X-ray photographic system and x-ray inspection device

Abstract

To provide a technique for achieving high resolution of a photographic image and high-speed photography in photographing an X-ray inspection image.SOLUTION: An X-ray photographic system has: an X-ray source which is provided movably in at least a horizontal direction; an X-ray camera which is provided movably in at least the horizontal direction; a workpiece holding part which holds a photographing object, and is provided movably in at least the horizontal direction and a vertical direction; and control means for controlling movement of at least the X-ray source, the X-ray camera, and the workpiece holding part. The control means controls the X-ray source and the X-ray camera respectively so as to revolve at a constant path according to the resolution of a photographic image captured by the X-ray camera, and controls the workpiece holding part so that a photographing object place of the photographic object is arranged at a photographic position by the X-ray source and the X-ray camera.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to an X-ray imaging system that obtains a plurality of X-ray images of an object to generate three-dimensional data, and an X-ray inspection apparatus using the same. [Background technology]

[0002] Conventionally, there has been known a technique for taking X-ray images of an inspection object, such as the surface of a substrate, from multiple directions, creating three-dimensional data from the multiple X-ray images taken, and inspecting the internal structure of the inspection point (e.g., Patent Documents 1 and 2).

[0003] Examples of this technology include tomosynthesis and CT (Computed Tomography). In this technology, an X-ray source irradiates an area of ​​an object to be inspected with X-rays, and the transmitted X-rays are captured by an X-ray camera. Then, multiple X-ray images are taken while changing the relative positions of the X-ray source, object to be inspected, and X-ray camera.

[0004] In this case, at least one of the X-ray source, the object to be inspected, and the X-ray camera is rotated on a horizontal plane to change their relative positions. After one rotation is completed and the inspection point is photographed, the object is moved to a position to photograph the next inspection point, and then rotated again.

[0005] As for which of the X-ray source, the object to be inspected, or the X-ray camera should be moved or rotated, there are two known methods in the past: a method in which the object to be inspected is fixed at a height where the image is focused, and the X-ray source and the X-ray camera are moved to the inspection location and then rotated; and a method in which the X-ray source and the X-ray camera are fixed and the object to be inspected is rotated around the axis in the thickness direction. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2006-340787 A [Patent Document 2] JP 2010-2221 A Summary of the Invention [Problem to be solved by the invention]

[0007] In recent years, with the miniaturization of structures of inspection objects, there is an increasing need to obtain imaging data with higher imaging resolution (for example, less than 10 μm per pixel) in order to perform inspections properly. However, among the previously known methods, the method of moving an X-ray source and an X-ray camera to the inspection location has low repeatability of the rotation trajectory, making it difficult to achieve high resolution. On the other hand, the method of rotating the inspection object around the axis in the thickness direction of the inspection object while fixing the X-ray source and X-ray camera has a problem that the inspection object moves due to rotation acceleration, making it difficult to increase the imaging speed.

[0008] In view of the above circumstances, an object of the present invention is to provide a technique for realizing high resolution and high speed capture of X-ray inspection images. [Means for solving the problem]

[0009] In order to achieve the above object, the present invention adopts the following configuration. an X-ray source movable at least in a horizontal direction; an X-ray camera that is movable at least in a horizontal direction; A workpiece that holds the object to be photographed and is movable in the horizontal and vertical directions A holding portion; A control means for controlling the movement of at least the X-ray source, the X-ray camera, and the workpiece holder; It has The control means controlling the X-ray source and the X-ray camera so as to rotate in a constant orbit according to a resolution of an image captured by the X-ray camera; Controlling the workpiece holding unit so that a portion of the object to be photographed is positioned at a photographing position by the X-ray source and the X-ray camera. An X-ray imaging system.

[0010] Naturally, such a system can be introduced into the imaging section of an X-ray inspection device. In the following, the object to be imaged (in the case of an X-ray inspection device, the object to be inspected) is also referred to as the "workpiece." In the above, "rotating on a fixed orbit according to the resolution of the captured image" means that as long as the resolution of the captured image is the same, it rotates on the same orbit. Note that although the X-ray source and the X-ray camera each rotate on different fixed orbits, the case where the orbits of the two are the same is not excluded.

