Cooling sample holder for electron microscope and charged particle beam device using the same

Abstract

To provide a cooling sample holder for electron microscope.SOLUTION: A cooling sample holder for electron microscope comprises: a sample mount region 12 provided on a substrate 10; a thermoelectric element 20 provided on the substrate 10, and cooling the sample mount region 12; an electric power supply electrode 30 provided on the substrate 10; means for connecting the thermoelectric element 20 and the electric power supply electrode 30; and a holder enclosure 50 holding the substrate 10 in a sample chamber of an electron microscope.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a cooled specimen holder for an electron microscope and a charged particle beam device using the same. [Background technology]

[0002] When observing a sample under an electron microscope while heating it, a mechanism for heating the sample must be built into the tip of the sample holder. For example, as disclosed in Non-Patent Document 1, a heater made of an electric heating wire was previously placed at the tip of the holder, but recently it has become common to build heaters using MEMS (microelectromechanical systems: micromachine technology). MEMS chips are disposable. With a MEMS chip, the heating range is very narrow, so the response is good, and the temperature can be changed at, for example, 100 to 1000°C / s. There is almost no movement of the sample as it is heated. With electron microscope observation, the magnification is high, so even slight thermal expansion of the sample can become a problem, making it suitable for electron microscope observation.

[0003] Meanwhile, cooling holders used when observing a sample under an electron microscope while cooling the sample are disclosed, for example, in Non-Patent Document 1. Conventional cooling holders are configured to include a tank for holding liquid nitrogen outside the electron microscope observation area, from which a rod with good thermal conductivity, such as copper, is extended to the sample position, allowing for cooling by thermal conduction. Because the sample is cooled by thermal conduction, it takes, for example, 20 minutes to an hour to cool the sample, which is an extremely time-consuming process for electron microscope observation.

[0004] For example, as disclosed in Patent Document 1, a sample holder that uses a Peltier element instead of liquid nitrogen has been developed, but the cooling method remains the same: it is cooled by thermal conduction. Because Peltier elements do not have the vibrations that accompany boiling liquid nitrogen, they are expected to be useful for electron microscope observations. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2023-26841 [Non-patent literature]

[0006] [Non-Patent Document 1] Kitano Seiki Co., Ltd. website Peltier heating and cooling TEM sample holder, sample cooling TEM holder https: / / www.kitano-seiki.co.jp / product / tem / TEM.html Summary of the Invention [Problem to be solved by the invention]

[0007] As mentioned above, the cooling holder has a tank for holding liquid nitrogen outside the electron microscope observation area, and extends a rod with good thermal conductivity, such as copper, from the tank to the sample position, and cools the sample by thermal conduction.However, since cooling is done by thermal conduction, there was an issue that it took a very long time to cool the sample for electron microscope observation. SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to provide a cooled specimen holder for an electron microscope with a fast response speed, and a charged particle beam device using the same. [Means for solving the problem]

[0008] The inventors of the present invention conceived the idea that a cooled specimen holder for an electron microscope with a fast response time could be provided if a thermoelectric element was created where the specimen is placed, while keeping the size of the MEMS chip used in the heating holder the same, and if the structure allowed for cooling of the specimen by external current. That is, a thermoelectric element, such as a Peltier element, is a semiconductor element that creates a temperature difference by passing an electric current through it, and because it is a semiconductor element, it can be easily miniaturized using MEMS technology. Therefore, the inventors conceived the idea that the microfabrication technology used in heating mechanisms could also be applied to cooling holders, leading to the invention.

[0009] [1] As shown in Figures 3 and 1, the cooled specimen holder for an electron microscope of the present invention comprises a specimen mounting area 14 provided on a substrate 10, a thermoelectric element 20 provided on the substrate 10 for cooling the specimen mounting area 14, a power supply electrode 30 provided on the substrate 10, means for connecting the thermoelectric element 20 and the power supply electrode 30, and a holder housing 50 for holding the substrate 10 in the specimen chamber of the electron microscope.

