Control device for vibration type actuator

Abstract

To estimate thrust or speed of a vibration type actuator without a thrust or speed detection sensor.SOLUTION: In a control device for a vibration type actuator, a neural network has a plurality of input layers for inputting at least a first input value and a second input value. The first input value is based on at least one of a phase difference between a first AC signal and a second AC signal, frequencies of the first AC signal and the second AC signal, and an amplitude of the first AC signal or the second AC signal. The second input value is at least one of a measured value of a vibration state in a vibrator or a measured value in accordance with an admittance characteristic of the vibrator.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present disclosure relates to a control device for a vibration type actuator.

Background Art

[0002] Research has been published on estimating the speed and position of a vibration type actuator from various state quantities of the vibration type actuator using a neural network, and a sensorless control technique that does not require a sensor for detecting the position and speed has been reported.

[0003] Non-Patent Document 1 discloses a technique for estimating the speed of a vibration type actuator from the frequency of a drive voltage, the current flowing through the vibration type actuator, and the load torque of the vibration type actuator using a neural network and controlling the speed.

[0004] Non-Patent Document 2 discloses a technique for estimating the speed of a vibration type actuator from the frequency of a drive voltage, the voltage applied to the vibration type actuator, and the temperature of the vibration type actuator using a neural network and controlling the speed.

[0005] Patent Document 1 discloses a technique for controlling using a machine-learned neural network that sets the phase difference and frequency of a plurality of drive voltages from a target speed and a position deviation.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Non-Patent Documents

[0007]

Non-Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0008] Non-Patent Documents 1 and 2 disclose speed estimation techniques using neural networks. The estimation uses, in addition to the drive frequency, which is a parameter for controlling the speed of the vibration actuator, the current flowing in response to the vibration of the vibration actuator, the drive voltage amplitude of the vibration actuator, the detected value of the load torque, and the temperature to estimate the speed. When using the load torque for estimation, a torque sensor is required in addition to current detection, making miniaturization difficult.

[0009] In addition, there is a problem of a decrease in estimation accuracy due to the difference in the frequency characteristics of the detected values by the current and the added torque sensor. Also, when using temperature for estimation, in addition to voltage detection, a temperature sensor is required, and there is a problem of a decrease in estimation accuracy due to the difference in the frequency characteristics of the detected values of temperature and drive voltage. Also, neither can estimate the thrust.

[0010] An object of the present disclosure is to enable estimation of the thrust or speed of a vibration actuator without a sensor for detecting thrust or speed.

Means for Solving the Problems

[0011] The control device has a vibrating body including an elastic body and an electro-mechanical energy conversion element, and a contact body in contact with the elastic body, and is a control device for a vibration type actuator in which the vibrating body and the contact body relatively move in a predetermined moving direction due to vibration of the vibrating body. The electro-mechanical energy conversion element has a first electrode to which a first AC voltage based on a first AC signal is applied, and a second electrode to which a second AC voltage based on a second AC signal is applied. The control device has a neural network, and the neural network has a plurality of input layers that input at least a first input value and a second input value, a plurality of intermediate layers connected to the input layers, and an output layer connected to the plurality of intermediate layers. The output layer outputs an estimated value of at least one of a thrust generated between the vibrating body and the contact body, a relative speed between the vibrating body and the contact body, a resonance frequency of the vibrating body, and a temperature of the vibrating body. The first input value is a value based on at least one of a phase difference between the first AC signal and the second AC signal, a frequency of the first AC signal and the second AC signal, and an amplitude of the first AC signal or the second AC signal. The second input value is at least one of a measured value of a vibration state in the vibrating body and a measured value corresponding to admittance.

Advantages of the Invention

[0012] According to the present disclosure, it is possible to estimate the thrust or speed of a vibration type actuator without a sensor for detecting thrust or speed.

Brief Description of the Drawings

[0013]

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Embodiments for Carrying Out the Invention

[0014] The vibration type drive device according to this embodiment includes the following. First, the vibration type drive device includes a vibration type actuator having a vibrating body provided with an elastic body and an electro-mechanical energy conversion element, and a contact body in contact with the elastic body, and a control device for the vibration type actuator.

[0015] And the vibration type drive device is a vibration type drive device in which the vibrating body and the contact body relatively move in a predetermined moving direction due to the vibration of the vibrating body.

[0016] And the aforementioned vibration is generated in the vibrating body by the voltage applied to the electro-mechanical energy conversion element.

[0017] And the vibration type drive device has a neural network that inputs the vibration state of the aforementioned vibrating body, the applied voltage and the inflowing current to the electro-mechanical energy conversion element that change according to the vibration state, and states such as the frequency, phase, and amplitude indicating the state of the applied voltage. At least one of the measured value of the vibration state in the vibrating body and the measured value according to the admittance characteristic of the vibrating body is used as an input. And the aforementioned neural network is characterized by estimating at least one of the thrust and relative velocity generated between the aforementioned vibrating body and the contact body, the temperature of the vibrating body, and the resonance frequency.

[0018] Hereinafter, it will be described in detail with reference to the drawings.

[0019] [First Embodiment] FIG. 1 is a diagram showing an example of the configuration and vibration shape of a vibration type actuator 100 according to the first embodiment. Using FIG. 1, the configuration and operating principle of the vibration type actuator 100 according to the first embodiment will be described.

[0020] As shown in Fig. 1(e), the vibration type actuator 100 according to the first embodiment includes a vibrating body 5 and a contact body 6. As shown in Figs. 1(a) and 1(e), the vibrating body 5 is composed of an elastic body 1 having a piezoelectric element 2 and two protrusions 80 that contact the contact body 6. The piezoelectric element 2 is an example of an electro-mechanical energy conversion element, forms a part of the vibrating body 5, and is a component for exciting the vibrating body 5.

[0021] Further, the piezoelectric element 2 is composed of a piezoelectric material and electrodes, and electrodes 3 and 4 are formed on the surface of the polarized piezoelectric material so that voltages can be independently applied thereto as shown in Fig. 1(b). Note that piezoelectric ceramics can be used as the piezoelectric material.

[0022] These two electrodes 3 and 4 are electrodes electrically insulated from each other, and two AC voltages with independent phase changes are applied. Also, the back surface of the piezoelectric element 2 is entirely an electrode, and is configured to be able to connect to the ground potential from the surface of the piezoelectric element 2 through vias (not shown) provided in a part of the piezoelectric element 2. Although this piezoelectric material is a single piece of piezoelectric material, for the purpose of circuit explanation, the part of the piezoelectric material sandwiched between the electrode 3, the electrode of the ground potential, and them may be referred to as a piezoelectric body 3. The same applies to the name of the piezoelectric body 4.

[0023] The contact body 6 shown in Fig. 1(e) is a slider that is pressed against the protrusion 80 of the vibrating body 5 with a constant pressing force by a pressing mechanism (not shown). This contact body (slider) 6 is configured to move relatively in the direction indicated by the arrow on the paper surface by the vibration excited in the vibrating body 5.

[0024] Figures 1(c) and 1(d) are diagrams showing an example of the vibration mode of the vibrating body 5. Figure 1(c) shows the vibration shape of the vibration mode (push-up vibration mode) excited in the vibrating body 5 when AC voltages with the same amplitude and phase are applied to the piezoelectric body 3 and the piezoelectric body 4. The push-up vibration mode is one of the natural vibration modes of the vibrating body 5, and the direction of the natural vibration is substantially perpendicular to the contact surface of the vibrating body 5 with the contact body 6 at the contact surface. The degree of identity of the amplitude and phase may be determined by the quality of the desired vibration wave by the user.

[0025] On the other hand, Figure 1(d) shows the vibration shape of the vibration mode (feed vibration mode) excited in the vibrating body 5 when AC voltages with the same amplitude and opposite phases are applied to the piezoelectric body 3 and the piezoelectric body 4. The feed vibration mode is one of the natural vibration modes of the vibrating body 5, and the direction of the natural vibration is substantially horizontal and substantially coincides with the above-mentioned moving direction at the contact surface of the vibrating body 5 with the contact body 6.

[0026] As an example, when the phase difference of the AC voltages applied to the piezoelectric body 3 and the piezoelectric body 4 is set to 0°, the vibration by the vibration mode (push-up vibration mode) shown in Figure 1(c) is excited. Also, when the phase difference of the AC voltages applied to the piezoelectric body 3 and the piezoelectric body 4 is set to 180°, the vibration by the vibration mode (feed vibration mode) shown in Figure 1(d) is excited.

[0027] Furthermore, when the phase difference of the AC voltages applied to the piezoelectric body 3 and the piezoelectric body 4 is set to a phase difference other than 0° and 180° (actually, a range of about 0° to ±120° is used), both vibration modes shown in Figures 1(c) and 1(d) are excited simultaneously. In this case, the contact body (slider) 6 in pressure contact with the protrusion 80 provided on the vibrating body 5 moves in the longitudinal direction of the rectangle of the vibrating body 5. And as the phase difference deviates from 0°, the amplitude of the vibration mode (feed vibration mode) shown in Figure 1(d) increases, and the relative speed between the contact body (slider) 6 and the vibrating body 5 increases.

[0028] In addition, the forces acting on the vibrating body 5 include a piezoelectric excitation force generated by applying an alternating voltage to the piezoelectric bodies 3 and 4 to cause vibration in the vibrating body 5, a reaction force received by the vibrating body 5 from a support member (not shown), and a reaction force received from the contact body (slider) 6. Among these, the vibration corresponding to the force (piezoelectric excitation force) generated by applying an alternating voltage to the piezoelectric bodies 3 and 4 constituting the vibrating body 5 is defined as the first vibration component, and the vibration generated in the vibrating body 5 by the reaction force received from the contact body (slider) 6 is defined as the second vibration component.

[0029] In addition, the "contact body" refers to a member that comes into contact with the vibrating body and relatively moves with respect to the vibrating body due to the vibration generated in the vibrating body. The contact between the contact body and the vibrating body is not limited to direct contact where no other member is interposed between the contact body and the vibrating body. The contact between the contact body and the vibrating body may be indirect contact where another member is interposed between the contact body and the vibrating body as long as the contact body relatively moves with respect to the vibrating body due to the vibration generated in the vibrating body.

[0030] The "other member" is not limited to a member independent of the contact body and the vibrating body (for example, a high-friction material made of a sintered body). The "other member" may be a surface treatment portion formed on the contact body or the vibrating body by plating, nitriding treatment, or the like.

[0031] In addition, the "vibrating body" refers to a member that includes an elastic body and an electro-mechanical energy conversion element and vibrates by applying an alternating voltage to the electro-mechanical energy conversion element. The elastic body is mainly composed of metal or ceramic, and the electro-mechanical energy conversion element may also serve as the elastic body.

[0032] FIG. 2 is a diagram showing a first configuration example of the vibration type drive device 102 according to the first embodiment. The vibration type drive device 102 includes a vibration type actuator 100 and a control device 101 for the vibration type actuator 100.

[0033] The control device 101 includes transformers 7 and 8, resistors 9 and 10, capacitors 11 and 12, inductors 13 and 14, an AC signal generation unit 15, amplitude detection units 16 to 18, an adder 19, a neural network 20, and a thrust / speed controller 21.

[0034] FIG. 2 is composed of a vibration type actuator 100, a generation unit for an AC voltage applied to the vibration type actuator 100, an estimation unit for the thrust and speed of the vibration type actuator 100, and a part related to speed / thrust control.

[0035] First, the AC voltage generation unit will be described. The AC signal generation unit 15 generates two-phase AC signals (first signal) VA and AC signal (second signal) VB based on a frequency command and an ON-OFF command from a command unit (not shown) and a phase difference command output from the thrust / speed controller 21 described later.

[0036] Then, the AC signal VA and the AC signal VB are connected to the primary windings of the transformers 7 and 8 via series resonance circuits each composed of inductors 13 and 14 and capacitors 11 and 12.

[0037] Here, in this example, an example of connecting the transformers 7 and 8 via a series resonance circuit is shown in order to suppress waveform shaping and changes in voltage amplitude to the piezoelectric bodies 3 and 4. However, only one of the inductor and the capacitor may be connected, or the series resonance circuit may not be connected.

