Tape joining device and method

Abstract

To provide a tape joining device and method that can easily join the ends of two dicing tapes together without using auxiliary materials.SOLUTION: A joint portion that joins the ends of dicing tapes peels a tape body B of the trailing dicing tape from a separator S by rotation of an upstream peeling roller 45 with multiple needle-shaped members 45a erected on its outer circumferential surface that can be inserted into the tape body of the trailing dicing tape, and peels the tape body of the leading dicing tape from the separator by rotation of a downstream peeling roller 46 with multiple needle-shaped members 46a erected on its outer circumferential surface that can be inserted into the tape body of the leading dicing tape. And there is a joint unit that joins the ends of the separator of a leading dicing tape DT2 and the separator of a trailing dicing tape DT1, and the ends of the tape body of the leading dicing tape DT2 and the tape body of the trailing dicing tape DT1.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a tape bonding device and method for bonding the ends of first and second dicing tapes to each other.

Background Art

[0002] In the field of semiconductor manufacturing, there is a process of dicing a semiconductor substrate such as a silicon wafer (hereinafter referred to as a "workpiece") into chips. In this process, the dicing tape attached to the workpiece restrains the positions of the individual chips, enabling efficient dicing of the chips.

[0003] Patent Document 1 describes a tape sticking device that can use the roll tape 2B mounted on the other shaft 11 even after the roll tape 2A mounted on one shaft 11 is used up. Patent Document 2 describes an adhesive tape bonding device that bonds an adhesive tape T and a separator S via a bonding tape CT. Note that the reference numerals are those of each patent document.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the device described in Patent Document 1, at the time of tape replacement, after removing the used roll tape set to pass through a predetermined orbit by winding it around various rollers, a new roll tape had to be set again to pass through the predetermined orbit.

[0006] In addition, in the apparatus described in Patent Document 2, a bonding tape, which is a subsidiary material, had to be prepared for bonding the preceding adhesive tape and the subsequent adhesive tape.

[0007] Therefore, a technical problem to be solved arises in order to simply bond the ends of two dicing tapes without using a subsidiary material, and an object of the present invention is to solve this problem.

Means for Solving the Problem

[0008] In order to achieve the above object, a tape bonding apparatus according to the present invention is a tape bonding apparatus for bonding the ends of first and second dicing tapes, and includes a first peeling means for peeling a tape body from a separator at an end of the first dicing tape, a second peeling means for peeling the tape body from the separator at an end of the second dicing tape, and a bonding means for bonding the separators of the first and second dicing tapes and bonding the tape bodies of the first and second dicing tapes. The first peeling means and the second peeling means are rollers having a plurality of needle-like members that can be inserted into the tape body standing on an outer peripheral surface, and peeling the tape body from the separator by rotation.

[0009] According to this configuration, the ends of the first and second dicing tapes can be bonded without using a subsidiary material. Further, by bonding the other end of the subsequent first and second dicing tapes to one end of any one of the preceding first and second dicing tapes, the complicated setting work of winding the subsequent dicing tape around various rollers is omitted, and the ends of the first and second dicing tapes can be simply bonded.

[0010] Also, in order to achieve the above object, a tape joining method according to the present invention is a tape joining method for joining the ends of first and second dicing tapes, including rotating a first peeling roller having a plurality of needle-like members erected on an outer peripheral surface thereof and capable of piercing a tape body of the first dicing tape to peel the tape body from a separator at an end of the first dicing tape; rotating a second peeling roller having a plurality of needle-like members erected on an outer peripheral surface thereof and capable of piercing a tape body of the second dicing tape to peel the tape body from a separator at an end of the second dicing tape; and joining the separators of the first and second dicing tapes and joining the tape bodies of the first and second dicing tapes.

[0011] According to this configuration, the ends of the first and second dicing tapes can be joined without using auxiliary materials. Further, by joining one end of the subsequent first and second dicing tapes to the other end of the preceding first and second dicing tapes, the complicated setting work of winding the subsequent dicing tape around various rollers is omitted, and the ends of the first and second dicing tapes can be easily joined.

