connection positions.

[0057]

[51] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a plurality of first main grooves located in the first main body surface of the first land portion, the first main grooves communicating with the space portion and extending in the first direction; a land connector located on the first body surface and connected to the first land portion; a land connection space that constitutes the space portion and is located on the opposite side of the first main body surface of the land connection body; a plurality of second through holes penetrating the land connection body, the second through holes communicating with the first main groove and communicating with the land connection space; a plurality of intersection grooves located on the first main body surface of the land connector, the intersection grooves connecting the first main groove to the second through hole; A plurality of the intersection grooves are connected to one of the second through holes, A planar area of ​​one of the second through holes is equal to or greater than a total value of flow path cross-sectional areas of the plurality of intersection grooves connected to the second through hole. It may also be a main body sheet for a vapor chamber.

[0058]

[52] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a plurality of first main grooves located in the first main body surface of the first land portion, the first main grooves communicating with the space portion and extending in the first direction; a land connection body connected to the first land portion and located on the first main body surface; and a land connection space constituting the space portion and located on the opposite side of the land connection body from the first main body surface; a plurality of second through holes penetrating the land connection body, the second through holes communicating with the first main groove and communicating with the land connection space; a plurality of intersection grooves located on the first main body surface of the land connector, the intersection grooves connecting the first main groove to the second through hole; The total value of the planar area of ​​the second through holes is 3% to 30% of the planar area of ​​the land connecting body. It may also be a main body sheet for a vapor chamber.

[0059]

[53] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a plurality of first main grooves located in the first main body surface of the first land portion, the first main grooves communicating with the space portion and extending in the first direction; a land connector located on the first body surface and connected to the first land portion; a land connection space that constitutes the space portion and is located on the opposite side of the first main body surface of the land connection body; a plurality of second through holes penetrating the land connection body, the second through holes communicating with the first main groove and communicating with the land connection space; a plurality of intersection grooves located on the first main body surface of the land connector, the intersection grooves connecting the first main groove to the second through hole; The total planar area of ​​the second through holes overlapping with an area of ​​the vapor chamber that is in contact with a device to be cooled is 3% to 30% of the planar area of ​​the area in contact with the device. It may also be a main body sheet for a vapor chamber.

[0060]

[54] This disclosure relates to: The first sheet, A second sheet; and a main body sheet for a vapor chamber according to any one of [1] to

[51] , which is positioned between the first sheet and the second sheet. It may be a vapor chamber.

[0061]

[55] This disclosure relates to: Housing and an electronic device contained within the housing; and a vapor chamber according to

[54] in thermal contact with the electronic device.

[0062]

[56] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion located on the first main body surface; a first land portion around which the space portion is located, the first land portion including the first main body surface and extending in a first direction in a plan view; a first groove flow passage portion located on the first main body surface of the first land portion, the first groove flow passage portion including a first main groove communicating with the space portion and extending in the first direction; a storage flow channel portion located on the first main body surface and connected to the first mainstream groove, A flow path cross-sectional area of ​​the storage flow path portion perpendicular to the first direction is larger than a flow path cross-sectional area of ​​the first groove flow path portion perpendicular to the first direction. It may also be a main body sheet for a vapor chamber.

[0063]

[57] This disclosure relates to: The storage flow passage portion includes a storage main groove, The storage mainstream groove has a width greater than the width of the first mainstream groove or a depth greater than the depth of the first mainstream groove. It may be a main body sheet for a vapor chamber as described in

[56] .

[0064]

[58] This disclosure relates to: A plurality of the first main grooves are located in the first main body surface of the first land portion, The storage flow channel portion includes storage recesses located on the first main body surface and connected to each of the first main grooves. It may be a main body sheet for a vapor chamber as described in

[56] .

[0065]

[59] This disclosure relates to: A protrusion protruding toward the first main body surface is located on the bottom surface of the storage recess. It may be a main body sheet for a vapor chamber as described in

[58] .

[0066]

[60] This disclosure relates to: The storage recess includes a curved outer edge in a plan view. It may be a main body sheet for a vapor chamber according to

[58] or

[59] .

[0067]

[61] This disclosure relates to: The first main groove protrudes into the storage recess in a plan view. The main body sheet for a vapor chamber according to any one of

[58] to

[60] may be used.

[0068]

[62] This disclosure relates to: A second partition wall that partitions the storage recess with respect to the space is located on the first main body surface. The main body sheet for a vapor chamber according to any one of items

[58] to

[61] may be used.

[0069]

[63] This disclosure relates to: The present invention may be a main body sheet for a vapor chamber described in

[62] , in which a partition wall groove connecting the space and the storage recess is located in the second partition wall.

[0070]

[64] This disclosure relates to: the first land portion includes a land body portion and a land wide portion having a width larger than a width of the land body portion, The storage channel portion is located on the first main body surface of the land wide portion. It may be a main body sheet for a vapor chamber according to

[62] or

[63] .

[0071]

[65] This disclosure relates to: The first land portion extends from the first body surface to the second body surface, The storage flow path portion includes a through space extending from the first main body surface to the second main body surface, A second partition wall that partitions the through space from the space portion is located on the first main body surface. It may be a main body sheet for a vapor chamber as described in

[56] .

[0072]

[66] This disclosure relates to: the storage channel portion is in contact with the first groove channel portion on one side in the first direction and in contact with the first partition wall on the other side in the first direction; The first partition wall extends across the entire width of the storage channel portion in a direction perpendicular to the first direction. The main body sheet for a vapor chamber according to any one of

[56] to

[65] may be used.

[0073]

[67] This disclosure relates to: A frame portion defining the space portion, One end of the first land portion in the first direction is connected to the frame portion, The first partition wall is located in the frame portion. It may be a main body sheet for a vapor chamber as described in

[66] .

[0074]

[68] This disclosure relates to: The storage channel portion is in contact with the first groove channel portion on both sides in the first direction. The main body sheet for a vapor chamber according to any one of

[56] to

[65] may be used.

[0075]

[69] This disclosure relates to: a second land portion around which the space portion is located, the second land portion including the first main body surface and extending in a second direction different from the first direction in a plan view; a second groove flow passage portion located on the first main body surface of the second land portion, the second groove flow passage portion including a second main groove communicating with the space portion and extending in the second direction; a land intersection portion where the first land portion and the second land portion intersect, the reservoir channel portion is located on the first main body surface of the land intersection portion, The first mainstream groove is connected to the storage flow path portion, and the second mainstream groove is connected to the storage flow path portion. The main body sheet for a vapor chamber according to any one of

[56] to

[65] may be used.

[0076]

[70] This disclosure relates to: A flow path cross-sectional area of ​​the storage flow path portion perpendicular to the second direction is larger than a flow path cross-sectional area of ​​the second groove flow path portion perpendicular to the second direction. It may be a main body sheet for a vapor chamber as described in

[69] .

[0077]

[71] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion located on the first main body surface; a first land portion around which the space portion is located, the first land portion including the first main body surface and extending in a first direction in a plan view; a first groove flow passage portion including a first main groove located in the first main body surface of the first land portion, the first main groove including a plurality of first main grooves communicating with the space portion and extending in the first direction; a storage flow path portion located on the first main body surface and connected to the first mainstream groove, the storage flow path portion being in contact with the first groove flow path portion on one side in the first direction and not in contact with the space portion on the other side in the first direction, a first surface remaining ratio indicating a ratio of an area of ​​the first main body surface remaining in the storage flow path portion is smaller than a second surface remaining ratio indicating a ratio of an area of ​​the first main body surface remaining in the first groove flow path portion; It may also be a main body sheet for a vapor chamber.

[0078]

[72] This disclosure relates to: The storage flow passage portion includes a plurality of storage main grooves extending on extensions of the corresponding first main grooves and a plurality of storage connection grooves, The reservoir communication groove intersects with the reservoir main groove and extends beyond the reservoir main groove in a direction perpendicular to the first direction. It may be a main body sheet for a vapor chamber as described in

[71] .

[0079]

[73] This disclosure relates to: The storage flow channel portion includes storage recesses located on the first main body surface and connected to each of the first main grooves. It may be a main body sheet for a vapor chamber as described in

[71] .

[0080]

[74] This disclosure relates to: A protrusion protruding toward the first main body surface is located on the bottom surface of the storage recess. It may be a main body sheet for a vapor chamber as described in

[72] .

[0081]

[75] This disclosure relates to: A second partition wall that partitions the storage recess with respect to the space is located on the first main body surface. It may be a main body sheet for a vapor chamber as described in

[73] or

[74] .

[0082]

[76] This disclosure relates to: the first land portion includes a land body portion and a land wide portion having a width larger than a width of the land body portion, The storage channel portion is located on the first main body surface of the land wide portion. It may be a main body sheet for a vapor chamber as described in

[75] .

[0083]

[77] This disclosure relates to: The storage channel portion is in contact with the first partition wall on the opposite side to the first groove channel portion, The first partition wall extends across the entire width of the storage channel portion in a direction perpendicular to the first direction. The main body sheet for a vapor chamber according to any one of items

[71] to

[76] may be used.

[0084]

[78] This disclosure relates to: The storage channel portion is in contact with the first groove channel portion on both sides in the first direction. The main body sheet for a vapor chamber according to any one of items

[71] to

[76] may be used.

[0085]

[79] This disclosure relates to: a second land portion around which the space portion is located, the second land portion including the first main body surface and extending in a second direction different from the first direction in a plan view; a second groove flow passage portion including a second mainstream groove located in the first main body surface of the second land portion, the second mainstream groove communicating with the space portion and extending in the second direction; a land intersection portion where the first land portion and the second land portion intersect, the reservoir channel portion is located on the first main body surface of the land intersection portion, The first mainstream groove is connected to the storage flow path portion, and the second mainstream groove is connected to the storage flow path portion. The main body sheet for a vapor chamber according to any one of

[71] to

[74] may be used.

[0086]

[80] This disclosure relates to: a first surface remaining ratio indicating a ratio of an area of ​​the first main body surface remaining in the storage flow path portion is smaller than a second surface remaining ratio indicating a ratio of an area of ​​the first main body surface remaining in the second groove flow path portion; It may be a main body sheet for a vapor chamber as described in

[79] .

[0087]

[81] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; A space portion located on the first main body surface; a first land portion around which the space portion is located, the first land portion including the first main body surface and extending in a first direction in a plan view; a first groove flow passage portion including a first mainstream groove located in the first main body surface of the first land portion, the first mainstream groove communicating with the space portion and extending in the first direction; a storage flow channel portion located on the first main body surface and connected to the first mainstream groove, a first surface remaining ratio indicating a ratio of an area of ​​the first main body surface remaining in the storage flow path portion is smaller than a second surface remaining ratio indicating a ratio of an area of ​​the first main body surface remaining in the first groove flow path portion, the storage flow channel portion includes a storage recess located on the first main body surface and connected to the first mainstream groove, A second partition wall that partitions the storage recess with respect to the space is located on the first main body surface. It may also be a main body sheet for a vapor chamber.

[0088]

[82] This disclosure relates to: the first land portion includes a land body portion and a land wide portion having a width larger than a width of the land body portion, The storage channel portion is located on the first main body surface of the land wide portion. It may be a main body sheet for a vapor chamber as described in

[81] .

[0089]

[83] This disclosure relates to: The first sheet, A second sheet; and a main body sheet for a vapor chamber according to any one of

[56] to

[82] , which is positioned between the first sheet and the second sheet. It may be a vapor chamber.

[0090]

[84] This disclosure relates to: A vapor chamber in which a working fluid is sealed, A body sheet for a vapor chamber including a first body surface and a second body surface located opposite to the first body surface; a first sheet located on the first body surface; A storage flow path portion, The main body sheet is A space portion located on the first main body surface; a first land portion around which the space portion is located, the first land portion including the first main body surface and extending in a first direction in a plan view; a first groove flow passage portion located on the first main body surface of the first land portion, the first groove flow passage portion including a first main groove communicating with the space portion and extending in the first direction, the storage channel portion is located on a surface of the first sheet on the side of the main body sheet, the storage flow channel portion is connected to the first mainstream groove and overlaps the first mainstream groove in a plan view, A flow path cross-sectional area of ​​the storage flow path portion perpendicular to the first direction is larger than a flow path cross-sectional area of ​​the first groove flow path portion perpendicular to the first direction. It may be a vapor chamber.

[0091]

[85] This disclosure relates to: A vapor chamber in which a working fluid is sealed, A body sheet for a vapor chamber including a first body surface and a second body surface located opposite to the first body surface; a first sheet located on the first body surface; a second sheet located on the second body surface; A storage flow path portion, The main body sheet is A space portion penetrating from the first body surface to the second body surface; a first land portion around which the space portion is located, the first land portion extending from the first main body surface to the second main body surface and extending in a first direction in a plan view; a first groove flow passage portion located on the first main body surface of the first land portion, the first groove flow passage portion including a first main groove communicating with the space portion and extending in the first direction, The two main body sheets are positioned between the first sheet and the second sheet, The two body sheets are composed of a first body sheet and a second body sheet laminated together, The first sheet is located on the first main body surface of the first main body sheet, The second sheet is located on the second main body surface of the second main body sheet, the storage flow path portion is located on the second main body surface of the first main body sheet, The storage flow channel portion is connected to the first main groove of the second sheet, A flow path cross-sectional area of ​​the storage flow path portion perpendicular to the first direction is larger than a flow path cross-sectional area of ​​the first groove flow path portion of the second sheet perpendicular to the first direction. It may be a vapor chamber.

[0092]

[86] This disclosure relates to: Housing and an electronic device contained within the housing; and a vapor chamber according to any one of

[83] to

[85] in thermal contact with the electronic device. It may be an electronic device. Effect of the Invention

[0093] According to the present disclosure, heat dissipation performance can be improved. [Brief description of the drawings]

[0094] [Figure 1] FIG. 1 is a schematic perspective view illustrating an electronic device according to a first embodiment of the present disclosure. [Diagram 2] FIG. 2 is a plan view showing the vapor chamber shown in FIG. [Diagram 3] FIG. 3 is a cross-sectional view taken along line AA in FIG. [Figure 4] FIG. 4 is a plan view showing the inner surface of the first sheet shown in FIG. [Diagram 5] FIG. 5 is a plan view showing the inner surface of the second sheet shown in FIG. [Figure 6] FIG. 6 is a plan view showing a first main body surface of the wick sheet shown in FIG. [Figure 7] FIG. 7 is a plan view showing the second main body surface of the wick sheet shown in FIG. [Figure 8] FIG. 8 is a partially enlarged cross-sectional view of FIG. [Figure 9] FIG. 9 is a plan view of the land intersection portion shown in FIG. [Figure 10] FIG. 10 is a cross-sectional view showing the second land recess taken along line BB in FIG. [Figure 11] FIG. 11 is a cross-sectional view showing the first land recess taken along line CC in FIG. [Figure 12] FIG. 12 is a partially enlarged plan view of the liquid flow path portion shown in FIG. [Figure 13] FIG. 13 is a plan view of the land intersection portion shown in FIG. [Figure 14] FIG. 14 is a cross-sectional view showing a modification of the second land recess shown in FIG. [Figure 15] FIG. 15 is a cross-sectional view showing a modification of the first land recess shown in FIG. [Figure 16] FIG. 16 is a cross-sectional view showing another modified example of the second land recess shown in FIG. [Figure 17] FIG. 17 is a plan view showing a modification of the groove connection shown in FIG. [Figure 18] FIG. 18 is a cross-sectional view of the groove connection shown in FIG. [Figure 19] FIG. 19 is a plan view showing another modified example of the groove connection portion shown in FIG. [Figure 20] FIG. 20 is a cross-sectional view of the groove connection shown in FIG. [Figure 21] FIG. 21 is a plan view showing another modified example of the groove connection portion shown in FIG. [Figure 22]FIG. 22 is a plan view showing another modified example of the groove connection portion shown in FIG. [Figure 23] FIG. 23 is a plan view showing another modified example of the groove connection portion shown in FIG. [Figure 24] FIG. 24 is a plan view showing another modified example of the groove connection portion shown in FIG. [Diagram 25] FIG. 25 is a plan view showing a modification of the land portion shown in FIG. [Figure 26] FIG. 26 is a partially enlarged plan view of FIG. [Figure 27] FIG. 27 is a schematic plan view showing the liquid flow path portion shown in FIG. [Figure 28] FIG. 28 is a plan view showing another modified example of the land portion shown in FIG. [Figure 29] FIG. 29 is a plan view showing another modified example of the land portion shown in FIG. [Diagram 30] FIG. 30 is a schematic plan view showing the liquid flow path portion shown in FIG. [Diagram 31] FIG. 31 is a plan view showing another modified example of the land portion shown in FIG. [Diagram 32] FIG. 32 is a plan view showing another modified example of the land portion shown in FIG. [Diagram 33] FIG. 33 is a plan view showing a land connection region including the land intersection portion shown in FIG. [Diagram 34] FIG. 34 is a cross-sectional view showing the second land recess taken along the line DD in FIG. [Diagram 35] FIG. 35 is a cross-sectional view showing the first land recess taken along line EE in FIG. [Diagram 36] FIG. 36 is a plan view showing a modification of the land connection region shown in FIG. [Figure 37] FIG. 37 is a plan view showing a modification of the passage dividing portion shown in FIG. [Figure 38] FIG. 38 is a plan view showing another modified example of the land connection region shown in FIG. [Figure 39] FIG. 39 is a cross-sectional view showing a space dividing portion taken along line FF in FIG. [Figure 40A] FIG. 40A is a plan view showing another modified example of the land connection region shown in FIG. [Figure 40B] FIG. 40B is a plan view showing a modification of the planar shape of the passage dividing portion shown in FIG. [Figure 41A] FIG. 41A is a cross-sectional view showing a modification of the land intersection portion shown in FIG. [Figure 41B] FIG. 41B is a cross-sectional view showing another modified example of the land intersection portion shown in FIG. [Diagram 42] FIG. 42 is a plan view showing another modified example of the land connection region shown in FIG. [Diagram 43] FIG. 43 is a cross-sectional view showing the first through hole taken along line GG in FIG. [Diagram 44] FIG. 44 is a partial enlarged plan view showing another modified example of the land connection region shown in FIG. [Diagram 45] 45 is a cross-sectional view showing the first through hole taken along line HH in FIG. [Figure 46] FIG. 46 is a plan view showing another modified example of the land connection region shown in FIG. [Figure 47] FIG. 47 is a cross-sectional view showing the pillar portion taken along line II in FIG. [Figure 48] FIG. 48 is a plan view showing another modified example of the land connection region shown in FIG. [Figure 49] FIG. 49 is a cross-sectional view showing the column portion taken along line JJ in FIG. [Figure 50] FIG. 50 is a cross-sectional view showing another modified example of the land recess shown in FIG. [Figure 51] FIG. 51 is a cross-sectional view showing another modified example of the land recess shown in FIG. [Figure 52] FIG. 52 is a plan view showing another modified example of the wick sheet shown in FIG. [Diagram 53] FIG. 53 is a plan view showing another modified example of the wick sheet shown in FIG. [Figure 54] FIG. 54 is a plan view showing another modified example of the wick sheet shown in FIG. [Figure 55] FIG. 55 is a cross-sectional view showing another modified example of the land intersection portion shown in FIG. [Figure 56] FIG. 56 is a cross-sectional view showing another modified example of the land intersection portion shown in FIG. [Figure 57] FIG. 57 is a plan view showing another modified example of the land connection region shown in FIG. [Figure 58] FIG. 58 is a cross-sectional view showing the land connection region taken along line KK in FIG. [Figure 59] FIG. 59 is a partial enlarged plan view showing a modification of the liquid retaining groove shown in FIG. [Figure 60] FIG. 60 is a cross-sectional view showing another modified example of the land intersection portion shown in FIG. [Figure 61] FIG. 61 is a cross-sectional view showing another modified example of the land intersection portion shown in FIG. [Figure 62] FIG. 62 is a plan view showing another modified example of the land connection region shown in FIG. [Figure 63A] FIG. 63A is a cross-sectional view showing the land connection area taken along line LL in FIG. [Figure 63B] 63B is a partially enlarged cross-sectional view of the second through hole shown in FIG. 62. FIG. [Figure 64] FIG. 64 is a partial enlarged plan view showing the land connection region shown in FIG. [Figure 65] FIG. 65 is a plan view showing a modification of the land connection region shown in FIG. [Figure 66] FIG. 66 is a plan view showing another modified example of the land connection region shown in FIG. [Figure 67] FIG. 67 is a plan view showing another modified example of the land connection region shown in FIG. [Figure 68A] FIG. 68A is a plan view showing an example of the second through hole shown in FIG. [Figure 68B] FIG. 68B is a plan view showing an example of the second through hole shown in FIG. [Figure 68C] FIG. 68C is a plan view showing an example of the second through hole shown in FIG. [Figure 69] FIG. 69 is a plan view showing another modified example of the land connection region shown in FIG. [Figure 70A] FIG. 70A is a plan view showing the land connection area shown in FIG. [Figure 70B] FIG. 70B is a plan view showing the second through hole of FIG. 70A. [Figure 70C] FIG. 70C is a schematic plan view showing the relationship between the second through holes and the intersection grooves shown in FIG. 70A. [Figure 71] FIG. 71 is a diagram for explaining a contact region of an electronic device. [Figure 72] FIG. 72 is a plan view showing a vapor chamber according to the second embodiment of the present disclosure. [Figure 73] FIG. 73 is a plan view showing the first main body surface of the wick sheet of the vapor chamber shown in FIG. [Figure 74] FIG. 74 is a plan view showing the second main body surface of the wick sheet of the vapor chamber shown in FIG. [Figure 75] FIG. 75 is a partial enlarged plan view of the storage flow path portion shown in FIG. [Figure 76] FIG. 76 is a cross-sectional view showing the storage channel portion taken along the line MM in FIG. [Figure 77] FIG. 77 is a cross-sectional view showing the storage channel portion taken along line NN in FIG. [Figure 78] FIG. 78 is a partial enlarged plan view showing a modified example of the storage flow path portion shown in FIG. [Figure 79] FIG. 79 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 80] FIG. 80 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 81] FIG. 81 is a cross-sectional view showing the storage channel portion taken along line OO in FIG. [Figure 82] FIG. 82 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 83]FIG. 83 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 84] FIG. 84 is a cross-sectional view showing the storage channel portion taken along the line PP in FIG. [Figure 85] FIG. 85 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 86] FIG. 86 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 87] FIG. 87 is a cross-sectional view showing the storage channel portion taken along line QQ in FIG. [Figure 88] FIG. 88 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 89] FIG. 89 is a cross-sectional view showing the storage channel portion taken along the line RR in FIG. [Figure 90] FIG. 90 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 91] FIG. 91 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 92] FIG. 92 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 93] FIG. 93 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 94] FIG. 94 is a cross-sectional view showing the storage channel portion taken along the line SS in FIG. [Figure 95] FIG. 95 is a cross-sectional view showing a modification of the storage flow path portion shown in FIG. [Figure 96] FIG. 96 is a cross-sectional view showing another modified example of the storage flow path portion shown in FIG. [Figure 97] FIG. 97 is a cross-sectional view showing another modified example of the storage flow path portion shown in FIG. [Figure 98] FIG. 98 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 99] FIG. 99 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 100] FIG. 100 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Figure 101] FIG. 101 is a cross-sectional view showing the storage channel portion taken along line TT in FIG. [Figure 102] FIG. 102 is a cross-sectional view showing another modified example of the storage flow path portion shown in FIG. [Figure 103] FIG. 103 is a cross-sectional view showing another modified example of the storage flow path portion shown in FIG. [Figure 104] FIG. 104 is a cross-sectional view showing another modified example of the storage flow path portion shown in FIG. [Figure 105] FIG. 105 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. [Fig. 106] FIG. 106 is a cross-sectional view showing the storage channel portion shown in FIG. 105, taken along the X direction. [Figure 107] FIG. 107 is a cross-sectional view showing the storage channel portion shown in FIG. 105, taken along the Y direction. [Figure 108] FIG. 108 is a cross-sectional view showing a modified example of the storage channel portion shown in FIG. 106, and is a cross-sectional view taken along the X direction. [Fig. 109] FIG. 109 is a cross-sectional view showing the storage channel portion shown in FIG. 108, taken along the Y direction. [Figure 110] FIG. 110 is a cross-sectional view showing another modified example of the storage flow path portion shown in FIG. 106, and is a cross-sectional view taken along the X direction. [Figure 111] FIG. 111 is a cross-sectional view showing the storage channel portion shown in FIG. 110, taken along the Y direction. [Figure 112] FIG. 112 is a cross-sectional view showing another modified example of the storage flow path portion shown in FIG. 106, and is a cross-sectional view taken along the X direction. [Figure 113] FIG. 113 is a cross-sectional view showing the storage channel portion shown in FIG. 112, taken along the Y direction. [Fig. 114] FIG. 114 is a plan view showing a first main body surface of a wick sheet according to the third embodiment of the present disclosure. [Figure 115] FIG. 115 is a partially enlarged plan view of the storage flow path portion shown in FIG. [Fig. 116] FIG. 116 is a cross-sectional view showing the storage channel portion taken along line UU in FIG. [Figure 117] FIG. 117 is a partially enlarged plan view showing a modification of the storage flow path portion shown in FIG. [Fig. 118] FIG. 118 is a cross-sectional view showing the storage channel portion taken along line VV in FIG. [Figure 119] FIG. 119 is a partial enlarged plan view showing another modified example of the storage flow path portion shown in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0095] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the drawings attached to this specification, the scale and aspect ratios are appropriately changed and exaggerated from those of the actual objects for the convenience of illustration and understanding.