[0038] The voltages input to the primary windings of the transformers 7 and 8 are stepped up and applied to the piezoelectric bodies 3 and 4 that constitute the vibrating body 5 of the vibration type actuator 100 connected to the secondary winding as the first drive voltage and the second drive voltage. As described above, for the sake of explanation on the electrical circuit, it is expressed in this way, but the piezoelectric bodies 3 and 4 are part of an integrated piezoelectric element 2.

[0039] Also, the inductance values of the secondary windings of transformer 7 and transformer 8 are frequency-matched with the braking capacitances of piezoelectric body 3 and piezoelectric body 4. As a result, currents approximately proportional to the vibration speed of the strain generated in piezoelectric body 3 and piezoelectric body 4 flow through the primary windings of transformer 7 and transformer 8.

[0040] Current detection resistors 9 and 10 are connected in series to the primary windings of transformer 7 and transformer 8, and detect the currents flowing through the primary windings of transformer 7 and 8 to generate current signal IA and current signal IB. The relationship between current signal IA and current signal IB and the vibration of vibrating body 5 will be described separately.

[0041] Next, the configuration related to the thrust and speed estimation unit will be described. The estimation of thrust and speed is performed by a trained neural network (NN) 20. The neural network will be hereinafter abbreviated as NN for description. NN 20 is composed of four input layers X1 to X4, two layers × five intermediate layers Z11 to Z25, and two output layers Y1 to Y2, and output layer Y1 is configured to output the estimated thrust, and output layer Y2 is configured to output the estimated speed.

[0042] Four signals are input to the input layers X1 to X4 of NN 20. The phase difference command output by the thrust·speed controller 21 is input to the input layer X1, and the output signals of the amplitude detection units 16 to 18 are input to the input layers X2 to X4.

[0043] The amplitude detection unit 16 detects the amplitude of the current signal IA. The amplitude detection unit 17 detects the amplitude of the current signal IB. The adder 19 outputs a signal obtained by adding the current signal IA and the current signal IB. The amplitude detection unit 18 detects the amplitude of the signal obtained by adding the current signal IA and the current signal IB output by the adder 19. The signal output by the adder 19 is a signal corresponding to the vibration state of FIG. 1(c), and its amplitude corresponds to the amplitude of the upward vibration mode of the vibrating body 5.

[0044] Further, the amplitude detectors 16 to 18 extract the fundamental wave component of the input signal using a band-pass filter or a low-pass filter, and detect the amplitude thereof. Further, the amplitude detectors 16 to 18 may convert the detected amplitude using a predetermined function calculation or a look-up table and then input it to the NN 20.

[0045] Further, the vibrating body 5 receives a reaction force generated according to the relative velocity with the contact body (slider) 6 and the relative force generated, and a second vibration component due to this reaction force is superimposed on the vibrating body 5, and the amplitudes of the current signal IA and the current signal IB change. The NN 20 estimates the velocity and the thrust from such a change in the amplitude of the current signal.

[0046] As described above, the vibration type actuator 100 has a vibrating body 5 including an elastic body 1 and a piezoelectric element 2 and a contact body 6 in contact with the elastic body 1, and the vibrating body 5 and the contact body 6 relatively move in a predetermined moving direction due to the vibration of the vibrating body 5.

[0047] The piezoelectric element 2 is an electro-mechanical energy conversion element, and has a first electrode 3 to which a first AC voltage based on the first AC signal VA is applied, and a second electrode 4 to which a second AC voltage based on the second AC signal VB is applied.

[0048] The first input layer X1 inputs a value based on the phase difference between the first AC signal VA and the second AC signal VB. The second input layer X2 inputs a value based on the amplitude of the first current signal IA based on the first AC signal VA. The third input layer X3 inputs a value based on the amplitude of the second current signal IB based on the second AC signal VB. The fourth input layer X4 inputs a value based on the amplitude of the signal obtained by adding the first current signal IA and the second current signal IB.

[0049] The first output layer Y1 outputs an estimated value of the thrust generated between the vibrating body 5 and the contact body 6. The second output layer Y2 outputs an estimated value of the relative velocity between the vibrating body 5 and the contact body 6.

[0050] The thrust·speed controller 21 controls the phase difference between the first AC signal VA and the second AC signal VB based on the estimated value of the thrust of the output layer Y1 and the estimated value of the relative speed of the output layer Y2.

[0051] Figure 3 is a diagram showing the relationship between (amplitude of current signal IA - amplitude of current signal IB) and speed. Figure 3(a) shows an example when the amplitude of (current signal IA + current signal IB) is relatively small, and Figure 3(b) shows an example when the amplitude of (current signal IA + current signal IB) is relatively large.

[0052] The line types in Figure 3 indicate the differences in the phase difference between the AC signal VA and the AC signal VB, showing a solid line (90°), a dotted line (45°), a dashed line (0°), a one-dot chain line (-45°), and a two-dot chain line (-90°).

[0053] Figure 4 is a diagram showing the relationship between (amplitude of current signal IA - amplitude of current signal IB) and thrust. Figure 4(a) shows an example when the amplitude of (current signal IA + current signal IB) is relatively small, and Figure 4(b) shows an example when the amplitude of (current signal IA + current signal IB) is relatively large.

[0054] The line types in Figure 4 indicate the differences in the phase difference between the AC signal VA and the AC signal VB, showing a solid line (90°), a dotted line (45°), a dashed line (0°), a one-dot chain line (-45°), and a two-dot chain line (-90°).

[0055] Thus, it can be seen that there is a strong correlation between the amplitudes of the current signal IA, the current signal IB, and (current signal IA + current signal IB), and the phase difference between the AC signal VA and the AC signal VB, speed, and thrust.

[0056] Therefore, NN20 is trained to input the amplitudes of the current signal IA, the current signal IB, and (current signal IA + current signal IB) and the phase difference between the AC signal VA and the AC signal VB in advance and output speed and thrust. By doing so, NN20 can output the estimated values of speed and thrust.

[0057] Next, the estimated thrust and estimated velocity, which are the calculation results of NN20, are input to the thrust-velocity controller 21. Then, the thrust-velocity controller 21 outputs a phase difference command for setting the phase difference between the AC signal VA and the AC signal VB according to the difference between the velocity command from a command unit (not shown) and the estimated velocity and the estimated thrust, and is controlled so that the velocity follows the velocity command.

[0058] FIG. 5(a) is a diagram showing a second configuration example of the vibration type driving device 102 according to the first embodiment. FIG. 5(a) is a diagram showing an example in the case where a piezoelectric element for detecting vibration is provided separately from the driving piezoelectric element on the vibrating body 5. The same components as those shown in FIG. 2 are denoted by the same reference numerals, and detailed description thereof is omitted.

[0059] Piezoelectric bodies 48 and 49 are piezoelectric elements for vibration detection. The piezoelectric body 48 outputs a vibration detection signal SA, and the piezoelectric body 49 outputs a vibration detection signal SB. Further, the piezoelectric body 48 is provided so as to overlap with the piezoelectric body 3, and the piezoelectric body 49 is provided so as to overlap with the piezoelectric body 4.

[0060] By providing the piezoelectric bodies 48 and 49 so as to overlap, they receive substantially the same strain as the overlapped piezoelectric bodies, and the vibrations of the driving piezoelectric bodies 3 and 4 can be accurately detected. The piezoelectric bodies 48 and 49 for vibration detection are not limited to the case where they are provided separately from the driving piezoelectric bodies 3 and 4 as described above. The piezoelectric bodies 48 and 49 for vibration detection may be used as the piezoelectric body regions for vibration detection by providing detection electrode regions independent of the driving electrodes on the driving piezoelectric bodies 3 and 4 and using them as the piezoelectric bodies 48 and 49 for vibration detection.

[0061] The amplitude detection unit 16 detects the amplitude of the vibration detection signal SA. The amplitude detection unit 17 detects the amplitude of the vibration detection signal SB. The adder 19 outputs a signal obtained by adding the vibration detection signals SA and SB. The amplitude detection unit 18 inputs the output signal of the adder 19 and detects the amplitude of the signal obtained by adding the vibration detection signals SA and SB. The input layer X2 inputs the signal detected by the amplitude detection unit 16. The input layer X3 inputs the amplitude detected by the amplitude detection unit 17. The input layer X4 inputs the amplitude detected by the amplitude detection unit 18.

[0062] FIG. 3 and FIG. 4 show the relationship between the difference in amplitude between the current signals IA and IB and the speed and thrust. However, the difference in amplitude between the vibration detection signals SA and SB also has a similar tendency. Therefore, also in the configuration of FIG. 5(a), NN20 can estimate the thrust and speed by performing learning in advance.

[0063] As described above, the first input layer X1 inputs a value based on the phase difference between the first AC signal VA and the second AC signal VB. The second input layer X2 inputs a value based on the amplitude of the first vibration detection signal SA based on the first electrode 3 of the piezoelectric element 2. The third input layer X3 inputs a value based on the amplitude of the second vibration detection signal SB based on the second electrode 4 of the piezoelectric element 2. The fourth input layer X4 inputs a value based on the amplitude of the signal obtained by adding the first vibration detection signal SA and the second vibration detection signal SB.

[0064] The first output layer Y1 outputs an estimated value of the thrust generated between the vibrating body 5 and the contacting body 6. The second output layer Y2 outputs an estimated value of the relative speed between the vibrating body 5 and the contacting body 6.

[0065] FIG. 5(b) is a diagram showing a third configuration example of the vibration type driving device 102 according to the first embodiment. The configuration of FIG. 5(b) is different from the configuration of FIG. 2 in that the number of input layers of NN20 has increased from four to six.

[0066] The increased input layers X2 and X3 input the amplitudes of the primary side input voltages TA and TB of the transformers 7 and 8, respectively. The amplitude detection unit 22 detects the amplitude of the primary side voltage TA of the transformer 7, and the amplitude detection unit 23 detects the amplitude of the primary side voltage TB of the transformer 8. The input layer X2 inputs the amplitude of the primary side voltage TA of the transformer 7 detected by the amplitude detection unit 22. The input layer X3 inputs the amplitude of the primary side voltage TB of the transformer 8 detected by the amplitude detection unit 23.

[0067] The input layer X4 in Fig. 5(b) corresponds to the input layer X2 in Fig. 2. The input layer X5 in Fig. 5(b) corresponds to the input layer X3 in Fig. 2. The input layer X6 in Fig. 5(b) corresponds to the input layer X4 in Fig. 2.

[0068] Since the amplitudes of the primary side voltages TA and TB of the transformers 7 and 8 change according to the admittance characteristics that change depending on the vibration state and temperature of the vibrating body 5, they change together with the state input to other input layers, so there is a possibility of improving the estimation accuracy of the thrust and speed.

[0069] As described above, the first input layer X1 inputs a value based on the phase difference between the first AC signal VA and the second AC signal VB. The second input layer X2 inputs a value based on the amplitude of the first voltage signal TA based on the first AC signal VA. The third input layer X3 inputs a value based on the amplitude of the second voltage signal TB based on the second AC signal VB.

[0070] The fourth input layer X4 inputs a value based on the amplitude of the first current signal IA. The fifth input layer X5 inputs a value based on the amplitude of the second current signal IB. The sixth input layer X6 inputs a value based on the amplitude of the signal obtained by adding the first current signal IA and the second current signal IB.

[0071] The first output layer Y1 outputs an estimated value of the thrust generated between the vibrating body 5 and the contact body 6. The second output layer Y2 outputs an estimated value of the relative speed between the vibrating body 5 and the contact body 6.

[0072] Fig. 6(a) is a diagram showing a fourth configuration example of the vibration type driving device 102 according to the first embodiment. In the configuration of Fig. 2, the amplitude detection units 16 and 17 are used to detect the amplitudes of the current signal IA and the current signal IB and input them to the input layers X2 and X3 of the NN20.