[0010] [2] In the electron microscope cooled specimen holder [1] of the present invention, the thermoelectric element 20 preferably comprises a P-type semiconductor electrode 21 and an N-type semiconductor electrode 25 provided on the substrate 10, a P-type semiconductor 22 having one end connected to the P-type semiconductor electrode 21, an N-type semiconductor 24 having one end connected to the N-type semiconductor electrode 25, and a cooling electrode 23 connecting the other end of the P-type semiconductor 22 and the other end of the N-type semiconductor 24, as shown in Figures 8 and 9, for example, and the cooling electrode 23 is thermally connected to the specimen mounting area 14. The means for connecting the thermoelectric element 20 and the power supply electrode 30 is preferably provided on the substrate 10 so as to connect the P-type semiconductor electrode 21 and the N-type semiconductor electrode 25 of the thermoelectric element 20 to the power supply electrode 30. [3] In the electron microscope cooling specimen holder [2] of the present invention, it is preferable that, for example as shown in FIG. 8, the P-type semiconductor 22 is stacked on the electrode for the P-type semiconductor 21, the N-type semiconductor 24 is stacked on the electrode for the N-type semiconductor 25, and the cooling electrode 23 is stacked on the other end of the P-type semiconductor 22 and the other end of the N-type semiconductor 24. [4] In the cooled specimen holder for electron microscopes [2] of the present invention, it is preferable that the specimen mounting area 12 is provided in the center of the substrate 10, and the thermoelectric element 20 is arranged between the specimen mounting area 12 and the peripheral area of the substrate 10, as shown in Figure 9, and that multiple thermoelectric elements 20 are arranged between the specimen mounting area 12 and the peripheral area. [5] In the cooled specimen holder for an electron microscope [4] of the present invention, preferably, the P-type semiconductor 22 is arranged on the substrate 10, the N-type semiconductor 24 is arranged on the substrate 10, and the cooling electrode 23 is thermally insulated from the substrate 10 and connected to the other end of the P-type semiconductor 22 and the other end of the N-type semiconductor 24. [6] In the cooled sample holder for electron microscopes [5] of the present invention, preferably, the sample mounting area is a rectangular area of 20 μm × 20 μm to 1 mm × 1 mm, or a circular area of 20 μm to 1 mm in diameter, and the cooling electrodes are divided and arranged on the substrate according to the plurality of thermoelectric elements so as to surround the sample mounting area, and the substrate is preferably a rectangular area of 1 mm × 1 mm to 10 mm × 10 mm, or a circular area of 1 mm to 10 mm in diameter.

[0011] [7] The charged particle beam device of the present invention includes any one of the sample holders [1] to [6], as shown in FIG. 6, for example. [8] In the charged particle beam device [7] of the present invention, it is preferable that the device includes a power supply that supplies power to the Peltier element, and the sample holder includes a connector, and the power is supplied to the Peltier element from the power supply via the connector, as shown in Figure 6, for example.

[0012] According to the electron microscope cooled specimen holder of the present invention, by miniaturizing the specimen loading area and the cooling electrode, it is possible to provide a cooled specimen holder for an electron microscope with a fast response speed by cooling only the immediate vicinity of the specimen loading area. The cooling response (ability to quickly cool or increase the temperature) is also improved by, for example, 100 to 1000 times compared to conventional devices, and because the miniaturization eliminates the problem of waste heat, it is expected that experiments that were previously impossible will become possible. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a diagram showing the overall configuration of a sample holder according to an embodiment of the present invention; [Figure 2A] A close-up of the tip of the sample holder shows the case of a two-axis tilt sample holder. [Figure 2B] 2B is an enlarged view of a holder tip portion 40 located at the tip of the sample holder shown in FIG. 2A. [Figure 3]1 is a diagram showing the configuration of a MEMS chip for in-situ observation using an electron microscope, which is equipped with a sample cooling mechanism using a thermoelectric element, according to an embodiment of the present invention. [Figure 4] FIG. 1 is a diagram illustrating a sample cooling mechanism using a thermoelectric element. [Figure 5] This is an explanatory diagram of the steady state in which the heat transfer by the Peltier element in the sample cooling mechanism and (Joule heating amount + heat flow inflow) are balanced. [Figure 6] 1 is a schematic diagram showing the overall configuration of a transmission electron microscope including a sample holder. [Figure 7] FIG. 2 is an enlarged view of a main part for explaining the mounting position of a sample holder in an electron microscope. [Figure 8] 1 is a diagram showing the configuration of a MEMS chip for in-situ observation using an electron microscope, which is equipped with a sample cooling mechanism using a thermoelectric element, according to an embodiment of the present invention. [Figure 9] FIG. 10 is an enlarged view of a MEMS chip for in-situ observation using an electron microscope, which is provided with a sample cooling mechanism using a thermoelectric element, according to a second embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0014] The present invention will be described below with reference to the drawings. Figure 1 is a diagram showing the overall configuration of a sample holder according to one embodiment of the present invention. Sample holder 100 is a sample holder for a transmission electron microscope. Sample holder 100 is used in a side entry stage, in which a sample is inserted from the side of the pole piece of the objective lens of the transmission electron microscope.

