Automatic coupler for supplying utilities

Abstract

To provide an automatic coupler for supplying utilities.SOLUTION: According to the present invention, an automatic coupler for supplying utilities comprises: a first coupling member (110) provided in one of a utility supply end and a utility reception end; a first valve body (120) that is provided in the first coupling member (110) and has an elastically-supported first check ball (121) such that a flow passage is opened and closed by the first check ball (121); a second coupling member (210) that is provided in the other of the utility supply end and the utility reception end and is coupled to the first coupling member (110); and a second valve body (220) that is provided in the second coupling member (210) and has an elastically-supported second check ball (221) such that a flow passage is opened and closed by the second check ball (221).SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to an autocoupler for connecting utility pneumatics. [Background technology]

[0002] Generally, semiconductor manufacturing processes require various utilities such as air, nitrogen, vacuum, deionized water (DW), and power supply, and it is very important to smoothly supply utilities during the manufacturing process.

[0003] For example, in the packaging process of semiconductor devices, a tester and handler are used to electrically test unit semiconductor devices after assembly is complete. The handler receives electrical signals and performs mechanical operations to connect the semiconductor devices to contactors connected to the tester, test their electrical characteristics, classify the semiconductor devices as defective or not based on the test results, and unload the semiconductor devices using semiconductor package carriers such as tubes and trays. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Korean Patent Publication No. 10-2000-0015678 (Publication Date: March 15, 2000) Summary of the Invention [Problem to be solved by the invention]

[0005] An object of the present invention is to provide an autocoupler for utility supply that can prevent leaks between a utility supply end and a utility receiving end for supplying utilities in manufacturing equipment and can stably connect air pressure. [Means for solving the problem]

[0006] In order to achieve the above object, the utility supply autocoupler of the present invention includes: a first coupling member provided at either the utility supply end or the utility receiving end; a first valve body provided at the first coupling member and equipped with a resiliently supported first check ball for opening and closing a flow path by the first check ball; a second coupling member provided at the other of the utility supply end or the utility receiving end and coupled to the first coupling member; and a second valve body provided at the second coupling member and equipped with a resiliently supported second check ball for opening and closing a flow path by the second check ball, wherein the second valve body includes a main body portion, a first floating body portion resiliently supported relative to the main body portion, and a second floating body portion resiliently supported relative to the first floating body portion, disposed so that a portion of the second check ball protrudes outside the first floating body portion, and elastically supports the second check ball so that the second check ball protrudes outside the first floating body portion.

[0007] Preferably, the second valve body is provided such that the second floating body portion protrudes by a certain height based on a contact surface of the first floating body portion that contacts the first valve body, and the second check ball protrudes higher than the protruding height of the second floating body portion.

[0008] Preferably, the first valve body and the second valve body further include an airtight member provided on at least one of two opposing contact surfaces for maintaining airtightness.

[0009] Preferably, the valve includes a first elastic body that elastically supports the main body portion and the first floating body portion, a second elastic body that elastically supports the first floating body portion and the second floating body portion, and a third elastic body that elastically supports the second floating body portion and the second check ball, wherein the first elastic body has a larger elastic modulus than the second elastic body, and the second elastic body has a larger elastic modulus than the third elastic body.

[0010] More preferably, the second valve body further includes a valve stem fixed to the second floating body portion and supporting the third elastic body. [Effects of the Invention]

[0011] The utility supply autocoupler of the present invention includes a first coupling member provided at either the utility supply end or the utility receiving end; a first valve body provided at the first coupling member and having a resiliently supported first check ball for opening and closing a flow path by the first check ball; a second coupling member provided at the other of the utility supply end or the utility receiving end and coupled to the first coupling member; and a second valve body provided at the second coupling member and having a resiliently supported second check ball for opening and closing a flow path by the second check ball. The second valve body includes a main body portion, a first floating body portion resiliently supported relative to the main body portion, and a second floating body portion resiliently supported relative to the first floating body portion, with a portion of the second check ball protruding outside the first floating body portion, and resiliently supporting the second check ball so that a portion of the second check ball protrudes outside the first floating body portion. This minimizes the possibility of leakage that may occur when the two valve bodies are connected, thereby maintaining a stable pneumatic connection. [Brief explanation of the drawings]

