Vibration type actuator, optical instrument, and electronic apparatus

Abstract

To provide a vibration type actuator of which the occurrence of unnecessary vibration is reduced, and the variation of damping performance for every lot is reduced.SOLUTION: A vibration type actuator comprises: a vibrator having an electric-mechanical energy conversion element and an elastic body; and a contact body contacting the elastic body and extending in a first direction, relatively moves the vibrator and the contact body in the first direction by vibrating the vibrator, and comprises: a vibration attenuation member extending in the first direction and contacting the contact body on a surface on the opposite side of a surface contacting the vibrator of the contact body; and a support member extending in the first direction to support the contact body via the vibration attenuation member, wherein the support member has a projection extending in the first direction and contacting the vibration attenuation member on a surface on the side contacting the vibration attenuation member of the support member, and width of the projection in a direction orthogonal to the first direction is smaller than width of the contact body and is smaller than width of the vibration attenuation member.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a vibration actuator, an optical device, and an electronic device.

Background Art

[0002] There is known a vibration actuator that relatively moves a vibrating body and a contacting body by bringing a vibrating body using an electro-mechanical energy conversion element into pressure contact with the contacting body, exciting a predetermined vibration in the vibrating body, and applying a frictional driving force from the vibrating body to the contacting body.

[0003] In Patent Document 1, a vibration actuator having a vibration damping member sandwiched between a contact portion and a guide member has been proposed for the purpose of reducing unnecessary vibration that is vibration in the audible range and causes abnormal noise.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the configuration described in Patent Document 1, positional deviation of the vibration damping member occurs due to assembly variations, and the region where the vibration damping member contacts the contacting body may become asymmetric. Further, when using butyl rubber or the like as the vibration damping member, dimensional variations become large when manufacturing the vibration damping member by cutting it out from a rubber sheet into a desired shape. As a result, the contact area of the vibration damping member that contacts the contacting body varies depending on the lot, and performance variations are likely to occur.

[0006] Therefore, an object of the present invention is to provide a vibration type actuator in which the generation of unnecessary vibration is reduced and the variation in vibration damping performance for each lot is reduced. Another object of the present invention is to provide an optical device or an electronic device including a vibration type actuator in which the generation of unnecessary vibration is reduced and the variation in vibration damping performance for each lot is reduced.

Means for Solving the Problems

[0007] The above object is achieved by the following present invention. That is, according to the present invention, there is provided a vibration type actuator having a vibrator having an electro-mechanical energy conversion element and an elastic body, and a contact body extending in a first direction in contact with the elastic body, and relatively moving the vibrator and the contact body in the first direction by vibrating the vibrator. The vibration type actuator according to the present invention has the following features. The vibration type actuator includes a vibration damping member that contacts the contact body and a support member that extends in the first direction and supports the contact body via the vibration damping member, on a surface opposite to the surface of the contact body that contacts the vibrator. The support member has a convex portion that extends in the first direction and contacts the vibration damping member, on a surface of the support member that contacts the vibration damping member. The width of the convex portion in a direction orthogonal to the first direction is smaller than the width of the contact body and smaller than the width of the vibration damping member.

[0008] Further, according to the present invention, there are provided an optical device and an electronic device including a vibrating body having an electro-mechanical energy conversion element and an elastic body, and a contact body that is in contact with the elastic body and extends in a first direction, and a vibration type actuator that relatively moves the vibrating body and the contact body in the first direction by vibrating the vibrating body. The vibration type actuator included in the optical device and the electronic device according to the present invention has the following characteristics. The vibration type actuator includes a vibration damping member that is in contact with the contact body and is on a surface opposite to the surface of the contact body that is in contact with the vibrating body, and a support member that extends in the first direction and supports the contact body via the vibration damping member. The support member has a convex portion that extends in the first direction and is in contact with the vibration damping member on a surface of the support member that is in contact with the vibration damping member. The width of the convex portion in a direction orthogonal to the first direction is smaller than the width of the contact body and smaller than the width of the vibration damping member.

