Control plate for high conductance valve

Abstract

To reduce potential fluid stagnation in a control plate for a high-purity control valve used in making semiconductor devices, pharmaceuticals or fine chemicals.SOLUTION: A control plate for a high-conductance valve comprises: a control plate body formed as a circular disk configured to be moved within a valve by an actuator; a counterbore 2042 formed in the control plate body and fluidly communicating with a fluid conduit; a plurality of radial fluid flow paths opening into the counterbore; and a plurality of axial fluid flow paths formed in the control plate body; and a polymer insert disk. The polymer insert disk comprises: a plurality of pillars extending through the control plate body; and a plurality of plugs extending radially from a pillar.SELECTED DRAWING: Figure 20B-1

Description

[Technical Field]

[0001] [CROSS-REFERENCE TO RELATED APPLICATIONS] This application is a continuation-in-part of U.S. patent application Ser. No. 16 / 178,247, entitled "CONTROL PLATE FOR A HIGH CONDUCTANCE VALVE," filed Nov. 1, 2018, U.S. patent application Ser. No. 15 / 997,172, entitled "CONTROL PLATE FOR A HIGH CONDUCTANCE VALVE," filed June 4, 2018, and U.S. provisional patent application Ser. No. 62 / 515,063, entitled "CONTROL PLATE WITH FLOW-THROUGH PASSAGE FOR A VALVE," filed June 5, 2017. Each of these U.S. patent applications is incorporated herein by reference in its entirety for all purposes. This application is related to U.S. patent application Ser. No. 15 / 204,245, entitled "CONTROL PLATE IN A VALVE," filed July 7, 2016, U.S. patent application Ser. No. 15 / 182,978, entitled "LOW HYSTERESIS DIAPHRAGM FOR A VALVE," filed June 15, 2016, U.S. patent application Ser. No. 14 / 932,086, entitled "VALVE STROKE AMPLIFIER MECHANISM ASSEMBLY," filed November 4, 2015, and U.S. patent application Ser. No. 14 / 737,564, entitled "HIGH CONDUCTANCE VALVE FOR FLUIDS AND VAPORS," filed June 12, 2015. Each of these U.S. patent applications is incorporated herein by reference in its entirety for all purposes.

[0002] The present invention relates to a moving part of a fluid control valve that can be actively positioned anywhere between a fully open and a fully closed condition to regulate the flow of fluid through the valve. The moving part includes a provision for a portion of the flowing fluid to pass through a control plate, thereby improving cleanliness by reducing the possibility of fluid stagnation. The present invention is particularly useful for valves intended for high-purity proportional or modulating control of fluid delivery within industrial processes that manufacture semiconductor devices, pharmaceuticals, or fine chemicals, and many similar fluid delivery systems that simultaneously require proportional control as well as leak-tight isolation in the fully closed condition. Summary of the Invention

[0003] In view of the above, a high-purity fluid control valve is presented herein, including a movable control plate having at least one throughflow passage for enhanced fluid sweep of the internal valve volume. The valve is of the jet and seat type, in which a relatively narrow, planar land is formed at the opening of the fluid passage, and a flat seat can move into contact with the land to block fluid flow. In this disclosure, the jet element is generally referred to as an orifice ridge, and the seat element is generally referred to as a control plate. The valve achieves high conductance with small actuator movements by using nested orifice ridges to provide a large control gap length with a small enclosed area. The control plate has continuous, uninterrupted flat portions sized to bridge adjacent orifice ridge portions and block fluid flow when fully closed. The orifice ridges are coplanar and circumferentially provide a smooth surface on which the control plate rests. A flow-through control plate is particularly useful in fast-acting proportional control applications, such as gas delivery in semiconductor manufacturing.

[0004] According to one embodiment, the control plate comprises a control plate body formed as an essentially circular disk having a flat side and an opposing side opposite the flat side, the control plate being configured to be moved within the valve by an actuator, the flat side having a continuous, uninterrupted flat portion for blocking fluid flow within the valve; a counterbore in the control plate body in communication with a fluid conduit; a plurality of radial fluid passages in the control plate body terminating in the counterbore; and a plurality of axial fluid passages in the control plate body, the radial fluid passages providing communication from the counterbore to a circumferential portion of the counterbore, and the axial fluid passages providing communication with an intermediate valve chamber portion which is in communication with the fluid conduit.

[0005] According to another embodiment, a valve assembly includes a valve body having a valve chamber, at least one first fluid conduit opening communicating with the valve chamber, at least one second fluid conduit opening communicating with the valve chamber, and at least one pair of adjacent orifice ridge segments extending from the valve body into the valve chamber and defining an intermediate valve chamber segment between the at least one pair of adjacent orifice ridge segments; and a control plate body formed as an essentially circular disk having a flat side and an opposite side opposite the flat side, the control plate having an axle. a control plate body configured to be moved within the valve by the actuator, the flat side having a continuous, uninterrupted flat portion for blocking fluid flow within the valve; a counterbore within the control plate body in communication with a fluid conduit; a plurality of radial fluid passages within the control plate body terminating in the counterbore; and a plurality of axial fluid passages within the control plate body, the radial fluid passages providing communication from the counterbore to a circumferential portion of the counterbore, and the axial fluid passages providing communication with an intermediate valve chamber portion which communicates with the fluid conduit.

[0006] According to another embodiment, a method of using a control plate to communicate fluid through a high conductance valve includes pumping fluid through a valve body having a valve chamber, at least one first fluid conduit opening in communication with the valve chamber, at least one second fluid conduit opening in communication with the valve chamber, and at least one pair of adjacent orifice ridge sections extending from the valve body into the valve chamber and defining an intermediate valve chamber section between the at least one pair of adjacent orifice ridge sections; and moving a control plate body within the valve body using a valve actuator, the control plate body having a flat side and a recessed portion on the flat side. the valve is formed as a circular disk having opposing opposite sides, the flat sides having a continuous uninterrupted flat portion for blocking fluid flow within the valve; directing fluid through a plurality of radial fluid passages, the radial passages being formed in the control plate body and terminating in a counterbore of the control plate body; and directing fluid through a plurality of axial fluid passages, the axial fluid passages being formed in the control plate body, the radial fluid passages providing communication from the counterbore to a circumferential portion of the counterbore, the axial fluid passages providing communication with an intermediate valve chamber portion which communicates with a fluid conduit.

[0007] In some embodiments, an axial fluid passage extends through the control plate body to create a communication path between the middle valve chamber and the upper valve chamber portion of the high conductance valve.

[0008] In some embodiments, an axial fluid passage extends from the radial fluid passage through the control plate body, creating a communication path between the radial fluid passage and the intermediate valve chamber.

[0009] In some embodiments, the intermediate valve chamber is a second intermediate valve chamber of a high conductance valve.

[0010] In some embodiments, the control plate further comprises a polymer insert disk comprising a plurality of pillars each extending through the control plate body and a plurality of plugs each extending radially from the pillars.

[0011] In some embodiments, an axial passage extends through at least one pillar to create a communication path between the middle and upper valve chamber portions of the high conductance valve and the at least one plug.

[0012] In some embodiments, at least one axial fluid passage extends from the radial fluid passage through the polymer insert disc, creating a communication path between the radial fluid passage and the intermediate valve chamber.

[0013] In some embodiments, the seat insert includes a disk that fills a circular groove formed in the control plate body, and the seat insert includes a first continuous, uninterrupted flat portion disposed radially inward of the plurality of fluid passages and a second continuous, uninterrupted flat portion disposed radially outward of the plurality of fluid passages.

[0014] In some embodiments, the control plate is attached to a stub suspended below the diaphragm, and the distance between the control plate and the diaphragm is minimized to reduce the swept volume. [Brief explanation of the drawings]