[0011] With this configuration, if the X-ray source and the X-ray camera have the same resolution, they rotate in a fixed orbit, so correction specific to the rotation position can be performed during imaging, making it possible to perform imaging at the ideal position. In addition, there is no need to move the X-ray source and the X-ray camera to the location to be imaged, and a short, highly accurate axis can be used as the axis of movement of the X-ray source, making it possible to perform high-speed, highly accurate position control. As a result, it is possible to achieve both high resolution images and high-speed imaging in the X-ray imaging system.

[0012] The X-ray source may be disposed above the X-ray camera across the workpiece holder in the vertical direction. In order to obtain a photographed image with the highest possible resolution within the constraints of the size of the device and the resolution of the X-ray camera, it is better to make the distance between the X-ray source and the photographed object as short as possible and to make the distance between the X-ray camera and the X-ray source as long as possible. However, since the photographed object is usually placed on the workpiece holder, the above-mentioned configuration is suitable for obtaining a photographed image with high resolution.

[0013] The X-ray inspection apparatus further includes an entrance for carrying the object into the apparatus and an exit for carrying the object out of the apparatus, The control means may move the workpiece holding portion to the carry-in entrance and the carry-out exit.

[0014] Because the work holding unit can move in the X, Y and Z directions, it can not only move the area to be photographed to the position to be photographed by the X-ray source and X-ray camera, but it can also move the work to the position to load the work from the upstream process equipment, and to the position to load the work to the downstream process equipment, which reduces equipment costs compared to providing a separate dedicated movement mechanism.

[0015] The control means further comprises: Controlling the X-ray source and the X-ray camera to continue rotating on the orbit at all times until imaging of all of the imaging target portions of the imaging target with at least the same imaging resolution is completed; When the location to be imaged is placed at a position to be imaged by the X-ray source and the X-ray camera, the X-ray camera may be controlled to capture a predetermined number of transmission images while continuing a rotational motion.

[0016] Even if the X-ray source and the X-ray camera rotate on the same orbit when the imaging resolution is the same, stopping the rotation each time until the imaging target part of the imaging object is positioned at the imaging position (i.e., rotating and stopping are repeated each time imaging is performed) poses problems in terms of increasing the speed of the inspection and improving the resolution of imaging. The repeated stopping and rotating motion itself can cause positional deviation, and when performing a rotation motion from a stopped state, the X-ray source and the X-ray camera are likely to vibrate due to the change in acceleration, resulting in a wasteful waiting period during which the inspection image cannot be captured until the vibration subsides. In this regard, by making the X-ray source and the X-ray camera continue to rotate at all times as described above and performing imaging (capturing a predetermined number of transmitted images) only when the imaging target part is positioned at the imaging position, problems associated with the acceleration and deceleration of the X-ray source and the X-ray camera can be eliminated.

[0017] The X-ray source and the X-ray camera may be configured to be movable in the vertical direction, and the control means may control the positional relationship between the X-ray source, the X-ray camera, and the workpiece holder so that the distance between the object and the X-ray source is constant during imaging, regardless of the shape of the object. With this configuration, it is possible to perform high-resolution imaging while maintaining the distance between the object and the X-ray source, regardless of the shape of the object.

[0018] Furthermore, the diameter of the orbit of the X-ray source may be equal to or less than 1 / 10 of the diameter of the orbit of the X-ray camera. With this configuration, it is possible to obtain high-resolution images while suppressing the device size by using an X-ray camera with a realistic resolution, taking into account the vertical positional relationship between the X-ray source, the X-ray camera, and the object to be photographed.

[0019] The captured image may have a resolution of less than 10 μm per pixel. The technology disclosed herein is suitable for such high-resolution imaging and inspection.

[0020] The present invention can also be understood as an X-ray inspection apparatus as follows: an X-ray source movable at least in a horizontal direction; an X-ray camera that is movable at least in a horizontal direction; a workpiece holding section that holds an object to be inspected and is movable in horizontal and vertical directions; A control means for controlling the movement of at least the X-ray source, the X-ray camera, and the workpiece holder; an inspection means for determining whether the object to be inspected is good or bad using X-ray image data captured by the X-ray camera; It has The control means controlling the X-ray source and the X-ray camera so as to rotate in a constant orbit according to a resolution of an image captured by the X-ray camera; Controlling the workpiece holding unit so that a portion of the object to be inspected is positioned at a photographing position by the X-ray source and the X-ray camera. This is an X-ray inspection device.

