Inspection device

Abstract

To shorten an inspection time for flaws on an inspection target.SOLUTION: An inspection device includes: a deformable member that has an outer surface facing an inspection target and is configured to expand or contract in a direction facing the inspection target; and a flaw detection unit that is provided on the outer surface of the deformable member and includes at least one flaw detection sensor.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present disclosure relates to an inspection apparatus.

Background Art

[0002] Conventionally, a method for inspecting a flaw formed in an object to be inspected, called the magnetic flux leakage inspection method, is known. For example, Patent Document 1 discloses an inspection apparatus that inspects a flaw in an object to be inspected by applying a magnetic field from a magnetic flux leakage inspection probe and detecting a reaction magnetic field from the object to be inspected. The inspection apparatus described in Patent Document 1 is configured to be able to inspect a flaw in an object to be inspected having a curved surface shape. Specifically, the inspection apparatus described in Patent Document 1 reduces the gap generated between the curved surface of the object to be inspected and the magnetic flux leakage inspection probe, and thus miniaturizes the magnetic flux leakage inspection probe and includes a driving device capable of freely changing the position and orientation of the magnetic flux leakage inspection probe.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, when the magnetic flux leakage inspection probe is miniaturized, there is a problem that the inspection range of the flaw in the object to be inspected becomes small, resulting in an extremely long inspection time.

[0005] An object of the present disclosure is to provide an inspection apparatus capable of shortening the inspection time for a flaw in an object to be inspected.

Means for Solving the Problems

[0006] In order to solve the above problems, the inspection apparatus of the present disclosure includes a deformable member having an outer surface facing an object to be inspected and configured to expand or contract in a direction facing the object to be inspected, and a flaw detection unit provided on the outer surface of the deformable member and including at least one flaw detection sensor.

[0007] The flaw detection unit may include a first flaw detection unit and a second flaw detection unit, and may include a stretchable member provided between the first flaw detection unit and the second flaw detection unit.

[0008] The flaw detection sensor may include linear conductive members arranged in parallel.

[0009] An annular member provided on the outer surface of the deformable member may be provided, and a part of the annular member may be a flaw detection unit, and the other part of the annular member may be a stretchable member that can expand and contract only in the circumferential direction of the annular member.

[0010] The flaw detection unit may be formed in a strip shape, and the inner surface of the flaw detection unit may be in contact with the outer surface of the deformable member in a spiral shape.

[0011] Parts of the flaw detection unit other than the flaw detection sensor may be made of a material having flexibility and stretchability.

[0012] A wear-resistant protective member may be provided on the outer surface of the flaw detection unit facing the object to be inspected.

Advantages of the Invention

[0013] According to the present disclosure, the inspection time for flaws in the object to be inspected can be shortened.

Brief Description of the Drawings

[0014]

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[0015] Embodiments of the present disclosure will be described below with reference to the accompanying drawings. The dimensions, materials, and other specific numerical values shown in the embodiments are merely examples for easy understanding and do not limit the present disclosure unless otherwise specified. In the present specification and drawings, elements having substantially the same function and configuration are denoted by the same reference numerals to omit redundant description, and elements not directly related to the present disclosure are not shown.

[0016] FIG. 1 is a schematic configuration diagram of an inspection apparatus 100 according to the first embodiment. As shown in FIG. 1, the inspection apparatus 100 includes a flaw detection probe 200, a supply source 300, and a control device 400. The inspection apparatus 100 is an apparatus for inspecting flaws in an inspection object T. The inspection object T is configured, for example, in a cylindrical shape. In FIG. 1, the inspection object T has a cylindrical shape and shows the shape of a cross section including a central axis C. Further, the flaw detection probe 200 shows the shape of a side surface in a state of being inserted into the inspection object T. Hereinafter, an example of the shape of the inspection object T will be described.

[0017] FIGS. 2A to 2H are schematic external views for explaining an example of the cylindrical inspection object T. The inspection object T in the examples shown in FIGS. 2A to 2D is configured in a cylindrical shape. The inspection object T in the examples shown in FIGS. 2E to 2H is configured in a rectangular tube shape.

[0018] Figure 2A is a first schematic external view of an inspection object T configured in a cylindrical shape with a constant outer diameter and inner diameter in the central axis direction. The size of the inner diameter of the inspection object T shown in Figure 2A is the same as the size of the outer diameter of the flaw detection probe 200 in the reference state. Here, the reference state is an initial state before the flaw detection probe 200 expands or contracts, as will be described in detail later. Note that the size of the inner diameter of the inspection object T being the same as the size of the outer diameter of the flaw detection probe 200 in the reference state includes both the case where they are exactly the same and the case where there is only a clearance for the flaw detection probe 200 to move inside the cylindrical inspection object T.

[0019] Figure 2B is a second schematic external view of an inspection object T configured in a cylindrical shape with a constant outer diameter and inner diameter in the central axis direction. The size of the inner diameter of the inspection object T shown in Figure 2B is larger than the size of the outer diameter of the flaw detection probe 200 in the reference state. Therefore, the inner diameter of the inspection object T is larger than the inner diameter of the inspection object T in Figure 2A.

[0020] Figure 2C is a first schematic external view of an inspection object T configured in a cylindrical shape with an outer diameter and an inner diameter that vary depending on the position in the central axis direction. The size of the inner diameter of the inspection object T shown in Figure 2C gradually increases or decreases in the direction of the central axis C. The size of the inner diameter of one end of the inspection object T shown in Figure 2C is the same as the size of the outer diameter of the flaw detection probe 200 in the reference state. On the other hand, the size of the inner diameter of the other end of the inspection object T shown in Figure 2C is larger than, or smaller than, the size of the outer diameter of the flaw detection probe 200 in the reference state.

[0021] Figure 2D is a second schematic external view of an inspection object T configured in a cylindrical shape with an outer diameter and an inner diameter that vary depending on the position in the central axis direction. The size of the inner diameter of one end of the inspection object T shown in Figure 2D is the same as the inner diameter of the other end. Also, the size of the inner diameter of the central part between one end and the other end of the inspection object T is smaller than the size of the inner diameters of one end and the other end. Specifically, the size of the inner diameter of the inspection object T shown in Figure 2D gradually decreases from one end to the central part of the inspection object T in the direction of the central axis C, and gradually increases from the central part to the other end.

