Chemical liquid storage device

Abstract

To provide a chemical liquid storage device capable of preventing inappropriate supply of a processing liquid to a processing device.SOLUTION: A chemical liquid storage device for storing a chemical liquid comprises a tank for storing the chemical liquid, and a concentration display unit for indicating a concentration level of the chemical liquid, the concentration display unit comprises a first float and a second float on which the buoyancy of the chemical liquid acts, the first float moves due to the buoyancy of the chemical liquid when the concentration of the chemical liquid is equal to or greater than a first reference value, and the second float moves due to the buoyancy of the chemical liquid when the concentration of the chemical liquid exceeds a second reference value that is higher than the first reference value.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a drug solution storage device for storing a drug solution. [Background technology]

[0002] A wafer on which a plurality of devices are formed is divided and diced to produce device chips each including a device. A package substrate is formed by mounting a plurality of device chips on a predetermined substrate and covering and sealing the mounted device chips with a resin layer (mold resin). A package device including a plurality of packaged device chips is manufactured by dividing and dicing the package substrate. The device chips and package devices are incorporated into various electronic devices such as mobile phones and personal computers.

[0003] When dividing a workpiece such as a wafer or a package substrate, the workpiece is processed by various processing devices. For example, the workpiece is divided by a cutting device that performs cutting processing on the workpiece with an annular cutting blade (see Patent Document 1). In addition, the workpiece before division may be subjected to grinding processing using a grinding device or polishing processing using a polishing device.

[0004] A processing liquid used when processing a workpiece with the processing device is supplied to the processing device. For example, when cutting a workpiece with a cutting device, a processing liquid such as pure water is supplied to the workpiece and the cutting blade. The supply of the processing liquid cools the workpiece and the cutting blade, and washes away chips (processing chips) generated by the cutting process.

[0005] In addition, a specific chemical solution may be added to the processing liquid used in the processing device depending on the purpose. For example, a method has been proposed in which a processing liquid containing a surfactant is supplied to a workpiece when the workpiece is cut with a cutting blade (see Patent Documents 2 and 3). By adding a surfactant to the processing liquid, processing debris adhering to the workpiece can be easily removed. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Publication No. 10-242083 [Patent Document 2] JP 2009-13301 A [Patent Document 3] JP 2016-165771 A Summary of the Invention [Problem to be solved by the invention]

[0007] A processing liquid (e.g., processing liquid, cleaning liquid) used in a processing device such as a machining device or a cleaning device is supplied from a processing liquid supply source to the processing device through a processing liquid supply path. When a specific chemical liquid is added to the processing liquid, a tank for storing the chemical liquid is connected to the processing liquid supply path. When the chemical liquid is supplied from the tank to the processing liquid supply path, the processing liquid and the chemical liquid are mixed in the processing liquid supply path, and the processing liquid containing the chemical liquid is supplied to the processing device.

[0008] The chemical liquid to be added to the processing liquid is stored in a tank at a predetermined concentration and is supplied from the tank to the processing liquid supply path at a predetermined flow rate. This adjusts the concentration of the chemical liquid contained in the processing liquid. However, if the adjustment of the concentration of the chemical liquid injected into the tank is insufficient or if a chemical liquid of a different concentration is mistakenly replenished to the tank, a chemical liquid of an unexpected concentration will be stored in the tank. In this case, even if the flow rate of the chemical liquid supplied from the tank to the processing liquid supply path is strictly controlled, the concentration of the chemical liquid contained in the processing liquid will not be adjusted as intended, which may cause problems in processing the workpiece using the processing liquid.

[0009] The present invention has been made in view of the above problems, and has an object to provide a chemical liquid storage device capable of preventing the supply of an inappropriate processing liquid to a processing device. [Means for solving the problem]

[0010] According to one aspect of the present invention, there is provided a chemical liquid storage device for storing a chemical liquid, the chemical liquid storage device comprising: a tank for storing the chemical liquid; and a concentration display unit for indicating the concentration level of the chemical liquid, the concentration display unit comprising a first float and a second float on which the buoyancy of the chemical liquid acts, the first float moving due to the buoyancy of the chemical liquid when the concentration of the chemical liquid is equal to or greater than a first reference value, and the second float moving due to the buoyancy of the chemical liquid when the concentration of the chemical liquid exceeds a second reference value that is higher than the first reference value.

[0011] Preferably, the concentration display unit is provided inside the tank. Alternatively, preferably, the concentration display unit is provided outside the tank. Furthermore, preferably, the density of the first float is lower than the density of the second float.

[0012] Also, preferably, the first float and the second float comprise a cylindrical container having an open end and a density adjustment member inserted into the container, and the density of the first float and the second float can be adjusted by adjusting the volume of the gap between the container and the density adjustment member by moving the density adjustment member relative to the container. Also, preferably, the drug solution storage device further comprises a sensor for detecting the first float and the second float.

[0013] In addition, preferably, the chemical solution is added to the processing solution supplied to the processing device. Furthermore, preferably, the chemical solution storage device further includes a chemical solution supply path connected to a processing solution supply path through which the processing solution supplied to the processing device flows, and a pump that supplies the chemical solution stored in the tank to the chemical solution supply path. Effect of the Invention

[0014] A chemical storage device according to one aspect of the present invention includes a concentration display unit that indicates the concentration level of the chemical by a first float that moves due to the buoyancy of the chemical when the concentration of the chemical is equal to or greater than a first reference value, and a second float that moves due to the buoyancy of the chemical when the concentration of the chemical exceeds a second reference value. This makes it possible to quickly and easily check whether the concentration of the chemical stored in the tank is within a predetermined range, and prevents a processing liquid containing a chemical of an inappropriate concentration from being supplied to a processing device. [Brief description of the drawings]

[0015] [Figure 1] FIG. 2 is a schematic diagram showing a drug solution storage device. [Diagram 2] FIG. [Diagram 3] Figure 3(A) is a cross-sectional view showing the front side of the concentration display unit, Figure 3(B) is a cross-sectional view showing the side side of the concentration display unit, and Figure 3(C) is a cross-sectional view showing the top side of the concentration display unit. [Figure 4] FIG. 4(A) is an exploded cross-sectional view showing a float with adjustable density, and FIG. 4(B) is a cross-sectional view showing a float with adjustable density. [Diagram 5] FIG. 5(A) is a cross-sectional view showing a chemical liquid storage device in which a low-concentration chemical liquid is stored in a tank, FIG. 5(B) is a cross-sectional view showing a chemical liquid storage device in which a medium-concentration chemical liquid is stored in a tank, and FIG. 5(C) is a cross-sectional view showing a chemical liquid storage device in which a high-concentration chemical liquid is stored in a tank. [Figure 6] Figure 6(A) is a cross-sectional view showing the front side of a modified concentration display unit, Figure 6(B) is a cross-sectional view showing the side side of a modified concentration display unit, and Figure 6(C) is a plan view showing a modified concentration display unit. [Figure 7] Figure 7(A) is a cross-sectional view showing a concentration display unit in which a low-concentration chemical solution is stored in a storage member, Figure 7(B) is a cross-sectional view showing a concentration display unit in which a medium-concentration chemical solution is stored in a storage member, and Figure 7(C) is a cross-sectional view showing a concentration display unit in which a high-concentration chemical solution is stored in a storage member. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. First, a configuration example of a chemical liquid storage device according to this embodiment will be described. Fig. 1 is a schematic diagram showing a chemical liquid storage device (chemical liquid supply device) 10 that stores a chemical liquid. The chemical liquid storage device 10 stores a chemical liquid to be added to a processing liquid supplied to a processing device 2.

