Floating support device and appearance inspection device

Abstract

To provide a floating support device that fixes a sheet-like medium having flexibility to a predetermined position in a floated state.SOLUTION: A floating support device 5 has a non-contact adsorption pad 8 that maintains a state in which a rectangular sheet-like medium 2 is floated by a predetermined distance H, and a fixation mechanism 9 that includes a first fixation mechanism 10A and a second fixation mechanism 10B. A first adsorption surface 41 of the first fixation mechanism 10A and a second adsorption surface 46 of the second fixation mechanism 10B are located above a porous plate 31 by a predetermined distance H. When a first suction mechanism 45 of the first fixation mechanism 10A is driven, air is sucked in from a first intake port 41a, and a portion of an edge of a first side 2a of the medium 2 along a first direction L is adsorbed on the first adsorption surface 41. When a second suction mechanism 50 of the second fixation mechanism 10B is driven, air is sucked in from a second intake port 46a, and a portion of an edge of a second side 2b of the medium 2 along a second direction W is adsorbed on the second adsorption surface 46.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to a medium floating support device that supports a sheet-like medium in a floating state so that the medium cannot move, and also to an appearance inspection device for inspecting the appearance of the sheet-like medium. [Background technology]

[0002] A non-contact conveying device that moves a flexible sheet-like medium in a levitated state is used to convey the medium. Patent Document 1 describes a non-contact conveying device having a non-contact suction plate that levitates a sheet-like medium. The non-contact suction plate has a porous plate at its upper end. The non-contact suction plate simultaneously levitates the medium by ejecting pressurized air onto the surface of the porous plate and non-contactly suctions the medium by air suction, thereby lifting the medium from the surface of the porous plate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-167251 Summary of the Invention [Problem to be solved by the invention]

[0004] An example of a flexible sheet-like medium is an organic light emitting diode (OLED) substrate, which is a substrate on which a thin film transistor, an OLED having an organic EL element, and a thin film sealing layer are laminated.

[0005] When manufacturing displays that use OLED substrates, visual inspection of the OLED substrate is performed. In the visual inspection, the OLED substrate is placed on an inspection stage and photographed with a camera, and the captured image data is processed to detect scratches and other defects.

[0006] However, since the OLED substrate has flexibility, warping or undulation may occur on the OLED substrate when the OLED substrate is placed on the upper surface of the inspection stage. Furthermore, since the OLED substrate is sheet-shaped, when the OLED substrate is placed on the upper surface of the inspection stage, if dust is present on the upper surface of the inspection stage, unevenness may occur on the OLED substrate. If shadows are generated in an image of the OLED substrate due to warping, undulation, and unevenness caused by dust, it is not possible to accurately distinguish between these shadows and scratches formed on the surface of the OLED substrate by analyzing the image data. For this reason, visual inspection by an inspector is the mainstream method for visual inspection of the OLED substrate.

[0007] Here, if the sheet-like medium is floated by a non-contact suction cup, the medium will not warp or ripple. Also, if the sheet-like medium is floated by a non-contact suction cup, it is possible to suppress the occurrence of unevenness in the medium even if dust is present on the upper surface of the porous plate. Therefore, if the medium is imaged while being floated by the non-contact suction cup, it is possible to accurately identify scratches formed on the medium surface based on the acquired image data. However, when the medium is floated by the non-contact suction cup, the medium is likely to move in the horizontal direction parallel to the porous plate, and the medium cannot be fixed in a fixed position, so there is a problem that it is not easy to image the floated medium.

[0008] In view of the above, an object of the present invention is to provide a floating support device that floats a flexible sheet-like medium and fixes it at a predetermined position, and to provide an appearance inspection device that can detect scratches on the sheet-like medium based on image data obtained by imaging the medium. [Means for solving the problem]

[0009] In order to solve the above problem, the present invention provides a floating support device comprising: a non-contact suction cup having a porous plate and configured to maintain a flexible rectangular sheet-like medium in a floating state a predetermined distance above the porous plate; and a fixing mechanism comprising a first fixing mechanism and a second fixing mechanism, each of which is fixed to a position of the non-contact suction cup not overlapping with the porous plate, wherein, assuming that a direction perpendicular to a vertical direction is a first direction and a direction perpendicular to the vertical direction and the first direction is a second direction, the first fixing mechanism comprises a first suction member having a first suction surface having a plurality of first intake ports, a first air flow path communicating with the plurality of first intake ports, and a first intake mechanism connected to the first air flow path, and the second fixing mechanism comprises a second suction member having a second intake port and a second intake mechanism. the first suction surface extends along the first direction, the second suction surface extends along the second direction, the first suction surface and the second suction surface are parallel to the porous plate and are located the predetermined distance above the porous plate, when the first suction mechanism is driven, air is sucked in from the first air intake port and a portion of an edge of a first side of the medium along the first direction is sucked in to the first suction surface, and when the second suction mechanism is driven, air is sucked in from the second air intake port and a portion of an edge of a second side of the medium along the second direction is sucked in to the second suction surface.

[0010] According to the present invention, the non-contact suction cup floats the sheet-like medium a predetermined distance above the porous plate. Therefore, the medium does not come into contact with the porous plate and warp or ripple, and even if dust is present on the upper surface of the porous plate, the medium does not become uneven. Meanwhile, the first and second fixing mechanisms are attached to positions that do not overlap with the porous plate of the non-contact suction cup, and have first and second suction surfaces located above the porous plate. In addition, the medium that has floated from the porous plate of the non-contact suction cup is adsorbed by the first and second fixing mechanisms at a portion of the edge of the first side and a portion of the edge of the second side of the medium. As a result, two sides of the medium are held by the first and second fixing mechanisms, and the medium is more reliably fixed in a state where it is floated above the porous plate, compared to a case where one side of the medium is held by the fixing mechanism. Furthermore, since the height to which the medium floats above the porous plate coincides with the height of each adsorption surface of each adsorption member, the medium does not warp or ripple when adsorbed by each adsorption member.

[0011] In the present invention, it is preferable that the first suction member is a porous body in the shape of a rectangular prism extending along the first direction, the second suction member is a porous body in the shape of a rectangular prism extending along the second direction, the first suction surface is the upper surface of the first suction member, the first air intake is a pore in the upper surface of the first suction member, the second suction surface is the upper surface of the second suction member, and the second air intake is a pore in the upper surface of the second suction member. In this way, the entire upper surface of each suction member can be used as a suction surface, so that the area of ​​each suction surface can be increased. This improves the suction force when each suction member suctions a part of the edge of the first side and a part of the edge of the second side of the medium.

[0012] In the present invention, the first fixing mechanism comprises a first holder for holding the first suction member, the first holder comprises a first lower surface contact portion in close contact with the lower surface of the first suction member and a first side surface contact portion in close contact with a first side surface of the first suction member opposite the porous plate, the first lower surface contact portion is fixed to the non-contact suction cup, the first air flow path comprises a first through hole penetrating the first holder and opening into the first side surface contact portion, the first intake mechanism is connected to an opening of the first through hole exposed to the outside on the side opposite the first side surface contact portion, the second fixing mechanism comprises a second holder for holding the second suction member, the second holder comprises a second lower surface contact portion in close contact with the lower surface of the second suction member and a second side surface contact portion in close contact with a third side surface of the second suction member opposite the porous plate, It is preferable that the two-sided contact portion is fixed to the non-contact suction cup, the second air flow path has a second through hole that penetrates the second holder and opens to the second side surface contact portion, the second intake mechanism is connected to an opening of the second through hole that is exposed to the outside on the opposite side to the second side surface contact portion, and the non-contact suction cup has a first end face that is in close contact with a second side surface of the first suction member facing the opposite side to the first side surface, and a second end face that is in close contact with a fourth side surface of the second suction member facing the opposite side to the third side surface when the first holder and the second holder are fixed to the non-contact suction cup.

