Vibration insulating structure and manufacturing method of the same

Abstract

To provide a vibration insulating structure having predetermined vibration insulating characteristics, and to provide a manufacturing method of the vibration insulating structure.SOLUTION: A vibration insulating structure is fixed to a vibration source and a measurement apparatus is placed thereon. The vibration insulating structure includes: a first vibration insulating structure fixed to the vibration source; and a second vibration insulating structure provided on top of the first vibration insulating structure. The first vibration insulating structure includes: a first mass body; and a first vibration insulating member supporting the first mass body. The second vibration insulating structure includes: a second mass body; and a second vibration insulating member supporting the second mass body. The measurement apparatus is placed on the second mass body, and a second structure ratio of the second vibration insulating structure is larger than a first structure ratio of the first vibration insulating structure.SELECTED DRAWING: Figure 15

Description

[Technical Field]

[0001] The present invention relates to a vibration isolation structure for an inertial measurement unit and a method for manufacturing the vibration isolation structure. [Background technology]

[0002] Inertial measurement units (IMUs) are known to be equipped with multiple sensors, such as angular velocity sensors and acceleration sensors, and are used to measure the displacement of buildings, structures, etc. With the structure of conventional inertial measurement units, external vibrations that are not from the object being detected are transmitted to the sensors, making it impossible to obtain accurate measurement data, so it has been proposed to equip inertial measurement units with a vibration-proof structure.

[0003] For example, Patent Document 1 discloses an inertial measurement unit with a vibration-proof structure. This inertial measurement unit has a vibration-proof structure that holds a sensor unit including an inertial sensor, and the vibration-proof structure is configured by stacking a first substrate and a second substrate. A vibration-proof member such as a gel bushing is provided between the first substrate and the second substrate to prevent external vibrations from being transmitted to the sensor unit. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2022-50915 Summary of the Invention [Problem to be solved by the invention]

[0005] However, there was room for improvement in the inertial measurement unit of Patent Document 1. Specifically, Patent Document 1 does not contain any description of optimizing the vibration isolation structure in consideration of vibration isolation characteristics including the resonance frequency and amplitude amplification factor, and there was a risk that sufficient vibration isolation performance would not be obtained. In other words, there has been a demand for a vibration-isolating structure having desired vibration-isolating properties and a manufacturing method thereof. [Means for solving the problem]

[0006] A vibration-isolating structure according to one embodiment of the present application is a vibration-isolating structure that is fixed to a vibration source and on which a measuring device is placed, and includes a first vibration-isolating structure that is fixed to the vibration source, and a second vibration-isolating structure that is overlaid on the first vibration-isolating structure, wherein the first vibration-isolating structure includes a first mass and a first vibration-isolating member that supports the first mass, and the second vibration-isolating structure includes a second mass and a second vibration-isolating member that supports the second mass, the measuring device is placed on the second mass, and the second structure ratio of the second vibration-isolating structure is greater than the first structure ratio of the first vibration-isolating structure.

[0007] A manufacturing method of a vibration-proof structure according to one embodiment of the present application includes a first vibration-proof structure fixed to a vibration source and a second vibration-proof structure overlaid on the first vibration-proof structure, the first vibration-proof structure including a first mass and a first vibration-proof member, and the second vibration-proof structure including a second mass and a second vibration-proof member, and a measuring device is placed on the second mass. The manufacturing method of a vibration-proof structure includes the steps of: acquiring the unit parameters of the vibration-proof member to be used from a database of unit parameters; generating reference parameters based on a desired resonance frequency and amplitude amplification factor; determining three points on a coordinate system in which the resonance frequency and the amplitude amplification factor are correlated based on the reference parameters; calculating an approximate straight line at an arbitrary structural ratio Rr based on the three points on the coordinate system; dividing the approximate straight line based on a division ratio and calculating the amount of the second mass and the amount of the second vibration-proof member in the second vibration-proof structure; and outputting the calculated results. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a plan view of a vibration-proof structure according to a first embodiment. [Figure 2] Side view of the vibration-proof structure. [Figure 3] FIG. 2 is a cross-sectional view of the vibration-isolating member taken along the cross section bb in FIG. 1 . [Figure 4] Schematic diagram of a model of the vibration-proof structure. [Figure 5] Vibration model diagram used in designing vibration-proof structures. [Figure 6] FIG. 10 is a flowchart showing the flow of a method for obtaining unit parameters. [Figure 7] Schematic diagram of the unit parameter measurement device. [Figure 8] FIG. 10 is a graph showing an example of gain frequency characteristics. [Figure 9] FIG. 10 is a flowchart showing the flow of a design method for a vibration-proof structure. [Figure 10] FIG. 10 is a graph showing an example of the correlation between an arbitrary structural ratio Rr and an amplitude amplification factor. [Figure 11] FIG. 10 is a graph showing an example of the correlation between an arbitrary structural ratio Rr and a resonance frequency. [Figure 12] FIG. 10 is a graph showing an example of the correlation between the resonance frequency and the amplitude amplification factor, with the structural ratio Rr used as a parameter. [Figure 13] FIG. 10 is a plan view of a vibration-proof structure according to a second embodiment. [Figure 14] Side view of the vibration-proof structure. [Figure 15] Vibration model diagram used in designing a two-layer vibration isolation structure. [Figure 16] FIG. 1 is a flowchart showing the steps of a design method for a two-layer vibration isolation structure. [Figure 17] 10 is a graph showing an example of the correlation between an arbitrary structural ratio Rr and an amplitude amplification factor in vibration-proof structure 0 and vibration-proof structure 2. FIG. [Figure 18] 10 is a graph showing an example of the correlation between an arbitrary structural ratio Rr and the resonance frequency in vibration-proof structure 0 and vibration-proof structure 2. FIG. [Figure 19] 10 is a graph showing an example of the correlation between the resonance frequency and the amplitude amplification factor, with the structural ratio Rr of the vibration-proof structure 2 used as a parameter. [Figure 20] FIG. 20 is an enlarged graph of the approximation line in FIG. 19 . [Figure 21] FIG. 1 is a functional block diagram of a measurement device including a vibration isolation structure. [Figure 22] FIG. 10 is a graph showing the correlation between the bandwidth of the measurement device and the gain frequency characteristics of the vibration isolation structure. [Figure 23] FIG. 2 is a diagram showing an example of an installation mode of a vibration isolation structure. DETAILED DESCRIPTION OF THE INVENTION

[0009] Embodiment 1 ***Outline of vibration-proof structure*** Fig. 1 is a plan view of the vibration-proof structure according to this embodiment, Fig. 2 is a side view of the vibration-proof structure, and Fig. 3 is a cross-sectional view of the vibration-proof member taken along the line bb in Fig. 1 . The vibration-isolating structure 100 of this embodiment is a base with vibration isolation functions on which a measuring device 50, which is an inertial measurement unit (IMU) equipped with multiple sensors such as angular velocity sensors and acceleration sensors and used to measure the displacement of buildings, structures, etc., is placed. Note that the measuring device 50 is not limited to an IMU, and may be, for example, an inertial navigation system (INS), an acceleration sensor, a displacement meter, a gyro sensor, an optical sensor, or an image measuring device. In other words, the measuring device 50 is any of an inertial measurement unit, an inertial navigation system, an acceleration sensor, a displacement meter, a gyro sensor, an optical sensor, and an image measuring device.