[0073] In the configuration of Fig. 6(a), power is obtained and input by multiplying the primary-side voltages TA and TB of transformers 7 and 8 by the current signals IA and IB. The multiplier 24 multiplies the primary-side voltage TA of transformer 7 by the current signal IA, and outputs the product of the primary-side voltage TA and the current signal IA to the average value detector 26. The multiplier 25 multiplies the primary-side voltage TB of transformer 8 by the current signal IB, and outputs the product of the primary-side voltage TB and the current signal IB to the average value detector 27.

[0074] The average value detector 26 detects the average value of the product of the primary-side voltage TA and the current signal IA, and outputs the average value of the product of the primary-side voltage TA and the current signal IA to the input layer X2. The average value detector 27 detects the average value of the product of the primary-side voltage TB and the current signal IB, and outputs the average value of the product of the primary-side voltage TB and the current signal IB to the input layer X3.

[0075] The input layer X2 inputs the average value of the product of the primary-side voltage TA and the current signal IA as the average value of the primary-side power of transformer 7. The input layer X3 inputs the average value of the product of the primary-side voltage TB and the current signal IB as the average value of the primary-side power of transformer 8.

[0076] The difference between the power generated on the AC signal VA side and the power generated on the AC signal VB side is correlated with the difference in the amplitudes of the current signals IA and IB, changes depending on the vibration state, and is also correlated with the thrust and speed in the same way. Therefore, the NN20 can estimate the thrust and speed by learning the relationship with the power difference in advance.

[0077] As described above, the first input layer X1 inputs a value based on the phase difference between the first AC signal VA and the second AC signal VB. The second input layer X2 inputs a value based on the average value of the first power signal based on the first AC signal VA. The third input layer X3 inputs a value based on the average value of the second power signal based on the second AC signal VB. The fourth input layer X4 inputs a value based on the amplitude of the signal obtained by adding the first current signal IA and the second current signal IB.

[0078] The first output layer Y1 outputs an estimated value of the thrust generated between the vibrating body 5 and the contact body 6. The second output layer Y2 outputs an estimated value of the relative velocity between the vibrating body 5 and the contact body 6.

[0079] FIG. 6(b) is a diagram showing a fifth configuration example of the vibration type drive device 102 according to the first embodiment. The difference between FIG. 6(b) and the configuration of FIG. 2 is that the number of input layers of the NN20 has increased from four to five.

[0080] The adder 28 outputs a signal obtained by adding the primary side voltages TA and TB of the transformers 7 and 8 to the phase difference detection unit 29. The phase difference detection unit 29 detects the phase difference between the signal output by the adder 19 and the signal output by the adder 28, and outputs the phase difference to the input layer X2. This phase difference indicates a state corresponding to the difference between the resonance frequency and the vibration frequency of the push-up vibration mode shown in FIG. 1(c), and changes according to the vibration state of the vibrating body 5. The input layer X2 inputs the phase difference between the signal output by the adder 19 and the signal output by the adder 28. The input layers X3 to X5 in FIG. 6(b) respectively correspond to the input layers X2 to X4 in FIG. 2. Thereby, the NN20 may improve the estimation accuracy of the thrust and the speed.

[0081] As described above, the first input layer X1 inputs a value based on the phase difference between the first AC signal VA and the second AC signal VB. The second input layer X2 inputs a value based on the phase difference between the addition signal of the first voltage signal TA and the second voltage signal TB and the addition signal of the first current signal IA and the second current signal IB.

[0082] The third input layer X3 inputs a value based on the amplitude of the first current signal IA. The fourth input layer X4 inputs a value based on the amplitude of the second current signal IB. The fifth input layer X5 inputs a value based on the amplitude of the signal obtained by adding the first current signal IA and the second current signal IB.

[0083] The first output layer Y1 outputs an estimated value of the thrust generated between the vibrating body 5 and the contact body 6. The second output layer Y2 outputs an estimated value of the relative velocity between the vibrating body 5 and the contact body 6.

[0084] Figure 7 shows an example of the configuration of a neural network. Figure 7(a) is a diagram for explaining the basic configuration of the neural network, where 31 is the input layer, 32 is the intermediate layer, and 33 is the output layer. Figure 7(a) shows one input layer 31, five intermediate layers 32, and one output layer 33, but there may be multiple input layers.

[0085] Figure 7(d) shows an example of the activation function used in the intermediate layer 32. The activation function is generally a function called ReLU (Rectified Linear Unit).

[0086] Figure 7(e) is an example of the activation function used in the output layer 33, which is generally called the identity function and outputs the input as it is.

[0087] Figure 7(b) shows a neural network configured to connect a time-series signal to the input layer 34. The input layer 34 inputs the input signal for each equal-time sample. At t-1, the input signal one sample time before is held, at t-2, the input signal two sample times before is held, at t-3, the input signal three sample times before is held, and at t-4, the input signal four sample times before is held. The t-1 to t-4 of the input layer 34 sequentially output a time-series signal to the intermediate layer 32. The input layer 34 outputs a plurality of input values in time series to a plurality of intermediate layers 32. In this way, by inputting a time-series signal into the neural network, it is possible to perform highly accurate estimation of speed and thrust for a fluctuating input signal.

[0088] Figure 7(c) is a neural network provided with a path for returning the state of the intermediate layer 32 to the same intermediate layer 32. The intermediate layer 32 is a recursive connection that returns the output to the input. Similar to Figure 7(b), Figure 7(c) has a configuration that has the effect of improving the estimation accuracy for time-series signals and is called a recurrent neural network.

[0089] Since the vibration type actuator 100 has a fast response to vibration, in order to estimate the speed and thrust, it is necessary to perform an estimation according to the fluctuation speed of the vibration. Figures 7(b) and 7(c) are effective methods for improving the estimation accuracy according to the fluctuation speed of the vibration.

[0090] Figure 8 shows a configuration example of an apparatus for performing the learning of NN20. The CPU 37 outputs a load command to the external load controller 41. Further, the CPU 37 outputs a frequency command, an ON-OFF command, and a phase difference command to the AC signal generation unit 15.

[0091] The amplitude detection unit 16 outputs the IA amplitude to the CPU 37. The amplitude detection unit 17 outputs the IB amplitude to the CPU 37. The amplitude detection unit 18 outputs the push-up amplitude to the CPU 37.

[0092] The CPU 37 drives the vibration type actuator 100 under various driving conditions, measures and collects the vibration state of the vibrating body 5 in terms of the IA amplitude, the IB amplitude, the push-up vibration amplitude, and the speed and thrust of the vibration type actuator 100, and generates a learned model of NN20.

[0093] 42 is a thrust sensor for measuring the thrust of the vibration type actuator 100, and outputs the measured thrust to the CPU 37. 43 is a speed sensor for measuring the speed of the vibration type actuator 100, and outputs the measured speed to the CPU 37.

[0094] In addition to data collection for the learning of NN20 and the learning of NN20, the CPU 37 performs control of the thrust and control of the push-up amplitude. First, the control of the thrust will be described. 41 is an external load controller that controls a load such as a brake or a motor connected to the vibration type actuator 100 in response to a load command from the CPU 37. The CPU 37 outputs a load command so that the thrust output by the thrust sensor 42 follows a predetermined thrust command sequence according to a predetermined thrust command sequence, and applies a predetermined load to the vibration type actuator 100.

[0095] Next, the control operation of the push-up amplitude of the CPU 37 will be described. The CPU 37 controls the frequency command so that the push-up amplitude output by the amplitude detection unit 18 follows the push-up amplitude command sequence based on a predetermined push-up amplitude command sequence.

[0096] FIG. 9 shows a first example of the sequences of the thrust command, the push-up amplitude command, and the phase difference command used for learning. The CPU 37 operates the thrust command in a triangular wave shape, operates the load command so that the thrust reciprocates between the minimum value Fmin and the maximum value Fmax, and stepwise switches the phase difference between -90° and 90°. Each time the phase difference setting is repeated, the push-up amplitude is stepwise switched.

[0097] Then, the CPU 37 collects the values of the IA amplitude, the IB amplitude, the push-up vibration amplitude, which are the vibration states during the execution of the operation of this sequence, and the speed and thrust of the vibration type actuator 100, and accumulates the learning data of the NN 20.

[0098] FIG. 10 shows a second example of the sequences of the thrust command, the push-up amplitude command, and the phase difference command used for learning. In FIG. 9, the thrust is swept in a triangular wave shape, but in FIG. 10, the phase difference command is swept in a triangular wave shape. Since the vibration state of the vibration type actuator 100 shows different responses even if it shows the same state instantaneously depending on the phase difference and the variation speed of the thrust, it is important to accumulate learning data under various conditions in addition to FIGS. 9 and 10 in constructing a good learning model.

[0099] FIG. 11 is a diagram showing an example of the time history data used for the learning of the NN 20. The NN 20 is a model that estimates the thrust and speed from the states of the phase difference command, the IA amplitude, the IB amplitude, and the push-up amplitude. FIG. 11 shows at what time the data input to the input layer is used when estimating the thrust and speed at time t.

[0100] FIG. 11(a) shows that a model for estimating the thrust and speed at time t is learned by inputting the state at time t to the input layer.

[0101] Figure 11(b) shows learning a model that inputs the state at time t-1 and estimates the thrust and velocity at time t.

[0102] Figure 11(c) shows learning a model that estimates the thrust and velocity at time t from the states from time t-4 to time t-1. This corresponds to the case of using a neural network having time-series data as shown in Figure 7(b) in the input layer 34. By adopting a configuration using such time-series data, a neural network capable of estimating thrust and velocity with a wide frequency band can be configured.

[0103] Also, by using Figures 11(a) and (b) and using a recurrent neural network as shown in Figure 7(c), the frequency band may be widened.

[0104] [Second Embodiment] Figure 12 is a diagram showing first and second examples of the configuration of the vibration type drive device 102 according to the second embodiment. The difference between the second embodiment and the first embodiment is that in the first embodiment, an example of estimating thrust and velocity using a neural network is shown, whereas in the second embodiment, further estimation of the resonance frequency and temperature of the vibrating body 5 of the vibration type actuator 100 is also performed.

[0105] Figure 12(a) is a diagram showing a first example of the configuration of the vibration type drive device 102 according to the second embodiment. The same components as those shown in Figure 2 are denoted by the same reference numerals, and detailed description thereof is omitted.

[0106] 39 is a trained neural network (NN). The difference between NN39 and NN20 is that a frequency command signal for commanding the frequency of the AC signal VA is input to the input layer X1, and an estimated value of the resonance frequency of the vibrating body 5 of the vibration type actuator 100 is output from the output layer Y3.

[0107] NN39 has an input layer X1 to X5 and an output layer Y1 to Y3. The input layers X2 to X5 in Fig. 12(a) correspond to the input layers X1 to X4 in Fig. 2. The input layer X1 inputs a frequency command signal that commands the frequency of the AC signal VA from the boost amplitude controller 30. The output layer Y3 outputs an estimated value of the resonance frequency to the boost amplitude controller 30.

[0108] NN39 is configured to output estimated values of thrust, speed, and resonance frequency from the output layers Y1 to Y3 by pre-learning.

[0109] 30 is a boost amplitude controller that controls the frequency command of the AC signal VA according to the output signal of the amplitude detection unit 18 so that the output signal of the amplitude detection unit 18 corresponding to the amplitude of the boost vibration mode of the vibrating body 5 becomes a predetermined value. The boost amplitude controller 30 is configured to adjust the control amount of the frequency command according to the estimated resonance frequency output by the NN39, and adjusts the operation amount of the frequency so that the frequency command does not exceed the estimated resonance frequency.

[0110] As described above, the first input layer X1 inputs a value based on the frequencies of the first AC signal VA and the second AC signal VB. Here, the frequencies of the first AC signal VA and the second AC signal VB are the same as each other. The second input layer X2 inputs a value based on the phase difference between the first AC signal VA and the second AC signal VB.

[0111] The third input layer X3 inputs a value based on the amplitude of the first current signal IA. The fourth input layer X4 inputs a value based on the amplitude of the second current signal IB. The fifth input layer X5 inputs a value based on the amplitude of the signal obtained by adding the first current signal IA and the second current signal IB.

[0112] The first output layer Y1 outputs an estimated value of the thrust generated between the vibrating body 5 and the contact body 6. The second output layer Y2 outputs an estimated value of the relative speed between the vibrating body 5 and the contact body 6. The third output layer Y3 outputs an estimated value of the resonance frequency of the vibrating body 5.