[0015] [Figure 1A] FIG. 1 is a plan view of an exemplary high conductance valve body having a central concentric orifice ridge. [Figure 1B] 1B is a cross-sectional view of the high conductance valve body of FIG. 1A taken along line II. [Figure 1C] FIG. 1B is a top perspective view of the high conductance valve body of FIG. 1A. [Figure 1D] 1B is a top perspective cross-sectional view of the high conductance valve body of FIG. 1A taken along line II. [Figure 2A] FIG. 1 is a plan view of one embodiment of a control plate having throughflow passages for high conductance valves. [Figure 2B] 2B is a cross-sectional view of the control plate of FIG. 2A taken along line II-II. [Figure 2C] FIG. 2B is a top perspective view of the control plate of FIG. 2A. [Figure 2D] 2B is a top perspective cross-sectional view of the control plate of FIG. 2A taken along line II-II. [Figure 3A] FIG. 10 is a plan view of another embodiment of a control plate having throughflow channels for high conductance valves. [Figure 3B] 3B is a cross-sectional view of the control plate of FIG. 3A taken along line III-III. [Figure 3C] FIG. 3B is a top perspective view of the control plate of FIG. 3A. [Figure 3D] 3B is a top perspective cross-sectional view of the control plate of FIG. 3A taken along line III-III. [Figure 4A] 2A-2D in combination with a valve topwork placed on a high conductance valve body having a concentric central orifice ridge according to FIGS. 1A-1D. [Figure 4B] 4B is a cross-sectional view of the valve assembly of FIG. 4A taken along line IV-IV. [Figure 4C] FIG. 4B is a top perspective view of the valve assembly of FIG. 4A. [Figure 4D] FIG. 4B is a top perspective cross-sectional view of the valve assembly of FIG. 4A taken along line IV-IV. [Figure 5A] 3A-3D in combination with a valve topwork placed on a high conductance valve body having a central concentric orifice ridge according to FIGS. 1A-1D. [Figure 5B] 5B is a cross-sectional view of the valve assembly of FIG. 5A taken along line VV. [Figure 5C] FIG. 5B is a top perspective view of the valve assembly of FIG. 5A. [Figure 5D] FIG. 5B is a top perspective cross-sectional view of the valve assembly of FIG. 5A taken along line VV. [Figure 6A] FIG. 10 is a plan view of another exemplary high conductance valve body having offset concentric orifice ridges. [Figure 6B] 6B is a cross-sectional view of the high conductance valve body of FIG. 6A taken along line VI-VI. [Figure 6C] FIG. 6B is a top perspective view of the high conductance valve body of FIG. 6A. [Figure 6D] 6B is a top perspective cross-sectional view of the high conductance valve body of FIG. 6A taken along line VI-VI. [Figure 7A] FIG. 1 illustrates one embodiment of a control plate having a through-flow passage combined with a valve stroke amplifier disk. [Figure 7B] 7B is a cross-sectional view of the control plate and valve stroke amplifier disk of FIG. 7A taken along line VII-VII. [Figure 7C] FIG. 7B is a top perspective view of the control plate of the combined control plate and valve stroke amplifier disk of FIG. 7A. [Figure 7D] 7B is a top perspective cross-sectional view of the control plate of the combined control plate and valve stroke amplifier disk of FIG. 7A taken along line VII-VII. [Figure 7E] FIG. 7B is a top perspective view of the combined control plate and valve stroke amplifier disk of FIG. 7A. [Figure 7F] 7B is a top perspective cross-sectional view of the combined control plate and valve stroke amplifier disk of FIG. 7A taken along line VII-VII. [Figure 8A] 7A-7F are plan views of a control plate having throughflow channels and amplifier disks in combination with a valve topwork installed on a high conductance valve body having offset concentric orifice ridges in accordance with FIGS. 6A-6D. [Figure 8B] 8B is a cross-sectional view of the valve assembly of FIG. 8A taken along line VIII-VIII. [Figure 8C] FIG. 8B is a top perspective view of the valve assembly of FIG. 8A. [Figure 8D] 8B is a top perspective cross-sectional view of the valve assembly of FIG. 8A taken along line VIII-VIII. [Figure 9A] FIG. 10 is a plan view of another embodiment of a control plate having throughflow channels for high conductance valves. [Figure 9B] 9B is a cross-sectional view of the control plate of FIG. 9A taken along line IX-IX. [Figure 9C] FIG. 9B is a top perspective view of the control plate of FIG. 9A. [Figure 9D] 9B is a top perspective cross-sectional view of the control plate of FIG. 9A taken along line IX-IX. [Figure 10A] FIG. 10 is a plan view of another exemplary high conductance valve body having two nested groups of concentric orifice ridges. [Figure 10B] 10B is a cross-sectional view of the high conductance valve body of FIG. 10A taken along line XX. [Figure 10C] FIG. 10B is a top perspective view of the high conductance valve body of FIG. 10A. [Figure 10D] 10B is a top perspective cross-sectional view of the high conductance valve body of FIG. 10A taken along line XX. [Figure 11A] 9A-9D in combination with a valve topwork installed on a high conductance valve body having nested groups of concentric orifice ridges according to FIGS. 10A-10D. [Figure 11B] FIG. 11B is a cross-sectional view of the valve assembly of FIG. 11A taken along line XI-XI. [Figure 11C] FIG. 11B is a top perspective view of the valve assembly of FIG. 11A. [Figure 11D] FIG. 11B is a top perspective cross-sectional view of the valve assembly of FIG. 11A taken along line XI-XI. [Figure 12A] FIG. 10 is a plan view of another exemplary high conductance valve body having two nested groups of concentric orifice ridges. [Figure 12B] 12B is a cross-sectional view of the high conductance valve body of FIG. 12A taken along line XII-XII. [Figure 12C] FIG. 12B is a top perspective view of the high conductance valve body of FIG. 12A. [Figure 12D] 12B is a top perspective cross-sectional view of the high conductance valve body of FIG. 12A taken along line XII-XII. [Figure 13A] FIG. 10 is a plan view of another embodiment of a control plate having throughflow channels for high conductance valves. [Figure 13B] 13B is a cross-sectional view of the control plate of FIG. 13A taken along line XIII-XIII. [Figure 13C] 13B is an exploded top perspective view of the control plate of FIG. 13A showing the two portions that make up the control plate. [Figure 13D] FIG. 13B is a top perspective view of the control plate of FIG. 13A. [Figure 13E] 13B is a top perspective cross-sectional view of the control plate of FIG. 13A taken along line XIII-XIII. [Figure 14A] 13A-13E in combination with a valve topwork installed on a high conductance valve body having nested groups of concentric orifice ridges according to FIGS. 12A-12D. [Figure 14B] FIG. 14B is a cross-sectional view of the valve assembly of FIG. 14A taken along line XIV-XIV. [Figure 14C] FIG. 14B is a top perspective view of the valve assembly of FIG. 14A. [Figure 14D] 14B is a top perspective cross-sectional view of the embodiment of FIG. 14A taken along line XIV-XIV. [Figure 15A] FIG. 10 is a plan view of another embodiment of a control plate having throughflow channels for high conductance valves. [Figure 15B] 15B is a cross-sectional view of the control plate of FIG. 15A taken along line XV-XV. [Figure 15C] 15B is an exploded top perspective view of the control plate of FIG. 15A showing the three sections that make up the control plate. [Figure 15D] FIG. 15B is a top perspective view of the control plate of FIG. 15A. [Figure 15E] 15B is a top perspective cross-sectional view of the control plate of FIG. 15A taken along line XV-XV. [Figure 16A]15A-15E in combination with a valve topwork installed on a high conductance valve body having nested groups of concentric orifice ridges according to FIGS. 12A-12D. [Figure 16B] 16B is a cross-sectional view of the valve assembly of FIG. 16A taken along line XVI-XVI. [Figure 16C] FIG. 16B is a top perspective view of the valve assembly of FIG. 16A. [Figure 16D] 16B is a top perspective cross-sectional view of the valve assembly of FIG. 16A taken along line XVI-XVI. [Figure 17A] FIG. 10 is a plan view of another exemplary high conductance valve body having two nested groups of concentric orifice ridges. [Figure 17B] 17B is a cross-sectional elevation view of the high conductance valve body of FIG. 17A taken along line XVII-XVII. [Figure 17C] FIG. 17B is a top perspective view of the high conductance valve body of FIG. 17A. [Figure 17D] 17B is a top perspective view of an angled cross section of the high conductance valve body of FIG. 17A taken along line XVII-XVII. FIG. [Figure 18A-1] FIG. 10 is a plan view of another embodiment of a control plate having throughflow channels for high conductance valves. [Figure 18A-2] FIG. 10 is a plan view of another embodiment of a control plate having throughflow channels for high conductance valves. [Figure 18B-1] 18A-1 along line XVIII-XVIII. FIG. 18A-1 is a cross-sectional elevation view of the control plate of FIG. [Figure 18B-2] 18A-18A is a cross-sectional elevation view of the control plate of FIG. 18A-2 taken along line XVIII-XVIII. [Figure 18C-1] FIG. 18A-2 is a top perspective view of the control plate of FIG. 18A-1. [Figure 18C-2] FIG. 18A-3 is a top perspective view of the control plate of FIG. 18A-2. [Figure 18D-1] 18A-1 along line XVIII-XVIII. FIG. 18A-1 is a top perspective view of an angled cross section of the control plate of FIG. [Figure 18D-2]18A-18A is a top perspective view of an angled cross section of the control plate of FIG. 18A-2 taken along line XVIII-XVIII. [Figure 19A-1] 18A-1 to 18D-1 in combination with a valve topwork installed on a high conductance valve body having nested groups of concentric orifice ridges according to FIGS. 17A-1 to 17D. [Figure 19A-2] 18A-2 to 18D-2 in combination with a valve topwork installed on a high conductance valve body having nested groups of concentric orifice ridges according to FIGS. 17A to 17D. [Figure 19B-1] FIG. 19A-1 is a cross-sectional view of the valve assembly of FIG. 19A-1 taken along line XIX-XIX. [Figure 19B-2] FIG. 19A-2 is a cross-sectional view of the valve assembly of FIG. 19A-2 taken along line XIX-XIX. [Figure 19C-1] FIG. 19A-2 is a top perspective view of the valve assembly of FIG. 19A-1. [Figure 19C-2] FIG. 19A-3 is a top perspective view of the valve assembly of FIG. 19A-2. [Figure 19D-1] FIG. 19A-2 is a top perspective view of an angled cross section of the embodiment of FIG. 19A-1 taken along line XIX-XIX. [Figure 19D-2] FIG. 19A-19A is a top perspective view of an angled cross section of the embodiment of FIG. 19A-2 taken along line XIX-XIX. [Figure 20A-1] FIG. 10 is a plan view of another embodiment of a control plate having throughflow channels for high conductance valves. [Figure 20A-2] FIG. 10 is a plan view of another embodiment of a control plate having throughflow channels for high conductance valves. [Figure 20B-1] FIG. 20A-1 is a cross-sectional elevation view of the control plate of FIG. 20A-1 taken along line XX-XX. [Figure 20B-2] FIG. 20A-2 is a cross-sectional elevation view of the control plate of FIG. 20A-2 taken along line XX-XX. [Figure 20C-1] FIG. 20A-2 is a top perspective view of the control plate of FIG. 20A-1. [Figure 20C-2] FIG. 20A-2 is a top perspective view of the control plate of FIG. [Figure 20D-1] FIG. 20A-2 is a top perspective view of an angled cross section of the control plate of FIG. 20A-1 taken along line XX-XX. [Figure 20D-2] FIG. 20A-2 is a top perspective view of an angled cross section of the control plate of FIG. 20A-2 taken along line XX-XX. [Figure 21A-1] 20A-1 to 20D-1 in combination with a valve topwork installed on a high conductance valve body having nested groups of concentric orifice ridges according to FIGS. 20A-1 to 20D-1 according to FIGS. 17A to 17D. [Figure 21A-2] 20A-2 to 20D-2 in combination with a valve topwork installed on a high conductance valve body having nested groups of concentric orifice ridges according to FIGS. 17A to 17D. [Figure 21B-1] FIG. 21A is a cross-sectional elevation view of the valve assembly of FIG. 21A-1 taken along line XXI-XXI. [Figure 21B-2] FIG. 21A is a cross-sectional elevation view of the valve assembly of FIG. 21A-2 taken along line XXI-XXI. [Figure 21C-1] FIG. 21A-2 is a top perspective view of the valve assembly of FIG. 21A-1. [Figure 21C-2] FIG. 21A-3 is a top perspective view of the valve assembly of FIG. 21A-2. [Figure 21D-1] FIG. 21A-2 is a top perspective view of an angled cross section of the valve assembly of FIG. 21A-1 taken along line XXI-XXI. [Figure 21D-2] FIG. 21A is a top perspective view of an angled cross section of the valve assembly of FIG. 21A-2 taken along line XXI-XXI. DETAILED DESCRIPTION OF THE INVENTION

[0016] The present invention is not limited herein to the details of construction and the arrangement of components set forth in the following description or illustrated in the drawings. The present invention is capable of other embodiments and of being practiced or carried out in various ways. Furthermore, the phraseology and terminology used herein are for purposes of description and should not be regarded as limiting. The use of "including," "comprising," "having," "containing," "involving," and variations thereof herein is meant to encompass the items listed before it and equivalents thereof, as well as additional items. The use of directional terms such as "inside," "outside," "above," "below," etc., is intended to aid in the understanding of the relative relationships between design elements and should not be construed to imply absolute directions in space or be regarded as limiting.

[0017] A representative example of a high-conductance valve body 190 having central concentric orifice ridges 120, 121 is shown in FIGS. 1A-1D. A more complete, exemplary valve assembly 100 can have a topwork including a valve housing 160 removably joined to the valve body 190 by deforming a metal gasket 165 into a leak-tight assembly, further shown in FIGS. 4A-4D. The topwork can include an actuator (not shown) selected for a particular application. For example, a pneumatic actuator might be used for a simple on-off high-conductance valve, while a piezoelectric actuator might be used for a proportionally controlled high-conductance valve compatible with a mass flow controller electronic system. The open cavities 154, 158, 159 formed in the upper surface of the valve body 190 can be considered the lower portion of the valve chamber 150, while the upper portion 157 of the valve chamber is formed above it in the lower surface of the valve housing 160. A large orifice ridge 120 formed as a circular upward protrusion from the valve body 190 separates the outer valve chamber portion 158 from the intermediate valve chamber portion 154 that is surrounded by the large orifice ridge 120. A generally concentric small orifice ridge 121 is also formed as a circular upward protrusion from the valve body 190 that is surrounded by the large orifice ridge 120 and further separates the inner valve chamber portion 159 from the intermediate valve chamber portion 154. Throughout this disclosure, the contiguous volume located between a pair of adjacent orifice ridge segments (e.g., between large orifice ridge 120 and small orifice ridge 121) may be referred to as an intermediate valve chamber segment, the contiguous volume located outside the pair(s) of adjacent orifice ridge segments may be referred to as an outer valve chamber segment (e.g., 158), and the contiguous volume located inside the pair(s) of adjacent orifice ridge segments may be referred to as an inner valve chamber segment (e.g., 159), for purposes of distinction only and not to a direction of fluid flow. A gasket seal area 164 may be formed in the upper surface of valve body 190 to house a metal gasket 165 adjacent the periphery of outer valve chamber segment 158.

