Linear motor, positioning device, processor, and device manufacturing method

Abstract

To provide a linear motor or the like capable of reducing an adverse effect at gap parts of a plurality of coil units.SOLUTION: A linear motor comprises: a mover provided with a magnetic circuit; and a stator 3 that comprises a plurality of coils 4 arranged in a moving direction of the mover and where a magnetic linear power along the moving direction is exerted on the magnetic circuit, according to a drive current made to flow through the plurality of coils 4. The stator 3 is divided into a speed change area in which a speed change of the mover is relatively large, and a speed stability area in which the speed change of the mover is relatively small. The coils 4 are grouped into a plurality of coil units 2 less than the plurality of coils 4, and provided; and gap parts 23 in first coil units 21 arranged inside the speed change area, and a majority of second coil units 22 arranged inside the speed stability area are arranged inside the speed change area.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present disclosure relates to linear motors and the like. [Background technology]

[0002] Patent Document 1 discloses a linear motor in which a plurality of coil units (armature blocks) including a group of three-phase coils that generate magnetic linear power in response to a three-phase AC current are arranged along the direction of movement, with a gap provided between adjacent coil units. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2000-278931 A Summary of the Invention [Problem to be solved by the invention]

[0004] According to Patent Document 1, each coil unit is arranged so that the gap between them corresponds to an electrical angle that is an integer multiple of the magnetic pole pitch divided by the number of armature blocks. However, there is a possibility that an error may occur when arranging each coil unit. In addition, there is a risk that ripples, which are fluctuations in thrust and speed, may become large in the gaps between each coil unit.

[0005] The present disclosure has been made in consideration of these circumstances, and has an object to provide a linear motor etc. that can reduce the adverse effects of gaps between multiple coil units. [Means for solving the problem]

[0006] In order to solve the above problems, a linear motor according to one embodiment of the present disclosure is a linear motor comprising a mover having a magnetic circuit, and a stator having a plurality of coils arranged along the movement direction of the mover, and which exerts a magnetic linear force along the movement direction on the magnetic circuit in response to a driving current passed through the plurality of coils, wherein the stator is divided into a speed change region where the change in speed of the mover is relatively large, and a speed stable region where the change in speed of the mover is relatively small, and the plurality of coils are divided into a first coil unit arranged in the speed change region, and a second coil unit the majority of which is arranged in the speed stable region.

[0007] In this embodiment, multiple coils are provided separately in a first coil unit on the speed change region side and a second coil unit on the speed stable region side. In the speed change region, the change in the speed of the mover is relatively large (for example, the mover is frequently accelerated and decelerated), and the required driving accuracy (position accuracy and speed accuracy) is originally not high, so even if there is a positioning error or a large ripple in each coil unit in the gap between the first coil unit and the second coil unit, there is little practical adverse effect.

[0008] Another aspect of the present disclosure is a positioning device, the device being powered by the linear motor described above.

[0009] Yet another aspect of the present disclosure is a processing apparatus that processes an object to be processed that has been positioned by the positioning apparatus described above.

[0010] Yet another aspect of the present disclosure is a device manufacturing method, in which a device is manufactured by processing a workpiece using the above-mentioned processing apparatus.

[0011] Any combination of the above components, or any conversion of these components into a method, device, system, recording medium, computer program, or the like, is also encompassed by the present disclosure. Effect of the Invention

[0012] According to the present disclosure, the adverse effects of gaps between multiple coil units can be reduced. [Brief description of the drawings]