[0113] The push-up amplitude controller 30 controls the frequencies of the first AC signal VA and the second AC signal VB based on a value based on the amplitude of the signal obtained by adding the first current signal IA and the second current signal IB of the amplitude detection unit 18, and an estimated value of the resonance frequency of the output layer Y3.

[0114] FIG. 12(b) is a diagram showing a second example of the configuration of the vibration type driving device 102 according to the second embodiment. The same components as those shown in FIG. 12(a) are denoted by the same reference numerals, and detailed description thereof is omitted.

[0115] NN39 in the second example is configured to output estimated values of the thrust, speed, and temperature of the vibrating body 5 from the output layers Y1 to Y3 by learning in advance.

[0116] The push-up amplitude controller 30 controls the frequency command of the AC signal VA according to the output signal of the amplitude detection unit 18 so that the output signal of the amplitude detection unit 18 corresponding to the amplitude of the push-up vibration mode of the vibrating body 5 becomes a predetermined value.

[0117] The thrust / speed controller 21 outputs a phase difference command for setting the phase difference between the AC signal VA and the AC signal VB according to the difference between the speed command from a command unit (not shown) and the estimated speed and the estimated thrust, and adjusts the change rate of the operation amount of the phase difference according to the estimated temperature of the output layer Y3. When the temperature of the vibrating body 5 increases, the efficiency of the vibration type actuator 100 decreases. Therefore, the thrust / speed controller 21 performs adjustments such as suppressing the thrust when the temperature of the vibrating body 5 increases.

[0118] As described above, the first input layer X1 inputs a value based on the frequencies of the first AC signal VA and the second AC signal VB. The second input layer X2 inputs a value based on the phase difference between the first AC signal VA and the second AC signal VB.

[0119] The third input layer X3 inputs a value based on the amplitude of the first current signal IA. The fourth input layer X4 inputs a value based on the amplitude of the second current signal IB. The fifth input layer X5 inputs a value based on the amplitude of the signal obtained by adding the first current signal IA and the second current signal IB.

[0120] The first output layer Y1 outputs an estimated value of the thrust generated between the vibrating body 5 and the contact body 6. The second output layer Y2 outputs an estimated value of the relative speed between the vibrating body 5 and the contact body 6. The third output layer Y3 outputs an estimated value of the temperature of the vibrating body 5.

[0121] Based on the estimated value of the thrust of the output layer Y1, the estimated value of the relative speed of the output layer Y2, and the estimated value of the temperature of the output layer Y3, the thrust - speed controller 21 controls the phase difference between the first AC signal VA and the second AC signal VB.

[0122] Based on the value based on the amplitude of the signal obtained by adding the first current signal IA and the second current signal IB of the amplitude detection unit 18, the push - up amplitude controller 30 controls the frequencies of the first AC signal VA and the second AC signal VB.

[0123] FIG. 13 is a diagram showing a third example of the configuration of the vibration - type driving device 102 according to the second embodiment. In the configuration of FIG. 13, the CPU 37 performs the generation of the phase - difference command and the frequency command with the NN39 in FIG. 12(a). For the configurations shown in FIG. 13 that are the same as those shown in FIG. 12(a), the same reference numerals are used, and their detailed descriptions are omitted.

[0124] 35 is an A / D converter for converting the current signal IA and the current signal IB from analog to digital. 36 is an FPGA that inputs the digital current signals IA and IB converted by the A / D converter 35, detects the amplitudes of the current signals IA and IB respectively and the amplitude of the signal obtained by adding the current signal IA and the current signal IB, and outputs them to the CPU 37. Furthermore, the FPGA 36 is inserted with a band - pass filter for removing the harmonic components and DC components included in the current signals IA and IB before detecting their respective amplitudes.

[0125] The CPU 37 uses an arithmetic routine that performs the same operations as the NN 39 in Fig. 12(a) to obtain the estimated values of the thrust, the resonance frequency of the vibrating body 5, and the temperature of the vibrating body 5 from the current signals IA and IB from the FPGA 36, the amplitude of the signal obtained by adding these signals, the phase difference command, and the frequency command.

[0126] Figs. 14(a) and 14(b) are flowcharts showing the operations in which the CPU 37 operates the phase difference command and the frequency command. Fig. 14(a) shows the control steps for controlling the thrust. Fig. 14(b) shows the control steps for controlling the amplitude of the push-up vibration.

[0127] First, an explanation will be given with reference to Fig. 14(a). In step S101, the CPU 37 sets a predetermined thrust command Fcom, sets the phase difference command Ph to the initial phase difference of 0°, and sets the ON-OFF command to ON.

[0128] Subsequently, in step S102, the CPU 37 determines whether it is the measurement timing. If it is not the measurement timing (No in S102), the CPU 37 waits in step S102. On the other hand, if it is the measurement timing (Yes in S102), the CPU 37 proceeds to step S103.

[0129] In step S103, the CPU 37 sets values to the input layers X1 to X5 of the neural network. The CPU 37 sets the frequency command Frq to the input layer X1, the phase difference command Ph to the input layer X2, the amplitude of the current signal IA to the input layer X3, the amplitude of the current signal IB to the input layer X4, and the amplitude of the signal obtained by adding the current signal IA and the current signal IB to the input layer X5. Here, the frequency command Frq is set in the control routine for the amplitude of the push-up vibration in Fig. 14(b) described later. Note that the control routine for the amplitude of the push-up vibration is executed in parallel with the control routine for the thrust in Fig. 14(a).

[0130] Subsequently, in step S104, the CPU 37 obtains estimated values of the thrust F, the resonance frequency Fr0 of the vibrating body 5, and the temperature Temp of the vibrating body 5 by using the calculation routine of the learned neural network according to the values of the input layers X1 to X5 set in step S103. Then, the CPU 37 sets dPh, which is the minimum change amount of the phase difference command, according to the temperature Temp. In subsequent steps, the CPU 37 compares the above-described thrust command Fcom with the thrust F calculated in step S104 and controls the phase difference command Ph.

[0131] Subsequently, the control of the phase difference command Ph will be described in steps S105 to S111.

[0132] In step S105, the CPU 37 compares the thrust command Fcom set in step S101 with the thrust F calculated in step S104.

[0133] As a result of the comparison in step S105, if the thrust command Fcom is smaller than the thrust F ( < in S105), the CPU 37 proceeds to step S106.

[0134] In step S106, the CPU 37 sets the result of subtracting dPh from the phase difference command Ph as the new phase difference command Ph.

[0135] Subsequently, in step S107, the CPU 37 determines whether the phase difference command Ph is smaller than -90°.

[0136] As a result of the determination in step S107, if the phase difference command Ph is smaller than -90° (Yes in S107), the CPU 37 proceeds to step S108.

[0137] On the other hand, as a result of the determination in step S107, if the phase difference command Ph is not smaller than -90° (No in S107), the CPU 37 proceeds to step S112.

[0138] In step S108, the CPU 37 sets the phase difference command Ph to -90° and proceeds to step S112.

[0139] Also, if the thrust command Fcom is greater than the thrust F as a result of the comparison in step S105 (S105's >), the CPU 37 proceeds to step S109.

[0140] In step S109, the CPU 37 sets the result of adding dPh to the phase difference command Ph as the new phase difference command Ph.

[0141] Subsequently, in step S110, the CPU 37 determines whether the phase difference command Ph is greater than +90°.

[0142] If the phase difference command Ph is greater than +90° as a result of the determination in step S110 (S110's Yes), the CPU 37 proceeds to step S111.

[0143] On the other hand, if the phase difference command Ph is not greater than +90° as a result of the determination in step S110 (S110's No), the CPU 37 proceeds to step S112.

[0144] In step S111, the CPU 37 sets the phase difference command Ph to +90° and proceeds to step S112.

[0145] When the process of step S108 ends, when the process of step S111 ends, or when the thrust command Fcom and the thrust F are the same in the comparison of step S105 (S105's =), the CPU 37 proceeds to step S112. Note that by repeating the operations from step S105 to step S111, the phase difference command Ph is controlled so that the thrust F approaches the thrust command Fcom.

[0146] Subsequently, in step S112, the CPU 37 determines whether a stop command has been input. If a stop command has not been input as a result of this determination (S112's No), the CPU 37 returns to step S102 and performs the processes after step S102.

[0147] On the other hand, if a stop command is input as a result of the determination in step S112 (Yes in S112), the CPU 37 proceeds to step S113.

[0148] In step S113, the CPU 37 sets the ON-OFF command to OFF. As a result, the outputs of the AC signal VA and the AC signal VB output by the AC signal generation unit 15 become 0V, and the contact body (slider) 6 of the vibration type actuator 100 stops.

[0149] Then, when the process of step S113 is completed, the process of the flowchart shown in FIG. 14(a) is completed.

[0150] Next, FIG. 14(b) will be described. First, in step S201, the CPU 37 sets a predetermined push-up vibration amplitude command TScom and sets the frequency command Frq to the initial frequency F0.

[0151] Subsequently, in step S202, the CPU 37 determines whether it is the measurement timing. As a result of this determination, if it is not the measurement timing (No in S202), the CPU 37 waits in step S202.

[0152] On the other hand, if it is the measurement timing as a result of the determination in step S202 (Yes in S202), the CPU 37 proceeds to step S203.

[0153] In step S203, the CPU 37 acquires the push-up vibration amplitude TS, which is the amplitude of the signal obtained by adding the current signal IA and the current signal IB from the FPGA 36. Then, the CPU 37 sets dFrq, which is the minimum change amount of the frequency command, according to the difference between the frequency command Frq and the resonance frequency Fr0 of the vibrating body 5 obtained in step S104 of FIG. 14(a).

[0154] Then, in subsequent steps, the CPU 37 compares the above-described push-up vibration amplitude command TScom with the push-up vibration amplitude TS detected in step S203 to control the frequency command Frq.

[0155] Next, the control of the frequency command Frq will be described in Steps S204 to S210.

[0156] In Step S204, the CPU 37 compares the boost vibration amplitude command TScom set in Step S201 with the boost vibration amplitude TS detected in Step S203.

[0157] As a result of the comparison in Step S204, if the boost vibration amplitude command TScom is smaller than the boost vibration amplitude TS (< in S204), the CPU 37 proceeds to Step S205.

[0158] In Step S205, the CPU 37 sets the result of adding dFrq to the frequency command Frq as the new frequency command Frq.

[0159] Subsequently, in Step S206, the CPU 37 determines whether the frequency command Frq is greater than Frqmax.

[0160] As a result of the determination in Step S206, if the frequency command Frq is greater than Frqmax (Yes in S206), the CPU 37 proceeds to Step S207.

[0161] On the other hand, as a result of the determination in Step S206, if the frequency command Frq is not greater than Frqmax (No in S206), the CPU 37 proceeds to Step S211.

[0162] In Step S207, the CPU 37 sets the frequency command Frq to Frqmax and proceeds to Step S211.

[0163] Also, as a result of the comparison in Step S204, if the boost vibration amplitude command TScom is greater than the boost vibration amplitude TS (> in S204), the CPU 37 proceeds to Step S208.

[0164] In step S208, the CPU 37 sets the result of subtracting dFrq from the frequency command Frq as the new frequency command Frq.

[0165] Subsequently, in step S209, the CPU 37 determines whether the frequency command Frq is less than Frqmin.

[0166] If, as a result of the determination in step S209, the frequency command Frq is less than Frqmin (Yes in S209), the CPU 37 proceeds to step S210.

[0167] On the other hand, if, as a result of the determination in step S209, the frequency command Frq is not less than Frqmin (No in S209), the CPU 37 proceeds to step S211.

[0168] In step S210, the CPU 37 sets the frequency command Frq to Frqmin and proceeds to step S211.

[0169] When the processing of step S207 is completed, when the processing of step S210 is completed, or when the boost vibration amplitude command TScom and the boost vibration amplitude TS are the same in the comparison of step S204 (= in S204), the CPU 37 proceeds to step S211. Note that by repeating the operations of steps S204 to S210, the frequency command Frq is controlled so that the boost vibration amplitude TS approaches the boost vibration amplitude command TScom.