[0018] The exemplary valve 100 may further include a first fluid conduit 110 (typically an inlet) and a second fluid conduit 114 (typically an outlet), both of which communicate fluid with a valve chamber 150, a valve chamber sealing diaphragm 170, and a control element that is movable by deflection of the valve chamber sealing diaphragm 170. The movable control element may comprise a control plate 200 (described further below) secured to a control shaft 182 that is secured to the diaphragm 170. In the design of the exemplary valve 100, the first fluid conduit opening 112 provides communication between the inner valve chamber portion 159 and the first fluid conduit 110. Similarly, the second fluid conduit opening 116 provides communication between the middle valve chamber portion 154 and the second fluid conduit 114. In the present illustration of Figures 4A-4D, the valve 100 is fully closed in a no-blocking, no-flow condition, so that the control plate 200 is shown contacting both the large orifice ridge 120 and the small orifice ridge 121. Designers will recognize that the first and second fluid conduits 110, 114 can provide fluid passage to surface-mounted component interfaces rather than the illustrated tube stubs. K1S and W seals are examples of surface-mounted component interfaces known in semiconductor capital equipment design and therefore are not shown in the drawings of this disclosure. Components including the valves can be constructed from materials selected for their desired chemical inertness with respect to the fluids handled, including, for example, stainless steel, Monel™ metal, titanium alloy, Hastelloy™ alloy, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and combinations of metals and polymers, separately or together. For example, a Type 316L stainless steel valve body 190 may be used with a Hastelloy™ nickel alloy control plate 200 and an Elgiloy™ cobalt alloy sealing diaphragm 170 .

[0019] The example of a through-flow control plate 200 shown in FIGS. 2A-2D includes a control plate body 240 formed as a substantially circular disk with one or more features on opposing sides of the disk. These features may include a central through-hole 242, a counterbore 244, and one or more upper holes 246. The counterbore 244 is typically central and is formed in the flat disk side that is typically intended to face the orifice ridges 120, 121. The one or more upper holes 246 may extend through the control plate body 240 from the opposing disk side, thereby leaving one or more webs 248 between the central through-hole 242 and the control plate body 240. Alternatively, the upper holes 246 may be positioned to intersect the counterbore 244, while also leaving one or more webs 248 between the central through-hole 242 and the remainder of the control plate body 240. The webs 248 bridge the counterbore 244. In either case, the upper bore 246 provides a fluid passageway through which fluid can pass from one side of the control plate body 240 to the opposite side without having to pass around the outer diameter periphery. As shown in FIGS. 4A-4D, the control plate 200 can be attached to a stub on the control shaft 182 and thereby suspended within the valve chamber 150. Any suitable attachment method can be used, such as a press fit (e.g., see FIGS. 9A-9D), swaging the head of the stub, threaded fasteners, welding, or similar design choices as desired by the implementer, so long as the fluid passageway through the upper bore 246 is not obstructed. It should be appreciated that rather than attaching the control plate to the stub on the control shaft 182 using the through bore 242 as shown in FIGS. 2A-2D, a blind hole mounting can instead be used as shown in FIGS. 9A-9D.

[0020] The method of controlling fluid flow can be further understood by considering that the inner valve chamber portion 159, surrounded by the small orifice ridge 121, is connected by the first fluid conduit opening 112 that communicates with the first fluid conduit 110, such that at least a portion of the control plate 200 can move toward or outward from the small orifice ridge 121 to create a first control gap (not shown) through which the first fluid portion can controllably flow. The controllable first fluid portion can transition from the inner valve chamber portion 159 through the first control gap directly to the middle valve chamber portion 154, from which it can exit through the offset second fluid conduit opening 116 that communicates with the second fluid conduit 114. In the present example valve 100, an actuator (not shown) applies a force to the control shaft 182 to deflect the diaphragm 170, thereby modulating the conductance through the valve 100 by changing the first control gap.

[0021] Concurrent with the flow of the first fluid portion described above, moving at least a portion of the control plate 200 toward or outward from the large orifice ridge 120 similarly creates a second control gap (not shown) through which a second fluid portion can controllably flow. The controllable second fluid portion can migrate from the inner valve chamber portion 159 through the upper hole 246 of the control plate 200 and sweep through the upper valve chamber portion 157 into the outer valve chamber portion 158, from which the second fluid portion can exit through the second control gap into the middle valve chamber portion 154. Upon reaching the middle valve chamber portion 154, the controllable second fluid portion can also exit through the offset second fluid conduit opening 116, which communicates with the second fluid conduit 114. Thus, in this example valve 100, an actuator (not shown) that applies a force to the control shaft 182 to deflect the diaphragm 170 further modulates the conductance through the valve 100 by varying the second control gap. It should be appreciated that while valve 100 is closed, fluid can pass through the holes in control plate 200 but cannot proceed any further. When valve 100 is closed, fluid cannot pass from first fluid conduit 110 to second fluid conduit 114.

[0022] The designer will recognize that the large and small orifice ridges 120, 121 need not be strictly concentric, but merely nested, and further, the nested pair of orifice ridges 120, 121 can be asymmetrically positioned relative to the shape and dimensions of the inner valve chamber 150. The throughflow control plate 200 must, of course, have a continuous, uninterrupted surface area on the lower, flat side of the disk-shaped body 240 that spans between contact with the large and small orifice ridges 120, 121 and is sufficient to cover the entire intermediate valve chamber portion 154. A single orifice ridge (not shown) of non-circular shape could also have an adjacent portion that encloses the intermediate valve chamber portion that the throughflow control plate can completely cover. The designer will also recognize that the described direction of fluid flow, traveling from the first fluid conduit 110 to the second fluid conduit 114, is used for convenience and clarity but is not limiting. Fluid can flow in the opposite direction from the second fluid conduit 114 to the first fluid conduit 110, still advantageously sweeping the complete valve chamber 150 with controllable fluid flow. The valve design shown in FIGS. 4A-4D also substantially eliminates any concerns regarding internal dead space versus swept volume, potentially improving the dynamic response of the exemplary valve design. The flow-through control plate allows for the use of nested orifice ridges 120, 121, which together create an overall control gap length approximately twice the circumference of a single large orifice, while significantly reducing the area that must be closed to achieve shutoff. This combination provides high conductance with low closing force. It should be recognized that in diaphragm-sealed valves of the type shown in FIGS. 4A-4D, the amount of axial displacement of the control plate 200 (e.g., up and down in the cross-sectional view of FIG. 4B) is very limited (e.g., approximately 50 μm for piezoelectrically actuated valves and approximately 200 μm for solenoid-actuated valves). Thus, the use of nested orifice ridges allows for a higher conductance, approximately twice the conductance achievable with a single orifice ridge alone.

[0023] Another example of a through-flow control plate 300 is shown in FIGS. 3A-3D and includes a control plate body 341 formed as a substantially circular disk with one or more features on opposing sides of the disk. These features can include a central through-hole 343, a spherical pocket (or recess) 345, and one or more angled-top holes 347. The spherical pocket 345 is typically central and is formed in the flat disk side that is typically intended to face the orifice ridges 120, 121. The one or more angled-top holes 347 extend through the control plate body 341 from the spherical pocket 345 to the opposing disk side, thereby leaving one or more webs 349 between the central through-hole 343 and the remainder of the control plate body 341. The webs 349 bridge the spherical pockets 345. The spherical pockets 345 are useful when drilling the angled-top holes 347. These angled holes are advantageous because their entrances are locally perpendicular to the pocket surface, thereby minimizing drill wobble or bending. The angled top holes 347 provide a fluid passageway through which fluid can pass from one side of the control plate body 341 to the opposite side without having to pass around the outer diameter periphery. As shown in FIGS. 5A-5D, the control plate 300 can be attached to a stub on the control shaft 182 and thereby suspended within the valve chamber 150. Any suitable attachment method can be used, such as a press fit (e.g., see FIGS. 9A-9D), swaging the head of the stub, threaded fasteners, welding, or similar design choices as desired by the implementer, so long as the fluid passageway through the angled top holes 347 is not obstructed. It should be appreciated that rather than attaching the control plate to the stub on the control shaft 182 using through holes 343 as shown in FIGS. 3A-3D, a blind hole attachment can instead be used as shown in FIGS. 9A-9D.

[0024] 5A-5D using the exemplary through-flow control plate 300 to control fluid flow in the valve assembly shown in FIGS. 4A-4D using the exemplary through-flow control plate 200 described above can further be understood as being essentially the same as that described for the valve assembly shown in FIGS. 4A-4D using the exemplary through-flow control plate 200 described above. A controllable first fluid portion can migrate directly from the inner valve chamber portion 159 through a first control gap (not shown) to the middle valve chamber portion 154, from which the first fluid portion can exit through an offset second fluid conduit opening 116 that communicates with the second fluid conduit 114. With respect to the through-flow control plate 300 in particular, a controllable second fluid portion can migrate from the inner valve chamber portion 159 through the angled upper hole 347 in the control plate 300 and sweep through the upper valve chamber portion 157 into the outer valve chamber portion 158, from which the second fluid portion can exit through the second control gap into the middle valve chamber portion 154. The through-flow control plate 300 must also have a continuous, uninterrupted surface area on the lower, flat side of the disk-shaped body 341 that spans between contact with the large orifice ridge 120 and the small orifice ridge 121 and is sufficient to cover the entire intermediate valve chamber portion 154. Designers will also recognize that the illustrated direction of fluid flow in the exemplary valve assembly shown in FIGS. 5A-5D is used for convenience and clarity, but is not limiting. Fluid can flow in the opposite direction, and the complete valve chamber 150 will still be advantageously swept by the controllable fluid flow. The valve assembly design shown in FIGS. 5A-5D also substantially eliminates any concerns regarding internal dead space versus swept volume, improving the dynamic response of the exemplary valve design. The through-flow control plate allows for the use of nested orifice ridges 120, 121, which together create an overall control gap length approximately twice the circumference of a single large orifice, while significantly reducing the area that must be closed to achieve shutoff. This combination provides high conductance with low closing force.

[0025] A representative example of another high-conductance valve body 490 having nested orifice ridges 420, 421 is shown in Figures 6A-6D. A more complete, exemplary valve assembly 400 can have a topwork including a valve housing 460 removably joined to the valve body 490 by deforming a metal gasket 465 into a leak-tight assembly, further shown in Figures 8A-8D. The topwork can include an actuator (not shown) selected for a particular application. For example, a pneumatic actuator might be used for a simple on-off high-conductance valve, while a piezoelectric actuator might be used for a proportionally controlled high-conductance valve compatible with a mass flow controller electronic system. The open cavities 454, 458, 459 formed in the upper surface of the valve body 490 can be considered the lower portion of the valve chamber, while the upper portion 457 of the valve chamber is formed above it in the lower surface of the valve housing 460. A large orifice ridge 420, formed as an offset, generally circular upward protrusion within the valve body 490, separates an outer valve chamber portion 458 from the middle valve chamber portion 454 that it surrounds. A nested small orifice ridge 421, also formed as a circular upward protrusion from the valve body 490, separates an inner valve chamber portion 459 from the middle valve chamber portion 454 that it surrounds. A gasket seal area 464 may be formed in the upper surface of the valve body 490 to house a metal gasket 465 adjacent the periphery of the outer valve chamber portion 458.

