Electronic component manufacturing apparatus

Abstract

To enable beads to be easily separated from slurry.SOLUTION: An electronic component manufacturing apparatus comprises a cylindrical container 10, a shaft part 70 and a plurality of stirring elements 80. The container 10 has a shaft center extending in a first direction, in which slurry can be stored. The shaft part 70 is arranged inside the container 10, which extends in the first direction and can rotate with the first direction as a shaft center. The plurality of stirring elements 80 respectively have at least one stirring parts extending in an in-plane direction crossing the first direction from the shaft part 70 and can rotate together with the shaft part 70 so as to stir slurry together with a plurality of beads 60. In the plurality of stirring elements 80, the stirring elements are arranged one by one with an interval from each other in the first direction. The plurality of stirring elements 80 include a first stirring element 81 and a second stirring element 82 arranged adjacently to each other in the first direction. The first stirring element 81 has stirring force lower than stirring force of the second stirring element 82.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to an apparatus for manufacturing electronic components. [Background technology]

[0002] A prior art document disclosing the configuration of a bead mill that can be used as a manufacturing device for electronic components is Utility Model Registration No. 3217671 (Patent Document 1). The bead mill described in Patent Document 1 includes a cylindrical container and a stirrer. The bead mill stirs hard particles (beads) by rotating the stirrer inside the cylindrical container. This pulverizes the particles in a suspension (slurry) of solid particles. The beads are then separated from the slurry. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Utility Model Registration No. 3217671 Summary of the Invention [Problem to be solved by the invention]

[0004] As multilayer ceramic capacitors become smaller, the particles of the ceramic slurry are being made finer, and the beads used to grind the ceramic slurry are also being made finer. In the bead mill described in Patent Document 1, as the beads become finer, it may become difficult to separate the beads from the slurry.

[0005] The present invention has been made in view of the above problems, and has an object to provide an electronic component manufacturing apparatus that can easily separate beads from a slurry. [Means for solving the problem]

[0006] An electronic component manufacturing apparatus according to the present invention includes a cylindrical container, a shaft, and multiple stirring bars. The container has an axis extending in a first direction and is capable of containing a slurry. The shaft is disposed inside the container, extends in the first direction, and is rotatable about its axis in the first direction. Each of the multiple stirring bars has at least one stirring portion extending from the shaft in an in-plane direction intersecting the first direction, and is rotatable together with the shaft so as to stir the slurry together with the multiple beads. The multiple stirring bars are arranged one by one at intervals in the first direction. The multiple stirring bars include a first stirring bar and a second stirring bar adjacent to each other in the first direction. The first stirring bar has a lower stirring force than the second stirring bar. [Effects of the Invention]

[0007] According to the device configuration of the present invention, the flow of beads can be easily controlled, and the beads can be easily separated from the slurry. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a partial cross-sectional view showing the configuration of an electronic component manufacturing apparatus according to a first embodiment of the present invention. [Figure 2] 1 is a schematic diagram showing the configuration of a shaft portion and a plurality of stirring bars provided in an electronic component manufacturing apparatus according to a first embodiment of the present invention. [Figure 3] 2 is a partial cross-sectional view showing the internal configuration of a shaft portion provided in the electronic component manufacturing apparatus according to the first embodiment of the present invention. FIG. [Figure 4] 1 is a schematic diagram showing a state in which a plurality of beads according to the first embodiment of the present invention flow in a container. [Figure 5] 3 is a flowchart showing a method for manufacturing an electronic component according to the first embodiment of the present invention. [Figure 6] FIG. 10 is a perspective view showing the configuration of an electronic component manufacturing apparatus according to a second embodiment of the present invention. [Figure 7] FIG. 10 is a perspective view showing the projected area of a stirring portion resulting from the stirring force of a plurality of stirring bars. [Figure 8]FIG. 10 is a perspective view showing the configuration of an electronic component manufacturing apparatus according to a third embodiment of the present invention. [Figure 9] FIG. 10 is a perspective view showing the configuration of an electronic component manufacturing apparatus according to a fourth embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an electronic component manufacturing apparatus according to each embodiment of the present invention will be described with reference to the drawings. In the following description of the embodiments, the same or corresponding parts in the drawings will be given the same reference numerals, and the description thereof will not be repeated.

[0010] In the drawings, an arbitrary direction perpendicular to a first direction in which the axis of a container provided in the electronic component manufacturing apparatus extends is defined as the X direction, a direction perpendicular to the first direction and the X direction is defined as the Y direction, and the first direction is defined as the Z direction.

[0011] (Embodiment 1) FIG. 1 is a partial cross-sectional view showing the configuration of an electronic component manufacturing apparatus according to a first embodiment of the present invention.

[0012] The electronic component manufacturing apparatus 1 in this embodiment is an apparatus that pulverizes particles in a slurry by stirring a plurality of hard particles (beads) together with a suspension of solid particles (slurry) inside the apparatus. The electronic component manufacturing apparatus 1 in this embodiment is a so-called bead mill.

