Electronic component manufacturing apparatus and electronic component manufacturing method

Abstract

To efficiently disperse a plurality of beads in a container.SOLUTION: An electronic component manufacturing apparatus 1 comprises a cylindrical container 10, an input port 40, an extraction port 50, a shaft part 70 and a plurality of stirring elements 80. The container 10 has a shaft center C extending in a first direction. The input port 40 is positioned at a first end part 11 side in the first direction of the container 10, through which slurry 2 can be put into the container 10. The extraction port 50 is positioned at a second end part 12 side at the opposite side of the first end part 11 in the first direction of the container 10, through which slurry 2 can be extracted from the inside of the container 10. The shaft part 70 is arranged inside the container 10, which extends in the first direction and can rotate with the first direction as a shaft center. The plurality of stirring elements 80 extend in a direction crossing the first direction from the shaft part 70 and can rotate together with the shaft part 70. A convex-shape or a concave-shape spiral part 130 that extends in the first direction while rotating with the shaft center C as a center is formed on an inner peripheral surface 111 of the container 10.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an apparatus for manufacturing electronic components and a method for manufacturing electronic components. [Background technology]

[0002] A prior art document disclosing the configuration of a bead mill that can be used as a manufacturing device for electronic components is Utility Model Registration No. 3217671 (Patent Document 1). The bead mill described in Patent Document 1 comprises a cylindrical container and a stirrer. The bead mill stirs hard particles (beads) by rotating the stirrer inside the cylindrical container. This pulverizes the particles in a suspension (slurry) of solid particles. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Utility Model Registration No. 3217671 Summary of the Invention [Problem to be solved by the invention]

[0004] In the bead mill described in Patent Document 1, there is a possibility that a plurality of beads may remain at a specific location in the container, making it difficult for the plurality of beads to disperse in the container.

[0005] The present invention has been made in consideration of the above-mentioned problems, and aims to provide an electronic component manufacturing apparatus and an electronic component manufacturing method that can efficiently disperse multiple beads in a container. [Means for solving the problem]

[0006] An electronic component manufacturing apparatus according to the present invention includes a cylindrical container, an inlet, an outlet, a shaft, and multiple stirring bars. The container has an axis extending in a first direction. The inlet is located at a first end of the container in the first direction, and allows slurry to be introduced into the container. The outlet is located at a second end of the container opposite the first end in the first direction, and allows slurry to be removed from the container. The shaft is disposed inside the container, extends in the first direction, and is rotatable around the first direction. The multiple stirring bars extend from the shaft in a direction intersecting the first direction and are rotatable together with the shaft. A convex or concave spiral portion is formed on the inner circumferential surface of the container, rotating around the axis and extending in the first direction.

[0007] A method for manufacturing electronic components according to the present invention includes the steps of: pouring a slurry into a container; stirring the slurry together with a plurality of beads by rotating a shaft and a plurality of stirrers extending from the shaft, which are disposed inside the container; and removing the slurry from the container. The inner peripheral surface of the container is formed with a convex or concave spiral portion that rotates around the axis of the container and extends along the axis, so that at least some of the beads are caused to flow within the container in a direction along the axis during stirring by the spiral portion. [Effects of the Invention]

[0008] According to the present invention, the structure of the device allows for efficient dispersion of multiple beads. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a partial cross-sectional view showing the configuration of an electronic component manufacturing apparatus according to a first embodiment of the present invention. [Figure 2] 1 is a schematic diagram showing the configuration of a container provided in an electronic component manufacturing apparatus according to a first embodiment of the present invention. [Figure 3] 1 is a schematic diagram showing a state in which a plurality of beads are caused to flow by a plurality of stirring bars provided in the electronic component manufacturing apparatus according to the first embodiment of the present invention. [Figure 4] 1 is a schematic diagram showing a state in which a plurality of beads flow on the inner circumferential surface of a container provided in the electronic component manufacturing apparatus according to the first embodiment of the present invention. [Figure 5] 5 is a cross-sectional view of the container of FIG. 4 as seen from the direction of the arrow VV. [Figure 6] 3 is a flowchart showing a method for manufacturing an electronic component according to the first embodiment of the present invention. [Figure 7] FIG. 10 is a cross-sectional view showing the configuration of a container provided in an electronic component manufacturing apparatus according to a second embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, an electronic component manufacturing apparatus and an electronic component manufacturing method according to each embodiment of the present invention will be described with reference to the drawings. In the following description of the embodiments, the same or corresponding parts in the drawings will be given the same reference numerals, and the description thereof will not be repeated.