[0013] In this way, since the first suction member is a porous body, the pores on the upper surface of the first suction member, which is the first intake port, are connected to the first through-hole through the pores inside the first suction member. In addition, the first holder is in close contact with the lower surface and the first side surface of the first suction member. A non-contact suction cup is in close contact with the second side surface of the first suction member, which is located on the opposite side to the first side surface. Furthermore, the first end surface of the non-contact suction cup faces the first side surface contact portion and one opening of the first through-hole exposed to the first side surface contact portion through the first suction member. Therefore, by driving the first suction mechanism connected to the first through-hole, air can be sucked in through the pores on the upper surface of the first suction member. Similarly, since the second suction member is a porous body, the pores on the upper surface of the second suction member, which is the second intake port, are connected to the second through-hole through the pores inside the second suction member. In addition, the second holder is in close contact with the lower surface and the third side surface of the second suction member. A non-contact suction cup is attached to a fourth side surface of the second suction member that is located on the opposite side to the third side surface. Furthermore, a second end surface of the non-contact suction cup faces the second side surface contact portion and one opening of the second through hole exposed at the second side surface contact portion via the second suction member. Therefore, by driving a second air intake mechanism connected to the second through hole, air can be sucked in through the air holes on the upper surface of the second suction member.

[0014] In the present invention, the fixing mechanism is capable of adsorbing a plurality of media each having a different length of the first side and the second side, and when the fixing mechanism adsorbs the smallest medium among the plurality of media, the first adsorption surface completely overlaps the first side of the smallest medium in the vertical direction, and the second adsorption surface completely overlaps the second side of the smallest medium in the vertical direction. In this way, even when the fixing mechanism adsorbs the smallest medium, the first adsorption surface and the second adsorption surface are entirely in contact with the medium. As a result, when the fixing mechanism adsorbs the smallest medium, air does not leak from the first intake port and the second intake port, so the first adsorption surface and the second adsorption surface can reliably adsorb the medium.

[0015] In the present invention, it is preferable that the dimension of the first suction surface in the first direction is shorter than the dimension of the first side of the smallest medium, and the dimension of the second suction surface in the second direction is shorter than the dimension of the second side of the smallest medium. In this way, when the fixing mechanism suctions the smallest medium, even if the first and second sides of the medium are slightly misaligned with respect to the first and second suction surfaces, the first side of the medium and the first suction surface, and the second side of the medium and the second suction surface are likely to completely overlap, respectively. As a result, when the fixing mechanism suctions the smallest medium, air does not leak from the first and second air intakes, so the first and second suction surfaces can reliably suction the medium.

[0016] In the present invention, the present invention has a first mounting member arranged on the opposite side of the first fixing mechanism from the side where the second fixing mechanism is located in the first direction, and a second mounting member arranged on the opposite side of the second fixing mechanism from the side where the first fixing mechanism is located in the second direction, the first mounting member has a first support member having a first mounting surface, the second mounting member has a second support member having a second mounting surface, the first mounting surface is preferably at the same height as the first suction surface in the vertical direction and extends along the first direction, and the second mounting surface is preferably at the same height as the second suction surface in the vertical direction and extends along the second direction. In this way, when the fixing mechanism adsorbs a medium larger than the smallest medium, the first mounting surface is preferably at the same height as the medium. The first adsorption surface supports a portion of the edge of the first side of the body that is not adsorbed by the first adsorption surface, and the second placement surface supports a portion of the edge of the second side of the medium that is not adsorbed by the second adsorption surface, which makes it easier for the height of the medium to be maintained constant when it floats up from the porous plate.

[0017] The visual inspection apparatus of the present invention comprises the above-mentioned floating support device, a rotation mechanism which rotates the floating support device on a rotation axis along a vertical direction, a drive mechanism which moves the floating support device along a horizontal transport path via the rotation mechanism, a line camera which images the medium, and a control unit which controls the floating support device, the rotation mechanism, the drive mechanism and the line camera, wherein the line camera is provided above the transport path and extends in a direction perpendicular to a transport direction along the transport path, the first suction surface extends in a direction perpendicular to the transport direction when the floating support device moves toward one side of the transport path, and the second suction surface extends in a direction perpendicular to the transport direction when the floating support device moves toward the other side of the transport path. The holding device rotates 90 degrees to extend in a direction perpendicular to the conveying direction, and the control unit controls the drive mechanism to move the floating support device toward one side of the conveying path, thereby acquiring first image data of the medium imaged in a direction perpendicular to the first side of the medium by the line camera, and after acquiring the first image data, controls the rotation mechanism to rotate the floating support device 90 degrees, and then controls the drive mechanism to move the floating support device toward the other side of the conveying path, thereby acquiring second image data of the medium imaged in a direction perpendicular to the second side of the medium by the line camera.

[0018] According to the present invention, even when the floating support device is moved in the horizontal direction, the medium does not move on the non-contact suction cup of the floating support device. Therefore, the medium levitated on the non-contact suction cup can be moved to an imaging position and imaged by the line camera. Furthermore, since the control unit acquires first image data of the medium imaged in a direction perpendicular to the first side of the medium and second image data of the medium imaged in a direction perpendicular to the second side of the medium, the appearance inspection device can inspect the appearance of the medium more accurately than when the control unit acquires only one of the first image data and the second image data.

[0019] In the present invention, it is preferable that the first fixing mechanism is located on the one side of the transport path of the non-contact suction cup when the floating support device moves toward the one side of the transport path, and the second fixing mechanism is located on the other side of the transport path of the non-contact suction cup when the floating support device moves toward the other side of the transport path. In this way, when the floating support device moves, the front of the medium in the direction of movement is fixed to the fixing mechanism. Therefore, it is possible to suppress the occurrence of warping or bending of the medium when the floating support device moves. Effect of the Invention

[0020] The floating support device of the present invention uses a fixing mechanism to suck and fix the medium that has been floated from the non-contact suction cups. Therefore, by capturing an image of the medium supported by the floating support device, scratches on the medium, etc. can be detected based on the captured image data. [Brief description of the drawings]

[0021] [Figure 1] FIG. 2 is an explanatory diagram of a visual inspection device. [Diagram 2] FIG. 1 is a schematic block diagram of a visual inspection device. [Diagram 3] FIG. [Figure 4] FIG. [Diagram 5] 1 is an explanatory diagram of a state in which a sheet-like medium is supported by a floating support device. [Figure 6] FIG. 4 is an exploded perspective view of a first fixing mechanism. [Figure 7] FIG. 4 is an exploded perspective view of a second fixing mechanism. [Figure 8] 4 is a vertical cross-sectional view of the periphery of a first suction member in the floating support device. FIG. [Figure 9] 4 is a vertical cross-sectional view of the periphery of a second suction member in the floating support device. FIG. [Figure 10] FIG. [Figure 11] FIG. 2 is a diagram illustrating the operation of the visual inspection device. [Figure 12]FIG. 2 is a diagram illustrating the operation of the visual inspection device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] The appearance inspection apparatus and the floating support apparatus of this embodiment will be described below with reference to the drawings.

[0023] (Visual inspection equipment) FIG. 1 is an explanatory diagram of an appearance inspection device. FIG. 2 is a block diagram of a control system of the appearance inspection device. The appearance inspection device 1 captures an image of a sheet-shaped medium 2 while conveying it, and detects scratches on the surface of the medium 2 from the acquired image data. In this embodiment, the sheet-shaped medium 2 is, for example, an OLED substrate. The OLED substrate is a laminate of a thin-film transistor, an OLED having an organic EL element, and a thin-film sealing layer. As shown in FIG. 1, the OLED substrate as the medium 2 has a rectangular planar shape. The OLED substrate has a first side 2a, which is one of two long sides, and a second side 2b, which is one of two short sides. A barcode (not shown) is written on the outer periphery of the first side 2a or the second side 2b of the OLED substrate. Note that the medium 2 is not limited to a rectangle, and may be a square. In this case, one of the sides of the medium may be the first side, and one of the sides perpendicular to the first side may be the second side. The medium may also have one of two short sides as a first side and one of two long sides as a second side.

[0024] The visual inspection device 1 includes a rail 4, a floating support device 5 placed on the rail 4, a rotation mechanism 6 that rotates the floating support device 5 on a rotation axis along the vertical direction, and a drive mechanism 7 that moves the floating support device 5 along the rail 4 via the rotation mechanism 6. The rotation mechanism 6 includes a drive unit such as a motor that rotates the floating support device 5. The rotation mechanism 6 is fixed to the drive mechanism 7. The drive mechanism 7 moves the floating support device 5 back and forth on a transport path 25 formed between a first position A set at one end of the rail 4 and a second position B set at the other end of the rail 4. Here, the medium 2 is supplied from above to the floating support device 5 placed at the first position A by a transport device (not shown). In addition, when the visual inspection by the visual inspection device 1 is completed, the medium 2 is discharged from the first position A to the next process by a transport device (not shown).

