Processing apparatus, substrate processing apparatus, display method, substrate processing method, method for manufacturing semiconductor device, and program

Abstract

To provide technology that makes it possible to easily identify a specific recipe and the combination information associated with the recipe in a processing apparatus.SOLUTION: A processing apparatus has a control unit capable of controlling the display of the recipe editing screen having a management information display area that enables display of management information of the recipe corresponding to the selected indication and a combination information edit area that displays combination information linked to the recipe displayed in the management information display area, on the screen, when the recipe selection screen with a recipe selection area that displays multiple markings indicating recipes, including sub-recipes or main recipes, and any of the markings are selected on the recipe selection screen.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present disclosure relates to a processing apparatus, a substrate processing apparatus, a display method, a substrate processing method, a manufacturing method of a semiconductor device, and a program. [Background technology]

[0002] A technique for displaying a recipe and its combination information, as described in Patent Document 1, is known. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2019 / 186649 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique that enables a processing device to easily identify a specific recipe and combination information associated with the recipe. [Means for solving the problem]

[0005] According to one aspect of the present disclosure, a technology is provided that includes a control unit capable of controlling the display of a recipe editing screen on a screen, the recipe editing screen having a recipe selection screen having a recipe selection area that displays a plurality of indicators indicating recipes including sub-recipes or main recipes, a management information display area that is capable of displaying management information of the recipe corresponding to a selected indicator when any of the indicators is selected on the recipe selection screen, and a combination information editing area that displays combination information linked to the recipes displayed in the management information display area. Effect of the Invention

[0006] According to the present disclosure, it is possible to easily identify a specific recipe in a processing apparatus and combination information associated with the recipe. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a perspective view illustrating an example of a substrate processing apparatus. [Diagram 2] 2 is a schematic configuration diagram of a processing furnace in the substrate processing apparatus of FIG. 1. [Diagram 3] 2 is a block diagram showing an outline of a control device in the substrate processing apparatus of FIG. 1. FIG. [Figure 4] 13 is a diagram showing an example of a recipe selection screen having a recipe selection area and a recipe editing area on the screen of the control unit. FIG. [Diagram 5] 13 is a diagram showing an example of a recipe selection screen having a recipe selection area and a second recipe selection area on the screen of the control unit. FIG. [Figure 6] 13 is a diagram showing an example of a recipe editing screen having a management information display area and a combination information editing area displayed on the screen of a control unit. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. Note that each drawing is merely a schematic diagram, and the size of each part shown in the drawing and the ratio of the size between each part do not necessarily reflect the actual device. Furthermore, symbols that appear in common in each drawing indicate common configurations even if they are not mentioned in the description of each drawing.

[0009] In the following description, a worker refers to a person who uses a substrate processing apparatus or a person who processes substrates using the substrate processing apparatus.

[0010] (composition) The configuration of a substrate processing apparatus 10 according to the present embodiment will be described with reference to Fig. 1 to Fig. 3. As shown in Fig. 1, the substrate processing apparatus 10 according to the present disclosure includes a housing 12. The substrate processing apparatus 10 uses a cassette 107 that stores a plurality of substrates 200 made of silicon or the like, and a cassette shelf 109 is installed inside the housing 12. The cassette 107 is adapted to be carried in and out onto the cassette shelf 109 by an in-process transport device (not shown).

[0011] A cassette shelf 109 is installed in the approximate center in the front-rear direction inside the housing 12, and the cassette shelf 109 is configured to store a plurality of cassettes 107 in a plurality of rows and a plurality of stages. The cassette shelf 109 is provided with a transfer shelf 123 on which the cassettes 107 are stored. A spare cassette shelf 110 is also provided inside the housing 12 of the substrate processing apparatus 10, and is configured to sparely store the cassettes 107. A cassette elevator 115 and a cassette transfer machine 114 that can move up and down while holding the cassette 107 are also provided inside the housing 12. The cassettes 107 are transported between the cassette shelf 109 and the spare cassette shelf 110 by continuous operations of the cassette elevator 115 and the cassette transfer machine 114 controlled by the control unit 101 described later.

[0012] Behind the cassette shelf 109, there are a substrate transfer machine 112 capable of rotating or translating the substrate 200 in a horizontal direction, and a transfer elevator 113 for raising and lowering the substrate transfer machine 112. The transfer elevator 113 is installed at the right end of the housing 12. By continuous operation of the transfer elevator 113 and the substrate transfer machine 112, the tweezers 111 of the substrate transfer machine 112 serve as a placement portion for the substrate 200, and the substrate 200 is loaded and unloaded from the boat 217.