[0026] The exemplary valve 400 may further include a first fluid conduit 417 (typically an inlet) and a second fluid conduit 414 (typically an outlet), both of which communicate fluid with a valve chamber, a valve chamber sealing diaphragm 470, and a control element that is movable by deflection of the valve chamber sealing diaphragm 470. The control element may consist of a control plate 600 (described further below) that includes a valve stroke amplifier mechanism secured to a control shaft 482 that is secured to the diaphragm 470. In the design of the exemplary valve 400, a first fluid conduit opening 419 provides communication between the outer valve chamber portion 458 and the first fluid conduit 417. Similarly, a second fluid conduit opening 416 provides communication between the middle valve chamber portion 454 and the second fluid conduit 414. In the present illustration of Figures 8A-8D, the valve assembly 400 is fully closed in a no-blocking, no-flow condition, so that the control plate 600 is shown contacting both the large orifice ridge 420 and the small orifice ridge 421. Designers will recognize that the first fluid conduit 417 and the second fluid conduit 414 can provide fluid passage to surface mount component interfaces rather than the illustrated tube stubs. K1S and W seals are examples of surface mount component interfaces known in semiconductor capital equipment design and therefore are not shown in the drawings of this disclosure. Components including the valves can be constructed from materials selected for their desired chemical inertness with respect to the fluids handled, including, for example, stainless steel, Monel™ metal, titanium alloy, Hastelloy™ alloy, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and combinations of metals and polymers, either separately or together. For example, a Type 316L stainless steel valve body 490 may be used with a Hastelloy™ nickel alloy control plate 600 and an Elgiloy™ cobalt alloy sealing diaphragm 470 .

[0027] Another example of a flow-through control plate 600, shown in FIGS. 7A-7F and included in FIGS. 8A-8D, includes a control plate body 640 and a valve stroke amplification mechanism amplifier disk 641, as described in U.S. Patent Application No. 14 / 932,086, filed November 4, 2015, by inventor Kim Ngoc Vu. As shown in FIGS. 7A-7F, the control plate body 640 is formed as a substantially circular disk having features including a central through-hole 642, a ring-shaped groove 644, and an upper relief 646. The ring-shaped groove 644 and the upper relief 646 are formed in the side of the disk opposite the flat side intended to face one or more orifice ridges. The upper relief 646 is positioned to intersect with a portion of the ring-shaped groove 644 and the central through-hole 642, thereby providing an open fluid passageway through which fluid can pass from one side of the control plate body 640 to the opposite side without having to pass around the outer diameter periphery. Amplifier disk 641 is described in detail in the referenced U.S. patent application Ser. No. 14 / 932,086. Amplifier disk features of interest to this application include lift holes 643, a passive portion, an active portion 649, an air gap passage 639 adjacent to the active portion, attachment points 645, and a torsion bar 648. Control plate body 640 and amplifier disk 641 are attached to one another by welding at two attachment points 645, whereby torsion bar 648 and active portion 649 form a web that bridges a portion of upper relief 646 and annular groove 644. A portion of air gap passage 639 is immediately adjacent upper relief 646, thereby providing a fluid path that allows fluid to pass from one side of control plate 600 to the opposite side without having to pass around the outer diameter periphery of the assembly. 8A-8D, the control plate 600 can be attached to the stubs of the control shaft 482 using the lift holes 643 in the stroke amplifier disk, thereby being suspended within the valve chamber. Any suitable attachment method can be used, such as a press fit, swaging the head of the stub, threaded fasteners, welding, or similar design choices as desired by the practitioner, so long as the fluid passages through the top relief 646 and the gap passages 639 in the amplifier disk are not obstructed.

[0028] A force from a top work actuator (not shown) applied at lifting holes 643 in the amplifier disk within active portion 649 will be transferred to attachment point 645 by torsion bar 648. In the event of such an applied force being a lifting event, passive portion 647 will hold an off-center first portion of throughflow control plate body 640 downward, while a diametrically opposite second portion will be lifted upward by the diametric force applied at attachment point 645. The resulting movement will open a wedge-shaped gap between the flat bottom surface of the control plate and both large and small orifice ridges 420, 421 in the exemplary valve 400 shown in FIGS. 8A-8D. When valve 400 is in the closed state (as shown in FIGS. 8A-8D), the various amplifier disk elements are nominally coplanar, and throughflow control plate body 640 contacts large and small orifice ridges 420, 421.

[0029] The method of controlling fluid flow can be further understood by considering that outer valve chamber portion 458 is supplied by first fluid conduit opening 419 in communication with first fluid conduit 417, such that at least a portion of control plate 600 can move toward or outward from large orifice ridge 420 to create a wedge-shaped first control gap (not shown) through which a first fluid portion can controllably flow. The controllable first fluid portion can transition from outer valve chamber portion 458 through the first control gap directly to middle valve chamber portion 454, from which it can exit through second fluid conduit opening 416 in communication with second fluid conduit 414. In this example valve 400, an actuator (not shown) can apply a force to control shaft 482 to deflect diaphragm 470, thereby modulating conductance through valve 400 by changing the first control gap. It should be appreciated that while the valve 400 is closed, fluid can pass from the first fluid conduit 417, through the first fluid conduit opening 419, around the periphery of the control plate 600, to the outer valve chamber portion 458 and upper portion 457 of the valve chamber, and through holes in the control plate 600 to the inner valve chamber portion 459, but cannot proceed any further. Thus, when the valve 400 is closed, fluid cannot pass from the first fluid conduit 417 to the second fluid conduit 414.

[0030] Concurrent with the flow of the first fluid portion described above, moving at least a portion of the control plate 600 toward or outward from the small orifice ridge 421 similarly creates a wedge-shaped second control gap (not shown) through which a second fluid portion can controllably flow. The controllable second fluid portion can migrate from the outer valve chamber portion 458 through the upper valve chamber portion 457, then sweep through the control plate 600, through the amplifier disk void passage 639 and the upper relief 646 of the control plate body 640, and into the inner valve chamber portion 459, where it can then migrate from the inner valve chamber portion 459 through the second control gap to the middle valve chamber portion 454, from which it can exit through the second conduit opening 416 in communication with the second fluid conduit 414. Thus, in this example valve 400, an actuator (not shown) that applies a force to the control shaft 482 to deflect the diaphragm 470 further modulates the conductance through the valve 400 by varying the second control gap. Designers will also recognize that the illustrated direction of fluid flow in the exemplary valve assembly shown in FIGS. 8A-8D is used for convenience and clarity, but is not limiting. Fluid can flow in the opposite direction, and the complete valve chamber 450 will still be advantageously swept by the controllable fluid flow. The valve assembly design shown in FIGS. 8A-8D also substantially eliminates any concerns regarding internal dead space versus swept volume and can also improve the dynamic response of the exemplary valve design. The flow-through control plate allows for the use of nested orifice ridges 420, 421, which together create an overall control gap length approximately twice the circumference of a single large orifice, while significantly reducing the area that must be closed to achieve shutoff. This combination provides high conductance with low closing force.

[0031] A representative example of another high-conductance valve body 890 having two nested groups of central concentric orifice ridges 820, 821, 822, and 823 is shown in FIGS. 10A-10D. A more complete exemplary valve assembly 1000 can have a topwork including a valve housing 860 removably joined to the valve body 890 by deforming a metal gasket 865 into a leak-tight assembly, further shown in FIGS. 11A-11D. The topwork can include an actuator (not shown) selected for a particular application. For example, a manual actuator might be used for a simple on-off high-conductance valve, while a piezoelectric or solenoid actuator might be used for a proportional-control high-conductance valve compatible with a mass flow controller electronic system. The open cavities 852, 854, 856, 858, 859 formed in the upper surface of the valve body 890 can be considered lower portions of the valve chamber, while the upper valve chamber portion 857 is formed in the underside of the valve housing 860 above it. A largest orifice ridge 820 formed as a circular upward protrusion from the valve body 890 separates the outer valve chamber portion 858 from a first intermediate valve chamber portion 856 that is surrounded by the largest orifice ridge 820. A generally concentric first smaller orifice ridge 821 also formed as a circular upward protrusion from the valve body 890 that is surrounded by the largest orifice ridge 820 further separates the enclosed second intermediate valve chamber portion 854 from the first intermediate valve chamber portion 856. A generally concentric second, smaller orifice ridge 822 is also formed as a circular upward protrusion from the valve body 890, surrounded by the first, smaller orifice ridge 821, and further separates the enclosed third, intermediate valve chamber portion 852 from the second, intermediate valve chamber portion 854. A generally concentric minimum orifice ridge 823 is also formed as a circular upward protrusion from the valve body 890, surrounded by the second, smaller orifice ridge 822, and further separates the inner valve chamber portion 859 from the third, intermediate valve chamber portion 852. A gasket seal area 864 can be formed in the upper surface of the valve body 890 for receiving a metal gasket 865 adjacent the periphery of the outer valve chamber portion 858.

[0032] The exemplary valve 1000 may further include a first fluid conduit 810 (typically an inlet) and a second fluid conduit 814 (typically an outlet), both of which communicate fluid with a valve chamber, a valve chamber sealing diaphragm 870, and a control element that is movable by deflection of the valve chamber sealing diaphragm 870. The movable control element may further comprise a control plate 900 (described further below) secured to a control shaft 882 that is secured to the diaphragm 870. In the design of the exemplary valve 1000, a first fluid conduit opening 812 provides communication between the inner valve chamber portion 859 and the first fluid conduit 810. Similarly, one or more second fluid conduit openings 816 provide communication between the first middle valve chamber portion 856 and the second fluid conduit 814. Similarly, one or more third inner fluid conduit openings 818 are provided, providing communication between the third intermediate valve chamber portion 852 and the second fluid conduit 814. In the present illustration of FIGS. 11A-11D, the valve 1000 is fully closed in a no-blocking, no-flow condition, so that the control plate 900 is shown contacting all four orifice ridges: largest orifice ridge 820, first smaller orifice ridge 821, second smaller orifice ridge 822, and smallest orifice ridge 823. Designers will recognize that the first and second fluid conduits 810 and 814 can provide fluid passage to surface mount component interfaces rather than the illustrated tube stubs. K1S and W seals are examples of surface mount component interfaces known in semiconductor capital equipment design and, therefore, are not shown in the drawings of this disclosure. The components comprising the valve can be constructed from materials selected for their desired chemical inertness with respect to the fluids being handled, and can include, for example, stainless steel, Monel™ metal, titanium alloy, Hastelloy™ alloy, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and combinations of metals and polymers, separately or together. For example, a Type 316L stainless steel valve body 890 can be used with a Hastelloy™ nickel alloy control plate 900 and an Elgiloy™ cobalt alloy sealing diaphragm 870.Alternatively, the valve body, sealing diaphragm, and control plate body can all be made from the same stainless steel alloy.

