Adhesive sheet for fixing polishing member and polishing member laminate

Abstract

To provide an adhesive sheet for fixing an a polishing member and a polishing member laminate having excellent long-term storability in a high humidity environment and excellent lamination workability.SOLUTION: There is provided an adhesive sheet having adhesive layers on both surfaces of a substrate layer in which a release paper contacts with at least one of the adhesive layers, wherein the release paper consists of a support having a polyvinyl alcohol layer having a saponification degree of 90 mol% or more on the surface of a base paper having a base weight of 50 to 200 g / m2 as specified in JIS P8124-2011 and the adhesive sheet has a release layer on the surface of the support.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present invention relates to an adhesive sheet for fixing a polishing member and a laminated polishing member.

Background Art

[0002] In recent years, the export of adhesive sheets for fixing polishing members and laminated polishing members used in semiconductor polishing and glass polishing has been increasing. In particular, semiconductor production and processing in Taiwan, Southeast Asia, etc. have become active, and the import and export to tropical regions (regions with high humidity environments) have been increasing. The adhesive sheet for fixing a polishing member is important for polishing a silicon wafer or glass. For example, as a conventional adhesive sheet for fixing a polishing member, those having a polyethylene terephthalate (PET) separator (Patent Document 1) or those having an elastomer-based adhesive layer are disclosed. (Patent Document 2). In addition, in recent years, polishing apparatuses have been increasing in size, and accordingly, the adhesive sheets for fixing polishing members have also increased in size, and the difficulty of the work of attaching them to the surface plate has been dramatically improved.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the adhesive layer of the adhesive sheet for fixing the polishing member, strong adhesive force, cohesive force (holding force) capable of withstanding the shear force applied during the polishing process, and chemical resistance such as strong alkali resistance and strong acid resistance against the polishing liquid used during polishing are required. However, when exposed to a high-humidity environment for a long time, such as during export or long-term storage, there has been a problem that the adhesive force and cohesive force change, and the chemical resistance is impaired. Therefore, there is a need for an adhesive sheet for fixing a polishing member whose physical properties hardly change even when exposed to a high-humidity environment for a long time.

[0005] In addition to the above characteristics, when attaching to a large-sized polishing apparatus (surface plate), an adhesive sheet for fixing a polishing member that is less likely to have wrinkles or uneven adhesion is required (hereinafter, also abbreviated as attachment workability), but the above problems could not be achieved in Citation Document 1 and Citation Document 2.

[0006] Also, when producing the release paper, it passes through a step of applying polyvinyl alcohol to the base paper while transporting and a step of applying a release agent. At this time, a base paper with high strength and excellent coatability that does not cause deformation (wrinkles, creases) or breakage such as tearing of the base paper is required. (Hereinafter, also abbreviated as the transportability of the base paper).

[0007] The present invention has been made in view of the above background, and an object thereof is to provide an adhesive sheet for fixing a polishing member and a laminated body of polishing members that are excellent in long-term storage stability in a high-humidity environment and excellent in attachment workability.

Means for Solving the Problems

[0008] The present invention solves the above problems in the following aspects [1] to [8].

[0009] [1]: An adhesive sheet having adhesive layers on both sides of a base material layer, and a release paper in contact with at least one adhesive layer, The release paper is composed of a support having a polyvinyl alcohol layer with a saponification degree of 90 mol% or more on the surface of a base paper having a basis weight of 50 to 200 g / m 2 as defined in JIS P8124-2011, and having a release layer on the surface of the support, which is an adhesive sheet for fixing a polishing member. [2]: The at least one of the adhesive layers is an elastomer adhesive layer, and the abrasive member fixing adhesive sheet according to [1], characterized in that the elastomer adhesive layer is in contact with the release paper. [3]: Regarding the surface of the elastomer adhesive layer, when measured under the conditions of using a stainless steel cylindrical probe with a diameter of 5 mm, a weight of 20 g, a probe speed of 1 m / min, and a probe grounding time of 1 s, the probe tack value is 0.002 to 0.03 N, which is the abrasive member fixing adhesive sheet according to [2]. [4]: The elastomer adhesive layer is composed of an elastomer adhesive, and the elastomer adhesive contains an elastomer and an adhesion - imparting resin. The elastomer includes a styrene - isoprene block copolymer (A) having a styrene content of 20 to 40% and a diblock content of 15 to 70%, which is the abrasive member fixing adhesive sheet according to [3]. [5]: The adhesion - imparting resin includes a terpene - phenol resin (B) having a hydroxyl value of 70 mgKOH / g or less, which is the abrasive member fixing adhesive sheet according to [4]. [6]: The abrasive member fixing adhesive sheet according to [5] contains 20 to 60 parts by mass of the terpene - phenol resin (B) with respect to 100 parts by mass of the elastomer. [7]: The softening point of the terpene - phenol resin (B) is 80 to 170°C, which is the abrasive member fixing adhesive sheet according to [6]. [8]: The short - side length of the adhesive sheet in the single - plate form is 2000 mm or more, or the width - direction length of the adhesive sheet in the roll form is 2000 mm or more, which is the abrasive member fixing adhesive sheet according to [1] to [7]. [9]: An abrasive member laminate obtained by laminating the abrasive member fixing adhesive sheet according to [1] to [8] on an abrasive member.

Advantages of the Invention

[0010] According to the present invention, it is possible to provide an abrasive member fixing adhesive sheet having high adhesive force, chemical resistance such as strong alkali resistance and strong acid resistance against the polishing liquid used during polishing, and capable of maintaining the above - mentioned adhesive force and chemical resistance even after being stored in a high - humidity environment for a long time. In addition, it is possible to provide an abrasive member fixing adhesive sheet with good adhesiveness to a large - scale polishing device.

Brief Description of the Drawings

[0011]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Modes for Carrying Out the Invention

[0012] Hereinafter, an example of an embodiment to which the present invention is applied will be described. In this specification, the numerical value “A to B” specified means a numerical value of A or more and B or less.

[0013] <Adhesive sheet for fixing the polishing member> The adhesive sheet for fixing the polishing member of the present invention is an adhesive sheet having adhesive layers on both sides of a base material layer, and a release paper is in contact with at least one of the adhesive layers (hereinafter, the adhesive sheet may also be omitted). Note that the adhesive sheet and the adhesive film in this embodiment are synonymous.

[0014] <Release paper> The release paper is a support having a polyvinyl alcohol layer (hereinafter, also omitted as the PVA layer) having a saponification degree of 90 mol% or more on the surface of a base paper (hereinafter, also omitted as the base paper) defined in JIS P8124-2011, and has a release layer on the surface of the support. 2

[0015] ​Figs. 1 and 2 are schematic cross-sectional views for explaining the structure of the support. The support (10) shown in Fig. 1 is formed by forming a PVA layer (12) on one surface of the base paper (11). The support (20) shown in Fig. 2 has PVA layers (12) formed on both surfaces of the base paper (11).

[0016] <Polyvinyl alcohol layer> As the method for forming the polyvinyl alcohol layer, a method of applying liquid polyvinyl alcohol or a method of thermally laminating a polyvinyl alcohol formed in a sheet shape to the base paper is preferable, and a method of applying polyvinyl alcohol is more preferable. When a part of the applied polyvinyl alcohol penetrates into the base paper, the adhesion between the base paper and the polyvinyl alcohol layer is improved. Also, unlike a smooth surface state such as paper laminated with a resin or a plastic film, it has a surface shape unique to paper.

[0017] The method of applying polyvinyl alcohol is not particularly limited. For example, coating devices such as a blade coater, an air knife coater, a rod blade coater, a bar blade coater, a gravure coater, a bar coater, a multi-stage roll coater, a roll coater, a reverse roll coater, a curtain coater, a spray coater, a gate roll coater, a size press coater, and a sim coater can be appropriately selected for coating.

