Sample holder tip and specimen holder

Abstract

To provide a specimen holder that allows various observations.SOLUTION: A sample holder tip according to the present invention includes a sample pedestal on which the sample and / or sample mesh is placed, a slit portion that is placed on the sample pedestal and allows the sample pedestal to be tilted, a frame portion that holds the sample pedestal, and a guide portion that guides the frame portion. In a preferred embodiment of the sample holder tip according to the present invention, the sample pedestal is provided in a plurality of positions.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a tip of a sample holder and a sample holder used for visualization, imaging, or analysis of a sample, and more particularly to a tip of a sample holder and a sample holder used for observing a sample under vacuum.

Background Art

[0002] Due to the need to observe and analyze samples at the molecular and atomic levels, currently, electron microscope observations that combine high-precision imaging and analysis techniques under harsh conditions are required. For example, in a transmission electron microscope (hereinafter referred to as "TEM"), a sample is observed under ultra-high vacuum or high vacuum.

[0003] As a sample holder for positioning a sample at the observation position of a TEM, for example, a sample holder body having a first opening with a step formed therein, and a sample holding member that is rotatably housed in the first opening by having a part of its periphery supported by the step and having a second opening for holding the sample at the center, and a cover member provided with an amorphous material film that covers at least a part of the second opening, a sample holder for a transmission electron microscope is known (Patent Document 1).

[0004] Also, for example, a cryogenic sample holder that houses, cools, and positions a sample in at least one of an imaging and analysis device, the cryogenic sample holder including a container that houses and holds the sample, a storage container for a liquid cooling medium having a collection point for the liquid cooling medium, a heat conductor that is in thermal contact with the liquid cooling medium and the container regardless of the amount of the liquid cooling medium in the container and the spatial direction of the storage container, the heat conductor being in adjacent surface contact with the liquid cooling medium at the collection point, and an elongated barrel attached between the storage container and the container for positioning the sample at a preselected location within at least one of the imaging and analysis devices, a cryogenic sample holder is known (Patent Document 2).

Prior Art Documents

Patent Document

[0005]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0006] In a conventional TEM sample holder including that of Patent Document 1, it is necessary to block the atmosphere side and the vacuum side so that no vacuum leaks through the holder inside the TEM.

[0007] Recently, in semiconductor observation, integration has advanced, and areas that cannot be observed with the resolution of SEM have emerged. There is a shift from SEM to TEM for defect analysis using TEM and confirmation of the structure. Therefore, it is necessary to process a large amount of semiconductor analysis. However, unlike SEM, the analysis takes time, so the conventional throughput cannot be achieved, and there is a problem that even if continuous observation and analysis are carried out on a 24 - hour basis, it never ends and the waiting time for observation increases.

[0008] Therefore, in order to solve the above problems, an object of the present invention is to provide a sample holder capable of various observations.

Means for Solving the Problems

[0009] In order to achieve the above object, as a result of intensive studies on the tip of the sample holder, the present inventor has found the present invention.

[0010] That is, the tip of the sample holder of the present invention is characterized by having a sample pedestal for installing the sample and / or a sample mesh, a slit portion installed on the sample pedestal and capable of tilting the sample pedestal, a frame portion for holding the sample pedestal, and a guide portion for guiding the frame portion.

[0011] In a preferred embodiment of the tip of the sample holder of the present invention, a plurality of the sample pedestals are provided.

[0012] In a preferred embodiment of the tip of the sample holder of the present invention, the sample pedestal has a support portion for sliding the slit portion.

[0013] In a preferred embodiment of the tip of the sample holder of the present invention, the sample and / or the sample mesh are fixed to the sample pedestal by a fixing member.

[0014] In a preferred embodiment of the tip of the sample holder of the present invention, the fixing member has a ring shape.

[0015] In a preferred embodiment of the tip of the sample holder of the present invention, an offset cam mechanism is further provided.