[0013] [Figure 1] FIG. 2 is a plan view showing a schematic diagram of a stage device. [Diagram 2] FIG. 2 is a perspective view showing an armature of a linear motor. [Diagram 3] FIG. 11 is a plan view showing a schematic diagram of another example of the arrangement of two coil arrays. [Figure 4] 4 is a schematic cross-sectional view of a mover and an armature as viewed in the direction in which the mover moves. FIG. [Diagram 5] FIG. 2 is a plan view showing a schematic diagram of a plurality of coil units divided and arranged on a stator. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] In the following, a form for carrying out the present disclosure (hereinafter also referred to as an embodiment) will be described in detail with reference to the drawings. In the description and / or drawings, identical or equivalent components, members, processes, etc. will be given the same reference numerals, and duplicated descriptions will be omitted. The scale and shape of each part shown in the drawings are set for convenience in order to simplify the description, and are not to be interpreted as being limiting unless otherwise specified. The embodiment is an example, and does not limit the scope of the present disclosure in any way. All features and their combinations presented in the embodiment are not necessarily essential to the present disclosure. The embodiment is presented for convenience, decomposed into components for each function and / or each functional group that realizes it. However, one component in the embodiment may actually be realized by a combination of multiple components as separate entities, and multiple components in the embodiment may actually be realized by one component as an integrated entity.

[0015] FIG. 1 is a plan view showing a stage device 100 as a positioning device or a driving device to which the linear motor according to the present disclosure can be applied. The stage device 100 is an XY stage that positions a table as a driven body on which a workpiece such as a semiconductor wafer is placed in the X-axis direction (left-right direction in FIG. 1) and the Y-axis direction (up-down direction in FIG. 1). The stage device 100 includes a pair of Y stages 120 that extend in the Y-axis direction and drive the table in the Y-axis direction, an X stage 130 that extends in the X-axis direction and drives the table in the X-axis direction and is integrated with the table, and a base 140. The pair of Y stages 120 are connected to both ends of the X stage 130 in the X-axis direction via sliders 124. The Y stage 120 and the X stage 130 form an H shape when viewed from above.

[0016] Among the components of the stage device 100, at least the table, the Y stage 120, and the X stage 130 may be housed in a vacuum chamber whose interior is kept in a vacuum state. In this specification, "vacuum" refers to the state of a space filled with gas at a pressure lower than normal atmospheric pressure. Depending on the pressure range, vacuum can be classified into low vacuum (100 kPa to 100 Pa), medium vacuum (100 Pa to 0.1 Pa), high vacuum (0.1 Pa to 10 -5 Pa), ultra-high vacuum (10 -5 Pa~10 -8 Pa), extremely high vacuum (10 -8 The stage device 100 according to this embodiment may be used in a vacuum environment of any of the above categories. Also, the stage device 100 according to this embodiment may be used in a non-vacuum environment that does not fall into any of the above categories.

[0017] Linear motors 2X and 2Y, which will be described later, are provided on the X-stage 130 and the Y-stage 120, respectively. The magnetic linear power in the X-axis or Y-axis direction generated by each of the linear motors 2X and 2Y linearly drives a table, which serves as a driven body, in the X-axis or Y-axis direction.

[0018] The linear motor 2X, which is responsible for linear drive in the X-axis direction, includes a stator 3 that forms a track in the X-axis direction, and a mover 20 that can move in the X-axis direction along the stator 3. A table, which serves as a driven body, is fixed to this mover 20 and moves integrally therewith. A pair of linear motors 2Y, which is responsible for linear drive in the Y-axis direction, includes a stator 3 that forms a track in the Y-axis direction, and a mover 20 that can move in the Y-axis direction along the stator 3. A slider 124 is fixed to this mover 20 and moves integrally therewith.

[0019] Here, since the pair of sliders 124 are connected to both ends of the armature 2 of the linear motor 2X, the pair of linear motors 2Y linearly drive the armature 2 of the linear motor 2X in the Y-axis direction together with the pair of sliders 124. And, since there is a table on the armature 2 (track) of the linear motor 2X, the pair of linear motors 2Y linearly drive the table in the Y-axis direction.

[0020] As described above, the stage device 100 (positioning device using a linear motor as a power source) according to this embodiment, which can realize highly accurate positioning or driving regardless of whether it is in a vacuum environment or a non-vacuum environment, is suitable for applications in which a table on which a semiconductor wafer or the like as a processing object is placed is positioned or driven as a driven object in semiconductor manufacturing equipment such as exposure equipment, ion implantation equipment, heat treatment equipment, ashing equipment, sputtering equipment, dicing equipment, inspection equipment, cleaning equipment, and device manufacturing equipment such as FPD (Flat Panel Display) manufacturing equipment. Note that the processing equipment to which the stage device 100 according to this embodiment can be applied may be any device that positions any processing object for processing by the stage device 100 or positioning device, and may be, for example, any manufacturing equipment, any processing equipment (e.g., machine tool), or any inspection equipment.