[0018] The amount of polyvinyl alcohol applied to the base paper (coating amount per side) is preferably 1.0 to 5.0 g / m 2 and more preferably 3.0 to 5.0 g / m 2 By being 1.0 g / m 2 or more, while maintaining the texture of the base paper, the entire surface layer of the base paper can be covered, and when applying the release agent, the release agent does not penetrate into the base paper and a barrier property can be imparted. Also, by being 5.0 g / m 2 or less, sufficient barrier properties are ensured, the degassing during production is good, and the quality of the release paper is stable. The coating amount represents the difference between the weight of the paper after applying polyvinyl alcohol and the weight of the base paper.

[0019] Polyvinyl alcohol is obtained by polymerizing vinyl acetate monomer and saponifying the resulting polyvinyl acetate resin. The reaction rate is referred to as the degree of saponification. The polyvinyl alcohol of the present invention has a degree of saponification of 90 mol% or more, preferably 95 mol% or more. The polyvinyl alcohol layer formed by polyvinyl alcohol with a degree of saponification of 90 mol% or more can suppress changes in adhesive physical properties in a high-humidity environment when formed into an adhesive sheet. Incidentally, the upper limit of the degree of saponification is 100 mol%.

[0020] The degree of saponification is measured and calculated in accordance with the polyvinyl alcohol test method described in JIS K9550-2020. The degree of saponification in the present invention is the same as the definition of the degree of saponification known in the industry, and represents the ratio (mol%) of the number of moles of vinyl alcohol units to the total number of moles of structural units (typically vinyl ester units) that can be converted to vinyl alcohol units by saponification and vinyl alcohol units. In particular, when using polyvinyl acetate resin as a raw material, it means the value obtained by dividing the number of hydroxyl groups derived from the vinyl alcohol skeleton contained in the polyvinyl alcohol resin by the sum of the number of acetyl groups derived from the vinyl acetate skeleton and the number of hydroxyl groups derived from the vinyl alcohol skeleton.

[0021] The degree of polymerization of polyvinyl alcohol is preferably 1500 to 3500, more preferably 2000 to 2500. When the degree of polymerization is within the above range, it is easy to apply to the base paper, the film strength is increased, and the solubility in water is decreased, so it is suitable for use in a high-humidity environment. The degree of polymerization can be determined in accordance with JIS K6726.

[0022] <Base paper> The basis weight of the base paper is 50 to 200 g / m 2 and preferably 70 to 120 g / m 2 When the basis weight of the base paper is 50 g / m 2 or more, the pasting workability is improved. When it is 200 g / m 2 or less, the deterioration of the physical properties of the adhesive layer in a high-humidity environment can be suppressed. Also, the transportability of the base paper and the adhesiveness to the platen of the polishing device are improved. The basis weight means 1 m2 The weight of a single sheet of paper around it, which is a value measured in accordance with JIS P8124-2011. Generally, the basis weight is an index indicating the thickness of the paper, but as the basis weight changes, the surface state of the base paper also changes microscopically. When the basis weight of the base paper is 50 g / m 2 or more, fine and unique irregularities derived from the base paper are likely to be formed on the surface of the release paper. By the adhesive layer transferring this, the pasting workability is improved. When it is 200 g / m 2 or less, it is presumed that excessive irregularities derived from the base paper are suppressed and the surface area of the adhesive layer is reduced, so the absorption of moisture in a high-humidity environment is suppressed, and the deterioration of the physical properties of the adhesive layer in a high-humidity environment can be suppressed.

[0023] Examples of the type of base paper include fine paper, glassine paper, and kraft paper. Fine paper and glassine paper, which are particularly excellent in strength and permeability, are preferred, and glassine paper is particularly preferred. Fine paper refers to paper made only from chemical pulp. Glassine paper refers to thin paper manufactured by highly beating chemical pulp, passing the paper between two metal rolls, and performing a super finish with a pressure treatment. Kraft paper is a general term for strong paper made from kraft pulp. Further, a bleaching treatment may be applied to the paper made by the above method. By using the above base paper, the attachability to the grinding device's constant plate is improved. In particular, glassine paper has a uniform texture, little unevenness in the penetration of polyvinyl alcohol, and high chemical resistance due to the uniform transfer of irregularities to the adhesive layer. In addition, the base paper refers to one manufactured based on the method defined in JIS P0001-1998. By highly beating, the texture of the paper becomes uniform, there is no unevenness in the penetration of polyvinyl alcohol, the coatability of the release agent in the next process is improved, the irregularities transferred to the adhesive layer also become uniform, and the chemical resistance is improved.

[0024] A release paper is formed by forming a release layer on the surface of the polyvinyl alcohol layer of the support described above. The formation of the release layer is preferably by coating a release agent.

[0025] FIG. 3 is a schematic cross-sectional view for explaining the structure of the release paper. In the release paper (30) of FIG. 3, a mode is shown in which a release layer (13) is formed on the PVA layer (12) of the support (10) of FIG. 1. The release paper (40) of FIG. 4 shows a mode in which the release layer (13) is formed on both surfaces of the support (20) of FIG. 2.

[0026] As the release agent, known ones can be used, and examples thereof include emulsions such as silicone, alkyd resin, melamine resin, fluororesin, and acrylic resin. From the viewpoints of coatability to polyvinyl alcohol, releasability of the release layer, and control of the release force, a silicone release agent is preferred. The release force can be adjusted by the amount of the release agent, being lighter when thick and heavier when thin.

[0027] As the silicone release agent, for example, KNS-3051, KNS-320A, KNS-316, KS-847, KS-847T, KS-776L manufactured by Shin-Etsu Chemical Co., Ltd., and SP7017, SP7015, SP7025, SP7031, SRX357, SRX211, SRX345, SRX370 manufactured by Dow Corning Toray Co., Ltd. can be used.

[0028] The type of the catalyst for curing the silicone is not particularly limited, and those that cure addition-type silicone by hydrosilylation can be preferably used. For example, SRX212P manufactured by Dow Corning Toray Co., Ltd., CATA93B manufactured by Arakawa Chemical Industries, Ltd., etc. can be used.

[0029] The coating method of the release agent is not particularly limited. For example, coating devices such as a blade coater, an air knife coater, a rod blade coater, a bar blade coater, a gravure coater, a bar coater, a multi-stage roll coater, a roll coater, a reverse roll coater, a curtain coater, a spray coater, a gate roll coater, a size press coater, and a shim sizer can be appropriately selected and used for coating.

[0030] The release paper has a role of protecting the surface of the adhesive layer during storage of the adhesive sheet.

[0031] <Adhesive layer> The pressure-sensitive adhesive sheet for fixing a polishing member of the present invention has pressure-sensitive adhesive layers on both sides of the base material layer. As long as it has a pressure-sensitive adhesive layer on the outermost surface, the number of laminated layers is not particularly limited, and another layer may be provided between the base material layer and the pressure-sensitive adhesive layer. The thickness of the pressure-sensitive adhesive layer of the pressure-sensitive adhesive sheet for fixing a polishing member is preferably 5 to 150 μm, more preferably 10 to 100 μm. By setting the pressure-sensitive adhesive layer in the range of 5 to 150 μm, a pressure-sensitive adhesive sheet excellent in adhesiveness can be obtained.

[0032] An acrylic pressure-sensitive adhesive or an elastomer pressure-sensitive adhesive can be used for the pressure-sensitive adhesive layer of the pressure-sensitive adhesive sheet of the present invention, and at least one of the pressure-sensitive adhesive layers is preferably an elastomer pressure-sensitive adhesive layer. In addition, the elastomer pressure-sensitive adhesive layer is preferably in contact with the release paper. When the elastomer pressure-sensitive adhesive layer is in contact with the release paper, the tack of the pressure-sensitive adhesive layer when the release paper is peeled off is suppressed while maintaining the adhesive strength, and the pasting workability is excellent. Incidentally, when one is an elastomer pressure-sensitive adhesive layer, the other pressure-sensitive adhesive layer can be appropriately selected, such as an acrylic pressure-sensitive adhesive layer or an elastomer pressure-sensitive adhesive layer, but it is preferably an acrylic pressure-sensitive adhesive layer from the viewpoints of chemical resistance and control of adhesive strength.