[0013] The processing furnace 202 is provided above the rear of the housing 12. The lower end of the processing furnace 202 is configured to be opened and closed by a furnace port shutter 116. A boat elevator 121 is provided below the processing furnace 202 as a lifting mechanism for lifting the boat 217 up and down to the processing furnace 202, and a seal cap 219 as a lid is horizontally installed on a lifting member 122 as a connector connected to a lifting platform of the boat elevator 121. The seal cap 219 is configured to support the boat 217 vertically and to be able to close the lower end of the processing furnace 202. The boat 217 as a substrate holder includes a plurality of boat pillars 221 and is configured to horizontally hold a plurality of substrates 200 (for example, about 50 to 150 substrates) aligned vertically with their centers aligned.

[0014] 1, a clean unit 118 including a supply fan and a dust filter is provided on the upper portion of the housing 12 to supply clean air, which is an atmosphere obtained by purifying the outside air flowing in from the duct 124. The clean unit 118 is configured to circulate the clean air inside the housing 12.

[0015] 1, the substrate processing apparatus 10 is provided with a control device 100, which will be described later. The control device 100 is electrically connected to each component in the substrate processing apparatus 10. Each component is operated according to instructions from the control device 100.

[0016] Next, the above-mentioned processing furnace 202 will be described in detail with reference to FIG.

[0017] (Processing furnace) 2, the processing furnace 202 includes a reaction tube 203. The reaction tube 203 is made of a heat-resistant nonmetallic material such as quartz (SiO2) or silicon carbide (SiC), and has a cylindrical shape with a closed upper end and an open lower end.

[0018] Inside the reaction tube 203, a processing chamber 34 capable of processing substrates 200 such as wafers is formed, for example. In other words, the substrate processing apparatus 10 has the processing chamber 34. A boat 217 as a substrate holder is inserted from below into the processing chamber 34, and the substrates 200 held in a horizontal position by the boat 217 are accommodated in a vertically aligned state in multiple stages. The boat 217 accommodated in the processing chamber 34 is configured to be rotatable with a plurality of substrates 200 mounted thereon while maintaining the airtightness of the processing chamber 34 by rotating a rotation shaft 44 by a rotation mechanism 43.

[0019] A manifold 45 is disposed concentrically with the reaction tube 203 below the reaction tube 203. The manifold 45 is made of a metal material such as stainless steel, and has a cylindrical shape with an open upper end and lower end. The manifold 45 supports the reaction tube 203 vertically from the lower end side. That is, the reaction tube 203 forming the processing chamber 34 stands vertically via the manifold 45 to form the processing furnace 202. The lower end of the manifold 45 is configured to be airtightly sealed by a seal cap 219 when the boat elevator 121 rises. A sealing member 46a such as an O-ring that airtightly seals the processing chamber 34 is provided between the lower end of the manifold 45 and the seal cap 219.

[0020] In addition, a gas inlet pipe 47 for introducing a source gas, a purge gas, etc. into the processing chamber 34, and an exhaust pipe 48 for exhausting the gas in the processing chamber 34 are connected to the manifold 45. The pressure in the processing chamber 34 is controlled by adjusting the APC valve 35 based on the detection result of a pressure sensor (not shown).

[0021] A heater unit 49 serving as a heating section (heating mechanism) is disposed around the outer periphery of the reaction tube 203 and concentrically with the reaction tube 203. The heater unit 49 is configured to heat the processing chamber 34 so that the processing chamber 34 has a uniform or predetermined temperature distribution throughout the processing chamber 34.

[0022] FIG. 3 is a block diagram showing an example of a functional configuration of the control device 100 included in the substrate processing apparatus 10 according to this embodiment.

[0023] As shown in FIG. 3, the substrate processing apparatus 10 includes a control device 100 which is a main controller, an external communication unit 201, an external memory unit 210, an operation unit 212, a display unit 204, a process control unit 205, and a transport control unit 206.

[0024] The control device 100 also includes a control unit 101, a storage unit 104, and an I / O (also called an I / O port) 105. The control unit 101 includes a CPU (Central Processing Unit) 102 and a RAM (Random Access Memory) 103.

[0025] The control device 100 is connected to an operation unit 212, and is also connected to a process control unit 205 and a transport control unit 206 via an I / O 105. The control device 100 is electrically connected to each of the process control unit 205 and the transport control unit 206 via the I / O 105, and is therefore configured to be capable of transmitting and receiving each data, downloading and uploading each file, and the like.

[0026] The control device 100 is connected to an external host computer (not shown) via an external communication unit 201. Therefore, even if the substrate processing apparatus 10 is installed in a clean room, the host computer can be placed in an office or the like outside the clean room. In addition, an external storage unit 210 is connected to the control device 100 as an attachment unit into which a USB (Universal Serial Bus) memory or the like, which is an example of a recording medium, is inserted and removed.

