Moving route generation method of robot and moving route generation device of robot

Abstract

To provide a moving route generation method of a robot in which a moving route of the robot can be generated in an arrangement area by arbitrarily combining data of the robot with data of the arrangement area.SOLUTION: A moving route generation method of a substrate transfer robot 10 reads transfer robot CAD data CD1 that is computer support design data of the substrate transfer robot 10 and arrangement area CAD data CD2 that is computer support design data of the arrangement area to generate a moving route OP in the arrangement area 20 of the substrate transfer robot 10 where the substrate transfer robot 10 and the substrate W are arranged.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present disclosure relates to a robot movement path generating method and a robot movement path generating device. [Background technology]

[0002] Conventionally, a robot trajectory generation method is known that derives a motion path of a robot based on a predetermined condition. For example, Patent Document 1 discloses a robot trajectory generation method that derives a motion path of a robot so that the robot arm does not interfere with other robot arms or obstacles. In the robot trajectory generation method of Patent Document 1, a robot trajectory generation program for deriving a motion path of a robot based on a predetermined condition is installed in a calculation processing unit. Then, the calculation processing unit derives the motion path of the robot based on the predetermined condition. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-193975 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the robot trajectory generation method described in the above Patent Document 1, a robot trajectory generation program for deriving the robot's motion path based on a predetermined condition is installed in a calculation processing unit, and the calculation processing unit derives the robot's motion path based on the predetermined condition. Therefore, the robot data used to derive the motion path and the data of the placement area in which the robot is placed cannot be arbitrarily combined. For this reason, there is a demand for a robot motion path generation method and a robot motion path generation device that can arbitrarily combine the robot data and the placement area data to derive the motion path in the robot placement area.

[0005] This disclosure has been made to solve the problems described above, and one objective of this disclosure is to provide a robot movement path generation method and a robot movement path generation device that are capable of deriving a movement path in a robot placement area by arbitrarily combining robot data and placement area data. [Means for solving the problem]

[0006] In order to achieve the above object, a method for generating a robot movement path according to a first aspect of this disclosure includes simulating and deriving a movement path of a robot including an end effector that holds a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other in a placement area in which the robot and the workpiece are placed based on predetermined conditions; reading robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, which are used to derive the movement path; and displaying a virtual image including the robot and the placement area on a display unit based on integrated data that integrates the loaded robot CAD data and placement area CAD data.

[0007] In the robot motion path generation method according to the first aspect of the disclosure, as described above, robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, used to derive the motion path of the robot in the placement area where the robot and the workpiece are placed, are read. This allows the user to read in any combination of the robot CAD data and placement area CAD data used when deriving the motion path of the robot in the placement area. As a result, the motion path of the robot in the placement area can be derived by arbitrarily combining the data of the robot and the data of the placement area. Also, in the robot motion path generation method according to the first aspect, as described above, a virtual image including the robot and the placement area is displayed on the display unit based on integrated data obtained by integrating the loaded robot CAD data and the placement area CAD data. This allows the user to easily consider the predetermined conditions when deriving the motion path of the robot in the placement area by viewing the virtual image including the robot and the placement area displayed on the display unit.

[0008] In addition, in order to achieve the above object, a robot movement path generation device according to a second aspect of this disclosure includes a display unit, and a control unit that simulates and derives a movement path of a robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed, based on predetermined conditions, reads robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, used to derive the movement path, and displays a virtual image including the robot and the placement area on the display unit based on integrated data obtained by integrating the read robot CAD data and placement area CAD data.

[0009] The robot motion path generating device according to the second aspect of the disclosure includes a control unit that reads robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, used to derive the motion path of the robot in the placement area where the robot and the workpiece are placed, as described above. As a result, similar to the robot motion path generating method according to the first aspect, the user can read the robot CAD data and placement area CAD data used to derive the motion path of the robot in the placement area in any combination. As a result, similar to the robot motion path generating method according to the first aspect, it is possible to provide a robot motion path generating device that can derive the motion path of the robot in the placement area by arbitrarily combining the robot data and the placement area data. Also, in the robot motion path generating device according to the second aspect, as described above, the control unit displays a virtual image including the robot and the placement area on the display unit based on integrated data obtained by integrating the loaded robot CAD data and placement area CAD data. As a result, similar to the robot movement path generation method according to the first aspect described above, a user can easily consider specified conditions for deriving a movement path in the robot's placement area by viewing a virtual image including the robot and the placement area displayed on the display unit. Effect of the Invention