[0017] The processing device 2 performs a predetermined process on the object using a processing liquid. Examples of the processing device 2 include processing devices such as a cutting device that cuts the workpiece, a grinding device that grinds the workpiece, a polishing device that polishes the workpiece, and a laser processing device that performs laser processing on the workpiece.

[0018] The cutting device is equipped with a processing unit (cutting unit) that cuts the workpiece. The cutting unit has a spindle, and an annular cutting blade is attached to the tip of the spindle. The cutting blade is rotated and cuts into the workpiece, thereby cutting the workpiece.

[0019] The grinding device includes a processing unit (grinding unit) that grinds the workpiece. The grinding unit includes a spindle, and an annular grinding wheel including multiple grinding stones is attached to the tip of the spindle. The grinding wheel is rotated while the grinding stones are brought into contact with the workpiece, thereby grinding the workpiece.

[0020] The polishing device is equipped with a processing unit (polishing unit) that polishes the workpiece. The polishing unit is equipped with a spindle, and a disk-shaped polishing pad is attached to the tip of the spindle. The polishing pad is rotated and brought into contact with the workpiece, thereby polishing the workpiece.

[0021] The laser processing device includes a processing unit (laser irradiation unit) that irradiates a laser beam onto a workpiece. For example, the laser irradiation unit includes a laser oscillator and a condenser that condenses the laser beam emitted from the laser oscillator. The laser beam irradiated from the laser irradiation unit is condensed on the front, back, or inside of the workpiece, thereby performing laser processing on the workpiece.

[0022] However, the processing device 2 may be a processing device other than the above-mentioned processing device. For example, the processing device 2 may be a cleaning device that cleans an object, a film forming device that forms a thin film on an object, an inspection device that inspects an object, etc.

[0023] A processing liquid supply path 4, through which a processing liquid flows and is supplied to the processing device 2, is connected to the processing device 2. The processing liquid supply path 4 is a piping formed of tubes, pipes, etc., and one end side of the processing liquid supply path 4 is connected to a predetermined component of the processing device 2.

[0024] A processing liquid supply source 6 is connected to the other end of the processing liquid supply path 4. The processing liquid supply source 6 supplies processing liquid such as a machining liquid or a cleaning liquid used in the processing device 2. For example, the processing liquid supply source 6 includes a tank for storing the processing liquid and a pump for pumping the processing liquid from the tank. The processing liquid supply source 6 may be a factory facility (processing liquid supply facility) provided in a factory in which the processing device 2 is installed. The processing liquid such as pure water is supplied from the processing liquid supply source 6 to the processing device 2 via the processing liquid supply path 4.

[0025] The chemical liquid storage device 10 adds the chemical liquid to the processing liquid by storing the chemical liquid and supplying it to the processing liquid supply path 4. Specifically, the chemical liquid storage device 10 includes a tank (container) 12 for storing the chemical liquid. For example, the tank 12 is a transparent rectangular parallelepiped container, and the chemical liquid to be added to the processing liquid is injected and filled into the tank 12. The size, shape, material, etc. of the tank 12 are appropriately set depending on the material, application, etc. of the chemical liquid stored in the tank 12.

[0026] The liquid medicine storage device 10 also includes a concentration display unit (concentration display mechanism) 14 that indicates the concentration level of the liquid medicine stored in the tank 12. For example, the concentration display unit 14 is provided inside the tank 12, and indicates the concentration of the liquid medicine stored in the tank 12 at a plurality of levels. The concentration display unit 14 will be described in detail later (see FIGS. 3(A) to 3(C) and 5(A) to 5(C)).

[0027] A chemical supply path 16 through which the chemical flows is connected to the tank 12. The chemical supply path 16 is a piping formed of a tube, a pipe, etc., and the chemical stored in the tank 12 is supplied to the chemical supply path 16. One end of the chemical supply path 16 is connected to the processing liquid supply path 4, and the other end of the chemical supply path 16 is connected to the tank 12.

[0028] Furthermore, the chemical liquid storage device 10 includes a pump 18 that supplies the chemical liquid stored in the tank 12 to the chemical liquid supply path 16. For example, the pump 18 is a diaphragm pump, and is connected to the chemical liquid supply path 16. The chemical liquid stored in the tank 12 is pumped out by the pump 18 and supplied to the processing liquid supply path 4 via the chemical liquid supply path 16. By controlling the operation of the pump 18, the amount (flow rate) of the chemical liquid supplied to the processing liquid supply path 4 is adjusted.

[0029] When the chemical solution is supplied to the processing liquid supply path 4, the processing liquid and the chemical solution are mixed in the processing liquid supply path 4. As a result, a processing liquid containing the chemical solution is generated and supplied to the processing device 2. In addition, by controlling the amount of the chemical solution supplied to the processing liquid supply path 4, the concentration of the chemical solution contained in the processing liquid is adjusted. The concentration of the chemical solution is set according to the type of processing in the processing device 2.

[0030] Next, a configuration example of the processing device 2 to which the processing liquid is supplied will be described. FIG. 2 is a perspective view showing the processing device 2. In this embodiment, as an example, the processing device 2 will be described as a cutting device. In FIG. 2, 1 Axial direction (machining feed direction, first horizontal direction) and Y 1 The axial direction (indexing feed direction, second horizontal direction) and the Z direction are perpendicular to each other.1 The axial direction (up and down, height, vertical) is X 1 Axial and Y directions 1 It is a direction perpendicular to the axial direction.

[0031] The processing device 2 performs cutting processing on a workpiece 11, which is an object to be processed. For example, the workpiece 11 is a disk-shaped wafer made of a semiconductor material such as single crystal silicon, and has a front surface 11a and a back surface 11b that are generally parallel to each other.