[0021] The present invention can be achieved by combining the above-mentioned configurations together as long as no technical contradiction occurs. Effect of the Invention

[0022] According to the present invention, it is possible to provide a technique for achieving high resolution and high speed imaging in capturing X-ray examination images. [Brief description of the drawings]

[0023] [Figure 1] FIG. 1 is a schematic diagram showing the appearance of an X-ray inspection apparatus according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a schematic diagram showing a schematic configuration of an X-ray inspection apparatus according to an embodiment of the present invention. [Diagram 3] FIG. 3 is a schematic diagram showing a schematic configuration of an X-ray inspection apparatus according to a first modified example. [Figure 4] FIG. 4 is a schematic diagram showing a schematic configuration of an X-ray inspection apparatus according to a second modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0024] <Application Examples> An outline of an application example of the present invention will be described below with reference to some of the drawings. The present invention can be applied to an X-ray inspection device 1 as shown in Figures 1 and 2, for example. Figure 1 is a schematic diagram showing the outline of the external appearance of the X-ray inspection device 1 as viewed from the front, and Figure 2 is a schematic diagram showing the configuration and functional blocks related to X-ray photography of the X-ray inspection device 1.

[0025] 1 and 2, the X-ray inspection device 1 includes an imaging unit equipped with an X-ray source 10 and an X-ray camera 20, and a terminal 100, and receives an inspection target (workpiece) W transported from an upstream process device through an entrance 61, and the workpiece W is X-rayed inside the device. The X-ray inspection device 1 then reconstructs three-dimensional shape data of the workpiece W (the part to be inspected) from the acquired imaging data, and inspects the workpiece W based on a desired cross-sectional image obtained from the three-dimensional shape data.

[0026] Specifically, the workpiece W is irradiated with X-rays from the X-ray source 10, and an X-ray image based on the amount of transmission is captured by the X-ray camera 20. The X-ray source 10 and the X-ray camera 20 revolve on orbits C1 and C2, respectively, and capture X-ray images of the workpiece W at multiple positions on the orbits. Here, the orbit C1 of the X-ray source 10 and the orbit C2 of the X-ray camera 20 are set to be constant according to the image resolution of the captured image.

[0027] The workpiece W is, for example, housed in a JEDEC standard tray, transported by a carry-in conveyor 91 from an upstream process, carried into the X-ray inspection device 1 from the carry-in entrance 61, and placed on the workpiece holding unit 30. The workpiece holding unit 30 is configured to be movable in the horizontal and vertical directions by a stage having XYZ drive axes, and holds the tray on which the workpiece W is placed. Note that the tray is not shown in the drawing for simplicity.

[0028] In the X-ray inspection device 1 according to this application example, the X-ray source 10 rotates in a constant orbit in the horizontal direction by the XY stage, and the workpiece holder 30 moves so that the inspection location of the workpiece W (i.e., the location where X-ray photography is performed) is positioned at the photography position (a position where a clear X-ray image can be obtained) by the X-ray camera 20. The movement of each stage is achieved by a combination of a servo motor and a ball screw, but since this technology is well known, a description thereof will be omitted.

[0029] Conventionally, there is known a device in which an X-ray source and an X-ray camera move so as to be able to rotate around an inspection point (i.e., a point where X-ray photography is performed) of a workpiece held by a workpiece holder and in a stopped state, and when the movement ends, the device stops once and then starts the rotation motion again. Alternatively, there is also known a device in which the workpiece holder is configured to be rotatable in the horizontal direction, the X-ray source and the X-ray camera are fixed, and the workpiece side is rotated.

[0030] In the method of moving the X-ray source and X-ray camera to the inspection location, the X-ray source and X-ray camera must move and rotate repeatedly for each image capture, so the repeatability of the rotation trajectory is low, making it difficult to perform inspections with high resolution images of, for example, 1 μm or less. In the method of rotating the workpiece horizontally, the object to be inspected moves due to rotational acceleration, making it difficult to rotate the workpiece, i.e., take X-ray images, at high speed.