[0010] According to the present disclosure, as described above, it is possible to provide a robot movement path generation method and a robot movement path generation device that are capable of deriving a movement path in a robot placement area by arbitrarily combining robot data and placement area data. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a plan view illustrating a substrate transport system according to an embodiment of the present disclosure. [Diagram 2] 1 is a block diagram showing a configuration of a motion path generating device for a substrate transport robot according to an embodiment of the present disclosure. [Diagram 3] FIG. 13 is a flow diagram illustrating a motion path generation flow for a substrate transport robot according to an embodiment of the present disclosure. [Figure 4] 11 is a diagram showing a virtual image displayed on a display unit according to an embodiment of the present disclosure. FIG. [Diagram 5] 13 is a diagram showing a state in which the size of a gap between a substrate transport robot and a placement area according to an embodiment of the present disclosure is displayed on a display unit. FIG. [Figure 6] 11A and 11B are diagrams for explaining placement of a virtual obstacle based on a minimum threshold value of a gap between a substrate transport robot and a placement area according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, specific embodiments of the present disclosure will be described with reference to the drawings.

[0013] [Motion path generation device for substrate transport robot] 1 and 2, a motion path generating device 200 for a substrate transport robot 10 according to an embodiment of the present disclosure will be described. The motion path generating device 200 for the substrate transport robot 10 is a device that generates a motion path OP for the substrate transport robot 10 in the substrate transport system 100. The substrate transport robot 10 is an example of a robot.

[0014] (Substrate transport system) 1, the substrate transfer system 100 includes a substrate transfer robot 10 and a placement area 20. A substrate W is an example of a workpiece.

[0015] The substrate transport robot 10 includes a hand 11 that holds the substrate W, a horizontal articulated robot arm 12 to which the hand 11 is attached and to which a plurality of links 12a are connected to one another, and a base 13 that supports the robot arm 12. The hand 11 holds the substrate W when the substrate W is transported by the substrate transport robot 10. The hand 11 is attached to the tip of the robot arm 12. The substrate W is, for example, a silicon wafer having a disk shape. The substrate W and the hand 11 are examples of a workpiece and an end effector, respectively.

[0016] The placement area 20 includes a substrate transfer chamber 21 and a substrate placement portion 22 .

[0017] The substrate transfer robot 10 is disposed in the substrate transfer chamber 21. The substrate transfer chamber 21 is a space in which the substrate W is transferred by the substrate transfer robot 10. The interior of the substrate transfer chamber 21 is maintained at atmospheric pressure.

[0018] The substrate placement part 22 is connected to the substrate transfer chamber 21. The substrate W is placed on the substrate placement part 22. The substrate placement part 22 includes a plurality of load ports 22a, a plurality of load locks 22b, and an aligner 22c.

[0019] Each of the multiple load ports 22a includes a front opening unify pod (FOUP), which is a container capable of accommodating multiple substrates W.

[0020] Each of the plurality of load locks 22b is connected to the substrate transfer chamber 21 at a position different from each of the plurality of load ports 22a. Each of the plurality of load locks 22b is connected to the substrate transfer chamber VC maintained in a vacuum atmosphere.

[0021] The substrate transfer chamber VC is connected to a substrate processing chamber in which processes such as resist coating and etching are performed on the substrate W at a position different from each of the multiple load locks 22b. In other words, the substrate transfer system 100 is an EFEM (Equipment Front End Module) that transfers the substrate W between each FOUP of the multiple load ports 22a and the substrate transfer chamber VC connected to the substrate processing chamber.

[0022] The aligner 22c is a device for performing alignment of the substrate W and correcting eccentricity.

[0023] (Configuration of the motion path generation device for the substrate transport robot) 2, the movement path generating device 200 for the substrate transport robot 10 includes an input unit 210, a display unit 220, a storage unit 230, and a control unit 240. The movement path generating device 200 for the substrate transport robot 10 is, for example, a PC (personal computer) or a tablet.

[0024] The input unit 210 accepts an input operation from a user. When the input unit 210 accepts an input operation from a user, the input unit 210 outputs an input signal corresponding to the input operation to the control unit 240. For example, the input unit 210 is a keyboard or a mouse. The input unit 210 is used when setting or changing a predetermined condition for deriving an operation path OP in the arrangement area 20 of the substrate transport robot 10.

