Adhesion device

Abstract

To provide an adhesion device that can more stably adhere to a wall surface.SOLUTION: An adsorption device includes: a base which is provided spaced apart from a wall surface so as to face the wall surface, and connected to a depressurization device that depressurizes a depressurization space formed between the base and the wall surface; a first partition portion which is provided on the periphery of the base and forms a base-side portion of the peripheral wall of the depressurization space with an elastic member; a second partition portion which is provided closer to the wall surface than the first partition portion and forms a wall-surface-side portion of the peripheral wall of the depressurization space with an elastic member so that one end on the wall surface side contacts the wall surface; and a first restricting portion which is provided between the first partition portion and the second partition portion so as to restrict deformation of the first partition portion and the second partition portion in a manner of being pulled into the depressurization space when the depressurization space becomes negative pressure. The first restricting portion includes a plurality of frame-shaped members which have at least a part positioned between the first partition portion and the second partition portion and are formed in a frame shape.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to an adsorption device that adsorbs to a wall surface.

Background Art

[0002] Conventionally, as a moving device for inspecting structures, a robot that travels on a wall surface is known. As this type of robot, a robot that can travel on a wall surface by adsorbing to the wall surface with an adsorption device provided on the main body has been proposed. As the adsorption method, there are pressing against the wall surface by a propeller, vacuum adsorption by a vacuum pump or a fan, adsorption by magnetic force, and adsorption to the wall surface using electrostatic force or intermolecular force.

[0003] When adsorbing to an insulating object such as concrete, that is, the wall surface of a structure such as a bridge pier, box girder, or building exterior wall, and stably moving the robot, among the above-described adsorption methods, vacuum adsorption by a vacuum pump or a fan is effective. This vacuum adsorption reduces the pressure in the space defined between the robot and the wall surface of the adsorption target by discharging the air in the space to the outside, and adsorbs the robot to the wall surface by the differential pressure between the air pressure in this space and the atmospheric pressure.

[0004] As a device that travels on a wall surface by such vacuum adsorption, a base provided at a distance from the wall surface so as to face the wall surface and connected to a decompression device that decompresses the decompression space generated between the base and the wall surface, a first partition portion formed of an elastic member at a base side portion of the peripheral wall of the decompression space, a second partition portion formed of an elastic member at a wall surface side portion of the peripheral wall of the decompression space such that one end portion on the wall surface side contacts the wall surface, and a member having higher rigidity than the second partition portion and formed in a frame shape corresponding to the second partition portion, and a first regulating member provided on the second partition portion to regulate deformation such that the other end portion on the base side of the second partition portion is drawn into the decompression space when the decompression space becomes negative pressure. An adsorption device is known (see Patent Document 1).

[0005] According to this adsorption device, even if the second partition portion has low rigidity to such an extent that it can overcome the uneven portion formed on the wall surface by the first regulating member formed in a frame shape, it is possible to prevent the second partition portion from being drawn into the reduced-pressure space.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0007] In vacuum adsorption, the wall surface to be adsorbed is not only formed in a flat shape, but also exists in a shape formed to be curved in a concave shape or a convex shape. According to the adsorption device described above, since the first regulating member is formed in a frame shape corresponding to the second partition portion, when the adsorption device travels on such a curved wall surface, the second partition portion does not deform corresponding to the curved wall surface, and a gap is generated between the second partition portion and the wall surface. When such a gap is generated, the adsorption force is extremely reduced, and the adsorption device cannot stably adsorb to the wall surface.

[0008] The present invention has been made to solve the above-described problems, and an object thereof is to provide an adsorption device that can more stably adsorb to a curved wall surface.

