Vibration generator system

Abstract

To provide a vibration generator system which can represent strong touch sense.SOLUTION: A vibration generator system comprises: a vibrator; and a driving device which switches a first period 78 and a second period 79 at a third frequency that is 1 Hz or more and 100 Hz or less in which a first signal 76 with a first frequency that is 100 Hz or more and 400 Hz or less is supplied to the vibrator during the first period, and a second signal 77 with a second frequency that is lower than the first frequency and is 10 Hz or more and 250 Hz or less is supplied to the vibrator during the second period.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a vibration generating device, and more particularly to a vibration generating device having a vibrator. [Background technology]

[0002] 2. Description of the Related Art In a vibration generating device that generates a tactile sensation by vibration of a vibrator, it is known to vibrate the vibrator using a modulated square wave (for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 8-314369 Summary of the Invention [Problem to be solved by the invention]

[0004] However, even with modulated square waves, it is difficult to express a strong tactile sensation.

[0005] The present invention has been made in consideration of the above problems, and has an object to express a strong tactile sensation. [Means for solving the problem]

[0006] The present invention is a vibration generating device comprising a vibrator, and a driving device that switches between a first period in which a first signal having a first frequency of 100 Hz or more and 400 Hz or less is supplied to the vibrator, and a second period in which a second signal having a second frequency lower than the first frequency and of 10 Hz or more and 250 Hz or less is supplied to the vibrator, and a third frequency in the range of 1 Hz or more and 100 Hz or less is switched.

[0007] In the above configuration, the first frequency may be equal to or greater than 200 Hz and equal to or less than 350 Hz, the second frequency may be equal to or greater than 10 Hz and equal to or less than 200 Hz, and the third frequency may be equal to or greater than 2 Hz and equal to or less than 30 Hz.

[0008] In the above configuration, the difference between the first frequency and the second frequency may be 50 Hz or more, and the difference between the second frequency and the third frequency may be 5 Hz or more.

[0009] In the above configuration, the first frequency may be 1.5 times or more the second frequency, and the second frequency may be 1 time or more the third frequency.

[0010] The present invention is a vibration generating device comprising a vibrator, a first period in which a first signal having a first frequency that is 0.86 to 1.14 times the resonant frequency of the vibrator is supplied to the vibrator, and a second period in which a second signal having a second frequency that is lower than the first frequency and is 100 Hz to 400 Hz, inclusive, is supplied to the vibrator, and a driving device that switches a third frequency to a frequency that is lower than the second frequency and is 1 Hz to 100 Hz, inclusive.

[0011] In the above configuration, the drive device can be configured to switch at least one of the first frequency, the second frequency, and the third frequency.

[0012] In the above configuration, the driving device may be configured to switch the third frequency, but not to switch the first frequency and the second frequency.

[0013] In the above configuration, the vibrator can be configured to include a vibration element to which the first signal and the second signal are supplied and which vibrates in response to the first signal and the second signal, and a housing to which the vibration element is fixed and which outputs the vibration of the vibration element.

[0014] In the above configuration, the housing may be pen-shaped.

[0015] In the above configuration, the vibration element may include a piezoelectric layer and a first electrode and a second electrode sandwiching the piezoelectric layer, and the first signal and the second signal may be supplied between the first electrode and the second electrode.

[0016] In the above configuration, the vibrator can be configured to include a piezoelectric layer, a first electrode and a second electrode sandwiching the piezoelectric layer, a piezoelectric element in which the first electrode and the second electrode expand and contract in a direction in which the piezoelectric layer is sandwiched when the first signal and the second signal are supplied between the first electrode and the second electrode, and a housing including a first member and a second member sandwiching the piezoelectric element in the direction, the first member and the second member pressing the piezoelectric element in the direction.

[0017] In the above configuration, the vibrator can be configured to include a piezoelectric element comprising a piezoelectric layer, a first electrode and a second electrode sandwiching the piezoelectric layer in a first direction, the piezoelectric element expanding and contracting in a second direction perpendicular to the first direction when the first signal and the second signal are supplied between the first electrode and the second electrode, and a housing extending in the second direction, being rod-shaped and having a width in the first direction that is smaller than the width in a third direction perpendicular to the first and second directions, having a narrow portion in a central portion in the second direction where the width in the first direction is narrow, and mounting the piezoelectric element on the narrow portion.

[0018] In the above configuration, the vibrator can be configured to include a piezoelectric element including a piezoelectric layer, a first electrode and a second electrode sandwiching the piezoelectric layer in a first direction, and expanding and contracting in a second direction perpendicular to the first direction when the first signal and the second signal are supplied between the first electrode and the second electrode, a vibration plate for fixing the piezoelectric element, and a housing having a frame surrounding the vibration plate and the piezoelectric element when viewed from the first direction, fixing the vibration plate at both ends of the vibration plate in the second direction, and having both ends of the vibration plate in a third direction perpendicular to the first direction and the second direction as free ends.

[0019] In the above configuration, the vibrator can be configured to include a piezoelectric layer, a first electrode and a second electrode sandwiching the piezoelectric layer, a plurality of piezoelectric elements in which the first electrode and the second electrode expand and contract in a direction in which the piezoelectric layer is sandwiched when the first signal and the second signal are supplied between the first electrode and the second electrode, and a housing including a first member and a second member sandwiching the plurality of piezoelectric elements in parallel in the direction, the first member and the second member pressing the plurality of piezoelectric elements in the direction. Effect of the Invention

[0020] According to the present invention, a strong tactile sensation can be expressed. [Brief description of the drawings]

[0021] [Figure 1] FIG. 1 is a perspective view of a vibration generator according to a first embodiment. [Diagram 2] FIG. 2 is a cross-sectional view of the vicinity of the tip of the electromagnetic exciter according to the first embodiment. [Diagram 3] FIG. 3 is a cross-sectional view of the piezoelectric element in the first embodiment. [Figure 4] FIG. 4 is a diagram showing signals supplied from the driving device to the piezoelectric element in the first embodiment. [Diagram 5] FIG. 5 is a perspective view of a vibration generator according to a second embodiment. [Figure 6] FIG. 6(a) is a plan view of a vibration generator according to a second embodiment, and FIGS. 6(b) to 6(d) are cross-sectional views taken along lines AA, BB, and CC, respectively, of FIG. 6(a). [Figure 7] FIG. 7 is a cross-sectional view of a piezoelectric element in accordance with the second embodiment. [Figure 8] FIG. 8 is a diagram illustrating a system according to the third embodiment. [Figure 9] FIG. 9 is a perspective view of a vibration generator according to a fourth embodiment. [Figure 10] FIG. 10 is a plan view of the electromagnetic exciter according to the fourth embodiment. [Figure 11]11(a) and 11(b) are cross-sectional views taken along lines AA and BB, respectively, of FIG. [Figure 12] FIG. 12 is a perspective view of a vibration generator according to a fifth embodiment. [Figure 13] FIG. 13 is a cross-sectional view of a vibration generator according to a fifth embodiment. [Figure 14] FIG. 14(a) is a plan view of a member 30 in the fifth embodiment, and FIG. 14(b) is a cross-sectional view taken along line AA of FIG. 14(a). [Figure 15] FIG. 15 is a perspective view of a film peeling device according to the sixth embodiment. [Figure 16] FIG. 16(a) is a plan view of a plate member in Example 6, and FIG. 16(b) is a cross-sectional view of the film peeling device corresponding to the cross section AA in FIG. 16(a). [Figure 17] 17(a) and 17(b) are cross-sectional views of the plate member and the film in Example 6. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] Hereinafter, the embodiments will be described with reference to the drawings.

