Floating unit

Abstract

To stop floating in some directions.SOLUTION: A floating unit according to an aspect of an embodiment includes a floating part and a floating direction restriction part. The floating part is movable in a direction around a rotation axis, a first direction orthogonal to the rotation axis, and a second direction orthogonal to each of the rotation axis and the first direction. The floating direction restriction part is movable in an extension direction of the rotation axis with respect to the floating part. The floating part includes: a first groove part including one or more first grooves having a ring shape or an arc shape around the rotation axis; and a plurality of balls arranged in the first groove part. The floating direction restriction part includes a second groove part including one or more second grooves extending in the first direction. When the floating direction restriction part moves in a direction of approaching the first groove part, the plurality of balls arranged in the first groove part fit to the second groove part, and movement of the floating part in the second direction is restricted.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The disclosed embodiments relate to a floating unit. [Background technology]

[0002] Manufacturing processes for electrical devices and the like may include a step of connecting a connecting object, such as a connector or a plate-like wiring member, to a connected object, such as another connector, and in recent years, such processes have been increasingly automated by automatic transport using robots, etc. For example, a technique is known in which a holding unit that holds the connecting object is attached to the tip of a robot arm, and the robot arm is controlled to connect the connecting object to the connected object.

[0003] When connecting a connection object to a connection-receiving object, if there is an error in the alignment between the connection object and the connection-receiving object, it may not be possible to connect the connection object to the connection-receiving object. Therefore, a technique is known in which a floating unit is provided between the robot arm and a holder that holds the connection object, and this floating unit corrects the alignment error between the connection object and the connection-receiving object. The floating unit is also sometimes called a compliance unit.

[0004] Patent Document 1 discloses a floating unit that provides floating capability between a body and a table that are connected to each other so as to be able to move relative to each other, in the X-axis direction and the Y-axis direction that are perpendicular to the central axis of the body and are perpendicular to each other, and in the θ rotation direction around the central axis. In this floating unit, the body and the table can be fixed in a misaligned state by restraining the table by driving pistons of multiple cylinders provided in the body. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2003-170383 Summary of the Invention [Problem to be solved by the invention]

[0006] However, in the floating unit described in Patent Document 1, although the floating function can be turned on and off in all directions, namely the X-axis direction, the Y-axis direction, and the θ rotation direction, it is not possible to stop floating in either the X-axis direction or the Y-axis direction.

[0007] One aspect of the embodiment has been made in view of the above, and aims to provide a floating unit that can stop floating in some directions. [Means for solving the problem]

[0008] A floating unit according to one aspect of the embodiment includes a floating portion and a floating direction limiting portion. The floating portion is movable in a direction around the rotation axis, a first direction perpendicular to the rotation axis, and a second direction perpendicular to both the rotation axis and the first direction. The floating direction limiting portion is movable relative to the floating portion in the extension direction of the rotation axis. The floating portion includes a first groove portion including one or more annular or arc-shaped first grooves centered on the rotation axis, and a plurality of balls arranged in the first groove portion. The floating direction limiting portion includes a second groove portion including one or more second grooves extending in the first direction. When the floating direction limiting portion is moved in a direction approaching the first groove portion, the balls arranged in the first groove portion fit into the second groove portion, restricting movement of the floating portion in the second direction. [Effects of the Invention]

[0009] According to one aspect of the embodiment, floating in some directions can be stopped. [Brief explanation of the drawings]

[0010] [Figure 1]FIG. 1 is a diagram illustrating an example of the configuration of an assembly system according to an embodiment. [Figure 2] FIG. 2 is a perspective view showing an example of a connecting jig and a holding portion according to the embodiment. [Figure 3] FIG. 3 is a side view showing an example of a floating unit according to the embodiment. [Figure 4] FIG. 4 is a top view showing an example of a floating unit according to the embodiment. [Figure 5] FIG. 5 is a bottom view showing an example of the floating unit according to the embodiment. [Figure 6] FIG. 6 is a cross-sectional view taken along line VI-VI shown in FIG. [Figure 7] FIG. 7 is a cross-sectional view taken along line VII-VII shown in FIG. [Figure 8] FIG. 8 is a cross-sectional view taken along line VIII-VIII shown in FIG. [Figure 9] FIG. 9 is a cross-sectional view taken along line IX-IX shown in FIG. [Figure 10] FIG. 10 is a cross-sectional view taken along the line XX shown in FIG. [Figure 11] FIG. 11 is a cross-sectional view corresponding to FIG. 9, showing an example of the relationship between the protrusion of the floating portion and the groove of the fixed portion in the floating unit according to the embodiment. [Figure 12] FIG. 12 is a cross-sectional view taken along line XII-XII shown in FIG. [Figure 13] FIG. 13 is a cross-sectional view taken along line XIII-XIII shown in FIG. [Figure 14] FIG. 14 is a perspective view illustrating an example of an opposing portion of a floating direction restricting portion according to the embodiment. [Figure 15] FIG. 15 is a perspective view showing an example of a columnar part of the floating unit according to the embodiment. [Figure 16] FIG. 16 is a top view showing another example of the columnar part of the floating unit according to the embodiment. [Figure 17]FIG. 17 is a perspective view illustrating an example of a first holding portion according to the embodiment. [Figure 18] FIG. 18 is a view corresponding to FIG. 6 when the floating direction restriction unit according to the embodiment is in operation. [Figure 19] FIG. 19 is a view corresponding to FIG. 7 when the floating direction restriction unit according to the embodiment is in operation. [Figure 20] FIG. 20 is a view corresponding to FIG. 7 when the first engaging portion and the second engaging portion according to the embodiment are engaged with each other. [Figure 21] FIG. 21 is a top view showing still another example of the columnar portion of the floating unit according to the embodiment. [Figure 22] FIG. 22 is a bottom view showing another example of the opposing portion of the floating direction restricting portion according to the embodiment. [Figure 23] FIG. 23 is a bottom view showing still another example of the opposing portion of the floating direction restricting portion according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments of the floating unit disclosed in the present application will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described below.