[0031] In this regard, in the X-ray inspection device 1 according to this application example, the role of locating the inspection point of the workpiece W at the photographing position by the X-ray source 10 and the X-ray camera 20 is solely played by the workpiece holding unit 30, and since the X-ray source 10 and the X-ray camera 20 only rotate on a fixed orbit according to the resolution, correction specialized for the rotation position can be performed when photographing the inspection point. Also, since the X-ray source 10 only needs to move by the rotation orbit C1, a short (small pitch) and highly accurate axis can be used as the moving axis, and high-speed and highly accurate position control can be performed. Therefore, both high resolution of the photographed image and high speed inspection can be realized.

[0032] <Example 1> In the following, the form for carrying out the present invention will be described in detail by way of example with reference to the drawings (including the drawings once described in the above application example) in sequence. However, the specific configurations described in each embodiment are not intended to limit the scope of the present invention to those configurations unless otherwise specified. Note that Fig. 1 is a schematic diagram showing an outline of the external appearance of an X-ray inspection device 1 according to this embodiment when viewed from the front, and Fig. 2 is a schematic diagram showing the configuration and functional blocks related to X-ray photography of the X-ray inspection device 1 according to this embodiment.

[0033] The X-ray inspection device 1 according to the first embodiment of the present invention is a device for determining, for example, the quality of the soldered state of electronic components soldered to a printed circuit board, bumps of a ball grid array (BGA), etc. More specifically, the X-ray source 10, the workpiece W, and the X-ray camera 20 are moved relative to one another to perform X-ray photography multiple times, obtain the state of the inside of the photographing target area (i.e., the inspection area), generate a cross-sectional image at an appropriate position, and inspect the quality based on the cross-sectional image.

[0034] In the following, the same components as those already described are denoted by the same reference numerals, and the detailed description will not be repeated. Fig. 1 shows a schematic configuration of an X-ray inspection device 1 according to a first embodiment of the present invention. The X-ray inspection device 1 has an entrance 61 and an exit 62, and an entrance conveyor 91 for transporting a work W from an upstream process of the X-ray inspection device 1 to the entrance 61 is disposed in the front stage, and an exit conveyor 92 for transporting an inspected work W to a downstream process of the X-ray inspection device 1 is disposed in the rear stage.

[0035] The X-ray inspection device 1 includes a terminal 100 for control and operation. The terminal 100 is realized, for example, by a general-purpose computer. Specifically, the computer may include a control unit 110 realized by a processor (not shown) such as a CPU or DSP, a storage unit (not shown), an input unit 103 configured by an input device 40 such as a keyboard or a mouse, an output unit 104 configured by an output device 50 such as a liquid crystal display, an inspection unit 105 for determining the quality of the workpiece W, and the like. The terminal 100 may be configured separately from an imaging unit including an X-ray camera 20 and the like. The terminal 100 may be configured as a single computer, or may be configured as a plurality of computers linked to each other.

[0036] The storage means includes, for example, a main storage unit 101 configured with a read-only memory (ROM), a random access memory (RAM), etc., and an auxiliary storage unit 102 configured with an EPROM, a hard disk drive (HDD), a removable medium, etc. An operating system (OS), various programs, etc. are stored in the auxiliary storage unit 102, and the functions of each unit of the X-ray inspection apparatus 1 are realized by loading the programs into a working area of ​​the main storage unit 101 and executing them by the control unit 110.

[0037] The inspection unit 105 detects a plurality of X-rays of the inspection portion of the workpiece W captured by the X-ray camera 20. A desired cross-sectional image is extracted from the three-dimensional shape data reconstructed using the image, and the quality of the workpiece W is judged (i.e., X-ray inspection) based on whether the feature values ​​obtained from the image meet predetermined judgment criteria.

[0038] 2 shows the arrangement of the X-ray source 10, the X-ray camera 20, and the workpiece holder 30 in the X-ray inspection device 1. In the X-ray inspection device 1, the workpiece W carried in through the carry-in entrance 61 is transferred to the workpiece holder 30 at the carry-in entrance 61, and X-ray images are taken at multiple shooting positions for each inspection point on the workpiece W to obtain three-dimensional data.