[0023] The receptors in the skin of the human body include Pacinian corpuscles, Meissner's corpuscles, and Merkel's disks. The skin can obtain a sense of touch by signals of frequencies that are sensitive to these receptors. By using the resonant frequency as a carrier wave and modulating signals of frequencies that are sensitive to these receptors, a stronger sense of touch can be obtained. However, even in this case, it is difficult to obtain a sufficiently strong sense of touch. In addition, the resonant frequency of the vibrator is high, at 10 kHz or more. Therefore, when the resonant frequency is supplied to the vibrator, the current that flows increases and the power consumption increases. In the following embodiment, a strong sense of touch can be obtained by performing modulation using frequency shift keying technology. In addition, as an example, a strong sense of touch can be obtained even without using the resonant frequency of the vibrator. EXAMPLES

[0024] As a first embodiment capable of expressing a strong tactile sensation, a vibration generator having a pen-shaped housing using a piezoelectric element of a vertical displacement type mode (or d33 mode) will be described. FIG. 1 is a perspective view of a vibration generator according to the first embodiment. As shown in FIG. 1, the vibration generator 100 of the first embodiment includes a vibrator 55 and a driving device 52. The vibrator 55 has a pen-shaped housing 50. The housing 50 includes members 11a and 11b. The member 11a has a tip shape of a pen, and the member 11b has a grip shape of a pen. The driving device 52 may be provided inside the housing 50. The vibration generator 100 is a slice pen whose tip is brought into contact with an object such as a display panel of a tablet terminal or a smartphone. The user grasps the member 11b. The housing 50 vibrates, and the user can obtain a tactile sensation.

[0025] FIG. 2 is a cross-sectional view of the vicinity of the tip of the vibration generator according to the first embodiment. As shown in FIG. 2, members 11a and 11b are joined. A recess 13 is provided on the surface of member 11b in the +Z direction. The recess 13 has a portion 13a provided on the +Z side and a portion 13b provided on the -Z side. The planar shape of portion 13a is approximately circular, and the planar shape of portion 13b is approximately rectangular. A thread that becomes a female screw is formed on the side of portion 13a. No thread is formed on the side of portion 13b. A support member 12, piezoelectric elements 10a and 10b are inserted in this order from the -Z side into the recess 13. The support member 12, piezoelectric elements 10a and 10b are not joined to member 11b and are free to move. A support member 12 may be provided between piezoelectric element 10b and member 11a. Cables 53 a and 53 b electrically connected to the piezoelectric elements 10 a and 10 b , respectively, are electrically connected to a driving device 52 .

[0026] The member 11a has a tip 15a provided on the +Z side and a screw portion 15b provided on the -Z side. The three-dimensional shape of the tip 15a is a substantially conical shape centered on the Z axis. A male screw thread is formed on the side of the screw portion 15b. The screw portion 15b of the member 11a is joined by fitting the screw thread into the portion 13a of the recess 13 of the member 11b. By tightening the screw, the member 11a presses the piezoelectric element 10a in the +Z direction as shown by the arrow 70a via the support member 12. The member 11a presses the piezoelectric element 10b in the -Z direction as shown by the arrow 70b. The support member 12 may not be provided, and may be provided between the member 11b and the piezoelectric element 10b.

[0027] The members 11a and 11b are made of, for example, metal or resin. The support member 12 is made of a material having a larger Young's modulus than the members 11a, 11b and the piezoelectric elements 10a and 10b, for example, stainless steel. The material, shape and dimensions of the members 11a and 11b can be designed as appropriate.

[0028] FIG. 3 is a cross-sectional view of the piezoelectric element in Example 1. As shown in FIG. 3, the piezoelectric elements 10a and 10b include a piezoelectric body 80 consisting of a plurality of piezoelectric layers 81, a plurality of electrodes 82, and a plurality of electrodes 84. The plurality of piezoelectric layers 81 are laminated in the Z direction. The piezoelectric layers 81, the first electrode 82, and the second electrode 84 are flat plates extending in the XY plane. The plurality of first electrodes 82 and the plurality of second electrodes 84 are provided alternately in the Z direction. One piezoelectric layer 81 is sandwiched between one first electrode 82 and one second electrode 84 in the Z direction. A first external electrode 83 is provided on a side surface on the -X side of the piezoelectric body 80, and a second external electrode 85 is provided on a side surface on the +X side of the piezoelectric body 80. The plurality of first electrodes 82 are electrically connected to the first external electrode 83. The plurality of second electrodes 84 are electrically connected to the second external electrode 85. By applying a voltage between the first external electrode 83 and the second external electrode 85, the piezoelectric body 80 expands and contracts in the Z direction as indicated by the arrow 72 due to the inverse piezoelectric effect. A vibration mode in which the first electrode 82 and the second electrode 84 expand and contract in the Z direction sandwiching the piezoelectric layer 81 by applying a voltage between them is called a longitudinal displacement mode or d33 mode.

[0029] The piezoelectric body 80 includes a first region 86, a second region 87, and a third region 88. The first region 86 and the second region 87 are alternately provided in the Z direction. The third region 88 is provided outside the first region 86, which is the outermost region in the Z direction. The first region 86 is a region in which the first electrodes 82 and the second electrodes 84 are alternately provided at regular intervals in the Z direction. The number of layers of the piezoelectric body layer 81 in the first region 86 is, for example, 50 layers. The second region 87 and the third region 88 are regions in which the first electrodes 82 and the second electrodes 84 are not provided. The second region 87 does not have to be provided. Providing the second region 87 may improve reliability in some cases.

[0030] Driving device 52 in Fig. 2 supplies an AC voltage between first external electrode 83 and second external electrode 85 of piezoelectric elements 10a and 10b. This causes piezoelectric elements 10a and 10b to expand and contract in the Z direction as indicated by arrows 72 in Fig. 3, transmitting vibration to housing 50. As indicated by arrows 70a and 70b in Fig. 2, members 11a and 11b press against piezoelectric elements 10a and 10b, thereby increasing the Q value of the mechanical vibration of housing 50.

[0031] Examples of the material for the piezoelectric layer 81 include lead zirconate titanate (PZT: Pb(Zr,Ti)O3), barium titanate-based material (BaTiO3, where Ba may be Ca and Ti may be Zr), bismuth titanate-based material (BiTiO3, where a part of Bi may be Na), and alkali niobate-based material (NaNbO3, where Na may be Li or K). Examples of the material for the first electrode 82, the second electrode 84, the first external electrode 83, and the second external electrode 85 include metals such as Ag, Pd, Pt, Cu, Ni, and Au. The piezoelectric elements 10a and 10b are chips made of sintered bodies formed by stacking and sintering piezoelectric sheets on which the first electrode 82 and the second electrode 84 are formed on the surface. The piezoelectric elements 10a and 10b are, for example, rectangular parallelepipeds, and the widths of the piezoelectric elements 10a and 10b in the X and Y directions are, for example, 3.5 mm, and the height in the Z direction is, for example, 3 mm.

[0032] If the displacement amount ΔZ in the Z direction on the ±Z side surfaces of the piezoelectric elements 10a and 10b, the number of stacked layers of the piezoelectric layer 81 is N, the voltage applied between the first electrode 82 and the second electrode 84 is V, and the constant related to the inverse piezoelectric constant is d33, then ΔZ=d33×V×N. Therefore, the displacement amount ΔZ increases by increasing the number of stacked layers N of the piezoelectric layer 81. However, due to manufacturing constraints, there are cases where the number of stacked layers N in one piezoelectric element 10a or 10b cannot be increased. In such a case, the piezoelectric elements 10a and 10b can be stacked in the Z direction within the housing 50. This allows the total displacement amount of the piezoelectric elements 10a and 10b to be increased. The number of piezoelectric elements 10a and 10b stacked in the Z direction may be one or three or more.