[0012] <1. Assembly system configuration> An assembly system including a connecting jig according to an embodiment will be described with reference to Fig. 1. As shown in Fig. 1, an assembly system 100 according to an embodiment includes a robot main body 90, a control device 91, a workbench 92, a connecting jig 93, and air pipes 94, 95, and 96. The robot main body 90 is an example of an automatic transport mechanism that automatically transports connection objects, such as connectors and plate-like wiring members, to a predetermined position.

[0013] The robot main body 90 is an industrial robot and includes a base 90a having a base end fixed to an installation surface 97 such as a floor, a rotating part 90b having a base end attached to the tip of the base 90a so as to be rotatable about a rotating shaft, and an arm 90c having a base end rotatably attached to the tip of the rotating part 90b. The arm 90c includes multiple links that can each rotate about different rotation axes.

[0014] The robot main body 90 includes a motor (not shown) that rotates the rotating part 90b about a rotation axis, and a motor (not shown) for each rotation axis that rotates the link of the arm 90c about the rotation axis.

[0015] Each motor provided in the robot main body 90 is controlled by a control device 91. Note that the robot main body 90 is, for example, a six-axis robot, but may be a seven-axis or more robot or a five-axis or less robot.

[0016] The base end of a connecting jig 93 is fixed to the tip of the arm 90c. The connecting jig 93 has its base end fixed to the tip of the arm 90c and its tip fixed to a holding unit 3 that holds an object to be connected 4. The connecting jig 93 includes a coupling unit 1 and a floating unit 2.

[0017] The connecting unit 1 has its base end fixed to the tip of the floating unit 2, and its tip fixed to the base end of the holding unit 3. The connecting unit 1 is provided with a sensor for detecting a force applied to the holding unit 3, etc.

[0018] The floating unit 2 has a base end fixed to the tip of the arm 90c and has a floating function of holding the connecting unit 1 connected to the tip so that it can move in the X-axis direction, Y-axis direction, and around the Z-axis. The configuration and function of the floating unit 2 will be described in detail later.

[0019] As shown in FIG. 2, the holding unit 3 includes a main body 3a that adsorbs the connection object 4, and an air supply / exhaust section 3b that is connected to an air pipe 94 (see FIG. 1) that supplies / exhausts air to / from the main body 3a.

[0020] The connection object 4 shown in Fig. 1 is a plate-shaped signal transmission medium. The plate-shaped signal transmission medium may be, for example, a flexible board such as a flexible printed circuit (FPC) or a rigid board. Note that the connection object 4 is not limited to the configuration shown in Fig. 1 and may be, for example, a cable, a flexible flat cable (FFC), or an electric connector to which a cable portion having multiple cables is attached.

[0021] A circuit board 6 with a connection target object 5 attached thereto is fixed to the workbench 92. The connection target object 5 is, for example, a connector, but is not limited to a connector as long as it is a member or device that is connected to the connection target object 4.

[0022] The control device 91 stores in advance teaching data for causing the robot main body 90 to perform an operation of connecting the connection object 4 to the connection receiving object 5. The control device 91 controls each motor provided in the robot main body 90 based on the stored teaching data to move the connection jig 93 holding the connection object 4, and connects the connection object 4 to the connection receiving object 5.

[0023] For ease of explanation, the direction in which the robot main body 90 moves the connecting jig 93 to connect the connection object 4 to the connection receiving object 5 (positive Y-axis direction) will be referred to as the "forward direction," and the opposite direction (negative Y-axis direction) will be referred to as the "rearward direction." The width direction (X-axis direction) of the connection object 4 will be referred to as the "left-right direction," and the height direction (Z-axis direction) of the connection object 4 will be referred to as the "up-down direction." The direction in which the connecting jig 93 rotates around the axis AX along the up-down direction will be referred to as the "direction around the rotation axis." The direction around the rotation axis can also be referred to as the rotation direction. For ease of understanding, the X, Y, and Z axes in the state of the assembly system 100 shown in FIG. 1 are additionally shown in several figures, including FIG. 2.

[0024] <2. Floating Unit 2> As shown in FIG. 3, the floating unit 2 includes a fixed portion 10 and a floating portion 20 supported by the fixed portion 10 so as to be movable in the X-axis direction, the Y-axis direction, and the direction around the rotation axis relative to the fixed portion 10. The X-axis direction is an example of a first direction perpendicular to the rotation axis, and the Y-axis direction is an example of a second direction perpendicular to both the rotation axis and the first direction. The direction around the rotation axis is the direction around the axis AX, as described above. In the state shown in FIG. 1, the second direction is a direction perpendicular to the connection direction of the connection object 4 held by the holding unit 3 attached to the floating portion 20 to the connection target object 5.

[0025] The floating unit 2 includes air supply and exhaust units 80, 81, and 82 that supply air to the interior of the fixed part 10 and exhaust air from the interior of the fixed part 10. The air supply and exhaust units 80 and 81 are connected to an air pipe 95 (see FIG. 1), and the air supply and exhaust unit 82 is connected to an air pipe 96 (see FIG. 1). Note that the air supply and exhaust units 80 and 81 do not have to be connected to the same air pipe 95, and may be connected to different air pipes.

[0026] In the floating unit 2, when air is supplied to the inside of the fixed part 10 through the air piping 95 (see Figure 1) and the air supply and exhaust parts 80, 81, the movement of the floating part 20 in the forward and backward directions (Y-axis direction) is restricted by the downward movement (negative Z-axis direction) of the floating direction restricting part 30 (see Figures 6 and 7, etc.) described later.

[0027] As a result, the floating function in the front-rear direction (Y-axis direction) of the floating unit 2 is stopped, and even if a force in the front-rear direction is applied to the floating portion 20, the floating portion 20 will not move in the front-rear direction relative to the fixed portion 10.

[0028] In addition, by attaching the connecting unit 1 to the connecting jig 93 with the floating unit 2 rotated 90 degrees around the rotation axis, it is possible to stop floating in the left-right direction (X-axis direction) instead of stopping floating in the front-to-back direction (Y-axis direction).

[0029] Furthermore, in the floating unit 2, when air is supplied to the inside of the fixed part 10 through the air piping 96 (see Figure 1) and the air supply / exhaust part 82, the movement of the first engagement part 40 (see Figures 6 and 7, etc.) described below restricts the movement of the floating part 20 in each of the forward / backward direction, left / right direction, and direction around the rotation axis.