[0013] The slurry 2 processed by the electronic component manufacturing apparatus 1 is, for example, a ceramic slurry. The ceramic slurry is mainly used for ceramic capacitors. The ceramic slurry contains ceramic particles, a binder, a dispersant, an organic solvent, and the like.

[0014] As shown in FIG. 1, the electronic component manufacturing apparatus 1 according to the first embodiment of the present invention includes a cylindrical container 10, a lower cover 20, an upper cover 30, an inlet 40, an outlet 50, a plurality of beads 60, a shaft 70, a plurality of stirring bars 80, and a separator 90.

[0015] The container 10 is cylindrical. The container 10 in this embodiment is cylindrical. However, the container 10 is not limited to a cylindrical shape, and may have other shapes such as an elliptical shape.

[0016] The container 10 has an axis C extending in a first direction (Z direction). In this embodiment, the first direction (Z direction) is the vertical direction. However, the first direction (Z direction) may also be the horizontal direction.

[0017] The container 10 is capable of containing the slurry 2. When the container 10 has an axis C in the vertical direction, the contents (slurry, etc.) are filled in the container 10 from the bottom to the top.

[0018] The capacity of the vessel 10 is changed appropriately according to the processing amount of the slurry 2. The inner diameter of the vessel 10 is, for example, 0.3 m or more and 1.0 m or less. The height of the vessel 10 in the first direction (Z direction) is, for example, 0.5 m or more and 1.5 m or less.

[0019] The container 10 has a double structure that allows cooling water 3 to flow around the circumferential surface of the container 10. The container 10 has an outer wall portion 100, an inner wall portion 110, and a cooling water flow path 120.

[0020] The outer wall portion 100 is located outside the container 10. The outer wall portion 100 is cylindrical. The inner wall portion 110 is located inside the container 10. The inner wall portion 110 is cylindrical. The inner wall portion 110 is disposed at a distance from the outer wall portion 100 in the X direction and the Y direction. A cooling water flow path 120 is formed between the outer wall portion 100 and the inner wall portion 110. The slurry 2 can be cooled by cooling water 3 flowing through the cooling water flow path 120.

[0021] Cooling water flow ports 101 are provided in the outer wall portion 100. A pair of cooling water flow ports 101 are provided above and below the outer wall portion 100 in the Z direction. The cooling water 3 is introduced into the cooling water flow path 120 from one cooling water flow port 101 and discharged from the other cooling water flow port 101. This allows the cooling water 3 to flow through the cooling water flow path 120 in the Z direction and in the circumferential direction of the Z direction.

[0022] In this embodiment, a spiral portion 130 is formed on the inner circumferential surface 111 of the inner wall portion 110. The spiral portion 130 extends in a first direction (Z direction) on the inner circumferential surface 111 of the container 10 while rotating around the axis C. The spiral portion 130 in this embodiment is a spiral groove that is concave in a direction away from the axis C.

[0023] The spiral portion 130 is formed so as to rotate in the first direction (Z direction) of the inner wall portion 110 in a range of two or more turns and three or less turns, for example.

[0024] The plurality of beads 60 can flow inside the container 10 along the spiral portion 130. By forming the spiral portion 130, it is possible to configure the plurality of beads 60 to flow toward the first end 11 when the plurality of beads 60 come into contact with or enter the inside of the spiral portion 130.

[0025] Specifically, the beads 60 that have entered the spiral portion 130 flow along the spiral portion 130, thereby smoothly flowing in the circumferential direction of the first direction (Z direction) and along the first direction. Therefore, the beads 60 can not only flow rotationally on the XY plane, but also flow in the first direction (Z direction). As a result, the beads 60 are efficiently dispersed within the container 10.

[0026] The spiral portion 130 is disposed in the first direction (Z direction) at least from a position corresponding to the separator 90 toward the first end 11. This makes it easier for the beads 60 to flow from the spiral portion 130 toward the first end 11 when the separator 90 separates the beads 60, thereby preventing the beads 60 from entering downstream of the separator 90.

[0027] The container 10 is configured to be rotatable about an axis C. In this embodiment, the inner wall portion 110 of the container 10 is configured to be rotatable about the axis C. The inner wall portion 110 can be rotated by a motor (not shown) independently of the shaft portion 70, the separator 90, the outer wall portion 100, and the like. This promotes the flow of the beads 60 inside the spiral portion 130 when the beads 60 enter the spiral portion 130. Note that the container 10 does not have to be configured to be rotatable about the axis C.

[0028] The rotation speed or direction of the inner wall 110 of the container 10 is not particularly limited. The rotation speed of the inner wall 110 of the container 10 may be the same as or slower than the rotation speed of the shaft 70. It is preferable that the rotation direction of the inner wall 110 of the container 10 is different from the rotation direction of the shaft 70.

