Inspection jig and structure

Abstract

To provide an inspection jig capable of improving inspection accuracy of the state of a joint part of a work.SOLUTION: An inspection jig is used in the inspection system. The inspection system heats a work by excitation light from an excitation source and inspects the state of a joint part of the work by analyzing temperature images generated by photographing in time series by an imaging device. The work includes a first base material having a top part and a side face, and a second base material joined to the top part at a joint part. The inspection jig includes a support part for supporting the work. The supporting part supports the work by contacting the side surface of the first base material at the contact part and supporting the side surface of the first base material.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to an inspection tool and a structure. [Background technology]

[0002] Patent Document 1 discloses a wafer processing apparatus that includes a heat sink and a fixing jig that contact one side of a wafer supported by a wafer holding means provided in a processing chamber. The wafer contact surface of the heat sink is formed as a convex curved surface, and the fixing jig sandwiches at least a part of the outer periphery of the wafer and at least a part of the outer periphery of the heat sink. Patent Document 1 describes that this configuration improves the heat dissipation effect of the wafer. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 9-115835 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides an inspection jig and structure capable of improving the inspection accuracy of the condition of a joint of a workpiece. [Means for solving the problem]

[0005] An inspection jig according to one aspect of the present disclosure includes: A test tool used in an inspection system that heats a workpiece including a first base material having a top and a side surface and a second base material joined at a top and a joint with excitation light from an excitation source, and inspects the condition of the joint of the workpiece by analyzing temperature images captured in time series by an imaging device, A support portion is provided for supporting the workpiece, The support portion supports the workpiece by contacting the side surface of the first base material at the contact portion and supporting the side surface of the first base material.

[0006] The structure according to one embodiment of the present disclosure comprises: Work and An inspection jig for supporting the workpiece, A structure used in an inspection system that inspects a state of a joint of a workpiece by analyzing temperature images generated by a photographing device photographing the workpiece in time series by the photographing device, the structure comprising: The workpiece includes a first base material having a top and a bottom, and a second base material joined to the top at a joint; The workpiece is placed on the inspection jig, and the inspection jig supports the bottom of the workpiece. Effect of the Invention

[0007] According to the present disclosure, it is possible to improve the accuracy of inspecting the condition of a joint of a workpiece. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a block diagram showing a configuration example of an inspection system according to a first embodiment. [Diagram 2] A block diagram showing an example of the configuration of the inspection device shown in FIG. [Diagram 3] FIG. 1 is a perspective view of a structure according to a first embodiment; [Figure 4] FIG. 1 is an exploded perspective view of a structure according to a first embodiment; [Diagram 5] FIG. 1 is a plan view of a structure according to a first embodiment; [Figure 6] Cross-sectional view of the structure in Figure 5 taken along line AA [Figure 7] Graph showing phase characteristics of joints in workpieces [Figure 8] Table showing correlation coefficients between the data of the five samples shown in Figure 7. [Figure 9] Table showing correlation coefficients between data of five samples according to the comparative example [Figure 10] FIG. 1 is a cross-sectional view showing a structure according to a first modified example of the first embodiment. [Figure 11] FIG. 11 is a cross-sectional view showing a structure according to a second modification of the first embodiment. [Figure 12]FIG. 11 is a cross-sectional view showing a structure according to a second embodiment. [Figure 13] FIG. 11 is a cross-sectional view showing a structure according to a modification of the second embodiment. [Figure 14] FIG. 11 is a cross-sectional view showing a structure according to a third embodiment. [Figure 15] FIG. 13 is a cross-sectional view showing a structure according to a modification of the third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, the embodiments will be described in detail with reference to the drawings as appropriate. However, more detailed explanation than necessary may be omitted. For example, detailed explanation of already well-known matters or duplicate explanation of substantially the same configuration may be omitted. This is to avoid the following explanation becoming unnecessarily redundant and to facilitate understanding by those skilled in the art. Note that the inventor provides the accompanying drawings and the following explanation so that those skilled in the art can fully understand the present disclosure, and does not intend to limit the subject matter described in the claims by them.

[0010] Hereinafter, an inspection jig and a structure according to an embodiment will be described with reference to the drawings.

