Coating processing apparatus, coating processing method, and storage medium

Abstract

To improve the degree of freedom and quality of drawing.SOLUTION: A coating processing apparatus comprises a substrate holding unit, a plurality of discharge heads, and a moving mechanism. The substrate holding unit holds a substrate having a plurality of pixels. The plurality of discharge heads are each provided with one or more nozzles, and discharge functional liquid from the one or more nozzles toward the plurality of pixels of the substrate held by the substrate holding unit. The moving mechanism moves the plurality of discharge heads and the substrate holding unit relative to each other. The plurality of discharge heads differ from one another in at least one of nozzle arrangement patterns and a distribution of discharge amounts per nozzle.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a coating processing apparatus, a coating processing method, and a storage medium. [Background technology]

[0002] Conventionally, there has been known a coating processing apparatus that applies droplets of a functional liquid onto a transported substrate using an inkjet method. For example, a coating processing apparatus has been disclosed that includes a transport mechanism that holds and moves the substrate, and a plurality of ejection heads that dispense droplets of the functional liquid from above onto the substrate held by the transport mechanism (see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-190445 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique that can improve drawing freedom and quality. [Means for solving the problem]

[0005] A coating processing apparatus according to one aspect of the present disclosure includes a substrate holding unit, multiple discharge heads, and a movement mechanism. The substrate holding unit holds a substrate having multiple pixels. Each of the multiple discharge heads has one or more nozzles arranged thereon, and discharges functional liquid from the one or more nozzles onto multiple pixels of the substrate held by the substrate holding unit. The movement unit moves the multiple discharge heads relative to the substrate holding unit. The multiple discharge heads differ from one another in at least one of the arrangement pattern of the one or more nozzles and the distribution of the discharge amount per nozzle. [Effects of the Invention]

[0006] According to the present disclosure, it is possible to improve the degree of freedom and quality of drawing. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a left side view showing a schematic configuration of a coating treatment apparatus according to an embodiment. [Figure 2] FIG. 2 is a plan view showing a schematic configuration of the coating treatment apparatus according to the embodiment. [Figure 3] FIG. 3 is a plan view of the carriage according to the embodiment. [Figure 4] FIG. 4 is a perspective view of the ejection head according to the embodiment, seen obliquely from below. [Figure 5] FIG. 5 is a flowchart showing an example of a processing procedure of the coating processing performed by the coating processing apparatus according to the embodiment. [Figure 6] FIG. 6 is a diagram illustrating an example of discharge amount distribution data according to the embodiment. [Figure 7] FIG. 7 is a diagram illustrating an example of the discharge number calculation process executed by the coating processing apparatus according to the embodiment. [Figure 8] FIG. 8 is a flowchart showing another example of the processing procedure of the coating processing performed by the coating processing apparatus according to the embodiment. [Figure 9] FIG. 9 is a diagram showing another example of the discharge amount distribution data according to the embodiment. [Figure 10] FIG. 10 is a diagram illustrating an example of a discharge head movement amount calculation process executed by the coating processing apparatus according to the embodiment. [Figure 11] FIG. 11 is a diagram for explaining an example of a coating process performed by a coating processing apparatus according to the first modification of the embodiment. [Figure 12] FIG. 12 is a diagram for explaining an example of a coating process performed by a coating processing apparatus according to the second modification of the embodiment. [Figure 13] FIG. 13 is a diagram for explaining an example of a coating process performed by a coating processing apparatus according to the third modification of the embodiment. [Figure 14]FIG. 14 is a diagram for explaining an example of a coating process performed by a coating processing apparatus according to the fourth modification of the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, a detailed description will be given of a coating processing apparatus, a coating processing method, and a storage medium (hereinafter referred to as "embodiments") according to the present disclosure, with reference to the drawings. Note that the present disclosure is not limited to these embodiments. It should be noted that the drawings are schematic, and the dimensional relationships and ratios of elements may differ from reality. Furthermore, the drawings may include portions with different dimensional relationships and ratios.

[0009] Conventionally, coating processing apparatuses that apply droplets of a functional liquid to a transported substrate using an inkjet method have been known. For example, a coating processing apparatus has been disclosed that includes a transport mechanism that holds and moves the substrate, and multiple ejection heads that dispense droplets of the functional liquid from above onto the substrate held by the transport mechanism.

[0010] However, the above-mentioned conventional techniques leave room for further improvement in terms of drawing flexibility and quality.

[0011] Therefore, there is a need for a technology that can overcome the above-mentioned problems and improve the degree of freedom and quality of drawing.

[0012] <Configuration of coating treatment device> First, the configuration of a coating treatment apparatus 1 according to an embodiment will be described with reference to Fig. 1 to Fig. 3. Fig. 1 is a left side view showing a schematic configuration of the coating treatment apparatus 1 according to an embodiment, and Fig. 2 is a plan view showing a schematic configuration of the coating treatment apparatus 1 according to an embodiment.

[0013] In the following description, to clarify the positional relationships, the X-axis direction, Y-axis direction, and Z-axis direction that are orthogonal to each other are defined, and the positive Z-axis direction is defined as the vertically upward direction.

[0014] In addition, in this disclosure, the front-to-back direction is defined as the Y-axis positive direction being the front and the Y-axis negative direction being the rear, the left-to-right direction is defined as the X-axis positive direction being the right and the X-axis negative direction being the left, and the up-down direction is defined as the Z-axis positive direction being the up and the Z-axis negative direction being the down.

[0015] The coating processing apparatus 1 is a drawing apparatus that performs drawing on the substrate S by an inkjet method while transporting the substrate S along a transport direction (for example, the Y-axis direction). The substrate S is, for example, a substrate used in a flat panel display, and has a plurality of pixels (not shown) arranged in a matrix.

[0016] The coating processing apparatus 1 is housed in a chamber room 100. An inert gas (such as nitrogen gas) is supplied to the chamber room 100. The coating processing apparatus 1 discharges a functional liquid onto the substrate S in an inert gas atmosphere to perform drawing on the substrate S. Note that the coating processing apparatus 1 may be an apparatus that is not housed in the chamber room 100.