[0025] The visual inspection device 1 includes a first detector 11 that detects whether or not a medium 2 is supported by the floating support device 5 at a first position A, and a second detector 12 that detects whether or not a medium 2 is supported by the floating support device 5 at a second position B. The first detector 11 and the second detector 12 include a light emitting unit 13 that emits inspection light toward the floating support device 5, and a detection unit 14 that detects reflected light from the medium 2. The first detector 11 and the second detector 12 determine the presence or absence of the medium 2 based on the output from each detection unit 14.

[0026] The appearance inspection device 1 includes a barcode reader 15 and an imaging mechanism 16 located in the middle of the conveying path 25. The barcode reader 15 and the imaging mechanism 16 are located above the rail 4. The imaging mechanism 16 includes a light (not shown) that irradiates illumination light onto the medium 2 moving along the rail 4, and a line camera 17 that images the medium 2. The line camera 17 extends in a direction perpendicular to the direction along the conveying path 25. More specifically, the line camera 17 includes a plurality of imaging elements arranged in a direction perpendicular to the direction along the conveying path 25.

[0027] 2, the visual inspection apparatus 1 includes a control unit 21 and a storage device 22. The first detector 11 and the second detector 12 are connected to the input side of the control unit 21. The floating support device 5, the rotation mechanism 6, and the drive mechanism 7 are connected to the output side of the control unit 21. Furthermore, a storage device 22, a barcode reader 15, and an imaging mechanism 16 are communicatively connected to the control unit 21.

[0028] In the following description, the up-down direction is defined as the Z-axis direction, and two directions perpendicular to the Z-axis direction and perpendicular to each other are defined as the X-axis direction and the Y-axis direction. The X-axis direction is defined as the transport direction along the transport path 25 (rail 4), and the Y-axis direction is defined as the direction perpendicular to the transport path 25. In the X-axis direction, the direction from the first position A to the second position B is defined as the X1 direction, and the opposite direction is defined as the X2 direction. In the floating support device 5, the direction along the first side 2a of the medium 2 placed on the floating support device 5 is defined as the first direction L, and the direction along the second side 2b is defined as the second direction W. The first direction L and the second direction W are perpendicular to each other and to the Z-axis direction.

[0029] (levitation support device) FIG. 3 is a perspective view of the floating support device 5. FIG. 4 is an exploded perspective view of the floating support device 5. FIG. 5 is an explanatory diagram of a state in which the sheet-like medium 2 is supported on the floating support device 5. FIG. 6 is an exploded perspective view of the first fixing mechanism 10A. FIG. 7 is an exploded perspective view of the second fixing mechanism 10B. FIG. 8 is a vertical cross-sectional view of the periphery of the first suction member 42 in the floating support device 5. FIG. 9 is a vertical cross-sectional view of the periphery of the second suction member in the floating support device 5. FIG. 10 is an exploded perspective view of the mounting member 18. As shown in FIGS. 1 and 3, the floating support device 5 includes a non-contact suction pad 8, a fixing mechanism 9, and a mounting member 18.

[0030] (Non-contact suction cup) 3 and 4, the non-contact suction cup 8 has a rectangular porous plate 31 in the center of its upper surface. The non-contact suction cup 8 simultaneously floats the medium 2 on the upper surface 31a of the porous plate 31 by jetting pressurized air and non-contactly adsorbs the medium 2 by air suction, causing the medium 2 supplied to the floating support device 5 from above to float from the upper surface 31a of the porous plate 31. The non-contact suction cup 8 is well known.

[0031] As shown in FIG. 4, the non-contact suction cup 8 includes a rectangular parallelepiped main body 32 and a rectangular protruding portion 33 protruding upward from the center of the upper surface of the main body 32. Thus, the non-contact suction cup 8 includes a pair of first step portions 34 facing each other in the second direction W and a second step portion 35 facing each other in the first direction L at the upper end portion. A plurality of first joints 36 for supplying pressurized air to the non-contact suction cup 8 and a plurality of second joints 37 for suctioning air are connected to the main body 32. A pressurized air supply mechanism (not shown) is connected to the first joint 36. An air suction mechanism (not shown) is connected to the second joint 37. A porous plate 31 is disposed in the center of the protruding portion 33. A rectangular frame plate 38 extending upward from the main body 32 is in close contact with the outer peripheral surface of the porous plate 31.

[0032] (Fixing mechanism) As shown in FIG. 3, the fixing mechanism 9 is attached to the non-contact suction cup 8. The fixing mechanism 9 is capable of adsorbing a plurality of media 2 each having a first side 2a and a second side 2b of different lengths. More specifically, as shown in FIG. 5, the fixing mechanism 9 is capable of adsorbing media 2 ranging from the smallest medium 2A having the smallest length of the first side 2a1 and the second side 2b1 to the largest medium 2B having the largest length of the first side 2a2 and the second side 2b2. As shown in FIGS. 3 to 5, the fixing mechanism 9 includes a first fixing mechanism 10A and a second fixing mechanism 10B.

[0033] The first fixing mechanism 10A extends in a first direction L along the first side 2a of the medium 2. The first fixing mechanism 10A is fixed offset in the L1 direction of the first step portion 34A in the W1 direction. The first fixing mechanism 10A comprises a first suction member 42 having a first suction surface 41 on its upper surface with a plurality of first intake ports 42a, and a first holder 43 that holds the first suction member 42. The first suction member 42 is fixed to the non-contact suction cup 8 via the first holder 43. First suction member 3, when the first suction member 42 is fixed to the non-contact suction cup 8, the first suction member 42 is located in the W1 direction of the porous plate 31. The first suction surface 41 of the first suction member 42 is parallel to the porous plate 31 of the non-contact suction cup 8 and is located a predetermined distance H above the upper surface 31a of the porous plate 31. The first fixing mechanism 10A includes a first air flow path 44 communicating with the multiple first intake ports 42a, and a first intake mechanism 45 connected to the first air flow path 44.

[0034] As shown in FIG. 6, the first adsorption member 42 is a porous body having a rectangular prism shape. The porous body is made of porous ceramics mainly composed of alumina, porous ceramics mainly composed of SiC, or air-permeable porous carbon. The first adsorption member 42 extends in a first direction L. The first adsorption member 42 has an upper surface 51 facing upward, a lower surface 52 facing downward and parallel to the upper surface 51, a first side surface 53 facing in the W2 direction, and a second side surface 54 facing in the W1 direction and parallel to the first side surface 53. Here, the first intake port 42a is a pore in the upper surface 51 of the first adsorption member 42 made of a porous body. The first adsorption surface 41 is the upper surface 51 of the first adsorption member 42.

[0035] 5, when the first fixing mechanism 10A adsorbs the smallest medium 2A, which has the shortest first side 2a and second side 2b among the multiple media 2, the first adsorption member 42 completely overlaps with the first side 2a1 of the smallest medium 2A in the Z-axis direction. The dimension of the first adsorption member 42 in the first direction L is shorter than the dimension of the first side 2a1 of the smallest medium 2A.

[0036] As shown in FIG. 6, the first holder 43 has a rectangular plate portion 61 (first lower surface contact portion) that has a constant width in the second direction W and extends from one end to the other end of the first suction member 42 in the W2 direction. The first holder 43 has an upper protrusion 62 (first side surface contact portion) that protrudes upward from the end portion of the plate portion 61 in the W1 direction and extends in the first direction L, and a lower protrusion 63 that protrudes downward from the end portion of the plate portion 61 in the W1 direction and extends in the first direction L. The upper protrusion 62 extends from one end to the other end of the plate portion 61 in the first direction L with a constant width and height. The lower protrusion 63 extends from one end to the other end of the plate portion 61 in the first direction L with a constant width and height. The width dimension of the upper protrusion 62 in the second direction W is longer than the width dimension of the lower protrusion 63.

[0037] The first holder 43 is provided with a first through hole 64 penetrating in the second direction W. A joint 65 is provided in an opening 64b of the first through hole 64 in the W1 direction. An opening 64a of the first through hole 64 in the W2 direction is exposed to a wall surface 62a of the upper protruding portion 62 facing the W2 direction.