[0032] The workpiece 11 is partitioned into a plurality of rectangular regions by a plurality of streets (planned division lines) 13 arranged in a lattice pattern so as to intersect with one another. Devices 15, such as ICs (Integrated Circuits), LSIs (Large Scale Integrations), LEDs (Light Emitting Diodes), and MEMS (Micro Electro Mechanical Systems) devices, are formed in each of the regions partitioned by the streets 13 on the front surface 11a side of the workpiece 11. The processing device 2 cuts and divides the workpiece 11 along the streets 13 to manufacture a plurality of device chips each including a device 15.

[0033] However, there are no limitations on the material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a substrate (wafer) made of a semiconductor material other than silicon (GaAs, InP, GaN, SiC, etc.), glass, sapphire, ceramics, resin, metal, etc. In addition, there are no limitations on the type, number, shape, structure, size, arrangement, etc. of the devices 15, and the devices 15 do not have to be formed on the workpiece 11.

[0034] Furthermore, the workpiece 11 may be a package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded package) substrate. For example, a package substrate is formed by mounting a plurality of device chips on a predetermined substrate and covering and sealing the mounted device chips with a resin layer (mold resin). By cutting and dividing the package substrate with the processing device 2, a plurality of package devices each including a plurality of packaged device chips are manufactured.

[0035] When processing the workpiece 11 with the processing device 2, the workpiece 11 may be supported by an annular frame 17 for ease of handling (transporting, holding, etc.) the workpiece 11. The frame 17 is an annular member made of a metal such as SUS (stainless steel), and a circular opening 17a is provided in the center of the frame 17, penetrating the frame 17 in the thickness direction. The diameter of the opening 17a is larger than the diameter of the workpiece 11.

[0036] A circular sheet 19 is fixed to the workpiece 11 and the frame 17. For example, a tape having a circular film-like base material and an adhesive layer (glue layer) provided on the base material is used as the sheet 19. Also, a thermo-compression sheet that does not have an adhesive layer and can be thermo-compression bonded to the workpiece 11 and the frame 17 can be used as the sheet 19.

[0037] With the workpiece 11 placed inside the opening 17a of the frame 17, the center of the sheet 19 is affixed to the back surface 11b of the workpiece 11, and the outer periphery of the sheet 19 is affixed to the frame 17. As a result, the workpiece 11 is supported by the frame 17 via the sheet 19.

[0038] The processing device 2 includes a chuck table (holding table) 20 for holding the workpiece 11. The upper surface of the chuck table 20 is a horizontal plane (X 1 Y 1The chuck table 20 has a flat surface that is generally parallel to the horizontal plane and constitutes a circular holding surface that holds the workpiece 11. The holding surface of the chuck table 20 is connected to a suction source (not shown) such as an ejector via a flow path (not shown), a valve (not shown), and the like provided inside the chuck table 20.

[0039] A moving unit (not shown) and a rotary drive source (not shown) are connected to the chuck table 20. The moving unit is, for example, a ball screw type moving mechanism, and moves the chuck table 20 in the X direction. 1 The rotation drive source is constituted by a motor or the like, and moves the chuck table 20 in the Z direction. 1 It is rotated about a rotation axis that is generally parallel to the axial direction.

[0040] The processing device 2 also includes a processing unit (cutting unit) 22. The processing unit 22 is installed above the chuck table 20, and performs cutting on the workpiece 11 held by the chuck table 20.

[0041] The processing unit 22 includes a cylindrical housing 24. 1 It houses a cylindrical spindle (not shown) arranged along the axial direction. The tip (one end) of the spindle is exposed to the outside of the housing 24, and an annular cutting blade 26 is attached to the tip of the spindle. A rotation drive source (not shown) such as a motor is connected to the base end (the other end) of the spindle. When the rotation drive source is operated with the cutting blade 26 attached, the cutting blade 26 rotates in a Y direction due to the power transmitted from the rotation drive source via the spindle. 1 It rotates around an axis of rotation that is generally parallel to the axial direction.

[0042] For example, a hub-type cutting blade (hub blade) is used as the cutting blade 26. The hub blade has an annular hub base made of a metal such as an aluminum alloy, and an annular cutting edge formed along the outer periphery of the hub base. The cutting edge of the hub blade is formed by an electroformed grinding wheel containing abrasive grains made of diamond, cubic boron nitride (cBN), or the like, and a binder such as a nickel plating layer that fixes the abrasive grains.

[0043] However, a washer-type cutting blade (washer blade) may also be used as the cutting blade 26. A washer blade is composed only of an annular cutting edge including abrasive grains and a binder made of metal, ceramics, resin, or the like that fixes the abrasive grains.

[0044] When the cutting blade 26 is attached to the tip of the spindle, the cutting blade 26 is covered by a blade cover 28 fixed to the housing 24. The blade cover 28 includes a pair of machining fluid supply units 30 to which machining fluid is supplied, and a pair of nozzles 32 connected to the machining fluid supply units 30 (only one of the nozzles 32 is shown in FIG. 2). The pair of nozzles 32 are disposed on both sides of the cutting blade 26 so as to sandwich the lower end of the cutting blade 26 therebetween. In addition, each of the pair of nozzles 32 is provided with a supply port (not shown) that opens toward the cutting blade 26.

[0045] The machining liquid supply unit 30 is connected to the processing liquid supply path 4. Then, the processing liquid containing a chemical solution is supplied from the processing liquid supply path 4 to the machining liquid supply unit 30 as the machining liquid. The machining liquid that has flowed into the machining liquid supply unit 30 is supplied from the supply ports of a pair of nozzles 32 toward both sides of the cutting blade 26. This machining liquid cools the workpiece 11 and the cutting blade 26, and washes away chips (machining chips) generated by the cutting process.

[0046] 1, for example, the processing liquid supply source 6 supplies pure water to the processing liquid supply path 4. A chemical liquid in which a predetermined solute is dissolved in a solvent such as pure water is stored in the tank 12. The pure water and the chemical liquid are mixed in the processing liquid supply path 4, and the pure water containing the chemical liquid is supplied to the processing unit 22 (see FIG. 2) as a processing liquid.

[0047] A moving unit (not shown) for moving the processing unit 22 is connected to the processing unit 22. The moving unit is configured, for example, by a ball screw type moving mechanism, and moves the processing unit 22 in a Y direction. 1 Axial and Z directions 1 The cutting blade 26 is moved along the axial direction. 1 Axial and Z directions 1 The axial position is adjusted.

[0048] The processing device 2 also includes a controller (control unit, control section, control device) 34 that controls the processing device 2. The controller 34 is connected to each component (the chuck table 20, the processing unit 22, etc.) of the processing device 2. The controller 34 controls the operation of the processing device 2 by outputting a control signal to each component of the processing device 2.