[0017] In addition to ink, the functional liquid includes, for example, liquids that form a hole injection layer (HIL) and a hole transport layer (HTL). The functional liquid also includes multiple types of inks that are different in color. For example, the functional liquid includes R (red), G (green), and B (blue) inks.

[0018] 2, the chamber room 100 is provided with an electrical room 101 that houses the control device 9 and the like. The chamber room 100 is also provided with an exchange room 102 for exchanging a functional liquid tank (not shown) that stores the functional liquid.

[0019] As shown in FIGS. 1 and 2, the coating processing apparatus 1 includes a stand 2, a pair of first guide rails 3, a substrate transport mechanism 4, a pair of second guide rails 5, a coating unit 6, and a control device 9.

[0020] The stand 2 is disposed so as to extend along the transport direction (Y-axis direction) of the substrate S. The top surface of the stand 2 is horizontal.

[0021] The pair of first guide rails 3 are arranged on the upper surface of the stand 2. The pair of first guide rails 3 extend linearly along the transport direction of the substrate S. The pair of first guide rails 3 are arranged spaced apart in the horizontal direction (X-axis direction) perpendicular to the transport direction.

[0022] The substrate transport mechanism 4 holds the substrate S and moves the held substrate S along the transport direction (Y-axis direction) and a direction intersecting the transport direction (X-axis direction). Specifically, the substrate transport mechanism 4 includes a stage 40, a rotating unit 41, and a moving unit 42. The stage 40 is an example of a substrate holding unit.

[0023] Stage 40 is, for example, a vacuum suction stage, and suctions and holds the lower surface (the surface opposite to the surface to be drawn) of substrate S. Rotating unit 41 is provided below stage 40, and rotates stage 40 around a vertical axis (Z axis).

[0024] A workpiece alignment camera (not shown) is provided above the stage 40 to capture an image of the alignment mark of the substrate S on the stage 40. The rotating unit 41 corrects the position of the substrate S by rotating based on the image captured by the workpiece alignment camera.

[0025] The moving unit 42 is provided below the rotating unit 41 and supports the rotating unit 41 and the stage 40. The moving unit 42 includes a first moving unit (not shown) and a second moving unit (not shown). The first moving unit is attached to the pair of first guide rails 3 and is movable in the front-to-back direction (Y-axis direction) along the pair of first guide rails 3 by a drive unit (not shown) provided on at least one of the pair of first guide rails 3, such as a linear motor. The second moving unit is provided on the first moving unit and is movable in the left-to-right direction (X-axis direction) on the first moving unit.

[0026] The moving unit 42 can move the first moving unit in the front-to-back direction (Y-axis direction) along a pair of first guide rails 3, thereby moving the stage 40 and the substrate S adsorbed and held on the stage 40 in the front-to-back direction (Y-axis direction).

[0027] Moreover, the moving section 42 can move the stage 40 and the substrate S held by suction on the stage 40 in the left-right direction (X-axis direction) by moving the second moving section in the left-right direction (X-axis direction).

[0028] Although an example has been shown here in which the moving unit 42 moves the substrate S held by suction on the stage 40, the moving unit 42 may be configured to move a plurality of ejection heads 63 (described later) of the coating unit 6 in the front-back direction (Y-axis direction) and the left-right direction (X-axis direction). In this case, the moving unit 42 may be configured to move the plurality of ejection heads 63 individually.

[0029] At the end of the substrate transport mechanism 4 on the negative Y-axis direction side, there is provided a carry-in / out section 10 into which the substrate S is carried in from the outside by a substrate carry-in / out mechanism (not shown) and into which the substrate S is carried out to the outside.

[0030] 2, the pair of second guide rails 5 extend linearly in a direction (X-axis direction) perpendicular to the transport direction of the substrate S. The pair of second guide rails 5 are arranged at an interval in the transport direction (Y-axis direction) of the substrate S. The pair of second guide rails 5 are arranged on supports 5a that are arranged above the pedestal 2 and at a position higher than the stage 40.

[0031] The pair of second guide rails 5 extend outward (to the sides) of the gantry 2 in a plan view. On the sides of the gantry 2 and between the pair of second guide rails 5, for example, a maintenance unit 50 is disposed.

[0032] The maintenance unit 50 performs maintenance on the discharge head 63, which will be described later, and eliminates or prevents discharge defects and the like of the discharge head 63. The application unit 6, which will be described later, is movable between a drawing position above the pedestal 2 and a maintenance position above the maintenance unit 50.

[0033] A plurality of coating units 6 are arranged along a direction (X-axis direction) perpendicular to the transport direction of the substrate S. For example, three coating units 6 are arranged along the X-axis direction. The number of coating units 6 is not limited to three. Each coating unit 6 includes a carriage plate 60, a carriage rotation unit 61, a carriage 62, and a plurality of discharge heads 63.

[0034] The carriage plate 60 is attached to the pair of second guide rails 5. The carriage plate 60 is movable along the pair of second guide rails 5 by a drive unit (not shown), such as a linear motor, provided on at least one of the pair of second guide rails 5.

[0035] As shown in Fig. 1, the carriage rotating part 61 is disposed below the carriage plate 60. The carriage rotating part 61 is attached to the center of the carriage plate 60 in the transport direction (Y-axis direction). A carriage 62 is attached to the lower end of the carriage rotating part 61. The carriage rotating part 61 supports the carriage 62 so that it can rotate freely around a vertical axis (Z-axis).

[0036] The carriage rotation unit 61 rotates the carriage 62 about an axis parallel to the vertical direction based on an image captured by a carriage alignment camera (not shown) provided on the stage 40. This corrects the position of the carriage 62.

[0037] The plurality of ejection heads 63 are provided on the carriage 62. Each ejection head 63 is connected to a functional liquid tank (not shown) via a supply tube (not shown), receives the functional liquid from the functional liquid tank via the supply tube, and ejects droplets of the functional liquid onto the substrate S. Each ejection head 63 can, for example, eject a plurality of types of functional liquid.

[0038] 3 is a plan view of a carriage 62 according to an embodiment. The carriage 62 is, for example, a flat member and has a plurality of openings 62a. For example, in the example shown in FIG. 3, the carriage 62 has a total of 12 openings 62a arranged in a matrix along the main transport direction and the secondary transport direction.