[0033] FIG. 4 is a diagram showing signals supplied by the driving device to the piezoelectric element in the first embodiment. In FIG. 4, the horizontal axis indicates time, and the vertical axis indicates voltage. The driving device 52 alternates between a period 78 in which a signal 76 is supplied and a period 79 in which a signal 77 is supplied. The switching period (frequency) is period T3 (frequency f3). The signal 76 has a period T1 (frequency f1). The signal 77 has a period T2 (frequency f2). Although sine waves are often used for the signals 76 and 77, a triangular wave is used in FIG. 4 for illustration. The signals 76 and 77 may be any of sine waves, triangular waves, and sawtooth waves.

[0034] The main frequencies used are as follows: Resonant frequency of the housing 50: 10 kHz or more and 100 kHz or less Frequencies sensitive to Pacinian corpuscles: 100Hz or higher and 400Hz or lower Frequencies sensitive to Meissner's corpuscles: 10Hz or higher and 250Hz or lower Frequencies sensitive to Merkel disks: 1Hz and above and 100Hz and below

[0035] The following two modes are mainly used. Low Frequency Modulation Mode Frequency f1: Frequency sensitive to Pacinian corpuscles Frequency f2: Frequency sensitive to Meissner's corpuscles Frequency f3: Sensitive frequency to Merkel disks High Frequency Modulation Mode Frequency f1: Resonant frequency of the housing 50 Frequency f2: Frequency sensitive to Pacinian corpuscles Frequency f3: Frequency sensitive to Meissner's corpuscles or Merkel disks

[0036] [experiment] The member 11b of the housing 50 was held as if holding a pen, and the tactile sensation was investigated. The materials used in the experiment are as follows: Piezoelectric elements 10a and 10b The material of the piezoelectric body 80 is PZT. The material of the first electrode 82 and the second electrode 84 is silver-palladium. Width in X and Y directions: 3.5mm Z-direction height: 3mm Number of stacked piezoelectric layers 81 in the first region 86: 50 Number of 86 in the first area: 3 Material of support member 12: Stainless steel Material of members 11a and 11b: acrylic resin Resonant frequency of the housing 50: 30kHz Signals 76 and 77: Sine waves Ratio of periods 78 and 79: 1:1

[0037] [Low frequency modulation mode experiment] Table 1 shows the conditions when the frequency f1 is 250Hz. f1 / f2 and f2 / f3 indicate the frequency ratios, and f1-f2 and f2-f3 indicate the frequency differences. In the "preferred" section, the condition with the strongest tactile sensation is designated as "A." [Table 1]

[0038] In Table 1, frequency f1 is set to 250Hz. When frequency f2 is set to 100Hz, under condition A1, where frequency f3 is set to 3Hz, the vibration is effectively braked, providing a delicate, floating sensation. Under condition A2, where frequency f3 is set to 13Hz, the vibration becomes faster and a bouncy, pumping sensation is provided. Under condition A3, where frequency f3 is set to 63Hz, a sensation of pressure is felt, close to high frequency drive, and the impact of the vibration is small. In this way, by changing frequency f3, a sensation corresponding to frequency f3 can be obtained.

[0039] When the frequency f2 is 60Hz, condition A4 with frequency f3 of 3Hz provides a more effective braking effect than condition A1, and the brush stops smoothly. Condition A4 is optimal for the brush stopping tactile sensation. When the frequency f3 is 13Hz, condition A5 provides a more brush stopping tactile sensation and is more sharp than condition A2. When the frequency f2 is 30Hz, condition A7 with frequency f3 of 3Hz provides a brush stopping tactile sensation with heavy pressure. When the frequency f2 is 30Hz, condition A8 with frequency f3 of 13Hz provides a faint tactile sensation. When the frequency f3 is 63Hz, condition A9 provides a weaker tactile sensation than conditions A3 and A6, and there is a numb sensation overall. When the frequency f2 is 60Hz and A11 with frequency f2 of 60Hz and 30Hz and frequency f3 of 25Hz, both conditions provide a strong tactile sensation.

[0040] When the frequency f1 is 250 Hz, the tactile sensation tends to be strong when the frequency f2 is 60 Hz and 30 Hz. When the frequency f3 is 63 Hz, the sensation is heavy and the braking sensation caused by switching between the signals 76 and 77 is not felt. When the frequency f3 is 25 Hz or less, changing the frequency f2 produces different tactile sensations depending on the frequency f3.

[0041] Table 2 shows the conditions when the frequency f1 is 330 Hz. [Table 2]

[0042] In Table 2, the frequency f1 is set to 330Hz. When the frequency f2 is set to 100Hz, in condition B1 where the frequency f3 is set to 3Hz, the tactile sensation of the brush stopping is stronger than that of condition A1, and is suitable for the tactile sensation of the brush stopping. In condition B2 where the frequency f3 is set to 13Hz, it is suitable as a high-frequency tactile sensation with less impact. In condition B3 where the frequency f3 is set to 63Hz, it is a tactile sensation close to that of high-frequency driving. When the frequency f2 is set to 60Hz, in condition B4 where the frequency f3 is set to 3Hz, it is stronger than that of condition B1, and is most suitable for the tactile sensation of the brush stopping among the frequency f1 of 330Hz. In conditions B5 and B6 where the frequency f3 is set to 13Hz and 63Hz, respectively, the tactile sensation is weaker than that of conditions B2 and B3. In conditions B7 to B9 where the frequency f2 is set to 30Hz, it is a tactile sensation weaker than that of conditions B4 to B6.

[0043] When frequency f1 is 330Hz, the tactile sensation is weak when frequency f2 is 30Hz. When frequency f3 is 3Hz, condition B4 with frequency f2 of 60Hz has the strongest tactile sensation. When frequency f3 is 13Hz, condition B2 with frequency f2 of 100Hz has the strongest tactile sensation.

[0044] Table 3 shows the conditions when the frequency f1 is 190 Hz. [Table 3]

[0045] In Table 3, frequency f1 is set to 190Hz. When frequency f1 is set to 190Hz, the tactile sensation is generally weak. In condition C1, where frequency f2 is 100Hz and frequency f3 is 3Hz, braking is felt with a "thud" sensation. This is suitable for applications that reproduce the rough texture of paper. In the other conditions C1 to C9, the tactile sensation tends to be weaker than conditions A1 to A9 and conditions B1 to B9.

[0046] Table 4 shows the conditions when the frequency f1 is 330 Hz. [Table 4]

[0047] In Table 4, the frequency f1 is set to 330Hz, and the frequency f2 is set to 200Hz, 110Hz, and 10Hz, which are different from those in Table 2. In conditions D1, D4, and D7, where the frequency f3 is 3Hz, a strong tactile sensation is obtained. In condition D7, a tactile sensation close to the heart sound and different from conditions D1 and D4 is obtained. In condition D2, where the frequency f3 is 13Hz and the frequency f2 is 200Hz, a strong tactile sensation is obtained.