[0049] For example, the controller 34 is configured by a computer installed in the processing device 2. Specifically, the controller 34 includes a processing unit that performs calculations and the like to operate the processing device 2, and a storage unit that stores various information (data, programs, etc.) used to operate the processing device 2. The processing unit includes a processor such as a CPU (Central Processing Unit). The storage unit includes memories such as a ROM (Read Only Memory), RAM (Random Access Memory), etc.

[0050] The controller 34 may be connected to components (such as the pump 18) of the drug solution storage device 10. In this case, the processing device 2 and the drug solution storage device 10 are controlled by the controller 34. However, the drug solution storage device 10 and the drug solution storage device 10 may each have an individual controller.

[0051] When processing the workpiece 11 using the processing device 2, first, the workpiece 11 is held by the chuck table 20. For example, the workpiece 11 is placed on the chuck table 20 so that the front surface 11a faces upward and the back surface 11b (the sheet 19 side) faces the holding surface. In this state, when the suction force (negative pressure) of the suction source is applied to the holding surface, the workpiece 11 is sucked and held by the chuck table 20 via the sheet 19.

[0052] Next, the chuck table 20 is rotated to move the length direction of the predetermined street 13 in the X direction. 1 Also, the Y of the processing unit 22 is aligned so that the cutting blade 26 overlaps with the extension line of the predetermined street 13. 1 The position in the axial direction is adjusted. Furthermore, the height of the processing unit 22 is adjusted so that the lower end of the cutting blade 26 is located lower than the back surface 11b (upper surface of the sheet 19) of the workpiece 11. The difference in height between the front surface 11a of the workpiece 11 and the lower end of the cutting blade 26 at this time corresponds to the cutting depth of the cutting blade 26 into the workpiece 11.

[0053] Then, while rotating the cutting blade 26, the chuck table 20 is moved in the X direction. 1 As a result, the chuck table 20 and the cutting blade 26 are moved in the X-axis direction. 1 The cutting blade 26 moves relatively along the axial direction (machining feed), and cuts into the workpiece 11 along the predetermined streets 13. As a result, the workpiece 11 is cut and divided along the predetermined streets 13. During cutting of the workpiece 11, machining fluid is supplied to the workpiece 11 and the cutting blade 26 from the pair of nozzles 32.

[0054] Thereafter, the same procedure is repeated to cut the workpiece 11 along all of the streets 13. As a result, the workpiece 11 is divided into a plurality of device chips, each of which has a device 15.

[0055] Next, the concentration display unit 14 (see FIG. 1) mounted on the drug solution storage device 10 will be described in detail. FIG. 3(A) is a cross-sectional view showing the front side of the concentration display unit 14, FIG. 3(B) is a cross-sectional view showing the side side of the concentration display unit 14, and FIG. 3(C) is a cross-sectional view showing the top side of the concentration display unit 14. In FIG. 3(A) to FIG. 3(C), X 2 Axial direction (first horizontal direction) and Y 2 The axial direction (second horizontal direction) and the Z direction are perpendicular to each other. 2 The axial direction (up and down, height, vertical) is X 2 Axial and Y directions 2 It is a direction perpendicular to the axial direction.

[0056] The tank 12 of the drug solution storage device 10 is disposed on a horizontal plane (X 2 Y 2 A top wall 12a and a bottom wall 12b (see FIGS. 3A and 3B) are arranged along a first vertical plane (X 2 Z 2 A front wall 12c and a rear wall 12d (see Figs. 3B and 3C) are arranged along a plane (Y 1 plane) and connected to the top wall 12a and the bottom wall 12b, and a second vertical plane (Y 2 plane) perpendicular to the first vertical plane. 2 Z 2 and a pair of side walls 12e, 12f (see Figs. 3(A) and 3(C)) arranged along a plane and connected to the top wall 12a and the bottom wall 12b. The area surrounded by the top wall 12a, the bottom wall 12b, the front wall 12c, the rear wall 12d, and the side walls 12e, 12f corresponds to a storage area (storage space) 12g in which the medicinal solution 40 is stored.

[0057] An opening 12h (see FIGS. 3(A) and 3(B)) that connects the outside of the tank 12 to the storage area 12g is provided in the upper wall 12a of the tank 12. The opening 12h functions as an inlet and an outlet for the chemical solution 40, and the chemical solution 40 is injected and discharged through the opening 12h.

[0058] A concentration display unit 14 that indicates the concentration level of the chemical solution 40 is provided inside the tank 12. The concentration display unit 14 includes a partition 42 that separates a part of the storage area 12g from the other part of the storage area 12g. For example, the partition 42 includes rectangular partition plates 42a and 42b, and is installed at a corner of the storage area 12g (see FIG. 3(C)).

[0059] The partition plate 42a is disposed generally parallel to the rear wall 12d of the tank 12, and one side of the partition plate 42a is connected to the side wall 12e of the tank 12. The partition plate 42b is disposed generally parallel to the side wall 12e of the tank 12, and one side of the partition plate 42b is connected to the rear wall 12d of the tank 12. Furthermore, the other side of the partition plate 42a and the other side of the partition plate 42b are connected to each other, and the partition plates 42a and 42b are disposed in an L-shape in a plan view. By installing the partition 42, a columnar storage space 44 is defined, which is surrounded by the rear wall 12d and the side wall 12e of the tank 12 and the partition plates 42a and 42b.

[0060] The partition 42 also includes a rectangular partition plate 42c that divides the storage space 44 in two in a plan view. For example, the partition plate 42c is disposed approximately perpendicular to the rear wall 12d and partition plate 42a of the tank 12, and approximately parallel to the side wall 12e and partition plate 42b of the tank 12. One side surface of the partition plate 42c is connected to the rear wall 12d of the tank 12, and the other side surface of the partition plate 42c is connected to the partition plate 42a. The partition plate 42c divides the storage space 44 into a columnar storage section (first storage section) 44a and a columnar storage section (second storage section) 44b.

[0061] The heights of the partition plates 42a, 42b, 42c are lower than the height of the storage region 12g (the distance from the upper wall 12a to the bottom wall 12b) (see Figs. 3(A) and 3(B)). The partitions 42 are installed such that gaps are secured between the upper ends of the partition plates 42a, 42b, 42c and the upper wall 12a of the tank 12, and between the lower ends of the partition plates 42a, 42b, 42c and the bottom wall 12b of the tank 12. Therefore, the chemical solution 40 stored in the tank 12 can flow into and out of the storage sections 44a, 44b through the upper and lower ends of the partitions 42.

