Exposure device and exposure method

Abstract

To provide an exposure device and an exposure method capable of accurately synchronizing a conveying speed of an exposed object with an actual moving speed of a pattern object.SOLUTION: An exposure device 10 includes: a conveying part 20 that conveys an exposed object 11; a projection part 30 that projects an active energy ray; a first detecting part 41 and a second detecting part 42 that detect the active energy ray; and a calculation part 50 that calculates an actual moving speed of a test object based on the time difference between when the first detection part 41 and the second detection part 42 detect the active energy ray and the distance between the first detection part 41 and the second detection part 42, when the projection part 30 projects the test object moving in the conveying direction D1. In the exposure device 10, when the conveying part 20 conveys the exposed object 11 while the projection part 30 projects a pattern object moving in the conveying direction D1 onto the exposed object 11, the actual moving speed of the pattern object and the conveying speed are synchronized based on the moving speed calculated by the calculation part 50.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to an exposure apparatus and an exposure method.

Background Art

[0002] As an example of a technique for forming a pattern on a thin film, lithography is known in which a photosensitive film made of a photosensitive material formed on the thin film is exposed to an active energy ray such as ultraviolet rays or electron beams (for example, Patent Document 1).

[0003] As an example of a manufacturing technique for a thin film using lithography, a technique for exposing a photosensitive film while transporting an object to be exposed including the thin film and the photosensitive film has been studied. In this manufacturing technique, a moving image of a pattern-shaped object moving is projected onto the object to be exposed by an active energy ray in accordance with the transport speed of the object to be exposed. Thereby, by continuously projecting a pattern object, which is a pattern-shaped active energy ray, onto an arbitrary region of the photosensitive film included in the transported object to be exposed, it is possible to secure the integrated light amount necessary for patterning the photosensitive film while transporting the object to be exposed.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the above manufacturing technique, the integrated light amount may be adjusted according to the thickness of the photosensitive film or the type of the photosensitive material constituting the photosensitive film. Further, in order to change the resolution of the pattern object or the intensity of the active energy ray, the distance between the projection device of the pattern object and the object to be exposed may be adjusted. When performing these adjustments, it is necessary to synchronize the actual moving speed of the pattern object and the transport speed of the object to be exposed.

[0006] Conventionally, while visually checking the actual moving speed of the pattern object and the conveyance speed, the set speed at which the pattern object moves in the video was adjusted, or the conveyance speed of the object to be exposed was adjusted, so that the actual moving speed and the conveyance speed were synchronized. Therefore, due to a speed deviation occurring between the moving speed of the pattern object and the conveyance speed of the object to be exposed, the pattern shape formed on the photosensitive film may be stretched, or the edge shape of the pattern formed on the photosensitive film may become unclear.

Means for Solving the Problem

[0007] An exposure apparatus for solving the above problems includes a projection unit that projects a video onto a projection area using active energy rays, a conveyance unit that conveys the object to be exposed along a specific conveyance direction so that the object to be exposed passes through the projection area, a first detection unit and a second detection unit that detect the active energy rays and are arranged at different positions from each other in the conveyance direction within the projection area, and a calculation unit that calculates the moving speed at which the projected test object actually moves through the projection area based on the time difference when each of the first detection unit and the second detection unit detects the active energy rays when a test video in which a test object moves at a test set speed in the conveyance direction is projected onto the projection area and the distance between the first detection unit and the second detection unit in the conveyance direction. When projecting an exposure video in which a pattern object moves at an exposure set speed in the conveyance direction onto the object to be exposed while conveying the object to be exposed, the conveyance speed of the object to be exposed and the actual moving speed at which the pattern object projected onto the object to be exposed moves in the conveyance direction are synchronized based on the moving speed calculated by the calculation unit.

