Teaching support device, teaching support method and teaching support program

Abstract

To shorten a time for determining a position of a prohibition area.SOLUTION: A teaching support device 30 causes a display to display an image of a model of a robot having an arm and a hand connected to the arm. The teaching support device 30 includes a setting unit 321 for setting a robot model, and a prohibition area which is not an operation area of the robot model, a receiving unit 322 for receiving the change of the prohibition area, a determining unit 326 for determining interference between the robot model and the prohibition area, a deriving unit 323 for deriving the attitude of the robot model, and an image generating unit 324 for generating images of the prohibition area and the robot model. When the prohibition area is changed, the image generating unit 324 generates the image of the changed and moved prohibition area. When the determination unit 326 determines the interference with the changed prohibition area, the deriving unit 323 derives the attitude of the robot model which is not interfered with the prohibition area, and the image generating unit 324 changes the attitude of the robot model to the derived attitude.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The technology disclosed herein relates to a teaching assistance device, a teaching assistance method, and a teaching assistance program. [Background technology]

[0002] There have been known teaching support devices that check the posture of a robot. For example, a teaching support device disclosed in Patent Document 1 checks the motion of a robot model by playing the motion of the robot model on a touch screen based on a motion trajectory determined from a set start point and end point. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6526098 Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, in the teaching support device as described above, the user sets one start point and one end point of the robot model, and then displays the operation of the robot model. Here, the user may want to change a prohibited area that is not an operating area of ​​the robot model. In this case, the user needs to check multiple positions of the prohibited area to find an appropriate position of the prohibited area. That is, the user needs to set the prohibited area one by one and check the postures of the robot model one by one to see whether a posture that does not interfere with the prohibited area is possible. Therefore, when the position of the prohibited area is determined based on the posture of the robot model, the time required to determine the position of the prohibited area increases.

[0005] The technology disclosed herein has been made in consideration of the above points, and has an object to reduce the time required to determine the position of the forbidden area. [Means for solving the problem]

[0006] The teaching support device disclosed herein is a teaching support device that displays on a display an image of a robot model having an arm and an end effector connected to the arm, and is equipped with a setter that sets a robot model that models the robot and a prohibited area that is not an operating area of ​​the robot model, a receiver that accepts changes to the prohibited area, a determiner that determines interference between the robot model and the prohibited area, a deriver that derives a posture of the robot model, and an image generator that generates an image of the prohibited area and the robot model, and when the prohibited area is changed via the receiver, the image generator generates an image of the changed and moving prohibited area, and when the determiner determines interference between the robot model and the changed prohibited area, the deriver derives a posture of the robot model that does not interfere with the prohibited area, and the image generator changes the posture of the robot model in the image to the posture derived by the deriver.

[0007] The teaching assistance method disclosed herein is a teaching assistance method that displays on a display an image of a model of a robot having an arm and an end effector connected to the arm, and includes the steps of: setting a robot model that models the robot and a prohibited area that is not an operating area of ​​the robot model; accepting changes to the prohibited area; determining interference between the robot model and the prohibited area; deriving a posture of the robot model; and, when determining interference between the robot model and the changed prohibited area, deriving a posture of the robot model that does not interfere with the prohibited area; generating images of the prohibited area and the robot model; and, when the prohibited area is changed, generating an image of the changed and moving prohibited area; and, when determining interference between the robot model and the changed prohibited area, changing the posture of the robot model in the image to the derived posture.

[0008] The teaching assistance program disclosed herein is a teaching assistance program that displays on a display an image of a model of a robot having an arm and an end effector connected to the arm, and causes a computer to realize the following functions: a function of setting a robot model that models the robot and a prohibited area that is not the operating area of ​​the robot model; a function of accepting changes to the prohibited area; a function of determining interference between the robot model and the prohibited area; a function of deriving the posture of the robot model, and, when determining interference between the robot model and the changed prohibited area, a function of deriving a posture of the robot model that does not interfere with the prohibited area; a function of generating images of the prohibited area and the robot model, and, when the prohibited area is changed, a function of generating an image of the changed and moving prohibited area, and, when determining interference between the robot model and the changed prohibited area, a function of changing the posture of the robot model in the image to the derived posture. Effect of the Invention

[0009] According to the teaching assistance device, the teaching assistance method, and the teaching assistance program, the time required to determine the position of the prohibited area can be reduced. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a schematic diagram showing a teaching support system including a teaching support device according to an embodiment. [Diagram 2] FIG. 2 is a schematic diagram showing a robot used in a clean room. [Diagram 3] FIG. 3 is a block diagram showing the configuration of the teaching assistance device. [Figure 4] FIG. 4 shows images of each model displayed on the display. [Diagram 5] FIG. 5 is a flowchart showing the operation of the teaching support device. [Figure 6] FIG. 6 is a diagram showing an image including a housing model of the initial specifications. [Figure 7]FIG. 7 is a diagram showing an image before the position of the interfering object model is changed. [Figure 8] FIG. 8 shows an image after the position of the interfering object model has been changed. [Figure 9] FIG. 9 is a diagram showing an image in which the display of the robot model is changed due to interference between the robot model and an interference object model. [Figure 10] FIG. 10 shows an image of a robot model whose pose has been changed. [Figure 11] FIG. 11 is a diagram showing an image in which the display of a robot model is changed because the robot model and an interfering object model interfere with each other in the teaching support device according to the first modification. [Figure 12] FIG. 12 is a diagram showing an image of a robot model whose posture has been changed in the teaching support device according to the first modification. [Figure 13] FIG. 13 is a diagram showing an image in which the display of the robot model is changed because the robot model and the interfering object model interfere with each other in the teaching support device according to the second modification. [Figure 14] FIG. 14 is a diagram showing an image of a robot model whose type has been changed in the teaching support device according to the second modification. [Figure 15] FIG. 15 shows three-dimensional images of each model displayed on the display. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, an exemplary embodiment will be described in detail with reference to the drawings. Fig. 1 is a schematic diagram showing a teaching support system 20 including a teaching support device 30 according to an embodiment. The teaching support system 20 is used to determine the layout of a place where a robot is used based on an image of a robot model that models the robot. The teaching support system 20 includes the teaching support device 30, a display 21, and a mouse 22.

[0012] The teaching support device 30 generates an image of a robot model, etc., and displays the generated image on the display 21. The display 21 displays the image upon receiving a signal from the teaching support device 30. The display 21 is, for example, a liquid crystal display or an organic EL display. The mouse 22 receives an input operation from a user. The mouse 22 outputs a signal corresponding to the input operation to the teaching support device 30. The mouse 22 is an example of an input device.

[0013] FIG. 2 is a schematic diagram showing a robot 10 used in the clean room 1. The robot 10 shown in FIG. 2 is an example of a robot targeted by the teaching support device 30. The robot 10 is a horizontally articulated robot (SCARA type robot). The robot 10 has a base 11, an arm 12 connected to the base 11, and a hand 14 connected to the arm 12. The arm 12 is connected to the base 11 so as to be rotatable in the horizontal direction. The arm 12 has a plurality of links 13 connected to each other. The hand 14 is an example of an end effector.

[0014] The arm 12 is composed of two links 13. The two links 13 are connected to each other so as to be rotatable in the horizontal direction. The two links 13 are, in order from the base 11 side, a first link 13a and a second link 13b. The first link 13a is connected to the base 11 so as to be rotatable around a first axis L1 extending in the vertical direction. The second link 13b is connected to the first link 13a so as to be rotatable around a second axis L2 extending in the vertical direction. When there is no need to distinguish between the first link 13a and the second link 13b, they are simply referred to as "link 13."

[0015] The robot 10 has two hands 14, that is, a first hand 14a and a second hand 14b. The first hand 14a is an example of a first end effector, and the second hand 14b is an example of a second end effector. The first hand 14a is located lower than the second hand 14b. The first hand 14a and the second hand 14b have the same basic configuration. The shape of the hand 14 is a plate extending in the horizontal direction, and the shape of the tip of the hand 14 is bifurcated. In other words, the shape of the hand 14 is approximately Y-shaped when viewed in the thickness direction. The first hand 14a and the second hand 14b are connected to the second link 13b so as to be rotatable in the horizontal direction around the third axis L3 extending in the vertical direction. The first axis L1, the second axis L2, and the third axis L3 extend parallel to each other. When there is no need to distinguish between the first hand 14a and the second hand 14b, they will be simply referred to as "hands 14."