[0011] In the drawings, an arbitrary direction perpendicular to a first direction in which the axis of a container provided in the electronic component manufacturing apparatus extends is defined as the X direction, a direction perpendicular to the first direction and the X direction is defined as the Y direction, and the first direction is defined as the Z direction.

[0012] (Embodiment 1) FIG. 1 is a partial cross-sectional view showing the configuration of an electronic component manufacturing apparatus according to a first embodiment of the present invention.

[0013] The electronic component manufacturing apparatus 1 in this embodiment is an apparatus that pulverizes particles in a slurry by stirring a plurality of hard particles (beads) together with a suspension of solid particles (slurry) inside the apparatus. The electronic component manufacturing apparatus 1 in this embodiment is a so-called bead mill.

[0014] The slurry 2 processed by the electronic component manufacturing apparatus 1 is, for example, a ceramic slurry. The ceramic slurry is mainly used for ceramic capacitors. The ceramic slurry contains ceramic particles, a binder, a dispersant, an organic solvent, and the like.

[0015] As shown in FIG. 1, the electronic component manufacturing apparatus 1 according to the first embodiment of the present invention includes a cylindrical container 10, a lower cover 20, an upper cover 30, an inlet 40, an outlet 50, a plurality of beads 60, a shaft 70, a plurality of stirring bars 80, and a separator 90.

[0016] The container 10 is cylindrical. The container 10 in this embodiment is cylindrical. However, the container 10 is not limited to a cylindrical shape, and may have other shapes such as an elliptical shape.

[0017] The container 10 has an axis C extending in a first direction (Z direction). In this embodiment, the first direction (Z direction) is the vertical direction. However, the first direction (Z direction) may also be the horizontal direction.

[0018] The container 10 is capable of containing the slurry 2. When the container 10 has an axis C in the vertical direction, the contents (slurry, etc.) are filled in the container 10 from the bottom to the top.

[0019] The capacity of the vessel 10 is changed appropriately according to the processing amount of the slurry 2. The inner diameter of the vessel 10 is, for example, 0.3 m or more and 1.0 m or less. The height of the vessel 10 in the first direction (Z direction) is, for example, 0.5 m or more and 1.5 m or less.

[0020] The container 10 has a double structure that allows cooling water 3 to flow around the circumferential surface of the container 10. The container 10 has an outer wall portion 100, an inner wall portion 110, and a cooling water flow path 120.

[0021] The outer wall portion 100 is located outside the container 10. The outer wall portion 100 is cylindrical. The inner wall portion 110 is located inside the container 10. The inner wall portion 110 is cylindrical. The inner wall portion 110 is disposed at a distance from the outer wall portion 100 in the X direction and the Y direction. A cooling water flow path 120 is formed between the outer wall portion 100 and the inner wall portion 110. The slurry 2 can be cooled by cooling water 3 flowing through the cooling water flow path 120.

[0022] Cooling water flow ports 101 are provided in the outer wall portion 100. A pair of cooling water flow ports 101 are provided above and below the outer wall portion 100 in the Z direction. The cooling water 3 is introduced into the cooling water flow path 120 from one cooling water flow port 101 and discharged from the other cooling water flow port 101. This allows the cooling water 3 to flow through the cooling water flow path 120 in the Z direction and in the circumferential direction of the Z direction.

[0023] In this embodiment, the inner wall portion 110 is rotatable about an axis in the first direction (Z direction). A spiral portion 130 is formed on an inner circumferential surface 111 of the inner wall portion 110. Details of the inner wall portion 110 and the spiral portion 130 will be described later.

[0024] The lower cover 20 is connected to the first end 11 of the container 10. A first pulley 21 is disposed inside the lower cover 20. The first pulley 21 is connected to a shaft 70. The first pulley 21 is rotatable in the circumferential direction, that is, the Z direction. A first belt 22 is wound around the first pulley 21. The first belt 22 is connected to the first pulley 21 and a first motor 23. When the first motor 23 is driven, the first pulley 21 can rotate via the first belt 22. This allows the shaft 70 to rotate together with the first pulley 21. The shaft 70 may extend to the separator 90.