[0016] The sample holder of the present invention has the tip of the sample holder of the present invention.

[0017] In a preferred embodiment of the sample holder of the present invention, the sample holder further includes a sample holder shaft portion having the tip of the sample holder, an outer cylinder portion capable of storing the sample holder shaft portion, and a sample holder handle portion provided on the sample holder shaft portion on the side opposite to the tip of the sample holder, and the sample holder shaft portion is rotatable about the sample holder shaft.

[0018] In a preferred embodiment of the sample holder of the present invention, by the rotation, the sample is rotatable around the axis of the sample holder shaft portion or around an axis orthogonal to the axial direction of the sample holder shaft portion.

[0019] Also, in a preferred embodiment of the sample holder of the present invention, the axis of the sample holder changes the position of the sample pedestal by moving back and forth with respect to the longitudinal direction of the sample holder.

[0020] Also, in a preferred embodiment of the sample holder of the present invention, a plurality of the sample pedestals are provided.

[0021] Also, in a preferred embodiment of the sample holder of the present invention, rotation around an axis orthogonal to the axial direction of the sample holder shaft portion is performed via an offset cam mechanism.

Advantages of the Invention

[0022] According to the tip of the sample holder of the present invention, there is an advantageous effect of being useful for processing a large amount of samples. Also, according to the tip of the sample holder of the present invention, there is an advantageous effect that it is possible to eliminate losses due to mounting errors by simplifying sample mounting. Further, according to the sample holder of the present invention, there is an advantageous effect that the time for inserting and removing from the TEM is significantly shortened and the observation speed is improved.

Brief Description of the Drawings

[0023]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Mode for Carrying Out the Invention

[0024] The tip of the sample holder of the present invention has a sample pedestal for installing the sample and / or sample mesh, a slit part installed on the sample pedestal and capable of tilting the sample pedestal, a frame part for holding the sample pedestal, and a guide part for guiding the frame part. In the present invention, the sample pedestal for installing the sample and / or sample mesh is not particularly limited, and it may be a sample pedestal for installing and mounting only the sample. The fixing part for fixing the sample and / or sample mesh to the sample pedestal is also not particularly limited, as long as the sample or the like can be fixed to the tip of the sample holder. As will be described later, in addition to using a clamp, when carrying the sample using a chip or a cartridge, the chip or the like may be used for fixing.

[0025] In a preferred embodiment of the tip of the sample holder of the present invention, a plurality of the sample pedestals are provided. By providing a plurality of the sample pedestals, it is possible to shorten the time for taking in and out the sample holder, and thus it is possible to improve the observation speed of the sample.

[0026] In a preferred embodiment of the tip of the sample holder of the present invention, the sample pedestal has a support part for sliding the slit part. In the present invention, as long as the sample pedestal can be tilted by the sliding of the slit part, it is not particularly limited. For example, a support part may be provided so that the slit part can be slid on the support part.

[0027] In a preferred embodiment of the tip of the sample holder of the present invention, the sample and / or the sample mesh are fixed to the sample pedestal by a fixing member. Further, in a preferred embodiment of the tip of the sample holder of the present invention, the fixing member is ring-shaped. In the present invention, for example, by installing a ring-shaped fixing member from above the sample or the like and rotating it, the sample or the like can be clamped, so that the sample or the like can be easily fixed. A slip prevention member may be installed between the ring-shaped fixing member and the sample pedestal in a groove cut in the sample pedestal so that the sample or the like does not slip.

[0028] In a preferred embodiment of the tip of the sample holder of the present invention, further, it is characterized by having an offset cam mechanism. In the present invention, the offset cam mechanism is not particularly limited, and a conventional method can be used. In the tip of the sample holder of the present invention, a camshaft is mounted, and by rotating the sample holder shaft portion, the camshaft also rotates and the sample stage can be tilted. By the rotation of the camshaft, the sample can rotate around an axis orthogonal to the axial direction of the sample holder shaft portion. Note that the rotation of the sample holder shaft portion can also be performed by rotating the handle portion.