[0010] As shown in Figures 1 and 2, a measuring device 50 having a substantially rectangular parallelepiped shape is placed on a rectangular substrate 10. The substrate 10 is attached to a base substrate 15 via vibration-isolating members 8 provided at the four corners of the substrate 10. The base substrate 15 is a metal substrate that is slightly larger than the substrate 10, and a plate-shaped magnet 16 of approximately the same size as the base substrate 15 is attached to its underside. The magnet 16 is attracted and fixed to a magnetic metal part of the vibration source. Note that the magnet 16 is not limited to a plate-shaped magnet, but may be a coin-shaped magnet, in which case it is preferable to place the coin-shaped magnet in multiple locations including the four corners of the base substrate 15.

[0011] In each drawing, the X-axis, Y-axis, and Z-axis are shown as three mutually orthogonal axes. In this embodiment, the direction in which the long sides of the substrate 10, which is substantially rectangular in plan view, extend is the X-positive direction, the direction in which the short sides extend is the Y-positive direction, and the height direction of the vibration-proof structure 100 is the Z-positive direction. The X-positive direction and the X-negative direction are collectively referred to as the X-axis direction. The same applies to the Y-axis and Z-axis. The Z-positive direction is also referred to as the upward direction, and the Z-negative direction is also referred to as the downward direction.

[0012] 2, the vibration-isolating structure 100 has a configuration in which a substrate 10 is layered on a base substrate 15. In a preferred example, the substrate 10 is a flat substrate made of aluminum. Note that the material of the substrate 10 is not limited to aluminum, and other metal substrates or ceramic substrates may also be used. The substrate 10 is fixed to the base substrate 15 by vibration-isolating members 8 at four locations. The number of vibration-isolating members 8 is not limited to four, but may be three, or may be five or more.

[0013] As shown in FIG. 3, vibration-isolating member 8 is made up of elastic bodies 3a and 3b, a collar 4, a washer 5, a bolt 6, etc., and employs a vibration-isolating structure in which substrate 10 is sandwiched between elastic bodies 3a and 3b. In a preferred embodiment, the elastic bodies 3a and 3b are gel bushings. However, they are not limited to gel bushings and may be any elastic material, such as silicone rubber, other rubbers, or elastomers. The elastic body 3a has a hemispherical portion and a cylindrical portion extending upward from the hemispherical portion, and the cylindrical portion is inserted into a hole 11 in the substrate 10. A through-hole through which the collar 4 is inserted is formed in the cylindrical portion and the hemispherical portion.

[0014] The collar 4 is a cylindrical collar, and in a preferred embodiment is made of brass. However, it is not limited to being made of brass, and may be made of aluminum, other metals, or resin, for example. Elastic body 3b is a semi-spherical member that pairs with elastic body 3a and has a hole in its center. The cylindrical part of elastic body 3a is inserted into the hole in elastic body 3b. The combination of elastic bodies 3a and 3b is also referred to as elastic body 3. In a preferred example, an aluminum washer is used as the washer 5. However, the washer is not limited to being made of aluminum, and may be made of other metals or resin. In a preferred example, a stainless steel bolt is used as the bolt 6. However, the bolt is not limited to stainless steel and may be made of any metal, such as steel or other metals.

[0015] As shown in Figure 3, the cylindrical portion of elastic body 3a is inserted into hole 11 in substrate 10, and elastic body 3b is fitted into the cylindrical portion that protrudes from the top of hole 11. Then, with collar 4 set in the through hole of the cylindrical portion of elastic body 3a, bolt 6 is inserted through washer 5, and the thread at the tip of bolt 6 is screwed into base substrate 15, thereby forming vibration-proof member 8. Because vibration-proof member 8 is a type that allows bolt 6 to pass through, lateral vibration can be minimized. Here, the collar 4 is a compression limiting member, and the bolt 6 is a fixing member. The vibration-damping member 8 is a structure in which the elastic bodies 3a and 3b are compressed by the washer 5 and the bolt 6, while the collar 4 limits the compression so that the elastic bodies 3a and 3b are compressed with an appropriate crushing pressure.

[0016] ***Vibration modeling of vibration isolation structures*** Figure 4 is a schematic diagram of a model of the vibration isolation structure, and Figure 5 is a vibration model diagram used in designing the vibration isolation structure. As shown in Fig. 4, the vibration-proof member 8 can be represented as a vibration model in which a spring stiffness section k and a damping section C are connected in parallel. The damping section C is a damper, and is also called the damping coefficient C. The other three vibration-proof members 8 are also represented by the same vibration model. In Fig. 4, the base substrate 15 is considered to be integrated with the vibration source. In the design method of the vibration isolation structure described later, calculations are performed using vibration model 0 in FIG. 5, which combines the four vibration isolation members of the model in FIG. 4 into one.

[0017] ***Getting unit parameters*** Fig. 6 is a flow chart showing the flow of a method for acquiring unit parameters, and Fig. 7 is a schematic diagram of a device for measuring unit parameters. First, as a preparatory step in designing a vibration isolation structure, a method for obtaining unit parameters of the vibration isolation structure will be described.

[0018] In step S11, vibration-isolating members are selected. Specifically, vibration-isolating members that can be used in the vibration-isolating structure to be designed are selected, and unit parameters are obtained for each of the selected vibration-isolating members. The vibration-isolating members may be commercially available general-purpose parts or may be specially designed vibration-isolating members.

[0019] In step S12, the vibration isolation structure for which measurements are to be performed to obtain the unit parameters is determined. In a preferred example, the vibration isolation structure 100 in Fig. 2 is adopted, and the determined vibration isolation structure is regarded as the unit structure of vibration model 0 in Fig. 5. Note that vibration model 0 is also referred to as the 0th vibration isolation structure.

[0020] In step S13, the selected vibration-isolating member is attached to the vibration-isolating structure 100, and the vibration response characteristics are measured using the measuring device 98 in Fig. 7. More specifically, as shown in Fig. 7, the measuring device 98 is equipped with two sensors 81 and 82, with sensor 82 attached to the vibration source and sensor 81 attached to the top of the vibration-isolating structure 100. In a preferred example, the vibration source is a vibration table such as a vibrator, and the sensors 81 and 82 are acceleration sensors. The measuring device 98 measures the outputs of the two sensors 81 and 82 when the vibration acceleration of the vibration source is frequency swept.

[0021] In step S14, the vibration propagation frequency characteristic G AB Specifically, the frequency characteristic Ga(f) of the vibration response of sensor 81 is divided by the frequency characteristic Gb(f) of the vibration response of sensor 82 from the frequency characteristics of the vibration response obtained by FFT processing of each of the acquired vibration responses to obtain the vibration propagation frequency characteristic GAB(f).

