Carrying device

Abstract

To provide a structure suitable for miniaturization, in a carrying device provided with a hand moved by a linear moving mechanism.SOLUTION: A carrying device A1 includes: a fixed base 1; a guide member 3 supported so as to be turnable around a turning axial line Os perpendicular to the fixed base 1; a linear movement mechanism supported by the guide member 3; a first hand 5A supported by the linear movement mechanism and configured to move along a horizontal linear movement stroke extending in a first direction x by operation of the linear movement mechanism; a motor M2 (turning drive source) configured to apply a turning drive force to the guide member 3; and a turning reduction gear 6 configured to reduce rotation made by the motor M2 inputted to a first input shaft 61 and to output the rotation from a first output shaft 62. The turning reduction gear 6 and the motor M2 are fixed to the guide member 3, and the first output shaft 62 is directly or indirectly attached to the fixed base 1.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present disclosure relates to a conveying device, and more particularly to a conveying device capable of linearly conveying a workpiece.

Background Art

[0002] Among conveying devices, there are those having a mechanism (linear movement mechanism) for moving a hand along a linear movement stroke. Such a conveying device is frequently used, for example, for loading or unloading a thin plate-like workpiece such as a wafer or a glass substrate into or from each processing chamber in a manufacturing process of a semiconductor manufacturing device or a manufacturing process of an FPD (Flat Panel Display).

[0003] As a conveying device for conveying such a thin plate-like workpiece, for example, there is one disclosed in Patent Document 1 below. This conveying device includes a fixed base, a swing base rotatably supported by the fixed base, a linear movement mechanism supported by the swing base, and a pair of hands separately supported by the linear movement mechanism. The linear movement mechanism has a pair of drive mechanisms (for example, belt drive mechanisms) for driving each of the pair of hands, and when the drive mechanisms are driven, the hands are linearly moved in the horizontal direction. Thereby, it is possible to separately convey the thin plate-like workpieces held by the pair of hands along a horizontal linear movement stroke.

[0004] Inside the fixed base or the swing base, a motor for swing-driving the swing base and a speed reducer corresponding to the motor are arranged. The driving force by the above-described swing driving motor is transmitted to the swing base via the speed reducer.

[0005] In recent years, for example, due to the increase in the size of glass substrates and the like used in FPDs, the workpieces to be transported by the transport device have also increased in size and have a considerable weight. In addition, the moving distance of the hand holding the workpiece is also required to be lengthened. As a result, the motors and speed reducers for driving the swivel base have also increased in size respectively, tending to cause an increase in the size of the entire transport device.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0007] The present disclosure has been conceived under such circumstances, and the main problem is to provide a structure suitable for miniaturization in a transport device including a hand that is moved by a linear movement mechanism.

Means for Solving the Problems

[0008] To solve the above problems, the present disclosure employs the following technical means.

[0009] The transport device provided by the present disclosure includes a fixed base, a guide member rotatably supported around a rotation axis perpendicular to the fixed base, a linear movement mechanism supported by the guide member, a first hand supported by the linear movement mechanism and moving along a horizontal linear movement stroke extending in a first direction by the operation of the linear movement mechanism, a rotation drive source for applying a turning driving force to the guide member, and a rotation speed reducer for reducing the rotation by the rotation drive source input to a first input shaft and outputting it from a first output shaft. The rotation speed reducer and the rotation drive source are fixed to the guide member, and the first output shaft is directly or indirectly attached to the fixed base.

[0010] In a preferred embodiment, the linear movement mechanism includes a pair of first guide rails each extending in the first direction and spaced apart in a second direction orthogonal to both the vertical direction and the first direction. The pair of first guide rails movably supports the first hand. The rotational drive source is located on one side of the rotational reduction gear in the first direction and is located between the pair of first guide rails in the second direction.

[0011] In a preferred embodiment, the first input shaft is located above the first output shaft, and a belt is wound around a pulley attached to the output shaft of the rotational drive source and a pulley attached to the first input shaft.

[0012] In a preferred embodiment, it further includes a second hand supported by the linear movement mechanism and moving along the movement stroke extending in the first direction by the operation of the linear movement mechanism, a first drive source for applying a driving force to the first hand, and a second drive source for applying a driving force to the second hand. The first drive source and the second drive source are located on the other side of the rotational reduction gear in the first direction.