[0029] The lower cover 20 is connected to the first end 11 of the container 10. A first pulley 21 is disposed inside the lower cover 20. The first pulley 21 is connected to a shaft 70. The first pulley 21 is rotatable in the circumferential direction, that is, the Z direction. A first belt 22 is wound around the first pulley 21. The first belt 22 is connected to the first pulley 21 and a first motor 23. When the first motor 23 is driven, the first pulley 21 can rotate via the first belt 22. This allows the shaft 70 to rotate together with the first pulley 21.

[0030] The upper cover 30 is connected to the second end 12 of the container 10. A second pulley 31 is disposed inside the upper cover 30. The second pulley 31 is connected to the separator 90. The second pulley 31 is rotatable in the circumferential direction, that is, the Z direction. A second belt 32 is wound around the second pulley 31. The second belt 32 is connected to the second pulley 31 and a second motor 33. When the second motor 33 is driven, the second pulley 31 can rotate via the second belt 32. This allows the separator 90 to rotate together with the second pulley 31.

[0031] The inlet 40 allows the slurry 2 to be introduced into the container 10. The inlet 40 is located on the first end 11 side of the container 10 in the first direction (Z direction). In this embodiment, the inlet 40 is located at the first end 11. The location of the inlet 40 is not limited to the first end 11. The inlet 40 may be located at any position around the first end 11 of the container 10 in the first direction (Z direction).

[0032] The outlet 50 allows the slurry 2 to be taken out from inside the container 10. The outlet 50 is located on the second end 12 side of the container 10, opposite the first end 11 in the first direction (Z direction). In this embodiment, the outlet 50 is located at the second end 12. The location of the outlet 50 is not limited to the second end 12. The outlet 50 may be located at any position around the second end 12 in the first direction (Z direction) of the container 10.

[0033] A plurality of beads 60 are housed inside the container 10. The plurality of beads 60 are spheres made of zirconia or resin. The diameter of each of the plurality of beads 60 is, for example, 0.3 μm or more and 1.0 mm or less. However, the particle diameter of the beads 60 is not limited to 0.3 μm or more and 1.0 mm or less.

[0034] The shaft portion 70 is disposed inside the container 10. The shaft portion 70 extends in a first direction (Z direction). The shaft portion 70 is rotatable around an axis in the first direction (Z direction).

[0035] The multiple stirrers 80 extend from the shaft 70 in a direction intersecting the first direction. In this embodiment, the multiple stirrers 80 extend from the shaft 70 in a direction perpendicular to the first direction (any direction on the XY plane). The multiple stirrers 80 extend radially on the same XY plane, with a gap between them, centered on the shaft 70. The multiple stirrers 80 are rotatable together with the shaft 70 so as to stir the slurry 2 together with the multiple beads 60. Details of the shaft 70 and the multiple stirrers 80 will be described later. The shaft 70 may extend to the separator 90.

[0036] The separator 90 is disposed inside the container 10. The separator 90 is located closer to the second end 12 than the shaft portion 70 in the first direction (Z direction). The separator 90 is provided just before the outlet 50 in the flow of the slurry 2 inside the container 10.

[0037] Separator 90 has blade portion 91 and two disk members 92. Blade portion 91 extends radially and curvedly from the center of separator 90. Two disk members 92 sandwich blade portion 91 in the Z direction.

[0038] The separator 90 is rotatable around an axis in a first direction (Z direction). When the separator 90 rotates, centrifugal force is applied to the slurry 2 and the plurality of beads 60 in the XY plane facing the separator 90. This centrifugal force presses the plurality of beads 60 mixed in the slurry 2 against the inner circumferential surface 111 of the container 10. This separates the plurality of beads 60 from the slurry 2. The rotation speeds of the separator 90 and the plurality of stirrers 80 may be the same or different.

[0039] Fig. 2 is a schematic diagram showing the configuration of a shaft portion and a plurality of stirring bars included in the electronic component manufacturing apparatus according to the first embodiment of the present invention, and Fig. 3 is a partial cross-sectional view showing the internal configuration of the shaft portion included in the electronic component manufacturing apparatus according to the first embodiment of the present invention.

[0040] 2 and 3, the shaft portion 70 is divided into at least two parts in the first direction (Z direction). In this embodiment, the shaft portion 70 is divided into three parts.

[0041] The shaft portion 70 has a first shaft portion 71, a second shaft portion 72, and a third shaft portion 73. The first shaft portion 71, the second shaft portion 72, and the third shaft portion 73 have a triple-layered structure around the rotation axis.

[0042] The lower pulley 21A of the first pulley 21 is connected to the lower side of the first shaft 71. The middle pulley 21B of the first pulley 21 is connected to the lower side of the second shaft 72. The upper pulley 21C of the first pulley 21 is connected to the lower side of the third shaft 73.

