X-ray inspection device and x-ray inspection system

Abstract

To provide an X-ray inspection device and an X-ray inspection system that can obtain a clear transmission image with less noise without reducing a conveyance speed of an object to be inspected.SOLUTION: An X-ray inspection device has an X-ray generator and an X-ray detector that can reciprocate in a direction parallel to a conveyance direction of a workpiece W, picks up an image of the workpiece W while moving in the conveyance direction from an imaging start position P1 to an imaging end position P2 at a speed equal to a conveyance speed of the workpiece W, and after the completion of imaging, returns to the imaging start position P1 before a next workpiece W reaches the imaging start position P1. The X-ray inspection device comprises: a reference image information storage section in which reference image information which is image information of a reference image obtained by picking up an image of the workpiece W in advance is stored; a determination section that determines whether or not image information of an X-ray image obtained through imaging matches the reference image information; and a control section that, when the determination section determines that the image information of the X-ray image obtained through imaging does not match the reference image information, adjusts a moving speed of an imaging unit.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] The present invention relates to an X-ray inspection device and an X-ray inspection system. [Background technology]

[0002] Patent Document 1 discloses an X-ray foreign object inspection device that includes an X-ray generator that is arranged at a predetermined height above an inspection space midway along a transport path and irradiates X-rays in the inspection space to the objects to be inspected that are transported sequentially, and an X-ray line sensor that is arranged opposite the X-ray generator within the transport section and detects the X-rays that have passed through the objects to be inspected. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 7060446 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the X-ray foreign body inspection device described in Patent Document 1, if the exposure time for the inspection object is short, the obtained transmission image will be a noisy image. Also, for example, when inspecting an inspection object having a relatively large thickness, if the exposure time is short, the obtained transmission image will be unclear. Therefore, if the exposure time for the inspection object is short, it is not possible to improve the inspection accuracy.

[0005] On the other hand, if the exposure time is increased, a clearer transmission image with less noise can be obtained. However, the longer the exposure time, the slower the transport speed of the object to be inspected must be, or in some cases, the object must be temporarily stopped, making it difficult to perform an efficient inspection.

[0006] The present invention has been made in consideration of the above-mentioned circumstances, and aims to provide an X-ray inspection device and an X-ray inspection system that can obtain clear transmitted images with less noise without slowing down the transport speed of the object to be inspected. [Means for solving the problem]

[0007] The X-ray inspection apparatus according to the present invention is an X-ray inspection apparatus comprising an X-ray generator which irradiates X-rays onto objects to be inspected which are transported sequentially, and an X-ray detector which detects the X-rays which have passed through the objects to be inspected, the X-ray generator and the X-ray detector being disposed so as to face each other across a transport path through which the objects to be inspected pass, the X-ray generator being configured to be able to move an irradiation range of the X-rays when imaging the objects to be inspected, the X-ray detector being configured to be able to move back and forth in a direction parallel to the transport direction of the objects to be inspected in conjunction with the movement of the irradiation range of the X-rays, the X-ray generator and the X-ray detector being configured so as to move in a manner to follow the object to be inspected while the object to be inspected moves from an imaging start position to an imaging end position, and The X-ray detector is configured to image the object to be inspected while moving in the transport direction, and after the previous object to be inspected has moved to the imaging end position, perform a return movement to a position where the object to be inspected located at the imaging start position can be imaged before the next object to be inspected reaches the imaging start position. The X-ray inspection device comprises a reference image information storage unit in which reference image information, which is image information of a reference image obtained by previously imaging the object to be inspected, a judgment unit which judges whether image information of the X-ray image obtained by the imaging matches the reference image information, and a control unit which adjusts the X-ray irradiation range and the movement speed of the X-ray detector when the judgment unit judges that the image information of the X-ray image obtained by the imaging does not match the reference image information.

[0008] With this configuration, the X-ray inspection device of the present invention images the inspection object while the X-ray irradiation range of the X-ray generator moves to follow the inspection object from the imaging start position to the imaging end position, and the X-ray detector moves in the transport direction. Therefore, compared to a configuration in which the X-ray generator and X-ray detector are fixed and imaging is performed, the exposure time can be extended without slowing down the transport speed of the inspection object.

[0009] In addition, the system is equipped with a control unit that adjusts the X-ray irradiation range and the movement speed of the X-ray detector when the judgment unit judges that the image information of the X-ray image obtained by imaging does not match the reference image information.Therefore, even if a discrepancy occurs between the movement of the object to be inspected and the X-ray irradiation range and the following movement of the X-ray detector, causing, for example, the object to be inspected in the X-ray image to become unclear or the position of the object to be inspected in the X-ray image to deviate from the position of the work image in the reference image, thereby degrading the quality of the X-ray image, the quality of the X-ray image can be improved by adjusting the X-ray irradiation range and the movement speed of the X-ray detector.

[0010] Therefore, the X-ray inspection apparatus according to the present invention can obtain clear transmitted images with less noise without reducing the transport speed of the inspection object.

[0011] In the X-ray inspection apparatus of the present invention, when the contrast of the object to be inspected in the X-ray image obtained by the imaging differs from the contrast of the object to be inspected in the reference image, it is preferable that the judgment unit judges that the image information of the X-ray image obtained by the imaging is a first pattern that does not match the reference image information, and the control unit adjusts the movement speed of the following movement in the case of the first pattern.

[0012] With this configuration, when the contrast of the object to be inspected in the X-ray image obtained by imaging differs from the contrast of the object to be inspected in the reference image, the X-ray inspection device according to the present invention determines that the image information of the X-ray image obtained by imaging does not match the reference image information as a first pattern, and in this case adjusts the moving speed of the tracking movement, so that the X-ray irradiation range and the moving speed of the X-ray detector during the tracking movement can be matched to the transport speed of the object to be inspected. This makes it possible to match the contrast of the object to be inspected in the X-ray image obtained by imaging with the contrast of the object to be inspected in the reference image, thereby improving the quality of the X-ray image.

[0013] In the X-ray inspection apparatus of the present invention, when the position of the object to be inspected in the X-ray image obtained by the imaging differs from the position of the object to be inspected in the reference image, it is preferable that the judgment unit judges that the image information of the X-ray image obtained by the imaging is a second pattern in which it does not match the reference image information, and the control unit adjusts the movement speed of the return movement in the case of the second pattern.

[0014] With this configuration, when the position of the object to be inspected in the X-ray image obtained by imaging differs from the position of the object to be inspected in the reference image, the X-ray inspection device according to the present invention determines that the image information of the X-ray image obtained by imaging does not match the reference image information, and in this case, adjusts the moving speed of the return movement, thereby adjusting the X-ray irradiation range and the timing at which the X-ray detector returns to a position where the object to be inspected located at the imaging start position can be imaged. This makes it possible to match the timing at which the object to be inspected reaches the imaging start position with the timing at which the X-ray generator and the X-ray detector start imaging. As a result, it is possible to match the position of the object to be inspected in the X-ray image obtained by imaging with the position of the object to be inspected in the reference image, thereby improving the quality of the X-ray image.