[0008] The exposure method for solving the above problems is an exposure method in which an object to be exposed conveyed along a specific conveyance direction passes through a projection area of a projection unit that projects a moving image using active energy rays, and while conveying the object to be exposed at a specific conveyance speed, an exposure moving image in which a pattern object moves in the conveyance direction with respect to the object to be exposed is projected. When a test moving image in which a test object moves at a test setting speed in the conveyance direction is projected onto the projection area, the time difference when each of a first detection unit and a second detection unit arranged at different positions in the conveyance direction within the projection area detects the active energy rays, and based on the distance between the first detection unit and the second detection unit in the conveyance direction, calculates the moving speed at which the projected test object actually moves through the projection area, and based on the calculated moving speed, synchronizes the conveyance speed for conveying the object to be exposed and the actual moving speed at which the pattern object projected onto the object to be exposed moves in the conveyance direction.

[0009] According to the above exposure apparatus or exposure method, compared with the conventional visual speed synchronization, the conveyance speed of the object to be exposed and the actual moving speed of the projected pattern object can be synchronized more accurately.

[0010] In the above exposure apparatus, it is preferable that the test object has a linear shape orthogonal to the conveyance direction. According to the above configuration, when the test moving image is projected onto the projection area, the first detection unit and the second detection unit are surely positioned on the movement path of the test object. Therefore, the detection of the active energy rays by the first detection unit and the second detection unit can be performed more surely.

[0011] In the above exposure apparatus, the exposure setting speed in the exposure video is equal to the test setting speed in the test video, and the transport unit may transport the object to be exposed so that the transport speed matches the movement speed calculated by the calculation unit. According to the above configuration, the transport speed of the object to be exposed by the transport unit can be synchronized with the actual movement speed of the pattern object. In this case, by setting the test setting speed to the same speed as the exposure setting speed in advance, synchronization can be completed only by matching the transport speed of the object to be exposed by the transport unit with the actual movement speed of the test object calculated by the calculation unit.

[0012] In the above exposure apparatus, the transport speed of the transport unit is set to an arbitrary speed, and the exposure setting speed in the exposure video may be set to a value obtained by multiplying the ratio of the transport speed to the movement speed calculated by the calculation unit with respect to the test setting speed in the test video. According to the above configuration, while setting the transport speed to an arbitrary speed, the transport speed of the object to be exposed by the transport unit can be synchronized with the actual movement speed of the pattern object.

Advantages of the Invention

[0013] According to the present disclosure, the transport speed of the object to be exposed can be accurately synchronized with the actual movement speed of the pattern object.

Brief Description of the Drawings

[0014]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Embodiments for Carrying Out the Invention

[0015] Hereinafter, with reference to FIGS. 1 to 5, an embodiment of an exposure apparatus and an exposure method will be described. [Exposure Apparatus] As shown in FIG. 1, the exposure apparatus 10 includes a conveyance unit 20 and a projection unit 30. The conveyance unit 20 conveys the object to be exposed 11 along a specific conveyance direction D1. The projection unit 30 exposes the object to be exposed 11 by projecting active energy rays onto the object to be exposed 11 conveyed by the conveyance unit 20.

[0016] The object to be exposed 11 is, for example, a sheet-like thin film. The object to be exposed 11 includes a base material 12 and a photosensitive film 13 formed on the base material 12. The base material 12 is composed of, for example, a resin film or sheet. The photosensitive film 13 is composed of an arbitrary photosensitive material. The photosensitive material is a resin material that causes a photochemical reaction such as photocrosslinking, photodegradation, or photopolymerization when irradiated with active energy rays such as electron beams or ultraviolet rays. The photosensitive material is, for example, a photoresist material.

[0017] The conveyance unit 20 conveys the object to be exposed 11, for example, in a roll-to-roll manner. As an example, the conveyance unit 20 unwinds the object to be exposed 11 from the first roll R1 around which the object to be exposed 11 is wound, and winds up the object to be exposed 11 with the photosensitive film 13 exposed by the projection unit 30 as the second roll R2. The conveyance unit 20 conveys the object to be exposed 11 so that the photosensitive film 13 faces the projection unit 30.

[0018] The conveyance unit 20 includes a conveyance control device 21 for controlling the conveyance speed. The conveyance control device 21 is a computer terminal including, for example, a control unit such as a CPU, a storage unit such as a non-volatile memory, and an input unit for receiving an input from an operator.