[0033] The elastomer pressure-sensitive adhesive layer is preferably the surface to be attached to the surface plate side of the polishing apparatus.

[0034] <Elastomer pressure-sensitive adhesive layer> The elastomer pressure-sensitive adhesive layer of the present invention is composed of an elastomer pressure-sensitive adhesive, and the elastomer pressure-sensitive adhesive contains an elastomer and an adhesion-imparting resin. The elastomer preferably contains a styrene-isoprene block copolymer (A). Further, the adhesion-imparting resin preferably contains a terpene phenol resin (B). Hereinafter, the details of each component will be described.

[0035] The styrene-isoprene block copolymer (A) may have a linear structure or a radial structure. When it has a linear structure, it has a highly flexible structure, so it has excellent adhesion to various adherends and shows more excellent effects on adhesive performance and heat resistance. Therefore, it is preferably a linear structure composed of a triblock of styrene-isoprene-styrene (SIS) or a diblock of styrene-isoprene (SI). The styrene-isoprene block copolymer with a linear structure refers to a linear copolymer in which a block of styrene and a block of isoprene are bonded.

[0036] The styrene content in the styrene-isoprene block copolymer (A) is preferably 20 to 40% by weight, more preferably 22 to 40% by weight, in 100% by weight. The diblock content is preferably 15 to 70% by weight, more preferably 25 to 70% by weight, and even more preferably 50 to 70% by weight. When the styrene content and the diblock content are within the above ranges, it can have excellent adhesive performance with excellent cohesive force, and the holding power and chemical resistance after high-humidity environment are improved.

[0037] Examples of the styrene-isoprene block copolymer include Quintac 3280 (manufactured by Nippon Zeon Co., Ltd., styrene content 25% by weight, diblock content 17% by weight), Quintac 3270 (manufactured by Nippon Zeon Co., Ltd., styrene content 24% by weight, diblock content 67% by weight), Quintac 3450 (manufactured by Nippon Zeon Co., Ltd., styrene content 19% by weight, diblock content 30% by weight), Quintac 3520 (manufactured by Nippon Zeon Co., Ltd., styrene content 15% by weight, diblock content 78% by weight), Quintac 3433N (manufactured by Nippon Zeon Co., Ltd., styrene content 16% by weight, diblock content 56% by weight), Quintac 3421 (manufactured by Nippon Zeon Co., Ltd., styrene content 14% by weight, diblock content 26% by weight), Quintac 3620 (manufactured by Nippon Zeon Co., Ltd., styrene content 14% by weight, diblock content 12% by weight), Kraton D1119 (manufactured by Kraton Corporation, styrene content 22% by weight, diblock content 66% by weight), Kraton D1126 (manufactured by Kraton Corporation, styrene content 21% by weight, diblock content 30% by weight), Kraton D1193 (manufactured by Kraton Corporation, styrene content 24% by weight, diblock content 20% by weight), Kraton D1117 (manufactured by Kraton Corporation, styrene content 17% by weight, diblock content 33% by weight), Kraton D1163 (manufactured by Kraton Corporation, styrene content 15% by weight, diblock content 38% by weight), Kraton D1161 (manufactured by Kraton Corporation, styrene content 15% by weight, diblock content 19% by weight), and the like. It is not limited to these, and such styrene-isoprene block copolymers can be used as required within the range that does not impair the required performance, and two or more kinds can be used in combination.

[0038] It is preferable that the styrene-isoprene block copolymer (A) contains 50 to 100% by weight of the styrene-isoprene block copolymer (A) in 100% by weight of the elastomer in terms of the balance between adhesive force and cohesive force, and more preferably 80 to 100% by weight.

[0039] Also, as long as the required performance is not impaired, natural rubber may be contained. The natural rubber is not particularly limited, but it is preferably kneaded with a kneading roll and has a Mooney viscosity of, for example, 10 to 100. Other elastomers and natural rubbers are not limited thereto, and one or more of them can be used in combination.

[0040] The elastomer adhesive layer of the present invention preferably has a probe tack value of 0.002 to 0.03 N, more preferably 0.002 to 0.02 N, and even more preferably 0.005 to 0.01 N when measured using a stainless steel cylindrical probe with a diameter of 5 mm and a 20 g weight, under the conditions of a probe speed of 1 m / min and a probe grounding time of 1 s. When the probe tack value is within the above range, initial peeling is facilitated, and the workability of attaching to the polishing device is excellent.

[0041] <Adhesion - imparting resin> Examples of the adhesion - imparting resin include rosin - based resins such as rosin ester, polymerized rosin, hydrogenated rosin, disproportionated rosin, maleic acid - modified rosin, fumaric acid - modified rosin, and rosin - phenol resin; terpene - based resins such as α - pinene resin, β - pinene resin, dipentene resin, aromatic - modified terpene resin, hydrogenated terpene resin, terpene - phenol resin, acid - modified terpene resin, and styrenated terpene resin; alkylphenol resin, coumarone - based resin, styrene - based resin, petroleum - based resin or its copolymer, etc. Among them, terpene - phenol resin (B) is particularly preferred. The above - mentioned adhesion - imparting resins can be used alone or in combination of two or more.

[0042] Since the terpene - phenol resin (B) has excellent compatibility with the styrene - isoprene block copolymer (A), it can impart adhesion performance to the styrene - isoprene block copolymer (A) in a well - balanced manner, and it is difficult to cause a decrease in the cohesive force of the adhesive layer due to the adhesion - imparting resin when used, suppresses the decrease in cohesive force, and can impart adhesion performance.

[0043] The upper limit of the hydroxyl value of the terpene phenol resin (B) is preferably 70 mgKOH / g or less, more preferably 50 mgKOH / g or less. Also, the lower limit of the hydroxyl value is preferably 10 mgKOH / g or more, more preferably 30 mgKOH / g or more. When the hydroxyl value is within the above range, it is possible to have excellent adhesion performance.

[0044] Examples of the terpene phenol resin (B) having a hydroxyl value of 70 mgKOH / g or less include SylVares TP95 (manufactured by Arizona Chemical, softening point 95 ± 5 °C, hydroxyl value 40 mgKOH / g), SylVares TP105 (manufactured by Arizona Chemical, softening point 105 ± 5 °C, hydroxyl value 40 mgKOH / g), SylVares TP115 (manufactured by Arizona Chemical, softening point 115 ± 5 °C, hydroxyl value 50 mgKOH / g), (YS Polyster U115 (manufactured by Yasuhara Chemical, softening point 115 ± 5 °C, hydroxyl value 35 mgKOH / g), YS Polyster T80 (manufactured by Yasuhara Chemical, softening point 80 ± 5 °C, hydroxyl value 60 mgKOH / g), YS Polyster T100 (manufactured by Yasuhara Chemical, softening point 100 ± 5 °C, hydroxyl value 60 mgKOH / g), YS Polyster T115 (manufactured by Yasuhara Chemical, softening point 115 ± 5 °C, hydroxyl value 60 mgKOH / g), YS Polyster T130 (manufactured by Yasuhara Chemical, softening point 130 ± 5 °C, hydroxyl value 60 mgKOH / g), YS Polyster T145 (manufactured by Yasuhara Chemical, softening point 145 ± 5 °C, hydroxyl value 60 mgKOH / g), etc. can be exemplified, but it is not limited thereto. Such tackifying resins can be used as needed within the range that does not impair the required performance, and two or more kinds can be used in combination.

[0045] The content of the terpene phenol resin (B) is preferably 20 to 60 parts by mass, more preferably 10 to 50 parts by mass, and particularly preferably 10 to 25 parts by mass with respect to 100 parts by mass of the elastomer. When the content of the terpene phenol resin (B) is within the above range, it is easy to obtain a balance between adhesiveness and cohesion, and it is possible to suppress a decrease in cohesion caused by the tackifying resin.