Means for Solving the Problems

[0009] In order to solve the above-described problems, an adsorption device according to the present embodiment is an adsorption device that forms a reduced-pressure space that becomes a negative pressure between the device and a wall surface and adsorbs to the wall surface. The adsorption device includes a base provided so as to be spaced apart from the wall surface so as to face the wall surface, the base being connected to a decompression device that decompresses the reduced-pressure space generated between the base and the wall surface; a first partition portion provided at a peripheral edge of the base, the first partition portion forming a portion on the base side of a peripheral wall of the reduced-pressure space with an elastic member; a second partition portion provided closer to the wall surface side than the first partition portion, the second partition portion forming a portion on the wall surface side of the peripheral wall of the reduced-pressure space with an elastic member such that one end portion on the wall surface side contacts the wall surface; and a first restricting portion provided between the first partition portion and the second partition portion so as to restrict deformation such that the first partition portion and the second partition portion are drawn into the reduced-pressure space when the reduced-pressure space becomes a negative pressure. The first restricting portion is characterized by having a plurality of frame-shaped members that are at least partially located between the first partition portion and the second partition portion and are formed in a frame shape.

Advantages of the Invention

[0010] According to the present invention, it is possible to more stably adsorb to a curved wall surface.

Brief Description of the Drawings

[0011]

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Mode for Carrying Out the Invention

[0012] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0013] <First Embodiment> (Configuration of the Moving Device) The configuration of the moving device according to the first embodiment will be described. FIG. 1 is a perspective view showing the configuration of the moving device according to the present embodiment. Note that FIG. 1 shows a moving device arranged on a wall surface curved in a concave shape.

[0014] As shown in FIG. 1, the moving device 1 according to the present embodiment includes a suction device 10 and a traveling device. The traveling device includes two wheels 30 that are rotatably provided. Each of the two wheels 30 is rotatably provided via a rotating shaft whose axial direction is parallel to each other and whose axial center positions coincide. According to the traveling device, the moving device 1 can travel on a wall surface such as the wall surface BR by rotating the two wheels 30 around their respective rotating shafts.

[0015] In the following description, the straight-ahead direction of the moving device 1 is referred to as the front-rear direction, the axial direction of the rotating shafts of the two wheels 30 is referred to as the side direction, and the direction orthogonal to the front-rear direction and the side direction, that is, the direction substantially perpendicular to the in-plane direction of the wall surface as the ground contact surface of the two wheels 30 is referred to as the vertical direction. Also, the ground contact surface side in this vertical direction is referred to as the lower side, and the opposite side is referred to as the upper side. Further, the front-rear direction and the side direction are collectively referred to as the orthogonal direction as the direction orthogonal to the vertical direction.

[0016] The suction device 10 is attached to the traveling device, and the moving device 1 can move on the wall surface by the traveling device traveling in a state where the suction device 10 is adsorbed to the wall surface. In the present embodiment, the suction device 10 is formed in a substantially box shape with an open lower side as a whole, and is formed in a substantially box shape that is longer in the side direction than in the front-rear direction.

[0017] (Configuration of the suction device) The configuration of the suction device according to the first embodiment will be described. FIGS. 2 and 3 are a perspective view and an exploded perspective view showing the configuration of the suction device according to the present embodiment, respectively.

[0018] As shown in FIGS. 2 and 3, the suction device 10 includes a base 11, a first partition portion 12, a second partition portion 13, a first restricting portion 14, and two decompression devices 19. A decompression space having a predetermined size in the vertical direction is defined in cooperation with the wall surface by the base 11, the first partition portion 12, and the second partition portion 13. The suction device 10 is configured to be able to adsorb to the wall surface by decompressing the decompression space by the two decompression devices 19 to become a negative pressure.

[0019] The base 11 is a substantially plate-shaped member provided so as to face and be spaced apart from the wall surface in a direction perpendicular to the wall surface with a reduced-pressure space therebetween, and closes the reduced-pressure space from above. Two exhaust holes 111 for communicating the reduced-pressure space with the outside are formed in the base 11, and two decompression devices 19 are provided so as to decompress the inside of the reduced-pressure space through each of the two exhaust holes.

[0020] The first partition portion 12 and the second partition portion 13 are members that constitute a partition portion that partitions the reduced-pressure space and the outside by surrounding the reduced-pressure space in the orthogonal direction over the entire circumference, that is, from the front-rear direction and the side direction. The first partition portion 12 is connected to the base 11 so as to surround the peripheral edge of the base 11. The second partition portion 13 is connected below the first partition portion 12. Further, the first partition portion 12 forms a portion of the peripheral wall of the reduced-pressure space on the side of the base 11, and the second partition portion 13 forms a portion of the peripheral wall of the reduced-pressure space on the side of the wall surface.