[0022]

number

[0023] Fig. 8 is a graph showing an example of the gain frequency characteristic, with frequency (Hz) on the horizontal axis and gain (db) on the vertical axis. Graph 70 in Fig. 8 is an example of a graph showing the gain frequency characteristic of vibration propagation obtained in step S14, and shows the gain frequency characteristic for vibration model 0 using the selected vibration-isolating member. In graph 70, there is a peak when the frequency exceeds 20 Hz, and as shown by the dotted line, the frequency of this peak value is the resonance frequency f0, and the peak value is the amplitude amplification factor T0.

[0024] In step S15, the resonant frequency and amplitude amplification factor in the measured gain frequency characteristics are calculated, and the mass m0 of the mass body, the vibration-isolating member S0, the resonant frequency f0, and the amplitude amplification factor T0 are set as unit parameters to form a parameter set. In other words, the unit parameter is a combination of data including the resonant frequency calculated from the gain frequency characteristics of the 0th vibration isolation structure, the amplitude amplification factor at the resonant frequency, the amount of the vibration isolation member, and the amount of the mass, in the 0th vibration isolation structure which has a vibration isolation member connected to a vibration source and a mass supported by the vibration isolation member.

[0025] In step S16, the set of unit parameters obtained is stored in a database as unit parameter data for various vibration isolation members.

[0026] In other words, the method for generating a database of unit parameters includes the steps of measuring the gain frequency characteristics of a zeroth vibration-proof structure, which has a vibration-proof member connected to a vibration source and a mass body supported by the vibration-proof member; calculating the resonant frequency and amplitude amplification factor based on the measurement results; generating a unit parameter combination of the calculated resonant frequency and amplitude amplification factor, and the amount of vibration-proof member and the amount of mass body; and storing the generated unit parameters in the database.

[0027] ***Design method for a single-layer vibration isolation structure*** FIG. 9 is a flowchart showing the flow of a method for designing a vibration-proof structure. Here, a description will be given of a method for designing a single-layer vibration-proof structure having one substrate 10 shown in Fig. 2. The method for designing a vibration-proof structure is also called a method for manufacturing a vibration-proof structure.

[0028] In step S101, vibration isolation characteristics to be designed are determined, including the maximum allowable amplitude amplification rate, the minimum allowable resonance frequency, the frequency at which the desired damping rate increases, and the minimum amount of vibration isolation material to be used.

[0029] In step S102, the vibration-isolating material to be used is selected. The vibration-isolating material is selected from those for which unit parameters have been acquired, but if a vibration-isolating material not registered in the database is to be used, the unit parameters are acquired first and added to the database.

[0030] In step S103, the unit parameters corresponding to the vibration-isolating member to be used are referenced from the database. In vibration model 0 in Fig. 7, the mass m0 of the mass body, the vibration-isolating member S0, the resonance frequency f0, and the amplitude amplification factor T0 are referenced. The ratio of the resonance frequency f0 to the amplitude amplification factor T0 is then set as the structural ratio Rref = 1.

[0031] In step S104, a correlation chart between the resonance frequency and the amplitude amplification factor is generated based on the referenced unit parameters. First, in the vibration model 0 in FIG. 7, the unit mass is defined as mass m0, an arbitrary mass is defined as mass m, and the mass ratio mr to the unit mass is defined as mr=m / m0. Furthermore, the unit vibration-isolating member is defined as vibration-isolating member S0, an arbitrary vibration-isolating member is defined as vibration-isolating member S, and the vibration-isolating member ratio Sr for the unit vibration-isolating member is defined as Sr=S / S0. Then, the structural ratio Rr is defined based on the mass ratio mr and the vibration-isolating member ratio Sr. The structural ratio Rr is expressed by the following formula (2).

[0032]

number

[0033] As mentioned above, the structural ratio Rr in the one-story vibration model 0 is the ratio obtained by dividing the vibration-isolating member ratio Sr by the mass ratio mr. The definition of the structural ratio is the same for the two-story vibration model and the n-story vibration model with two or more layers, which will be described later. In other words, the nth vibration-isolating structure, which includes the first vibration-isolating structure and / or the second vibration-isolating structure, includes an nth mass and an nth vibration-isolating member, and the nth structure ratio of the nth vibration-isolating structure is the mass ratio obtained by dividing the mass of the nth mass by the mass of the mass of a mass of a reference unit parameter, the vibration-isolating member ratio obtained by dividing the quantity of the nth vibration-isolating member by the vibration-isolating member of a reference unit parameter, and the ratio obtained by dividing the vibration-isolating member ratio by the mass ratio. The nth mass is a member with a higher elastic modulus than the elastic body, and the quantity of the nth mass is its weight. In a preferred example, the member with a higher elastic modulus is a substrate.

[0034] Based on the referenced unit parameters, the structural ratio Rr between the mass m0 and the vibration-isolating member S0 is set as the structural ratio Rref of the unit vibration-isolating structure. The structural ratio Rref is expressed by Equation (3).

[0035]

number

[0036] When the resonance frequency at the structural ratio Rref is the resonance frequency f0(Rref) and the amplitude amplification factor is the amplitude amplification factor T0(Rref), the amplitude amplification factor Test(Rr) of an arbitrary structural ratio Rr is calculated based on the approximate formula (4).

[0037]

number

[0038] Then, the resonance frequency fest(Rr) of an arbitrary structural ratio Rr is calculated based on the approximate formula (5).

[0039]

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[0040] Fig. 10 is a graph showing an example of the correlation between an arbitrary structural ratio Rr and the amplitude amplification factor, with the horizontal axis representing the structural ratio (Rr) and the vertical axis representing the amplitude amplification factor. Fig. 11 is a graph showing an example of the correlation between an arbitrary structural ratio Rr and the resonance frequency, with the horizontal axis representing the structural ratio (Rr) and the vertical axis representing the resonance frequency (Hz). As shown in graph 71 of Fig. 10, as the structural ratio Rr increases, the amplitude amplification factor decreases. On the other hand, as shown in graph 72 of Fig. 11, as the structural ratio Rr increases, the resonance frequency increases.

[0041] FIG. 12 is a graph showing an example of the correlation between the resonance frequency and the amplitude amplification factor, with the structure ratio Rr as a parameter, where the horizontal axis represents the resonance frequency (Hz) and the vertical axis represents the amplitude increase factor. Graph 73 in Fig. 12 illustrates a point where the structural ratio Rr is 1 and a point where the structural ratio Rr is 2.5. This graph 73 makes it possible to select a structural ratio Rr that provides a resonance frequency / amplitude amplification factor that is close to the desired vibration-damping characteristic condition. Graph 73 is called a correlation chart of resonance frequency / amplitude amplification factor.

[0042] In step S105, a point of resonance frequency / amplitude amplification factor that is closest to the desired vibration isolation characteristic condition is selected on the generated correlation chart of resonance frequency / amplitude amplification factor.