[0046] The softening point of the terpene phenol resin (B) is preferably 80 to 170°C, more preferably 95 to 150°C. When the softening point is within the above range, a decrease in cohesive force caused by the tackifying resin can be suppressed, a decrease in adhesive force after a high-humidity environment can be suppressed, and the holding force is improved. <Hardening agent>

[0047] A hardening agent can be added to the elastomer adhesive as needed. Since the required numerical values of the peeling force when peeling from the lapping machine surface plate vary from high adhesive force to low adhesive force, it is possible to add a hardening agent for the purpose of controlling the adhesive force. As the hardening agent, an isocyanate-based hardening agent, an aziridine-based hardening agent, a metal chelate-based hardening agent, an epoxy-based hardening agent, etc. can be used as needed within the range that does not impair the obtainable performance. Among them, from the viewpoint of cohesive force, an isocyanate-based hardening agent is preferred.

[0048] The amount of the hardening agent is preferably 1 to 10 parts by mass, more preferably 2 to 7 parts by mass, based on 100 parts by mass of the elastomer. By being 1 part by mass or more, it is easy to obtain a cohesive force that can withstand a strong shearing force, and by being 12 parts by mass or less, it has excellent heat resistance and is less likely to have a decrease in adhesion to the abrasive.

[0049] Examples of the isocyanate curing agent include polyisocyanate compounds such as tolylene diisocyanate, hexamethylene diisocyanate, isophorone diisocyanate, xylylene diisocyanate, hydrogenated xylylene diisocyanate, diphenylmethane diisocyanate, hydrogenated diphenylmethane diisocyanate, tetramethylxylylene diisocyanate, naphthalene diisocyanate, triphenylmethane triisocyanate, polymethylene polyphenyl isocyanate, and adducts, burettes, isocyanurates of these isocyanate compounds with polyol compounds such as trimethylolpropane, and further adducts of these isocyanate compounds with known polyether polyols, polyester polyols, acrylic polyols, polybutadiene polyols, polyisoprene polyols, etc. Among them, the adduct of tolylene diisocyanate and trimethylolpropane is preferred as the isocyanate curing agent.

[0050] Examples of the aziridine curing agent include N,N'-hexamethylene-1,6-bis(1-aziridinecarboxamide), trimethylolpropane-tri-β-aziridinylpropionate, N,N'-diphenylmethane 4,4'-bis(1-aziridinecarboxamide), trimethylolpropane-tri-β-(2-methylaziridine)propionate, etc.

[0051] Examples of the metal chelate curing agent include metal complex compounds. Metals include nickel, aluminum, chromium, iron, titanium, zinc, cobalt, manganese, copper, tin, zirconium, etc. Examples of the metal chelate compound include ferric trisacetylacetonate, aluminum trisacetylacetonate, aluminum monoacetylacetonate bis(ethylacetoacetate), aluminum tris(ethylacetoacetate), etc. Among them, aluminum trisacetylacetonate is more preferred.

[0052] Examples of the epoxy curing agent include bisphenol A, an epoxy resin of the epichlorohydrin type, ethylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, glycerin diglycidyl ether, glycerin triglycidyl ether, 1,6 - hexanediol diglycidyl ether, trimethylolpropane triglycidyl ether, diglycidylaniline, diaminoglycidylamine, N,N,N',N'-tetraglycidyl - m - xylylenediamine, and 1,3 - bis(N,N'-diaminoglycidylaminomethyl)cyclohexane, etc.

[0053] These curing agents may be used alone or in combination of two or more.

[0054] <Acrylic pressure - sensitive adhesive layer> The acrylic pressure - sensitive adhesive layer of the present invention is composed of an acrylic pressure - sensitive adhesive, and the acrylic pressure - sensitive adhesive contains an acrylic copolymer and a curing agent. The acrylic copolymer preferably has a carboxyl group or a hydroxyl group, and more preferably is a (meth)acrylate resin (a) having a hydroxyl group. The acrylic pressure - sensitive adhesive may further contain, for example, other acrylic copolymers, urethane resins, silicone resins, or elastomeric resins such as rubber.

[0055] <(Meth)acrylate resin (a)> The (meth)acrylate resin (a) is obtained by copolymerizing a monomer having a hydroxyl group and another monomer having no hydroxyl group. That is, the (meth)acrylate resin (a) is a copolymer composed of units derived from a monomer having a hydroxyl group and units derived from other monomers.

[0056] Examples of the monomer having a hydroxyl group include hydroxyalkyl (meth)acrylate and a compound obtained by adding ε - caprolactone to the hydroxyalkyl (meth)acrylate, etc., and hydroxyalkyl (meth)acrylate is preferred.

[0057] Specific examples of the hydroxyalkyl (meth)acrylate include hydroxyalkyl (meth)acrylates having 1 to 4 carbon atoms in the alkyl group such as 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 3-hydroxypropyl (meth)acrylate, 2-hydroxybutyl (meth)acrylate, and 4-hydroxybutyl (meth)acrylate. Specific examples of the compound obtained by adding ε-caprolactone to the hydroxyalkyl (meth)acrylate include ε-caprolactone adducts of hydroxyalkyl (meth)acrylates having 1 to 4 carbon atoms such as 1-mole adduct of ε-caprolactone to 2-hydroxyethyl (meth)acrylate, 2-mole adduct of ε-caprolactone to 2-hydroxyethyl (meth)acrylate, and 3-mole adduct of ε-caprolactone to 2-hydroxyethyl (meth)acrylate. However, the present invention is not limited only to such examples. These hydroxyl group-containing monomers may be used alone or in combination. 2-Hydroxyethyl (meth)acrylate is particularly preferred from the viewpoint that the intermolecular distance is relatively close when crosslinked with an isocyanate curing agent and the chemical resistance is improved.

[0058] As other monomers having no hydroxyl group, various monomers as shown below can be mentioned. Examples of the alkyl (meth)acrylate include alkyl (meth)acrylates such as methyl (meth)acrylate, ethyl (meth)acrylate, n-propyl (meth)acrylate, n-butyl (meth)acrylate, isobutyl (meth)acrylate, sec-butyl (meth)acrylate, tert-butyl (meth)acrylate, isoamyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, isononyl (meth)acrylate, isodecyl (meth)acrylate, lauryl (meth)acrylate, stearyl (meth)acrylate, and tert-butylhexyl (meth)acrylate, and 2-acetoacetoxyethyl (meth)acrylate, phenoxyethyl (meth)acrylate, and the like.

[0059] The weight average molecular weight (Mw) of the acrylic copolymer is preferably from 300,000 to 1,500,000, more preferably from 500,000 to 1,200,000. When the weight average molecular weight (Mw) is 300,000 or more, it is easy to obtain the cohesive force that the adhesive can withstand strong shear force. When it is 1,500,000 or less, it has excellent heat resistance and is difficult to reduce the adhesion to the abrasive.

[0060] Examples of the method for polymerizing the monomer include solution polymerization method, bulk polymerization method, suspension polymerization method, emulsion polymerization method, etc., but the present invention is not limited by such polymerization methods. Among these polymerization methods, the solution polymerization method is preferred because the obtained reaction mixture can be used as it is.

[0061] <Hardener> As the hardener added to the acrylic adhesive, the same hardeners as those of the above-mentioned elastomer adhesive can be used. Among them, from the viewpoints of cohesive force and heat resistance, isocyanate-based hardeners are preferred.

[0062] The amount of the hardener is preferably 1 to 10 parts by mass, more preferably 2 to 8 parts by mass, based on 100 parts by mass of the acrylic copolymer. When it is 1 part by mass or more, it is easy to obtain the cohesive force that can withstand strong shear force. When it is 15 parts by mass or less, it has excellent heat resistance and is difficult to reduce the adhesion to the abrasive.

[0063] <Other additives> The elastomer adhesive and acrylic adhesive according to the present invention may contain various additives such as fillers, pigments, dyes, diluents, anti-aging agents, polymerization inhibitors, ultraviolet absorbers, ultraviolet stabilizers, coupling agents, etc. that are blended in known adhesive compositions as necessary, and two or more kinds may also be used. Also, the addition amount of the additive may be an amount that can obtain the required physical properties and is not particularly limited.