[0021] The first restricting portion 14 is provided between the first partition portion 12 and the second partition portion 13, and restricts the first partition portion 12 and the second partition portion 13 from being drawn into the reduced-pressure space. As will be described in detail later, the first restricting portion 14 has a plurality of frame-shaped members 140 juxtaposed in the lateral direction of the suction device 10.

[0022] As described above, each of the two decompression devices 19 is provided on the base 11 so as to be able to decompress the inside of the reduced-pressure space through the corresponding exhaust hole 111. In the present embodiment, the decompression device 19 is configured as an exhaust fan, but any device may be used as long as it can decompress the reduced-pressure space. For example, it may be configured as a vacuum pump.

[0023] (Configuration of the partition portion) The configuration of the first partition portion and the second partition portion according to the first embodiment will be described. FIG. 4 is a schematic cross-sectional view showing the configuration of the suction device according to the present embodiment. Note that FIG. 4 shows a cross-section of the suction device cut by a plane extending in the front-rear direction and the vertical direction.

[0024] As shown in FIG. 3, the first partition portion 12 is formed in a substantially box shape with both vertical sides open so as to surround the decompression space over the entire circumference from the orthogonal direction, and as shown in FIG. 4, it has an inner wall portion 121, an outer wall portion 122, a bottom wall portion 123, and an upper wall portion 124. The inner wall portion 121 extends a predetermined distance in the vertical direction so as to surround the decompression space from the orthogonal direction in the inner direction of the orthogonal direction. The outer wall portion 122 extends a predetermined distance in the vertical direction so as to surround the inner wall portion 121 from the orthogonal direction in the outer direction of the orthogonal direction. The bottom wall portion 123 extends in the orthogonal direction and connects the inner wall portion 121 and the outer wall portion 122 below. The upper wall portion 124 extends in the orthogonal direction and connects the inner wall portion 121 and the outer wall portion 122 above.

[0025] The inner wall portion 121, the outer wall portion 122, the bottom wall portion 123, and the upper wall portion 124 are formed by bending a sheet-like elastic member. In this embodiment, this elastic member is a urethane rubber sheet formed in a thin film shape. Further, the first partition portion 12 is connected to the base 11 by, for example, screws and nuts.

[0026] The second partition portion 13 is formed in a frame shape as a whole so as to surround the decompression space over the entire circumference from the orthogonal direction, and a cross section cut by a plane orthogonal to the extending direction (front-rear direction or side direction) of the second partition portion 13 is formed in a substantially cylindrical shape. The second partition portion 13 has an inner wall portion 131, an outer wall portion 132, a bottom wall portion 133, and an upper wall portion 134. The inner wall portion 131 extends so as to surround the decompression space from the orthogonal direction in the inner direction of the orthogonal direction. The outer wall portion 132 extends so as to surround the inner wall portion 131 from the orthogonal direction in the outer direction of the orthogonal direction and is formed in a curved surface shape protruding downward. The bottom wall portion 133 connects the inner wall portion 131 and the outer wall portion 132 that are separated from each other in the orthogonal direction below. The upper wall portion 134 connects the inner wall portion 131 and the outer wall portion 132 above.

[0027] The inner wall portion 131, the outer wall portion 132, the bottom wall portion 133, and the upper wall portion 134 are formed by bending a sheet-like elastic member into a cylindrical shape, and in this embodiment, they are formed of a urethane rubber sheet in the same manner as the first partition portion 12. Further, the first partition portion 12 is connected to the first partition portion 12 via the first restricting portion 14 by, for example, a screw 13S and a nut (not shown) as will be described later.

[0028] (Configuration of the first restricting portion) The configuration of the first restricting portion according to this embodiment will be described. FIG. 5 is a plan view showing the configuration of the first restricting portion according to this embodiment.