[0019] The projection unit 30 includes a projector 31 and a playback device 32. The projector 31 is a projector capable of projecting active energy rays such as ultraviolet rays and electron beams. The projector 31 projects a video onto the projection area A1 using the active energy rays.

[0020] The projection area A1 refers to the range within which the projector 31 can project a clear video. The projection area A1 has a size corresponding to the projection distance indicating the distance between the projection target and the projector 31 in the plane direction orthogonal to the projection direction. Also, the projection area A1 has a depth corresponding to the depth of field of the projector 31 in the projection direction.

[0021] The projector 31 is configured to be able to adjust the distance to the object to be exposed in order to change the resolution of the objects included in the video projected onto the object to be exposed 11 and the intensity of the active energy rays. For example, the projector 31 is configured to be movable in the vertical direction.

[0022] The playback device 32 plays back the video projected by the projector 31. The playback device 32 is, for example, a computer terminal including a control unit such as a CPU, a storage unit such as a non-volatile memory, and an input unit for receiving input from an operator.

[0023] The exposure device 10 includes a detection unit 40 and a calculation unit 50. The detection unit 40 includes a first detection unit 41 and a second detection unit 42. The first detection unit 41 and the second detection unit 42 are sensors capable of detecting active energy rays respectively. When the first detection unit 41 and the second detection unit 42 detect active energy rays, they output a signal for notifying the calculation unit 50 that the active energy rays have been detected.

[0024] Note that when the vertical position of the projector 31 changes, the position (range) of the projection area A1 also changes accordingly. Therefore, the first detection unit 41 and the second detection unit 42 are installed so as to be located within the projection area A1 even when the projector 31 approaches the object to be exposed 11. The first detection unit 41 and the second detection unit 42 are arranged within the projection area A1 so as to be symmetric with respect to a virtual plane that is orthogonal to the conveyance direction D1 and located at the center of the projection area A1 in the conveyance direction D1, with the virtual plane serving as the plane of symmetry.

[0025] The arithmetic unit 50 is a programmable logic controller (PLC) including, for example, a control unit such as a CPU, a storage unit such as a non-volatile memory, and a signal input unit that receives inputs from the detection unit 40. Details of the operation of the arithmetic unit 50 will be described later.

[0026] As shown in FIG. 2, the first detection unit 41 and the second detection unit 42 are arranged at different positions in the conveyance direction D1 within the projection area A1. That is, the first detection unit 41 and the second detection unit 42 are arranged along the conveyance direction D1 in the projection area A1. In FIG. 2, for convenience, the object to be exposed 11 is not shown.

[0027] The first detection unit 41 and the second detection unit 42 are arranged within the projection area A1 such that a predetermined distance L1 is provided in the conveyance direction D1 so as to be arranged along the conveyance direction D1 within the projection area A1. In the storage unit of the arithmetic unit 50, for example, the distance L1 between the first detection unit 41 and the second detection unit 42 is stored.

[0028] [Exposure Method] With reference to FIG. 3, an exposure method using the exposure apparatus 10 will be described. As shown in FIG. 3, in the exposure method using the exposure apparatus 10, when the object to be exposed 11 passes through the projection area A1, while the object to be exposed 11 is conveyed at a specific conveyance speed, an exposure moving image including the pattern object PO1 is projected onto the object to be exposed 11.

[0029] That is, the projector 31 projects an exposure video including the pattern object PO1 onto the photosensitive film 13 of the object to be exposed 11 passing through the projection area A1 among the objects to be exposed 11 conveyed by the conveyance unit 20. In FIG. 3, the pattern object PO1 is shown as a dot pattern of 3 columns in the horizontal direction and 5 columns in the vertical direction, but the shape of the pattern object PO1 can adopt any form.

[0030] The exposure video is stored in the storage unit of the playback device 32. In the exposure video, as indicated by the arrow X1 in FIG. 3, the pattern object PO1 moves within the projection area A1 along the conveyance direction D1. In the exposure video, by continuously projecting a plurality of images in which the position of the pattern object PO1 gradually moves along the conveyance direction D1, the pattern object PO1 moves in the conveyance direction D1 at a predetermined exposure setting speed V P1 is set.