[0027] The operation unit 212 is a so-called touch panel that is integral with the display unit 204 or is connected to the display unit 204 via a video cable or the like. The display unit 204 is configured to display various operation screens for operating the substrate processing apparatus 10. The operation screen has a screen for checking the state of the substrate process system controlled by the process control unit 205 and the substrate transport system controlled by the transport control unit 206, and the display unit 204 can also be provided with various operation buttons as an input unit for inputting operation instructions to the substrate process system and the substrate transport system. The operation unit 212 displays information generated in the substrate processing apparatus 10 on the display unit 204 via the operation screen. The operation unit 212 also outputs the information displayed on the display unit 204 to a device such as a USB memory inserted in the external storage unit 210. The operation unit 212 accepts input data (input instructions) from the operation screen displayed on the display unit 204 and transmits the input data to the control device 100. Furthermore, the operation unit 212 is adapted to receive an instruction (control instruction) to execute an arbitrary substrate processing recipe (also called a process recipe) among the recipes expanded in the RAM 103 or the plurality of recipes stored in the memory unit 104, and transmit the instruction to the control device 100. Here, the operation unit 212 and the display unit 204 are provided separately from the control device 100, but may be configured to be included integrally in the control device 100.

[0028] Although not shown here, the process control unit 205 includes a temperature control unit, a gas flow rate control unit, and a pressure control unit. Each of these temperature control units, gas flow rate control units, and pressure control units constitutes a sub-controller, and is electrically connected to the process control unit 205, enabling transmission and reception of each data, downloading and uploading of each file, etc. The process control unit 205 and each sub-controller (temperature control unit, gas flow rate control unit, and pressure control unit) may be configured separately or integrally.

[0029] The transport control unit 206 includes a mechanism control unit (not shown). The mechanism control unit is configured to control each of the drive system, the rotation system, and the lift system of the substrate processing apparatus 10. The transport control unit 206 is configured to control, for example, the transport operations of the cassette shelf 109, the boat elevator 32, the cassette transport mechanism 15, the substrate transfer mechanism 24, the boat 26, and the rotation mechanism (not shown).

[0030] The control device 100 is configured as a computer including a CPU 102, a RAM 103, a storage unit 104, and an I / O 105. The storage unit 104 stores recipe files such as recipes in which processing conditions and processing procedures are defined, control program files for executing these recipe files, parameter data (setting value files) for setting processing conditions and processing procedures, an error processing program file and parameter data for error processing, various screen files including an input screen for inputting process parameters, various icon files, and the like (none of which are shown). The control device 100 is connected to a network such as the Internet, a LAN (Local Area Network), or a WAN (Wide Area Network) by using an external communication unit 201, and is capable of communicating with external devices via the network.

[0031] In this embodiment, when simply referring to a recipe, this refers to a general term for a main recipe and a sub-recipe, and in the following description, this refers to at least one of a main recipe and a sub-recipe.

[0032] The main recipe is a recipe that specifies a series of procedures from the start of processing the substrate 200 (loading the substrate 200 into the boat 217) to the end of processing the substrate 200 (unloading the substrate 200 from the boat 217) in the processing procedure of the substrate 200 described later. Each main recipe is specified by citing one sub-recipe and multiple pieces of parameter data, as shown in a recipe selection area 62 in Fig. 4 described later.

[0033] A sub-recipe is a recipe that specifies the more detailed steps in a processing procedure of a substrate 200, which will be described later. Each sub-recipe can be referenced by multiple main recipes, as shown in a combination information editing area 70 in Fig. 6, which will be described later.

[0034] In this embodiment, the maximum number of steps that can be specified in a sub-recipe is greater than the maximum number of steps that can be specified in a main recipe, i.e., the sub-recipe allows for more detailed step specification than the main recipe.

[0035] As described above, in this embodiment, since the sub-recipe is cited in the main recipe, when an operator edits a sub-recipe cited in the main recipe, the result of the editing may affect the main recipe as well. In other words, the sub-recipe is configured to be linked to the main recipe.

[0036] For example, a hard disk drive (HDD), a solid state drive (SSD), a flash memory, etc. are used as the storage unit 104. The storage unit 104 stores a program for executing each procedure according to the present embodiment.

[0037] The program may be pre-installed in the substrate processing apparatus 10, for example. The program may be realized by recording it on a non-volatile recording medium or distributing it via a network and appropriately installing it in the substrate processing apparatus 10. Examples of the non-volatile recording medium include a CD-ROM, a magneto-optical disk, a HDD, a DVD-ROM, a flash memory, a memory card, a USB, and the like.

[0038] The CPU 102 of the substrate processing apparatus 10 according to this embodiment functions as a control unit 101 by writing a program stored in the storage unit 104 into the RAM 103 and executing the program.

[0039] Next, the operations of the substrate processing apparatus 10 and the control unit 101 in the substrate processing method according to this embodiment will be described.

[0040] (Transportation process) 1, the control unit 101 receives the cassette 107 from a cassette loading / unloading port. Thereafter, the control unit 101 transfers the cassette 107 from the cassette shelf 109 or the spare cassette shelf 110 to the transfer shelf 123, or transports the cassette 107 directly to the transfer shelf 123.