[0030] As a result, all floating functions in the floating unit 2 in the front-to-back direction, left-to-right direction, and around the rotation axis are stopped, and the floating part 20 is fixed relatively to the fixed part 10. In this state, even if a force is applied to the floating part 20, the floating part 20 will not move relative to the fixed part 10 in any of the front-to-back direction, left-to-right direction, and around the rotation axis.

[0031] In addition, when air is supplied to the inside of the fixed part 10 through the air piping 96 (see Figure 1) and the air supply and exhaust part 82, the floating unit 2 stops floating in the front-to-back and left-to-right directions, but may be configured so that floating in the direction around the rotation axis does not stop.

[0032] 6 to 17, the configuration of the floating unit 2 will be described in detail. As shown in Fig. 6, the floating unit 2 includes a fixed part 10 attached to the tip of an arm 90c (see Fig. 1), a floating part 20, a floating direction restricting part 30, a first engaging part 40, a first holding part 50, a second holding part 60, and the air supply and exhaust parts 80, 81, and 82 described above.

[0033] The floating unit 2 is supported by the fixed part 10 in a state in which it can move in the front-to-back direction, the left-to-right direction, and the direction around the rotation axis relative to the fixed part 10. The floating direction restricting part 30 is supported by the fixed part 10 by a plurality of elastic members 85 in a state in which it can move downward (in the negative direction of the Z axis) relative to the fixed part 10. The elastic members 85 are, for example, springs, but are not limited to such an example.

[0034] The first engagement portion 40 is supported by the fixed portion 10 by a plurality of elastic members 84 in a state in which it can move downward (in the negative direction of the Z axis) relative to the fixed portion 10. The elastic members 84 are, for example, springs, but are not limited to such an example. The first holding portion 50 rotatably holds each of the plurality of balls 87, and the second holding portion 60 rotatably holds each of the plurality of balls 88.

[0035] The configurations of the fixed portion 10, floating portion 20, floating direction restricting portion 30, first engaging portion 40, first holding portion 50, and second holding portion 60 will be described in detail below.

[0036] 6 and 7, the fixing part 10 includes a top plate 11, a first cylindrical member 12, a second cylindrical member 13, a third cylindrical member 14, a fourth cylindrical member 15, and a support part 16. The top plate 11 is formed in a disk shape, and as shown in FIG. 7, the top plate 11 is formed with a recess 111 in which the first engagement part 40 is slidably disposed, and a mounting hole 112 to which the air supply / exhaust part 82 is attached.

[0037] 6 and 7, the first cylindrical member 12 has an upper cylindrical portion 121 located at the top and a lower cylindrical portion 122 that is continuous with the upper cylindrical portion 121 below the upper cylindrical portion 121. The upper cylindrical portion 121 and the lower cylindrical portion 122 have the same outer diameter, and the upper cylindrical portion 121 has a larger inner diameter than the lower cylindrical portion 122. A thread is formed on the inner peripheral surface of the upper cylindrical portion 121.

[0038] 6, the lower cylinder portion 122 of the first cylindrical member 12 is formed with two mounting holes 122a to which corresponding one of the air supply and exhaust units 80, 81 is attached, and two vent holes 122b that are continuous with the corresponding one of the two mounting holes 122a. The lower cylinder portion 122 of the first cylindrical member 12 also is formed with two recesses 122c that are continuous with the corresponding one of the two vent holes 122b and in which a part of the floating direction restricting unit 30 is slidably disposed.

[0039] The second cylindrical member 13 is formed in a cylindrical shape, and as shown in Figures 6 and 7, has an upper cylindrical portion 131 located at the top and a lower cylindrical portion 132 that is continuous with the upper cylindrical portion 131 below the upper cylindrical portion 131. The upper cylindrical portion 131 and the lower cylindrical portion 132 have the same inner diameter, and the lower cylindrical portion 132 has a larger outer diameter than the upper cylindrical portion 131. A thread is formed on the outer peripheral surface of the lower cylindrical portion 132, and is threadedly engaged with a thread formed on the inner periphery of the upper cylindrical portion 121 of the first cylindrical member 12. Furthermore, as shown in Figure 13, the outer periphery of the upper cylindrical portion 131 is formed in the shape of a trapezoidal dodecagon.

[0040] The second cylindrical member 13 and the first cylindrical member 12 are screwed together by threads formed on the outer peripheral surface of the lower cylindrical portion 132 of the second cylindrical member 13 and threads formed on the inner peripheral surface of the upper cylindrical portion 121 of the first cylindrical member 12. This fixes the second cylindrical member 13 to the first cylindrical member 12, but the second cylindrical member 13 and the first cylindrical member 12 may also be fastened together by a fastener.

[0041] 6 and 7, the third cylindrical member 14 has an upper cylindrical portion 141 located at the top, a central cylindrical portion 142 that is continuous with the upper cylindrical portion 141 below the upper cylindrical portion 141, and a lower cylindrical portion 143 that is continuous with the central cylindrical portion 142 below the central cylindrical portion 142. One end of each of the plurality of elastic members 85 is attached to the upper surface of the central cylindrical portion 142.

[0042] The outer diameters of the upper cylindrical portion 141, the central cylindrical portion 142, and the lower cylindrical portion 143 are the same, and the inner diameters of the upper cylindrical portion 141 and the lower cylindrical portion 143 are larger than the inner diameter of the central cylindrical portion 142. The upper cylindrical portion 141 of the third cylindrical member 14 is fastened to the lower cylindrical portion 122 of the first cylindrical member 12 with a plurality of fasteners.

[0043] 6 and 7, the fourth cylindrical member 15 has an upper cylindrical portion 151 located at the top, a central cylindrical portion 152 that is continuous with the upper cylindrical portion 151 below the upper cylindrical portion 151, and a lower cylindrical portion 153 that is continuous with the central cylindrical portion 152 below the central cylindrical portion 152. The upper cylindrical portion 151 has an inner circumference that is formed in a cross-shaped ring shape, and the central cylindrical portion 152 and the lower cylindrical portion 153 have inner circumferences that are formed in a circular ring shape.