[0031] The exposure setting speed V P1 is defined by the moving speed of the pattern object PO1 set on the video file of the exposure video and the playback speed of the exposure video. The moving speed of the pattern object PO1 set on the video file of the exposure video is defined, for example, by the number of frames required to move a unit distance within the image. The playback speed of the exposure video is defined, for example, by the number of frames projected per second. The playback device 32 can adjust at least one of the moving speed of the pattern object PO1 set on the video file of the exposure video and the playback speed of the exposure video, so that the exposure setting speed V P1 can be adjusted.

[0032] In the exposure apparatus 10, the actual moving speed V P2 of the pattern object PO1 projected onto the object to be exposed 11 and the conveyance speed of the object to be exposed 11 are synchronized at the same speed, and the conveyance speed of the object to be exposed 11 and the exposure setting speed V P1 in the exposure video are set by the method described later.

[0033] The actual moving speed V of the pattern object PO1 projected onto the object to be exposed 11 P2 By synchronizing the actual moving speed V of the pattern object PO1 projected onto the object to be exposed 11 with the conveyance speed of the object to be exposed 11, the pattern object PO1 is projected so as to follow (travel side by side with) the object to be exposed 11 moving within the projection area A1. As a result, while conveying the object to be exposed 11, it is possible to secure the integrated light amount necessary for patterning the photosensitive film 13.

[0034] [Speed synchronization method] For example, even when projecting the same exposure video, the actual moving speed V of the projected pattern object PO1 P2 varies according to the distance between the object to be exposed 11 and the projector 31. Therefore, in the exposure apparatus 10, when the distance between the object to be exposed 11 and the projector 31 is changed, the conveyance speed of the object to be exposed 11 by the conveyance unit 20 and the actual moving speed V of the projected pattern object PO1 P2 need to be synchronized.

[0035] With reference to FIGS. 4 and 5, a speed synchronization method for synchronizing the conveyance speed of the object to be exposed 11 by the conveyance unit 20 and the actual moving speed V of the projected pattern object PO1 P2 will be described. The following speed synchronization method is executed, for example, before starting the conveyance of the object to be exposed 11 by the conveyance unit 20.

[0036] FIG. 4 is a top view of the projection area A1 in which the first detection unit 41 and the second detection unit 42 are arranged. As shown in FIG. 4, when synchronizing the conveyance speed of the object to be exposed 11 by the conveyance unit 20 and the actual moving speed V of the pattern object PO1 P2 first, the projection unit 30 projects a test video including the test object TO1 onto the projection area A1.

[0037] The test video is stored in the storage unit of the playback device 32. In the test video, as indicated by the arrow X2 in FIG. 4, the test object TO1 moves within the projection area A1 along the conveyance direction D1. In the test video, by continuously projecting a plurality of images in which the position of the test object TO1 gradually moves along the conveyance direction D1, the test object TO1 is set to move in the conveyance direction D1 at a predetermined test setting speed V T1 is set. The test object TO1 has, as an example, a linear shape orthogonal to the conveyance direction D1.

[0038] The test setting speed V T1 is defined by the moving speed of the test object TO1 set on the video file of the test video and the playback speed of the test video. The moving speed of the test object TO1 set on the video file of the test video is defined by the number of frames required to move a unit distance within the image. The playback speed of the test video is defined by the number of frames projected per second. The playback device 32 can adjust the test setting speed V T1 by adjusting at least one of the parameters of the moving speed of the test object TO1 set on the video file of the test video and the playback speed of the test video.

[0039] The projection unit 30 projects the test video onto the projection area A1 so that at least the test object TO1 passes through the first detection unit 41 and the second detection unit 42. For example, the projection unit 30 may move the test object TO1 from one end (the left end in FIG. 3) to the other end (the right end in FIG. 3) of the projection area A1 along the conveyance direction D1.

[0040] In each of the first detection unit 41 and the second detection unit 42, the test object TO1 passes through at different timings. The first detection unit 41 and the second detection unit 42 output a signal indicating that the active energy ray has been detected to the arithmetic unit 50 at the timing when the test object TO1 has passed through.