[0062] There are no limitations on the structure of the partition 42 as long as it is possible to form the storage sections 44a and 44b. For example, the partition 42 may be formed by providing a partition plate inside a hollow columnar member, or by arranging two hollow columnar members side by side.

[0063] In addition, when the partition 42 is composed of the partition plates 42a, 42b, and 42c, the partition plates 42a, 42b, and 42c may each be provided with one or more through holes (not shown) penetrating the partition plates 42a, 42b, and 42c in the thickness direction. This allows the drug solution 40 to flow into and out of the storage parts 44a and 44b through the through holes. In this case, the upper ends of the partition plates 42a, 42b, and 42c may be connected to the upper wall 12a of the tank 12, and the lower ends of the partition plates 42a, 42b, and 42c may be connected to the bottom wall 12b of the tank 12.

[0064] The storage section 44a and the storage section 44b respectively store a float (first float) 46A and a float (second float) 46B on which the buoyancy of the chemical solution 40 stored in the tank 12 acts. A buoyancy according to the concentration (density) of the chemical solution 40 acts on the floats 46A and 46B. Therefore, the floats 46A and 46B move in the storage sections 44a and 44b in a Z-direction according to the concentration (density) of the chemical solution 40. 2 It moves (rises and falls) along the axial direction.

[0065] Here, the density of the float 46A is lower than the density of the float 46B. Therefore, the float 46A is more likely to rise due to the buoyancy of the chemical solution 40 than the float 46B, and is more likely to float in the chemical solution 40. The densities and the relative sizes of the floats 46A and 46B can be adjusted by appropriately setting the material, shape, size, etc. of the floats 46A and 46B.

[0066] The floats 46A and 46B may be configured to have adjustable density. Figure 4(A) is an exploded cross-sectional view showing the float 46A, which has adjustable density. The configuration of the float 46A will be described below, but the float 46B can be configured in the same way as the float 46A.

[0067] The float 46A shown in Fig. 4(A) includes a cylindrical container (main body) 50 with one open end. For example, the container 50 is a cylindrical member made of resin, metal, or the like. A cylindrical storage section (recess) 50b is provided inside the container 50, and opens at a tip end surface (upper surface) 50a of the container 50. The storage section 50b includes a circular bottom surface 50c and an annular inner wall 50d connected to the bottom surface 50c.

[0068] The float 46A also includes a density adjustment member 52 that is inserted into the container 50. The density adjustment member 52 is a columnar member made of resin, metal, or the like, and includes a cylindrical insertion portion 54 that is inserted into the storage portion 50b of the container 50. The insertion portion 54 is formed to have roughly the same diameter as the storage portion 50b of the container 50, and includes a circular tip surface (bottom surface) 54a and an annular side surface (outer peripheral surface) 54b connected to the tip surface 54a.

[0069] The container 50 and the density adjustment member 52 are integrated by inserting the insertion portion 54 of the density adjustment member 52 into the receiving portion 50b of the container 50. In this way, a float 46A whose density is adjustable is formed.

[0070] 4B is a cross-sectional view showing a float 46A with adjustable density. When the density adjustment member 52 is inserted into the container 50 until the tip surface 54a of the insertion portion 54 contacts the bottom surface 50c of the container 50, the density of the float 46A becomes maximum. On the other hand, when the insertion amount of the density adjustment member 52 is adjusted so that the tip surface 54a of the insertion portion 54 does not contact the bottom surface 50c of the container 50, a gap 56 is formed between the bottom surface 50c of the container 50 and the tip surface 54a of the insertion portion 54. As a result, the density of the float 46A becomes lower than when the bottom surface 50c of the container 50 and the tip surface 54a of the insertion portion 54 contact each other (when the gap 56 is not formed).

[0071] Moreover, by raising and lowering the density adjusting member 52 to move it relatively to the container 50, the height H of the gap 56 (the distance between the bottom surface 50c of the container 50 and the tip surface 54a of the insertion part 54) can be set arbitrarily. This allows the volume of the gap 56 to be adjusted, and the density of the float 46A to be adjusted.

[0072] The inner wall 50d of the container 50 and the side surface 54b of the insertion portion 54 may each have a thread groove formed thereon to mesh with each other. In this case, the density adjustment member 52 is rotated to screw the insertion portion 54 into the storage portion 50b, thereby inserting the insertion portion 54 into the storage portion 50b. At this time, the height H of the gap 56 can be adjusted as desired by adjusting the number of times the density adjustment member 52 is rotated.

[0073] Furthermore, a seal member (not shown) that seals the gap 56 may be provided at the lower end of the insertion portion 54 of the density adjustment member 52. For example, a rubber O-ring is wrapped around the side surface 54b of the lower end of the insertion portion 54 as a seal member. This prevents the chemical solution 40 from entering the gap 56 when the float 46A is placed in the chemical solution 40 (see FIGS. 3(A) to 3(C)), and makes it possible to avoid fluctuations in the density of the float 46A.

[0074] The floats 46A, 46B configured as described above are accommodated in the accommodation sections 44a, 44b of the tank 12 as shown in Figs. 3(A) to 3(C). When the chemical solution 40 is poured into the storage area 12g of the tank 12, the chemical solution 40 flows into the accommodation sections 44a, 44b from the upper and lower ends of the partition 42, and the accommodation sections 44a, 44b are filled with the chemical solution 40. This places the floats 46A, 46B in the chemical solution 40. When the chemical solution 40 is discharged from the tank 12, the chemical solution 40 stored in the accommodation sections 44a, 44b flows out from the lower end of the partition 42.

[0075] As shown in Fig. 3(C), the drug solution storage device 10 may include a sensor 48A for detecting the float 46A and a sensor 48B for detecting the float 46B. For example, the sensors 48A and 48B are each composed of an optical sensor capable of detecting the floats 46A and 46B (see Fig. 3(A)) positioned at the lower ends of the storage sections 44a and 44b. The tank 12 is composed of a material that is transmissible to the light (detection light) detected by the sensors 48A and 48B. Therefore, the sensors 48A and 48B can detect the floats 46A and 46B positioned at the lower ends of the storage sections 44a and 44b through the tank 12.

[0076] However, only the area (detection section) of the tank 12 located between the floats 46A, 46B and the sensors 48A, 48B may be made of a material that allows the detection light to pass through. In this case, the detection section functions as a window for detecting the floats 46A, 46B. The sensors 48A, 48B may be provided inside the tank 12 (storage area 12g).

[0077] In this embodiment, an example in which the sensors 48A, 48B for detecting the floats 46A, 46B are provided separately will be described, but instead of the sensors 48A, 48B, a single sensor capable of detecting both the floats 46A, 46B may be provided. The sensors 48A, 48B may also be installed so as to be able to detect the floats 46A, 46B positioned at the upper ends of the storage sections 44a, 44b.