[0015] In the X-ray inspection apparatus of the present invention, when the position of the object to be inspected in the X-ray image obtained by the imaging differs from the position of the object to be inspected in the reference image, it is preferable that the judgment unit judges that the image information of the X-ray image obtained by the imaging is a second pattern in which it does not match the reference image information, and when the second pattern is found, the control unit externally notifies the fact that the image information of the X-ray image obtained by the imaging does not match the reference image information.

[0016] With this configuration, when the position of the inspection object in the X-ray image obtained by imaging differs from the position of the inspection object in the reference image, the X-ray inspection device according to the present invention determines that the image information of the X-ray image obtained by imaging does not match the reference image information as a second pattern, and in this case, notifies the outside that the image information of the X-ray image obtained by imaging does not match the reference image information, so that it is possible to inform the user that the quality of the X-ray image needs to be improved. Upon receiving the above-mentioned notification, the user can, for example, change the settings of a transport device that transports the inspection object to the X-ray inspection device or an input device that inputs the inspection object into the transport device.

[0017] In the X-ray inspection apparatus of the present invention, it is preferable that the X-ray generator and the X-ray detector are configured to perform imaging even during the return movement, the judgment unit judges whether or not an object to be inspected is present in the X-ray image taken during the return movement, and the control unit externally notifies the outside that there is an abnormality in the transportation of the object to be inspected when the judgment unit judges that an object to be inspected is present in the X-ray image taken during the return movement.

[0018] With this configuration, when it is determined that an object to be inspected is present in an X-ray image captured during return movement, the X-ray inspection apparatus according to the present invention notifies the outside that there is an abnormality in the transportation of the object to be inspected, and can notify the user that the transport interval of the object to be inspected may be so small or the transport speed of the object to be inspected may be so fast that it is not possible to accommodate the transport interval or transport speed of the object to be inspected by adjusting the X-ray irradiation range and the movement speed of the X-ray detector. Upon receiving the above-mentioned notification, the user can, for example, change the settings of the transport device that transports the object to the X-ray inspection apparatus or the input device that inputs the object to the transport device.

[0019] In the X-ray inspection apparatus according to the present invention, it is preferable that the X-ray generator and the X-ray detector are unitized so as to be able to move back and forth integrally in a direction parallel to the transport direction.

[0020] With this configuration, the X-ray inspection device of the present invention has the X-ray generator and the X-ray detector unitized so that they can move back and forth as a unit in a direction parallel to the transport direction, so that the X-ray generator and the X-ray detector can be moved at the same speed without any misalignment.

[0021] The X-ray inspection system of the present invention is an X-ray inspection system including the X-ray inspection apparatus described in claim 1, a transport device that transports an object to be inspected to the X-ray inspection apparatus, and an input device that inputs the object to be inspected into the transport device, wherein the judgment unit judges that the image information of the X-ray image obtained by imaging is a second pattern in which it does not match the reference image information when the position of the object to be inspected in the X-ray image obtained by imaging differs from the position of the object to be inspected in the reference image, and the control unit is configured to output a signal to the input device to adjust the timing of input of the object to be inspected into the transport device in the case of the second pattern.

[0022] With this configuration, the X-ray inspection system according to the present invention determines that the image information of the X-ray image obtained by imaging does not match the reference image information when the position of the object to be inspected in the X-ray image obtained by imaging is different from the position of the object to be inspected in the reference image, and in this case outputs a signal to the insertion device to adjust the timing of inserting the object to the transport device, so that the insertion device can adjust the timing of inserting the object to be inspected. This makes it possible to match the timing at which the object to be inspected reaches the imaging start position with the timing at which the X-ray generator and the X-ray detector start imaging. As a result, it is possible to match the position of the object to be inspected in the X-ray image obtained by imaging with the position of the object to be inspected in the reference image, improving the quality of the X-ray image. Effect of the Invention

[0023] According to the present invention, it is possible to provide an X-ray inspection device and an X-ray inspection system that can obtain clear transmitted images with less noise without reducing the transport speed of the object to be inspected. [Brief description of the drawings]

[0024] [Figure 1] FIG. 1 is a schematic diagram of an X-ray inspection apparatus according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a schematic perspective view of an X-ray inspection apparatus according to an embodiment of the present invention. [Diagram 3] FIG. 3 is a graph showing the transition of movement of the imaging unit of the X-ray inspection apparatus according to one embodiment of the present invention. [Figure 4] 4(a) to 4(e) are diagrams showing, in chronological order, the positional relationship between an imaging unit of an X-ray inspection apparatus according to one embodiment of the present invention and a workpiece. [Diagram 5] Figure 5 shows a workpiece image in an X-ray image captured by an imaging unit of an X-ray inspection apparatus according to one embodiment of the present invention, where (a) shows a case where the workpiece image is blurred, and (b) shows a case where the position of the workpiece image in the X-ray image is shifted from the position of the workpiece image in the reference image. [Figure 6]FIG. 6 is a time chart for a case (first pattern) in which the tracking speed of the imaging unit of the X-ray inspection apparatus according to one embodiment of the present invention does not match the transport speed of the workpiece. [Figure 7] FIG. 7 is a timing chart for a case (second pattern) in which the timing at which the imaging unit of the X-ray inspection apparatus according to one embodiment of the present invention starts imaging does not coincide with the timing at which the workpiece reaches the imaging start position. [Figure 8] FIG. 8 is a time chart in the case where the first pattern in FIG. 6 and the second pattern in FIG. 7 occur simultaneously. [Figure 9] FIG. 9 is a flowchart showing the flow of a tracking deviation determination process executed in an X-ray inspection apparatus according to an embodiment of the present invention. [Figure 10] FIG. 10 is a schematic block diagram showing an X-ray inspection system including an X-ray inspection apparatus according to an embodiment of the present invention. [Figure 11] FIG. 11 is a perspective view showing a modified example of an X-ray inspection apparatus according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] An X-ray inspection apparatus according to an embodiment of the present invention will now be described with reference to the drawings.

[0026] (X-ray inspection equipment configuration) As shown in FIG. 1, the X-ray inspection apparatus 1 of this embodiment is an X-ray inspection apparatus that irradiates X-rays onto a workpiece W as an inspection object being transported, detects the transmitted X-rays, and uses the obtained transmitted image to inspect the workpiece W for foreign matter contamination, shape, etc.

[0027] In this embodiment, the workpiece W will be described as a cylindrical object such as a bottle product, but the workpiece W is not limited to this.

[0028] The X-ray inspection device 1 of this embodiment includes a housing (not shown), an X-ray generator 10 that generates X-rays, an X-ray detector 11 that detects X-rays that have passed through a workpiece W, and a control circuit 20. The X-ray generator 10, the X-ray detector 11, and the control circuit 20 are housed in a housing (not shown).