Effect of the Invention

[0012] The present invention can easily join the ends of the first and second dicing tapes without using auxiliary materials.

Brief Description of the Drawings

[0013]

Figure 1

Figure 2

Figure 3

Mode for Carrying Out the Invention

[0014] An embodiment of the present invention will be described with reference to the drawings. In the following, when referring to the number of components, numerical values, amounts, ranges, etc., unless otherwise specified or clearly limited to a specific number in principle, it is not limited to that specific number, and it may be more or less than the specific number.

[0015] Also, when referring to the shape, positional relationship, etc. of components, etc., unless otherwise specified or clearly considered not to be so in principle, it includes those substantially approximated or similar to the shape, etc.

[0016] Also, the drawings may be exaggerated, for example, by enlarging characteristic parts to make the features easier to understand, and the dimensional ratios of components are not necessarily the same as the actual ones.

[0017] FIG. 1 is a perspective view of a tape sticking device 1. The tape sticking device 1 sticks the tape body B of a dicing tape DT to a workpiece W and a dicing frame DF. The workpiece W is, for example, a semiconductor substrate such as a silicon wafer, but is not limited thereto. The dicing tape DT is an ultraviolet curable tape or the like.

[0018] The tape sticking device 1 includes a conveyance unit 2, an attachment unit 3, and a joining unit 4 as a tape joining unit.

[0019] The conveyance unit 2 includes an inner peripheral table 21 that holds the workpiece W and an outer peripheral table 22 on which the dicing frame DF is placed.

[0020] An adsorbent (not shown) made of a porous material having innumerable pores is embedded in the surface of the inner peripheral table 21. The roughness of the pores of the adsorbent is, for example, #400 or #800 or the like.

[0021] The inner peripheral table 21 is switchably connected to a vacuum source and a compressed air source (not shown). When the vacuum source is activated, a negative pressure is supplied between the work W placed on the inner peripheral table 21 and the upper surface (adsorbing surface) of the adsorbent, and the work W is adsorbed and held on the adsorbing surface. When the compressed air source is activated, compressed air (release air) is supplied between the work W and the adsorbing surface, and the adsorption between the work W and the adsorbing surface is released.

[0022] The inner peripheral table 21 and the outer peripheral table 22 are placed on the slider 23 and are configured to be slidable in a predetermined conveying direction.

[0023] The sticking unit 3 includes feed rollers 31a and 31b that support the dicing tape DT so as to be pay-outable, a take-up roller 32 that winds up the separator S peeled from the dicing tape DT and imparts a pay-out force to the dicing tape DT, first to sixth guide rollers 33a to 33f that apply tension to the dicing tape DT and regulate the trajectory of the dicing tape DT, a pressing roller 34 that moves up and down to stick the tape body B to the work W, and a knife plate 35 that regulates the trajectory of the separator S. Note that the number of feed rollers may be three or more.

[0024] The joining unit 4 includes a lifting plate 41 on which the feed rollers 31a and 31b are erected from the side. The lifting plate 41 is provided so as to be movable up and down in the vertical direction, and can switch the feed rollers 31a and 31b to a pay-out position where the dicing tape DT can be fed out or a standby position where the unused dicing tape DT is accommodated.

[0025] The joining unit 4 includes upstream holding portions 42a and 42b that can respectively adsorb and hold the dicing tape DT, and a downstream holding portion 43.

[0026] The upstream holding parts 42a and 42b are erected from the side surfaces of the elevating plate 41. The upstream holding part 42a can hold the dicing tape DT fed out from the feed roller 31a, and the upstream holding part 42b can hold the dicing tape DT fed out from the feed roller 31b. The upstream holding parts 42a and 42b are configured to be slidable along the feeding direction D of the dicing tape DT.

[0027] The downstream holding part 43 is disposed on the downstream side in the feeding direction D with respect to the feed rollers 31a and 31b located at the feeding position, and can hold the dicing tape DT. The downstream holding part 43 is configured to be slidable along the feeding direction D.

[0028] The joining part 4 is provided with a cutter 44. The cutter 44 is configured to be slidable in the vertical direction, and when the cutting edge of the cutter 44 is pressed against the dicing tape DT, the cutter 44 cuts the dicing tape DT.