[0029] The sample holder of the present invention is characterized by having the tip of the sample holder of the present invention. For the tip of the sample holder that can be used in the sample holder of the present invention, the above description can be referred to.

[0030] In a preferred embodiment of the sample holder of the present invention, further, a sample holder shaft portion having the tip of the sample holder, an outer cylinder portion capable of storing the sample holder shaft portion, and a sample holder handle portion installed on the sample holder shaft portion on the side opposite to the tip of the sample holder, wherein the sample holder shaft portion is rotatable around the sample holder shaft. For the tip of the sample holder that can be used in the sample holder of the present invention, the above description can be referred to.

[0031] In a preferred embodiment of the sample holder of the present invention, due to the rotation, the sample can rotate around the axis of the sample holder shaft portion or around an axis perpendicular to the axial direction of the sample holder shaft portion.

[0032] In a preferred embodiment, the sample holder shaft portion can be made rotatable around the sample holder axis. This is also referred to as X-axis tilt, α tilt, or uniaxial tilt. Generally, it can be performed using the device on the TEM side, but in the present invention, X-axis tilt is also possible on the sample holder side. By making the sample holder shaft portion rotatable around the axis, the sample and / or the sample mesh installation portion can also be made rotatable around the sample holder axis, enabling observation of the sample and the like in a rotated state. The rotation may be a conventional method and is not particularly limited. More specifically, for example, it may be rotated using the handle portion of the sample holder.

[0033] In a preferred embodiment of the present invention, due to the rotation, the sample and / or the sample mesh installation portion can be made rotatable around the axis of the sample holder shaft portion as described above, and can also be rotated around an axis perpendicular to the axial direction of the sample holder shaft portion. A mechanism that can rotate around an axis perpendicular to the axial direction of the sample holder shaft portion may also adopt a conventional method and is not particularly limited. In a preferred embodiment, the rotation around an axis perpendicular to the axial direction of the sample holder shaft portion may be performed via an offset cam mechanism.

[0034] Also, in a preferred embodiment of the sample holder of the present invention, the axis of the sample holder changes the position of the sample pedestal by moving back and forth with respect to the longitudinal direction of the sample holder. In the present invention, since the position of the sample pedestal can be changed in this way, not only can the position of the sample be finely adjusted, but also when there are a plurality of sample pedestals, it is possible to set the center of observation for each sample pedestal. That is, the center of each sample can be switched in one operation. Further, as described above, in the present invention, the sample holder shaft portion can be rotated around its axis, and can also be rotated around an axis orthogonal to the axial direction of the sample holder shaft portion, so that the crystal orientation of the sample can also be adjusted, and thus the analysis range can be widened. That is, in the present invention, it is possible to hold one or more samples, and further, a sample holder having an inclination function for adjusting the crystal orientation and having an easy sample attachment can be realized by a sample pedestal.

[0035] Also, in a preferred embodiment of the sample holder of the present invention, the sample pedestal is characterized by being plural. In the present invention, since there are a plurality of sample pedestals, it is possible to process a large number of samples. Also, in the present invention, the time for loading and unloading into and from the TEM can be significantly shortened, and the observation speed can be improved.

[0036] Also, in a preferred embodiment of the sample holder of the present invention, the rotation around an axis orthogonal to the axial direction of the sample holder shaft portion is characterized by being performed via an offset cam mechanism. Regarding the offset cam mechanism, reference can be made to the description at the tip of the sample holder described above.

Example

[0037] Hereinafter, embodiments of the sample holder of the present invention will be described with reference to the drawings, but the present invention is not construed as being limited to those embodiments. Needless to say, it can be appropriately changed without departing from the gist of the present invention.

