Machine processing device with measurement system

Abstract

To provide a machine processing device having a measurement system capable of performing measurement by a method with high accuracy, high reproducibility, and high-speed, the method preventing a damage of a sensitive or brittle processing target object, during processing of the processing target object.SOLUTION: A machine processing device having a measurement system includes: a machine processing unit (2) that includes any one of a laser system including an optical system for performing at least one of generation, orientation, and movement of a laser beam along an optical axis, a grinding tool rotatable around a tool axial line, and an electrode tool for generating electric discharge; a processing target object support body (11) to which a processing target object (10) is attached; a measurement system (20) that performs measurement along both or one of a first measurement axial line (7) and a second measurement axial line (8) and determines measurement data; and a control unit (12) that is configured to control both or one of the machine processing unit (2) and the measurement system (20).SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a machining device with a measuring system, in particular a machining device with several translational and / or rotational axes for machining a workpiece into an intended tool by laser machining, grinding or electric discharge machining. [Background technology]

[0002] Machining machines, in particular grinding, laser or electric discharge machines, for machining workpieces into tools are known. Machining machines, known for example as grinding machines, have at least two, preferably three, four or five, machine axes, including a plurality of rotating and / or translating machine axes, for moving the workpiece and the grinding tool relative to each other under the control of a programmable control unit. Grinding machines generally have a first rotating machine axis, a second rotating machine axis perpendicular to the first rotating machine axis and rotating around the first rotating machine axis, and possibly further rotating machine axes. The translating machine axis of the machining machine can be designated as the X-axis, the Y-axis and / or the Z-axis.

[0003] Known laser processing devices comprise mechanical axes providing a relative movement between the laser system, e.g. a scanner and the workpiece, and at least one optical axis for positioning and / or moving the laser beam. The scanner is adapted to move the focal point of the laser beam, so that the impingement point and / or focal point of the laser beam on the workpiece and thus on the machining or removal space can be directed almost freely in three dimensions.

[0004] Electrical discharge machining (EDM) machines perform machining by generating an electrical discharge between a workpiece and a tool electrode, typically a wire or a rotating conductive wheel, via a dielectric fluid between the workpiece and the tool electrode.

[0005] The machining device may have at least two, preferably three, four or five machine axes, including rotational and / or translational axes that move the workpiece and the tool electrode relative to one another under the control of a programmable control unit. Typically, the EDM device has a first rotating machine axis, a second rotating machine axis perpendicular to the first rotating machine axis and rotating about the first rotating machine axis, and possibly further rotating machine axes. The translational machine axis may be designated as the X-axis, the Y-axis and / or the Z-axis.

[0006] These machining devices comprise at least a holding and / or gripping device for receiving the workpiece to be machined, and at least one tool unit provided for acting on the workpiece to perform the desired operation. In the context of this invention, the machine unit may be a grinding unit, for example a cup-shaped grinding wheel, or alternatively a laser system together with an optical system for irradiating and moving a laser beam over the surface of the workpiece, or an electrode unit for generating electrical discharges.

[0007] Known machining devices may comprise a measuring system arranged for in-process measurement of the workpiece. The measuring method may be contact or non-contact depending on the measuring means. For example, a measuring system for performing contact measurements may comprise a stylus probe as measuring means. A non-contact measuring system may comprise an optical or inductive sensor. The measuring means may be designed as a contact probe, a remote scanning probe, a laser scanning probe, a probe using a light beam or a probe arranged with electrostatic response.

[0008] Tactile probes configured as touch-trigger probes are well known, comprising a protruding stylus with a distal sensing end as a measuring tip. In some known machining devices, the touch-trigger probe is moved relative to the workpiece by a machine axis along at least one translational direction and brought into contact with the workpiece to be measured. The sensing end deflects, which deflection is determined by corresponding means, and at the moment of contact the touch-trigger probe generates a trigger signal, which is transmitted to the machining device. The transmitted trigger signal initiates the stopping of the machine axis to which the probe is attached or freezes the output of the read head of the coordinate measuring device. The instantaneous position value can be determined and this information can be used to adapt further processing. In this case the touch-trigger probe simply acts as a switch and cannot be moved independently of the machine axes. This type of touch-trigger probe is not suitable for high-precision measurements or fast measurement processing because there is a time delay between the actual trigger event and the issuing of the signal. It is not easy to compensate for the variations in the time delay. Additionally, thermal effects from the operation of the machining equipment itself or an uncontrolled thermal environment can reduce the accuracy of the measurements. A disadvantage of this measurement system is that these touch-trigger probes cannot move independently of the machine axes and do not have an independent position coordinate system.