[0039] While an example has been shown here in which twelve openings 62a are provided in the carriage 62, the number of openings 62a may be more or less than 12. Also, while an example has been shown here in which a plurality of openings 62a are provided in the carriage 62 in a matrix pattern, the arrangement pattern of the openings 62a is not limited to a matrix pattern. Also, while an example has been shown here in which the plurality of openings 62a have the same size, the sizes of the plurality of openings 62a may differ depending on the size of the corresponding ejection head 63.

[0040] Each of the plurality of openings 62a accommodates one ejection head 63. The ejection heads 63 are mounted on the carriage 62 so as to cover the openings 62a. The plurality of ejection heads 63 are arranged at intervals in the transport direction (Y-axis direction) of the substrate S and in a direction perpendicular to the transport direction (X-axis direction), for example. The detailed configuration of the ejection heads 63 will be described later.

[0041] 2 is, for example, a computer, and includes a control unit 91 and a storage unit 92. The storage unit 92 is realized by, for example, a semiconductor memory element such as a RAM (Random Access Memory) or a flash memory, or a storage device such as a hard disk or an optical disk.

[0042] The control unit 91 includes a microcomputer and various circuits, including a CPU (Central Processing Unit), ROM (Read Only Memory), RAM, input / output ports, etc. The CPU of the microcomputer controls each part in the coating processing apparatus 1 by reading and executing a program stored in the ROM.

[0043] The program may be recorded on a computer-readable storage medium and installed from the storage medium into the storage unit 92 of the control device 9. Examples of computer-readable storage media include a hard disk (HD), a flexible disk (FD), a compact disk (CD), a magnetic optical disk (MO), and a memory card.

[0044] <Configuration of the ejection head> Next, a configuration example of the ejection head 63 according to this embodiment will be described with reference to Fig. 4. Fig. 4 is a perspective view of the ejection head 63 according to this embodiment, seen obliquely from below.

[0045] 4, the ejection head 63 has, for example, a head main body 63a and a flange portion 63b that protrudes laterally from the head main body 63a. The ejection head 63 is inserted into the opening 62a (see FIG. 3) from above the carriage 62 (see FIG. 3), for example. As a result, the head main body 63a of the ejection head 63 is positioned within the opening 62a.

[0046] Furthermore, the flange portion 63b of the ejection head 63 abuts against the upper surface of the carriage 62. This causes the ejection head 63 to be locked to the carriage 62. Furthermore, while the ejection head 63 is locked to the carriage 62, it is fixed by a fixing portion (not shown) provided on the carriage 62.

[0047] The ejection head 63 is, for example, a piezoelectric or resistance heating nozzle head. A plurality of nozzles 64 are formed on a lower surface 63c of the head body 63a. The plurality of nozzles 64 are arranged, for example, in a line at equal intervals along a first direction D1. The first direction D1 is an example of a first direction and a given direction.

[0048] This first direction D1 is a direction intersecting the scanning direction Ds (for example, a direction perpendicular to the scanning direction Ds), for example, the X-axis direction. The scanning direction Ds is the direction in which the substrate S is scanned, for example, the Y-axis direction when the substrate S moves back and forth. The scanning direction Ds is an example of the second direction.

[0049] The head main body 63a has a pump section (not shown) that includes a cavity for storing the functional liquid, a piezoelectric element for changing the volume of the cavity, a vibration plate, etc. By applying a voltage to the piezoelectric element to vibrate the vibration plate, the volume of the cavity is changed and droplets of the functional liquid are ejected from each nozzle 64.

[0050] Additionally, the ejection head 63 is provided with a functional liquid introduction section connected to a functional liquid tank via a supply tube, a head substrate connected to the control device 9 (see FIG. 2) via a flexible flat cable, and the like.

[0051] The arrangement pattern of the nozzles 64 in the ejection head 63 according to this embodiment is not limited to the example in Fig. 4, and for example, multiple rows of the nozzles 64 aligned along the first direction D1 may be arranged side by side along the scanning direction Ds. Also, the ejection head 63 may be provided with a single nozzle 64 instead of multiple nozzles 64. That is, the ejection head 63 may be provided with one or more nozzles 64.

[0052] Here, in the embodiment, the multiple ejection heads 63 differ from one another in at least one of the arrangement pattern of the one or more nozzles 64 and the distribution of the ejection amount for each nozzle 64. For example, at least one ejection head 63 may have multiple nozzles 64 arranged in a line along the first direction D1, and at least one other ejection head 63 may have multiple nozzles 64 arranged in a matrix along the first direction D1 and the scanning direction Ds. Furthermore, at least one ejection head 63 may have a distribution in which the ejection amount increases toward the center of the nozzles 64, and at least one other ejection head 63 may have a distribution in which the ejection amount decreases toward the center of the nozzles 64.

[0053] As described above, the coating processing apparatus 1 according to the embodiment has a plurality of discharge heads 63 that differ from one another in at least one of the arrangement pattern of one or more nozzles 64 and the distribution of the discharge amount for each nozzle 64. This makes it possible to perform a coating process of the functional liquid on the substrate S by arbitrarily combining a plurality of discharge heads 63 that differ from one another in at least one of the arrangement pattern of one or more nozzles 64 and the distribution of the discharge amount for each nozzle 64. Therefore, according to the embodiment, it is possible to improve the degree of freedom and quality of drawing on the substrate S with the functional liquid.

[0054] <Details of coating process> Next, details of the coating process performed by the coating processing apparatus 1 according to the embodiment will be described with reference to Fig. 5 to Fig. 7. Fig. 5 is a flowchart showing an example of the processing procedure of the coating process performed by the coating processing apparatus 1 according to the embodiment. Note that, in this example, the multiple discharge heads 63 have one or more nozzles 64 arranged in a common arrangement pattern as shown in Fig. 4, and the distribution of the discharge amount for each nozzle 64 is at least different from each other.

[0055] 5, first, the control unit 91 acquires discharge amount distribution data indicating the distribution of the discharge amount for each nozzle 64 in one discharge of the functional liquid for each of the multiple discharge heads 63 (step S101). The discharge amount distribution data is created in advance using, for example, experiments or simulations, and stored in the storage unit 92. The control unit 91 acquires the discharge amount distribution data from the storage unit 92.