[0048] To summarize the above, when the frequency f3 is 3Hz and the frequency f1 is 330Hz, a strong tactile sensation with a braking effect is obtained when the frequency f2 is between 10Hz and 200Hz. Even if the frequency f1 is 190Hz or 250Hz, if the frequency f2 is 60Hz or 100Hz, a strong tactile sensation with a faster tempo is obtained than when the frequency f1 is 3Hz. When the frequency f3 is 63Hz, the tactile sensation with a braking effect is not strong.

[0049] Furthermore, experiments F1 to F6 were carried out. Table 5 shows the conditions of experiments F1 to F8. [Table 5]

[0050] First, in experiment F1 in Table 5, frequencies f1 and f3 were set to 250Hz and 13Hz, respectively, and frequency f2 was set to 30Hz, 60Hz, and 110Hz. When frequency f2 is 110Hz, it is difficult to obtain the tactile sensation of frequency f2. When frequency f2 is set to 60Hz, the tactile sensation of frequency f2 is obtained, and when frequency f2 is set to 30Hz, the tactile sensation of frequency f2 is obtained more than at 60Hz.

[0051] In experiment F2, frequencies f1 and f2 were set to 250Hz and 30Hz, respectively, and frequency f3 was set to 1Hz, 3Hz, 6Hz, and 8Hz. When frequency f3 was 1Hz, there was a large gap between periods when strong tactile sensations were felt. When frequency f3 was 3Hz, the gap between periods when strong tactile sensations were felt was moderate. When frequency f3 was 6Hz, there was no gap between periods when strong tactile sensations were felt. When frequency f3 was 8Hz, there was no gap between periods when strong tactile sensations were felt, and a stronger tactile sensation was obtained than when frequency f3 was 6Hz.

[0052] In experiment F3, the frequencies f1 and f3 were set to 330 Hz and 8 Hz, respectively, and the frequency f2 was set to 20 Hz, 30 Hz, 60 Hz, and 100 Hz. In experiment F3, unlike experiment F1, the difference in tactile sensation due to frequency f2 was hardly felt.

[0053] In experiment F4, the frequencies f1 and f2 were set to 330Hz and 30Hz, respectively, and the frequency f3 was set to 1Hz, 3Hz, 6Hz, and 8Hz. When the frequency f3 was changed, the tactile sensation changed in the same way as when the frequency f1 was set to 250Hz. The trend was the same as in experiment F2.

[0054] In experiment F5, the frequencies f1 and f3 were set to 330Hz and 3Hz, respectively, and the frequency f2 was set to 20Hz, 30Hz, 100Hz, 200Hz, and 250Hz. When the frequency f2 was between 20Hz and 100Hz, the tactile sensation was almost unchanged, as in experiment F3. When the frequency f2 was 200Hz and 250Hz, the vibration became finer and the tactile sensation of frequency f3 was hardly felt.

[0055] In experiment F6, the frequencies f1 and f2 were set to 330 Hz and 250 Hz, respectively, and the frequency f3 was set to 1 Hz, 3 Hz, and 8 Hz. The tactile sensation of the frequency f3 was not felt, and the tactile sensation hardly changed even when the frequency f3 was changed.

[0056] In experiment F7, frequencies f1 and f2 were set to 190 Hz and 50 Hz, respectively, and frequency f3 was set to 1 Hz, 3 Hz, 6 Hz, and 8 Hz. The tactile sensation of frequency f3 was obtained, but it was weaker than that in experiments F2 and F4.

[0057] In experiment F8, frequencies f1, f2, and f3 were set to 190 Hz, 15 Hz, and 6 Hz, respectively. Although the tactile sensation of frequency f3 was obtained, it was weaker than experiments F2 and F4, similar to experiment F7.

[0058] To summarize the above, the frequency f1 gives a stronger tactile sensation at 250Hz and 330Hz than at 190Hz. At frequencies f2 above 200Hz, it becomes difficult to obtain a tactile sensation with a period of frequency f3. At frequencies f3 between 3Hz and 8Hz, a tactile sensation corresponding to the period of frequency f3 can be obtained.

[0059] As described above, the driving device 52 switches between a period 78 (first period) during which a signal 76 (first signal) having a frequency f1 (first frequency) is supplied to the vibrator 55, and a period 79 (second period) during which a signal 77 (second signal) having a frequency f2 (second frequency) is supplied to the vibrator 55. At this time, the frequency f1 is set to 100 Hz or more and 400 Hz or less, which is a frequency to which the Pacinian corpuscles are sensitive. The frequency f2 is set to a frequency lower than the frequency f1 and 10 Hz or more and 250 Hz or less, which is a frequency to which the Meissner's corpuscles are sensitive. The frequency f3 (third frequency) for switching between the periods 78 and 79 is set to 1 Hz or more and 100 Hz or less, which is a frequency to which the Merkel disks are sensitive. This allows the skin to be given a strong tactile sensation similar to that of the high frequency modulation mode. Since the frequencies f1 and f2 are lower than those of the high frequency modulation mode, power consumption can be reduced compared to the high frequency modulation mode.

[0060] As shown in Tables 1 to 5, the frequency f1 can enhance the tactile sensation at 250 Hz and 330 Hz. Therefore, the frequency f1 is preferably 150 Hz or more, more preferably 200 Hz or more, and preferably 350 Hz or less. As shown in Tables 1 to 5, the frequency f2 can enhance the tactile sensation at 30 Hz, 60 Hz, 100 Hz, and 200 Hz. Therefore, the frequency f2 is preferably 10 Hz or more, more preferably 20 Hz or more, preferably 250 Hz or less, more preferably 200 Hz or less, and more preferably 100 Hz or less. As shown in Tables 1 to 5, the frequency f3 can enhance the tactile sensation at 3 Hz, 6 Hz, 8 Hz, 13 Hz, and 25 Hz. Therefore, the frequency f3 is preferably 2 Hz or more, preferably 30 Hz or less, more preferably 25 Hz or less, and even more preferably 10 Hz or less.

[0061] From Tables 1 to 4, the tactile sensation tends to be stronger when the difference f1-f2 between frequencies f1 and f2 and the difference f2-f3 between frequencies f2 and f3 are larger. Therefore, the difference f1-f2 is preferably 50 Hz or more, and more preferably 100 Hz or more. The difference f2-f3 is preferably 5 Hz or more, and more preferably 10 Hz or more.

[0062] From Tables 1 to 4, the tactile sensation tends to be stronger when the ratio f1 / f2 between frequencies f1 and f2 and the ratio f2 / f3 between frequencies f2 and f3 are larger. Therefore, the ratio f1 / f2 is preferably 1.5 times or more, and more preferably 2 times or more. The ratio f2 / f3 is preferably 1 time or more, and more preferably 5 times or more.

[0063] [High frequency modulation mode experiment] Table 6 shows the conditions when the frequency f1 is 30 kHz. [Table 6]

[0064] As shown in Table 6, in the high frequency modulation mode, the frequency f1 is set to 30 kHz, which is the resonant frequency of the housing 50, and the frequency f2 is set to 250 Hz, which is the frequency sensitive to the Pacinian corpuscles. In condition E1, where the frequency f1 is 3 Hz, the sensation is that of stepping on the brakes of a pen pulsating at 3 Hz, and there is a sensation of it stopping with a jerk. In condition E2, where the frequency f1 is 14 Hz, there is a sensation of fine pumping, and a sensation of bouncing with a rattle. In condition E3, where the frequency f1 is 60 Hz, there is a powerful sense of pressure, and there is a sensation of heavy pressure with a thud. In this way, different tactile sensations can be obtained by changing the frequency f3. By setting the frequency f1 to the resonant frequency of the vibrator 55, a strong tactile sensation is obtained on the skin.