[0021] 2 is a perspective view showing the armatures 2 of linear motors 2X and 2Y provided on the X-stage 130 and the Y-stage 120, respectively. The armatures 2 in this embodiment are provided on a stator 3 (FIG. 1) that forms tracks in the X-axis and Y-axis directions. Although not shown in this figure, a field magnet or a magnetic circuit such as a permanent magnet that magnetically interacts with the armature 2 formed of an electromagnet is provided on the mover 20. In other words, the linear motors 2X and 2Y according to this embodiment are of the moving magnet type in which a field magnet is provided on the mover 20.

[0022] The armature 2 is a long, approximately rectangular plate, and coil arrays each consisting of a plurality of coils 4 are formed on both its first surface side (e.g., the rear side of the armature 2 in FIG. 2) and its second surface side (e.g., the front side of the armature 2 in FIG. 2). Each coil array includes a plurality of coils 4 arranged along the longitudinal direction of the armature 2 (approximately the left-right direction in FIG. 2). In the example of FIG. 2, each coil array includes 12 coils 4, and therefore, when three-phase AC is applied to each coil array, the 12 coils 4 are divided into four sets of three-phase coils. The armature 2 in which a plurality of coils 4 are grouped and provided integrally in this manner is also referred to as a coil unit 2 below.

[0023] The coil groups provided on the first and second surfaces of the armature 2 face a mover 20 (FIG. 1) having a magnetic circuit or field magnet such as a permanent magnet. Each coil group through which a driving current such as three-phase AC flows exerts linear power on the magnetic circuit facing that coil group and / or on that coil group itself. The direction of this linear power is approximately the same as the arrangement direction of each coil group (i.e., the longitudinal direction of the armature 2 or approximately the left-right direction in FIG. 2), and the field magnet (mover 20) and the armature 2 (stator 3) move linearly relative to each other in that direction.

[0024] Also, the magnetic circuits or fields in the mover 20 facing the coil arrays on the first and second surfaces of the armature 2 may be physically connected to each other or formed integrally, so that the magnetic circuits on both sides (i.e., the entire mover 20) are driven integrally by the coil arrays on both sides of the armature 2. In this case, approximately the same drive current may be applied to each coil 4 on the first surface side of the armature 2 and each coil 4 on the second surface side located approximately behind it, or, as will be described later with reference to Figures 3 and 5, when the coil arrays on the first and second surfaces of the armature 2 are arranged offset from each other along the movement direction, an appropriate drive current according to the arrangement may be applied to each coil array.

[0025] Between the coil array on the first surface side and the coil array on the second surface side of the armature 2, there is interposed a cooling member 10 for cooling the coils 4 of the armature 2. The cooling member 10 is a long, substantially rectangular plate, and is arranged so that one end face or an inner end face of each of the coil arrays is in contact with both the first surface and the second surface. The cooling member 10 includes a substantially rectangular cooling plate 12 supporting each of the coil arrays on each surface, an inlet portion 14 provided at one end of the cooling plate 12 in the arrangement direction of the coils 4, and an outlet portion 16 provided at the other end of the cooling plate 12 in the arrangement direction of the coils 4. The inlet portion 14 and the outlet portion 16 may be reversed (i.e., the flow direction of the refrigerant described later may be reversed, and the inlet portion 14 may function as the outlet portion and the outlet portion 16 may function as the inlet portion).

[0026] Inlet section 14 is provided at a position deviated from the arrangement direction of coil 4, specifically, above coil 4 at one end of the coil array (the right end in FIG. 2). In this specification, terms such as "upper" and "lower" are used to conveniently indicate the relative positional relationship between the coil array or coil 4 and inlet section 14, etc., along the drawings, and do not mean upper or lower in the vertical direction or the direction of gravity. In the following, unless otherwise specified, terms indicating directions such as "upper", "lower", "left", and "right" mean relative directions based on the coil array or coil 4 shown in each drawing.