[0056] An example of such discharge amount distribution data is shown in Figure 6. Figure 6 is a diagram showing an example of discharge amount distribution data according to an embodiment. The discharge amount distribution data shown in Figure 6 is a graph showing the distribution of the discharge amount for each nozzle 64 in one discharge of functional liquid for each of the multiple discharge heads 63 (here, discharge heads 63A and 63B). The discharge heads 63A and 63B are, for example, two discharge heads adjacent to each other along the scanning direction Ds (see Figure 4). The horizontal axis of the graph in Figure 6 represents the nozzle number, which is assigned to the multiple nozzles 64 lined up in a row along the first direction D1 (see Figure 4) so ​​that the numbers gradually increase from one end to the other.

[0057] 6, ejection head 63A has a distribution in which the ejection amount increases with increasing distance from nozzle 64 to the center. On the other hand, ejection head 63B has a distribution in which the ejection amount decreases with increasing distance from nozzle 64 to the center. Furthermore, the maximum ejection amount at the center of ejection head 63A is greater than the maximum ejection amount at both ends of ejection head 63B.

[0058] Returning to the description of Fig. 5, following the process of step S101, the control unit 91 calculates the number of times the functional liquid is ejected for each ejection head 63 based on the ejection amount distribution data acquired in the process of step S101 (step S102).

[0059] In the process of step S102, the number of times the functional liquid is ejected from each ejection head 63 is calculated so that the difference in the distribution of the ejection amount for each nozzle 64 among the plurality of ejection heads 63 is small.

[0060] For example, in the example of the discharge amount distribution data shown in Fig. 6, the maximum value of the discharge amount of discharge head 63A is greater than the maximum value of the discharge amount of discharge head 63B. Therefore, as shown in Fig. 7, the control unit 91 calculates the number of times the functional liquid is discharged from discharge head 63A as N1, and calculates the number of times the functional liquid is discharged from discharge head 63B as N2, which is greater than N1. Fig. 7 is a diagram showing an example of the discharge number calculation process executed by the coating processing apparatus 1 according to the embodiment.

[0061] The number of times N2 the functional liquid is ejected from the ejection head 63A is calculated, for example, by dividing a predetermined target ejection amount by the maximum ejection amount of the ejection head 63A.

[0062] The number of times N2 the functional liquid is ejected from ejection head 63B is calculated, for example, according to the ratio between the maximum ejection amount of ejection head 63A and the maximum ejection amount of ejection head 63B. For example, if the ratio between the maximum ejection amount of ejection head 63A and the maximum ejection amount of ejection head 63B is 2:1, the number of times N2 the functional liquid is ejected from ejection head 63B is calculated as the number of times N1 the functional liquid is ejected from ejection head 63B × 2 / 1.

[0063] As described above, in the embodiment, the number of times the functional liquid is ejected from each ejection head 63 is calculated so as to reduce the difference in the distribution of the ejection amount for each nozzle 64 among the plurality of ejection heads 63. This makes it possible to reduce the occurrence of variations in the amount of functional liquid applied to multiple pixels on the substrate S when applying the functional liquid to the substrate S using the plurality of ejection heads 63, even if there is a difference in the distribution of the ejection amount for each nozzle 64 among the plurality of ejection heads 63. Therefore, according to the embodiment, it is possible to suppress a deterioration in drawing quality due to a difference in the distribution of the ejection amount for each nozzle 64 among the plurality of ejection heads 63.

[0064] Returning to the explanation of Fig. 5, following the processing of step S102, the control unit 91 operates a substrate carry-in / out mechanism (not shown) to carry the substrate S into the carry-in / out unit 10. Then, the control unit 91 operates the substrate transport mechanism 4 to hold the substrate S on the stage 40 of the substrate transport mechanism 4 (step S103).

[0065] Next, the control unit 91 operates the moving unit 42 to move the substrate S along the scanning direction Ds (step S104). Then, the control unit 91 ejects the functional liquid from each nozzle 64 of each ejection head 63 onto a plurality of pixels of the moving substrate S, based on the number of ejections calculated in the process of step S102 (step S105).

[0066] When the desired pixels of the substrate S are filled with the functional liquid by the processes of steps S104 and S105, the control unit 91 moves the substrate S to the load / unload unit 10 and unloads the substrate S from the load / unload unit 10 (step S106). This completes a series of coating processes for the substrate S.

[0067] 8 is a flowchart showing another example of the procedure of the coating process performed by the coating processing apparatus 1 according to the embodiment. Note that, in this example, the multiple discharge heads 63 have one or more nozzles 64 arranged in a common arrangement pattern as shown in FIG. 4, and the distribution of the discharge amount for each nozzle 64 is at least different from one another.

[0068] 8, first, the control unit 91 acquires discharge amount distribution data indicating the distribution of the discharge amount for each nozzle 64 in one discharge of the functional liquid for one discharge head 63 out of the multiple discharge heads 63 (step S111). The discharge amount distribution data is created in advance using, for example, experiments or simulations, and stored in the storage unit 92. The control unit 91 acquires the discharge amount distribution data from the storage unit 92.

[0069] An example of such discharge amount distribution data is shown in Fig. 9. Fig. 9 is a diagram showing another example of discharge amount distribution data according to the embodiment. The discharge amount distribution data shown in Fig. 9 is a graph showing the distribution of the discharge amount for each nozzle 64 in one discharge of functional liquid for one discharge head 63 (discharge head 63A in this case) out of the multiple discharge heads 63. The horizontal axis of the graph in Fig. 9 represents the nozzle number, which is assigned to the multiple nozzles 64 lined up in a row along the first direction D1 (see Fig. 4) so ​​that the numbers gradually increase from one end to the other.

[0070] 9, the ejection head 63A has a distribution in which the ejection amount increases with increasing distance from the nozzles 64. The ejection amount at the center of the ejection head 63A is greater than the ejection amount at both ends of the ejection head 63A.

[0071] Returning to the description of Fig. 8, following the process of step S111, the control unit 91 calculates the amount of movement of one ejection head 63 from its initial position based on the ejection amount distribution data acquired in the process of step S111 (step S112).

[0072] In the process of step S112, the movement amount of one ejection head 63 from the initial position is calculated so that the difference in ejection amount between the nozzles 64 in one ejection head 63 becomes small.

