Sensor holder

Abstract

To provide a sensor holder capable of easily attaching and detaching a sensor.SOLUTION: A sensor holder includes a base portion facing an installation surface, and a plurality of protrusions erected on the base portion at intervals to hold a sensor. An accommodation space in which the sensor is installed is formed between the plurality of protrusions. A restriction protrusion that restricts movement of the sensor in a direction away from the accommodation space is formed at the protrusion. At least one of the plurality of protrusions is a first protrusion that is elastically bendable and deformable in a direction away from the accommodation space. The bending rigidity of the first protrusion is lower than the bending rigidity of a second protrusion that is at least one of the protrusions other than the first protrusion.SELECTED DRAWING: Figure 8

Description

[Technical field]

[0001] The present invention relates to a sensor holder. [Background technology]

[0002] For example, in a substrate processing apparatus for performing various processes on a substrate such as a semiconductor wafer, a sensor is used for detecting the processing status, etc. An example of the sensor is a liquid leakage sensor that detects leakage of a liquid used in the processing.

[0003] A sensor holder can be used to install the sensor (see, for example, Patent Document 1). The sensor holder includes, for example, a frame body and a plurality of locking portions erected on the frame body. The sensor holder holds the sensor by the plurality of locking portions. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2004-294164 A Summary of the Invention [Problem to be solved by the invention]

[0005] A sensor may be removed from and reattached to a sensor holder for replacement, maintenance, confirmation testing, etc. Therefore, it is important that the sensor holder allows the sensor to be easily attached and detached. However, the above-mentioned sensor holder has room for improvement in terms of ease of attachment and detachment of the sensor.

[0006] An object of one aspect of the present invention is to provide a sensor holder that allows a sensor to be easily attached and detached. [Means for solving the problem]

[0007] A sensor holder according to aspect 1 of the present invention is a sensor holder for holding a sensor, comprising a base portion facing an installation surface, and a plurality of protrusions arranged at intervals on the base portion to hold the sensor, wherein a storage space in which the sensor is installed is formed between the plurality of protrusions, and a regulating protrusion is formed on the protrusion for regulating movement of the sensor in a direction away from the storage space, and at least one of the plurality of protrusions is a first protrusion that is elastically bendable and deformable in a direction away from the storage space, and the bending rigidity of the first protrusion is lower than the bending rigidity of a second protrusion which is at least one of the protrusions other than the first protrusion.

[0008] A sensor holder according to a second aspect of the present invention is the sensor holder according to the first aspect, wherein the plurality of protrusions are not formed at equal intervals.

[0009] A sensor holder according to aspect 3 of the present invention is a sensor holder according to aspect 1 or aspect 2, in which a fixing portion that is fixed to the installation surface is formed on the back side of the second protrusion, and the portion of the base portion on which the first protrusion is formed is away from the installation surface.

[0010] A sensor holder according to aspect 4 of the present invention is a sensor holder according to any one of aspects 1 to 3, in which the first protrusion is formed thinner than the second protrusion, thereby making the bending rigidity of the first protrusion lower than the bending rigidity of the second protrusion.

[0011] A sensor holder according to a fifth aspect of the present invention is the sensor holder according to any one of the first to fourth aspects, wherein the restricting protrusion has an opposing surface that faces an upper surface of the sensor.

[0012] A sensor holder according to a sixth aspect of the present invention is the sensor holder according to any one of the first to fifth aspects, wherein the protrusion is formed so as to secure a gap between the protrusion and a side surface of the sensor. Effect of the Invention

[0013] According to one aspect of the present invention, it is possible to provide a sensor holder that allows a sensor to be easily attached and detached. [Brief description of the drawings]

[0014] [Figure 1] FIG. 2 is a plan view of the sensor holder according to the embodiment. [Diagram 2] FIG. 2 is a side view of the sensor holder according to the embodiment. [Diagram 3] FIG. 2 is a perspective view of a sensor holder according to the embodiment. [Figure 4] FIG. 2 is a perspective view of a sensor holder according to the embodiment. [Diagram 5] FIG. 13 is a side view of a portion of the front protrusion of the sensor holder according to the embodiment. [Figure 6] 11 is a cross-sectional view of a portion of a first rear protrusion of the sensor holder of the embodiment. FIG. [Figure 7] 11 is a cross-sectional view of a portion of a second rear protrusion of the sensor holder of the embodiment. FIG. [Figure 8] FIG. 2 is a perspective view of a sensor holder and a sensor according to the embodiment. [Figure 9] FIG. 2 is a plan view of a sensor holder and a sensor according to the embodiment. [Figure 10] FIG. 2 is a cross-sectional view of a sensor holder and a sensor according to the embodiment. [Figure 11] FIG. 2 is a side view of a portion of a sensor holder and a sensor according to an embodiment. [Figure 12] FIG. 2 is a perspective view of a portion of the sensor holder according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a sensor holder according to the present invention will be described with reference to the drawings.