[0011] [1. First Embodiment] [1-1. Configuration] 1 is a block diagram showing a configuration example of an inspection system 1 according to a first embodiment of the present disclosure. The inspection system 1 inspects a bonding state of a bonded portion 93 between a first base material 91 and a second base material 92 of a workpiece 90 by applying an active thermography method to a structure 100 according to the first embodiment.

[0012] The inspection system 1 includes an inspection device 10 , an infrared camera 17 , an excitation source 18 , a control box 15 , a power supply 16 , and an alarm device 19 .

[0013] The inspection system 1 nondestructively detects the bonding state of the bonded portion 93 by using an active thermography method in which excitation energy is applied to the workpiece 90 to be inspected and temperature images are taken while heating the workpiece 90. For example, the inspection system 1 applies excitation energy to the workpiece 90 by an excitation source 18, and takes temperature images in time series by an infrared camera 17.

[0014] 1, the workpiece 90 includes a first base material 91 that mainly absorbs light irradiated from a light source for deposition or welding, such as a laser light source, and a second base material 92 that mainly transmits the light. The first base material 91 and the second base material 92 are joined at a joint 93 by the first base material 91 and / or the second base material 92 melted by the light from the light source.

[0015] The material of the workpiece 90 is, for example, a resin such as polybutylene terephthalate (PBT), polyphenylene sulfide (PPS), or polyamide (PA). Alternatively, the material of the workpiece 90 may be ceramics. The material of the workpiece 90 may be a metal such as cold rolled steel (SPCC steel) or aluminum.

[0016] The workpiece 90 is supported by an inspection jig (hereinafter simply referred to as the “jig”) 20 .

[0017] The infrared camera 17 is an example of an imaging device that captures an imaging area including at least a part of the workpiece 90 in time series to generate a plurality of temperature image data (hereinafter, may be simply referred to as "temperature images"). The infrared camera 17 includes an infrared sensor that detects infrared rays having a wavelength of, for example, 3 μm to 15 μm. The frame rate of the infrared camera 17 is, for example, 50 Hz (or 50 fps), but is not limited thereto.

[0018] The excitation source 18 is an example of a heating device capable of heating the workpiece 90. The excitation source 18 is, for example, a xenon lamp, a laser light source, a vibrator that generates ultrasonic waves, or a coil that generates electromagnetic induction, but is not limited to these, and may be any energy source that can radiate energy. The excitation source 18 can perform flash heating (pulse heating) by emitting a flash of light on the workpiece 90, or step heating by heating in steps.

[0019] The wavelength band of light that can be emitted by the excitation source 18 may be the same as or different from the wavelength band of infrared light that can be detected by the infrared camera 17. Although two excitation sources 18 are illustrated in Fig. 1, the number of excitation sources 18 is not limited thereto, and may be one, or three or more.

[0020] The power supply 16 supplies power to the infrared camera 17 and the excitation source 18. The control box 15 includes a control circuit that controls the power supply 16 based on a control signal from the inspection device 10. The control box 15 may control the light emission method, light emission cycle, light emission time, etc. of the excitation source 18.

[0021] The notification device 19 notifies information to the outside. For example, the notification device 19 is controlled by the inspection device 10 and notifies a user of temperature image data, information indicating a detection result of the bonding state of the bonded portion 93, and the like. The notification device 19 may include a visual notification device such as a light source such as an LED, a display, or an indicator. The notification device 19 may also include an auditory notification device such as a speaker.

[0022] Fig. 2 is a block diagram showing an example of the configuration of the inspection device 10 of Fig. 1. The inspection device 10 includes a processor 11, a storage device 12, and an interface 13.

[0023] The processor 11 is composed of a CPU, an MPU, etc., and controls the entire inspection device 10 by executing various programs stored in the storage device 12. The processor 11 controls the excitation source 18 via the control box 15, etc., to control the start and stop of the heating output of the excitation source 18. The processor 11 also controls the imaging operation of the infrared camera 17, such as the start and stop of imaging. The processor 11 also analyzes temperature image data stored in the storage device 12 and detects the bonding state of the bonded portion 93.