[0038] The first suction member 42 is held by a step 68 defined by the plate 61 and the upper protrusion 62. As shown in FIG. 8, when the first suction member 42 is held by the step 68, the portion of the plate 61 on the W2 side of the upper protrusion 62 is in close contact with the entire lower surface 52 of the first suction member 42. The wall surface 62a of the upper protrusion 62 facing the W2 direction is in close contact with the first side surface 53 of the first suction member 42. In this embodiment, the height dimension of the upper protrusion 62 is shorter than the height dimension of the first side surface 53 of the first suction member 42. Therefore, the first suction member 42 protrudes slightly upward from the upper protrusion 62. Therefore, the upper end portion of the first side surface 53 of the first suction member 42 is not covered by the upper protrusion 62 and is exposed.

[0039] 8, when the first suction member 42 is held by the first holder 43, the opening 64a of the first through hole 64 is in close contact with the first side surface 53 of the first suction member 42. Here, since the first suction member 42 is a porous body, when one opening 64a of the first through hole 64 comes into contact with the first suction member 42, the pores of the upper surface 51 (first suction surface 41) of the first suction member 42, which is the first air intake port 42a, are connected to the first through hole 64 via the pores 42b inside the first suction member 42 and the pores 42c of the first side surface 53. That is, when the first suction member 42 is held by the first holder 43, the air in the upper surface 51 of the first suction member 42 is in contact with the first through hole 64. A first air flow path 44 that communicates with the plurality of first intake ports 42a is formed. The first through-hole 64 is a part of the first air flow path 44.

[0040] As shown in FIG. 3 and FIG. 8, the first fixing mechanism 10A is fixed to the non-contact suction cup 8 by placing the plate portion 61 of the first holder 43 on the first step portion 34A of the non-contact suction cup 8. When the first fixing mechanism 10A is fixed to the non-contact suction cup 8, the lower protrusion 63 abuts against the main body portion 32 of the non-contact suction cup 8 from the W1 direction side. When the first fixing mechanism 10A is fixed to the non-contact suction cup 8, the first end surface 38a facing the W1 direction of the frame plate 38 surrounding the outer peripheral surface of the porous plate 31 in the non-contact suction cup 8 is in close contact with the second side surface 54 of the first suction member 42. The first end surface 38a of the frame plate 38 extends from one end to the other end of the first suction member 42. The first end surface 38a faces the wall surface 62a and the opening 64a in the upper protrusion 62 via the first suction member 42.

[0041] 8, when the first fixing mechanism 10A is fixed to the non-contact suction cup 8, the upper surface 51 of the first suction member 42, which is the first suction surface 41, is located a predetermined distance H above the upper surface 31a of the porous plate 31 of the non-contact suction cup 8. The predetermined distance H is the same as the distance by which the non-contact suction cup 8 lifts the medium 2 from the porous plate 31.

[0042] The first suction mechanism 45 includes an ejector. As indicated by the dashed line in Fig. 4, the first suction mechanism 45 is connected to a joint 65 provided on the first holder 43. When the first suction mechanism 45 is driven, air is sucked in through the first suction port 42a, and a portion of the edge of the first side 2a of the medium 2 in the L1 direction is attracted to the first attraction surface 41. In this way, the first fixing mechanism 10A holds the first side 2a of the medium 2.

[0043] The second fixing mechanism 10B extends in the second direction W along the second side 2b of the medium 2. The second fixing mechanism 10B is fixed offset in the W1 direction of the second step portion 35A in the L1 direction. The second fixing mechanism 10B includes a second suction member 47 having a second suction surface 46 on its upper surface with a plurality of second intake ports 47a, and a second holder 48 for holding the second suction member 47. The second suction member 47 is fixed to the non-contact suction plate 8 via the second holder 48. When the second suction member 47 is fixed to the non-contact suction plate 8, as shown in FIG. 3, the second suction member 47 is located in the L1 direction of the porous plate 31. The second suction surface 46 of the second suction member 47 is parallel to the porous plate 31 of the non-contact suction plate 8 and is located a predetermined distance H above the upper surface 31a of the porous plate 31. The first suction surface 41 of the first suction member 42 and the second suction surface 46 of the second suction member 47 are at the same height.

[0044] As shown in FIG. 4, the second fixing mechanism 10B includes a second air flow path 49 that communicates with the plurality of second intake ports 47a, and a second intake mechanism 50 that is connected to the second air flow path 49.

[0045] As shown in FIG. 7, the second suction member 47 is a porous body having a rectangular prism shape, similar to the first suction member 42. The second suction member 47 is extended in the second direction W. The second suction member 47 has an upper surface 56 facing upward, a lower surface 57 facing downward and parallel to the upper surface 56, a third side surface 58 facing in the L2 direction, and a fourth side surface 59 facing in the L1 direction and parallel to the third side surface 58. Here, the second intake port 47a is an air hole in the upper surface 56 of the second suction member 47 made of a porous body. The second suction surface 46 is the upper surface 56 of the second suction member 47.

[0046] 5, when the second fixing mechanism 10B adsorbs the smallest medium 2A, which has the shortest first side 2a and second side 2b among the multiple media 2, the second adsorption member 47 completely overlaps with the second side 2b1 of the smallest medium 2A in the Z-axis direction. The dimension of the second adsorption member 47 in the second direction W is shorter than the dimension of the second side 2b1 of the smallest medium 2A.

[0047] As shown in FIG. 7, the second holder 48 has a rectangular plate portion 71 (second lower surface contact portion) that has a constant width in the first direction L and extends from one end to the other end of the second suction member 47 in the L2 direction. The second holder 48 has an upper protrusion 72 (second side surface contact portion) that protrudes upward from the end portion of the plate portion 71 in the L1 direction and extends in the second direction W, and a lower protrusion 73 that protrudes downward from the end portion of the plate portion 71 in the L1 direction and extends in the second direction W. The upper protrusion 72 extends from one end to the other end of the plate portion 71 in the second direction W with a constant width and height. The lower protrusion 73 extends from one end to the other end of the plate portion 71 in the second direction W with a constant width and height. The width dimension of the upper protrusion 72 in the first direction L is longer than the width dimension of the lower protrusion 73.

[0048] The second holder 48 is provided with a second through hole 74 penetrating in the first direction L. A joint 75 is provided in an opening 74b in the L1 direction of the second through hole 74. An opening 74a in the L2 direction of the second through hole 74 is exposed to a wall surface 72a of the upper protruding portion 72 facing the L2 direction.

[0049] The second suction member 47 is held by a step 78 defined by the plate 71 and the upper protrusion 72. As shown in FIG. 9, when the second suction member 47 is held by the step 78, the portion of the plate 71 on the L2 side of the upper protrusion 72 is in close contact with the entire lower surface 57 of the second suction member 47. The wall surface 72a of the upper protrusion 72 facing the L2 direction is in close contact with the third side surface 58 of the second suction member 47. In this embodiment, the height of the upper protrusion 72 is shorter than the height of the third side surface 58 of the second suction member 47. Therefore, the second suction member 47 protrudes slightly upward from the upper protrusion 72. Therefore, the upper end portion of the third side surface 58 of the second suction member 47 is not covered by the upper protrusion 72 and is exposed.

[0050] 9, when the second suction member 47 is held by the second holder 48, the opening 74a of the second through hole 74 is in close contact with the third side surface 58 of the second suction member 47. When one opening 74a of the second through hole 74 comes into contact with the second suction member 47, the pores of the upper surface 56 (second suction surface 46) of the second suction member 47, which are the second air intake ports 47a, are connected to the second through hole 74 via the pores 47b inside the second suction member 47 and the pores 47c of the third side surface 58. That is, when the second suction member 47 is held by the second holder 48, a second air flow path 49 is formed that communicates from the second through hole 74 to the multiple second air intake ports 47a of the upper surface 56 of the second suction member 47. The second through hole 74 is a part of the second air flow path 49.

[0051] As shown in FIG. 3 and FIG. 9, the second fixing mechanism 10B is fixed to the non-contact suction cup 8 by placing the plate portion 71 of the second holder 48 on the second step portion 35A of the non-contact suction cup 8. When the second fixing mechanism 10B is fixed to the non-contact suction cup 8, the lower protrusion 73 abuts against the main body portion 32 of the non-contact suction cup 8 from the L1 direction side. When the second fixing mechanism 10B is fixed to the non-contact suction cup 8, the second end surface 38b facing the L1 direction of the frame plate 38 surrounding the outer peripheral surface of the porous plate 31 in the non-contact suction cup 8 is in close contact with the fourth side surface 59 of the second suction member 47. The second end surface 38b of the frame plate 38 extends from one end to the other end of the second suction member 47. The second end surface 38b faces the wall surface 72a and the opening 74a in the upper protrusion 72 via the second suction member 47.