[0016] The first link 13a, the second link 13b, the first hand 14a, and the second hand 14b are stacked from bottom to top in this order. Although not shown, the robot 10 has a plurality of motors that rotate the two links 13 and the two hands 14. The robot 10 transports a substrate S as an object by placing it on the upper surface of the hand 14 without fixing it thereto. In other words, the object is simply placed on the upper surface of the hand 14, and is not fixed thereto.

[0017] The clean room 1 includes a housing 2, and a robot 10 is disposed within the housing 2. The clean room 1 is used, for example, for an EFEM (Equipment Front End Module). The housing 2 is substantially rectangular. The inside of the housing 2 is a cleaned space. The robot 10 transports a substrate S within the clean room 1. For example, the substrate S is a disk-shaped semiconductor wafer.

[0018] A plurality of FOUPs (FOUP: Front Opening Unified Pod) 4 and a plurality of processing devices 5 are attached to the housing 2 from the outside of the housing 2. In this example, three FOUPs 4 and two processing devices 5 are provided in the housing 2. The plurality of FOUPs 4 are arranged on one side wall of the housing 2. The plurality of processing devices 5 are arranged on a side wall of the housing 2 opposite to the side wall on which the FOUPs 4 are arranged. The interiors of the FOUPs 4 and the processing devices 5 can communicate with the interior of the housing 2. The FOUP 4 accommodates a substrate S. The FOUP 4 accommodates, for example, a plurality of substrates S horizontally and equidistantly spaced in the vertical direction. The processing device 5 processes the substrate S. The processing device 5 is a processing device that performs various processes on the substrate S, such as heat treatment, impurity introduction processing, thin film formation processing, etc.

[0019] The robot 10 transports the substrate S between the FOUP 4 and the processing device 5. That is, the arm 12 and the hand 14 transport the substrate S between the FOUP 4 and the processing device 5. The areas inside the housing 2, the FOUP 4, and the processing device 5 correspond to the operational area of ​​the robot 10.

[0020] An obstruction 6 may be placed inside the housing 2. The obstruction 6 is a static or dynamic obstruction. The static obstruction 6 is a stationary obstruction such as a pillar, a screw, a wiring cover, etc. The dynamic obstruction 6 is a moving obstruction such as another robot, a shutter, etc.

[0021] The teaching support device 30 displays an image of a model of the robot 10 having an arm 12 and a hand 14 connected to the arm 12 on the display 21. The teaching support device 30 further displays an operating area of ​​the model of the robot 10 and a prohibited area that is not an operating area of ​​the model of the robot 10 on the display 21. When the prohibited area is changed by the user, the teaching support device 30 generates an image of the changed and moved prohibited area. When the changed prohibited area interferes with the model of the robot 10, the teaching support device 30 generates an image of the model of the robot 10 that does not interfere with the prohibited area. FIG. 3 is a block diagram showing the configuration of the teaching support device 30. The teaching support device 30 has a storage device 31, a processor 32, and a memory 33.

[0022] The processor 32 performs various types of arithmetic processing. For example, the processor 32 is formed of a processor such as a CPU (Central Processing Unit). The processor 32 may be formed of an MCU (Micro Controller Unit), an MPU (Micro Processor Unit), an FPGA (Field Programmable Gate Array), a PLC (Programmable Logic Controller), a system LSI, or the like.

[0023] The memory 31 stores various programs and various data executed by the processor 32. The memory 31 is formed of a non-volatile memory, a hard disk drive (HDD), a solid state drive (SSD), or the like. The memory 31 stores control programs such as a teaching assistance program 311. The teaching assistance program 311 is a teaching assistance program for causing a computer, i.e., the teaching assistance device 30, to realize various functions of generating images such as a model of the robot 10 to be displayed on the display 21. The teaching assistance program 311 is constructed, for example, based on a genetic algorithm.

[0024] The memory 33 temporarily stores data, etc. For example, the memory 33 is formed of a volatile memory.

[0025] The processor 32 realizes various functions by reading out control programs such as the teaching assistance program 311 from the storage unit 31 and developing them in the memory 33. Specifically, the processor 32 has a setter 321, a receiver 322, a deriver 323, an image generator 324, and a determiner 326 as functional blocks. The processor 32 may further have a warning unit 325 as a functional block.

[0026] The setter 321 sets a robot model 10m modeled on the robot 10 and a prohibited area that is not the operating area of ​​the robot model 10m. The setter 321 sets a housing model 2m modeled on the housing 2 and an interference model 6m modeled on the interference 6 as the prohibited area. In detail, the inside of the housing model 2m is the operating area, and the outside of the housing model 2m is the prohibited area. The inside of the interference model 6m is the prohibited area. The setter 321 further sets a hoop model 4m modeled on the hoop 4 and a processing device model 5m modeled on the processing device 5. Here, each model will be described. FIG. 4 is a schematic diagram showing an image of each model displayed on the display 21. The image shown in FIG. 4 corresponds to the layout shown in FIG. 2.

[0027] The robot model 10m includes elements that model the arm 12m and the hand 14 of the robot 10. Each element of the robot model 10m is assigned a symbol that is the symbol of the corresponding element of the robot 10 plus "m". That is, the robot model 10m has an arm 12m and a hand 14m. The arm 12m includes a link 13m, and the link 13m includes a first link 13am and a second link 13bm with reference to FIG. 7. The hand 14m includes a first hand 14am and a second hand 14bm with reference to FIG. 7. The robot model 10m also includes a substrate Sm placed on the hand 14m. The substrate Sm is placed on each of the first hand 14am and the second hand 14bm. The robot model 10m omits the base 11 of the robot 10. When the first link 13am and the second link 13bm are not to be distinguished from each other, they are simply referred to as "link 13m". When there is no need to distinguish between the first hand 14am and the second hand 14bm, they will simply be referred to as "hand 14m."

[0028] The position of the robot model 10m is defined, for example, by the position of the first axis L1, which is the center of rotation of the first link 13am. Note that the position of the robot model 10m may be defined by the position of a corner of the first link 13am, or, if the base 11 of the robot 10 is modeled, by the position of the modeled base.

[0029] The housing model 2m models the side wall of the housing 2, that is, the planar shape of the housing 2.

[0030] The hoop model 4m models the side peripheral wall of the hoop 4, i.e., the planar shape of the hoop 4. Target positions P1, P2, and P3 are set inside the three hoop models 4m, respectively. Each of the target positions P1, P2, and P3 is a target position of the hand 14m in the hoop model 4m. In this example, the position of the hand 14m is defined by the center position of the substrate Sm placed on the hand 14m, and the target position of the hand 14m in the hoop model 4m is defined by the center position of the substrate Sm accommodated in the hoop model 4m. In other words, the position of the hand 14m when the substrate Sm in the hoop model 4m is placed on the hand 14m is the target position of the hand 14m in the hoop model 4m.

[0031] The processing device model 5m models the side walls of the processing device 5, i.e., the planar shape of the processing device 5. Target positions P4 and P5 are set inside the two processing device models 5m, respectively. Each of the target positions P4 and P5 is the target position of the hand 14m in the processing device model 5m. In this example, the position of the hand 14m is defined by the center position of the substrate Sm placed on the hand 14m, and the target position of the hand 14m in the processing device model 5m is defined by the center position of the substrate Sm accommodated in the processing device model 5m. In other words, the position of the hand 14m when the substrate Sm in the processing device model 5m is placed on the hand 14m is the target position of the hand 14m in the processing device model 5m.

[0032] The interference model 6m models the planar shape of the interference object 6.

[0033] The setter 321 sets the specifications (parameters) of each model when setting the model. Specifically, the setter 321 sets the position of the housing, the planar shape, the number of side walls, the size of the side walls, etc., for the specifications of the housing model 2m. The setter 321 sets the relative position of the robot model 10m with respect to the housing model 2m, the number of links 13m, the length of the links 13m, the number of hands 14m, the size of the hands 14m, the shape of the hands 14m, etc., for the specifications of the robot model 10m. The setter 321 sets the number, size, shape, and relative position of the hoop models 4m with respect to the housing model 2m, etc., for the specifications of the hoop models 4m. The setter 321 sets the number, size, shape, and relative position of the processing device models 5m with respect to the housing model 2m, etc., for the specifications of the processing device models 5m. The setter 321 sets the number, size, shape, and relative position of the processing device models 5m with respect to the housing model 2m, etc., for the specifications of the interference object models 6m.

[0034] The specifications of each model include changeable specifications. The setter 321 can change at least one of the specifications of each model described above. For example, the setter 321 can change the number of links 13m or the length of the links 13m for the robot model 10m. The setter 321 changes the changeable specifications in response to an input from a user. The input from the user regarding the specifications of each model is input to the receiver 322. The setter 321 sets the specifications of each model in response to the input regarding the specifications received by the receiver 322. When there is no input from the user regarding the changeable specifications, the setter 321 sets the changeable specifications to initial settings.

