Inspection system and inspection method

Abstract

To provide an inspection system capable of properly inspecting the roughness of a surface to be inspected.SOLUTION: An inspection system 1 includes an irradiation unit 10, a brightness measuring unit 20, and a control unit 100. The irradiation unit 10 irradiates a surface to be inspected 72 with light from a position opposite the surface to be inspected 72. The brightness measuring unit 20 is placed at the opposite side of the surface to be inspected 72 with the irradiation unit 10 interposed therebetween to measure the brightness of the surface to be inspected 72 from the direction of irradiation by irradiation unit 10. The control unit 100 is configured to determine the state of the roughening of the surface to be inspected 72 based on the brightness of the surface to be inspected 72.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to an inspection system and an inspection method, and more particularly to an inspection system and an inspection method for inspecting a surface of a member to be inspected. [Background technology]

[0002] Patent Document 1 discloses a nano-protrusion structure inspection device. The device in Patent Document 1 includes an inspection light irradiation unit and a color luminance meter. The inspection light irradiation unit irradiates inspection light onto the surface to be inspected, which is a metal surface. The color luminance meter is disposed with the imaging optical axis of the imaging element tilted with respect to the direction of specular reflection of the inspection light by the surface to be inspected. The color luminance meter inspects nano-scale protrusion structures on the surface to be inspected by receiving diffuse reflected light from the inspection light reflected from the surface to be inspected, which includes specular reflected light and diffuse reflected light, with the imaging element. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2022-123932 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the technique disclosed in Patent Document 1, light is irradiated from an oblique direction onto the surface to be inspected, and the nanoscale protrusion structures are inspected using diffuse reflected light of the inspection light reflected from the surface to be inspected. Due to this configuration, the technique disclosed in Patent Document 1 may not be able to perform the inspection properly. Specifically, the technique disclosed in Patent Document 1 may require a long time for the inspection. Furthermore, the technique disclosed in Patent Document 1 may not be able to inspect the protrusion structures with high accuracy depending on the shape of the surface to be inspected. Therefore, it is desirable to properly inspect the roughening state of the surface to be inspected.

[0005] The present disclosure provides an inspection system and an inspection method capable of appropriately inspecting the roughening state of a surface to be inspected. [Means for solving the problem]

[0006] The inspection system according to the present disclosure is an inspection system for inspecting an inspected surface, which is the surface of a component to be inspected, and includes an irradiation device configured to irradiate light onto the inspected surface from a position facing the inspected surface, a brightness measuring device that is provided on the opposite side of the inspected surface across the irradiation device and configured to measure the brightness of the inspected surface from a direction along the direction of light irradiation by the irradiation device, and a control unit configured to determine the state of roughening of the inspected surface based on the brightness of the inspected surface.

[0007] The inspection method disclosed herein is an inspection method for inspecting an inspection surface, which is the surface of a component to be inspected, in which an illumination device is used to illuminate the inspection surface from a position facing the inspection surface, and a brightness measuring device is used to measure the brightness of the inspection surface from a direction along the direction of light irradiation by the illumination device, and the state of roughening of the inspection surface is determined based on the brightness of the inspection surface.

[0008] In addition, the illumination device may illuminate the inspected surface with light by reflecting the light on a half mirror provided in the illumination device, and the brightness measurement device may measure the brightness of the inspected surface via the half mirror.

[0009] The control unit may determine that the brighter the brightness of the inspected surface is, the lower the degree of roughness of the inspected surface.

[0010] The control unit may also determine an edge of a roughened region on the surface to be inspected, the edge being subjected to a roughening treatment, based on the brightness of the surface to be inspected. Effect of the Invention

[0011] According to the present disclosure, it is possible to provide an inspection system and an inspection method capable of appropriately inspecting the roughening state of a surface to be inspected. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 is a diagram showing a configuration of an inspection system according to a first embodiment. [Diagram 2] FIG. 2 is a diagram for explaining the operation of the inspection system according to the first embodiment. [Diagram 3] 5A to 5C are diagrams for explaining experimental results for the inspection system according to the first embodiment. [Figure 4] 5A to 5C are diagrams for explaining experimental results for the inspection system according to the first embodiment. [Diagram 5] 5A to 5C are diagrams for explaining experimental results for the inspection system according to the first embodiment. [Figure 6] 5A to 5C are diagrams for explaining experimental results for the inspection system according to the first embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. However, the present invention is not limited to the following embodiment. In addition, the following description and drawings are appropriately simplified for clarity of explanation.