[0041] (Carry-in process) When the control unit 101 transfers the cassette 107 to the transfer shelf 123, it uses the tweezers 111 of the substrate transfer machine 112 to pick up the substrates 200 from the cassette 107 through the substrate loading / unloading opening, and loads each substrate 200 into the boat 217. As a result, the boat 217 holds the multiple substrates 200 in a stacked state with gaps between each substrate in the vertical direction.

[0042] When a predetermined number of substrates 200 are loaded into the boat 217, the control unit 101 causes the furnace port shutter 116 to open the lower end of the processing furnace 202, which has been closed by the furnace port shutter 116. Next, the control unit 101 causes the seal cap 219 to rise by the boat elevator 121, so that the boat 217 holding the group of substrates 200 is loaded into the processing furnace 202. In other words, the control unit 101 operates the boat elevator 121 to load the boat 217 holding the unprocessed substrates 200 from inside the transfer chamber into the processing chamber 34. As a result, the seal cap 219 seals the lower end of the manifold 45 via the sealing member 46a.

[0043] (Processing) After the substrate 200 is loaded into the boat 217, the control unit 101 processes the unprocessed substrate 200 held by the boat 217 loaded into the processing chamber 34 according to a recipe that defines processing conditions for the substrate. Specifically, when performing a film formation process by thermal CVD reaction, for example, the control unit 101 uses the exhaust pipe 48 to exhaust air and adjusts the APC valve 35 so that the processing chamber 34 has a desired pressure (vacuum level). Then, the control unit 101 uses the heater unit 49 to heat the processing chamber 34 to maintain it at a desired temperature, and operates the rotation mechanism 43 to rotate the boat 217, in other words, the substrate 200. The control unit 101 continues to rotate the substrate 200 until the substrate 200 is unloaded, which will be described later. Furthermore, the control unit 101 supplies raw material gas, purge gas, and the like to the processing chamber 34 through the gas introduction pipe 47, thereby forming a film on the surface of the substrate 200 held in the boat 217 by utilizing a thermal decomposition reaction or the like.

[0044] After forming a film on the surface of the substrate 200, the control unit 101 stops heating by the heater unit 49 and reduces the temperature of the processed substrate 200 to a predetermined temperature. Then, when a preset time has elapsed from the point in time when heating was stopped, the control unit 101 stops the supply of gas to the processing chamber 34 and starts the supply of an inert gas to the processing chamber 34. As a result, the control unit 101 replaces the atmosphere in the processing chamber 34 with the inert gas and returns the pressure in the processing chamber 34 to normal pressure.

[0045] The control unit 101 executes the above-mentioned processing steps according to a recipe (more specifically, a main recipe and a sub-recipe). The processing steps are determined by an operator who performs a film forming process on the substrate 200 by appropriately selecting a main recipe from the recipes.

[0046] The recipe is stored in the storage unit 104, and the control unit 101 acquires the recipe in a substrate processing step and controls the substrate processing according to the processing conditions defined in the recipe. The recipe may not only be stored in the storage unit 104, but may also be read from a USB memory, a CD, or a DVD via the external storage unit 210, or may be acquired from an external device via the external communication unit 201.

[0047] (Export process) After the processing step is completed, the control unit 101 raises and lowers the boat elevator 121 and lowers the seal cap 219 to open the bottom end of the manifold 45. The control unit 101 also unloads the boat 217 holding the processed substrates 200 from the bottom end of the manifold 45 to the outside of the processing chamber 34 (boat unloading).

[0048] (Transfer process after unloading) After the substrates 200 in the waiting boat 217 have cooled to a predetermined temperature (for example, about room temperature), the control unit 101 uses the substrate transfer machine 28 arranged in the transfer chamber to remove the substrates 200 from the boat 217. Then, the control unit 101 performs a substrate discharge operation to transport and store the processed substrates 200 removed from the boat 217 in an empty cassette. Thereafter, the control unit 101 ejects the cassette 107 that stores the processed substrates 200 to the outside of the housing 12 in the reverse order described above. The substrates 200 ejected to the outside of the housing 12 are then transported to a semiconductor device manufacturing device and incorporated into the semiconductor device.

[0049] The method of processing the substrate 200 and the method of manufacturing a semiconductor device according to this embodiment include a step of processing the substrate 200 based on a recipe displayed on a recipe selection screen 60, which will be described later. In other words, the method of processing the substrate 200 and the method of manufacturing a semiconductor device include a step of displaying a screen by a display method, which will be described later.

[0050] In other words, the program causes the computer to execute a procedure for displaying a plurality of indicators indicating recipes including sub-recipes or main recipes on a recipe selection screen, and also causes the computer to execute a procedure for displaying a recipe editing screen on a screen, the recipe editing screen having a management information display area that can display management information corresponding to an indicator selected when any of the indicators is selected on the recipe selection screen, and a combination information editing area that displays combination information linked to the recipes displayed in the management information display area.

[0051] Next, a display method for displaying on the screen of the display unit 204 according to this embodiment will be described with reference to FIGS.