[0035] The image generator 324 generates images of the prohibited area, the robot model 10m, etc., and outputs the generated images to the display 21. In detail, the image generator 324 generates images of the robot model 10m, the housing model 2m, the hoop model 4m, the processing device model 5m, and the interference object model 6m. At this time, the image generator 324 generates images of the models set by the setter 321. The generated images are displayed on the display 21.

[0036] The acceptor 322 accepts the change of the prohibited area. The setter 321 sets the prohibited area changed via the acceptor 322. Specifically, the acceptor 322 accepts an input related to the prohibited area from the user via the mouse 22. When the acceptor 322 accepts the change of the prohibited area, the setter 321 updates the prohibited area to the changed prohibited area. The change of the prohibited area refers to, for example, the addition of a prohibited area, the modification of the shape of the prohibited area, or the movement of the position of the prohibited area.

[0037] The user operates the mouse 22 to select the interference model 6m with the pointer Q displayed on the display 21 and drag to move it. The acceptor 322 accepts the drag operation on the interference model 6m via the mouse 22 as a change of the prohibited area. According to the drag operation, the position of the interference model 6m is continuously changed, so the drag operation on the interference model 6m with the mouse 22 is a continuous change of the prohibited area. The user may operate the mouse 22 to newly place the interference model 6m in the image. The new placement of the interference model 6m is an input of a new prohibited area. Similarly, the user may operate the mouse 22 to select the housing model 2m with the pointer Q displayed on the display 21 and drag to change the shape. The acceptor 322 accepts the drag operation on the housing model 2m via the mouse 22 as a change of the prohibited area. According to the drag operation, the shape of the housing model 2m is continuously changed, so the drag operation on the housing model 2m with the mouse 22 is a continuous change of the prohibited area.

[0038] The determiner 326 determines whether or not the robot model 10m interferes with the prohibited area. For example, when the prohibited area is changed via the acceptor 322, the determiner 326 determines whether or not the robot model 10m interferes with the prohibited area after the change.

[0039] The deriving device 323 derives the posture of the robot model 10m. Specifically, the deriving device 323 derives the posture of the robot model 10m when the hand 14m of the robot model 10m is located at the target position or another position. The other positions include, for example, via positions through which the hand 14m passes before reaching the target position. For example, the hand 14m waits at the via positions before reaching each of the hoop model 4m and the processing device model 5m. Specifically, since the hoop 4 and the processing device 5 have shutters in the actual clean room 1, the hand 14 waits at the via positions until the shutters open. The via positions are also set for the hoop model 4m and the processing device model 5m so as to correspond to the via positions of the hoop 4 and the processing device 5. The deriving device 323 derives the posture of the robot model 10m within the areas of the housing model 2m, the hoop model 4m, and the processing device model 5m. The deriver 323 derives the posture of the robot model 10m in consideration of conditions such as the possible rotation angles of the first link 13am, the second link 13bm, the first hand 14am, and the second hand 14bm. Hereinafter, the "posture of the robot model 10m when the hand 14m is located at the target position" is also simply referred to as the "target posture." For example, the deriver 323 derives, as the target posture of the robot model 10m, the posture of the robot model 10m when the first hand 14am is located at the target position and the second hand 14bm is located at a predetermined position within the operating area.

[0040] The deriver 323 derives a posture of the robot model 10m that does not interfere with the prohibited area. When the prohibited area set by the setter 321 is changed and the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriver 323 re-derives a posture of the robot model 10m that does not interfere with the changed prohibited area.

[0041] The image generator 324 generates images of the prohibited area and the robot model 10m. The image generator 324 outputs the generated images to the display 21. The image generator 324 generates an image of the housing model 2m and an image of the interfering object model 6m as images of the prohibited area. The image generator 324 further generates an image of the hoop model 4m and an image of the processing device model 5m as images of the target position. The image generator 324 synthesizes the image of the housing model 2m, the image of the hoop model 4m, the image of the processing device model 5m, the image of the interfering object model 6m, and the image of the robot model 10m. The image generator 324 outputs the synthesized image to the display 21.

[0042] When the target posture of the robot model 10m is derived by the deriver 323, the image generator 324 generates an image of the robot model 10m in the target posture. That is, in the generated image, the hand 14m of the robot model 10m is located at the target position, and the arm 12m of the robot model 10m is in a posture that realizes the placement of the hand 14m at the target position. When the target posture is updated by the deriver 323, the image generator 324 generates an image of the robot model 10m in the updated target posture.

[0043] When the prohibited area is changed via the acceptor 322, the image generator 324 generates an image of the changed and moving prohibited area. In other words, the image generator 324 generates an image (moving image) of the changed prohibited area moving. When the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the image generator 324 changes the posture of the robot model 10m in the image to a posture that does not interfere with the prohibited area derived by the deriver 323.

[0044] As described above, the receiver 322 may receive continuous input of the prohibited area, i.e., continuous changes. In this case, the setter 321 sequentially updates the changed prohibited area in response to the continuous changes of the prohibited area. The image generator 324 sequentially generates an image of the updated prohibited area. As a result, when the prohibited area is changed via the receiver 322, the image generator 324 generates an image of the prohibited area that is changed and moves. In other words, the image generator 324 generates a moving image of the prohibited area. The image generator 324 outputs the image of the prohibited area that is changed and moves to the display 21.

[0045] At this time, the determiner 326 sequentially determines interference between the robot model 10m and the sequentially updated prohibited area. When the robot model 10m interferes with the prohibited area due to the change in the prohibited area, the deriver 323 derives a target posture of the robot model 10m that does not interfere with the changed prohibited area. The image generator 324 generates an image of the robot model 10m in the target posture derived by the deriver 323. As a result, the image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the deriver 323. In other words, the image generator 324 changes the image of the robot model 10m before interfering with the prohibited area to an image of the robot model 10m that avoids interference with the changed prohibited area. The image generator 324 outputs the image of the changed robot model 10m to the display 21.

[0046] For example, in the image of the robot model 10m whose posture is changed generated by the image generator 324, the posture of the robot model 10m is changed by changing the posture of the arm 12m or the second hand 14bm without changing the position of the robot model 10m and the position of the first hand 14am located at the target position. Alternatively, the posture of the robot model 10m is changed by changing the position of the robot model 10m, without changing the position of the first hand 14am, and by changing the posture of the arm 12m or the second hand 14bm.

[0047] When the determiner 326 determines that the robot model 10m interferes with the prohibited area after the change, the warning device 325 notifies the user that the robot model 10m interferes with the prohibited area. Specifically, when notifying the user, the warning device 325 causes the image generator 324 to change the display of the robot model 10m. For example, the warning device 325 changes the color of the display of the robot model 10m when the prohibited area has been changed and the robot model 10m interferes with the prohibited area, compared with the color of the display of the robot model 10m when the prohibited area has been changed and the robot model 10m does not interfere with the prohibited area. As an example, the color of the display of the robot model 10m when the robot model 10m interferes is set to red, and the color of the display of the robot model 10m when the robot model 10m does not interfere is set to blue.

[0048] Next, the layout setting process by the teaching support device 30 will be described with reference to the flowchart of Fig. 5. The layout setting process is a process for determining the position of a prohibited area while checking for interference between the robot model 10m and the prohibited area.

[0049] First, in step S1, the setter 321 performs initial settings of the specifications of each model. Specifically, the setter 321 performs initial settings of the housing model 2m, the target position, the interference model 6m, and the robot model 10m. A part of the specifications of each model in the initial settings is stored in the storage device 31 in advance, and the remaining specifications are input by the user. That is, the setter 321 performs initial settings of the housing model 2m, the target position, the interference model 6m, and the robot model 10m based on the initial specifications of each model stored in the storage device 31 and the specifications received from the user by the reception device 322. Step S1 is an example of "setting the robot model 10m and the prohibited area" in the teaching support method.

[0050] In the initial setting, the image generator 324 generates an image in which the housing model 2m, the target position, the interfering object model 6m, and the robot model 10m are combined, and displays the generated image on the display 21. At this time, the robot model 10m is in an initial posture. For example, the initial posture of the robot model 10m is a posture in which the first link 13am and the second link 13bm and the first hand 14am and the second hand 14bm overlap each other in a planar view. Note that the deriver 323 may derive the posture of the robot model when the hand 14m is located at any one of the target positions in the initial setting, and the image generator 324 may generate an image of the robot model 10m in the derived posture.