[0025] The display unit 220 displays a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W, and a derived movement path OP of the substrate transport robot 10 in the placement area 20. The display unit 220 is, for example, a liquid crystal display or an organic EL display.

[0026] The storage unit 230 is a computer-readable storage medium that stores various programs and various data. The storage unit 230 stores a motion path generation program MP for the control unit 240 to execute a motion path generation method for the substrate transport robot 10. The storage unit 230 is formed, for example, by a magnetic disk such as a hard disk, an optical disk such as a CD-ROM or DVD, or a semiconductor memory.

[0027] The control unit 240 performs a simulation based on predetermined conditions to derive an operation path OP of the substrate transport robot 10 in the arrangement area 20. The control unit 240 includes, for example, a processor such as a CPU (Central Processing Unit) and semiconductor memories such as a RAM (Random Access Memory) and a ROM (Read Only Memory).

[0028] The control unit 240 reads CAD data CD used to derive the operation path OP. The CAD data CD includes transport robot CAD data CD1, which is computer-aided design data for the substrate transport robot 10, placement area CAD data CD2, which is computer-aided design data for the placement area 20, and substrate CAD data CD3, which is computer-aided design data for the substrate W. The transport robot CAD data CD1, placement area CAD data CD2, and substrate CAD data CD3 to be read by the control unit 240 can be arbitrarily selected by the user. The transport robot CAD data CD1 and substrate CAD data CD3 are examples of robot CAD data and workpiece CAD data, respectively.

[0029] The control unit 240 causes the display unit 220 to display a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W based on the integrated data ID that integrates the loaded transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3.

[0030] [Method for generating motion path for substrate transport robot] A method for generating a movement path for the substrate transport robot 10 according to an embodiment of the present disclosure will be described with reference to FIGS.

[0031] 3, in step S1, the control unit 240 reads the transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3 used to derive the operation path OP. The placement area CAD data CD2 includes an obstacle 30 shown in FIG. 4 that becomes an obstacle when the substrate transport robot 10 operates. In FIG. 4, a columnar object placed in the substrate transport chamber 21 is shown as an example of the obstacle 30.

[0032] 3, in step S2, the control unit 240 causes the display unit 220 to display a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W, based on an integrated data ID that integrates the loaded transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3. Note that the control unit 240 also causes the display unit 220 to display the virtual image VI in steps S3, S4, and S5, which will be described later.

[0033] As shown in Fig. 4, the control unit 240 causes at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb to be displayed on the display unit 220. Fig. 4 shows an example in which the control unit 240 causes both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb to be displayed on the display unit 220. The control unit 240 switches between a state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, a state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and a state in which the three-dimensional virtual image VIb is displayed on the display unit 220, based on an input operation by the user on the input unit 210.

[0034] When one of the three-dimensional data IDb in the integrated data ID is changed based on the user's operation, the control unit 240 displays at least one of the two-dimensional virtual image VIa corresponding to the two-dimensional data IDa and the three-dimensional virtual image VIb corresponding to the three-dimensional data IDb on the display unit 220 while reflecting the other of the two-dimensional data IDa and the three-dimensional data IDb. For example, when one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on the user's operation, the control unit 240 displays both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb side by side on the display unit 220 while reflecting the other of the two-dimensional data IDa and the three-dimensional data IDb. That is, when the user performs an input operation on the input unit 210 to change the two-dimensional data IDa or the three-dimensional data IDb in step S3 described later while both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed on the display unit 220, both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb change in a linked manner.

[0035] 3, in step S3, the control unit 240 sets a predetermined condition for deriving the movement path OP in response to a user's input operation on the input unit 210 for setting a predetermined condition for deriving the movement path OP. The predetermined condition includes the start point and end point of the movement path OP, the upper limit values ​​of the speed and acceleration of the hand 11, the upper limit values ​​of the speed and acceleration of the robot arm 12, whether the hand 11 holds the substrate W, a minimum threshold Ga of the gap G described later, the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, the position of the components of the placement area 20, and the like. That is, the control unit 240 changes at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 in the integrated data ID based on the user's operation. Furthermore, when at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on the user's operation, the control unit 240 displays at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb. The change in the size and position of the components of the substrate transport robot 10 in the integrated data ID includes the change in the length and position of at least one of the link 12a and the hand 11 as the components of the substrate transport robot 10 in the integrated data ID. The change in the size and position of the components of the placement area 20 in the integrated data ID includes at least one of the change in the position, addition, and deletion of the substrate placement unit 22 as the components of the placement area 20, and at least one of the change in the position and size of the obstacle 30 as the components of the placement area 20.