[0009] Another known measuring system uses a tactile measuring probe that can be moved in a linear axis independently of the machining device and measures the position values ​​in the direction of the linear axis with an internal measuring unit in another coordinate system. After repositioning the workpiece, another measuring point can be accessed. Therefore, only one direction is possible; measuring in a different direction requires a repositioning of the workpiece. Another challenge with this measurement system is controlling the force that the probe applies to the workpiece surface upon contact. Too much force can deform or damage the workpiece surface or the probe. Too little force can prevent dust or dirt from adhering to the workpiece surface from completely contacting the probe, resulting in inaccurate measurements.

[0010] US 2007 / 0133963 A1 describes a modular measuring device integrated in a grinding machine, in particular a modular measuring device mounted on a tool unit movable along at least one feed axis relative to the workpiece, the measuring device comprising at least a toggle measuring head and a support providing a number of predefined predefined positions for the toggle measuring head. The measuring device comprises a linkage for pivoting and translating the toggle measuring head and is movable into measuring and non-measuring positions relative to the workpiece. The actual position of the toggle measuring head is determined from a signal emitted by the toggle measuring head when it comes into contact with the workpiece, based on the actual position of the tool unit, which is movable in several directions or spatial axes. When the measuring head is positioned in the measuring position, certain inaccuracies and delay times are introduced into the system. [Prior art documents] [Patent documents]

[0011] [Patent Document 1] West German Patent Application Publication No. 102012110673 Summary of the Invention [Problem to be solved by the invention]

[0012] It is therefore an object of the invention to provide a machining apparatus with a measuring system adapted to perform measurements directly in the machining apparatus during the machining of the workpieces in a highly accurate, reproducible, fast manner and in a manner that prevents damage to sensitive and / or fragile workpieces. Furthermore, the measuring system should be space-saving and integrable as an independent unit in the machining apparatus and should be robust against thermal effects and contamination.

[0013] Another objective is to provide an optimal location for the measurement system with respect to the machining device, in particular as close as possible to the operating point without interfering with the machining or working area. Furthermore, the measurement system should have low inertia so as not to interfere with the high speed movements of the moving parts of the machining device, low weight, low vibration, wide measurement range and high accuracy. [Means for solving the problem]

[0014] In one aspect of the present invention, there is provided a machining apparatus having a plurality of translational axes and / or rotational axes for laser machining, grinding, or electric discharge machining of a workpiece to a tool, the apparatus comprising: - a machining unit, a laser system including an optical system for generating, directing, and / or moving a laser beam along an optical axis; a grinding tool rotatable about a tool axis; An electrode tool that generates discharge; a machining unit comprising: - a workpiece support on which a workpiece is mounted, the workpiece support being arranged to be movable about a second rotating machine axis, the second rotating machine axis being movable relative to a first rotating machine axis perpendicular to the second rotating machine axis; - a metrology system arranged at the center of the first rotating machine axis and oriented towards a machine origin defined by an intersection of the first rotating machine axis and the second rotating machine axis, the metrology system being adapted to perform measurements and determine metrology data along the first measurement axis and / or the second measurement axis; - a control unit configured to control the machining unit and / or the measurement system; A machining apparatus comprising:

[0015] In one aspect of the invention, a machining device is used to convert a workpiece into a tool, preferably a cutting tool such as a drill or milling cutter, cutting inserts such as interchangeable inserts of various designs and shapes. The manufacturing of the tool may include the sequential processing of the workpiece in one or more machining devices through different machining steps (laser machining, grinding, electrical discharge machining (EDM) and / or other suitable processes).

[0016] Generally, a machining device (of the present invention) comprises a tool unit, such as a grinding tool, a scanning device or a tool electrode, and a workpiece unit, which are moved relative to one another along or around a machining axis to perform the machining.

[0017] The machining apparatus according to the present invention is made as a multi-axis machining apparatus having a workpiece support that positions the workpiece in an accurate and reproducible manner relative to a tool unit, such as a grinding wheel, a laser unit, and / or a tool electrode.