[0043] The first motor 23 is provided with a main shaft 24 whose rotation axis is in the Z direction. The lower pulley 21A is connected to the main shaft 24 via a lower belt 22A of the first belt 22. The intermediate pulley 21B is connected to the main shaft 24 via an intermediate belt 22B of the first belt 22. The upper pulley 21C is connected to the main shaft 24 via an upper belt 22C of the first belt 22. When the first motor 23 rotates, the first shaft 71, the second shaft 72, and the third shaft 73 connected to each pulley rotate. By varying the diameters of the pulleys, the rotation speeds of the first shaft 71, the second shaft 72, and the third shaft 73 can be varied.

[0044] The first shaft portion 71, the second shaft portion 72, and the third shaft portion 73 are rotatable in the same direction. In this embodiment, the first shaft portion 71 rotates at a lower rotation speed than the second shaft portion 72 and the third shaft portion 73. In this embodiment, the first shaft portion 71 rotates at a rotation speed that is 80% or more and 90% or less of the rotation speed of the second shaft portion 72 and the third shaft portion 73.

[0045] Each of the multiple stirring bars 80 has at least one stirring portion 180 extending from the shaft portion 70 in an in-plane direction intersecting the first direction. In this embodiment, at least one stirring portion 180 extends in a direction perpendicular to the first direction. In the XY plane in which the stirring portions extend, the at least one stirring portion 180 extends radially in four directions, spaced apart from one another, with the shaft portion 70 as the center.

[0046] At least one stirring section 180 has a cylindrical shape in a cross section seen from the extending direction. However, the shape of the stirring section 180 is not limited to a cylindrical shape. The stirring section 180 may have an elliptical shape, a rectangular shape, or any other shape.

[0047] The thickness of the agitating part 180 in a cross section seen from the extending direction is, for example, 10 mm or more and 20 mm or less, and the length of the agitating part 180 in the extending direction is, for example, 100 mm or more and 400 mm or less.

[0048] The plurality of stirrers 80 includes a first stirrer 81 and a second stirrer 82. The plurality of stirrers 80 in this embodiment further includes a third stirrer, a fourth stirrer, and a fifth stirrer 85.

[0049] The plurality of stirring bars 80 are arranged one by one at intervals in the first direction (Z direction). In the plurality of stirring bars 80 of this embodiment, the first to fifth stirring bars 81 to 85 are arranged one by one at intervals in the first direction (Z direction).

[0050] The first stirring bar 81 and the second stirring bar 82 are adjacent to each other in the first direction (Z direction). As shown in Figures 1 and 2, the first stirring bar 81 is located closer to the outlet 50 than the second stirring bar 82 in the first direction (Z direction).

[0051] A first stirring bar 81 is connected to the first shaft portion 71. A second stirring bar 82, a third stirring bar, and a fourth stirring bar are connected to the second shaft portion 72. A fifth stirring bar 85 is connected to the third shaft portion 73.

[0052] The flow of the slurry 2 and the plurality of beads 60 inside the vessel 10 will now be described.

[0053] FIG. 4 is a schematic diagram showing a state in which a plurality of beads according to the first embodiment of the present invention flow in a container.

[0054] In this embodiment, the rotation speed of first shaft portion 71 is slower than the rotation speed of second shaft portion 72. Therefore, the rotation speed of first stirrer 81 is slower than the rotation speed of second stirrer .

[0055] When the rotation speed of first agitator 81 becomes slower than the rotation speed of second agitator 82, the amount of fluid agitated by the agitator decreases, and the agitating force of first agitator 81 decreases. Therefore, first agitator 81 has a lower agitating force than second agitator 82. As a result, the slurry 2 being agitated in first region R1 around first agitator 81 connected to first shaft portion 71 becomes under lower pressure (a state in which the flow of slurry 2 is smaller) than the slurry 2 being agitated in second region R2 around second to fifth agitators 82 to 85 connected to second shaft portion 72 and third shaft portion 73.

[0056] Generally, a fluid flows from a region of high pressure to a region of low pressure. If the stirring forces of the multiple stirrers 80 are all the same, the pressure in the first direction (Z direction) within the container 10 will be approximately uniform. Therefore, the multiple beads 60 stirred by the multiple stirrers 80 rotate in the circumferential direction of the first direction (Z direction) on the same XY plane while being pressed against the XY plane of the inner wall 110, which is perpendicular to the first direction (Z direction). Although the separator 90 separates the multiple beads 60 mixed in the slurry 2, there is a possibility that some of them will pass over the separator 90 and flow to a subsequent process.

[0057] On the other hand, in this embodiment, the beads 60 flow from the high-pressure second region R2 around the second stirrer 82 to the low-pressure first region R1 around the first stirrer 81 (flowing in the direction DR1 in FIG. 4). The beads 60 mixed in the slurry 2 tend to gather in the first region R1, which makes it easier to separate the beads 60 from the slurry 2.