[0022] The inner diameters of one end and the other end of the object under inspection T shown in FIG. 2D are the same as the outer diameter of the flaw detection probe 200 in the reference state, and the inner diameter of the central portion of the object under inspection T is smaller than the outer diameter of the flaw detection probe 200 in the reference state. Alternatively, the inner diameters of one end and the other end of the object under inspection T shown in FIG. 2D are larger than the outer diameter of the flaw detection probe 200 in the reference state, and the inner diameter of the central portion of the object under inspection T is the same as the outer diameter of the flaw detection probe 200 in the reference state. The shape of the object under inspection T shown in FIG. 2D is symmetric with respect to the central portion, with the shape on one end side and the shape on the other end side being symmetric. However, it is not limited to this, and the shape of the object under inspection T may be, for example, asymmetric with respect to the central portion, with the shape on one end side and the shape on the other end side being asymmetric.

[0023] FIG. 2E is a first schematic external view of the object under inspection T having an outer shape configured as a rectangular tube shape with a constant cross-section in the central axis direction. In FIG. 2E, arrow H indicates the height direction, and arrow W indicates the width direction. In the case of the rectangular tube-shaped object under inspection T, the central axis of the rectangular tube is an axis passing through the area center, which is the geometric center in the cross-section of the inner peripheral surface of the rectangular tube. The width and height of the inner surface of the object under inspection T shown in FIG. 2E are constant in the central axis direction and are the same as the width and height of the outer surface of the flaw detection probe 200 in the reference state.

[0024] FIG. 2F is a second schematic external view of the object under inspection T having an outer shape configured as a rectangular tube shape that varies depending on the position in the central axis direction. In FIG. 2F, arrow H indicates the height direction, and arrow W indicates the width direction. The height of the inner surface of the object under inspection T shown in FIG. 2F is constant in the central axis C direction, and the width of the inner surface of the object under inspection T increases or decreases gradually in the central axis direction.

[0025] Specifically, the width and height of the inner surface at one end of the object T to be inspected shown in Fig. 2F are the same as the width and height of the outer surface of the flaw detection probe 200 in its reference state. On the other hand, the height of the inner surface at the other end of the object T to be inspected shown in Fig. 2F is the same as the height of the outer surface of the flaw detection probe 200 in its reference state, and the width of the inner surface at the other end of the object T to be inspected is larger or smaller than the width of the outer surface of the flaw detection probe 200 in its reference state.

[0026] Fig. 2G is a first schematic external view of the object T to be inspected configured in a rectangular tube shape whose outer width and height vary depending on the position in the central axis direction. In Fig. 2G, the arrow H indicates the height direction, and the arrow W indicates the width direction. The width and height of the inner surface of the object T to be inspected shown in Fig. 2G increase or decrease gradually in the central axis direction. The width of the inner surface at one end of the object T to be inspected shown in Fig. 2G is larger than the height. Also, the width of the inner surface at the other end of the object T to be inspected shown in Fig. 2G is smaller than the height.

[0027] Specifically, the width of the inner surface at one end of the object T to be inspected shown in Fig. 2G is the same as the height of the inner surface at the other end. Also, the height of the inner surface at one end of the object T to be inspected shown in Fig. 2G is the same as the width of the inner surface at the other end. Also, the width and height of the inner surface at one end of the object T to be inspected shown in Fig. 2G are the same as the width and height of the outer surface of the flaw detection probe 200 in its reference state.

[0028] Fig. 2H is a second schematic external view of the object T to be inspected configured in a rectangular tube shape whose outer width and height vary depending on the position in the central axis direction. In Fig. 2H, the arrow H indicates the height direction, and the arrow W indicates the width direction. The width and height of the inner surface of the object T to be inspected shown in Fig. 2H increase or decrease gradually in the central axis C direction. The width of the inner surface at one end of the object T to be inspected shown in Fig. 2H is larger than the height. Also, the width of the inner surface at the other end of the object T to be inspected shown in Fig. 2H is smaller than the height.

[0029] Specifically, the height of the inner surface at one end of the object under inspection T shown in FIG. 2H is the same as the width of the inner surface at the other end. However, the width of the inner surface at one end of the object under inspection T shown in FIG. 2H is greater than or smaller than the height of the inner surface at the other end. Also, the width and height of the inner surface at one end of the object under inspection T shown in FIG. 2H are the same as the width and height of the outer surface in the reference state of the flaw detection probe 200.

[0030] FIG. 3 is a schematic cross-sectional view of the flaw detection probe 200 according to the first embodiment. The shape of the flaw detection probe 200 shown in FIG. 3 shows the shape of the flaw detection probe 200 in the reference state. That is, in the example shown in FIG. 3, the inner diameter of the inner peripheral surface TS of the object under inspection T is larger than the outer diameter of the flaw detection probe 200 in the reference state. As shown in FIG. 3, the flaw detection probe 200 is inserted inside the inner peripheral surface TS of the object under inspection T in order to inspect the flaw of the object under inspection T.

[0031] The flaw detection probe 200 includes a deformation member 210, an annular member 220, and a protection member 230. The deformation member 210 is configured such that its outer shape can be deformed according to the shape of the inner peripheral surface TS of the object under inspection T. Specifically, the deformation member 210 is formed of a bag body that can enclose a medium having fluidity such as gas or liquid inside. The deformation member 210 in the first embodiment is formed of an inflatable body that can be inflated, for example, like a balloon, by introducing air as a medium inside.

[0032] The deformation member 210 is configured to be able to expand or contract in the direction facing the inner peripheral surface TS of the object under inspection T by introducing air inside or discharging the air inside. By the deformation member 210 expanding in the direction facing the inner peripheral surface TS of the object under inspection T, the outer shape of the flaw detection probe 200 can be deformed into a shape that fits the inner peripheral surface TS of the object under inspection T.

[0033] However, without being limited thereto, the deformable member 210 may be a shrinkable body such as a sponge. In that case, by shrinking the deformable member 210 in the direction facing the inner peripheral surface TS of the inspection object T, the outer shape of the flaw detection probe 200 can be deformed into a shape that fits the inner peripheral surface TS of the inspection object T.

[0034] The deformable member 210 has an outer surface 210a facing the inner peripheral surface TS of the inspection object T. The cross-sectional shape of the outer surface 210a of the deformable member 210 orthogonal to the central axis C is formed in accordance with the cross-sectional shape of the inner peripheral surface TS of the inspection object T orthogonal to the central axis C. For example, when the cross-sectional shape of the inner peripheral surface TS of the inspection object T is circular, the cross-sectional shape of the outer surface 210a of the deformable member 210 is formed in a circular shape. Also, when the cross-sectional shape of the inner peripheral surface TS of the inspection object T is rectangular, the cross-sectional shape of the outer surface 210a of the deformable member 210 is formed in a rectangular shape. However, without being limited thereto, the cross-sectional shape of the outer surface 210a of the deformable member 210 may not be formed in accordance with the cross-sectional shape of the inner peripheral surface TS of the inspection object T. For example, when the cross-sectional shape of the inner peripheral surface TS of the inspection object T is rectangular, the cross-sectional shape of the outer surface 210a of the deformable member 210 may be formed in a circular shape. The annular member 220 is provided on the outer surface 210a of the deformable member 210. The annular member 220 has a flaw detection unit 222 and a telescopic member 224.