[0039] Specifically, X-rays are irradiated from the X-ray source 10 onto the workpiece W, and an X-ray image of the transmitted light is captured by the X-ray camera 20. Both the X-ray source 10 and the X-ray camera 20 can be moved by an XY stage. The X-ray source 10 and the X-ray camera 20 move on rotational orbits C1 and C2, respectively, by horizontal movement by the XY stage, and capture images at multiple positions on the rotation circle. The diameter of the rotational orbit C1 of the X-ray source 10 may be set to, for example, one-tenth or less of the diameter of the rotational orbit C2 of the X-ray camera 20.

[0040] The X-ray camera 20 is a two-dimensional X-ray detector that detects X-rays irradiated from the X-ray source 10 and transmitted through the workpiece W. An image intensifier (II) tube or a flat panel detector (FPD) can be used as the X-ray camera 20. The X-ray camera 20 according to this embodiment has high resolution (for example, 1 μm or less per pixel) and can obtain imaging data that can be used to inspect minute areas. Although only one X-ray camera 20 is used here, multiple X-ray cameras may be used.

[0041] Each part in X-ray inspection apparatus 1 is controlled based on a control signal from control unit 110 of terminal 100. X-ray inspection apparatus 1 further includes functional units in control unit 110, such as an X-ray source control unit 111, an XY stage control unit for X-ray source 112, a workpiece stage control unit 113, an XY stage control unit for camera 114, and an X-ray camera control unit 115.

[0042] The camera XY stage control unit 114 transmits a control signal for driving the camera XY stage (not shown) and for horizontally moving the X-ray camera 20. The X-ray camera control unit 115 transmits a control signal for causing the X-ray camera 20 to capture an X-ray image.

[0043] The X-ray source control unit 111 transmits signals for starting and ending irradiation of X-rays by the X-ray source 10 and for adjusting the X-ray intensity. The X-ray source XY stage control unit 112 transmits signals for driving the X-ray source XY stage (not shown) to move the X-ray source 10 in the horizontal direction.

[0044] The work stage control unit 113 transmits a control signal to the work holding unit 30 to control the horizontal and vertical positions of the work W to be optimal positions for photographing. Also, when carrying in and out the work W, the work stage control unit 113 transmits a control signal to move the work holding unit 30 to the carry-in entrance 61 and the carry-out exit 62, and controls so that the work W is carried in and out.

[0045] The signals output from the X-ray source control unit 111, the XY stage control unit 112 for the X-ray source, the work stage control unit 113, the XY stage control unit 114 for the camera, and the X-ray camera control unit 115 are determined based on the information stored in the main memory unit 101 and the auxiliary memory unit 102, and the position information of the X-ray source 10, the X-ray camera 20, and the work holding unit 30 detected by position sensors not shown.

[0046] With the above configuration, the X-ray inspection device 1 can capture images of a workpiece from various angles. It is possible to control the positional relationship between the radiation source 10, the X-ray camera 20, and the workpiece holder 30. In this embodiment, based on the results of photographing from various directions, three-dimensional data of the test point of the workpiece W is generated using a three-dimensional data generation method called CT.

[0047] In the X-ray inspection apparatus 1 according to this embodiment, the control unit 110 controls the X-ray source 10 and the X-ray camera 20 to constantly rotate on the above-mentioned rotation orbits C1 and C2 until all of the inspection target locations have been photographed at the same imaging resolution (for example, until all of the inspection target locations on one workpiece W have been photographed). Then, only when the workpiece holder 30 has positioned the inspection location at a position for photography by the X-ray source 10 and the X-ray camera 20, the control unit 110 controls the X-ray camera 20 to photograph a predetermined number of images.

[0048] By performing such control, it is possible to eliminate the acceleration and deceleration associated with stopping and rotating the X-ray source 10 and the X-ray camera 20 when changing the position of the inspection point of the workpiece W, which contributes to faster inspection and higher resolution imaging.

[0049] <Variation 1> Next, a first modified example of the present invention will be described with reference to Fig. 3. An X-ray inspection apparatus 2 according to this modified example has the same appearance and schematic configuration as the X-ray inspection apparatus 1 of the first embodiment. As shown in Fig. 3, the X-ray inspection apparatus 2 differs from the X-ray inspection apparatus 1 of the first embodiment in that the positional relationship between the X-ray source 10 and the X-ray camera 20 is upside down.