[0024] The storage device 12 is a recording medium for recording various information including data and programs required to realize the functions of the inspection device 10. The storage device 12 is realized by, for example, a semiconductor storage device such as a flash memory or a solid state drive (SSD), a magnetic storage device such as a hard disk drive (HDD), or other recording media alone or in combination. The storage device 12 is not limited to a built-in storage device installed in the same housing as the processor 11, and may be, for example, an external storage device or a NAS (network-attached storage) type storage device. The storage device 12 may include a volatile memory such as an SRAM or a DRAM.

[0025] The interface 13 connects the inspection device 10 to external devices such as the infrared camera 17, the control box 15, the alarm device 19, and the excitation source 18. The interface 13 may be a communication circuit that performs data communication in accordance with an existing wired communication standard or wireless communication standard.

[0026] The interface 13 is an example of an input unit that connects the inspection device 10 and the infrared camera 17 in order to input information such as temperature image data from the infrared camera 17 to the inspection device 10. The interface 13 is also an example of an output unit that connects the inspection device 10 to an external device in order to output information such as a control signal from the processor 11 to the external device such as the control box 15, the alarm device 19, and the excitation source 18. Such input and output units may be integrated as an input / output interface 13 as shown in FIG. 2, or may be realized as a plurality of interface circuits.

[0027] 3 to 5 are respectively a perspective view, an exploded perspective view, and a plan view of structure 100 according to the present embodiment. Fig. 6 is a cross-sectional view of structure 100 taken along line AA in Fig. 5.

[0028] 3 and 4 show a virtual axis C. In this specification, the direction parallel to the axis C is called the axial direction, the direction perpendicular to the axial direction is called the radial direction, and the circumferential direction centered on the axis C is called the circumferential direction. With regard to the axial direction, the upward direction into the paper is called positive. The positive axial direction is also called the upward direction, and the negative axial direction is also called the downward direction.

[0029] As shown in FIG. 3, the structure 100 includes a workpiece 90 and a jig 20 that supports the workpiece 90. A first base material 91 and a second base material 92 of the workpiece 90 have different absorptivities for light irradiated from a light source for deposition or welding. For example, the absorptivity of the light in the first base material 91 is lower than the absorptivity of the light in the second base material 92. The first base material 91 and the second base material 92 may have the same absorptivity. The light source for deposition or welding may be the same light source as the excitation source 18, or may be a different light source.

[0030] The jig 20 is made of a material having high thermal conductivity. For example, the thermal conductivity of the jig 20 is equal to or higher than the thermal conductivity of the first base material 91. The jig 20 includes a metal such as aluminum or copper. This allows the jig 20 to dissipate heat given to the workpiece 90 by the excitation source 18.

[0031] The jig 20 may dissipate heat imparted to the workpiece 90 by the excitation source 18, by having a larger volume than the first base material 91. Alternatively, or in addition, the jig 20 may dissipate heat imparted to the workpiece 90 by the excitation source 18, by having a larger surface area than the first base material 91. The jig 20 may be a heat sink.

[0032] As shown in Fig. 4, the first base material 91 has a top 91a, a side surface 91b, and a bottom 91c, and has a bottomed cylindrical shape. In Fig. 4, the side wall of the first base material 91 including the top 91a and the side surface 91b has a rectangular cylindrical shape, but the shape of the first base material 91 is not limited thereto. For example, the side wall of the first base material 91 may have a polygonal rectangular cylindrical shape in a plan view, or may have a cylindrical shape.

[0033] 4 to 6, the jig 20 supports the side surface 91b of the first base material 91 by contacting the side surface 91b of the first base material 91 over the entire circumferential direction centered on the axis C. As shown in particular in FIG. 4, the jig 20 has a base portion 20a. The base portion 20a contacts the bottom surface of the bottom portion 91c of the first base material 91.

[0034] The top 91a of the first base material 91 and the back surface of the second base material 92 are joined at a joint 93 (see FIG. 6) by the first base material 91 and / or the second base material 92 melted by light from a light source.

[0035] In the active thermography method, the processor 11 of the inspection device 10 heats the workpiece 90 with the excitation source 18 and captures an image of the workpiece 90 with the infrared camera 17. As shown in Fig. 6, the excitation light emitted from the excitation source 18 is incident on the second base material 92 from above.