[0012] [Figure 1]1A and 1B are configuration diagrams showing a utility supply autocoupler according to an embodiment of the present invention in a disconnected state and a connected state, respectively. [Figure 2] 1 is a cross-sectional view of an auto-coupler for utility supply according to an embodiment of the present invention; [Figure 3] 1 is a cross-sectional view showing a connection process of an auto-coupler for utility supply according to an embodiment of the present invention; [Figure 4] 1 is a cross-sectional view showing a connection process of an auto-coupler for utility supply according to an embodiment of the present invention; [Figure 5] 1 is a cross-sectional view showing a connection process of an auto-coupler for utility supply according to an embodiment of the present invention; [Figure 6] 1 is a cross-sectional view showing a connection process of an auto-coupler for utility supply according to an embodiment of the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0013] The specific structure or functional description presented in the embodiments of the present invention is merely exemplary for the purpose of describing the embodiments according to the inventive concept, and the embodiments according to the inventive concept can be embodied in various forms. Furthermore, it should not be construed as being limited to the embodiments described herein, but should be understood to include all modifications, equivalents, and alternatives within the spirit and technical scope of the present invention.

[0014] The present invention will now be described in detail with reference to the accompanying drawings.

[0015] 1(a) and 1(b) are configuration diagrams showing a utility supply auto-coupler 1 according to an embodiment of the present invention in a disconnected state and a connected state, respectively.

[0016] Referring to (a) and (b) of Figure 1, a utility supply autocoupler 1 according to an embodiment of the present invention includes a first coupling member 110, a first valve body 120, a second coupling member 210, and a second valve body 220.

[0017] The first coupling member 110 and the second coupling member 210 are provided at the utility receiving end and the utility supply end, respectively, and may include a male-female coupling guide member. In this embodiment, the coupling guide member includes a guide arm 211 protruding from the second coupling member 210 in the coupling direction and a guide groove 111 recessed in the first coupling member 110 corresponding to the guide arm 211 and into which the guide arm 211 is inserted. Such a guide member may be modified into various shapes as long as the first coupling member 110 and the second coupling member 210 can be coupled. Meanwhile, although not shown, a separate locking member may be added to mechanically lock or unlock the coupled state of the first coupling member 110 and the second coupling member 210.

[0018] The first valve body 120 is provided in the first flow passage 112 of the first coupling member 110 and includes a first check ball 121 that is elastically supported, and the flow passage is opened and closed by the first check ball 121. Preferably, the first check ball 121 is elastically supported within the first valve body 120 such that at least a portion of the first check ball 121 protrudes outside the first valve body 120.

[0019] The second valve body 220 is provided in the second flow path 212 of the second coupling member 210 and includes a resiliently supported second check ball 221, which opens and closes the flow path. Preferably, the second check ball 221 is resiliently supported within the second valve body 220 such that at least a portion of the second check ball 221 protrudes outside the second valve body 220.

[0020] When the first and second coupling members 110 and 210 maintain a state in which the first and second valve bodies 120 and 220 are spaced apart, the air pressure is blocked by the check balls 121 and 221 of the valve bodies 120 and 220. Meanwhile, when the first and second coupling members 110 and 210 are coupled together, the check balls 121 and 221 of the first and second valve bodies 120 and 220 are pressed inward, connecting the supply and receiving ends of the utility (air pressure) to each other.

[0021] In particular, in the present invention, the contact process between the first valve body 120 and the second valve body 220 is comprised of two steps, which can minimize the possibility of leakage that may occur when the first valve body 120 and the second valve body 220 are connected.

[0022] The configuration of each valve body, which is a main component of the present invention, will be described in detail below with reference to the related drawings. Fig. 2 is a cross-sectional view of the auto-coupler 1 for utility supply according to an embodiment of the present invention.

[0023] Referring to FIG. 2, the second valve body 220 includes a second check ball 221 , a main body portion 222 , a first floating body portion 223 , and a second floating body portion 224 .