[0050] According to such a configuration, even if the X-ray source 10 is very heavy and it is undesirable to operate it on the upper part of the device from the viewpoint of stability, it is possible to perform high-speed inspection using high-resolution images. Also, this is suitable for a workpiece W in which the inspection location is concentrated on the lower side of the workpiece W.

[0051] <Variation 2> Next, a second modified example of the present invention will be described with reference to Fig. 4. The external appearance and general configuration of the X-ray inspection apparatus 3 according to this modified example are similar to those of the X-ray inspection apparatus 1 of the first embodiment. The X-ray inspection apparatus 3 is different from the X-ray inspection apparatus 1 of the first embodiment in that the X-ray source 10 and the X-ray camera 20 are also configured to be movable in the vertical direction.

[0052] Specifically, the X-ray source 10 and the X-ray camera 20 are also moved by a stage having three axes, XYZ, and the control unit 310 of the terminal 300 is configured to include functional units of an XYZ stage control unit 312 for the X-ray source and an XYZ stage control unit 314 for the camera.

[0053] With this configuration, it is possible to control the positional relationship between the X-ray source 10, the X-ray camera 20, and the workpiece holder 30 so that the distance between the workpiece W and the X-ray source 10 is constant, regardless of the shape of the workpiece W. This makes it possible to perform high-resolution imaging while maintaining the clearance between the workpiece W and the X-ray source 10, regardless of the shape of the workpiece W.

[0054] <Other> The above examples merely exemplify the present invention, and the present invention is not limited to the above specific embodiments. Various modifications and combinations of the present invention are possible within the scope of the technical concept. For example, the configurations of the above modification 1 and modification 2 can be combined to place the X-ray camera 20 on the vertical upper side and the X-ray source 10 on the vertical lower side across the workpiece holder 30, and each of them can move not only horizontally but also vertically.

[0055] Furthermore, the present invention does not necessarily have to be integrated with a configuration for inspecting an object to be inspected, and can also be applied as an X-ray imaging device that simply captures X-ray tomographic images for constructing three-dimensional shape data.

[0056] <Appendix 1> an X-ray source (10) movable at least in a horizontal direction; an X-ray camera (20) that is movable at least in the horizontal direction; a work holding unit (30) that holds an object to be photographed and is movable in horizontal and vertical directions; A control means (110, 310) for controlling at least the movement of the X-ray source, the X-ray camera, and the workpiece holder; It has The control means controlling the X-ray source and the X-ray camera so as to rotate in a constant orbit according to a resolution of an image captured by the X-ray camera; Controlling the workpiece holding unit so that a portion of the object to be photographed is positioned at a photographing position by the X-ray source and the X-ray camera. X-ray system (1, 2, 3).

[0057] <Appendix 2> The X-ray source is disposed above the X-ray camera across the workpiece holder in the vertical direction. 2. An X-ray imaging system as described in claim 1.

[0058] <Appendix 3> The apparatus has an entrance (61) for carrying the object to be photographed into the apparatus, and an exit (62) for carrying the object to be photographed out of the apparatus, The control means Moving the workpiece holding unit to the entrance and the exit; 3. The X-ray imaging system according to claim 1 or 2,

[0059] <Appendix 4> The control means Controlling the X-ray source and the X-ray camera to continue rotating on the orbit at all times until imaging of all of the imaging target areas with at least the same imaging resolution is completed; When the location to be photographed is placed at a position to be photographed by the X-ray source and the X-ray camera, the X-ray camera is controlled so as to capture a predetermined number of transmission images while continuing a rotational motion. 4. An X-ray imaging system according to any one of claims 1 to 3.

[0060] <Appendix 5> The X-ray source and the X-ray camera are configured to be movable in the vertical direction, The control means When the X-ray camera captures an image, the positional relationship between the X-ray source, the X-ray camera, and the workpiece holder is controlled so that the distance between the object and the X-ray source is constant regardless of the shape of the object. 5. An X-ray imaging system according to any one of claims 1 to 4.