[0036] In this embodiment, the processor 11 acquires, via the interface 13, a plurality of temperature images generated by the infrared camera 17 photographing the workpiece 90 in a time series. The processor 11 performs, for example, a discrete Fourier transform on the obtained plurality of temperature images to extract a phase image according to the analysis conditions. The phase image indicates, for example, the phase characteristics at a set frequency of the data after the discrete Fourier transform. The processor 11 performs image analysis processing such as filtering and binarization on the phase image to analyze the bonding state of the bonding portion 93.

[0037] [1-2. Effects] The effect of the structure 100 according to this embodiment will be described with reference to Figures 7 to 9. Figure 7 is a graph showing the phase characteristics of the joints 93 of the workpieces 90 obtained by the above-mentioned analysis process. The graph in Figure 7 shows the phases of the joints 93 in five samples of the workpieces 90. The horizontal axis of the graph in Figure 7 shows the radial position of the joints 93 with the radial inner surface of the sidewall of the first base material 91 as the reference (=0 mm).

[0038] According to the structure 100 of this embodiment, the heat given to the workpiece 90 by the excitation source 18 is easily dissipated by the jig 20, for example, along a path as shown by the solid arrow in Fig. 6. In this way, by increasing the heat dissipation in the same direction as the incident direction of the excitation light, i.e., the incident direction of the heat, it is possible to prevent the heat given by the excitation source 18 from being trapped inside the workpiece 90.

[0039] Without the jig 20, the heat applied by the excitation source 18 may be trapped in the workpiece 90, affecting the contrast of the phase image of the joint 93. For example, the trapped heat may deteriorate the reproducibility of the contrast of the phase image of the joint 93. That is, even when the active thermography method is applied to multiple samples with similar bonding states of the joint 93 or to the same sample, if heat is trapped in the workpiece 90, phase images with large differences may be obtained. This may make it difficult to accurately determine whether the bonding state of the joint 93 is good or bad.

[0040] In contrast, according to the structure 100 of this embodiment, heat is dissipated by the jig 20, so that heat does not accumulate inside the workpiece 90. In particular, in the structure 100, the jig 20 is configured so that the distance d (see FIG. 6) between the contact portion between the jig 20 and the first base material 91 and the joint portion 93 or the top portion 91a of the first base material 91 is greater than a predetermined distance. This makes it easier for the heat given to the workpiece 90 by the excitation source 18 to be transferred downward to the workpiece 90, and is considered to improve the heat dissipation efficiency.

[0041] When the active thermography method is applied to the workpiece 90 using the structure 100, a phase image with high reproducibility can be obtained because heat is not trapped inside the workpiece 90. In other words, when the active thermography method is applied to a plurality of samples having similar bonding states of the bonding portion 93 or to the same sample, similar phase images can be obtained.

[0042] Fig. 8 is a table showing correlation coefficients between data of the five samples shown in Fig. 7. Fig. 9 is a table showing, as a comparative example, correlation coefficients between data showing the phases of joints 93 of workpiece 90 not supported by jig 20. Workpiece 90 not supported by jig 20 corresponds to a configuration in which jig 20 is omitted from structure 100 according to this embodiment.

[0043] 8 according to the present embodiment and the table of the comparative example in FIG 9, it is found that the correlation coefficient between the data of the samples according to the present embodiment is higher than that of the comparative example. Thus, according to the structure 100 according to the present embodiment, a phase image with high reproducibility can be obtained.

[0044] [1-3.Summary] As described above, the jig 20 according to the present embodiment is used in the inspection system 1. The inspection system 1 inspects the state of the joint 93 of the workpiece 90 by analyzing temperature images generated by an infrared camera 17 (an example of an imaging device) capturing images of the workpiece 90 heated by excitation light from an excitation source 18 in time series. The workpiece 90 includes a first base material 91 having a top 91a and a side surface 91b, and a second base material 92 joined to the top 91a at a joint 93. The jig 20 supports the workpiece 90 by contacting the side surface 91b of the first base material 91 at a contact portion and supporting the side surface 91b of the first base material 91.

[0045] According to the jig 20 of this embodiment, highly reproducible inspection results can be obtained in the inspection system 1, and the inspection accuracy of the state of the joint 93 of the workpiece 90 can be improved.