[0024] The main body portion 222 has a hollow shape and constitutes the main exterior of the second valve body 220. It is assembled with the second connecting member 210. The main body portion 222 is provided with a first elastic body S1 that elastically supports the first floating body portion 223. The lower end of the main body portion 222 is provided with a first locking step 222a bent inwardly, and the first floating body portion 223, which is inserted into the main body portion 222 and elastically supported by the first elastic body S1, has its lower end supported by the first locking step 222a. In this embodiment, the first floating body portion 223 is provided with a second flow path 212 therein.

[0025] The second floating body part 224 is inserted into the first floating body part 223 and elastically supported by the second elastic body S2, and a second locking step 222a that supports the second check ball 221 is provided at the outer opening end of the flow path, and the diameter of the opening with the second locking step 222a is smaller than the diameter of the second check ball 221.

[0026] The second floating body part 224 is elastically supported with the first floating body part 223 by the second elastic body S2 and is provided so that a portion of the second floating body part 224 protrudes outward from the first floating body part 223 by a certain height d1. Also, a third elastic body S3 is provided to elastically support the second check ball 221 so that a portion of the second check ball 221 protrudes outward from the first floating body part 223.

[0027] Preferably, the second floating body part 224 further includes a first airtight member 225 for maintaining airtightness on a contact surface that faces and contacts the first valve body 120. For example, such first airtight member 225 can be provided by a well-known O-ring. Meanwhile, although the present embodiment illustrates the first airtight member 225 being provided on the second floating body part 224, it may also be provided around the open end of the first floating body part 223 to achieve airtightness with the first valve body 120.

[0028] In the second valve body 220, the first floating body portion 223 protrudes by a certain height d1 based on the contact surface of the first floating body portion 223 that contacts the first valve body 120, and the second check ball 221 protrudes by a certain height d2 that is higher than the protruding height d1 of the first floating body portion 223 (d1 <d2)。

[0029] Preferably, the second valve body 220 further includes a first valve stem 226 that is fixed to the first floating body portion 223 and positioned on the flow path, and that supports the third elastic body S3, and a first guide stem 226a that extends from the first valve stem 226 and into which a portion of the third elastic body S3 is inserted.

[0030] Preferably, the first elastic body S1 has a greater elastic modulus than the second elastic body S2, and the second elastic body S2 has a greater elastic modulus than the third elastic body S3. Therefore, when the second valve body 220 and the first valve body 120 come into contact with each other, the third elastic body S3, the second elastic body S2, and the first elastic body S1 are compressed in sequence, and the second check ball 221 is inserted into the second floating body portion 224 (compression of the third elastic body S3), and then the first floating body portion 223 is inserted into the main body portion 222 (compression of the second elastic body S2 and the third elastic body S3).

[0031] The first valve body 120 has a hollow shape, constitutes the main exterior of the first valve body 120, and is assembled with the first connecting member 110. Preferably, a second airtight member 126 may be provided to maintain the airtightness of the first connecting member 110. The first valve body 120 is provided with a second locking step 120a that supports the first check ball 121 at the outer open end of the flow path, and the diameter of the open end with the second locking step 120a is smaller than the diameter of the first check ball 121. The first valve body 120 further includes a second valve stem 124 that supports the fourth elastic body S4, and may further include a second guide stem 124a extending from the second valve stem 124 and into which a portion of the fourth elastic body S4 is inserted.

[0032] The first valve body 120 has a contact surface with the second valve body 220 as a reference, and the first check ball 121 is provided so as to protrude a certain height d3 so that a part of the first check ball 121 protrudes outward.

[0033] Preferably, the first valve body 120 further includes a valve body head 122 coupled to the first coupling member 110 and protruding outward, and the outer diameter D1 of the valve body head 122 is smaller than the inner diameter D2 of the open end of the main body portion 222.

[0034] 3 to 6 are cross-sectional configuration diagrams showing the connection process of the utility supply auto-coupler 1 according to the embodiment of the present invention.

[0035] The connection process of the utility supply autocoupler 1 of the present invention configured as above will be described with reference to Figures 3 and 6. To facilitate understanding, it will be explained that the first valve body 120 is fixed and the second valve body 220 moves to connect the first valve body 120 and the second valve body 220.