[0025] The upper cover 30 is connected to the second end 12 of the container 10. A second pulley 31 is disposed inside the upper cover 30. The second pulley 31 is connected to the separator 90. The second pulley 31 is rotatable in the circumferential direction, that is, the Z direction. A second belt 32 is wound around the second pulley 31. The second belt 32 is connected to the second pulley 31 and a second motor 33. When the second motor 33 is driven, the second pulley 31 can rotate via the second belt 32. This allows the separator 90 to rotate together with the second pulley 31.

[0026] The inlet 40 allows the slurry 2 to be introduced into the container 10. The inlet 40 is located on the first end 11 side of the container 10 in the first direction (Z direction). In this embodiment, the inlet 40 is located at the first end 11. The location of the inlet 40 is not limited to the first end 11. The inlet 40 may be located at any position around the first end 11 of the container 10 in the first direction (Z direction).

[0027] The outlet 50 allows the slurry 2 to be taken out from inside the container 10. The outlet 50 is located on the second end 12 side of the container 10, opposite the first end 11 in the first direction (Z direction). In this embodiment, the outlet 50 is located at the second end 12. The location of the outlet 50 is not limited to the second end 12. The outlet 50 may be located at any position around the second end 12 in the first direction (Z direction) of the container 10.

[0028] A plurality of beads 60 are housed inside the container 10. The plurality of beads 60 are spheres made of zirconia or resin. The diameter of each of the plurality of beads 60 is, for example, 0.3 μm or more and 1.0 mm or less. However, the particle diameter of each of the plurality of beads 60 is not limited to 0.3 μm or more and 1.0 mm or less.

[0029] The shaft portion 70 is disposed inside the container 10. The shaft portion 70 extends in a first direction (Z direction). The shaft portion 70 is rotatable around an axis in the first direction (Z direction).

[0030] The multiple stirring bars 80 extend from the shaft 70 in a direction intersecting the first direction. In this embodiment, the multiple stirring bars 80 extend from the shaft 70 in a direction perpendicular to the first direction (any direction on the XY plane). The multiple stirring bars 80 are rotatable together with the shaft 70 so as to stir the slurry 2 together with the multiple beads 60.

[0031] The separator 90 is disposed inside the container 10. The separator 90 is located closer to the second end 12 than the shaft portion 70 in the first direction (Z direction). The separator 90 is provided just before the outlet 50 in the flow of the slurry 2 inside the container 10.

[0032] Separator 90 has blade portion 91 and two disk members 92. Blade portion 91 extends radially and curvedly from the center of separator 90. Two disk members 92 sandwich blade portion 91 in the Z direction.

[0033] The separator 90 is rotatable around an axis in a first direction (Z direction). When the separator 90 rotates, centrifugal force is applied to the slurry 2 and the plurality of beads 60 in the XY plane facing the separator 90. This centrifugal force presses the plurality of beads 60 mixed in the slurry 2 against the inner circumferential surface 111 of the container 10. This separates the plurality of beads 60 from the slurry 2. The rotation speeds of the separator 90 and the plurality of stirrers 80 may be the same or different.

[0034] Fig. 2 is a schematic diagram showing the configuration of a container provided in the electronic component manufacturing apparatus according to embodiment 1 of the present invention. In Fig. 2, to facilitate understanding of the invention, only inner wall portion 110 of container 10 is shown, and spiral portion 130 is shown by a solid line regardless of whether it should be shown by a hidden line.

[0035] 1 and 2, the spiral portion 130 extends in a first direction (Z direction) on the inner circumferential surface 111 of the container 10 while rotating around the axis C. The spiral portion 130 is convex or concave. In this embodiment, the spiral portion 130 is a spiral groove that is concave in the direction away from the axis C.

[0036] The spiral portion 130 is formed so as to rotate in the first direction (Z direction) of the inner wall portion 110 in a range of two or more turns and three or less turns, for example.

[0037] The spiral portion 130 is disposed in the first direction (Z direction) at least from a position corresponding to the separator 90 toward the first end 11. This makes it easier for the beads 60 to flow from the spiral portion 130 toward the first end 11 when the separator 90 separates the beads 60, thereby preventing the beads 60 from entering downstream of the separator 90.

[0038] The radial depth of the spiral portion 130 about the axis C of the container 10 may be deep enough to accommodate a plurality of beads 60. The depth of the spiral portion 130 is, for example, not less than 0.1 μm and not more than 1.2 mm.

[0039] The width of the spiral portion 130 in the first direction may be such that the plurality of beads 60 can fit in. The width of the spiral portion 130 is, for example, 80% to 120% of the particle diameter of the plurality of beads 60.