[0078] The concentration display unit 14 configured as described above indicates the concentration level of the chemical solution 40 according to the positions of the floats 46A, 46B. This allows the operator to check whether the concentration of the chemical solution 40 stored in the tank 12 is appropriate or not. Details of the display of the concentration level by the floats 46A, 46B will be described below.

[0079] 5(A) to 5(C) show the difference in behavior of floats 46A, 46B when the concentration of chemical solution 40 is different. The density of floats 46A, 46B is set so that floats 46A, 46B move due to the buoyancy of chemical solution 40 when the concentration of chemical solution 40 is equal to or higher than a predetermined reference value. This makes it possible to check whether the concentration of chemical solution 40 is within a predetermined allowable range based on the positions of floats 46A, 46B.

[0080] Specifically, when the concentration of the chemical solution 40 is equal to or greater than a first reference value, the float 46A moves (rises) due to the buoyancy of the chemical solution 40. When the concentration of the chemical solution 40 exceeds a second reference value that is higher than the first reference value, the float 46B moves (rises) due to the buoyancy of the chemical solution 40. For example, the first reference value is a value corresponding to the lower limit of the allowable range of the concentration of the chemical solution 40, and the second reference value is a value corresponding to the upper limit of the allowable range of the concentration of the chemical solution 40.

[0081] The type of chemical liquid 40 is appropriately selected depending on the contents of the processing in the processing device 2 (see FIG. 1). For example, when supplying a processing liquid to the workpiece 11 and the cutting blade 26 (see FIG. 2), a liquid containing an organic acid and an oxidizing agent can be used as the chemical liquid 40. In this case, the processing liquid containing an organic acid and an oxidizing agent can be supplied to the workpiece 11 and the cutting blade 26.

[0082] When the workpiece 11 is formed with metal (electrodes, terminals, etc.), when the workpiece 11 is cut with the cutting blade 26, the cutting blade 26, which rotates at high speed, comes into contact with the metal and stretches it, which tends to cause whisker-like burrs. However, when a machining fluid containing an organic acid and an oxidizing agent is supplied to the workpiece 11 and the cutting blade 26, the metal is modified by the organic acid and oxidized by the oxidizing agent. This reduces the ductility of the metal, suppresses the generation of burrs, and makes it easier to remove the burrs.

[0083] 5(A) is a cross-sectional view showing the chemical storage device 10 in which a low-concentration chemical solution 40 is stored in the tank 12. When the concentration of the chemical solution 40 stored in the tank 12 is less than a first reference value, both floats 46A, 46B remain submerged and do not rise to the surface. Therefore, the floats 46A, 46B remain in a submerged position (low concentration position) 60A corresponding to the lower end of the accommodation space 44. This causes the concentration display unit 14 to indicate that the concentration of the chemical solution 40 is an abnormal value below the lower limit of the allowable range.

[0084] 5(B) is a cross-sectional view showing the chemical storage device 10 in which a medium concentration chemical solution 40 is stored in the tank 12. When the concentration of the chemical solution 40 stored in the tank 12 is equal to or higher than the first reference value and equal to or lower than the second reference value, the float 46A floats up, and the float 46B remains submerged and does not float up. As a result, the float 46A is positioned at a floating position (high concentration position) 60B corresponding to the upper end of the accommodation space 44, and the float 46B remains at the submerged position 60A. This causes the concentration display unit 14 to display that the concentration of the chemical solution 40 is a normal value within the allowable range.

[0085] 5(C) is a cross-sectional view showing the liquid chemical storage device 10 in which a high-concentration liquid chemical 40 is stored in the tank 12. When the concentration of the liquid chemical 40 stored in the tank 12 exceeds a second reference value, both floats 46A, 46B float and are positioned at floated positions 60B. This causes the concentration display unit 14 to indicate that the concentration of the liquid chemical 40 is an abnormal value that exceeds the upper limit of the allowable range.

[0086] As described above, the concentration display unit 14 indicates the concentration level of the chemical solution 40 in three stages depending on the positions of the floats 46A, 46B. Therefore, an operator can instantly check whether the concentration of the chemical solution 40 is within a predetermined allowable range by simply checking the positions of the floats 46A, 46B. If the concentration of the chemical solution 40 is abnormal, the pump 18 (see FIG. 1) does not operate, and the supply of the chemical solution 40 from the tank 12 to the processing liquid supply path 4 is stopped. This makes it possible to prevent the chemical solution 40 of an inappropriate concentration from being supplied to the processing liquid supply path 4 (see FIG. 1).

[0087] When the chemical solution storage device 10 is configured so that an operator can check the positions of the floats 46A, 46B from outside the tank 12, the tank 12 is made of a transparent body (glass, etc.) that can transmit visible light. Alternatively, only a part of the tank 12 is made of a transparent body (window) so that the positions (sinking position 60A and rising position 60B) where the floats 46A, 46B are positioned can be observed from outside the tank 12.

[0088] However, the positions of the floats 46A, 46B may be automatically detected by the sensors 48A, 48B (see FIG. 3(C)). For example, the sensors 48A, 48B are installed so as to be able to detect the floats 46A, 46B positioned at the sinking position 60A (see FIG. 5(A) to FIG. 5(C)).

[0089] When the floats 46A, 46B are detected by the sensors 48A, 48B, it is determined that the concentration of the chemical solution 40 is below the lower limit. When the float 46A is not detected by the sensor 48A and the float 46B is detected by the sensor 48B, it is determined that the concentration of the chemical solution 40 is within the allowable range. When the floats 46A, 46B are not detected by the sensors 48A, 48B, it is determined that the concentration of the chemical solution 40 exceeds the upper limit. The determination of the concentration level of the chemical solution 40 is performed, for example, by the controller 34 (see FIG. 2) which receives detection signals from the sensors 48A, 48B.

[0090] The sensors 48A, 48B may be installed so as to be able to detect the floats 46A, 46B positioned at the surfaced position 60B (see Figs. 5(A) to 5(C)). Also, a plurality of sensors 48A, 48B may be installed so as to be able to detect both the floats 46A, 46B positioned at the submerged position 60A and the floats 46A, 46B positioned at the surfaced position 60B.

[0091] As described above, the chemical liquid storage device 10 according to this embodiment includes a concentration display unit 14 that indicates the concentration level of the chemical liquid 40 by means of a float 46A that moves due to the buoyancy of the chemical liquid 40 when the concentration of the chemical liquid 40 is equal to or greater than a first reference value, and a float 46B that moves due to the buoyancy of the chemical liquid 40 when the concentration of the chemical liquid 40 exceeds a second reference value. This makes it possible to quickly and easily check whether the concentration of the chemical liquid 40 stored in the tank 12 is within a predetermined range, and prevents a treatment liquid containing a chemical liquid 40 of an inappropriate concentration from being supplied to the treatment device 2.