[0014] (Embodiment 1) FIG. 1 is a diagram showing a configuration of an inspection system 1 according to the first embodiment. The inspection system 1 according to the first embodiment includes an irradiation device 10, a brightness measurement device 20, and a control unit 100. The inspection system 1 inspects an inspection surface 72, which is the surface of an inspection target member 70. The inspection system 1 can also be referred to as a measurement system that measures the inspection surface 72. In this case, the inspection surface 72 can also be referred to as a measured surface. The inspection system 1 also executes an inspection method for inspecting the inspection surface 72, which is the surface of the inspection target member 70, as described below.

[0015] The inspected member 70 is formed of a metal material such as copper (Cu). The inspected member 70 is, for example, an electrode terminal or a current collecting terminal, but is not limited thereto. By subjecting the inspected surface 72 of the inspected member 70 to a roughening treatment, the bonding strength between the inspected surface 72 and the resin can be strengthened. The inspection system 1 can evaluate whether the inspected surface 72 and the resin can be firmly bonded by inspecting the roughening state of the inspected surface 72. It is not necessary that the entire inspected surface 72 is roughened. Therefore, the inspected surface 72 can have a roughened area that has been subjected to a roughening treatment and a non-roughened area that has not been subjected to a roughening treatment.

[0016] A large number of nano-order (nano-scale) pillars 74 (nano-order metal pillars) are formed on the surface 72 to be inspected. The formation of such a large number of pillars 74 results in a roughening treatment of the surface 72 to be inspected. For example, the surface 72 to be inspected is irradiated with a laser beam such as a pulsed laser, and the metal at the irradiated portion is melted, causing metal particles to scatter and accumulate around the metal. As a result, the pillars 74 are formed. For example, the diameter of the irradiated portion is 10 μm to 200 μm, and the depth of the depression of the irradiated portion by the laser beam is 5 μm to 20 μm. For example, the interval between the pillars 74 is 5 nm to 20 nm, and the height of the pillars 74 is 10 nm to 1000 nm.

[0017] The irradiation device 10 has a light source 12 and a half mirror 14. The irradiation device 10 is provided at a position facing the surface 72 to be inspected. The irradiation device 10 is configured to irradiate the surface 72 to be inspected with light from a position facing the surface 72 to be inspected. Specifically, the irradiation device 10 irradiates the surface 72 to be inspected with light substantially perpendicularly. More specifically, the irradiation device 10 may irradiate the surface 72 to be inspected with light from a direction within a range of ±1.43° with respect to a direction strictly perpendicular to the surface 72 to be inspected. That is, the irradiation direction D1 of the light by the irradiation device 10 may be a direction within a range of 90°±1.43° with respect to the surface 72 to be inspected. That is, in the first embodiment, "irradiating the surface 72 to be inspected with light perpendicularly" means irradiating the surface 72 to be inspected with light in a direction within a range of 90°±1.43°.

[0018] The light source 12 is a white light source. Alternatively, the light source 12 may be a surface light source. The light Lt emitted from the light source 12 is reflected by the half mirror 14 and irradiated onto the surface 72 to be inspected. That is, the irradiation device 10 irradiates the light Lt onto the surface 72 to be inspected by reflecting the light Lt on the half mirror 14. Here, since the light source 12 irradiates the surface 72 to be inspected via the half mirror 14, the light Lt can be uniformly irradiated onto the irradiation area of ​​the surface 72 to be inspected, regardless of the position within the irradiation area.

[0019] The brightness measuring device 20 is, for example, a luminance meter, but is not limited thereto. The brightness measuring device 20 may measure illuminance. In the following description, an example in which the brightness measuring device 20, which is a luminance meter, measures luminance will be described as appropriate. When the brightness measuring device 20 is a luminance meter, the brightness measuring device 20 may be configured with an imaging element (image sensor) such as a CCD (Charge Coupled Device) camera or a CMOS (Complementary Metal-Oxide-Semiconductor) camera.