[0073] For example, in the example of the discharge amount distribution data shown in FIG. 9, the discharge amount at the center of the discharge head 63A is larger than the discharge amount at both ends of the discharge head 63A. Therefore, as shown in FIG. 10, the control unit 91 adjusts the amount of movement of the discharge head 63A from the initial position to the center (nozzle number N i ) and the position of the nozzle 64 at both ends (nozzle number N o1 ,N o2 ) is calculated as the distance between the position of the nozzle 64. Fig. 10 is a diagram showing an example of the discharge head movement amount calculation process executed by the coating treatment device 1 according to the embodiment.

[0074] For example, the amount of movement from the initial position of the ejection head 63A isi ) and the position of the nozzle 64 at one end (nozzle number N o1 The amount of movement of the ejection head 63A from the initial position to one end side in the first direction D1 is the distance between the nozzle 64 at the center (nozzle number N i ) and the position of the nozzle 64 at the other end (nozzle number N o2 ) is the amount of movement by which the initial position of the ejection head 63A is shifted toward the other end in the first direction D1 by the distance between the initial position of the ejection head 63A and the position of the nozzle 64.

[0075] As described above, in the embodiment, the movement amount of one ejection head 63 from the initial position is calculated so as to reduce the difference in ejection amount between the nozzles 64 in one ejection head 63. This makes it possible to reduce variations in the amount of functional liquid applied to multiple pixels on the substrate S when applying functional liquid to the substrate S using one ejection head 63, even if there is a difference in the amount of ejection between the nozzles 64 in one ejection head 63. Therefore, according to the embodiment, it is possible to suppress deterioration in drawing quality due to differences in the amount of ejection between the nozzles 64 in one ejection head 63.

[0076] Returning to the description of Fig. 8, following the processing of step S112, the control unit 91 operates a substrate carry-in / out mechanism (not shown) to carry the substrate S into the carry-in / out unit 10. Then, the control unit 91 operates the substrate transport mechanism 4 to hold the substrate S on the stage 40 of the substrate transport mechanism 4 (step S113).

[0077] Next, the control unit 91 operates the moving unit 42 to move the substrate S along the scanning direction Ds (step S114). Then, the control unit 91 moves one ejection head 63 based on the movement amount calculated in the process of step S112, and ejects the functional liquid from each nozzle 64 of one ejection head 63 to a plurality of pixels of the moving substrate S (step S115).

[0078] When the desired pixels of the substrate S are filled with the functional liquid by the processes of steps S114 and S115, the control unit 91 moves the substrate S to the load / unload unit 10 and unloads the substrate S from the load / unload unit 10 (step S116). This completes a series of coating processes for the substrate S.

[0079] <Variation 1> Next, various modified examples of the embodiment will be described with reference to Fig. 11 to Fig. 14. Fig. 11 is a diagram for explaining an example of a coating process performed by a coating processing apparatus 1 according to modified example 1 of the embodiment. Before describing the coating process, a configuration example of a first discharge head 63C included in the coating processing apparatus 1 according to modified example 1 of the embodiment will first be described.

[0080] 11, the coating processing apparatus 1 according to Modification 1 includes a first discharge head 63C among the multiple discharge heads 63. The first discharge head 63C has one or more nozzles 64 arranged in a matrix along the first direction D1 and the scanning direction Ds at a pitch that is an integer multiple of the pitch of multiple pixels on the substrate S. In the example of FIG. 11, 16 nozzles 64 are arranged in a matrix along the first direction D1 and the scanning direction Ds at a pitch that is twice the pitch of the 8×8 pixels on the substrate S.

[0081] Next, the coating process performed by the coating processing apparatus 1 according to the first modification using the first discharge head 63C will be described.

[0082] As shown in Figure 11, the control unit 91 ejects functional liquid from the 16 nozzles 64 of the first ejection head 63C onto 8 x 8 pixels arranged in the first direction D1 and the scanning direction Ds while repeatedly moving the first ejection head 63C in the first direction D1 and the scanning direction Ds.

[0083] Specifically, first, the control unit 91 ejects the functional liquid from the 16 nozzles 64 of the first ejection head 63C onto given 16 pixels (pixels hatched with diagonal lines in FIG. 11). Next, the control unit 91 operates the movement unit 42 to move the first ejection head 63C to the positive side of the scanning direction Ds (for example, the positive direction of the Y axis), and ejects the functional liquid from the 16 nozzles 64 of the first ejection head 63C onto the next 16 pixels. Next, the control unit 91 operates the movement unit 42 to move the first ejection head 63C to the negative side of the first direction D1 (for example, the negative direction of the X axis), and ejects the functional liquid from the 16 nozzles 64 of the first ejection head 63C onto the next 16 pixels. Finally, the control unit 91 operates the movement unit 42 to move the first ejection head 63C to the negative side of the scanning direction Ds (for example, the negative Y-axis direction), and ejects functional liquid from the 16 nozzles 64 of the first ejection head 63C onto the remaining 16 pixels.

[0084] In this way, in variant example 1, functional liquid is ejected from the 16 nozzles 64 of the first ejection head 63C onto multiple pixels aligned in the first direction D1 and the scanning direction Ds while repeatedly moving the first ejection head 63C in the first direction D1 and the scanning direction Ds.

[0085] This allows the functional liquid to be stably filled into a plurality of pixels aligned in the first direction D1 and the scanning direction Ds, thereby further improving the degree of freedom in drawing on the substrate S with the functional liquid.

[0086] In the above-described first modification, an example is shown in which the functional liquid is applied to a plurality of pixels on the substrate S, but the target to which the functional liquid is applied may be a BM (black matrix) located between adjacent pixels.

[0087] Furthermore, in the above-described variant example 1, an example was shown in which the first ejection head 63C is moved in the first direction D1 and the scanning direction Ds, but the stage 40 of the substrate transport mechanism 4 may also be moved in the first direction D1 and the scanning direction Ds.

[0088] <Variation 2> 12 is a diagram for explaining an example of a coating process performed by a coating processing apparatus 1 according to Modification 2 of the embodiment. Before explaining the coating process, an example of the configuration of the first to fourth discharge heads 63D to 63G included in the coating processing apparatus 1 according to Modification 2 of the embodiment will first be explained.