[0092] In the above embodiment, the concentration display unit 14 is described as having two floats 46A, 46B with different densities, and showing the concentration level of the chemical solution 40 in three stages. However, the concentration display unit 14 may be provided with three or more floats with different densities, and showing the concentration level of the chemical solution 40 in four or more stages. In this case, three or more sensors may be installed to detect three or more floats.

[0093] In the above embodiment, the case has been described in which the liquid medicine storage device 10 includes the concentration display unit 14 provided inside the tank 12 (see Figs. 3(A) to 3(C)). However, the liquid medicine storage device 10 may include a concentration display unit provided outside the tank 12. Below, a configuration example of a concentration display unit that can be installed outside the tank 12 will be described.

[0094] Figures 6(A) to 6(C) show a concentration display unit (concentration display mechanism) 70 which corresponds to a modified example of the concentration display unit 14. Figure 6(A) is a cross-sectional view showing the front side of the concentration display unit 70, Figure 6(B) is a cross-sectional view showing the side side of the concentration display unit 70, and Figure 6(C) is a plan view showing the concentration display unit 70.

[0095] The tank 12 shown in Figures 6(A) to 6(C) is provided with a concentration display unit 70 instead of the concentration display unit 14 (see Figures 3(A) to 3(C)). The concentration display unit 70 includes a pair of accommodation units 72A, 72B that accommodate floats 80A, 80B (described below) (see Figure 6(B)).

[0096] Each of the storage units 72A and 72B includes a storage member 74 that stores the medicinal liquid 40. For example, the storage member 74 is a cylindrical member formed into a hollow cylindrical shape, and is composed of a tube, a pipe, or the like. A storage section 74a that penetrates the center of the storage member 74 in the length direction (height direction) of the storage member 74 is provided inside the storage member 74. The storage section 74a corresponds to a region (space) that stores the medicinal liquid 40, and is open at the upper and lower ends of the storage member 74.

[0097] A connection part 76 that connects the tank 12 and the storage member 74 is connected to the upper end side of the storage member 74. For example, the connection part 76 is a block-shaped member made of metal, resin, or the like, and a flow path 76a through which the chemical solution 40 flows is provided inside the connection part 76. As shown in FIG. 6(A), one end side of the flow path 76a is connected to the upper end side of the storage part 74a of the storage member 74. Meanwhile, the other end side of the flow path 76a is connected to the storage region 12g of the tank 12 via an opening 12i provided in a side wall 12e of the tank 12.

[0098] A connection part 78 that connects the tank 12 and the storage member 74 is connected to the lower end side of the storage member 74. For example, the connection part 78 is a block-shaped member made of metal, resin, or the like, and a flow path 78a through which the chemical solution 40 flows is provided inside the connection part 78. As shown in FIG. 6(A), one end side of the flow path 78a is connected to the lower end side of the storage part 74a of the storage member 74. Meanwhile, the other end side of the flow path 78a is connected to the storage region 12g of the tank 12 via an opening 12j provided in a side wall 12e of the tank 12.

[0099] The storage units 72A and 72B are arranged such that the height direction of the storage member 74 is Z 2 The storage units 72A and 72B are attached to the side surface of the tank 12 along the axial direction. Although Fig. 6(A) shows an example in which the storage units 72A and 72B are connected to the side wall 12e of the tank 12, the storage units 72A and 72B may be connected to the front wall 12c, the rear wall 12d, or the side wall 12f of the tank 12.

[0100] As shown in Fig. 6(B), a float (first float) 80A is accommodated in the storage section 74a of the storage member 74 provided in the storage unit 72A, and a float (second float) 80B is accommodated in the storage section 74a of the storage member 74 provided in the storage unit 72B. The configuration, material, density, etc. of the floats 80A and 80B are similar to those of the above-mentioned floats 46A and 46B (see Figs. 3(A) to 3(C)). Therefore, the density of the float 80A is lower than the density of the float 80B.

[0101] 6(C), the drug solution storage device 10 may include a sensor 82A for detecting the float 80A and a sensor 82B for detecting the float 80B. The functions, types, configurations, etc. of the sensors 82A and 82B are similar to those of the above-mentioned sensors 48A and 48B (see FIG. 3(C)).

[0102] For example, the sensors 82A and 82B are respectively configured with optical sensors capable of detecting the floats 80A and 80B positioned at the lower end of the storage portion 74a of the storage member 74 (see FIG. 6(A)). In this case, the storage member 74 is configured with a material that is transmissible to the light (detection light) detected by the sensors 82A and 82B.

[0103] However, only the area (detection section) of the storage member 74 located between the floats 80A, 80B and the sensors 82A, 82B may be made of a material that allows the detection light to pass through. In this case, the detection section functions as a window for detecting the floats 80A, 80B. The sensors 82A, 82B may be provided inside the storage member 74 (storage section 74a).

[0104] When the liquid medicine 40 is poured into the tank 12 to which the storage member 74 is attached, the liquid medicine 40 stored in the storage region 12g flows into the storage section 74a of the storage member 74 through the opening 12i of the tank 12 and the flow path 76a of the connection section 76. As a result, the liquid medicine 40 fills the storage section 74a in which the floats 80A, 80B are housed, and the concentration display unit 70 indicates the concentration level of the liquid medicine 40 based on the positions of the floats 80A, 80B. When the liquid medicine 40 is discharged from the tank 12, the liquid medicine 40 stored in the storage section 74a of the storage member 74 flows out into the storage region 12g through the flow path 78a of the connection section 78 and the opening 12j of the tank 12.

[0105] 7(A) to 7(C) show the difference in behavior of floats 80A, 80B when the concentration of chemical solution 40 is different. The densities of floats 80A, 80B are set in the same manner as floats 46A, 46B described above (see Figs. 3(A) to 3(C)). Therefore, float 80A moves (rises) due to the buoyancy of chemical solution 40 when the concentration of chemical solution 40 is equal to or higher than a first reference value. Meanwhile, float 80B moves (rises) due to the buoyancy of chemical solution 40 when the concentration of chemical solution 40 exceeds a second reference value that is higher than the first reference value.

[0106] 7(A) is a cross-sectional view showing the concentration display unit 70 in which a low-concentration chemical solution 40 is stored in the storage member 74. When the concentration of the chemical solution 40 stored in the storage section 74a of the storage member 74 is less than the first reference value, both floats 80A, 80B remain submerged and do not rise. Therefore, the floats 80A, 80B remain in a submerged position (low concentration position) 90A corresponding to the lower end of the storage section 74a. This causes the concentration display unit 70 to indicate that the concentration of the chemical solution 40 is an abnormal value below the lower limit of the allowable range.