[0020] The brightness measuring device 20 measures the brightness of the inspection surface 72 irradiated with the light Lt by the irradiation device 10. The brightness measuring device 20 is provided on the opposite side of the inspection surface 72 across the irradiation device 10. The brightness measuring device 20 is configured to measure the brightness of the inspection surface 72 from a direction along the irradiation direction D1 of the light by the irradiation device 10. Specifically, the brightness measuring device 20 is configured to measure the brightness of the inspection surface 72 from approximately the same direction as the irradiation direction D1 of the light by the irradiation device 10. In other words, the brightness measuring device 20 is configured to measure the brightness of the inspection surface 72 coaxially with the irradiation direction D1 of the light by the irradiation device 10. In addition, the brightness measuring device 20 measures the brightness of the inspection surface 72 via the half mirror 14. In other words, the brightness measuring device 20 measures the brightness of the inspection surface 72 by coaxial epi-illumination. With this configuration, the brightness measurement device 20 can measure the specular reflection light from the inspection surface 72 of the light Lt that is irradiated onto the inspection surface 72 substantially perpendicularly.

[0021] Strictly speaking, the measurement direction D2 of the brightness measuring device 20 may measure the brightness of the surface 72 to be inspected from a direction within a range of ±3.7° with respect to the direction perpendicular to the surface 72 to be inspected. That is, the measurement direction D2 of the brightness measuring device 20 may be a direction within a range of 90°±3.7° with respect to the surface 72 to be inspected. In other words, the brightness measuring device 20 may measure the brightness of the surface 72 to be inspected from a direction within a range of ±3.7° with respect to the direction of irradiation of light D1 by the irradiation device 10. That is, the difference between the measurement direction D2 (photographing direction) of the brightness measuring device 20 and the direction of irradiation of light D1 is within a range of ±3.7°. That is, in the first embodiment, "measuring the brightness of the surface 72 to be inspected on the same axis as the direction of irradiation of light D1 by the irradiation device 10" means measuring the brightness of the surface 72 to be inspected from a direction within a range of ±3.7° with respect to the direction of irradiation of light D1 by the irradiation device 10.

[0022] The control unit 100 is, for example, a computer. The control unit 100 has an arithmetic device such as a CPU (Central Processing Unit) and a storage device such as a memory or a disk. The control unit 100 may have a communication device that performs processing required for communication with other devices, and a user interface such as an input device and an output device. The control unit 100 performs processing described below, for example, by the arithmetic device executing a program stored in the storage device. The control unit 100 controls the operation of the inspection system 1. Specifically, the control unit 100 controls the operation of the irradiation device 10 and the brightness measurement device 20. Also, FIG. 1 shows a flowchart showing the operation of the control unit 100.

[0023] The control unit 100 sets the measurement conditions of the brightness measurement device 20 (luminance meter) (step S100). Specifically, the control unit 100 sets the zoom, resolution, and brightness extraction range of the brightness measurement device 20. The control unit 100 controls the illumination device 10 to illuminate the inspection surface 72 with light (step S102). As a result, the illumination device 10 illuminates the inspection surface 72 with light from a position facing the inspection surface 72.

[0024] The control unit 100 controls the brightness measuring device 20 to obtain the brightness of the surface 72 to be inspected (step S104). The control unit 100 obtains brightness information indicating the brightness of the surface 72 to be inspected from the brightness measuring device 20. The brightness information indicates a physical property value indicating the brightness of the surface 72 to be inspected. When the brightness measuring device 20 is a luminance meter, the brightness information indicates the brightness of the surface 72 to be inspected. The control unit 100 may obtain a luminance profile Im1 (illuminance profile) exemplified in FIG. 1. The control unit 100 may also obtain an image captured by a luminance meter, which is an imaging element, and calculate the brightness from the obtained image. The control unit 100 may display the luminance profile on a user interface such as a display. The luminance profile may be a contour diagram. The luminance profile may be expressed in grayscale or a color gradation image.