[0170] Subsequently, in step S211, the CPU 37 determines whether a stop command has been input. If, as a result of this determination, a stop command has not been input (No in S211), the CPU 37 returns to step S202 and performs the processing after step S202.

[0171] On the other hand, if, as a result of the determination in step S211, a stop command has been input (Yes in S211), the processing of the flowchart shown in FIG. 14(b) ends.

[0172] FIG. 15 is a diagram showing an example of the configuration and vibration shape of the vibration type actuator 200. With reference to this FIG. 15, the configuration and operating principle of the vibration type actuator 200 according to the second embodiment will be described.

[0173] As shown in FIG. 15(d), the vibration type actuator 200 according to the second embodiment includes a vibrating body 205 and a contact body 206. The vibrating body 205 is a plate-shaped vibrating body made of a conductive material, and as shown in FIGS. 15(a) and 15(d), it is composed of a piezoelectric element 202 and an elastic body 201 having a protrusion 280 that contacts the contact body 206 on the plate-shaped surface. The piezoelectric element 202 forms a part of the vibrating body 205 and is a component for exciting the vibrating body 205.

[0174] Also, as shown in FIG. 15(a), two electrodes 203 and 204 are formed on the surface of the piezoelectric element 202. These two electrodes 203 and 204 are electrodes that are electrically insulated from each other, and two alternating voltages with independent phase changes are applied. Also, the entire back surface of the piezoelectric element 202 serves as an electrode, and it is configured to be able to connect to the ground potential from the surface of the piezoelectric element 202 through a via (not shown) provided in a part of the piezoelectric element 202. In the following description, the electrodes 203 and 204 will be referred to as piezoelectric body 203 and piezoelectric body 204, respectively.

[0175] The contact body 206 shown in FIG. 15(d) is a slider that is pressed against the protrusion 280 of the vibrating body 205 with a constant pressing force by a pressing mechanism (not shown). This contact body (slider) 206 is configured to move in the direction of the arrow in the plane of the paper due to the vibration excited in the vibrating body 205.

[0176] FIGS. 15(b) and 15(c) are diagrams showing an example of the vibration mode of the vibrating body 205. FIG. 15(b) shows the vibration shape (tensile and compressive vibration) of the vibration mode (pushing-up vibration mode) excited in the vibrating body 205 when an alternating voltage with the same amplitude and in-phase is applied to the piezoelectric body 203 and the piezoelectric body 204.

[0177] Further, FIG. 15(c) shows the vibration shape (bending vibration) of the vibration mode (feed vibration mode) excited in the vibrating body 205 when AC voltages of the same amplitude and opposite phases are applied to the piezoelectric bodies 203 and 204.

[0178] That is, when the phase difference of the AC voltages applied to the piezoelectric bodies 203 and 204 of the vibrating body 205 is set to 0°, the vibration mode (push-up vibration mode) shown in FIG. 15(b) is excited. Further, when the phase difference of the AC voltages applied to the piezoelectric bodies 203 and 204 of the vibrating body 205 is set to 180°, the vibration mode (feed vibration mode) shown in FIG. 15(c) is excited.

[0179] Furthermore, when the phase difference of the AC voltages applied to the piezoelectric bodies 203 and 204 of the vibrating body 205 is set to a phase other than 0° and 180° (actually, a range of about 0° to ±120° is used), both vibration modes in FIGS. 15(b) and 15(c) are excited simultaneously. In this case, the contact body (slider) 206 in pressure contact with the protrusion 280 provided on the vibrating body 205 moves in the short side direction of the rectangle of the vibrating body 205. Then, as the phase difference deviates from 0°, the amplitude of the vibration mode (feed vibration mode) shown in FIG. 15(c) increases, and the relative speed between the contact body (slider) 206 and the vibrating body 205 increases.

[0180] If these piezoelectric bodies 203 and 204 are replaced with the above piezoelectric bodies 3 and 4, the vibration type drive device 102 according to the above first embodiment can be applied.

[0181] In the above example, the amplitude of the sum signal of the current signal IA and the current signal IB is set as the push-up vibration amplitude. However, depending on the structure of the vibration type actuator, the amplitude of the difference signal between the current signal IA and the current signal IB may be the push-up vibration amplitude.

[0182] FIG. 16 is a diagram showing a configuration example of a vibration type actuator 300. The vibration type actuator 300 uses the same vibration mode as the vibration type actuator 200, but the position of the protrusion 380 in contact with the contact body 306 is different, and the amplitude of (current signal IA - current signal IB) corresponds to the push-up vibration amplitude.

[0183] As shown in FIG. 16(d), the vibration type actuator 300 includes a vibrating body 305 and a contact body 306. As shown in FIGS. 16(a) and 16(d), the vibrating body 305 is composed of a piezoelectric element 302 and an elastic body 301 having a protrusion 380 that contacts the contact body 306 on a plate-like surface. The piezoelectric element 302 forms a part of the vibrating body 305 and is a component for exciting the vibrating body 305. Further, as shown in FIG. 16(a), two electrodes 303 and 304 are formed on the surface of the piezoelectric element 302. In the following description, the electrodes 303 and 304 will be referred to as the piezoelectric body 303 and the piezoelectric body 304, respectively.

[0184] FIGS. 16(b) and 16(c) are diagrams showing an example of the vibration mode of the vibrating body 305. FIG. 16(b) shows the vibration shape (bending vibration) of the vibration mode (lifting vibration mode) excited in the vibrating body 305 when an AC voltage of the same amplitude and opposite phase is applied to the piezoelectric body 303 and the piezoelectric body 304. Further, FIG. 16(c) shows the vibration shape (tensile-compressive vibration) of the vibration mode (feeding vibration mode) excited in the vibrating body 305 when an AC voltage of the same amplitude and the same phase is applied to the piezoelectric body 303 and the piezoelectric body 304.

[0185] [Third Embodiment] FIG. 17 is a diagram showing an example of the configuration of a vibration type actuator 400 according to the third embodiment. Using this FIG. 17, the configuration and operating principle of the vibration type actuator 400 according to the third embodiment will be described.

[0186] As shown in FIG. 17(b), the vibration type actuator 400 according to the third embodiment includes a vibrating body 405, a contact body 406, and a rotating shaft 407 connected to the contact body 406.

[0187] As shown in Fig. 17(a), the vibrating body 405 is a columnar vibrating body made of a conductive material, and is composed of piezoelectric bodies 403 and 404, and an elastic body 401 that sandwiches these piezoelectric bodies 403 and 404 from above and below and has a protrusion 480 at the upper part of the column.

[0188] Also, the piezoelectric body 403 is a component for exciting vibrations that cause the vibrating body 405 to expand and contract in the height direction of the column, and the piezoelectric body 404 is a component for exciting torsional vibrations of the vibrating body 405 with respect to the central axis of the column, and is sandwiched and fixed to the elastic body 401 by a fastening member (not shown).

[0189] The contact body 406 shown in Fig. 17(b) is a rotor that is brought into pressure contact with the protrusion 480 of the vibrating body 405 with a constant pressure by a pressurizing mechanism (not shown). This contact body (rotor) 406 rotates the rotating shaft 407 and the contact body (rotor) 406 by the vibrations excited in the vibrating body 405.

[0190] Next, the driving operation of the vibration type actuator 400 will be described. The vibration type actuator 400 is an actuator that rotationally drives the contact body (rotor) 406 by a combined vibration of a telescopic vibration (lifting vibration) and a torsional vibration (feeding vibration) excited in the vibrating body 405.

[0191] When an alternating voltage of a predetermined frequency is applied to the piezoelectric body 403, a telescopic vibration (lifting vibration) is excited in the vibrating body 405, and when an alternating voltage is applied to the piezoelectric body 404, a torsional vibration (feeding vibration) is excited in the vibrating body 405. Therefore, when the telescopic vibration (lifting vibration) and the torsional vibration (feeding vibration) are excited with a phase shift in time, the contact body (rotor) 406 rotates.

[0192] Here, the differences between the vibration type actuator 400 and the vibration type actuator 100 will be described. These actuators have significant differences in driving in addition to the difference in shape. That is, while the vibration type actuator 100 excites the push vibration with the in-phase component of the two-phase AC voltage applied and the feed vibration with the out-of-phase component, each phase of the two-phase AC voltage corresponds to the push vibration and the feed vibration individually.

[0193] Therefore, the vibration type actuator 100 controls the amplitude balance between the push vibration and the feed vibration with the phase difference between the two-phase AC voltages applied. However, for the vibration type actuator 400, the amplitude balance between the push vibration and the feed vibration does not change even if the phase difference is manipulated. Thus, the vibration type actuator 400 controls the balance between the push vibration and the feed vibration by manipulating the amplitude balance of the two-phase AC voltage or the voltage amplitude of one phase.

[0194] Next, the vibration excitation of the vibrating body 405 due to the external force of the vibration type actuator 400 will be described. An example of the case of driving under the condition that the frequency of the two-phase AC voltage is higher than the natural frequency of the push vibration mode of the vibrating body 405 will be described. Also in the vibration type actuator 400, a second vibration component is superimposed on the vibrating body 405 by the force generated at the contact portion according to the relative speed and the relative force between the protrusion 480 and the contact body (rotor) 406.

[0195] FIG. 18 is a diagram showing a configuration example of a vibration type driving device 412 according to the third embodiment. The vibration type driving device 412 includes a vibration type actuator 400 and a control device 411 for the vibration type actuator 400.

[0196] The control device 411 includes transformers 7, 8, resistors 9, 10, capacitors 11, 12, inductors 13, 14, an AC signal generation unit 15, amplitude detection units 16 to 18, an adder 19, an NN 20, a thrust / speed controller 21, and a subtractor 38.

[0197] First, the AC voltage generation section will be described. The AC signal generation section 15 generates two-phase AC signals VA (the first signal) and VB (the second signal) with a 90° phase difference based on the frequency command from a command section (not shown) and the VB voltage amplitude command output by the thrust / speed controller 21. Further, the AC signal generation section 15 sets the AC signal VA to a predetermined amplitude and the AC signal VB to an amplitude corresponding to the VB voltage amplitude command. When the VB voltage amplitude command is a negative value, the AC signal VB is output after being inverted in sign.

[0198] As described above, the first input layer X1 inputs a value based on the amplitude of the second AC signal VB. The second input layer X2 inputs a value based on the amplitude of the signal obtained by adding the first current signal IA and the second current signal IB. The third input layer X3 inputs a value based on the amplitude of the signal obtained by subtracting the second current signal IB from the first current signal IA. The fourth input layer X4 inputs a value based on the amplitude of the first current signal IA.

[0199] The first output layer Y1 outputs an estimated value of the thrust generated between the vibrating body 5 and the contact body 6. The second output layer Y2 outputs an estimated value of the relative speed between the vibrating body 5 and the contact body 6.

[0200] The thrust / speed controller 21 controls the amplitude of the second AC signal VB based on the estimated value of the thrust of the output layer Y1 and the estimated value of the relative speed of the output layer Y2.

[0201] FIG. 19 shows an example of the waveforms of the AC signal VA, the AC signal VB, and the VB voltage amplitude command. FIG. 19(a) shows the signal waveform of the AC signal VA. FIG. 19(b) shows the signal waveforms of the AC signal VB (solid line) and the VB voltage amplitude command (dashed line). The phase of the AC signal VB is shifted by 90° with respect to the AC signal VA, and the sign of the phase difference between the AC signal VA and the AC signal VB is switched according to the sign of the VB voltage amplitude (dashed line).

[0202] In FIG. 18, the AC signal VA and the AC signal VB are each connected to the primary windings of the transformers 7 and 8 via series resonance circuits composed of inductors 13, 14 and capacitors 11, 12. Then, the voltages input to the primary windings of the transformers 7 and 8 are boosted and applied as a first driving voltage and a second driving voltage to the piezoelectric bodies 403 and 404 of the vibration type actuator 400 connected to the secondary winding.