[0036] As shown in Fig. 3, in step S4, the control unit 240 simulates and derives an operation path OP in the placement area 20 of the substrate transport robot 10 based on a predetermined condition. As shown in Fig. 5, the control unit 240 derives a plurality of operation paths OP. In Fig. 5, for simplification, only two operation paths OP are shown. Note that, as shown in Fig. 6, the control unit 240 simulates and derives the operation path OP in a state in which the outline of the placement area 20 is shifted by a minimum threshold value Ga of a gap G, which will be described later, by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220.

[0037] As shown in FIG. 3, in step S5, the control unit 240 causes the display unit 220 to display the derived operation path OP. As shown in FIG. 5, the control unit 240 causes the display unit 220 to display the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20, together with the derived operation path OP. Specifically, the control unit 240 causes the display unit 220 to display the size of the smallest gap G on each of the multiple operation paths OP in the integrated data ID. That is, the size of the smallest gap G on each of the multiple derived operation paths OP is simultaneously displayed on the display unit 220. In addition, the control unit 240 causes the display unit 220 to display the size of the smallest gap G on each of the multiple operation paths OP in the integrated data ID in a manner according to the size of the gap G. For example, the control unit 240 causes the display unit 220 to display the size of the smallest gap G on each of the multiple operation paths OP in a color according to the size of the gap G.

[0038] After step S4 or step S5, if the user performs an input operation on the input unit 210 to change the predetermined conditions when deriving the operation path OP, the process returns to step S3. If the user does not perform an input operation on the input unit 210 to change the predetermined conditions when deriving the operation path OP after step S5, the generation of the operation path for the substrate transport robot 10 ends.

[0039] [Effects of the embodiment] In this embodiment, the following effects can be obtained.

[0040] (Effect of the method for generating the motion path of the substrate transport robot) In this embodiment, the transport robot CAD data CD1, which is computer-aided design data of the substrate transport robot 10, and the placement area CAD data CD2, which is computer-aided design data of the placement area 20, are read in, and are used to derive the operation path OP of the substrate transport robot 10 in the placement area 20 in which the substrate transport robot 10 and the substrate W are placed. This allows the user to read in any combination of the transport robot CAD data CD1 and the placement area CAD data CD2 used when deriving the operation path OP of the substrate transport robot 10 in the placement area 20. As a result, the operation path OP of the substrate transport robot 10 in the placement area 20 can be derived by arbitrarily combining the data of the substrate transport robot 10 and the data of the placement area 20. In addition, in this embodiment, a virtual image VI including the substrate transport robot 10 and the placement area 20 is displayed on the display unit 220 based on the integrated data ID obtained by integrating the loaded transport robot CAD data CD1 and the placement area CAD data CD2. This allows the user to easily consider specified conditions when deriving the operating path OP of the substrate transport robot 10 in the placement area 20 by viewing the virtual image VI including the substrate transport robot 10 and the placement area 20 displayed on the display unit 220.

[0041] Moreover, in this embodiment, displaying the virtual image VI on the display unit 220 includes displaying a three-dimensional virtual image VIb on the display unit 220. This allows the user to more easily set predetermined conditions for deriving the operation path OP of the substrate transport robot 10 in the placement area 20 while viewing the visually easy-to-recognize three-dimensional virtual image VIb including the substrate transport robot 10 and the placement area 20 displayed on the display unit 220.

[0042] In the present embodiment, the method for generating the operation path of the substrate transport robot 10 includes changing at least one of the following in the integrated data ID based on the user's operation: the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20. This allows the user to derive the operation path OP in a state in which at least one of the sizes of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 has been arbitrarily changed in the integrated data ID. As a result, it is possible to improve the degree of freedom in setting at least one of the conditions of the sizes of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 as the predetermined condition when deriving the operation path OP.

[0043] In this embodiment, changing at least one of the size and position of the components of the substrate transport robot 10 includes changing at least one of the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10 in the integrated data ID based on the user's operation. This allows the user to derive the operation path OP in a state in which at least one of the length and position of the link 12a and the hand 11 as components of the substrate transport robot 10 in the integrated data ID has been arbitrarily changed. As a result, it is possible to improve the degree of freedom in setting at least one of the conditions of the length and position of the link 12a and the hand 11 as a predetermined condition when deriving the operation path OP.