[0052] Here, as shown in Figure 9, when the second fixing mechanism 10B is fixed to the non-contact suction cup 8, the upper surface 56 of the second suction member 47, which is the second suction surface 46, is positioned a predetermined distance H above the upper surface 31a of the porous plate 31 of the non-contact suction cup 8.

[0053] The second suction mechanism 50 includes an ejector. As indicated by the dashed line in Fig. 4, the second suction mechanism 50 is connected to a joint 75 provided on the second holder 48. When the second suction mechanism 50 is driven, air is sucked in from the second suction port 47a, and a part of the edge of the second side 2b of the medium 2 in the W1 direction is sucked onto the second suction surface 46. This allows the second fixing mechanism 10B to suck in the second side 2b of the medium 2. Hold 2b.

[0054] In this embodiment, the first fixing mechanism 10A and the second fixing mechanism 10B have the same basic configuration. Since the first fixing mechanism 10A is longer in the length direction than the second fixing mechanism 10B, the first holder 43 has two first through holes 64 and two joints 65.

[0055] (Placement member) 3 and 4, the mounting member 18 includes a first mounting member 19A and a second mounting member 19B. The first mounting member 19A is disposed adjacent to the first fixing mechanism 10A on the L2 side in the first direction L.

[0056] The first mounting member 19A extends in a first direction L along the first side 2a of the medium 2. The first mounting member 19A is a first step 34A, and is fixed to the L2 direction side of the first fixing mechanism 10A. The first mounting member 19A includes a first support member 82 having a first mounting surface 81, and a first holder 83 that holds the first support member 82.

[0057] As shown in FIG. 10, the first support member 82 has a rectangular prism shape. The first support member 82 is made of metal or resin. The upper surface of the first support member 82 is a first mounting surface 81. In this embodiment, the cross-sectional shape of the first support member 82 is the same as the cross-sectional shape of the first suction member 42. As shown in FIGS. 3 to 5, the first support member 82 overlaps with the first suction member 42 in the first direction L. The height of the first mounting surface 81 in the Z-axis direction is the same as the height of the first suction surface 41 in the Z-axis direction.

[0058] As shown in FIG. 10, the first holder 83 has a rectangular plate portion 84 that has a constant width in the second direction W and extends from one end to the other end of the first support member 82 in the W2 direction. The first holder 83 has an upper protrusion 85 that protrudes upward from an end portion of the plate portion 84 in the W1 direction and extends in the first direction L, and a lower protrusion 86 that protrudes downward from an end portion of the plate portion 84 in the W1 direction and extends in the first direction L. The upper protrusion 85 extends from one end to the other end of the plate portion 84 in the first direction L with a constant width and height. The lower protrusion 86 extends from one end to the other end of the plate portion 84 in the first direction L with a constant width and height. The width dimension of the upper protrusion 85 in the second direction W is longer than the width dimension of the lower protrusion 86. The first support member 82 is held by a step portion 87 defined by a plate portion 84 and an upper protrusion 85. The first mounting member 19A is fixed to the non-contact suction cup 8 by placing the plate portion 84 of the first holder 83 on the first step portion 34A of the non-contact suction cup 8. Note that in this embodiment, the first holder 83 has the same basic configuration as the first holder 43, except that it does not include the first through hole 64 and the joint.

[0059] 3 and 4, the second mounting member 19B extends in the second direction W along the second side 2b of the medium 2. The second mounting member 19B is fixed to the second step 35A adjacent to the W2 direction side of the second fixing mechanism 10B. The second mounting member 19B includes a second support member 92 having a second mounting surface 91, and a second holder 93 that holds the second support member 92.

[0060] The second mounting member 19B has the same basic configuration as the first mounting member 19A. That is, as shown in Fig. 10, the second support member 92 and the second holder 93 correspond to the first support member 82 and the first holder 83. Therefore, detailed description of the second support member 92 and the second holder 93 will be omitted.

[0061] 3 to 5, the second support member 92 overlaps with the second suction member 47 in the second direction W. The height in the Z-axis direction of the second mounting surface 91 is the same as the height in the Z-axis direction of the second suction surface 46. The second mounting member 19B is fixed to the non-contact suction cup 8 by placing the plate portion 94 of the second holder 93 on the second step portion 35A of the non-contact suction cup 8.

[0062] (Support of the medium by a floating support device) The control unit 21 of the visual inspection apparatus 1 receives the supply of the medium 2 while the floating support device 5 is driven. That is, the control unit 21 receives the supply of the medium 2 while the non-contact suction cup 8 and the fixing mechanism 9 are operating. As shown in FIG. 5 , when the medium 2 is supplied to the floating support device 5, the first side 2a of the medium 2 is arranged along the first suction surface 41, and the second side 2b of the medium 2 is arranged along the second suction surface 46.

[0063] The medium 2 supplied to the floating support device 5 is floated a predetermined distance H above the porous plate 31 of the non-contact suction cup 8. A part of the edge of the first side 2a of the medium 2 in the L1 direction is adsorbed to the first adsorption surface 41. At this time, the other part of the edge of the first side 2a of the medium 2 in the L2 direction is placed on the first mounting surface 81. In addition, a part of the edge of the second side 2b of the medium 2 in the W1 direction is adsorbed to the second adsorption surface 46. At this time, the other part of the edge of the second side 2b of the medium 2 in the W2 direction is placed on the second mounting surface 91.

[0064] (Operation of visual inspection device) The operation of the visual inspection device 1 of this embodiment will be described below. Fig. 11 is a diagram for explaining the operation of the visual inspection device 1. Fig. 12 is a diagram for explaining the operation of the visual inspection device 1.

[0065] First, when the floating support device 5 is located at the first position A, the control unit 21 operates the non-contact suction cup 8 and the fixing mechanism 9. Next, when the first detector 11 detects that the medium 2 is not present based on the output from the detection unit 14, the medium 2 is supplied from the previous process to the floating support device 5 by a transport device such as a robot arm (ST1 in FIG. 11). At this time, the first fixing mechanism 10A and the first mounting member 19A are located on the X1 direction side of the non-contact suction cup 8, and the second fixing mechanism 10B and the second mounting member 19B are located on the Y2 direction side of the non-contact suction cup 8. That is, the first suction surface 41 and the first mounting surface 81 extend in the Y axis direction, and the second suction surface 46 and the second mounting surface 91 extend in the X axis direction.

[0066] Next, when the first detector 11 detects the presence of the medium 2 on the floating support device 5 based on the output from the detection unit 14, the control unit 21 operates the drive mechanism 7 to move the floating support device 5 to the second position B (ST2 in FIG. 11). At this time, the control unit 21 operates the barcode reader 15 to read the barcode printed on the medium 2 passing below the barcode reader 15. In this way, the control unit 21 obtains information on the barcode printed on the medium 2. The control unit 21 also operates the imaging mechanism 16 to image the medium 2 passing below the line camera 17. In this way, the control unit 21 obtains first image data of the medium 2 imaged in a direction perpendicular to the first side 2a of the medium 2.

[0067] Next, after acquiring the first image data, the control unit 21 drives the rotation mechanism 6 to rotate the floating support device 5 90° to the right (ST3 in FIG. 12). At this time, the first fixing mechanism 10A and the first mounting member 19A are located on the Y2 direction side of the non-contact suction cup 8, and the second fixing mechanism 10B and the second mounting member 19B are located on the X2 direction side of the non-contact suction cup 8. In other words, the first suction surface 41 and the first mounting surface 81 extend in the X-axis direction, and the second suction surface 46 and the second mounting surface 91 extend in the Y-axis direction.

[0068] When the floating support device 5 rotates 90° to the right, the second detector 12 determines the presence or absence of the medium 2 based on the output from the detection unit 14. When the second detector 12 detects that the medium 2 is present on the floating support device 5, the control unit 21 operates the drive mechanism 7 to move the floating support device 5 to the first position A (ST4 in FIG. 12). At this time, the control unit 21 operates the imaging mechanism 16 to capture an image of the medium 2 passing below the line camera 17. As a result, the control unit 21 obtains second image data of the medium 2 captured in a direction perpendicular to the second side 2b of the medium 2. do.