[0035] FIG. 4 is a schematic configuration diagram of the flaw detection unit 222 according to the first embodiment. In FIG. 4, both ends of the flaw detection unit 222 in the left-right direction are connected to the telescopic member 224. As shown in FIG. 4, the flaw detection unit 222 includes a flexible body 222a and at least one flaw detection sensor 222b.

[0036] The flexible body 222a is made of a material having flexibility and softness without having stretchability. The flexible body 222a is made of a polymer material such as plastic, for example. However, the flexible body 222a may be made of a material having flexibility and softness without having stretchability, and may be made of a material other than a polymer material.

[0037] The flaw detection sensor 222b is an overcurrent flaw detection sensor, for example, a coil. However, the flaw detection sensor 222b is not limited to an overcurrent flaw detection sensor and may be, for example, an ultrasonic flaw detection sensor. A plurality of flaw detection sensors 222b are provided on the flexible body 222a. The size of the flaw detection sensor 222b is, for example, 1 mm in diameter. However, it is not limited thereto, and the size of the flaw detection sensor 222b may be smaller than 1 mm in diameter or larger than 1 mm in diameter. Since the flexible body 222a does not have elasticity, the distance between the flaw detection sensors 222b can be kept constant when the flexible body 222a is deformed.

[0038] Returning to FIG. 3, a part of the circumferential direction of the annular member 220 is constituted by the flaw detection unit 222. What is shown in FIG. 4 as the flaw detection unit 222 deformed into an arc shape is represented as the flaw detection unit 222 which is a part of the annular member 220 shown in FIG. 3. Further, the other part of the circumferential direction of the annular member 220 is constituted by the telescopic member 224. The flaw detection unit 222 and the telescopic member 224 are welded, pressure-bonded or adhered in the circumferential direction of the annular member 220. However, the flaw detection unit 222 and the telescopic member 224 only need to be connected in the circumferential direction of the annular member 220 and may be connected by a method other than welding, pressure-bonding or adhesion. Here, the circumferential direction of the deformation member 210 and the annular member 220 is, for example, the circumferential direction of the inner peripheral surface TS of the inspection object T. In other words, the circumferential direction of the deformation member 210 and the annular member 220 is the circumferential direction of the central axis C of the inspection object T. Further, the central axis direction of the deformation member 210 and the annular member 220 is, for example, the central axis C direction of the inspection object T.

[0039] The telescopic member 224 is made of a material having flexibility, softness, and stretchability. The telescopic member 224 is made of an elastic material such as rubber, for example. However, the telescopic member 224 only needs to be made of a material having flexibility, softness, and stretchability, and may be made of a material other than an elastic material. Since the telescopic member 224 has stretchability, it is configured to be stretchable at least in the circumferential direction of the annular member 220. Thereby, when the deformable member 210 is deformed, even if the flaw detection unit 222 does not have stretchability, the annular member 220 can be deformed following the deformation of the deformable member 210.

[0040] The annular member 220 has an outer surface 220a facing the inner peripheral surface TS of the inspection object T. The protective member 230 is provided on the outer surface 220a of the annular member 220. The protective member 230 is disposed between the annular member 220 and the inner peripheral surface TS of the inspection object T. Therefore, the protective member 230 can prevent the annular member 220 and the inner peripheral surface TS of the inspection object T from coming into direct contact, and can suppress wear of the annular member 220.

[0041] As shown in FIG. 1, the protective member 230 extends in a relationship parallel to the central axis C direction of the inspection object T. Further, as shown in FIG. 3, the cross-sectional shape of the protective member 230 is, for example, rectangular. However, it is not limited thereto, and the cross-sectional shape of the protective member 230 may be a semi-circular shape, a semi-elliptical shape, a triangular shape, or the like. A plurality of protective members 230 are provided at intervals from each other in the circumferential direction of the annular member 220. As shown in FIG. 3, the plurality of protective members 230 are provided at equal intervals in the circumferential direction of the annular member 220. However, it is not limited thereto, and the plurality of protective members 230 may be provided at unequal intervals in the circumferential direction of the annular member 220. By providing the protective members 230 at intervals from each other in the circumferential direction of the annular member 220, it is possible to make it difficult to inhibit the expansion and contraction of the telescopic member 224.

[0042] The protective member 230 is made of a wear-resistant material. The protective member 230 is composed of, for example, a polymer material such as plastic or a fiber material such as glass fiber. However, the protective member 230 only needs to be made of a wear-resistant material and may be made of a material other than a polymer material or a fiber material. By having wear resistance, the protective member 230 can protect the flaw detection unit 222 and the telescopic member 224 from wear.

[0043] Returning to FIG. 1, the supply source 300 is connected to the deformation member 210 and supplies a medium to the deformation member 210. In the first embodiment, the supply source 300 is composed of a pump that supplies air as a medium to the inside of the deformation member 210. The control device 400 is electrically connected to the supply source 300 and controls the drive of the supply source 300.

[0044] FIG. 5 is a schematic block diagram of the control device 400 according to the first embodiment. As shown in FIG. 5, the control device 400 includes an I / F 410, a storage device 420, a system bus 430, one or more processors 440, and one or more memories 450. The I / F 410 is an interface for transmitting signals with the pressure sensor S, the supply source 300, and the flaw detection sensor 222b. Here, the pressure sensor S is provided, for example, inside the deformation member 210 and detects the pressure inside the deformation member 210. A signal indicating the pressure detected by the pressure sensor S is transmitted to the control device 400 via the I / F 410.

[0045] The storage device 420 is composed of a RAM, a flash memory, an HDD, etc., and holds various information necessary for the processing of the processor 440. The system bus 430 is a transmission path that electrically connects the I / F 410, the storage device 420, the processor 440, and the memory 450 and transmits data between them.

[0046] The processor 440 includes, for example, a CPU (Central Processing Unit). The memory 450 includes, for example, a ROM (Read Only Memory) and a RAM (Random Access Memory). The ROM is a storage element that stores programs, arithmetic parameters, etc. used by the CPU. The RAM is a storage element that temporarily stores data such as variables and parameters used in the processes executed by the CPU.

[0047] FIG. 6 is a block diagram showing an example of the functional configuration of the control device 400 according to the first embodiment. For example, as shown in FIG. 6, the control device 400 includes a drive control unit 400a and a detection unit 400b.