[0044] The outer diameters of the upper cylindrical portion 151, the central cylindrical portion 152, and the lower cylindrical portion 153 are the same, and the inner diameter of the upper cylindrical portion 151 is larger than the inner diameter of the central cylindrical portion 152, which is larger than the inner diameter of the lower cylindrical portion 153. The upper cylindrical portion 151 of the fourth cylindrical member 15 is fastened to the lower cylindrical portion 143 of the third cylindrical member 14 with a plurality of fasteners.

[0045] 7, a plurality of recesses 153a each recessed upward are formed in lower cylinder portion 153, and a first magnetic body 18 is attached to each recess 153a. The lower surface of lower cylinder portion 153 and the lower surface of first magnetic body 18 are flush with each other, but the lower surface of lower cylinder portion 153 may be located below or above the lower surface of first magnetic body 18.

[0046] The support portion 16 is formed in a disk shape and, as shown in FIG. 6, is attached to the upper surface of the lower cylindrical portion 153 of the fourth cylindrical member 15 by a plurality of fasteners. A plurality of recesses 161 are formed on the upper surface of the support portion 16 and arranged circumferentially at intervals from one another. Each of the recesses 161 is a truncated cone-shaped recess or a cone-shaped recess, but may also be a hemispherical recess. A portion of a spherical ball 88 is disposed in each of the recesses 161.

[0047] 6 and 7, the floating part 20 includes a columnar part 21, a bottom plate 22 attached to the lower end of the columnar part 21 with a plurality of fasteners, and a supported part 23. The columnar part 21 includes a cylindrical main body part 211 and an annular protruding part 212 that is continuous with the outer periphery of the main body part 211 and protrudes in the radial direction of the main body part 211. The main body part 211 and the protruding part 212 are integrally formed, but the main body part 211 and the protruding part 212 may be fastened together with fasteners.

[0048] The outer diameter of the main body portion 211 decreases in multiple stages as it goes upward, and a second engagement portion 211a having a square outer periphery is formed at the upper end of the main body portion 211, as shown in Figures 13 and 15.

[0049] A first groove portion 212b including a first groove 212a is formed on the upper surface of the protrusion 212. The first groove 212a is a groove having a trapezoidal cross section, but may also be a groove having an inverted triangular cross section or a groove having a semicircular cross section. As shown in Fig. 15, the first groove 212a is formed in the shape of a ring centered on the axis AX.

[0050] The first grooves 212a formed in the first groove portion 212b are not limited to annular grooves and may be, for example, arc-shaped grooves centered on the axis AX, in which case the first groove portion 212b includes a plurality of first grooves 212a as shown in Fig. 16. In the example shown in Fig. 16, a first groove 212a is provided for each ball 87 to be arranged, but a first groove 212a may be provided for two or more balls 87.

[0051] When the first groove 212a is annular, the first groove 212a corresponds to the first groove portion 212b, and when the first groove 212a is an arc-shaped groove, a plurality of first grooves 212a correspond to the first groove portion 212b.

[0052] 6 and 7, the lower surface of protrusion 212 is flat and comes into contact with a plurality of balls 88 that are rotatably arranged on support portion 16. This allows floating portion 20 to be supported by fixed portion 10 via the plurality of balls 88 in a state in which it can move in the front-to-back direction, the left-to-right direction, and the direction around the rotation axis.

[0053] The bottom plate 22 has an outer diameter equal to that of the fourth cylindrical member 15, and is fastened to the lower end of the columnar portion 21 via a plurality of fasteners. As a result, the bottom plate 22 is supported by the fixed portion 10 via the columnar portion 21 in a state in which it can move in the front-to-rear direction, the left-to-right direction, and the direction around the rotation axis.

[0054] 7, a plurality of recesses 221 recessed downward (negative direction of the Z axis) are formed on the upper surface of the bottom plate 22. A second magnetic body 24 having a magnetic polarity different from that of the first magnetic body 18 is attached to each recess 221. The upper surface of the bottom plate 22 and the upper surface of the second magnetic body 24 are flush with each other, but the upper surface of the bottom plate 22 may be located above or below the upper surface of the second magnetic body 24. Note that, for example, the magnetic polarity of the surface of the first magnetic body 18 facing the second magnetic body 24 is an N pole, and the magnetic polarity of the surface of the second magnetic body 24 facing the first magnetic body 18 is an S pole, but this is not a limitation.

[0055] When no force is applied to the floating section 20, each second magnetic body 24 is positioned opposite a corresponding first magnetic body 18 among the multiple first magnetic bodies 18 provided on the fixed section 10. In this state, the attractive force between the first magnetic body 18 and the second magnetic body 24 is strongest, and the position of the floating section 20 relative to the fixed section 10 is the origin position in each of the directions of the rotation axis, the front-rear direction, and the left-right direction.

[0056] Furthermore, suppose that a force is applied to floating portion 20, causing floating portion 20 to move relative to fixed portion 10 in at least one of the directions of the rotation axis, the front-rear direction, and the left-right direction, and then the force acting on floating portion 20 is removed. In this case, the position of floating portion 20 relative to fixed portion 10 returns to its original position in each of the directions of the rotation axis, the front-rear direction, and the left-right direction due to the attraction force between first magnetic body 18 and second magnetic body 24.

[0057] The supported portion 23 is formed in an annular shape, and as shown in Figures 6 and 7, a hollow portion 231 is formed in the supported portion 23. The columnar portion 21 is inserted into the hollow portion 231 of the supported portion 23. The supported portion 23 has a two-step inner diameter, with the inner diameter of the lower inner peripheral surface being larger than the inner diameter of the upper inner peripheral surface. The step between the upper and lower inner peripheral surfaces engages with the columnar portion 21.

[0058] As shown in Fig. 12, a plurality of recesses 232 are formed on the upper surface of the supported portion 23, and a spherical ball 86 is disposed in each of the plurality of recesses 232. Each recess 232 is a truncated cone-shaped recess or a cone-shaped recess, but may also be a hemispherical recess. In the example shown in Fig. 12, six recesses 232 are formed on the upper surface of the supported portion 23, but the number of recesses 232 is not limited to six.