[0096] The geometric conditions, physical characteristics, terms specifying the degree of the geometric conditions or physical characteristics, and numerical values ​​indicating the geometric conditions or physical characteristics used in this specification may be interpreted without being bound by strict meaning. These geometric conditions, physical characteristics, terms, and numerical values ​​may be interpreted including the range of the degree to which similar functions can be expected. Examples of terms specifying geometric conditions include "length", "angle", "shape", "parallel", "orthogonal", and "same". Furthermore, in order to clarify the drawings, the shapes of multiple parts that can be expected to have similar functions are regularly described. However, without being bound by strict meaning, the shapes of the parts may be different from each other within the range in which the functions can be expected. In the drawings, the boundary lines indicating the joint surfaces between members are shown as simple straight lines for convenience, but they are not limited to being strictly straight lines, and the shape of the boundary line is arbitrary within the range in which the desired joint performance can be expected.

[0097] (First embodiment) A main body sheet for a vapor chamber, a vapor chamber, and an electronic device according to an embodiment of the present disclosure will be described with reference to Figs. 1 to 71. The vapor chamber 1 according to the present embodiment is accommodated in a housing H of an electronic device E together with an electronic device D that generates heat, and is a device for cooling the electronic device D. Examples of the electronic device E include mobile terminals such as portable terminals and tablet terminals. Examples of the electronic device D include a central processing unit (CPU), a light-emitting diode (LED), and a power semiconductor. The electronic device D may also be referred to as a cooled device.

[0098] Here, first, an electronic device E equipped with the vapor chamber 1 according to the present embodiment will be described by taking a tablet terminal as an example. As shown in FIG. 1, the electronic device E may include a housing H, an electronic device D housed in the housing H, and a vapor chamber 1. In the electronic device E shown in FIG. 1, a touch panel display TD is provided on the front surface of the housing H. The vapor chamber 1 is housed in the housing H and arranged so as to be in thermal contact with the electronic device D. The vapor chamber 1 receives heat generated by the electronic device D when the electronic device E is used. The heat received by the vapor chamber 1 is released to the outside of the vapor chamber 1 via the working fluids 2a and 2b described later, and the electronic device D is effectively cooled. When the electronic device E is a tablet terminal, the electronic device D corresponds to a central processing unit or the like.

[0099] Next, the vapor chamber 1 according to the present embodiment will be described.

[0100] As shown in Figures 2 and 3, the vapor chamber 1 has a sealed space 3 in which working fluids 2a and 2b (see Figure 6) are sealed. The working fluids 2a and 2b in the sealed space 3 repeatedly undergo phase changes, thereby cooling the above-mentioned electronic device D. The working fluids 2a and 2b contain water. Examples of the working fluids 2a and 2b include pure water and a mixture thereof.

[0101] The vapor chamber 1 according to the present embodiment is composed of three layers. More specifically, the vapor chamber 1 according to the present embodiment includes a first sheet 10, a second sheet 20, a wick sheet 30, a vapor flow path section 50, and liquid flow path sections 60X and 60Y. The second sheet 20 is located on the opposite side of the wick sheet 30 from the first sheet 10. The wick sheet 30 is an example of a main body sheet, and is located between the first sheet 10 and the second sheet 20. In the vapor chamber 1 according to this embodiment, the second sheet 20, the wick sheet 30, and the first sheet 10 are stacked in this order.

[0102] The vapor chamber 1 shown in FIG. 2 is generally formed in a thin flat plate shape. The planar shape of the vapor chamber 1 is arbitrary, but may be a rectangular shape as shown in FIG. 2. The planar shape of the vapor chamber 1 may be, for example, a rectangle with one side being 1 cm and the other side being 3 cm, or a square with one side being 15 cm. The planar dimensions of the vapor chamber 1 are arbitrary. In this embodiment, an example in which the planar shape of the vapor chamber 1 is a rectangular shape with the X direction described later as the longitudinal direction will be described. In this case, as shown in FIGS. 4 to 7, the first sheet 10, the second sheet 20, and the wick sheet 30 may have the same planar shape as the vapor chamber 1. The planar shape of the vapor chamber 1 is not limited to a rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L-shape, or a T-shape.

[0103] 2, the vapor chamber 1 has an evaporation region SR where the working fluid 2b evaporates and a condensation region CR where the working vapor 2a condenses. The working vapor 2a is a working fluid in a gaseous state, and the working fluid 2b is a working fluid in a liquid state.

[0104] The evaporation region SR is a region that overlaps with the electronic device D in a planar view and is in contact with the electronic device D. The position of the evaporation region SR is arbitrary. In this embodiment, the evaporation region SR is formed at a position relatively close to one end (the left end in FIG. 2) of the vapor chamber 1 in the X direction. Heat from the electronic device D is transferred to the evaporation region SR, and the working liquid 2b is evaporated by this heat to generate working vapor 2a. The heat from the electronic device D can be transferred not only to the region that overlaps with the electronic device D in a planar view, but also to the periphery of the region that the electronic device D overlaps. Therefore, the evaporation region SR may include the region that overlaps with the electronic device D and the periphery thereof in a planar view.

[0105] The condensation region CR is a region that does not overlap with the electronic device D in a plan view, and is a region where the working vapor 2a mainly releases heat and condenses. The condensation region CR in this embodiment may be formed mainly at a position relatively close to the other end (the right end in FIG. 2) of the vapor chamber 1 in the X direction. In addition, the condensation region CR may be formed at a position to the left of the evaporation region SR, a position above the evaporation region SR, or a position below the evaporation region SR in FIG. 2. The condensation region CR may be a region around the evaporation region SR. Heat is released from the working vapor 2a in the condensation region CR. The working vapor 2a is cooled and condensed, and the working liquid 2b is generated.

[0106] Here, the plan view refers to a state in which the vapor chamber 1 is viewed from a direction perpendicular to the surface that receives heat from the electronic device D and the surface that releases the received heat. The surface that receives heat corresponds to a first sheet outer surface 10a of the first sheet 10, which will be described later. The surface that releases heat corresponds to a second sheet outer surface 20b of the second sheet 20, which will be described later. When the vapor chamber 1 is arranged so that the first sheet 10 is located on the upper side and the second sheet 20 is located on the lower side, the state in which the vapor chamber 1 is viewed from the upper side or the lower side, as shown in FIG. 2, corresponds to a plan view.

[0107] As shown in FIG. 3, the first sheet 10 includes a first sheet outer surface 10a located on the opposite side to the wick sheet 30, and a first sheet inner surface 10b facing the wick sheet 30. The electronic device D described above may come into contact with the first sheet outer surface 10a. A first main body surface 30a of the wick sheet 30, which will be described later, comes into contact with the first sheet inner surface 10b. The first sheet 10 may be formed in a substantially flat shape. The first sheet 10 may have a substantially constant thickness.

[0108] As shown in FIG. 3, the second sheet 20 includes a second sheet inner surface 20a facing the wick sheet 30 and a second sheet outer surface 20b located on the opposite side to the wick sheet 30. The housing member Ha may be in contact with the second sheet outer surface 20b. The housing member Ha is a member that constitutes the housing H. The second sheet inner surface 20a is in contact with a second main body surface 30b of the wick sheet 30, which will be described later. The second sheet 20 may be formed in a substantially flat shape. The second sheet 20 may have a substantially constant thickness.

[0109] Next, the wick sheet 30 will be described. In this embodiment, an example in which one wick sheet 30 is located between the first sheet 10 and the second sheet 20 will be described. However, a plurality of wick sheets 30 may be located between the first sheet 10 and the second sheet 20.

[0110] As shown in FIG. 3, the wick sheet 30 includes a first body surface 30a and a second body surface 30b located on the opposite side to the first body surface 30a. The first sheet inner surface 10b of the first sheet 10 is in contact with the first body surface 30a. The second sheet inner surface 20a of the second sheet 20 is in contact with the second body surface 30b. The first sheet inner surface 10b of the first sheet 10 and the first body surface 30a of the wick sheet 30 may be diffusion bonded. The first sheet inner surface 10b and the first body surface 30a may be permanently bonded to each other. Similarly, the second sheet inner surface 20a of the second sheet 20 and the second body surface 30b of the wick sheet 30 may be diffusion bonded. The second sheet inner surface 20a and the second body surface 30b may be permanently bonded to each other. The term "permanently joined" is not limited to a strict meaning, but is used to mean that the connection is made to such an extent that the sealed space 3 can be maintained in a sealed state when the vapor chamber 1 is in operation.

[0111] The wick sheet 30 defines a vapor flow path portion 50, which will be described later. More specifically, the wick sheet 30 includes a frame portion 32, at least one first land portion 33X, and at least one second land portion 33Y. As shown in Fig. 3, Fig. 6, and Fig. 7, the wick sheet 30 may include a plurality of first land portions 33X and a plurality of second land portions 33Y.

[0112] The frame body 32 is formed in a rectangular frame shape along the X direction and the Y direction in a plan view. The land portions 33X and 33Y are located inside the frame body 32 in a plan view. The steam flow path portion 50 is located around the first land portion 33X and the second land portion 33Y. The frame body 32 and the land portions 33X and 33Y are portions where the material of the wick sheet 30 remains without being etched in the etching process described later. The frame body 32 and the land portions 33X and 33Y include the first main body surface 30a and the second main body surface 30b, and extend from the first main body surface 30a to the second main body surface 30b. A first steam passage 51, described later, through which the working steam 2a flows, is formed between the frame body 32 and the adjacent first land portion 33X. A steam passage 52, which will be described later, through which the working steam 2a flows is formed between the adjacent first land portions 33X.

[0113] The first land portion 33X may extend in an elongated shape with the X direction as the longitudinal direction in a plan view. The second land portion 33Y may extend in an elongated shape with the Y direction as the longitudinal direction in a plan view. The planar shape of the land portions 33X and 33Y may be an elongated rectangular shape. The first land portions 33X may be parallel to each other. The second land portions 33Y may be parallel to each other. The first land portion 33X and the second land portion 33Y may be separated from the frame body portion 32 as shown in Figs. 6 and 7, or may be connected to the frame body portion 32. The X direction is an example of a first direction, and corresponds to the left-right direction in Figs. 6 and 7. The Y direction is an example of a second direction, and is a direction perpendicular to the X direction in a plan view. The Y direction corresponds to the up-down direction in Figs. 6 and 7. The direction perpendicular to the X direction and the Y direction is the Z direction. The Z direction corresponds to the up-down direction in Fig. 3 and corresponds to the thickness direction. In this embodiment, the first land portion 33X and the second land portion 33Y are perpendicular to each other. However, the first land portion 33X and the second land portion 33Y do not have to be perpendicular to each other, and the angle at which the first land portion 33X and the second land portion 33Y intersect is arbitrary.

[0114] As shown in FIG. 8, the width w1 of the first land portion 33X may be, for example, 100 μm to 1500 μm. Here, the width w1 of the first land portion 33X is the dimension of the first land portion 33X in the Y direction. The width w1 is the dimension of the first land portion 33X on the first body surface 30a and the second body surface 30b. The width w2 of the second land portion 33Y may be equal to the width w1 of the first land portion 33X or may be different from the width w1. The width w2 of the second land portion 33Y (see FIG. 13) is the dimension of the second land portion 33Y in the X direction. The width w2 is the dimension of the second land portion 33Y on the first body surface 30a and the second body surface 30b.

[0115] The frame portion 32 and the land portions 33X, 33Y may be diffusion bonded to the first sheet 10 or to the second sheet 20. This improves the mechanical strength of the vapor chamber 1. The first body surface 30a and the second body surface 30b of the wick sheet 30 may be formed flat across the frame portion 32 and the land portions 33X, 33Y.

[0116] Next, the steam flow path section 50 will be described.

[0117] As shown in FIG. 3, the vapor flow path portion 50 may be provided on the first main body surface 30a of the wick sheet 30. The vapor flow path portion 50 is an example of a space portion in which the working fluids 2a and 2b are sealed. The vapor flow path portion 50 may be a flow path through which the working steam 2a mainly passes. The working liquid 2b may also pass through the vapor flow path portion 50. In this embodiment, the vapor flow path portion 50 may extend from the first main body surface 30a to the second main body surface 30b, or may penetrate the wick sheet 30. The vapor flow path portion 50 may be covered by the first sheet 10 on the first main body surface 30a, and may be covered by the second sheet 20 on the second main body surface 30b. The second sheet 20 covers the vapor flow path portion 50 from the side opposite to the first sheet 10.

[0118] As shown in Figs. 6 and 7, the steam flow path section 50 according to this embodiment may include a first steam passage 51 and a plurality of second steam passages 52. The first steam passage 51 is formed between adjacent frame body sections 32 and first land sections 33X. The planar shape of the first steam passage 51 may be a rectangular frame shape along the X direction and the Y direction. The second steam passage 52 is formed between adjacent first land sections 33X. The second steam passages 52 may be aligned in the Y direction. The planar shape of the second steam passage 52 may be an elongated rectangular shape.

[0119] 3, the steam passages 51, 52 may include a first steam flow path recess 53 provided in the first body surface 30a and a second steam flow path recess 54 provided in the second body surface 30b. The first steam flow path recess 53 and the second steam flow path recess 54 are connected and communicated with each other.

[0120] The first vapor flow path recess 53 may be formed by etching the first main body surface 30a of the wick sheet 30 in an etching step described below. The first vapor flow path recess 53 is formed in a concave shape on the first main body surface 30a. The wall surface of the first vapor flow path recess 53 may be formed in a curved shape. As shown in FIG. 8, the width w3 of the first vapor flow path recess 53 may be, for example, 100 μm to 5000 μm. The width w3 is a dimension in the Y direction, which is the dimension of the first vapor flow path recess 53 on the first main body surface 30a.

[0121] The second vapor flow path recess 54 may be formed by etching the second main body surface 30b of the wick sheet 30 in an etching step described later. The second vapor flow path recess 54 is formed in a concave shape on the second main body surface 30b. The wall surface of the second vapor flow path recess 54 may be formed in a curved shape. As shown in FIG. 8, the width w4 of the second vapor flow path recess 54 may be, for example, 100 μm to 5000 μm, similar to the width w3 of the first vapor flow path recess 53 described above. The width w4 is a dimension in the Y direction, which is the dimension of the second vapor flow path recess 54 on the second main body surface 30b.

[0122] As shown in FIG. 8, in this embodiment, the cross-sectional shapes of the steam passages 51 and 52 are formed to include the through-portion 34. The through-portion 34 is defined by a ridge line formed such that the wall surfaces of the steam passage recesses 53 and 54 protrude inward. The depth d1 from the first main body surface 30a to the tip of the through-portion 34 may be equal to or different from the depth d2 from the second main body surface 30b to the tip of the through-portion 34. The cross-sectional shapes of the steam passages 51 and 52 are not limited thereto. For example, the cross-sectional shapes of the steam passages 51 and 52 may be trapezoidal or parallelogrammatic, or may be barrel-shaped. The steam passage section 50 including the steam passages 51 and 52 thus configured constitutes a part of the sealed space 3 described above. Each of the steam passages 51 and 52 has a relatively large flow passage cross-sectional area so that the working steam 2a passes through. FIG. 8 shows the first steam passage 51 and the second steam passage 52 in an enlarged manner in order to clarify the drawing. The number and positions of the steam passages 51, 52 and a first main groove 61X (described later) are different from those in FIGS.

[0123] Although not shown, a plurality of support parts for supporting the land parts 33X, 33Y on the frame part 32 may be provided in each steam passage 51, 52. A support part for supporting two adjacent first land parts 33X may be provided, and a support part for supporting two adjacent second land parts 33Y may be provided. These support parts may be formed so as not to impede the flow of the working steam 2a diffusing through the steam passage part 50.

[0124] As shown in FIG. 2, the vapor chamber 1 may include an injection part 4 that injects the working fluid 2b into the sealed space 3. The injection part 4 includes an injection passage 36 that communicates with the first vapor passage 51. The position of the injection part 4 is arbitrary. As shown in FIG. 6 and FIG. 7, the injection passage 36 may be formed in a concave shape on the first main body surface 30a. Alternatively, the injection passage 36 may be formed in a concave shape on the second main body surface 30b. When a liquid flow passage part similar to a first liquid flow passage part 60X described later is formed on the frame part 32, the injection passage 36 may be connected to and communicate with this liquid flow passage part.

[0125] As shown in FIG. 6 and FIG. 9, in a plan view, the first land portion 33X extends in the X direction, and the second land portion 33Y extends in the Y direction different from the X direction. The first land portion 33X is aligned in the Y direction, and the second land portion 33Y is aligned in the X direction. The first land portion 33X and the second land portion 33Y may intersect at a land intersection portion 37. More specifically, each first land portion 33X and each second land portion 33Y may intersect with each other to form a plurality of land intersection portions 37. One first land portion 33X and one second land portion 33Y intersect at one land intersection portion 37. The plurality of first land portions 33X and the plurality of second land portions 33Y may be formed in a lattice shape at least partially. The plurality of first land portions 33X and the plurality of second land portions 33Y may be formed in a lattice shape partially as shown in FIG. 6 and FIG. 7. In this case, the land intersections 37 may be located in the evaporation region SR as described above, as shown in Figures 6 and 7. Alternatively, the first land portions 33X and the second land portions 33Y may be formed in a lattice pattern over the entire surface.

[0126] As shown in FIG. 9, the first land portion 33X may extend in the X direction beyond the land intersection portion 37, and the second land portion 33Y may extend in the Y direction beyond the land intersection portion 37. In this case, the first land portion 33X and the second land portion 33Y may cross each other. In all the land intersection portions 37, the first land portion 33X and the second land portion 33Y may cross each other. As shown in FIG. 6 and FIG. 7, in some of the land intersection portions 37, the first land portion 33X and the second land portion 33Y may cross each other in a T shape. In FIG. 9, the liquid flow path portions 60X and 60Y are omitted for clarity of the drawing.

[0127] The land intersection 37 may extend from the first body surface 30a to the second body surface 30b. The first body surface 30a of the land intersection 37 may be joined to the first sheet inner surface 10b of the first sheet 10. The second body surface 30b of the land intersection 37 may be joined to the second sheet inner surface 20a of the second sheet 20.

[0128] As shown in FIG. 9, the second steam passage 52 may include a passage dividing portion 55 located on both sides of the second land portion 33Y in the Y direction. The passage dividing portion 55 is located on both sides of the second land portion 33Y in the X direction. The passage dividing portion 55 is an example of a first space dividing portion and also an example of a second space dividing portion. In this embodiment, each second steam passage 52 includes a plurality of passage dividing portions 55. More specifically, a plurality of second lands 33Y cross the second steam passage 52, and a plurality of passage dividing portions 55 are formed by each of the second lands 33Y. The passage dividing portions 55 may be located on both sides of the first land portion 33X in the X direction. The passage dividing portions 55 are located on both sides of the first land portion 33X in the Y direction. These passage dividing portions 55 are also an example of a first space dividing portion and an example of a second space dividing portion. In this manner, the passage dividing portions 55 are lined up in both the X direction and the Y direction. The passage dividing portion 55 located on one side of the first land portion 33X may be a passage dividing portion 55 located on one side of the second land portion 33Y. Four passage dividing portions 55 may be formed around the land intersection portion 37. Each passage dividing portion 55 may extend from the first body surface 30a to the second body surface 30b, and may penetrate the wick sheet 30.

[0129] As shown in Fig. 10, a second land recess 38Y may be located on the second main body surface 30b of the second land portion 33Y. As shown in Fig. 9, the second land recess 38Y may connect the passage dividing portions 55 located on both sides of the second land recess 38Y in the X direction. Fig. 10 shows a cross section of the second land portion 33Y along the Y direction. The second land recess 38Y is formed in each second land portion 33Y, and the multiple passage dividing portions 55 aligned in the X direction may be continuously connected in the X direction via the second land recess 38Y.

[0130] 9, the second land recess 38Y may be located on both sides of the land intersection 37 in the Y direction. The second land recess 38Y may be formed between two land intersections 37 adjacent to each other in the Y direction.

[0131] The second land recess 38Y may be formed by etching the second main body surface 30b of the wick sheet 30 in an etching process described later. As shown in FIG. 10, the second land recess 38Y is formed in a concave shape on the second main body surface 30b. The width w5 of the second land recess 38Y may be equal to the width w4 (see FIG. 8) of the second vapor flow path recess 54 described above, or may be smaller than the width w4. The width w5 is a dimension in the Y direction, which is the dimension of the second land recess 38Y on the second main body surface 30b. The second land recess 38Y may include a second bottom surface 38Ya. The second bottom surface 38Ya may be formed substantially flat. The second bottom surface 38Ya may be a surface of the second land recess 38Y located near the first main body surface 30a. The depth d3 of the second land recess 38Y may be shallower than or equal to the depth d2 (see FIG. 8) from the second body surface 30b to the through portion 34. The depth d3 may be the distance from the second body surface 30b to the second bottom surface 38Ya.

[0132] As shown in Fig. 11, a first land recess 38X may be located on the second main body surface 30b of the first land portion 33X. As shown in Fig. 9, the first land recess 38X may connect passage dividing portions 55 located on both sides in the Y direction of the first land recess 38X. Fig. 11 shows a cross section of the land portion 33X along the X direction. The first land recess 38X is formed in each first land portion 33X, and the multiple passage dividing portions 55 aligned in the Y direction may be continuously connected in the Y direction via the first land recess 38X.

[0133] 9, the first land recess 38X may be located on both sides of the land intersection 37 in the X direction. The first land recess 38X may be formed between two land intersections 37 adjacent to each other in the X direction.

[0134] The first land recess 38X may be formed by etching the second main body surface 30b of the wick sheet 30 in an etching process described later. As shown in FIG. 11, the first land recess 38X is formed in a concave shape on the second main body surface 30b. The width w6 of the first land recess 38X may be equal to the width w4 (see FIG. 8) of the second vapor flow path recess 54 described above, or may be smaller than the width w4. The width w6 is the X-direction dimension, which is the dimension of the first land recess 38X on the second main body surface 30b. The first land recess 38X may include a first bottom surface 38Xa. The first bottom surface 38Xa may be formed in a substantially flat shape. The first bottom surface 38Xa may be a surface of the first land recess 38X located near the first main body surface 30a. The depth d4 of the first land recess 38X may be shallower than the depth d2 (see FIG. 8) from the second body surface 30b to the through portion 34, or may be equal to the depth d2. The depth d4 may be the distance from the second body surface 30b to the first bottom surface 38Xa. The depth d4 may be equal to the depth d3.

[0135] Next, the first liquid flow path section 60X and the second liquid flow path section 60Y will be described.

[0136] As shown in FIG. 3 and FIG. 8, the first liquid flow path portion 60X and the second liquid flow path portion 60Y may be formed between the first sheet 10 and the wick sheet 30. The first liquid flow path portion 60X is formed on the first main body surface 30a of the first land portion 33X. The second liquid flow path portion 60Y is formed on the first main body surface 30a of the second land portion 33Y. The liquid flow path portions 60X and 60Y may include a flow path through which the working fluid 2b mainly passes. The above-mentioned working steam 2a may pass through the flow path of the liquid flow path portions 60X and 60Y. The liquid flow path portions 60X and 60Y constitute a part of the above-mentioned sealed space 3 and communicate with the steam flow path portion 50. The liquid flow path portions 60X and 60Y are formed as capillary structures for transporting the working fluid 2b to the evaporation region SR. The liquid flow path portions 60X and 60Y may also be called wicks. The first liquid flow path portion 60X may be formed over the entire first main body surface 30a of each first land portion 33X. In this case, the Y-direction dimension of the first liquid flow path portion 60X may be equal to the width w1 of the first land portion 33X. The second liquid flow path portion 60Y may be formed over the entire first main body surface 30a of each second land portion 33Y. In this case, the X-direction dimension of the second liquid flow path portion 60Y may be equal to the width w2 of the second land portion 33Y. Although not shown in FIG. 6 and the like, a liquid flow path portion similar to the liquid flow path portions 60X and 60Y may be formed in the inner part of the first main body surface 30a of the frame body portion 32. Although not shown, a liquid flow path portion may be formed in the second main body surface 30b of the land portions 33X and 33Y, or a liquid flow path portion may be formed in the second main body surface 30b of the frame body portion 32.

[0137] The first liquid flow path section 60X will be described.

[0138] 12 and 13, the first liquid flow path portion 60X may include a plurality of first mainstream grooves 61X and a plurality of first communication grooves 65X. The first mainstream grooves 61X and the first communication grooves 65X are flow paths through which the working fluid 2b passes. The first communication grooves 65X are connected to and communicate with the first mainstream grooves 61X.

[0139] The first main groove 61X and the first communication groove 65X may be located in the first main body surface 30a of the first land portion 33X. The first main groove 61X and the first communication groove 65X may communicate with the steam passages 51, 52.

[0140] As shown in Figs. 12 and 13, each of the first mainstream grooves 61X extends in the X direction. The first mainstream grooves 61X are aligned in the Y direction. The first mainstream grooves 61X have a small flow passage cross-sectional area so that the working fluid 2b flows mainly by capillary action. The flow passage cross-sectional area of ​​the first mainstream grooves 61X is smaller than the flow passage cross-sectional area of ​​the vapor passages 51, 52. The first mainstream grooves 61X are configured to transport the working fluid 2b condensed from the working steam 2a to the evaporation region SR.

[0141] The first mainstream groove 61X may be formed by etching the first main body surface 30a of the wick sheet 30 in an etching process described later. As shown in FIG. 8 and FIG. 12, the width w7 of the first mainstream groove 61X may be smaller than the width w3 of the first vapor flow path recess 53. The width w7 may be, for example, 5 μm to 400 μm. The width w7 refers to the dimension of the first mainstream groove 61X at the first main body surface 30a. The width w7 corresponds to the Y-direction dimension of the first mainstream groove 61X. The depth d5 ​​of the first mainstream groove 61X may be, for example, 3 μm to 300 μm. The depth d5 ​​corresponds to the Z-direction dimension of the first mainstream groove 61X.