[0052] (Screen display and combination information) 4 to 6 are diagrams showing an example of a screen display according to the present disclosure, in which a recipe selection screen 60 having a recipe selection area 62 and a recipe editing area 64 is displayed on the screen. More specifically, in this embodiment, the recipe selection area 62 is displayed on the left side of the screen, and the recipe editing area 64 is displayed on the right side of the screen, adjacent to each other.

[0053] The recipe selection area 62 displays a plurality of main recipes, sub-recipes, and parameter data stored in the memory unit 104. More specifically, the names of the recipes and parameter data are displayed as character strings in the recipe selection area 62, and each indicator 72 can be selected by the operator touching the screen. In Fig. 4, as an example, the main recipe "MR3" is shown being selected.

[0054] The recipe editing area 64 displays the recipe selected in the recipe selection area 62 so that it can be edited. For example, in Fig. 4, when "MR3" in the main recipe is selected, the steps of that recipe are displayed in the recipe editing area 64. More specifically, the recipe editing area 64 displays sub-recipes and parameter data cited by each step of the main recipe "MR3". Each of the displayed step indicators 72 can be selected by the worker by touching the screen, and when each step is selected, the contents of the step are separately displayed, allowing the worker to edit it (not shown).

[0055] That is, FIG. 4 is an example of a screen displayed by a process of displaying a plurality of indicators 72 indicating recipes including sub-recipes or main recipes on the recipe selection screen 60.

[0056] 5 shows a screen when the recipe selection area 62 is selected to display a list of sub-recipes. As an example, the list of sub-recipes is displayed in the second recipe selection area 66 on the right side of the screen by selecting the indicator 72 for the item "Sub-recipe" ("Sub Recipe" in FIG. 5) from the list in the recipe selection area 62. The second recipe selection area 66 is another example of the recipe selection area 62 in this embodiment.

[0057] 5, the second recipe selection area 66 displays a list of names of sub-recipe stored in the storage unit 104. In the second recipe selection area 66 in this embodiment, the name of each sub-recipe may be displayed with a link display icon 74. For example, an icon indicating the presence of link, such as link display icon 74A, is displayed. Furthermore, when each sub-recipe is cited by a main recipe, the link display icon 74 may be changed according to the number of cited main recipes. More specifically, the link display character 74B is displayed as a character according to the number of cited main recipes. In this embodiment, seven main recipes are linked, and "(7)" is displayed as the link display character. Also, in this embodiment, when the number of cited main recipes for each sub-recipe is 0 (i.e., when the sub-recipe is not cited in any main recipe), the link display icon 74 is displayed without being added. Note that, when there is no cited main recipe, the link display character 74B may display the number of cited main recipes (i.e., display "(0)").

[0058] That is, FIG. 5 is another example of a screen displayed by the step of displaying a plurality of indicators 72 indicating recipes including sub-recipe or main recipe on the recipe selection screen 60. In FIG.

[0059] 6 shows a recipe editing screen 80 having a management information display area 68 and a combination information editing area 70. More specifically, in this embodiment, the management information display area 68 is displayed on the left side of the screen, and the combination information editing area 70 is displayed on the right side of the screen, close to each other.

[0060] The management information display area 68 displays management information of a sub-recipe (the "SR2" sub-recipe in FIG. 6) selected from the sub-recipe displayed in FIG. 4 or 5. More specifically, the management information display area 68 displays the name of the sub-recipe, parameter data to be referenced, and combination information to be described later. In other words, the control unit 101 displays detailed information of the combination information in the combination information editing area 70.

[0061] In this embodiment, the combination information is a list of main recipes that cite the sub-recipe. When combination information is selected, details of the corresponding combination information are displayed in the combination information editing area 70. In addition, the combination information editing area 70 displays a list of main recipes that cite the sub-recipe as the combination information, and buttons for accepting editing of each main recipe are arranged side by side.

[0062] In this embodiment, as an example, three buttons for accepting editing of the main recipe are displayed for each main recipe: a first edit button 76A, a second edit button 76B, and a third edit button 76C.

[0063] When an operator selects the first edit button 76A, the first edit button 76A causes the control unit 101 to execute a process displayed on a screen for editing steps in the main recipe (i.e., FIG. 4). In other words, when an operator selects the first edit button 76A, the first edit button 76A causes a transition to a screen for editing the corresponding recipe.

[0064] Moreover, the second edit button 76B is a button that, when selected by the operator, causes the control unit 101 to execute a process of deleting the main recipe (deleting it from the storage unit 104).

[0065] Furthermore, the third edit button 76C, when selected by the operator, causes the control unit 101 to execute a process of eliminating the citation relationship of the selected sub-recipe from the main recipe. Here, examples of eliminating the citation relationship of a sub-recipe include a process of directly writing parameter data or steps of the sub-recipe into the main recipe, and a process of ignoring steps that cite the sub-recipe in the main recipe. In other words, the third edit button 76C can be said to be a button that, when selected by the operator, prevents the editing results of the sub-recipe from affecting the main recipe even if the sub-recipe is edited.