[0041] As shown in FIG. 5, in graph 100, waveform 101 represents the change over time in the intensity of the active energy rays detected by the first detection unit 41 when a test video including the test object TO1 is projected onto the projection area A1. Waveform 102 represents the change over time in the intensity of the signal output from the first detection unit 41 to the arithmetic unit 50 when the test video is projected onto the projection area A1. Similarly, waveform 103 represents the change over time in the intensity of the active energy rays detected by the second detection unit 42 when the test video is projected onto the projection area A1. Waveform 104 represents the change over time in the intensity of the signal output from the second detection unit 42 to the arithmetic unit 50 when the test video is projected onto the projection area A1.

[0042] As represented by waveform 101 and waveform 103, the first detection unit 41 and the second detection unit 42 detect active energy rays at different timings. Specifically, when a test video including the test object TO1 is projected onto the projection area A1, first, after the first detection unit 41 detects the active energy rays, the second detection unit 42 detects the active energy rays.

[0043] As represented by waveform 102 and waveform 104, when the first detection unit 41 and the second detection unit 42 detect active energy rays having a predetermined intensity or more, they output a signal to the arithmetic unit 50. Specifically, first, at time T1, after the first detection unit 41 outputs a signal to the arithmetic unit 50, at time T2, the second detection unit 42 outputs a signal to the arithmetic unit 50.

[0044] The arithmetic unit 50 calculates the time difference ΔT between the time T1 when the peak rises in waveform 102 and the time T2 when the peak rises in waveform 104. Based on the time difference ΔT and the distance L1 between the first detection unit 41 and the second detection unit 42 stored in the storage unit, the arithmetic unit 50 determines the actual moving speed V T2 of the projected test object TO1 in the test video.

[0045] In the exposure apparatus 10, the actual moving speed V T2Based on this, the conveyance speed of the object to be exposed 11 by the conveyance unit 20 and the actual movement speed V of the pattern object PO1 projected onto the object to be exposed 11 are synchronized. Specifically, based on the actual movement speed V of the test object TO1 calculated by the arithmetic unit 50, the conveyance speed of the object to be exposed 11 by the conveyance unit 20 and the exposure setting speed V in the exposure video are set by the following first synchronization method or second synchronization method. P2 And. T2 Based on this, the conveyance speed of the object to be exposed 11 by the conveyance unit 20 and the exposure setting speed V in the exposure video are set by the following first synchronization method or second synchronization method. P1 And.

[0046] Note that under the condition that the distance between the object to be exposed 11 and the projector 31 is constant, the ratio of the test setting speed V to the exposure setting speed V is equal to the ratio of the actual movement speed V of the pattern object PO1 to the actual movement speed V of the test object TO1. That is, V / V = V / V holds. For example, under the condition that the distance between the object to be exposed 11 and the projector 31 is constant and the exposure setting speed V and the test setting speed V are made equal, the actual movement speed V of the pattern object PO1 and the actual movement speed V of the test object TO1 become equal. P1 For the test setting speed V with respect to T1 The ratio of the actual movement speed V of the pattern object PO1 to P2 The actual movement speed V of the test object TO1 with respect to T2 Is equal to. That is, V T1 / V P1 =V T2 / V P2 Holds. For example, when the distance between the object to be exposed 11 and the projector 31 is constant and the exposure setting speed V P1 And the test setting speed V T1 Are made equal, the actual movement speed V of the pattern object PO1 P2 And the actual movement speed V of the test object TO1 T2 Become equal.

[0047] Hereinafter, the first synchronization method will be described. In the first synchronization method, first, the exposure setting speed V of the pattern object PO1 in the exposure video is made equal to the test setting speed V of the test object TO1 in the test video. As a result, the actual movement speed V of the pattern object PO1 projected onto the object to be exposed 11 becomes equal to the actual movement speed V of the test object TO1 calculated by the arithmetic unit 50. P1 For the test setting speed V of the test object TO1 in the test video T1 And. P2 The actual movement speed V of the pattern object PO1 projected onto the object to be exposed 11 T2 Is equal to the actual movement speed V of the test object TO1 calculated by the arithmetic unit 50.