[0040] The depth or width of the spiral portion 130 does not have to be such that the entirety of each particle of the plurality of beads 60 enters the inside of the spiral portion 130. The depth or width of the spiral portion 130 only needs to be configured so that the plurality of beads 60 can flow within the container 10 along the spiral portion 130.

[0041] The direction of rotation of the spiral portion 130 can be either clockwise or counterclockwise around the axis C of the container 10. The direction of rotation of the spiral portion 130 is formed to match the direction of rotation of the shaft portion 70 and the plurality of stirrers 80.

[0042] For example, when viewed from the first end 11 side toward the second end 12 side in the first direction (Z direction), if the shaft portion 70 and the plurality of stirring bars 80 rotate clockwise, the spiral portion 130 is formed to rotate counterclockwise from the first end 11 side toward the second end 12 side. On the other hand, when viewed from the first end 11 side toward the second end 12 side in the first direction (Z direction), if the shaft portion 70 and the plurality of stirring bars 80 rotate counterclockwise, the spiral portion 130 is formed to rotate clockwise from the first end 11 side toward the second end 12 side.

[0043] The plurality of beads 60 can flow inside the container 10 along the spiral portion 130. By forming the spiral portion 130, it is possible to configure the plurality of beads 60 to flow toward the first end 11 when the plurality of beads 60 come into contact with or enter the inside of the spiral portion 130.

[0044] The container 10 is configured to be rotatable about an axis C. In this embodiment, the inner wall portion 110 of the container 10 is configured to be rotatable about the axis C. The inner wall portion 110 can be rotated by a motor (not shown) independently of the shaft portion 70, the separator 90, the outer wall portion 100, and the like. This promotes the flow of the beads 60 inside the spiral portion 130 when the beads 60 enter the spiral portion 130. Note that the container 10 does not have to be configured to be rotatable about the axis C.

[0045] The rotation speed or direction of the inner wall 110 of the container 10 is not particularly limited. The rotation speed of the inner wall 110 of the container 10 may be the same as or slower than the rotation speed of the shaft 70. It is preferable that the rotation direction of the inner wall 110 of the container 10 is different from the rotation direction of the shaft 70.

[0046] FIG. 3 is a schematic diagram showing a state in which a plurality of beads are caused to flow by a plurality of stirrers provided in the electronic component manufacturing apparatus according to the first embodiment of the present invention.

[0047] The shaft portion 70 is divided into at least two parts in the first direction (Z direction). In this embodiment, the shaft portion 70 is divided into three parts.

[0048] The shaft portion 70 has a first shaft portion 71, a second shaft portion 72, and a third shaft portion 73. The first shaft portion 71, the second shaft portion 72, and the third shaft portion 73 can each rotate at a different speed.

[0049] The plurality of stirrers 80 includes a first stirrer 81 and a second stirrer 82. The plurality of stirrers 80 in this embodiment further includes a third stirrer, a fourth stirrer, and a fifth stirrer 85.

[0050] The plurality of stirring bars 80 (first to fifth stirring bars 81 to 85) are arranged in order at intervals from one another along the first direction (Z direction).

[0051] A first stirring bar 81 is connected to the first shaft portion 71. A second stirring bar 82, a third stirring bar, and a fourth stirring bar are connected to the second shaft portion 72. A fifth stirring bar 85 is connected to the third shaft portion 73.

[0052] Each of the plurality of stirring bars 80 (first to fifth stirring bars 81 to 85) has at least one stirring portion extending from the shaft portion 70 in the circumferential direction in the first direction (Z direction).

[0053] First stirring bar 81 has, as stirring parts, four first stirring parts 181 lined up in the circumferential direction in the first direction (Z direction). The thickness of each of the four first stirring parts 181 in a cross-sectional view seen from the extending direction is, for example, 10 mm or more and 20 mm or less. The length of each of the four first stirring parts 181 in the extending direction is, for example, 100 mm or more and 400 mm or less.

[0054] The four first stirring parts 181 have a cylindrical shape in a cross section seen from the extending direction. Note that the shape of each stirring part is not limited to a cylindrical shape. Each stirring part may have an elliptical shape, a rectangular shape, or any other shape.

[0055] The second stirring bar 82 has, as stirring parts, four second stirring parts 182 lined up in the circumferential direction in the first direction (Z direction). The thickness of each of the four second stirring parts 182 in a cross-sectional view seen from the extending direction is, for example, 10 mm or more and 20 mm or less. The length of each of the four second stirring parts 182 in the extending direction is, for example, 100 mm or more and 400 mm or less. The shape of the four second stirring parts 182 is the same as that of the first stirring part 181.