[0043] In step S106, the mass and vibration-isolating members are determined based on the arbitrary structural ratio Rrs corresponding to the selected point. More specifically, the mass km0 and vibration-isolating members jS0 are calculated using equation (6) based on the arbitrary structural ratio Rrs, and the distribution ratio of the arbitrary mass and vibration-isolating members is determined.

[0044]

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[0045] In a preferred embodiment, the amount of vibration-isolating members is the number of vibration-isolating members. For example, when the structural ratio Rr=2.5 in graph 73, the magnification n for the standard structural ratio is 2.5, and this 2.5 is divided between j and k. If j is 1, k is 1 / 2.5. In this case, the vibration-isolating members should be configured with a mass that is 1 / 2.5 of the mass of the vibration-isolating structure measured with the unit parameters, and the number of vibration-isolating members will be 4. Note that there is no limitation to the number of vibration-isolating members, and it may be, for example, the volume of the elastic body of the vibration-isolating member or the area where the elastic body comes into contact with the substrate. In other words, the quantity of the nth vibration-isolating member is either the number of vibration-isolating members, the volume of the elastic body of the vibration-isolating member, or the area where the elastic body comes into contact with the nth mass body.

[0046] In step S107, it is determined whether the calculated mass and vibration-isolating member are appropriate, and if optimization is required, the process returns to step S101 and recalculates.

[0047] In step S108, the result derived in step S106 is output.

[0048] As described above, the vibration-proof structure and the method for manufacturing the vibration-proof structure of this embodiment can provide the following effects. Previously, when designing a vibration-isolation structure, designers would select viable vibration-isolation materials, incorporate them into the structure, and then repeatedly conduct evaluation tests on each material, resulting in a trial-and-error design. This was because commercially available vibration-isolation materials did not disclose their vibration characteristic parameters, making them difficult to determine, and the only way to design a vibration-isolation structure was to repeatedly conduct prototype experiments. This resulted in long design periods and high costs. Furthermore, because vibration isolation for inertial measurement units operates in a different frequency range than general vibration isolation, there was no method for optimizing a vibration-isolation structure with good damping characteristics (without increasing the resonance amplification factor) for this measurement unit.

[0049] In contrast, according to the manufacturing method of the vibration-proof structure of this embodiment, a database of unit parameters is generated in advance for a plurality of selectable vibration-proof members, and the unit parameters of the database are used to generate a correlation chart of resonance frequency / amplitude amplification factor with the structural ratio as a parameter.By referring to the correlation chart, it is possible to select a structural ratio that will yield a resonance frequency / amplitude amplification factor that is close to the conditions of the desired vibration-proof characteristics. Therefore, a vibration-proof structure with the desired damping characteristics (large damping rate without an increase in the resonance amplification rate) can be designed in a short period of time, and costs can also be reduced. Therefore, it is possible to provide a vibration-isolating structure having desired vibration-isolating properties and a manufacturing method thereof.

[0050] Embodiment 2 ***Double-layer vibration-proof structure*** Fig. 13 is a plan view of the vibration-proof structure according to the second embodiment, and corresponds to Fig. 1. Fig. 14 is a side view of the vibration-proof structure, and corresponds to Fig. 2. In the above embodiment, the vibration-isolating structure 100 has been described as a single-layer vibration-isolating structure in which the measuring device 50 is placed on a substrate 10 equipped with vibration-isolating members 8, but this is not limited to this and a two-layer vibration-isolating structure is also possible. Hereinafter, the same parts as in the above embodiment will be assigned the same numbers, and duplicated explanations will be omitted.

[0051] As shown in Figures 13 and 14, the vibration-proof structure 200 of this embodiment further includes a substrate 20 between the base substrate 15 and the substrate 10. The planar size of the substrate 20 is approximately the same as that of the base substrate 15, and vibration-proof members 8 are provided at its four corners. Bolts 6 (Figure 3) of the vibration-proof members 8 at four locations are screwed into the base substrate 15. The substrate 20 is fixed to the base substrate 15 via the four vibration-proof members 8. The substrate 20 is made of the same material as the substrate 10.

[0052] As shown in Figure 14, bolts 6 (Figure 3) of vibration-isolating members 8 at four locations on substrate 10 are screwed into substrate 20. With measuring device 50 placed on it, substrate 10 is fixed to substrate 20 via four vibration-isolating members 8. In this way, vibration-isolating structure 200 has a two-layer structure in which substrate 20 and substrate 10 are stacked on top of each other. Note that the number of vibration-isolating members 8 is not limited to four on each layer, and may be three, five or more.

[0053] ***Vibration modeling of a two-layer vibration isolation structure*** FIG. 15 is a vibration model diagram used in designing a two-layer vibration isolation structure, and corresponds to FIG. As shown in Figure 15, when two-layer vibration-isolating structure 200 is made into a vibration model, it becomes vibration model 200m, which is a stack of vibration models 1 and 2. The parameters of vibration model 1 are mass m1 and vibration-isolating member S1. The parameters of vibration model 2 are mass m2 and vibration-isolating member S2. Vibration model 1 is also called vibration-isolating structure 1, and vibration model 2 is also called vibration-isolating structure 2.

[0054] In other words, the vibration-proof structure 200 is fixed to a vibration source and has the measuring device 50 placed on it, and comprises a vibration-proof structure 1 as a first vibration-proof structure fixed to the vibration source, and a vibration-proof structure 2 as a second vibration-proof structure overlaid on the first vibration-proof structure, wherein the vibration-proof structure 1 includes a mass m1 as a first mass and a vibration-proof member S1 as a first vibration-proof member, and the vibration-proof structure 2 includes a mass m2 as a second mass and a vibration-proof member S2 as a second vibration-proof member, and the measuring device 50 is placed on the second mass.

[0055] ***Design method for two-layer vibration isolation structure*** Fig. 16 is a flowchart showing the flow of a design method for a two-layer vibration-isolating structure, and corresponds to Fig. 9. Here, the design method for a two-layer vibration-isolating structure will be explained with reference to the vibration model 200m in Fig. 15. The design method for a vibration-isolating structure is also called a manufacturing method for a vibration-isolating structure.

[0056] First, steps S201 to S203 are the same as steps S101 to S103 in Fig. 9. In detail, in step S201, the vibration isolation characteristics to be designed are determined, in step S202, the vibration isolation material to be used is selected, and in step S203, the unit parameters corresponding to the vibration isolation material to be used are referenced from the database.

[0057] In step S204, a correlation chart between the amplitude amplification factor and the resonance frequency when the structural ratio Rr is arbitrarily changed is generated for the vibration-proof structure 0 in Fig. 5. The amplitude amplification factor Test0(Rr) for an arbitrary structural ratio Rr is calculated based on the approximate formula (7).

[0058]

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[0059] Furthermore, the resonance frequency fest0(Rr0) of an arbitrary structural ratio Rr0 is calculated based on the approximate formula (8).