[0058] Furthermore, by providing the first stirrer 81 on the outlet 50 side, a low-pressure first region R1 can be formed in the region close to the outlet 50 side. This allows the plurality of beads 60 to be present sufficiently along the shaft portion 70. Furthermore, the plurality of beads 60 on the inlet 40 side also flows to the region on the outlet 50 side along the flow of the slurry 2. As a result, a flow of the plurality of beads 60 circulating within the container 10 is formed, thereby improving the agitation of the slurry 2. Furthermore, the plurality of beads 60 separated by the separator 90 can be collected around the first stirrer 81, thereby improving the separator 90's ability to separate the beads.

[0059] In this embodiment, the thickness or length of the stirring parts is the same, but this is not limitative and they may be different from each other.

[0060] The method for manufacturing the electronic component will be described below: Fig. 5 is a flowchart showing the method for manufacturing the electronic component according to the first embodiment of the present invention.

[0061] 1, 2, and 5, in the method for manufacturing an electronic component according to the first embodiment of the present invention, first, slurry 2 is poured into container 10 through inlet 40 (S1). A plurality of beads 60 are placed inside container 10 in advance. Inside container 10, slurry 2 and the plurality of beads 60 are mixed together. Even while slurry 2 and the plurality of beads 60 are being stirred, slurry 2 continues to be poured continuously.

[0062] Next, the shaft 70 and the plurality of stirring bars 80 extending from the shaft 70, which are disposed inside the container 10, rotate to stir the slurry 2 together with the plurality of beads 60 (S2). The stirring time is, for example, two hours or more. As a result of the stirring, the plurality of beads 60 collide with particles in the slurry 2, pulverizing the particles.

[0063] When the slurry 2 is stirred together with the plurality of beads 60, the plurality of beads 60 are caused to flow to a first region R1 around the first stirrer 81 in the container 10 (S3). Because the plurality of beads 60 gather around the first stirrer 81, the number of the plurality of beads 60 that reach the separator 90 can be reduced.

[0064] Next, the plurality of beads 60 are separated from the slurry 2 by the separator 90 (S4). The plurality of beads 60 are subjected to centrifugal force by the separator 90, and flow from the axial center C side toward the inner circumferential surface 111 of the container 10. At this time, the plurality of beads 60 repelled by the separator 90 tend to gather on the first stirrer 81 arranged near the separator 90, and therefore the plurality of beads 60 can be separated efficiently by the separator 90.

[0065] Next, the slurry 2 inside the container 10 is taken out (S5). The slurry 2 is discharged from the outlet 50 to a subsequent process. Thereafter, the slurry 2 is completed. Note that a filter may be provided after the outlet 50 to remove a plurality of beads 60 from the slurry 2.

[0066] In electronic component manufacturing apparatus 1 according to embodiment 1 of the present invention, when slurry 2 is stirred with multiple beads 60, a pressure change is generated that causes multiple beads 60 to flow from second stirrer 82, which has a second stirring force higher than the first stirring force, toward first stirrer 81, making first region R1 around first stirrer 81 a lower-pressure region compared to second region R2 around second stirrer 82. This allows multiple beads 60 to collect in first region R1, making it easier to separate the multiple beads 60 from slurry 2. Consequently, multiple beads 60 can be retained in the region in container 10 where multiple stirrers 80 are arranged, thereby reducing the number of multiple beads 60 that flow from separator 90 to subsequent processes, thereby enabling efficient pulverization of slurry 2 in container 10.

[0067] In electronic component manufacturing apparatus 1 according to embodiment 1 of the present invention, first stirrer 81, which has a lower stirring power than second stirrer 82, is disposed on the outlet 50 side, so that beads 60 can be retained in the area where stirrers 80 are disposed in container 10. This prevents beads 60 from reaching outlet 50, and therefore prevents beads 60 from flowing out of container 10 to a subsequent process.

[0068] In the electronic component manufacturing apparatus 1 according to the first embodiment of the present invention, the rotation speed of the first stirrer 81 is slower than that of the second stirrer 82, and thus the first stirrer 81 has a lower stirring force than the second stirrer 82, allowing for fine adjustment of the rotation speed control of each stirrer. This allows for easy changes in manufacturing conditions and makes it easier to adjust bead separation conditions. Furthermore, the first stirrer and the second stirrer can be configured with the same stirrer shape, allowing for the use of common stirrer components.

[0069] (Embodiment 2) An electronic component manufacturing apparatus according to a second embodiment of the present invention will be described below with reference to the drawings. The electronic component manufacturing apparatus according to the second embodiment of the present invention differs from electronic component manufacturing apparatus 1 according to the first embodiment of the present invention in the configuration of the shaft portion and the plurality of stirring bars, and therefore, the description of the configuration that is the same as that of electronic component manufacturing apparatus 1 according to the first embodiment of the present invention will not be repeated.

[0070] Fig. 6 is a perspective view showing the configuration of an electronic component manufacturing apparatus according to embodiment 2 of the present invention, Fig. 7 is a perspective view showing the projected area of a stirring portion resulting from the stirring force of a plurality of stirring bars.