[0029] The housing is incorporated into a conveyor 2 that transports the workpiece W. The conveyor 2 is part of the production equipment for the workpiece W, and is configured separately from the X-ray inspection device 1. In this way, the X-ray inspection device 1 is an embedded type X-ray inspection device that is incorporated into a separate conveyor 2, and is incorporated into an existing conveyor that transports the workpiece W in a horizontal direction, such as a top chain conveyor or a belt conveyor.

[0030] The X-ray generator 10 and the X-ray detector 11 are disposed so as to face each other in the width direction of the conveyor 2, sandwiching the transport path 3 along which the workpiece W on the conveyor 2 passes.

[0031] The X-ray generator 10 generates X-rays by irradiating an electron beam from the cathode of an X-ray tube (not shown) installed inside the generator 10 onto an anode target, and irradiates the generated X-rays radially so as to image the range shown by the dashed line in Fig. 1. In this way, the X-ray generator 10 irradiates X-rays onto the workpieces W on the conveyor 2 that are transported in sequence.

[0032] The X-ray detector 11 includes a photodiode (not shown) and a plurality of X-ray detection elements (not shown) each made of a scintillator provided on the photodiode. The X-ray detector 11 is configured with an area sensor in which the X-ray detection elements are arranged in a plane in the conveying direction and in a direction perpendicular to the conveying direction.

[0033] The X-ray detector 11 captures an image of the X-rays (hereinafter referred to as "X-ray image") that are irradiated from the X-ray generator 10 to the workpiece W on the transport path 3 and transmitted through the workpiece W. Specifically, the X-rays are converted into optical signals by the scintillator of the X-ray detection element, and the optical signals are converted into electrical signals by the photodiode. Further processing such as noise removal is performed, and an X-ray image with a gray-scale distribution is generated based on the amount of transmitted X-rays.

[0034] The control circuit 20 is connected to a display unit 12, a setting operation unit 13, and a drive unit .

[0035] The display unit 12 is configured with a flat display or the like, and is configured to perform display output to a user. The display unit 12 is configured to display images of the inspection results, judgment results, etc., by the control circuit 20.

[0036] The display unit 12 is also configured to display the pass / fail judgment result of the workpiece W with letters or symbols such as "OK" or "NG". The display unit 12 is also configured to display statistical values ​​such as the total number of inspections, the number of pass / fail products, and the total number of NG products. Furthermore, the display unit 12 is configured to display the judgment result by the judgment unit 27 described later, as well as any abnormality in the transportation of the workpiece W based on the judgment result with letters or symbols.

[0037] The display contents and display mode of the display unit 12 are determined based on preset settings or requests made through predetermined key operations on the setting operation unit 13.

[0038] The setting operation unit 13 is used to input settings of various parameters and the like to the control circuit 20. The setting operation unit 13 is composed of a plurality of keys, switches, and the like that are operated by the user, and is used to input settings of various parameters and the like to the control circuit 20 and to select an operation mode.

[0039] In this embodiment, the display unit 12 and the setting operation unit 13 are integrated as a touch panel type display device, and are disposed on the upper front surface of a housing (not shown).

[0040] The drive section 14 is configured as a drive source for reciprocating an imaging unit 30 (described later) in a direction parallel to the conveying direction of the workpiece W, and is composed of an actuator such as a motor.

[0041] The control circuit 20 includes an X-ray image storage unit 21 , an image processing unit 22 , a determination unit 23 , a control unit 25 , a reference image information storage unit 26 , and a judgment unit 27 .

[0042] The X-ray image storage unit 21 is configured to store the X-ray image received from the X-ray detector 11 .

[0043] The image processing unit 22 applies various image processing algorithms and the like to the X-ray image read out from the X-ray image storage unit 21 to perform image processing. Here, the image processing algorithm is a combination of a plurality of image processing filters.

[0044] The judgment unit 23 distinguishes between the workpiece W and foreign matter in the X-ray image processed by the image processing unit 22 to determine whether or not foreign matter is present, and also judges whether the shape of the workpiece W is good or bad.

[0045] The control unit 25 has a CPU, a memory as a storage area or a working area for a control program, and the like, and is configured to control the entire X-ray inspection apparatus 1. The control contents of the control unit 25 include control of the display contents and display form of the display unit 12.

[0046] The control unit 25 is also configured to control the driving of the drive unit 14. By controlling the driving of the drive unit 14, the control unit 25 controls the reciprocating movement operation of the imaging unit 30 and adjusts the movement speed of the imaging unit 30.

[0047] The reference image information storage unit 26 stores image information (hereinafter referred to as "reference image information") of an X-ray image (hereinafter referred to as "reference image") captured in advance of a sample of the workpiece W. As the reference image, for example, a still image of the sample of the workpiece W may be used, or an X-ray image captured while tracking the sample of the workpiece W after adjusting the moving speed of the imaging unit 30, the transport speed of the workpiece W, the transport interval of the workpiece W, and the like may be used.

[0048] The reference image information includes various information that can be identified as the reference image, such as contrast information of the workpiece W in the reference image and the central coordinates of the workpiece W in the reference image.

[0049] The determination unit 27 is configured to determine whether or not image information of an X-ray image captured while tracking the workpiece W matches the reference image information. Here, "matching the reference image information" includes a case where the image information matches the reference image information completely, as well as a case where, for example, differences between various numerical values ​​indicating the image information of the captured X-ray image and various numerical values ​​indicating the reference image information fall within an allowable range.

[0050] (Imaging unit) As shown in FIG. 2, in the X-ray inspection apparatus 1 of this embodiment, the X-ray generator 10 and the X-ray detector 11 are connected to each other by a movable bracket 31, thereby forming a unit capable of reciprocating movement in a direction parallel to the transport direction B of the workpiece W.

[0051] In this embodiment, the X-ray generator 10, the X-ray detector 11, and the moving bracket 31 constitute an imaging unit 30.

[0052] The movable bracket 31 is configured to reciprocate on a linear slider 32 extending in a direction parallel to the transport direction B of the workpiece W. The reciprocating movement of the movable bracket 31 is realized by the drive of the drive unit 14.

[0053] A pair of guide rails 33, 34 are provided below the moving bracket 31, sandwiching the linear slider 32 between them and facing each other in a direction perpendicular to the conveying direction B. The moving bracket 31 reciprocates while being guided by the pair of guide rails 33, 34.

[0054] As a result, the X-ray generator 10 and the X-ray detector 11 reciprocate between an imaging start position (position shown in FIG. 4(a)) and an imaging end position (position shown in FIG. 4(b)).