[0033] The example of a through-flow control plate 900 shown in Figures 9A-9D includes a control plate body 940 formed as a generally circular disk with one or more features on opposing sides of the disk. These features may include a central mounting hole 942 (blind or through), one or more first intermediate through-holes 944, and one or more second intermediate through-holes 946. As shown in Figures 11A-11D, the control plate 900 may be attached to a stub on the control shaft 882, thereby being suspended within the valve chamber. Any suitable attachment method may be used, such as a press fit, swaging the head of the stub, threaded fasteners, welding, or similar design choices as desired by the practitioner, so long as the fluid passage formed by the first intermediate through-hole 944 and the second intermediate through-hole 946 is not obstructed. It should be appreciated that rather than using blind holes to mount the control plate 900 to the stubs of the control shaft 882 as shown in Figures 9A-9D, through-hole mounting can instead be used as shown in Figures 2A-2D, 3A-3D, and 7A-7F.

[0034] One or more first intermediate through-holes 944 extend through the control plate body 940 and are typically spaced apart around a first circle of constant diameter surrounding the central mounting hole 942. The diameter of the first circle and the diameters of the first intermediate through-holes 944 are selected so that they cover only the inner valve chamber portion 859 and do not overlap the adjacent smallest orifice ridge 823. As shown in FIGS. 9A-9D and 11A-11D, angle drilling the first intermediate through-holes 944 allows for the use of larger diameter holes while avoiding overlap with the smallest orifice ridge 823. Although not shown, it should be appreciated that spherical pockets or recesses can be used to assist in drilling the first intermediate through-holes 944 in the manner discussed above with respect to FIGS. 3A-3D. The first intermediate through-holes 944 provide a fluid passageway through which fluid can pass from one side of the control plate body 940 to the opposite side without having to pass around the outer diameter periphery. More specifically, the first intermediate through-holes 944 fluidly connect the inner valve chamber portion 859 with the upper valve chamber portion 857. A web of material 945 between one or more adjacent first intermediate through-holes 944 provides a mechanical connection from the central mounting hole 942 to a continuous, uninterrupted first surface area 941 on the lower flat side of the disk-shaped control plate body 940, the first surface area 941 having sufficient radial extent to span between contact with the second, smaller orifice ridge 822 and contact with the smallest orifice ridge 823 while covering the entire third intermediate valve chamber portion 852.

[0035] One or more second intermediate through-holes 946 extend through the control plate body 940 and are typically spaced apart around a second circle of constant diameter that further surrounds the first surface region 941 and the first intermediate through-holes 944. The diameter of the second circle and the diameters of the second intermediate through-holes 946 are selected so that the through-holes cover only the second intermediate valve chamber portion 854 and do not overlap the adjacent first smaller orifice ridge 821 or second smaller orifice ridge 822. The second intermediate through-holes 946 define a fluid passageway through which fluid can pass from one side of the control plate body 940 to the opposite side without having to pass around the outer diameter periphery. More specifically, the second intermediate through-holes 946 fluidly connect the second intermediate valve chamber portion 854 to the upper valve chamber portion 857. The web of material 947 between one or more adjacent intermediate through holes 946 provides a mechanical connection from the first surface region 941 to a continuous, uninterrupted second surface region 943 on the lower flat side of the disk-shaped body 940, the second surface region 943 having sufficient radial extent to span between contact with the largest orifice ridge 820 and contact with the first, smaller orifice ridge 821 while covering the entire first intermediate valve chamber portion 856.

[0036] The method of controlling fluid flow can be further understood by considering that the inner valve chest portion 859, surrounded by the smallest orifice ridge 823, is supplied by the first fluid conduit opening 812 that communicates with the first fluid conduit 810, such that at least a portion of the control plate 900 can move toward or outward from the smallest orifice ridge 823 to create a first control gap (not shown) through which the first fluid portion can controllably flow. The controllable first fluid portion can migrate directly to the third intermediate valve chest portion 852, from which it can exit through one or more third fluid conduit openings 818 that communicate with the second fluid conduit 814. The second fluid portion can migrate from the inner valve chest portion 859 upward through one or more first intermediate through-holes 944 into the upper portion 857 of the valve chest, and from there downward through one or more second intermediate through-holes 946 into the second intermediate valve chest portion 854. Moving at least a portion of the control plate 900 toward or outward from the second, smaller orifice ridge 822 creates a second control gap (not shown) through which a second fluid portion can also controllably flow directly from the second intermediate valve chamber portion 854 into the third intermediate valve chamber portion 852 and then exit through one or more third fluid conduit openings 818 that communicate with the second fluid conduit 814. In the present example valve 1000, an actuator (not shown) applies a force to the control shaft 882 to deflect the diaphragm 870, thereby modulating the conductance through the valve 1000 by varying the first control gap and the second control gap.

[0037] Concurrent with the above-described flow of the first and second fluid portions, moving at least a portion of the control plate 900 toward or outward from the largest orifice ridge 820 similarly creates a third control gap (not shown) through which a third fluid portion can controllably flow. The controllable third fluid portion can migrate upward from the inner valve chamber portion 859 through one or more first intermediate through-holes 944 of the control plate 900, sweep through the upper valve chamber portion 857 into the outer valve chamber portion 858, from where the third fluid portion can exit through the third control gap into the first intermediate valve chamber portion 856. Upon reaching the first intermediate valve chamber portion 856, the controllable third fluid portion can exit through one or more second fluid conduit openings 816, which are in communication with the second fluid conduit 814. The fourth fluid portion can migrate from the inner valve chamber portion 859 upward through one or more first intermediate through-holes 944 into the upper valve chamber portion 857, and from there downward through one or more second intermediate through-holes 946 into the second intermediate valve chamber portion 854. Moving at least a portion of the control plate 900 toward or outward from the first smaller orifice ridge 821 creates a fourth control gap (not shown) through which the fourth fluid portion can controllably flow directly into the first intermediate valve chamber portion 856, from which it can exit through one or more second inner fluid conduit openings 816 that communicate with the second fluid conduit 814. Thus, in this example valve 1000, an actuator (not shown) that applies a force to the control shaft 882 to deflect the diaphragm 870 further modulates the conductance through the valve 1000 by varying the third control gap and the fourth control gap. It should be appreciated that while the valve 1000 is closed, fluid can pass through the holes in the control plate 900 into the upper valve chamber portion 857, the outer valve chamber portion 858, and the second middle valve chamber portion 854, but cannot proceed any further. Thus, when the valve 1000 is closed, fluid cannot pass from the first fluid conduit 810 to the second fluid conduit 814.

[0038] The designer can recognize that the largest orifice ridge 820 and the first smaller orifice ridge 821 need not be strictly concentric, but only need to be nested, and further, the nested pair of orifice ridges 820, 821 can be asymmetrically positioned with respect to the shape and dimensions of the lower valve chamber. The throughflow control plate 900, of course, must have a continuous, uninterrupted second surface area 943, primarily on the lower, flat side of the disk-shaped body 940, spanning between contact with the largest orifice ridge 820 and contact with the first smaller orifice ridge 821 and sufficient to cover the entire first intermediate valve chamber portion 856. Similarly, the second smaller orifice ridge 822 and the smallest orifice ridge 823 need not be strictly concentric, but only need to be nested, and further, the nested pair of orifice ridges 822, 823 can be asymmetrically positioned with respect to the shape and dimensions of the lower valve chamber. The through-flow control plate 900, of course, must have a continuous, uninterrupted first surface area 941, primarily on the lower, flat side of the disk-shaped body 940, spanning between contact with the second, smaller orifice ridge 822 and contact with the smallest orifice ridge 823, and sufficient to cover the entire third, intermediate valve chamber portion 852. The designer will also recognize that the described direction of fluid flow, traveling from the first fluid conduit 810 to the second fluid conduit 814, is used for convenience and clarity, but is not limiting. Fluid can flow in the opposite direction, from the second fluid conduit 814 to the first fluid conduit 810, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve assembly design shown in FIGS. 11A-11D also substantially eliminates any concerns regarding internal dead space versus swept volume, and may also improve the dynamic response of the exemplary valve design. The flow-through control plate allows for the use of nested orifice ridges 820, 821, 822, 823 which together create an overall control gap length approximately three times the circumference of a single large orifice while significantly reducing the area that must be closed to achieve shutoff. This combination provides high conductance with low closing force.

[0039] A representative example of another high-conductance valve body 1290 having two nested groups of central concentric orifice ridges 1220, 1221, 1222, 1223 is shown in Figures 12A-12D. A more complete exemplary valve assembly 1400 can have a topwork including a valve housing 1460 removably joined to the valve body 1290 by deforming a metal gasket 1465 into a leak-tight assembly further shown in Figures 14A-14D. The topwork can include an actuator (not shown) selected for a particular application. For example, a manual or solenoid actuator might be used for a simple on-off high-conductance valve, while a piezoelectric actuator might be used for a proportional-control high-conductance valve compatible with a mass flow controller electronic system. The open cavities 1252, 1254, 1256, 1258, 1259 formed in the upper surface of the valve body 1290 can be considered lower portions of the valve chamber, while the upper portion 1457 of the valve chamber is formed in the lower surface of the valve housing 1460 above. Consideration of Figures 12A-12D will inform the designer that the open cavities 1252, 1254, 1256, 1258 appear as generally circular grooves, and that the open cavities can all be the same depth, or can vary in depth relative to one another and range in extent for any particular circular groove. A maximum orifice ridge 1220, formed as a circular upward protrusion from the valve body 1290, separates the outer valve chamber portion 1258 from a first intermediate valve chamber portion 1256 surrounded by the maximum orifice ridge 1220. A generally concentric first smaller orifice ridge 1221 is also formed as a circular upward protrusion from the valve body 1290, surrounded by the largest orifice ridge 1220, and further separates the enclosed second intermediate valve chamber portion 1254 from the first intermediate valve chamber portion 1256. A generally concentric second smaller orifice ridge 1222 is also formed as a circular upward protrusion from the valve body 1290, surrounded by the first smaller orifice ridge 1221, and further separates the enclosed third intermediate valve chamber portion 1252 from the second intermediate valve chamber portion 1254.A generally concentric minimum orifice ridge 1223 is also formed as a circular upward protrusion from the valve body 1290, surrounded by a second, smaller orifice ridge 1222, further separating the inner valve chamber portion 1259 from the third, intermediate valve chamber portion 1252. It should be appreciated that the upper surface of each orifice ridge 1220, 1221, 1222, 1223 is flush with the adjacent orifice ridges, while the depth of the individual intermediate valve chamber cavities 1252, 1254, 1256 can have varying depths and can further be contoured to encourage flow toward openings in the valve body 1290. A gasket seal area 1264 can be formed in the upper surface of the valve body 1290 to house a metal gasket 1465 adjacent the periphery of the outer valve chamber portion 1258.