[0044] Furthermore, in this embodiment, reading the placement area CAD data CD2 includes reading the placement area CAD data CD2 including the substrate placement part 22 on which the substrate W is placed. Changing at least one of the size and position of the components of the placement area 20 includes changing the position of the substrate placement part 22 as a component of the placement area 20 in the integrated data ID based on a user operation. This allows the user to derive the operation path OP in a state in which the position of the substrate placement part 22 as a component of the placement area 20 in the integrated data ID has been arbitrarily changed. As a result, it is possible to improve the degree of freedom in setting the condition of the position of the substrate placement part 22 as a predetermined condition when deriving the operation path OP.

[0045] In this embodiment, reading the placement area CAD data CD2 includes reading the placement area CAD data CD2 including the obstacle 30 that is an obstacle when the substrate transport robot 10 operates. Changing at least one of the size and position of the constituent parts of the placement area 20 includes changing at least one of the position and size of the obstacle 30 as a constituent part of the placement area 20 in the integrated data ID based on the user's operation. This allows the user to derive the operation path OP in a state in which at least one of the position and size of the obstacle 30 as a constituent part of the placement area 20 in the integrated data ID has been changed. As a result, it is possible to improve the degree of freedom in setting at least one of the position and size of the obstacle 30 as a predetermined condition when deriving the operation path OP.

[0046] In the present embodiment, reading the placement area CAD data CD2 includes reading the placement area CAD data CD2 including the obstacle 30 that becomes an obstacle when the substrate transport robot 10 operates. The method for generating the movement path of the substrate transport robot 10 includes displaying the derived movement path OP on the display unit 220. Displaying the derived movement path OP on the display unit 220 includes displaying the size of the gap G between the substrate transport robot 10 on the movement path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20 on the display unit 220. This allows the user to recognize the size of the gap G by looking at the size of the gap G between the substrate transport robot 10 on the movement path OP displayed on the display unit 220 and the obstacle 30 as a component of the placement area 20. As a result, the user can consider the size of the gap G between the substrate transport robot 10 on the movement path OP in the placement area 20 of the substrate transport robot 10 and the placement area 20.

[0047] In the present embodiment, displaying the virtual image VI on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb when one of the two-dimensional data IDa in the integrated data ID corresponding to the two-dimensional virtual image VIa and the three-dimensional data IDb in the integrated data ID corresponding to the three-dimensional virtual image VIb is changed based on the user's operation. As a result, when one of the two-dimensional data IDa and the three-dimensional data IDb is changed, it is reflected in the other of the two-dimensional data IDa and the three-dimensional data IDb, so that even when the user changes either the two-dimensional data IDa or the three-dimensional data IDb, at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 at a desired timing. As a result, it is possible to improve the operability and visibility of the user when setting a predetermined condition when deriving the motion path OP.

[0048] In the present embodiment, the method for generating the movement path of the substrate transport robot 10 includes reading in the substrate CAD data CD3, which is computer-aided design data of the substrate W, used to derive the movement path OP. This allows the user to read in any combination of the transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3 used when deriving the movement path OP of the substrate transport robot 10 in the placement area 20. As a result, the movement path OP of the substrate transport robot 10 in the placement area 20 can be derived by arbitrarily combining the data of the substrate transport robot 10, the data of the placement area 20, and the substrate CAD data CD3. In the present embodiment, displaying the virtual image VI on the display unit 220 includes displaying the virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W on the display unit 220 based on the integrated data ID obtained by integrating the loaded transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3. This allows the user to more easily consider specified conditions when deriving the operation path OP of the substrate transport robot 10 in the placement area 20 by viewing the virtual image VI displayed on the display unit 220, which includes the substrate transport robot 10, the placement area 20, and the substrate W.