[0025] The control unit 100 judges the roughness state of the surface 72 to be inspected from the brightness of the surface 72 to be inspected (step S106). Specifically, the control unit 100 may judge that the brighter the surface 72 to be inspected (the higher the brightness), the lower the degree of roughness of the surface 72 to be inspected. On the other hand, the control unit 100 may judge that the darker the surface 72 to be inspected (the lower the brightness), the higher the degree of roughness of the surface 72 to be inspected. The control unit 100 may judge the roughness state of the surface 72 to be inspected using a brightness profile obtained by photographing the surface 72 to be inspected. Note that, when viewed on a nanoscale, a state in which the degree of roughness is high may be a state in which the height (average height) of the columnar bodies 74 is high. Also, a state in which the degree of roughness is high may be a state in which the density of the columnar bodies 74 is high. Also, a state in which the degree of roughness is high may be a state in which the intervals between the columnar bodies 74 are narrow.

[0026] The control unit 100 determines the roughened region on the surface 72 to be inspected (step S108). Specifically, the control unit 100 may determine a region on the surface 72 to be inspected, where the degree of roughening is equal to or greater than a predetermined height, as a roughened region. On the other hand, the control unit 100 may determine a region on the surface 72 to be inspected, where the degree of roughening is less than a predetermined height, as a non-roughened region. The control unit 100 may also determine the edge (boundary) between the roughened region and the non-roughened region. This allows the control unit 100 to determine whether the surface 72 to be inspected has been satisfactorily roughened.

[0027] The non-roughened region may be a region where the glossy surface of the metal remains. Therefore, when light is irradiated onto the non-roughened region of the surface 72 to be inspected, the irradiated light is reflected at a high rate by specular reflection. Therefore, in the non-roughened region, specular reflected light is detected by the brightness measuring device 20, so the brightness may be brighter (brighter). On the other hand, when light is irradiated onto the roughened region, the irradiated light is reflected at a high rate by diffuse reflection. Therefore, in the roughened region, diffuse reflected light is detected by the brightness measuring device 20, so the brightness may be darker (brighter) than in the non-roughened region.

[0028] The inspection system 1 according to the first embodiment executes the inspection method described below. The inspection system 1 uses an irradiation device 10 to irradiate light onto the inspected surface 72 from a position facing the inspected surface 72. The inspection system 1 uses a brightness measuring device 20 provided on the opposite side of the inspection surface 72 across the irradiation device 10 to measure the brightness of the inspection surface 72 from a direction along the irradiation direction of light by the irradiation device 10. The inspection system 1 judges the roughening state of the inspection surface 72 based on the brightness of the inspection surface 72.

[0029] (Comparative Example) The first embodiment is compared with a comparative example. First, the configuration according to the first embodiment is compared with the technique according to Patent Document 1. In the technique according to Patent Document 1, a nanoscale protrusion structure is inspected by irradiating light from an oblique direction onto the surface to be inspected and receiving diffuse reflection light of the inspection light reflected from the surface to be inspected. In this case, as described below, the technique according to Patent Document 1 may require a long time for inspection. That is, in the technique according to Patent Document 1, it is necessary to calculate the relative value of the diffuse reflection light with respect to the reflection light from the reference test piece, so it takes time to obtain the inspection result (determination of the roughened state). Therefore, in the technique according to Patent Document 1, it may be difficult to perform an in-line inspection that incorporates an inspection process for the roughened state in the manufacturing process of the inspected member 70.

[0030] In contrast, in the configuration according to the first embodiment, the roughening state is determined not by the light flux reflected by the metal surface but by the absolute brightness (absolute luminance) of the inspected surface 72 irradiated with light, and therefore the analysis time is shorter than that of the technique according to Patent Document 1. Therefore, in the configuration according to the first embodiment, it is possible to appropriately perform in-line inspection that incorporates an inspection process for the roughening state in the manufacturing process of the inspected member 70.

[0031] In addition, in the technology of Patent Document 1, when inspecting the roughening state of a small area, the intensity of reflected light in the small area is weak, so the luminance measured by the luminance meter may be so low that it cannot be measured. In addition, since the inspection range is small, the influence of measurement errors may be large, and the inspection may not be performed accurately. In addition, if the reflected light is to be measured by the luminance meter in such a situation, the exposure time of the image sensor must be extended to increase the amount of light received, and the inspection may take a long time.