[0013] In a preferred embodiment, it further includes a lifting base that is supported so as to be movable up and down with respect to the fixed base and supports the guide member. The first output shaft is fixed to the lifting base, and the rotational reduction gear has a flange portion fixed to the guide member.

Advantages of the Invention

[0014] According to the conveying device of the present disclosure, by arranging the rotary reducer and the rotary drive source inside the guide member, the space for arranging the rotary reducer and the rotary drive source inside the fixed base becomes unnecessary. As a result, the size of the fixed base in the radial direction (the direction perpendicular to the rotation axis) can be reduced, and the miniaturization of the conveying device can be achieved. Further, since the rotary reducer is fixed to the guide member and the first output shaft of the rotary reducer is attached to the fixed base side, the rotary reducer itself functions as a member that rotates while supporting the guide member. Therefore, the need for a swivel base (a separate member) for supporting the guide member in the conventional configuration is eliminated. As a result, the size of the fixed base in the vertical direction can be reduced, and the miniaturization of the conveying device can be achieved.

[0015] Other features and advantages of the present disclosure will become more apparent from the following detailed description with reference to the accompanying drawings.

Brief Description of the Drawings

[0016]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Modes for Carrying Out the Invention

[0017] Hereinafter, preferred embodiments of the present disclosure will be specifically described with reference to the drawings.

[0018] Terms such as "first" and "second" in the present disclosure are merely used as labels and are not necessarily intended to assign an order to their objects.

[0019] Figures 1 to 6 show an example of a conveying device according to the present disclosure. The conveying device A1 is for conveying a thin plate-like workpiece W such as a substrate for a liquid crystal display panel. As shown in Figures 1 to 4, the conveying device A1 includes a fixed base 1, a guide member 3 rotatably supported around a turning axis Os perpendicular to the fixed base 1, a linear movement mechanism 4 supported by the guide member 3, a first hand 5A and a second hand 5B separately supported by the linear movement mechanism 4, a reduction gear 6 for turning, and motors M1, M2, M3, M4. The first hand 5A and the second hand 5B are for holding the thin plate-like workpiece W in a horizontal posture.

[0020] In the example illustrated in the present embodiment, the first direction x corresponds to the "first direction" of the present disclosure, and the second direction y corresponds to the "second direction" of the present disclosure. The first direction x and the second direction y are orthogonal to each other and are both directions along the horizontal plane. The vertical direction z is a direction orthogonal to the first direction x and the second direction y, and corresponds to the vertical direction when the conveying device A1 is placed in a predetermined conveying chamber (not shown), etc., and corresponds to the "vertical direction" of the present disclosure. In the following description, one side of the first direction x is appropriately referred to as the "x1 side of the first direction x", and the other side of the first direction x is appropriately referred to as the "x2 side of the first direction x". The x1 side of the first direction x corresponds to the "one side of the first direction" of the present disclosure, and the x2 side of the first direction x corresponds to the "other side of the first direction" of the present disclosure.

[0021] As clearly shown in Figure 3, the fixed base 1 includes a housing 10 having a substantially cylindrical outer shape, which includes a bottom wall portion 11, a cylindrical side wall portion 12, and a ceiling wall 13. A central opening 13A is formed in the ceiling wall 13. A motor M1 is disposed near the lower end inside the fixed base 1. Note that the bottom wall portion 11, the side wall portion 12, and the ceiling wall 13 constituting the fixed base 1 are configured such that the respective members divided from each other are assembled. Thereby, each member such as the lifting base 14, the guide member 16, and the ball screw mechanism 18, which will be described later, can be appropriately disposed inside the fixed base 1.