[0015] The sample holder 100 includes a holder tip portion 40, an outer cylinder 50, and a base portion 60. The holder tip portion 40 holds the sample S. The holder tip portion 40 is provided at the tip of the sample holder 100. The holder tip portion 40 is supported by the outer cylinder 50 and is fixed to the tip of the outer cylinder 50. The outer cylinder 50 is, for example, cylindrical. The outer cylinder 50 is fixed to a cylindrical base 60. A connector (not shown) is provided on the base 60. The base 60 also has wiring (not shown) that electrically connects the Peltier element provided on the holder tip 40 to the connector.

[0016] Fig. 2A is an enlarged schematic diagram of the tip of the sample holder, showing the case of a two-axis tilt sample holder, and Fig. 2B is an enlarged view of holder tip portion 40 located at the tip of the sample holder shown in Fig. 2A. The two-axis tilt sample holder allows for adjustment of the observation direction. The sample insertion space is very narrow, about 5 mm thick. In the illustrated example, the holder tip portion 40 is a plate-shaped sample stage, and the sample S is fixed to the sample stage. The sample S is fixed to the holder tip portion 40 by, for example, a leaf spring or a screw.

[0017] The holder tip portion 40 has a frame member 41, a first support member 42, a second support member 43, a first link member 44, a sample stage 45, and a thermoelectric element 46. The frame member 41 is a frame-shaped member provided at the tip of the holder tip portion 40. The first support member 42 is a plate-shaped support member provided parallel to the plane formed by the frame member 41. The second support member 43 is a plate-shaped support member attached to the first support member 42. The sample stage 45 is a circular or rectangular area provided parallel to the plane formed by the first support member 42, where the sample S is fixed, and corresponds to the sample placement area 14 shown in FIG. 3.

[0018] The thermoelectric element 46 is an element that utilizes the Peltier effect, and may be a combination of a P-type semiconductor and an N-type semiconductor, as shown in Figures 8 and 9. The thermoelectric element 46 has a heat absorption part on the sample support stage 43 side, and a heat dissipation surface on the first support member 42 side. When a current is passed through the thermoelectric element 45 in a predetermined direction, heat is absorbed in the heat absorption part and dissipated on the heat dissipation surface.

[0019] 3 is a diagram showing the configuration of a MEMS chip for in-situ observation with an electron microscope equipped with a sample cooling mechanism using a thermoelectric element, illustrating one embodiment of the present invention. In the figure, the MEMS chip is composed of a substrate 10, a thermoelectric element 20, and a power supply electrode 30. The substrate 10 has a sample placement area 14. The surface of the sample placement area 14 on which the sample is placed is supported by the surfaces on which a P-type semiconductor 22 and an N-type semiconductor 24 are formed, and is floating and separated from the surrounding area. A cooling electrode (heat absorption part) 23 is provided directly below the sample placement area 14. The thermoelectric element 20 has a P-type semiconductor electrode 21 , a P-type semiconductor 22 , a cooling electrode 23 , an N-type semiconductor 24 and an N-type semiconductor electrode 25 . The power supply electrode 30 is a terminal for connecting to an external power source, and is connected to the P-type semiconductor electrode 21 and the N-type semiconductor electrode 25. When the power supply electrode 30 is close to the P-type semiconductor electrode 21 and the N-type semiconductor electrode 25, the pattern of the power supply electrode 30 is used to directly connect to the P-type semiconductor electrode 21 and the N-type semiconductor electrode 25. On the other hand, when the distance between them is large, a wiring pattern is provided to connect them.