[0060]

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[0061] Next, a correlation chart was generated between the amplitude amplification factor and the resonance frequency when the structural ratio of the vibration-isolating structure 2 was changed. Note that the structural ratios were set as Rr0 = Rr1 = Rr2, and the vibration-isolating members were set as S0 = S1 = S2, or the masses were set as m0 = m1 = m2. When the structural ratio is Rr1=Rr2=1, the amplitude amplification factor T2ref is T2ref=C T2 × T0. However, the coefficient C T2 = 2. The resonance frequency f2ref of the vibration-proof structure 2 is f2ref = 2 / πf0.

[0062] The amplitude amplification factor T2Rr of the vibration-proof structure 2 with an arbitrary structural ratio Rr1 = Rr2 = Rr is calculated based on the approximate formula (9). The resonance frequency f2(Rr) is calculated based on the approximate formula (10).

[0063]

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[0064] 17 is a graph showing an example of the correlation between an arbitrary structural ratio Rr and the amplitude amplification factor in vibration-isolating structure 0 and vibration-isolating structure 2, and corresponds to FIG. 10. Graph 74 is the graph for vibration-isolating structure 0, and graph 75 is the graph for vibration-isolating structure 2. 18 is a graph showing an example of the correlation between an arbitrary structural ratio Rr and the resonance frequency in vibration-isolating structure 0 and vibration-isolating structure 2, and corresponds to FIG. 11. Graph 76 is the graph for vibration-isolating structure 0, and graph 77 is the graph for vibration-isolating structure 2.

[0065] In step S205, from the correlation graphs of any structural ratio Rr and amplitude amplification factor / resonance frequency for vibration-proof structure 0 and vibration-proof structure 2 shown in Figures 17 and 18, generated in step S204, the structural ratio Rrs containing the desired resonant frequency fp and amplitude amplification factor Tp is selected, and the unit parameters of vibration-proof structure 0 and vibration-proof structure 1 are reset.

[0066] The structural ratio Rrs is selected so that it includes the desired amplitude amplification factor Tp within the line connecting the amplitude amplification factor Test0(Rr) of vibration isolation structure 0, which has the structural ratio Rr as a parameter, and the amplitude amplification factor T2(Rr) of vibration isolation structure 2. The relationship between these is expressed by the following equation. Test0(Rrs)≦Tp≦T2(Rrs)

[0067] The structural ratio Rrs is selected so that the desired resonance frequency fp is included within the straight line connecting the resonance frequency fest0(Rr) of vibration-proof structure 0, which has the structural ratio Rr as a parameter, and the resonance frequency f2(Rr) of vibration-proof structure 2. The relationship between these is expressed by the following equation. f2(Rrs)≦fp≦fest0(Rrs)

[0068] The selected structural ratio Rrs is then updated as the structural ratio Rr0 of vibration-isolation structure 0. The resonance frequency fest0(Rrs) and amplitude amplification factor Test0(Rrs) of vibration-isolation structure 0 at this time are set as the resonance frequency f0s and amplitude amplification factor T0s as unit parameters of vibration-isolation structure 0.

[0069] Based on the selected structural ratio Rrs, the mass km0 of the vibration-isolating structure 0 and the amount jS0 of the vibration-isolating member are determined by equation (11).

[0070]

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[0071] The selected structural ratio Rrs, the allocated mass km0, and the amount of vibration isolation material jS0 are revised to become the unit parameters of vibration isolation structure 0, vibration isolation structure 1, and vibration isolation structure 2 as shown in the following equation. Rr0=Rr1=Rr2=1 S0s→S o =S1=S2 m 0S →M0=M1=M2

[0072] In step S206, based on the unit parameters of the vibration isolation structure 0, the amplitude amplification factor T when the structure ratio Rr0=0.5 is calculated. 0(Rr0=0.5) is calculated using equation (12), and the resonant frequency f 0(Rr0=0.5) is calculated using equation (13).

[0073]

number

[0074] Next, based on the fact that the unit parameters of vibration isolation structure 1 and vibration isolation structure 2 are the same, the amplitude amplification factor T of vibration isolation structure 2 when the structural ratio Rr2 = 1 is calculated from the resonance frequency f0s and amplitude amplification factor T0s of vibration isolation structure 0. 2A(Rr2=1) and the resonant frequency f 2A(Rr2=1) is calculated using the following formula: T 2A(Rr2=1) =C T2 ×T 0S f 2A(Rr2=1) =2 / π×f 0S

[0075] Fig. 19 is a graph showing an example of the correlation between the resonance frequency and the amplitude amplification factor, with the structural ratio Rr of the vibration-isolating structure 2 as a parameter, and corresponds to Fig. 12. Fig. 20 is an enlarged graph of the periphery of the approximation line in Fig. 19. From the above, the following three points are determined on the coordinate system of resonance frequency / amplitude amplification factor, as shown in the range example of the correlation graph in FIG. point a;(f 0s ,T 0s ) point b;(f 0(Rr0=0.5) ,T 0(Rr0=0.5) ) point c;(f 2A(Rr2=1) ,T 2A(Rr2=1) )

[0076] In step S207, the structural ratio Rr in the vibration-isolating structure 2 is changed within the range of n≧1, see formula (14).

[0077]

number

[0078] Here, when mass m2 is changed as j=1 and 1 / n=k, the amplitude amplification factor T of vibration isolation structure 2 is 2BEST(Rr) and the resonant frequency f 2BEST(Rr) The approximate value of fluctuates from point c to point b. See equations (15) and (16).

[0079]

number

[0080] Amplitude amplification factor T of vibration isolation structure 2 with any allocation ratio in structure ratio Rr 2est(Rr) and the resonant frequency f 2est(Rr) The approximate value of is the point d(f 2BEST(Rr) ,T 2BEST(Rr) ) and point e(f2Cest(Rr) ,T 2Cest(Rr) ) is an approximate straight line 9 passing through the points 1 and 2. The approximate equation is given by equation (17).

[0081]

number

[0082] Here, in Figure 19, in a virtual triangle with point c as the vertex and consisting of points a and b, as shown by the arrow, the second structural ratio Rr2 of vibration-proof structure 2 becomes larger than the first structural ratio of vibration-proof structure 1 from point c toward the base connecting points a and b. In other words, the vibration-proof structure 200 comprises a vibration-proof structure 1 fixed to a vibration source and a vibration-proof structure 2 superimposed on the vibration-proof structure 1, and the second structural ratio of the vibration-proof structure 2 is greater than the first structural ratio of the vibration-proof structure 1.

[0083] In step S208, the mass m2 and the allocation ratio of the vibration-isolating member S2 at the structural ratio Rr=n of the vibration-isolating structure 2 are determined by equation (18).

[0084]

number

[0085] In step S209, the resonant frequency and amplitude amplification factor are calculated by dividing the approximate line 9 according to the distribution ratio. When the structural ratio Rr=n, the ratio by which the range 1 / n≦k≦1 is divided is set to the division ratio kr. The division ratio kr is calculated using formula (19).