[0018] The workpiece is received and positioned by a workpiece support (hereinafter also referred to as a holder). The workpiece is at least movable about the second rotating machine axis and the first rotating machine axis. The holder can be adapted to grip the tool between two anvils so as to be aligned with the second rotating machine axis. Alternatively, the holder is adapted to grip the workpiece such that the gripping movement is perpendicular to the second rotating machine axis. Furthermore, the workpiece can be held in the holder by vacuum or magnetic forces. Furthermore, the holder can be made as a chuck, in particular a collet, a hydraulic chuck or other chuck, mounted on the second rotating machine axis. Alternatively, the holder may comprise a machined taper, such as an HSK (hollow tapered shaft), which receives the workpiece.

[0019] According to the invention, the machining apparatus is equipped with a metrology system for performing measurements during machining of a supported and positioned workpiece which may involve determining characteristics such as position, orientation and / or shape, contour and / or size of the workpiece before machining, at intermediate states in the machining process and / or on the finished tool. Based on the measurements determined by the high-precision metrology system, the performance of the machining equipment can be improved. Furthermore, special signal processing algorithms can be used to determine characteristic values ​​of the workpiece.

[0020] Prior to machining, the measured values ​​can be used to adjust the machining of the workpiece, in particular to adjust the machining program to the measured position and / or orientation of the workpiece, which can be based on measurements of the dimensions, position and / or orientation of a supported workpiece, e.g. a cutting insert. By having this adjustment, gripping errors can be corrected. In the case of machining cylindrical workpieces, this adjustment can be based on the position of the supported workpiece, wobble and / or runout errors.

[0021] The machining apparatus (of the present invention) further comprises a control unit for controlling the machining apparatus and / or the metrology system, in one embodiment the control unit controls the operation of the metrology system and thus the force exerted by the probe in contact with the workpiece surface when measuring and / or scanning the workpiece.

[0022] In the present invention, the measurement system is located in the center of the first rotating machine axis and oriented towards the machine origin. The machine origin is defined as the intersection of the first rotating machine axis and the second rotating machine axis. The machine origin is defined as a characteristic value of the machining tool. The machine origin can be seen as a reference point of a spatial coordinate system (e.g. a coordinate reference point of the machining tool assigned to the workpiece). Advantageously, the workpiece is machined in an area as close as possible to the machine origin, so that the measuring system provided is arranged towards and located close to the plane or surface to be measured of the workpiece, so that when moving the measuring system from the rest position to the measuring position, the moving distance, preferably along the first and / or second measurement axis, is short.

[0023] In a preferred embodiment, the measurement system comprises a probe having a measurement tip at least movable between a measurement position, a rest position and / or a reference position, the measurement system comprises a first linear axis and a second linear axis perpendicular to the first linear axis, the first linear axis and the second linear axis adapted to move the probe along the first measurement axis and the second measurement axis, respectively. The measurement system further comprises a positioning system for detecting a position of the measuring tip. Preferably, the positioning system comprises at least one encoder for each linear axis for detecting a position of the measuring tip in a corresponding coordinate axis.

[0024] Typically, the linear axis comprises at least an actuator with a drive member movable to any determined position. According to one embodiment, the probe is a rigid touch probe and is movable in a force-controlled manner along the first and second linear axes. The associated probe is moved towards the workpiece until the determined probe force is equal to or exceeds a predefined value. Not only force values ​​can be determined, but other types of values ​​can also be used to control the operation of the metrology system. These values ​​can be detectable increments of probe force increase and / or rate of increase of probe force. The detectable values ​​can be set relative to pre-definable thresholds. These thresholds can be set by a user and stored in the control unit. The metrology system with the first and second linear axes not only allows high accuracy and precision measurements, but also applies a controllable force to avoid over-contact of the probe with sensitive surfaces or areas of the workpiece.

[0025] Each linear axis representing each measurement axis may be motorized by an electric motor, which advantageously is relatively simple to control.

[0026] The first and second linear axes for translating the probe along the first and second measurement axes respectively allow length measurements or detection of coordinate values ​​which can be processed based on an algorithm to derive position information of the probe and thus characteristic values ​​of the workpiece. The measurements may be used for closed-loop feedback control of at least one of the linear axes to measure dimensions and / or surface shape of the workpiece and to adjust the measurement system.