[0029] As shown in FIG. 5, the first restricting portion 14 has four frame-shaped members 140 juxtaposed in one direction. Each of the four frame-shaped members 140 is divided into two restricting members 141 in the juxtaposing direction of the four frame-shaped members 140. In other words, one frame-shaped member 140 is constituted by two restricting members 141. In this embodiment, since the first restricting portion 14 includes four frame-shaped members 140, it includes eight restricting members 141.

[0030] Each of the eight restricting members 141 has an extending portion and two orthogonal extending portions provided at both ends of the extending portion, respectively. The extending portion is formed in a long plate shape extending in one direction. Each of the two orthogonal extending portions is formed in a long plate shape extending in a direction orthogonal to the extending direction of the extending portion from each end of the extending portion. The eight restricting members 141 are arranged such that the ends of the two orthogonal extending portions respectively possessed by these two restricting members 141 face each other with respect to an adjacent restricting member 141 on one side, thereby constituting one frame-shaped member 140.

[0031] The juxtaposition direction of the four frame members 140 and the respective dividing directions of the four frame members 140, that is, the juxtaposition direction of the eight restricting members 141 may be either the front-rear direction or the side direction. In addition, when the front-rear direction length and the side direction length of the suction device 10 are different, it is desirable that the juxtaposition direction of the plurality of frame members 140 and the eight restricting members 141 faces the longer direction of the front-rear direction and the side direction. In the present embodiment, since the suction device 10 is formed to be long in the side direction, the juxtaposition direction of the plurality of frame members 140 and the eight restricting members 141 faces the side direction.

[0032] All of the eight restricting members 141 are arranged such that at least a part of each of them is sandwiched between the first partition portion 12 and the second partition portion 13. Specifically, among the eight restricting members 141, the two restricting members 141 arranged at both ends in the side direction are arranged so as to extend along the first partition portion 12 and the second partition portion 13. Further, for the other six restricting members 141, only their orthogonally extending portions are arranged so as to extend along the first partition portion 12 and the second partition portion 13.

[0033] A plurality of through holes 141H are formed in each of the eight restricting members 141. Each of the plurality of through holes 141H is formed so that a screw 13S for connecting the first partition portion 12 to the second partition portion 13 can be inserted therethrough. The eight restricting members 141 are fixed between the first partition portion 12 and the second partition portion 13 by inserting the screws 13S through the through holes 141H formed in the portions along the first partition portion 12 and the second partition portion 13.

[0034] (Effect by the first restricting portion) The effect by the first restricting portion according to the present embodiment will be described. FIGS. 6 and 7 are schematic views showing a suction device that sucks to a wall surface formed in a concave shape and a convex shape according to the present embodiment, respectively. In FIGS. 6 and 7, for simplicity, a suction device with a reduced number of restricting members is shown.

[0035] As shown in FIG. 6, when the adsorption device 10 adsorbs to the concave curved wall surface BR, since a plurality of frame-shaped members 140 are juxtaposed in the lateral direction, and further, since a plurality of frame-shaped members 140 are juxtaposed in the lateral direction, the first partition portion 12 and the second partition portion 13 are deformed along the wall surface BR. As shown in FIG. 7, even when the adsorption device 10 adsorbs to the convex curved wall surface CR, the first partition portion 12 and the second partition portion 13 are deformed along the wall surface CR.

[0036] In this way, the first regulating portion 14 enables the first partition portion 12 and the second partition portion 13 to deform along the curved wall surface, and prevents the first partition portion 12 and the second partition portion 13 from being drawn into the adsorption space, thereby also preventing a gap from being formed between the second partition portion 13 and the wall surface BR that allows the decompression space to communicate with the outside.

[0037] <Second Embodiment> The configuration of the adsorption device according to the second embodiment will be described. FIG. 8 is a plan view showing the configuration of the adsorption device according to the present embodiment. FIG. 9 is a cross-sectional view taken along line A-A of FIG. 8.