[0086]

number

[0087] The division ratio Fr is the ratio at which the frequency difference between points e and d on the approximate line 9 is divided. The division ratio kr is calculated by equation (20).

[0088]

number

[0089] Assuming that the division ratio kr and the division ratio Fr are proportional to each other, the relationship shown in equation (21) is established.

[0090]

number

[0091] And the resonant frequency f when the mass is divided by the division ratio kr 2est(nRr2) can be calculated by the formula (22). 2est(nRr2) is calculated by the approximate formula (23).

[0092]

number

[0093] In step S210, it is determined whether the calculated mass and vibration isolation member are appropriate, and if optimization is required, the process returns to step S201 and recalculates.

[0094] In step S211, the result derived above is output.

[0095] In other words, a method for manufacturing a vibration-proof structure includes a first vibration-proof structure fixed to a vibration source and a second vibration-proof structure overlaid on the first vibration-proof structure, the first vibration-proof structure including a first mass and a first vibration-proof member, and the second vibration-proof structure including a second mass and a second vibration-proof member, and a measuring device is placed on a second substrate, and includes the steps of: acquiring unit parameters of the vibration-proof member to be used from a database of unit parameters; generating reference parameters based on the desired resonance frequency and amplitude amplification factor; determining three points on the coordinate system in the correlation between the resonance frequency and the amplitude amplification factor based on the reference parameters; calculating an approximate straight line at an arbitrary structural ratio Rr based on the three points on the coordinate system; dividing the approximate straight line based on a division ratio and calculating the amount of the second mass and the amount of the second vibration-proof member in the second vibration-proof structure; and outputting the calculated calculation results.

[0096] ***Relationship with measurement equipment bandwidth*** Fig. 21 is a functional block diagram of a measurement device including a vibration isolation structure. Fig. 22 is a graph showing the correlation between the bandwidth of the measurement device and the gain frequency characteristics of the vibration isolation structure, and corresponds to Fig. 8.

[0097] 21, the measurement device 50 includes a sensor 41, an AD conversion unit 42, an LPF 43, and a signal processing unit 44. The sensor 41 is an inertial sensor such as an acceleration sensor or an angular velocity sensor. 21, vibration is input to a sensor 41 via a vibration-proof structure having a vibration-proof member 8. A detection signal from the sensor 41 is AD-converted by an AD conversion unit 42 and input to a signal processing unit 44 via an LPF 43, which is a low-pass filter.

[0098] 22 is a graph showing the gain frequency characteristics of the vibration isolation structure, and graph 45 is a graph showing the cutoff frequency characteristics of LPF 43. Note that graph 80 shows the gain frequency characteristics of second-layer vibration isolation structure 2 in a two-layer vibration isolation structure. As shown in FIG. 22, in the vibration isolation structure 200, in a preferred example, when the sampling frequency of the measuring device 50 is set to frequency fsmp, half of the frequency fsmp (frequency fsmp / 2) is set to be equal to or higher than the resonance frequency fo of the vibration isolation structure 2, and the cutoff frequency f of the LPF 43 is set to be equal to or higher than frequency fsmp. LPF is set to be equal to or lower than the resonance frequency fo of the vibration isolation structure 2.

[0099] The reason why the resonant frequency fo of the vibration-proof structure 2 is set lower than the Nyquist frequency of the sampling frequency fsmp of the measuring device 50 is to reduce the influence of aliasing in the AD conversion of the AD conversion unit 42. LPF The reason why is set to be equal to or lower than the resonance frequency fo of the vibration isolation structure 2 is to prevent the influence of the amplitude amplification factor from appearing in the output gain of the measuring device 50. In other words, the resonance frequency of the vibration isolation structure 200 is lower than half the sampling frequency fsmp of the measuring device 50 and higher than the upper limit of the output frequency band of the measuring device 50 .

[0100] ***An example of vibration-proof structure installation*** FIG. 23 is a diagram showing an example of an installation mode of a vibration isolation structure. As shown in FIG. 23, in a preferred embodiment, a vibration isolation structure 200 on which a measuring device 50 is mounted is installed on a bridge girder 92 of a railway bridge pier 90.

[0101] The bridge pier 90 is configured, for example, by bridging a bridge girder 92 on a pair of abutments 91 provided on both banks of a river. A plurality of bridge piers 93 are provided in the middle of the bridge girder 92. As shown in Figure 23, one vibration-isolating structure 200 is installed on the upper surface of the bridge girder 92 and one on the lower surface. Note that multiple structures may be installed on each of the upper and lower surfaces. In a preferred example, the vibration-isolating structure 200 is fixed to the steel frame portion of the bridge girder 92 by attracting magnets 16 (Figure 14). Note that the method of attraction is not limited to magnetic force, and the base substrate 15 may be screwed to the bridge girder 92 or may be fixed by adhesive.

[0102] In this way, by installing the vibration isolation structure 200 on the pier 90, the amount of deflection of the pier 90 that occurs when a train 95 passes can be measured as a displacement amount. The vibration isolation structure 200 is not limited to being installed on bridge piers, but may also be installed on other man-made structures such as buildings, roads, towers, utility poles, dams, etc. These structures may also include natural structures such as mountains, rivers, and cliffs. Furthermore, the vibration isolation structure 200 is not limited to being installed on structures, but may also be installed on moving objects such as motorcycles, automobiles, agricultural vehicles such as tractors, or construction vehicles such as bulldozers.

[0103] As described above, according to the vibration-proof structure and the manufacturing method of the vibration-proof structure of this embodiment, in addition to the effects of the first embodiment, the following effects can be obtained. The method for manufacturing a two-layer vibration-damping structure includes the steps of: acquiring unit parameters of the vibration-damping member to be used from a database of unit parameters; generating reference parameters based on the desired resonance frequency and amplitude amplification factor; determining three points on the coordinate system in the correlation between the resonance frequency and the amplitude amplification factor based on the reference parameters; calculating an approximate straight line at an arbitrary structural ratio Rr based on the three points on the coordinate system; dividing the approximate straight line based on the division ratio to calculate the amount of the second mass body and the amount of the second vibration-damping member in the second vibration-damping structure; and outputting the calculated calculation results.

[0104] This allows us to select a structural ratio that achieves a resonance frequency / amplitude amplification factor close to the desired vibration isolation characteristics, even in a two-layer vibration isolation structure. Therefore, we can design a vibration isolation structure with the desired damping characteristics (large damping factor without an increase in resonance amplification factor) in a short period of time and at a reduced cost. Therefore, it is possible to provide a vibration-isolating structure having desired vibration-isolating properties and a manufacturing method thereof.