[0022] Inside the fixed base 1, the elevating base 14 is supported. The elevating base 14 has a cylindrical portion 141 with an outer diameter smaller than that of the central opening 13A and having a predetermined dimension in the vertical direction, an outward flange portion 142 connected to the lower end of the cylindrical portion 141, and an upper flange portion 143 connected to the upper end of the cylindrical portion 141. The cylindrical portion 141 is in a cylindrical shape centered on the turning axis Os. A plurality of linear guide rails 15 in the vertical direction are attached to the inner wall of the side wall portion 12 of the housing 10, and a plurality of guide members 16 provided on the outward flange portion 142 of the elevating base 14 are supported so as to be slidable in the vertical direction with respect to the linear guide rails 15. Thereby, the elevating base 14 is movable within a predetermined range in the vertical direction with respect to the fixed base 1. Note that the upper part of the cylindrical portion 141 and the upper flange portion 143 of the elevating base 14 protrude from and retract into the central opening 13A of the housing 10.

[0023] A seal mechanism 17 is interposed between the ceiling wall 13 of the fixed base 1 and the cylindrical portion 141 of the elevating base 14. This seal mechanism 17 hermetically seals between the ceiling wall 13 of the fixed base 1 and the cylindrical portion 141 of the elevating base 14 regardless of the vertical movement of the elevating base 14. The specific configuration of the seal mechanism 17 is not particularly limited, and for example, a lip seal can be adopted.

[0024] Also inside the fixed base 1, a ball screw mechanism 18 is arranged, which consists of a screw shaft 181 arranged in the vertical direction z and rotating, and a nut member 182 screwed onto the screw shaft 181 and fixedly penetrated through the outward flange portion 142 of the elevating base 14. The screw shaft 181 is linked to the motor M1 by a belt 184 wound around a pulley 183 attached to the lower end thereof and a pulley 185 attached to the output shaft of the motor M1, and is rotated in the forward and reverse directions by the drive of this motor M1. By rotating the screw shaft 181 in this way, the elevating base 14 is elevated and lowered. Although detailed illustration is omitted, the screw shaft 181 may be covered by, for example, a cover for preventing grease scattering.

[0025] The guide member 3 has a substantially long rectangular box shape in plan view with a longitudinal axis (moving stroke GL) extending in the first direction x, and includes a bottom wall 31, side walls 32, an intermediate wall 33, an upper wall 34, a cover 35, and a case wall 36. The guide member 3 is supported by the fixed base 1. In the present embodiment, it is supported by the elevating base 14 via the turning reduction gear 6. An opening is formed at the center of the bottom wall 31, and the turning reduction gear 6 is disposed inside the guide member 3 through this opening.

[0026] As shown in FIGS. 2 to 4, the turning reduction gear 6 has a first input shaft 61, a first output shaft 62, and a flange portion 63. The flange portion 63 is fixed to the bottom wall 31 of the guide member 3. As clearly shown in FIG. 4, the first input shaft 61 is located above the first output shaft 62 (on the upper side in the vertical direction z). A pulley 64 is attached to the first input shaft 61. The motor M2 corresponds to an example of the turning drive source of the present disclosure, and a pulley 72 is attached to the output shaft 71 of the motor M2. The belt 8 is wound around the pulley 72 and the pulley 64 on the first input shaft 61 side, and the first input shaft 61 is linked to the motor M2 by the belt 8. The first output shaft 62 is fixed to the upper flange portion 143 of the elevating base 14. Thus, the guide member 3 is supported by the elevating base 14 or the fixed base 1 via the turning reduction gear 6. When the motor M2 is driven, the guide member 3 and the turning reduction gear 6 turn about the central axis of the turning reduction gear 6 as the turning axis Os. In the present embodiment, the turning reduction gear 6 has a hollow shape with its central portion penetrating in the vertical direction z. A seal member (not shown) is disposed at an appropriate position of the turning reduction gear 6. Specifically, between the bottom wall 31 of the guide member 3 and the flange portion 63 of the turning reduction gear 6, between the flange portion 63 and the first output shaft 62, and between the first output shaft 62 and the upper flange portion 143 of the elevating base 14, airtight seals are respectively provided by seal members (not shown).

[0027] The rotary reducer 6 and the motor M2 are arranged inside the space surrounded by the bottom wall 31, the intermediate wall 33, and the upper wall 34. Further, a case wall 36 protruding upward from the upper wall 34 is attached to the upper wall 34, and the pulleys 64, 72 are arranged inside the case wall 36. As shown in FIGS. 2 and 4, the motor M2 is located on the x1 side in the first direction x with respect to the rotary reducer 6.