[0032] In contrast, in the configuration according to the first embodiment, the light is irradiated substantially perpendicularly to the surface 72 to be inspected, so that the brightness in the narrow area is prevented from becoming weak. Furthermore, in the configuration according to the first embodiment, the brightness of the narrow area can be accurately measured simply by enlarging and photographing the narrow area using the zoom function of the image sensor in the brightness measurement device 20. Therefore, in the configuration according to the first embodiment, the time required for inspection can be reduced compared to the technology according to Patent Document 1, and inspection can be performed with high accuracy.

[0033] In addition, when a component wall is formed on the surface to be inspected, if light is irradiated from an oblique direction as in the technique of Patent Document 1, a shadow will be generated on the side of the component wall opposite to the side irradiated with light. Therefore, it is not possible to properly measure the brightness of the part where the shadow is generated, and therefore it may be difficult to perform the inspection properly. In addition, the degree of reflection may change discontinuously at the edge between the roughened area and the non-roughened area, but if light is irradiated from an oblique direction as in the technique of Patent Document 1, it may be difficult to detect such a difference in the degree of reflection. Therefore, it may be difficult to perform the inspection with high accuracy using the technique of Patent Document 1.

[0034] In contrast, in the configuration according to the first embodiment, light is applied substantially perpendicularly to the surface 72 to be inspected, so that even if a component wall is formed on the surface to be inspected, the appearance of a shadow can be suppressed. Also, in the configuration according to the first embodiment, light is applied substantially perpendicularly to the surface 72 to be inspected, so that the difference in the degree of reflection at the edge between the roughened region and the non-roughened region can be detected with high accuracy. Therefore, inspection can be performed with high accuracy compared to the technology according to Patent Document 1.

[0035] In addition, when inspecting the roughening state of a large area, if light is irradiated from an oblique direction as in the technology of Patent Document 1, the distance from the light source and the angle of the optical axis may differ for each position in the large area. In other words, the distance from the light source and the angle of the optical axis at a certain position in the large area may differ from the distance from the light source and the angle of the optical axis at another position in the large area. Therefore, even if the roughening state is the same, the measured brightness may differ for each position in the large area. In other words, the brightness may depend on the position in the large area. Therefore, there is a risk that the inspection cannot be performed with high accuracy.

[0036] In contrast, in the configuration according to the first embodiment, the light is irradiated substantially perpendicularly to the surface 72 to be inspected, so that it is possible to suppress the occurrence of differences in brightness due to differences in position in a large area. In other words, it is possible to suppress the brightness from depending on the position in the large area. Therefore, the configuration according to the first embodiment can perform inspection with higher accuracy than the technology according to Patent Document 1.

[0037] FIG. 2 is a diagram for explaining the operation of the inspection system 1 according to the first embodiment. As shown in the lower diagram of FIG. 2, if the direction of light irradiation by the irradiation device 10 is misaligned with the direction of measurement by the brightness measurement device 20, the distance from the imaging focal position of the brightness measurement device 20 to each position on the surface to be inspected 72 may differ for each position. In such a case, the brightness measured by the brightness measurement device 20 may be bright (high luminance) at a position close to the imaging focal position, such as the position on the right side of the surface to be inspected 72 in the lower diagram of FIG. 2. On the other hand, the brightness measured by the brightness measurement device 20 may be dark (low luminance) at a position far from the imaging focal position, such as the left side of the surface to be inspected 72 in the lower diagram of FIG. 2. Therefore, if the direction of light irradiation by the irradiation device 10 is misaligned with the direction of measurement by the brightness measurement device 20, the brightness (luminance) measured by the brightness measurement device 20 may vary for each position on the surface to be inspected 72. In other words, if there is a misalignment between the direction of light irradiation by the irradiation device 10 and the direction of measurement by the brightness measurement device 20, the brightness (luminance) measured by the brightness measurement device 20 may depend on the position on the inspected surface 72. Therefore, if there is a misalignment between the direction of light irradiation by the irradiation device 10 and the direction of measurement by the brightness measurement device 20, there is a risk that the roughening state may not be inspected accurately.