[0016] [Sensor holder] FIG. 1 is a plan view of the sensor holder 100. FIG. 2 is a side view of the sensor holder 100. FIG. 3 is a perspective view of the sensor holder 100. FIG. 4 is a perspective view of the sensor holder 100. FIG. 5 is a side view of a portion of the front projection 21. FIG. 6 is a cross-sectional view of a portion of the first rear projection 22. FIG. 6 shows a cross-section along the radial direction of the main portion 11. FIG. 7 is a cross-sectional view of a portion of the second rear projection 23. FIG. 7 shows a cross-section along the radial direction of the main portion 11.

[0017] In the following description, an XYZ Cartesian coordinate system may be used. The X direction is the longitudinal direction of the base portion 10 (left-right direction in FIG. 1). +X is one direction of the X direction (rightward in FIG. 1). -X is the opposite direction to +X. The Y direction is the lateral direction of the base portion 10 (up-down direction in FIG. 1). The Y direction is perpendicular to the X direction. +Y is one direction of the Y direction (upward in FIG. 1). -Y is the opposite direction to +Y. A plane along the X direction and the Y direction is called an "XY plane." A plane along the Y direction and the Z direction is called a "YZ plane." The Z direction is perpendicular to the X direction and the Y direction. A planar view is a view from the Z direction. +Z is one direction of the Z direction (upward in FIG. 2). -Z is the opposite direction to +Z.

[0018] The positional relationship of the sensor holder 100 is defined according to FIG. 2. The Z direction is the up-down direction. The upper side (+Z side) in FIG. 2 is defined as the top. The lower side (-Z side) in FIG. 2 is defined as the bottom. The left side (-X side) in FIG. 2 is defined as the front. The right side (+X side) in FIG. 2 is defined as the rear. Note that the positional relationship defined here does not limit the orientation of the sensor holder when in use.

[0019] As shown in FIGS. 1 to 4, the sensor holder 100 includes a base portion 10, a plurality of protrusions 20, and two fixing portions 30. The base portion 10 has a first protrusion 20 and a second protrusion 20a. The base portion 10 has a plate shape and includes a main portion 11 and an extension portion 12.

[0020] As shown in Fig. 1, the main portion 11 has a rectangular shape with a front (-X side) corner cut out. More specifically, the front edge of the main portion 11 has a shape having two inclined portions 11a and a tip edge 11b. The two inclined portions 11a are inclined in directions approaching each other toward the front (-X side). The tip edge 11b is formed along the Y direction from the front end of one inclined portion 11a to the front end of the other inclined portion 11a.

[0021] An opening 13 is formed in the center of the main portion 11. The opening 13 is formed in a portion including the center of the main portion 11. The opening 13 is, for example, circular. The center of the opening 13 coincides with the center C of the main portion 11. The opening 13 is formed by a hole penetrating the main portion 11 in the thickness direction. A shallow recess 11e is formed in the upper surface 11c (the surface on the +Z side) of the main portion 11. The recess 11e has a circular shape concentric with the opening 13, for example.

[0022] 2, a ground protrusion 14 is formed in the center of the lower surface 11d (the surface on the -Z side) of the main portion 11. The ground protrusion 14 protrudes downward (to the -Z side) from the lower surface 11d. The ground protrusion 14 is formed intermittently along the inner periphery of the opening 13, for example.

[0023] The sensor holder 100 is installed so that the base portion 10 faces the installation surface 120 (see FIG. 11). The ground protrusion 14 contacts the installation surface 120. The portion of the main portion 11 forward of the ground protrusion 14 is away from the installation surface 120. The portion of the main portion 11 forward of the ground protrusion 14 is the portion of the base portion 10 on the side where the front protrusion 21 is formed (the front portion). The front portion includes the frontmost part of the base portion 10. 1, the extension portion 12 extends to the +X side from the main portion 11. The extension portion 12 has a rectangular shape.

[0024] 2 to 4, the multiple protrusions 20 include a front protrusion 21, a first rear protrusion 22, and a second rear protrusion 23. The front protrusion 21 is an example of a "first protrusion." The first rear protrusion 22 and the second rear protrusion 23 are examples of a "second protrusion."