[0027] An inlet 14a is provided at the top of the inlet section 14, through which a refrigerant such as cooling water flows in to cool the multiple coils 4. Inside the cooling member 10 (particularly the flat cooling plate 12), a flow path structure (not shown) of an arbitrary shape is formed to guide the refrigerant that flows in from the inlet 14a to the following outlet 16a while efficiently cooling each coil 4. The outlet section 16, like the inlet section 14, is provided at a position deviated from the arrangement direction of the coils 4, specifically, above the coil 4 at the other end (left end in FIG. 2) of the coil array. An outlet 16a is provided at the top of the outlet section 16, through which the refrigerant that flows in from the inlet 14a and passes through the flow path structure in the cooling member 10 flows out.

[0028] As described above, the refrigerant flowing through the flow path structure in the cooling member 10 simultaneously cools two coil arrays arranged so as to be in contact with both sides of the flat cooling plate 12. Note that the coil array may be provided on only one side of the flat cooling plate 12. In this case, the refrigerant flowing through the flow path structure in the cooling member 10 cools one coil array arranged so as to be in contact with one side of the flat cooling plate 12.

[0029] FIG. 3 is a plan view showing a schematic diagram of another arrangement example of two coil arrays. In each of the upper and lower coil arrays in this figure, the U-phase coil 4U, the V-phase coil 4V, and the W-phase coil 4W are periodically arranged along the moving direction (the left-right direction in FIG. 3), except for a gap 23 (in the example of this figure, a portion where the U-phase coil 4U can be provided in the lower coil array) described later with reference to FIG. 5. Furthermore, in the illustrated example, the upper and lower coil arrays are arranged to be shifted from each other along the moving direction. That is, the positions of the U-phase coil 4U, the V-phase coil 4V, and the W-phase coil 4W in the upper coil array are different from the positions of the U-phase coil 4U, the V-phase coil 4V, and the W-phase coil 4W in the lower coil array. As a result, the phases of the three-phase AC currents flowing through the upper and lower coil arrays are shifted from each other. It is known that the mover 20 can be driven efficiently by an arrangement of the coils 4 that brings about such a phase shift. As described above, the permanent magnets 6 in the mover 20 (not shown) may be arranged such that the magnetic poles of the pair of permanent magnets 6 facing each other in the vertical direction in FIG. 3 are different from each other.

[0030] 4 is a schematic cross-sectional view of the mover 20 (field magnet) and the armature 2 when viewed in the direction of movement of the mover 20 (or when viewed in the direction of arrangement of the coil 4). As illustrated in this figure, in a linear motor or an armature 2 used particularly in a vacuum environment, the cooling member 10 and the coil 4 are molded with an insulating resin material 5 (molding resin) such as epoxy resin so that the refrigerant flowing through the flow path structure in the cooling member 10 (cooling plate 12 is shown in this figure) and particles that may scatter from the heat-generating coil 4 and the like do not contaminate the vacuum environment.

[0031] Furthermore, a base 51 for mounting the coil unit 2 on a stator 3 or the like is joined to the bottom of the coil unit 2 (armature 2) including the cooling member 10 and the coil 4 thus sealed with the resin material 5. Although not shown, the inflow section 14 and / or the outflow section 16 shown in Fig. 2 may be provided on the side of the base 51 so as not to interfere with the base 51 (in this case, the up-down directions of Figs. 2 and 4 are reversed).

[0032] As shown diagrammatically in Fig. 4, the coils 4 are arranged in two rows (the left row and the right row in Fig. 4). A mover 20 having a generally U-shaped cross section is provided so as to cover from above the portion of the armature 2 molded with the resin material 5. A pair of permanent magnets 6 constituting a magnetic circuit are provided in the mover 20 as a field magnet so as to face the left and right coil rows of the armature 2, respectively. Here, it is preferable that the magnetic poles of the pair of permanent magnets 6 facing each other across the armature 2 (the magnetic poles facing the coils 4) are different from each other.