[0066] In other words, Figure 6 is an example of a screen displayed by a process of displaying a recipe editing screen 80 on the screen, the recipe editing screen 80 having a management information display area 68 that can display management information corresponding to a selected indicator 72 when any indicator 72 is selected on the recipe selection screen 60, and a combination information editing area 70 that displays combination information associated with the recipe displayed in the management information display area 68.

[0067] In this embodiment, the combination information may be created in any manner.

[0068] As an example, the combination information is data created by the CPU 102 referencing each of the main recipes stored in the storage unit 104 and detecting the names of the sub-recipes referenced by each of the main recipes when the substrate processing apparatus 10 is started. In this case, the combination information is stored as data in the storage unit 104, and when combination information is selected, as shown in Figures 5 and 6, the combination information data is read from the storage unit 104. In this case, the combination information is automatically created by the CPU 102, which reduces the burden on the operator. In this case, the combination information is promptly updated when the main recipe is created or edited.

[0069] As another example, the combination information is data of a portion of a sub-recipe that is added as meta information such as a header of the sub-recipe when an operator creates or edits the sub-recipe. In this case, when the management information display area 68 shown in Fig. 6 is displayed, the combination information is read together with the management information of the sub-recipe. In this case, since the combination information is stored as data of the sub-recipe, the size of the data stored in the storage unit 104 is smaller than when the CPU 102 automatically creates the combination information as data. Also, in this case, the start-up of the substrate processing apparatus 10 is faster than when the CPU 102 automatically creates the combination information as data when the substrate processing apparatus 10 is started up.

[0070] Next, the operation of the substrate processing apparatus 10 according to this embodiment and one or more effects obtained by the substrate processing apparatus 10 will be described.

[0071] (Action and Effects) In the substrate processing apparatus 10 according to this embodiment, the control unit 101 can control the screen to display the recipe selection screen 60 and the recipe editing screen 80. As a result, according to the substrate processing apparatus 10 according to this embodiment, the operator can easily identify other recipes associated with a specific recipe in the substrate processing apparatus 10 that stores a plurality of main recipes.

[0072] Moreover, in the substrate processing apparatus 10 according to the present embodiment, the control unit 101 displays a button for accepting editing of the combination information in the combination information editing area 70. Therefore, according to the substrate processing apparatus 10 according to the present embodiment, since the button for accepting editing of the combination information can be displayed, the operator can easily select the object to be edited.

[0073] Furthermore, in the substrate processing apparatus 10 according to this embodiment, the control unit 101 displays the linkage state between the sub-recipe and the main recipe in the recipe selection area 62. Therefore, according to the substrate processing apparatus 10 according to this embodiment, the operator can easily understand the linkage state between the sub-recipe and the main recipe. More specifically, since the operator can easily understand the recipes that are not linked to the sub-recipe, it is easy for the operator to determine whether or not the recipe displayed on the screen is unnecessary.

[0074] Furthermore, in the substrate processing apparatus 10 according to this embodiment, the control unit 101 displays an icon indicating whether or not there is a link between the sub-recipe and the main recipe. Therefore, according to the substrate processing apparatus 10 according to this embodiment, the operator can easily understand the link state between the sub-recipe and the main recipe by checking the icon displayed on the screen.

[0075] Furthermore, in the substrate processing apparatus 10 according to this embodiment, the control unit 101 displays indicators 72 indicating multiple sub-recipes and an icon indicating whether or not the sub-recipes are linked to the main recipe in the recipe selection area 62. Therefore, according to the substrate processing apparatus 10 according to this embodiment, the operator can easily understand the link state between the sub-recipes and the main recipe.

[0076] Furthermore, in the substrate processing apparatus 10 according to this embodiment, the control unit 101 displays an indicator 72 indicating a plurality of sub-recipes and an indicator 72 indicating the number of main recipes linked to the sub-recipes in the recipe selection area 62. Therefore, according to the substrate processing apparatus 10 according to this embodiment, the operator can easily grasp the number of main recipes linked to the sub-recipes, and therefore can easily grasp the impact of editing the sub-recipes.

[0077] Furthermore, in the substrate processing apparatus 10 according to this embodiment, a sub-recipe is configured to be linked to multiple main recipes, and the maximum number of steps that the main recipe can handle is configured to be smaller than the number of steps that the sub-recipe can handle. Here, since the sub-recipe has a larger maximum number of steps that it can handle, the sub-recipe has a higher degree of freedom in editing the apparatus control in the recipe than the main recipe. Therefore, according to the substrate processing apparatus 10 according to this embodiment, when editing a recipe, an operator can leave the sub-recipe and delete the main recipe.

[0078] In the substrate processing apparatus 10 according to this embodiment, one of the buttons for accepting edits is a button for transitioning to an edit screen for a recipe corresponding to each piece of combination information. Therefore, according to the substrate processing apparatus 10 according to this embodiment, when editing a recipe, the operator can easily edit the main recipe quickly after checking the combination information of the sub-recipe and the main recipe.