[0025] The front projection 21, the first rear projection 22, and the second rear projection 23 can be collectively referred to as "projections 21-23." The projections 21-23 are erected on the base portion 10 to hold a sensor. The projections 21-23 project upward (to the +Z side) from the upper surface 11c (the surface on the +Z side) of the base portion 10. The projections 21-23 may project in any direction as long as they intersect with the base portion 10. The first rear projection 22 and the second rear projection 23 can be collectively referred to as "rear projections 22, 23."

[0026] The front protrusion 21 protrudes upward (to the +Z side) from the tip edge 11b of the main portion 11. The front protrusion 21 is in the form of a rectangular plate along the YZ plane. The front protrusion 21 is in the form of a rectangular plate having a side edge 21a along the Z direction and an end edge 21b along the Y direction. The thickness direction of the front protrusion 21 is parallel to the X direction. The width (dimension in the Y direction) of the front protrusion 21 is approximately the same as the dimension in the Y direction of the tip edge 11b. The end face of the side edge 21a is an inclined surface that follows the inclined portion 11a.

[0027] A restricting protrusion 24 is formed on the inner surface (+X side surface) of a portion including the upper edge (edge ​​21b) of the front protrusion 21. The restricting protrusion 24 protrudes to the +X side from the inner surface (+X side surface) of the front protrusion 21. The restricting protrusion 24 extends along the width direction (Y direction) of the front protrusion 21.

[0028] As shown in FIG. 5, the restricting protrusion 24 has an upper surface 24a, a lower surface 24b, an upper inclined surface 24c, a lower inclined surface 24d, and a tip surface 24e. The upper surface 24a and the lower surface 24b are parallel to the XY plane. The lower surface 24b is a surface facing the upper surface 111a of the sensor main body 111 (see FIG. 11). At least a part of the lower surface 24b can face the upper surface 111a. The upper inclined surface 24c is an inclined surface that descends from the tip of the upper surface 24a toward the +X side. The lower inclined surface 24d is an inclined surface that ascends from the tip of the lower surface 24b toward the +X side. The tip surface 24e is formed from the tip of the upper inclined surface 24c to the tip of the lower inclined surface 24d. The tip surface 24e is parallel to the YZ plane. The shape of the restricting protrusion 24 is not limited to the shape shown in Fig. 5. The cross section of the restricting protrusion (cross section perpendicular to the length direction) may be, for example, rectangular, semicircular, trapezoidal, triangular, or the like.

[0029] As shown in FIGS. 2 to 4 and 11, the front projection 21 can be elastically bent and deformed outward (in the direction away from the accommodation space 40, ie, toward the -X side).

[0030] The outward (-X side) bending rigidity of the front projection 21 is lower than the outward (+X side) bending rigidity of the rear projections 22, 23 (e.g., the lowest bending rigidity among the rear projections 22, 23). The front projection 21 is formed thinner than the rear projections 22, 23, for example, to reduce its bending rigidity.

[0031] The bending rigidity of the front projection 21 may be, for example, 90% or less of the bending rigidity of the rear projections 22, 23 (for example, the lower bending rigidity of the rear projections 22, 23). This allows the sensor 110 to be easily attached to and detached from the sensor holder 100. The bending rigidity of the front projection 21 may be, for example, 10% or more (for example, 20% or more) of the bending rigidity of the rear projections 22, 23 (for example, the lower bending rigidity of the rear projections 22, 23). This allows the sensor 110 to be securely held.

[0032] Bending rigidity can be expressed as the product of Young's modulus and the second moment of area. In other words, if Young's modulus is E and the second moment of area is I, bending rigidity is EI [N m 2 The bending stiffness is measured in accordance with, for example, JIS K-7161 (2014) and JIS K-7127 (1999).

[0033] The thickness T1 of the front projection 21 (see FIG. 2) may be, for example, 90% or less of the thickness T2 (see FIG. 2) of the rear projections 22, 23 (for example, the thinner of the rear projections 22, 23). This reduces the bending rigidity of the front projection 21, making it possible to easily attach and detach the sensor 110 to and from the sensor holder 100. The thickness T1 of the front projection 21 may be, for example, 10% or more (for example, 20% or more) of the thickness T2 of the rear projections 22, 23 (for example, the thinner of the rear projections 22, 23). This allows the sensor 110 to be securely held.

[0034] The rear projections 22, 23 project from the rear end edge (the end edge on the +X side) of the main portion 11 toward the +Z side. The rear projections 22, 23 are located away from the front projection 21 on the +X side. The space defined by the rear projections 22, 23 and the front projection 21 is the accommodation space 40 in which the sensor 110 is installed. The rear projections 22, 23 are located opposite the front projection 21 with the accommodation space 40 interposed therebetween.