[0027] Alternatively, the probe of the metrology system may be a touch trigger probe having a measuring tip and a ball-tipped sensing end, movable along the first and second linear axes until it contacts the workpiece and activates the trigger. Thus, contact with the workpiece surface is converted into an electrical signal, movement is stopped and the coordinates of the actual contact point are determined. Preferably, the touch-trigger probe is capable of scanning over an area of ​​the workpiece or along a line on the workpiece so that more properties of the workpiece can be determined.

[0028] A touch-trigger probe has only two signal responses (contact or non-contact state of the measuring tip) and is preferably designed as a ruby ​​ball, mounted at the distal end of a stylus or touch-trigger probe structure.

[0029] In known touch-trigger probes, when the measuring tip comes into contact with the workpiece, the force of the probe causes an elastic deformation of a structure of the touch-trigger probe, the amount of elastic deformation of the structure being measured and can be used by the control unit.

[0030] Another type of touch-trigger probe has a measurement point that vibrates to detect changes in vibration characteristics due to contact with the measurement object.

[0031] Each deformation or change in the vibration characteristics of the structure is converted into an electrical signal that can be transmitted to a control unit to record the instantaneous positions of the first and second linear axes and to calculate the coordinates of the contact point on the workpiece.

[0032] For measurements with touch-trigger probes, the relevant variables are the probe movement speed and the probing pressure. The speed must be limited below a certain value to avoid discrepancies between the coordinates determined from the contact detection signal and the actual coordinates of the measuring tip. It is known that the probe force is related to the repeatability of the measurement, the accuracy of the determined contact point coordinates and / or the pressure that the sensing tip of the probe exerts on the measuring surface, which may deform or damage the workpiece surface. Probe forces are typically determined and fixed by the probe design. Therefore, measurements based on a controlled and pre-set probe force thanks to a controllable linear axis improves measurement efficiency and accuracy. Thanks to the high-precision linear axis, the measurement system provides backlash-free measurements, has high dynamics, requires little maintenance and allows the force to be adjusted to the measurement task.

[0033] In yet another embodiment, the measurement system comprises an additional third linear axis extending perpendicular to the first linear axis and perpendicular to the second linear axis, providing a further adjustment direction of the measurement system. This third linear axis may be a third measurement axis, preferably a measurement axis of force control. If the first and second measurement axes lie in the XY-plane, the third linear axis or the third measurement axis represents the Z coordinate direction.

[0034] The third measurement axis allows the measurement point of the probe to be moved along one further direction, thus enabling measurements in three dimensions (3D). By adjusting the position of the probe in at least one further direction, the surface of the workpiece can be measured in 3D. This corresponds to measurement using a 3D probe.

[0035] The measuring system provided on the machining device is located in the center of a first rotating machine axis, known as the penultimate machine axis of the machining device, and is oriented towards the machine zero point. This minimizes the influence of thermal effects and / or contamination in the measurement area. Thermal effects and contamination are known to have a negative effect on the precision and accuracy of the measurements. In the present invention, the measuring system is configured to minimize these effects, in particular by having a short displacement path.

[0036] Furthermore, depending on the geometry and operation of the measurement system, the probe can be designed to have a short overall length and small diameter, which reduces the overall weight of the probe and increases the accuracy of operation. By avoiding systematic errors due to pre-travel variations, measurements can be determined by shortening the linear axis travel distance and by shortening the measurement time to minimize dynamic effects.

[0037] In another embodiment, instead of a touch probe, the metrology system includes a non-contact sensor probe mounted on a first linear axis, known as the first measurement axis. Such a non-contact probe may be an optical and / or inductive sensor. The arrangement of the first and second linear axes allows the non-contact sensor probe to move towards and along the surface of the workpiece, but without contacting the workpiece.

[0038] According to another embodiment, the machining device may comprise a camera unit for generating an image of the workpiece. Preferably, the camera unit is fixedly accommodated in the centre of the first rotating machine axis and arranged to face the supported workpiece. The camera unit comprises a camera, variable focus optics and / or illumination means, whereby the illumination means is provided on one side of the camera or on the opposite side of the camera.

[0039] In another embodiment, the machining device comprises a further camera arranged to generate an image of the workpiece. Preferably, this further camera may be part of the laser system in case of a laser machining device. The image data may be used as further information. The data from the metrology system and the data from the further camera may be combined or may complement each other.