[0203] Here, the inductor values of the secondary windings of the transformers 7 and 8 are frequency-matched with the braking capacitances of the piezoelectric bodies 403 and 404. As a result, a current approximately proportional to the vibration speeds of the piezoelectric bodies 403 and 404 flows through the primary windings of the transformers 7 and 8.

[0204] On the other hand, resistors 9 and 10 are connected in series to the primary windings of the transformers 7 and 8. These resistors 9 and 10 convert the current flowing through the connected primary windings of the transformers 7 and 8 into voltages to generate a current signal IA and a current signal IB. The current signal IA is a signal corresponding to the vibration of the vibrating body 405 in the telescopic vibration mode (lifting vibration mode), and the current signal IB is a signal corresponding to the vibration of the vibrating body 405 in the torsional vibration mode (feeding vibration mode).

[0205] Next, the configuration regarding the estimation and control of the thrust and speed will be described. To detect the amplitude of the lifting direction vibration of the vibration type actuator 100 in FIG. 2, the amplitude of (current signal IA + current signal IB) was detected. However, in the vibration type actuator 400, the amplitude of the current signal IA corresponds to the amplitude of the lifting direction vibration.

[0206] Therefore, in the present embodiment, instead of the amplitude of the current signal IA in FIG. 2, the amplitude of (current signal IA + current signal IB) is detected. Also, instead of the amplitude of the current signal IB in FIG. 2, the amplitude of (current signal IA - current signal IB) is detected. Further, instead of the amplitude of (current signal IA + current signal IB) in FIG. 2, the amplitude of the current signal IA is detected.

[0207] The amplitude detection unit 16 receives the signal obtained by adding the current signal IA and the current signal IB output by the adder 19, and outputs the amplitude of the signal obtained by adding the current signal IA and the current signal IB to the input layer X2.

[0208] The amplitude detection unit 17 receives the signal obtained by subtracting the current signal IB from the current signal IA output by the subtracter 38, and outputs the amplitude of the signal obtained by subtracting the current signal IB from the current signal IA to the input layer X3.

[0209] The amplitude detection unit 18 outputs the amplitude of the current signal IA to the input layer X4.

[0210] These amplitudes change due to the second vibration component superimposed on the vibrating body 405 according to the thrust and speed, and the estimated values of the thrust and speed are output by the NN20 that has been learned in advance by the VB voltage amplitude command and the input of the amplitude values output by the amplitude detection units 16 to 18.

[0211] Then, the estimated thrust and estimated speed, which are the calculation results of the NN20, are input to the thrust - speed controller 21. And the thrust - speed controller 21 outputs a VB voltage amplitude command signal for setting the voltage amplitude of the AC signal VB to the AC signal generation unit 15 according to the difference between the speed command from a command unit (not shown) and the estimated speed and the estimated thrust. And the AC signal generation unit 15 sets the voltage amplitude of the AC signal VB, and the speed and thrust are controlled by the magnitude of the amplitude of the feed vibration mode excited in the vibrating body 405.

[0212] [Fourth Embodiment] FIG. 20 is a diagram showing a configuration example of a vibration - type actuator 500 according to the fourth embodiment.

[0213] The vibrating bodies 501, 502, and 503 are the same as the vibrating body 5 shown in FIG. 1, and are in contact with each other at the contact surfaces of the respective protrusions 580 along the circumference of the annular contact body 510. By combining the thrusts of the three vibrating bodies 501, 502, and 503, the output torque is increased.

[0214] FIG. 21 is a diagram showing a configuration example of a vibration type driving device 512 according to the fourth embodiment. The same components as those shown in FIG. 2 are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0215] The vibration type driving device 512 includes a vibration type actuator 500 and a control device 511 for the vibration type actuator 500.

[0216] The control device 511 includes resistors 9 and 10, capacitors 11 and 12, inductors 13 and 14, an AC signal generation unit 15, amplitude detection units 16 to 18, an adder 19, a speed controller 40, an NN 50, and transformers 60 to 65.

[0217] Piezoelectric elements 504 and 505 are provided as excitation piezoelectric elements on the vibrating body 501. Piezoelectric elements 506 and 507 are provided as excitation piezoelectric elements on the vibrating body 502. Piezoelectric elements 508 and 509 are provided as excitation piezoelectric elements on the vibrating body 503.

[0218] Each piezoelectric element is divided into an A-phase side piezoelectric element connected to the AC signal VA via the inductor 13, the capacitor 11, and three transformers 60 to 62, and a B-phase side piezoelectric element connected to the AC signal VB via the inductor 14, the capacitor 12, and three transformers 63 to 65.

[0219] The A-phase side piezoelectric elements are piezoelectric elements 504, 506, and 508, which are respectively connected to the secondary side windings of the transformers 60, 61, and 62. The primary side windings of the transformers 60, 61, and 62 are connected in series, and one of the series connections is connected to the capacitor 11 and the other is connected to the current detection resistor 9.

[0220] On the other hand, the B-phase side piezoelectric elements are piezoelectric elements 505, 507, and 509, which are respectively connected to the secondary side windings of the transformers 63, 64, and 65. The primary side windings of the transformers 63, 64, and 65 are connected in series, and one end of the series connection is connected to the capacitor 12 and the other end is connected to the current detection resistor 10.

[0221] The resistor 9 detects the current signal IA corresponding to the vibration speed of the piezoelectric body on the A-phase side, and the resistor 10 detects the current signal IB corresponding to the vibration speed of the piezoelectric body on the B-phase side.

[0222] Since the vibrating bodies 501, 502, and 503 are driven in series connection, when an alternating voltage is applied to the primary side of the transformer, well-aligned vibrations are formed. Also, the second vibration components superimposed on each vibrating body due to the frictional force acting between the protrusion 580 of the vibrating bodies 501, 502, 503 and the contact body (rotor) 510 also change in a well-aligned manner. Since the vibrations of each vibrating body 501, 502, 503 are well-aligned, similar to the case of the first embodiment, by detecting the current signals IA and IB of the primary side winding of the transformer, the vibrations of the vibrating bodies 501, 502, 503 can be detected as one vibration.

[0223] That is, in this embodiment where a plurality of vibrating bodies 501, 502, 503 are connected in series and driven, it is also possible to estimate the thrust and speed by using the NN20 described in the first embodiment. In this embodiment, the speed is estimated using the NN50 that has been pre-learned to estimate only the speed. The speed controller 40 compares the estimated speed with the speed command from a command unit (not shown) and outputs a phase difference command for setting the phase difference between the AC signal VA and the AC signal VB so that the estimated speed becomes equal to the speed command.

[0224] In the fourth embodiment, an example is shown in which a plurality of vibrating bodies 501, 502, 503 are connected to transformers 60 to 65 and connected in series, and voltages are applied to both ends. However, the piezoelectric bodies of a plurality of vibrating bodies may be directly connected in series without using a transformer. Also, in the above example, the vibrations were detected using the current signals IA and IB of the primary side winding of the transformer, but a piezoelectric element for vibration detection may be separately provided on the vibrating body.

[0225] As described above, the first input layer X1 inputs a value based on the phase difference between the first AC signal VA and the second AC signal VB. The second input layer X2 inputs a value based on the amplitude of the second current signal IB. The third input layer X3 inputs a value based on the amplitude of the first current signal IA. The fourth input layer X4 inputs a value based on the amplitude of the signal obtained by adding the first current signal IA and the second current signal IB. The output layer Y1 outputs an estimated value of the relative speed between the vibrating body 5 and the contact body 6.

[0226] Based on the estimated value of the relative speed of the output layer Y1, the speed controller 40 controls the phase difference between the first AC signal VA and the second AC signal VB.

[0227] [Fifth Embodiment] FIG. 22(a) is a diagram showing a configuration example of a vibration type actuator 600 according to the fifth embodiment.

[0228] The vibration type actuator 600 according to the fifth embodiment includes a vibrating body 605, and a contact body 606 which is an annular rotor and a rotating shaft 607 connected to the contact body (rotor) 606. The vibrating body 605 is an annular vibrating body made of a conductive material, and is composed of a piezoelectric element 602 and an elastic body 601 having a protrusion 680 that contacts the contact body (rotor) 606 on the upper surface of the ring. Further, the protrusion 680 has a resin friction member 681 at the contact portion with the contact body (rotor) 606. The piezoelectric element 602 forms a part of the vibrating body 605 and is a component for vibrating the vibrating body 605.

[0229] FIG. 22(b) is a diagram showing an example of a plurality of electrode structures and electrical connection wirings configured in the piezoelectric element 602 shown in FIG. 22(a).

[0230] As shown in Fig. 22(b), the piezoelectric element 602 has 24 electrodes provided at equal intervals on the circumference. Each electrode of the piezoelectric element 602 is electrically connected by connection wiring every four along the circumference. Here, the regions of the piezoelectric element 602 where electrode groups connected to each other are provided will be called piezoelectric bodies 611, 612, 613, and 614 for each connection.

[0231] Also, the piezoelectric bodies 611 are arranged every 60° on the circumference. When an AC voltage A is applied, six out-of-plane bending vibrations are formed along the circumference of the vibrating body 605. Further, when AC voltages B, AC voltage NA, and AC voltage NB, which are phase-shifted by 90° in order with respect to the AC voltage A, are applied to the piezoelectric bodies 612, 613, and 614, respectively, six out-of-plane progressive vibration waves are formed on the vibrating body 605. Then, these six progressive vibration waves generate a relative force between the protrusion 680 of the vibrating body 605 and the contact body (rotor) 606, and rotate the contact body (rotor) 606.

[0232] Also, the piezoelectric element 602 is provided with a plurality of electrodes for vibration detection, and the regions of the piezoelectric element 602 where these electrodes are provided are the piezoelectric bodies 615 and 616. The piezoelectric body 615 detects the vibration excited by the piezoelectric bodies 611 and 613 and outputs a vibration detection signal SA. The piezoelectric body 616 detects the vibration excited by the piezoelectric bodies 612 and 614 and outputs a vibration detection signal SB.

[0233] Fig. 22(c) is a diagram showing an example of the positional relationship between the piezoelectric bodies 611 to 614 and the protrusion 680. The protrusion 680 is provided at the center of the electrode partitions of the piezoelectric bodies 611 and 613 to which the AC voltage A and the AC voltage NA are connected. When the excitation by the piezoelectric bodies 611 and 613 is called A-phase excitation and the excitation by the piezoelectric bodies 612 and 614 is called B-phase excitation, the A-phase excitation excites a pushing-up vibration that vibrates in the direction of pushing up the protrusion 680 against the contact body (rotor) 606, and the B-phase excitation excites a feeding vibration that vibrates in the direction in which the protrusion 680 falls and relatively moves the contact body (rotor) 606 with respect to the elastic body 601.

[0234] FIG. 23 is a diagram showing a configuration example of the vibration type drive device 622 according to the fourth embodiment. In FIG. 23, the same components as those shown in FIG. 18 are denoted by the same reference numerals, and detailed descriptions thereof are omitted.

[0235] The vibration type drive device 622 includes a vibration type actuator 600 and a control device 621 for the vibration type actuator 600.

[0236] The control device 621 includes an AC signal generation unit 15, amplitude detection units 16 to 18, an adder 19, an NN 20, a thrust / speed controller 21, a push-up amplitude controller 30, a subtractor 38, transformers 44 and 45, and resistors 46 and 47.

[0237] The vibration type actuator 600 is an actuator driven by a four-phase AC voltage. The AC voltage A and the AC voltage NA, and the AC voltage B and the AC voltage NB are AC voltages of opposite phases with inverted phases, respectively. The piezoelectric bodies that form pairs with the piezoelectric bodies 611 and 613 and the piezoelectric bodies 612 and 614 to which the AC voltages of opposite phases are applied are connected to the center-tapped secondary side windings of the transformers 44 and 45.

[0238] An AC signal VA and an AC signal VB, which are outputs of the AC signal generation unit 15, are applied to one ends of the primary side windings of the transformers 44 and 45, and current detection resistors 46 and 47 are connected to the other ends.