[0033] That is, in the cross section as shown in the figure, if the magnetic pole on the right side face of the left permanent magnet 6 is an N pole, then it is preferable that the magnetic pole on the left side face of the right permanent magnet 6 is an S pole, and if the magnetic pole on the right side face of the left permanent magnet 6 is an S pole, then it is preferable that the magnetic pole on the left side face of the right permanent magnet 6 is an N pole. Here, the magnetic poles of the pair of permanent magnets 6 change along the movement direction (the direction perpendicular to the paper surface in FIG. 4) (for example, N pole / Pairs of permanent magnets 6 with south poles and pairs of permanent magnets 6 with south poles and north poles are arranged alternately along the direction of movement.

[0034] As described above, the coil unit 2 that can be used in a vacuum environment is limited in length along the direction of movement because molding with a resin material 5 and special metal processing are required for a case or shell (not shown) for vacuum compatibility. For this reason, it may be difficult to cover the entire length of the stator 3 (the track of the mover 20) with only one coil unit 2. In such a case, the entire length of the stator 3 (the track of the mover 20) must be covered by arranging multiple coil units 2 along the direction of movement. However, when arranging multiple coil units 2 on the stator 3, there is a possibility that an error will occur. In addition, there is a risk that ripples, which are fluctuations in thrust and speed, will become large in the gaps between the coil units 2.

[0035] Therefore, in this embodiment, a linear motor capable of reducing the adverse effects of the gaps between the multiple coil units 2 is proposed.

[0036] Fig. 5 is a plan view showing a schematic diagram of a plurality of coil units 2 divided and arranged on a stator 3. This figure is a diagram seen from above in Fig. 4, and shows a cross section including the coil 4. In this figure, the mover 20 and the cooling plate 12 of the cooling member 10 shown in Fig. 4 are omitted.

[0037] 5, the coil unit 2 includes two relatively short first coil units 21 provided at both ends of the stator 3 (the track of the mover 20) and one relatively long second coil unit 22 provided in the center or non-end of the stator 3 (the track of the mover 20). The number of first coil units 21 at each end and the number of second coil units 22 provided in the center or non-end may be multiple. However, even in this case, it is preferable that the length of one first coil unit 21 along the movement direction (the left-right direction in FIG. 5) is shorter than the length of one second coil unit 22 along the movement direction.

[0038] As in the illustrated example, when the number of coils 4 per unit length of each coil unit 2 is substantially the same, it is preferable that the number of coils 4 included in one first coil unit 21 (six in the example of FIG. 5) is less than the number of coils 4 included in one second coil unit 22 (13 in the example of FIG. 5). In this way, in this embodiment, it is preferable that the length along the movement direction of each coil unit 2 and the number of coils 4 included in each coil unit 2 are different between the end (first coil unit 21) and non-end (second coil unit 22) of the stator 3. As described above, in this embodiment, a plurality of coils 4 (25 in the example of FIG. 5) are grouped into a plurality of coil units 2 (three in the example of FIG. 5) that is less than the plurality of coils 4.

[0039] In the illustrated example, two coil arrays, an upper one and an lower one, are provided in each coil unit 2. In each coil array, except for the gap 23 described later, the U-phase coil 4U, the V-phase coil 4V, and the W-phase coil 4W are periodically arranged along the moving direction. Furthermore, in the illustrated example, the upper and lower coil arrays are arranged to be shifted from each other along the moving direction. That is, the positions of the U-phase coil 4U, the V-phase coil 4V, and the W-phase coil 4W in the upper coil array are different from the positions of the U-phase coil 4U, the V-phase coil 4V, and the W-phase coil 4W in the lower coil array. As a result, the phases of the three-phase AC currents flowing through the upper and lower coil arrays are shifted from each other. It is known that the mover 20 can be efficiently driven by the arrangement of the coils 4 that brings about such a phase shift. Note that the permanent magnets 6 in the mover 20 (not shown) may be arranged such that the magnetic poles of a pair of permanent magnets 6 facing each other in the vertical direction in FIG. 5 are different from each other, as described above.