[0035] The rear protrusions 22, 23 are rectangular plate-shaped along the YZ plane. The thickness direction of the rear protrusions 22, 23 is parallel to the X direction. The first rear protrusion 22 and the second rear protrusion 23 are arranged in the Y direction at an interval. The protrusion height of the rear protrusions 22, 23 may be the same as the protrusion height of the front protrusion 21.

[0036] The first rear projection 22 has a rectangular shape having a side edge 22a along the Z direction and an upper edge (edge ​​22b) along the Y direction. In a plan view, the outer edge (side edge 22a on the +Y side) of the first rear projection 22 reaches the side edge on the +Y side of the main portion 11 (see FIG. 1).

[0037] As shown in Fig. 3, an inclined surface 22d is formed on a portion of the front surface 22c (-X side surface) of the first rear projection 22 including the inner edge (-Y side edge 22a). The inclined surface 22d is inclined so as to retreat toward the +X side as it approaches the -Y side. The first rear projection 22 in the portion where the inclined surface 22d is formed is gradually thinned toward the inner edge. The inclined surface 22d may be, for example, a curved concave surface (cylindrical surface) that follows the outer circumferential edge of the recess 11e of the main portion 11.

[0038] A restricting protrusion 25 is formed on the inclined surface 22d of a portion including the upper edge (edge ​​22b) of the first rear projection 22. The restricting protrusion 25 protrudes in a direction perpendicular to the inclined surface 22d. The restricting protrusion 25 protrudes, for example, in a direction approaching the central axis C1 passing through the center C of the main portion 11. The restricting protrusion 25 extends in the width direction of the inclined surface 22d (for example, in a direction along the outer circumferential edge of the recess 11e).

[0039] The second rear projection 23 is in the shape of a rectangular plate having a side edge 23a along the Z direction and an upper edge (edge ​​23b) along the Y direction. In a plan view, the outer edge (side edge 23a on the -Y side) of the second rear projection 23 reaches the side edge on the -Y side of the main portion 11 (see FIG. 1).

[0040] An inclined surface 23d is formed on a portion of the front surface 23c (-X side surface) of the second rear projection 23 including the inner edge (side edge 23a on the +Y side). The inclined surface 23d is inclined so as to retreat toward the +X side as it approaches the +Y side. The second rear projection 23 in the portion where the inclined surface 23d is formed is gradually thinned toward the inner edge. The inclined surface 23d may be, for example, a curved concave surface (cylindrical surface) that follows the outer circumferential edge of the recess 11e of the main portion 11.

[0041] A restricting protrusion 26 is formed on the inclined surface 23d of a portion including the upper edge (edge ​​23b) of the second rear projection 23. The restricting protrusion 26 protrudes in a direction perpendicular to the inclined surface 23d. The restricting protrusion 26 protrudes, for example, in a direction approaching the central axis C1. The restricting protrusion 26 extends in the width direction of the inclined surface 23d (for example, in a direction along the outer circumferential edge of the recess 11e).

[0042] As shown in FIG. 6, the restricting protrusion 25 has an upper surface 25a, a lower surface 25b, an upper inclined surface 25c, a lower inclined surface 25d, and a tip surface 25e. The upper surface 25a and the lower surface 25b are parallel to the XY plane. The lower surface 25b is an opposing surface that faces the upper surface 111a (see FIG. 8) of the sensor main body 111. At least a part of the lower surface 25b can face the upper surface 111a. The upper inclined surface 25c is an inclined surface that descends from the tip of the upper surface 25a toward the tip surface 25e. The lower inclined surface 25d is an inclined surface that ascends from the tip of the lower surface 25b toward the tip surface 25e. The tip surface 25e is formed from the tip of the upper inclined surface 25c to the tip of the lower inclined surface 25d.

[0043] As shown in FIG. 7, the restricting protrusion 26 has an upper surface 26a, a lower surface 26b, an upper inclined surface 26c, a lower inclined surface 26d, and a tip surface 26e. The upper surface 26a and the lower surface 26b are parallel to the XY plane. The lower surface 26b is an opposing surface that faces the upper surface 111a (see FIG. 8) of the sensor main body 111. At least a part of the lower surface 26b can face the upper surface 111a. The upper inclined surface 26c is an inclined surface that descends from the tip of the upper surface 26a toward the tip surface 26e. The lower inclined surface 26d is an inclined surface that ascends from the tip of the lower surface 26b toward the tip surface 26e. The tip surface 26e is formed from the tip of the upper inclined surface 26c to the tip of the lower inclined surface 26d.