[0048] Then, the transport unit 20 transports the object to be exposed 11 so that the transport speed of the object to be exposed 11 matches the actual movement speed V of the test object TO1 calculated by the calculation unit 50. As a result, the transport speed of the object to be exposed 11 by the transport unit 20 and the actual movement speed V of the pattern object PO1 projected onto the object to be exposed 11 T2 are synchronized with the actual movement speed V of the test object TO1 calculated by the calculation unit 50. P2 T2

[0049] In the first synchronization method, the setting of the transport speed of the object to be exposed 11 by the transport unit 20 and the exposure setting speed V of the pattern object PO1 in the exposure video P1 may be performed by an operator or may be executed by the processing of the calculation unit 50. In the latter case, the calculation unit 50 functions as a speed adjustment unit that synchronizes the transport speed and the actual movement speed V of the pattern object PO1 based on the actual movement speed V of the test object TO1 calculated by the calculation unit 50. T2 P2

[0050] The calculation unit 50 as the speed adjustment unit is communicably connected to, for example, the transport control device 21 and the playback device 32. The calculation unit 50 executes a process of transmitting a command to make the transport speed of the object to be exposed 11 by the transport unit 20 equal to the actual movement speed V of the test object TO1 calculated by the calculation unit 50 to the transport control device 21. Then, the calculation unit 50 executes a process of transmitting a command to make the exposure setting speed V of the pattern object PO1 in the exposure video equal to the test setting speed V of the test object TO1 in the test video to the playback device 32. The playback device 32 adjusts at least one of the movement speed of the pattern object PO1 set on the video file of the exposure video and the playback speed of the exposure video to make the exposure setting speed V P2 P1 equal to the test setting speed V of the test video. T1 P1 T1

[0051] ​​​​​​​​Also, in the first synchronization method, the test setting speed V of the test object TO1 in the test video is set in advance. T1 It may be set to be equal to the exposure setting speed V of the pattern object PO1 in the exposure video. P1 In this case, the operation (process) of matching the conveyance speed of the object to be exposed 11 by the conveyance unit 20 with the actual moving speed V of the test object TO1 calculated by the arithmetic unit 50 can synchronize the conveyance speed with the actual moving speed V of the pattern object PO1. T2 P2

[0052] Hereinafter, the second synchronization method will be described. In the second synchronization method, the conveyance speed of the object to be exposed 11 by the conveyance unit 20 can be set to an arbitrary speed V. F In the second synchronization method, first, the ratio of the conveyance speed (here, speed V) to the actual moving speed V of the test object TO1 calculated by the arithmetic unit 50 is calculated. T2 F F / V T2 And the value obtained by multiplying the calculated ratio value (V T1 / V F / V T2 ) by the test setting speed V in the test video is set as the exposure setting speed V in the exposure video. P1 =V T1 ×(V F / V T2 ) This allows the actual moving speed V of the pattern object PO1 to be adjusted according to the conveyance speed of the object to be exposed 11 by the conveyance unit 20. P2

[0053] P1 In the second synchronization method, the setting of the exposure setting speed V of the pattern object PO1 in the exposure video may be performed by an operator or may be executed by the processing of the arithmetic unit 50. In the latter case, similar to the first synchronization method, the arithmetic unit 50 functions as a speed adjustment unit.

[0054] ​​​​​​The arithmetic unit 50 as a speed adjustment unit is communicably connected to, for example, the conveyance control device 21 and the reproduction device 32. The arithmetic unit 50 executes a process of acquiring the conveyance speed of the object to be exposed 11 by the conveyance unit 20 from the conveyance control device 21. Then, the arithmetic unit 50 sets the exposure setting speed V of the pattern object PO1 in the exposure video P1 to the value of V T1 ×(V F / V T2 ) calculated by the above procedure, and executes a process of transmitting a command to the reproduction device 32. The reproduction device 32 adjusts at least one of the moving speed of the pattern object PO1 set on the video file of the exposure video and the reproduction speed of the exposure video, so that the exposure setting speed V P1 is set to the value of V T1 ×(V F / V T2 ) calculated by the above procedure.