[0029] The joining part 4 includes an upstream peeling roller 45 as a first peeling means and a downstream peeling roller 46 as a second peeling means. The upstream peeling roller 45 and the downstream peeling roller 46 are made of, for example, resin. The upstream peeling roller 45 and the downstream peeling roller 46 are configured to be slidable along the feeding direction D.

[0030] The upstream peeling roller 45 is configured to be rotatable around the rotation axis A1. Needle-like members 45a are erected on the outer peripheral surface of the upstream peeling roller 45. As will be described later, the needle-like members 45a are provided so as to be inclined upstream in the feeding direction D with respect to the radial direction of the upstream peeling roller 45.

[0031] The downstream peeling roller 46 is configured to be rotatable around the rotation axis A2. Needle-like members 46a are erected on the outer peripheral surface of the downstream peeling roller 46. As will be described later, the needle-like members 46a are provided so as to be inclined downstream in the feeding direction D with respect to the radial direction of the downstream peeling roller 46.

[0032] The joint portion 4 is provided with a joint unit 47 capable of joining the preceding first dicing tape DT (hereinafter referred to as "the preceding dicing tape DT1") and the subsequent second dicing tape DT (hereinafter referred to as "the following dicing tape DT2"). Note that the mode of joining by the joint unit 47 may be any of thermocompression bonding, vibration, or the like.

[0033] The operation of the tape attaching device 1 is controlled via a controller (not shown). The controller controls each of the components constituting the tape attaching device 1. The controller is, for example, a computer and is composed of a CPU, a memory, and the like. Note that the functions of the controller may be realized by controlling using software or may be realized by an operation using hardware.

[0034] Next, the operation of the tape attaching device 1 will be described with reference to the drawings.

[0035] <Work transfer> First, the dicing frame DF is transferred onto the outer peripheral table 22 by a transfer hand or the like (not shown).

[0036] Next, the work W is transferred onto the inner peripheral table 21 by a transfer hand or the like (not shown). Thereafter, when negative pressure is supplied between the work W and the adsorption surface from a compressed air source, the work W is adsorbed to the inner peripheral table 21. The upper surface of the work W and the upper surface of the dicing frame DF are set to be substantially flush.

[0037] <Tape attachment> Next, the slider 23 is driven to move the inner peripheral table 21 and the outer peripheral table 22 so that one end (attachment start position) of the tape body B is disposed below the pressing roller 34.

[0038] Next, the winding roller 32 rotates to feed out the dicing tape DT, and the pressing roller 34 presses the tape body B against the dicing frame DF to attach the tape body B with a predetermined pressing force.

[0039] After that, when the inner peripheral table 21 and the outer peripheral table 22 move along a predetermined conveyance direction, the tape body B is gradually adhered and advanced to the dicing frame DF and the workpiece W.

[0040] Then, when the tape body B reaches the other end (adhesion end position) of the dicing frame DF, the workpiece W and the dicing frame DF are integrally adhered via the tape body B.

[0041] <Tape joining> When the preceding dicing tape DT1 is used up to the extent that replacement is necessary, the succeeding dicing tape DT2 is connected. Hereinafter, the case where the dicing tape DT supported by the feed roller 31a is used up will be described as an example, but the case where the dicing tape DT supported by the feed roller 31b is used up is the same.

[0042] First, when it is detected that the remaining amount of the preceding dicing tape DT1 has decreased, as shown in Fig. 2(a), the upstream holding portion 42a and the downstream holding portion 43 adsorb and hold the preceding dicing tape DT1. The remaining amount of the dicing tape DT1 is, for example, determined using a rotation speed sensor that calculates the remaining amount of the dicing tape DT from the rotation speed of the feed roller 31a, or a metal detection sensor that detects the feed roller 31a when the dicing tape DT1 has decreased.

[0043] Next, as shown in Fig. 2(b), the cutter 44 descends to cut the dicing tape DT1. After that, the lifting plate 41 rises to move the feed roller 31a to the standby position and the feed roller 31b to the feeding position. The succeeding dicing tape DT2 supported by the feed roller 31b has its end adsorbed and held by the upstream holding portion 42b.