[0065] According to the findings of the inventors, the frequency f1 may be in the range of 0.86 to 1.14 times the resonant frequency of the vibrator 55, and preferably 0.9 to 1.1 times. The resonant frequency may be the fundamental mode resonant frequency or the harmonic mode resonant frequency. The frequency f1 is, for example, 10 kHz to 100 kHz, or 20 kHz to 70 kHz.

[0066] The frequency f2 is a frequency to which the Pacinian corpuscles are sensitive, and is 100 Hz or more and 400 Hz or less. The frequency f2 is preferably 150 Hz or more, more preferably 200 Hz or more, and is preferably 350 Hz or less. The frequency f3 is a frequency to which the Meissner's corpuscles and Merkel's disks are sensitive, and is lower than the frequency f2, and is 1 Hz or more and 100 Hz or less. The frequency f2 is preferably 2 Hz or more and 60 Hz or less.

[0067] The voltage amplitude of the signal 76 in the period 78 and the voltage amplitude of the signal 77 in the period 79 are, for example, approximately equal. The voltage amplitude of the signal 76 in the period 78 and the voltage amplitude of the signal 77 in the period 79 may be different, but the voltage amplitude of the signal 76 in the period 78 is preferably 1 / 2 to 2 times the voltage amplitude of the signal 77 in the period 79, more preferably 3 / 4 to 4 / 3 times, and even more preferably 9 / 10 to 10 / 9 times. The length of the period 78 and the length of the period 79 are, for example, approximately equal. If the period 78 or 79 is too short, it becomes difficult to obtain a tactile sensation at the frequency f3. From this viewpoint, the length of the period 78 is preferably 1 / 2 to 2 times the length of the period 79, more preferably 3 / 4 to 4 / 3 times, and even more preferably 9 / 10 to 10 / 9 times.

[0068] In the first embodiment, the vibrator 55 includes piezoelectric elements 10a and 10b of a vertical displacement mode and a housing 50. The housing 50 includes members 11a (first member) and 11b (second member) that sandwich the piezoelectric elements 10a and 10b in the Z direction, and the members 11a and 11b press the piezoelectric elements 10a and 10b in the Z direction. This can improve the Q value of the mechanical vibration. This can enhance the tactile sensation. EXAMPLES

[0069] As a second embodiment, a vibration generator having a pen-shaped housing using a piezoelectric element of a lateral displacement mode (or d31 mode) will be described. Fig. 5 is a perspective view of the vibration generator according to the second embodiment. Fig. 6(a) is a plan view of the vibration generator according to the second embodiment, and Figs. 6(b) to 6(d) are AA, BB and CC cross-sectional views of Fig. 6(a), respectively. The direction in which the long side of the piezoelectric element 10 extends is the X direction, the direction in which the short side of the piezoelectric element 10 extends is the Y direction, and the direction perpendicular to the X and Y directions is the Z direction.

[0070] As shown in FIG. 5 to FIG. 6(d), in the vibration generator 102 of the second embodiment, the housing 50 is rod-shaped and flat. The tip in the -X direction is pointed. A narrow portion 17 is provided at the tip side in the X direction of the housing 50. The upper surface of the narrow portion 17 is provided with a recess 16 recessed in the -Z direction. A piezoelectric element 10 is provided on the upper surface of the narrow portion 17 and on the bottom surface of the recess 16. The piezoelectric element 10 is a piezoelectric element of a lateral displacement type mode, and has a rectangular planar shape. The long side direction and the short side direction of the rectangle are the X direction and the Y direction, respectively. The piezoelectric element 10 is directly attached to the bottom surface of the recess 16 on the upper surface of the narrow portion 17 using an adhesive. When the piezoelectric element 10 expands and contracts in the X direction, the narrow portion 17 vibrates so as to bend in the Z direction. A lid portion 15 is fitted onto the narrow portion 17. The lid portion 15 protects the piezoelectric element 10 and the like. The material of the housing 50 and the cover 15 is, for example, metal or resin. The dimensions of the housing 50 in the X direction, Y direction, and Z direction are, for example, 138 mm, 12 mm, and 6.5 mm. The material, shape, and dimensions of the housing 50 can be designed appropriately.

[0071] FIG. 7 is a cross-sectional view of a piezoelectric element in Example 2. As shown in FIG. 7, in the piezoelectric element 10 having a lateral displacement mode, the number of piezoelectric layers 81 is smaller than that of the piezoelectric elements 10a and 10b having a longitudinal displacement mode in FIG. 3. The number of piezoelectric layers 81 is, for example, eight layers. The external electrode 83 is provided around the upper surface (surface on the +Z side) of the piezoelectric body 80. The external electrode 85 is provided around the upper surface (surface on the +Z side) and the lower surface (surface on the -Z side) of the piezoelectric body 80. The external electrode 85 on the upper surface of the piezoelectric body 80 and the first electrode 82 of the uppermost layer are provided with the uppermost piezoelectric layer 81 sandwiched therebetween, and the external electrode 85 on the lower surface of the piezoelectric body 80 and the first electrode 82 of the lowermost layer are provided with the lowermost piezoelectric layer 81 sandwiched therebetween. The cables 53a and 53b electrically connected to the external electrodes 83 and 85, respectively, are electrically connected to the driving device 52. The other materials of the piezoelectric element 10 are the same as those of Example 1, and will not be described.

[0072] 6(a), the planar shape of the piezoelectric element 10 is a rectangle with its longer side in the X direction. In the lateral displacement mode, a first electrode 82 and a second electrode 84 sandwich a piezoelectric layer 81 in the Z direction (first direction), and when a voltage is supplied between the first electrode 82 and the second electrode 84, the piezoelectric element 10 expands and contracts in the X direction (second direction perpendicular to the first direction) as indicated by arrow 71.

[0073] As shown in FIG. 5, it is difficult to accommodate the piezoelectric elements 10a and 10b in the vertical displacement mode in a rod-shaped housing 50 whose width in the Z direction is smaller than its width in the Y direction (a third direction perpendicular to the first and second directions). This is because the piezoelectric elements 10a and 10b have a large number of layers and become thick. Therefore, a piezoelectric element 10 in the horizontal displacement mode is used. However, it is difficult to vibrate the housing 50 with the piezoelectric element 10 in the horizontal displacement mode. Therefore, a narrow width portion 17 is provided in the housing 50, in which the width in the Z direction is narrowed at the center in the X direction. The piezoelectric element 10 is mounted on the narrow width portion 17. As a result, the narrow width portion 17 is easily deflected in the Z direction because its width in the Z direction is narrow. By mounting the piezoelectric element 10 on the narrow width portion 17, the housing 50 can be deflected and vibrated.

[0074] As in the second embodiment, the slice pen using the piezoelectric element 10 in the lateral displacement mode can also provide the user with a tactile sensation similar to that in the first embodiment. EXAMPLES

[0075] FIG. 8 is a diagram showing a system according to a third embodiment. As shown in FIG. 8, a system 103 of the third embodiment includes the vibration generator 100 or 102 of the first or second embodiment and a panel 18. The panel 18 is, for example, a display panel. A user brings the tip of a vibrator 55 into contact with the panel 18. The driving device 52 supplies a signal as shown in FIG. 4 to the piezoelectric elements 10a and 10b, or 10, in the vibrator 55. The driving device 52 changes the frequency f1 to f3 of the signal supplied to the vibrator 55 based on the input switching signal 54. This allows the user to obtain various tactile sensations. For example, when the user brings the tip of the vibrator 55 into contact with the panel 18 and moves the vibrator 55, the user can obtain the tactile sensation of paper quality such as rough paper or smooth paper. In addition, the user can obtain the tactile sensation of moving the brush and operating the brush, such as brush stop. Furthermore, for example, in the case where a line is displayed on the panel 18 when the tip of the vibrator 55 moves over the upper surface of the panel 18, it is possible to provide the user with a different tactile vibration depending on the color of the displayed line.