[0071] 6 and 7, electronic component manufacturing apparatus 1A according to the second embodiment of the present invention includes shaft portion 70A and a plurality of stirring bars 80A. Shaft portion 70A includes first shaft portion 71A, second shaft portion 72A, and third shaft portion 73A.

[0072] A first stirring bar 81A is connected to the first shaft portion 71A. A second stirring bar 82A, a third stirring bar, and a fourth stirring bar are connected to the second shaft portion 72A. A fifth stirring bar 85A is connected to the third shaft portion 73A. The first shaft portion 71A, the second shaft portion 72A, and the third shaft portion 73A rotate at the same rotation speed. Therefore, the first to fifth stirring bars 81A to 85A also rotate at the same rotation speed.

[0073] Each of the plurality of stirring bars 80A (first to fifth stirring bars 81A to 85A) has at least one stirring portion extending from the shaft portion 70A in the circumferential direction in the first direction (Z direction).

[0074] The first stirring bar 81A has four first stirring parts 181A as stirring parts. The four first stirring parts 181A are lined up in the circumferential direction in the first direction (Z direction).

[0075] The second stirring bar 82A has four second stirring parts 182A as stirring parts. The four second stirring parts 182A are lined up in the circumferential direction in the first direction (Z direction).

[0076] The third, fourth and fifth stirring bars 85A have four stirring parts arranged in the circumferential direction in the first direction (Z direction), similar to the first stirring bar 81A and second stirring bar 82A. The four stirring parts of the third, fourth and fifth stirring bars 85A have the same shape as the stirring parts of the second stirring bar 82A.

[0077] When viewed in cross section in the direction in which the stirring parts extend, each first stirring part 181A and each second stirring part 182A have different thicknesses. In this embodiment, the thickness of each first stirring part 181A is, for example, 50% to 70% of the thickness of each second stirring part 182A.

[0078] As shown in Figure 7, because the thicknesses of the first agitating sections 181A and the second agitating sections 182A are different, the sum of the projected areas S1 of the first agitating sections 181A when viewed from the circumferential direction of the shaft section 70A in a cross section along the first direction (Z direction) and the direction in which the agitating sections extend is smaller than the sum of the projected areas S2 of the second agitating sections 182A when viewed from the circumferential direction. As the projected areas become smaller, the range in which the agitating sections agitate the fluid becomes smaller, and the agitating force of the first agitating bar 81A becomes lower. As a result, the first agitating bar 81A has a lower agitating force than the second agitating bar 82A.

[0079] In electronic component manufacturing apparatus 1A according to the second embodiment of the present invention, by changing the total projected area, a pressure change is generated that causes beads 60 to flow from second stirrer 82A, which has a second stirring force higher than the first stirring force, toward first stirrer 81A, making first region R1 around first stirrer 81A a lower-pressure region compared to second region R2 around second stirrer 82A. This allows beads 60 to collect in first region R1, making it easier to separate beads 60 from slurry 2.

[0080] In electronic component manufacturing apparatus 1A according to embodiment 2 of the present invention, first agitator 81A and second agitator 82A can be configured more simply than in a configuration in which the rotation speed is changed between first agitator and second agitator.

[0081] Hereinafter, electronic component manufacturing apparatuses according to third and fourth embodiments of the present invention will be described with reference to the drawings. The electronic component manufacturing apparatuses according to the third and fourth embodiments of the present invention differ from electronic component manufacturing apparatus 1A according to second embodiment of the present invention in the configuration of the plurality of stirring bars, and therefore, the description of the configuration that is the same as that of electronic component manufacturing apparatus 1A according to second embodiment of the present invention will not be repeated.

[0082] (Embodiment 3) FIG. 8 is a perspective view showing the configuration of an electronic component manufacturing apparatus according to the third embodiment of the present invention.

[0083] 8, multiple stirrers 80B included in electronic component manufacturing apparatus 1B in accordance with embodiment 3 of the present invention include first stirrer 81B and second stirrer 82B. Because first shaft 71B and second shaft 72B rotate at the same rotation speed, first stirrer 81B and second stirrer 82B also rotate at the same rotation speed.

[0084] The first stirring bar 81B has four first stirring portions 181B. The second stirring bar 82 has four second stirring portions 182B.

[0085] The total length of each first stirring portion 181B in the direction in which the stirring portion extends is shorter than the total length of each second stirring portion 182B. As a result, first stirring bar 81B has a lower stirring force than second stirring bar 82B. In this embodiment, the total length of each first stirring portion 181B in the direction in which the stirring portion extends is, for example, 80% or less of the total length of each second stirring portion 182B.

[0086] In electronic component manufacturing apparatus 1B according to the third embodiment of the present invention, by changing the total length of each of the stirring sections, a pressure change is generated that causes beads 60 to flow from second stirrer 82B, which has a second stirring force higher than the first stirring force, toward first stirrer 81B, making first region R1 around first stirrer 81B a lower-pressure region compared to second region R2 around second stirrer 82B. This allows beads 60 to collect in first region R1, making it easier to separate beads 60 from slurry 2.