[0051] Specifically, the setter 321 sets the size and shape of the case model 2m of the initial specifications. As shown in FIG. 6, the image generator 324 generates an image including the case model 2m of the initial specifications (see solid line), and displays the generated image on the display 21. The user changes the size and shape of the case model 2m by operating a pointer Q with the mouse 22 and dragging one vertex of the case model 2m. When the receiver 322 receives an operation input of the mouse 22 by the user, the setter 321 sets the size and shape of the case model 2m based on the operation input received by the receiver 322. At the same time, as shown in FIG. 4, the image generator 324 generates an image of the case model 2m of the set size and shape, and displays the generated image on the display 21. Note that, instead of the above-mentioned operation of the mouse 22, for example, the receiver 322 may receive an input of coordinate values ​​by the user via a keyboard or the like, and the setter 321 may set the size of the case model 2m based on the coordinate values ​​received by the receiver 322.

[0052] The setter 321 sets a target position based on an input operation by a user. The setter 321 sets the hoop model 4m and the processing device model 5m as the target position. Specifically, the setter 321 sets the quantity, shape, size, and position of the hoop model 4m and the processing device model 5m. For example, for the hoop model 4m, the setter 321 sets a plurality of options regarding the shape and size. The image generator 324 generates an image including options regarding the shape and size of the hoop model 4m, and displays the image on the display 21. The acceptor 322 accepts the selection of the option by the user via the mouse 22. The setter 321 sets the shape and size of the hoop model 4m according to the option accepted by the acceptor 322. The acceptor 322 accepts the designation of an initial position by the user via the mouse 22. The setter 321 sets the designated position accepted by the acceptor 322 as the initial position of the hoop model 4m. When the quantity, shape, size or initial position of the hoop models 4m are stored in advance in the memory 31, the setter 321 may read and set the quantity, shape, size or initial position stored in the memory 31. The setting related to the processing device model 5m is similar to the setting related to the hoop model 4m.

[0053] When the target position is set by the setter 321, the image generator 324 generates an image including the hoop model 4m and the processing device model 5m whose quantity, shape, size and position have been set, and displays it on the display 21. The image generator 324 generates an image in which the hoop model 4m and the processing device model 5m are incorporated into the case model 2m. The case model 2m, the hoop model 4m and the processing device model 5m are connected so that their internal spaces are continuous.

[0054] The setter 321 sets the interfering object model 6m by an input operation of the user. The setter 321 sets the quantity, shape, size, and position of the interfering object model 6m. Specifically, the setter 321 sets a plurality of options regarding the shape and size of the interfering object model 6m. The image generator 324 generates an image including options regarding the shape and size of the interfering object model 6m, and displays the image on the display 21. The acceptor 322 accepts the selection of the option by the user via the mouse 22. The setter 321 sets the shape and size of the interfering object model 6m according to the option accepted by the acceptor 322. The acceptor 322 accepts the designation of the initial position of the interfering object model 6m via the mouse 22 by the user. The setter 321 sets the designated position accepted by the acceptor 322 as the initial position of the interfering object model 6m. When the quantity, shape, size or initial position of the interfering object model 6m is stored in advance in the storage device 31, the setting device 321 may read and set the shape, size or initial position stored in the storage device 31. The position of the interfering object model 6m can also be set by inputting coordinate values.

[0055] When the setter 321 sets the interference object models 6m, the image generator 324 generates an image including the interference object models 6m whose quantity, shape, size and position have been set, and causes the display 21 to display the image.

[0056] The setter 321 sets the robot model 10m according to an input operation by the user. The setter 321 sets the shape, size, and position of the robot model 10m. Specifically, the setter 321 sets a plurality of options regarding the shape and size of the robot model 10m. The image generator 324 generates an image including options regarding the shape and size of the robot model 10m, and displays the image on the display 21. The acceptor 322 accepts the selection of an option by the user via the mouse 22. The setter 321 sets the shape and size of the robot model 10m according to the option accepted by the acceptor 322. The acceptor 322 accepts the designation of the initial position of the robot model 10m by the user via the mouse 22. The setter 321 sets the designated position accepted by the acceptor 322 as the initial position of the robot model 10m. Note that, in the case where the shape, size, or initial position of the robot model 10m is stored in advance in the storage device 31, the setter 321 may read out the shape, size, or initial position stored in the storage device 31 and set it. The position of the robot model 10m can also be determined by inputting coordinate values.

[0057] When the robot model 10m is set by the setter 321, the image generator 324 generates an image including the robot model 10m whose shape, size and position have been set, and causes the display 21 to display the image.

[0058] In step S2, the acceptor 322 accepts the selection of a target position. The user selects a target position corresponding to a target posture of the robot model 10m that may interfere with the prohibited area due to a change in the prohibited area, among the target postures of the robot model 10m corresponding to all the target positions, taking into consideration in advance the target posture of the robot model 10m that may interfere with the prohibited area due to a change in the prohibited area. Specifically, the acceptor 322 accepts an input of the selection of the target position via the mouse 22 or the like. For example, the acceptor 322 accepts a click operation on one target position as an input of the selection of the target position.

[0059] In step S3, the deriver 323 derives a target posture of the robot model 10m corresponding to the selected target position. In step S4, the image generator 324 generates an image of the robot model 10m in the derived target posture, and causes the display 21 to display the generated image.

[0060] Specifically, as shown in FIG. 4, the user operates the pointer Q with the mouse 22 to specify the hoop model 4m at the target position P1. As a result, the acceptor 322 accepts the operation input of the mouse 22 by the user, and the deriver 323 derives the posture of the robot model 10m when the substrate Sm of the first hand 14am of the robot model 10m is located at the specified hoop model 4m. The deriver 323 derives the target posture of the robot model 10m that does not interfere with the housing model 2m and the interference object model 6m, i.e., the prohibited area. The image generator 324 generates an image of the robot model 10m in the target posture corresponding to the specified hoop model 4m based on the posture of the robot model 10m derived by the deriver 323. As shown in FIG. 7, the generated image is displayed on the display 21.

[0061] In step S5, the receiver 322 judges whether or not a change to the prohibited area has been received. Specifically, the receiver 322 judges whether or not an input to change the prohibited area has been received via the mouse 22 or the like. For example, the receiver 322 receives a drag operation on one prohibited area as an input to change the prohibited area. If there is no input to change the prohibited area, the receiver 322 judges whether or not there is an input to confirm the layout in step S6. For example, a confirm button for confirming the layout is displayed on the display 21. When the user clicks the confirm button via the mouse 22, the receiver 322 accepts the input to confirm the layout. If the receiver 322 accepts the input to confirm the layout, the setting unit 321 stores the current layout, i.e., the settings of each model, in the storage unit 31, and the layout setting process is completed. If there is no input to confirm the layout, the receiver 322 returns to step S5. The receiver 322 periodically repeats steps S5 and S6, and waits for an input to change the prohibited area or to confirm the layout. Although the layout is confirmed by clicking the Confirm button, instead of or in addition to clicking the Confirm button, the layout may be confirmed when a certain period of time has elapsed without any input for changing the prohibited area.

[0062] If the acceptor 322 accepts a change to the prohibited area in step S5, then in step S7 the setter 321 sets the changed prohibited area accepted by the acceptor 322. In step S8, the image generator 324 generates an image of the changed prohibited area, and displays the generated image of the changed prohibited area on the display 21. Step S5 is an example of "accepting a change to the prohibited area" in the teaching assistance method. Step S8 is an example of "generating an image of the changed and moved prohibited area when the prohibited area is changed" in the teaching assistance method.

[0063] In step S9, the determiner 326 determines whether the robot model 10m interferes with the prohibited area. Step S9 is an example of "determining whether the robot model 10m interferes with the prohibited area" in the teaching support method.

[0064] If the robot model 10m does not interfere with the prohibited area in step S9, the acceptor 322 determines in step S10 whether or not the acceptance of the change of the prohibited area is continued. Specifically, the acceptor 322 determines whether the input of the change of the prohibited area is continued or stopped via the mouse 22 or the like. For example, the acceptor 322 accepts the maintenance of a drag operation on one prohibited area as the continuation of the input of the change of the prohibited area. On the other hand, the acceptor 322 accepts a drop operation on one prohibited area as the stop of the input of the change of the prohibited area. If the acceptance of the change of the prohibited area is continued in step S10, the process returns to step S7. If the acceptance of the change of the prohibited area is not continued, that is, stopped in step S10, the process returns to step S5.