[0040] According to another aspect, the metrology data can be used by the control unit to control the machining device. Based on the metrology data, the control unit can modify the machining program of the machining device. For example, the machining position, direction and even the machining volume can be modified based on the metrology data obtained before machining. Further metrology data acquired during machining can be used for closed-loop control of the machining process. Further metrology data acquired after the machining process can be used as input for quality assessment and for closed-loop control of the machining equipment for machining the next part. The control unit can use algorithms that directly utilize the metrology data or send it to a processing unit which can then use algorithms that further utilize the data.

[0041] In one embodiment, the metrology system may be designed as a separate unit, preferably mounted in a space-saving manner, in the center of the first rotating machine axis. Another advantage of such a separate unit is that it is easy to replace, upgrade and / or maintain.

[0042] For a more complete understanding of the present invention and its advantages, exemplary embodiments are described in more detail in the following description, taken in conjunction with the accompanying drawings, in which like reference characters refer to like parts, and in which: [Brief description of the drawings]

[0043] [Figure 1] FIG. 1 is a schematic perspective view of a machining apparatus comprising a machining unit with a machining tool. [Diagram 2] FIG. 2 is a schematic perspective view of a detail of a machining device with a measurement system. [Diagram 3] FIG. 3 is a schematic perspective view of a detail of a machining device with a measurement system. [Figure 4] FIG. 4 is a schematic cross-sectional view of the measurement system showing the first linear axis. [Diagram 5] FIG. 5 is a schematic cross-sectional view of an embodiment of a measurement system. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0044] The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of the specification. The drawings illustrate certain embodiments of the invention and, together with the description, serve to explain the principles of the invention. Other embodiments and many of the attendant advantages of the invention will be readily appreciated as the same becomes better understood by reference to the following detailed description.

[0045] 1, an embodiment of a machining device 1 is shown diagrammatically, comprising a machining unit 2 adapted to machine a workpiece 10 into a tool. The machining unit 2 may comprise an abrasive tool such as a cup-shaped abrasive wheel. Other embodiments of the machining unit 2 may comprise a laser system or an electric discharge unit, depending on the machining process.

[0046] The machining device 1 is configured as a multi-axis device having at least a first rotating machine axis 3 and a second rotating machine axis 4 perpendicular to the first rotating machine axis 3, the second rotating machine axis 4 being movable with respect to the first rotating machine axis 3. In addition to these rotating machine axes 3 and 4, the machining device 1 comprises a translation axis (not shown) for the relative movement of a workpiece 10 supported on a workpiece support 11 and the machining unit 2 under the control of a control unit 12. These translational axes preferably extend along the X-, Y- and / or Z-coordinate axis. As shown diagrammatically in Fig. 1, the machining apparatus 1 comprises a measurement system 20 located at the centre 5 of a first rotating machine axis 3. The measurement system 20 is arranged to measure a supported workpiece 10 at least along a first measurement axis 7, in this embodiment along the X-coordinate axis, and along a second measurement axis 8 extending perpendicular to the first measurement axis 7. The measuring system 20 is arranged in the machining device 1 close to a machine origin 6. The machine origin 6 is the imaginary intersection of the first rotating machine axis 3 and the second rotating machine axis 4. The machine origin 6 creates a reference point of a spatial coordinate system, in particular of the coordinate system of the machining device 1, which is assigned to the workpiece 10.

[0047] 1 is a further camera 40 which may be provided to generate images before, during and / or after machining of the workpiece 10 in order to generate further data verifying the process of machining the workpiece 10. The further camera 40 may be part of the machining unit 2, in particular a part of a laser system used for laser machining.

[0048] FIG. 2 shows in detail the processing area in which machining operations are carried out on a workpiece 10. The workpiece 10 can be attached to a workpiece support 11. The mobile workpiece support 11 is provided on the second rotating machine axis 4 and is made to position the workpiece 10 in a processing position. The workpiece support 11 can be described as a mobile part assembly of the machining device 1, which grips and moves the workpiece 10 with the help of the first rotating machine axis 3 and the second rotating machine axis 4, which are independent of each other. The workpiece support 11 can be made as a gripping unit consisting of a drive anvil and a gripping anvil or can be of any other suitable type.