[0064] The anti-aging agent is used for the purpose of preventing deterioration of the elastomer adhesive layer and the acrylic adhesive layer. Examples of such anti-aging agents include Nonflex WS, Nonflex WS-P, Nonflex MBP, Nonflex CBP, Nonflex EBP, Nonflex TNP, Nonflex MB, Nonflex RD, Nonflex OS, Nonflex DCD manufactured by Seiko Chemical Co., Ltd., and Irganox 1010 manufactured by BASF Japan Ltd. The anti-aging agent is not limited to these, and can be used as needed within the range that does not impair the required performance, and can be used alone or in combination of two or more.

[0065] <Base material layer (core material layer)> The base material constituting the base material layer of the present invention is preferably a non-woven fabric and a plastic film. Examples of the plastic film include those made of polyolefins such as polyethylene and polypropylene, polyesters such as polyethylene terephthalate, PPS (polyphenylene sulfide), nylon, triacetyl cellulose, cycloolefin, polyimide, and polyamide into films. The thickness of the base material is not particularly limited, but is preferably 5 to 200 μm.

[0066] The base material of the present invention may be subjected to an easy adhesion treatment to enhance the adhesion to the adhesive layer. As the easy adhesion treatment, known methods such as a dry method of performing corona discharge and a wet method of coating with an anchor coating agent can be used.

[0067] In the case of an elastomer adhesive, if an easy adhesion treatment of performing corona discharge is performed, the adhesive is likely to peel off from the base material. Therefore, it is preferable to apply the elastomer adhesive to the surface that has not been subjected to the easy adhesion treatment.

[0068] <Preparation of the adhesive sheet for fixing the polishing member> An example of the method for preparing the adhesive sheet of the present invention will be described. First, an adhesive is applied to the release surface of the release paper and dried to form an adhesive layer. Separately, an adhesive is applied onto a release liner to form an adhesive layer. Then, by laminating the adhesive layer on the release paper and the adhesive layer on the release film to both sides of the base material, the adhesive sheet shown in FIG. 5 can be produced.

[0069] FIG. 5 is a schematic cross-sectional view for explaining the configuration of the adhesive sheet for fixing a polishing member. In the adhesive sheet (50) for fixing a polishing member of FIG. 5, an adhesive layer (14), a base material layer (15), and an adhesive layer (16) are formed in this order on a release paper (40), and a release liner (17) is laminated on the adhesive layer (16). Note that the laminated state shown in FIG. 6 with the release liner (17) removed is also preferable.

[0070] The release liner has a release layer formed by applying a release agent to a base material such as paper, plastic film, synthetic paper, etc. Examples of the release agent include silicone, alkyd resin, melamine resin, fluororesin, acrylic resin, etc. Note that the thickness of the release liner is not particularly limited, but is about 10 to 200 μm.

[0071] For the application of the adhesive, known methods such as roll coater method, comma coater method, lip coater method, die coater method, reverse coater method, silk screen method, gravure coater method, etc. can be used. After application, it can be dried with a hot air oven, infrared heater, etc.

[0072] <Use · Form> An example of the use of the adhesive sheet for fixing a polishing member of the present invention will be described. First, a polishing member laminated body integrated by laminating a polishing member on one surface of the adhesive sheet for fixing a polishing member is formed, and the polishing member laminated body is laminated on the surface plate of a polishing machine and used. The polishing member is, for example, a urethane-based polishing pad, a non-woven fabric-based polishing pad, a suede-based polishing pad, etc. The abrasive member laminate may be formed into a multi-layer structure by laminating cushioning materials. Examples of the cushioning material include urethane-based foams, polyethylene-based foams, polypropylene-based foams, etc., but are not limited thereto as long as they are used as materials constituting the abrasive member laminate for the purpose of polishing. In the present invention, the abrasive member, polishing cloth, polishing pad, polishing pad, and polishing PAD are synonymous.

[0073] Since the adhesive sheet for fixing the abrasive member of the present invention is excellent in sticking workability, it can be suitably used even when sticking to the surface plate of a large polishing device. The size of the adhesive sheet to be used is such that the length of the short side in the single plate form is 2000 mm or more, or the length in the width direction in the roll form is 2000 mm or more.

[0074] <Example> Hereinafter, the present invention will be described more specifically by way of examples, but the present invention is not limited to the following examples. In the examples, "parts" means "parts by mass" and "%" means "% by weight".

[0075] In the following examples, the molecular weight is the weight average molecular weight in terms of polystyrene measured by GPC (gel permeation chromatography). The measuring device is GPC-8020 (manufactured by Tosoh Corporation), the eluent is tetrahydrofuran, three TSKgel Super HM-M (manufactured by Tosoh Corporation) columns are used, and the measurement is carried out at a column temperature of 40°C, a flow rate of 0.6 mL / min, a sample concentration of 0.3%, and an injection volume of 10 μL.

[0076] The non-volatile content means a value calculated from the mass of the sample after heating when 1 g of the sample is heated at 170°C for 10 minutes / the mass of the sample before heating. However, in the case of commercially available products, a value calculated based on the method specified by the manufacturer may be adopted.

[0077] The acid value was measured by the potentiometric titration method specified in JIS K1557, and the solid content acid value [mgKOH / g] was calculated as acid value [mgKOH / g] ÷ non-volatile content [%].

[0078] The hydroxyl value was measured by potentiometric titration according to Method A (acetylation method) specified in JIS K1557, and the solid hydroxyl value [mgKOH / g] was calculated as solid hydroxyl value [mgKOH / g] = hydroxyl value [mgKOH / g] ÷ non-volatile content [%].

[0079] The glass transition temperature was determined by drying a resin solution to form a test piece with a thickness of about 100 μm and a width of 5 mm, and gripping it with a gripping length of 15 mm. While applying a tensile strain of 0.05% at a frequency of 10 Hz, the temperature was raised from room temperature to 200 °C at a rate of 10 °C / min to obtain a plot of the loss tangent tanδ against temperature. The glass transition temperature was determined by reading the peak top temperature of the obtained plot.

[0080] <<Base paper>> <Glassine paper> The following three types of grammage glassine papers were prepared. · Grammage 35 g / m 2 · Grammage 75 g / m 2 · Grammage 90 g / m 2 <Fine paper> The following seven types of grammage fine papers were prepared. · Grammage 52.3 g / m 2 · Grammage 64 g / m 2 · Grammage 81.4 g / m 2 · Grammage 104.7 g / m 2 · Grammage 127.9 g / m 2 · Grammage 157 g / m 2 · Grammage 209.3 g / m 2 <Kraft paper> The following three types of grammage kraft papers were prepared. · Grammage 50 g / m 2 · Grammage 60 g / m 2 · Grammage 85 g / m 2

[0081] <Polyvinyl alcohol> · Manufactured by Kuraray Co., Ltd. (Kuraray Poval: 3-98): Saponification degree 98.0 - 99.0 mol% · Manufactured by Kuraray Co., Ltd. (Kuraray Poval: 27-96): Saponification degree 95.5 - 96.5 mol% · Manufactured by Kuraray Co., Ltd. (Kuraray Poval: 17-94): Saponification degree 92.5 - 94.5 mol% · Manufactured by Kuraray Co., Ltd. (Kuraray Poval: 35-80): Saponification degree 79.0 - 81.0 mol%

[0082] <Release agent> · Manufactured by Dow Corning Toray Co., Ltd. (SP7015): Solvent-free addition type silicone release agent

[0083] <Catalyst> · Manufactured by Dow Corning Toray Co., Ltd. (SRX212P): General-purpose curing catalyst for solvent-free type

[0084] <Release liner> · Manufactured by Iimura Co., Ltd. (RF2PETCS001): Polyester film, single-sided release treatment, thickness 38 μm

[0085] <Manufacture of elastomer adhesive (E-1)> Into a four-necked flask equipped with a stirrer, thermometer, reflux condenser, dropping device, and nitrogen inlet tube, under a nitrogen atmosphere, 100 parts by mass of Quintac 3270 (manufactured by Nippon Zeon Co., Ltd., styrene content 24% by weight, diblock content 67% by weight) as an elastomer and an appropriate amount of methyl ethyl ketone and toluene as solvents were charged. Then the flask was gradually heated, and heating was continued at an internal temperature of about 50°C for 3 hours. After the heating was completed, it was cooled, and at an internal temperature of about 40°C or lower, 39 parts by mass of YS Polyster T130 (manufactured by Yasuhara Chemical Co., Ltd., softening point 130 ± 5°C, hydroxyl value 60 mgKOH / g) as a tackifier resin and 2 parts by mass of Irganox 1010 (manufactured by BASF Japan Ltd., antioxidant) as an antioxidant were charged, diluted with methyl ethyl ketone and toluene, and stirring was continued until the tackifier resin was dissolved to obtain an elastomer adhesive (E-1) with a non-volatile content of 49.0% and a viscosity of 1500 mPa·s.