Effects of the Invention

[0009] According to the present invention, it is possible to provide a vibration type actuator in which the generation of unnecessary vibration is reduced and the variation in vibration damping performance for each lot is reduced. Further, according to the present invention, it is possible to provide an optical device or an electronic device including a vibration type actuator in which the generation of unnecessary vibration is reduced and the variation in vibration damping performance for each lot is reduced.

Brief Description of the Drawings

[0010]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Embodiments for Carrying Out the Invention

[0011] In order to reduce the generation of abnormal noise (sound in the audible range) during the driving of a vibration type actuator, the present inventors studied a configuration for reducing the generation of unnecessary vibration (vibration not necessary for driving) of the vibration type actuator. As a result, it was found that abnormal noise is likely to occur when the area of the vibration damping member sandwiched between the contact body and the support member decreases due to assembly variations.

[0012] Therefore, the present inventors found that by providing convex portions on the surface of the support member on the side in contact with the vibration damping member, the vibration damping member can be brought into contact with the contact body in a region of a certain width regardless of assembly variations. Further, the present inventors found that even if no convex portion is provided on the support member, by providing a groove portion or a through portion in the vibration transmission member, the vibration damping member can be brought into contact with the contact body in a region of substantially constant width regardless of assembly variations. By bringing the vibration damping member into contact with the contact body in a region of substantially constant width, the generation of abnormal noise during the driving of the vibration type actuator can be reduced.

[0013] Further, as a result of further study, the present inventors found that when using butyl rubber or the like, which is particularly excellent in vibration damping properties, as the vibration damping member, in a state where the vibration damping member is crushed, since the elastic reaction force applied to the contact body is large, the deflection of the contact body may become large. When the deflection of the contact body becomes large, the hook interval of the tension spring that generates the pressing force for bringing the vibrating body into contact with the contact body becomes long. Therefore, the pressing force increases, and the power consumption required for driving may increase. Even in such a case, it was found that the deflection of the contact body can be reduced by a configuration in which convex portions are provided on the surface of the support member on the side in contact with the vibration damping member or a configuration in which groove portions or through portions are provided in the vibration transmission member.

[0014] [First Embodiment] Hereinafter, the first embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a schematic diagram showing the configuration of a vibration type actuator according to the first embodiment. Here, the direction of relative movement between the vibrating body 104 and the contact body 101 is defined as the X direction (first direction), the pressing direction is defined as the Z direction, and the direction perpendicular to the X direction and the Z direction is defined as the Y direction. The pressing direction is the direction in which the vibrating body 104 is pressed against the contact body 101.

[0015] FIG. 1(a) shows a view of the vibration type actuator as seen from the Z-axis direction. FIG. 1(b) shows a cross-sectional view of the vibration type actuator taken along the B-B section shown in FIG. 1(a). FIG. 1(c) shows an enlarged view of the non-driven unit portion of FIG. 1(b).

[0016] As shown in FIG. 1(b), the vibration type actuator has a vibrating body 104 and a contact body 101 that contacts the vibrating body 104. The vibrating body 104 has a rectangular shape. The vibrating body 104 includes a flat plate-shaped elastic body 102, a piezoelectric element 103 which is an electro-mechanical energy conversion element adhered to one surface of the elastic body 102, and two protrusions provided on the other surface of the elastic body 102.

[0017] FIG. 2(a) is a diagram for explaining the first vibration mode (hereinafter referred to as "A mode") among the two bending vibration modes excited in the vibrating body 104. A common electrode (entire surface electrode) (not shown) is formed on the surface of the piezoelectric element 103 on the side of the elastic body 102, and drive electrodes (not shown) bisected in the length direction are formed on the surface opposite to the surface on the side of the elastic body 102.