[0089] 12, the coating processing apparatus 1 according to the second modification includes first to fourth discharge heads 63D to 63G among the plurality of discharge heads 63. The first to fourth discharge heads 63D to 63G differ from one another in the arrangement pattern of one or more nozzles 64. Furthermore, the substrate S is divided into a plurality (four in this example) of pixel areas (for example, first to fourth pixel areas), and the first to fourth discharge heads 63D to 63G correspond one-to-one to the four pixel areas.

[0090] The first discharge head 63D has 16 nozzles 64 arranged in a matrix along the first direction D1 and the scanning direction Ds at a pitch that is an integer multiple of the pitch of the pixels on the substrate S. In the example of Fig. 12, the 16 nozzles 64 are arranged in a matrix along the first direction D1 and the scanning direction Ds at a pitch that is four times the pitch of the 18 x 19 pixels on the substrate S. Furthermore, the first discharge head 63D corresponds to a first pixel area including 16 x 16 pixels on the substrate S.

[0091] The second discharge head 63E has four nozzles 64 arranged in a row along the scanning direction Ds at a pitch that is an integer multiple of the pitch of multiple pixels on the substrate S. In the example of Fig. 12, the four nozzles 64 are arranged in a row along the scanning direction Ds at a pitch that is four times the pitch of the 18 x 19 pixels on the substrate S. Furthermore, the second discharge head 63E corresponds to a second pixel area including 16 x 3 pixels on the substrate S.

[0092] The third discharge head 63F has four nozzles 64 arranged in a row along the first direction D1 at a pitch that is an integer multiple of the pitch of the pixels on the substrate S. In the example of Fig. 12, the four nozzles 64 are arranged in a row along the first direction D1 at a pitch that is four times the pitch of the 18 x 19 pixels on the substrate S. Furthermore, the second discharge head 63E corresponds to a third pixel area including 2 x 16 pixels on the substrate S.

[0093] The fourth discharge head 63G has one nozzle 64. The fourth discharge head 63G corresponds to a fourth pixel area of ​​the substrate S that includes 2×3 pixels.

[0094] Next, the coating process performed by the coating processing apparatus 1 according to the second modification using the first to fourth discharge heads 63D to 63G will be described.

[0095] As shown in FIG. 12, the control unit 91 ejects the functional liquid onto a plurality of pixels in each pixel area from one or more nozzles 64 of the ejection head 63 corresponding to the pixel area among the first to fourth ejection heads 63D to 63G.

[0096] Specifically, the control unit 91 ejects the functional liquid onto 16 × 16 pixels included in a first pixel area from 16 nozzles 64 of a first ejection head 63D corresponding to the first pixel area. The control unit 91 also ejects the functional liquid onto 16 × 3 pixels included in a second pixel area from four nozzles 64 of a second ejection head 63E corresponding to the second pixel area. The control unit 91 also ejects the functional liquid onto 2 × 16 pixels included in a third pixel area from four nozzles 64 of a third ejection head 63F corresponding to the third pixel area. The control unit 91 also ejects the functional liquid onto 2 × 3 pixels included in a fourth pixel area from one nozzle 64 of a fourth ejection head 63G corresponding to the fourth pixel area.

[0097] The control unit 91 repeatedly moves the first to fourth ejection heads 63D to 63G in the first direction D1 and the scanning direction Ds to eject the functional liquid from one or more nozzles 64 of each ejection head 63 onto a plurality of pixels in each pixel area. The first to fourth ejection heads 63D to 63G may be moved in parallel or individually.

[0098] In this way, in the second modification, the functional liquid is ejected onto a plurality of pixels in each pixel area from one or more nozzles 64 of the ejection head 63 corresponding to the pixel area among the first to fourth ejection heads 63D to 63G.

[0099] This allows the functional liquid to be stably filled into a plurality of pixels in each pixel area, and therefore the degree of freedom in drawing on the substrate S with the functional liquid can be further improved.

[0100] In the above-described variant example 1, an example was shown in which the first to fourth ejection heads 63D to 63G are moved in the first direction D1 and the scanning direction Ds, but the stage 40 of the substrate transport mechanism 4 may also be moved in the first direction D1 and the scanning direction Ds.

[0101] <Variation 3> 13 is a diagram for explaining an example of a coating process performed by a coating processing apparatus 1 according to Modification 3 of the embodiment. Before explaining the coating process, an example of the configuration of the first to fourth discharge heads 63H to 63K included in the coating processing apparatus 1 according to Modification 2 of the embodiment will first be explained.

[0102] As shown in FIG. 13, the coating processing apparatus 1 according to Modification 3 includes first to fourth discharge heads 63 among the plurality of discharge heads 63. The first to fourth discharge heads 63H to 63K have mutually different arrangement patterns of one or more nozzles 64. The substrate S also has a plurality of drawing areas C arranged in a matrix along the first direction D1 and the scanning direction Ds, and each divided into first to fourth pixel areas. The first to fourth discharge heads 63D to 63G are respectively arranged to face four of these drawing areas C that are adjacent to each other along the scanning direction Ds. The arrangement pattern of the one or more nozzles 64 in the first to fourth discharge heads 63D to 63G is the same as the arrangement pattern of the one or more nozzles 64 in the first to fourth discharge heads 63D to 63G described above.

[0103] Next, the coating process performed by the coating processing device 1 according to the third modification using the first to fourth discharge heads 63H to 63K will be described.

[0104] The control unit 91 moves the substrate S to the positive side of the scanning direction Ds (for example, the positive direction of the Y axis) and ejects functional liquid from one or more nozzles 64 of the ejection head 63 corresponding to the drawing area C onto multiple pixels for each drawing area C.

[0105] This allows the functional liquid to be stably filled into a plurality of pixels in each drawing area C, thereby further improving the degree of freedom in drawing on the substrate S with the functional liquid.

[0106] <Variation 4> 14 is a diagram for explaining an example of a coating process performed by a coating processing apparatus 1 according to Modification 4 of the embodiment. Before explaining the coating process, a configuration example of a first discharge head 63L included in the coating processing apparatus 1 according to Modification 4 of the embodiment will first be described.