[0059] As shown in Figures 6 and 7, the ball 86 abuts against the underside of the lower cylindrical portion 132 of the second cylindrical member 13, thereby restricting upward movement of the supported portion 23, but not restricting movement in the front-to-back, left-to-right, or around the rotation axis.

[0060] 6 and 7, the floating direction restricting portion 30 includes two sliding portions 31 that slide within corresponding one of the two recesses 122c, an annular base portion 32 against whose upper surface the two sliding portions 31 abut, and a cylindrical opposing portion 33 whose upper surface is attached by a fastener or the like to the lower surface of the base portion 32. The two sliding portions 31 may be fixedly attached to the upper surface of the base portion 32 by a fastener or the like.

[0061] Since the sliding part 31 slides in the recess 122c, it can move up and down (in the Z-axis direction), but movement in the left and right directions (in the X-axis direction) and the front and rear directions (in the Y-axis direction) is restricted. Furthermore, a ring-shaped recess is formed on the outer periphery of the sliding part 31, and a ring-shaped seal member is attached to this recess. This allows air entering through the air vent 122b to be contained within the recess 122c.

[0062] 6, one end of an elastic member 85 is attached to the lower surface of the base portion 32. The other end of the elastic member 85 is attached to the central cylindrical portion 142 of the third cylindrical member 14. This allows the floating direction restricting portion 30 to be supported by the fixed portion 10 so as to be movable in the extension direction of the axis AX (the Z-axis direction).

[0063] 7, a through-hole 321 that penetrates in the vertical direction is formed in the base portion 32, and a guide member 89 that extends in the vertical direction is inserted into the through-hole 321. The guide member 89 is attached to the lower cylindrical portion 122 of the first cylindrical member 12. As a result, the floating direction restricting portion 30 is guided in its movement in the vertical direction along the extension direction of the guide member 89.

[0064] 7, a second groove portion 332 including a plurality of second grooves 331 is formed on the lower surface of the opposing portion 33. As shown in FIGS. 10 and 14, each of the plurality of second grooves 331 extends in the left-right direction (X-axis direction), and in the second groove portion 332, the plurality of second grooves 331 are arranged side by side in the front-rear direction (Y-axis direction).

[0065] As shown in Figures 6 and 7, the first engagement part 40 includes a disk-shaped main body part 41 and an annular sealing member 42. The main body part 41 has an annular recess 411 on its outer circumferential surface, and the sealing member 42 is disposed in the recess 411. The sealing member 42 is made of, for example, a rubber material, a plastic material, or an elastomer. The sealing member 42 prevents air from entering below the disk-shaped main body part 41.

[0066] Furthermore, the main body 41 has recesses 412, 413 formed on its underside, recessed upward. The peripheral shape of each of the recesses 412, 413 is, for example, circular, but is not limited to this example. When the first engagement portion 40 moves downward, the recess 413 engages with the second engagement portion 211a formed at the upper end of the main body 211 of the floating portion 20. As shown in FIG. 13 , the peripheral shape of the second engagement portion 211a is formed in a scalene octagonal shape. However, any shape may be used as long as it fits into the recess 413 and its movement in the direction around the rotation axis, the front-rear direction, and the left-right direction is restricted by the recess 413. The second engagement portion 211a may have any polygonal shape other than a scalene octagon or any other shape.

[0067] As a result, the engagement between the first engagement portion 40 and the second engagement portion 211a restricts movement of the floating portion 20 relative to the fixed portion 10 in the direction around the rotation axis, the front-rear direction, and the left-right direction, thereby stopping the floating function of the floating unit 2. The outer peripheral shape of the second engagement portion 211a may be circular, and in this case the peripheral shape of the recess 413 is formed, for example, in a polygonal shape, but other shapes are also possible.

[0068] Furthermore, the outer peripheral shape of the second engagement portion 211a may be a shape that allows the recess 413 to rotate around the rotation axis but prevents movement in the front-rear and left-right directions. For example, the outer peripheral shape of the second engagement portion 211a and the peripheral shape of the recess 413 may be circular. In this case, engagement between the first engagement portion 40 and the second engagement portion 211a restricts movement of the floating portion 20 relative to the fixed portion 10 in the front-rear and left-right directions, but does not restrict movement around the rotation axis.

[0069] 17, the first holding part 50 has an outer periphery formed in a cross-shaped ring shape, and a plurality of through holes 501 formed at intervals along the circumferential direction are formed in the first holding part 50. In the example shown in Fig. 17, eight through holes 501 are formed in the first holding part 50, but the number of through holes 501 is not limited to eight.

[0070] The diameter of each through-hole 501 on the upper surface side is smaller than the diameter of the ball 87 (see FIGS. 6 and 7), and the diameter of the hole on the lower surface side is larger than the diameter of the ball 87. Therefore, the first holding part 50 can hold the ball 87 with high precision between it and the protruding part 212 of the floating part 20, without causing the ball 87 to fall out of the first groove 212a.

[0071] In addition, each through hole 501 may have a shape in which the hole diameter on the upper surface side is larger than the diameter of the ball 87, and in this case, the first holding portion 50 can hold the ball 87 between itself and the protrusion 212 of the floating portion 20.

[0072] 6 and 7, the multiple protrusions 502 formed on the first holding part 50 are inserted into multiple grooves 17 formed between the third cylindrical member 14 and the fourth cylindrical member 15. The multiple grooves 17 are formed by the lower cylindrical portion 143 of the third cylindrical member 14, the upper cylindrical portion 151 of the fourth cylindrical member 15, and the central cylindrical portion 152 of the fourth cylindrical member 15. The lower cylindrical portion 143 of the third cylindrical member 14 and the central cylindrical portion 152 of the fourth cylindrical member 15 limit the amount of movement of the first holding part 50 in the extension direction of the rotation axis.

[0073] As shown in Figures 6, 7, and 9, the upper cylindrical portion 151 of the fourth cylindrical member 15 has an inner periphery 151a that is larger than the inner periphery of the central cylindrical portion 152 and is formed in a cross-shaped ring shape. This forms a plurality of grooves 17 between the central cylindrical portion 152 and the lower cylindrical portion 143. The outer periphery of the first holding portion 50 is formed in a cross-shaped ring shape, and as shown in Figure 9, four protrusions 502 are formed. Each of the four protrusions 502 is disposed in a corresponding one of the four grooves 17.