[0046] The side surface 91b of the first base material 91 may be disposed around the first base material 91 in the direction of the axis C, and the jig 20 may be in contact with the side surface 91b of the first base material 91 over the entire circumferential direction centered on the axis C to support the side surface 91b of the first base material 91. With this configuration, the jig 20 can dissipate heat evenly in the circumferential direction of the axis C, and the inspection system 1 can obtain inspection results with high reproducibility.

[0047] The first base material 91 may have a bottomed cylindrical shape having a bottom 91c, and the jig 20 may have a pedestal 20a in contact with the bottom surface of the bottom 91c. The thermal conductivity of the jig 20 may be equal to or greater than the thermal conductivity of the first base material 91. The jig 20 may contain aluminum. The volume of the jig 20 may be greater than the volume of the first base material 91. The volume of the jig 20 may be greater than the volume of the workpiece 90. The jig 20 may be configured such that a distance d between the joint 93 and the contact portion is greater than a predetermined distance.

[0048] According to these configurations, heat from the first base material 91 is easily dissipated via the bottom surface of the bottom portion 91c and the pedestal portion 20a, and the inspection system 1 can obtain inspection results with high reproducibility.

[0049] [1-4. Modifications] [1-4-1. First modified example] Modifications of this embodiment will be described below. Fig. 10 is a cross-sectional view showing a structure 101 according to a first modification of this embodiment. Compared to the structure 100 of Fig. 6, the structure 101 of Fig. 10 further includes a heat dissipation sheet 30 at a contact portion between the first base material 91 and the jig 20, for example, between the first base material 91 and the jig 20.

[0050] The heat dissipation sheet 30 is an example of the heat dissipation material of the present disclosure, and transmits heat from the first base material to the jig. The heat dissipation sheet 30 includes a resin such as silicone or acrylic. The heat dissipation sheet 30 may include a metal, such as a metal filler.

[0051] The heat dissipation material of the present disclosure is not limited to the sheet-shaped heat dissipation sheet 30. For example, the heat dissipation material may be heat dissipation grease. A known thermal interface material (TIM) may be applied to the heat dissipation material. The heat dissipation material may be a material having a higher thermal conductivity than the first base material 91.

[0052] According to the structure 101 of this modification, the first base material 91 is in close contact with the jig 20 via the heat dissipation sheet 30, so that the heat inside the workpiece 90 is dissipated more efficiently by the heat dissipation sheet 30. Therefore, the inspection system 1 can obtain highly reproducible inspection results, and the inspection accuracy of the state of the joint 93 of the workpiece 90 can be improved.

[0053] [1-4-2. Second modified example] FIG. 11 is a cross-sectional view showing a structure 102 according to a second modified example of the present embodiment. Compared with the structure 101 of FIG. 10, the structure 102 of FIG. 11 further includes a Peltier element 40. The Peltier element 40 is an example of the "cooling device" of the present disclosure. The Peltier element 40 has a cooling surface and a heat generating surface, and the cooling surface is in contact with the bottom surface of the jig 20. The Peltier element 40 is connected to an external power source, and the cooling surface of the energized Peltier element 40 can cool the jig 20. In order to increase the cooling capacity of the Peltier element 40, a heat sink may be attached to the heat generating surface of the Peltier element 40.

[0054] According to the structure 102 of this modified example, the heat inside the workpiece 90 is dissipated more efficiently by the Peltier element 40. Therefore, the inspection system 1 can obtain highly reproducible inspection results, and the inspection accuracy of the state of the joint 93 of the workpiece 90 can be improved.

[0055] The cooling device of the present disclosure is not limited to the Peltier element 40. For example, the cooling device may be a cooling device that performs air or water cooling on the jig 20. This also applies to the second and third embodiments described below.

[0056] [2. Second Embodiment] Fig. 12 is a cross-sectional view showing a structure 200 according to the second embodiment. The structure 200 in Fig. 12 is compared with the structure 100 in Fig. 6 according to the first embodiment. In the structure 100 in Fig. 6, the base portion 20a of the jig 20 contacts the bottom surface of the bottom portion 91c of the first base material 91, whereas in the structure 200 in Fig. 12, the surface of the base portion 220a of the jig 220 does not contact the bottom surface of the bottom portion 91c. The jig 220 supports the first base material 91 by contacting only the side surface of the first base material 91, thereby supporting the workpiece 90.