[0107] 7B is a cross-sectional view showing the concentration display unit 70 in which a medium concentration of the chemical solution 40 is stored in the storage member 74. When the concentration of the chemical solution 40 stored in the storage section 74a of the storage member 74 is equal to or higher than the first reference value and equal to or lower than the second reference value, the float 80A floats up, and the float 80B remains in a submerged state and does not float up. As a result, the float 80A is positioned at a floating position (high concentration position) 90B corresponding to the upper end of the storage section 74a, and the float 80B remains at the submerged position 90A. This causes the concentration display unit 70 to indicate that the concentration of the chemical solution 40 is a normal value within the allowable range.

[0108] 7(C) is a cross-sectional view showing the concentration display unit 70 in which a high concentration of the chemical solution 40 is stored in the storage member 74. When the concentration of the chemical solution 40 stored in the storage section 74a of the storage member 74 exceeds the second reference value, both of the floats 80A and 80B float up and are positioned at the floated position 90B. This causes the concentration display unit 70 to indicate that the concentration of the chemical solution 40 is an abnormal value that exceeds the upper limit of the allowable range.

[0109] In this way, the concentration display unit 70 shows the concentration level of the chemical solution 40 in three stages according to the positions of the floats 80A, 80B. Therefore, the operator can instantly check whether the concentration of the chemical solution 40 is within a predetermined allowable range by simply checking the positions of the floats 80A, 80B.

[0110] When the concentration display unit 70 is configured so that an operator can check the positions of the floats 80A, 80B from outside the storage member 74, the storage member 74 is made of a transparent body (glass, etc.) that can transmit visible light. Alternatively, only a part of the storage member 74 is made of a transparent body (window) so that the positions (sinking position 90A and rising position 90B) where the floats 80A, 80B are positioned can be observed.

[0111] However, the positions of the floats 80A, 80B may be automatically detected by sensors 82A, 82B (see FIG. 6(C)). For example, the sensors 82A, 82B are installed so as to be able to detect the floats 80A, 80B positioned at the sinking position 90A (see FIG. 7(A) to FIG. 7(C)).

[0112] When the floats 80A, 80B are detected by the sensors 82A, 82B, it is determined that the concentration of the chemical solution 40 is below the lower limit. When the float 80A is not detected by the sensor 82A and the float 80B is detected by the sensor 82B, it is determined that the concentration of the chemical solution 40 is within the allowable range. When the floats 80A, 80B are not detected by the sensors 82A, 82B, it is determined that the concentration of the chemical solution 40 exceeds the upper limit.

[0113] The sensors 82A, 82B may be installed so as to be able to detect the floats 80A, 80B positioned at the surfaced position 90B (see Figs. 7(A) to 7(C)). Also, a plurality of sensors 82A, 82B may be installed so as to be able to detect both the floats 80A, 80B positioned at the submerged position 90A and the floats 80A, 80B positioned at the surfaced position 90B.

[0114] Furthermore, although the above describes an example in which the concentration display unit 70 includes two sets of storage units 72A, 72B, the concentration display unit 70 may include three or more sets of storage units. In this case, floats with different densities are stored in the storage members 74 of the three or more sets of storage units, and the concentration level of the chemical solution 40 is displayed in four or more stages. Also, three or more sensors may be installed to detect three or more floats.

[0115] In addition, the structures, methods, etc. according to the present embodiment can be modified as appropriate without departing from the scope of the object of the present invention. [Explanation of symbols]

[0116] 11 Workpiece 11a surface 11b Back side 13th Street (Planned division line) 15 Devices 17 Frame 17a aperture 19 sheets 2 Processing equipment 4 Processing liquid supply path 6 Processing liquid supply source 10. Chemical storage device (chemical supply device) 12 Tank (container) 12a Upper wall 12b Bottom wall 12c front wall 12d back wall 12e,12f side wall 12g Storage area (storage space) 12h opening 12i,12j opening 14 Concentration display unit (concentration display mechanism) 16 Chemical supply path 18 Pump 20 Chuck table (holding table) 22 Processing unit (cutting unit) 24 Housing 26 Cutting blade 28 Blade Cover 30 Machining fluid supply section 32 Nozzles 34 Controller (control unit, control section, control device) 40 Chemical Solution 42 Partition 42a, 42b, 42c Partition plate 44 Storage Space 44a, 44b Storage section 46A,46B Float 48A, 48B Sensor 50 Container (main body) 50a Tip surface (top surface) 50b Storage section (recess) 50c bottom 50d interior wall 52 Density adjustment member 54 Insertion section 54a Tip surface (bottom surface) 54b Side (outer surface) 56 void 60A Settling position (low concentration position) 60B Floating position (high concentration position) 70 Concentration display unit (concentration display mechanism) 72A, 72B Containment Unit 74 Storage material 74a Storage section 76 Connection 76a Flow path 78 Connection 78a Flow path 80A,80B float 82A, 82B Sensor 90A Settling position (low concentration position) 90B Floating position (high concentration position)

Claims

1. A drug solution storage device for storing a drug solution, A tank for storing the chemical solution; a concentration display unit for indicating the concentration level of the chemical solution; The concentration display unit includes a first float and a second float on which the buoyancy of the chemical solution acts, the first float is moved by the buoyancy of the chemical solution when the concentration of the chemical solution is equal to or greater than a first reference value; The second float moves due to the buoyancy of the chemical solution when the concentration of the chemical solution exceeds a second reference value that is higher than the first reference value.

2. 2. The drug solution storage device according to claim 1, wherein the concentration display unit is provided inside the tank.

3. 2. The liquid medicine storage device according to claim 1, wherein the concentration display unit is provided on the outside of the tank.

4. 4. The chemical liquid storage device according to claim 1, wherein the density of the first float is lower than the density of the second float.

5. The first float and the second float each include a cylindrical container having an open end and a density adjustment member inserted into the container; A drug solution storage device as described in any one of claims 1 to 3, characterized in that the density of the first float and the second float can be adjusted by moving the density adjustment member relative to the container to adjust the volume of the gap between the container and the density adjustment member.

6. 4. The drug solution storage device according to claim 1, further comprising a sensor for detecting the first float and the second float.

7. 4. The chemical storage device according to claim 1, wherein the chemical is added to a processing liquid supplied to a processing device.

8. a chemical supply path connected to a processing liquid supply path through which the processing liquid to be supplied to the processing device flows; 8. The chemical liquid storage device according to claim 7, further comprising: a pump that supplies the chemical liquid stored in the tank to the chemical liquid supply path.

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