[0028] The linear movement mechanism 4 is for conveying the first hand 5A and the second hand 5B along a horizontal linear movement stroke GL. As shown in FIGS. 2 and 3, the linear movement mechanism 4 includes a first guide rail 41A and a second guide rail 41B provided on the guide member 3, a first drive mechanism 43A and a second drive mechanism 43B that transmit a horizontal driving force to the first hand 5A and the second hand 5B, and a first connecting member 44A and a second connecting member 44B. The first guide rail 41A and the second guide rail 41B are provided in pairs with a distance in the second direction y, and both extend in the first direction x. The pair of first guide rails 41A are arranged inside in the second direction y, and the pair of second guide rails 41B are arranged outside in the second direction y with respect to the pair of first guide rails 41A. As understood from FIGS. 2 to 4, the motor M2 is located between the pair of first guide rails 41A in the second direction y.

[0029] As shown in FIGS. 1 to 3, the first hand 5A has a pair of support arms 51a and a plurality of holding pieces 53a. As shown in FIG. 3, the first hand 5A is supported by a pair of first guide rails 41A via sliders 42A fixed to each of the pair of support arms 51a. Above the pair of first guide rails 41A and the pair of second guide rails 41B, it is covered by a cover 35. The support arms 51a of the first hand 5A penetrate through slits 35a formed on the upper surface of the cover 35, and a first connecting member 44A is provided on the support arms 51a. The first connecting member 44A penetrates through a slit formed on the upper wall 34 and is connected to a first output belt 434A of a first drive mechanism 43A described later. Thereby, the first connecting member 44A connects the first hand 5A and the first output belt 434A. The plurality of support arms 51a are separated from each other in the second direction y, and each extends in the first direction x. The thin plate-like workpiece W is placed and held on these support arms 51a.

[0030] As shown in FIGS. 1 to 3, the second hand 5B has a pair of support arms 51b and a plurality of holding pieces 53b. As shown in FIG. 3, the pair of support arms 51b are formed so as to bypass the outside of the first hand 5A in the second direction y. The second hand 5B is supported by a pair of second guide rails 41B via sliders 42B fixed to each of the pair of support arms 51b. The support arms 51b of the second hand 5B penetrate through slits 35b formed on the side surface of the cover 35, and a second connecting member 44B is provided on the support arms 51b. The second connecting member 44B penetrates through a slit formed on the upper wall 34 and is connected to a second output belt 434B of a second drive mechanism 43B described later. Thereby, the second connecting member 44B connects the second hand 5B and the second output belt 434B. The plurality of support arms 51b are separated from each other in the second direction y, and each extends in the first direction x. The workpiece W is placed and held on these support arms 51b.

[0031] In the illustrated example, the first hand 5A (the second hand 5B) has two support arms 51a (support arm 51b), but the number of the support arms 51a (support arm 51b) may be one or three or more. The shape of the support arm 51a (support arm 51b) is not particularly limited. Also, although shown in a simplified manner in each figure, the first hand 5A and the second hand 5B each have, for example, a configuration in which a plurality of members are connected to each other.

[0032] The first drive mechanism 43A and the second drive mechanism 43B are for moving the first hand 5A and the second hand 5B separately along the moving stroke GL. Since the first drive mechanism 43A and the second drive mechanism 43B basically have the same configuration, the configuration of the first drive mechanism 43A will be specifically described below, and the description of the second drive mechanism 43B will be omitted as appropriate.

[0033] As shown in FIGS. 2, 3, and 5, the first drive mechanism 43A includes a speed reduction mechanism 431a, a first drive pulley 432a, a plurality of pulleys 432b, 432c, 432d, 432e, and a first output belt 434A, and is housed in the guide member 3. The first drive pulley 432a is attached to the output shaft of the speed reduction mechanism 431a. The first drive pulley 432a is rotatable around a horizontal axis orthogonal to the turning axis Os. Although detailed illustration is omitted, the output shaft of the motor M3 is connected to the input shaft of the speed reduction mechanism 431a. The motor M3 applies a driving force to the first hand 5A via the first drive mechanism 43A. The motor M3 corresponds to an example of the first drive source of the present disclosure. The motor M3 is located on the x2 side in the first direction x with respect to the turning speed reduction mechanism 6.