[0074] 11, when floating portion 20 attempts to rotate in a direction around the rotation axis by more than a predetermined angle, protrusion 502 comes into contact with upper cylinder portion 151, thereby limiting the amount of movement around the rotation axis of first holding portion 50. Note that the number of protrusions 502 and grooves 17 is not limited to four.

[0075] 8, the second holding part 60 is formed in an annular shape, and has a plurality of through holes 601 formed at intervals along the circumferential direction. The hole diameters on the upper surface side and the lower surface side of each through hole 601 are larger than the diameter of the ball 88, but the hole diameter on the upper surface side may be smaller than the diameter of the ball 88 and the hole diameter on the lower surface side may be larger than the diameter of the ball 88. The second holding part 60 is placed on the upper surface of the support part 16, but may be fastened to the support part 16 with a fastener.

[0076] Next, referring to Figures 18 and 19, we will explain the operation of the floating direction restricting section 30 (see Figures 6 and 7, etc.) when air is supplied into the inside of the fixed section 10 in the floating unit 2 through the air piping 95 (see Figure 1) and the air supply and exhaust sections 80, 81.

[0077] As shown in Figures 18 and 19, when air is supplied into the inside of the fixed part 10 through the air piping 95 (see Figure 1) and the air supply and exhaust parts 80, 81, the force of the air causes the floating direction restricting part 30 to move downward (negative direction of the Z axis).

[0078] 18 and 19, the plurality of balls 87 rotatably held by the first holding part 50 fit into the second groove part 332 including the plurality of second grooves 331 formed in the facing part 33 of the floating direction restricting part 30. As a result, some of the plurality of balls 87 rotatably held by the first holding part 50 are placed in the second grooves 331.

[0079] As shown in Figure 10, each second groove 331 has one ball 87 or two balls 87 positioned opposite each other in the vertical direction, so that each second groove 331 has a portion of one ball 87 or a portion of two balls 87 arranged therein.

[0080] The floating direction restricting portion 30 has its vertical position fixed by the force of air resisting the elastic force of the elastic member 85, and its horizontal position (X-axis direction) and front-to-back position (Y-axis direction) fixed by the guide member 89.

[0081] In this state, when a force acting around the rotation axis acts on the floating portion 20, the ball 87 rotatably held by the first holding portion 50 moves within the first groove 212a, causing the floating portion 20 to rotate around the rotation axis.

[0082] Furthermore, when a force acts on the floating portion 20 in the left-right direction (X-axis direction), the ball 87 rotatably held by the first holding portion 50 moves within the second groove 331 formed in the opposing portion 33 of the floating direction restricting portion 30, and the floating portion 20 moves in the left-right direction (X-axis direction).

[0083] On the other hand, when a force acts on the floating portion 20 in the front-rear direction (Y-axis direction), the movement of each ball 87 rotatably held by the first holding portion 50 in the front-rear direction (Y-axis direction) is restricted by the second groove 331. Therefore, when a force acts on the floating portion 20 in the front-rear direction (Y-axis direction), the movement of the floating portion 20 in the front-rear direction (Y-axis direction) is restricted.

[0084] In this way, in the floating unit 2 according to the embodiment, the floating direction restricting section 30 acts on the floating section 20, making it possible to stop floating in one of the two orthogonal axis directions.

[0085] Next, referring to Figure 20, we will explain the operation of the first engagement portion 40 (see Figures 6 and 7, etc.) when air is supplied into the inside of the fixed portion 10 in the floating unit 2 through the air piping 96 (see Figure 1) and the air supply and exhaust portion 82.

[0086] As shown in Figure 20, in the floating unit 2, when air is supplied into the inside of the fixed part 10 through the air piping 96 (see Figure 1) and the air supply and exhaust part 82, the force of the air causes the first engagement part 40 to move downward (negative direction of the Z axis).

[0087] 20, when the first engagement portion 40 moves downward (in the negative direction of the Z axis), which is the extension direction of the rotation axis, the second engagement portion 211a formed at the tip of the main body portion 211 is inserted into the recess 413 formed in the first engagement portion 40. This causes the first engagement portion 40 and the second engagement portion 211a to engage with each other, restricting movement of the floating portion 20 relative to the fixed portion 10 in the direction around the rotation axis, the front-rear direction, and the left-right direction, and the floating function of the floating unit 2 is stopped.

[0088] The second engagement portion 211a is formed on a part of the columnar portion 21 of the floating portion 20, but is not limited to this example. For example, the second engagement portion 211a may be formed separately from the columnar portion 21 and attached to the columnar portion 21.

[0089] Furthermore, the second engagement portion 211a may be engaged with the recess 413 so as to be rotatable about the rotation axis. In this case, movement of the floating portion 20 relative to the fixed portion 10 in the direction about the rotation axis is not restricted, but movement of the floating portion 20 relative to the fixed portion 10 in both the front-rear and left-right directions is restricted.

[0090] In the above-described example, the first groove portion 212b formed in the floating portion 20 includes one or more annular or arc-shaped first grooves 212a centered on the rotation axis, but is not limited to such an example. Similarly, the second groove portion 332 formed in the floating direction restricting portion 30 includes one or more second grooves 331 extending in the left-right direction (X-axis direction), but is not limited to such an example.

[0091] For example, as shown in Fig. 21, first groove portion 212b formed in floating portion 20 may include one or more first grooves 212a extending in the left-right direction (X-axis direction), and as shown in Fig. 22, second groove portion 332 formed in floating direction restricting portion 30 may include an annular second groove 331 centered on the rotation axis. This also makes it possible to stop floating in one of the directions of two orthogonal axes by the action of floating direction restricting portion 30 on floating portion 20.

[0092] 21, the first groove 212b formed in the floating portion 20 may include one or more first grooves 212a extending in the left-right direction (X-axis direction), and as shown in Fig. 23, the second groove 332 formed in the floating direction restricting portion 30 may include one or more second grooves 331 extending in the front-rear direction (Y-axis direction). This allows the floating in the direction around the rotation axis to be stopped by the action of the floating direction restricting portion 30 on the floating portion 20.