[0142] As shown in Fig. 12 and Fig. 13, each of the first communication grooves 65X extends in a direction different from the X direction. In this embodiment, each of the first communication grooves 65X extends in the Y direction and is formed perpendicular to the first mainstream grooves 61X. The first communication grooves 65X have a small flow passage cross-sectional area so that the working fluid 2b flows mainly by capillary action. The flow passage cross-sectional area of ​​the first communication grooves 65X is smaller than the flow passage cross-sectional area of ​​the steam passages 51, 52.

[0143] The first communication groove 65X may be formed by etching the first main body surface 30a of the wick sheet 30 in an etching process described later, similar to the first mainstream groove 61X. As shown in FIG. 8 and FIG. 12, the width w8 of the first communication groove 65X may be smaller than the width w3 of the first vapor flow path recess 53. The width w8 may be equal to or different from the width w7 of the first mainstream groove 61X. The width w8 refers to the dimension of the first communication groove 65X on the first main body surface 30a. The width w8 corresponds to the X-direction dimension of the first communication groove 65X. The depth of the first communication groove 65X may be equal to the depth d5 ​​of the first mainstream groove 61X. The depth of the first communication groove 65X corresponds to the dimension of the first communication groove 65X in the Z direction.

[0144] The first communication grooves 65X constitute an edge side communication groove row 63Xa and an intermediate communication groove row 63Xb. The edge side communication groove row 63Xa is composed of a plurality of first communication grooves 65X arranged in the X direction, which connect the steam passages 51, 52 and the first main grooves 61X. The intermediate communication groove row 63Xb is composed of a plurality of first communication grooves 65X arranged in the Y direction, which connect two adjacent first main grooves 61X. The edge side communication groove row 63Xa is located between the steam passages 51, 52 and the intermediate communication groove row 63Xb. The intermediate communication groove row 63Xb is located in the first land portion 33X and arranged in the Y direction.

[0145] The X-direction interval p1 of the first communication grooves 65X constituting the edge side communication groove row 63Xa may be equal to the X-direction interval p2 of the first communication grooves 65X constituting each intermediate communication groove row 63Xb. The X-direction position of the first communication groove 65X constituting the edge side communication groove row 63Xa may be shifted from the X-direction position of the first communication groove 65X constituting the intermediate communication groove row 63Xb adjacent to the edge side communication groove row 63Xa. This shift amount may be half the X-direction intervals p1, p2 of the first communication grooves 65X. Similarly, the X-direction position of the first communication groove 65X constituting one of the two mutually adjacent intermediate communication groove rows 63Xb may be shifted from the X-direction position of the first communication groove 65X constituting the other intermediate communication groove row 63Xb.

[0146] As shown in FIG. 12 and FIG. 13, the first liquid flow path portion 60X may include a plurality of first protrusions 64X located on the first main body surface 30a of the first land portion 33X. The first protrusions 64X may be defined by the first mainstream groove 61X and the first communication groove 65X, or may be defined by the first mainstream groove 61X, the first communication groove 65X, and the steam passages 51, 52. The first protrusions 64X may be formed in a rectangular shape in a plan view such that the X direction is the longitudinal direction, or may be formed in a rounded rectangular shape. The first protrusions 64X are portions that are not etched in the etching process described later, and the material of the wick sheet 30 remains. The first protrusions 64X may be joined to the first sheet inner surface 10b of the first sheet 10. The first protrusions 64X may be positioned in a staggered manner. More specifically, the first protrusions 64X adjacent to each other in the Y direction may be shifted from each other in the X direction. This offset amount may be half the arrangement pitch of the first protrusions 64X in the X direction. The width of the first protrusions 64X may be equal to or different from the width w7 of the first main groove 61X. The width of the first protrusions 64X corresponds to the Y direction dimension of the first main body surface 30a.

[0147] Next, the second liquid flow path section 60Y will be described.

[0148] 13, the second liquid flow path portion 60Y may include a plurality of second mainstream grooves 61Y and a plurality of second communication grooves 65Y. The second mainstream groove 61Y and the second communication groove 65Y are grooves through which the working fluid 2b passes. The second communication groove 65Y is connected to and communicates with the second mainstream groove 61Y.

[0149] The second main groove 61Y and the second communication groove 65Y may be located in the first main body surface 30a of the second land portion 33Y. The second main groove 61Y and the second communication groove 65Y may communicate with the steam passages 51, 52.

[0150] As shown in FIG. 13, each of the second mainstream grooves 61Y extends in the Y direction. The second mainstream grooves 61Y are aligned in the X direction. The second mainstream grooves 61Y have a small flow passage cross-sectional area so that the working fluid 2b mainly flows by capillary action. The flow passage cross-sectional area of ​​the second mainstream grooves 61Y is smaller than the flow passage cross-sectional area of ​​the vapor passages 51 and 52. The second mainstream grooves 61Y are configured to transport the working fluid 2b condensed from the working vapor 2a to the evaporation region SR. The second mainstream grooves 61Y may be formed by an etching process similar to the above-mentioned first mainstream grooves 61X. The width w9 of the second mainstream grooves 61Y may be equal to the width w7 of the first mainstream grooves 61X. The width w9 means the dimension of the second mainstream grooves 61Y on the first main body surface 30a. The width w9 corresponds to the X-direction dimension of the second mainstream grooves 61Y. The depth of the second mainstream grooves 61Y may be equal to the depth d5 ​​of the first mainstream grooves 61X. The depth of the second main groove 61Y corresponds to the dimension of the second main groove 61Y in the Z direction.

[0151] As shown in FIG. 13, each of the second communication grooves 65Y extends in a direction different from the Y direction. In this embodiment, each of the second communication grooves 65Y extends in the X direction and is formed perpendicular to the second main groove 61Y. The second communication groove 65Y has a small flow passage cross-sectional area so that the working fluid 2b mainly flows by capillary action. The flow passage cross-sectional area of ​​the second communication groove 65Y is smaller than the flow passage cross-sectional area of ​​the steam passages 51, 52. The second communication groove 65Y may be formed by an etching process similar to the above-mentioned first communication groove 65X. The width of the second communication groove 65Y may be equal to the width of the first communication groove 65X. The width of the second communication groove 65Y means the dimension of the second communication groove 65Y on the first main body surface 30a, and corresponds to the Y direction dimension of the second communication groove 65Y. The depth of the second communication groove 65Y may be equal to the depth of the first communication groove 65X. The depth of the second communication groove 65Y corresponds to the dimension of the second communication groove 65Y in the Z direction.

[0152] The second communication grooves 65Y constitute an edge side communication groove row 63Ya and an intermediate communication groove row 63Yb. The edge side communication groove row 63Ya is composed of a plurality of second communication grooves 65Y arranged in the Y direction, which connect the steam passages 51, 52 and the second main groove 61Y. The intermediate communication groove row 63Yb is composed of a plurality of second communication grooves 65Y arranged in the X direction, which connect two adjacent second main grooves 61Y. The edge side communication groove row 63Ya is located between the steam passages 51, 52 and the intermediate communication groove row 63Yb. The intermediate communication groove row 63Yb is located in the second land portion 33Y and arranged in the X direction.

[0153] As with the first communication groove 65X described above, the Y-direction interval of the second communication grooves 65Y constituting the edge side communication groove row 63Ya may be equal to the Y-direction interval of the second communication grooves 65Y constituting each intermediate communication groove row 63Yb. The Y-direction position of the second communication groove 65Y constituting the edge side communication groove row 63Ya may be shifted from the Y-direction position of the second communication groove 65Y constituting the intermediate communication groove row 63Yb adjacent to the edge side communication groove row 63Ya. This shift amount may be half the Y-direction interval of the second communication grooves 65Y. Similarly, the Y-direction position of the second communication groove 65Y constituting one of the two mutually adjacent intermediate communication groove rows 63Yb may be shifted from the Y-direction position of the second communication groove 65Y constituting the other intermediate communication groove row 63Yb.

[0154] As shown in FIG. 13, the second liquid flow path portion 60Y may include a plurality of second convex portions 64Y located on the first main body surface 30a of the second land portion 33Y. The second convex portion 64Y may be defined by the second main groove 61Y and the second communication groove 65Y, or may be defined by the second main groove 61Y, the second communication groove 65Y, and the steam passages 51 and 52. The second convex portion 64Y may be formed in a rectangular shape in a plan view such that the Y direction is the longitudinal direction, or may be formed in a rounded rectangular shape. The second convex portion 64Y is a portion where the material of the wick sheet 30 remains without being etched in the etching process described later. The second convex portion 64Y may be joined to the first sheet inner surface 10b of the first sheet 10. The second convex portions 64Y may be located in a staggered manner. More specifically, the second convex portions 64Y adjacent to each other in the X direction may be shifted from each other in the Y direction. This amount of deviation may be half the arrangement pitch of the second protrusions 64Y in the Y direction.

[0155] 13, a groove connection portion 66 may be located at the land intersection 37. The groove connection portion 66 is connected to each of the first mainstream grooves 61X on both sides in the X direction and is connected to each of the second mainstream grooves 61Y on both sides in the Y direction. As a result, at each land intersection 37, each of the first mainstream grooves 61X located in the corresponding first land portion 33X and each of the second mainstream grooves 61Y located in the corresponding second land portion 33Y communicate with each other.

[0156] The groove connection portion 66 may include a plurality of first intersection grooves 67X and a plurality of second intersection grooves 67Y. The first intersection groove 67X and the second intersection groove 67Y may be located on the first main body surface 30a of the land intersection portion 37. The first intersection groove 67X and the second intersection groove 67Y may have a small flow passage cross-sectional area so that the working fluid 2b mainly flows by capillary action. The flow passage cross-sectional area of ​​the first intersection groove 67X is smaller than the flow passage cross-sectional area of ​​the steam passages 51, 52. The width w10 of the first intersection groove 67X may be equal to the width w7 of the first mainstream groove 61X. The width w10 corresponds to the Y-direction dimension of the first intersection groove 67X on the first main body surface 30a. The depth of the first intersection groove 67X may be equal to the depth d5 ​​of the first mainstream groove 61X. The depth of the first intersection groove 67X corresponds to the Z-direction dimension of the first intersection groove 67X. The width w11 of the second intersection groove 67Y may be equal to the width w9 of the second mainstream groove 61Y. The width w11 corresponds to the X-direction dimension of the second intersection groove 67Y on the first main body surface 30a. The depth of the second intersection groove 67Y may be equal to the depth of the second mainstream groove 61Y. The depth of the second intersection groove 67Y corresponds to the Z-direction dimension of the second intersection groove 67Y. The first intersection groove 67X and the second intersection groove 67Y may be formed by an etching process, similar to the above-mentioned mainstream grooves 61X and 61Y.

[0157] The first intersection grooves 67X extend in the X direction on the extension of the corresponding first mainstream grooves 61X. The second intersection grooves 67Y extend in the Y direction on the extension of the corresponding second mainstream grooves 61Y. The first intersection grooves 67X are aligned in the Y direction, and the second intersection grooves 67Y are aligned in the X direction. Each of the first intersection grooves 67X and each of the second intersection grooves 67Y intersect. The first intersection grooves 67X and the second intersection grooves 67Y may intersect in a cross shape. In this case, the first intersection grooves 67X and the second intersection grooves 67Y may be at least partially formed in a lattice shape. The first intersection grooves 67X and the second intersection grooves 67Y may be formed in a lattice shape as a whole or partially formed in a lattice shape as shown in FIG. 13. The first intersection grooves 67X and the second intersection grooves 67Y are connected to each other and configured to allow the hydraulic fluid 2b to flow therethrough.

[0158] The groove connection 66 may include a plurality of intersection protrusions 68 provided on the first main body surface 30a of the land intersection 37. The intersection protrusions 68 are defined by a first intersection groove 67X and two second intersection grooves 67Y. The intersection protrusions 68 may be formed in a rectangular or square shape along the X and Y directions in a plan view. The corners of the intersection protrusions 68 may be rounded. The intersection protrusions 68 are portions that are not etched in the etching process described below and where the material of the wick sheet 30 remains. The intersection protrusions 68 may be joined to the first sheet inner surface 10b of the first sheet 10. The intersection protrusions 68 may be aligned in both the X and Y directions.

[0159] The materials constituting the first sheet 10, the second sheet 20, and the wick sheet 30 are not particularly limited as long as they have a good thermal conductivity to the extent that the heat dissipation performance of the vapor chamber 1 can be ensured. For example, each of the sheets 10, 20, and 30 may be made of a metal material. For example, each of the sheets 10, 20, and 30 may contain copper or a copper alloy. Copper and copper alloys have good thermal conductivity and corrosion resistance when pure water is used as the working fluid. Examples of copper include pure copper and oxygen-free copper (C1020). Examples of copper alloys include copper alloys containing tin, copper alloys containing titanium (C1990, etc.), and Corson copper alloys (C7025, etc.), which are copper alloys containing nickel, silicon, and magnesium. An example of a copper alloy containing tin is phosphor bronze (C5210, etc.).

[0160] The thickness t1 of the vapor chamber 1 shown in FIG. 3 may be, for example, 100 μm to 500 μm. By making the thickness t1 100 μm or more, the vapor channel portion 50 can be properly secured. Therefore, the vapor chamber 1 can function properly. On the other hand, by making the thickness t1 500 μm or less, the thickness t1 can be prevented from becoming thick. Therefore, the vapor chamber 1 can be made thin.

[0161] The thickness of the wick sheet 30 may be greater than the thickness of the first sheet 10. Similarly, the thickness of the wick sheet 30 may be greater than the thickness of the second sheet 20. In the present embodiment, an example in which the thickness of the first sheet 10 and the thickness of the second sheet 20 are equal is shown. However, the present disclosure is not limited to this, and the thickness of the first sheet 10 and the thickness of the second sheet 20 may be different.

[0162] The thickness t2 of the first sheet 10 may be, for example, 6 μm to 100 μm. By making the thickness t2 of the first sheet 10 6 μm or more, the mechanical strength and long-term reliability of the first sheet 10 can be ensured. On the other hand, by making the thickness t2 of the first sheet 10 100 μm or less, the thickness t1 of the vapor chamber 1 can be prevented from becoming thick. The thickness t3 of the second sheet 20 may be equal to the thickness t2 of the first sheet 10, or may be different.

[0163] The thickness t4 of the wick sheet 30 may be, for example, 50 μm to 400 μm. By making the thickness t4 of the wick sheet 30 50 μm or more, the vapor flow path portion 50 can be properly secured. In this case, the vapor chamber 1 can function properly. On the other hand, by making the thickness t4 400 μm or less, the thickness t1 of the vapor chamber 1 can be prevented from becoming thick. Therefore, the vapor chamber 1 can be made thin. The thickness t4 of the wick sheet 30 may be the distance between the first main body surface 30a and the second main body surface 30b.

[0164] Next, a method for manufacturing the vapor chamber 1 of this embodiment having such a configuration will be described.

[0165] First, in a preparation step, the first sheet 10, the second sheet 20, and the wick sheet 30 are prepared. The preparation step may include an etching step of forming the wick sheet 30 by an etching process. In the etching step, the wick sheet 30 may be formed by an etching process using a patterned resist film (not shown) formed by a photolithography technique.

[0166] In the temporary fixing process, the first sheet 10, the wick sheet 30, and the second sheet 20 are temporarily fixed. For example, the sheets 10, 20, and 30 may be temporarily fixed by spot welding or laser welding. At this time, the sheets 10, 20, and 30 may be aligned using the alignment holes 12, 22, and 35 described above.

[0167] Next, in a bonding step, the first sheet 10, the wick sheet 30, and the second sheet 20 are permanently bonded together. The sheets 10, 20, and 30 may be bonded together by diffusion bonding.

[0168] After the joining step, as an injection step, the sealed space 3 is evacuated and the working fluid 2b is injected into the sealed space 3 from the injection part 4 (see FIG. 3).

[0169] After the injection step, the above-mentioned injection flow path 36 is sealed as a sealing step. This blocks communication between the sealed space 3 and the outside, and seals the sealed space 3. The sealed space 3 is filled with the working fluid 2b, and the working fluid 2b in the sealed space 3 is prevented from leaking to the outside.

[0170] In this manner, the vapor chamber 1 according to the present embodiment is obtained.

[0171] Next, a method for operating the vapor chamber 1, that is, a method for cooling the electronic device D, will be described.

[0172] The vapor chamber 1 obtained as described above is installed in a housing H of a mobile terminal or the like. When the electronic device D generates heat, the working liquid 2b present in the evaporation region SR receives heat from the electronic device D. The received heat is absorbed as latent heat, the working liquid 2b evaporates, and working vapor 2a is generated. The generated working vapor 2a diffuses in the first vapor passage 51 and the second vapor passage 52 that constitute the sealed space 3, as shown by the solid arrows in FIG. 6. More specifically, the working steam 2a generated in the land portions 33X, 33Y moves to the adjacent passage division portion 55. Then, the working steam 2a moves toward the condensation region CR in either direction of the dashed arrows shown in FIG. 9 through the first land recess 38X located in the first land portion 33X and the second land recess 38Y located in the second land portion 33Y.

[0173] In this way, the working steam 2a in each steam passage 51, 52 is diffused away from the evaporation region SR to the condensation region CR, which has a relatively low temperature. In the condensation region CR, the working steam 2a is cooled mainly by dissipating heat to the second sheet 20. The heat received by the second sheet 20 from the working steam 2a is transferred to the outside air via the housing member Ha (see FIG. 3). Although an example in which the region to the right of the evaporation region SR acts as the condensation region CR is shown in FIG. 6 and FIG. 7, the region to the left of the evaporation region SR can also act as the condensation region CR.

[0174] The working vapor 2a loses the latent heat absorbed in the evaporation region SR by dissipating heat to the second sheet 20 in the condensation region CR. As a result, the working vapor 2a condenses to generate the working liquid 2b. Meanwhile, the working liquid 2b continues to evaporate in the evaporation region SR. Therefore, the condensed working liquid 2b is transported toward the evaporation region SR by the capillary action of the mainstream grooves 61X, 61Y, as shown by the dashed arrow in FIG. 6. More specifically, the working liquid 2b moves from the vapor passages 51, 52 through the connecting grooves 65X, 65Y of the edge-side connecting groove row 63Xa to the mainstream grooves 61X, 61Y. The working liquid 2b is filled into each of the mainstream grooves 61X, 61Y and each of the connecting grooves 65X, 65Y. The filled working liquid 2b obtains a driving force toward the evaporation region SR by the capillary action of each of the mainstream grooves 61X, 61Y, and is smoothly transported toward the evaporation region SR.

[0175] In the liquid flow path sections 60X, 60Y, each of the main grooves 61X, 61Y communicates with the adjacent main grooves 61X, 61Y via the communication grooves 65X, 65Y of the intermediate communication groove rows 63Xb, 63Yb. This allows the working fluid 2b to move between the two adjacent main grooves 61X, 61Y. This provides a capillary action to the working fluid 2b in each of the main grooves 61X, 61Y, allowing the working fluid 2b to be smoothly transported toward the evaporation region SR.

[0176] The working fluid 2b that has reached the evaporation region SR receives heat from the electronic device D again and evaporates.

[0177] Here, consider a case where the amount of evaporation of the working fluid 2b is not uniform in the evaporation region SR. In this case, the amount of evaporation of the working fluid 2b is large in some of the first land portions 33X among the multiple first land portions 33X. In the case where there is no second land portion 33Y extending in the Y direction, the working fluid 2b is likely to be small in the first liquid flow path portion 60X located in the first land portion 33X where the amount of evaporation is large. On the other hand, the working fluid 2b is likely to be left over in the first liquid flow path portion 60X located in the other first land portions 33X.

[0178] In contrast, in this embodiment, there is a second land portion 33Y extending in the Y direction, and the second land portion 33Y intersects with each first land portion 33X at the land intersection portion 37. At the land intersection portion 37, the first mainstream groove 61X of the first land portion 33X and the second mainstream groove 61Y of the second land portion 33Y communicate with each other. The capillary action acts to transport the working fluid 2b to a position where there is less working fluid 2b. As a result, the working fluid 2b of the first mainstream groove 61X located in the other first land portion 33X is transported toward the first mainstream groove 61X located in the first land portion 33X where evaporation is activated. At this time, the working fluid 2b located in the first mainstream groove 61X moves to the second mainstream groove 61Y of the second land portion 33Y through the groove connection portion 66 located in the land intersection portion 37. Then, the working fluid 2b passes through the other groove connecting portion 66 and moves to the first mainstream groove 61X of the first land portion 33X where evaporation is activated. In this way, the working fluid 2b is transported to the first land portion 33X where evaporation is activated, and the amount of evaporation of the working fluid 2b increases. In this case, absorption of heat from the electronic device D is promoted, and the heat absorption efficiency of the electronic device D is improved.

[0179] The working vapor 2a evaporated from the working fluid 2b in the main grooves 61X, 61Y moves to the vapor passages 51, 52 through the communication grooves 65X, 65Y of the edge side communication groove rows 63Xa, 63Ya. Then, the working vapor 2a diffuses in each of the vapor passages 51 and 52. In this manner, the working fluids 2a and 2b circulate in the sealed space 3 while repeatedly undergoing phase changes, i.e., evaporation and condensation. This causes the heat of the electronic device D to be diffused and released. As a result, the electronic device D is cooled.

[0180] Thus, according to this embodiment, the first land portion 33X extending in the X direction and the second land portion 33Y extending in the Y direction intersect at the land intersection portion 37. At the land intersection portion 37, the first main grooves 61X located in the first land portion 33X and the second main grooves 61Y located in the second land portion 33Y communicate with each other. This allows the working fluid 2b flowing through the first main groove 61X of the first land portion 33X to pass through the second main groove 61Y of the second land portion 33Y and move to the first main groove 61X of the other first land portion 33X. Therefore, the working fluid 2b can be transported to the first land portion 33X where the amount of working fluid 2b is small, and the transport efficiency of the working fluid 2b can be improved. As a result, the heat dissipation performance of the vapor chamber 1 can be improved.

[0181] According to this embodiment, the second steam passage 52 located between two adjacent first land portions 33X includes passage dividing portions 55 located on both sides of the second land portion 33Y in the Y direction. The second land recess 38Y that connects the passage dividing portions 55 located on both sides in the X direction is located on the second main body surface 30b of the second land portion 33Y. The working steam 2a evaporated in the evaporation region SR moves from the land portions 33X, 33Y to the passage dividing portion 55 of the adjacent second steam passage 52. As a result, the working steam 2a can move in the X direction from the passage dividing portion 55 through the second land recess 38Y and can diffuse toward the condensation region CR. Therefore, the flow path of the working steam 2a can be prevented from being divided by the second land portion 33Y, and the transport efficiency of the working steam 2a can be improved. As a result, the heat dissipation performance of the vapor chamber 1 can be improved.

[0182] According to this embodiment, the first land portion 33X extends in the X direction beyond the land intersection portion 37, and the second land portion 33Y extends in the Y direction beyond the land intersection portion 37. This allows the first mainstream grooves 61X located on both sides of the land intersection portion 37 in the X direction to be arranged along the X direction. Therefore, when the amount of evaporation of the working fluid 2b in the other first land portion 33X is small, the working fluid 2b can be continuously moved in the X direction through the land intersection portion 37. Similarly, the second mainstream grooves 61Y located on both sides of the land intersection portion 37 in the Y direction can be arranged along the Y direction. Therefore, when the amount of evaporation of the working fluid 2b in the relatively distant first land portion 33X is large, the working fluid 2b can be continuously moved in the Y direction through the land intersection portion 37, and the working fluid 2b can be moved to the relatively distant first land portion 33X. In this way, the working fluid 2b can be transported to the first land portion 33X where the amount of the working fluid 2b is small, and the transport efficiency of the working fluid 2b can be improved. As a result, the heat dissipation performance of the vapor chamber 1 can be improved.

[0183] Furthermore, according to this embodiment, the land intersection 37 extends from the first body surface 30a to the second body surface 30b. This allows the first body surface 30a of the land intersection 37 to be joined to the first sheet 10, and the second body surface 30b of the land intersection 37 to be joined to the second sheet 20. This improves the mechanical strength of the vapor chamber 1.

[0184] Moreover, according to this embodiment, the second land recesses 38Y are located on both sides of the land intersection 37 in the Y direction. This makes it possible to prevent the second land recesses 38Y from being formed on the second main body surface 30b of the land intersection 37. This makes it possible to bond the second main body surface 30b of the land intersection 37 to the second sheet 20, thereby improving the mechanical strength of the vapor chamber 1.

[0185] Further, according to this embodiment, the first land recess 38X that connects the passage dividing portions 55 located on both sides in the Y direction is located on the second main body surface 30b of the first land portion 33X. The working steam 2a evaporated in the evaporation region SR moves from the land portions 33X, 33Y to the passage dividing portion 55 of the adjacent second steam passage 52. This allows the working steam 2a to move in the Y direction from the passage dividing portion 55 through the first land recess 38X and to diffuse toward the condensation region CR. Therefore, the flow path of the working steam 2a can be prevented from being divided by the first land portion 33X, and the transport efficiency of the working steam 2a can be improved. As a result, the heat dissipation performance of the vapor chamber 1 can be improved.

[0186] Furthermore, according to this embodiment, the first land recesses 38X are located on both sides of the land intersection 37 in the X direction. This makes it possible to prevent the first land recesses 38X from being formed on the second main body surface 30b of the land intersection 37. This makes it possible to bond the second main body surface 30b of the land intersection 37 to the second sheet 20, thereby improving the mechanical strength of the vapor chamber 1.