[0065] By repeating steps S5, S7, S8, S9, and S10, or steps S7, S8, S9, and S10, the acceptor 322 can accept successive changes to the prohibited area. In this case, the setter 321 sequentially updates the changed prohibited area in response to the successive changes to the prohibited area. The image generator 324 sequentially generates an image of the updated prohibited area. As a result, the image generator 324 generates an image of the changed and moving prohibited area. In other words, the image generator 324 generates a moving image of the prohibited area. Note that, in the case where the acceptance of the changes to the prohibited area is not continued in step S10, the image generator 324 stops the input of the changes and generates an image of the stationary prohibited area.

[0066] For example, when the position of the interfering object model 6m is changed as a prohibited area, as shown in FIG. 8, the user operates the pointer Q with the mouse 22 to drag the interfering object model 6m from the dotted line to the solid line, thereby changing the position of the interfering object model 6m. Dragging the interfering object model 6m is an input of a continuous (strictly speaking, intermittent) change in the position of the interfering object model 6m from the user. Therefore, the setter 321 continuously sets, that is, changes, the position of the interfering object model 6m. In response to this, the determiner 326 sequentially determines the interference between the robot model 10m and the interfering object model 6m. In this case, since the robot model 10m and the interfering object model 6m do not interfere with each other, the image generator 324 sequentially generates images of the changed interfering object model 6m. As a result, the image generator 324 continuously generates images of the interfering object model 6m after the change, and as a result, generates a moving image in which the interfering object model 6m moves.

[0067] If the robot model 10m interferes with the prohibited area in step S9, the warning device 325 notifies the user that the robot model 10m interferes with the prohibited area in step S11. Specifically, the warning device 325 changes the display of the robot model 10m to the image generator 324. For example, the image generator 324 changes the color of the robot model 10m in response to a command from the warning device 325.

[0068] Specifically, as shown in Fig. 9, the user operates the pointer Q with the mouse 22 to drag the interfering object model 6m from the dotted line at the start point of the arrow to the dashed line at the end point of the arrow, thereby changing the position of the interfering object model 6m. When the acceptor 322 accepts successive operation inputs of the mouse 22 by the user, the setter 321 sequentially sets the position of the interfering object model 6m based on the operation inputs accepted by the acceptor 322. The determiner 326 sequentially determines whether the robot model 10m and the interfering object model 6m are interfering with each other. The image generator 324 generates an image of the changed and moving interfering object model 6m and displays it on the display 21.

[0069] When the changed and moving interference model 6m reaches the position shown by the solid line, the robot model 10m interferes with the interference model 6m, so the warning device 325 causes the image generator 324 to change the display of the robot model 10m interfering with the interference model 6m as shown by hatching. The hatching display is expressed, for example, in red in the actual image. The warning device 325 changes the display of the board Sm of the second hand 14bm interfering with the interference model 6m, for example.

[0070] In step S12, the acceptor 322 determines whether or not the acceptance of the change of the prohibited area is continued. Specifically, the acceptor 322 determines whether the input of the change of the prohibited area is continued or stopped via the mouse 22 or the like. For example, the acceptor 322 accepts the maintenance of a drag operation on one prohibited area as the continuation of the input of the change of the prohibited area. On the other hand, the acceptor 322 accepts a drop operation on one prohibited area as the stop of the input of the change of the prohibited area. If the acceptance of the change of the prohibited area is to be continued in step S12, the process returns to the process of step S7. If the acceptance of the change of the prohibited area is not to be continued, i.e., is to be stopped in step S12, the process proceeds to step S13.

[0071] In step S13, the deriver 323 derives a target posture of the robot model 10m that does not interfere with the prohibited region. Step S13 is an example of “deriving a posture of the robot model 10m that does not interfere with the prohibited region when determining interference between the robot model 10m and the changed prohibited region” in the teaching support method.

[0072] In step S14, the image generator 324 changes the target posture of the robot model 10m in the image to the target posture derived by the deriver 323. The image generator 324 displays the changed image of the robot model 10m on the display 21. Specifically, the image generator 324 changes the image of the robot model 10m before interfering with the prohibited area to an image of the robot model 10m that avoids interference with the prohibited area after the change. The image generator 324 changes the image of the robot model 10m after the warning device 325 notifies the user that the robot model 10m is interfering with the prohibited area. Then, the process returns to step S5. As long as the change of the prohibited area continues to be accepted, the processes from step S5 onwards are repeated. Step S14 is an example of "changing the posture of the robot model 10m in the image to the derived posture when determining interference between the robot model 10m and the prohibited area after the change" in the teaching support method.

[0073] Specifically, as shown in Fig. 9, after the warning device 325 notifies the user that the robot model 10m is interfering with the interfering object model 6m, the deriver 323 derives a posture of the robot model 10m that does not interfere with the changed interfering object model 6m, as shown in Fig. 10. Accordingly, the image generator 324 generates an image of the robot model 10m whose posture has been changed and derived by the deriver 323, and displays it on the display 21. For example, as shown in Fig. 9, while the user is dragging the interfering object model 6m, the warning device 325 changes the display of the robot model 10m, and when the user drops the interfering object model 6m at the position indicated by the dashed dotted line, the deriver 323 derives the posture of the robot model 10m, and the image generator 324 generates and outputs an image of the changed robot model 10m, as shown in Fig. 10. Specifically, the deriver 323 derives a posture of the robot model 10m that does not interfere with the prohibited area by changing the posture of the second hand 14bm without changing the position of the robot model 10m and the position of the first hand 14am located at the target position.

[0074] This allows the user to view on the display 21 the robot model 10m whose posture is deformed so as not to interfere with the interfering object model 6m while changing the position of the interfering object model 6m. Specifically, the user can check the interference with the interfering object model 6m for the robot model 10m in the target posture corresponding to the hoop model 4m as the target position P1. Similarly, the user can check the interference with the interfering object model 6m for the robot model 10m in the target posture corresponding to each of the target positions P2, P3, P4, and P5. Therefore, when determining the position of the forbidden area based on the posture of the robot model 10m, the user can reduce the time required to determine the position of the forbidden area.

[0075] According to the teaching support device 30 described above, when the prohibited area is changed via the receiver 322, the image generator 324 generates an image of the changed and moved prohibited area, and when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriver 323 derives the posture of the robot model 10m that does not interfere with the prohibited area, and the image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the deriver 323. This allows the user to check the posture of the robot model 10m that does not interfere with the prohibited area while changing the prohibited area by looking at the display 21. Therefore, when the position of the prohibited area is determined based on the posture of the robot model 10m, the time required to determine the position of the prohibited area can be shortened.

[0076] In addition, since the warning device 325 is provided, when the user changes the prohibited area and the robot model 10m interferes with the prohibited area, the user can easily know by the warning device 325. Furthermore, after the user knows that the robot model 10m interferes with the prohibited area, the user can check the posture of the robot model 10m so that it does not interfere with the prohibited area.

[0077] Furthermore, when notifying the user, the warning device 325 changes the display of the robot model 10m on the image generator 324. This allows the user to easily determine that the robot model 10m is interfering with the prohibited area by the change in the display of the robot model 10m.

[0078] Furthermore, since the deriver 323 derives the posture of the robot model 10m when the hand 14m is located at the target position, the user can confirm the posture of the robot model 10m when the hand 14m is located at the target position.

[0079] In addition, since the robot model 10m is a model of the robot 10 including the first hand 14a and the second hand 14b, the robot model 10m is intended for robots 10 with more complicated configurations. Even for such complicated robots, the time required to determine the position of the prohibited area can be reduced.

[0080] Moreover, the robot model 10m is a model of a horizontal articulated robot 10 in which the hand 14 transports the substrate S. For such a robot as well, the time required to determine the target position of the robot model 10m can be reduced.

[0081] Furthermore, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriver 323 derives a posture of the robot model 10m that does not interfere with the prohibited area by changing the posture of the second hand 14bm without changing the posture of the first hand 14am. This allows the user to check the posture of the second hand 14bm of the robot model 10m that does not interfere with the prohibited area while viewing the display 21 and changing the prohibited area.

[0082] In addition, since the prohibited area includes the area inside the interfering object model 6m, the user can display the interfering object 6 on the display 21 as the prohibited area.

[0083] In addition, since the prohibited area includes the area outside the housing model 2m, the user can display the housing 2 as the prohibited area on the display 21. This allows the user to check the posture of the robot 10 used in the clean room 1. Therefore, the user can check the posture of the robot 10 used in an environment with strict operational restrictions.

[0084] Variation 1 In the teaching support device of variant example 1, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriver 323 derives the position of the robot model 10m that does not interfere with the prohibited area, and thereby derives the posture of the robot model 10m that does not interfere with the prohibited area.