[0044] The shape of the restricting protrusions 25 and 26 may be the same as the shape of the restricting protrusion 24 (see FIG. 5). The shape of the cross section (cross section perpendicular to the length direction) of the restricting protrusions 25 and 26 may be, for example, rectangular, semicircular, trapezoidal, triangular, or the like.

[0045] The restricting protrusions 25, 26 are preferably at the same height as the restricting protrusion 24 of the front projection 21. The lower surfaces 24b to 26b of the restricting protrusions 24 to 26 are preferably at the same height as each other. The rear projections 22, 23 may be elastically bendable and deformable outward (in the direction away from the accommodation space 40, ie, toward the +X side).

[0046] The thickness of the rear protrusions 22 and 23 (the thickness of the portion excluding the inclined surfaces 22d and 23d) is formed, for example, thicker than that of the front protrusion 21. Thereby, the bending rigidity of the rear protrusions 22 and 23 outward (+X side) is higher than the bending rigidity of the front protrusion 21 outward (-X side). The bending rigidities of the first rear protrusion 22 and the second rear protrusion 23 outward (+X side) may be equal to each other.

[0047] The distance between the front protrusion 21 and the first rear protrusion 22 is larger than the distance between the first rear protrusion 22 and the second rear protrusion 23. The distance between the front protrusion 21 and the second rear protrusion 23 is larger than the distance between the first rear protrusion 22 and the second rear protrusion 23. Thus, the protrusions 21 to 23 are formed so as not to be equally spaced. That is, the protrusions 21 to 23 are formed at unequal intervals.

[0048] As shown in FIG. 1, the relative positions of the protrusions 21 to 23 in a plan view can be represented by the angles at the center C of the main portion 11. Let the angle between the center of the front protrusion 21 and the inner edge (-Y side edge 22a) of the first rear protrusion 22 be θ1. Let the angle between the center of the front protrusion 21 and the inner edge (+Y side edge 23a) of the second rear protrusion 23 be θ2. The angles θ1 and θ2 can be 100° or more and less than 180°. When the angles θ1 and θ2 are within this range, when the sensor is moved forward (-X side), the movement restriction by the regulating convex portions 25 and 26 is easily released. Therefore, the operation of attaching and detaching the sensor to and from the sensor holder 100 becomes easy.

[0049] As shown in FIGS. 2 to 4, the fixing portion 30 is formed to protrude upward (+Z side) from the upper surface (+Z side surface) of the extending portion 12. The fixing portion 30 is in a block shape. The two fixing portions 30 are arranged in the Y direction with a space therebetween. The two fixing portions 30 are respectively formed on the back side (opposite side to the accommodation space 40, that is, +X side) of the rear protrusions 22 and 23. The two fixing portions 30 are respectively formed continuously with the rear surfaces (+X side surfaces) of the rear protrusions 22 and 23. The height of the fixing portion 30 is lower than that of the rear protrusions 22 and 23.

[0050] The fixing portion 30 has an insertion hole 30a through which a fixing device 31 (see FIG. 8) is inserted. The insertion hole 30a penetrates the fixing portion 30 in the thickness direction (Z direction). The fixing portion 30 is fixed to the installation surface 120 (see FIG. 11) by the fixing device 31. The fixing device 31 has, for example, a head and a screw shaft extending from the head. The screw shaft is inserted through the insertion hole 30a. A portion of the screw shaft including the tip end is fixed to the installation surface 120 (see FIG. 11). The sensor holder 100 may be fixed by the fixing device 31 at only one of the two fixing portions 30.

[0051] The sensor holder 100 is formed of, for example, resin, metal, etc. As the resin, general-purpose plastic, engineering plastic, etc. can be used. As the general-purpose plastic, polyolefin-based (polyethylene (PE), polypropylene (PP) etc.), polyester-based (polyethylene terephthalate (PET) etc.), halogenated polyolefin-based (polyvinyl chloride (PVC) etc.) can be used. As the engineering plastic, polycarbonate (PC), polyamide (PA), polyether ether ketone (PEEK) etc. can be used. As the metal, stainless steel (SUS304 etc.), aluminum alloy (A5000 series, A6000 series etc.), etc. can be used. When a metal is used as a constituent material of the sensor holder 100, the sensor holder 100 may be subjected to a surface treatment (coating etc.) to enhance chemical resistance.