[0018] The A mode is a secondary bending vibration in the longitudinal direction (X direction) of the vibrating body 104 and has three nodal lines substantially parallel to the short side direction (Y direction (width direction)) of the vibrating body 104. By applying an alternating voltage with a phase shift of 180° at a predetermined frequency to the drive electrodes of the piezoelectric element 103, the vibration of the A mode can be excited in the vibrating body 104. The protrusion 5 is arranged in the vicinity of the position that becomes a node in the vibration of the A mode, and reciprocates in the X direction when the vibration of the A mode is excited in the vibrating body 104.

[0019] Figure 2(b) is a diagram for explaining the second vibration mode (hereinafter referred to as the "B mode") among the two bending vibration modes excited in the vibrating body 104. The B mode is the primary bending vibration in the short side direction (Y direction) of the vibrating body 104 and has two nodal lines substantially parallel to the long side direction (X direction). By applying an alternating voltage of the same phase at a predetermined frequency to the drive electrodes of the piezoelectric element 103, the B mode vibration can be excited in the vibrating body 104. The protrusion 5 is arranged near the position that becomes the antinode in the vibration of the B mode, and when the B mode vibration is excited in the vibrating body 104, the protrusion 5 performs a reciprocating motion in the axial direction (Z direction).

[0020] The vibrating body 104 is configured such that the nodal line in the A mode and the nodal line in the B mode are substantially orthogonal in the XY plane. Also, a flexible substrate (not shown) is adhered to the piezoelectric element 103, and by supplying an alternating current to the piezoelectric element 103 through the flexible substrate, the A mode and B mode vibrations can be excited in the vibrating body 104 simultaneously. Therefore, by exciting the A mode and B mode vibrations with a predetermined phase difference, an elliptical motion can be generated at the tip of the protrusion 5 in the ZX plane.

[0021] In the vibration type actuator, the vibrating body 104 is in contact with the contact body 101. Therefore, by exciting the A mode and B mode vibrations in the vibrating body 104 simultaneously, the vibrating body 104 moves relative to the contact body 101 due to the substantially elliptical motion generated at the tips of the two protrusions. Hereinafter, the direction (the first direction) in which the vibrating body 104 and the contact body 101 move relative to each other is defined as the driving direction.

[0022] As shown in FIG. 1(a), four tension springs 110 are arranged around the vibrating body 104, generating a pressing force that presses the vibrating body 104 and the contact body 101 into contact. Note that it is not necessary to use four springs 110 to apply the pressing force, and the type of the spring is not limited to the tension spring. Hereinafter, the direction of the pressing force that presses the vibrating body 104 and the contact body 101 into contact is defined as the pressing direction, which is shown as the Z-axis direction in the figure.

[0023] The movable-side guide member 115 is provided with movable-side rolling grooves 115a which are two substantially V-shaped grooves, and rolling balls 114 are arranged in respective grooves. Further, the movable-side guide member 115 has a hook portion for fixing the spring 110. On the other hand, the fixed-side guide member 113 which is a support member and supports the contact body 101 via the vibration damping member 117 is provided with a fixed-side rolling groove portion 113a which is a substantially trapezoidal groove. And, the rolling balls 114 are sandwiched between the fixed-side rolling groove 113a provided in the fixed-side guide member 113 and the movable-side rolling groove 115a provided in the movable-side guide member 115. By the guide mechanism constituted by these fixed-side rolling groove 113a, rolling balls 114, and movable-side rolling groove 115a, the vibrating body 104 is relatively moved with respect to the contact body 101.

[0024] Here, the configurations of the contact body 101, the vibration damping member 117, the fixed-side guide member (support member) 113, and the fixed frame member 118 will be described.

[0025] The contact body 101 is fixed to the fixed frame member 118 at both ends in the driving direction by screws or the like (not shown) together with the fixed-side guide member (support member) 113 that guides the relative movement between the vibrating body 104 and the contact body 101.