[0076] According to the third embodiment, the driving device 52 switches at least one of the frequencies f1 to f3 based on the switching signal 54. This allows the user to obtain a different tactile sensation. In particular, the driving device 52 switches the frequency f3 based on the switching signal 54, but does not switch the frequencies f1 and f2. In this way, by limiting the frequency to be switched based on the switching signal 54 to f3, the driving device 52 can be simplified, and by switching the frequency f3, the user can obtain a different tactile sensation.

[0077] As in the first to third embodiments, the housing 50 is pen-shaped, which allows the user to feel the texture of paper or a brush. EXAMPLES

[0078] Example 4 is an example of a vibration generator using a miniaturizable vibrator using a lateral displacement mode piezoelectric element. Fig. 9 is a perspective view of the vibration generator according to Example 4. Fig. 10 is a plan view of the vibration generator according to Example 4. Figs. 11(a) and 11(b) are AA and BB cross-sectional views of Fig. 10, respectively. Fig. 9 is a perspective view with the plate member 28, the vibration plate 23, and the piezoelectric element 10 removed. Fig. 10 is a plan view seen from above with the plate member 28 removed. The direction in which the long side of the piezoelectric element 10 extends is the X direction, the direction in which the short side of the piezoelectric element 10 extends is the Y direction, and the direction perpendicular to the X direction and the Y direction is the Z direction.

[0079] 9 to 11(b), in a vibration generator 104 of the fourth embodiment, the planar shape of a housing 50 is a rectangle whose longer and shorter sides extend in the X and Y directions, respectively. Plate members 27 and 28 are provided on the lower and upper surfaces of the housing 50, respectively.

[0080] The housing 50 includes a frame 20a, a step 20b, and a lower wall 20c. The step 20b is provided inside the frame 20a. The lower wall 20c is provided inside the step 20b. An opening 22 is provided in the center of the lower wall 20c. The planar shapes of the frame 20a, the step 20b, the lower wall 20c, and the opening 22 are rectangular with long and short sides extending in the X and Y directions, respectively. A fixing member 21 is attached to both sides of the housing 50 in the X direction. The fixing member 21 is made of a material harder than the housing 50. The fixing member 21 has an L-shaped cross section and includes a main body 21a and a step 21b. The heights of the top surface (the surface on the +Z side) of the main body 21a and the top surface (the surface on the +Z side) of the frame 20a are approximately the same. The height of the upper surface of step portion 21b and the height of the upper surface of step portion 20b are approximately the same. A hole connecting the inside and outside of housing 50 is provided on the +X side of the side wall on the -Y side of frame body 20a.

[0081] A piezoelectric element 10 is fixed to the center of the upper surface (surface on the +Z side) of the diaphragm 23 with an adhesive or the like. The piezoelectric element 10 is, for example, the piezoelectric element shown in FIG. 7. The planar shape of the diaphragm 23 and the piezoelectric element 10 is a rectangle whose long sides and short sides extend in the X direction and the Y direction, respectively. The width of the diaphragm 23 in the Y direction is approximately the same as the width of the piezoelectric element 10 in the Y direction. A weight 24 is fixed to the center of the lower surface (surface on the -Z side) of the diaphragm 23 with an adhesive or the like. The weight 24 fits within the opening 22 of the lower wall portion 20c, and the lower surface of the weight 24 is located below the lower surface of the lower wall portion 20c. The weight 24 is not bonded to the housing 50. The planar shape of the weight 24 is rectangular.

[0082] Both ends of the vibration plate 23 in the X direction are fixed to the upper surface of the step portion 21b of the fixing member 21 with an adhesive or the like. The main body portion 21a is located on the outer side of the vibration plate 23 in the X direction. The main body portion 21a can restrict the movement of the vibration plate 23 in the X direction. In a plan view, the piezoelectric element 10 does not overlap the step portion 21b. Cables 53a and 53b electrically connected to the external electrodes 85 and 83 of the piezoelectric element 10, respectively, are drawn out to the outside of the housing 50 through holes provided in the frame body 20a and are electrically connected to the driving device 52. The configuration of the piezoelectric element 10 is the same as that in FIG. 4.

[0083] Plate member 27 is fixed to the lower surface of housing 50. Recesses are provided at the four corners of the upper surface of plate member 27. Protrusions are provided at the four corners of the lower surface of housing 50. The protrusions are fitted into the recesses. Bonding material 26 bonds housing 50 and plate member 27. The lower surface of weight 24 and the upper surface of plate member 27 are not bonded or fixed to each other. There may be a distance between the lower surface of weight 24 and the upper surface of plate member 27. The distance between the lower surface of weight 24 and the lower surface of plate member 27 is preferably such that the lower surface of weight 24 comes into contact with the upper surface of plate member 27 when diaphragm 23 vibrates.

[0084] The plate member 28 is fixed to the upper surface of the housing 50. The plate member 28 has recesses at the four corners of the lower surface thereof. The plate member 28 has protrusions at the four corners of the upper surface thereof. The protrusions are fitted into the recesses. The housing 50 and the plate member 28 are joined using an adhesive or the like. The plate member 28 has holes 29 penetrating the plate member 28 in the Z direction. The holes 29 function as sound emission holes that emit sound waves in the housing 50 to the outside. The material of the housing 50, the plate members 27, and 28 is, for example, a resin or a metal. The material of the fixing member 21 has a Young's modulus greater than that of the housing 50. The dimensions of the housing 50 in the X direction, Y direction, and Z direction are, for example, 26 mm, 12 mm, and 3 mm. The thickness of the plate members 27 and 28 is, for example, 0.8 mm. The material, shape, and dimensions of the housing 50, the plate members 27, and 28 can be designed as appropriate.

[0085] In the fourth embodiment, the housing 50 has a frame body 20a surrounding the piezoelectric element 10 and the vibration plate 23 in the lateral displacement mode as viewed from the Z direction, and the vibration plate 23 is fixed at both ends of the vibration plate 23 in the X direction, and both ends of the vibration plate 23 in the Y direction are free ends. As a result, when the piezoelectric element 10 expands and contracts as shown by the arrow 71 in FIG. 11(a), the vibration plate 23 vibrates in the Z direction. In this way, an inertial drive method can be realized. Since the piezoelectric element 10 in the lateral displacement mode is attached to the vibration plate 23, the total thickness of the housing 50, the plate members 27 and 28 can be reduced. Therefore, a thin vibration generating device can be realized. In addition, the number of layers of the piezoelectric layer 81 of the piezoelectric element 10 in the lateral displacement mode can be reduced, and the electrostatic capacitance can be reduced. This makes it possible to suppress the power consumption when driving at a high frequency. In one example, the power consumption can be reduced compared to a vibration generating device that presses a piezoelectric element in the vertical displacement mode from the vibration direction.

[0086] The Q value of the mechanical vibration can be increased by providing the plate members 27 and 28. Furthermore, the weight 24 can provide an inertia effect, enabling high output.