[0087] In electronic component manufacturing apparatus 1B according to embodiment 3 of the present invention, by changing the total length of each of the stirring parts, first stirring bar 81B and second stirring bar 82B can be configured more simply than in a configuration in which the rotation speed is changed between first stirring bar and second stirring bar.

[0088] (Fourth embodiment) FIG. 9 is a perspective view showing the configuration of an electronic component manufacturing apparatus according to a fourth embodiment of the present invention.

[0089] 9, multiple stirrers 80C included in electronic component manufacturing apparatus 1C in accordance with embodiment 4 of the present invention include first stirrer 81C and second stirrer 82C. Because first shaft 71C and second shaft 72C rotate at the same rotation speed, first stirrer 81C and second stirrer 82C also rotate at the same rotation speed.

[0090] The first stirring bar 81C has three first stirring portions 181C, and the second stirring bar 82C has four second stirring portions 182C.

[0091] Because the number of first stirring portions 181C of first stirring bar 81C is less than the number of second stirring portions 182C of second stirring bar 82C, first stirring bar 81C has a lower stirring power than second stirring bar 82C. The number of each of first stirring portions 181C and second stirring portions 182C can be changed appropriately depending on the stirring power of the stirring bar.

[0092] In electronic component manufacturing apparatus 1C according to the fourth embodiment of the present invention, by changing the number of the agitating parts, a pressure change is generated that causes beads 60 to flow from second agitator 82C, which has a second agitating force higher than the first agitating force, toward first agitator 81C, making first region R1 around first agitator 81C a lower-pressure region compared to second region R2 around second agitator 82C. This allows beads 60 to collect in first region R1, making it easier to separate beads 60 from slurry 2.

[0093] In the electronic component manufacturing apparatus 1C according to the fourth embodiment of the present invention, by changing the number of stirring parts that each stirring bar has, the first stirring bar 81C and the second stirring bar 82C can be configured more simply than in a configuration in which the rotation speeds of the first stirring bar and the second stirring bar are changed.

[0094] The first stirrer, which has a lower stirring power than the second stirrer, may be provided on the side of the inlet 40. In this case as well, it is possible to prevent a plurality of beads 60 from reaching the separator 90 side.

[0095] The rotation directions of the first and second stirrers may be reversed. In this case, the slurry 2 is more easily stirred, which can increase the stirring force in the container 10 while preventing the beads 60 from reaching the separator 90 side.

[0096] Furthermore, in the first direction (Z direction) of the container 10, regions of weak stirring force may be formed on both the inlet 40 side and the outlet 50 side, with a region of high stirring force sandwiched in between. This results in a configuration in which a high-pressure region is sandwiched between low-pressure regions in the first direction (Z direction) of the container 10. In this case, it is possible to prevent a plurality of beads 60 from reaching the subsequent processes after the separator 90.

[0097] Furthermore, by changing the stirring force in three or more stages in the first direction (Z direction) of the container 10, regions of weaker stirring force may be formed in the order of the inlet 40 side, the intermediate position, and the outlet 50 side. This creates regions in the first direction (Z direction) of the container 10 where the pressure gradually decreases from the inlet 40 for the slurry 2 toward the outlet 50. In this case, it is possible to prevent a plurality of beads 60 from reaching the subsequent process after the separator 90.

[0098] [Note] <1> a cylindrical container having an axis extending in a first direction and capable of containing a slurry; a shaft portion disposed inside the container, extending in the first direction, and rotatable about an axis in the first direction; a plurality of stirrers, each of which has at least one stirring portion extending from the shaft portion in an in-plane direction intersecting the first direction and which are rotatable together with the shaft portion so as to stir the slurry; The plurality of stirring bars are arranged one by one at intervals in the first direction, the plurality of stirring bars include a first stirring bar and a second stirring bar adjacent to each other in the first direction, The electronic component manufacturing apparatus, wherein the first agitator has a lower agitating force than the second agitator.

[0099] <2> an inlet located on a first end side of the container in the first direction and capable of injecting the slurry into the container; and an outlet located at a second end of the container opposite to the first end in the first direction, through which the slurry can be taken out from the inside of the container. The first stirring bar is located closer to the outlet in the first direction than the second stirring bar. <1> The manufacturing apparatus for the electronic component according to claim 1.

[0100] <3> The rotation speed of the first stirrer is slower than the rotation speed of the second stirrer, so that the first stirrer has a lower stirring force than the second stirrer. <1> or <2> The manufacturing apparatus for the electronic component according to claim 1.