[0026] The support member 113 which is a fixed-side guide and supports the contact body 101 via the vibration damping member 117 is formed with a convex portion 113b extending in the X-axis direction. That is, the convex portion 113b is rectangular when viewed from above (the positive Z-axis direction) and has a longitudinal direction in the X-axis direction. The position of the convex portion 113b is a position overlapping with the protrusion of the contact body 101 in the Z-axis direction. The convex portion 113b is formed by press working, and the opposite side is a concave portion and forms a rolling groove 113a in which the rolling balls roll. In the present embodiment, an example in which the surface of the convex portion 113b that contacts the vibration damping member 117 is a flat surface has been described, but the present invention is not limited to this, and the surface of the convex portion 113b may be a curved surface.

[0027] The vibration damping member 117 extends in the X-axis direction in the same manner as the contact body 101, contacts the contact body 101 on the side opposite to the vibrating body 104, and is sandwiched in the pressing direction by the contact body 101 and the convex portion 113b of the fixed-side guide member (support member) 113. Here, the width of the convex portion 113b is smaller than the width of the contact body 101, and the width of the vibration damping member 117 is made larger than that of the convex portion 113b. Note that the width of each member here refers to the length of each member in the Y-axis direction (the direction orthogonal to the first direction).

[0028] As the material of the vibration damping member 117, it is preferably a material with high vibration damping properties (for example, a high vibration damping rate). For example, butyl rubber and the like can be mentioned.

[0029] With respect to the thickness of the vibration damping member 117, the distance (gap) between the contact body 101 and the convex portion of the fixed-side guide member 113 is small. This distance is a value determined by the dimensions of the contact body, the fixed-side guide member, and the fixed frame member. The vibration damping member 117 has elasticity, and by being sandwiched (crushed) by the contact body 101 and the fixed-side guide member 113, an urging force due to an elastic reaction force is generated with respect to the contact body 101 and the fixed-side guide member 113.

[0030] FIG. 3 is a diagram showing an example of the arrangement of the vibration damping member according to the present embodiment, and shows a state in which the vibration damping member 117 is sandwiched with a positional deviation in the Y direction during assembly. When the position of the contact body 101 is used as a reference, the vibration damping member 117 is displaced in the positive direction of the Y-axis direction, and the fixed-side guide member 113 is displaced in the negative direction of the Y-axis direction.

[0031] The reason why the influence on the vibration damping performance can be reduced even when misalignment occurs in this embodiment will be described below. The fixed-side guide member 113 is provided with a convex portion 113b, and the vibration damping member 117 is sandwiched via the convex portion 113b. Therefore, even when the vibration damping member 117 is misaligned in the Y direction and is sandwiched, the area of the portion of the vibration damping member 117 that is sandwiched does not change. If the positioning between the contact body 101 and the fixed-side guide member 113 can be made accurate, the portion of the vibration damping member 117 that is sandwiched can maintain substantially symmetry with respect to the center line without strictly requiring the positioning accuracy of the vibration damping member 117. Here, the portion that is sandwiched refers to a portion that is not only in contact on one side but also sandwiched and pressurized from both sides.

[0032] Compared with other components, the vibration damping member 117 is likely to have dimensional variations due to lots because of the nature of the processing method. On the other hand, by setting the width of the vibration damping member 101 in consideration of the width of the convex portion, the possible value of misalignment, and the dimensional variations of the width dimension of the vibration damping member 101, the variations in the vibration damping performance due to lots can be reduced. Regarding the adjustment of the deflection of the contact body, it is performed by adjusting the width of the convex portion 113b within a range where there is no problem with the vibration damping performance and adjusting the area of the vibration damping member 117 that is sandwiched.

[0033] [Second Embodiment] In the second embodiment, a first modification example of the vibration damping member 117 will be described. Since other components such as the contact body 101 and the fixed-side guide member 113 are the same as those in the first embodiment, detailed descriptions thereof will be omitted.

[0034] The vibration damping member has elasticity and generates a biasing force due to an elastic reaction force with respect to the contact member 101 and the fixed-side guide member 113 by being sandwiched between the contact member 101 and the fixed-side guide member 113. As a result, deflection of the contact member 101 and the fixed-side guide member 113 occurs. In the case of the present embodiment, since the shape of the fixed-side guide member 113 is devised so that the rigidity of the second moment of area is increased, the deflection of the fixed-side guide member is relatively small. On the other hand, if the contact member 101 is lengthened to increase the drivable range, in the configuration of the first embodiment, the deflection of the contact member 101 may be so large that it cannot be ignored.