[0086] <Manufacture of elastomer adhesive (E-2)> Into a four-necked flask equipped with a stirrer, thermometer, reflux condenser, dropping device, and nitrogen inlet tube, under a nitrogen atmosphere, 100 parts by mass of Quintac 3620 (manufactured by Nippon Zeon Co., Ltd., styrene content 14% by weight, diblock content 12% by weight) as an elastomer and appropriate amounts of methyl ethyl ketone and toluene as solvents were charged. Then, the flask was gradually heated and heating was continued at an internal temperature of about 50 °C for 3 hours. After the heating was completed, it was cooled, and at an internal temperature of about 40 °C or lower, 39 parts by mass of YS Polyster T130 (manufactured by Yasuhara Chemical Co., Ltd., softening point 130 ± 5 °C, hydroxyl value 60 mgKOH / g) as a tackifier resin and 2 parts by mass of Irganox 1010 (manufactured by BASF Japan Ltd., antioxidant) as an antioxidant were charged, diluted with methyl ethyl ketone and toluene, and stirring was continued until the tackifier resin was dissolved to obtain an elastomer adhesive (E-2) with a non-volatile content of 49.0% and a viscosity of 1500 mPa·s.

[0087] <Production of Elastomer Adhesive (E-3)> Into a four-necked flask equipped with a stirrer, thermometer, reflux condenser, dropping device, and nitrogen inlet tube, under a nitrogen atmosphere, 100 parts by mass of Quintac 3433N (manufactured by Nippon Zeon Co., Ltd., styrene content 16% by weight, diblock content 56% by weight) as an elastomer and appropriate amounts of methyl ethyl ketone and toluene as solvents were charged. Then, the flask was gradually heated and heating was continued at an internal temperature of about 50 °C for 3 hours. After the heating was completed, it was cooled, and at an internal temperature of about 40 °C or lower, 39 parts by mass of YS Polyster T130 (manufactured by Yasuhara Chemical Co., Ltd., softening point 130 ± 5 °C, hydroxyl value 60 mgKOH / g) as a tackifier resin and 2 parts by mass of Irganox 1010 (manufactured by BASF Japan Ltd., antioxidant) as an antioxidant were charged, diluted with methyl ethyl ketone and toluene, and stirring was continued until the tackifier resin was dissolved to obtain an elastomer adhesive (E-3) with a non-volatile content of 49.0% and a viscosity of 1500 mPa·s.

[0088] <Production of Elastomer Adhesive (E-4)> Into a four-necked flask equipped with a stirrer, a thermometer, a reflux condenser, a dropping device, and a nitrogen inlet tube, under a nitrogen atmosphere, 100 parts by mass of Quintac 3270 (manufactured by Nippon Zeon Co., Ltd., styrene content 24% by weight, diblock content 67% by weight) as an elastomer and an appropriate amount of methyl ethyl ketone and toluene as solvents were charged. Subsequently, the flask was gradually heated, and heating was continued at an internal temperature of about 50°C for 3 hours. After completion of heating, it was cooled, and at an internal temperature of about 40°C or lower, 39 parts by mass of YS Polyster G125 (manufactured by Yasuhara Chemical Co., Ltd., softening point 125 ± 5°C, hydroxyl value 120 mgKOH / g) as a tackifier resin and 2 parts by mass of Irganox 1010 (manufactured by BASF Japan Ltd., antioxidant) as an antioxidant were charged, diluted with methyl ethyl ketone and toluene, and stirring was continued until the tackifier resin was dissolved to obtain an elastomer adhesive (E-4) having a non-volatile content of 49.0% and a viscosity of 1500 mPa·s.

[0089] <Production of Elastomer Adhesive (E-5)> Into a four-necked flask equipped with a stirrer, a thermometer, a reflux condenser, a dropping device, and a nitrogen inlet tube, under a nitrogen atmosphere, 100 parts by mass of Quintac 3270 (manufactured by Nippon Zeon Co., Ltd., styrene content 24% by weight, diblock content 67% by weight) as an elastomer and an appropriate amount of methyl ethyl ketone and toluene as solvents were charged. Subsequently, the flask was gradually heated, and heating was continued at an internal temperature of about 50°C for 3 hours. After completion of heating, it was cooled, and at an internal temperature of about 40°C or lower, 39 parts by mass of YS Polyster T30 (manufactured by Yasuhara Chemical Co., Ltd., softening point 30 ± 5°C, hydroxyl value 60 mgKOH / g) as a tackifier resin and 2 parts by mass of Irganox 1010 (manufactured by BASF Japan Ltd., antioxidant) as an antioxidant were charged, diluted with methyl ethyl ketone and toluene, and stirring was continued until the tackifier resin was dissolved to obtain an elastomer adhesive (E-5) having a non-volatile content of 49.0% and a viscosity of 1500 mPa·s.

[0090] <Production of Acrylic Adhesive (A-1)> In a four-necked flask equipped with a cooling tube, a stirring device, a thermometer, and a nitrogen introduction tube, under a nitrogen atmosphere, 23.5 parts by mass of butyl acrylate, 22.45 parts by mass of 2-ethylhexyl acrylate, 2.5 parts by mass of vinyl acetate, 1.5 parts by mass of acrylic acid, 0.05 parts by mass of 2-hydroxyethyl acrylate, ethyl acetate as a solvent, and an appropriate amount of azobisisobutyronitrile as an initiator were charged. Separately, in a dropping tube, 23.5 parts by mass of butyl acrylate, 22.45 parts by mass of 2-ethylhexyl acrylate, 2.5 parts by mass of vinyl acetate, 1.5 parts by mass of acrylic acid, 0.05 parts by mass of 2-hydroxyethyl acrylate, ethyl acetate as a solvent, and an appropriate amount of azobisisobutyronitrile as an initiator were charged. Then, the flask was gradually heated, and after confirming the start of the reaction, the solution was dropped from the dropping tube over 1 hour. Further, the reaction was continued at an internal temperature of about 80 °C for 8 hours. After completion of the reaction, while cooling, dilution with ethyl acetate and toluene gave an acrylate resin having a nonvolatile content of 44.2%. The acrylate resin had a glass transition temperature of 63 °C and a weight average molecular weight (Mw) of 780,000.

[0091] 100 parts of the acrylate resin and 3.27 parts of an isocyanate-based curing agent (manufactured by Mitsubishi Chemical Corporation (Mitec GP105A): tolylene diisocyanate, trimethylolpropane adduct) were stirred and mixed to prepare an acrylic pressure-sensitive adhesive (A-1) having a nonvolatile content of 45%.

[0092] [Example 1] [Preparation of Adhesive Sheet for Fixing Polishing Member] On glassine paper (basis weight 90 g / m 2 ), polyvinyl alcohol (manufactured by Kuraray Co., Ltd., Kuraray Poval 27-96, saponification degree 95.5 - 96.5 mol%) was coated on one side at 0.3 g / m 2 and dried at 100 °C for 20 seconds. The same procedure was performed on the other side to create a support having PVA layers on both sides. On one side of the support, a release agent (a mixture of 100 parts of Dow Corning Toray Co., Ltd., SP7015 and 1.0 part of SRX212P) was coated at 1.0 g / m 2 and dried at 120 °C for 30 seconds to form a release layer and obtain release paper.