[0052] The sensor holder 100 may be produced by, for example, cutting. When a hardening resin (such as a thermoplastic resin) or a casting material is used as a constituent material, the sensor holder 100 may be produced by molding.

[0053] [How to use the sensor holder] An example of how to use the sensor holder 100 will now be described. Fig. 8 is a perspective view of the sensor holder 100 and the sensor 110. Fig. 9 is a plan view of the sensor holder 100 and the sensor 110. Fig. 10 is a cross-sectional view of the sensor holder 100 and the sensor 110. Fig. 11 is a side view of a portion of the sensor holder 100 and the sensor 110. Fig. 12 is a perspective view of a portion of the sensor holder 100.

[0054] 8 to 10, the sensor holder 100 holds a sensor 110. An example of the sensor 110 is a sensor used in a substrate processing apparatus that performs various processes on substrates such as semiconductor wafers.

[0055] The sensor 110 may be, for example, a liquid leakage sensor that detects leakage of a liquid used in processing a substrate. The liquid leakage sensor detects leakage of a liquid (pure water, rinse liquid, etc.) used in cleaning a substrate. In addition to the liquid leakage sensor, the sensor 110 may be, for example, an optical sensor (photointerrupter, etc.), a float sensor, a pressure gauge, a flow meter, a concentration meter, a rotation sensor, a position sensor, etc.

[0056] In this embodiment, the sensor 110 is a liquid leakage sensor. The sensor 110 includes a cylindrical sensor body 111 and a protrusion 112. As shown in Fig. 10, a detection unit 114 is formed in the center of the lower surface 111b of the sensor main body 111. The detection unit 114 faces the installation surface 120 (see Fig. 11) through the opening 13 of the main part 11. The detection unit 114 detects liquid on the installation surface 120. The detection unit 114 protrudes downward from the lower surface 111b. It is desirable for the detection unit 114 to abut or be close to the installation surface 120.

[0057] As shown in FIGS. 8 to 10, the protrusion 112 is in the form of a block that protrudes from the side surface of the sensor body 111 towards the +X side. A cable 113 is connected to the sensor main body 111. The cable 113 extends from a side surface of the sensor main body 111 to the +Y side.

[0058] The sensor main body 111 is placed in the accommodation space 40 of the sensor holder 100. The lower part of the sensor main body 111 is engageable with the recess 11e (see FIGS. 3 and 4). 8, the sensor 110 is held by the main portion 11 and the protrusions 21 to 23. The movement of the sensor 110 to the -X side is restricted by the front protrusion 21. The movement of the sensor 110 to the +X side is restricted by the rear protrusions 22, 23.

[0059] The protrusion 112 protrudes to the +X side between the first rear protrusion 22 and the second rear protrusion 23. Since a part of the protrusion 112 is between the first rear protrusion 22 and the second rear protrusion 23, the movement of the sensor 110 in the Y direction is restricted by the rear protrusions 22, 23.

[0060] The projections 21 to 23 are formed to be the same height as the sensor body 111 or higher than the sensor body 111 . The restricting protrusions 24-26 may be located slightly higher than the sensor main body 111. A part of the restricting protrusions 24-26 may be at the same height as the upper surface 111a of the sensor main body 111. More specifically, a gap may be present between the lower surfaces 24b-26b of the restricting protrusions 24-26 and the upper surface 111a. The lower surfaces 24b-26b or the downward inclined surfaces 24d-26d of the restricting protrusions 24-26 may be in contact with the upper surface 111a.

[0061] It is desirable that at least a part of the restricting protrusions 24 to 26 overlaps with the sensor main body 111 in a plan view. For example, as shown in FIG. 11, it is desirable that at least a part of the restricting protrusion 24 including the tip (tip surface 24e) overlaps with the sensor main body 111 in a plan view. As shown in FIG. 12, it is desirable that at least a part of the restricting protrusion 25 including the tip overlaps with the sensor main body 111 in a plan view. It is also desirable that at least a part of the restricting protrusion 26 (see FIG. 8) including the tip overlaps with the sensor main body 111 in a plan view. By at least a part of the restricting protrusions 24 to 26 overlapping with the sensor main body 111, the restricting protrusions 24 to 26 can restrict the upward movement of the sensor main body 111 (movement in a direction away from the accommodation space 40).

[0062] 11, when the sensor holder 100 is placed on the installation surface 120, the ground protrusion 14 comes into contact with the installation surface 120. In a side view, the portion of the main portion 11 forward of the ground protrusion 14 (the portion of the base portion 10 on the side where the forward protrusion 21 is formed) is separated from the installation surface 120.