[0187] According to this embodiment, a plurality of first lands 33X and a plurality of second lands 33Y are located in the steam flow passage 50, and each of the first lands 33X and each of the second lands 33Y intersect at a plurality of land intersections 37. At each of the land intersections 37, each of the first mainstream grooves 61X located in the corresponding first land 33X and each of the second mainstream grooves 61Y located in the corresponding second land 33Y communicate with each other. This allows the working fluid 2b moving through the first mainstream groove 61X of each of the first land 33X to move to the first mainstream groove 61X of the other first land 33X through the second mainstream groove 61Y of each of the second land 33Y. Therefore, the amount of the working fluid 2b transported to the first land portion 33X where the amount of the working fluid 2b is small can be increased, and the transport efficiency of the working fluid 2b can be improved. As a result, the heat dissipation performance of the vapor chamber 1 can be improved.

[0188] According to this embodiment, the land intersections 37 are located in the evaporation region SR where the working fluid 2b evaporates. This makes it possible to uniformly transport the working fluid 2b to each of the lands 33X and each of the lands 33Y in the evaporation region SR. This improves the transport efficiency of the working fluid 2b.

[0189] According to the present embodiment, the groove connection portion 66 located at the land intersection portion 37 is connected to each of the first mainstream grooves 61X on both sides in the X direction, and is connected to each of the second mainstream grooves 61Y on both sides in the Y direction. This allows the transport direction of the working fluid 2b that reaches the groove connection portion 66 from the first mainstream groove 61X located on one side in the X direction to be changed to either the X direction or the Y direction. In this case, the transport direction of the working fluid 2b can be changed to a direction toward the first land portion 33X where the amount of working fluid 2b is small. Therefore, the working fluid 2b can be transported to the first land portion 33X where the amount of working fluid 2b is small, and the transport efficiency of the working fluid 2b can be improved.

[0190] According to this embodiment, the groove connection portion 66 includes a plurality of first intersection grooves 67X extending on the extension of the corresponding first mainstream grooves 61X and a plurality of second intersection grooves 67Y extending on the extension of the corresponding second mainstream grooves 61Y. Each of the first intersection grooves 67X and each of the second intersection grooves 67Y intersect with each other. This allows the working fluid 2b that has reached the groove connection portion 66 from the first mainstream groove 61X located on one side in the X direction to move to the first mainstream groove 61X located on the other side in the X direction, and also to move to the second mainstream grooves 61Y located on both sides in the Y direction. This allows the transport direction of the working fluid 2b to be changed toward the first land portion 33X where the working fluid 2b is less.

[0191] A modification of the above-described embodiment will now be described.

[0192] The first modified example will be described.

[0193] In the above-described first embodiment, an example has been described in which the land intersection 37 extends from the first main body surface 30a to the second main body surface 30b, and the second land recesses 38Y are located on both sides of the land intersection 37. However, the present disclosure is not limited to this. For example, as shown in FIG. 14, the second land recesses 38Y may extend through the land intersection 37 in the Y direction from a portion located on one side of the land intersection 37 in the Y direction to a portion located on the other side. In the example shown in FIG. 14, the second land recesses 38Y may be continuous in the Y direction from a portion on the left side of the land intersection 37 to a portion on the right side of the first land 33X. In this case, the land intersection 37 does not extend to the second main body surface 30b. A land intersection space 42 shown in FIG. 42 and FIG. 43 described later is formed in the land intersection 37. According to the example shown in FIG. 14, the flow path cross-sectional area of ​​the second land recess 38Y can be increased, and the flow path resistance of the working steam 2a can be reduced. This improves the transport efficiency of the working steam 2a. Also, according to the example shown in FIG. 14, the second land recess 38Y can be connected to two second steam passages 52 adjacent to each other in the Y direction. This allows the working steam 2a to move directly from one second steam passage 52 to the other second steam passage 52, and improves the transport efficiency of the working steam 2a.

[0194] In the example shown in Fig. 14, the land intersections 37 adjacent to the land intersections 37 overlapping the second land recesses 38Y may extend from the first body surface 30a to the second body surface 30b as shown in Fig. 10. The land intersections 37 overlapping the second land recesses 38Y shown in Fig. 14 and the land intersections 37 shown in Fig. 10 may be arranged alternately in the Y direction.

[0195] As shown in FIG. 15, the first land recess 38X may extend through the land intersection 37 in the X direction from a portion located on one side of the land intersection 37 in the X direction to a portion located on the other side. In the example shown in FIG. 15, the first land recess 38X may be continuous in the X direction from a portion on the left side of the land intersection 37 of the second land portion 33Y to a portion on the right side. In this case, the land intersection 37 does not extend to the second main body surface 30b. According to the example shown in FIG. 15, the flow path cross-sectional area of ​​the first land recess 38X can be increased, and the flow path resistance of the working steam 2a can be reduced. Therefore, the transport efficiency of the working steam 2a can be improved.

[0196] In the example shown in Fig. 15, the land intersections 37 adjacent to the land intersections 37 overlapping the first land recesses 38X may extend from the first body surface 30a to the second body surface 30b as shown in Fig. 11. The land intersections 37 overlapping the first land recesses 38X shown in Fig. 15 and the land intersections 37 shown in Fig. 11 may be arranged alternately in the X direction.

[0197] The second land recess 38Y shown in Fig. 14 and the first land recess 38X shown in Fig. 15 may overlap a common land intersection 37. The second land recess 38Y and the first land recess 38X may intersect in a cross shape in a plan view. Even in this case, the land intersection 37 overlapping the second land recess 38Y and the first land recess 38X and the land intersection 37 shown in Figs. 10 and 11 may be arranged alternately in the X direction and the Y direction.

[0198] A second modified example will be described.

[0199] In the above-mentioned first embodiment, an example in which the second bottom surface 38Ya of the second land recess 38Y is formed in a flat shape has been described. However, the present disclosure is not limited to this. For example, as shown in FIG. 16, the second bottom surface 38Ya of the second land recess 38Y may have a second protruding portion 38Yb extending in the X direction and protruding toward the second main body surface 30b. The second protruding portion 38Yb may be formed so as to protrude toward the second main body surface 30b while tapering when viewed in the X direction. The second protruding portion 38Yb may be spaced inward from the extension surface of the second main body surface 30b. In this case, the second protruding portion 38Yb may be spaced from the second sheet inner surface 20a of the second sheet 20. A plurality of second protruding portions 38Yb may be located in the second land recess 38Y. The cross-sectional shape of the second protruding portion 38Yb when viewed in the X direction is arbitrary. The second protrusion 38Yb may be formed by etching from the second main body surface 30b. Such second protrusion 38Yb can rectify the working steam 2a flowing through the second land recess 38Y in the X direction. This can reduce the flow resistance of the working steam 2a and improve the diffusion efficiency of the working steam 2a. Since the second protrusion 37Yb is spaced from the second sheet inner surface 20a, the flow resistance of the working steam 2a can be reduced and the transport efficiency of the working steam 2a can be improved.

[0200] Similarly, as shown in FIG. 16, the first land recess 38X may have a first protruding portion 38Xb extending in the Y direction and protruding toward the second main body surface 30b on the first bottom surface 38Xa of the first land recess 38X. The first protruding portion 38Xb may be spaced inward from the extension surface of the second main body surface 30b. In this case, the first protruding portion 38Xb may be spaced from the second sheet inner surface 20a of the second sheet 20. Such a first protruding portion 38Xb can straighten the working steam 2a flowing through the first land recess 38X in the Y direction. Therefore, the flow path resistance of the working steam 2a can be reduced, and the diffusion efficiency of the working steam 2a can be improved. Since the first protruding portion 38Xb is spaced from the second sheet inner surface 20a, the flow path resistance of the working steam 2a can be reduced, and the transport efficiency of the working steam 2a can be improved.

[0201] In the example shown in Fig. 16, the first protrusion 38Xb extends in the Y direction, and the second protrusion 38Yb extends in the X direction. However, the first protrusion 38Xb may extend in the X direction. The second protrusion 38Yb may extend in the Y direction. Alternatively, both the first protrusion 38Xb and the second protrusion 38Yb may extend in the X direction, or both may extend in the Y direction.

[0202] A third modified example will be described.

[0203] In the above-mentioned first embodiment, an example has been described in which the groove connection portion 66 includes a plurality of first intersection grooves 67X extending in the X direction and a plurality of second intersection grooves 67Y extending in the Y direction. However, the present disclosure is not limited to this. For example, as shown in FIG. 17 and FIG. 18, the groove connection portion 66 may include an intersection recess 69. The intersection recess 69 may be located on the first main body surface 30a of the land intersection portion 37. The intersection recess 69 is connected to each of the first mainstream grooves 61X and is also connected to each of the second mainstream grooves 61Y. This allows the intersection recess 69 to receive the working fluid 2b from each of the first mainstream grooves 61X located on one side in the X direction. The working fluid 2b in the intersection recess 69 can move to the first mainstream groove 61X located on the other side in the X direction and can move to the second mainstream grooves 61Y located on both sides in the Y direction. Therefore, the hydraulic fluid 2b can be transported uniformly to each of the main grooves 61X, 61Y.

[0204] 17, the intersection recess 69 is formed so as to straddle, in the Y direction, the multiple first mainstream grooves 61X located in the first land portion 33X. When viewed in the X direction, the intersection recess 69 overlaps the multiple first mainstream grooves 61X. The intersection recess 69 is formed so as to straddle, in the X direction, the multiple second mainstream grooves 61Y located in the second land portion 33Y. The intersection recess 69 overlaps with the second mainstream grooves 61Y when viewed in the Y direction. By configuring the intersection recess 69 in this manner, the transportation of the working fluid 2b to each of the first mainstream grooves 61X can be made uniform, and the transportation of the working fluid 2b to each of the second mainstream grooves 61Y can be made uniform. In addition, the flow path cross-sectional area of ​​the intersection recess 69 along the Y direction can be made larger than the total flow path cross-sectional area of ​​the first mainstream grooves 61X. The flow path cross-sectional area of ​​the intersection recess 69 along the X direction can be made larger than the total flow path cross-sectional area of ​​the second mainstream grooves 61Y. This can increase the volume of the intersection recess 69 and increase the amount of the working fluid 2b stored. The width w12 of the intersection recess 69 in the Y direction may be smaller than the width w1 (see FIG. 8) of the first land portion 33X. In this case, the first main body surface 30a can be left in the land intersection portion 37 and can be joined to the first sheet 10. However, the present disclosure is not limited thereto, and the width w12 may be equal to the width w1. The width w12 corresponds to the Y-direction dimension of the intersection recess 69 on the first main body surface 30a. Similarly, the width w13 of the intersection recess 69 in the X-direction may be smaller than or equal to the width w2 of the second land portion 33Y. The width w13 corresponds to the X-direction dimension of the intersection recess 69 on the first main body surface 30a.

[0205] As shown in Fig. 18, the intersection recess 69 may include an intersection bottom surface 69a. The intersection bottom surface 69a may be formed substantially flat. The intersection bottom surface 69a may be a surface of the intersection recess 69 located near the second body surface 30b. The depth d6 of the intersection recess 69 may be shallower than the depth d1 (see Fig. 8) from the first body surface 30a to the through portion 34, or may be equal to the depth d1. The depth d6 may be the distance from the first body surface 30a to the intersection bottom surface 69a.

[0206] A fourth modified example will be described.

[0207] In the above-described third modified example, the intersection bottom surface 69a of the intersection recess 69 is formed flat. However, the present disclosure is not limited to this. For example, as shown in FIG. 19 and FIG. 20, a plurality of intersection protrusions 69b protruding toward the first main body surface 30a may be located on the intersection bottom surface 69a of the intersection recess 69. The intersection protrusions 69b may be aligned in the X direction and also in the Y direction. The intersection protrusions 69b may be formed so as to protrude toward the first main body surface 30a while tapering when viewed in the X direction and the Y direction. The intersection protrusions 69b may be spaced inward from the first main body surface 30a. In this case, the intersection protrusions 69b may be spaced from the first sheet inner surface 10b of the first sheet 10. The height dimension of the intersection protrusions 69b from the intersection bottom surface 69a may be smaller than the depth dimension of the intersection recess 69. This height dimension corresponds to the Z direction dimension from the intersection bottom surface 69a to the tip of the intersection protrusion 69b. The cross-sectional shape of the intersection protrusions 69b is arbitrary. The intersection protrusion 69b may be formed by etching from the first main body surface 30a. According to the modification shown in Figs. 19 and 20, the amount of hydraulic fluid 2b stored can be increased, similar to the modification shown in Figs. 17 and 18. In addition, the intersection protrusion 69b can impart capillary action to the hydraulic fluid 2b. Since the intersection protrusion 69b is spaced from the first sheet inner surface 10b, a capillary action can be imparted between the intersection protrusion 69b and the first sheet inner surface 10b, and the hydraulic fluid 2b can be easily drawn into the intersection recess 69. In addition, a storage space for the hydraulic fluid 2b can be formed between the intersection protrusion 69b and the first sheet inner surface 10b, and the amount of storage can be increased.

[0208] The fifth modified example will be described.

[0209] In the above-mentioned first embodiment, an example has been described in which the width w10 of the first intersection groove 67X is equal to the width w7 of the first mainstream groove 61X, and the width w11 of the second intersection groove 67Y is equal to the width w9 of the second mainstream groove 61Y. However, the present disclosure is not limited to this. For example, as shown in FIG. 21, the width w14 of the first intersection groove 67X may be larger than the width w7 of the first mainstream groove 61X. The width w15 of the second intersection groove 67Y may be larger than the width w9 of the second mainstream groove 61Y. According to the example shown in FIG. 21, the flow path cross-sectional area of ​​the first intersection groove 67X can be larger than the flow path cross-sectional area of ​​the first mainstream groove 61X, and the flow path cross-sectional area of ​​the second intersection groove 67Y can be larger than the flow path cross-sectional area of ​​the second mainstream groove 61Y. This can increase the volume of each first intersection groove 67X and the volume of each second intersection groove 67Y, and can increase the storage amount of the hydraulic fluid 2b. Also, the flow path resistance of the hydraulic fluid 2b in the intersection grooves 67X, 67Y can be reduced. Also, the first intersection groove 67X can impart capillary action to the hydraulic fluid 2b in the X direction, and the second intersection groove 67Y can impart capillary action to the hydraulic fluid 2b in the Y direction.

[0210] In the example shown in FIG. 21, the number of the first intersection grooves 67X may be less than the number of the first mainstream grooves 61X located in the first land portion 33X. The number of the second intersection grooves 67Y may be less than the number of the second mainstream grooves 61Y located in the second land portion 33Y. This allows the planar shape of the intersection convex portion 68 to be large, and the bonding strength between the intersection convex portion 68 and the first sheet 10 to be improved. This allows the mechanical strength of the vapor chamber 1 to be improved. FIG. 21 shows an example in which five first intersection grooves 67X and seven first mainstream grooves 61X are formed, but the number of the first mainstream grooves 61X and the number of the first intersection grooves 67X are arbitrary. FIG. 21 shows an example in which five second intersection grooves 67Y and seven second mainstream grooves 61Y are formed, but the number of the second mainstream grooves 61Y and the number of the second intersection grooves 67Y are arbitrary.

[0211] The sixth modified example will be described.

[0212] In the above-described first embodiment, the first intersection groove 67X and the second intersection groove 67Y are formed in a lattice pattern. However, the present disclosure is not limited to this. For example, a groove connection portion 66 may be formed as shown in FIG. 22.

[0213] The groove connection portion 66 may include a first division groove 91X1, a second division groove 91X2, a third division groove 91Y1, and a fourth division groove 91Y2. The first division groove 91X1 may be located on one side in the X direction. The second division groove 91X2 may be located on the other side in the X direction. The second division groove 91X2 may be located on an extension of the first division groove 91X1. The first division groove 91X1 and the second division groove 91X2 may be connected to the corresponding first main groove 61X. The third division groove 91Y1 may be located on one side in the Y direction. The fourth division groove 91Y2 may be located on the other side in the Y direction. The fourth division groove 91Y2 may be located on an extension of the third division groove 91Y1. The third division groove 91Y1 and the fourth division groove 91Y2 may be connected to the corresponding second main groove 61Y.

[0214] The first division groove 91X1 and the third division groove 91Y1 may be connected at the first groove intersection 93a. The second division groove 91X2 may not be connected to the first groove intersection 93a. The intersection protrusion 68 may be located between the first groove intersection 93a and the second division groove 91X2. The fourth division groove 91Y2 may not be connected to the first groove intersection 93a. The intersection protrusion 68 may be located between the first groove intersection 93a and the fourth division groove 91Y2. In the example shown in FIG. 22, the first division groove 91X1 and the third division groove 91Y1 may form an L-shaped flow path at the first groove intersection 93a.

[0215] The groove connection portion 66 may include another first division groove 92X1, another second division groove 92X2, another third division groove 92Y1, and another fourth division groove 92Y2. The first division groove 92X1 may be located on one side in the X direction. The second division groove 92X2 may be located on the other side in the X direction. The second division groove 92X2 may be located on an extension of the first division groove 92X1. The first division groove 92X1 and the second division groove 92X2 may be connected to the corresponding first main groove 61X. The third division groove 92Y1 may be located on one side in the Y direction. The fourth division groove 92Y2 may be located on the other side in the Y direction. The fourth division groove 92Y2 may be located on an extension of the third division groove 92Y1. The third division groove 92Y1 and the fourth division groove 92Y2 may be connected to the corresponding second main groove 61Y.

[0216] The second division groove 92X2 and the fourth division groove 92Y2 may be connected at the second groove intersection 93b. The first division groove 92X1 may not be connected to the second groove intersection 93b. The intersection convex portion 68 may be located between the second groove intersection 93b and the first division groove 92X1. The third division groove 92Y1 may not be connected to the second groove intersection 93b. The intersection convex portion 68 may be located between the second groove intersection 93b and the third division groove 92Y1. In this case, the second division groove 92X2 and the fourth division groove 92Y2 may form an L-shaped flow path at the second groove intersection 93b. As shown in FIG. 22, the intersection convex portion 68 may be formed in a cross shape in a plan view, or may divide some of the division grooves as described above.

[0217] 22, as described above, the second division groove 91X2 and the fourth division groove 91Y2 are not connected to the first groove intersection 93a. This makes it possible to suppress a decrease in capillary action at the first groove intersection 93a, and to improve the transport efficiency of the working fluid 2b between the first main groove 61X located in the first land portion 33X and the second main groove 61Y located in the second land portion 33Y. Similarly, the transport efficiency of the working fluid 2b can be improved at the second groove intersection 93b.

[0218] The first groove intersection 93a is not necessarily connected to both the second division groove 91X2 and the fourth division groove 91Y2. For example, if one of the second division groove 91X2 and the fourth division groove 91Y2 is not connected to the first groove intersection 93a, the other may be connected. Even in this case, the capillary action at the first groove intersection 93a is prevented from decreasing, and the transport efficiency of the hydraulic fluid 2b can be improved. The same applies to the second groove intersection 93b.

[0219] The first division groove 91X1 and the first division groove 92X1 may be connected by a first connection groove 94X1. The first connection groove 94X1 may extend in the Y direction. This allows the hydraulic fluid 2b to travel between the first division groove 91X1 and the first division groove 92X1, and allows the hydraulic fluid 2b to be transported from the first main mainstream groove 61X to the second main mainstream groove 61Y located on both sides in the Y direction. The second division groove 91X2 and the second division groove 92X2 may also be connected by a second connection groove 94X2 similar to the first connection groove 94X1. Similarly, the third division groove 91Y1 and the third division groove 92Y1 may also be connected by a third connection groove 94Y1, and the fourth division groove 91Y2 and the fourth division groove 92Y2 may also be connected by a fourth connection groove 94Y2.

[0220] The width of each dividing groove 91X1, 91X2, 92X1, 92X2 and the width of each connecting groove 94Y1, 94Y2 shown in FIG. 22 may be equal to the width w7 of the first mainstream groove 61X. The depth of each dividing groove 91X1, 91X2, 92X1, 92X2 and the depth of each connecting groove 94Y1, 94Y2 may be equal to the depth d5 ​​of the first mainstream groove 61X. The width of each dividing groove 91Y1, 91Y2, 92Y1, 92Y2 and the width of each connecting groove 94X1, 94X2 may be equal to the width w9 of the second mainstream groove 61Y. The depth of each dividing groove 91Y1, 91Y2, 92Y1, 92Y2 and the depth of each connecting groove 94X1, 94X2 may be equal to the depth of the second mainstream groove 61Y. Each dividing groove and each connecting groove may be formed by etching, similarly to the first mainstream groove 61X and the second mainstream groove 61Y.

[0221] The seventh modified example will be described.

[0222] In the above-described first embodiment, an example has been described in which the X-direction interval p1 (see FIG. 12) of the first communication grooves 65X constituting the edge side communication groove row 63Xa is equal to the X-direction interval p2 (see FIG. 12) of the first communication grooves 65X constituting the intermediate communication groove row 63Xb. However, the present disclosure is not limited to this. For example, as shown in FIG. 23, the X-direction interval p3 of the first communication grooves 65X of the edge side communication groove row 63Xa may be smaller than the X-direction interval p4 of the first communication grooves 65X of the intermediate communication groove row 63Xb.

[0223] In the example shown in FIG. 23, a plurality of edge side connecting grooves 95Xa and a plurality of intermediate connecting grooves 95Xb may be located in the first main body surface 30a of the first land portion 33X. The edge side connecting groove 95Xa constitutes the edge side connecting groove row 63Xa, and the intermediate connecting groove 95Xb constitutes the intermediate connecting groove row 63Xb. The edge side connecting groove 95Xa connects the steam passages 51, 52 and the first main groove 61X adjacent to the steam passages 51, 52. The edge side connecting groove 95Xa extends in the Y direction and is aligned in the X direction. The intermediate connecting groove 95Xb connects two first main grooves 61X adjacent to each other. The intermediate connecting groove 95Xb extends in the Y direction and is aligned in the X direction.

[0224] As shown in FIG. 23, the interval p3 between two adjacent edge side connecting grooves 95Xa in the X direction may be smaller than the interval p4 between two adjacent intermediate connecting grooves 95Xb in the X direction. The interval p3 between two adjacent edge side connecting grooves 95Xa may be equal to the interval p5 between two adjacent second intersection grooves 67Y. By reducing the interval p3 between the edge side connecting grooves 95Xa, the number of edge side connecting grooves 95Xa can be increased, and the flow resistance between the first liquid flow path section 60X and the steam passages 51, 52 can be reduced. Therefore, when the land intersection section 37 is located in the evaporation region SR, the flow resistance of the working steam 2a from the first liquid flow path section 60X to the steam passages 51, 52 can be reduced, and the transport efficiency of the working steam 2a can be improved. When the land intersection portion 37 is located in the condensation region CR, the flow resistance of the working fluid 2b from the vapor passages 51, 52 to the first liquid flow passage portion 60X can be reduced, and the transport efficiency of the working fluid 2b can be improved.

[0225] As with the first connecting grooves 65X, for example, as shown in FIG. 23, the Y-direction spacing of the second connecting grooves 65Y in the edge side connecting groove row 63Ya may be smaller than the Y-direction spacing of the second connecting grooves 65Y in the intermediate connecting groove row 63Yb.

[0226] Similar to the first land portion 33X, a plurality of edge side connecting grooves 95Ya and a plurality of intermediate connecting grooves 95Yb may be located on the first main body surface 30a of the second land portion 33Y. The edge side connecting groove 95Ya constitutes the edge side connecting groove row 63Ya, and the intermediate connecting groove 95Yb constitutes the intermediate connecting groove row 63Yb. The edge side connecting groove 95Ya connects the steam passages 51, 52 and the second main groove 61Y adjacent to the steam passages 51, 52. The edge side connecting groove 95Ya extends in the X direction and is aligned in the Y direction. The intermediate connecting groove 95Yb connects two adjacent second main grooves 61Y. The intermediate connecting groove 95Yb extends in the X direction and is aligned in the Y direction.

[0227] As shown in FIG. 23, the distance in the Y direction between two adjacent edge side connecting grooves 95Ya may be smaller than the distance in the Y direction between two adjacent intermediate connecting grooves 95Yb. The interval between two adjacent edge-side connecting grooves 95Ya may be equal to the interval between two adjacent first intersection grooves 67X. By reducing the interval between the edge-side connecting grooves 95Ya, the number of edge-side connecting grooves 95Ya can be increased, and the flow resistance between the second liquid flow path section 60Y and the steam passages 51, 52 can be reduced. Therefore, when the land intersection section 37 is located in the evaporation region SR, the flow resistance of the working steam 2a from the second liquid flow path section 60Y to the steam passages 51, 52 can be reduced, and the transport efficiency of the working steam 2a can be improved. When the land intersection section 37 is located in the condensation region CR, the flow resistance of the working fluid 2b from the steam passages 51, 52 to the second liquid flow path section 60Y can be reduced, and the transport efficiency of the working fluid 2b can be improved.

[0228] In the first land portion 33X, except for the periphery of the land intersection portion 37, the interval p3 of the edge side connecting grooves 95Xa does not have to be smaller than the interval p4 of the intermediate connecting grooves 96Xb. In this case, as shown in Fig. 12, the interval p1 of the first connecting grooves 65X constituting the edge side connecting groove row 63Xa may be equal to the interval p2 of the first connecting grooves 65X constituting the intermediate connecting groove row 63Xb. The same applies to the intervals of the edge side connecting grooves 95Ya and the intervals of the intermediate connecting grooves 95Yb in the second land portion 33Y.

[0229] The eighth modified example will now be described.

[0230] In the above-described first embodiment, an example has been described in which the X-direction position of the first communication groove 65X constituting one of the two communication groove rows 63Xa, 63Xb adjacent to each other in the Y direction is shifted from the X-direction position of the first communication groove 65X constituting the other communication groove row 63Xa, 63Xb. However, the present disclosure is not limited to this.