[0093] Furthermore, the first groove portion 212b formed in the floating portion 20 may include one or more annular or arcuate first grooves 212a centered on the rotation axis, and the second groove portion 332 formed in the floating direction restricting portion 30 may include an annular second groove 331 centered on the rotation axis, as shown in Fig. 22. This allows the action of the floating direction restricting portion 30 on the floating portion 20 to stop floating in both the left-right direction (X-axis direction) and the front-back direction (Y-axis direction).

[0094] 22 includes an annular second groove 331 centered on the rotation axis, but may include a plurality of arc-shaped second grooves 331 centered on the rotation axis. The arc-shaped second groove 331 has a shape similar to that of the arc-shaped first groove 212a shown in FIG. 16, for example.

[0095] In the example described above, the structure restricts the movement of the floating portion 20 when air is sucked in, but the present invention is not limited to this example, and may be a structure in which, for example, the restriction on the movement of the floating portion 20 is released when air is sucked in. Furthermore, in the example described above, the floating direction restricting portion 30 is moved by air drive, but it may also be moved by drive using a solenoid or an electromagnet.

[0096] As described above, the floating unit 2 according to the embodiment includes a floating portion 20 and a floating direction restricting portion 30. The floating portion 20 is movable in a direction around the rotation axis, a first direction perpendicular to the rotation axis, and a second direction perpendicular to both the rotation axis and the first direction. The floating direction restricting portion 30 is movable relative to the floating portion 20 in the direction of extension of the rotation axis. The floating portion 20 includes a first groove portion 212b including one or more annular or arc-shaped first grooves 212a centered on the rotation axis, and a plurality of balls 87 arranged in the first groove portion 212b. The floating direction restricting portion 30 includes a second groove portion 332 including one or more second grooves 331 extending in the first direction. When the floating direction restricting portion 30 is moved in a direction approaching the first groove portion 212b, the plurality of balls 87 arranged in the first groove portion 212b fit into the second groove portion 332, restricting movement of the floating portion 20 in the second direction. This allows the floating unit 2 to stop floating in one of the two orthogonal axis directions.

[0097] The floating unit 2 according to the embodiment includes a floating portion 20 and a floating direction restricting portion 30. The floating portion 20 is movable in a direction around the rotation axis, a first direction perpendicular to the rotation axis, and a second direction perpendicular to both the rotation axis and the first direction. The floating direction restricting portion 30 is movable relative to the floating portion 20 in the direction of extension of the rotation axis. The floating portion 20 includes a first groove portion 212b including one or more first grooves 212a extending in the first direction, and a plurality of balls 87 arranged in the first groove portion 212b. The floating direction restricting portion 30 includes a second groove portion 332 including one or more second grooves 331 having an annular or arc-shaped configuration centered on the rotation axis. When the floating direction restricting portion 30 is moved in a direction approaching the first groove portion 212b, the plurality of balls 87 arranged in the first groove portion 212b fit into the second groove portion 332, restricting movement of the floating portion 20 in the second direction. This allows the floating unit 2 to stop floating in one of the two orthogonal axis directions.

[0098] The floating unit 2 according to the embodiment includes a floating portion 20 and a floating direction limiting portion 30. The floating portion 20 is movable in a direction around the rotation axis, a first direction perpendicular to the rotation axis, and a second direction perpendicular to both the rotation axis and the first direction. The floating direction limiting portion 30 is movable relative to the floating portion 20 in the direction of extension of the rotation axis. The floating portion 20 includes a first groove portion 212b including one or more first grooves 212a extending in the first direction, and a plurality of balls 87 arranged in the first groove portion 212b. The floating direction limiting portion 30 includes a second groove portion 332 including one or more second grooves 331 extending in the second direction. When the floating direction limiting portion 30 is moved in a direction approaching the first groove portion 212b, the plurality of balls 87 arranged in the first groove portion 212b fit into the second groove portion 331, restricting movement of the floating portion 20 around the rotation axis. This allows the floating unit 2 to stop floating in the direction around the rotation axis.

[0099] The floating unit 2 according to the embodiment includes a floating portion 20 and a floating direction restricting portion 30. The floating portion 20 is movable in a direction around the rotation axis, a first direction perpendicular to the rotation axis, and a second direction perpendicular to both the rotation axis and the first direction. The floating direction restricting portion 30 is movable relative to the floating portion 20 in the direction of extension of the rotation axis. The floating portion 20 includes a first groove portion 212b including one or more annular or arc-shaped first grooves 212a, and a plurality of balls 87 arranged in the first groove portion 212b. The floating direction restricting portion 30 includes a second groove portion 332 including one or more annular or arc-shaped second grooves 331. When the floating direction restricting portion 30 is moved in a direction approaching the first groove portion 212b, the plurality of balls 87 arranged in the first groove portion 212b fit into the second groove portion 332, restricting movement of the floating portion 20 in both the first and second directions. This allows the floating unit 2 to stop floating in the first direction and the second direction.

[0100] The floating section 20 also includes a first holding section 50 that rotatably holds the plurality of balls 87 arranged in the first groove section 212b. The first holding section 50 is an example of a holding section. This allows the floating unit 2 to hold the plurality of balls 87 with high precision when force is applied to the floating section 20.

[0101] Furthermore, the floating unit 2 includes a first engagement portion 40 that is movable in the direction in which the rotation shaft extends. The floating portion 20 includes a second engagement portion 211a that engages with the first engagement portion 40 when the first engagement portion 40 moves in the direction in which the rotation shaft extends. The engagement between the first engagement portion 40 and the second engagement portion 211a restricts the movement of the floating portion 20 in each of the first and second directions. This allows the floating unit 2 to stop floating in the directions of the two orthogonal axes.

[0102] Furthermore, the engagement between the first engagement portion 40 and the second engagement portion 211a restricts the movement of the floating portion 20 in each of the directions about the rotation axis, the first direction, and the second direction, thereby preventing the floating unit 2 from floating in the directions of the two orthogonal axes and the direction about the rotation axis.