[0040] The exemplary valve 1400 may further include a first fluid conduit 1210 (typically an inlet) and a second fluid conduit 1214 (typically an outlet), both of which communicate fluid with the valve chamber, the valve chamber sealing diaphragm 1470, and a control element that is movable upon deflection of the valve chamber sealing diaphragm 1470. The movable control element may further comprise a control plate 1300 (described further below) secured to a control shaft 1482 to which the valve chamber sealing diaphragm 1470 is secured. In the illustration of FIGS. 14B and 14D , a central insert 1350 of the control plate 1300 may be attached to a stub 1483 of the control shaft 1482, thereby being suspended within the upper valve chamber portion 1457. Any suitable attachment method may be used, such as a press fit, swaging of the stub head, threaded fasteners, welding, or similar design choices as desired by the practitioner, so long as the fluid passages through the various control plate holes are not obstructed. It should be appreciated that rather than the control plate being attached to the stub 1483 of the control shaft 1482 using through holes 1352 as shown in Figures 14B and 14D, a blind hole attachment similar to that shown in Figures 9A-9D could instead be used. In the exemplary valve 1400 design, the first fluid conduit opening 1212 provides communication between the inner valve chamber portion 1259 and the first fluid conduit 1210. Similarly, the second fluid conduit opening 1216, formed as a curved slot, provides communication between the first intermediate valve chamber portion 1256 and the second fluid conduit 1214. Similarly, a third inner fluid conduit opening 1218, formed as a curved slot, is provided, providing communication between the third intermediate valve chamber portion 1252 and the second fluid conduit 1214. 14A-14D, valve 1400 is fully closed in a no-blocking, no-flow condition, so that control plate 1300 is shown contacting all four orifice ridges: largest orifice ridge 1220, first smaller orifice ridge 1221, second smaller orifice ridge 1222, and smallest orifice ridge 1223. Designers will recognize that first fluid conduit 1210 and second fluid conduit 1214 can provide fluid passageways to surface mount component interfaces rather than the illustrated tube stubs.K1S and W seals are examples of surface-mounted component interfaces known in semiconductor capital equipment design and therefore are not shown in the drawings of this disclosure. The components, including the valve, can be constructed from materials selected for their desired chemical inertness with respect to the fluids handled, including, for example, stainless steel, Monel™ metal, titanium alloy, Hastelloy™ alloy, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and combinations of metals and polymers, separately or together. For example, a Type 316L stainless steel valve body 1290 can be used with a Hastelloy™ nickel alloy control plate 1300 and an Elgiloy™ cobalt alloy sealing diaphragm 1470. Alternatively, the valve body, sealing diaphragm, and control plate body can all be made from the same stainless steel alloy.

[0041] The example of a through-flow control plate 1300 shown in Figures 13A-13E can be constructed from two pieces pressed together: a control plate body 1340 and a central insert 1350 formed as a generally circular disk with one or more features on opposite sides of the disk. The features of the control plate body 1340 can include a central insert mounting hole 1348, effectively defined as a counterbore 1344 terminating in a smaller diameter control plate through-hole 1342, and one or more intermediate through-holes 1346. The axisymmetric central insert 1350 includes a central through-hole 1352 and an outer rim 1358. The area between the central through-hole 1352 and the outer rim 1358 is penetrated by one or more insert holes 1354 that are generally parallel to the central through-hole 1352. Leaving a web 1355 of central insert material between the insert holes 1354 ensures that the outer diameter is robust enough to allow the central insert 1350 to be locked into the insert mounting hole 1348 by a simple press fit (see the exploded view in FIG. 13C and the cross-sectional view in FIG. 13B). Other assembly methods, such as welding or brazing (for metal parts), can be contemplated, and the insert holes 1354 could be curved slots rather than round, but the illustrated design is likely to be the cheapest to machine. The central insert 1350 could be made by injection molding or die casting, if desired, but such methods cannot meet the density and cleanliness requirements of high-purity fluid delivery devices typically used in semiconductor capital equipment. The insert holes 1354, along with the control plate through-holes 1342, provide a fluid passageway through which fluid can pass from one side of the control plate body 1340 to the opposite side without having to pass around the outer diameter periphery. The recessed insert bottom relief (or recessed bottom relief) 1353 can direct flow from the insert through-hole 1354 towards the control plate through-hole 1342. More specifically, the insert hole 1354 fluidly connects the inner valve chamber portion 1259 with the upper valve chamber portion 1457 (discussed further below with respect to FIG. 14B ).

[0042] An alternative design (not shown) for the center insert 1350 may include an insert shaft and a radially outwardly protruding insert flange. The insert flange would be pierced by one or more insert holes generally parallel to the insert shaft. Again, leaving a web of material between the flange holes would ensure that the outer diameter of the insert flange would be robust enough to allow the alternative center insert to be locked into the insert mounting hole 1348 by a simple press fit. Because an undesirable lack of robustness was observed when connecting such an insert shaft to the valve topwork diaphragm, this alternative design is not considered further in this disclosure for any of the control plate types described herein and below.

[0043] The diameter of the control plate through-holes 1342 is selected to create a continuous, uninterrupted first surface area 1341 on the lower flat side of the disk-shaped control plate body 1340, such that the first surface area 1341 has sufficient radial extent to span between contact with the second, smaller orifice ridge 1222 and contact with the smallest orifice ridge 1223, while covering the entire third, intermediate valve chamber portion 1252. One or more intermediate through-holes 1346 extend through the control plate body 1340 and are typically regularly spaced around a circle of constant diameter that further surrounds the first surface area 1341. In some embodiments, the intermediate through-holes 1346 extend substantially straight through the control plate body 1340. The diameter of the constant diameter circle and the diameter of the intermediate through-holes 1346 are selected so that the intermediate through-holes 1346 cover only the second intermediate valve chest portion 1254 and do not overlap with the adjacent first smaller orifice ridge 1221 or second smaller orifice ridge 1222. The intermediate through-holes 1346 provide a fluid passageway through which fluid can pass from one side of the control plate body 1340 to the opposite side without having to pass around the outer diameter periphery. More specifically, the intermediate through-holes 1346 fluidly connect the second intermediate valve chest portion 1254 with the upper valve chest portion 1457. The web of material 1347 between one or more adjacent intermediate through holes 1346 provides a mechanical connection from the first surface region 1341 to a continuous, uninterrupted second surface region 1343 on the lower flat side of the disk-shaped body 1340, the second surface region 1343 having sufficient radial extent to span between contact with the largest orifice ridge 1220 and contact with the first, smaller orifice ridge 1221 while covering the entire first intermediate valve chamber portion 1256.

[0044] The manner in which the exemplary valve 1400 controls fluid flow can be further understood by considering that the inner valve chamber portion 1259, surrounded by the smallest orifice ridge 1223, is supplied by the first fluid conduit opening 1212 that communicates with the first fluid conduit 1210, such that at least a portion of the control plate 1300 can move toward or outward from the smallest orifice ridge 1223 to create a first control gap (not shown) through which the first fluid portion can controllably flow. The controllable first fluid portion can transition directly to the third, intermediate valve chamber portion 1252, from which the first fluid portion can exit through the third inner fluid conduit opening 1218 that communicates with the second fluid conduit 1214. The second fluid portion can travel from the inner valve chest portion 1259 upward through the control plate through-hole 1342 and the insert hole 1354 into the upper valve chest portion 1457, and from there downward through the intermediate through-hole 1346 into the second intermediate valve chest portion 1254. Moving at least a portion of the control plate 1300 toward or outward from the second smaller orifice ridge 1222 creates a second control gap (not shown) through which the second fluid portion can also controllably flow directly from the second intermediate valve chest portion 1254 into the third intermediate valve chest portion 1252 and then exit through one or more third inner fluid conduit openings 1218 in communication with the second fluid conduit 1214. In this example valve 1400, an actuator (not shown) applies a force to the control shaft 1482 to deflect the diaphragm 1470, thereby moving the attached control plate 1300 and thereby modulating the conductance through the valve 1400 by varying the first control gap and the second control gap.

[0045] Concurrent with the above-described flow of the first and second fluid portions, moving at least a portion of the control plate 1300 toward or outward from the largest orifice ridge 1220 similarly creates a third control gap (not shown) through which a third fluid portion can controllably flow. The controllable third fluid portion can migrate upward from the inner valve chamber portion 1259 through one or more insert holes 1354 in the control plate 1300 and sweep through the upper valve chamber portion 1457 into the outer valve chamber portion 1258, from which the third fluid portion can exit through the third control gap into the first intermediate valve chamber portion 1256. Upon reaching the first intermediate valve chamber portion 1256, the controllable third fluid portion can exit through the second fluid conduit opening 1216, which is in communication with the second fluid conduit 1214. The fourth fluid portion can migrate from the inner valve chamber portion 1259 upward through one or more insert holes 1354 into the upper valve chamber portion 1457 of the valve chamber, and from there downward through one or more intermediate through-holes 1346 into the second intermediate valve chamber portion 1254. Moving at least a portion of the control plate 1300 toward or outward from the first smaller orifice ridge 1221 creates a fourth control gap (not shown) through which the fourth fluid portion can controllably flow directly into the first intermediate valve chamber portion 1256, from which it can exit through the second inner fluid conduit opening 1216, which communicates with the second fluid conduit 1214. Thus, in this example valve 1400, an actuator (not shown) that applies a force to the control shaft 1482 to deflect the diaphragm 1470 further modulates the conductance through the valve 1400 by varying the third and fourth control gaps. It should be appreciated that while the valve 1400 is closed, fluid can pass through the holes in the control plate 1300 into the upper portion 1457 of the valve chamber, the outer valve chamber portion 1258, and the second middle valve chamber portion 1254, but cannot proceed any further. Thus, when the valve 1400 is closed, fluid cannot pass from the first fluid conduit 1210 to the second fluid conduit 1214.

[0046] The designer can recognize that the largest orifice ridge 1220 and the first smaller orifice ridge 1221 need not be strictly concentric, but only nested, and further, the nested pair of orifice ridges 1220, 1221 can be positioned asymmetrically with respect to the shape and dimensions of the lower valve chamber. The throughflow control plate 1300, of course, must have a continuous, uninterrupted second surface area 1343, primarily on the lower flat side of the disk-shaped body 1340, spanning between contact with the largest orifice ridge 1220 and contact with the first smaller orifice ridge 1221 and sufficient to cover the entire first intermediate valve chamber portion 1256. Similarly, the second smaller orifice ridge 1222 and the smallest orifice ridge 1223 need not be strictly concentric but can be nested, and further, the nested pair of orifice ridges 1222, 1223 can be asymmetrically positioned relative to the shape and dimensions of the lower valve chamber. The throughflow control plate 1300, of course, must have a continuous, uninterrupted first surface area 1341, primarily on the lower, flat side of the disk-shaped body 1340, spanning between contact with the second smaller orifice ridge 1222 and contact with the smallest orifice ridge 1223 and sufficient to cover the entire third, intermediate valve chamber portion 1252. The designer will also recognize that the described direction of fluid flow, traveling from the first fluid conduit 1210 to the second fluid conduit 1214, is used for convenience and clarity, but is not limiting. Fluid can flow in the opposite direction from the second fluid conduit 1214 to the first fluid conduit 1210, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve assembly design shown in Figures 14A-14D also substantially eliminates any concerns regarding internal dead space versus swept volume and can also improve the dynamic response of the exemplary valve design. The flow-through control plate enables the use of nested orifice ridges 1220, 1221, 1222, 1223, which together create an overall control gap length approximately three times the circumference of a single large orifice, while significantly reducing the area that must be closed to achieve shutoff.This combination provides high conductance with low closing force.