[0231] For example, as shown in FIG. 24, the first communication groove 65X may extend in the Y direction beyond the first mainstream groove 61X. In this case, the first mainstream groove 61X and the first communication groove 65X may cross each other. The first communication groove 65X may extend in the Y direction over the entire width of the first land portion 33X in the Y direction. More specifically, the first communication groove 65X may be connected to the passage dividing portion 55 located on one side of the first land portion 33X in the Y direction and connected to the passage dividing portion 55 located on the other side. In the example shown in FIG. 24, the multiple first mainstream grooves 61X and the multiple first communication grooves 65X may be formed in a lattice shape. Each first mainstream groove 61X and each first communication groove 65X are connected to each other, and are configured so that the working fluid 2b can move back and forth. Thus, according to the example shown in FIG. 24, the transportation amount of the working fluid 2b in each first mainstream groove 61X can be made uniform.

[0232] Similarly, in the above-described first embodiment, an example has been described in which the Y-direction position of the second communication groove 65Y constituting one of the two communication groove rows 63Ya, 63Yb adjacent to each other in the X-direction is shifted from the Y-direction position of the second communication groove 65Y constituting the other communication groove row 63Ya, 63Yb. However, the present disclosure is not limited to this.

[0233] For example, as shown in FIG. 24, the second communication groove 65Y may extend in the X direction beyond the second main groove 61Y. In this case, the second main groove 61Y and the second communication groove 65Y may cross each other. The second communication groove 65Y may extend in the X direction over the entire width of the second land portion 33Y in the X direction. More specifically, the second communication groove 65Y may be connected to the passage dividing portion 55 located on one side of the second land portion 33Y in the X direction and connected to the passage dividing portion 55 located on the other side. In the example shown in FIG. 24, the multiple second main grooves 61Y and the multiple second communication grooves 65Y may be formed in a lattice shape. The second main grooves 61Y and the second communication grooves 65Y are connected to each other, and are configured to allow the working fluid 2b to move in and out. Thus, according to the example shown in FIG. 24, the transport amount of the working fluid 2b in each second main groove 61Y can be made uniform.

[0234] In the first land portion 33X, except for the periphery of the land intersection portion 37, the first mainstream grooves 61X and the first communication grooves 65X do not have to intersect in a cross shape and may be formed as shown in Fig. 12. The same applies to the second mainstream grooves 61Y and the second communication grooves 65Y in the second land portion 33Y.

[0235] The ninth modified example will be described.

[0236] In the above-described first embodiment, an example in which a plurality of land intersections 37 are located in the evaporation region SR has been described. However, the present disclosure is not limited to this. For example, a plurality of land intersections 37 may be located in the condensation region CR. This allows the working fluid 2b that has moved to the first mainstream groove 61X of the first land portion 33X to be transported to another first land portion 33X located in the condensation region CR through the second mainstream groove 61Y of the second land portion 33Y. This makes it possible to suppress the condensed working fluid 2b from being biased in the condensation region CR, thereby improving the transport efficiency of the working fluid 2b.

[0237] The tenth modified example will now be described.

[0238] In the above-mentioned first embodiment, an example has been described in which the wick sheet 30 includes a first land portion 33X extending in the X direction and a second land portion 33Y extending in the Y direction. However, the present disclosure is not limited to this. For example, as shown in FIG. 25 and FIG. 26, the wick sheet 30 may include a first land portion 33A extending in a first direction A, a second land portion 33B extending in a second direction B, and a third land portion 33C extending in a third direction C. The third direction C is different from the first direction A and different from the second direction B. The angle between the first direction A and the second direction B may be 120°, the angle between the second direction B and the third direction C may be 120°, and the angle between the third direction C and the first direction A may be 120°.

[0239] The first land portion 33A, the second land portion 33B, and the third land portion 33C may intersect at the land intersection portion 37. The first land portion 33A may terminate at the land intersection portion 37 without going beyond the land intersection portion 37. The second land portion 33B may terminate at the land intersection portion 37 without going beyond the land intersection portion 37. The third land portion 33C may terminate at the land intersection portion 37 without going beyond the land intersection portion 37. The first land portion 33A, the second land portion 33B, and the third land portion 33C may be formed in the same manner as the first land portion 33X and the second land portion 33Y according to the first embodiment described above.

[0240] 26, the steam flow path section 50 may be configured by a plurality of passage division sections 55. Each passage division section 55 may be located at a position partitioned by a first land section 33A, a second land section 33B, and a third land section 33C.

[0241] More specifically, as shown in FIG. 26, the passage dividing portions 55 are located on both sides of the first land portion 33A in the first direction A. The passage dividing portions 55 are located on both sides of the first land portion 33A in the direction perpendicular to the first direction A. The passage dividing portions 55 are located on both sides of the second land portion 33B in the second direction B. The passage dividing portions 55 are located on both sides of the second land portion 33B in the direction perpendicular to the second direction B. The passage dividing portions 55 are located on both sides of the third land portion 33C in the third direction C. The passage dividing portions 55 are located on both sides of the third land portion 33C in the direction perpendicular to the third direction C. In this way, three passage dividing portions 55 are formed around the land intersection portion 37. The passage dividing portion 55 is an example of a first space dividing portion, an example of a second space dividing portion, and an example of a third space dividing portion. Each passage dividing portion 55 may be formed in a hexagonal shape along the first direction A, the second direction B, and the third direction C in a plan view.

[0242] A first land recess 38A connecting the passage dividing portions 55 located on both sides may be located in the second main body surface 30b of the first land portion 33A. A second land recess 38B connecting the passage dividing portions 55 located on both sides may be located in the second main body surface 30b of the second land portion 33B. A third land recess 38C connecting the passage dividing portions 55 located on both sides may be located in the second main body surface 30b of the third land portion 33C. The first land recess 38A, the second land recess 38B, and the third land recess 38C may be formed in the same manner as the first land recess 38X and the second land recess 38Y according to the first embodiment described above.

[0243] As shown in FIG. 27, a first liquid flow path portion 60A may be formed in the first main body surface 30a of the first land portion 33A. The first liquid flow path portion 60A may include a plurality of first mainstream grooves 61A extending in the first direction A and a plurality of first communication grooves 65A extending in a direction perpendicular to the first direction A. The first mainstream groove 61A and the first communication groove 65A may be formed in the same manner as the first mainstream groove 61X and the first communication groove 65X according to the first embodiment described above. In FIG. 27, in order to simplify the drawing, the first mainstream groove 61A and the first communication groove 65A are each shown by a single straight line. The same applies to the mainstream grooves 61B, 61C and the communication grooves 65B, 65C described later.

[0244] A second liquid flow path portion 60B may be formed in the first main body surface 30a of the second land portion 33B. The second liquid flow path portion 60B may include a plurality of second mainstream grooves 61B extending in the second direction B and a plurality of second communication grooves 65B extending in a direction perpendicular to the second direction B. The second mainstream groove 61B and the second communication groove 65B may be formed in the same manner as the first mainstream groove 61X and the first communication groove 65X according to the first embodiment described above.

[0245] A third liquid flow path portion 60C may be formed in the first main body surface 30a of the third land portion 33C. The third liquid flow path portion 60C may include a plurality of third mainstream grooves 61C extending in the third direction C and a plurality of third communication grooves 65C extending in a direction perpendicular to the third direction C. The third mainstream groove 61C and the third communication groove 65C may be formed in the same manner as the first mainstream groove 61X and the first communication groove 65X according to the first embodiment described above.

[0246] At a groove connection portion 66 located at the land intersection portion 37, each of the first mainstream grooves 61A, each of the second mainstream grooves 61B, and each of the third mainstream grooves 61C may be connected.

[0247] In this modified example, as in the first embodiment, the transport efficiency of the working fluid 2b can be improved, and the transport efficiency of the working vapor 2a can be improved, so that the heat dissipation performance of the vapor chamber 1 can be improved.

[0248] The eleventh modified example will now be described.

[0249] The wick sheet 30 may be configured as shown in FIG. 28, for example. In the example shown in FIG. 28, a plurality of second lands 33Y intersect with one first land 33X, and extend in the Y direction beyond each land intersection 37. The region in which the second land 33Y extends in the Y direction may be located in the evaporation region SR. Outside the region in which the second land 33Y extends in the Y direction, a third land 33U extending in different directions in the X direction and the Y direction may be located. The third land 33U may intersect with the second land 33Y at a land intersection 37, and the second land 33Y and the third land 33U may terminate at this land intersection 37. In this case, the second land 33Y and the third land 33U are formed in a bent planar shape. In the other land intersections 37, the second land portions 33Y may extend beyond the land intersections 37 in the Y direction, and the third land portions 33U may terminate at the land intersections 37.

[0250] 28, the steam flow path section 50 may be configured with a plurality of passage division sections 55. Each passage division section 55 may be located at a position partitioned by a first land section 33X, a second land section 33Y, and a third land section 33U.

[0251] More specifically, as shown in FIG. 28, a passage dividing portion 55 is located on both sides of the first land portion 33X in the X direction. The two passage dividing portions 55 are located on both sides of the first land portion 33X in the Y direction. A passage dividing portion 55 is located on both sides of the second land portion 33Y in the Y direction. The two passage dividing portions 55 are located on both sides of the second land portion 33Y in the X direction. A passage dividing portion 55 is located on both sides of the third land portion 33U. The two passage dividing portions 55 are located on both sides of the third land portion 33U in a direction perpendicular to the direction in which the third land portion 33U extends.

[0252] 28, a first land recess 38X connecting the passage dividing portions 55 located on both sides may be located in the second main body surface 30b of the first land portion 33X. A second land recess 38Y connecting the passage dividing portions 55 located on both sides may be located in the second main body surface 30b of the second land portion 33Y. A groove connection portion 66 located in the land intersection portion 37 may connect each of the first mainstream grooves 61X and each of the second mainstream grooves 61Y.

[0253] A similar second land recess 38Y may be located at a land intersection 37 where the second land portion 33Y and the third land portion 33U intersect. A third land recess 38U connecting the passage dividing portions 55 located on both sides of the third land portion 33U may be located on the second main body surface 30b of the third land portion 33U. The third land recess 38U may be formed in the same manner as the first land recess 38X and the second land recess 38Y according to the first embodiment described above.

[0254] In this modified example, as in the first embodiment, the transport efficiency of the working fluid 2b can be improved, and the transport efficiency of the working vapor 2a can be improved, so that the heat dissipation performance of the vapor chamber 1 can be improved.

[0255] The twelfth modified example will now be described.

[0256] The wick sheet 30 may be configured as shown in FIG. 29, for example. In the example shown in FIG. 29, the wick sheet 30 may include a first land portion 33M extending in a first direction M and a second land portion 33N extending in a second direction N. In the example shown in FIG. 29, the first land portion 33M extends radially, and the first direction M is along the radial direction. The second land portion 33N extends in the circumferential direction, and the second direction N is along a circumferential direction different from the first direction M. The first land portion 33M and the second land portion 33N may intersect at a land intersection portion 37. The first land portion 33M may extend in the first direction M beyond the land intersection portion 37. The second land portion 33N may extend in the second direction N beyond the land intersection portion 37. The first land portion 33M and the second land portion 33N may be formed similarly to the first land portion 33X and the second land portion 33Y according to the first embodiment described above. The region shown in FIG. 29 may be located in the evaporation region SR.

[0257] 29, the steam flow path portion 50 may be configured by a plurality of passage division portions 55. Each passage division portion 55 may be located at a position partitioned by a first land portion 33M and a second land portion 33N.

[0258] More specifically, as shown in Fig. 29, the passage dividing portions 55 are located on both sides of the first land portion 33M in the first direction M. The passage dividing portions 55 are located on both sides of the first land portion 33M in the direction perpendicular to the first direction M. The passage dividing portions 55 are located on both sides of the second land portion 33N in the second direction N. The passage dividing portions 55 are located on both sides of the second land portion 33N in the direction perpendicular to the second direction N. In this way, four passage dividing portions 55 are formed around the land intersection portion 37.

[0259] A first land recess 38M connecting the passage dividing portions 55 located on both sides may be located in the second main body surface 30b of the first land portion 33M. A second land recess 38N connecting the passage dividing portions 55 located on both sides may be located in the second main body surface 30b of the second land portion 33N. The first land recess 38M and the second land recess 38N may be formed in the same manner as the first land recess 38X and the second land recess 38Y according to the first embodiment described above.

[0260] As shown in FIG. 30, a first liquid flow path portion 60M may be formed in the first main body surface 30a of the first land portion 33M. The first liquid flow path portion 60M may include a plurality of first mainstream grooves 61M extending in a first direction M and a plurality of first communication grooves 65M extending in a direction perpendicular to the first direction M. The first mainstream groove 61M and the first communication groove 65M may be formed in the same manner as the first mainstream groove 61X and the first communication groove 65X according to the first embodiment described above. In FIG. 30, in order to simplify the drawing, the first mainstream groove 61M and the first communication groove 65M are each shown by a single straight line. The same applies to the main mainstream groove 61N and the communication groove 65N described later.

[0261] A second liquid flow path portion 60N may be formed in the first main body surface 30a of the second land portion 33N. The second liquid flow path portion 60N may include a plurality of second mainstream grooves 61N extending in the second direction N and a plurality of second communication grooves 65N extending in a direction perpendicular to the second direction N. The second mainstream groove 61N and the second communication groove 65N may be formed in the same manner as the first mainstream groove 61X and the first communication groove 65X according to the first embodiment described above. Each of the first mainstream grooves 61M and each of the second mainstream grooves 61N may be connected to a groove connection portion 66 located at the land intersection portion 37.

[0262] In this modified example, as in the first embodiment, the transport efficiency of the working fluid 2b can be improved, and the transport efficiency of the working vapor 2a can be improved, so that the heat dissipation performance of the vapor chamber 1 can be improved.

[0263] The thirteenth modified example will now be described.

[0264] The wick sheet 30 may be configured as shown in FIG. 31, for example. In the example shown in FIG. 31, the wick sheet 30 may include a first land 33P extending in a first direction P, a second land 33Q extending in a second direction Q, and a third land 33R extending in a third direction R. The first direction P, the second direction Q, and the third direction R are different directions from each other. In general, the first land 33P extends radially, and the first direction P is along the radial direction. The second land 33Q and the third land 33R intersect with one first land 33P. The first land 33P extends in the first direction P beyond the land intersection 37. The second land 33Q and the third land 33R may terminate at the land intersection 37. The region shown in FIG. 31 may be located in the evaporation region SR. Here, a land intersection 37 shown in Fig. 31 will be representatively described. The first direction P, second direction Q, and third direction R shown in Fig. 31 indicate the directions corresponding to the first land portion 33P, the second land portion 33Q, and the third land portion 33R that intersect at this land intersection 37. Therefore, the directions corresponding to the lands that intersect with different land intersections 37 may be different from the first direction P, the second direction Q, and the third direction R shown in Fig. 31.

[0265] 31, the steam flow path section 50 may be configured with a plurality of passage division sections 55. Each passage division section 55 may be located at a position partitioned by a first land section 33P, a second land section 33Q, and a third land section 33R.

[0266] More specifically, as shown in FIG. 31, the passage dividing portions 55 are located on both sides of the first land portion 33P in the first direction P. The passage dividing portions 55 are located on both sides of the first land portion 33P in the direction perpendicular to the first direction P. The passage dividing portions 55 are located on both sides of the second land portion 33Q in the second direction Q. The passage dividing portions 55 are located on both sides of the second land portion 33Q in the direction perpendicular to the second direction Q. The passage dividing portions 55 are located on both sides of the third land portion 33R in the third direction R. The passage dividing portions 55 are located on both sides of the third land portion 33R in the direction perpendicular to the third direction R. In this way, four passage dividing portions 55 are formed around the land intersection portion 37.

[0267] 31, a first land recess 38P connecting the passage dividing portions 55 located on both sides may be located in the second body surface 30b of the first land portion 33P. A second land recess 38Q connecting the passage dividing portions 55 located on both sides may be located in the second body surface 30b of the second land portion 33Q. A third land recess 38R connecting the passage dividing portions 55 located on both sides may be located in the second body surface 30b of the third land portion 33R.

[0268] A first liquid flow path portion similar to the first liquid flow path portion 60X may be formed on the first main body surface 30a of the first land portion 33P. A second liquid flow path portion similar to the first liquid flow path portion 60X may be formed on the first main body surface 30a of the second land portion 33Q. A third liquid flow path portion similar to the first liquid flow path portion 60X may be formed on the first main body surface 30a of the third land portion 33R. The main stream grooves of each liquid flow path portion may be connected to each other at a groove connection portion 66 located at the land intersection portion 37.

[0269] In this modified example, as in the first embodiment, the transport efficiency of the working fluid 2b can be improved, and the transport efficiency of the working vapor 2a can be improved, so that the heat dissipation performance of the vapor chamber 1 can be improved.

[0270] The fourteenth modified example will now be described.

[0271] The wick sheet 30 may be configured as shown in FIG. 32, for example. In the example shown in FIG. 32, the wick sheet 30 may include a first land portion 33V extending in a first direction V and a second land portion 33W extending in a second direction W. The first direction V and the second direction W are different from each other. The second land portion 33W intersects with one first land portion 33V. The first land portion 33V may extend in the first direction V beyond the land intersection portion 37. However, the directions in which the two first land portions 33V located on both sides of the land intersection portion 37 extend may be different from each other. In this case, each first land portion 33V may terminate at the land intersection portion 37. The second land portion 33W may extend in the second direction W beyond the land intersection portion 37. However, the directions in which the two second land portions 33W located on both sides of the land intersection portion 37 extend may be different from each other. In this case, each second land portion 33W may terminate at a land intersection portion 37. The region shown in FIG. 32 may be located in the evaporation region SR. Here, the land intersection portion 37 shown in FIG. 32 will be representatively described. The first direction V and the second direction W shown in FIG. 32 indicate the directions corresponding to the first land portion 33V and the second land portion 33W that intersect at this land intersection portion 37. Therefore, the directions corresponding to the lands that intersect with different land intersection portions 37 may be different from the first direction V and the second direction W shown in FIG. 32.

[0272] 32, the steam flow path portion 50 may be configured by a plurality of passage division portions 55. Each passage division portion 55 may be located at a position partitioned by a first land portion 33V and a second land portion 33W.

[0273] More specifically, as shown in Fig. 32, the passage dividing portions 55 are located on both sides of the first land portion 33V in the first direction V. The passage dividing portions 55 are located on both sides of the first land portion 33V in the direction perpendicular to the first direction V. The passage dividing portions 55 are located on both sides of the second land portion 33W in the second direction W. The passage dividing portions 55 are located on both sides of the second land portion 33W in the direction perpendicular to the second direction W. In this manner, four passage dividing portions 55 are formed around the land intersection portion 37.

[0274] 32, a first land recess 38V connecting the passage dividing portions 55 located on both sides may be located in the second body surface 30b of the first land portion 33V. A second land recess 38W connecting the passage dividing portions 55 located on both sides may be located in the second body surface 30b of the second land portion 33W.

[0275] A first liquid flow path portion similar to the first liquid flow path portion 60X may be formed on the first main body surface 30a of the first land portion 33V. A second liquid flow path portion similar to the second liquid flow path portion 60Y may be formed on the first main body surface 30a of the second land portion 33W. The main grooves of each liquid flow path portion may be connected to each other at a groove connection portion 66 located at the land intersection portion 37.

[0276] In this modified example, as in the first embodiment, the transport efficiency of the working fluid 2b can be improved, and the transport efficiency of the working vapor 2a can be improved, so that the heat dissipation performance of the vapor chamber 1 can be improved.

[0277] The fifteenth modified example will now be described.

[0278] Before describing the specific configuration of the fifteenth modified example, the configuration of the land intersection portion shown in Fig. 9 to Fig. 11 will be described. As described above, a plurality of land intersection portions 37 are formed by the intersection of a plurality of first land portions 33X extending in the X direction and a plurality of second land portions 33Y extending in the Y direction. A land connection region 40 is formed by the plurality of land intersection portions 37. The configuration of such a land connection region 40 will be described below using the first intersection land portion 33Xa and the second intersection land portion 33Ya with reference to Figs. 33 to 35.

[0279] As shown in FIG. 33, the land connection area 40 may include a plurality of first intersection land portions 33Xa, a plurality of second intersection land portions 33Ya, and a plurality of land intersection portions 37.

[0280] The first intersection land portion 33Xa and the second intersection land portion 33Ya include the first body surface 30a and the second body surface 30b, and extend from the first body surface 30a to the second body surface 30b. A steam flow path portion 50 is located around the first intersection land portion 33Xa and the second intersection land portion 33Ya.

[0281] The first intersection land portion 33Xa may extend in an elongated shape with the X direction as the longitudinal direction in a plan view. The second intersection land portion 33Ya may extend in a direction different from the X direction in a plan view, and may extend in an elongated shape with the Y direction as the longitudinal direction in a plan view. The planar shape of the first intersection land portion 33Xa and the planar shape of the second intersection land portion 33Ya may be an elongated rectangular shape. The first intersection land portions 33Xa may be located parallel to each other. The second intersection land portions 33Ya may be positioned parallel to one another.

[0282] At least one first intersection land 33Xa may be connected to the first land 33X. In the example shown in FIG. 33, each first intersection land 33Xa is connected to a corresponding first land 33X. Each first intersection land 33Xa is connected to a corresponding one of the first intersection land 33Xa. The first intersection land 33Xa may be located on an extension of the first land 33X. The width w16 of the first intersection land 33Xa may be equal to the width w1 of the first land 33X. In this case, the land extending in the X direction is formed continuously. The arrangement pitch p8 of the first intersection land 33Xa in the Y direction may be equal to the arrangement pitch p6 of the first land 33X. The first intersection land 33Xa may be formed in the same manner as the first land 33X. In the example shown in FIG. 33, the land connection region 40 may be located at a midpoint in the X direction of the first land 33X. In this case, the first land portion 33X is divided by the corresponding first intersection land portion 33Xa.

[0283] At least one second intersection land 33Ya may be connected to the second land 33Y. In the example shown in FIG. 33, each second intersection land 33Ya is connected to the corresponding second land 33Y. Each second intersection land 33Ya is connected to one corresponding second land 33Y. The second intersection land 33Ya may be located on an extension of the second land 33Y. The width w17 of the second intersection land 33Ya may be equal to the width w2 of the second land 33Y. In this case, the land extending in the Y direction is formed continuously. The arrangement pitch p9 of the second intersection land 33Ya in the X direction may be equal to the arrangement pitch p7 of the second land 33Y. The second intersection land 33Ya may be formed in the same manner as the second land 33Y. As shown in FIG. 33, the land connection region 40 may be located at a midpoint in the Y direction of the second land 33Y. In this case, the second land portion 33Y is divided by the corresponding second intersection land portion 33Ya.

[0284] At least one first land portion 33X is connected to the land connection region 40, and at least one second land portion 33Y is connected to the land connection region 40. As shown in FIG. 33, a plurality of first land portions 33X may be connected to the land connection region 40, and a plurality of second land portions 33Y may be connected to the land connection region 40. However, the second land portion 33Y may not be connected to the land connection region 40. In this case, the wick sheet 30 may not include the second land portion 33Y.

[0285] As shown in FIG. 33, the first intersection land portion 33Xa and the second intersection land portion 33Ya may intersect at a land intersection portion 37. More specifically, each of the first intersection land portions 33Xa and each of the second intersection land portions 33Ya may intersect with each other to form a plurality of land intersection portions 37. A land connection region 40 may be formed by the plurality of land intersection portions 37. One first intersection land portion 33Xa and one second intersection land portion 33Ya intersect at one land intersection portion 37. The plurality of first intersection land portions 33Xa and the plurality of second intersection land portions 33Ya may be formed at least partially in a lattice shape.

[0286] The first intersection land portion 33Xa may extend beyond the land intersection portion 37 in the X direction. In the example shown in Fig. 33, the first intersection land portion 33Xa may terminate at the land intersection portion 37 that constitutes the outer periphery of the land connection area 40. The second intersection land portion 33Ya may extend in the Y direction beyond the land intersection portion 37. In the example shown in Fig. 33, the second intersection land portion 33Ya may terminate at the land intersection portion 37 that constitutes the outer periphery of the land connection area 40. The first intersection land portion 33Xa and the second intersection land portion 33Ya may intersect in a cross shape.

[0287] In the fifteenth modification, the first intersection land portion 33Xa and the second intersection land portion 33Ya are perpendicular to each other. However, the first intersection land portion 33Xa and the second intersection land portion 33Ya do not have to be perpendicular to each other, and the angle at which the first intersection land portion 33Xa and the second intersection land portion 33Ya intersect is arbitrary.

[0288] The land connection region 40 may be a region in which a plurality of land intersections 37 are located. The land connection region 40 may be a region defined by the land intersections 37 that constitute the outer periphery among the multiple land intersections 37. For example, as shown by the thick dashed line in Fig. 33, the land connection region 40 may be a region defined by a line passing through the outer edge of the land intersections 37 that constitute the outer periphery in a plan view. The outer edge of the land connection region 40 may be defined on the first body surface 30a.

[0289] The steam flow passage portion 50 is located around the first intersection land portion 33Xa and the second intersection land portion 33Ya. A passage dividing portion 55 may be formed between two first intersection land portions 33Xa adjacent to each other in the Y direction. The passage dividing portion 55 is located on both sides of the second intersection land portion 33Ya in the X direction. The passage dividing portion 55 may be formed between two second intersection land portions 33Ya adjacent to each other in the X direction. The passage dividing portion 55 is located on both sides of the first intersection land portion 33Xa in the Y direction. Four passage dividing portions 55 may be formed around the land intersection portion 37. The Y direction dimension L1 of the passage dividing portion 55 located inside the land connection region 40 may be equal to the Y direction dimension L2 of the passage dividing portion 55 located outside the land connection region 40. The X direction dimension L3 of the passage dividing portion 55 located inside the land connection region 40 may be equal to the Y direction dimension L1. The X-direction dimension L3 and the Y-direction dimension L1 of the passage dividing portion 55 are dimensions at the first main body surface 30a. The Y-direction dimension L1 of the second steam passage 52 is a dimension at the first main body surface 30a.