[0079] Furthermore, in the substrate processing apparatus 10 according to this embodiment, one of the buttons for accepting edits is a button for accepting severing the link between the sub-recipe and the main recipe displayed in the combination information edit area 70. Therefore, according to the substrate processing apparatus 10 according to this embodiment, when editing a recipe, even if the operator edits the sub-recipe, the editing result of the sub-recipe does not affect the main recipe.

[0080] Furthermore, in the substrate processing apparatus 10 according to this embodiment, one of the buttons for accepting edits is a button for deleting the main recipe corresponding to the sub-recipe displayed in the combination information editing area 70. Therefore, according to the substrate processing apparatus 10 according to this embodiment, when editing a recipe, the operator can easily delete the main recipe quickly after checking the combination information of the sub-recipe and the main recipe.

[0081] Furthermore, in the substrate processing apparatus 10 according to this embodiment, the control unit 101 arranges the management information display area 68 and the combination information editing area 70 adjacent to each other. Therefore, according to the substrate processing apparatus 10 according to this embodiment, the operator can easily compare the management information display area 68 and the combination information editing area 70 of each recipe.

[0082] Furthermore, in the substrate processing apparatus 10 according to this embodiment, the control unit 101 displays information indicating at least a sub-recipe or a main recipe in the management information display area 68. Furthermore, the control unit 101 displays a plurality of combination information linked to the sub-recipe or main recipe, and displays detailed information of the combination information selected in the management information display area 68 in the combination information editing area 70. Therefore, according to the substrate processing apparatus 10 according to this embodiment, the operator can quickly select other combination information in the management information display area 68, and can edit the combination information while paying attention to the other combination information.

[0083] Furthermore, in the substrate processing apparatus 10 according to this embodiment, the control unit 101 displays combination information corresponding to a recipe selected on the recipe selection screen 60 in the management information display area 68. Therefore, according to the substrate processing apparatus 10 according to this embodiment, the operator can easily grasp the combination information selected on the recipe selection screen 60 and the details of the combination information.

[0084] In the above description, the combination information is described as a list of main recipes that reference sub-recipe, but the technology disclosed herein is not limited to this. For example, it is possible to create combination information similarly for parameter data that a sub-recipe references. For example, when a sub-recipe or a main recipe references parameter data, the combination information is created as a list of sub-recipe or main recipe that references the parameter data.

[0085] That is, the combination information according to this embodiment can be said to be information indicating the relationship between the main procedure information and the secondary procedure information cited in the main procedure information. In the above description, the relationship between the main recipe and a sub-recipe cited in the main recipe can be said to correspond to this. For example, in the above description, the recipe includes the main recipe and the sub-recipe, but the recipe may further include other types of recipes cited by the sub-recipe. In other words, combination information may be created in the same manner as described above for other types of recipes cited only by the sub-recipe.

[0086] In the above description, the control unit 101 has been described as a part of the configuration of the substrate processing apparatus 10, but the technology according to the present disclosure is not limited to this, and the control unit 101 may be separated from the substrate processing apparatus 10. That is, the technology according to the present embodiment is also applicable to a case where a processing apparatus not having a processing chamber 34 processes a substrate 200 by controlling a separate substrate processing apparatus 10 via a network or the like.

[0087] In the above-mentioned embodiment, an example of forming a film using a batch-type substrate processing apparatus that processes multiple substrates at a time has been described. The present disclosure is not limited to the above-mentioned embodiment, and can be suitably applied to, for example, a case where a film is formed using a single-wafer type substrate processing apparatus that processes one or several substrates at a time. In addition, in the above-mentioned embodiment, an example of forming a film using a substrate processing apparatus having a hot-wall type processing furnace has been described. The present disclosure is not limited to the above-mentioned embodiment, and can be suitably applied to a case where a film is formed using a substrate processing apparatus having a cold-wall type processing furnace. In addition, the present disclosure is not limited to this, and can be applied to substrate processing apparatuses in general, such as a diffusion apparatus, an annealing apparatus, and an oxidation apparatus.

[0088] When using these substrate processing apparatuses, each process can be performed according to the same process procedures and under the same process conditions as in the above-mentioned aspects and modifications, and the same effects as in the above-mentioned aspects and modifications can be obtained.

[0089] The substrate is not limited to a wafer, but may be a photomask, a printed wiring board, a liquid crystal panel, a compact disk, a magnetic disk, or the like.