[0038] As shown in FIGS. 8 and 9, the adsorption device 10A according to the present embodiment is different from the adsorption device 10 according to the first embodiment in that it further includes two elastic members 129. The two elastic members 129 are arranged in the internal space of the first partition portion 12. Here, the internal space of the first partition portion 12 is a space defined by the inner wall portion 121, the outer wall portion 122, the bottom wall portion 123, and the upper wall portion 124.

[0039] Of the two elastic members 129, one is arranged in the internal space of the portion forming the front side of the first partition portion 12, and the other is arranged in the internal space of the portion forming the rear side of the first partition portion 12. Here, the two elastic members 129 are arranged in the internal space so as to be located at approximately the center in the lateral direction of the adsorption device 10A.

[0040] The two elastic members 129 are formed in a substantially rectangular shape extending to a length approximately equal to the distance from the bottom wall portion 123 to the upper wall portion 124 of the first partition portion 12. Further, the two elastic members 129 are elastic members having higher rigidity than the first partition portion 12 and the second partition portion 13 or more. In the present embodiment, they are sponges formed in a substantially rectangular shape.

[0041] Since the suction device 10 is configured in a rectangle in plan view and is further formed larger in the lateral direction than in the front-rear direction, in the first partition portion 12 and the second partition portion 13, the vicinity of the lateral end portion has the highest rigidity, and the central portion in the lateral direction has the lowest rigidity. Therefore, the first partition portion 12 and the second partition portion 13 have the characteristic that as these lateral end portions contract, these lateral central portions also contract. According to such a characteristic, when the suction device 10 is adsorbed to a wall surface curved in a concave shape, particularly a wall surface curved with a small radius of curvature, a gap is generated between the second partition portion 13 and the wall surface at the lateral central portion of the suction device 10.

[0042] According to the suction device 10A according to the present embodiment, the rigidity of the lateral central portion can be increased, and it is possible to prevent a gap from being generated between the second partition portion 13 and the wall surface when adsorbing to a wall surface curved in a concave shape.

[0043] <Third Embodiment> The configuration of the suction device according to the third embodiment will be described. FIG. 10 is a bottom view showing the configuration of the suction device according to the present embodiment. FIG. 11 is a cross-sectional view taken along line B-B of FIG. 10.

[0044] As shown in FIGS. 10 and 11, the suction device 10B according to the present embodiment is different from the suction device 10 according to the first embodiment in that it includes a first partition portion 12B instead of the first partition portion 12 and further includes four cross beam members 151.

[0045] The four cross beam members 151 are each a long member extending in one direction, and are preferably formed of a material having higher rigidity than at least the first partition portion 12B and the second partition portion 13, and are formed of a material having high rigidity and being lightweight.

[0046] The four cross beam members 151 are all arranged in the decompression space such that their extending directions face one direction in the orthogonal direction, preferably the front-rear direction or the side direction, so as to cross the decompression space. In the present embodiment, the four cross beam members 151 are all arranged in the decompression space such that their extending directions face the front-rear direction and both ends thereof abut against the inner wall portion 121 of the first partition portion 12B. Further, the four cross beam members 151 are respectively provided corresponding to any one of the four frame members 140 and are positioned at substantially the center in the side direction of the corresponding frame member 140. Since each of the four frame members 140 is divided into two regulating members 141 at substantially the center in the side direction, the four cross beam members 151 are respectively arranged at the dividing positions of the four frame members 140.

[0047] The first partition portion 12B is different from the first partition portion 12 in that eight recesses 121R are formed corresponding to each of the four cross beam members 151. The eight recesses 121R are respectively formed on the inner wall portion 121 of the first partition portion 12B so as to be recessed toward the inner space side of the first partition portion 12B, that is, toward the opposing outer wall portion 122 side, at the locations where both ends of each of the four cross beam members 151 abut. Each of the four cross beam members 151 is provided in the decompression space by connecting both ends to the corresponding two recesses 121R.

[0048] According to the suction device 10B according to the present embodiment, it is possible to further prevent the first partition portion 12B from being drawn into the decompression space.