[0061] <Appendix 6> the diameter of the trajectory (C1) of the X-ray source is equal to or smaller than one tenth of the diameter of the trajectory (C2) of the X-ray camera; 6. An X-ray imaging system according to any one of claims 1 to 5.

[0062] <Appendix 7> The resolution of the captured image is less than 10 μm per pixel. 7. An X-ray imaging system according to any one of claims 1 to 6.

[0063] <Appendix 8> an X-ray source (10) movable at least in a horizontal direction; an X-ray camera (20) that is movable at least in the horizontal direction; a workpiece holding section (30) that holds an object to be inspected and is movable in horizontal and vertical directions; A control means (110, 310) for controlling at least the movement of the X-ray source, the X-ray camera, and the workpiece holder; an inspection means (105) for determining whether the inspection object is good or bad using X-ray image data captured by the X-ray camera; It has The control means controlling the X-ray source and the X-ray camera so as to rotate in a constant orbit according to a resolution of an image captured by the X-ray camera; Controlling the workpiece holding unit so that a portion of the object to be inspected is positioned at a photographing position by the X-ray source and the X-ray camera. X-ray inspection equipment (1, 2, 3). [Explanation of symbols]

[0064] 1, 2, 3... X-ray inspection equipment 10...X-ray source 20. X-ray camera 30...Work holding section 40 Input Devices 50 Output Device 61... Loading entrance 62...Exit 91···Intake conveyor 92...Export conveyor 100, 300... Terminal 110, 310... Control unit C1, C2...Turning trajectory W... Work

Claims

1. an X-ray source movable at least in a horizontal direction; an X-ray camera that is movable at least in a horizontal direction; A work holding unit that holds an object to be photographed and is movable in a horizontal direction and a vertical direction; A control means for controlling the movement of at least the X-ray source, the X-ray camera, and the workpiece holder; It has The control means controlling the X-ray source and the X-ray camera so as to rotate in a constant orbit according to a resolution of an image captured by the X-ray camera; Controlling the workpiece holding unit so that a portion of the object to be photographed is positioned at a photographing position by the X-ray source and the X-ray camera. X-ray imaging system.

2. The X-ray source is disposed above the X-ray camera across the workpiece holder in the vertical direction.

2. The X-ray imaging system according to claim 1 .

3. The apparatus has an entrance for carrying the object to be photographed into the apparatus and an exit for carrying the object to be photographed out of the apparatus, The control means Moving the workpiece holding unit to the entrance and the exit; 2. The X-ray imaging system according to claim 1 .

4. The control means Controlling the X-ray source and the X-ray camera to continue rotating on the orbit at all times until imaging of all of the imaging target areas with at least the same imaging resolution is completed; When the location to be photographed is placed at a photographing position by the X-ray source and the X-ray camera, the X-ray camera is controlled so as to capture a predetermined number of transmission images while continuing a rotational motion.

2. The X-ray imaging system according to claim 1 .

5. The X-ray source and the X-ray camera are configured to be movable in a vertical direction, The control means When the X-ray camera is used for photographing, a positional relationship between the X-ray source, the X-ray camera, and the workpiece holder is controlled so that a distance between the object to be photographed and the X-ray source is constant regardless of a shape of the object to be photographed.

2. The X-ray imaging system according to claim 1 .

6. a diameter of the orbit of the X-ray source is equal to or smaller than one-tenth of a diameter of the orbit of the X-ray camera; 2. The X-ray imaging system according to claim 1 .

7. The resolution of the captured image is less than 10 μm per pixel.

7. The X-ray imaging system according to claim 1, wherein the X-ray imaging system further comprises a first detecting means.

8. an X-ray source movable at least in a horizontal direction; an X-ray camera that is movable at least in a horizontal direction; a workpiece holding section that holds an object to be inspected and is movable in horizontal and vertical directions; A control means for controlling the movement of at least the X-ray source, the X-ray camera, and the workpiece holder; an inspection means for determining whether the object to be inspected is good or bad using X-ray image data captured by the X-ray camera; It has The control means controlling the X-ray source and the X-ray camera so as to rotate in a constant orbit according to a resolution of an image captured by the X-ray camera; Controlling the workpiece holding unit so that a target portion of the inspection object is positioned at a position to be photographed by the X-ray source and the X-ray camera. X-ray inspection equipment.

Images