[0057] Even with this configuration, the heat given to the workpiece 90 by the excitation source 18 is easily dissipated by the jig 220, for example, along a path as shown by the solid arrow in Fig. 12. Therefore, the jig 220 can prevent the heat given by the excitation source 18 from being trapped inside the workpiece 90. Therefore, the inspection system 1 can obtain highly reproducible inspection results, and the inspection accuracy of the state of the joint 93 of the workpiece 90 can be improved.

[0058] Fig. 13 is a cross-sectional view showing a structure 201 according to a modified example of the present embodiment. Compared to structure 200 in Fig. 12, structure 201 in Fig. 13 further includes heat dissipation sheet 30 and Peltier element 40, which are disposed at the contact portion between first base material 91 and jig 220.

[0059] According to the structure 201 of this modified example, the heat in the workpiece 90 is dissipated more efficiently by the heat dissipation sheet 30 and the Peltier element 40. Therefore, the inspection system 1 can obtain highly reproducible inspection results, and the inspection accuracy of the state of the joint 93 of the workpiece 90 can be improved.

[0060] This modification is not limited thereto, and for example, the structure 201 may be configured to include either the heat dissipation sheet 30 or the Peltier element 40 as shown in Fig. 13, rather than both of them. Even with such a configuration, the heat in the workpiece 90 can be efficiently dissipated.

[0061] [3. Embodiment 3] Fig. 14 is a cross-sectional view showing a structure 300 according to embodiment 3. Structure 300 in Fig. 14 will be compared with structure 100 in Fig. 6 according to embodiment 1. In structure 100 in Fig. 6, jig 20 supports first base material 91 by contacting side surface 91b of first base material 91 at a contact portion, whereas in structure 300 in Fig. 14, jig 320 is a stand and does not contact side surface 91b of first base material 91.

[0062] Even with this configuration, the heat given to the workpiece 90 by the excitation source 18 is easily dissipated by the jig 320, for example, along a path as shown by the solid arrow in Fig. 14. Therefore, the jig 320 can prevent the heat given by the excitation source 18 from being trapped inside the workpiece 90. Therefore, the inspection system 1 can obtain highly reproducible inspection results, and the inspection accuracy of the state of the joint 93 of the workpiece 90 can be improved.

[0063] Fig. 15 is a cross-sectional view showing a structure 301 according to a modified example of the present embodiment. Compared to structure 300 in Fig. 14, structure 301 in Fig. 15 further includes heat dissipation sheet 30 and Peltier element 40 disposed between first base material 91 and jig 320.

[0064] According to the structure 301 of this modification, the heat in the workpiece 90 is more efficiently dissipated by the heat dissipation sheet 30 and the Peltier element 40. Therefore, the inspection system 1 can obtain highly reproducible inspection results, and the inspection accuracy of the state of the joint 93 of the workpiece 90 can be improved.

[0065] This modification is not limited to this, and for example, the structure 301 may be configured to include either the heat dissipation sheet 30 or the Peltier element 40 as shown in Fig. 15, rather than both of them. Even with such a configuration, the heat in the workpiece 90 can be efficiently dissipated.

[0066] As described above, the embodiment has been described as an example of the technology in the present disclosure. However, the technology in the present disclosure is not limited to this, and can be applied to embodiments in which modifications, substitutions, additions, omissions, etc. are appropriately performed. In addition, it is also possible to combine the components described in the above embodiment to create a new embodiment. Therefore, other embodiments will be exemplified below.

[0067] [4.Examples] The following provides examples of aspects of the present disclosure.

[0068] <Aspect 1> A workpiece including a first base material having a top and a side surface, and a second base material joined to the top at a joint is heated by excitation light from an excitation source, and a photographing device photographs the workpiece in a time series and generates temperature images to thereby inspect the state of the joint of the workpiece. A support portion for supporting the workpiece is provided, The support portion supports the workpiece by contacting a side surface of the first base material with a contact portion and supporting the side surface of the first base material. Inspection fixture.

[0069] <Aspect 2> The side surface is disposed around the axis of the first base material; the inspection jig contacts the side surface of the first base material over the entire circumferential direction around the axis and supports the side surface of the first base material; 2. The inspection tool according to claim 1.