[0239] The resistors 46 and 47 detect a current signal IA and a current signal IB. The amplitude detection unit 16 outputs the amplitude of the signal obtained by adding the current signal IA and the current signal IB output by the adder 19 to the input layer X2. The amplitude detection unit 17 outputs the amplitude of the signal obtained by subtracting the current signal IB from the current signal IA output by the subtractor 38 to the input layer X3. The amplitude detection unit 18 outputs the amplitude of the current signal IA to the input layer X4 and the push-up amplitude controller 30. The NN 20 outputs an estimated torque and an estimated speed from the output layers Y1 and Y2.

[0240] Then, the thrust and speed controller 21 outputs a VB voltage amplitude command signal for setting the voltage amplitude of the AC signal VB to the AC signal generation unit 15 according to the difference between the speed command from a command unit (not shown) and the estimated speed and the estimated thrust. Then, the AC signal generation unit 15 sets the voltage amplitude of the AC signal VB, and the speed and thrust are controlled according to the magnitude of the amplitude of the vibration in the feed direction excited in the vibrating body 605.

[0241] Also, in the fifth embodiment, in addition to controlling the speed and thrust, the amplitude of the upward vibration is also controlled. The amplitude of the current signal IA output by the amplitude detection unit 18 indicates the amplitude of the vibration in the upward direction. The upward amplitude controller 30 compares the upward vibration amplitude command from a command unit (not shown) with the amplitude of the current signal IA and generates a frequency command signal so that they match. Then, the AC signal generation unit 15 sets the frequencies of the AC signals VA and VB according to the frequency command signal, and the amplitude of the upward vibration is controlled.

[0242] When the amplitude of the upward vibration is controlled to be constant, the contact state between the contact body (rotor) 606 and the vibrating body 605 becomes stable, so the stability of the speed and thrust estimation can be enhanced.

[0243] As described above, the upward amplitude controller 30 controls the frequencies of the first AC signal VA and the second AC signal VB based on the value based on the amplitude of the first current signal IA of the amplitude detection unit 18.

[0244] As described above, according to the first to fifth embodiments, the NN20, 39, 50 have a plurality of input layers for inputting at least a first input value and a second input value, a plurality of intermediate layers connected to the input layers, and an output layer connected to the plurality of intermediate layers.

[0245] The output layer outputs an estimated value of at least one of the thrust generated between the vibrating body 5 and the contact body 6, the relative speed between the vibrating body 5 and the contact body 6, the resonance frequency of the vibrating body 5, and the temperature of the vibrating body 5.

[0246] The first input value is a value based on at least one of the phase difference between the first AC signal VA and the second AC signal VB, the frequencies of the first AC signal VA and the second AC signal VB, and the amplitude of the first AC signal VA or the second AC signal VB.

[0247] The second input value is a value based on at least one of the current based on the first AC signal VA or the second AC signal VB, the vibration generated in the vibrating body 5, the voltage based on the first AC signal VA or the second AC signal VB, the power based on the first AC signal VA or the second AC signal VB, and the phase difference between the voltage based on the first AC signal VA or the second AC signal VB and the current based on the first AC signal VA or the second AC signal VB.

[0248] Specifically, the second input value is at least one of the measured value of the vibration state in the vibrating body and the measured value corresponding to the admittance characteristic of the vibrating body. More specifically, the amplitude of the first current signal IA based on the first AC signal VA, the amplitude of the second current signal IB based on the second AC signal VB, the amplitude of the signal obtained by adding the first current signal IA and the second current signal IB, the amplitude of the first vibration detection signal SA based on the first electrode 3 of the piezoelectric element 2, the amplitude of the second vibration detection signal SB based on the second electrode 4 of the piezoelectric element 2, the amplitude of the signal obtained by adding the first vibration detection signal SA and the second vibration detection signal SB, the amplitude of the first voltage signal TA based on the first AC signal VA, the amplitude of the second voltage signal TB based on the second AC signal VB, the average value of the first power signal based on the first AC signal VA, the average value of the second power signal based on the second AC signal VB, the phase difference between the added signal of the first voltage signal TA and the second voltage signal TB and the added signal of the first current signal IA and the second current signal IB, and the amplitude of the signal obtained by subtracting the second current signal IB from the first current signal IA.

[0249] According to the first to fifth embodiments, it is possible to estimate the speed and thrust (torque) of a vibration type actuator 100 or the like without a sensor for detecting speed and thrust (torque), and it is possible to estimate in a wide frequency band.

[0250] (Other Embodiments) The present disclosure can also be implemented by supplying a program that realizes one or more functions of the above-described embodiments to a system or device via a network or a storage medium, and having one or more processors in a computer of the system or device read and execute the program. It can also be implemented by a circuit (for example, ASIC) that realizes one or more functions.

[0251] The vibration type drive devices 102, 412, 512, and 622 can be applied to optical devices. The optical device is, for example, a lens unit, and includes an optical element (lens) and the vibration type drive devices 102, 412, 512, and 622 that drive the optical element. The lens unit is detachable from the camera body.

[0252] Also, the vibration type drive devices 102, 412, 512, and 622 can be applied to imaging devices. The imaging device is, for example, a camera body, and includes an imaging element and the vibration type drive devices 102, 412, 512, and 622 that drive the imaging element.

[0253] Also, the vibration type drive devices 102, 412, 512, and 622 can be applied to electronic devices. The electronic device includes a member and the vibration type drive devices 102, 412, 512, and 622 that drive the member.

[0254] Note that the above-described embodiments are merely specific examples for implementing the present disclosure, and the technical scope of the present disclosure is not limitedly interpreted by these. That is, the present disclosure can be implemented in various forms without departing from its technical idea or its main features.

[0255] The disclosure of the present embodiment includes the following configurations. (Configuration 1) A control device for a vibration type actuator having a vibrating body including an elastic body and an electro-mechanical energy conversion element, and a contact body in contact with the elastic body, wherein the vibrating body and the contact body relatively move in a predetermined moving direction due to the vibration of the vibrating body. The electro-mechanical energy conversion element has a first electrode to which a first AC voltage based on a first AC signal is applied, and a second electrode to which a second AC voltage based on a second AC signal is applied. The control device has a neural network. The neural network has a plurality of input layers that input at least a first input value and a second input value, a plurality of intermediate layers connected to the input layer, and an output layer connected to the plurality of intermediate layers, wherein the output layer outputs an estimated value of at least one of a thrust generated between the vibrating body and the contacting body, a relative speed between the vibrating body and the contacting body, a resonance frequency of the vibrating body, and a temperature of the vibrating body. The first input value is a value based on at least one of a phase difference between the first AC signal and the second AC signal, a frequency of the first AC signal and the second AC signal, and an amplitude of the first AC signal or the second AC signal. The second input value is at least one of a measured value of a vibration state of the vibrating body and a measured value corresponding to an admittance characteristic of the vibrating body, and is characterized by a control device. (Configuration 2) At least one of the measured value of the vibration state of the vibrating body and the measured value corresponding to the admittance characteristic of the vibrating body is a value based on at least one of a current based on the first AC signal or the second AC signal, a vibration generated in the vibrating body, a voltage based on the first AC signal or the second AC signal, a power based on the first AC signal or the second AC signal, and a phase difference between the voltage based on the first AC signal or the second AC signal and the current based on the first AC signal or the second AC signal, and is characterized by the control device according to Configuration 1. (Configuration 3) The second input value is at least one of the amplitude of the first current signal based on the first AC signal, the amplitude of the second current signal based on the second AC signal, the amplitude of the signal obtained by adding the first current signal and the second current signal, the amplitude of the first vibration detection signal based on the first electrode of the electro-mechanical energy conversion element, the amplitude of the second vibration detection signal based on the second electrode of the electro-mechanical energy conversion element, the amplitude of the signal obtained by adding the first vibration detection signal and the second vibration detection signal, the amplitude of the first voltage signal based on the first AC signal, the amplitude of the second voltage signal based on the second AC signal, the average value of the first power signal based on the first AC signal, the average value of the second power signal based on the second AC signal, the phase difference between the added signal of the first voltage signal and the second voltage signal and the added signal of the first current signal and the second current signal, and the amplitude of the signal obtained by subtracting the second current signal from the first current signal, and is a value based on this, and is the control device according to Configuration 1 or 2. (Configuration 4) The input layer has a first input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal, a second input layer that inputs a value based on the amplitude of the first current signal, a third input layer that inputs a value based on the amplitude of the second current signal, and a fourth input layer that inputs a value based on the amplitude of the signal obtained by adding the first current signal and the second current signal, The output layer has a first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contacting body, and a second output layer that outputs an estimated value of the relative speed between the vibrating body and the contacting body, and is the control device according to Configuration 3. (Configuration 5) The input layer has a first input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal, a second input layer that inputs a value based on the amplitude of the first vibration detection signal, A third input layer that inputs a value based on the amplitude of the second vibration detection signal; and a fourth input layer that inputs a value based on the amplitude of a signal obtained by adding the first vibration detection signal and the second vibration detection signal. The output layer includes a first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contacting body, and a second output layer that outputs an estimated value of the relative speed between the vibrating body and the contacting body. The control device according to Configuration 3 is characterized by this. (Configuration 6) The input layer includes a first input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal, a second input layer that inputs a value based on the amplitude of the first voltage signal, a third input layer that inputs a value based on the amplitude of the second voltage signal, a fourth input layer that inputs a value based on the amplitude of the first current signal, a fifth input layer that inputs a value based on the amplitude of the second current signal, and a sixth input layer that inputs a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal. The output layer includes a first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contacting body, and a second output layer that outputs an estimated value of the relative speed between the vibrating body and the contacting body. The control device according to Configuration 3 is characterized by this. (Configuration 7) The input layer includes a first input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal, a second input layer that inputs a value based on the average value of the first power signal, a third input layer that inputs a value based on the average value of the second power signal, and a fourth input layer that inputs a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal. The output layer A first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contact body The control device according to Configuration 3, further comprising a second output layer that outputs an estimated value of the relative velocity between the vibrating body and the contact body (Configuration 8) The input layer A first input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal A second input layer that inputs a value based on the phase difference between the addition signal of the first voltage signal and the second voltage signal and the addition signal of the first current signal and the second current signal A third input layer that inputs a value based on the amplitude of the first current signal A fourth input layer that inputs a value based on the amplitude of the second current signal And a fifth input layer that inputs a value based on the amplitude of the signal obtained by adding the first current signal and the second current signal The output layer A first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contact body The control device according to Configuration 3, further comprising a second output layer that outputs an estimated value of the relative velocity between the vibrating body and the contact body (Configuration 9) The input layer A first input layer that inputs a value based on the frequencies of the first AC signal and the second AC signal A second input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal A third input layer that inputs a value based on the amplitude of the first current signal A fourth input layer that inputs a value based on the amplitude of the second current signal And a fifth input layer that inputs a value based on the amplitude of the signal obtained by adding the first current signal and the second current signal The output layer A first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contact body A second output layer that outputs an estimated value of the relative velocity between the vibrating body and the contact body; The control device according to Configuration 3, further comprising a third output layer that outputs an estimated value of the resonance frequency of the vibrating body. (Configuration 10) The input layer comprises a first input layer that inputs a value based on the frequencies of the first AC signal and the second AC signal; a second input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal; a third input layer that inputs a value based on the amplitude of the first current signal; a fourth input layer that inputs a value based on the amplitude of the second current signal; and a fifth input layer that inputs a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal. The output layer comprises a first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contact body; a second output layer that outputs an estimated value of the relative velocity between the vibrating body and the contact body; and a third output layer that outputs an estimated value of the temperature of the vibrating body. The control device according to Configuration 3 is characterized by this. (Configuration 11) The input layer comprises a first input layer that inputs a value based on the amplitude of the second AC signal; a second input layer that inputs a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal; a third input layer that inputs a value based on the amplitude of a signal obtained by subtracting the second current signal from the first current signal; and a fourth input layer that inputs a value based on the amplitude of the first current signal. The output layer comprises a first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contact body; and a second output layer that outputs an estimated value of the relative velocity between the vibrating body and the contact body. The control device according to Configuration 3 is characterized by this. (Configuration 12) The input layer includes a first input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal, a second input layer that inputs a value based on the amplitude of the second current signal, a third input layer that inputs a value based on the amplitude of the first current signal, and a fourth input layer that inputs a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal. The output layer outputs an estimated value of the relative speed between the vibrating body and the contacting body. The control device according to Configuration 3. (Configuration 13) The control device further includes first control means for controlling the phase difference between the first AC signal and the second AC signal based on the estimated value of the thrust and the estimated value of the relative speed. The control device according to any one of Configurations 4 to 10. (Configuration 14) The control device further includes first control means for controlling the phase difference between the first AC signal and the second AC signal based on the estimated value of the thrust, the estimated value of the relative speed, and the estimated value of the temperature. The control device according to Configuration 10. (Configuration 15) The control device further includes second control means for controlling the frequencies of the first AC signal and the second AC signal based on a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal. The control device according to Configuration 9 or 10. (Configuration 16) The control device further includes second control means for controlling the frequencies of the first AC signal and the second AC signal based on a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal and the estimated value of the resonance frequency. The control device according to Configuration 9. (Configuration 17) The control device further includes first control means for controlling the amplitude of the second AC signal based on the estimated value of the thrust and the estimated value of the relative speed. The control device according to Configuration 11. (Configuration 18) The control device further includes second control means for controlling the frequencies of the first AC signal and the second AC signal based on a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal, according to the control device described in Configuration 11 or 17. (Configuration 19) The control device further includes first control means for controlling the phase difference between the first AC signal and the second AC signal based on the estimated value of the relative speed, according to the control device described in Configuration 12. (Configuration 20) The input layer outputs a plurality of input values in time series to a plurality of intermediate layers, according to the control device described in any one of Configurations 1 to 19. (Configuration 21) The intermediate layer is a recursive connection that returns the output to the input, according to the control device described in any one of Configurations 1 to 20. (Configuration 22) A vibration type actuator, The control device described in any one of Configurations 1 to 21, and A vibration type driving device characterized by having the same. (Configuration 23) An optical element, The vibration type driving device described in Configuration 22 for driving the optical element, and An optical device characterized by having the same. (Configuration 24) An imaging element, The vibration type driving device described in Configuration 22 for driving the imaging element, and An imaging device characterized by having the same. (Configuration 25) A member, The vibration type driving device described in Configuration 22 for driving the member, and An electronic device characterized by having the same.