[0038] Figure 1 is a side cross-sectional view of a sample holder according to an embodiment of the present invention. In Figure 1, 1 represents a sample pedestal (cradle), 2 represents an offset cam mechanism, 3 represents a sample holder shaft portion, 4 represents an outer cylinder portion, 5 represents a camshaft, 6 represents a handle portion, and 7 represents a motor, respectively. In this example, three tiltable cradles 1 are provided. 2 is an offset cam mechanism, and the cradle 1 rotates when the sample holder shaft connected to the motor 7 and the camshaft connected to the sample holder shaft rotate. The camshaft and the motor 7 are connected via the sample holder shaft portion 3. The sample holder shaft portion 3 has a rotation function and at the same time has a retract function for sample switching. Although the motor 7 is connected to the sample holder shaft portion 3 and thus the camshaft, the handle portion 6 also functions for sample switching. The sample can be switched by moving the handle portion back and forth in the longitudinal direction of the sample holder. In this example, the camshaft and the motor 7 are connected, realizing a so-called sample holder for two-axis tilting.

[0039] Next, Figure 2 is a perspective view of the tip of the sample holder according to an embodiment of the present invention. In Figure 2, 10 represents a reference frame, 11 represents an offset cam mechanism, 12 represents a reference frame guide rail (a guide portion for guiding the frame portion), and 13 represents a sample pedestal holding frame (a frame portion for holding the sample pedestal), respectively. The reference frame 10 can serve as a frame for realizing stable movement of the sample pedestal and the like. 13 is a sample pedestal holding frame, which can switch samples and can be retracted. The reference frame 10 can have a guide rail 12. The reference frame guide rail 12 becomes a guide groove, and the sample pedestal holding frame 13 can move. That is, the sample pedestal holding frame can move back and forth in the longitudinal direction of the sample holder along the reference frame guide rail 12. Thereby, it becomes possible to switch samples. Also, for atomic resolution observation, the reference frame guide rail can also contribute to vibration prevention.

[0040] Next, FIG. 3 is a side sectional view of the tip of the sample holder in one embodiment of the present invention. In FIG. 3, 20 is a slit (slit portion), 21 is pin A (support portion), 22 is a sample pedestal, 23 is pin B (support portion), 24 is a slit for a camshaft, 25 is an offset cam mechanism, 26 is a reference frame, and 27 is a camshaft, respectively. In this example, three sample pedestals 22 are provided. The slit portion provided at the end of the sample pedestal can contact the support portions of adjacent sample pedestals. The slit portion and the support portion can slide, and thus the sample pedestal can be inclined as shown in the figure. In this example, support portions are used at both ends of the central sample pedestal, but any combination of a slit portion and a support portion is not particularly limited as long as the sample pedestal can be inclined. Such an aspect can also be an aspect of the present invention. That is, either the slit portion or the support portion (pin) may be on the sample pedestal. When there are a plurality of them, a combination of the slit and the support portion between adjacent sample pedestals is sufficient. When the camshaft 27 rotates, the offset cam mechanism 25 acts to incline the sample pedestal 22. At the ends of adjacent sample pedestals of the offset cam mechanism 25, slits 24 for the camshaft are provided. By means of the slits for the camshaft, the rotational movement of the offset cam mechanism 25 can be converted into the tilting movement of the sample pedestal. In summary, for simultaneously tilting the three cradles 22, the central cradle serves as a reference, and pins AB (21, 23) are fixed. The sample pedestals 22 on both sides are on a slit table such that the central pins AB (21, 23) slide. Also, as the camshaft 27 rotates, the sample pedestal 22 has a slide shape, and it can rotate by making the position of the pin slide as it rotates.