[0069] When the control unit 21 acquires the first image data and the second image data, the image analysis unit 23 provided in the control unit 21 analyzes the first image data and the second image data to detect scratches on the surface of the medium 2. The control unit 21 also stores each image and the scratch detection results in the storage device 22 as inspection information associated with the barcode reading information.

[0070] When the inspection information is stored in the storage device 22, the control unit 21 drives the rotation mechanism 6 to rotate the floating support device 5 90° to the left. When the floating support device 5 has rotated 90° to the left, the medium 2 is carried out from the floating support device 5 at the second position B to the next process by a transport device such as a robot arm. The appearance inspection device 1 repeats operations ST1 to ST4.

[0071] (Action and effect) According to this embodiment, the non-contact suction cup 8 floats the sheet-like medium 2 upward from the porous plate 31 by a predetermined distance H. Therefore, the medium 2 does not come into contact with the porous plate 31 and warp or ripple, and even if dust is present on the upper surface of the porous plate 31, the medium 2 does not become uneven. Meanwhile, the first fixing mechanism 10A and the second fixing mechanism 10B are attached to a position that does not overlap with the porous plate 31 of the non-contact suction cup 8, and have a first suction surface 41 and a second suction surface 46 located above the porous plate 31. In addition, the medium 2 that has floated from the porous plate 31 of the non-contact suction cup 8 has a part of the edge of the first side 2a and a part of the edge of the second side 2b of the medium 2 adsorbed by the first fixing mechanism 10A and the second fixing mechanism 10B. As a result, two sides of the medium 2 are held by the first fixing mechanism 10A and the second fixing mechanism 10B, so the medium 2 is more securely fixed in a state where it is floating above the porous plate 31, compared to when one side of the medium 2 is held by the fixing mechanism 9. Furthermore, because the height at which the medium 2 floats above the porous plate 31 matches the height of each adsorption surface of each adsorption member, the medium 2 does not warp or ripple when it is adsorbed to each adsorption member.

[0072] The first suction member 42 is a porous body in the shape of a rectangular prism extending along the first direction L. The second suction member 47 is a porous body in the shape of a rectangular prism extending along the second direction W. The first suction surface 41 is the upper surface of the first suction member 42. The first air intake 42a is a pore in the upper surface of the first suction member 42. The second suction surface 46 is the upper surface of the second suction member 47. The second air intake 47a is a pore in the upper surface of the second suction member 47. This allows the entire upper surface of each suction member to be used as an suction surface, so that the area of ​​each suction surface can be increased. This improves the suction force when each suction member suctions a part of the edge of the first side 2a and a part of the edge of the second side 2b of the medium 2.

[0073] The first fixing mechanism 10A includes a first holder 43 that holds the first suction member 42. The first holder 43 includes a plate portion 61 (first lower surface contact portion) that is in close contact with the lower surface 52 of the first suction member 42, and an upper protruding portion 62 (first side surface contact portion) that is in close contact with the first side surface 53 of the first suction member 42 on the side opposite to the porous plate 31. The plate portion 61 is fixed to the non-contact suction cup 8. The first air flow path 44 includes a first through hole 64 that penetrates the first holder 43 and opens into the upper protruding portion 62. The first intake mechanism 45 is connected to an opening 64b of the first through hole 64 that is exposed to the outside on the side opposite to the wall surface 62a of the upper protruding portion 62. The second fixing mechanism 10B includes a second holder 48 that holds the second suction member 47. The second holder 48 includes a plate portion 71 (second lower surface contact portion) that is in close contact with the lower surface 57 of the second suction member 47, and an upper protruding portion 72 (second side surface contact portion) that is in close contact with the third side surface 58 of the second suction member 47 on the side opposite the porous plate 31. The plate portion 71 is fixed to the non-contact suction cup 8. The second air flow path 49 includes a second through hole 74 that penetrates the second holder 48 and opens into the upper protruding portion 72. The second intake mechanism 50 is connected to an opening 74b of the second through hole 74 that is exposed to the outside on the side opposite the wall surface 72a of the upper protruding portion 72. The non-contact suction cup 8 connects the first holder 43 and the second holder 48 to the non-contact suction cup. When fixed to 8, it has a first end face 38a that is in close contact with a second side face 54 facing the opposite side to the first side face 53 of the first suction member 42, and a second end face 38b that is in close contact with a fourth side face 59 facing the opposite side to the third side face 58 of the second suction member 47.

[0074] As a result, since the first suction member 42 is a porous body, the pores of the upper surface 51 of the first suction member 42, which are the first air intake port 42a, are connected to the first through-hole 64 via the pores 42b inside the first suction member 42. The first holder 43 is in close contact with the lower surface 52 and the first side surface 53 of the first suction member 42. The non-contact suction cup 8 is in close contact with the second side surface 54 of the first suction member 42, which is located on the opposite side to the first side surface 53. Furthermore, the first end surface 38a of the non-contact suction cup 8 faces the wall surface 62a of the upper protrusion 62 and one opening 64a of the first through-hole 64 exposed to the wall surface 62a via the first suction member 42. Therefore, by driving the first suction mechanism 45 connected to the first through-hole 64, air can be sucked in from the pores of the upper surface 51 of the first suction member 42. Similarly, since the second suction member 47 is a porous body, the pores of the upper surface 56 of the second suction member 47, which are the second air intake port 47a, are connected to the second through-hole 74 via the pores 47b inside the second suction member 47. The second holder 48 is in close contact with the lower surface 57 and the third side surface 58 of the second suction member 47. The non-contact suction cup 8 is in close contact with the fourth side surface 59 of the second suction member 47, which is located on the opposite side to the third side surface 58. Furthermore, the second end surface 38b of the non-contact suction cup 8 faces the upper protrusion 72 and one opening 74a of the second through-hole 74 exposed to the third side surface via the second suction member 47. Therefore, by driving the second suction mechanism 50 connected to the second through-hole 74, air can be sucked in from the pores of the upper surface 56 of the second suction member 47.

[0075] The fixing mechanism 9 can adsorb a plurality of media 2 having different lengths of the first side 2a and the second side 2b. When the fixing mechanism 9 adsorbs the smallest medium 2A having the smallest lengths of the first side 2a and the second side 2b among the plurality of media 2, the first adsorption surface 41 completely overlaps with the first side 2a1 of the smallest medium 2A in the Z-axis direction. The second adsorption surface 46 completely overlaps with the second side 2b1 of the smallest medium 2A in the Z-axis direction. As a result, even when the fixing mechanism 9 adsorbs the smallest medium 2A, the first adsorption surface 41 and the second adsorption surface 46 are entirely in contact with the medium 2. Therefore, when the fixing mechanism 9 adsorbs the smallest medium 2A, air does not leak from the first intake port 42a and the second intake port 47a, so that the first adsorption surface 41 and the second adsorption surface 46 can reliably adsorb the medium 2.

[0076] The dimension of the first suction surface 41 in the first direction L is shorter than the dimension of the first side 2a of the smallest medium 2. The dimension of the second suction surface 46 in the second direction W is shorter than the dimension of the second side 2b of the smallest medium 2A. As a result, when the fixing mechanism 9 suctions the smallest medium 2A, even if the first side 2a1 and the second side 2b1 of the medium 2A are slightly misaligned with respect to the first suction surface 41 and the second suction surface 46, the first side 2a1 and the first suction surface 41 of the medium 2A, and the second side 2b1 and the second suction surface 46 of the medium 2A are likely to completely overlap, respectively.

[0077] The floating support device 5 has a first mounting member 19A arranged on the opposite side of the first fixing mechanism 10A from the side where the second fixing mechanism 10B is located in the first direction L, and a second mounting member 19B arranged on the opposite side of the second fixing mechanism 10B from the side where the first fixing mechanism 10A is located in the second direction W. The first mounting member 19A has a first support member 82 having a first mounting surface 81. The second mounting member 19B has a second support member 92 having a second mounting surface 91. The first mounting surface 81 is at the same height as the first suction surface 41 in the Z-axis direction and extends along the first direction L. The second mounting surface 91 is at the same height as the second suction surface 46 in the Z-axis direction and extends along the second direction W. As a result, when the fixing mechanism 9 adsorbs a medium 2 larger than the smallest medium 2A, the first mounting surface 81 supports the portion of the edge of the first side 2a of the medium 2 that is not adsorbed by the first adsorption surface 41, and the second mounting surface 91 supports the portion of the edge of the second side 2b of the medium 2 that is not adsorbed by the second adsorption surface 46. When it floats up from the surface, it tends to maintain a constant height.