[0049] <Fourth Embodiment> The configuration of the suction device according to the fourth embodiment will be described. FIGS. 12 and 13 are a perspective view and a front view respectively showing the configuration of the suction device according to the present embodiment.

[0050] As shown in FIGS. 12 and 13, the suction device 10C according to the present embodiment is different from the suction device 10 according to the first embodiment in that it includes a first partition portion 12C instead of the first partition portion 12 and further includes a second regulating portion 16.

[0051] The first partition part 12C is different from the first partition part 12 in that it has an upper partition part 12C1 and a lower partition part 12C2. The lower partition part 12C2 is located above the second partition part 13 and is connected to the second partition part 13 via the first restricting part 14. The upper partition part 12C1 is located above the lower partition part 12C2, the lower end part thereof is connected to the lower partition part 12C2 via the second restricting part 16, and the upper end part thereof is connected to the base 11.

[0052] The second restricting part 16 is a member configured in the same manner as the first restricting part 14 except for the position where it is provided. Specifically, the second restricting part 16 has four frame-shaped members 160, similar to the first restricting part 14, and each of the four frame-shaped members 160 is divided into two restricting members 161. The second restricting part 16 is fixed between the upper partition part 12C1 and the lower partition part 12C2 in the same manner as the first restricting part 14.

[0053] According to the suction device 10C according to the present embodiment, it is possible to further prevent the suction into the reduced-pressure space of the first partition part 12C.

[0054] <Fifth Embodiment> The configuration of the suction device according to the fifth embodiment will be described. FIGS. 14 and 15 are a perspective view and a front view showing the configuration of the suction device according to the present embodiment, respectively.

[0055] As shown in FIGS. 14 and 15, the suction device 10D according to the present embodiment is different from the suction device 10 according to the first embodiment in that it includes a first partition part 12D instead of the first partition part 12. The first partition part 12D is different from the first partition part 12 in that it is formed in a bellows shape that can expand and contract in the vertical direction. Specifically, the first partition part 12D is different from the first partition part 12 in that it has an inner wall part 121D and an outer wall part 122D instead of the inner wall part 121 and the outer wall part 122.

[0056] The inner wall portion 121D and the outer wall portion 122D are different from the inner wall portion 121 and the outer wall portion 122 in that the mountain-folded portions and the valley-folded portions alternately and repeatedly appear in the vertical direction. In this way, by forming the first partition portion 12D in a bellows shape that can expand and contract in the vertical direction, the first partition portion 12D can be formed of a material with higher rigidity.

[0057] According to the suction device 10D according to the present embodiment, it is possible to further prevent the first partition portion 12D from being drawn into the reduced-pressure space.

[0058] <Sixth Embodiment> The configuration of the partition portion according to the sixth embodiment will be described. FIG. 16 is a schematic front view showing the configuration of the partition portion according to the present embodiment.

[0059] The suction device 10E according to the present embodiment is different from the suction device 10B according to the second embodiment in that two parallel link portions 17 are arranged in the internal space instead of the two elastic members 129. Of the two parallel link portions 17, one is arranged in the internal space of the portion forming the front side of the first partition portion 12, and the other is arranged in the internal space of the portion forming the rear side of the first partition portion 12. Here, the two parallel link portions 17 are arranged in the internal space so as to be located at substantially the center in the lateral direction of the suction device 10E.

[0060] Each of the two parallel link portions 17 has a parallel link 170 and a spring 171. The parallel link 170 is formed by movably connecting the ends of four links to form a parallelogram, which is a so-called parallel link mechanism. The spring 171 is a compression spring, and the ends of the corresponding springs 171 are connected to two of the connecting portions of the parallel link 170 that face each other, that is, are not adjacent to each other. Of the two connecting portions to which the ends of the spring 171 are connected, one is connected to the base 11, and the other is connected to the bottom wall portion 123 of the first partition portion 12. According to the two parallel link portions 17, the base 11 and the bottom wall portion 123 are urged to be separated from each other at the substantially central portion in the lateral direction of the suction device 10E.