[0105] Further, the step of generating the reference parameters includes a step of acquiring unit parameters of the vibration-isolating member to be used from a database, calculating a second amplitude amplification factor by multiplying the first amplitude amplification factor by a predetermined first coefficient based on the unit parameters of the first resonance frequency and the first amplitude amplification factor, calculating a second resonance frequency by multiplying the first resonance frequency by 2 / π, and calculating a structural ratio and a structural ratio of the first resonance frequency based on a structural ratio of a normalized vibration-isolating member value and a normalized mass value obtained by normalizing the amount of the vibration-isolating member and the amount of the mass body based on the unit parameters of the first vibration-isolating member and the amount of the first mass body. The correlation between the frequency and the first amplitude amplification factor and the second resonance frequency and the second amplitude amplification factor is calculated, and a structural ratio is selected such that the desired resonance frequency is between the first resonance frequency and the second resonance frequency, or the desired amplitude amplification factor is between the first amplitude amplification factor and the second amplitude amplification factor. The amount of the second mass and the amount of the second vibration-damping member are determined based on the acquired unit parameters of the amount of the first mass and the amount of the first vibration-damping member, the selected structural ratio, and the desired distribution ratio, and the combination of the second resonance frequency, the second amplitude amplification factor, the amount of the second mass, and the amount of the second vibration-damping member is set as the reference parameter for structural ratio Rr=1.

[0106] Further, the step of determining the three points on the coordinate system includes the steps of calculating a third amplitude amplification factor from the structural ratio=0.5 and the second amplitude amplification factor based on the second resonance frequency and the second amplitude amplification factor, which are the reference parameters; calculating a third resonance frequency from the structural ratio=0.5, the third amplitude amplification factor, and the second resonance frequency; calculating a fourth amplitude amplification factor by multiplying the second amplitude amplification factor by a predetermined first coefficient; calculating the fourth resonance frequency by multiplying the second resonance frequency by 2 / π; and determining three points on the coordinate system of the second resonance frequency and the second amplitude amplification factor, the third resonance frequency and the third amplitude amplification factor, and the fourth resonance frequency and the fourth amplitude amplification factor.

[0107] Further, the step of calculating the approximation line includes multiplying a value obtained by subtracting the fourth amplitude amplification factor from the second amplitude amplification factor by a first exponent with the first structure ratio as a base, a fifth amplitude amplification factor subtracted from the second amplitude amplification factor, a value obtained by subtracting the fourth resonance frequency from the second resonance frequency by a second exponent with the first structure ratio as a base, a fifth resonance frequency subtracted from the second resonance frequency, and a value obtained by subtracting the fourth amplitude amplification factor from the third amplitude amplification factor by a first exponent with the first structure ratio as a base. The sixth amplitude amplification factor is obtained by subtracting the value obtained by multiplying the value obtained by subtracting the fourth resonance frequency from the third resonance frequency by a power set to the third exponent with the first structure ratio as the base to obtain the sixth amplitude amplification factor, and the sixth resonance frequency is obtained by subtracting the value obtained by multiplying the value obtained by subtracting the fourth resonance frequency from the third resonance frequency by a power set to the fourth exponent with the first structure ratio as the base to obtain the sixth resonance frequency, and in the Cartesian coordinates of the resonance frequencies and the amplitude amplification factors, the line passing through the point of the fifth resonance frequency and the fifth amplitude amplification factor and the point of the sixth resonance frequency and the sixth amplitude amplification factor is defined as an approximate line at an arbitrary structure ratio.

[0108] Furthermore, the step of calculating the amount of the second mass body and the amount of the second vibration-isolating member in the second vibration-isolating structure includes determining a division ratio for dividing an approximate line in a resonant frequency range that is equal to or less than the fifth resonant frequency and equal to or greater than the sixth resonant frequency, calculating a seventh amplitude amplification factor and the seventh resonant frequency on the approximate line divided by the division ratio, calculating an allocation ratio based on the first structure ratio and the division ratio, and calculating the amount of the second vibration-isolating member and the amount of the second mass body from the allocation ratio and the reference parameters of the amount of the first vibration-isolating member and the amount of the first mass body. Note that the division of the approximate line is not limited to two divisions.

[0109] Moreover, the step of outputting the calculation results includes outputting the amount of the second vibration-isolating member, the amount of the second mass body, the seventh amplitude amplification factor, and the seventh resonance frequency. In addition, the first structural ratio is greater than one. Also, the first coefficient is 2. Furthermore, the first power exponent, the second power exponent, the third power exponent, and the fourth power exponent are values ​​in the range of -1 to -0.7.

[0110] These methods allow selection of a structural ratio that achieves a resonance frequency / amplitude amplification factor close to the desired vibration isolation characteristics, even in a two-layer vibration isolation structure. This allows a vibration isolation structure with the desired damping characteristics (large damping factor without an increase in resonance amplification factor) to be designed in a short period of time, while also reducing costs. Therefore, it is possible to provide a vibration-isolating structure having desired vibration-isolating properties and a manufacturing method thereof. [Explanation of symbols]

[0111] 0...Vibration-proof structure, 1...Vibration-proof structure, vibration model, 2...Vibration-proof structure, vibration model, Rr, Rr1, Rr2...Structural ratio, 3...Elastic body, 3a...Elastic body, 3b...Elastic body, 4...Collar, 5...Washer, 6...Bolt, 8...Vibration-proof member, 9...Approximate line, 10...Circuit board, 11...Hole, 15...Base board, 16...Magnet, 20...Circuit board, 41...Sensor, 42...AD conversion unit, 43...LPF, 44...Signal processing unit, 45...Graph, 50...Measuring device, 70-77...Graph, 80...Graph, 81...Sensor, 82...Sensor, 90...Pier, 91...Abutment, 92...Bridge girder, 93...Multiple piers, 95...Train, 98...Measuring device, 100...Vibration-proof structure, 200...Two-layer vibration-proof structure, 200m...Vibration model.

Claims

1. A vibration isolation structure fixed to a vibration source and on which a measuring device is mounted, comprising: a first vibration isolation structure fixed to a vibration source; and a second vibration isolation structure overlaid on the first vibration isolation structure, the first vibration isolation structure includes a first mass and a first vibration isolation member supporting the first mass, the second vibration isolation structure includes a second mass and a second vibration isolation member supporting the second mass, the measurement device is mounted on the second mass, A second structure ratio of the second vibration-proof structure is greater than a first structure ratio of the first vibration-proof structure. Vibration-proof structure.

2. an n-th vibration isolation structure including the first vibration isolation structure and / or the second vibration isolation structure includes an n-th mass and an n-th vibration isolation member, The nth structural ratio of the nth vibration isolation structure is A mass ratio obtained by dividing the mass of the nth mass by the mass of a mass of a reference unit parameter; a vibration-isolating member ratio obtained by dividing the amount of the nth vibration-isolating member by a vibration-isolating member having a standard unit parameter; The vibration-isolating member ratio is divided by the mass ratio. The vibration-isolating structure according to claim 1.

3. the amount of the nth vibration-isolating member is the number of the vibration-isolating members, or the volume of the elastic body of the vibration-isolating member, or the area of ​​contact between the elastic body and the nth mass body. The vibration-isolating structure according to claim 2.

4. The nth mass is a member having a higher elastic modulus than the elastic body, and the amount of the nth mass is weight. The vibration-isolating structure according to claim 3.