[0101] <4> The first stirring bar has a first stirring part as the stirring part, The second stirring bar has a second stirring part as the stirring part, The sum of the projected areas of the first stirring parts when viewed from the circumferential direction of the shaft part in a cross section along the first direction and the direction in which the stirring parts extend is smaller than the sum of the projected areas of the second stirring parts when viewed from the circumferential direction, so that the first stirring bar has a lower stirring force than the second stirring bar. <1> from <3> 10. The electronic component manufacturing apparatus according to claim 9, wherein the first and second electrodes are connected to the first and second electrodes.

[0102] <5> The total length of each of the first stirring parts in the direction in which the stirring parts extend is shorter than the total length of each of the second stirring parts, so that the first stirring bar has a lower stirring force than the second stirring bar. <4> The manufacturing apparatus for the electronic component according to claim 1.

[0103] <6> The number of the first stirring portions of the first stirring bar is smaller than the number of the second stirring portions of the second stirring bar, so that the first stirring bar has a lower stirring force than the second stirring bar. <4> or <5> The manufacturing apparatus for the electronic component according to claim 1.

[0104] <7> The plurality of stirring bars are rotatable with the shaft portion so as to stir the slurry together with the plurality of beads. <1> from <6> 10. The electronic component manufacturing apparatus according to claim 9, wherein the first and second electrodes are connected to the first and second electrodes.

[0105] In the above-described embodiments, configurations that can be combined may be combined with each other.

[0106] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the above description, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0107] 1, 1A, 1B, 1C Electronic component manufacturing apparatus, 2 Slurry, 3 Cooling water, 10 Container, 11 First end, 12 Second end, 20 Lower cover, 21 First pulley, 21A Lower pulley, 21B Intermediate pulley, 21C Upper pulley, 22 First belt, 22A Lower belt, 22B Intermediate belt, 22C Upper belt, 23 First motor, 24 Main shaft, 30 Upper cover, 31 Second pulley, 32 Second belt, 33 Second motor, 40 Inlet, 50 Outlet, 60 Plurality of beads, 70, 70A Shaft portion, 71, 71A First shaft portion, 72, 72A Second shaft portion, 73, 73A Third shaft portion, 80, 80A, 80B, 80C Plurality of stirrers, 81, 81A, 81B, 81C 1st stirrer, 82,82A,82B,82C 2nd stirrer, 85,85A 5th stirrer, 90 separator, 91 wing part, 92 disk member, 100 outer wall part, 101 cooling water flow port, 110 inner wall part, 111 inner peripheral surface, 120 cooling water flow path, 130 spiral part, 180 Stirring section, 181A, 181B, 181C 1st stirring section, 182A, 182B, 182C 2nd stirring section, C axis, R1 first region, R2 second region, S1, S2 projected area.

Claims

1. a cylindrical container having an axis extending in a first direction and capable of containing a slurry; a shaft portion that is disposed inside the container, extends in the first direction, and is rotatable around an axis that is in the first direction; a plurality of stirrers, each of which has at least one stirring portion extending from the shaft portion in an in-plane direction intersecting the first direction and which are rotatable together with the shaft portion so as to stir the slurry; The plurality of stirring bars are arranged one by one at intervals in the first direction, the plurality of stirring bars include a first stirring bar and a second stirring bar adjacent to each other in the first direction, The electronic component manufacturing apparatus, wherein the first agitator has a lower agitating force than the second agitator.

2. an inlet located on a first end side of the container in the first direction and capable of injecting the slurry into the container; an outlet located at a second end of the container opposite to the first end in the first direction, through which the slurry can be taken out from the inside of the container; 2. The electronic component manufacturing apparatus according to claim 1, wherein the first stirring bar is located closer to the outlet in the first direction than the second stirring bar.

3. 3. The electronic component manufacturing apparatus according to claim 1, wherein the rotation speed of the first stirrer is slower than the rotation speed of the second stirrer, so that the first stirrer has a lower stirring force than the second stirrer.

4. The first stirring bar has a first stirring part as the stirring part, The second stirring bar has a second stirring part as the stirring part, 3. The electronic component manufacturing apparatus according to claim 1, wherein the sum of the projected areas of the first stirring portions when viewed from the circumferential direction of the shaft portion in a cross section along the first direction and the direction in which the stirring portions extend is smaller than the sum of the projected areas of the second stirring portions when viewed from the circumferential direction, and thus the first stirring bar has a lower stirring force than the second stirring bar.

5. 5. The electronic component manufacturing apparatus of claim 4, wherein the total length of each of the first stirring parts in the direction in which the stirring parts extend is shorter than the total length of each of the second stirring parts, so that the first stirring bar has a stirring force lower than that of the second stirring bar.

6. 5. The electronic component manufacturing apparatus of claim 4, wherein the number of first stirring portions of the first stirring bar is less than the number of second stirring portions of the second stirring bar, so that the first stirring bar has a lower stirring force than the second stirring bar.

7. 3. The electronic component manufacturing apparatus according to claim 1, wherein the plurality of stirring bars are rotatable together with the shaft portion so as to stir the slurry together with the plurality of beads.

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