[0040] However, the present disclosure is not limited to the arrangement of the coils 4 as shown in Fig. 5, and for example, the upper and lower coil arrays may be arranged without shifting from each other along the movement direction as shown in Fig. 2. Also, the number of coil arrays may be one, or three or more.

[0041] The mover 20 (not shown) is driven between both ends (the left end and the right end in FIG. 5) of the stator 3 (orbit) by a plurality of coil units 2. The mover 20 is driven in any manner on the stator 3, but below, a typical scan operation in the stage device 100 as shown in FIG. 1 is exemplified. In the scan operation, for example, the X-stage 130 reciprocates between both ends to sequentially process each point of a workpiece such as a semiconductor wafer placed on a table in the stage device 100. The Y-stage 120 drives a small distance while the X-stage 130 is at each end, and gradually shifts the Y position where the reciprocating operation by the X-stage 130 is performed.

[0042] In this example, the stator 3 in the X-stage 130, which performs continuous reciprocating motion, is divided into end regions where the mover 20 is frequently and suddenly accelerated and decelerated, and a non-end region or a central region where the mover 20 is typically driven at a constant speed for sequential processing of each point of the workpiece. In other words, as shown diagrammatically in Fig. 5, the two end regions including each end of the stator 3 are speed change regions where the change in speed of the mover 20 is relatively large, and the central region sandwiched between the two end regions of the stator 3 is a stable speed region where the change in speed of the mover 20 is relatively small.

[0043] The speed change region may be understood as a region in which, during normal operations such as scanning operations, the absolute value of the acceleration command or speed change command (acceleration command or deceleration command) for the mover 20 (or the absolute value of the measured acceleration of the mover 20) is expected to be equal to or greater than a predetermined reference value (e.g., a positive value close to zero), and the speed stability region may be understood as a region in which, during normal operations such as scanning operations, the absolute value of the acceleration command or speed change command for the mover 20 (or the absolute value of the measured acceleration of the mover 20) is expected to remain below the reference value (typically, zero).

[0044] In this embodiment, the lengths and arrangements of the first coil unit 21, which mainly covers the speed change region, and the second coil unit 22, which mainly covers the speed stable region, are determined according to the arrangement of the speed change region and the speed stable region as described above. For example, the entire first coil unit 21 is arranged within the speed change region. The main part of the second coil unit 22, which is the non-end or central part, is arranged within the speed stable region, and both ends are arranged within the speed change region. The main part of the second coil unit 22 arranged within the speed stable region accounts for more than half (preferably 65% ​​or more, more preferably 80% or more) of the total length of the second coil unit 22 in the moving direction.

[0045] It is preferable that the speed stable region is covered by one second coil unit 22. However, if the total length of the speed stable region is longer than the maximum length of the second coil unit 22 that can be manufactured, the speed stable region may be covered by multiple second coil units 22. In this case, it is preferable that the length of each second coil unit 22 along the movement direction is longer than the length of each first coil unit 21 along the movement direction.

[0046] As a result of the above-mentioned arrangement, the gap 23 of the first coil unit 21, the entirety of which is located within the speed change region, and the second coil unit 22, the majority of which is located within the speed stable region, are located within the speed change region. In the speed change region, as described above, the change in speed of the mover 20 is relatively large (for example, acceleration and deceleration due to the reciprocating or reversing motion of the mover 20 is frequently performed), and the required driving accuracy (position accuracy and speed accuracy) is originally not high, so even if there is an arrangement error or large ripples of the coil unit 2 in the gap 23, there is little adverse effect in practice.

[0047] On the other hand, in the stable speed region where the mover 20 is typically driven at a constant speed for sequential processing of each point on the workpiece, the gap 23 between the first coil unit 21 and the second coil unit 22 that causes ripples does not exist, and therefore the required high driving precision can be fully satisfied.