[0038] In contrast, in the inspection system 1 according to the first embodiment, the direction of light irradiation by the irradiation device 10 and the direction of measurement by the brightness measuring device 20 are coaxial, as shown in the upper diagram of Fig. 2. Therefore, the distance from the imaging focal position of the brightness measuring device 20 to each position on the inspected surface 72 is approximately the same. Therefore, there is little variation in the measured brightness depending on the position on the inspected surface 72. By measuring the brightness on the same axis as the direction of light irradiation as in the inspection system 1 according to the first embodiment, it is possible to inspect the roughening state with high accuracy.

[0039] Furthermore, when the direction of light irradiation by the irradiation device 10 is approximately perpendicular to the surface 72 to be inspected, the reflected light in the non-roughened region is mostly strong specular light from the metallic gloss surface. In this case, as shown in the lower diagram of Fig. 2, if the direction of light irradiation by the irradiation device 10 and the measurement direction by the brightness measurement device 20 are misaligned, the strong specular reflected light in the non-roughened region may not be measured properly. In this case, the brightness in the non-roughened region is determined to be low, and therefore, there is a risk that the region may be erroneously determined to be roughened (columnar bodies 74 are formed) even though it is actually a non-roughened region.

[0040] In contrast, in the inspection system 1 according to the first embodiment, as shown in the upper diagram of FIG. 2, the direction of light irradiation by the irradiation device 10 and the direction of measurement by the brightness measurement device 20 are coaxial. Therefore, it is possible to properly measure the strong specular reflection light in the non-roughened region. Therefore, it is possible to properly determine that the non-roughened region is not roughened (the columns 74 are not formed). Therefore, by measuring the brightness on the same axis as the direction of light irradiation as in the inspection system 1 according to the first embodiment, it is possible to inspect the roughened state with high accuracy.

[0041] In the inspection system 1 according to the first embodiment, the irradiation device 10 irradiates the inspected surface 72 with light by reflecting the light on the half mirror 14. The brightness measurement device 20 measures the brightness of the inspected surface 72 via the half mirror 14. With this configuration, it is possible to coaxially measure the specularly reflected light from the non-roughened region of the inspected surface 72. Therefore, it is possible to accurately determine the roughening state.

[0042] Moreover, in the inspection system 1 according to the first embodiment, the brighter the brightness of the inspected surface 72, the lower the degree of roughness of the inspected surface 72. With such a configuration, it is possible to perform the inspection more appropriately compared to the above-mentioned comparative example.

[0043] Furthermore, in the inspection system 1 according to the first embodiment, the edge of the roughened region on the inspected surface 72, which has been subjected to a roughening process, is determined based on the brightness of the inspected surface 72. With this configuration, it becomes possible to accurately distinguish between the roughened region and the non-roughened region.

[0044] (Experimental Results) 3 to 6 are diagrams for explaining the results of an experiment performed on the inspection system 1 according to the first embodiment. FIG. 3 shows an inspected member 70 used in an experiment performed on the first embodiment. FIG. 3 shows an electrode terminal, which is the inspected member 70. The right side of FIG. 3 shows the reverse side of the left side. In the experiment described below, inspection was performed on an area Ar1, which is a flat portion, and an area Ar2, which is a corner portion (rounded corner portion). The area of ​​area Ar1 is approximately 48 mm 2 The area of ​​the region Ar2 is about 0.16 mm2. Therefore, the region Ar1 corresponds to the above-mentioned wide region, and the region Ar2 corresponds to the above-mentioned narrow region.

[0045] 4 and 5 show the experimental results when the inspected member 70 is copper (Cu). FIG. 4 shows the experimental results when the roughening state of the region Ar1 (wide region) was inspected. The graph shown in FIG. 4 shows the relationship between the surface area magnification and the relative brightness for the region Ar1. Here, the "relative brightness" is the relative brightness with the brightness of the reference white taken as 100. Also, the "surface area magnification" is an index representing the size of the surface area measured by gas adsorption measurement. The surface area magnification (specific surface area) is a value indicating the relative size of the surface area when the surface area of ​​a flat plate is taken as 1. The surface area magnification is calculated by measuring the surface area of ​​the inspected surface based on the amount of gas (inert gas) adsorbed to the inspected surface. Here, the surface area magnification can be an index of surface roughness. The larger the nano-order surface roughness (the higher the average height of the columnar bodies), the larger the surface area magnification, and the smaller the nano-order surface roughness (the lower the average height of the columnar bodies), the smaller the surface area magnification.