[0055] Specifically, the X-ray generator 10 and the X-ray detector 11 are adapted to move in the transport direction B from the imaging start position to the imaging end position at a speed equal to the transport speed of the workpiece W so as to follow the workpiece W while the workpiece W moves from the imaging start position to the imaging end position, thereby capturing an image of the workpiece W. In other words, the irradiation range of X-rays by the X-ray generator 10 is adapted to move in the transport direction B following the workpiece W when imaging the workpiece W. In addition, the X-ray detector 11 is adapted to move in a direction parallel to the transport direction B in conjunction with the movement of the irradiation range of X-rays.

[0056] The X-ray generator 10 and the X-ray detector 11 are configured to perform a return movement to the imaging start position after the previous workpiece W has moved to the imaging end position and before the next workpiece W to be transported reaches the imaging start position. In this embodiment, it is desirable that the next workpiece W is located at the imaging start position when the X-ray generator 10 and the X-ray detector 11 return to the imaging start position. In other words, it is desirable that the timing when the X-ray generator 10 and the X-ray detector 11 return to the imaging start position coincides with the timing when the next workpiece W reaches the imaging start position.

[0057] It is desirable that the moving speed at which the X-ray generator 10 and the X-ray detector 11 return to the imaging start position is faster than the transport speed of the workpiece W. In other words, it is desirable that the moving speed at which the X-ray generator 10 and the X-ray detector 11 move in the opposite direction to the transport direction B is faster than the moving speed at which they move in the transport direction B. This makes it possible to reduce the intervals between the works W that are transported sequentially, and to increase the number of inspections of the workpieces W per unit time.

[0058] (Transition of imaging unit movement) Next, the transition of the movement of the imaging unit 30 will be described with reference to FIGS.

[0059] In Fig. 3, the dashed lines indicate the transition of the movement of the workpiece W, and the solid lines indicate the transition of the movement of the imaging unit 30. In Fig. 3, the transition of the movement of the imaging unit 30 will be explained using as an example the workpiece W1 that is transported first and the workpiece W2 that is transported next among the workpieces W that are transported sequentially. In Fig. 3, P1 indicates the imaging start position, and P2 indicates the imaging end position.

[0060] Figures 4(a) to 4(e) are diagrams showing the positional relationship between the imaging unit 30 and the workpiece W at each time from time t0 to time t4 shown in Figure 3, with Figure 4(a) corresponding to time t0, Figure 4(b) corresponding to time t1, Figure 4(c) corresponding to time t2, Figure 4(d) corresponding to time t3, and Figure 4(e) corresponding to time t4.

[0061] 3, when the workpiece W1 reaches the imaging start position P1 at time t0, the imaging unit 30 starts imaging the workpiece W1 while moving toward the imaging end position P2 at a speed equal to the conveying speed of the workpiece W1 so as to follow the workpiece W1. That is, as shown in FIG. 4(a), at the timing when the center of the workpiece W1 in the conveying direction coincides with the imaging axis A perpendicular to the imaging surface of the X-ray detector 11, the X-ray generator 10 and the X-ray detector 11 start imaging the workpiece W1 while starting to follow the workpiece W1.

[0062] Thereafter, until the imaging of the workpiece W1 is completed, that is, until the workpiece W1 reaches the imaging end position P2, the workpiece W1 is imaged while the workpiece W1 and the imaging unit 30 move at a constant speed.

[0063] Next, when the workpiece W1 and the imaging unit 30 reach the imaging end position P2 (the position shown in FIG. 4(b)) at time t1, imaging of the workpiece W1 ends, and an operation for returning the imaging unit 30 to the imaging start position P1 is started. Specifically, the control unit 25 starts driving the drive unit 14 in the reverse direction.

[0064] At this time, the imaging unit 30 slightly passes the imaging end position P2 in the transport direction B, then reverses its movement direction at that position (the position shown in FIG. 4(c)) and starts to return to the imaging start position P1.

[0065] At time t2, when the imaging unit 30 starts to return to the imaging start position P1, a positive acceleration is applied to the imaging unit 30. That is, the imaging unit 30 accelerates and moves from the position shown in FIG.

[0066] Next, at time t3, the acceleration applied to the imaging unit 30 is switched from positive to negative. That is, the control unit 25 controls the drive unit 14 so that the imaging unit 30, which has been moving with positive acceleration, is given negative acceleration at time t3, and the imaging unit 30 starts to decelerate.

[0067] Time t3 is, for example, half the moving distance of the imaging unit 30, that is, the timing when the imaging unit 30 reaches an intermediate position between the imaging start position P1 and the imaging end position P2 (the position shown in FIG. 4(d)), and can also be defined as t3=(t2+t4) / 2. Note that the timing of switching between positive and negative acceleration applied to the imaging unit 30 is not limited to the above-mentioned timing, and may be changed as appropriate depending on the specifications of the imaging unit 30 and the drive unit 14.

[0068] Next, the imaging unit 30, which is decelerating, slightly passes the imaging start position P1 in the direction opposite to the conveying direction B, and then the deceleration ends at time t4, at which point the moving direction reverses and the imaging unit 30 starts moving toward the imaging end position P2. At this time, as shown in FIG. 4(e), the workpiece W2 has not yet reached the imaging start position P1.

[0069] After that, when the workpiece W2 reaches the imaging start position P1 at time t5, the imaging unit 30 starts imaging the workpiece W2 while moving toward the imaging end position P2 at a speed equal to the conveying speed of the workpiece W2 so as to follow the workpiece W2. After that, the flow is the same as that of the workpiece W1.

[0070] In this manner, the control unit 25 controls the driving unit 14 so that the X-ray generator 10 and the X-ray detector 11 periodically repeat the reciprocating movement.

[0071] (Adjusting the moving speed of the imaging unit) Next, adjustment of the moving speed of the imaging unit will be described with reference to FIGS.

[0072] If the movement of the workpiece W and the movement of the imaging unit 30 are not synchronized when imaging the workpiece W, for example, the workpiece image Ir in the captured X-ray image may be blurred relative to the workpiece image Is in the reference image (state shown in Figure 5(a)), or the position of the workpiece image Ir in the captured X-ray image may be shifted relative to the workpiece image Is in the reference image (state shown in Figure 5(b)), resulting in a decrease in the quality of the captured X-ray image.

[0073] Here, examples of patterns in which the movement of the workpiece W and the movement of the imaging unit 30 are not synchronized include the following first and second patterns.

[0074] 6, the first pattern is a pattern in which the transport speed of the workpiece W, such as the workpiece WH and the workpiece WL, deviates from the transport speed of the workpiece W1, which is equal to the moving speed of the imaging unit 30 during the following movement (hereinafter referred to as the "following speed"). The workpiece WH is transported at a transport speed faster than the transport speed of the workpiece W1. The workpiece WL is transported at a transport speed slower than the transport speed of the workpiece W1.

[0075] In the case of the first pattern, the workpiece image in the captured X-ray image is blurred. For example, Fig. 5(a) shows a comparison between the workpiece image Ir captured when the workpiece WH is captured and the workpiece image Is in the reference image.