[0048] Note that various processes performed by the drive control unit 400a and the detection unit 400b can cooperate with a program included in the memory 450 and be executed by the processor 440. Specifically, by the processor 440 executing the program stored in the memory 450, various processes are executed.

[0049] The drive control unit 400a drives and controls the supply source 300 based on the signal of the pressure sensor S, and controls the supply amount of the medium supplied to the deformation member 210. Thereby, the expansion amount or the contraction amount of the deformation member 210 in the direction facing the inner peripheral surface TS of the inspection object T can be controlled. The detection unit 400b detects a defect in the inspection object T based on a change in the current (impedance) generated in the flaw detection sensor 222b.

[0050] Hereinafter, the operation of the inspection device 100 according to the first embodiment will be described in detail. As shown in FIG. 1, in a state where the flaw detection probe 200 is inserted inside the inner peripheral surface TS of the inspection object T, the drive control unit 400a drives the supply source 300 to introduce air, which is a medium, into the deformation member 210.

[0051] When air is introduced into the deformable member 210, the deformable member 210 expands in a direction facing the inner peripheral surface TS of the inspection object T, and as the deformable member 210 expands, the expansion and contraction member 224 extends in the circumferential direction of the annular member 220. Due to the expansion of the deformable member 210, the distance between the flaw detection probe 200 and the inner peripheral surface TS of the inspection object T becomes smaller. Then, the flaw detection unit 222 sandwiched between the expanding deformable member 210 and the inner peripheral surface TS of the inspection object T is pressed by the expansion force of the deformable member 210 and thus adheres closely to the inner peripheral surface TS of the inspection object T.

[0052] FIG. 7 is a schematic configuration diagram of the inspection apparatus 100 in a state where the flaw detection probe 200 is in close contact with the inner peripheral surface TS of the inspection object T. In FIG. 7, the inspection object T has, for example, a cylindrical shape and shows the shape of a cross section including the central axis C. Further, the flaw detection probe 200 shows the shape of a side surface in a state of being inserted into the inspection object T. FIG. 8 is a schematic cross-sectional view of the flaw detection probe 200 in a state of being in close contact with the inner peripheral surface TS of the inspection object T.

[0053] As can be seen by comparing FIG. 3 and FIG. 8, when the deformable member 210 expands, the expandable and contractible expansion and contraction member 224 extends in the circumferential direction of the annular member 220 as the deformable member 210 expands. On the other hand, although the flaw detection unit 222 having no stretchability deforms as the outer surface 210a of the deformable member 210 deforms, it hardly extends in the circumferential direction of the annular member 220.

[0054] Therefore, the circumferential interval of the protective member 230 provided on the outer surface 220a of the flaw detection unit 222 hardly changes in response to the deformation of the deformable member 210. In contrast, the circumferential interval of the protective member 230 provided on the outer surface 220a of the expansion and contraction member 224 changes in response to the deformation of the deformable member 210.

[0055] Specifically, when the deformable member 210 expands, the circumferential interval of the protective member 230 provided on the outer surface 220a of the expansion and contraction member 224 changes so as to increase. On the other hand, when the deformable member 210 contracts, the circumferential interval of the protective member 230 provided on the outer surface 220a of the expansion and contraction member 224 changes so as to decrease.

[0056] Therefore, when the deformation member 210 expands from the reference state of the flaw detection probe 200, the circumferential interval of the protection member 230 provided on the outer surface 220a of the expansion and contraction member 224 becomes larger than the circumferential interval of the protection member 230 provided on the outer surface 220a of the flaw detection unit 222.

[0057] On the other hand, when the deformation member 210 contracts from the reference state of the flaw detection probe 200, the circumferential interval of the protection member 230 provided on the outer surface 220a of the expansion and contraction member 224 becomes smaller than the circumferential interval of the protection member 230 provided on the outer surface 220a of the flaw detection unit 222.

[0058] When the flaw detection probe 200 comes into close contact with the inner peripheral surface TS of the inspection object T, the expansion of the deformation member 210 is restricted by the inner peripheral surface TS of the inspection object T. By restricting the expansion of the deformation member 210, the pressure inside the deformation member 210 increases, and the pressure detected by the pressure sensor S reaches a specified value.

[0059] When the pressure detected by the pressure sensor S reaches the specified value, the drive control unit 400a stops the drive of the supply source 300 and maintains the close contact state between the inner peripheral surface TS of the inspection object T and the flaw detection probe 200. Further, when the pressure detected by the pressure sensor S rises beyond the specified value, the drive control unit 400a controls the supply source 300 to discharge air from the inside of the deformation member 210. Then, the drive control unit 400a performs control to lower the pressure inside the deformation member 210 until the pressure detected by the pressure sensor S reaches the specified value.

[0060] On the other hand, when the pressure detected by the pressure sensor S drops below the specified value, the drive control unit 400a supplies air to the inside of the deformation member 210 by the supply source 300 and performs control to increase the pressure inside the deformation member 210 until the pressure detected by the pressure sensor S reaches the specified value.

[0061] By the way, when the flaw detection probe 200 is miniaturized, the inspection range of the flaw in the inspection object T becomes smaller, so the inspection time becomes extremely long. For example, when the flaw detection probe 200 has a flat inspection surface and the inner peripheral surface TS of the inspection object T has a curved surface, the smaller the flaw detection probe 200 is, the easier it is for the curved inner peripheral surface TS and the flat inspection surface to fit. On the other hand, the smaller the flaw detection probe 200 is, the smaller the inspection surface becomes, so the inspection range becomes smaller and the inspection time becomes longer. On the contrary, the larger the flaw detection probe 200 is, the larger the inspection surface becomes, so the inspection range becomes larger and the inspection time can be shortened. On the other hand, the larger the flaw detection probe 200 is, the more difficult it is for the curved inner peripheral surface TS and the flat inspection surface to fit. That is, the larger the flaw detection probe 200 is, the larger the lift-off, which is the separation distance between the curved inner peripheral surface TS and the flat inspection surface, becomes. The larger the lift-off is, the lower the inspection accuracy of the flaw detection probe 200 becomes.

[0062] Therefore, the flaw detection probe 200 according to the first embodiment fits the flaw detection unit 222 having flexibility and flexibility to the inner peripheral surface TS of the inspection object T by sandwiching and pressing it between the inspection object T and the deformation member 210. In this way, by fitting the flaw detection unit 222 having flexibility and flexibility to the inner peripheral surface TS of the inspection object T, the lift-off from the inner peripheral surface TS of the inspection object T can be reduced. As a result, the inspection accuracy of the flaw detection unit 222 can be improved.