[0035] An example of the shape of the vibration damping member according to the present embodiment will be described with reference to FIGS. 4 to 6. As shown in FIG. 4, the vibration damping member 217 has a plurality of rectangular through-holes 217a. The through-hole 217a is a hole that penetrates from the surface of the vibration damping member 217 that contacts the contact member 101 to the surface of the vibration damping member 217 that contacts the fixed-side guide member 113. The short side direction of the through-hole 217a coincides with the X direction, and the long side direction of the through-hole 217a coincides with the Y direction. The width in the long side direction of the through-hole 217a is longer than the width of the convex portion of the fixed-side guide member 113. Here, the width of each member refers to the length of each member in the Y-axis direction (the direction orthogonal to the first direction).

[0036] The through-hole 217a is provided at a position facing a nodal portion of the out-of-plane bending vibration of the contact member generated by the resonance of the contact member. Among the unnecessary vibrations of the contact member 101, the out-of-plane vibration is most likely to occur. Therefore, by bringing the vibration damping member 217 into contact with the position of the antinode of the out-of-plane vibration to be reduced, the contact area of the vibration damping member 217 is reduced, and the effect of reducing the deterioration of the vibration damping performance is achieved.

[0037] By providing the through-hole 217a in the vibration damping member 217, the area of the vibration damping member 217 sandwiched between the contact body 101 and the fixed-side guide member 113 can be reduced. As a result, the component deflection of the contact body 101 and the fixed-side guide member 113 can be reduced. Further, by making the through-hole 217a rectangular, even if a misalignment occurs in the Y direction, the area of the vibration damping member 217 being sandwiched does not change, and variations in vibration damping performance can be reduced. Note that it is not essential for the shape of the groove portion to be composed of straight lines, and the groove portion may have a gentle curved portion in consideration of performance.

[0038] As shown in FIG. 5(b), which is a cross-sectional view taken along line A-A of FIG. 5(a), the vibration damping member 317 has a plurality of elliptical groove portions 317a. By making the shape without a through-hole, unlike the case where the through-hole is formed by post-processing as shown in FIG. 4, the desired shape can be obtained at once during rubber molding. Note that the size of the radius R of the curve of the groove portion 317a is set to be equal to or less than a predetermined value according to the allowable amount of difference in the contact area when misalignment occurs.

[0039] In order to reduce the deflection of the contact body 101, it is desirable that the depth of the groove portion 317a is large, and the thin portion 317b, which is the difference between the total thickness of the vibration damping member 317 and the depth of the groove portion 317a, is set to a depth such that it is not at least sandwiched between the contact body 101 and the fixed-side guide member 113. That is, it is preferable that the vibration damping member 417 has a shape in which the bottom (thin portion) of the groove portion 317a does not contact the contact body 101. In this embodiment, the depth of the groove portion 317a is set to 60% or more with respect to the thickness of the portion of the vibration damping member 317 where the groove portion 317a is not provided.

[0040] As shown in FIG. 6(b), which is a cross-sectional view taken along line A-A of FIG. 6(a), the vibration damping member 417 has a plurality of rectangular groove portions 417a. Also, the cross-sectional shape is the same regardless of where in the cross-section parallel to the X direction is viewed. By adopting this shape, after molding a large sheet of rubber, it can be cut to the required size of the vibration damping member 417 for use, thus enabling cost reduction.

[0041] In addition, in the present embodiment, the description has been made on the premise that the convex portion of the fixed-side guide member 113 contacts the vibration damping member. However, the present invention is not limited to this, and a configuration in which the fixed-side guide member is not provided with a convex portion may be adopted. It is preferable to adjust the ratio of the area of the through-hole of the vibration damping member and make the width of the vibration damping member larger than the width of the contact body. With this configuration, while allowing the deflection of the contact body, the entire contact body is in pressure contact with the vibration damping member, so that it is not affected by misalignment and the variation in vibration damping performance can be reduced.