[0076] When the workpiece W is imaged, the image is captured at a frame rate of, for example, 20 frames / second. Therefore, when the workpiece WH moves at a speed faster than the imaging unit 30, as shown in Fig. 5(a), the workpiece image of the workpiece WH is elongated toward the conveying direction (to the right in Fig. 5) like the workpiece image Ir, and the contrast of the workpiece image gradually decreases toward both ends in the direction parallel to the conveying direction, resulting in a blurred image. Note that when the workpiece WL is imaged, the elongated direction is the opposite direction to the conveying direction (to the left in Fig. 5).

[0077] Therefore, in this embodiment, when the contrast of the workpiece image in the X-ray image obtained by imaging during tracking movement differs from the contrast of the workpiece image in the reference image, the judgment unit 27 judges this to be the first pattern, in which the image information of the X-ray image obtained by imaging does not match the reference image information.

[0078] In this embodiment, in order to eliminate the first pattern, the control unit 25 adjusts the following speed of the imaging unit 30 during the following movement.

[0079] Specifically, when the tracking speed of the imaging unit 30 is slower than the transport speed of the workpiece W, the control unit 25 controls the drive unit 14 to increase the tracking speed of the imaging unit 30. On the other hand, when the tracking speed of the imaging unit 30 is faster than the transport speed of the workpiece W, the control unit 25 controls the drive unit 14 to decrease the tracking speed of the imaging unit 30.

[0080] When it becomes necessary to adjust the movement speed of the imaging unit 30 during the return movement by adjusting the tracking speed of the imaging unit 30 as described above, it is preferable that the control unit 25 also adjusts the movement speed of the imaging unit 30 during the return movement.

[0081] The second pattern, as shown in FIG. 7, is a pattern in which the timing when the imaging unit 30 is positioned at the imaging start position P1 is different from the timing when the workpiece W reaches the imaging start position P1.

[0082] A workpiece W(-) is a transition of a workpiece when the imaging unit 30 reaches the imaging start position P1 at a timing earlier than the timing at which the imaging unit 30 is positioned at the imaging start position P1. For example, when the interval between successively transported workpieces becomes narrow, the workpiece reaches the imaging start position P1 before the imaging unit 30 is positioned at the imaging start position P1, as in the case of a workpiece W(-).

[0083] The workpiece W(+) is a transition of the workpiece when the imaging unit 30 reaches the imaging start position P1 at a timing later than the timing at which the imaging unit 30 is positioned at the imaging start position P1. For example, when the interval between the successively transported workpieces becomes wider, the workpiece reaches the imaging start position P1 after the imaging unit 30 is positioned at the imaging start position P1, as in the case of the workpiece W(+).

[0084] In the case of the second pattern, the position of the workpiece image Ir in the captured X-ray image is shifted from the position of the workpiece image Is in the reference image. For example, Fig. 5(b) shows a comparison of the workpiece image Ir when capturing an image of the workpiece W(+) with the workpiece image Is in the reference image.

[0085] When the workpiece W(+) is imaged, as shown in Fig. 5(b), the workpiece image Ir of the workpiece W(+) is an image whose position is shifted in the opposite direction to the transport direction (leftward in Fig. 5) with respect to the workpiece image Is in the reference image. Note that when the workpiece W(-) is imaged, the workpiece image Ir of the workpiece W(-) is an image whose position is shifted in the transport direction (rightward in Fig. 5) with respect to the workpiece image Is in the reference image.

[0086] Therefore, in this embodiment, when the position of the workpiece image in the X-ray image obtained by imaging during tracking movement differs from the position of the workpiece image in the reference image, the judgment unit 27 judges this to be a second pattern in which the image information of the X-ray image obtained by imaging does not match the reference image information.

[0087] In this embodiment, in order to eliminate the second pattern, the control unit 25 adjusts the moving speed of the imaging unit 30 during the return movement, that is, the acceleration and deceleration (hereinafter also collectively referred to as "acceleration / deceleration").

[0088] Specifically, when the workpiece W reaches the imaging start position P1 earlier than the timing at which the imaging unit 30 was located at the imaging start position P1 (in the case of workpiece W(-) in FIG. 7), the control unit 25 controls the drive unit 14 to increase the acceleration / deceleration of the imaging unit 30 during the return movement. In contrast, when the imaging unit 30 reaches the imaging start position P1 later than the timing at which the imaging unit 30 was located at the imaging start position P1, the control unit 25 controls the drive unit 14 to decrease the acceleration / deceleration of the imaging unit 30 during the return movement.

[0089] When the second pattern occurs, the control unit 25 may adjust the timing of acceleration and deceleration instead of or in addition to adjusting the acceleration and deceleration rate of the imaging unit 30 during the return movement.

[0090] Here, the first and second patterns described above may occur simultaneously. In this case, the transition of the work W may be, for example, a transition such as work WH(-) or work WL(+) as shown in FIG.

[0091] The workpiece WH(-) moves at a faster speed than the imaging unit 30 and reaches the imaging start position P1 at a timing earlier than the timing at which the imaging unit 30 is positioned at the imaging start position P1.

[0092] The workpiece WL(+) moves at a slower speed than the imaging unit 30 and reaches the imaging start position P1 at a timing later than the timing at which the imaging unit 30 is positioned at the imaging start position P1.

[0093] Work WH(-) and work WL(+) are examples of combinations when the first pattern and the second pattern occur simultaneously, and there may also be combinations that result in a transition to work WL(-) or work WH(+).

[0094] When the first pattern and the second pattern occur simultaneously, it is preferable that the control unit 25 adjusts the following speed of the imaging unit 30 during the following movement, and adjusts the acceleration / deceleration of the imaging unit 30 during the return movement.

[0095] Each of the patterns in Figures 6 to 8 described above is an example of the transition of the workpiece W when a tracking error occurs in which the movement of the workpiece W and the movement of the imaging unit 30 are not synchronized, and is not limited to this.

[0096] (Following deviation judgment process) Next, the flow of the tracking error determination process executed by the control circuit 20 will be described with reference to the flowchart of FIG.

[0097] As shown in FIG. 9, the control circuit 20 captures an image of the workpiece W when the imaging unit 30 moves in a following manner (step S1).

[0098] Next, the control circuit 20 compares the image information of the X-ray image captured in step S1 with the reference image information stored in the reference image information storage unit 26 (step S2).

[0099] If the control circuit 20 determines, as a result of the comparison in step S2, that the difference between the image information of the X-ray image captured in step S1 and the reference image information stored in the reference image information memory unit 26 falls within the acceptable range (including agreement), it proceeds to step S9.

[0100] If the comparison result in step S2 indicates a first pattern in which the following speed of the imaging unit 30 during the following movement does not match the transport speed of the workpiece W, the control circuit 20 moves the process to step S3.

[0101] If the control circuit 20 determines, as a result of the comparison in step S2, that the second pattern is formed in which the timing at which the imaging unit 30 is positioned at the imaging start position P1 and the timing at which the workpiece W reaches the imaging start position P1 are different, the control circuit 20 proceeds to processing in step S6.