[0085] Specifically, as shown in Fig. 11, the user operates the pointer Q with the mouse 22 to drag the interfering object model 6m from the dotted line at the start point of the arrow to the dashed line at the end point of the arrow, thereby changing the position of the interfering object model 6m. When the acceptor 322 accepts successive operation inputs of the mouse 22 by the user, the setter 321 sequentially sets the position of the interfering object model 6m based on the operation inputs accepted by the acceptor 322. The determiner 326 sequentially determines whether the robot model 10m and the interfering object model 6m are interfering with each other. The image generator 324 generates an image of the interfering object model 6m that is changed and moved, and displays it on the display 21.

[0086] When the changed and moving interfering object model 6m reaches the position shown by the solid line, the robot model 10m interferes with the interfering object model 6m, so the warning device 325 makes the image generator 324 change the display of the robot model 10m interfering with the interfering object model 6m as shown by hatching. Specifically, the warning device 325 changes the display of the first link 13am interfering with the interfering object model 6m.

[0087] Thereafter, the user performs a drop operation on the interference model 6m at the position indicated by the dashed dotted line, whereby the deriver 323 re-derives a target posture of the robot model 10m that does not interfere with the changed interference model 6m, as shown in Fig. 12. Accordingly, the image generator 324 generates an image of the robot model 10m derived by the deriver 323 and displays it on the display 21. Specifically, the deriver 323 derives a posture of the robot model 10m that does not interfere with the interference model 6m, by changing the position of the robot model 10m and without changing the position of the first hand 14am located at the target position.

[0088] According to the teaching support device of the first modification, the user can check the position of the robot model 10m that does not interfere with the prohibited area while viewing the display 21 and changing the prohibited area.

[0089] Variation 2 In the teaching support device according to the second modification, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriver 323 derives the type of the robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area. The type of the robot model 10m is, for example, a collection of robot models 10m that differ in the length of the links 13m and the number of links 13m. Deriving the type of the robot model 10m means selecting a predetermined robot model 10m from the collection of robot models 10m. The deriver 323 derives an appropriate type of the robot model 10m based on pre-accumulated data such as experience values.

[0090] Specifically, as shown in Fig. 13, the user operates the pointer Q with the mouse 22 to drag the interfering object model 6m from the dotted line at the start point of the arrow to the dashed line at the end point of the arrow, thereby changing the position of the interfering object model 6m. When the acceptor 322 accepts successive operation inputs of the mouse 22 by the user, the setter 321 sequentially sets the position of the interfering object model 6m based on the operation inputs accepted by the acceptor 322. The determiner 326 sequentially determines whether the robot model 10m and the interfering object model 6m are interfering with each other. The image generator 324 generates an image of the changed and moving interfering object model 6m and displays it on the display 21.

[0091] When the changed and moving interference model 6m reaches the position shown by the solid line, the robot model 10m interferes with the interference model 6m, so the warning device 325 makes the image generator 324 change the display of the robot model 10m interfering with the interference model 6m as shown by hatching. Specifically, the warning device 325 makes the image generator 324 change the display of the board Sm of the second hand 14bm interfering with the interference model 6m.

[0092] Thereafter, the user performs a drop operation on the interference model 6m at the position indicated by the dashed line, so that the deriver 323 re-derives a target posture of the robot model 10m that does not interfere with the changed interference model 6m, as shown in FIG. 14. Accordingly, the image generator 324 generates an image of the robot model 10m derived by the deriver 323 and displays it on the display 21. Specifically, the deriver 323 derives a robot model 10m with an increased number of links 13m, and derives the posture of the robot model 10m that does not interfere with the interference model 6m. In more detail, the deriver 323 selects a robot model 10m in which a third link 13cm is added to the first link 13am and the second link 13bm, and derives the posture of the robot model 10m that does not interfere with the interference model 6m. At this time, the deriver 323 derives the posture of the robot model 10m without changing the position of the robot model 10m and without changing the position of the first hand 14am located at the target position.

[0093] According to the teaching support device of the second modification, the user can check the type of robot model 10m that does not interfere with the prohibited area while viewing the display 21 and changing the prohibited area.

[0094] Other Embodiments As described above, the above embodiment has been described as an example of the technology disclosed in this application. However, the technology in this disclosure is not limited to this, and can be applied to embodiments in which modifications, replacements, additions, omissions, etc. are appropriately performed. In addition, it is also possible to combine the components described in the above embodiment to form a new embodiment. In addition, among the components described in the attached drawings and detailed description, not only components essential for solving the problem but also components that are not essential for solving the problem in order to exemplify the technology may be included. Therefore, the fact that these non-essential components are described in the attached drawings and detailed description should not immediately lead to the determination that these non-essential components are essential.

[0095] For example, the location where the robot 10 is used is not limited to a clean room where semiconductor wafers are processed, but may be a space where other materials are processed, that is, a space with low air cleanliness.

[0096] The number of hoops 4 and processing devices 5 is not limited to the above example, and may be increased or decreased. Accordingly, the number of hoop models 4m and processing device models 5m is not limited to the above example, and may be increased or decreased.

[0097] Although the robot 10 is used in a location including both the FOUP 4 and the processing device 5, it may be used in a location including either the FOUP 4 or the processing device 5. That is, the setter 321 may set only either the FOUP model 4m or the processing device model 5m. For example, when the robot is used in a sorter, the robot transports substrates between FOUPs. For this reason, the setter sets only the FOUP model. Alternatively, when the robot is used in a vacuum processing chamber, the robot transports substrates between processing devices 5. For this reason, the setter sets the processing device model. In this way, the setter 321 may set at least one of the FOUP model 4m and the processing device model 5m.

[0098] The housing 2 is provided with a FOUP 4 and a processing device 5, but other spaces may also be provided. For example, when the robot is used in a stocker, the robot transports substrates between a FOUP and a substrate storage room (storage). In this case, the housing is provided with a FOUP and a storage. At this time, the setter sets a FOUP model and a storage model.

[0099] The number of interference objects 6 is not limited to the above example, and may be increased or decreased. Accordingly, the number of interference object models 6m is not limited to the above example, and may be increased or decreased.

[0100] The setter 321 may set only one of the housing model 2m and the interfering object model 6m as the prohibited area. The setter 321 may set models of objects other than the housing and the interfering object as the prohibited area.

[0101] The housing 2 is provided with a FOUP 4 and a processing device 5, and may also be provided with a pre-alignment device. The pre-alignment device is, for example, a device that detects the center position or notch position of the substrate S and positions the substrate S at a desired position. Accordingly, a pre-alignment device model that models the pre-alignment device may be set as a target position for the hand 14m of the robot model 10m.

[0102] The end effector of the robot 10 is a hand 14, but may also be a mechanical tool such as a cutting tool or a polishing tool.

[0103] The input device of the teaching support system 20 is a mouse 22, but may be a keyboard, or may be both a mouse and a keyboard.

[0104] The processor 32 only needs to have the setter 321, the receiver 322, the deriver 323, the image generator 324, and the determiner 326 as functional blocks, and may not have the warning unit 325 as a functional block.

[0105] When the determiner 326 determines that the prohibited area has been changed via the acceptor 322 and that the robot model 10m is interfering with the prohibited area, the warning device 325 changes the display of the robot model 10m, but it may also be configured to notify the user by a warning display or sound.

[0106] When the robot model 10m and the interfering object model 6m interfere with each other, the warning device 325 causes the image generator 324 to change the display of the robot model 10m, but may also notify the user by a warning display or sound. Specifically, the warning device 325 may cause the image generator 324 to display a message on the screen indicating that the robot model 10m and the interfering object model 6m interfere with each other. Alternatively, the warning device 325 may output a sound indicating that the robot model 10m and the interfering object model 6m interfere with each other.

[0107] When the robot model 10m and the interfering object model 6m interfere with each other, the warning device 325 may cause the image generator 324 to change the display of the image other than the robot model 10m from the display when there is no interference. For example, the warning device 325 may cause the image generator 324 to change the color or display mode (blinking display, etc.) of the display of the interfering object model 6m.

[0108] The acceptor 322 accepts a movement of the position of a prohibited area as a change to the prohibited area, but may also accept, for example, the addition of a prohibited area or a change in the shape of a prohibited area. For example, when a user adds a new prohibited area on the screen of the display 21, the acceptor 322 accepts the newly added prohibited area. Also, when a user changes the shape of a prohibited area on the screen of the display 21, the acceptor 322 accepts the changed prohibited area.