5. The unit parameter is A zeroth vibration isolation structure including a vibration isolation member connected to a vibration source and a mass body supported by the vibration isolation member, A combination of data including a resonance frequency calculated from the gain frequency characteristic of the zero vibration isolation structure, an amplitude amplification factor at the resonance frequency, the amount of the vibration isolation member, and the amount of the mass body. The vibration-isolating structure according to claim 2.

6. The resonant frequency of the vibration-proof structure is lower than half the sampling frequency of the measurement device and higher than the upper limit of the output frequency band of the measurement device. The vibration-isolating structure according to claim 1.

7. The measurement device is any one of an inertial measurement unit, an inertial navigation system, an acceleration sensor, a displacement meter, a gyro sensor, an optical sensor, and an image measurement device. The vibration-isolating structure according to claim 6.

8. A method for manufacturing a vibration-isolating structure, comprising: a first vibration-isolating structure fixed to a vibration source; and a second vibration-isolating structure overlaid on the first vibration-isolating structure, the first vibration-isolating structure including a first mass and a first vibration-isolating member, the second vibration-isolating structure including a second mass and a second vibration-isolating member, and a measuring device being placed on the second mass, obtaining the unit parameters of the vibration-isolating member to be used from a database of unit parameters; generating reference parameters based on a desired resonant frequency and an amplitude gain; determining three points on a coordinate system in a correlation between a resonant frequency and an amplitude amplification factor based on the reference parameters; calculating an approximation line at an arbitrary structural ratio Rr based on the three points on the coordinate system; a step of dividing the approximation line based on a division ratio to calculate a quantity of the second mass body and a quantity of the second vibration isolation member in the second vibration isolation structure; and outputting the calculated result. A method for manufacturing an anti-vibration structure.

9. The method for generating the database of unit parameters comprises: A zeroth vibration isolation structure including a vibration isolation member connected to a vibration source and a mass body supported by the vibration isolation member, Measuring a gain frequency characteristic in the zero vibration isolation structure; calculating a resonance frequency and an amplitude amplification factor based on the measurement results; a unit parameter generating step of generating a combination of the calculated resonant frequency, the amplitude amplification factor, the amount of the vibration-isolating member, and the amount of the mass body; and storing the generated unit parameters in the database. A method for manufacturing the vibration-proof structure according to claim 8.

10. The step of generating the reference parameters comprises: obtaining unit parameters of the vibration-isolating member to be used from the database; calculating a second amplitude amplification factor by multiplying the first amplitude amplification factor by a predetermined first coefficient based on the first resonance frequency and the first amplitude amplification factor of the unit parameters, and calculating a second resonance frequency by multiplying the first resonance frequency by 2 / π; Based on a structural ratio between a normalized value of the vibration-isolating member and a normalized value of the mass body, the amount of any one of the vibration-isolating members and the amount of the mass body are normalized by the amount of the first vibration-isolating member and the amount of the first mass body, which are the unit parameters, Calculating a correlation between the structural ratio, the first resonance frequency, the first amplitude amplification factor, and the second resonance frequency and the second amplitude amplification factor; Selecting a structural ratio such that a desired resonant frequency is between the first resonant frequency and the second resonant frequency, or a desired amplitude gain is between the first amplitude gain and the second amplitude gain; determining an amount of a second mass and an amount of a second vibration-isolating member based on the amount of the first mass and the amount of the first vibration-isolating member of the acquired unit parameters, the selected structural ratio, and a desired distribution ratio; a combination of the second resonance frequency, the second amplitude amplification factor, the amount of the second mass body, and the amount of the second vibration isolation member is set as a reference parameter for a structural ratio Rr=1; A method for manufacturing the vibration-proof structure according to claim 8.

11. The step of determining three points on the coordinate system includes: Based on a second resonant frequency and a second amplitude amplification factor of the reference parameters, A third amplitude amplification factor is calculated from the structure ratio=0.5 and the second amplitude amplification factor, A third resonance frequency is calculated from the structure ratio=0.5, the third amplitude amplification factor, and the second resonance frequency, calculating a fourth amplitude amplification factor by multiplying the second amplitude amplification factor by a predetermined first coefficient; Calculating a fourth resonance frequency by multiplying the second resonance frequency by 2 / π; determining three points on a coordinate system of the second resonance frequency and the second amplitude amplification factor, the third resonance frequency and the third amplitude amplification factor, and the fourth resonance frequency and the fourth amplitude amplification factor; A method for manufacturing the vibration-proof structure according to claim 8.

12. The step of calculating the approximation line includes: a fifth amplitude amplification factor obtained by subtracting from the second amplitude amplification factor a value obtained by multiplying a value obtained by subtracting the fourth amplitude amplification factor from the second amplitude amplification factor by a first exponent with the first structure ratio as a base; a fifth resonance frequency obtained by subtracting from the second resonance frequency a value obtained by multiplying a value obtained by subtracting the fourth resonance frequency from the second resonance frequency by a second exponent with the first structure ratio as a base; and a sixth amplitude amplification factor obtained by subtracting from the third amplitude amplification factor a value obtained by subtracting the fourth amplitude amplification factor from the third amplitude amplification factor and multiplying the result by a third exponent with the first structure ratio as a base; and a sixth resonance frequency obtained by subtracting from the third resonance frequency a value obtained by multiplying a value obtained by subtracting the fourth resonance frequency from the third resonance frequency by a fourth exponent with the first structure ratio as a base; and In the orthogonal coordinates of the resonance frequency and the amplitude gain, a straight line passing through the point of the fifth resonance frequency and the fifth amplitude amplification factor and the point of the sixth resonance frequency and the sixth amplitude amplification factor is set as an approximation straight line at an arbitrary structural ratio; A method for manufacturing the vibration-proof structure according to claim 11.

13. The step of calculating the amount of the second mass and the amount of the second vibration isolation member in the second vibration isolation structure includes: In the approximation line in the resonance frequency range that is equal to or lower than the fifth resonance frequency and equal to or higher than the sixth resonance frequency, determining a division ratio for dividing the approximation line; Calculating a seventh amplitude amplification factor and a seventh resonance frequency on the approximate straight line divided by the division factor; Calculating an allocation ratio based on the first structure ratio and a division ratio; calculating the amount of the second vibration isolating member and the amount of the second mass from the allocation ratio and the amount of the first vibration isolating member and the amount of the first mass, which are reference parameters; A method for manufacturing the vibration-proof structure according to claim 12.

14. The step of outputting the calculation result includes: outputting the amount of the second vibration isolation member, the amount of the second mass body, the seventh amplitude amplification factor, and the seventh resonance frequency; A method for manufacturing the vibration-proof structure according to claim 13.

15. The first structural ratio is greater than 1; A method for manufacturing the vibration-proof structure according to claim 12.

16. The first coefficient is 2. A method for manufacturing the vibration-proof structure according to claim 10 or 11.

17. The first power exponent, the second power exponent, the third power exponent, and the fourth power exponent are values ​​in the range of −1 to −0.

7. A method for manufacturing the vibration-proof structure according to claim 12.

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