Explanation of Signs

[0256] 100, 200, 300, 400, 500, 600 vibration type actuators; 5, 205, 305, 405, 501, 502, 503, 605 vibrating bodies; 6, 206, 306, 406, 510, 606 contact bodies; 80, 280, 380, 480, 580, 680 protrusions; 15 AC signal generation unit; 16, 17, 18, 22, 23 amplitude detection units; 19, 28 adders; 20, 39, 50 neural networks (NN); 21 thrust and speed controller; 24, 25 multipliers; 26, 27 average value detection units; 29 phase difference detection unit; 30 push-up amplitude controller; 31 input layer; 32 intermediate layer; 33 output layer; 34 time series input layer; 35 A / D converter; 36 FPGA; 37 CPU; 38 subtracter; 40 speed controller; 3, 4, 48, 49, 203, 204, 303, 304, 403, 404, 504 - 509, 611 - 614 piezoelectric bodies; 9, 10, 46, 47 resistors; 7, 8, 44, 45, 61 - 65 transformers

Claims

1. A control device for a vibration type actuator having a vibrating body provided with an elastic body and an electro-mechanical energy conversion element, and a contact body in contact with the elastic body, wherein the vibrating body and the contact body move relatively in a predetermined moving direction due to the vibration of the vibrating body, The electro-mechanical energy conversion element has a first electrode to which a first AC voltage based on a first AC signal is applied, and a second electrode to which a second AC voltage based on a second AC signal is applied, The control device has a neural network, The neural network, Has a plurality of input layers for inputting at least a first input value and a second input value, A plurality of intermediate layers connected to the input layer, And an output layer connected to the plurality of intermediate layers, The output layer outputs an estimated value of at least one of a thrust generated between the vibrating body and the contact body, a relative speed between the vibrating body and the contact body, a resonance frequency of the vibrating body, and a temperature of the vibrating body, The first input value is a value based on at least one of a phase difference between the first AC signal and the second AC signal, a frequency of the first AC signal and the second AC signal, and an amplitude of the first AC signal or the second AC signal, The second input value is at least one of a measured value of the vibration state in the vibrating body and a measured value corresponding to the admittance characteristic of the vibrating body. The control device according to claim 1, characterized in that.

2. At least one of the measured value of the vibration state in the vibrating body and the measured value corresponding to the admittance characteristic of the vibrating body is, A current based on the first AC signal or the second AC signal, a vibration generated in the vibrating body, a voltage based on the first AC signal or the second AC signal, a power based on the first AC signal or the second AC signal, and the first AC signal or the second AC signal The control device according to claim 1, characterized in that it is a value based on at least one of a phase difference between a voltage based on the AC signal and a current based on the first AC signal or the second AC signal.

3. The second input value is at least one of the amplitude of a first current signal based on the first AC signal, the amplitude of a second current signal based on the second AC signal, the amplitude of a signal obtained by adding the first current signal and the second current signal, the amplitude of a first vibration detection signal based on the first electrode of the electro-mechanical energy conversion element, the amplitude of a second vibration detection signal based on the second electrode of the electro-mechanical energy conversion element, the amplitude of a signal obtained by adding the first vibration detection signal and the second vibration detection signal, the amplitude of a first voltage signal based on the first AC signal, the amplitude of a second voltage signal based on the second AC signal, the average value of a first power signal based on the first AC signal, the average value of a second power signal based on the second AC signal, the phase difference between an added signal of the first voltage signal and the second voltage signal and an added signal of the first current signal and the second current signal, and the amplitude of a signal obtained by subtracting the second current signal from the first current signal. The control device according to claim 1 is characterized by this.

4. The input layer A first input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal, A second input layer that inputs a value based on the amplitude of the first current signal, A third input layer that inputs a value based on the amplitude of the second current signal, And has a fourth input layer that inputs a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal, The output layer A first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contacting body, The control device according to claim 3, characterized by having a second output layer that outputs an estimated value of the relative speed between the vibrating body and the contacting body.

5. The input layer A first input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal, A second input layer that inputs a value based on the amplitude of the first vibration detection signal, A third input layer that inputs a value based on the amplitude of the second vibration detection signal, And has a fourth input layer that inputs a value based on the amplitude of a signal obtained by adding the first vibration detection signal and the second vibration detection signal, The output layer A first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contacting body, The control device according to claim 3, characterized by having a second output layer that outputs an estimated value of the relative speed between the vibrating body and the contacting body.

6. The input layer A first input layer for inputting a value based on the phase difference between the first AC signal and the second AC signal; A second input layer for inputting a value based on the amplitude of the first voltage signal; A third input layer for inputting a value based on the amplitude of the second voltage signal; A fourth input layer for inputting a value based on the amplitude of the first current signal; A fifth input layer for inputting a value based on the amplitude of the second current signal; And a sixth input layer for inputting a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal; The output layer: A first output layer for outputting an estimated value of the thrust generated between the vibrating body and the contacting body; The control device according to claim 3, further comprising a second output layer for outputting an estimated value of the relative speed between the vibrating body and the contacting body. **Claim 7** The input layer: A first input layer for inputting a value based on the phase difference between the first AC signal and the second AC signal; A second input layer for inputting a value based on the average value of the first power signal; A third input layer for inputting a value based on the average value of the second power signal; And a fourth input layer for inputting a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal; The output layer: A first output layer for outputting an estimated value of the thrust generated between the vibrating body and the contacting body; The control device according to claim 3, further comprising a second output layer for outputting an estimated value of the relative speed between the vibrating body and the contacting body. **Claim 8** The input layer: A first input layer for inputting a value based on the phase difference between the first AC signal and the second AC signal; A second input layer for inputting a value based on the phase difference between the added signal of the first voltage signal and the second voltage signal and the added signal of the first current signal and the second current signal; A third input layer for inputting a value based on the amplitude of the first current signal; A fourth input layer for inputting a value based on the amplitude of the second current signal; And a fifth input layer for inputting a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal; The output layer: A first output layer for outputting an estimated value of the thrust generated between the vibrating body and the contacting body; The control device according to claim 3, further comprising a second output layer for outputting an estimated value of the relative speed between the vibrating body and the contacting body. **Claim 9** The input layer: A first input layer for inputting a value based on the frequencies of the first AC signal and the second AC signal; A second input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal; A third input layer that inputs a value based on the amplitude of the first current signal; A fourth input layer that inputs a value based on the amplitude of the second current signal; It has a fifth input layer that inputs a value based on the amplitude of the signal obtained by adding the first current signal and the second current signal, The output layer, A first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contacting body; A second output layer that outputs an estimated value of the relative speed between the vibrating body and the contacting body; The control device according to claim 3, further comprising a third output layer that outputs an estimated value of the resonance frequency of the vibrating body.

10. The input layer, A first input layer that inputs a value based on the frequencies of the first AC signal and the second AC signal; A second input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal; A third input layer that inputs a value based on the amplitude of the first current signal; A fourth input layer that inputs a value based on the amplitude of the second current signal; It has a fifth input layer that inputs a value based on the amplitude of the signal obtained by adding the first current signal and the second current signal, The output layer, A first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contacting body; A second output layer that outputs an estimated value of the relative speed between the vibrating body and the contacting body; The control device according to claim 3, further comprising a third output layer that outputs an estimated value of the temperature of the vibrating body.

11. The input layer, A first input layer that inputs a value based on the amplitude of the second AC signal; A second input layer that inputs a value based on the amplitude of the signal obtained by adding the first current signal and the second current signal; A third input layer that inputs a value based on the amplitude of the signal obtained by subtracting the second current signal from the first current signal; It has a fourth input layer that inputs a value based on the amplitude of the first current signal, The output layer, A first output layer that outputs an estimated value of the thrust generated between the vibrating body and the contacting body; The control device according to claim 3, further comprising a second output layer that outputs an estimated value of the relative speed between the vibrating body and the contacting body.

12. The input layer, A first input layer that inputs a value based on the phase difference between the first AC signal and the second AC signal; A second input layer that inputs a value based on the amplitude of the second current signal; A third input layer for inputting a value based on the amplitude of the first current signal; A fourth input layer for inputting a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal; The output layer outputs an estimated value of the relative speed between the vibrating body and the contacting body. The control device according to claim 3.

13. The control device further includes first control means for controlling the phase difference between the first AC signal and the second AC signal based on the estimated value of the thrust and the estimated value of the relative speed. The control device according to claim 4.

14. The control device further includes first control means for controlling the phase difference between the first AC signal and the second AC signal based on the estimated value of the thrust, the estimated value of the relative speed, and the estimated value of the temperature. The control device according to claim 10.

15. The control device further includes second control means for controlling the frequencies of the first AC signal and the second AC signal based on a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal. The control device according to claim 9.

16. The control device further includes second control means for controlling the frequencies of the first AC signal and the second AC signal based on a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal and the estimated value of the resonance frequency. The control device according to claim 9.

17. The control device further includes first control means for controlling the amplitude of the second AC signal based on the estimated value of the thrust and the estimated value of the relative speed. The control device according to claim 11.

18. The control device further includes second control means for controlling the frequencies of the first AC signal and the second AC signal based on a value based on the amplitude of a signal obtained by adding the first current signal and the second current signal. The control device according to claim 11.

19. The control device further includes first control means for controlling the phase difference between the first AC signal and the second AC signal based on the estimated value of the relative speed. The control device according to claim 12.

20. The input layer outputs a plurality of input values in time series to a plurality of intermediate layers. The control device according to claim 1.

21. The control device according to claim 1, wherein the intermediate layer is a recursive connection that returns the output to the input.

22. A vibration type actuator, and the control device according to any one of claims 1 to 21 characterized by a vibration type drive device having the same.

23. An optical element, and the vibration type drive device according to claim 22 for driving the optical element characterized by an optical device having the same.

24. An imaging element, and the vibration type drive device according to claim 22 for driving the imaging element characterized by an imaging device having the same.

25. A member, and the vibration type drive device according to claim 22 for driving the member characterized by an electronic device having the same.

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