[0063] As shown in FIG. 8, in a state where the deformation member 210 is expanded, the protection member 230 is in contact with the inner peripheral surface TS of the inspection object T. The protection member 230 suppresses the direct contact between the flaw detection unit 222 and the expansion and contraction member 224 and the inner peripheral surface TS of the inspection object T. Thereby, wear of the flaw detection unit 222 and the expansion and contraction member 224 can be suppressed.

[0064] By reducing the thickness of the protection member 230, the lift-off between the flaw detection unit 222 and the inner peripheral surface TS of the inspection object T can be further reduced, and the inspection accuracy of the flaw detection unit 222 can be improved.

[0065] FIG. 9 is a schematic cross-sectional view showing the state of the flaw detection probe 200 for inspecting the flaw of the object T to be inspected. The flaw detection probe 200 may be manually driven in the direction of the central axis C of the object T to be inspected, or may be driven by a driving device (not shown) to move along the direction of the central axis C of the object T to be inspected.

[0066] The object T to be inspected shown in FIG. 9 has a cylindrical shape as shown in FIG. 2C. As shown in FIG. 9, the flaw detection probe 200 is driven along the direction of the central axis C of the object T to be inspected. In the example shown in FIG. 9, the flaw detection probe 200 is driven from the side with the larger inner diameter of the object T to the side with the smaller inner diameter. However, it is not limited thereto, and the flaw detection probe 200 may be driven from the side with the smaller inner diameter of the object T to the side with the larger inner diameter.

[0067] When the flaw detection probe 200 is driven from the side with the larger inner diameter of the object T to the side with the smaller inner diameter, the internal pressure of the deformation member 210 increases as the inner diameter of the object T decreases.

[0068] The drive control unit 400a controls the supply source 300 to discharge the air inside the deformation member 210 in response to the increase in the internal pressure of the deformation member 210. Thereby, the flaw detection probe 200 and the object T to be inspected can be brought into close contact with each other at an appropriate pressure while changing the outer shape of the deformation member 210 according to the change in the inner diameter or the cross-sectional area of the inner peripheral surface TS of the object T to be inspected.

[0069] Also, when the flaw detection probe 200 is inserted inside the inner peripheral surface TS of the inspection object T, the detection unit 400b supplies current to the flaw detection sensor 222b of the flaw detection unit 222. The supply of current to the flaw detection sensor 222b continues even while the flaw detection probe 200 is being driven along the central axis C direction of the inspection object T. At the same time, the detection unit 400b detects a change in the current (impedance) generated in the flaw detection sensor 222b due to a flaw in the inspection object T. By detecting the change in the current (impedance) generated in the flaw detection sensor 222b, the detection unit 400b can detect a flaw on the inner peripheral surface TS of the inspection object T.

[0070] The flaw detection probe 200 is linearly driven along the central axis C direction from one end to the other end of the inspection object T, thereby linearly inspecting a part (for a predetermined angle) of the inner peripheral surface TS of the inspection object T from one end to the other end. Thereafter, the flaw detection probe 200 is arranged such that the inspection range of the flaw detection unit 222 is located in the uninspected range at one end of the inspection object T, and is again linearly driven along the central axis C direction from one end to the other end of the inspection object T. Here, the uninspected range is a different range from the inspected completed range of the inspection object T that has been inspected by the inspection range of the flaw detection unit 222.

[0071] The inspection of the flaw in the inspection object T by the flaw detection probe 200 is repeated until there is no uninspected range in the inspection object T. However, it is not limited to this, and the inspection of the flaw in the inspection object T by the flaw detection probe 200 may be performed only once.

[0072] FIG. 10 is a schematic diagram showing the configuration of a flaw detection probe 200A according to a modified example of the first embodiment. A plurality of protective members 230 (not shown) are provided on the outer surfaces of each of the plurality of annular members 220. Further, the deformable member 210, the plurality of annular members 220, and the plurality of protective members 230 (not shown) are arranged inside the inner peripheral surface TS of an inspection object T (not shown). As shown in FIG. 10, the flaw detection probe 200A has a plurality of annular members 220 and one deformable member 210 inserted inside the plurality of annular members 220. Each annular member 220 includes a flaw detection unit 222 and a telescopic member 224.

[0073] The plurality of annular members 220 are arranged side by side in the direction of the central axis C of the object T to be inspected. Further, the plurality of annular members 220 are arranged with their phases shifted so that the circumferential positions of the flaw detection units 222 are different from each other. A flaw detection probe 200 including the plurality of flaw detection units 222 with their phases shifted in this way may be inserted inside the object T to be inspected, and the entire inner circumferential surface TS of the object T to be inspected may be inspected with only one inspection.

[0074] As described above, the inspection apparatus 100 according to the first embodiment includes a deformable member 210 configured to be expandable or contractible in a direction facing the object T to be inspected, and a flaw detection unit 222 provided on the outer surface 210a of the deformable member 210 and including at least one flaw detection sensor 222b. Thereby, while enlarging the inspection range, it is possible to reduce the lift-off between the flaw detection probe 200 and the inner circumferential surface TS of the object T to be inspected, and it is possible to shorten the inspection time for flaws in the object T to be inspected. Further, the flaw detection unit 222 itself has only flexibility and flexibility without elasticity, and since the distance between the flaw detection sensors 222b does not change even when the deformable member 210 is deformed, the inspection can be stabilized without degrading the detection accuracy of flaws in the object T to be inspected.

[0075] Further, the inspection apparatus 100 according to the first embodiment includes a wear-resistant protective member 230 on the outer surface 220a facing the object T to be inspected among the flaw detection unit 222 and the telescopic member 224. Thereby, wear of the flaw detection unit 222 and the telescopic member 224 can be suppressed.

[0076] FIG. 11 is a schematic configuration diagram of the annular member 1220 according to the second embodiment. In FIG. 11, the object T to be inspected has a cylindrical shape with an inwardly concave curved surface, and shows the shape of a cross section including the central axis C. Further, the annular member 1220 shows the shape of a side surface in a state of being inserted into the object T to be inspected. Although not shown, a plurality of protective members 230 are provided on the outer surface of the annular member 1220. For components that are substantially the same as those of the inspection apparatus 100 according to the first embodiment, the same reference numerals are given and the description is omitted.