[0063] It is desirable that the protrusions 21-23 are formed so as to secure a gap between them and the side surface 111c of the sensor main body 111. For example, if the diameter of an inscribed circle that is in contact with the inner circumferential surface of the protrusions 21-23 in a plan view is made larger than the outer diameter of the sensor main body 111, it becomes easier to secure a gap between the protrusions 21-23 and the side surface 111c. This gap makes it easy to operate the sensor 110 to climb over the restricting protrusions 24-26 while appropriately changing the attitude of the sensor main body 111 (for example, the degree of inclination with respect to the horizontal plane) when attaching or detaching the sensor 110 to the sensor holder 100.

[0064] To remove the sensor 110 from the sensor holder 100, for example, a force is applied outward (to the -X side) to the front protrusion 21 with a finger. The outward force may be applied to the front protrusion 21 by the sensor main body 111 held with a finger. The front protrusion 21 is bent outward and the restricting protrusion 24 moves outward. This releases the restriction on the movement of the sensor 110 (restriction on movement upward (to the +Z side)). This allows the sensor 110 to be easily removed from the sensor holder 100.

[0065] Specifically, the following operation can be given as an example. The sensor body 111 is gripped by pressing the side surface 111c with two or three fingers. The sensor body 111 is moved to the -X side to bend and deform the front protrusion 21 outward (to the -X side). The sensor body 111 is moved upward (to the +Z side) so as to overcome the restricting protrusions 24 to 26 while appropriately changing the attitude of the sensor body 111 (for example, the degree of inclination with respect to the horizontal plane). When the sensor body 111 is moved upward in a state where it is in contact with the lower inclined surfaces 24d to 26d (see Figs. 5 to 7), an outward force is applied to the front protrusion 21 by the sensor body 111 abutting the lower inclined surface 24d, and the front protrusion 21 is bent and deformed outward. This allows the sensor 110 to be removed from the sensor holder 100.

[0066] When the sensor 110 is to be held in the sensor holder 100, the operation of holding the sensor 110 in the sensor holder 100 can be easily performed by applying an outward (-X side) force to the front protrusion 21, thereby bending and deforming the front protrusion 21 outward.

[0067] Specifically, the following operation can be given as an example. The sensor main body 111 is gripped by pressing the side surface 111c with two or three fingers. The sensor main body 111 is lowered toward the accommodation space 40. The sensor main body 111 abuts against the upper inclined surfaces 24c to 26c (see Figs. 5 to 7) of the restricting protrusions 24 to 26. When the sensor main body 111 is further lowered, an outward force is applied to the front protrusion 21 by the sensor main body 111 abutting against the upper inclined surface 24c, and the front protrusion 21 is bent outward. The sensor main body 111 climbs over the restricting protrusions 24 to 26 and is accommodated in the accommodation space 40. In this manner, the sensor 110 can be held in the sensor holder 100.

[0068] [Effects of the sensor holder according to the embodiment] In the sensor holder 100 of this embodiment, the bending rigidity of the front projection 21 is lower than the bending rigidity of the rear projections 22, 23, so that the restriction on the movement of the sensor 110 can be released by bending and deforming the front projection 21 outward. This facilitates the operation of removing the sensor 110 from the sensor holder 100 and the operation of holding the sensor 110 in the sensor holder 100. Thus, the sensor 110 can be easily attached to and detached from the sensor holder 100.

[0069] Depending on the components of the device in which the sensor 110 is to be installed, the installation location may be narrow. It may also be difficult to ensure visibility at the installation location. The sensor holder 100 allows the sensor 110 to be easily attached and detached with one hand, even if the installation location is difficult to work with.

[0070] When workability at the installation location is poor, the sensor holder is required to not only be easy to attach and detach, but also to be able to securely hold the sensor. Since sensor holder 100 can securely hold sensor 110 by means of multiple protrusions 21-23, it is possible to achieve both ease of attachment and detachment of sensor 110 and secure retention of sensor 110.

[0071] Since the protrusions 21 to 23 of the sensor holder 100 are arranged at intervals, the sensor 110 (sensor main body 111) can be pinched and grasped with fingers from both sides between the front protrusion 21 and the rear protrusions 22, 23. Therefore, the sensor 110 can be attached and detached without applying a load to the cable 113, the connector portion, etc.

[0072] The projections 20 are formed so as not to be equally spaced. The distance between the front projection 21 and the rear projections 22, 23 is greater than the distance between the first rear projection 22 and the second rear projection 23, so that the sensor main body 111 can be grasped by inserting a finger between the front projection 21 and the rear projections 22, 23. This makes it possible to easily grasp the sensor 110 (more specifically, the sensor main body 111).