[0093] An elastomeric adhesive (E-1) was applied onto the release layer of the release paper so that the dried thickness became 40 μm, and dried at 100°C for 2 minutes to obtain an adhesive layer 1 (elastomeric adhesive layer). Thereafter, the adhesive layer 1 was laminated onto the untreated corona surface of a base material (Toray Industries, Inc. (E-5107): polyester film, one-sided corona treatment, thickness 25 μm). Separately, an acrylic adhesive (A-1) was applied onto a release liner so that the dried thickness became 45 μm, and dried at 100°C for 2 minutes to obtain an adhesive layer 2 (acrylic adhesive layer). Then, the adhesive layer 2 was laminated onto the surface of the base material (corona-treated surface) where the adhesive layer 1 was not laminated, and left to stand at 23°C - 50% for 1 week to obtain an adhesive sheet (S-1) for fixing a polishing member, which consisted of a release paper / adhesive layer 1 / base material / adhesive layer 2 / release liner.

[0094] <Workability of attaching to a surface plate> The obtained adhesive sheet for fixing a polishing member was cut into a size of 500 mm in width × 500 mm in length, and this was used as a sample. Next, in an atmosphere of 23°C - 50%RH, while peeling off the release paper, the workability when manually attaching the exposed adhesive layer 1 onto a stainless steel workbench was evaluated. Five arbitrarily selected persons each performed the work 2 times (10 times in total for one sheet) and evaluated it. The evaluation criteria are as follows. S: In all 10 evaluations, no wrinkles, creases, or air entrapment occurred and it was attached extremely well A: In 9 out of 10 evaluations, no wrinkles, creases, or air entrapment occurred and it was attached well B: In 7 - 8 out of 10 evaluations, no wrinkles, creases, or air entrapment occurred and it was attached practically usable D: In 10 evaluations, the number of times without wrinkles, creases, or air entrapment and attached was 6 times or less, not suitable for practical use

[0095] <Transportability of the base paper> When producing the release paper, in the steps of applying polyvinyl alcohol to the base paper and applying the release agent, visual evaluation was performed to ensure that no deformation (wrinkling, creasing) or breakage such as tearing occurred in the base paper. The evaluation criteria are as follows. S: No deformation or breakage is observed. The best. A: No breakage, but slight deformation is observed. Practicable. D: Significant deformation and breakage are observed. Not suitable for practical use.

[0096] <Preparation of Measurement Sample A> In an atmosphere of 23°C - 50% RH, the release liner of the adhesive sheet for fixing the polishing member was peeled off, the exposed adhesive layer 2 was bonded to a 25 μm PET film, and it was cut into a size of 25 mm in width × 100 mm in length. Then, the release paper was peeled off, and the exposed adhesive layer 1 was pressure-bonded to a stainless steel plate with a 2 kg roller for one round trip and left for 24 hours, thereby obtaining Measurement Sample A composed of a stainless steel plate / adhesive layer 1 / base material / adhesive layer 2 / PET film.

[0097] <Preparation of Measurement Sample B> The adhesive sheet for fixing the polishing member was left in an atmosphere of 23°C - 85% RH for 30 days and then left in an atmosphere of 23°C - 50% RH for 24 hours. In an atmosphere of 23°C - 50% RH, the release liner of the adhesive sheet for fixing the polishing member was peeled off, the exposed adhesive layer 2 was bonded to a 25 μm PET film, and it was cut into a size of 25 mm in width × 100 mm in length. Then, the release paper was peeled off, and the exposed adhesive layer 1 was pressure-bonded to a stainless steel plate with a 2 kg roller for one round trip and left for 24 hours, thereby obtaining Measurement Sample B composed of a stainless steel plate / adhesive layer 1 / base material / adhesive layer 2 / PET film.

[0098] <Measurement of Initial Adhesive Force> In an atmosphere of 23°C - 50% RH, in accordance with the measurement method of JIS Z1528, using a tensile testing machine, the adhesive force (adhesion to SUS) of the adhesive layer 1 was measured under the conditions of a peeling angle of 180 degrees and a peeling speed of 0.5 m / min for Measurement Sample A. The obtained measured values are shown in Table 1.

[0099] <Change in Adhesion after High-Humidity Treatment> Using measurement sample B, the adhesion of the adhesive layer 1 was measured in the same manner as <Measurement of Initial Adhesion>. This was taken as the adhesion after high-humidity treatment. The difference between the <Measurement of Initial Adhesion> and the adhesion after high-humidity treatment was calculated, and it can be said that the smaller this difference, the better the storage performance in a high-humidity environment. The evaluation criteria are as follows. S: The difference in adhesion is less than 0.8 N / 25 mm, the best A: The difference in adhesion is 0.8 N / 25 mm or more and less than 1.0 N / 25 mm, extremely good B: The difference in adhesion is 1.0 N / 25 mm or more and less than 1.3 N / 25 mm, good C: The difference in adhesion is 1.3 N / 25 mm or more and less than 1.7 N / 25 mm, practical D: The difference in adhesion is 1.7 N / 25 mm or more, not suitable for practical use

[0100] <<Chemical Resistance>> <Acid Resistance> Measurement sample A was immersed in a sulfuric acid aqueous solution with a pH of 1.5 and left in an environment at 40 °C for 24 hours. Then, it was taken out from the aqueous solution, washed with water, and left in an atmosphere at 23 °C - 50% RH for 1 hour. The adhesion of the adhesive layer 1 of the above measurement sample A was measured in the same manner as <Measurement of Initial Adhesion> and taken as the "adhesion after acid immersion". The difference between the initial adhesion and the adhesion after the above acid immersion was calculated, and it can be said that the smaller this difference, the better the acid resistance. The evaluation criteria are as follows. S: The difference in adhesion is less than 0.8 N / 25 mm, the best A: The difference in adhesion is 0.8 N / 25 mm or more and less than 1.1 N / 25 mm, extremely good B: The difference in adhesion is 1.1 N / 25 mm or more and less than 1.3 N / 25 mm, good C: The difference in adhesion is 1.3 N / 25 mm or more and less than 1.7 N / 25 mm, practical D: The difference in adhesion is 1.7 N / 25 mm or more, not suitable for practical use <Alkali Resistance> The measurement sample A was immersed in an aqueous sodium hydroxide solution with a pH of 11.5 and left standing for 24 hours in an environment at 40°C. Then, the sample was taken out from the aqueous solution, washed with water, and left standing for 1 hour in an atmosphere of 23°C - 50% RH. The adhesive strength of the adhesive layer 1 was measured for the above measurement sample A in the same manner as <Measurement of Initial Adhesive Strength>, and it was designated as the "adhesive strength after alkali immersion". The difference between the initial adhesive strength and the adhesive strength after the above alkali immersion was calculated, and it can be said that the smaller this difference, the better the alkali resistance. The evaluation criteria are as follows. S: The difference in adhesive strength is less than 0.8 N / 25 mm, which is the best. A: The difference in adhesive strength is 0.8 N / 25 mm or more and less than 1.1 N / 25 mm, which is extremely good. B: The difference in adhesive strength is 1.1 N / 25 mm or more and less than 1.3 N / 25 mm, which is good. C: The difference in adhesive strength is 1.3 N / 25 mm or more and less than 1.7 N / 25 mm, which is practical. D: The difference in adhesive strength is 1.7 N / 25 mm or more, which is not suitable for practical use.

[0101] <Acid Resistance after High-Humidity Treatment> Using the measurement sample B, the adhesive strength of the adhesive layer 1 was measured in the same manner as <Acid Resistance>, and it was designated as the "adhesive strength after acid immersion after high-humidity treatment". The difference between the initial adhesive strength and the adhesive strength after acid immersion after high-humidity treatment was calculated, and it can be said that the smaller this difference, the better the acid resistance after high-humidity treatment. The evaluation criteria are as follows. S: The difference in adhesive strength is less than 0.8 N / 25 mm, which is the best. A: The difference in adhesive strength is 0.8 N / 25 mm or more and less than 1.1 N / 25 mm, which is extremely good. B: The difference in adhesive strength is 1.1 N / 25 mm or more and less than 1.3 N / 25 mm, which is good. C: The difference in adhesive strength is 1.3 N / 25 mm or more and less than 1.7 N / 25 mm, which is practical. D: The difference in adhesive strength is 1.7 N / 25 mm or more, which is not suitable for practical use.