[0107] 14, the coating processing apparatus 1 according to the fourth modification includes a first discharge head 63L among the plurality of discharge heads 63. The first discharge head 63L has a plurality of (here, four) nozzles 64 aligned in a line along the first direction D1.

[0108] Next, the coating process performed by the coating processing apparatus 1 according to the fourth modification using the first discharge head 63L will be described.

[0109] 14, the control unit 91 ejects the functional liquid from the four nozzles 64 of the first ejection head 63L to a plurality of pixels aligned in the first direction D1 while moving the first ejection head 63L in the positive side of the first direction D1 (for example, the positive direction of the X axis). The functional liquid ejected from the four nozzles 64 of the first ejection head 63L is applied to the substrate S in an overlapping manner.

[0110] This allows a linear multilayer film M made of functional liquid to be formed on the substrate S in one scan (i.e., one movement of the first ejection head 63L), thereby further improving the degree of freedom in drawing the functional liquid on the substrate S and shortening the drawing processing time.

[0111] Note that both end portions of the linear multilayer film M tend to be thinner than other portions. In response to this, the control unit 91 may apply the functional liquid to both end portions of the linear multilayer film M using another discharge head 63 different from the first discharge head 63L, which has one nozzle 64.

[0112] Furthermore, in the above-described fourth modification, curved liquid films may be connected to both ends of the linear multilayer film M. In this case, the control unit 91 may apply the functional liquid using another discharge head 63 different from the first discharge head 63L, which has one nozzle 64, so that curved liquid films are formed at both ends of the linear multilayer film M.

[0113] Furthermore, in the above-described fourth modification, the control unit 91 may form another multilayer film that intersects with the linear multilayer film by using another ejection head 63 that is different from the first ejection head 63L and has a plurality of nozzles 64 aligned in a row along the scanning direction Ds. That is, the control unit 91 may eject the functional liquid from the plurality of nozzles 64 of the other ejection head 63 to a plurality of pixels aligned in the scanning direction Ds while moving the other ejection head 63 to the positive side of the scanning direction Ds (for example, the positive direction of the Y axis).

[0114] Furthermore, in the above-described fourth modification, an example was shown in which a line-shaped multilayer film M was formed by a single movement of the first ejection head 63L, but the shape of the multilayer film M is not limited to a line-shaped one. The shape of the multilayer film M may also be a wave-shaped one. In this case, the first ejection head 63L may have a plurality of nozzles 64 (four in this case) aligned in a row along the first direction D1 at a pitch equal to the period of a given wave-shaped one. The control unit 91 may then eject the functional liquid from the four nozzles 64 of the first ejection head 63L while moving the first ejection head 63L along the given wave-shaped one. This allows a wave-shaped multilayer film M to be formed by a single movement of the first ejection head 63L.

[0115] A coating processing apparatus according to an embodiment (for example, coating processing apparatus 1) includes a substrate holding unit (for example, stage 40), a plurality of ejection heads (for example, ejection head 63), and a moving unit (for example, moving unit 42). The substrate holding unit holds a substrate (for example, substrate S) having a plurality of pixels. Each of the plurality of ejection heads has one or more nozzles (for example, nozzle 64) arranged thereon, and ejects functional liquid from the one or more nozzles onto a plurality of pixels of the substrate held by the substrate holding unit. The moving unit moves the plurality of ejection heads relative to the substrate holding unit. The plurality of ejection heads differ from one another in at least one of the arrangement pattern of the one or more nozzles and the distribution of the ejection amount per nozzle. This allows for improved drawing freedom and quality.

[0116] Furthermore, the plurality of ejection heads may have different ejection amount distributions for each nozzle. The coating processing apparatus according to the embodiment may include a control unit (for example, a control unit 91) that controls each unit. The control unit may acquire ejection amount distribution data indicating the distribution of the ejection amount for each nozzle in one ejection of the functional liquid for each of the plurality of ejection heads. The control unit may calculate the number of ejections of the functional liquid for each ejection head based on the ejection amount distribution data so as to reduce the difference in the distribution of the ejection amount for each nozzle among the plurality of ejection heads. The control unit may eject the functional liquid from one or more nozzles of each ejection head onto multiple pixels of the substrate based on the number of ejections of the functional liquid calculated for each ejection head. This makes it possible to suppress degradation of drawing quality due to differences in the distribution of the ejection amount for each nozzle among the plurality of ejection heads.

[0117] Furthermore, the multiple ejection heads may have different ejection amount distributions for each nozzle. The coating processing apparatus according to the embodiment may include a control unit (for example, a control unit 91) that controls each unit. The control unit may acquire ejection amount distribution data indicating the distribution of the ejection amount for each nozzle in one ejection of functional liquid for one of the multiple ejection heads. The control unit may calculate a movement amount of one ejection head from its initial position based on the ejection amount distribution data so as to reduce the difference in ejection amount for each nozzle in the single ejection head. The control unit may eject functional liquid from one or more nozzles of the single ejection head onto multiple pixels of the substrate while moving the single ejection head based on the calculated movement amount from its initial position. This makes it possible to suppress degradation of drawing quality due to the difference in ejection amount for each nozzle in the single ejection head.

[0118] The multiple discharge heads may also include a first discharge head (for example, first discharge head 63C) having one or more nozzles arranged in a matrix along a first direction (for example, first direction D1) and a second direction (for example, scanning direction Ds) intersecting the first direction at a pitch that is an integer multiple of the pitch of multiple pixels on the substrate. The coating processing apparatus according to the embodiment may also include a control unit (for example, control unit 91) that controls each unit. The control unit may discharge the functional liquid from one or more nozzles of the first discharge head to the multiple pixels arranged in the first direction and the second direction while repeatedly moving the first discharge head or the substrate holding unit in the first direction or the second direction. This further improves the degree of freedom in drawing with the functional liquid on the substrate.

[0119] Furthermore, the arrangement patterns of one or more nozzles of the multiple ejection heads may be different from each other. The substrate may be divided into multiple pixel areas that correspond one-to-one to the multiple ejection heads. The coating processing apparatus according to the embodiment may include a control unit (for example, a control unit 91) that controls each unit. The control unit may eject the functional liquid from one or more nozzles of a ejection head, among the multiple ejection heads, that corresponds to the pixel area, onto multiple pixels in each pixel area. This further improves the degree of freedom in drawing with the functional liquid on the substrate.