[0290] As shown in Fig. 34, a second land recess 38Y may be located on the second main body surface 30b of the second intersection land portion 33Ya. As shown in Fig. 33, the second land recess 38Y may connect passage dividing portions 55 located on both sides of the second land recess 38Y in the X direction. Fig. 34 shows a cross section of the second intersection land portion 33Ya along the Y direction. As shown in Fig. 35, a first land recess 38X may be located on the second main body surface 30b of the first intersection land portion 33Xa. As shown in Fig. 33, the first land recess 38X may connect passage dividing portions 55 located on both sides of the first land recess 38X in the Y direction.

[0291] Thus, in the example shown in Figs. 33 to 35, the first intersection land portion 33Xa and the second intersection land portion 33Ya intersect at the land intersection portion 37. In the example shown in Figs. 9 to 11, the first land portion 33X and the second land portion 33Y intersect at the land intersection portion 37. The two examples differ in this respect. However, this difference occurs due to the change in the name of the land portions intersecting at the land intersection portion 37, and there is no difference in the substantial configuration of the land connection region 40. In the land connection region 40 shown in Fig. 33, as described above, the passage division portion 55, the first land recess 38X, and the second land recess 38Y are formed, and the land connection region 40 is configured similarly to the examples shown in Figs. 9 to 11. For this reason, detailed description will be omitted.

[0292] As shown in FIG. 33, a first liquid flow path portion 60X may be formed in the first main body surface 30a of the first intersection land portion 33Xa. More specifically, a first main groove 61X of the first liquid flow path portion 60X may extend from the first main body surface 30a of the first land portion 33X to the first main body surface 30a of the first intersection land portion 33Xa. A first communication groove 65X constituting the first liquid flow path portion 60X may be located in the first main body surface 30a of the first intersection land portion 33Xa in the same manner as the first main body surface 30a of the first land portion 33X. In FIG. 33, in order to clarify the drawing, one main groove 61X, 61Y is represented by one line, and the first communication groove 65X is omitted. The same applies to FIG. 36 and the like.

[0293] The second liquid flow path portion 60Y may be formed in the first main body surface 30a of the second intersection land portion 33Ya. More specifically, the second main groove 61Y of the second liquid flow path portion 60Y may extend from the first main body surface 30a of the second land portion 33Y to the first main body surface 30a of the second intersection land portion 33Ya. The second communication groove 65Y constituting the second liquid flow path portion 60Y may be located in the first main body surface 30a of the second intersection land portion 33Ya in the same manner as the first main body surface 30a of the second land portion 33Y. In FIG. 33, the second communication groove 65Y is omitted for clarity of the drawing.

[0294] The first mainstream groove 61X and the second mainstream groove 61Y may be connected to each other at the land intersection 37. The first mainstream groove 61X may be connected to the groove connection portion 66 located at the land intersection 37. The second mainstream groove 61Y may be connected to the groove connection portion 66 located at the land intersection 37.

[0295] Next, a specific configuration of the fifteenth modification will be described with reference to Fig. 36. In the example shown in Figs. 33 to 35, the width w16 of the first intersection land portion 33Xa is equal to the width w1 of the first land portion 33X, and the width w17 of the second intersection land portion 33Ya is equal to the width w2 of the second land portion 33Y. In contrast, in the fifteenth modification, the width w16 of the first intersection land portion 33Xa is smaller than the width w1 of the first land portion 33X, and the width w17 of the second intersection land portion 33Ya is smaller than the width w2 of the second land portion 33Y.

[0296] The width w16 of the first intersection land portion 33Xa may be smaller than the width w1 of the first land portion 33X. The arrangement pitch p8 of the first intersection land portions 33Xa in the Y direction may be smaller than the arrangement pitch p6 of the first land portions 33X. The arrangement pitch p8 of the first intersection land portions 33Xa is arbitrary.

[0297] The land connection region 40 may be the region indicated by the thick dashed line as in the example shown in Fig. 33, or may be the region defined by the land intersections 37 that form the outer periphery. The land connection region 40 may be located in the evaporation region SR or the condensation region CR described above.

[0298] At least some of the first intersection lands 33Xa among the multiple first intersection lands 33Xa constituting the land connection area 40 may be connected to the first land 33X. In the example shown in Fig. 36, some of the first intersection lands 33Xa may be connected to the first land 33X, and other first intersection lands 33Xa may not be connected to the first land 33X. The first intersection lands 33Xa that are not connected to the first land 33X may have a length similar to that of the first intersection lands 33Xa that are connected to the first land 33X.

[0299] The width w17 of the second intersection land portion 33Ya may be smaller than the width w2 of the second land portion 33Y. The arrangement pitch p9 of the second intersection land portions 33Ya in the X direction may be smaller than the arrangement pitch p7 of the second land portions 33Y. The arrangement pitch p9 of the second intersection land portions 33Ya is arbitrary.

[0300] At least some of the second intersection lands 33Ya among the multiple second intersection lands 33Ya constituting the land connection region 40 may be connected to the second land portion 33Y. In the example shown in FIG. 36, some of the second intersection lands 33Ya may be connected to the second land portion 33Y, and other second intersection lands 33Ya may not be connected to the second land portion 33Y. The second intersection lands 33Ya that are not connected to the second land portion 33Y may have a length similar to that of the second intersection lands 33Ya that are connected to the second land portion 33Y.

[0301] As shown in Fig. 36, the first main groove 61X of the first liquid flow path portion 60X may extend from the first main body surface 30a of the first land portion 33X to the first main body surface 30a of the first intersection land portion 33Xa. The first liquid flow path portion 60X formed in the first intersection land portion 33Xa may be configured similarly to the example shown in Fig. 24. The first main grooves 61X and the first communication grooves 65X formed in the first intersection land portion 33Xa may be formed in a lattice pattern. In Fig. 36, the first communication grooves 65X located in the first land portion 33X are omitted for clarity of the drawing.

[0302] The second main groove 61Y of the second liquid flow path portion 60Y may extend from the first main surface 30a of the second land portion 33Y to the first main surface 30a of the second intersection land portion 33Ya. The second liquid flow path portion 60Y formed in the second intersection land portion 33Ya may be configured similarly to the example shown in FIG. 24. The multiple second main grooves 61Y and the multiple second communication grooves 65Y formed in the second intersection land portion 33Ya may be formed in a lattice pattern. In FIG. 36, the second communication groove 65Y located in the second land portion 33Y is omitted for clarity of the drawing.

[0303] The groove connection portion 66 located at the land intersection portion 37 is connected to the first mainstream grooves 61X on both sides in the X direction, and is connected to the second mainstream grooves 61Y on both sides in the Y direction. As a result, in each land intersection 37, the first mainstream grooves 61X located in the corresponding first intersection land portion 33Xa and the second mainstream grooves 61Y located in the corresponding second intersection land portion 33Ya are connected to each other. The groove connection portion 66 may include a plurality of first intersection grooves 67X and a plurality of second intersection grooves 67Y, as in the example shown in Fig. 24. The first intersection grooves 67X and the second intersection grooves 67Y may intersect in a cross shape or may be formed in a lattice shape.

[0304] According to the fifteenth modification, the number of the passage dividing portions 55 can be increased while reducing the size of the passage dividing portions 55 in a plan view. This allows the number of intersection grooves 67X, 67Y communicating with the passage dividing portions 55 to be increased, and the gas-liquid interface length in the land connection region 40 to be increased. Therefore, when the land connection region 40 is located in the evaporation region SR, the evaporation amount of the working steam 2a can be increased. When the land connection region 40 is located in the condensation region CR, the recovery amount of the working fluid 2b condensed from the working steam 2a can be increased. The gas-liquid interface length means the length of the interface between the working fluid 2b and the working steam 2a. When the land connection region 40 is located in the evaporation region SR, the interface between the working fluid 2b and the working steam 2a is usually formed in the intersection grooves 67X, 67Y near the passage dividing portion 55. In this case, the gas-liquid interface length corresponds to the total value of the lengths of the gas-liquid interfaces formed in each intersection groove 67X, 67Y. When the land connection region 40 is located in the condensation region CR, the interface between the working fluid 2b and the working steam 2a is usually formed near the intersection grooves 67X, 67Y of the passage division section 55. In this case, the length of the gas-liquid interface corresponds to the sum of the lengths of the gas-liquid interfaces formed in each passage division section 55.

[0305] According to the fifteenth modification, it is possible to increase the density of the land intersections 37 while reducing the size of the land intersections 37 in a plan view. This makes it possible to improve the mechanical strength of the vapor chamber 1 and reduce the flow path resistance of the working steam 2a.

[0306] 36 shows an example in which the first intersection land 33Xa that is not connected to the first land 33X and the second intersection land 33Ya that is not connected to the second land 33Y do not protrude from the land connection area 40. However, as shown in FIG 37, the first intersection land 33Xa that is not connected to the first land 33X may protrude from the land connection area 40. Similarly, the second intersection land 33Ya that is not connected to the second land 33Y may protrude from the land connection area 40.

[0307] In the example shown in FIG. 37, the width w16 of the first intersection land portion 33Xa may be equal to the width w1 of the first land portion 33X. The arrangement pitch p8 of the first intersection land portion 33Xa in the Y direction may be half the arrangement pitch p6 of the first land portion 33X, but is not limited to being half and may be any value. The width w17 of the second intersection land portion 33Ya may be equal to the width w2 of the second land portion 33Y. The arrangement pitch p9 of the second intersection land portion 33Ya in the X direction may be half the arrangement pitch p7 of the second land portion 33Y, but is not limited to being half and may be any value.

[0308] The 16th to 31st modified examples described below may be applied to a wick sheet 30 in which the widths of the intersection lands 33Xa, 33Ya are equal to the widths of the lands 33X, 33Y, as in the example shown in Fig. 33. Alternatively, the 16th to 31st modified examples may be applied to a wick sheet 30 in which the widths of the intersection lands 33Xa, 33Ya are smaller than the widths of the lands 33X, 33Y, as in the example shown in Fig. 36.

[0309] The sixteenth modified example will now be described.

[0310] In the above-mentioned fifteenth modified example, the Y-direction dimension L1 of the passage dividing portion 55 located inside the land connection region 40 is equal to the Y-direction dimension L2 of the passage dividing portion 55 located outside the land connection region 40. In the fifteenth modified example, the X-direction dimension L3 of the passage dividing portion 55 located inside the land connection region 40 is equal to the Y-direction dimension L1 of the passage dividing portion 55. However, the present disclosure is not limited to this. For example, as shown in FIG. 38, the Y-direction dimension L1 of the passage dividing portion 55 located inside the land connection region 40 may be smaller than the Y-direction dimension L2 (see FIG. 33) of the passage dividing portion 55 located outside the land connection region 40. FIG. 38 shows the land connection region 40 on the second main body surface 30b. The diagonal hatching on the land connection region 40 means that it may be a surface constituting the second main body surface 30b. In FIG. 38, the first land portion 33X and the second land portion 33Y located outside the land connection region 40 are omitted. The same applies to the subsequent figures.

[0311] The X-direction dimension L3 of the passage dividing portion 55 may be equal to the Y-direction dimension L1. This allows the size of the passage dividing portion 55 to be reduced in plan view. The X-direction dimension L3 and the Y-direction dimension L1 of the passage dividing portion 55 are dimensions at the first main body surface 30a. The Y-direction dimension L2 of the second steam passage 52 is a dimension at the first main body surface 30a. The passage dividing portion 55 may communicate with the adjacent first land recesses 38X and also communicate with the adjacent second land portions 33Y.

[0312] As shown in FIG. 38 and FIG. 39, the passage dividing portion 55 may be defined by a protruding portion 41. The protruding portion 41 is a portion protruding from the adjacent first intersection land portion 33Xa and second intersection land portion 33Ya toward the passage dividing portion 55, and reduces the size of the passage dividing portion 55 in a plan view. The protruding portion 41 is connected to the first intersection land portion 33Xa and the second intersection land portion 33Ya, and may be formed continuously with the first intersection land portion 33Xa and the second intersection land portion 33Ya. As shown in FIG. 39, on the opposite side of the protruding portion 41 from the first main body surface 30a, the passage dividing portion 55 communicates with the adjacent first land recess 38X and second land recess 38Y. In the example shown in FIG. 39, the protruding portion 41 has a cross-sectional shape similar to that of the through portion 34 shown in FIG. 8, but the cross-sectional shape of the protruding portion 41 is arbitrary. The first communication groove 65X of the first liquid flow path portion 60X may extend, or the first mainstream groove 61X may be formed, on the first main body surface 30a of the overhanging portion 41. The second communication groove 65Y of the second liquid flow path portion 60Y may extend, or the second mainstream groove 61Y may be formed, on the first main body surface 30a of the overhanging portion 41. The first communication groove 65X and the second communication groove 65Y may be in communication with the passage dividing portion 55 surrounded by the overhanging portion 41.

[0313] According to the sixteenth modification, the size of the passage dividing portion 55 in a plan view can be reduced. This makes it possible to increase the planar areas of the first liquid flow path portion 60X and the second liquid flow path portion 60Y in the land connection region 40. Therefore, when the land connection region 40 is located in the evaporation region SR, the amount of working vapor 2a transported to the evaporation region SR can be increased, and the amount of working vapor 2a transported toward the center of the evaporation region SR can be increased.

[0314] The seventeenth modified example will now be described.

[0315] In the above-described first modified example, the passage dividing portion 55 is formed in a rectangular shape in a plan view. However, the present disclosure is not limited to this. For example, the passage dividing portion 55 may be formed in a rectangular shape with rounded corners in a plan view. Alternatively, for example, as shown in FIG. 40A, the passage dividing portion 55 may be formed in a circular shape in a plan view. Alternatively, although not shown, the passage dividing portion 55 may be formed in an elliptical shape in a plan view, which is optional. Alternatively, as shown in FIG. 40B, the passage dividing portion 55 may include a passage convex portion 55a and a passage concave portion 55b in a plan view. The passage convex portion 55a and the passage concave portion 55b may be arranged alternately in the circumferential direction of the passage dividing portion 55. By forming the passage convex portion 55a, when the land connection region 40 is located in the condensation region CR, the condensed working fluid 2b can be easily collected in the intersection grooves 67X and 67Y. By forming the passage concave portion 55b, when the land connection region 40 is located in the evaporation region SR, the evaporated working vapor 2a can be smoothly diffused in the passage dividing portion 55. FIG. 40B shows an example in which the passage convex portions 55a and the passage concave portions 55b are alternately arranged at equal intervals in the circumferential direction. However, the passage convex portions 55a and the passage concave portions 55b may be arranged at irregular intervals in the circumferential direction. FIG. 40B shows an example in which the passage convex portions 55a have the same shape and the same size. However, the shapes of the passage convex portions 55a may be different, and the sizes of the passage convex portions 55a may be different. The same applies to the passage concave portions 55b.

[0316] The eighteenth modified example will now be described.

[0317] In the above-mentioned fifteenth modified example, an example has been described in which the Y direction dimension of the land intersection 37 is equal to the width w5 of the second land concave 38Y and equal to the width w1 of the first land portion 33X (see FIG. 8, etc.). However, the present disclosure is not limited to this. For example, as shown in FIG. 41A, the Y direction dimension w18 of the land intersection 37 may be smaller than the width w5 of the second land concave 38Y. For example, the Y direction dimension w18 of the land intersection 37 may be 20% to 90% of the width w5. In the example shown in FIG. 41A, the Y direction dimension w18 of the land intersection 37 may be equal to or different from the width w16 of the first intersection land portion 33Xa (see FIG. 33, etc.).

[0318] According to the 18th modification, the land intersection portion 37 is formed, so that the mechanical strength of the vapor chamber 1 can be ensured. According to the 18th modification, the width w5 of the second land recess 38Y can be increased. This can reduce the flow path resistance of the working steam 2a, and improve the transport efficiency of the working steam 2a.

[0319] Similarly, in the above-mentioned fifteenth modified example, an example has been described in which the X-direction dimension of the land intersection 37 is equal to the width w6 of the first land concave 38X and equal to the width w2 of the second land portion 33Y (see FIG. 13, etc.). However, the present disclosure is not limited to this. For example, as shown in FIG. 41B, the X-direction dimension w19 of the land intersection 37 may be smaller than the width w6 of the first land concave 38X. For example, the X-direction dimension w19 of the land intersection 37 may be 20% to 90% of the width w6. In the example shown in FIG. 41B, the X-direction dimension w19 of the land intersection 37 may be equal to or different from the width w17 of the second intersection land portion 33Ya (see FIG. 33, etc.).

[0320] According to the 18th modification, the land intersection portion 37 is formed, thereby ensuring the mechanical strength of the vapor chamber 1. According to the 18th modification, the width w6 of the first land recess 38X can be increased. This reduces the flow path resistance of the working steam 2a, and improves the transport efficiency of the working steam 2a.

[0321] In the above-mentioned fifteenth modified example, an example was described in which the planar shape of the land intersection 37 on the second main body surface 30b is rectangular. However, the present disclosure is not limited to this. For example, the planar shape of the land intersection 37 on the second main body surface 30b may be any shape, such as a rectangular shape with rounded corners, a circular shape, or an elliptical shape. In this case, the flow path resistance of the working steam 2a can be reduced.

[0322] The 19th modified example will now be described.

[0323] In the above-mentioned fifteenth modified example, an example in which all the land intersections 37 extend from the first body surface 30a to the second body surface 30b has been described. However, the present disclosure is not limited to this. For example, as shown in FIG. 42 and FIG. 43, all the land intersections 37 may not extend to the second body surface 30b. In the example shown in FIG. 42 and FIG. 43, some of the land intersections 37 extend from the first body surface 30a to the second body surface 30b, and these land intersections 37 are defined as first land intersections 37a. The remaining land intersections 37 do not extend to the second body surface 30b, and these land intersections 37 are defined as second land intersections 37b. The second land intersections 37b are located on the first body surface 30a. A land intersection space 42 may be formed on the opposite side of the second land intersections 37b from the first body surface 30a. The land intersection space 42 may be located between the second land intersection portion 37b and the second sheet 20, or may be located at a position overlapping the second land intersection portion 37b in a plan view. The land intersection space 42 may form a steam flow path portion 50 and communicate with the adjacent first land recess 38X, second land recess 38Y, and passage dividing portion 55. A continuous space may be formed by the land intersection space 42 and the adjacent land recesses 38X, 38Y.

[0324] In the land connection region 40, a first through hole 43 communicating with the second land recess 38Y and the first land recess 38X may be formed. The first through hole 43 may be located at a position different from the passage dividing portion 55 in a plan view. As shown in FIG. 43, the first through hole 43 may be formed in the second land intersection portion 37b and may extend from the first main body surface 30a to the land intersection space 42. The first through hole 43 may penetrate the second land intersection portion 37b in the Z direction and communicate with the land intersection space 42. In FIG. 42, the first land intersection portion 37a is diagonally hatched.

[0325] As shown in Fig. 42, when the first through holes 43 are formed in the second land intersections 37b, the passage dividing portions 55 and the first through holes 43 may be arranged in a staggered manner. In the land connection region 40 shown in Fig. 42, except for the outer edge portion, the passage dividing portions 55 and the first through holes 43 are arranged in a staggered manner. More specifically, two passage dividing portions 55 adjacent to each other in the Y direction may be shifted in the X direction with respect to the first through holes 43. The amount of shift may be half the arrangement pitch of the passage dividing portions 55 in the X direction or half the arrangement pitch of the first through holes 43 in the X direction, but is arbitrary.

[0326] As shown in FIG. 42, similarly to the example shown in FIG. 38, the X-direction dimension L3 and the Y-direction dimension L1 of the passage dividing portion 55 may be smaller than the Y-direction dimension L2 (see FIG. 33) of the second steam passage 52. The size of the passage dividing portion 55 in a plan view may be made smaller. The planar shape of the first through hole 43 may be any shape, such as a rectangular shape, a rectangular shape with rounded corners, a circular shape, or an elliptical shape. The planar shape of the first through hole 43 may be the same as or different from the planar shape of the passage dividing portion 55. The size of the planar shape of the first through hole 43 may be the same as or different from the planar shape of the passage dividing portion 55 as shown in FIG. 42, and is any size.

[0327] According to the 19th modification, the passage dividing portion 55 and the first through hole 43 are formed as a passage that communicates the liquid passage portion 60X, 60Y with the vapor passage 51, 52. As a result, when the land connection region 40 is located in the evaporation region SR, the passage dividing portion 55 and the first through hole 43 can function as a passage through which the working vapor 2a evaporated in the liquid passage portion 60X, 60Y travels toward the vapor passage 51, 52. Therefore, the flow path cross-sectional area of ​​the flow path through which the working vapor 2a flows can be increased, and the transportation amount of the working vapor 2a can be increased. In addition, the boundary between the working liquid 2b and the working vapor 2a can be formed not only in the passage dividing portion 55 but also in the first through hole 43. As a result, the gas-liquid interface length can be increased, and the evaporation amount of the working vapor 2a can be increased. When the land connection region 40 is located in the condensation region CR, the passage dividing portion 55 and the first through hole 43 can function as a passage through which the working liquid 2b condensed in the vapor passage 51, 52 travels toward the liquid passage portion 60X, 60Y. Therefore, the length of the gas-liquid interface can be increased, and the amount of recovered working fluid 2b can be increased.

[0328] According to the nineteenth modification, a land intersection space 42 is formed on the opposite side of the second land intersection portion 37b from the first main body surface 30a. This reduces the flow resistance of the working vapor 2a and improves the transport efficiency of the working liquid 2b. In this case, the working vapor 2a can be transported from the evaporation region SR to a distant position in the vapor passages 51 and 52. This allows the working vapor 2a to be diffused over a wide range, improving the heat dissipation performance of the vapor chamber 1.

[0329] In the above-mentioned 19th modified example, an example in which the first through hole 43 is formed in the second land intersection portion 37b has been described. However, the present disclosure is not limited to this. For example, as shown in FIG. 44, the first through hole 43 may be formed in at least one of the first intersection land portion 33Xa and the second intersection land portion 33Ya. As shown in FIG. 44, the first through hole 43 may be formed in both the first intersection land portion 33Xa and the second intersection land portion 33Ya. The first through hole 43 may be located between two land intersection portions 37 adjacent to each other in the X direction and the Y direction in the land connection region 40. As shown in FIG. 45, the first through hole 43 may extend from the first main body surface 30a to the land recesses 38X, 38Y. The first through hole 43 may penetrate the intersection land portions 33Xa, 33Ya in the Z direction and communicate with the land recesses 38X, 38Y. In the example shown in Figures 44 and 45, the land intersections 37 may extend from the first body surface 30a to the second body surface 30b.

[0330] The twentieth modified example will now be described.

[0331] In the above-mentioned nineteenth modified example, some of the passage dividing portions 55 may be replaced with blocking portions 44, as shown in FIGS.

[0332] More specifically, a blocking portion 44 may be provided between two adjacent first intersection lands 33Xa and two adjacent second intersection lands 33Ya. The blocking portion 44 is connected to the first intersection lands 33Xa and the second intersection lands 33Ya, and is formed continuously with the first intersection lands 33Xa and the second intersection lands 33Ya. The blocking portion 44 is surrounded by the first intersection lands 33Xa and the second intersection lands 33Ya.

[0333] The blocking portion 44 is located on the first main body surface 30a. As shown in FIG. 47, a blocked space 45 may be formed on the side of the blocking portion 44 opposite to the first main body surface 30a. The blocked space 45 may be located between the blocking portion 44 and the second sheet 20, or may be located at a position overlapping with the blocking portion 44 in a plan view. The blocked space 45 may form a steam flow path portion 50 and communicate with the adjacent first land recess 38X and second land recess 38Y. A first liquid flow path portion 60X and a second liquid flow path portion 60Y may be formed on the first main body surface 30a of the blocking portion 44 in the same manner as the above-mentioned protruding portion 41.

[0334] A pillar portion 46a may be formed in the blocking portion 44. As shown in Fig. 47, the pillar portion 46a may extend from the blocking portion 44 to the second main body surface 30b. The diagonal hatching on the pillar portion 46a in Fig. 46 means that it may be a surface constituting the second main body surface 30b. The planar shape of the pillar portion 46a on the second main body surface 30b may be smaller than the planar shape of the land intersection portion 37 on the second main body surface 30b.

[0335] As shown in FIG. 47, the land intersection 37 may not extend to the second main body surface 30b, similar to the second land intersection 37b shown in FIG. 42. A land intersection space 42 may be formed on the opposite side of the land intersection 37 from the first main body surface 30a, similar to the examples shown in FIG. 42 and FIG. 43. A pillar portion 46b may be formed in the land intersection space 42. The pillar portion 46b may extend from the land intersection 37 to the second main body surface 30b. The oblique hatching on the pillar portion 46b in FIG. 46 means that it may be a surface constituting the second main body surface 30b. The planar shape of the pillar portion 46b on the second main body surface 30b may be smaller than the planar shape of the land intersection 37 on the second main body surface 30b as shown in FIG. 38 and the like.