[0049] (Effects of the robot's motion path generation device) In this embodiment, the motion path generating device 200 for the substrate transport robot 10 includes a control unit 240 that reads the transport robot CAD data CD1, which is computer-aided design data for the substrate transport robot 10, and the placement area CAD data CD2, which is computer-aided design data for the placement area 20, used to derive the motion path OP of the substrate transport robot 10 in the placement area 20 where the substrate transport robot 10 and the substrate W are placed. As a result, similar to the above-mentioned method for generating a motion path for the substrate transport robot 10, the user can read in any combination of the transport robot CAD data CD1 and the placement area CAD data CD2 used to derive the motion path OP of the substrate transport robot 10 in the placement area 20. As a result, similar to the above-mentioned method for generating a motion path for the substrate transport robot 10, it is possible to provide a motion path generating device 200 for the substrate transport robot 10 that can derive the motion path OP of the substrate transport robot 10 in the placement area 20 by arbitrarily combining the data of the substrate transport robot 10 and the data of the placement area 20. Furthermore, in this embodiment, the control unit 240 displays a virtual image VI including the substrate transport robot 10 and the placement area 20 on the display unit 220 based on the integrated data ID obtained by integrating the loaded transport robot CAD data CD1 and placement area CAD data CD2. As a result, similar to the above-mentioned method for generating an operation path for the substrate transport robot 10, the user can easily consider predetermined conditions for deriving the operation path OP of the substrate transport robot 10 in the placement area 20 by viewing the virtual image VI including the substrate transport robot 10 and the placement area 20 displayed on the display unit 220.

[0050] [Variations] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is indicated by the claims, not by the description of the embodiments described above, and further includes all modifications (variations) within the meaning and scope equivalent to the claims.

[0051] For example, in the above embodiment, displaying the virtual image VI on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting the other of the two-dimensional data IDa and the three-dimensional data IDb in the integrated data ID corresponding to the two-dimensional virtual image VIa and the three-dimensional data IDb in the integrated data ID corresponding to the three-dimensional virtual image VIb based on the user's operation, but the present disclosure is not limited to this. In the present disclosure, displaying the virtual image VI on the display unit 220 does not have to include displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting the other of the two-dimensional data IDa and the three-dimensional data IDb in the integrated data ID corresponding to the two-dimensional virtual image VIa and the three-dimensional data IDb in the integrated data ID corresponding to the three-dimensional virtual image VIb based on the user's operation.

[0052] In the above embodiment, an example was shown in which displaying the derived operation path OP on the display unit 220 includes displaying on the display unit 220 the size of the gap G between the substrate transport robot 10 on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20, but the present disclosure is not limited to this. In the present disclosure, displaying the derived operation path OP on the display unit 220 does not have to include displaying on the display unit 220 the size of the gap G between the substrate transport robot 10 on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20.

[0053] In the above embodiment, an example was shown in which changing at least one of the size and position of a component of the placement area 20 included changing at least one of the position and size of an obstacle 30 as a component of the placement area 20 in the integrated data ID based on a user operation, but the present disclosure is not limited to this. In the present disclosure, changing at least one of the size and position of a component of the placement area 20 does not have to include changing at least one of the size and position of an obstacle 30 as a component of the placement area 20 in the integrated data based on a user operation.

[0054] In the above embodiment, an example has been shown in which changing at least one of the size and position of a component of the placement area 20 includes changing the position of the substrate placement part 22 as a component of the placement area 20 in the integrated data ID based on a user operation, but the present disclosure is not limited to this. In the present disclosure, changing at least one of the size and position of a component of the placement area 20 does not have to include changing the position of the substrate placement part 22 as a component of the placement area 20 in the integrated data ID based on a user operation.

[0055] In the above embodiment, an example was shown in which changing at least one of the size and position of the components of the substrate transport robot 10 includes changing at least one of the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10 in the integrated data ID based on a user's operation, but the present disclosure is not limited to this. In the present disclosure, changing at least one of the size and position of the components of the substrate transport robot 10 does not have to include changing at least one of the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10 in the integrated data ID based on a user's operation.

[0056] In the above embodiment, an example was shown in which the operation path generation method for the substrate transport robot 10 includes changing, in the integrated data ID, at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 based on a user's operation, but the present disclosure is not limited to this. In the present disclosure, the operation path generation method for the substrate transport robot 10 does not have to include changing, in the integrated data ID, at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 based on a user's operation.

[0057] In the above embodiment, an example has been described in which displaying the virtual image VI on the display unit 220 includes displaying a three-dimensional virtual image VIb on the display unit 220, but the present disclosure is not limited to this. In the present disclosure, displaying the virtual image VI on the display unit 220 does not necessarily include displaying the three-dimensional virtual image VIb on the display unit 220.

[0058] In the above embodiment, an example has been shown in which displaying the virtual image VI on the display unit 220 includes displaying the virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W on the display unit 220 based on an integrated data ID that integrates the loaded transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3, but the present disclosure is not limited to this. In the present disclosure, displaying the virtual image VI on the display unit 220 may also include displaying the virtual image VI including the substrate transport robot 10 and the placement area 20 but not the substrate W on the display unit 220 based on an integrated data ID that integrates the loaded transport robot CAD data CD1 and the placement area CAD data CD2 but does not integrate the substrate CAD data CD3.