[0055] [Effects of the Embodiment] (1) In the exposure apparatus 10, based on the actual moving speed V of the test object TO1 calculated by the arithmetic unit 50, the conveyance speed of the object to be exposed 11 by the conveyance unit 20 and the actual moving speed V of the pattern object PO1 T2 are synchronized with a specific speed. Thereby, compared with the conventional visual speed synchronization, the conveyance speed of the object to be exposed 11 and the actual moving speed V of the projected pattern object PO1 P2 can be synchronized more accurately. P2 (2) Since the test object TO1 has a linear shape orthogonal to the conveyance direction D1, when the test video is projected onto the projection area A1, the first detection unit 41 and the second detection unit 42 are surely located on the moving path of the test object TO1. Therefore, the detection of the active energy rays by the first detection unit 41 and the second detection unit 42 can be performed more surely.

[0056] (3) In the first synchronization method, the exposure setting speed V

[0057] is set to the test setting speed V P1 to the test setting speed V T1Set it equal to, and set the conveyance speed of the object to be exposed 11 by the conveyance unit 20 to the actual movement speed V of the test object TO1 calculated by the calculation unit 50 T2 to match. Thereby, the conveyance speed of the object to be exposed 11 by the conveyance unit 20 and the actual movement speed V of the pattern object PO1 P2 can be synchronized. In this case, by setting the test setting speed V T1 in advance to the same speed as the exposure setting speed V P1 , the synchronization can be completed only by the process of matching the conveyance speed of the object to be exposed 11 by the conveyance unit 20 with the actual movement speed V of the test object TO1 calculated by the calculation unit 50 T2 .

[0058] (4) In the second synchronization method, when the conveyance speed is V F , the exposure setting speed V P1 is set to the value obtained by multiplying the ratio of the conveyance speed (V T1 ) to the actual movement speed V of the test object TO1 calculated by the calculation unit 50 with respect to the test setting speed V T2 . That is, the exposure setting speed V F is expressed as V T2 = V P1 × (V P1 / V T1 ). In the second synchronization method, while setting the conveyance speed to an arbitrary speed V F , the conveyance speed of the object to be exposed 11 by the conveyance unit 20 and the actual movement speed V of the pattern object PO1 T2 can be synchronized to an arbitrary speed V F . P2 F

[0059] (5) In the exposure apparatus 10, by the calculation unit 50 functioning as a speed adjustment unit, the process of synchronizing the conveyance speed of the object to be exposed 11 by the conveyance unit 20 and the actual movement speed V of the pattern object PO1 P2 can be automated.

[0060] [Modification Example] ​​Note that the above-described embodiment can be implemented with the following modifications. Also, each modification example can be combined within a technically non-conflicting range.

[0061] · The shape of the test object TO1 is not limited to a linear shape. When a test video is projected onto the projection area A1 and the test object TO1 is moved along the conveyance direction D1, it may have any shape that allows it to pass through the first detection unit 41 and the second detection unit 42. For example, the test object TO1 may adopt the same shape as the pattern object PO1, or the exposure video may be used as the test video.

[0062] · The conveyance unit 20 is not limited to the form of conveying the object to be exposed 11 by a roll-to-roll method. For example, the conveyance unit 20 may include a moving stage for conveying the object to be exposed 11. In this case, the object to be exposed 11 may have any form other than a sheet form.

[0063] · The detection unit 40 only needs to include the first detection unit 41 and the second detection unit 42 arranged at different positions in the conveyance direction D1 within at least the projection area A1, and may further include other detection units. In this case, the detection accuracy of the active energy ray can be further improved.

[0064] · In the conveyance path of the conveyance unit 20, devices for other processes may be arranged upstream or downstream of the projection unit 30. For example, a device for forming the photosensitive film 13 may be provided upstream of the projection unit 30. For example, a device for developing the photosensitive film 13 may be provided downstream of the projection unit 30. In such a configuration, there may be cases where the adjustable range of the conveyance speed is limited by processes other than the exposure process. Even in this case, with the above-described second synchronization method, the actual moving speed V of the pattern object PO1 can be synchronized with any conveyance speed. P2 can be synchronized.