[0020] 4 is a diagram illustrating a sample cooling mechanism using a thermoelectric element. In the figure, the thermoelectric element includes a P-type semiconductor electrode 21 and an N-type semiconductor electrode 25 provided on a substrate (not shown), a P-type semiconductor 22 having one end connected to the P-type semiconductor electrode 21, an N-type semiconductor 24 having one end connected to the N-type semiconductor electrode 25, and a cooling electrode 23 connecting the other end of the P-type semiconductor 22 and the other end of the N-type semiconductor 24. The cooling electrode 23 is thermally connected to the sample placement area 14. Thermoelectric elements, such as Peltier elements, are semiconductor elements that create a temperature difference by passing an electric current through them. Because they are semiconductor elements, they can be easily miniaturized using MEMS technology. By miniaturizing them, it is possible to cool only the area immediately adjacent to the sample, and the cooling response (the ability to quickly cool or raise the temperature) is 100 to 1000 times better. Furthermore, miniaturization eliminates the problem of waste heat, making it possible to conduct experiments that were previously impossible.

[0021] Figure 5 is an explanatory diagram of the steady state in which the heat transfer by the Peltier element in the sample cooling mechanism and (Joule heating amount + heat flow inflow) are balanced, with the horizontal axis representing the current and the vertical axis representing the reached temperature. The Seebeck coefficient α, electrical conductivity ρ, and thermal conductivity λ were used by fitting the values for a standard Bi2Te3-based Peltier element as a quadratic function of temperature (Manikandan, S. and Kaushik, SC. "Thermodynamic studies and maximum power point tracking in thermoelectric generator-thermoelectric cooler combined system". Cryogenics. Vol. 67, p52-62 (2015)).

[0022] Heat transfer due to the Peltier effect is given by the following equation:

number

number

number

[0023] Next, a transmission electron microscope including the sample holder 100 will be described with reference to the drawings. Figure 6 is a schematic diagram showing the overall configuration of a transmission electron microscope including the sample holder. The transmission electron microscope 200 can obtain a transmission electron microscope image (TEM image) of the sample S by irradiating the sample S held in the sample holder 100 with an electron beam (an example of a charged particle beam) EB and imaging the electrons that have transmitted through the sample S. The transmission electron microscope 200 can also obtain a scanning electron microscope image (STEM image) by scanning the sample S with a finely focused electron beam EB.

[0024] The transmission electron microscope 200 includes a sample holder 100. The transmission electron microscope 200 further includes an electron gun 210, an illumination lens 211, a deflector 212, a sample stage 214, an objective lens 216, an intermediate lens 217, a projection lens 218, a detector 220, and a Peltier element power supply 230.

[0025] The electron gun 210 emits an electron beam EB. The electron gun 210, for example, accelerates electrons emitted from a cathode at an anode to emit the electron beam EB. The projection lens 211 focuses the electron beam EB emitted from the electron gun 210 and irradiates the sample S with the beam. The deflector 212 deflects the electron beam EB that is irradiated onto the sample S. A STEM image can be obtained by deflecting the irradiated electron beam EB. The sample stage 214 holds the sample S via the sample holder 100. The sample stage 214 has a movement mechanism that moves the sample S in the horizontal direction. By moving the sample S in the horizontal direction using the movement mechanism of the sample stage 214, the field of view can be moved.

[0026] The objective lens 216 is a first-stage lens that forms a TEM image using the electron beam EB that has passed through the sample S. The objective lens 216, intermediate lens 217, and projection lens 218 constitute an imaging lens system that forms a TEM image on a detector 220 using the electron beam EB that has passed through the sample S. The detector 220 captures the TEM image formed by the imaging lens system and is, for example, a digital camera such as a CCD (Charge Coupled Device) camera. The Peltier element power supply 230 supplies power to the Peltier element 48 of the sample holder 100. In the transmission electron microscope 200, the Peltier element power supply 230 that supplies power to the Peltier element 48 is not mounted on the sample holder 100, but is provided outside the sample holder 100. This allows the sample holder 100 to be made lighter.

[0027] Although the above description has been given of the sample holder 100 being applied to a transmission electron microscope, the sample holder 100 can also be applied to other charged particle beam devices, such as scanning electron microscopes, focused ion beam devices, and electron beam microanalyzers.

[0028] FIG. 7 is an enlarged view of a main part for explaining the mounting position of the sample holder in the electron microscope. A sample is placed on the tip of the sample holder 100 and inserted into the side of the sample chamber of the electron microscope. A pole piece 215 is placed in the center of the sample chamber of the electron microscope, and the sample to be observed is placed on the top of the pole piece 215. An objective lens 216 is located on the lower periphery of the pole piece 215. An objective aperture 222 is placed between the tip of the sample holder 100 and the top of the pole piece 215, and has a knob for adjusting the aperture (not shown). The knob for adjusting the aperture is located outside the sample chamber.