[0103] The floating unit 2 also includes a first magnetic body 18. The floating part 20 is provided at a position facing the first magnetic body 18 and includes a second magnetic body 24 having a magnetic polarity different from that of the first magnetic body 18. The attraction force between the first magnetic body 18 and the second magnetic body 24 returns the floating part 20 to its original position in each of the directions of the rotation axis, the first direction, and the second direction. This allows the floating unit 2 to accurately return the floating part 20 to its original position in each of the directions of the rotation axis, the first direction, and the second direction.

[0104] Additionally, the second groove portion 332 has a plurality of second grooves 331. The plurality of second grooves 331 each extend in the first direction and are arranged side by side in the second direction. This allows the floating unit 2 to accurately stop floating in one of the two orthogonal axial directions.

[0105] The second direction is perpendicular to the direction in which the connection object 4 held by the holding unit 3 attached to the floating part 20 is connected to the connection target object 5. This allows the floating unit 2 to stop floating in one of the two perpendicular axial directions.

[0106] The second direction is the direction in which the connecting object 4 held by the holding unit 3 attached to the floating part 20 is connected to the connecting object 5. This allows the floating unit 2 to stop floating in one of the two orthogonal axis directions.

[0107] Further advantages and modifications will readily occur to those skilled in the art. Therefore, the invention in its broader aspects is not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents. [Explanation of symbols]

[0108] 2 Floating Unit 3 Holding Unit 18 First magnetic body 20 Floating section 24 Second magnetic body 30 Floating direction limiter 40 first engagement portion 50 1st holding part 87 balls 211a Second engaging part 212a 1st groove 212b 1st groove 331 Second groove 332 Second groove

Claims

1. a floating portion movable in a direction around a rotation axis, a first direction perpendicular to the rotation axis, and a second direction perpendicular to both the rotation axis and the first direction; a floating direction limiting portion that is movable in the extension direction of the rotation shaft relative to the floating portion, The floating portion is a first groove portion including one or more annular or arcuate first grooves centered on the rotation axis; a plurality of balls disposed in the first groove portion, The floating direction restriction unit is a second groove portion including one or more second grooves extending in the first direction; When the floating direction restricting portion is moved in a direction approaching the first groove portion, the plurality of balls arranged in the first groove portion fit into the second groove portion, and movement of the floating portion in the second direction is restricted. A floating unit characterized by:

2. a floating portion movable in a direction around a rotation axis, a first direction perpendicular to the rotation axis, and a second direction perpendicular to both the rotation axis and the first direction; a floating direction limiting portion that is movable in the extension direction of the rotation shaft relative to the floating portion, The floating portion is a first groove portion including one or more first grooves extending in the first direction; a plurality of balls disposed in the first groove portion, The floating direction restriction unit is a second groove portion including one or more second grooves having an annular or arcuate shape centered on the rotation axis; When the floating direction restricting portion is moved in a direction approaching the first groove portion, the plurality of balls arranged in the first groove portion fit into the second groove portion, and movement of the floating portion in the second direction is restricted. A floating unit characterized by:

3. a floating portion movable in a direction around a rotation axis, a first direction perpendicular to the rotation axis, and a second direction perpendicular to both the rotation axis and the first direction; a floating direction limiting portion that is movable in the extension direction of the rotation shaft relative to the floating portion, The floating portion is a first groove portion including one or more first grooves extending in the first direction; a plurality of balls disposed in the first groove portion, The floating direction restriction unit is a second groove portion including one or more second grooves extending in the second direction; When the floating direction restricting portion is moved in a direction approaching the first groove portion, the plurality of balls arranged in the first groove portion fit into the second groove portion, and movement of the floating portion in a direction around the rotation axis is restricted. A floating unit characterized by:

4. a floating portion movable in a direction around a rotation axis, a first direction perpendicular to the rotation axis, and a second direction perpendicular to both the rotation axis and the first direction; a floating direction limiting portion that is movable in the extension direction of the rotation shaft relative to the floating portion, The floating portion is a first groove portion including one or more annular or arcuate first grooves centered on the rotation axis; a plurality of balls disposed in the first groove portion, The floating direction restriction unit is a second groove portion including one or more second grooves having an annular or arcuate shape centered on the rotation axis; When the floating direction restricting portion is moved in a direction approaching the first groove portion, the plurality of balls arranged in the first groove portion fit into the second groove portion, and movement of the floating portion in each of the first direction and the second direction is restricted. A floating unit characterized by:

5. The floating portion is a holding portion that rotatably holds the plurality of balls arranged in the first groove portion; 5. The floating unit according to claim 1, wherein the floating unit is a floating unit.

6. a first engaging portion movable in an extending direction of the rotation shaft; The floating portion is a second engaging portion that engages with the first engaging portion when the first engaging portion moves in an extension direction of the rotation shaft; The engagement between the first engaging portion and the second engaging portion restricts movement of the floating portion in each of the first direction and the second direction.

5. The floating unit according to claim 1, wherein the floating unit is a floating unit.

7. The engagement between the first engaging portion and the second engaging portion restricts movement of the floating portion in each of the direction around the rotation axis, the first direction, and the second direction.

7. The floating unit according to claim 6, wherein the floating unit is a floating unit.

8. A first magnetic body is provided, The floating portion is a second magnetic body provided at a position facing the first magnetic body and having a magnetic polarity different from that of the first magnetic body; The floating portion is returned to the origin position in each of the direction of the rotation axis, the first direction, and the second direction by the attraction force between the first magnetic body and the second magnetic body.

5. The floating unit according to claim 1, wherein the floating unit is a floating unit.

9. The second groove portion is The second groove is provided in plurality. The plurality of second grooves are The first and second electrodes extend in the first direction and are arranged side by side in the second direction.

2. The floating unit according to claim 1, wherein the floating unit comprises:

10. The second direction is a direction perpendicular to the direction in which the connecting object held by the holding unit attached to the floating portion is connected to the connecting object; 5. The floating unit according to claim 1, wherein the floating unit is a floating unit.

11. The second direction is The connecting direction of the connecting object held by the holding unit attached to the floating portion to the connecting object.

5. The floating unit according to claim 1, wherein the floating unit is a floating unit.

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