[0049] In the embodiment shown in FIG. 2, the workpiece support 11 is oriented coaxially with the second axis of rotation 4 .

[0050] Furthermore, FIG. 2 shows a measurement system 20 provided at the centre 5 (not shown) of the first rotating machine axis 3 and oriented towards the machine origin 6 .

[0051] 2 in this embodiment, the metrology system 20 comprises a probe 21 having a measuring tip 22 extending coaxially with the first rotating machine axis 3 towards the machine origin 6. In the embodiment shown, the probe 21 is configured as a force controlled touch probe and is movable along a first linear axis 23 and a second linear axis 24 perpendicular to the first linear axis 23. The probe 21 can thus be moved from a rest position to a measurement position along the first measurement axis 7, indicated by the arrows, and along the second measurement axis 8, and can be moved to a reference position and / or to any defined position. Due to this arrangement of the measurement system 20, in the case of the touch probe 21, the movement path necessary to position the measuring tip 22 close to the plane or surface 13 to be measured of the workpiece 10 and to bring the measuring tip 22 into contact with the surface 13 is quite short.

[0052] The probe 21, in particular the measuring tip 22, is brought into contact with the workpiece surface 13 or moved along a measurement path on the surface 13 of the workpiece 10, which is located in a plane determined by the first measurement axis 7 and the second measurement axis 8. This movement is preferably force-controlled by the first linear axis 23 and the second linear axis 24. The control of the movement can be performed based on a determinable force increase or a rate of increase of the force, the determined value being related to a predeterminable threshold value. When the measuring tip 22 comes into contact with the surface 13 of the workpiece 10, by means of a positioning system 30 of the measurement system 20 actual position coordinate values ​​can be determined which may be further processed into characteristic values ​​of the workpiece 10 or into data for controlling an adjustment or machining process of the workpiece 10. The positioning system 30 may in particular be made as an encoder associated with the first linear axis 23 and another encoder associated with the second linear axis 24.

[0053] In another embodiment, the probe 21 can be made as a non-contact sensor, such as an optical or inductive sensor. The measurements performed by a non-contact sensor do not come into contact with the surface 13 of the workpiece 10, but it is possible to move the non-contact sensor towards the workpiece 10 in order to position the measuring tip 22 close to the workpiece surface 13 to be measured, in particular at a predetermined distance from said surface.

[0054] In an alternative embodiment, metrology system 20 comprises a camera unit 26 (shown in FIG. 4) fixedly mounted relative to the first rotating machine axis 3. Camera unit 26 comprises a camera, collection optics, and optional illumination.

[0055] In Figure 3 there is shown in detail the arrangement of a metrology system 20 in the machining apparatus 1. The workpiece 10 is mounted on a workpiece support 11 and is an exchangeable insert extending from the centre of the second rotating machine axis 4. A probe 21 having a measuring tip 22 is movable by a first linear axis 23 and a second linear axis 24. In particular, the first linear axis 23 is mounted on the second linear axis 24 such that the probe 21 mounted on the first linear axis 23 is movable in two dimensions in a controlled manner. The first measurement axis 7 extends along the movement path of the first linear axis 23 and the second measurement axis 8 extends along the movement path of the second linear axis 24. By moving the probe 21 in a plane defined by the first measurement axis 7 and the second measurement axis 8, in particular the XY coordinate plane, the measuring tip 22 can be moved along a predefined path on the surface 13 of the workpiece 10.

[0056] Furthermore, in the embodiment shown, a third measurement axis 9 may be provided extending along the Z axis, allowing the measurement tip 22 of the probe 21 to be moved in three dimensions to generate three-dimensional data of the workpiece 10.

[0057] In Fig. 4 a top cross-sectional view of the measurement system 20 is shown. According to Fig. 4 a first linear axis 23 is intended to move the attached probe 21 towards the workpiece 10, in particular along the first measurement axis 7, in this case along the Y coordinate axis. A second linear axis 24 is intended to move the probe 21 perpendicular to the first measurement axis 7, in this case along the X coordinate axis.

[0058] The first linear axis 23 and the second linear axis 24 may each comprise an electric motor that drives the linear axis 23, 24 in a controlled manner.

[0059] Although not shown in FIG. 4, the third measurement axis 9 is perpendicular to the first measurement axis 7 and perpendicular to the second measurement axis 8, in this case extending along the Z coordinate axis.