[0102] In step S3, the control circuit 20 determines whether or not the tracking speed of the imaging unit 30 is slower than the transport speed of the workpiece W. Specifically, the control circuit 20 can determine whether or not the tracking speed of the imaging unit 30 is slower than the transport speed of the workpiece W by determining whether or not the workpiece image in the X-ray image captured in step S1 is an image that is elongated in either the transport direction or the opposite direction with respect to the workpiece image in the reference image.

[0103] If the control circuit 20 determines in step S3 that the following speed of the imaging unit 30 is slower than the transport speed of the workpiece W, it increases the following speed of the imaging unit 30, i.e., makes the following speed faster (step S4), and proceeds to step S9.

[0104] If the control circuit 20 determines in step S3 that the tracking speed of the imaging unit 30 is not slower than the transport speed of the workpiece W, i.e., that the tracking speed of the imaging unit 30 is faster than the transport speed of the workpiece W, it reduces the tracking speed of the imaging unit 30, i.e., slows down the tracking speed (step S5), and proceeds to step S9.

[0105] Here, if the following speed and the conveying speed match, this is determined to be within the allowable range in step S2, so if the answer is "No" in step S3, this does not include the case where the following speed and the conveying speed match.

[0106] In step S6, the control circuit 20 determines whether or not the position of the workpiece image in the X-ray image captured in step S1 advances in the conveying direction of the workpiece W relative to the position of the workpiece image in the reference image.

[0107] When the control circuit 20 determines in step S6 that the position of the workpiece image in the X-ray image captured in step S1 is further forward in the conveying direction of the workpiece W than the workpiece image in the reference image, it increases the acceleration / deceleration of the imaging unit 30 during the return movement, i.e., increases the absolute value of the acceleration / deceleration (step S7), and proceeds to step S9. This increases both the acceleration and deceleration of the imaging unit 30 during the return movement.

[0108] If the control circuit 20 determines in step S6 that the position of the workpiece image in the X-ray image captured in step S1 does not advance in the conveying direction of the workpiece W relative to the workpiece image in the reference image, that is, that it lags behind in the opposite direction to the conveying direction, it reduces the acceleration / deceleration of the imaging unit 30 during the return movement, that is, reduces the absolute value of the acceleration / deceleration (step S8), and proceeds to step S9. This reduces the acceleration and deceleration of the imaging unit 30 during the return movement.

[0109] Here, if the position of the workpiece image in the X-ray image taken in step S1 matches the position of the workpiece image in the reference image, this is judged to be within the acceptable range in step S2, so if the answer is "No" in step S6, this does not include the case where the position of the workpiece image in the X-ray image taken in step S1 matches the position of the workpiece image in the reference image.

[0110] In step S9, the control circuit 20 judges whether or not a workpiece image is present in the X-ray image captured within a predetermined period during the return movement. In other words, the control circuit 20 is configured to capture an image during a predetermined period during the return movement in addition to the image captured in step S1, and judges whether or not a workpiece image is present in the X-ray image captured within the predetermined period.

[0111] The specified period is a period during which the workpiece W would not be captured in the X-ray image if no tracking deviation occurs, and corresponds to the period from time t2 to time t4 in FIG. 3 in this embodiment, for example.

[0112] If the control circuit 20 determines in step S9 that there is no workpiece image in the X-ray image captured within the predetermined period during the return movement, it ends the current tracking deviation determination process.

[0113] If the control circuit 20 determines in step S9 that a workpiece image is present in the X-ray image taken within the specified period during the return movement, it determines that the workpiece transport interval has become so narrow that the tracking deviation cannot be eliminated by increasing or decreasing the tracking speed or acceleration / deceleration described above, and notifies the outside, for example via the display unit 12, of a workpiece transport abnormality indicating that there is an abnormality in the workpiece transport (step S10), and terminates the current tracking deviation determination process.

[0114] (Action and effect) As described above, in the X-ray inspection apparatus of this embodiment, the X-ray generator 10 moves to follow the workpiece W from the imaging start position P1 to the imaging end position P2, and the X-ray detector 11 moves in the transport direction to image the workpiece W. Therefore, compared to a configuration in which the X-ray generator 10 and the X-ray detector 11 are fixed and imaging is performed, the exposure time can be extended without slowing down the transport speed of the workpiece W.

[0115] Furthermore, the control unit 25 adjusts the movement speed of the imaging unit 30 when the judgment unit 27 judges that the image information of the X-ray image obtained by imaging during the tracking movement does not match the reference image information. Therefore, even if a misalignment occurs between the movement of the workpiece W and the tracking movement of the imaging unit 30, for example, causing the workpiece image in the X-ray image to become unclear or the position of the workpiece image in the X-ray image to deviate from the position of the workpiece image in the reference image, thereby degrading the quality of the X-ray image, the quality of the X-ray image can be improved by adjusting the movement speed of the imaging unit 30.

[0116] Therefore, the X-ray inspection apparatus according to this embodiment can obtain clear transmitted images with less noise without reducing the transport speed of the inspection object.

[0117] Furthermore, when the contrast of the workpiece image in the X-ray image obtained by imaging during the following movement differs from the contrast of the workpiece image in the reference image, the X-ray inspection device according to this embodiment determines that the image information of the X-ray image obtained by imaging during the following movement does not match the reference image information as a first pattern, and in this case adjusts the moving speed of the imaging unit 30 during the following movement, so that the moving speed of the imaging unit 30 during the following movement can be matched with the transport speed of the workpiece W. This makes it possible to match the contrast of the workpiece image in the X-ray image obtained by imaging during the following movement with the contrast of the workpiece image in the reference image, thereby improving the quality of the X-ray image.

[0118] In addition, when the position of the workpiece image in the X-ray image obtained by imaging during the follow-up movement differs from the position of the workpiece image in the reference image, the X-ray inspection device according to this embodiment determines that the image information of the X-ray image obtained by imaging during the follow-up movement does not match the reference image information, and in this case, adjusts the moving speed of the return movement of the imaging unit 30, so that the timing at which the imaging unit 30 returns to the imaging start position P1 can be adjusted. This makes it possible to match the timing at which the workpiece W reaches the imaging start position P1 with the timing at which the X-ray generator 10 and the X-ray detector 11 start imaging. As a result, it is possible to match the position of the workpiece image in the X-ray image obtained by imaging during the follow-up movement with the position of the workpiece image in the reference image, thereby improving the quality of the X-ray image.

[0119] Furthermore, the X-ray inspection apparatus according to this embodiment notifies the outside of a work transport abnormality when it is determined that a workpiece W is present in an X-ray image captured within a predetermined period during the return movement of the imaging unit 30, and can therefore notify the user that the workpiece transport interval may be too small or the transport speed may be too fast to accommodate the transport interval or transport speed of the workpiece W by adjusting the movement speed of the imaging unit 30. Upon receiving the above-mentioned notification, the user can, for example, change the settings of the transport device that transports the workpiece W to the X-ray inspection apparatus 1 or the input device that inputs the workpiece W into the transport device.