[0041] Figure 4 is a perspective view of the tip of the sample holder according to an embodiment of the present invention. In Figure 4, 30 is an anti-slip ring, 31 is a clamp ring (fixing member), 32 is a state in which the sample is fixed by rotation, 33 is a reference frame, 34 is the center of the rotation axis, 35 is a groove, 36 is a sample pedestal holding frame, and 37 is a reference frame guide rail, respectively. The clamp ring (fixing member) 31 can be used to fix the sample. The anti-slip ring 30 can serve to prevent the clamp ring 31, and thus the sample, from moving. The anti-slip ring 30 can be fixed to the sample pedestal by having a shape that matches the groove 35. By rotating the clamp ring (fixing member) 31, the sample can be fixed to the sample pedestal. In this example, since the ring-shaped fixing member can be placed from above and rotated to clamp, the sample can be easily fixed.

[0042] Note that 34 is the center of the rotation axis, and the sample pedestal can rotate and tilt around this center.

[0043] Figure 5 is a perspective view of the sample holder according to an embodiment of the present invention. Figure 5 shows a state in which all the sample pedestals are presented.

[0044] Figure 6 is a perspective view of the sample holder according to an embodiment of the present invention. Figure 6 shows a state in which some of the sample pedestals are stored inside the outer cylinder portion. By moving the handle portion back and forth in the direction of the arrow in Figure 6, the position of the sample pedestal can be changed.

Industrial Applicability

[0045] The sample holder of the present invention is suitable for use under high vacuum and can be expected to be beneficial in a wide range of fields.

Explanation of Reference Numerals

[0046] 1 Sample pedestal (cradle) 2 Offset cam mechanism 3 Sample Holder Shaft Portion 4 Outer Cylinder Portion 5 Cam Shaft 6 Handle Portion 7 Motor 10 Reference Frame 11 Offset Cam Mechanism 12 Reference Frame Guide Rail (Guide Portion for Guiding the Frame Portion) 13 Sample Pedestal Holding Frame (Frame Portion for Holding the Sample Pedestal) 20 Slit 21 Pin A 22 Sample Pedestal 23 Pin B 24 Slit for Cam Shaft 25 Offset Cam Mechanism 26 Reference Frame 27 Cam Shaft 30 Anti-Slip Ring 31 Clamp Ring 32 State of Fixing the Sample by Rotation 33 Reference Frame 34 Rotation Axis Center 35 Groove 36 Sample Pedestal Holding Frame 37 Reference Frame Guide Rail

Claims

1. A sample holder tip, comprising: a sample pedestal for installing the sample and / or a sample mesh; a slit portion installed on the sample pedestal and capable of tilting the sample pedestal; a frame portion for holding the sample pedestal; and a guide portion for guiding the frame portion.

2. The sample holder tip according to claim 1, wherein a plurality of the sample pedestals are provided.

3. The sample holder tip according to claim 2, wherein the sample pedestal has a support portion for sliding the slit portion.

4. The sample holder tip according to any one of claims 1 to 3, wherein the sample and / or the sample mesh is fixed to the sample pedestal by a fixing member.

5. The sample holder tip according to claim 4, wherein the fixing member is ring-shaped.

6. The sample holder tip according to any one of claims 1 to 5, further comprising an offset cam mechanism.

7. A sample holder, comprising the sample holder tip according to any one of claims 1 to 6.

8. A sample holder, further comprising: a sample holder shaft portion having the sample holder tip; an outer cylinder portion capable of storing the sample holder shaft portion; and a sample holder handle portion installed on the sample holder shaft portion on the side opposite to the sample holder tip, wherein the sample holder shaft portion is rotatable about the sample holder shaft.

9. The sample holder according to claim 8, wherein by the rotation, the sample is rotatable about the axis of the sample holder shaft portion or about an axis orthogonal to the axial direction of the sample holder shaft portion.

10. The sample holder according to claim 8 or 9, wherein the position of the sample pedestal is changed by the axis of the sample holder moving back and forth with respect to the longitudinal direction of the sample holder.

11. The sample holder according to any one of claims 8 to 10, wherein a plurality of the sample pedestals are provided.

12. The sample holder according to claim 9, wherein the rotation about an axis orthogonal to the axial direction of the sample holder shaft portion is performed via an offset cam mechanism.

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