[0077] As shown in FIG. 11, the inner peripheral surface TS of the inspection object T of the second embodiment has a curved surface that is recessed inward. The annular member 1220 according to the second embodiment has a group of flaw detection units 1222 including a first flaw detection unit 1222a, a second flaw detection unit 1222b, and a third flaw detection unit 1222c. The first flaw detection unit 1222a, the second flaw detection unit 1222b, and the third flaw detection unit 1222c of the second embodiment are divided flaw detection units obtained by dividing the flaw detection unit 222 of the first embodiment into three in the direction of the central axis C of the cylindrical inspection object T. Here, in the second embodiment, an example in which the flaw detection unit 222 of the first embodiment is divided into three is shown, but it is not limited thereto. Specifically, it is sufficient that the flaw detection unit 222 of the first embodiment can be divided into two or more, and the group of flaw detection units 1222 of the second embodiment may include at least the first flaw detection unit 1222a and the second flaw detection unit 1222b. The first flaw detection unit 1222a, the second flaw detection unit 1222b, and the third flaw detection unit 1222c are arranged side by side at intervals in the direction of the central axis C of the inspection object T.

[0078] The annular member 1220 according to the second embodiment has a group of telescopic members 1224 including a first telescopic member 1224a, a second telescopic member 1224b, a third telescopic member 1224c, a fourth telescopic member 1224d, and a fifth telescopic member 1224e. The first telescopic member 1224a, the second telescopic member 1224b, and the third telescopic member 1224c of the second embodiment are divided telescopic members obtained by dividing the telescopic member 224 of the first embodiment into three in the direction of the central axis C of the inspection object T. Here, in the second embodiment, an example in which the telescopic member 224 of the first embodiment is divided into three is shown, but it is not limited thereto. Specifically, it is sufficient that the telescopic member 224 of the first embodiment can be divided into two or more, and the group of telescopic members 1224 of the second embodiment may include at least the first telescopic member 1224a and the second telescopic member 1224b. The first telescopic member 1224a, the second telescopic member 1224b, and the third telescopic member 1224c are arranged side by side at intervals in the direction of the central axis C of the inspection object T.

[0079] The fourth telescopic member 1224d is provided between the first flaw detection unit 1222a and the first telescopic member 1224a, and the second flaw detection unit 1222b and the second telescopic member 1224b. Further, the fifth telescopic member 1224e is provided between the second flaw detection unit 1222b and the second telescopic member 1224b, and the third flaw detection unit 1222c and the third telescopic member 1224c.

[0080] The fourth telescopic member 1224d and the fifth telescopic member 1224e are configured to be telescopic at least in the direction of the central axis C of the inspection object T. The fourth telescopic member 1224d can displace the space between the first flaw detection unit 1222a and the second flaw detection unit 1222b more greatly than when the first flaw detection unit 1222a and the second flaw detection unit 1222b are integrally connected. Similarly, the fifth telescopic member 1224e can displace the space between the second flaw detection unit 1222b and the third flaw detection unit 1222c more greatly than when the second flaw detection unit 1222b and the third flaw detection unit 1222c are integrally connected.

[0081] According to the second embodiment, even when the inner peripheral surface TS of the inspection object T has a complicated shape, the fourth telescopic member 1224d can reduce the lift-off between the first flaw detection unit 1222a and the second flaw detection unit 1222b and the inspection object T. Similarly, even when the inner peripheral surface TS of the inspection object T has a complicated shape, the fifth telescopic member 1224e can reduce the lift-off between the second flaw detection unit 1222b and the third flaw detection unit 1222c and the inspection object T.

[0082] FIG. 12 is a schematic configuration diagram of the flaw detection unit 2222 according to the third embodiment. In FIG. 12, both ends of the flaw detection unit 2222 in the left-right direction are connected to the telescopic member 224. For components that are substantially the same as those of the inspection apparatus 100 of the first embodiment, the same reference numerals are given and the description thereof is omitted.

[0083] As shown in FIG. 12, the flaw detection unit 2222 according to the third embodiment includes a flexible body 222a and at least one flaw detection sensor 2222b. The flaw detection sensor 2222b of the second embodiment is composed of a linear conductive member. Each of the plurality of flaw detection sensors 2222b extends in a direction parallel to the circumferential direction of the annular member 220. The plurality of flaw detection sensors 2222b are arranged side by side at intervals in the direction of the central axis C of the object T to be inspected. That is, the flaw detection sensor 2222b of the second embodiment includes a linear conductive member extending in the circumferential direction of the object T to be inspected.

[0084] According to the flaw detection unit 2222 of the third embodiment, when a flaw extending in the circumferential direction is formed in the object T to be inspected, the flaw detection sensitivity can be increased as compared with the flaw detection unit 222 of the first embodiment.

[0085] FIG. 13 is a schematic configuration diagram of a flaw detection unit 3222 according to the fourth embodiment. In FIG. 13, both left and right ends of the flaw detection unit 3222 in the lateral direction are connected to the telescopic member 224. For components that are substantially the same as those of the inspection device 100 of the first embodiment, the same reference numerals are given and the description thereof is omitted.

[0086] As shown in FIG. 13, the flaw detection unit 3222 according to the fourth embodiment includes a flexible body 222a and at least one flaw detection sensor 3222b. In the third embodiment, the flaw detection sensor 3222b is composed of a linear conductive member. Each of the plurality of flaw detection sensors 3222b extends in a direction parallel to the central axis C of the object T to be inspected. The plurality of flaw detection sensors 3222b are arranged side by side at intervals in the circumferential direction of the annular member 220, that is, in the circumferential direction of the central axis C. That is, the flaw detection sensor 3222b of the third embodiment includes a linear conductive member extending in the direction of the central axis C of the object T to be inspected.

[0087] According to the flaw detection unit 3222 of the fourth embodiment, when a flaw extending in the direction of the central axis C is formed in the object T to be inspected, the flaw detection sensitivity can be increased as compared with the flaw detection unit 222 of the first embodiment.

[0088] FIG. 14 is a schematic configuration diagram of an annular member 4220 according to the fifth embodiment. For components that are substantially the same as those of the inspection apparatus 100 of the first embodiment, the same reference numerals are given and the description thereof is omitted. A deformation member 210 is provided on the inner surface of the annular member 4220, and a plurality of protection members 230 (not shown) are provided on the outer surface of the annular member 4220.

[0089] As shown in FIG. 14, the annular member 4220 according to the fifth embodiment has a flaw detection unit 222 and a telescopic member 4224 including at least one regulating member 4224a. The regulating member 4224a extends so as to be parallel to the central axis C direction of the inspection object T, and is provided inside the telescopic member 4224.

[0090] In the fifth embodiment, a plurality of regulating members 4224a are provided on the telescopic member 224 at intervals in the circumferential direction of the annular member 4220. The regulating member 4224a regulates the displacement of the telescopic member 4224 in the central axis C direction of the inspection object T. Therefore, the telescopic member 4224 of the fifth embodiment is configured such that the displacement in the central axis C direction of the inspection object T is regulated by the regulating member 4224a, and can be telescopically extended only in the circumferential direction of the annular member 4220.