[0087] In the fourth embodiment, the vibration generator 104 can be made thin. Therefore, the vibration generator 104 can be attached to the earlobe or the abdominal cavity of the concha. In addition, by clamping the vibration generator 104 on the rear side of the outer ear, it can be used as an earphone by bone conduction. In addition, by providing the vibration generator 104 of the fourth embodiment on the fingertips of a glove or the band of a watch, it is possible to give a tactile sensation to the fingertips or the arm. Furthermore, by providing the vibration generator 104 on a hair ornament or a hair clip, it is possible to give a tactile sensation to the head. The driving device 52 supplies a signal as shown in FIG. 4 to the vibrator 55, and the frequencies f1 to f3 are appropriately set, so that various tactile sensations can be given to the user. EXAMPLES

[0088] Example 5 is an example in which vertical displacement mode piezoelectric elements are arranged in parallel to enable high output. Fig. 12 is a perspective view of a vibration generator according to Example 5. Fig. 13 is a cross-sectional view of the vibration generator according to Example 5. The direction in which member 31 and member 32 sandwich member 30 is the Z direction, and the directions perpendicular to the Z direction are the X direction and the Y direction. C in Figs. 12 and 13 is the center line.

[0089] As shown in Figs. 12 and 13, in the vibration generator 106 of the fifth embodiment, the housing 50 includes members 30 to 32. A flat plate member 33 is provided between the members 30 and 31, and a flat plate member 34 is provided between the members 30 and 32. A rod-shaped protruding portion 38 that protrudes in the -Z direction is provided on the -Z side surface of the member 31. A hole 37 is provided in the member 32 into which the tip of the protruding portion 38 fits. A thread that becomes a male screw is provided on the tip of the protruding portion 38, and a thread that becomes a female screw is provided on the inner surface of the hole 37. The members 31 and 32 are joined by fitting the threads together.

[0090] The member 30, the flat plate members 33 and 34 are provided with openings 35, 33a and 34a through which the protrusion 38 penetrates. The protrusion 38 is not joined to the member 30, the flat plate members 33 and 34, and can move freely within the openings 35, 33a and 34a. The members 30 to 32 and the flat plate members 33 and 34 have circular planar shapes, and the centers of the planar shapes are approximately aligned. The members 30 to 32 and the flat plate members 33 and 34 are made of a material such as resin or metal. The members 31, 32, and the flat plate members 33 and 34 are preferably made of a hard material, such as stainless steel or aluminum. The member 30 is a member for restricting the movement of the piezoelectric elements 10a and 10b, and may be made of a soft material such as resin. The diameter of the members 30 to 32 and the flat plate members 33 and 34 is, for example, 20 mm, and the dimensions in the Z direction of the members 30, 31, 32, and the flat plate members 33 and 34 are, for example, 5.8 mm, 30 mm, 8 mm, 1 mm, and 1 mm, respectively. The materials, shapes, and dimensions of the members 30, 31, 32, and the flat plate members 33 and 34 can be designed as appropriate.

[0091] FIG. 14(a) is a plan view of the member 30 in the fifth embodiment, and FIG. 14(b) is a cross-sectional view taken along line AA of FIG. 14(a). In FIG. 14(b), in addition to the member 30, flat plate members 33 and 34 are illustrated. As shown in FIG. 14(a) and FIG. 14(b), the planar shape of the member 30 and the opening 35 is circular, and the center of the circle of the member 30 and the opening 35 approximately coincides with the center line C. The member 30 has an opening 36. The planar shape of the opening 36 is approximately rectangular. Three openings 36 are provided. Two piezoelectric elements 10a and 10b are provided in one opening 36. The piezoelectric elements 10a and 10b are, for example, the piezoelectric elements shown in FIG. 3, and are stacked in the Z direction. The piezoelectric elements 10a and 10b are not bonded to the opening 36 and can move freely within the opening 36.

[0092] The +Z side surface of piezoelectric element 10a protrudes in +Z beyond the +Z side surface of member 30, and the -Z side surface of piezoelectric element 10b protrudes in -Z beyond the -Z side surface of member 30. The +Z side surface of piezoelectric element 10a contacts flat plate member 33, and the -Z side surface of piezoelectric element 10b contacts flat plate member 34. In Figures 12 and 13, by tightening the screw between protrusion 38 and hole 37, member 31 presses piezoelectric element 10a in the -Z direction via flat plate member 33 as indicated by arrow 74a. Member 32 presses piezoelectric element 10b in the +Z direction via flat plate member 34 as indicated by arrow 74b.

[0093] According to the fifth embodiment, the housing 50 presses the piezoelectric elements 10a and 10b in the vertical displacement mode, thereby improving the Q value of the mechanical vibration of the housing 50. Therefore, even a small vibration generating device can achieve high output. Furthermore, the members 31 and 32 press the multiple piezoelectric elements 10a and 10b in parallel, thereby enabling higher output. Although an example in which two piezoelectric elements 10a and 10b are arranged in the Z direction in one opening 36 has been described, one opening 36 may be provided with one piezoelectric element or three or more piezoelectric elements.

[0094] Between the piezoelectric element 10a and the plate member 33, and between the piezoelectric element 10b and the plate member 34, supporting members having a larger Young's modulus than the piezoelectric elements 10a and 10b may be provided.

[0095] A user can obtain a tactile sensation by gripping the housing 50 of the vibration generator 106. For example, by installing the vibration generator 106 on the handlebars of a bicycle, the rider of the bicycle can obtain information through vibration. The driver 52 supplies a signal as shown in FIG. 4 to the vibrator 55, and the frequencies f1 to f3 are appropriately set, so that the user can be given various tactile sensations. For example, the user can be given different tactile sensations depending on the information provided to the user. EXAMPLES

[0096] Example 6 is an example of a film peeling device. Fig. 15 is a perspective view of the film peeling device according to Example 6. Fig. 16(a) is a plan view of a plate member in Example 6, and Fig. 16(b) is a cross-sectional view of the film peeling device corresponding to the AA cross section of Fig. 16(a). In plate member 40, the direction in which film 48 is pulled out is defined as the -X direction, the thickness direction of plate member 40 is defined as the Z direction, and the direction perpendicular to the X direction and the Z direction is defined as the Y direction.

[0097] As shown in FIG. 15 to FIG. 16(b), in the film peeling device 108 of the sixth embodiment, the housing 50 includes a plate member 40 and a member 41. The member 41 has a flat plate portion having a rectangular planar shape, and the peripheral portion of the flat plate portion is bent in the +Z direction. The bent portion surrounds the plate member 40 in the X direction and the Y direction, and is provided in contact with the side walls of the plate member 40 on the X side and the Y side. A space 47 made of a gas such as air is formed between the member 41 and the plate member 40. Side walls 46 extending in the +Z direction are fixed to both sides in the Y direction of the end portion in the +X direction of the housing 50. Rollers 43 and 44 are provided between the two side walls 46. The roller 43 is a film roller, and a film roll 45 around which a film 48 is wound is installed. The roller 44 is a tension roller, and applies tension to the film 48 when the film 48 is pulled out.

[0098] The plate member 40 is flat and has a rectangular planar shape. The upper surface (+Z side surface) of the plate member 40 is substantially flat. A plurality of holes 42 are provided in the center of the plate member 40 in the X direction, penetrating the plate member 40. The holes 42 vacuum-adsorb the film 48. The piezoelectric element 10 is fixed to the lower surface (-Z side surface) of both ends of the plate member 40 in the X direction with an adhesive or the like. The piezoelectric element 10 is, for example, the piezoelectric element shown in FIG. 7, and is electrically connected to the driving device 52. A pump (not shown) sucks air from the space 47 through the exhaust path 49. Negative pressure is created in the space 47, and the holes 42 vacuum-adsorb and fix the film 48 on the plate member 40.