[0044] Next, as shown in FIG. 3(a), the upstream peeling roller 45 moves near the subsequent dicing tape DT2, and the tip of the needle-shaped member 45a penetrates into the tape body B of the subsequent dicing tape DT2. Similarly, the downstream peeling roller 46 moves near the preceding dicing tape DT1, and the tip of the needle-shaped member 46a penetrates into the tape body B of the preceding dicing tape DT1.

[0045] Next, as shown in FIG. 3(b), while rotating the upstream peeling roller 45 and sliding it upstream in the feeding direction D, at the end of the subsequent dicing tape DT2, the tape body B is peeled off so as to be wound from the separator S. Similarly, while rotating the downstream peeling roller 46 and sliding it downstream in the feeding direction D, at the end of the preceding dicing tape DT1, the tape body B is peeled off so as to be wound from the separator S. Here, the thickness dimension of the tape body B is, for example, about 150 μm, and the thickness of the separator S is, for example, about 40 μm. And the peeling amounts of the preceding dicing tape DT1 and the subsequent dicing tape DT2 are set to about 70 to 80 mm, respectively, for example.

[0046] Next, as shown in FIG. 3(c), by sliding the upstream holding portion 42b and the downstream holding portion 43 so that the preceding dicing tape DT1 and the subsequent dicing tape DT2 approach each other, a part of the separators S of the preceding dicing tape DT1 and the subsequent dicing tape DT2 overlap each other. Then, as shown in FIG. 3(d), the joining unit 47 joins the separators S together.

[0047] Next, while rotating the downstream peeling roller 46, it is slid upstream in the feeding direction D so that the tape body B of the preceding dicing tape DT1 is overlapped with the separator S of the subsequent dicing tape DT2. Then, while rotating the upstream peeling roller 45, it is slid downstream in the feeding direction D so that the tape body B of the subsequent dicing tape DT2 is overlapped with the tape body B of the preceding dicing tape DT1. That is, the ends of the dicing tapes DT are laminated such that the separator S of the subsequent dicing tape DT2 is interposed between the tape body B and the separator S of the preceding dicing tape DT1. The width at which the separators S overlap each other is set to, for example, 30 mm.

[0048] Then, as shown in FIG. 3(e), the joining unit 47 joins the preceding dicing tape DT1 and the subsequent dicing tape DT2 at the ends of the overlapping dicing tapes DT.

[0049] In this way, the tape attaching device 1 according to the present embodiment has a configuration in which the joining portion 4 includes an upstream peeling roller 45 that peels the tape body B from the separator S at the end of the subsequent dicing tape DT2, a downstream peeling roller 46 that peels the tape body B from the separator S at the end of the preceding dicing tape DT1, and a joining unit 47 that joins the ends of the separators S of the preceding dicing tape DT2 and the subsequent dicing tape DT1 and joins the ends of the tape bodies B of the preceding dicing tape DT2 and the subsequent dicing tape DT1.

[0050] According to this configuration, the ends of the dicing tape DT can be joined without using auxiliary materials. Further, by joining the end of the subsequent dicing tape DT2 to the end of the preceding dicing tape DT1, the complicated setting work of winding the subsequent dicing tape DT2 around the first to sixth guide rollers 33a to 33f is omitted, and the ends of the dicing tape DT can be easily joined.

[0051] Further, in the tape sticking device 1, a plurality of needle-like members 45a and 46a capable of piercing the tape body B are erected on the outer peripheral surfaces of the upstream peeling roller 45 and the downstream peeling roller 46, and the tape body B is peeled from the separator S by rotation.

[0052] According to this configuration, the tape body B can be peeled from the separator S only by piercing the needle-like members 45a and 46a into the tape body B and rotating the upstream peeling roller 45 and the downstream peeling roller 46.

[0053] Further, in the tape sticking device 1, the needle-like member 45a is provided to be inclined with respect to the radial direction of the upstream peeling roller 45, and the needle-like member 46a is provided to be inclined with respect to the radial direction of the downstream peeling roller 46.