[0034] As shown in FIG. 5, the pulleys 432b to 432e are each rotatably supported around a predetermined horizontal axis within the guide member 3. The first output belt 434A is looped around the first drive pulley 432a and the pulleys 432b to 432e along a plane perpendicular to the vertical plane. The pulleys 432b and 432c are provided near both ends in the longitudinal direction of the guide member 3 (the first direction x along the moving stroke GL). On the other hand, the pulleys 432d and 432e are provided near the first drive pulley 432a and are arranged outside the first output belt 434A. Thereby, an appropriate tension is applied to the first output belt 434A. As the first output belt 434A, for example, a timing belt is preferably used.

[0035] With such a configuration, when the motor M3 is driven, the rotational driving force of the motor M3 is decelerated by the speed reduction mechanism 431a and then the first drive pulley 432a is rotated. Along with the rotation of the first drive pulley 432a, the first output belt 434A reciprocates within a predetermined vertical plane.

[0036] The pulleys 432b and 432c are arranged along a line parallel to the moving stroke GL. And in FIG. 5, the region above the pulleys 432b and 432c in the first output belt 434A is a section 46a parallel to the moving stroke GL, and the first output belt 434A is configured to be able to reciprocate in this section 46a. The other end of the first connecting member 44A, one end of which is connected to the support arm 51a of the first hand 5A, is connected to a predetermined portion of the section 46a in the first output belt 434A. Thereby, the first hand 5A horizontally slides along the moving stroke GL while being supported by the two inner first guide rails 41A by the drive of the first drive mechanism 43A.

[0037] As shown in FIGS. 2, 3, and 6, the second drive mechanism 43B includes a speed reduction mechanism 431b, a second drive pulley 433a, a plurality of pulleys 433b, 433c, 433d, 433e, and a second output belt 434B, and is housed in the guide member 3. The second drive pulley 433a is attached to the output shaft of the speed reduction mechanism 431b. The second drive pulley 433a is rotatable around a horizontal axis orthogonal to the turning axis Os. Although detailed illustration is omitted, the output shaft of the motor M4 is connected to the input shaft of the speed reduction mechanism 431b. The motor M4 applies a driving force to the second hand 5B via the second drive mechanism 43B. The motor M4 corresponds to an example of the second drive source of the present disclosure. The motor M4 is located on the x2 side in the first direction x with respect to the turning speed reduction mechanism 6.

[0038] As shown in FIG. 6, the pulleys 433b to 433e are rotatably supported around respective predetermined horizontal axes within the guide member 3. The second output belt 434B is looped around the second drive pulley 433a and the pulleys 433b to 433e along a vertical plane. The pulleys 433b and 433c are provided near both ends in the longitudinal direction of the guide member 3 (the first direction x along the moving stroke GL). On the other hand, the pulleys 433d and 433e are provided near the second drive pulley 433a and are arranged outside the second output belt 434B. Thereby, an appropriate tension is applied to the second output belt 434B. As the second output belt 434B, for example, a timing belt is preferably used.

[0039] With such a configuration, when the motor M4 is driven, the rotational driving force of the motor M4 is reduced by the speed reduction mechanism 431b, and then the second drive pulley 433a is rotated. As the second drive pulley 433a rotates, the second output belt 434B reciprocates within a predetermined vertical plane.

[0040] The pulleys 433b and 433c are arranged along a line parallel to the moving stroke GL. In FIG. 6, the region above the pulleys 433b and 433c in the second output belt 434B is a section 46b parallel to the moving stroke GL, and the second output belt 434B is configured to be able to reciprocate in this section 46b. One end of a second connecting member 44B, whose other end is connected to a support arm 51b of the second hand 5B, is connected to a predetermined portion of the above-mentioned section 46b in the second output belt 434B. Thereby, the second hand 5B horizontally slides along the moving stroke GL while being supported by the two outer second guide rails 41B by the driving of the second drive mechanism 43B.

