Production method of polymer, polymer, composition, resist composition and resist pattern

By integrating styrene monomer and a basic catalyst with alcohol compound in ATRP, the method significantly reduces chlorine content in polymers, enhancing stability and preventing corrosion, suitable for electronic materials.

JP2025097474APending Publication Date: 2025-07-01DIC CORP
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Patent Information

Application Number
JP2023213687
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-12-19
Publication Date
2025-07-01

AI Technical Summary

Technical Problem

Atom transfer radical polymerization (ATRP) methods using organic chlorine compounds as initiators result in polymers with high chlorine content, leading to issues such as decreased storage stability and equipment corrosion due to the formation of hydrogen chloride when exposed to external energy.

Method used

Incorporating a styrene monomer into the polymerization reaction system and using a basic catalyst and alcohol compound to dechlorinate the polymer terminal, reducing the chlorine content to less than 1% by mass.

Benefits of technology

The method effectively reduces chlorine content in the polymer, improving storage stability and preventing equipment corrosion, making it suitable for electronic material applications like resist compositions.

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Abstract

To provide a production method of a polymer, which enables reduction of a chlorine content of a polymer obtained by atom transfer radical polymerization.SOLUTION: A production method of a polymer comprises the steps of: subjecting a polymerizable monomer to atom transfer polymerization using a radical polymerization initiator, which is an organic chlorine compound, to produce a polymer; adding a styrene monomer to a reaction system comprising the radical polymerization initiator and the polymer and subjecting the mixture to atom transfer polymerization to produce a polymer having a structure derived from a styrene monomer on at least one chain end; and adding a basic catalyst and an alcoholic compound to a reaction system comprising the polymer having a structure derived from a styrene monomer at the chain end to dechlorinate the polymer.SELECTED DRAWING: None
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Citation Information

Patent Citations

  • Catalytic process for controlled polymerization of free radically (CO)polymerizable monomer and functional polymeric system prepared thereby

    JP2011202169A