[0046] As shown in FIG. 4, for the area Ar1, the coefficient of determination of the regression equation showing the relationship between the surface area magnification and the relative luminance is R 2=0.8376. Since the coefficient of determination is close to 1, it can be said that there is a strong correlation between the surface area magnification and the relative luminance for the region Ar1. Therefore, it can be seen that the degree of roughening (degree of unevenness of nano-order columnar bodies) in a large region can be determined with high accuracy by measuring the luminance using the method according to the first embodiment.

[0047] FIG. 5 shows the experimental results of inspecting the roughening state of the region Ar2 (narrow region). The graph shown in FIG. 5 shows the relationship between the surface area magnification and the relative brightness for the region Ar2. As shown in FIG. 5, the coefficient of determination of the regression equation showing the relationship between the surface area magnification and the relative brightness for the region Ar2 is R 2 = 0.9501. Since the coefficient of determination is close to 1, it can be said that there is a strong correlation between the surface area magnification and the relative luminance for the region Ar2. Therefore, it can be seen that the degree of roughening in a narrow region (the degree of unevenness of nano-order columnar bodies) can be determined with high accuracy by measuring the luminance using the method according to the first embodiment.

[0048] FIG. 6 is a diagram comparing a microscopic image obtained by observing an inspected member with a microscope and a brightness image obtained by measuring the brightness of the same inspected member with the brightness measuring device 20. The upper diagram indicated by the arrow A shows the microscopic image. The microscopic image may be a color image. The lower diagram indicated by the arrow B shows the brightness image. The area ArA in the microscopic image is a roughened area that has been subjected to a roughening treatment. Here, the area ArB with low brightness in the brightness image approximately coincides with the area ArA in the microscopic image. Therefore, it can be seen that the roughened area and the non-roughened area can be distinguished by measuring the brightness (brightness) of the inspected member. Furthermore, compared to the microscopic image, the edge portion between the roughened area and the non-roughened area is more prominently shown in the brightness image. Therefore, the range of the roughened area can be accurately determined by measuring the brightness (brightness) of the inspected member.

[0049] (Modification) The present invention is not limited to the above-described embodiment, and can be modified as appropriate without departing from the spirit of the present invention. For example, the material of the inspected member is not limited to copper. The inspected member may be made of aluminum (Al). [Explanation of symbols]

[0050] 1. Inspection system 10 Irradiation device 12 light source 14 Half Mirror 20 Brightness measuring device 70 Inspected parts 72 Surface to be inspected 74 Columnar body 100 Control section

Claims

1. An inspection system for inspecting an inspection surface which is a surface of an inspection member, comprising: an irradiation device configured to irradiate the inspection surface with light from a position facing the inspection surface; a brightness measuring device that is provided on the opposite side of the inspection surface across the irradiation device and is configured to measure the brightness of the inspection surface from a direction along the irradiation direction of light by the irradiation device; A control unit configured to determine a roughness state of the inspection surface based on the brightness of the inspection surface; An inspection system having

2. the irradiation device irradiates the inspection surface with light by reflecting the light on a half mirror provided in the irradiation device; the brightness measuring device measures the brightness of the inspection surface via the half mirror; The inspection system of claim 1 .

3. The control unit determines that the brighter the brightness of the inspection surface is, the lower the degree of roughness of the inspection surface is. The inspection system of claim 1 .

4. The control unit determines an edge of a roughened region on the inspection surface, the edge being subjected to a roughening treatment, based on the brightness of the inspection surface. The inspection system of claim 1 .

5. An inspection method for inspecting an inspection surface which is a surface of an inspection member, comprising the steps of: Using an irradiation device, irradiating the inspection surface with light from a position facing the inspection surface; measuring the brightness of the surface to be inspected from a direction along the irradiation direction of the light by the irradiation device using a brightness measuring device provided on the opposite side of the surface to be inspected across the irradiation device; determining a roughness state of the inspection surface based on the brightness of the inspection surface; Testing method.

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