[0120] The multiple discharge heads may also include a first discharge head (for example, first discharge head 63L) having multiple nozzles aligned in a given direction (for example, first direction D1). The coating processing apparatus according to the embodiment may also include a control unit (for example, control unit 91) that controls each unit. The control unit may discharge functional liquid from the multiple nozzles of the first discharge head while moving the first discharge head or the substrate holding unit in the given direction, toward multiple pixels aligned in the given direction. This further improves the degree of freedom in drawing with the functional liquid on the substrate.

[0121] The disclosed embodiments should be considered in all respects as illustrative and not restrictive. Indeed, the above-described embodiments may be embodied in various forms. Furthermore, the above-described embodiments may be omitted, substituted, or modified in various ways without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0122] 1 Coating treatment equipment 4. Substrate transport mechanism 6 Application section 9 Control Device 40 stages 42 Moving section 63, 63A, 63B Discharge Head 63C, 63D, 63L First ejection head 64 nozzles 91 Control Unit 92 Memory section S board

Claims

1. a substrate holder that holds a substrate having a plurality of pixels; a plurality of ejection heads, each having one or more nozzles arranged thereon, that eject functional liquid from the one or more nozzles onto the plurality of pixels of the substrate held by the substrate holding unit; a moving unit that moves the plurality of ejection heads and the substrate holding unit relatively; Equipped with The plurality of ejection heads include: At least one of the arrangement pattern of the one or more nozzles and the distribution of the ejection amount for each nozzle is different from each other. Coating treatment equipment.

2. The plurality of ejection heads include: the distribution of the discharge amount for each nozzle is at least different from each other, Control unit for controlling each part Equipped with The control unit acquiring ejection amount distribution data indicating a distribution of the ejection amount for each of the nozzles in one ejection of the functional liquid for each of the plurality of ejection heads; determining the number of times the functional liquid is ejected from each of the ejection heads based on the ejection amount distribution data so as to reduce a difference in the distribution of the ejection amount for each of the nozzles among the plurality of ejection heads; The functional liquid is ejected from the one or more nozzles of each ejection head onto the plurality of pixels of the substrate based on the number of ejections of the functional liquid determined for each ejection head. The coating treatment device according to claim 1 .

3. The plurality of ejection heads include: the distribution of the discharge amount for each nozzle is at least different from each other, Control unit for controlling each part Equipped with The control unit acquiring ejection amount distribution data indicating a distribution of the ejection amount for each nozzle in one ejection of the functional liquid for one ejection head of the plurality of ejection heads; determining a movement amount from an initial position of the one ejection head based on the ejection amount distribution data so as to reduce a difference in ejection amount between the nozzles in the one ejection head; The functional liquid is ejected from the one or more nozzles of the one ejection head onto the plurality of pixels of the substrate while the one ejection head is moved based on the calculated movement amount from the initial position of the one ejection head. The coating treatment device according to claim 1 .

4. The plurality of ejection heads include: a first ejection head having the one or more nozzles arranged in a matrix along a first direction and a second direction intersecting the first direction at a pitch that is an integer multiple of the pitch of the plurality of pixels on the substrate; Including, Control unit for controlling each part Equipped with The control unit the functional liquid is ejected from the one or more nozzles of the first ejection head to the plurality of pixels aligned in the first direction and the second direction while repeatedly moving the first ejection head or the substrate holding unit in the first direction or the second direction. The coating treatment device according to claim 1 .

5. The plurality of ejection heads include: The arrangement patterns of the one or more nozzles are at least different from each other, The substrate is divided into a plurality of pixel areas corresponding one-to-one to the plurality of ejection heads, Control unit for controlling each part Equipped with The control unit The functional liquid is discharged onto the plurality of pixels in each pixel area from the one or more nozzles of a discharge head corresponding to the pixel area among the plurality of discharge heads. The coating treatment device according to claim 1 .

6. The plurality of ejection heads include: a first ejection head having a plurality of nozzles aligned in a given direction; Including, Control unit for controlling each part Equipped with The control unit The functional liquid is ejected from the plurality of nozzles of the first ejection head to the plurality of pixels aligned in the given direction while moving the first ejection head or the substrate holding unit in the given direction. The coating treatment device according to claim 1 .

7. a step of acquiring, for each of the plurality of ejection heads, ejection amount distribution data indicating the distribution of the ejection amount for each nozzle in one ejection of the functional liquid for each of the plurality of ejection heads, using a coating treatment device comprising: a substrate holding unit that holds a substrate having a plurality of pixels; a plurality of ejection heads, each having one or more nozzles arranged thereon, that eject a functional liquid from the one or more nozzles onto the plurality of pixels of the substrate held by the substrate holding unit; and a movement unit that moves the plurality of ejection heads and the substrate holding unit relatively, wherein the plurality of ejection heads are different from one another in at least one of an arrangement pattern of the one or more nozzles and a distribution of the ejection amount for each nozzle; determining the number of times the functional liquid is ejected for each of the ejection heads based on the ejection amount distribution data so that a difference in the distribution of the ejection amount for each of the nozzles among the plurality of ejection heads is reduced; ejecting the functional liquid from the one or more nozzles of each ejection head onto the plurality of pixels of the substrate based on the number of times of ejection of the functional liquid determined for each ejection head; A coating treatment method comprising:

8. a step of acquiring, for each of the plurality of ejection heads, ejection amount distribution data indicating the distribution of the ejection amount for each nozzle in a single ejection of the functional liquid from each of the plurality of ejection heads using a coating treatment device in which at least one of an arrangement pattern of the one or more nozzles and a distribution of the ejection amount for each nozzle is different from one another; determining the number of times the functional liquid is ejected from each of the ejection heads based on the ejection amount distribution data so that a difference in the distribution of the ejection amount for each of the nozzles among the plurality of ejection heads is reduced; ejecting the functional liquid from the one or more nozzles of each ejection head onto the plurality of pixels of the substrate based on the number of times of ejection of the functional liquid determined for each ejection head; A computer-readable storage medium on which a program that causes a computer to realize the above is non-temporarily recorded.

Images