[0029] FIG. 8 is a schematic diagram of a MEMS chip for in-situ observation with an electron microscope, which is equipped with a sample cooling mechanism using a thermoelectric element, showing one embodiment of the present invention. The thermoelectric element 20 comprises an electrode 21 for a P-type semiconductor and an electrode 25 for an N-type semiconductor provided on a substrate (not shown), a P-type semiconductor 22 having one end connected to the electrode 21 for the P-type semiconductor, an N-type semiconductor 24 having one end connected to the electrode 25 for the N-type semiconductor, and a cooling electrode 23 connecting the other end of the P-type semiconductor 22 to the other end of the N-type semiconductor 24, and the cooling electrode 23 is thermally connected to the sample mounting region 14. That is, the thermoelectric element 20 has a three-layer structure consisting of a layer of the electrode 21 for a P-type semiconductor and the electrode 25 for an N-type semiconductor, a layer of the P-type semiconductor 22 and the N-type semiconductor 24, and a layer of the cooling electrode 23. Preferably, a wiring pattern is provided on the substrate so as to connect the P-type semiconductor electrode 21 and the N-type semiconductor electrode 25 of the thermoelectric element 20 to the power supply electrode 30. The cooling electrode 23 can be provided at any position on the substrate, and may be provided, for example, in the center of the substrate.

[0030] FIG. 9 is a diagram illustrating the configuration of a MEMS chip for in-situ electron microscope observation equipped with a sample cooling mechanism using thermoelectric elements, showing a second embodiment of the present invention. The cooling chip fabricated using MEMS has a sample placement area 14 provided in the center of a circular substrate 10, and four sets of thermoelectric elements 20a-20d provided on the four sides of the periphery of the sample placement area 14. The sample placement area 14 has a diameter of, for example, 100 μm to 300 μm. The rectangular substrate 10 has a side length of, for example, 1 mm to 3 mm. Therefore, the four sets of thermoelectric elements 20a-20d can be arranged in a planar manner in an annular area of the rectangular substrate 10 excluding the sample placement area 14, for example, in an area with a length of 0.3 mm to 1.0 mm. Thermoelectric element 20a is provided on the right side of rectangular substrate 10, thermoelectric element 20b is provided on the bottom side of rectangular substrate 10, thermoelectric element 20c is provided on the left side of rectangular substrate 10, and thermoelectric element 20d is provided on the top side of rectangular substrate 10.

[0031] In the thermoelectric elements 20a and 20c, the P-type semiconductors 22a and 22c are arranged in the horizontal direction on the substrate 10, the N-type semiconductors 24a and 24c are arranged in the horizontal direction on the substrate 10, and the cooling electrodes 23a and 23c are arranged in the vertical direction on the substrate 10 and are connected to one end of the P-type semiconductors 22a and 22c and one end of the N-type semiconductors 24a and 24c. The P-type semiconductor electrodes 21a and 21c and the N-type semiconductor electrodes 25a and 25c are arranged in the vertical direction on the substrate 10 and are connected to the other end of the P-type semiconductors 22a and 22c and the other end of the N-type semiconductors 24a and 24c.

[0032] In the thermoelectric elements 20b and 20d, it is preferable that the P-type semiconductors 22b and 22d are arranged in the vertical direction on the substrate 10, the N-type semiconductors 24b and 24d are arranged in the vertical direction on the substrate 10, and the cooling electrodes 23b and 23d are arranged in the horizontal direction on the substrate 10 and are connected to the other ends of the P-type semiconductors 22b and 22d and the other ends of the N-type semiconductors 24b and 24d. The P-type semiconductor electrodes 21b and 21c and the N-type semiconductor electrodes 25b and 25d are arranged in the horizontal direction on the substrate 10 and are connected to the other ends of the P-type semiconductors 22b and 22d and the other ends of the N-type semiconductors 24b and 24d.