[0047] Another exemplary high-conductance valve 1600 is shown in Figures 16A-16D. Similar to the valve 1400 described above, this valve uses a high-conductance valve body 1290 having two nested groups of central concentric orifice ridges and a valve housing 1460 removably joined to the valve body 1290 by deformation of a metal gasket 1465, a valve chamber sealing diaphragm 1470, and a valve topwork including a control element movable by deflection of the valve chamber sealing diaphragm 1470. The movable control element may further comprise another control plate 1500 (described further below) secured to a control shaft 1482 secured to the diaphragm 1470. In the illustration of Figures 16B and 16D, a central insert 1550 of the control plate 1500 may be attached to a stub 1483 of the control shaft 1482, thereby suspending it within the upper valve chamber portion 1457. Any suitable attachment method can be used, such as press-fitting, swaging of stub heads, threaded fasteners, welding, or similar design choices as desired by the practitioner, so long as the fluid passageways through the various control plate holes are not obstructed. It should be appreciated that rather than using through-holes 1552 to attach the control plate to the stub 1483 of the control shaft 1482 as shown in FIGS. 16B and 16D , a blind-hole attachment similar to that shown in FIGS. 9A-9D can instead be used. In the exemplary valve 1600 design, the first fluid conduit opening 1212 provides communication between the inner valve chamber portion 1259 and the first fluid conduit 1210. Similarly, the second fluid conduit opening 1216, formed as a curved slot, provides communication between the first middle valve chamber portion 1256 and the second fluid conduit 1214. Similarly, there is provided a third inner fluid conduit opening 1218 formed as a curved slot that provides communication between the third intermediate valve chamber portion 1252 and the second fluid conduit 1214. In the present illustration of Figures 16A-16D, the valve 1600 is fully closed in a no-blocking, no-flow condition, so that the control plate 1500 is shown contacting all four orifice ridges: largest orifice ridge 1220, first smaller orifice ridge 1221, second smaller orifice ridge 1222, and smallest orifice ridge 1223.Designers will recognize that the first fluid conduit 1210 and the second fluid conduit 1214 can provide fluid passage to surface-mounted component interfaces rather than the illustrated tube stubs. K1S and W seals are examples of surface-mounted component interfaces known in semiconductor capital equipment design and therefore are not shown in the drawings of this disclosure. Components including the valves can be constructed from materials selected for their desired chemical inertness with respect to the fluids handled, including, for example, stainless steel, Monel™ metal, titanium alloy, Hastelloy™ alloy, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and combinations of metals and polymers, separately or together. For example, a Type 316L stainless steel valve body 1290 can be used with a Hastelloy™ nickel alloy control plate 1500 and an Elgiloy™ cobalt alloy sealing diaphragm 1470. Alternatively, the valve body, sealing diaphragm, and control plate body can all be made from the same stainless steel alloy.

[0048] The example flow-through control plate 1500 shown in Figures 15A-15E can be comprised of three elements assembled by a combination of processes: a control plate body 1540 formed as an essentially circular disk; a polymer insert (sheet insert) 1530 (both having one or more features on opposite sides of the disk); and a central insert 1550. The features of the control plate body 1540 can include a central insert mounting hole 1548, effectively defined as a counterbore 1544 terminating in a smaller diameter control plate through-hole 1542, and one or more intermediate through-hole cavities 1549. The axisymmetric central insert 1550 includes a central through-hole 1552 and an outer rim 1558. The area between the central through-hole 1552 and the outer rim 1558 is penetrated by one or more insert holes 1554 that are generally parallel to the central through-hole 1552. Leaving a web of material 1555 between the insert holes 1554 ensures that the outer diameter of the outer rim 1558 is robust enough to allow the central insert 1550 to be locked into the insert mounting hole 1548 by a simple press fit (see the exploded view in FIG. 15C and the cross-sectional view in FIG. 15B). Other assembly methods, such as welding or brazing (for metal parts), can be contemplated, and the insert holes 1554 could be curved slots rather than round, but the illustrated design is likely to be the cheapest to machine. The central insert 1550 could be made by injection molding or die casting, if desired, but such methods cannot meet the density and cleanliness requirements of high-purity fluid delivery devices typically used in semiconductor capital equipment. The insert holes 1554, along with the control plate through-holes 1542, provide a fluid passageway through which fluid can pass from one side of the control plate body 1540 to the opposite side without having to pass around the outer diameter periphery. The recessed insert bottom relief (or recessed bottom relief) 1553 can direct flow from the insert through-hole 1554 toward the control plate through-hole 1542. More specifically, the insert hole 1554 fluidly connects the inner valve chamber portion 1259 with the upper valve chamber portion 1457 (discussed further below with respect to FIG. 16B ).As noted above, an alternative design (not shown) for the central insert 1550 may include an insert shaft and a radially outwardly projecting insert flange. The insert flange would be pierced by one or more insert holes generally parallel to the insert shaft. An undesirable lack of robustness has been observed when connecting such an insert shaft to the valve topwork diaphragm and, therefore, will not be discussed further herein.

[0049] The exemplary polymer insert 1530 shown in FIGS. 15B, 15C, and 15E can have certain features formed as a result of being compression molded into openings in the control plate body 1540. For example, the insert can include multiple pillars that are each received in one of the openings in the control plate body by the molding process. A typical compression molding process begins with polychlorotrifluoroethene (PCTFE) powder filling the openings 1545, 1549 in the control plate body 1540, followed by polymerizing the powder under the action of heat and pressure applied directly into the control plate body 1540 by known methods. The exemplary polymer insert 1530 has multiple polymer pillars 1531 formed in and fitting into multiple intermediate through-hole cavities 1549, while also interconnected by articulated, relatively thin polymer disks 1532 that fill wide, shallow circular grooves 1545 formed in the control plate body 1540 (facing the orifice ridge, as further described below with respect to FIG. 16B). Intermediate through-holes 1546 penetrate the polymer pillars 1531 and provide a fluid passageway through which fluid can pass from one side of the control plate body 1540 to the other without having to pass around the outer diameter periphery. The inner diameter (slightly larger than the diameter of the control plate through-holes 1542) of the thin polymer disk 1532 that fills the wide, shallow circular groove 1545 is selected to create a continuous, uninterrupted first surface area 1541 on the lower, flat side of the disk-shaped control plate body 1540, such that the first surface area 1541 has sufficient radial extent to span between contact with the second, smaller orifice ridge 1222 and contact with the smallest orifice ridge 1223 while covering the entire third, intermediate valve chamber portion 1252. One or more intermediate through-holes 1546 penetrate one or more polymer pillars 1531 filling one or more intermediate through-cavities 1549 formed in the control plate body 1540, typically spaced at regular intervals around a circle of constant diameter that further surrounds the first surface region 1541. In some embodiments, the intermediate through-holes 1546 extend substantially straight through the one or more polymer pillars 1531 and the thin polymer disk 1532.The diameter of the constant diameter circle and the diameter of the intermediate through-hole 1546 are selected so that the through-holes cover only the second, intermediate valve chest portion 1254 and do not overlap the adjacent first smaller orifice ridge 1221 or second smaller orifice ridge 1222. More specifically, the intermediate through-hole 1546 fluidly connects the intermediate valve chest portion 1254 with the upper valve chest portion 1457. A web of material 1547 between one or more adjacent intermediate through cavities 1549 provides further mechanical support for the polymer disc 1532 on the lower flat side of the disc-shaped body 1540, spanning from a first surface region 1541 to a continuous, uninterrupted second surface region 1543 having sufficient radial extent to span between contact with the largest orifice ridge 1220 and contact with the first, smaller orifice ridge 1221 while covering the entire first intermediate valve chamber portion 1256.

[0050] The manner in which the exemplary valve 1600 controls fluid flow can be further understood by considering that the inner valve chamber portion 1259, surrounded by the smallest orifice ridge 1223, is supplied by the first fluid conduit opening 1212 that communicates with the first fluid conduit 1210, such that at least a portion of the control plate 1500 can move toward or outward from the smallest orifice ridge 1223 to create a first control gap (not shown) through which the first fluid portion can controllably flow. The controllable first fluid portion can transition directly to the third, intermediate valve chamber portion 1252, from which the first fluid portion can exit through the third inner fluid conduit opening 1218 that communicates with the second fluid conduit 1214. The second fluid portion can travel from the inner valve chest portion 1259 upward through the control plate through-hole 1542 and the insert hole 1554 into the upper valve chest portion 1457, and from there downward through the intermediate through-hole 1546 into the second intermediate valve chest portion 1254. Moving at least a portion of the control plate 1500 toward or outward from the second smaller orifice ridge 1222 creates a second control gap (not shown) through which the second fluid portion can also controllably flow directly from the second intermediate valve chest portion 1254 into the third intermediate valve chest portion 1252 and then exit through the third inner fluid conduit opening 1218, which communicates with the second fluid conduit 1214. In this example valve 1600, an actuator (not shown) applies a force to the control shaft 1482 to deflect the diaphragm 1470, thereby moving the affixed control plate 1500 and thereby modulating the conductance through the valve 1600 by varying the first control gap and the second control gap.

[0051] Concurrently with the above-described flow of the first and second fluid portions, moving at least a portion of the control plate 1500 toward or outward from the largest orifice ridge 1220 similarly creates a third control gap (not shown) through which a third fluid portion can controllably flow. The controllable third fluid portion can migrate upward from the inner valve chamber portion 1259 through one or more insert holes 1554 in the control plate 1500, sweep through the upper valve chamber portion 1457 into the outer valve chamber portion 1258, from which the third fluid portion can exit through the third control gap into the first intermediate valve chamber portion 1256. Upon reaching the first intermediate valve chamber portion 1256, the controllable third fluid portion can exit through one or more second fluid conduit openings 1216, which are in communication with the second fluid conduit 1214. The fourth fluid portion can migrate from the inner valve chamber portion 1259 upward through one or more insert holes 1554 into the upper valve chamber portion 1457, and from there downward through one or more intermediate through-holes 1546 into the second intermediate valve chamber portion 1254. Moving at least a portion of the control plate 1500 toward or outward from the first smaller orifice ridge 1221 creates a fourth control gap (not shown) through which the fourth fluid portion can controllably flow directly into the first intermediate valve chamber portion 1256, from which it can exit through the second inner fluid conduit opening 1216, which communicates with the second fluid conduit 1214. Thus, in this example valve 1600, an actuator (not shown) that applies a force to the control shaft 1482 to deflect the diaphragm 1470 further modulates the conductance through the valve 1600 by varying the third and fourth control gaps. It should be appreciated that while the valve 1600 is closed, fluid can pass through the holes in the control plate 1500 into the upper portion 1457 of the valve chamber, the outer valve chamber portion 1258, and the second middle valve chamber portion 1254, but cannot proceed any further. Thus, when the valve 1600 is closed, fluid cannot pass from the first fluid conduit 1210 to the second fluid conduit 1214.