[0056] The third, fourth and fifth stirrers 85 have four stirrers arranged in the circumferential direction of the first direction (Z direction), similar to the first stirrer 81 and second stirrer 82. The four stirrers in the third, fourth and fifth stirrers 85 are similar to those in the first stirrer 181.

[0057] In this embodiment, the rotation speed of first shaft 71 is slower than the rotation speeds of second shaft 72 and third shaft 73. When the rotation speed of first stirrer 81 is slower than the rotation speed of second stirrer 82, the amount of fluid stirred by the stirring section decreases, and the stirring force decreases. Therefore, first stirrer 81 has a lower stirring force than second stirrer 82.

[0058] As a result, the slurry 2 being stirred in the area around the first stirrer 81 connected to the first shaft portion 71 is in a lower pressure state (a state in which the flow of the slurry is smaller) than the slurry 2 being stirred in the areas around the second to fifth stirrers 82 to 85 connected to the second shaft portion 72 and the third shaft portion 73.

[0059] Generally, a fluid flows from a region of high pressure to a region of low pressure. Therefore, the plurality of beads 60 mixed in the slurry 2 tend to gather around the first stirrer 81, which makes it easier to separate the plurality of beads 60 from the slurry 2. In this embodiment, the low-pressure region is formed by changing the rotation speed of each of the plurality of stirrers 80, but this configuration is not limiting. The low-pressure region may also be formed by reducing the size or length of the plurality of stirrers 80, for example.

[0060] In this embodiment, the thickness or length of the stirring parts is the same, but this is not limitative and they may be different from each other.

[0061] The flow of the slurry 2 and the plurality of beads 60 inside the vessel 10 will now be described.

[0062] FIG. 4 is a schematic diagram showing a state in which a plurality of beads flow on the inner circumferential surface of a container provided in the electronic component manufacturing apparatus according to the first embodiment of the present invention.

[0063] 3 and 4, the shaft 70 and the plurality of stirring bars 80 rotate in one direction in the circumferential direction of the shaft center when viewed in the first direction (Z direction) from the first end 11 side toward the second end 12 side. In this embodiment, the shaft 70 and the plurality of stirring bars 80 rotate clockwise (DR1 direction) in the circumferential direction of the shaft center when viewed in the first direction (Z direction) from the first end 11 side toward the second end 12 side.

[0064] As the shaft 70 and the plurality of stirring bars 80 rotate in the DR1 direction, the slurry 2 and the plurality of beads 60 flow within the container 10 so as to rotate in a direction along the DR1 direction. The plurality of beads 60 are subjected to a force that rotates them in the circumferential direction in the first direction (Z direction), while also being subjected to a centrifugal force about the axis C of the container 10. Therefore, the plurality of beads 60 flow in the circumferential direction in the first direction (Z direction), while also flowing in a direction away from the axis C (the DR2 direction in FIG. 3).

[0065] The beads 60 flowing in association with the rotation of the stirrers 80 come into contact with the inner wall 110 of the container 10. As a result, at least a portion of the beads 60 enters the concave spiral portion 130.

[0066] The spiral portion 130 is provided on the inner circumferential surface 111 so as to rotate in the opposite direction to the one direction (DR1 direction) and extend from the first end 11 side to the second end 12 side in the first direction (Z direction). The spiral portion 130 in this embodiment is provided on the inner circumferential surface 111 so as to rotate counterclockwise (DR3 direction in FIG. 4) when viewed from the direction from the first end 11 side to the second end 12 side in the first direction (Z direction).

[0067] If the spiral portion 130 were not provided on the inner wall 110 of the container 10, the beads 60 stirred by the stirrers 80 would rotate in the circumferential direction of the first direction (Z direction) on the same XY plane while being pressed against the XY plane perpendicular to the first direction (Z direction) of the inner wall 110. For this reason, the beads 60 may not be sufficiently dispersed in the first direction (Z direction) inside the container 10.

[0068] On the other hand, in this embodiment, the beads 60 that have entered the spiral portion 130 flow along the spiral portion 130, thereby smoothly flowing in the circumferential direction of the first direction (Z direction) and along the first direction (along the DR4 direction in FIG. 4). Therefore, the beads 60 can not only flow rotationally on the XY plane, but also flow in the first direction (Z direction). As a result, the beads 60 are efficiently dispersed within the container 10.