[0033] 9, four thermoelectric elements are provided on the periphery of the sample-mounting region 14 on the substrate 10, but the present invention is not limited to four and may have five or more, or may have two or three. In this case, in each thermoelectric element 20, the P-type semiconductor 22 and the N-type semiconductor 24 are preferably disposed so as to face in a radial direction from the center of the substrate 10, while the P-type semiconductor electrode 21 and the N-type semiconductor electrode 25 are preferably disposed circumferentially along the outer edge of the substrate 10. The cooling electrode 23 is preferably disposed circumferentially along the side of the center of the substrate 10 facing the sample-mounting region 14. Furthermore, for electron microscopes, a cooling area of about 1mm x 1mm is sufficient, and even 20μm x 20μm is practical. This allows for quick cooling to the equilibrium temperature with less power, enabling a quick temperature response. Furthermore, a small thermoelectric element generates less heat and has a relatively larger volume for dissipating heat, allowing for long cooling times. [Industrial Applicability]

[0034] The cooled specimen holder for electron microscopes of the present invention has cooling response (ability to quickly cool or raise temperature) that is, for example, 100 to 1000 times better than conventional devices, and because it is miniaturized, waste heat is no longer an issue, so it is expected that experiments that were previously impossible will become possible. [Explanation of symbols]

[0035] 10 Substrate 14 Sample placement area (sample holder) 20 Thermoelectric element 21 P-type semiconductor electrode (heat dissipation surface) 22 P-type semiconductor 23, 23a, 23b Cooling electrode (heat absorption part) 24 N-type semiconductor 25 N-type semiconductor electrode (heat dissipation surface) 30 Power supply electrode 40 Holder tip 41, 42, 43, 46 Support members 44, 45 Link members 47 Sample stage 48 Peltier element 50 Holder housing (outer cylinder) 60 base 100 Sample holder 200 Transmission Electron Microscope 210 Electron Gun 211 Irradiation lens 212 Deflector 214 Sample Stage 216 Objective Lens 217 Intermediate Lens 218 Projection Lens 220 detector 230 Peltier element power supply

Claims

1. a sample placement area provided on the substrate; a thermoelectric element provided on the substrate, the thermoelectric element cooling the sample placement area; a power supply electrode provided on the substrate; a means for connecting the thermoelectric element and the power supply electrode; a holder housing that holds the substrate in a sample chamber of an electron microscope; A cooled sample holder for an electron microscope comprising:

2. The thermoelectric element is a P-type semiconductor electrode and an N-type semiconductor electrode provided on the substrate; a P-type semiconductor having one end connected to the P-type semiconductor electrode; an N-type semiconductor having one end connected to the N-type semiconductor electrode; a cooling electrode connecting the other end of the P-type semiconductor and the other end of the N-type semiconductor, the cooling electrode being thermally connected to the sample placement area; the means for connecting the thermoelectric element and the power supply electrode is provided on the substrate so as to connect the P-type semiconductor electrode and the N-type semiconductor electrode of the thermoelectric element to the power supply electrode; 2. The cooled specimen holder for an electron microscope according to claim 1.

3. The P-type semiconductor is laminated on the P-type semiconductor electrode, The N-type semiconductor is laminated on the N-type semiconductor electrode, the cooling electrode is laminated on the other end of the P-type semiconductor and the other end of the N-type semiconductor; 3. The cooled specimen holder for an electron microscope according to claim 2.

4. the sample placement area is provided in the center of the substrate, The thermoelectric element is disposed between the sample placement region and the peripheral region of the substrate, and A plurality of the thermoelectric elements are arranged between the sample placement area and the peripheral area.

3. The cooled specimen holder for an electron microscope according to claim 2.

5. the P-type semiconductor is disposed on the substrate; the N-type semiconductor is disposed on the substrate; the cooling electrode is disposed on the substrate and connected to the other end of the P-type semiconductor and the other end of the N-type semiconductor; 5. The cooled specimen holder for an electron microscope according to claim 4.

6. the sample placement area is a rectangular area of 20 μm×20 μm to 1 mm×1 mm or a circular area of 20 μm to 1 mm in diameter, the cooling electrodes are arranged on the substrate in sections corresponding to the plurality of thermoelectric elements so as to surround the sample placement area, The substrate is a rectangular area of 1 mm x 1 mm to 10 mm x 10 mm, or a circular area with a diameter of 1 mm to 10 mm.

6. A cooled specimen holder for an electron microscope according to claim 5.

7. A charged particle beam device comprising the sample holder according to any one of claims 1 to 6.

8. In claim 7, a power supply for supplying power to the Peltier element; the sample holder includes a connector; The power is supplied to the Peltier element from the power source via the connector. Charged particle beam device.

Images