[0120] Furthermore, in the X-ray inspection apparatus according to this embodiment, the X-ray generator 10 and the X-ray detector 11 are unitized so that they can move back and forth together in a direction parallel to the transport direction B, so that the X-ray generator 10 and the X-ray detector 11 can be moved at the same speed without any misalignment.

[0121] (Modification) In this embodiment, an example has been described in which the X-ray inspection apparatus according to the present invention is applied to a horizontal irradiation type X-ray inspection apparatus in which the X-ray generator 10 and the X-ray detector 11 are arranged to face each other in a horizontal direction perpendicular to the transport direction of the workpiece W, with the transport path 3 in between. However, the apparatus may also be applied to an X-ray inspection apparatus of a type in which the X-ray generator 10 and the X-ray detector 11 are arranged to face each other in a vertical direction, with the transport path 3 in between.

[0122] Furthermore, the X-ray inspection apparatus according to this embodiment is configured to include one set of the X-ray generator 10 and the X-ray detector 11, but may be configured to include two or more sets of the X-ray generator 10 and the X-ray detector 11. In this case, it is preferable to configure these two or more sets of the X-ray generator 10 and the X-ray detector 11 as a unit that can be moved as a unit.

[0123] In the X-ray inspection apparatus according to the present embodiment, the X-ray generator 10 and the X-ray detector 11 are unitized and configured to be able to reciprocate together, but this is not limiting, and the X-ray generator 10 and the X-ray detector 11 may be configured to be able to reciprocate independently. In this case, the control unit 25 synchronizes the movement of the X-ray generator 10 and the movement of the X-ray detector 11.

[0124] Furthermore, in the X-ray inspection apparatus according to this embodiment, when the second pattern occurs, instead of or in addition to adjusting the acceleration / deceleration of the imaging unit 30 during the return movement, the control unit 25 may notify the outside, for example via the display unit 12, that the image information of the X-ray image obtained by imaging during the following movement does not match the reference image information.

[0125] In this case, since a notification is sent to the outside that the image information of the X-ray image obtained by imaging during the tracking movement does not match the reference image information, the user can be notified that the quality of the X-ray image needs to be improved. Upon receiving the notification, the user can, for example, change the settings of the transport device that transports the workpiece W to the X-ray inspection device 1 and the input device that inputs the workpiece W into the transport device.

[0126] In addition, in the X-ray inspection device according to this embodiment, when the first pattern or the second pattern occurs, or when the first pattern and the second pattern occur simultaneously, the multiple X-ray images captured during the tracking movement may be corrected by image processing so that the position of the workpiece image in each X-ray image coincides with the position of the workpiece image in the reference image, and each of the corrected X-ray images may be superimposed to generate a single X-ray image. Furthermore, when generating a single X-ray image as described above, it is possible not to superimpose X-ray images that are subject to a lot of degradation due to disturbances, for example.

[0127] Furthermore, in the X-ray inspection apparatus according to this embodiment, a light projector / receiver may be provided in front of the imaging start position P1 across the transport path 3. The light projector / receiver detects the workpiece W transported on the transport path 3 toward the imaging start position P1.

[0128] In this case, the presence or absence of the workpiece W can be monitored by the light emitter / receiver, and, for example, when the transport interval of the workpiece W becomes so large that it becomes difficult to synchronize the movement of the workpiece W with the movement of the imaging unit 30 by adjusting the moving speed of the imaging unit 30, it becomes possible to stop the operation of the imaging unit 30.

[0129] If the workpiece W is detected by the light projector / receiver after the imaging unit 30 is stopped, the operation of the imaging unit 30 can be resumed in response to the detection of the workpiece W by the light projector / receiver. In this case, the start timing of the tracking movement of the imaging unit 30 can be set based on the timing of the detection of the workpiece W by the light projector / receiver.

[0130] (X-ray inspection system) As shown in FIG. 10, the X-ray inspection apparatus 1 of the present embodiment may be used in an X-ray inspection system 100 in which an input device 4 and a transport device 5 are connected to each other via a network 6.

[0131] The input device 4 is a device that inputs the workpieces W into the transport device 5. As the input device 4, for example, a timing screw type input device can be used, which aligns a plurality of workpieces W that are transported from a conveyor in a previous process in an irregular or closely packed state at a predetermined interval with a timing screw and sends them out at a predetermined speed.

[0132] The transport device 5 has the above-mentioned conveyor 2, and is a device that transports the workpiece W input from the input device 4 to the X-ray inspection device 1.

[0133] In the X-ray inspection system 100 of this embodiment, when the judgment unit 27 of the X-ray inspection apparatus 1 determines that the second pattern is occurring, the control unit 25 of the X-ray inspection apparatus 1 outputs a signal to the input device 4 to adjust the timing of inputting the workpiece W into the conveying device 5.

[0134] In this case, the control unit 25 of the X-ray inspection apparatus 1 outputs the above-mentioned signal to the insertion device 4 to adjust the insertion timing of the workpiece W, instead of or in addition to adjusting the acceleration / deceleration of the imaging unit 30 during the return movement.

[0135] In this way, when the position of the workpiece image in the X-ray image obtained by imaging during tracking movement differs from the position of the workpiece image in the reference image, the X-ray inspection system 100 of this embodiment judges this to be a second pattern in which the image information of the X-ray image obtained by imaging does not match the reference image information, and in this case outputs a signal to the feeding device 4 to adjust the timing of feeding the workpiece W into the conveying device 5, so that the timing of feeding the workpiece W in the feeding device 4 can be adjusted.

[0136] This allows the timing when the workpiece W reaches the imaging start position P1 to coincide with the timing when the X-ray generator 10 and the X-ray detector 11 start imaging. As a result, the position of the workpiece image in the X-ray image obtained by imaging during the tracking movement can be matched with the position of the workpiece image in the reference image, improving the quality of the X-ray image.

[0137] (X-ray inspection equipment with different tracking methods) The X-ray inspection apparatus to which the present invention is applied may be an X-ray inspection apparatus 101 as shown in FIG. 11, which has a tracking system different from that of the X-ray inspection apparatus 1 of this embodiment.

[0138] 11, in the X-ray inspection apparatus 101, an X-ray generator 10 and an X-ray detector 11 are unitized by connecting them to each other via a connecting bracket 51. This allows the X-ray detector 11 to move back and forth in a direction parallel to the transport direction B of the object W to be inspected in conjunction with the rotation of the X-ray generator 10.

[0139] In the X-ray inspection apparatus 101 , the X-ray generator 10 , the X-ray detector 11 and the connecting bracket 51 constitute an imaging unit 50 .