[0060] Figure 5 shows another embodiment of the invention, in particular the arrangement of a metrology system 20 with a camera unit 26 fixedly mounted relative to the first rotating machine axis 3 and oriented towards the machine origin 6. The camera unit 26 comprises a camera and optional lighting means 27, which may be mounted either on the same side as the camera or on the opposite side as shown in figure 5. Additionally, the camera unit 26 includes a variable focus lens capable of producing an image of the surface 13 of the workpiece 10 that can be further processed.

[0061] Although the present invention has been described in detail with reference to specific embodiments thereof, it will be apparent to those skilled in the art that various changes and modifications can be made thereto, and equivalents can be employed, without departing from the scope of the appended claims.

Claims

1. A machining device (1) for laser machining, grinding, or electric discharge machining of a workpiece (10) into a tool, the machining device having a plurality of translational mechanical axes and / or rotational mechanical axes, a machining unit (2), a laser system including an optical system for generating, directing, and / or moving a laser beam along an optical axis; a grinding tool rotatable about a tool axis; An electrode tool that generates discharge; said machining unit (2) comprising any one of a workpiece support (11) on which the workpiece (10) is mounted, the workpiece support (11) being arranged to be movable about a second rotating machine axis (4), the second rotating machine axis (4) being movable relative to a first rotating machine axis (3) perpendicular to the second rotating machine axis (4); a measurement system (20) arranged at the centre (5) of said first rotating machine axis (3) and oriented towards a machine origin (6) defined by the intersection of said first rotating machine axis (3) and said second rotating machine axis (4), said measurement system (20) being adapted to perform measurements and to determine measurement data along a first measurement axis (7) and / or a second measurement axis (8); a control unit (12) configured to control said machining unit (2) and / or said measurement system (20); A machining device (1).

2. said measurement system (20) comprising a probe (21) having a measuring tip (22) movable in a measurement position, a rest position and / or a reference position; a first linear axis (23) arranged coaxially with said first rotating machine axis (3) and a second linear axis (24) perpendicular to said first linear axis (23), said first linear axis (23) and said second linear axis (24) adapted to move said probe (21) along said first measurement axis (7) and said second measurement axis (8), respectively; a positioning system (30) for detecting the position of said measuring tip (22); A machining device (1) according to claim 1, comprising:

3. 3. Machining device (1) according to claim 2, wherein the movement of the probe (21) along the first linear axis (23) and the second linear axis (24) is force controlled.

4. 4. The machining device (1) according to claim 3, wherein the force control of the first linear axis (23) and / or the second linear axis (24) is capable of predetermining thresholds based on determined data such as a probe force, an increase in the probe force, and / or an increase rate of the probe force.

5. 3. The machining device (1) according to claim 2, wherein the probe (21) is made as a touch-trigger probe programmed to generate a trigger signal indicating when the measuring tip (22) has come into contact with the surface (13) of the workpiece.

6. 3. Machining device (1) according to claim 2, wherein the probe (21) is made as a non-contact sensor probe, such as an optical and / or inductive sensor, and for non-contact measurement of the workpiece (10).

7. 7. The machining device (1) according to any one or more of the preceding claims, wherein the measurement system (20) comprises a third linear axis (25) extending perpendicular to the first linear axis (23) and perpendicular to the second linear axis (24).

8. 8. Machining device (1) according to claim 7, wherein the third linear axis (25) is a third measurement axis (9).

9. 2. The machining apparatus (1) according to claim 1, wherein the measurement system (20) comprises a camera unit (26) fixedly mounted at the center (5) of the first rotating machine axis (3), the camera unit (26) comprising at least one of a camera, a variable focus optical system and an illumination means.

10. 10. Machining device (1) according to any one or more of the preceding claims, wherein a further camera (40) is provided in the machining device (1) for generating an image of the workpiece (10).

11. 11. Machining device (1) according to claim 10, wherein metrology data from the further camera (40) is combined with metrology data from the metrology system (20).

12. Machining device (1) according to any one or more of the preceding claims, wherein metrology data is used by the control unit (12) to control the machining device (1).

13. 13. Machining device (1) according to any one of the preceding claims, wherein the metrology system is made as a separate unit positionable in the centre of the first rotating machine axis.

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