[0059] In the above embodiment, an example has been shown in which the movement path generating method for the substrate transport robot 10 includes reading in the substrate CAD data CD3, which is computer-aided design data for the substrate W, used to derive the movement path OP, but the present disclosure is not limited to this. In the present disclosure, the movement path generating method for the substrate transport robot 10 does not have to include reading in the substrate CAD data CD3, which is computer-aided design data for the substrate W, used to derive the movement path OP.

[0060] In the above embodiment, an example has been shown in which the workpiece is the substrate W, the end effector is the hand 11, and the robot arm 12 is a horizontally articulated robot arm, but the present disclosure is not limited to this. In the present disclosure, the workpiece may be something other than the substrate W, the end effector may be something other than the hand 11, and the robot arm 12 may be something other than a horizontally articulated robot arm.

[0061] In the above embodiment, an example has been shown in which the placement area 20 includes the substrate transport chamber 21 to which the substrate W is transported, and the substrate mounting portion 22 adjacent to the substrate transport chamber 21 and on which the substrate W is mounted, but the present disclosure is not limited to this. The placement area 20 may include the substrate transport chamber 21 to which the substrate W is transported, but may not include the substrate mounting portion 22 adjacent to the substrate transport chamber 21 and on which the substrate W is mounted.

[0062] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general purpose processors, special purpose processors, integrated circuits, Application Specific Integrated Circuits (ASICs), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. Processors are considered processing circuits or circuits because they include transistors and other circuits. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or the processor.

[0063] [Aspects] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0064] (Item 1) deriving, by simulating based on predetermined conditions, an operation path of a robot including an end effector for holding a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed; Reading robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, used for deriving the motion path; A method for generating a robot movement path comprising: displaying a virtual image including the robot and the placement area on a display unit based on integrated data that integrates the loaded robot CAD data and the placement area CAD data.

[0065] (Item 2) 2. The robot movement path generation method according to item 1, wherein displaying the virtual image on the display unit includes displaying a three-dimensional virtual image on the display unit.

[0066] (Item 3) 3. The robot movement path generation method according to claim 1 or 2, further comprising changing, based on a user's operation, at least any of the size of the robot's components, the position of the robot's components, the posture of the robot, the size of the components of the placement area, and the position of the components of the placement area in the integrated data.

[0067] (Item 4) 4. The robot motion path generation method according to item 3, wherein changing at least one of the size and position of the components of the robot includes changing at least one of the length and position of at least one of the links and the end effector as the components of the robot in the integrated data based on the user's operation.

[0068] (Item 5) Reading the placement area CAD data includes reading the placement area CAD data including a workpiece placement portion on which the workpiece is placed, 4. The robot motion trajectory generating method according to item 3, wherein changing at least one of the size and position of the component of the placement area includes changing the position of the workpiece placement section as the component of the placement area in the integrated data based on the user's operation.

[0069] (Item 6) Reading the placement area CAD data includes reading the placement area CAD data including obstacles that hinder the robot from operating, 4. A robot movement path generation method as described in item 3, wherein changing at least one of the size and position of the component of the placement area includes changing at least one of the position and size of the obstacle as the component of the placement area in the integrated data based on the user's operation.

[0070] (Item 7) Reading the placement area CAD data includes reading the placement area CAD data including obstacles that hinder the robot from operating, displaying the derived motion path on the display unit; 7. The robot movement path generation method according to any one of items 1 to 6, wherein displaying the movement path on the display unit includes displaying on the display unit a size of a gap between the robot on the movement path in the integrated data and the obstacle as a component of the placement area.

[0071] (Item 8) The robot movement path generation method according to any one of items 1 to 7, wherein displaying the virtual image on the display unit includes, when one of two-dimensional data in the integrated data corresponding to the two-dimensional virtual image and three-dimensional data in the integrated data corresponding to the three-dimensional virtual image is changed based on a user operation, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

[0072] (Item 9) The method further includes reading work CAD data, which is computer-aided design data of the work, used for deriving the motion path; The robot movement path generation method according to any one of items 1 to 8, wherein displaying the virtual image on the display unit includes displaying the virtual image including the robot, the placement area, and the workpiece on the display unit based on the integrated data that is an integration of the loaded robot CAD data, the placement area CAD data, and the workpiece CAD data.