[0054] According to this configuration, it becomes easier for the needle-like member 46a to peel the tape body B of the preceding dicing tape DT1 from the separator S, and it becomes easier for the needle-like member 45a to peel the tape body B of the subsequent dicing tape DT2 from the separator S.

[0055] Further, the tape joining method using the tape sticking device 1 according to the present embodiment is a tape joining method for joining the ends of the dicing tapes DT, and includes a step of peeling the tape body B from the separator S at the end of the subsequent dicing tape DT, a step of peeling the tape body B from the separator S at the end of the preceding dicing tape DT, and a step of joining the ends of the separators S of the preceding dicing tape DT2 and the subsequent dicing tape DT1 and joining the ends of the tape bodies B of the preceding dicing tape DT2 and the subsequent dicing tape DT1.

[0056] According to this configuration, the ends of the dicing tape DT can be joined without using auxiliary materials. Further, by joining the end of the subsequent dicing tape DT2 to the end of the preceding dicing tape DT1, the complicated setting operation of winding the subsequent dicing tape DT2 around the first to sixth guide rollers 33a to 33f can be omitted, and the ends of the dicing tape DT can be easily joined.

[0057] Also, the present invention can be variously modified other than the above as long as it does not depart from the spirit of the present invention, and it is natural that the present invention extends to the modified ones.

[0058] For example, the joint 4 is not limited to joining the tape bodies B to each other in a state where the separator Ss are joined in advance by peeling the tape bodies B from the separators S in the preceding dicing tape DT1 and the subsequent dicing tape DT2, respectively. For example, the separator Ss may be joined and the tape bodies B may be joined together in a state where the tape bodies B and the separators S are alternately laminated.

[0059] Also, the structures of the upstream peeling roller 45 and the downstream peeling roller 46 are not limited to those described above, and any structure may be used as long as it can peel the tape body B from the separator S.

[0060] Also, the upstream holding portions 42a and 42b and the downstream holding portion 43 are not limited to adsorbing and holding the dicing tape DT, and for example, they may grip the dicing tape DT from the front and back.

Explanation of Reference Numerals

[0061] 1: Tape sticking device 2: Conveying portion 21: Inner peripheral side table 22: Outer peripheral side table 23: Slider 3: Sticking portion 31a: Feeding roller 31b: Feeding roller 32: Take-up roller 33a~33f: First to sixth guide rollers 34: Pressing roller 35: Knife plate 4: Joint part (tape joining device) 41: Lifting plate 42a, 42b: Upstream side holding parts 43: Downstream side holding part 44: Cutter 45: Upstream side peeling roller (first peeling means) 45a: Needle-shaped member 46: Downstream side peeling roller (second peeling means) 46a: Needle-shaped member 47: Joining unit

Claims

1. A tape splicing device that splices ends of a first dicing tape and a second dicing tape together, a first peeling means for peeling the tape body from the separator at an end portion of the first dicing tape; a second peeling means for peeling the tape body from the separator at an end portion of the second dicing tape; a joining means for joining separators of the first and second dicing tapes together and for joining tape bodies of the first and second dicing tapes together; Equipped with A tape splicing device characterized in that the first peeling means and the second peeling means are rollers having a plurality of needle-shaped members erected on their outer surface that can be inserted into the tape body and that peel the tape body from the separator by rotating.

2. 2. The tape splicing device according to claim 1, wherein the needle-shaped member is provided at an angle with respect to a radial direction of the roller.

3. A tape joining method for joining ends of a first dicing tape and a second dicing tape, comprising the steps of: a step of rotating a first peeling roller having a plurality of needle-shaped members on an outer peripheral surface thereof that can be inserted into a tape body of a first dicing tape, thereby peeling off the tape body from the separator at an end portion of the first dicing tape; a step of rotating a second peeling roller having a plurality of needle-shaped members on an outer peripheral surface thereof that can be inserted into a tape body of the second dicing tape, thereby peeling off the tape body from the separator at an end portion of the second dicing tape; a step of joining separators of the first and second dicing tapes to each other and joining tape bodies of the first and second dicing tapes to each other; A tape splicing method comprising the steps of:

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