[0102] <Alkali Resistance after High-Humidity Treatment> Using the measurement sample B, the adhesive strength of the adhesive layer 1 was measured in the same manner as <alkali resistance>, and defined as the "adhesive strength after alkali immersion after high humidity treatment". The difference between the initial adhesive strength and the adhesive strength after alkali immersion after high humidity treatment was calculated. The smaller this difference, the better the alkali resistance after high humidity treatment. The evaluation criteria are as follows. S: The difference in adhesive strength is less than 0.8 N / 25 mm, the best A: The difference in adhesive strength is 0.8 N / 25 mm or more and less than 1.1 N / 25 mm, very good B: The difference in adhesive strength is 1.1 N / 25 mm or more and less than 1.3 N / 25 mm, good C: The difference in adhesive strength is 1.3 N / 25 mm or more and less than 1.7 N / 25 mm, practical D: The difference in adhesive strength is 1.7 N / 25 mm or more, not suitable for practical use

[0103] <Retention force> The release liner of the obtained adhesive sheet for fixing the polishing member was peeled off, and the exposed adhesive layer 2 was bonded to a 25-μm PET film. Then, it was made into a size of 25 mm in width × 100 mm in length and used as a sample. Next, in an atmosphere of 23°C - 50% RH, 25 mm in length × 25 mm in width of the release paper was peeled off, and the exposed adhesive layer 1 was pressure-bonded to a stainless steel plate with a 2-kg roll once back and forth, and left in an atmosphere of 23°C - 50% RH for 20 minutes. Then, a 1-kg weight was attached in an atmosphere of 80°C and set so that a force was applied in a 180-degree direction. After 24 hours, it was measured how many millimeters the sample was displaced from the adherend. Also, when the sample was completely displaced and fell off the adherend, the time until the fall was measured. The evaluation criteria are as follows. S: The displacement is less than 0.1 mm, the best A: 0.1 mm or more and less than 1.0 mm, very good B: The displacement is 1.0 mm or more and 5.0 mm or less, good C: It falls after 180 min, practical D: It falls in less than 180 min, not suitable for practical use

[0104] <Retention force after storage in a high humidity environment> The obtained adhesive sheet for fixing the polishing member was left standing in an atmosphere of 23°C - 85% RH for 30 days. The adhesive sheet for fixing the polishing member that had been left standing for 30 days was left standing in an atmosphere of 23°C - 50% RH for 24 hours. Thereafter, the holding force was measured in the same manner as <Holding force> and defined as the "holding force after storage in a high-humidity environment". The evaluation criteria were the same as those for <Holding force>.

[0105] <Probe tack> The obtained adhesive sheet for fixing the polishing member was left in an oven at 40°C for one week and then taken out and left in an atmosphere of 23°C - 50% RH for 24 hours. The release paper of the adhesive sheet that had been left standing for 24 hours was peeled off, and the probe tack value of the exposed adhesive layer 1 was measured. For the measurement, a stainless steel cylindrical probe with a diameter of 5 mmΦ and a weight of 20 g was used, the speed of the probe was 1 m / min, and the contact time between the probe and the adhesive surface was 1 second.

[0106] <Probe tack value after storage in a high-humidity environment> The obtained adhesive sheet for fixing the polishing member was left in an atmosphere of 23°C - 85% RH for 30 days. The adhesive sheet for fixing the polishing member that had been left standing for 30 days was left standing in an atmosphere of 23°C - 50% RH for 24 hours. Thereafter, the probe tack value was measured in the same manner as above and defined as the "probe tack value after storage in a high-humidity environment".

[0107] The various evaluation results of Example 1 are shown in Table 1.

[0108] [Comparative Example 1] Release paper was obtained in the same procedure as in Example 1. Next, an elastomer adhesive (E-1) was applied onto the release layer of the release paper so that the dried thickness would be 40 μm, and dried at 100°C for 2 minutes to obtain an adhesive layer 1 (elastomer adhesive layer). Separately, an acrylic adhesive (A-1) was applied onto a release liner so that the dried thickness would be 45 μm, and dried at 100°C for 2 minutes to obtain an adhesive layer 2 (acrylic adhesive layer). Then, the adhesive layer 2 was laminated onto the adhesive layer 1, and left standing at 23°C - 50% for one week to obtain an adhesive sheet for fixing a polishing member (H-1) composed of release paper / adhesive layer 1 / adhesive layer 2 / release liner.

[0109] [Examples 2 to 20, Comparative Examples 2 to 4] Except for changing the configurations shown in Tables 1 to 3, polishing member fixing adhesive sheets (S-2 to S-20, H-2 to H-4) were produced in the same manner as in Example 1, and Examples 2 to 20 and Comparative Examples 1 to 4 were evaluated in the same manner as in Example 1.

[0110]

Table 1

[0111]

Table 2

[0112]

Table 3

[0113] As shown in Tables 1 to 3, for Comparative Examples 1 to 4, the polishing member fixing adhesive sheets of Examples 1 to 20 had good conveyance properties of the base paper, excellent sticking properties to the surface plate of the polishing apparatus, chemical resistance in high humidity environment storage, and holding power.

Explanation of Signs

[0114] 10, 20: Support 30, 40: Release paper 50, 60: Polishing member fixing adhesive sheet 11: Base paper 12: PVA layer 13: Release layer 14: Adhesive layer 1 15: Base material layer 16: Adhesive layer 2 17: Release liner

Claims

1. An adhesive sheet having adhesive layers on both sides of a base material layer, and a release paper in contact with at least one of the adhesive layers. The release paper is composed of a support having a polyvinyl alcohol layer with a saponification degree of 90 mol% or more on the surface of a base paper having a basis weight of 50 to 200 g / m defined in JIS P8124-2011, and has a release layer on the surface of the support. The adhesive sheet for fixing an abrasive member. ２ ​

2. The adhesive sheet for fixing a polishing member according to claim 1, wherein at least one of the adhesive layers is an elastomer adhesive layer, and the elastomer adhesive layer is in contact with the release paper.

3. The adhesive sheet for fixing a polishing member according to claim 2, wherein the probe tack value measured under the conditions of using a stainless steel cylindrical probe with a diameter of 5 mm, a 20 g weight, a probe speed of 1 m / min, and a probe grounding time of 1 s on the surface of the elastomer adhesive layer is 0.002 to 0.03 N.

4. The elastomer adhesive layer is composed of an elastomer adhesive, the elastomer adhesive contains an elastomer and a tackifier resin, and the elastomer contains a styrene-isoprene block copolymer (A) having a styrene content of 20 to 40% and a diblock content of 15 to 70%. The adhesive sheet for fixing a polishing member according to claim 3.

5. The adhesive sheet for fixing a polishing member according to claim 4, wherein the tackifier resin contains a terpene phenol resin (B) having a hydroxyl value of 70 mgKOH / g or less.

6. The adhesive sheet for fixing a polishing member according to claim 5, which contains 20 to 60 parts by mass of the terpene phenol resin (B) with respect to 100 parts by mass of the elastomer.

7. The adhesive sheet for fixing a polishing member according to claim 6, wherein the softening point of the terpene phenol resin (B) is 80 to 170°C.

8. The adhesive sheet for fixing a polishing member according to claims 1 to 7, wherein when the adhesive sheet is in a single plate form, the length of the short side is 2000 mm or more, or when the adhesive sheet is in a roll form, the length in the width direction is 2000 mm or more.

9. A polishing member laminate obtained by bonding the adhesive sheet for fixing a polishing member according to claim 8 to a polishing member.

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