[0069] Furthermore, in this embodiment, the plurality of beads 60 flow along the spiral portion 130 toward the first end 11 in the first direction (Z direction). This makes it difficult for the plurality of beads 60 to reach the second end 12 where the outlet 50 is located, thereby preventing the plurality of beads 60 from flowing out of the container 10 to a subsequent process.

[0070] Furthermore, the separator 90 presses the plurality of beads 60 mixed in the slurry 2 against the inner circumferential surface 111 of the container 10 by the centrifugal force it generates. The spiral portion 130 is also provided on the inner wall portion 110 on the XY plane facing the separator 90. Therefore, the plurality of beads 60 pressed by the separator 90 can enter the spiral portion 130, similar to the plurality of beads 60 that flow with the rotation of the plurality of stirrers 80. As a result, the plurality of beads 60 are dispersed within the container 10 and flow toward the first end 11 in the first direction (Z direction) in the first direction, thereby preventing the plurality of beads 60 from flowing out of the container 10 to a subsequent process.

[0071] Fig. 5 is a cross-sectional view of the container of Fig. 4 as seen from the direction of the arrows VV. As shown in Fig. 4 and Fig. 5, the spiral portion 130 has a slope 132 at the end 131 on the first end 11 side.

[0072] The beads 60 flow along the spiral portion 130, and when released from the spiral portion 130, they are released along the slope 132. This causes the beads 60 to flow in a direction approaching the shaft portion 70. The beads 60 released toward the shaft portion 70 are stirred by the stirrers 80, so that the beads 60 can be efficiently dispersed within the container 10.

[0073] If the spiral portion 130 is interrupted at any position in the first direction (Z direction) of the container 10, the beads 60 can be relocated to any position in the first direction (Z direction), thereby dispersing the beads 60 more efficiently. Note that the end of the spiral portion 130 on the first end 11 side may be disposed up to the first end 11. Also, the spiral portion 130 may be provided over the entire height of the inner wall portion 110 of the container 10.

[0074] The method for manufacturing the electronic component will be described below: Fig. 6 is a flowchart showing the method for manufacturing the electronic component according to the first embodiment of the present invention.

[0075] 1 and 6, in the method for manufacturing an electronic component according to the first embodiment of the present invention, first, slurry 2 is poured into container 10 through inlet 40 (S1). A plurality of beads 60 are placed inside container 10 in advance. Inside container 10, slurry 2 and the plurality of beads 60 are mixed together. Even while slurry 2 and the plurality of beads 60 are being stirred, slurry 2 continues to be poured continuously.

[0076] Next, the shaft 70 and the plurality of stirring bars 80 extending from the shaft 70, which are disposed inside the container 10, rotate to stir the slurry 2 together with the plurality of beads 60 (S2). The stirring time is, for example, two hours or more. As a result of the stirring, the plurality of beads 60 collide with particles in the slurry 2, pulverizing the particles.

[0077] When the slurry 2 is stirred together with the plurality of beads 60, at least some of the plurality of beads 60 are caused to flow within the container 10 in a direction along the axis C by the spiral portion 130 (S3). In this embodiment, at least some of the plurality of beads 60 flow along the spiral portion 130, thereby flowing toward the first end 11 within the container 10.

[0078] Next, the plurality of beads 60 are separated from the slurry 2 by the separator 90 (S4). The plurality of beads 60 are subjected to centrifugal force by the separator 90, and flow from the axial center C toward the inner circumferential surface 111 of the container 10. At this time, the plurality of beads 60 enter the spiral portion 130 arranged on the inner wall portion 110. At least a portion of the plurality of beads 60 flow along the spiral portion 130, and are thereby caused to flow toward the first end 11 inside the container 10.

[0079] Next, the slurry 2 inside the container 10 is taken out (S5). The slurry 2 is discharged from the outlet 50 to a subsequent process. Thereafter, the slurry 2 is completed. Note that a filter may be provided after the outlet 50 to remove a plurality of beads 60 from the slurry 2.

[0080] In electronic component manufacturing apparatus 1 according to the first embodiment of the present invention, a concave spiral portion 130 is formed on inner circumferential surface 111 of container 10, rotating about axis C and extending in a first direction (Z direction). At least a portion of beads 60 are aligned along spiral portion 130, which allows at least a portion of beads 60 to flow in the first direction (Z direction), thereby efficiently dispersing beads 60 within container 10. Consequently, slurry 2 can be efficiently stirred.