[0065] · The photosensitive material constituting the photosensitive film 13 may contain, for example, components applicable to an emulsion transformation type patterning technique (ET method: Emulsion Transforming Method for Patterning) that uses self-organization of an emulsion for patterning. The photosensitive material applicable to the ET method is, for example, an emulsion containing dispersed particles including a first liquid that cures upon irradiation with an active energy ray such as ultraviolet rays or electron beams, and a dispersion medium containing a second liquid that does not cure upon irradiation with an active energy ray.

[0066] Note that the ET method includes the following first to fourth steps as basic steps. In the first step, a film-shaped photosensitive film 13 made of the above emulsion is formed on the base material 12. In the second step, the first liquid present in the region irradiated with the active energy ray is cured by irradiating the photosensitive film 13 with the active energy ray in a pattern. In the third step, at least a part of the second liquid is removed from the photosensitive film 13 after irradiation with the active energy ray. In the fourth step, the uncured first liquid contained in the photosensitive film 13 from which at least a part of the second liquid has been removed is cured.

Explanation of Signs

[0067] A1…Projection area D1…Transport direction L1…Distance PO1…Pattern object TO1…Test object 10…Exposure device 11…Object to be exposed 12…Base material 13…Photosensitive film 20…Transport unit 30…Projection unit 40…Detection unit 41…First detection unit 42…Second detection unit 50…Calculation unit

Claims

1. A projection unit that projects a video onto a projection area using active energy rays, A transport unit that transports the object to be exposed along a specific transport direction so that the object to be exposed passes through the projection area, A first detection unit and a second detection unit that detect the active energy rays and are arranged at different positions from each other in the transport direction within the projection area, When a test video in which a test object moves at a test setting speed in the transport direction is projected onto the projection area, the time difference when each of the first detection unit and the second detection unit detects the active energy rays, and the distance between the first detection unit and the second detection unit in the transport direction, and based on these, a calculation unit that calculates the moving speed at which the projected test object actually moves through the projection area, While transporting the object to be exposed, when projecting an exposure video in which a pattern object moves at an exposure setting speed in the transport direction onto the object to be exposed, the transport speed of the object to be exposed and the actual moving speed at which the pattern object projected onto the object to be exposed moves in the transport direction are synchronized based on the moving speed calculated by the calculation unit An exposure apparatus.

2. The test object has a linear shape orthogonal to the transport direction The exposure apparatus according to claim 1.

3. The exposure setting speed in the exposure video is equal to the test setting speed in the test video, The transport unit transports the object to be exposed so that the transport speed and the moving speed calculated by the calculation unit match The exposure apparatus according to claim 1 or 2.

4. The transport speed of the transport unit is set to an arbitrary speed, The exposure setting speed in the exposure video is set to a value obtained by multiplying the test setting speed in the test video by the ratio of the transport speed to the moving speed calculated by the calculation unit The exposure apparatus according to claim 1 or 2.

5. An exposure method in which, when a light-exposed object conveyed along a specific conveyance direction passes through a projection area of a projection unit that projects a moving image using active energy rays, while conveying the light-exposed object at a specific conveyance speed, a moving image for exposure in which a pattern object moves in the conveyance direction with respect to the light-exposed object is projected onto the light-exposed object, When a test video in which a test object moves at a test setting speed in the conveyance direction is projected onto the projection area, based on a time difference when each of a first detection unit and a second detection unit arranged at different positions from each other in the conveyance direction within the projection area detects the active energy rays, and a distance between the first detection unit and the second detection unit in the conveyance direction, a moving speed at which the projected test object actually moves through the projection area is calculated. Based on the calculated moving speed, the conveyance speed for conveying the light-exposed object and an actual moving speed at which the pattern object projected onto the light-exposed object moves in the conveyance direction are synchronized. Exposure method.

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