[0078] The appearance inspection device 1 of this embodiment includes a floating support device 5, a rotation mechanism 6 that rotates the floating support device 5 on a rotation axis along the Z-axis direction, a drive mechanism 7 that moves the floating support device 5 along a horizontal transport path 25 via the rotation mechanism 6, a line camera 17 that images the medium 2, and a control unit 21 that controls the floating support device 5, the rotation mechanism 6, the drive mechanism 7, and the line camera 17. The line camera 17 is provided above the transport path 25 and extends in a direction perpendicular to the transport direction along the transport path 25. When the floating support device 5 moves in the X1 direction of the transport path 25, the first suction surface 41 extends in the Y-axis direction perpendicular to the transport direction. When the floating support device 5 moves in the X2 direction of the transport path 25, the floating support device 5 rotates by 90°, so that the second suction surface 46 extends in the Y direction perpendicular to the transport direction. The control unit 21 controls the drive mechanism 7 to move the floating support device 5 in the X1 direction of the transport path 25, thereby acquiring first image data of the medium 2 imaged in a direction perpendicular to the first side 2a of the medium 2 by the line camera 17, and after acquiring the first image data, controls the rotation mechanism 6 to rotate the floating support device 5 by 90 degrees, and then controls the drive mechanism 7 to move the floating support device 5 in the X2 direction of the transport path 25, thereby acquiring second image data of the medium 2 imaged in a direction perpendicular to the second side 2b of the medium 2 by the line camera 17.

[0079] According to this embodiment, even when the floating support device 5 is moved in the horizontal direction, the medium 2 does not move on the non-contact suction cup 8 of the floating support device 5. Therefore, the medium 2 floated on the non-contact suction cup 8 can be moved to the imaging position and imaged by the line camera 17. Furthermore, since the control unit 21 acquires the first image data of the medium 2 imaged in a direction perpendicular to the first side 2a of the medium 2 and the second image data of the medium 2 imaged in a direction perpendicular to the second side 2b of the medium 2, the appearance inspection device 1 can inspect the appearance of the medium 2 more accurately than when the control unit 21 acquires one of the first image data and the second image data.

[0080] When the floating support device 5 moves in the X1 direction of the transport path 25, the first fixing mechanism 10A is located on the X1 direction side of the transport path 25 of the non-contact suction cup 8, and when the floating support device 5 moves in the X2 direction of the transport path 25, the second fixing mechanism 10B is located on the X2 direction side of the transport path 25 of the non-contact suction cup 8. As a result, when the floating support device 5 moves, the front of the medium 2 in the movement direction is fixed to the fixing mechanism 9. Therefore, it is possible to prevent the medium 2 from warping or bending when the floating support device 5 moves.

[0081] The present technology can be configured as follows.

[0082] (1) a non-contact suction plate having a porous plate and configured to maintain a flexible rectangular sheet-shaped medium in a state where the medium is lifted a predetermined distance from the porous plate; a fixing mechanism including a first fixing mechanism and a second fixing mechanism, each of which is fixed to a position of the non-contact suction cup that does not overlap with the porous plate; having If a direction perpendicular to the vertical direction is defined as a first direction, and a direction perpendicular to the vertical direction and the first direction is defined as a second direction, the first fixing mechanism includes a first suction member having a first suction surface having a plurality of first intake ports, a first air flow path communicating with the plurality of first intake ports, and a first intake mechanism connected to the first air flow path; the second fixing mechanism includes a second suction member having a second suction surface having a plurality of second intake ports, a second air flow path communicating with the plurality of second intake ports, and a second intake mechanism connected to the second air flow path; The first adsorption surface extends along the first direction, The second adsorption surface extends along the second direction, the first adsorption surface and the second adsorption surface are parallel to the porous plate and positioned above the porous plate by the predetermined distance; When the first suction mechanism is driven, air is sucked through the first suction port, and a portion of an edge of a first side of the medium along the first direction is sucked onto the first suction surface, A floating support device characterized in that when the second suction mechanism is driven, air is sucked in through the second suction port, and a portion of the edge of a second side of the medium along the second direction is adsorbed to the second suction surface.

[0083] (2) the first adsorption member is a porous body having a rectangular prism shape extending along the first direction, the second adsorption member is a porous body having a rectangular prism shape extending along the second direction, the first adsorption surface is an upper surface of the first adsorption member, the first air intake port is an air hole in an upper surface of the first adsorption member, the second adsorption surface is an upper surface of the second adsorption member, The floating support device according to (1), wherein the second air intake is an air hole in an upper surface of the second suction member.

[0084] (3) the first fixing mechanism includes a first holder that holds the first suction member, the first holder includes a first lower surface contact portion that is in close contact with a lower surface of the first adsorption member, and a first side surface contact portion that is in close contact with a first side surface of the first adsorption member opposite to the porous plate, The first lower surface contact portion is fixed to the non-contact suction cup, the first air flow path includes a first through hole that penetrates the first holder and opens to the first side contact portion, the first intake mechanism is connected to an opening of the first through hole that is exposed to the outside on a side opposite to the first side contact portion, the second fixing mechanism includes a second holder that holds the second suction member, the second holder includes a second lower surface contact portion that is in close contact with a lower surface of the second suction member, and a second side surface contact portion that is in close contact with a third side surface of the second suction member opposite to the porous plate, The lower second surface contact portion is fixed to the non-contact suction cup, the second air flow path includes a second through hole that penetrates the second holder and opens to the second side contact portion, the second intake mechanism is connected to an opening of the second through hole that is exposed to the outside on a side opposite to the second side contact portion, The floating support device described in (2) is characterized in that the non-contact suction cup has a first end surface that is in close contact with a second side surface of the first suction member facing opposite the first side surface, when the first holder and the second holder are fixed to the non-contact suction cup, and a second end surface that is in close contact with a fourth side surface of the second suction member facing opposite the third side surface.

[0085] (4) the fixing mechanism is capable of adsorbing a plurality of media each having a first side and a second side with different lengths, When the fixing mechanism adsorbs the smallest medium, which has the smallest first side and second side lengths, among the plurality of media, the first adsorption surface completely overlaps with the first side of the smallest medium in the vertical direction; The floating support device according to (2) or (3), wherein the second suction surface completely overlaps with the second side of the smallest medium in the up-down direction.

[0086] (5) a dimension of the first adsorption surface in the first direction is shorter than a dimension of the first side of the smallest medium; The floating support device described in (4) is characterized in that the dimension of the second suction surface in the second direction is shorter than the dimension of the second side of the smallest medium.

[0087] (6) a first mounting member disposed on an opposite side of the first fixing mechanism to a side on which the second fixing mechanism is located in the first direction; a second mounting member disposed on a side of the second fixing mechanism opposite to a side on which the first fixing mechanism is located in the second direction; having the first mounting member comprises a first support member having a first mounting surface; the second mounting member comprises a second support member having a second mounting surface; the first placement surface is at the same height as the first adsorption surface in the vertical direction and extends along the first direction; The floating support device according to (4) or (5), wherein the second placement surface is at the same height as the second suction surface in the up-down direction and extends along the second direction.

[0088] (7) A floating support device according to any one of (1) to (6), a rotation mechanism that rotates the floating support device on a rotation axis along a vertical direction; a drive mechanism that moves the floating support device along a horizontal transport path via the rotation mechanism; A line camera that captures an image of the medium; a control unit that controls the floating support device, the rotation mechanism, the drive mechanism, and the line camera; having the line camera is provided above the conveying path and extends in a direction perpendicular to a conveying direction along the conveying path, the first suction surface extends in a direction perpendicular to the transport direction when the floating support device moves toward one side of the transport path, when the floating support device moves toward the other side of the transport path, the second suction surface extends in a direction perpendicular to the transport direction by rotating the floating support device by 90 degrees; the control unit controls the drive mechanism to move the floating support device toward the one side of the transport path, thereby acquiring first image data of the medium imaged in a direction perpendicular to the first side of the medium by the line camera, and after acquiring the first image data, controls the rotation mechanism to rotate the floating support device by 90 degrees, and then controls the drive mechanism to move the floating support device toward the other side of the transport path, thereby acquiring second image data of the medium imaged in a direction perpendicular to the second side of the medium by the line camera.