[0073] In the sensor holder 100, the fixing portion 30 is formed on the rear side of the rear projections 22, 23. The portion of the main portion 11 on the side where the front projection 21 is formed (the front portion) is away from the installation surface 120. Therefore, when the front projection 21 is bent outward, the front portion of the main portion 11 can be displaced downward. This makes it easier for the front projection 21 to bend outward. This makes it easier to remove the sensor 110 from the sensor holder 100 and to hold the sensor 110 in the sensor holder 100.

[0074] The front projection 21 is formed to be thinner than the rear projections 22 and 23. Therefore, the bending rigidity of the front projection 21 can be set low with a simple structure.

[0075] The restricting protrusions 24 to 26 have opposing surfaces (for example, lower surfaces 24b to 26b shown in FIGS. 5 to 7) that face the upper surface 111a of the sensor 110. Therefore, the restricting protrusions 24 to 26 can improve the function of restricting the upward movement of the sensor 110.

[0076] If the projections 21 to 23 are formed so as to ensure a gap between them and the side surface 111c of the sensor main body 111 of the sensor 110 (see FIG. 11), the sensor 110 can be easily removed.

[0077] The rear projections 22, 23 are plate-shaped along the YZ plane, similar to the front projection 21. Therefore, compared to a case in which the rear projections 22, 23 are inclined with respect to the YZ plane, a larger gap can be secured between the front projection 21 and the rear projections 22, 23. This makes it easier to hold the sensor 110 (sensor main body 111) by pinching it from both sides with fingers.

[0078] The technical scope of the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention. The sensor holder 100 of this embodiment has three protrusions 21 to 23. The number of protrusions may be more than one (any number equal to or greater than two), but is preferably three or more. The bending rigidity of the front protrusion 21 is desirably lower than the bending rigidity of both the rear protrusions 22, 23, but the bending rigidity of the front protrusion 21 may be lower than the bending rigidity of either one of the rear protrusions 22, 23. The bending rigidity of the front protrusion 21 (first protrusion) only needs to be lower than the bending rigidity of the rear protrusion (second protrusion), which is at least one of the protrusions 20 other than the front protrusion 21.

[0079] The number of first protrusions (front protrusions 21 in this embodiment) having low bending elasticity is preferably one, but the number is not particularly limited. The number of first protrusions may be one or more. The first protrusion needs to be at least one of the multiple protrusions. The number of second protrusions (rear protrusions 22, 23 in this embodiment) having high bending elasticity is not particularly limited. The number of second protrusions may be one or more. The second protrusion needs to be at least one of the protrusions other than the first protrusions.

[0080] In addition, within the scope of the spirit of the present invention, it is possible to replace the components in the above-described embodiments with well-known components as appropriate, and the above-described embodiments and variations may be combined as appropriate. [Explanation of symbols]

[0081] 10...base portion, 20, 21-23...projections, 21...front projection (first projection), 22...first rear projection (second projection), 23...second rear projection (second projection), 24-26...regulating protrusion, 24b...lower surface (opposing surface), 30...fixing portion, 40...accommodating space, 100...sensor holder, 110...sensor, 111c...side surface, 120...installation surface

Claims

1. A sensor holder for holding a sensor, A base portion facing an installation surface; a plurality of projections provided at intervals on the base portion to hold the sensor; A storage space in which the sensor is installed is formed between the plurality of protrusions, A restricting protrusion is formed on the protrusion to restrict the sensor from moving in a direction away from the accommodation space, At least one of the plurality of protrusions is a first protrusion that is elastically bendable and deformable in a direction away from the accommodation space, The bending rigidity of the first protrusion is lower than the bending rigidity of a second protrusion which is at least one of the protrusions other than the first protrusion. Sensor holder.

2. The plurality of protrusions are formed so as not to be equally spaced apart. The sensor holder according to claim 1.

3. A fixing portion to be fixed to the installation surface is formed on a rear side of the second protrusion, A portion of the base portion on which the first protrusion is formed is spaced from the installation surface. The sensor holder according to claim 1.

4. The first protrusion is formed thinner than the second protrusion, so that the first protrusion has a lower bending rigidity than the second protrusion. The sensor holder according to claim 1.

5. The restricting protrusion has an opposing surface that faces an upper surface of the sensor. The sensor holder according to claim 1.

6. The protrusion is formed so as to ensure a gap between the protrusion and a side surface of the sensor. The sensor holder according to claim 1.

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