[0081] In electronic component manufacturing apparatus 1 according to the first embodiment of the present invention, container 10 is configured to be rotatable about axis C. When beads 60 are caused to flow along concave spiral portion 130, beads 60 that have entered spiral portion 130 can be made to flow more easily along spiral portion 130, making it easier to disperse beads 60 within container 10.

[0082] In electronic component manufacturing apparatus 1 according to embodiment 1 of the present invention, when viewed in a direction from first end 11 toward second end 12 in a first direction (Z direction), shaft portion 70 and multiple stirring bars 80 rotate in one direction circumferentially around the axis, and spiral portion 130 is provided on inner circumferential surface 111 so as to rotate in the opposite direction from the one direction while moving from first end 11 toward second end 12 in the first direction (Z direction). This allows the multiple beads 60 that have entered spiral portion 130 to flow toward first end 11 in container 10 when slurry 2 is stirred. As a result, it is possible to prevent the multiple beads 60 used in the pulverization process of slurry 2 from being discharged to a subsequent process through outlet 50 located on second end 12.

[0083] In the method for manufacturing an electronic component according to the first embodiment of the present invention, a concave spiral portion 130 is formed on the inner surface 111 of the container 10, which rotates around the axis C of the container 10 and extends along the axis C. This allows at least a portion of the beads 60 to flow within the container 10 in a direction along the axis C during stirring, thereby enabling the beads 60 to be efficiently dispersed within the container 10.

[0084] (Embodiment 2) An electronic component manufacturing apparatus and an electronic component manufacturing method according to a second embodiment of the present invention will be described below with reference to the drawings. The electronic component manufacturing apparatus and the electronic component manufacturing method according to the second embodiment of the present invention differ in the configuration of the container from the electronic component manufacturing apparatus 1 and the electronic component manufacturing method according to the first embodiment of the present invention, and therefore, the description of the configuration that is the same as the electronic component manufacturing apparatus 1 and the electronic component manufacturing method according to the first embodiment of the present invention will not be repeated.

[0085] FIG. 7 is a cross-sectional view showing the configuration of a container provided in an electronic component manufacturing apparatus according to a second embodiment of the present invention.

[0086] As shown in FIG. 7, a spiral portion 130A is provided on inner wall portion 110A of container 10A included in electronic component manufacturing apparatus 1A according to the second embodiment of the present invention.

[0087] The spiral portion 130A extends in a first direction (Z direction) on the inner circumferential surface 111A of the container 10 while rotating around the axis C. The spiral portion 130A in this embodiment is a spiral protrusion that becomes convex in a direction approaching the axis C.

[0088] The beads 60 can flow along the side surfaces of the protruding portions of the convex spiral portion 130A. When the slurry and the beads 60 are stirred in the method for manufacturing electronic components, the beads 60 can not only flow rotationally on the XY plane but also flow in the first direction (Z direction). As a result, the beads 60 are efficiently dispersed within the container 10.

[0089] In the electronic component manufacturing apparatus 1A and electronic component manufacturing method according to embodiment 2 of the present invention, multiple beads 60 can be caused to flow along the convex spiral portion 130A on the XY plane and in the first direction (Z direction), thereby efficiently dispersing multiple beads 60 within the container 10A.

[0090] The number of spiral portions per container 10 is not limited to one, and multiple spiral portions may be provided. The number of spiral portions can be changed appropriately according to the number of beads. When multiple spiral portions are provided, the positions of the ends of each spiral portion in the first direction (Z direction) can be made different, thereby adjusting the positions at which the beads are dispersed along the spiral portion, and thus the beads can be dispersed more efficiently.

[0091] In the above-described embodiment, the first shaft portion 71, the second shaft portion 72, and the third shaft portion 73 of the shaft portion 70 rotate in the same direction, but this configuration is not limited thereto. The first shaft portion 71, the second shaft portion 72, and the third shaft portion 73 may rotate in different directions. However, it is desirable to set the rotation conditions of each shaft portion so that the beads 60 can easily enter the spiral portion 130.

[0092] [Note] <1> a cylindrical container having an axis extending in a first direction; an inlet located on a first end side of the container in the first direction and capable of injecting a slurry into the container; an outlet located at a second end of the container opposite to the first end in the first direction, the outlet being capable of removing the slurry from the container; a shaft portion disposed inside the container, extending in the first direction, and rotatable about an axis in the first direction; a plurality of stirring bars extending from the shaft portion in a direction intersecting the first direction and rotatable together with the shaft portion so as to stir the slurry together with the plurality of beads; An electronic component manufacturing apparatus, wherein a convex or concave spiral portion that extends in the first direction while rotating around the axis is formed on the inner peripheral surface of the container.