[0336] According to the twentieth modification, the blocking portion 44 and the column portion 46a are formed instead of the passage dividing portion 55. This improves the mechanical strength of the vapor chamber 1. Also, according to the twentieth modification, the blocking portion 44 can be formed instead of the passage dividing portion 55, and the transport amount of the working vapor 2a can be reduced as necessary. For example, by forming the blocking portion 44 in a part of the land connection region 40, the flow of the working vapor 2a can be controlled in a direction toward the distant position of the vapor passages 51 and 52. Therefore, the flow of the working vapor 2a can be intentionally changed. When the land connection region 40 is located in the evaporation region SR, the working vapor 2a can be transported to a position where the working vapor 2a is difficult to transport. As a result, the working vapor 2a can be diffused over a wide range, and the heat dissipation performance of the vapor chamber 1 can be improved.

[0337] The twenty-first modified example will now be described.

[0338] In the above-mentioned fifteenth modified example, as shown in FIG. 48, a pillar portion 46c may be formed between two adjacent land intersections 37 in a part of the peripheral region of the land connection region 40. The pillar portion 46c shown in FIG. 48 is located in the first land recess 38X. As shown in FIG. 49, the pillar portion 46c extends from the first intersection land portion 33Xa to the second main body surface 30b. The planar shape of the pillar portion 46c on the second main body surface 30b may be the same as the planar shape of the pillar portion 46b shown in FIG. 46. The pillar portion 46b may be formed in the land intersection 37 in the same manner as the example shown in FIG. 46.

[0339] In the example shown in FIG. 48, the pillar portion 46c is located in a portion of the periphery of the land connection region 40. More specifically, the pillar portion 46c may be formed in the first intersection land portion 33Xa located in the periphery of the land connection region 40. In this case, it is possible to suppress diffusion of the working steam 2a in the Y direction. On the other hand, the pillar portion 46c may not be formed in the second intersection land portion 33Ya located in the periphery of the land connection region 40. In this case, it is possible to diffuse the working steam 2a in the X direction.

[0340] According to the twenty-first modified example, a pillar portion 46c is formed between two adjacent land intersection portions 37 at the periphery of the land connection region 40. When the land connection region 40 is located in the evaporation region SR, the flow of the working vapor 2a can be controlled in a direction toward a distant position of the vapor passages 51, 52, and the working vapor 2a can be transported to a position to which it is difficult to transport the working vapor 2a. This allows the working vapor 2a to be diffused over a wide range, and the heat dissipation performance of the vapor chamber 1 can be improved.

[0341] The twenty-second modified example will now be described.

[0342] In the above-mentioned fifteenth modified example, an example was described in which the depth d4 of the first land recess 38X and the depth d3 of the second land recess 38Y are equal (see Figs. 10 and 11). However, the present disclosure is not limited to this. The depth d4 and the depth d3 may be different from each other. This allows the flow of the working vapor 2a to be intentionally changed. As a result, the working vapor 2a can be diffused over a wide range, and the heat dissipation performance of the vapor chamber 1 can be improved.

[0343] For example, as shown in FIG. 50, the depth d3 of the second land recess 38Y may be deeper than the depth d4 of the first land recess 38X (see FIG. 11). The depth d3 of each of the second land recesses 38Y formed in the land connection region 40 may be deeper than the depth d4. Alternatively, as shown in FIG. 51, the depth d3 of some of the second land recesses 38Y formed in the land connection region 40 may be deeper than the depth d4 of the first land recess 38X (see FIG. 11), and the depth d3 of the remaining second land recesses 38Y may be equal to the depth d4. This allows the flow of the working steam 2a to be changed intentionally and finely.

[0344] Alternatively, for example, the depth d4 of each of the first land recesses 38X formed in the land connection region 40 may be deeper than the depth d3. Alternatively, the depth d4 of some of the first land recesses 38X formed in the land connection region 40 may be deeper than the depth d3, and the depth d4 of the remaining first land recesses 38X may be equal to the depth d3. This allows the flow of the working steam 2a to be changed intentionally and in a finely detailed manner.

[0345] The flow of the working vapor 2a will be described below with reference to a plan view of the wick sheet 30. Here, an example in which the land connection region 40 is located in the evaporation region SR will be described.

[0346] For example, as shown in FIG. 52, the evaporation region SR and the land connection region 40 may be disposed near one end of the vapor chamber 1 in the X direction. In this case, the land recesses 38X, 38Y located at the periphery of the land connection region 40 and indicated by cross-hatching in FIG. 52 may be deeper. In the example shown in FIG. 52, the working vapor 2a may be diffused to the condensation region CR located far from the evaporation region SR in the vapor chamber 1. The depth of the land recesses 38X, 38Y that are the outlets of the land connection region 40 from which the working vapor 2a flows out may be deeper than the depth of the other land recesses 38X, 38Y located at the center of the land connection region 40. The land recesses 38X, 38Y with a deeper depth are indicated by cross-hatching, and the land recesses 38X, 38Y with a shallower depth are indicated by diagonal hatching. In the example shown in FIG. 52, the working vapor 2a is easily allowed to flow from the land connection region 40 to the upper side, lower side, and right side in FIG. 52.

[0347] For example, as shown in Fig. 53, the evaporation region SR may be positioned offset toward one side in the Y direction with respect to the land connection region 40. This makes it easier for the working steam 2a to flow from the land connection region 40 to the upper and right sides in Fig. 53. In the example shown in Fig. 53, the depth of the land recesses 38X, 38Y located at the outlet of the land connection region 40 may be deeper than the depth of the land recesses 38X, 38Y located on the lower left side. The depth of the other land recesses 38X, 38Y adjacent to the land recesses 38X, 38Y located at the outlet may also be deeper than the depth of the land recesses 38X, 38Y located on the lower left side.

[0348] For example, as shown in Fig. 54, the evaporation region SR may be located at the center of the vapor chamber 1 in the X direction. In this case, the depth of the land recesses 38X, 38Y located at the peripheral portion may be deep over the entire circumference of the land connection region 40. In the example shown in Fig. 54, since the evaporation region SR is located at the center of the land connection region 40 in the Y direction, the working vapor easily flows from the land connection region 40 to the upper side, lower side, left side, and right side in Fig. 54.

[0349] The twenty-third modified example will now be described.

[0350] In the above-mentioned fifteenth modified example, an example in which the vapor chamber 1 is configured with three layers has been described. However, the present disclosure is not limited to this. For example, as shown in Fig. 55 and Fig. 56, the vapor chamber 1 may be configured with four layers. Fig. 55 shows a cross section along the Y direction at a position where a first land recess 38X is located, and Fig. 56 shows a cross section along the Y direction at a position where a land intersection portion 37 is located.

[0351] More specifically, as shown in FIG. 55 and FIG. 56, two wick sheets may be located between the first sheet 10 and the second sheet 20. The two wick sheets are composed of a first wick sheet 30P and a second wick sheet 30Q stacked together. The first wick sheet 30P is an example of a first main body sheet, and the second wick sheet 30Q is an example of a second main body sheet. The second main body surface 30b of the first wick sheet 30P is located on the first main body surface 30a of the second wick sheet 30Q. The first sheet 10 is located on the first main body surface 30a of the first wick sheet 30P. The second sheet 20 is located on the second main body surface 30b of the second wick sheet 30Q.

[0352] The first sheet inner surface 10b of the first sheet 10 and the first body surface 30a of the first wick sheet 30P are joined to each other. The second body surface 30b of the first wick sheet 30P and the first body surface 30a of the second wick sheet 30Q are joined to each other. The second body surface 30b of the second wick sheet 30Q and the second sheet inner surface 20a of the second sheet 20 are joined to each other.

[0353] As shown in Fig. 55, the first liquid flow path portion 60X is located on the first main surface 30a of the first intersection land portion 33Xa of the first wick sheet 30P. As shown in Fig. 56, the second liquid flow path portion 60Y is located on the first main surface 30a of the second intersection land portion 33Ya of the first wick sheet 30P. As shown in Fig. 55, the first land recess 38X is located on the second main surface 30b of the first intersection land portion 33Xa of the first wick sheet 30P. As shown in Fig. 56, the second land recess 38Y is located on the second main surface 30b of the second intersection land portion 33Ya of the first wick sheet 30P.

[0354] As shown in Fig. 55, the first liquid flow path portion 60X is located on the second main surface 30b of the first intersection land portion 33Xa of the second wick sheet 30Q. As shown in Fig. 56, the second liquid flow path portion 60Y is located on the second main surface 30b of the second intersection land portion 33Ya of the second wick sheet 30Q. As shown in Fig. 55, the first land recess 38X is located on the first main surface 30a of the first intersection land portion 33Xa of the second wick sheet 30Q. As shown in Fig. 56, the second land recess 38Y is located on the first main surface 30a of the second intersection land portion 33Ya of the second wick sheet 30Q.

[0355] 55, the first land recesses 38X of the first wick sheet 30P and the first land recesses 38X of the second wick sheet 30Q face each other to form a space that is continuous in the Z direction. The first land recesses 38X communicate with the passage dividing portions 55 adjacent to each other in the X direction.

[0356] 56, the second land recesses 38Y of the first wick sheet 30P and the second land recesses 38Y of the second wick sheet 30Q face each other to form a space that is continuous in the Z direction. The second land recesses 38Y communicate with the passage dividing portions 55 adjacent to each other in the Y direction.

[0357] As shown in Fig. 55, the passage dividing portion 55 of the first wick sheet 30P and the passage dividing portion 55 of the second wick sheet 30Q face each other to form a continuous space in the Z direction. As shown in Fig. 56, the land intersection portion 37 of the first wick sheet 30P and the land intersection portion 37 of the second wick sheet 30Q are joined to each other.

[0358] According to the twenty-third modified example, the first land recesses 38X of the first wick sheet 30P and the first land recesses 38X of the second wick sheet 30Q face each other. The second land recesses 38Y of the first wick sheet 30P and the second land recesses 38Y of the second wick sheet 30Q face each other. This allows a space that is continuous in the Z direction to be formed, and the flow path cross-sectional area of ​​the flow path through which the working steam 2a flows to be increased. This allows the flow path resistance of the working steam 2a to be reduced, and the transport efficiency of the working steam 2a to be improved.

[0359] In the twenty-third modified example, the depth of the land recesses 38X, 38Y of the first wick sheet 30P and the depth of the land recesses 38X, 38Y of the second wick sheet 30Q may be arbitrarily different, similar to the twenty-second modified example.

[0360] In the twenty-third modified example, an example has been described in which two wick sheets 30P, 30Q are positioned between the first sheet 10 and the second sheet 20. However, the present disclosure is not limited to this, and three or more wick sheets may be positioned between the first sheet 10 and the second sheet 20.

[0361] The twenty-fourth modified example will now be described.

[0362] In the fifteenth modification described above, for example, as shown in FIG. 57 and FIG. 58, the liquid storage groove 47 may be located on the second main body surface 30b of the land intersection 37. The liquid storage groove 47 is an example of a liquid storage portion. One liquid storage groove 47 may be formed in one land intersection 37. The liquid storage groove 47 may be formed in each land intersection 37. However, as shown in FIG. 57, the liquid storage groove 47 may be formed in some land intersections 37, and the liquid storage groove 47 may not be formed in the remaining land intersections 37. The liquid storage groove 47 may extend in the X direction or in the Y direction. The liquid storage groove 47 may extend in any direction. As shown in FIG. 57, in the land connection region 40, the liquid storage groove 47 extending in the X direction and the liquid storage groove 47 extending in the Y direction may be mixed. The liquid storage groove 47 may be connected to the adjacent land recesses 38X and 38Y. The liquid retention groove 47 may be formed by etching from the second main body surface 30b.

[0363] 58, the flow path cross-sectional area of ​​the liquid retention groove 47 may be larger than that of the first mainstream groove 61X. In this case, the capillary action of the liquid retention groove 47 may be smaller than that of the first mainstream groove 61X. The flow path cross-sectional area of ​​the liquid retention groove 47 may be larger than that of the second mainstream groove 61Y. In this case, the capillary action of the liquid retention groove 47 may be smaller than that of the second mainstream groove 61Y. The flow path cross-sectional area of ​​the liquid retention groove 47 may be smaller than that of the steam passages 51, 52.

[0364] The width w20 of the liquid retention groove 47 may be greater than the width w7 of the first mainstream groove 61X (see FIG. 8). The width w20 of the liquid retention groove 47 may be greater than the width w9 of the second mainstream groove 61Y (see FIG. 13). The width w20 of the liquid retention groove 47 may be smaller than the width w3 of the first vapor flow path recess 53 (see FIG. 8). The width w20 refers to the dimension of the liquid retention groove 47 on the second main body surface 30b.

[0365] The depth d7 of the liquid retention groove 47 may be greater than the depth d5 ​​(see FIG. 8) of the first mainstream groove 61X. The depth d7 of the liquid retention groove 47 corresponds to the dimension of the liquid retention groove 47 in the Z direction.

[0366] According to the twenty-fourth modified example, a liquid storage groove 47 is formed on the second main body surface 30b of the land intersection portion 37. This allows the working liquid 2b to be stored in the liquid storage groove 47 while the vapor chamber 1 is not in operation. Therefore, even if the working liquid 2b freezes and expands, the expansion force due to freezing can be weakened. When the vapor chamber 1 is in operation, it can function as a flow path for the working steam 2a, and the flow path resistance of the working steam 2a can be reduced.

[0367] In a 24th modified example, as shown in Fig. 59, two liquid storage grooves 47 may be formed in the second main body surface 30b of one land intersection portion 37. One of the two liquid storage grooves 47 may extend in the X direction, and the other liquid storage groove 47 may extend in the Y direction. The two liquid storage grooves 47 may be formed in a cross shape. However, the two liquid storage grooves 47 are not limited to being formed in a cross shape, and may extend in different directions from each other.

[0368] In the 24th modification, the vapor chamber 1 may be configured with four layers, as in the 23rd modification. For example, as shown in FIG. 60, a liquid storage groove 47 may be formed in the second main body surface 30b of the land intersection 37 of the first wick sheet 30P. The liquid storage groove 47 may not be formed in the first main body surface 30a of the land intersection 37 of the second wick sheet 30Q that faces the land intersection 37. For example, as shown in FIG. 61, a liquid storage groove 47 may be formed in the second main body surface 30b of the land intersection 37 of the first wick sheet 30P. A liquid storage groove 47 may be formed in the first main body surface 30a of the land intersection 37 of the second wick sheet 30Q facing the land intersection 37. In this case, the two liquid storage grooves 47 facing each other may extend in the same direction, or may extend in different directions as shown in Fig. 61. In the example shown in Fig. 61, the liquid storage groove 47 of the first wick sheet 30P extends in the X direction, and the liquid storage groove 47 of the second wick sheet 30Q extends in the Y direction. The two liquid storage grooves 47 may be formed in a cross shape in a plan view.

[0369] 61, the flow passage cross-sectional area of ​​the liquid storage groove 47 can be increased, and the amount of the working liquid 2b stored can be increased. Therefore, even if the working liquid 2b freezes and expands, the expansion force caused by freezing can be weakened. When the vapor chamber 1 is in operation, it can function as a flow passage for the working vapor 2a, and the flow passage resistance of the working vapor 2a can be reduced.

[0370] The twenty-fifth modified example will now be described.

[0371] As shown in Fig. 62, a plurality of second through holes 103 may be located in the land connection area 40. The land connection area 40 shown in Fig. 62 will be described in more detail.

[0372] As shown in FIGS. 62 and 63, the land connection region 40 may include a land connection body 101, a land connection space 102, a second through-hole 103, a pillar portion 104, and a groove connection portion 105.

[0373] As shown in FIG. 62 and FIG. 63A, the land connection body 101 is located on the first main body surface 30a of the wick sheet 30. As shown in FIG. 64, the land connection body 101 is connected to a plurality of first land portions 33X and a plurality of second land portions 33Y. The land connection body 101 may be connected to each of the first land portions 33X and each of the second land portions 33Y. As shown in FIG. 63A, the land connection body 101 extends from the first main body surface 30a toward the second main body surface 30b, but does not have to extend to the second main body surface 30b. The land connection body 101 may be spaced apart from the second sheet 20. The land connection body 101 may be a portion corresponding to the land connection region 40 including the plurality of first intersection land portions 33Xa, the plurality of second intersection land portions 33Ya, and the plurality of land intersection portions 37 shown in FIG. 33 and the like. The land connection body 101 may be an area defined by a thick dashed line shown in FIG. 64, and connected to each of the first land portions 33X and each of the second land portions 33Y.

[0374] The land connection body 101 may be located at a midpoint in the X direction of the first land portion 33X. In this case, each first land portion 33X is divided by the land connection body 101. The land connection body 101 may be located at a midpoint in the Y direction of the second land portion 33Y. In this case, each second land portion 33Y is divided by the land connection body 101.

[0375] 64, a plurality of first land portions 33X are connected to the land connection body 101, and a plurality of second land portions 33Y are connected to the land connection body 101. However, the second land portion 33Y does not have to be connected to the land connection body 101. In this case, the wick sheet 30 does not have to include the second land portion 33Y.

[0376] As shown in FIG. 63A, the land connection space 102 may be formed on the opposite side of the land connector 101 from the first main body surface 30a. The land connection space 102 may be located between the land connector 101 and the second sheet 20, or may be located at a position overlapping the land connector 101 in a plan view. The land connection space 102 may constitute the steam flow path portion 50. The land connection space 102 is a space through which mainly the working steam 2a passes, and may be in communication with the steam passages 51 and 52. The land connection space 102 may be a space including the passage division portion 55 (see FIG. 33, etc.) and the land recesses 38X and 38Y (see FIG. 10 and FIG. 11, etc.).

[0377] As shown in FIG. 63A, the second through hole 103 may penetrate the land connection body 101. The second through hole 103 may penetrate the land connection body 101 in the Z direction and extend from the first main body surface 30a to the land connection space 102. A plurality of second through holes 103 may be formed in the land connection body 101. As shown in FIG. 64, the second through hole 103 may communicate with the first mainstream groove 61X of the first liquid flow path portion 60X and the second mainstream groove 61Y of the second liquid flow path portion 60Y. The second through hole 103 may communicate with the land connection space 102. The second through holes 103 may be arranged along the X direction and along the Y direction as shown in FIG. 62. However, the second through holes 103 may be arranged in a staggered manner as shown in FIG. 42. Each second through hole 103 may be a hole corresponding to the above-mentioned passage dividing portion 55 (see FIG. 33, etc.), or may be a hole corresponding to the above-mentioned first through hole 43 (see FIG. 42, FIG. 43, etc.). Each second through hole 103 may include a hole corresponding to the passage dividing portion 55 and a hole corresponding to the first through hole 43.

[0378] As shown in FIG. 63A, the pillar portion 104 may extend from the land connector 101 to the second main body surface 30b. This can improve the mechanical strength of the vapor chamber 1. A plurality of pillar portions 104 may extend from the land connector 101 to the second main body surface 30b. The pillar portion 104 may be joined to the second sheet 20. The dot hatching on the pillar portion 104 in FIG. 62 means that it may be a surface constituting the second main body surface 30b. As shown in FIG. 62, the pillar portion 104 may be located in a first hole region 107 and a second hole region 108 described later. The pillar portion 104 may be located on an extension of the first land portion 33X or on an extension of the second land portion 33Y. However, the pillar portion 104 is not limited to the example shown in FIG. 62, and may be located at any position. The pillar portion 104 may be located in a position similar to the land intersection portion 37 described above (see FIG. 33, etc.) in a plan view. In a cross-sectional view, the pillar portion 104 may be formed similarly to the land intersection portion 37. However, as shown in Fig. 63A, the pillar portion 104 may be formed similarly to the above-mentioned pillar portions 46a to 46c (see Figs. 47 and 49, etc.).

[0379] As shown in FIG. 63A and FIG. 64, the groove connection part 105 may be located on the first main body surface 30a of the land connector 101. The groove connection part 105 is connected to the first mainstream groove 61X of the first liquid flow path part 60X and is connected to the second mainstream groove 61Y of the second liquid flow path part 60Y. The first mainstream groove 61X of each first liquid flow path part 60X may be connected to the groove connection part 105. The second mainstream groove 61Y of each second liquid flow path part 60Y may be connected to the groove connection part 105. The groove connection part 105 may be formed over the entire land connector 101.

[0380] 64, the groove connection portion 105 is connected on both sides in the X direction to the first mainstream grooves 61X located in each first land portion 33X, and is connected on both sides in the Y direction to the second mainstream grooves 61Y located in each second land portion 33Y. As a result, the first mainstream grooves 61X located in each first land portion 33X and the second mainstream grooves 61Y located in each second land portion 33Y communicate with each other.

[0381] As shown in FIG. 64, the groove connection portion 105 may include a plurality of first intersection grooves 106X and a plurality of second intersection grooves 106Y. The first intersection groove 106X and the second intersection groove 106Y may be located on the first main body surface 30a of the land connector 101. The first intersection groove 106X and the second intersection groove 106Y may have a small flow passage cross-sectional area so that the working fluid 2b mainly flows by capillary action. The flow passage cross-sectional area of ​​the first intersection groove 106X is smaller than the flow passage cross-sectional area of ​​the steam passages 51 and 52. The width of the first intersection groove 106X may be equal to the width w7 of the first mainstream groove 61X. The width of the first intersection groove 106X corresponds to the Y-direction dimension of the first intersection groove 106X on the first main body surface 30a. The depth of the first intersection groove 106X may be equal to the depth d5 ​​of the first mainstream groove 61X. The depth of the first intersection groove 106X corresponds to the Z-direction dimension of the first intersection groove 106X. The width of the second intersection groove 106Y may be equal to the width of the second mainstream groove 61Y. The width of the second intersection groove 106Y corresponds to the X-direction dimension of the second intersection groove 106Y on the first main body surface 30a. The depth of the second intersection groove 106Y may be equal to the depth of the second mainstream groove 61Y. The depth of the second intersection groove 106Y corresponds to the Z-direction dimension of the second intersection groove 106Y. The first intersection groove 106X and the second intersection groove 106Y may be formed by an etching process, similar to the above-mentioned mainstream grooves 61X and 61Y.

[0382] The first intersection grooves 106X may extend in the X direction on the extension of the corresponding first mainstream grooves 61X. The second intersection grooves 106Y may extend in the Y direction on the extension of the corresponding second mainstream grooves 61Y. The first intersection grooves 106X are aligned in the Y direction, and the second intersection grooves 106Y are aligned in the X direction. Each of the first intersection grooves 106X and each of the second intersection grooves 106Y intersect. The first intersection grooves 106X and the second intersection grooves 106Y may intersect in a cross shape. In this case, the first intersection grooves 106X and the second intersection grooves 106Y may be formed at least partially in a lattice shape. The first intersection grooves 106X and the second intersection grooves 106Y may be formed in a lattice shape as a whole, or may be formed in a lattice shape partially, as shown in FIG. 64. The first intersection grooves 106X and the second intersection grooves 106Y are connected to each other, and configured to allow the hydraulic fluid 2b to pass therethrough.

[0383] As shown in FIG. 64, the groove connection portion 105 may be connected to the second through hole 103. The first intersection groove 106X and the second intersection groove 106Y may be connected to each of the second through holes 103. The first intersection groove 106X and the second intersection groove 106Y may connect the first mainstream groove 61X and the second mainstream groove 61Y to the second through hole 103. The working steam 2a evaporated from the working fluid 2b supplied by the first intersection groove 106X and the second intersection groove 106Y can be smoothly diffused from the second through hole 103 through the land connection space 102 to the steam passages 51 and 52 as shown in FIG. 63A.

[0384] The land connection 101 may include a first hole region 107 and a second hole region .

[0385] As shown in FIG. 62, the first hole region 107 is located in the land connection region 40. The first hole region 107 may include a plurality of second through holes 103 formed with a first unit perimeter. The first unit perimeter is the total value per unit area of ​​the perimeters of the second through holes 103 located in the first hole region 107. The first unit perimeter is a value obtained by converting the total value of the perimeters of the second through holes 103 located in the first hole region 107 into a value per unit area. The first unit perimeter is calculated by dividing the total value of the perimeters of the second through holes 103 located in a measurement frame having a square shape of 2 mm x 2 mm by the area of ​​the measurement frame. Even if a part of the second through hole 103 is located outside the measurement frame, the perimeter of the part of the second through hole 103 located inside the measurement frame is used to calculate the first unit perimeter. The first unit circumference is the average value of the values ​​calculated by positioning the measurement frame at any five positions in the first hole region 107. The circumference of the second through hole 103 is the length of the contour line of the second through hole 103 on the first main body surface 30a. More specifically, as shown in FIG. 63B, the circumference of the second through hole 103 is the length of the contour line 103b of the second through hole 103 formed by the intersection of the wall surface 103a of the second through hole 103 and the first main body surface 30a. When a chamfered surface CH is formed between the wall surface 103a and the first main body surface 30a, the chamfered surface CH is not a surface constituting the wall surface 103a of the second through hole 103. The chamfered surface CH includes a surface formed in a tapered shape or a curved surface having a relatively small radius of curvature. When the overhanging portion 41 is formed as shown in FIG. 39, the wall surface 103a described above is the wall surface of the overhanging portion 41.

[0386] The first hole region 107 is a region defined by the second through holes 103 that constitute the outer peripheral edge portion among the multiple second through holes 103 formed with the first unit circumferential length. In the example shown in FIG. 62, the first hole region 107 is a region defined by a thick dashed line passing through the outer edge of the second through holes 103 that constitute the outer peripheral edge portion in a plan view. The outer edge of the first hole region 107 is defined by the first main body surface 30a. The inner peripheral edge portion of the first hole region 107 is defined by the outer peripheral edge portion of the second hole region 108 described later.

[0387] The second hole region 108 is located within the land connection region 40. The second hole region 108 may include a plurality of second through holes 103 formed with a second unit perimeter. The second unit perimeter is the total value per unit area of ​​the perimeters of the second through holes 103 located in the second hole region 108. The second unit perimeter is a value obtained by converting the total value of the perimeters of the second through holes 103 located in the second hole region 108 into a value per unit area. The second unit perimeter is obtained in the same manner as the first unit perimeter.