[0073] (Item 10) The workpiece is a substrate, the end effector is a hand, the robot arm is a horizontal articulated robot arm, 10. The robot motion path generation method according to any one of claims 1 to 9, wherein the placement area includes a substrate transport chamber to which the substrate is transported, and a substrate placement section connected to the substrate transport chamber and on which the substrate is placed.

[0074] (Item 11) A display unit; a control unit that simulates and derives a motion path of a robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed, based on predetermined conditions, reads robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, used in deriving the motion path, and displays a virtual image including the robot and the placement area on a display unit based on integrated data obtained by integrating the read robot CAD data and placement area CAD data. [Explanation of symbols]

[0075] 10 Substrate transport robot (robot) 11 Hand (end effector) 12 Robot Arm 12a Link 20 Placement area 21 Substrate transfer chamber 22 Substrate placement section (work placement section) 30 Obstacles 200 Substrate transport robot motion path generation device (robot motion path generation device) 220 Display section 240 Control Unit CD1 Transport robot CAD data (robot CAD data) CD2 Placement area CAD data CD3 Board CAD data (Work CAD data) G Gap Identity Integration Data IDa 2D data IDb 3D data OP Operation Path VI Virtual Image VIa (2D) Virtual Image VIb (3D) Virtual Image W substrate (work)

Claims

1. deriving, by simulating based on predetermined conditions, an operation path of a robot including an end effector that holds a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed; Reading robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, used for deriving the motion path; A method for generating a robot movement path comprising: displaying a virtual image including the robot and the placement area on a display unit based on integrated data obtained by integrating the loaded robot CAD data and the placement area CAD data.

2. The robot movement path generating method according to claim 1 , wherein displaying the virtual image on the display unit includes displaying a three-dimensional virtual image on the display unit.

3. 2. The robot movement path generation method according to claim 1, further comprising changing at least one of the size of the robot's components, the position of the robot's components, the posture of the robot, the size of the components of the placement area, and the position of the components of the placement area in the integrated data based on a user's operation.

4. 4. The robot motion path generation method of claim 3, wherein changing at least one of the size and position of the components of the robot includes changing the length and position of at least one of the links and the end effector as the components of the robot in the integrated data based on the user's operation.

5. Reading the placement area CAD data includes reading the placement area CAD data including a workpiece placement portion on which the workpiece is placed, The robot movement path generation method of claim 3, wherein changing at least one of the size and position of the component of the placement area includes changing the position of the workpiece placement section as the component of the placement area in the integrated data based on the user's operation.

6. Reading the placement area CAD data includes reading the placement area CAD data including obstacles that may hinder the robot from operating, 4. The robot movement path generation method of claim 3, wherein changing at least one of the size and position of the component of the placement area includes changing at least one of the position and size of the obstacle as the component of the placement area in the integrated data based on the user's operation.

7. Reading the placement area CAD data includes reading the placement area CAD data including obstacles that may hinder the robot from operating, displaying the derived motion path on the display unit; 2. The robot movement path generating method of claim 1, wherein displaying the movement path on the display unit includes displaying on the display unit the size of a gap between the robot on the movement path in the integrated data and the obstacle as a component of the placement area.

8. 2. The robot movement path generation method of claim 1, wherein displaying the virtual image on the display unit includes, when one of two-dimensional data in the integrated data corresponding to the two-dimensional virtual image and three-dimensional data in the integrated data corresponding to the three-dimensional virtual image is changed based on a user operation, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

9. The method further includes reading work CAD data, which is computer-aided design data of the work, used for deriving the motion path; 2. The robot movement path generating method of claim 1, wherein displaying the virtual image on the display unit includes displaying the virtual image including the robot, the placement area, and the workpiece on the display unit based on the integrated data that integrates the loaded robot CAD data, the placement area CAD data, and the workpiece CAD data.

10. The workpiece is a substrate, the end effector is a hand, the robot arm is a horizontal articulated robot arm, The robot motion path generating method according to claim 1 , wherein the placement area includes a substrate transfer chamber into which the substrate is transferred, and a substrate placement part connected to the substrate transfer chamber and on which the substrate is placed.

11. A display unit; a control unit that simulates and derives a motion path of a robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed, based on specified conditions, reads robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, used in deriving the motion path, and displays a virtual image including the robot and the placement area on the display unit based on integrated data obtained by integrating the read robot CAD data and the placement area CAD data.

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