[0109] The image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the deriver 323 after the warning device 325 notifies the user, but the posture of the robot model 10m in the image may also be changed to the posture derived by the deriver 323 before the warning device 325 notifies the user.

[0110] The setter 321 may set a via-position through which the first hand 14am of the robot model 10m passes before reaching the target position. The deriving device 323 may derive the posture of the robot model 10m when the first hand 14am is located at the via-position and the second hand 14bm of the robot model 10m is located at a predetermined position within the motion area.

[0111] When the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriver 323 may derive a posture of the robot model 10m that does not interfere with the prohibited area by changing the posture of the arm 12m without changing the postures of the first hand 14am and the second hand 14bm. For example, the deriver 323 may change the posture of the arm 12m so that the first link 13am and the second link 13bm are bent in the opposite direction to the bending direction.

[0112] The image generator 324 generates two-dimensional images of each model as shown in FIG. 4, but may generate three-dimensional images as shown in FIG. 15. In FIG. 15, the same reference numerals as in FIG. 4 and FIG. 7 are used. Also, the processing device model 5m is drawn with a two-dot chain line, and the housing model 2m is omitted. Also, the robot model 10m includes a base 11m that models the base 11. In this case, the position of each model is defined by a three-dimensional position. For example, the acceptor 322 accepts the three-dimensional position of the target position, the setter 321 sets the three-dimensional position of the target position, and the deriving unit 323 derives the posture of the robot model 10m at the three-dimensional position of the target position.

[0113] The flowchart is merely an example. Steps in the flowchart may be changed, replaced, added, omitted, etc. as appropriate. The order of steps in the flowchart may be changed, and serial processing may be performed in parallel. For example, in the flowchart (FIG. 5), in the initial setting of step S1, the order of setting the case model, setting the hoop model, setting the interference model, and setting the robot model may be changed, or may be performed in parallel. Also, the derivation of the posture of the robot model in step S13 may be performed before the warning in step S11. Also, the warning in step S11 may be performed after the display of the changed robot model in step S14.

[0114] The teaching assistance method can be realized by other devices without being limited to the above-mentioned teaching assistance device 30. The teaching assistance program can be realized by other devices without being limited to the above-mentioned teaching assistance device 30.

[0115] The functions performed by the components described herein may be implemented in circuitry or processing circuitry, including general purpose processors, application specific processors, integrated circuits, ASICs (Application Specific Integrated Circuits), a CPU (a Central Processing Unit), conventional circuits, and / or combinations thereof, programmed to perform the functions described. Processors include transistors and other circuits and are considered to be circuits or processing circuitry. A processor may be a programmable processor that executes a program stored in a memory.

[0116] In this specification, a circuit, unit, or means is hardware that is programmed to realize or performs the described functions, which may be any hardware disclosed in this specification or any hardware known to be programmed to realize or perform the described functions.

[0117] If the hardware is a processor considered to be a type of circuitry, the circuit, means, or unit is a combination of the hardware and software used to configure the hardware and / or processor.

[0118] [Aspects] The above-described embodiment is a specific example of the following aspects.

[0119] (Aspect 1) The teaching support device 30 is a teaching support device that displays on a display 21 an image of a model of a robot 10 having an arm 12 and a hand 14 (end effector) connected to the arm 12, and includes a setter 321 that sets a robot model 10m that is a model of the robot 10 and a prohibited area that is not an operating area of ​​the robot model 10m, a receiver 322 that receives changes to the prohibited area, a determiner 326 that determines interference between the robot model 10m and the prohibited area, a deriver 323 that derives the posture of the robot model 10m, and a controller 324 that controls the controller 322 to determine whether the prohibited area is an operating area of ​​the robot model 10m. and an image generator 324 that generates an image of the robot model 10m. When the prohibited area is changed via the acceptor 322, the image generator 324 generates an image of the changed and moving prohibited area. When the determiner 326 determines that the robot model 10m interferes with the changed prohibited area, the deriver 323 derives a posture of the robot model 10m that does not interfere with the prohibited area, and the image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the deriver 323.

[0120] According to this configuration, when the prohibited area is changed via the acceptor 322, the image generator 324 generates an image of the changed and moved prohibited area, and when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriver 323 derives the posture of the robot model 10m that does not interfere with the prohibited area, and the image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the deriver 323. This allows the user to check the posture of the robot model 10m that does not interfere with the prohibited area while changing the prohibited area by looking at the display 21. Therefore, when the position of the prohibited area is determined based on the posture of the robot model 10m, the time required to determine the position of the prohibited area can be shortened.

[0121] (Aspect 2) In the teaching support device 30 described in aspect 1, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the device further includes a warning device 325 that notifies a user that the robot model 10m is interfering with the prohibited area, and the image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the deriver 323 after the warning device 325 notifies the user that the robot model 10m is interfering with the prohibited area.

[0122] According to this configuration, since the warning device 325 is provided, when the user changes the prohibited area and the robot model 10m interferes with the prohibited area, the user can easily know by the warning device 325. Furthermore, after the user knows that the robot model 10m interferes with the prohibited area, the user can check the posture of the robot model 10m so that it does not interfere with the prohibited area.

[0123] (Aspect 3) In the teaching support device 30 according to either one of the first and second aspects, the warning device 325 changes the display of the robot model 10m on the image generator 324 when notifying the user.

[0124] According to this configuration, when notifying the user, the warning device 325 changes the display of the robot model 10m on the image generator 324. This allows the user to easily determine that the robot model 10m is interfering with the prohibited area by the change in the display of the robot model 10m.

[0125] (Aspect 4) In the teaching support device 30 described in any one of aspects 1 to 3, the setter 321 sets a target position of a hand 14m (end effector) of the robot model 10m, and the deriving device 323 derives the posture of the robot model 10m when the hand 14m (end effector) is located at the target position.

[0126] According to this configuration, the deriver 323 derives the posture of the robot model 10m when the hand 14m is located at the target position, so that the user can confirm the posture of the robot model 10m when the hand 14m is located at the target position.

[0127] (Aspect 5) In the teaching support device 30 described in any one of aspects 1 to 4, the robot model 10m is a model of a robot 10 that includes a first hand 14a (first end effector) and a second hand 14b (second end effector) connected to the arm 12 as the hands 14 (end effectors).

[0128] According to this configuration, the robot model 10m is a model of the robot 10 including the first hand 14a and the second hand 14b, and therefore the robot model 10m is intended for robots 10 with more complicated configurations. Even for such complicated robots, the time required to determine the position of the prohibited area can be reduced.

[0129] (Aspect 6) In the teaching support device 30 described in any one of aspects 1 to 5, the setter 321 sets a target position of the first hand 14am (first end effector) of the robot model 10m, the deriver 323 derives the posture of the robot model 10m when the first hand 14am (first end effector) is located at the target position and the second hand 14bm (second end effector) of the robot model 10m is located at a predetermined position within the operating area, and when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriver 323 derives the posture of the robot model 10m that does not interfere with the prohibited area by not changing the posture of the first hand 14am (first end effector) and by changing the posture of the second hand 14bm (second end effector).

[0130] According to this configuration, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriver 323 derives a posture of the robot model 10m that does not interfere with the prohibited area by changing the posture of the second hand 14bm without changing the posture of the first hand 14am. This allows the user to check the posture of the second hand 14bm of the robot model 10m that does not interfere with the prohibited area while viewing the display 21 and changing the prohibited area.

[0131] (Aspect 7) In the teaching support device 30 described in any one of aspects 1 to 6, the setter 321 sets an interference object model 6m that models a static or dynamic interference object 6, and the prohibited area includes an area inside the interference object model 6m.

[0132] According to this configuration, the prohibited area includes the area inside the interfering object model 6m, so that the user can display the interfering object 6 on the display 21 as the prohibited area.

[0133] (Aspect 8) In the teaching support device 30 described in any one of aspects 1 to 7, the setting device 321 sets a housing model 2m that models the housing 2 of the clean room 1, and the prohibited area includes the area outside the housing model 2m.

[0134] According to this configuration, since the prohibited area includes the area outside the housing model 2m, the user can display the housing 2 as the prohibited area on the display 21. This allows the user to check the posture of the robot 10 used in the clean room 1. Therefore, the user can check the posture of the robot 10 used in an environment with strict operational restrictions.

[0135] (Aspect 9) In the teaching support device 30 described in any one of aspects 1 to 8, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriver 323 derives a position of the robot model 10m that does not interfere with the prohibited area, and thereby derives a posture of the robot model 10m that does not interfere with the prohibited area.

[0136] According to this configuration, the deriver 323 derives the position of the robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area. This allows the user to check the position of the robot model 10m that does not interfere with the prohibited area while watching the display 21 and changing the prohibited area.