[0388] The second hole region 108 is a region defined by the second through holes 103 that constitute the outer periphery among the multiple second through holes 103 formed in the second unit circumferential length. In the example shown in Fig. 62, the second hole region 108 is a region defined by a thick dashed line passing through the outer edge of the second through holes 103 that constitute the outer periphery in a plan view. The outer edge of the second hole region 108 is defined by the first main body surface 30a.

[0389] The positional relationship between the first hole region 107 and the second hole region 108 is arbitrary. The positions of the first hole region 107 and the second hole region 108 may be set according to the position of the electronic device D.

[0390] For example, as shown in Fig. 62, the second hole region 108 may be located inside the first hole region 107. In this case, the second hole region 108 may be surrounded by the first hole region 107. When the first hole region 107 and the second hole region 108 are formed in a rectangular shape in a plan view, the first hole region 107 and the second hole region 108 include four sides that form the outer edge. In the example shown in Fig. 62, all of the four sides of the second hole region 108 are located inside the corresponding sides of the first hole region 107 in a plan view.

[0391] Alternatively, a part of the outer edge of the second hole region 108 may not be located inside the outer edge of the first hole region 107. For example, as shown in Fig. 65, one side of the second hole region 108 may be located outside the corresponding side of the first hole region 107 in a plan view, or may overlap the corresponding side of the first hole region 107. Alternatively, as shown in Fig. 66, two sides of the second hole region 108 may be located outside the corresponding sides of the first hole region 107 in a plan view, or may overlap the corresponding sides of the first hole region 107.

[0392] 62, the second through holes 103 located in the second hole region 108 may be arranged along the X direction with the second through holes 103 located in the first hole region 107. More specifically, the centers of the second through holes 103 located in the second hole region 108 may be arranged along the X direction with the centers of the second through holes 103 located in the first hole region 107. However, the second through holes 103 located in the second hole region 108 do not have to be arranged along the X direction with the second through holes 103 located in the first hole region 107.

[0393] 62, the second through holes 103 located in the second hole region 108 may be arranged along the Y direction with the second through holes 103 located in the first hole region 107. More specifically, the centers of the second through holes 103 located in the second hole region 108 may be arranged along the Y direction with the centers of the second through holes 103 located in the first hole region 107. However, the second through holes 103 located in the second hole region 108 do not have to be arranged along the Y direction with the second through holes 103 located in the first hole region 107.

[0394] The second unit perimeter may be different from the first unit perimeter. The second unit perimeter may be larger than the first unit perimeter. In the example shown in FIG. 62, for convenience, the perimeter of each second through hole 103 located in the first hole region 107 is constant, and the perimeter of each second through hole 103 located in the second hole region 108 is also constant. The second through holes 103 located in the first hole region 107 and the second hole region 108 are formed in a rectangular shape in a plan view. The arrangement pitch of the second through holes 103 located in the first hole region 107 is equal to the arrangement pitch of the second through holes 103 located in the second hole region 108. The planar shape of the second through holes 103 located in the second hole region 108 is larger than the planar shape of the second through holes 103 located in the first hole region 107. Therefore, the perimeter of the second through hole 103 located in the second hole region 108 is longer than the perimeter of the second through hole 103 located in the first hole region 107, and the second unit perimeter is greater than the first unit perimeter.

[0395] According to the twenty-fifth modified example, the second unit perimeter is larger than the first unit perimeter, so that the gas-liquid interface length in the second hole region 108 can be increased. Therefore, when the land connection region 40 is located in the evaporation region SR, the evaporation amount of the working steam 2a in the second hole region 108 can be increased. As described above, the gas-liquid interface length means the length of the interface between the working fluid 2b and the working steam 2a. When the land connection region 40 is located in the evaporation region SR, the interface between the working fluid 2b and the working steam 2a is usually formed in the intersection grooves 106X and 106Y near the second through hole 103. In this case, the gas-liquid interface length corresponds to the total value of the lengths of the gas-liquid interfaces formed in the intersection grooves 106X and 106Y. When the land connection region 40 is located in the condensation region CR, the interface between the working fluid 2b and the working steam 2a is usually formed in the vicinity of the intersection grooves 67X and 67Y in the passage division section 55. In this case, the gas-liquid interface length corresponds to the sum of the lengths of the gas-liquid interfaces formed in each passage division portion 55. Meanwhile, since the first unit circumferential length is smaller than the second unit circumferential length, the gas-liquid interface length in the first hole region 107 can be reduced. As a result, when the land connection region 40 is located in the evaporation region SR, the evaporation amount of the working steam 2a in the first hole region 107 can be reduced. Therefore, the working fluid 2b can be supplied to the second hole region 108 to increase the evaporation amount of the working steam 2a in the second hole region 108.

[0396] The ratio of the second unit perimeter to the first unit perimeter may be 1.1 to 20.0. A case where the land connection region 40 is located in the evaporation region SR will be described. By setting the ratio of the second unit perimeter to the first unit perimeter to be 1.1 times or more, a significant difference can be made between the evaporation amount of the working vapor 2a in the first hole region 107 and the evaporation amount of the working vapor 2a in the second hole region 108. This allows the working liquid 2b to be supplied to the second hole region 108, and the evaporation amount of the working vapor 2a in the second hole region 108 can be effectively increased. Therefore, the absorption of heat from the electronic device D can be promoted, and the heat absorption efficiency of the electronic device D can be improved. By setting the ratio of the second unit perimeter to the first unit perimeter to be 1.3 times or more, the evaporation amount of the working vapor 2a in the second hole region 108 can be more effectively increased. On the other hand, by setting the ratio of the second unit perimeter to the first unit perimeter to be 20.0 times or less, a flow path of the working liquid 2b in the second hole region 108 can be secured. This makes it possible to prevent the working fluid 2b from becoming insufficient in the second hole region 108, and to transport the working fluid 2b to near the center of the second hole region 108. Therefore, it is possible to prevent a decrease in the efficiency of heat absorption of the electronic device D.

[0397] In the example shown in Fig. 62, the perimeter of the second through hole 103 is constant in each of the first hole region 107 and the second hole region 108. However, the present disclosure is not limited to this. If the first unit perimeter is smaller than the second unit perimeter, the perimeter of the second through hole 103 located in the first hole region 107 does not have to be constant. Alternatively, if the second unit perimeter is larger than the first unit perimeter, the perimeter of the second through hole 130 located in the second hole region 108 does not have to be constant.

[0398] In the example shown in FIG. 67, a case will be described where the second hole region 108 is the region indicated by reference numeral 108X and the region indicated by reference numeral 108Y is included in the region indicated by reference numeral 108X. In this case, the perimeter of the second through hole 103 located in the first hole region 107 is constant. However, the perimeter of the second through hole 103 located in the region indicated by the reference symbol 108Y is larger than the perimeter of the second through hole 103 located in the region indicated by the reference symbol 108X. Therefore, the perimeter of the second through hole 103 located in the second hole region 108 is not constant. Even in this case, the planar shape of the second through hole 103 located in the second hole region 108 is larger than the planar shape of the second through hole 103 located in the first hole region 107. Therefore, the second unit perimeter of the second hole region 108 can be made larger than the first unit perimeter of the first hole region 107. In FIG. 67, the above-mentioned column portion 104 is omitted in order to simplify the drawing.

[0399] Alternatively, in the example shown in FIG. 67, the second hole region 108 is the region indicated by the reference symbol 108Y, and the region indicated by the reference symbol 108X is included in the first hole region 107. In this case, the perimeter of the second through hole 103 located in the second hole region 108 is constant. However, the perimeter of the second through hole 103 located in the region indicated by the reference symbol 108X is larger than the perimeter of the second through hole 103 located in the region indicated by the reference symbol 107. Therefore, the perimeter of the second through hole 103 located in the first hole region 107 is not constant. Even in this case, the planar shape of the second through hole 103 located in the second hole region 108 is larger than the planar shape of the second through hole 103 located in the first hole region 107. Therefore, the second unit perimeter of the second hole region 108 can be made larger than the first unit perimeter of the first hole region 107.

[0400] In the twenty-fifth modified example, an example in which the second unit perimeter is greater than the first unit perimeter has been described. However, the second unit perimeter may be smaller than the first unit perimeter. In this case, the gas-liquid interface length in the second hole region 108 can be reduced. As a result, when the land connection region 40 is located in the evaporation region SR, the vapor pressure of the working steam 2a in the second hole region 108 can be reduced. Therefore, the working fluid 2b is more likely to evaporate in the second hole region 108, and the working fluid 2b can be smoothly transported from the first hole region 107 to the second hole region 108. On the other hand, since the first unit perimeter is greater than the second unit perimeter, the gas-liquid interface length in the first hole region 107 can be increased. As a result, when the land connection region 40 is located in the evaporation region SR, the evaporation amount of the working steam 2a in the first hole region 107 can be increased. Therefore, the diffusion amount of the working steam 2a from the first hole region 107 to the steam passages 51 and 52 can be increased.

[0401] The twenty-sixth modified example will now be described.

[0402] In the twenty-fifth modified example, an example was described in which the first hole region 107 includes a plurality of second through holes 103 formed in a first unit circumferential length, and the second hole region 108 includes a plurality of second through holes 103 formed in a second unit circumferential length. However, the present disclosure is not limited to this. The first hole region 107 may include a plurality of second through holes 103 formed in a first unit longitudinal dimension, and the second hole region 108 may include a plurality of second through holes 103 formed in a second unit longitudinal dimension.

[0403] The first unit longitudinal dimension is the total value per unit area of ​​the longitudinal dimensions of the second through holes 103 located in the first hole region 107. The first unit longitudinal dimension is a value obtained by converting the total value of the longitudinal dimensions of the second through holes 103 located in the first hole region 107 into a value per unit area. The first unit longitudinal dimension is calculated by dividing the total value of the longitudinal dimensions of the second through holes 103 located in a measurement frame having a square shape of 2 mm x 2 mm by the area of ​​the measurement frame. Even if a part of the second through hole 103 is located outside the measurement frame, the longitudinal dimension of this second through hole 103 is used to calculate the first unit longitudinal dimension. The first unit longitudinal dimension is the average value of the values ​​calculated by positioning the measurement frame at any five points in the first hole region 107.

[0404] The first hole region 107 is a region defined by the second through holes 103 that constitute the outer periphery among the plurality of second through holes 103 formed with the first unit longitudinal dimension. In the example shown in Fig. 62, the first hole region 107 is a region defined by a thick dashed line passing through the outer edge of the second through holes 103 that constitute the outer periphery in a plan view.

[0405] The second unit longitudinal dimension is the total value per unit area of ​​the longitudinal dimensions of the second through holes 103 located in the second hole region 108. The second unit longitudinal dimension is a value obtained by converting the total value of the longitudinal dimensions of the second through holes 103 located in the second hole region 108 into a value per unit area. The second unit longitudinal dimension is obtained in the same manner as the first unit longitudinal dimension.

[0406] The second hole region 108 is a region defined by the second through holes 103 that constitute the outer periphery among the plurality of second through holes 103 formed with the second unit longitudinal dimension. In the example shown in Fig. 62, the second hole region 108 is a region defined by a thick dashed line passing through the outer edge of the second through holes 103 that constitute the outer periphery in plan view.

[0407] The longitudinal dimension of the second through hole 103 is the maximum dimension of the second through hole 103 on the first main body surface 30a. More specifically, the longitudinal dimension of the second through hole 103 is the maximum dimension of the area surrounded by the contour line 103b shown in FIG. 63B.

[0408] For example, as shown in FIG. 68A, when the second through hole 103 is formed in a rectangular shape in a plan view, the length L4 of the diagonal line of the second through hole 103 corresponds to the maximum dimension. The second through hole 103 shown in FIG. 68A is formed so that the corners are rounded, but even in this case, the length L4 of the diagonal line of the second through hole 103 corresponds to the maximum dimension. For example, as shown in FIG. 68B, when the second through hole 103 is formed in a circular shape in a plan view, the diameter L5 of the second through hole 103 corresponds to the maximum dimension. For example, as shown in FIG. 68C, when the second through hole 103 is formed in an elliptical shape in a plan view, the major axis L6 of the second through hole 103 corresponds to the maximum dimension.

[0409] The second unit longitudinal dimension may be different from the first unit longitudinal dimension. The second unit longitudinal dimension may be larger than the first unit longitudinal dimension. In the example shown in FIG. 62, for convenience, the longitudinal dimension of each second through hole 103 located in the first hole region 107 is constant, and the longitudinal dimension of each second through hole 103 located in the second hole region 108 is also constant. The second through holes 103 located in the first hole region 107 and the second hole region 108 are formed in a rectangular shape in a plan view. The arrangement pitch of the second through holes 103 located in the first hole region 107 is equal to the arrangement pitch of the second through holes 103 located in the second hole region 108. The planar shape of the second through holes 103 located in the second hole region 108 is larger than the planar shape of the second through holes 103 located in the first hole region 107. Therefore, the longitudinal dimension of the second through hole 103 located in the second hole region 108 is larger than the longitudinal dimension of the second through hole 103 located in the first hole region 107, and the second unit longitudinal dimension is larger than the first unit longitudinal dimension.

[0410] According to the twenty-sixth modified example, since the second unit longitudinal dimension is larger than the first unit longitudinal dimension, the second through holes 103 located in the second hole region 108 can be enlarged, and the flow path resistance of the working steam 2a in the second hole region 108 can be reduced. Therefore, when the land connection region 40 is located in the evaporation region SR, the evaporated working steam 2a can be smoothly diffused from the second through holes 103 through the land connection space 102 to the steam passages 51, 52. On the other hand, since the first unit longitudinal dimension is smaller than the second unit longitudinal dimension, the second through holes 103 located in the first hole region 107 can be made smaller, and the flow path resistance of the working steam 2a in the first hole region 107 can be increased. Therefore, when the land connection region 40 is located in the evaporation region SR, the evaporation amount of the working steam 2a in the first hole region 107 can be reduced. Therefore, the working fluid 2b can be supplied to the second hole region 108 to increase the evaporation amount of the working steam 2a in the second hole region 108.

[0411] The ratio of the second unit longitudinal dimension to the first unit longitudinal dimension may be 1.1 to 20.0 times. A case where the land connection region 40 is located in the evaporation region SR will be described. By setting the ratio of the second unit longitudinal dimension to the first unit longitudinal dimension to 1.1 times or more, a significant difference can be made between the evaporation amount of the working vapor 2a in the first hole region 107 and the evaporation amount of the working vapor 2a in the second hole region 108. This allows the working fluid 2b to be supplied to the second hole region 108, and the evaporation amount of the working vapor 2a in the second hole region 108 can be effectively increased. Therefore, the absorption of heat from the electronic device D can be promoted, and the heat absorption efficiency of the electronic device D can be improved. By setting the ratio of the second unit longitudinal dimension to the first unit longitudinal dimension to 1.3 times or more, the evaporation amount of the working vapor 2a in the second hole region 108 can be more effectively increased. On the other hand, by setting the ratio of the second unit longitudinal dimension to the first unit longitudinal dimension to 20.0 or less, a flow path for the working fluid 2b in the second hole region 108 can be secured. This makes it possible to prevent the working fluid 2b from becoming insufficient in the second hole region 108, and to transport the working fluid 2b to near the center of the second hole region 108. This makes it possible to prevent a decrease in the heat absorption efficiency of the electronic device D.

[0412] In the 26th modified example, as shown in FIG. 62, the longitudinal dimension of the second through hole 103 is constant in each of the first hole region 107 and the second hole region 108. However, the present disclosure is not limited to this. If the first unit longitudinal dimension is smaller than the second unit longitudinal dimension, the longitudinal dimension of the second through hole 103 located in the first hole region 107 may not be constant. Alternatively, if the second unit longitudinal dimension is larger than the first unit longitudinal dimension, the longitudinal dimension of the second through hole 103 located in the second hole region 108 may not be constant. The perimeter of each second through hole 103 located in the first hole region 107 may be constant or different. The perimeter of each second through hole 103 located in the second hole region 108 may be constant or different.

[0413] In the twenty-sixth modified example, an example in which the second unit longitudinal dimension is larger than the first unit longitudinal dimension has been described. However, the second unit longitudinal dimension may be smaller than the first unit longitudinal dimension. In this case, the second through-hole 103 located in the second hole region 108 can be made smaller. When the land connection region 40 is located in the evaporation region SR, the vapor pressure of the working steam 2a in the second hole region 108 can be reduced. This makes it easier for the working fluid 2b to evaporate in the second hole region 108, and the working fluid 2b can be smoothly transported from the first hole region 107 to the second hole region 108. On the other hand, the second through-hole 103 located in the first hole region 107 can be made larger, and the flow path resistance of the working steam 2a in the first hole region 107 can be reduced. This allows the vapor pressure of the working steam 2a in the first hole region 107 to be reduced. Therefore, the working fluid 2b is more likely to evaporate in the first hole region 107, and the amount of working vapor 2a diffusing from the first hole region 107 to the vapor passages 51, 52 can be increased.

[0414] The 27th modified example will now be described.

[0415] In the 25th modified example, an example was described in which the first hole region 107 includes a plurality of second through holes 103 formed with a first unit circumferential length, and the second hole region 108 includes a plurality of second through holes 103 formed with a second unit circumferential length. However, the present disclosure is not limited to this. The first hole region 107 may include a plurality of second through holes 103 formed with a first occupancy rate, and the second hole region 108 may include a plurality of second through holes 103 formed with a second occupancy rate. In the 27th modified example, the unit circumferential length of each second through hole 103 located in the first hole region 107 may be constant or may be different. The unit circumferential length of each second through hole 103 located in the second hole region 108 may be constant or may be different.

[0416] The first occupancy rate is the total value per unit area of ​​the area of ​​the second through holes 103 located in the first hole region 107. The first occupancy rate is a value obtained by converting the total value of the area of ​​the second through holes 103 located in the first hole region 107 into a value per unit area. The first occupancy rate is calculated by dividing the total value of the area of ​​the second through holes 103 located in a measurement frame having a square shape of 2 mm x 2 mm by the area of ​​the measurement frame. Even if a part of the second through holes 103 is located outside the measurement frame, the area of ​​the part of the second through holes 103 located inside the measurement frame is used to calculate the first occupancy rate. The first occupancy rate is the average value of the values ​​calculated by positioning the measurement frame at any five places in the first hole region 107. The area of ​​the second through holes 103 is the area on the first main body surface 30a. More specifically, the area of ​​the second through holes 103 is the area of ​​the region surrounded by the contour line 103b shown in FIG. 63B.

[0417] The first hole region 107 is a region defined by the second through holes 103 that constitute the outer periphery among the plurality of second through holes 103 formed at the first occupancy rate. In the example shown in Fig. 62, the first hole region 107 is a region defined by a thick dashed line passing through the outer edge of the second through holes 103 that constitute the outer periphery in a plan view.

[0418] The second occupancy rate is the total value per unit area of ​​the areas of the second through holes 103 located in the second hole region 108. The second occupancy rate is a value obtained by converting the total value of the areas of the second through holes 103 located in the second hole region 108 into a value per unit area. The second occupancy rate is obtained in the same manner as the first occupancy rate.

[0419] The second hole region 108 is a region defined by the second through holes 103 that constitute the outer periphery among the multiple second through holes 103 formed with the second occupancy rate. In the example shown in Fig. 62, the second hole region 108 is a region defined by a thick dashed line passing through the outer edge of the second through holes 103 that constitute the outer periphery in a plan view.

[0420] The second occupancy rate may be different from the first occupancy rate. The second occupancy rate may be larger than the first occupancy rate. In the example shown in FIG. 62, for convenience, the area of ​​each second through hole 103 located in the first hole region 107 is constant, and the area of ​​each second through hole 103 located in the second hole region 108 is also constant. The second through holes 103 located in the first hole region 107 and the second hole region 108 are formed in a rectangular shape in a plan view. The arrangement pitch of the second through holes 103 located in the first hole region 107 is equal to the arrangement pitch of the second through holes 103 located in the second hole region 108. The planar shape of the second through holes 103 located in the second hole region 108 is larger than the planar shape of the second through holes 103 located in the first hole region 107. Therefore, the second occupancy rate of the second through holes 103 located in the second hole region 108 is larger than the first occupancy rate of the second through holes 103 located in the first hole region 107.

[0421] According to the twenty-seventh modification, since the second occupancy rate is larger than the first occupancy rate, when the land connection region 40 is located in the evaporation region SR, the flow path resistance of the working steam 2a in the second hole region 108 can be reduced. As a result, the evaporated working steam 2a can be smoothly diffused from the second through hole 103 through the land connection space 102 to the steam passages 51, 52. On the other hand, since the first occupancy rate is smaller than the second occupancy rate, the flow path resistance of the working steam 2a in the first hole region 107 can be increased. As a result, the evaporation amount of the working steam 2a in the first hole region 107 can be reduced. Therefore, the working fluid 2b can be supplied to the second hole region 108 to increase the evaporation amount of the working steam 2a in the second hole region 108.

[0422] The ratio of the second occupancy rate to the first occupancy rate may be 1.1 to 100.0. A case where the land connection region 40 is located in the evaporation region SR will be described. By setting the ratio of the second occupancy rate to the first occupancy rate to 1.1 or more, a significant difference can be made between the evaporation amount of the working vapor 2a in the first hole region 107 and the evaporation amount of the working vapor 2a in the second hole region 108. This allows the working liquid 2b to be supplied to the second hole region 108, and the evaporation amount of the working vapor 2a in the second hole region 108 can be effectively increased. Therefore, the absorption of heat from the electronic device D can be promoted, and the heat absorption efficiency of the electronic device D can be improved. By setting the ratio of the second occupancy rate to the first occupancy rate to 1.3 or more, the evaporation amount of the working vapor 2a in the second hole region 108 can be more effectively increased. On the other hand, by setting the ratio of the second occupancy rate to the first occupancy rate to 100.0 or less, a flow path of the working liquid 2b in the second hole region 108 can be secured. This makes it possi...

Claims

1. A sheet for a vapor chamber, The first main surface and A second body surface located on the opposite side from the first body surface, A space that penetrates from the first main body surface to the second main body surface, The aforementioned space is located around the first land portion which extends in the first direction in a plan view, The aforementioned space is located around the second land portion, which extends in a second direction different from the first direction in a plan view, Liquid flow channels formed in the first land portion and the second land portion, It comprises a land connection area that is connected to the first land portion and also connected to the second land portion, The land connection region includes a plurality of first intersection land portions that extend in an elongated shape in plan view and in which the liquid flow channel portion is formed, a plurality of second intersection land portions that extend in a direction different from the direction in which the first intersection land portions extend in plan view and in which the liquid flow channel portion is formed, and a land intersection portion where the first intersection land portions and the second intersection land portions intersect. The land intersection portion is located on the side of the first main body surface, A land intersection space is formed on the side of the land intersection portion opposite to the first main body surface. Sheets for vapor chambers.

2. The sheet for a vapor chamber according to claim 1, wherein a column portion is formed extending from the land intersection portion to the second main body surface.

3. The sheet for a vapor chamber according to claim 2, wherein a column portion is formed extending from the land intersection portion located at the periphery of the land connection region to the second main body surface.

4. A sheet for a vapor chamber, The first main surface and A second body surface located on the opposite side from the first body surface, A space that penetrates from the first main body surface to the second main body surface, The aforementioned space is located around the first land portion which extends in the first direction in a plan view, The aforementioned space is located around the second land portion, which extends in a second direction different from the first direction in a plan view, Liquid flow channels formed in the first land portion and the second land portion, It comprises a land connection area that is connected to the first land portion and also connected to the second land portion, The land connection region includes a plurality of first intersection land portions that extend in an elongated shape in plan view and have the liquid flow channel portion formed thereon, a plurality of second intersection land portions that extend in a direction different from the direction in which the first intersection land portions extend in plan view and have the liquid flow channel portion formed thereon, and a land intersection portion where the first intersection land portions and the second intersection land portions intersect. In a portion of the peripheral edge of the land connection region, the first intersection land portion is located on the side of the first main body surface, and a first land recess is formed on the side of the first intersection land portion opposite to the first main body surface. Sheets for vapor chambers.

5. The sheet for a vapor chamber according to claim 4, wherein a column portion extending from the first intersection land portion to the second main body surface is formed in the first land recess.

6. A sheet for a vapor chamber, The first main surface and A second body surface located on the opposite side from the first body surface, A space that penetrates from the first main body surface to the second main body surface, The aforementioned space is located around the first land portion which extends in the first direction in a plan view, The aforementioned space is located around the second land portion, which extends in a second direction different from the first direction in a plan view, Liquid flow channels formed in the first land portion and the second land portion, It comprises a land connection area that is connected to the first land portion and also connected to the second land portion, The land connection region includes a plurality of first intersection land portions that extend in an elongated shape in plan view and in which the liquid flow channel portion is formed, and a plurality of second intersection land portions that extend in a direction different from the direction in which the first intersection land portions extend in plan view and in which the liquid flow channel portion is formed, It includes a plurality of land intersections where each of the first intersection land portions and each of the second intersection land portions intersect, A sheet for a vapor chamber, wherein a closure portion is formed between two adjacent first intersection land portions and between two adjacent second intersection land portions.

7. The closing portion is located on the side of the first main body surface, A sheet for a vapor chamber according to claim 6, wherein a closed space is formed on the side of the closed portion opposite to the first main body surface.

8. The sheet for a vapor chamber according to claim 6, wherein a column portion is formed extending from the closed portion to the second main body surface.

9. A vapor chamber comprising a sheet for a vapor chamber according to any one of claims 1 to 8.

10. An electronic device comprising the vapor chamber described in Claim 9.

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