[0061] According to the adsorption device 10E according to this embodiment, not only can the rigidity in the vertical direction at the central portion in the lateral direction be increased, but also the first partition portion 12 can be more effectively prevented from being drawn into the reduced-pressure space.

[0062] The embodiments of the present invention are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and their modifications are included in the scope and gist of the invention, and are also included in the invention described in the claims and the equivalent scope thereof.

Explanation of Reference Numerals

[0063] 10, 10A to 10E Adsorption device 11 Base 12, 12B to 12D First partition portion 13 Second partition portion 14 First restricting member 140, 160 Frame-shaped member 141, 161 Restricting member 16 Second restricting member 19 Reduced-pressure device

Claims

1. An adsorption device that forms a reduced-pressure space with negative pressure between itself and a wall surface and adsorbs to the wall surface, a base provided spaced apart from the wall surface so as to face the wall surface, the base being connected to a decompression device that decompresses the reduced-pressure space generated between the base and the wall surface, a first partition portion provided at the periphery of the base, the base-side portion of the peripheral wall of the reduced-pressure space being formed of an elastic member, a second partition portion provided closer to the wall surface than the first partition portion, the wall surface-side portion of the peripheral wall of the reduced-pressure space being formed of an elastic member such that one end portion on the wall surface side contacts the wall surface, a first restricting portion provided between the first partition portion and the second partition portion so as to restrict deformation such that the first partition portion and the second partition portion are drawn into the reduced-pressure space when the reduced-pressure space becomes negative pressure, The adsorption device according to claim 1, wherein at least a part of the first restricting portion is located between the first partition portion and the second partition portion and has a plurality of frame-shaped members formed in a frame shape.

2. The adsorption device according to claim 1, wherein each of the plurality of frame-shaped members has two restricting members having an extending portion extending in one direction and an orthogonal extending portion formed in a long plate shape extending in a direction orthogonal to the extending direction of the extending portion from each end of the extending portion.

3. The adsorption device is formed to be long in a first direction orthogonal to the adsorption direction with respect to the wall surface, The adsorption device according to claim 1 or claim 2, wherein the plurality of frame-shaped members are juxtaposed in the first direction.

4. The adsorption device is formed to be long in a first direction orthogonal to the adsorption direction with respect to the wall surface, The adsorption device according to claim 3, wherein the two restricting members each of the plurality of frame-shaped members has are juxtaposed in the first direction.

5. The adsorption device according to claim 1, further comprising a cross beam member that extends across the reduced-pressure space and is arranged in the reduced-pressure space such that both ends contact the first partition portion.

6. The adsorption device according to claim 3, wherein the first partition portion is formed so as to define an internal space surrounding the reduced-pressure space, and an elastic member is provided in the internal space at a substantially central portion in the first direction to enhance the rigidity of the first partition portion.

7. The adsorption device according to claim 1, wherein the first partition portion includes an upper partition portion formed of an elastic member at a base side portion of a peripheral wall of the reduced-pressure space, and a lower partition portion formed of an elastic member at a second partition portion side portion of the peripheral wall of the reduced-pressure space.

8. The adsorption device according to claim 7, further comprising a second restricting portion provided between the upper partition portion and the lower partition portion so as to restrict deformation of the first partition portion so as to be drawn into the reduced-pressure space when the reduced-pressure space becomes a negative pressure.

9. The adsorption device according to claim 8, wherein at least a part of the second restricting portion is located between the upper partition portion and the lower partition portion, and has a plurality of frame-shaped members formed in a frame shape.

10. Each of the plurality of frame-shaped members of the second restricting portion has two restricting members having an extending portion extending in one direction, and an orthogonal extending portion formed in a long plate shape extending in a direction orthogonal to the extending direction of the extending portion from each end of the extending portion. The adsorption device according to claim 9.

11. The adsorption device according to claim 1, wherein the first partition portion is formed in a bellows shape.

12. The adsorption device according to claim 3, wherein the first partition portion is formed to define an internal space surrounding the reduced-pressure space, and a parallel link portion provided in the internal space so as to increase the rigidity of the first partition portion is provided at a substantially central portion in the first direction.

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