[0137] (Aspect 10) In the teaching support device 30 described in any one of aspects 1 to 9, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriver 323 derives the type of the robot model 10m that does not interfere with the prohibited area, and thereby derives the posture of the robot model 10m that does not interfere with the prohibited area.

[0138] According to this configuration, the deriver 323 derives the type of the robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area. This allows the user to check the type of the robot model 10m that does not interfere with the prohibited area while watching the display 21 and changing the prohibited area.

[0139] (Aspect 11) In the teaching support device 30 according to any one of the first to tenth aspects, the robot model 10m is a model of a horizontal articulated robot 10 in which the hand 14 (end effector) transports a substrate S.

[0140] According to this configuration, the robot model 10m is a model of the horizontal articulated robot 10 in which the hand 14 transports the substrate S. Even for such a robot, the time required to determine the target position of the robot model 10m can be reduced.

[0141] (Aspect 12) The teaching support method displays on a display 21 an image of a model of a robot 10 having an arm 12 and a hand 14 (end effector) connected to the arm 12, and includes the steps of: setting a robot model 10m modeled on the robot 10 and a prohibited area which is not an operating area of ​​the robot model 10m; accepting changes to the prohibited area; determining interference between the robot model 10m and the prohibited area; deriving a posture of the robot model 10m; and, when determining interference between the robot model 10m and the changed prohibited area, deriving a posture of the robot model 10m that does not interfere with the prohibited area; generating an image of the prohibited area and the robot model 10m; and, when the prohibited area is changed, generating an image of the changed and moving prohibited area; and, when determining interference between the robot model 10m and the changed prohibited area, changing the posture of the robot model 10m in the image to the derived posture.

[0142] According to this configuration, when the prohibited area is changed, an image of the changed and moved prohibited area is generated, and when judging interference between the robot model 10m and the changed prohibited area, a posture of the robot model 10m that does not interfere with the prohibited area is derived, and the posture of the robot model 10m in the image is changed to the derived posture. This allows the user to check the posture of the robot model 10m that does not interfere with the prohibited area while changing the prohibited area by looking at the display 21. Therefore, when the position of the prohibited area is determined based on the posture of the robot model 10m, the time required to determine the position of the prohibited area can be shortened.

[0143] (Aspect 13) The teaching support program 311 is a teaching support program that displays on a display 21 an image of a model of a robot 10 having an arm 12 and a hand 14 (end effector) connected to the arm 12, and causes a computer to realize the following functions: a function of setting a robot model 10m that is a model of the robot 10 and a prohibited area that is not an operating area of ​​the robot model 10m, a function of accepting changes to the prohibited area, a function of determining interference between the robot model 10m and the prohibited area, a function of deriving the posture of the robot model 10m and, when determining interference between the robot model 10m and the changed prohibited area, a function of deriving the posture of the robot model 10m that does not interfere with the prohibited area, a function of generating an image of the prohibited area and the robot model 10m and, when the prohibited area is changed, generating an image of the changed and moving prohibited area, and, when determining interference between the robot model 10m and the changed prohibited area, a function of changing the posture of the robot model 10m in the image to the derived posture.

[0144] According to this configuration, when the prohibited area is changed, an image of the changed and moved prohibited area is generated, and when judging interference between the robot model 10m and the changed prohibited area, a posture of the robot model 10m that does not interfere with the prohibited area is derived, and the posture of the robot model 10m in the image is changed to the derived posture. This allows the user to check the posture of the robot model 10m that does not interfere with the prohibited area while changing the prohibited area by looking at the display 21. Therefore, when the position of the prohibited area is determined based on the posture of the robot model 10m, the time required to determine the position of the prohibited area can be shortened. [Explanation of symbols]

[0145] 1. Clean Room 2. Chassis 2m housing model 4. Hoops 4m hoop model 5 Processing equipment 5m Processing Equipment Model 6 Interference 6m interference model 10. Robot 10m Robot Model 12,12m arm 14,14m Hand (end effector) 14a, 14am 1st hand (1st end effector) 14b, 14bm Second hand (second end effector) 21 Display 30 Teaching support device 311 Teaching Support Program 321 Setting device 322 Reception desk 323 Deriver 324 Image Generator 325 Alarm 326 Judgment device

Claims

1. A teaching support device that displays on a display an image of a model of a robot having an arm and an end effector connected to the arm, a setting device that sets a robot model obtained by modeling the robot and a prohibited area that is not an operating area of ​​the robot model; a receiver for receiving a change to the prohibited area; a determiner for determining interference between the robot model and the prohibited area; A deriver for deriving a posture of the robot model; an image generator for generating an image of the forbidden area and the robot model; When the prohibited area is changed via the acceptor, the image generator generates an image of the prohibited area that is changed and moved; When the determiner determines interference between the robot model and the changed prohibited area, The derivation unit derives a posture of the robot model that does not interfere with the prohibited area, and The image generator is a teaching support device that changes the posture of the robot model in the image to the posture derived by the deriver.

2. 2. The teaching support device according to claim 1, a warning device that notifies a user that the robot model is interfering with the prohibited area when the determiner determines that the robot model is interfering with the prohibited area after the change; The image generator is a teaching support device that changes the posture of the robot model in the image to the posture derived by the deriver after the warning device notifies the user that the robot model is interfering with the prohibited area.

3. The teaching support device according to claim 2, The warning device is a teaching support device that changes the display of the robot model to the image generator when notifying a user.

4. 2. The teaching support device according to claim 1, The setter sets a target position of an end effector of the robot model, The deriver is a teaching support device that derives the posture of the robot model when the end effector is located at the target position.

5. 2. The teaching support device according to claim 1, The robot model is a teaching support device that is a model of a robot that includes a first end effector and a second end effector connected to the arm as the end effectors.

6. 6. The teaching support device according to claim 5, The setter sets a target position of a first end effector of the robot model, the deriver derives a posture of the robot model when the first end effector is located at the target position and a second end effector of the robot model is located at a predetermined position within the operating space; When the determiner determines interference between the robot model and the changed prohibited area, the deriver derives a posture of the robot model that does not interfere with the prohibited area by changing the posture of the second end effector without changing the posture of the first end effector.

7. 2. The teaching support device according to claim 1, The setting unit sets an interference model that models a static or dynamic interference object, A teaching support device, wherein the prohibited area includes an area inside the interference object model.

8. 2. The teaching support device according to claim 1, The setting device sets a housing model that models a housing of a clean room, A teaching support device, wherein the prohibited area includes an area outside the housing model.

9. 2. The teaching support device according to claim 1, When the determiner determines interference between the robot model and the changed prohibited area, the deriver derives a position of the robot model that does not interfere with the prohibited area, thereby deriving a posture of the robot model that does not interfere with the prohibited area.

10. 2. The teaching support device according to claim 1, When the determiner determines interference between the robot model and the changed prohibited area, the deriver derives the type of the robot model that does not interfere with the prohibited area, thereby deriving the posture of the robot model that does not interfere with the prohibited area.

11. 2. The teaching support device according to claim 1, The robot model is a model of a horizontal articulated robot whose end effector transports a substrate.

12. A teaching support method for displaying on a display an image of a model of a robot having an arm and an end effector connected to the arm, comprising: Setting a robot model obtained by modeling the robot and a prohibited area which is not an operating area of ​​the robot model; accepting a change to the prohibited area; and determining interference between the robot model and the prohibited area; deriving a posture of the robot model, and further, when determining interference between the robot model and the changed prohibited area, deriving a posture of the robot model that does not interfere with the prohibited area; A teaching support method comprising: generating an image of the prohibited area and the robot model; and, when the prohibited area is changed, generating an image of the changed and moving prohibited area; and, when determining interference between the robot model and the changed prohibited area, changing the posture of the robot model in the image to the derived posture.

13. A teaching support program for displaying on a display an image of a model of a robot having an arm and an end effector connected to the arm, A function of setting a robot model obtained by modeling the robot and a prohibited area that is not an operating area of ​​the robot model; A function of accepting changes to the prohibited area; A function of determining interference between the robot model and the prohibited area; a function of deriving a posture of the robot model, and further, when determining interference between the robot model and the changed prohibited area, deriving a posture of the robot model that does not interfere with the prohibited area; A teaching support program that causes a computer to realize the following functions: generate images of the prohibited area and the robot model; and, when the prohibited area is changed, generate an image of the changed and moving prohibited area; and, when determining interference between the robot model and the changed prohibited area, change the posture of the robot model in the image to the derived posture.

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