[0091] According to the fifth embodiment, when the deformation member 210 is deformed, the displacement of the telescopic member 4224 in the central axis C direction of the inspection object T can be suppressed. As a result, it is possible to suppress the flaw detection unit 222 from being displaced in the central axis C direction of the inspection object T as the telescopic member 4224 deforms in the central axis C direction.

[0092] FIG. 15 is a schematic configuration diagram of an annular member 5220 according to the sixth embodiment. For components that are substantially the same as those of the inspection apparatus 100 of the first embodiment, the same reference numerals are given and the description thereof is omitted. A deformation member 210 (not shown) is provided on the inner surface of the annular member 5220, and a plurality of protection members 230 (not shown) are provided on the outer surface of the annular member 5220. Further, the deformation member 210 (not shown), the annular member 5220, and the plurality of protection members 230 (not shown) are arranged inside the inner peripheral surface TS of the inspection object T (not shown).

[0093] As shown in FIG. 15, the annular member 5220 according to the sixth embodiment includes a flaw detection unit 5222 formed in a strip shape. Note that the annular member 5220 of the sixth embodiment does not include the telescopic member 224 as in the first embodiment. That is, the annular member 5220 of the sixth embodiment is composed only of the strip-shaped flaw detection unit 5222 without including the telescopic member 224.

[0094] The strip-shaped flaw detection unit 5222 is spirally wound around the outer surface 210a of a deformation member 210 (not shown). Therefore, the inner surface of the flaw detection unit 5222 is in contact with the outer surface 210a of the deformation member 210 in a spiral shape. In the sixth embodiment, the strip-shaped flaw detection unit 5222 is spirally wound around the outer surface 210a of the deformation member 210 to form an annular shape. The annular member 5220 of the sixth embodiment is constituted by the flaw detection unit 5222 formed in this annular shape. One end of the strip-shaped flaw detection unit 5222 is connected to the outer surface 210a of the deformation member 210, and the other end of the strip-shaped flaw detection unit 5222 is connected to the outer surface 210a of the deformation member 210. Therefore, both ends of the strip-shaped flaw detection unit 5222 are connected to the outer surface 210a of the deformation member 210, so that the strip-shaped flaw detection unit 5222 is held by the deformation member 210. Here, although the portion between one end and the other end of the strip-shaped flaw detection unit 5222 is in contact with the outer surface 210a of the deformation member 210, it is configured to be relatively movable with respect to each other. That is, the portion between one end and the other end of the strip-shaped flaw detection unit 5222 is configured to be slidable on the outer surface 210a of the deformation member 210.

[0095] In FIG. 15, as indicated by the white arrow, as the deformation member 210 expands, the strip-shaped flaw detection unit 5222 spirally wound deforms such that the winding diameter increases and the number of windings decreases. Conversely, as the deformation member 210 contracts, the strip-shaped flaw detection unit 5222 spirally wound deforms such that the winding diameter decreases and the number of windings increases.

[0096] FIG. 16 is a schematic configuration diagram of the flaw detection unit 5222 according to the sixth embodiment. As shown in FIG. 16, the flaw detection unit 5222 of the sixth embodiment includes a belt-shaped flexible body 222a and a plurality of flaw detection sensors 222b. In the flaw detection unit 5222 of the sixth embodiment, the flexible body 222a and the flaw detection sensors 222b are provided over the entire circumferential direction of the annular member 5220. The belt-shaped flexible body 222a is made of a material having flexibility and softness without having stretchability. Since the flexible body 222a is configured in a belt shape, a plurality of flaw detection sensors 222b are arranged side by side in the longitudinal direction of the belt-shaped flexible body 222a.

[0097] According to the sixth embodiment, without providing the expansion and contraction member 224, by changing the number of turns and the winding diameter of the flaw detection unit 5222 wound in a spiral shape, the outer shape of the annular member 5220 can be deformed following the deformation of the deformation member 210. Further, since the flaw detection unit 5222 is formed over the entire circumferential direction of the annular member 5220, the entire inner peripheral surface TS of the inspection object T can be inspected at once. Further, the flaw detection unit 5222 itself has only flexibility and softness without having stretchability, and even if the number of turns and the winding diameter change, the distance between the flaw detection sensors 222b does not change, so the inspection can be stabilized without degrading the detection accuracy of the flaw in the inspection object T.

[0098] FIG. 17 is a schematic configuration diagram of the annular member 6220 according to the seventh embodiment. The deformation member 210 is provided on the inner surface of the annular member 6220, and a plurality of protection members 230 (not shown) are provided on the outer surface of the annular member 6220. Further, the deformation member 210, the annular member 6220, and the plurality of protection members 230 (not shown) are arranged inside the inner peripheral surface TS of the inspection object T (not shown). For components that are substantially the same as those of the inspection apparatus 100 of the first embodiment, the same reference numerals are given and the description is omitted.

[0099] As shown in FIG. 17, the annular member 6220 according to the seventh embodiment is composed only of an annular flaw detection unit 6222. That is, in the annular member 6220 of the seventh embodiment, the flexible body 6222a and the flaw detection sensors 222b are provided over the entire circumferential direction.

[0100] Here, the annular member 6220 of the seventh embodiment is not provided with the telescopic member 224 as in the first embodiment. Instead, the flexible body 6222a of the flaw detection unit 6222 is made of a material having flexibility, softness, and stretchability. In other words, the parts of the flaw detection unit 6222 other than the flaw detection sensor 222b are made of a material having flexibility, softness, and stretchability.

[0101] According to the seventh embodiment, since the flaw detection unit 6222 has stretchability in addition to flexibility and softness, the lift-off between the flaw detection unit 6222 and the inspection object T can be reduced. Further, since the flaw detection unit 6222 is formed over the entire circumferential direction of the annular member 220, the entire inner peripheral surface TS of the inspection object T can be inspected at once. When the flaw detection unit 6222 has stretchability, the distance between the flaw detection sensors 222b changes due to the expansion or contraction of the deformation member 210. In that case, the detection unit 400b can correct the detection error of the flaw in the inspection object T by correcting the signals of the flaw detection sensors 222b according to the change in the distance between the flaw detection sensors 222b.

[0102] As described above, the embodiments of the present disclosure have been described with reference to the accompanying drawings. Needless to say, the present disclosure is not limited to such embodiments. It is obvious that those skilled in the art can conceive of various modification examples or correction examples within the scope described in the claims, and it is naturally understood that they also belong to the technical scope of the present disclosure.