[0089] (8) the first fixing mechanism is located on the one side of the transport path of the non-contact suction cup when the floating support device moves toward the one side of the transport path, The visual inspection apparatus described in (7) is characterized in that the second fixing mechanism is positioned on the other side of the transport path of the non-contact suction cup when the floating support device moves toward the other side of the transport path. [Explanation of symbols]

[0090] Reference Signs List 1...visual inspection device, 2...medium, 2A...smallest medium, 2B...largest medium, 2a...first side, 2b...second side, 2a1...first side of smallest medium, 2b1...second side of smallest medium, 2a2...first side of largest medium, 2b2...second side of largest medium, 4...rail, 5...floating support device, 6...rotation mechanism, 7...driving mechanism, 8...non-contact suction cup, 9...fixing mechanism, 10A...first fixing mechanism, 10B...second fixing mechanism, 11...first detector, 12...second detector, 13...light emitting unit, 14...detection unit, 15...barcode Reader, 16...imaging mechanism, 17...line camera, 18...mounting member, 19A...first mounting member, 19B...second mounting member, 21...control unit, 22...storage device, 23...image analysis unit, 25...transport path, 31a...upper surface, 31...porous plate, 31a...upper surface, 32...main body portion, 33...protruding portion, 34...first step portion, 35...second step portion, 36...first joint, 37...second joint, 38...frame plate, 38a...first end surface, 38b...second end surface, 41...first suction surface, 42a...first air intake port, 42b...internal air holes, 42c ...side air hole, 42...first suction member, 43...first holder, 44...first air flow path, 45...first intake mechanism, 46...second suction surface, 47a...second intake port, 47b...internal air hole, 47c...side air hole, 47...second suction member, 48...second holder, 49...second air flow path, 50...second intake mechanism, 51...upper surface, 52...lower surface, 53...first side surface, 54...second side surface, 56...upper surface, 57...lower surface, 58...third side surface, 59...fourth side surface, 61...plate portion, 62...upper protrusion, 62a...wall surface, 63...lower protrusion protrusion, 64...first through hole, 64a...opening, 64b...opening, 65...joint, 68...step, 71...plate, 72...upper protrusion, 72a...wall surface, 73...lower protrusion, 74...second through hole, 74a...opening, 74b...opening, 75...joint, 78...step, 81...first mounting surface, 82...first support member, 83...first holder, 84...plate, 85...upper protrusion, 86...lower protrusion, 87...step, 91...second mounting surface, 92...second support member, 93...second holder, 94...plate, A...first position, B...second position.

Claims

1. a non-contact suction plate having a porous plate and configured to maintain a flexible rectangular sheet-shaped medium in a state where the medium is lifted a predetermined distance from the porous plate; a fixing mechanism including a first fixing mechanism and a second fixing mechanism, each of which is fixed to a position of the non-contact suction cup that does not overlap with the porous plate; having If a direction perpendicular to the vertical direction is defined as a first direction, and a direction perpendicular to the vertical direction and the first direction is defined as a second direction, the first fixing mechanism includes a first suction member having a first suction surface having a plurality of first intake ports, a first air flow path communicating with the plurality of first intake ports, and a first intake mechanism connected to the first air flow path; the second fixing mechanism includes a second suction member having a second suction surface having a plurality of second intake ports, a second air flow path communicating with the plurality of second intake ports, and a second intake mechanism connected to the second air flow path; The first adsorption surface extends along the first direction, The second adsorption surface extends along the second direction, The first adsorption surface and the second adsorption surface are parallel to the porous plate and positioned above the porous plate by the predetermined distance; When the first suction mechanism is driven, air is sucked through the first suction port, and a portion of an edge of a first side of the medium along the first direction is sucked onto the first suction surface, A floating support device characterized in that when the second suction mechanism is driven, air is sucked in through the second suction port, and a portion of the edge of the second side of the medium along the second direction is adsorbed to the second suction surface.

2. The first adsorption member is a porous body having a rectangular prism shape extending along the first direction, the second adsorption member is a porous body having a rectangular prism shape extending along the second direction, the first adsorption surface is an upper surface of the first adsorption member, the first air intake port is an air hole in an upper surface of the first adsorption member, the second adsorption surface is an upper surface of the second adsorption member, 2. The floating support device according to claim 1, wherein the second air intake port is an air hole in an upper surface of the second suction member.

3. the first fixing mechanism includes a first holder that holds the first suction member, the first holder includes a first lower surface contact portion that is in close contact with a lower surface of the first adsorption member, and a first side surface contact portion that is in close contact with a first side surface of the first adsorption member opposite to the porous plate, The first lower surface contact portion is fixed to the non-contact suction cup, the first air flow path includes a first through hole that penetrates the first holder and opens to the first side contact portion, the first intake mechanism is connected to an opening of the first through hole that is exposed to the outside on a side opposite to the first side contact portion, the second fixing mechanism includes a second holder that holds the second suction member, the second holder includes a second lower surface contact portion that is in close contact with a lower surface of the second suction member, and a second side surface contact portion that is in close contact with a third side surface of the second suction member opposite to the porous plate, The lower second surface contact portion is fixed to the non-contact suction cup, the second air flow path includes a second through hole that penetrates the second holder and opens to the second side contact portion, the second intake mechanism is connected to an opening of the second through hole that is exposed to the outside on a side opposite to the second side contact portion, The non-contact suction cup fixes the first holder and the second holder to the non-contact suction cup. The floating support device described in claim 2, characterized in that when the first suction member is attached, it has a first end surface that is in close contact with a second side surface of the first suction member facing opposite the first side surface, and a second end surface that is in close contact with a fourth side surface of the second suction member facing opposite the third side surface.

4. the fixing mechanism is capable of adsorbing a plurality of media each having a first side and a second side with different lengths, When the fixing mechanism adsorbs the smallest medium, which has the first side and the second side having the shortest lengths, among the plurality of media, the first suction surface completely overlaps with the first side of the smallest medium in the vertical direction; 4. The floating support device according to claim 2, wherein the second attraction surface completely overlaps with the second side of the smallest medium in the vertical direction.

5. a dimension of the first adsorption surface in the first direction is shorter than a dimension of the first side of the smallest medium; 5. The floating support device according to claim 4, wherein a dimension of the second attraction surface in the second direction is shorter than a dimension of the second side of the smallest medium.

6. a first mounting member disposed on a side of the first fixing mechanism opposite to a side on which the second fixing mechanism is located in the first direction; a second mounting member disposed on a side of the second fixing mechanism opposite to a side on which the first fixing mechanism is located in the second direction; having The first mounting member includes a first support member having a first mounting surface; the second mounting member includes a second support member having a second mounting surface; the first placement surface is at the same height as the first adsorption surface in the vertical direction and extends along the first direction; The floating support device according to claim 4 , wherein the second placement surface is at the same height as the second attraction surface in the up-down direction and extends along the second direction.

7. The floating support device according to claim 1 ; a rotation mechanism that rotates the floating support device on a rotation axis along a vertical direction; a drive mechanism that moves the floating support device along a horizontal transport path via the rotation mechanism; A line camera that captures an image of the medium; a control unit that controls the floating support device, the rotation mechanism, the drive mechanism, and the line camera; having the line camera is provided above the conveying path and extends in a direction perpendicular to a conveying direction along the conveying path, the first suction surface extends in a direction perpendicular to the transport direction when the floating support device moves toward one side of the transport path, when the floating support device moves toward the other side of the transport path, the second suction surface extends in a direction perpendicular to the transport direction by rotating the floating support device by 90 degrees; The control unit controls the drive mechanism to move the floating support device toward the one side of the transport path, thereby acquiring, by the line camera, first image data of the medium captured in a direction perpendicular to the first side of the medium, and after acquiring the first image data, controls the rotation mechanism to rotate the floating support device by 90 degrees, and then controls the drive mechanism to move the floating support device toward the other side of the transport path, thereby acquiring, by the line camera, second image data of the medium captured in a direction perpendicular to the second side of the medium. Visual inspection equipment.

8. the first fixing mechanism is located on the one side of the transport path of the non-contact suction cup when the floating support device moves toward the one side of the transport path, 8. The visual inspection apparatus according to claim 7, wherein the second fixing mechanism is positioned on the other side of the transport path of the non-contact suction cup when the floating support device moves toward the other side of the transport path.

Images