[0041] Although detailed illustration description is omitted, the motors M3 and M4 are arranged inside the space surrounded by the bottom wall 31, the intermediate wall 33, and the upper wall 34. Also, as described above, the swing reduction gear 6 and the motor M2 are also arranged inside the space surrounded by the bottom wall 31, the intermediate wall 33, and the upper wall 34. The internal space of the guide member 3 in which the swing reduction gear 6 and the motors M2, M3, and M4 are arranged is airtight sealed with respect to the outside by a sealing member (not shown).

[0042] As described above, the swing reduction gear 6 is hollow with its central portion penetrating in the vertical direction z, and a sealing member (not shown) is arranged at an appropriate position of the swing reduction gear 6. A sealing mechanism 17 is interposed between the ceiling wall 13 of the fixed base 1 and the cylindrical portion 141 of the lifting base 14. Also, the inside of the guide member 3 in which the swing reduction gear 6 and the motors M2, M3, and M4 are arranged is airtight sealed with respect to the outside. Since the swing reduction gear 6 is hollow, the inner space of the lifting base 14 communicating from the inside of the guide member 3 through the hollow portion of the swing reduction gear 6 is airtight sealed with respect to the outside. Wiring (not shown) connected to the motors M2, M3, and M4 passes through the inner space of the lifting base 14 that is airtight sealed with respect to the outside and communicates from the inside of the guide member 3 through the hollow portion of the swing reduction gear 6.

[0043] The transfer device A1 of the present embodiment is used, for example, to carry a workpiece into or out of a process chamber in the manufacturing process of an FPD. In this case, the transfer device A1 is arranged in a vacuum environment, for example, in a transport chamber in which a plurality of process chambers are arranged around the periphery.

[0044] Next, the operation of the present embodiment will be described.

[0045] The transfer device A1 includes a fixed base 1, a guide member 3 rotatably supported around a rotation axis Os perpendicular to the fixed base 1, a linear movement mechanism 4 supported by the guide member 3, a first hand 5A, a rotation reduction gear 6, and a motor M2 (a drive source for rotation). The first hand 5A moves along a horizontal linear movement stroke GL extending in the first direction x by the operation of the linear movement mechanism 4. The rotation reduction gear 6 reduces the rotation by the motor M2 input to the first input shaft 61 and outputs it from the first output shaft 62. The rotation reduction gear 6 and the motor M2 are fixed to the guide member 3, and the first output shaft 62 is directly or indirectly (indirectly via the lifting base 14 in this embodiment) attached to the fixed base 1. By arranging the rotation reduction gear 6 and the rotation drive motor M2 inside the guide member 3, a space for arranging the rotation reduction gear 6 and the motor M2 inside the fixed base 1 becomes unnecessary. Thereby, the size of the fixed base 1 in the radial direction (the direction orthogonal to the rotation axis Os) can be reduced, and the transfer device A1 can be miniaturized. Further, since the rotation reduction gear 6 is fixed to the guide member 3 and the first output shaft 62 of the rotation reduction gear 6 is attached to the fixed base 1 side, the rotation reduction gear 6 itself functions as a member that rotates while supporting the guide member 3. Therefore, a rotation base (separate member) for supporting the guide member 3 of the conventional configuration becomes unnecessary. Thereby, the size of the fixed base 1 in the vertical direction z can be reduced, and the transfer device A1 can be miniaturized.

[0046] The linear movement mechanism 4 includes a pair of first guide rails 41A that movably support the first hand 5A. Each of the pair of first guide rails 41A extends in the first direction x and is arranged apart in the second direction y (the direction orthogonal to the vertical direction z and the first direction x). The motor M2 is located on the x1 side in the first direction x with respect to the rotary reduction gear 6 and is located between the pair of second directions y in the second direction y. According to such a configuration, the rotary motor M2 can be efficiently arranged.

[0047] The first input shaft 61 of the rotary reduction gear 6 is located above the first output shaft 62, and a belt 8 is wound around a pulley 72 attached to the output shaft 71 of the motor M2 and a pulley 64 attached to the first input shaft 61. According to such a configuration, the motor M2 can be arranged close to the rotary reduction gear 6, and the occupied space for arranging the motor M2 can be reduced. This is more preferable for miniaturizing the transfer device A1.