[0048] In the arrangement of two coil arrays with a phase difference as shown in Fig. 5, in each coil array configured across the first coil unit 21 and the second coil unit 22, a gap 23 may be arranged at a location where the coil 4 of each phase should be arranged. In such a case, as shown in the figure, the coil 4 that should have been arranged in the gap 23 of the first coil unit 21 and the second coil unit 22 is omitted. Specifically, in the gap 23 on the left side in Fig. 5, the U-phase coil 4U that should have been arranged in the upper coil array is omitted, and in the gap 23 on the right side in Fig. 5, the V-phase coil 4V that should have been arranged in the upper coil array is omitted. Omission of some of the coils 4 in the gap 23 in this way may lead to an increase in ripples, but this does not pose a major problem in the speed change region where the required driving accuracy is not originally high as described above.

[0049] Typically, in a stable speed region where constant speed driving is performed, the required thrust is often smaller than in a speed change region accompanied by acceleration / deceleration where a large thrust is required. Therefore, in order to generate only the minimum required thrust, a "thinning-out drive" may be performed in which no drive current is passed to some of the coils 4 in the stable speed region of the second coil unit 22. In addition, in order to make the second coil unit 22 have a lower thrust than the first coil unit 21, the number of coils 4 per unit length provided in the second coil unit 22 may be made smaller than the number of coils 4 per unit length provided in the first coil unit 21.

[0050] The present disclosure has been described above based on the embodiments. Various modifications are possible to the combinations of the components and processes in the exemplary embodiments, and it will be obvious to those skilled in the art that such modifications are included within the scope of the present disclosure.

[0051] 5, since the mover 20 (not shown) is driven to reciprocate between both ends of the stator 3, both end regions are set as speed change regions and the central region is set as a stable speed region, but the arrangement of the speed change regions and the stable speed regions in the stator 3 is arbitrary and can be freely set according to an acceleration command or a speed change command given to the mover 20. For example, when an acceleration command or a speed change command whose absolute value is equal to or greater than a predetermined reference value is given only in a specific region in the stator 3, the specific region is set as a speed change region, and the other regions are set as stable speed regions.

[0052] The configuration, action, and function of each device and method described in the embodiments can be realized by hardware resources or software resources, or by the cooperation of hardware resources and software resources. For example, a processor, ROM, RAM, and various integrated circuits can be used as hardware resources. For example, programs such as an operating system and applications can be used as software resources. [Explanation of symbols]

[0053] 2 coil unit, 2X linear motor, 2Y linear motor, 3 stator, 4 coil, 6 permanent magnet, 10 cooling member, 20 mover, 21 first coil unit, 22 second coil unit, 23 gap, 100 stage device, 120 Y stage, 130 X stage.

Claims

1. a mover having a magnetic circuit; a stator including a plurality of coils arranged along a moving direction of the mover, the stator applying a magnetic linear force along the moving direction to the magnetic circuit in response to a driving current flowing through the plurality of coils; A linear motor comprising: the stator is divided into a speed change region in which the change in the speed of the mover is relatively large, and a speed stable region in which the change in the speed of the mover is relatively small, The plurality of coils are divided into a first coil unit arranged in the speed change region and a second coil unit, the majority of which is arranged in the speed stable region. Linear motor.

2. The linear motor according to claim 1 , wherein a gap between the first coil unit and the second coil unit is disposed within the speed change region.

3. The linear motor according to claim 2 , wherein a length of the first coil unit along the direction of movement is shorter than a length of the second coil unit along the direction of movement.

4. The linear motor according to claim 3 , wherein the stable speed region is covered by one of the second coil units.

5. The mover is driven between both ends of the stator, the speed change region is a two end region including each end of the stator; The speed stable region is a central region sandwiched between the two end regions.

5. A linear motor according to claim 2.

6. The coils are arranged in two rows, the magnetic circuits are provided to face the two coil arrays, the two coil arrays are arranged to be shifted from each other along the moving direction; 5. A linear motor according to claim 2.

7. 7. The linear motor according to claim 6, wherein in each of the coil arrays that spans the first coil unit and the second coil unit, the coils in the gaps of the first coil unit and the second coil unit are omitted.

8. A positioning device using the linear motor according to any one of claims 1 to 4 as a power source.

9. A processing apparatus for processing a workpiece positioned by the positioning apparatus according to claim 8.

10. A device manufacturing method, comprising: processing the workpiece by the processing apparatus according to claim 9 ;

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