[0036] 3 and 4, as the second valve body 220 moves downward, the first check ball 121 and the second check ball 221 come into contact and are pressed against each other (see FIG. 3), and as the second elastic body S2 and the fourth elastic body S4 are compressed, the first check ball 121 and the second check ball 221 are drawn into the first valve body 120 and the second floating body portion 224, respectively, and the flow paths of the first valve body 120 and the second valve body 220 begin to connect (see FIG. 4). Meanwhile, when the first check ball 121 and the second check ball 221 are completely drawn into the first valve body 120 and the second floating body portion 224, the upper surface of the valve body head 122 and the lower surface of the second floating body portion 224 are in close contact with each other.

[0037] 5 and 6, as the second valve body 220 continues to move downward, the second elastic body S2 is compressed, the second floating body part 224 is drawn into the inside of the first floating body part 223, and the first floating body part 223 is drawn into the inside of the main body part 222, completely connecting the flow paths of the first valve body 120 and the second valve body 220. Meanwhile, with the flow paths of the first valve body 120 and the second valve body 220 connected, the first airtight member 225 provided between the contact surfaces of the first valve body 120 and the first floating body part 223 can enhance the airtight effect.

[0038] The first valve body 120 and the second valve body 220 are disconnected by performing the connection process in reverse. As the first valve body 120 and the second valve body 220 move apart, the check balls 121 and 221 are pulled outward, blocking the flow paths of the valve bodies 120 and 220.

[0039] Meanwhile, in this embodiment, the first coupling member 110 equipped with the first valve body 120 and the second coupling member 210 equipped with the second valve body 220 are described as being provided at the utility receiving end and the utility supply end, respectively. However, they may be arranged in the reversed manner, and one of the first coupling member 110 and the second coupling member 210 may be fixed and the other may move to connect the first valve body 120 and the second valve body 220, or the first coupling member 110 and the second coupling member 210 may move together to connect the first valve body 120 and the second valve body 210.

[0040] The present invention described above is not limited to the above-described embodiments and accompanying drawings, and it will be apparent to those skilled in the art to which the present invention pertains that various substitutions, modifications, and changes can be made without departing from the technical spirit of the present invention. [Explanation of symbols]

[0041] 1 Utility supply auto coupler 110 First connecting member 120 First valve body 121 First Check Ball 210 second connecting member 220 Second valve body 221 Second Check Ball 222 Main body section 223 First Floating Body Section 224 Second Floating Body Section S1 First elastic body S2 Second elastic body S3 Third elastic body S4 Fourth elastic body

Claims

1. a first coupling member provided at either the utility supply end or the utility receiving end; a first valve body provided on the first coupling member and having a first check ball elastically supported thereon, the first check ball opening and closing a flow path; a second coupling member provided at the other of the utility supply end and the utility receiving end, the second coupling member being coupled to the first coupling member; a second valve body provided on the second coupling member and having a second check ball elastically supported thereon, the second check ball opening and closing the flow path; The second valve body is The main body and a first floating body portion elastically supported by the main body portion; a second floating body portion that is elastically supported by the first floating body portion and that is provided so that a portion of the second check ball protrudes outside the first floating body portion, and that elastically supports the second check ball so that a portion of the second check ball protrudes outside the first floating body portion.

2. 2. The utility supply autocoupler according to claim 1, wherein the second valve body protrudes a certain height from a contact surface of the first floating body portion that contacts the first valve body, and the second check ball protrudes higher than the protruding height of the second floating body portion.

3. 2. The utility supply autocoupler according to claim 1, wherein the first valve body and the second valve body further include an airtight member provided on at least one of two opposing contact surfaces for maintaining airtightness.

4. a first elastic body that elastically supports the main body portion and the first floating body portion, a second elastic body that elastically supports the first floating body portion and the second floating body portion, and a third elastic body that elastically supports the second floating body portion and the second check ball, 2. The utility supply autocoupler according to claim 1, wherein the first elastic body has a greater elastic modulus than the second elastic body, and the second elastic body has a greater elastic modulus than the third elastic body.

5. 5. The utility supply autocoupler according to claim 4, wherein the second valve body further includes a valve stem fixed to the second floating body portion and supporting the third elastic body.

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