[0042] <Application Example of Vibration-Type Actuator> Next, an imaging device and an industrial robot as examples of devices and apparatuses to which the above-described vibration-type actuator 1 is applied will be described.

[0043] [Third Embodiment] FIG. 7(a) is a top view showing a schematic configuration of an imaging device 700 which is an example of an optical device. The imaging device 700 includes a camera body 730 equipped with an imaging element 710 and a power button 720. The imaging device 700 also includes a lens barrel 740 which includes a lens group (not shown) and a vibration-type actuator. The driving of the lens group which is an example of an optical element is performed by the vibration-type actuator. The lens barrel 740 is replaceable as an interchangeable lens, and a lens barrel 740 suitable for the imaging object can be attached to the camera body 730. As the vibration-type actuator, the vibration-type actuator described with reference to FIG. 2 can be used.

[0044] The driving of the lens by the vibration-type actuator is considered to be suitable for driving the lens for autofocus, but the present invention is not limited to this, and it is considered that the lens for zoom can also be driven by the same configuration. In addition, the vibration-type actuator can also be used for driving the imaging element and driving the lens or the imaging element during shake correction.

[0045] [Fourth Embodiment] FIG. 8 is a perspective view showing a schematic configuration of a robot 100 which is an example of an electronic device equipped with the vibration type actuator 1, and here, a horizontal articulated robot which is a kind of industrial robot is illustrated.

[0046] The robot 100 has an arm joint portion 111 and a hand portion 112. The arm joint portion 111 connects two arms so that the angle at which the two arms 120 intersect can be changed. The hand portion 112 has an arm 120, a gripping portion 121 attached to one end of the arm 120, and a hand joint portion 122 connecting the arm 120 and the gripping portion 121. The vibration type actuator is built into the arm joint portion 111 and the gripping portion 121, and performs angle adjustment and rotational movement of the arm 120 and the hand joint portion. For the bending of the arm joint portion 111 and the gripping operation of the hand portion 112, a vibration type actuator having a TN characteristic (a drooping characteristic showing the relationship between load torque and rotational speed) with a low rotational speed and high torque is preferably used.

[0047] As described above, the present invention has been described in detail based on its preferred embodiments, but the present invention is not limited to these specific embodiments, and various forms within the scope not departing from the gist of this invention are also included in the present invention. For example, an XY stage can be cited as a device capable of driving a flat contact body in an arbitrary direction within its plane. Further, each of the above-described embodiments may be implemented alone or in combination.

[0048] The disclosure of the present embodiment includes the following configurations.

[0049] (Configuration 1) A vibrating body having an electro-mechanical energy conversion element and an elastic body, and a contact body extending in a first direction in contact with the elastic body. A vibration type actuator that relatively moves the vibrating body and the contact body in the first direction by vibrating the vibrating body. A vibration damping member that extends in the first direction and contacts the contact body on a surface opposite to the surface of the contact body that contacts the vibrating body, and It includes a support member that extends in the first direction and supports the contact body via the vibration damping member. The support member has a convex portion that extends in the first direction and contacts the vibration damping member on the surface of the support member that contacts the vibration damping member. A vibration type actuator, characterized in that the width of the convex portion in the direction orthogonal to the first direction is smaller than the width of the contact body and smaller than the width of the vibration damping member.

[0050] (Configuration 2) The vibration damping member has a plurality of groove portions or through portions that are longer than the width of the convex portion in the direction orthogonal to the first direction, in the vibration type actuator according to Configuration 1.

[0051] (Configuration 3) It has a vibrating body having an electro-mechanical energy conversion element and an elastic body, and a contact body that contacts the elastic body and extends in the first direction. A vibration type actuator that relatively moves the vibrating body and the contact body in the first direction by vibrating the vibrating body, On the surface of the contact body that extends in the first direction and is opposite to the surface that contacts the vibrating body, there is a vibration damping member that contacts the contact body, It includes a support member that extends in the first direction and supports the contact body via the vibration damping member. A vibration type actuator, characterized in that the vibration damping member has a plurality of groove portions or through portions that are longer than the width of the contact body in the direction orthogonal to the first direction.