[0099] A film roll 45 with a film 48 wound around it is attached to the roller 43. The film 48 is pulled out from the film roll 45 onto the upper surface of the plate member 40 via the roller 44. The pulled out film 48 is fixed to the upper surface of the plate member 40 by suction through the holes 42.

[0100] 17(a) and 17(b) are cross-sectional views of the plate member and the film in the sixth embodiment. As shown in FIG. 17(a), the film 48 is a laminated film in which the films 48a and 48b are laminated. The lower surface of the film 48a is fixed, for example, by vacuum suction. The user brings the tip of the finger 56 into contact with the upper surface of the film 48b. The driving device 52 supplies a signal to the piezoelectric element 10, and a standing wave of vibration is formed on the upper surface of the plate member 40. The vibration is transmitted to the finger 56. When the driving device 52 supplies a signal as shown in FIG. 4 to the piezoelectric element 10, the tip of the finger 56 feels as if something is catching on it. By appropriately setting the frequencies f1 to f3 of the signals, the finger 56 can be more strongly caught.

[0101] As shown in FIG. 17(b), when the finger 56 is moved, the films 48b and 48a are misaligned, and the film 48b is peeled off from the film 48a. When the user grasps and pulls the film 48b with the finger 56, the film 48b is peeled off from the film 48a. The film 48 is, for example, bag-shaped, and a bag can be formed by peeling the films 48a and 48b off. The films 48a and 48b are, for example, resin films or metal films, and one example is a polyethylene film.

[0102] The signal supplied by the driving device 52 can be used for vibration generating devices other than those in the first to sixth embodiments. For example, piezoelectric elements 10 in a lateral displacement mode are provided on both sides of a flat plate, and the signal shown in FIG. 4 is supplied to the piezoelectric elements 10. This makes it possible to rotate or move an object placed on the flat plate. By using a figure or the like as the object, the flat plate can be used as a toy or a soothing item.

[0103] In the first to sixth embodiments, the vibrator 55 includes a vibration element to which the signals 76 and 77 are supplied and which vibrates in response to the signals 76 and 77, and a housing 50 to which the vibration element is fixed and which outputs the vibration of the vibration element. This can enhance the tactile sensation. As the vibration element, the piezoelectric elements 10, 10a, and 10b are provided with a piezoelectric layer 81, a first electrode 82, and a second electrode 84 sandwiching the piezoelectric layer 81, and the signals 76 and 77 are supplied between the first electrode 82 and the second electrode 84. The vibration element may be an element other than a piezoelectric element.

[0104] Although the embodiments of the present invention have been described in detail above, the present invention is not limited to such specific embodiments, and various modifications and variations are possible within the scope of the gist of the present invention described in the claims. [Explanation of symbols]

[0105] 10, 10a, 10b Piezoelectric element 11a, 11b Members 12 Support member 13a, 13b part 50 Case 52 Drive unit 54, 76, 77 signals 55 Vibrator 80 Piezoelectric 82, 84 electrode

Claims

1. A vibrator; a drive device that switches between a first period during which a first signal having a first frequency of 100 Hz or more and 400 Hz or less is supplied to the vibrator and a second period during which a second signal having a second frequency lower than the first frequency and being 10 Hz or more and 250 Hz or less is supplied to the vibrator, with a third frequency being 1 Hz or more and 100 Hz or less; A vibration generating device comprising:

2. 2 . The vibration generator according to claim 1 , wherein the first frequency is not less than 200 Hz and not more than 350 Hz, the second frequency is not less than 10 Hz and not more than 200 Hz, and the third frequency is not less than 2 Hz and not more than 30 Hz.

3. a difference between the first frequency and the second frequency is 50 Hz or more; The vibration generator according to claim 2 , wherein the difference between the second frequency and the third frequency is 5 Hz or more.

4. the first frequency is equal to or greater than 1.5 times the second frequency; The vibration generating device according to claim 2 , wherein the second frequency is equal to or greater than one time the third frequency.

5. A vibrator; a drive device which switches between a first period during which a first signal having a first frequency that is 0.86 times or more and 1.14 times or less a resonance frequency of the vibrator is supplied to the vibrator, and a second period during which a second signal having a second frequency that is lower than the first frequency and is 100 Hz or more and 400 Hz or less is supplied to the vibrator, and a third frequency which is lower than the second frequency and is 1 Hz or more and 100 Hz or less; A vibration generating device comprising:

6. The vibration generator according to claim 1 , wherein the driving device switches at least one of the first frequency, the second frequency, and the third frequency.

7. The vibration generator according to claim 1 , wherein the driving device switches the third frequency and does not switch the first frequency and the second frequency.

8. The vibrator includes: a vibration element to which the first signal and the second signal are supplied and which vibrates in response to the first signal and the second signal; a housing to which the vibration element is fixed and which outputs vibration of the vibration element; The vibration generating device according to claim 1 , further comprising:

9. The vibration generating device according to claim 8 , wherein the housing is pen-shaped.

10. The vibration generating device of claim 8, wherein the vibration element comprises a piezoelectric layer and a first electrode and a second electrode sandwiching the piezoelectric layer, and the first signal and the second signal are supplied between the first electrode and the second electrode.

11. The vibrator includes: a piezoelectric element including a piezoelectric layer, and a first electrode and a second electrode sandwiching the piezoelectric layer, the first electrode and the second electrode expanding and contracting in a direction sandwiching the piezoelectric layer when the first signal and the second signal are supplied between the first electrode and the second electrode; a housing including a first member and a second member sandwiching the piezoelectric element in the direction, the first member and the second member pressing the piezoelectric element in the direction; The vibration generating device according to claim 1 , further comprising:

12. The vibrator includes: a piezoelectric element including a piezoelectric layer, and a first electrode and a second electrode sandwiching the piezoelectric layer in a first direction, the piezoelectric element expanding and contracting in a second direction perpendicular to the first direction when the first signal and the second signal are supplied between the first electrode and the second electrode; a housing extending in the second direction, being rod-shaped with a width in the first direction smaller than a width in a third direction perpendicular to the first direction and the second direction, having a narrow portion in a center portion in the second direction where the width in the first direction is narrower, and mounting the piezoelectric element on the narrow portion; The vibration generating device according to claim 1 , further comprising:

13. The vibrator includes: a piezoelectric element including a piezoelectric layer, and a first electrode and a second electrode sandwiching the piezoelectric layer in a first direction, the piezoelectric element expanding and contracting in a second direction perpendicular to the first direction when the first signal and the second signal are supplied between the first electrode and the second electrode; a vibration plate for fixing the piezoelectric element; a housing having a frame surrounding the vibration plate and the piezoelectric element when viewed from the first direction, the vibration plate being fixed at both ends of the vibration plate in the second direction, and both ends of the vibration plate in a third direction perpendicular to the first direction and the second direction being free ends; The vibration generating device according to claim 1 , further comprising:

14. The vibrator includes: a plurality of piezoelectric elements including a piezoelectric layer, and a first electrode and a second electrode sandwiching the piezoelectric layer, the first electrode and the second electrode expanding and contracting in a direction sandwiching the piezoelectric layer when the first signal and the second signal are supplied between the first electrode and the second electrode; a housing including a first member and a second member sandwiching the plurality of piezoelectric elements in parallel in the direction, the first member and the second member pressing the plurality of piezoelectric elements in the direction; The vibration generating device according to claim 1 , further comprising:

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