[0070] <Aspect 3> The first base material has a cylindrical shape having a bottom, The inspection jig has a base portion that contacts a bottom surface of the bottom portion. 3. The inspection tool according to claim 1 or 2.

[0071] <Aspect 4> 4. The inspection tool according to any one of aspects 1 to 3, wherein the thermal conductivity of the inspection tool is equal to or higher than the thermal conductivity of the first base material.

[0072] <Aspect 5> 5. The inspection tool according to any one of aspects 1 to 4, comprising aluminum.

[0073] <Aspect 6> 6. The inspection tool according to any one of aspects 1 to 5, wherein a volume of the inspection tool is larger than a volume of the first base material.

[0074] <Aspect 7> The inspection tool according to any one of aspects 1 to 6, wherein the inspection tool includes a heat dissipation material, provided at the contact portion, for transferring heat of the first base material to the inspection tool.

[0075] <Aspect 8> 8. The inspection tool according to any one of aspects 1 to 7, further comprising a cooling device for cooling the inspection tool.

[0076] <Aspect 9> 9. The inspection tool according to any one of aspects 1 to 8, wherein the distance between the joint portion and the contact portion is greater than a predetermined distance.

[0077] <Aspect 10> Work and An inspection jig for supporting the workpiece, A structure used in an inspection system that inspects a state of a joint of a workpiece by analyzing temperature images generated by an imaging device photographing the workpiece heated by excitation light from an excitation source in a time series, The workpiece includes a first base material having a top and a bottom, and a second base material joined to the top at the joint; The workpiece is placed on the inspection jig, and the inspection jig supports the bottom portion of the workpiece. structure. [Industrial Applicability]

[0078] The present disclosure is applicable to inspection jigs and structures used in inspection systems that inspect the bonding condition of joints in workpieces using a thermography method. [Explanation of symbols]

[0079] 1 Inspection system 10 Inspection equipment 11 Processors 12 Storage device 13 Interface 15 Control Box 16 Power supply 17 Infrared Camera 18 Excitation Source 19. Notification device 20 Jig (Inspection jig) 20a Daibe 30 Heat dissipation sheet 40 Peltier element 90 Work 91 First base material 91a top 91b Side 91c bottom 92 Second base material 93 Joint 100 structures

Claims

1. A workpiece including a first base material having a top and a side surface, and a second base material joined to the top at a joint, is heated by excitation light from an excitation source, and an image capturing device captures images in time series to generate temperature images, thereby inspecting the condition of the joint of the workpiece. A support portion for supporting the workpiece is provided, The support portion supports the workpiece by contacting a side surface of the first base material with a contact portion and supporting the side surface of the first base material. Inspection fixture.

2. The side surface is disposed around the axis of the first base material; the inspection jig contacts the side surface of the first base material over the entire circumferential direction around the axis and supports the side surface of the first base material; The inspection tool according to claim 1 .

3. The first base material has a cylindrical shape having a bottom, The inspection jig has a base portion that contacts a bottom surface of the bottom portion. The inspection tool according to claim 1 .

4. The inspection jig according to claim 1 , wherein the thermal conductivity of the inspection jig is equal to or greater than the thermal conductivity of the first base material.

5. 10. The inspection tool of claim 1, comprising aluminum.

6. The inspection jig according to claim 1 , wherein a volume of the inspection jig is larger than a volume of the first base material.

7. The inspection jig according to claim 1 , further comprising a heat dissipation material at the contact portion for transferring heat of the first base material to the inspection jig.

8. The inspection tool according to claim 1 , further comprising a cooling device for cooling the inspection tool.

9. 9. The inspection tool according to claim 1, wherein the distance between the joint portion and the contact portion is greater than a predetermined distance.

10. Work and An inspection jig for supporting the workpiece, A structure used in an inspection system that inspects a state of a joint of a workpiece by analyzing temperature images generated by an imaging device photographing the workpiece heated by excitation light from an excitation source in a time series, The workpiece includes a first base material having a top and a bottom, and a second base material joined to the top at the joint; The workpiece is placed on the inspection jig, and the inspection jig supports the bottom portion of the workpiece. structure.

Images