[0048] The transfer device A1 includes a second hand 5B, a motor M3 that applies a driving force to the first hand 5A, and a motor M4 that applies a driving force to the second hand 5B. The motors M3 and M4 are located on the x2 side in the first direction x with respect to the rotary reduction gear 6 and are located on the side opposite to the motor M2 with respect to the rotary reduction gear 6. According to such a configuration, the three motors M2, M3, and M4 can be efficiently arranged inside the guide member 3. Also, the space for arranging the motors M3 and M4 inside the fixed base 1 becomes unnecessary. This is more preferable for miniaturizing the transfer device A1.

[0049] The transfer device A1 includes a lifting base 14 that is supported so as to be movable up and down with respect to a fixed base 1, and the lifting base 14 supports a guide member 3. The first output shaft 62 of the rotation reduction gear 6 is fixed to the lifting base 14 (upper flange portion 143). Further, the rotation reduction gear 6 has a flange portion 63, and the flange portion 63 is fixed to the guide member 3 (bottom wall 31). With such a configuration, the guide member 3 can rotate and move up and down, and the workpiece W held by the first hand 5A or the like can be efficiently transferred.

[0050] The transfer device according to the present disclosure is not limited to the above-described embodiment. The specific configuration of the transfer device according to the present disclosure can be freely designed in various ways. In the above embodiment, the rotation reduction gear 6 and the motor M2 (rotation drive source) are linked via a belt 8, but instead, a configuration in which the rotation reduction gear 6 and the motor M2 are linked via a gear mechanism may be used.

[0051] Also, in the above embodiment, the first output shaft 62 of the rotation reduction gear 6 is fixed to the upper flange portion 143 of the lifting base 14, but the present disclosure is not limited to this. In the case of a transfer device that does not require a lifting mechanism, the first output shaft 62 may be directly attached to the fixed base 1.

Explanation of Reference Numerals

[0052] A1: Transfer device, 1: Fixed base, 14: Lifting base, 3: Guide portion, 4: Linear movement mechanism, 41A: First guide rail, 5A: First hand, 5B: Second hand, 6: Rotation reduction gear, 61: First input shaft, 62: First output shaft, 63: Flange portion, 64: Pulley, 71: Output shaft, 72: Pulley, 8: Belt, GL: Movement stroke, M2: Motor (rotation drive source), M3: Motor (first drive source), M4: Motor (second drive source), Os: Rotation axis, x: First direction, y: Second direction, z: Vertical direction

Claims

1. A fixed base, a guide member rotatably supported about a pivot axis perpendicular to the fixed base, a linear movement mechanism supported by the guide member, a first hand supported by the linear movement mechanism and moving along a horizontal linear movement stroke extending in a first direction by the operation of the linear movement mechanism, a rotation drive source for applying a turning driving force to the guide member, a rotation reduction gear that reduces the rotation by the rotation drive source input to a first input shaft and outputs it from a first output shaft, and is provided with, the rotation reduction gear and the rotation drive source are fixed to the guide member, the first output shaft is directly or indirectly attached to the fixed base, a conveying device.

2. The linear movement mechanism includes a pair of first guide rails each extending in the first direction and spaced apart in a second direction orthogonal to both the vertical direction and the first direction, the pair of first guide rails movably support the first hand, the rotation drive source is located on one side of the rotation reduction gear in the first direction and between the pair of first guide rails in the second direction, the conveying device according to claim 1.

3. The first input shaft is located above the first output shaft, a pulley attached to the output shaft of the rotation drive source and a belt is wound around a pulley attached to the first input shaft, the conveying device according to claim 2.

4. a second hand supported by the linear movement mechanism and moving along the movement stroke extending in the first direction by the operation of the linear movement mechanism, a first drive source for applying a driving force to the first hand, a second drive source for applying a driving force to the second hand, and further comprising, the first drive source and the second drive source are located on the other side of the rotation reduction gear in the first direction, the conveying device according to claim 2 or 3.

5. further comprising a lifting base supported so as to be liftable with respect to the fixed base and supporting the guide member, the first output shaft is fixed to the lifting base, the rotation reduction gear has a flange portion fixed to the guide member, the conveying device according to any one of claims 1 to 3.

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