[0140] The lower part of the connecting bracket 51 on the X-ray generator 10 side is connected to a rotating table 53. The rotating table 53 is rotatably supported by a rotation support part 52 incorporating a driving part 14, and is rotationally driven by the driving part 14. Therefore, the connecting bracket 51 is configured to be rotatable with the X-ray generator 10 side as a fulcrum.

[0141] A support base 54 is connected to an upper end of the connecting bracket 51 on the X-ray detector 11 side. The support base 54 supports the X-ray detector 11.

[0142] An arc-shaped long hole (not shown) is formed in the end of the connecting bracket 51 on the X-ray detector 11 side so as to penetrate the connecting bracket 51 in the vertical direction. The long hole is formed so as to be long in the short direction of the connecting bracket 51, i.e., in the horizontal direction perpendicular to the central axis A of the X-rays, and to bulge in an arch shape toward the X-ray generator 10 side.

[0143] A guide pin (not shown) is formed to protrude downward from the lower part of the support base 54. The guide pin passes through the long hole of the connecting bracket 51 described above and is configured to reciprocate on a linear slider 55 extending in a direction parallel to the transport direction B of the workpiece W.

[0144] As a result, even if the positional relationship between the end of the connecting bracket 51 on the X-ray detector 11 side and the linear slider 55 changes due to the rotation of the connecting bracket 51, the support base 54 can linearly move back and forth on the linear slider 55. Therefore, even if the connecting bracket 51 rotates, the X-ray detector 11 can move back and forth in a direction parallel to the transport direction while maintaining the distance from the transport path 3.

[0145] In the X-ray inspection apparatus 101, the X-ray generator 10 is configured to be rotatable within a predetermined angle range so that the X-ray irradiation range can move back and forth in a direction parallel to the conveying direction B when imaging the workpiece W.

[0146] Although an embodiment of the present invention has been disclosed, it will be apparent to one of ordinary skill in the art that modifications may be made thereto without departing from the scope of the present invention, and all such modifications and equivalents are intended to be encompassed by the following claims. [Explanation of symbols]

[0147] 1, 101 X-ray inspection equipment 2. Conveyor 3. Transport Path 4 Feeding device 5. Conveyor 6 Network 10 X-ray generator 11 X-ray detector 12 Display section 13 Setting operation section 14 Drive unit 20 Control circuit 21 X-ray image storage unit 22 Image processing section 23 Judgment section 25 Control Unit 26 Reference image information storage unit 27 Judgment Department 30, 50 Imaging unit 31 Moving bracket 32, 55 Linear slider 33, 34 Guide rail 51 Connecting bracket 52 Rotation support part 53 Rotating Table 54 Support stand 100 X-ray inspection system W, W1, W2 Work (inspection item) P1 Imaging start position P2 Imaging end position

Claims

1. an X-ray generator (10) for irradiating X-rays onto the objects (W) to be inspected which are conveyed sequentially; an X-ray detector (11) for detecting the X-rays transmitted through the object to be inspected; An X-ray inspection apparatus in which the X-ray generator and the X-ray detector are disposed so as to face each other across a transport path (3) through which the object to be inspected passes, the X-ray generator is configured to be able to move an irradiation range of the X-rays when imaging the object to be inspected; the X-ray detector is configured to be capable of reciprocating in a direction parallel to a transport direction of the object to be inspected in association with the movement of an irradiation range of the X-rays; the X-ray generator and the X-ray detector are configured to move in the transport direction while the object to be inspected moves from an imaging start position (P1) to an imaging end position (P2) so that the X-ray irradiation range of the X-ray generator moves to follow the object to be inspected, and the X-ray detector moves to the transport direction to image the object to be inspected, and after the previous object to be inspected has moved to the imaging end position, the X-ray generator and the X-ray detector perform a return movement to a position where the object to be inspected located at the imaging start position can be imaged before the next object to be inspected reaches the imaging start position, The X-ray inspection apparatus includes: a reference image information storage unit (26) in which reference image information, which is image information of a reference image obtained by previously capturing an image of the object to be inspected, is stored; a determination unit (27) for determining whether or not image information of the X-ray image obtained by the imaging coincides with the reference image information; and a control unit (25) that adjusts the X-ray irradiation range and the movement speed of the X-ray detector when the judgment unit judges that image information of the X-ray image obtained by the imaging does not match the reference image information.

2. the determination unit, when a contrast of the object to be inspected in the X-ray image obtained by the imaging is different from a contrast of the object to be inspected in the reference image, determines that the image information of the X-ray image obtained by the imaging is a first pattern in which the image information does not match the reference image information; The X-ray inspection apparatus according to claim 1 , wherein the control unit adjusts a moving speed of the following movement in the case of the first pattern.

3. the determination unit, when a position of the object to be inspected in the X-ray image obtained by the imaging is different from a position of the object to be inspected in the reference image, determines that a second pattern in which image information of the X-ray image obtained by the imaging does not match the reference image information; The X-ray inspection apparatus according to claim 1 , wherein the control unit adjusts a moving speed of the return movement in the case of the second pattern.

4. the determination unit, when a position of the object to be inspected in the X-ray image obtained by the imaging is different from a position of the object to be inspected in the reference image, determines that a second pattern in which image information of the X-ray image obtained by the imaging does not match the reference image information; 3. The X-ray inspection device according to claim 1, wherein, in the case of the second pattern, the control unit notifies an outside party that image information of the X-ray image obtained by the imaging does not match the reference image information.

5. the X-ray generator and the X-ray detector are configured to perform imaging during the return movement; The determination unit determines whether or not an object to be inspected is present in an X-ray image captured during the return movement, The X-ray inspection apparatus according to claim 1 , wherein the control unit notifies an outside party that there is an abnormality in the transportation of the object to be inspected when the judgment unit judges that an object to be inspected is present in the X-ray image captured during the return movement.

6. 6. The X-ray inspection apparatus according to claim 1, 2 or 5, wherein the X-ray generator and the X-ray detector are unitized so as to be capable of reciprocating integrally in a direction parallel to the conveying direction.

7. 4. The X-ray inspection apparatus according to claim 3, wherein the X-ray generator and the X-ray detector are unitized so as to be capable of reciprocating integrally in a direction parallel to the conveying direction.

8. 5. The X-ray inspection apparatus according to claim 4, wherein the X-ray generator and the X-ray detector are unitized so as to be capable of reciprocating integrally in a direction parallel to the conveying direction.

9. An X-ray inspection device (1) according to claim 1, A conveying device (5) for conveying an object to be inspected to the X-ray inspection device; an input device (4) that inputs the object to be inspected into the transport device, the determination unit, when a position of the object to be inspected in the X-ray image obtained by the imaging is different from a position of the object to be inspected in the reference image, determines that a second pattern in which image information of the X-ray image obtained by the imaging does not match the reference image information; The control unit outputs a signal to the insertion device to adjust the timing of inserting the object to the transport device in the case of the second pattern.

Images