[0090] In addition, the processing executed by the CPU 102 by reading the software (program) in each of the above embodiments may be executed by various processors other than the CPU 102. In this case, examples of the processor include a PLD (Programmable Logic Device) such as an FPGA (Field-Programmable Gate Array) whose circuit configuration can be changed after manufacture, and a dedicated electric circuit such as an ASIC (Application Specific Integrated Circuit) which is a processor having a circuit configuration designed exclusively for executing a specific processing. In addition, the processing may be executed by one of these various processors, or may be executed by a combination of two or more processors of the same or different types (for example, a plurality of FPGAs, a combination of the CPU 102 and an FPGA, etc.). In addition, the hardware structure of these various processors is, more specifically, an electric circuit that combines circuit elements such as semiconductor elements.

[0091] In addition, in each of the above embodiments, the processing program is described as being pre-stored (installed) in the storage, but the present invention is not limited to this. The program may be provided in a form stored in a non-transitory storage medium such as a CD-ROM (Compact Disk Read Only Memory), a DVD-ROM (Digital Versatile Disk Read Only Memory), or a USB (Universal Serial Bus) memory. The program may also be downloaded from an external device via a network.

[0092] The above describes an embodiment of the present disclosure with reference to the attached drawings. However, it is clear that a person with ordinary knowledge in the technical field to which the present disclosure pertains can conceive of various modifications or applications within the scope of the technical ideas described in the claims, and it is understood that these also naturally fall within the technical scope of the present disclosure. [Explanation of symbols]

[0093] 62 Recipe selection area 60 Recipe selection screen 68 Management information display area 70 Combination information editing area 72 Signs 80 Recipe editing screen 101 Control section

Claims

1. a control unit capable of controlling to display on a screen a recipe selection screen having a recipe selection area displaying a plurality of indications indicating recipes including sub-recipes or main recipes, and a recipe editing screen having a management information display area capable of displaying management information of the recipe corresponding to the selected indication when any of the indications is selected on the recipe selection screen, and a combination information editing area displaying combination information linked to the recipes displayed in the management information display area; A processing device comprising:

2. the control unit displays a button for accepting editing of the combination information in the combination information editing area. The processing device of claim 1 .

3. The control unit displays a link state between the sub-recipe and the main recipe in the recipe selection area. The processing device of claim 1 .

4. the control unit displays an icon indicating whether or not the sub-recipe and the main recipe are linked in the recipe selection area. The processing device of claim 1 .

5. the control unit displays, in the recipe selection area, indications indicating the plurality of sub-recipes and an icon indicating whether or not the sub-recipes and the main recipe are linked to each other. The processing device of claim 1 .

6. the control unit displays, in the recipe selection area, indications indicating the plurality of sub-recipes and indications indicating the number of the main recipes linked to the sub-recipes. The processing device of claim 1 .

7. The sub-recipe is configured to cooperate with a plurality of the main recipes. The processing device of claim 1 .

8. The main recipe is configured to work with only one sub-recipe. The processing device of claim 7.

9. The sub-recipe is configured to cooperate with a plurality of the main recipes; The maximum number of steps that the main recipe can handle is configured to be smaller than the number of steps that the sub-recipe can handle. The processing device of claim 1 .

10. The button for accepting the edit is a button for transitioning to an edit screen for a recipe corresponding to each of the combination information. The processing device of claim 2 .

11. the button for accepting the editing is a button for accepting severance of the link between the sub-recipe and the main recipe displayed in the combination information editing area; The processing device of claim 2 .

12. the button for accepting the edit is a button for deleting the main recipe corresponding to the sub-recipe displayed in the combination information edit area; The processing device according to claim 2 .

13. the control unit disposes the management information display area and the combination information editing area adjacent to each other. The processing device of claim 1 .

14. the control unit displays, in the management information display area, information indicating at least the sub-recipe or the main recipe, and a plurality of pieces of combination information linked to the sub-recipe or the main recipe, and displays, in the combination information editing area, detailed information of the combination information selected in the management information display area. The processing device of claim 1 .

15. the control unit displays combination information corresponding to a recipe selected on the recipe selection screen in the management information display area. The processing device of claim 14.

16. A processing device according to claim 1 ; a processing chamber capable of processing a substrate; The substrate processing apparatus includes:

17. displaying a plurality of indications indicating recipes including sub-recipe or main recipe on a recipe selection screen; displaying a recipe editing screen on a screen, the recipe editing screen having a management information display area capable of displaying management information corresponding to the selected label when any of the labels is selected on the recipe selection screen, and a combination information editing area displaying combination information associated with the recipe displayed in the management information display area; A display method comprising:

18. A step of processing a substrate based on the recipe displayed on the recipe selection screen in the display method according to claim 17; The method for processing a substrate further comprises:

19. A step of processing a substrate based on the recipe displayed on the recipe selection screen in the display method according to claim 17; The method for manufacturing a semiconductor device further comprises:

20. A step of displaying a plurality of indications indicating recipes including sub-recipe or main recipe on a recipe selection screen; a step of displaying on a screen a recipe editing screen having a management information display area capable of displaying management information corresponding to the selected label when any of the labels is selected on the recipe selection screen, and a combination information editing area displaying combination information associated with the recipe displayed in the management information display area; A program that causes a computer to execute the following.

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