[0103] In the above embodiment, an example in which the inspection object T is a tubular member configured in a cylindrical shape has been described. However, the inspection object T is not limited to a tubular member, and may be, for example, a sphere, a pyramid, a cube, a toroidal body, a cylinder, a cone, a plate-shaped member, or the like.

[0104] In the above-described embodiment, an example in which the protective member 230 is provided between the inner peripheral surface TS of the inspection object T and the annular member 220 has been described. However, the protective member 230 is not an essential component. Therefore, the protective member 230 may not be provided between the inner peripheral surface TS of the inspection object T and the annular member 220. That is, the protective member 230 may not be provided between the inner peripheral surface TS of the inspection object T and the flaw detection unit 222, and the inner peripheral surface TS of the inspection object T and the flaw detection unit 222 may be configured to be in direct contact with each other.

[0105] In the above-described first embodiment, an example in which the annular member 220 is provided on the outer surface 210a of the deformable member 210 has been described. However, the present invention is not limited to this, and the annular member 220 may not be provided on the outer surface 210a of the deformable member 210. For example, only the flaw detection unit 222 may be provided on the outer surface 210a of the deformable member 210 without providing the telescopic member 224.

[0106] In the above-described second embodiment, an example in which the fourth telescopic member 1224d is provided between the first flaw detection unit 1222a and the second flaw detection unit 1222b has been described. However, the present invention is not limited to this, and the fourth telescopic member 1224d may not be provided between the first flaw detection unit 1222a and the second flaw detection unit 1222b. For example, a space for separating each other may be provided between the first flaw detection unit 1222a and the second flaw detection unit 1222b instead of the fourth telescopic member 1224d. Similarly, a space for separating each other may be provided between the second flaw detection unit 1222b and the third flaw detection unit 1222c instead of the fifth telescopic member 1224e.

[0107] In the above-described second embodiment, an example in which the first flaw detection unit 1222a, the second flaw detection unit 1222b, and the third flaw detection unit 1222c are arranged side by side at intervals in the direction of the central axis C of the inspection object T has been described. However, the present invention is not limited to this, and the first flaw detection unit 1222a, the second flaw detection unit 1222b, and the third flaw detection unit 1222c may be arranged side by side at intervals in the circumferential direction of the central axis C of the inspection object T.

[0108] In the above-described sixth embodiment, an example in which the deformation member 210 is provided on the inner surface of the flaw detection unit 5222 has been described. However, in the sixth embodiment, the configuration of the deformation member 210 is not essential. Therefore, only the flaw detection unit 5222 shown in FIG. 15 may be provided inside the inner peripheral surface TS of the inspection object T, and the deformation member 210 may not be provided inside the inner surface of the flaw detection unit 5222. That is, the flaw detection probe 200 according to the sixth embodiment may be composed only of the flaw detection unit 5222.

[0109] For example, the belt-shaped flexible body 222a of the flaw detection unit 5222 may be made of a material having elasticity and resilience in addition to flexibility and softness. And the flaw detection unit 5222 having such a flexible body 222a may be formed in a belt shape and a flat plate shape. The flaw detection unit 5222 formed in a belt shape and a flat plate shape is spirally wound around the inner peripheral surface TS of the inspection object T as shown in FIG. 15. At this time, due to the restoring force of the flexible body 222a, the outer surface of the flaw detection unit 5222 moves in a direction approaching the inner peripheral surface TS of the inspection object T, and an adhesive force is generated between the flaw detection unit 5222 and the inner peripheral surface TS of the inspection object T.

[0110] In FIG. 15, as indicated by the white arrow, as the cross-sectional area of the inner peripheral surface TS of the inspection object T increases, the belt-shaped flaw detection unit 5222 wound spirally deforms such that the winding diameter increases and the number of windings decreases due to the restoring force of the flexible body 222a. Conversely, as the cross-sectional area of the inner peripheral surface TS of the inspection object T decreases, the belt-shaped flaw detection unit 5222 wound spirally deforms such that the winding diameter decreases and the number of windings increases as the outer surface is pressed by the inner peripheral surface TS of the inspection object T.

[0111] In this way, since the flexible body 222a has elasticity and resilience, the outer shape of the strip-shaped flaw detection unit 5222 can be changed following the shape of the inner peripheral surface TS of the inspection object T without providing the deformation member 210. A plurality of protection members 230 (not shown) may or may not be provided between the inner peripheral surface TS of the inspection object T and the flaw detection unit 5222.

[0112] The present disclosure can contribute to, for example, Goal 12, "Ensure sustainable consumption and production patterns," of the Sustainable Development Goals (SDGs).

Description of Reference Numerals

[0113] T Inspection object TS Inner peripheral surface 100 Inspection device 200 Flaw detection probe 210 Deformation member 210a Outer surface 220 Annular member 220a Outer surface 222 Flaw detection unit 222a Flexible body 222b Flaw detection sensor 224 Telescopic member 230 Protection member 300 Supply source 400 Control device 400a Drive control unit 400b Detection unit 1220 Annular member 1222a First flaw detection unit 1222b Second flaw detection unit 1222c Third flaw detection unit 2222b Flaw detection sensor 3222b Flaw detection sensor 4224a Regulation member 5220 Annular member 5222 Flaw detection unit 6220 Annular member 6222 Flaw detection unit

Claims

1. A deformation member having an outer surface facing the object to be inspected and configured to be expandable or contractible in a direction facing the object to be inspected, A flaw detection unit provided on the outer surface of the deformation member and including at least one flaw detection sensor, An inspection device comprising the above.

2. The flaw detection unit includes a first flaw detection unit and a second flaw detection unit, The inspection device according to claim 1, further comprising an expandable and contractible member provided between the first flaw detection unit and the second flaw detection unit. The inspection device according to claim 1.

3. The flaw detection sensor includes linear conductive members arranged in parallel, The inspection device according to claim 1 or 2.

4. The inspection device according to claim 1 or 2, further comprising an annular member provided on the outer surface of the deformation member, A part of the annular member is the flaw detection unit, Another part of the annular member is an expandable and contractible member that can be expanded or contracted only in the circumferential direction of the annular member. The inspection device according to claim 1 or 2.

5. The flaw detection unit is formed in a strip shape, The inspection device according to claim 1 or 2, wherein an inner surface of the flaw detection unit contacts the outer surface of the deformation member in a spiral shape. The inspection device according to claim 1 or 2.

6. A part of the flaw detection unit other than the flaw detection sensor is made of a material having flexibility and expandability and contractibility, The inspection device according to claim 1 or 2.

7. The inspection device according to claim 1 or 2, further comprising a wear-resistant protection member on an outer surface of the flaw detection unit facing the object to be inspected. The inspection device according to claim 1 or 2.

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