[0052] (Configuration 4) The support member has a convex portion that extends in the first direction and contacts the vibration damping member on the surface of the support member that contacts the vibration damping member. A vibration type actuator according to Configuration 3, characterized in that the width of the convex portion in the direction orthogonal to the first direction is smaller than the width of the contact body and smaller than the width of the vibration damping member.

[0053] (Configuration 5) When the vibration damping member has the groove portion, the vibration type actuator according to any one of Configurations 2 to 4, characterized in that the bottom of the groove portion does not contact the contact member.

[0054] (Configuration 6) The vibration damping member has the groove portion or the through portion at a position facing a nodal portion of out-of-plane bending vibration of the contact member generated by resonance of the contact member, and the vibration type actuator according to any one of Configurations 2 to 5.

[0055] (Configuration 7) A vibration type actuator according to any one of Configurations 1 to 6, and An optical device including at least one of an optical element or an imaging element driven by the vibration type actuator.

[0056] (Configuration 8) A member, and An electronic device including the vibration type actuator according to any one of Configurations 1 to 6 that drives the member.

Explanation of Signs

[0057] 101 Contact member 102 Elastic body 103 Piezoelectric element 104 Vibrator 113 Fixed-side guiding member (supporting member) 114 Rolling ball 117 Vibration damping member 118 Fixed frame member

Claims

1. A vibrating body having an electro-mechanical energy conversion element and an elastic body, and a contact body that is in contact with the elastic body and extends in a first direction, A vibration type actuator that relatively moves the vibrating body and the contact body in the first direction by vibrating the vibrating body, A vibration damping member that extends in the first direction and is in contact with the contact body on a surface opposite to the surface of the contact body that contacts the vibrating body, and A support member that extends in the first direction and supports the contact body via the vibration damping member, The support member has a convex portion that extends in the first direction and is in contact with the vibration damping member on a surface of the support member that is in contact with the vibration damping member, A vibration type actuator, wherein a width of the convex portion in a direction orthogonal to the first direction is smaller than a width of the contact body and smaller than a width of the vibration damping member.

2. The vibration type actuator according to claim 1, wherein the vibration damping member has a plurality of groove portions or through portions that are longer than the width of the convex portion in a direction orthogonal to the first direction.

3. A vibrating body having an electro-mechanical energy conversion element and an elastic body, and a contact body that is in contact with the elastic body and extends in a first direction, A vibration type actuator that relatively moves the vibrating body and the contact body in the first direction by vibrating the vibrating body, A vibration damping member that extends in the first direction and is in contact with the contact body on a surface opposite to the surface of the contact body that contacts the vibrating body, and A support member that extends in the first direction and supports the contact body via the vibration damping member, A vibration type actuator, wherein the vibration damping member has a plurality of groove portions or through portions that are longer than the width of the contact body in a direction orthogonal to the first direction.

4. The support member has a convex portion that extends in the first direction and is in contact with the vibration damping member on a surface of the support member that is in contact with the vibration damping member, A vibration type actuator according to claim 3, wherein a width of the convex portion in a direction orthogonal to the first direction is smaller than a width of the contact body and smaller than a width of the vibration damping member.

5. The vibration type actuator according to claim 3, wherein when the vibration damping member has the groove portion, a bottom portion of the groove portion does not contact the contact body.

6. The vibration damping member has the groove portion or the through portion at a position facing a nodal portion of out-of-plane bending vibration of the contact body generated by resonance of the contact body, and the vibration type actuator according to claim 1 is characterized in that.

7. A vibration type actuator according to any one of claims 1 to 6, An optical device including at least one of an optical element or an imaging element driven by the vibration type actuator.

8. A member, An electronic device including the vibration type actuator according to any one of claims 1 to 6 that drives the member.

Images