[0093] <2> The container is configured to be rotatable around the axis. <1> The manufacturing apparatus for the electronic component according to claim 1.

[0094] <3> When viewed from a direction from the first end side toward the second end side in the first direction, The shaft portion and the plurality of stirring bars rotate in one direction in the circumferential direction of the shaft center, The spiral portion is provided on the inner circumferential surface so as to rotate in a direction opposite to the one direction and extend from the first end side to the second end side in the first direction. <1> or <2> The manufacturing apparatus for the electronic component according to claim 1.

[0095] <4> The plurality of stirring bars are rotatable with the shaft portion so as to stir the slurry together with the plurality of beads. <1> from <3> 10. The electronic component manufacturing apparatus according to claim 9, wherein the first and second electrodes are connected to the first and second electrodes.

[0096] <5> introducing a slurry into a vessel; agitating the slurry together with the plurality of beads by rotating a shaft portion and a plurality of stirrers extending from the shaft portion, which are disposed inside the container; and removing the slurry from the container. A method for manufacturing electronic components, wherein a convex or concave spiral portion is formed on the inner surface of the container, rotating around the axis of the container and extending along the axis, so that during stirring, at least some of the plurality of beads are caused to flow within the container in a direction along the axis by the spiral portion.

[0097] In the above-described embodiments, configurations that can be combined may be combined with each other.

[0098] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the above description, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0099] 1, 1A Electronic component manufacturing apparatus, 2 Slurry, 3 Cooling water, 10, 10A Container, 11 First end, 12 Second end, 20 Lower cover, 21 First pulley, 22 First belt, 23 First motor, 30 Upper cover, 31 Second pulley, 32 Second belt, 33 Second motor, 40 Inlet, 50 Outlet, 60 Plurality of beads, 70 Shaft portion, 71 First shaft portion, 72 Second shaft portion, 73 Third shaft portion, 80 Plurality of stirrers, 81 First stirrer, 82 Second stirrer, 85 Fifth stirrer, 90 Separator, 91 Blade portion, 92 Disk member, 100 Outer wall portion, 101 Cooling water flow port, 110, 110A Inner wall portion, 111, 111A Inner peripheral surface, 120 Cooling water flow path, 130, 130A Spiral portion, 131 end, 132 slope, 181 first stirring portion, 182 second stirring portion, C axis.

Claims

1. a cylindrical container having an axis extending in a first direction; an inlet located on a first end side of the container in the first direction and capable of injecting a slurry into the container; an outlet located at a second end of the container opposite to the first end in the first direction, the outlet being capable of removing the slurry from the container; a shaft portion that is disposed inside the container, extends in the first direction, and is rotatable around an axis that is in the first direction; a plurality of stirrers extending from the shaft portion in a direction intersecting the first direction and rotatable together with the shaft portion so as to stir the slurry together with the plurality of beads; An electronic component manufacturing apparatus, wherein a convex or concave spiral portion that extends in the first direction while rotating around the axis is formed on the inner peripheral surface of the container.

2. 2. The electronic component manufacturing apparatus according to claim 1, wherein the container is configured to be rotatable about the axis.

3. When viewed from a direction from the first end side toward the second end side in the first direction, The shaft portion and the plurality of stirring bars rotate in one direction in the circumferential direction of the shaft center, 3. The electronic component manufacturing apparatus according to claim 1, wherein the spiral portion is provided on the inner circumferential surface so as to rotate in a direction opposite to the one direction and extend from the first end side to the second end side in the first direction.

4. 3. The electronic component manufacturing apparatus according to claim 1, wherein the plurality of stirring bars are rotatable together with the shaft portion so as to stir the slurry together with the plurality of beads.

5. introducing a slurry into a vessel; agitating the slurry together with the plurality of beads by rotating a shaft portion and a plurality of stirrers extending from the shaft portion, which are disposed inside the container; and removing the slurry from the container. A method for manufacturing electronic components, wherein a convex or concave spiral portion is formed on the inner surface of the container, rotating around the axis of the container and extending along the axis, so that during stirring, at least some of the plurality of beads are caused to flow within the container in a direction along the axis by the spiral portion.

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