[0052] The designer can recognize that the largest orifice ridge 1220 and the first smaller orifice ridge 1221 need not be strictly concentric, but only nested, and further, the nested pair of orifice ridges 1220, 1221 can be positioned asymmetrically with respect to the shape and dimensions of the lower valve chamber. The throughflow control plate 1500, of course, must have a continuous, uninterrupted second surface area 1543, primarily on the lower flat side of the disk-shaped body 1540, spanning between contact with the largest orifice ridge 1220 and contact with the first smaller orifice ridge 1221 and sufficient to cover the entire first intermediate valve chamber portion 1256. Similarly, the second smaller orifice ridge 1222 and the smallest orifice ridge 1223 need not be strictly concentric, but merely nested, and further, the nested pair of orifice ridges 1222, 1223 may be asymmetrically positioned relative to the shape and dimensions of the lower valve chamber. The throughflow control plate 1500, of course, must have a continuous, uninterrupted first surface area 1541, primarily on the lower, flat side of the disk-shaped body 1540, spanning between contact with the second smaller orifice ridge 1222 and contact with the smallest orifice ridge 1223 and sufficient to cover the entire third, intermediate valve chamber portion 1252. The designer will also recognize that the described direction of fluid flow, traveling from the first fluid conduit 1210 to the second fluid conduit 1214, is used for convenience and clarity, but is not limiting. Fluid can flow in the opposite direction from the second fluid conduit 1214 to the first fluid conduit 1210, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve assembly design shown in Figures 16A-16D also substantially eliminates any concerns regarding internal dead space versus swept volume and can also improve the dynamic response of the exemplary valve design. The flow-through control plate enables the use of nested orifice ridges 1220, 1221, 1222, 1223, which together create an overall control gap length approximately three times the circumference of a single large orifice, while significantly reducing the area that must be closed to achieve shutoff.This combination provides high conductance with low closing force, and the inclusion of a relatively soft polymer insert 1530 will further improve the shut-off tightness of the valve 1600.

[0053] A representative example of another high conductance valve body 1790 having two nested groups of central concentric orifice ridges 1720, 1721, 1722, 1723 is shown in Figures 17A-17D. A more complete exemplary valve assembly 1900-1 can have a top work including a valve housing 1960 that is removably joined to the valve body 1790 by deforming a metal gasket 1965 into a leak-tight assembly further shown in Figures 19A-1-19D-1. Another more complete exemplary valve assembly 1900-2 can have a top work including a valve housing 1960 that is removably joined to the valve body 1790 by deforming a metal gasket 1965 into a leak-tight assembly further shown in Figures 19A-2-19D-2. The top work can include an actuator (not shown) selected for a particular application. For example, manual or solenoid actuators may be used for simple on-off high conductance valves, while piezoelectric actuators may be used for proportionally controlled high conductance valves compatible with mass flow controller electronic systems. The open cavities 1752, 1754, 1756, 1758, 1759 formed in the upper surface of the valve body 1790 may be considered the lower portion of the valve chamber, while the upper portion 1957 of the valve chamber is formed in the lower surface of the valve housing 1960 above it. Consideration of Figures 17A-17D will inform the designer that the open cavities 1752, 1754, 1756, 1758 appear as generally circular grooves, and that the open cavities may all be the same depth, or may vary in depth relative to one another and represent the extent of any particular circular groove range. A largest orifice ridge 1720 formed as a circular upward protrusion from the valve body 1790 separates the outer valve chamber portion 1758 from a first intermediate valve chamber portion 1756 that is surrounded by the largest orifice ridge 1720. A generally concentric first smaller orifice ridge 1721 is also formed as a circular upward protrusion from the valve body 1790 that is surrounded by the largest orifice ridge 1720 and further separates the enclosed second intermediate valve chamber portion 1754 from the first intermediate valve chamber portion 1756.A generally concentric second, smaller orifice ridge 1722 is also formed as a circular upward protrusion from the valve body 1790, surrounded by the first, smaller orifice ridge 1721, and further separates the enclosed third, intermediate valve chamber portion 1752 from the second, intermediate valve chamber portion 1754. A generally concentric minimum orifice ridge 1723 is also formed as a circular upward protrusion from the valve body 1790, surrounded by the second, smaller orifice ridge 1722, and further separates the inner valve chamber portion 1759 from the third, intermediate valve chamber portion 1752. It should be appreciated that the top surface of each orifice ridge 1720, 1721, 1722, 1723 is flush with the adjacent orifice ridges, while the depth of the individual intermediate valve chamber cavities 1752, 1754, 1756 may have varying depths and may further be contoured to encourage flow toward openings in the valve body 1790. A gasket seal area 1764 may be formed in the top surface of the valve body 1790 to house a metal gasket 1765 adjacent the periphery of the outer valve chamber portion 1758.

[0054] The exemplary valves 1900-1, 1900-2 may further include a first fluid conduit 1710 (typically an inlet) and a second fluid conduit 1714 (typically an outlet), both of which communicate fluid with upper and lower portions of the valve chamber, a valve chamber sealing diaphragm 1970, and a control element that is movable by deflection of the valve chamber sealing diaphragm 1970. The movable control element may further comprise control plates 1800-1, 1800-2 (described further below) that are affixed to the valve chamber sealing diaphragm 1970. In the illustrations of FIGS. 19B-1, 19B-2 and 19D-1, 19D-2, the control plates 1800-1, 1800-2 may be attached to stubs 1983 that protrude from the diaphragm 1970, thereby being suspended within the upper valve chamber portion 1957. The distance between the control plate 2000-2 and the valve chamber seal diaphragm 2170 is minimized to reduce or eliminate the swept volume. Any suitable attachment method can be used, such as press-fitting, swaging the head of a stub, threaded fasteners, welding, or similar design choices as desired by the practitioner, so long as the fluid passages through the various control plate holes are not obstructed. It should be appreciated that rather than attaching the control plate to the stub 1983 using through-holes 1952 as shown in FIGS. 19B-1, 19B-2, and 19D-1, 19D-2, a blind-hole attachment similar to that shown in FIGS. 9A-9D can instead be used. In the design of the exemplary valves 1900-1, 1900-2, the first fluid conduit opening 1712 provides communication between the inner valve chamber portion 1759 and the first fluid conduit 1710. Similarly, a second fluid conduit opening 1716 formed as a curved slot provides communication between the first intermediate valve chamber portion 1756 and the second fluid conduit 1714. Similarly, a third inner fluid conduit opening 1718 formed as a curved slot is provided that provides communication between the third intermediate valve chamber portion 1752 and the second fluid conduit 1714.19A-1-19D-1 and 19A-2-19D-2, valves 1900-1, 1900-2 are fully closed in a no-blocking, no-flow condition, so that control plates 1800-1, 1800-2 are shown contacting all four orifice ridges: largest orifice ridge 1720, first smaller orifice ridge 1721, second smaller orifice ridge 1722, and smallest orifice ridge 1723. Designers will recognize that first fluid conduit 1710 and second fluid conduit 1714 can provide fluid passage to surface mount component interfaces rather than the illustrated tube stubs. K1S and W seals are examples of surface mount component interfaces that are known in semiconductor capital equipment design and, therefore, are not shown in the drawings of this disclosure. The components comprising the valve can be constructed from materials selected for their desired chemical inertness with respect to the fluids handled, including, for example, stainless steel, Monel™ metal, titanium alloy, Hastelloy™ alloy, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and combinations of metals and polymers, separately or together. For example, a Type 316L stainless steel valve body 1790 can be used with a Hastelloy™ nickel alloy control plate 1800-1, 1800-2, and an Elgiloy™ cobalt alloy sealing diaphragm 1970. Alternatively, the valve body, sealing diaphragm, and control plate body can all be made from the same stainless steel alloy.

[0055] 18A-1 through 18D-1 includes a control plate body 1840 formed as a generally circular disk having a first side 1871 and an opposing second side 1872 separated axially by a circumferential portion 1850 of the control plate body 1840. One or more holes or features are formed in the circumferential portion 1850 and the opposing side of the disk. These holes can include a central mounting hole 1848 (blind or through) in the second side 1872, one or more axial through-holes 1846-1, 1847-1 that provide communication from the first side 1871 to the second side 1872, a counterbore 1842 in the first side, and one or more radial holes 1854-1, 1856-1, 1858-1 that provide communication from the counterbore 1842 to the circumferential portion 1850. As shown in FIGS. 18A-1-18D-1, the control plate 1800-1 can be attached to stubs 1983 that protrude from the diaphragm 1970 and thereby suspended within the upper valve chamber portion 1957. Any suitable attachment method can be used, such as press fit, swaging of the stub heads, threaded fasteners, welding, or similar design choices as desired by the practitioner, so long as the fluid passages formed by the axial through-holes 1846-1, 1847-1 are not obstructed. It should be appreciated that rather than attaching the control plate 1800-1 to the stubs 1983 using blind holes as shown in FIGS. 9A-9D, through-hole attachment can instead be used as shown in FIGS. 2A-2D, 3A-3D, and 7A-7F.

[0056] One or more axial through-holes 1846-1, 1847-1 extend through the control plate body 1840 and are typically spaced apart around a first circle of constant diameter that surrounds the central mounting hole 1848. The diameter of the first circle and the diameters of the axial through-holes 1846-1, 1847-1 are selected so that the axial through-holes cover only the second, intermediate valve chest portion 1754 and do not overlap the adjacent first smaller orifice ridge 1721 or second smaller orifice ridge 1722. The axial through-holes 1846-1, 1847-1 define a fluid passageway through which fluid can pass from a first side 1871 of the control plate body 1840 to an opposite second side 1872. More specifically, the axial through-holes 1846-1, 1847-1 fluidly connect the second, intermediate valve chest portion 1754 with the upper valve chest portion 1957. The solid material of the control plate body 1840 provides a mechanical connection from the central mounting hole 1848 to a continuous, uninterrupted first surface area 1841 on a first side 1871 of the disk-shaped control plate body 1840, the first surface area 1841 having sufficient radial extent to span between contact with the second, smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 while covering the entire third, intermediate valve chamber portion 1752. The solid portions 1861, 1862 between one or more adjacent axial through holes 1846-1, 1847-1 of the control plate body 1840 provide a mechanical connection from the central mounting hole 1848 to a continuous, uninterrupted second surface area 1843 on the first side 1871 of the disk-shaped control plate body 1840, the second surface area 1843 having sufficient radial extent to span between contact with the largest orifice ridge 1720 and contact with the first, smaller orifice ridge 1721 while covering the entire first intermediate valve chamber portion 1756.

[0057] A central counterbore 1842 is formed in a first side 1871 of the control plate body 1840 so as to protrude into the body toward an opposite second side 1872. One or more radial holes 1854-1, 1856-1, 1858-1 extend from the counterbore 1842 through the control plate body 1840 to create a fluid passageway leading to the circumferential portion 1850. The radial holes 1854-1, 1856-1, 1858-1 are typically formed at equal angles, thereby providing regular spacing around the circumferential portion 1850, alternating with solid regions 1855, 1857, 1859 between the holes. It should be appreciated that the depth of the central counterbore 1842 can vary, but should be greater than the depth penetrating the radial holes 1854-1, 1856-1, 1858-1. The diameter of the counterbore must be smaller than the inner diameter of the smallest orifice ridge 1723 to ensure a continuous, uninterrupted first surface area 1841 seals against the third, intermediate valve chamber portion 1752 when the valve 1900-1 is in the closed condition shown. The counterbore 1842 may or may not intersect with the central mounting hole 1848 (a blind mounting hole) and may be the same diameter or a different diameter.

[0058] The manner in which the exemplary valve 1900-1 controls fluid flow can be further understood by considering that the inner valve chamber portion 1759, surrounded by the smallest orifice ridge 1723, is supplied by the first fluid conduit opening 1712 that communicates with the first fluid conduit 1710, such that at least a portion of the control plate 1800-1 can move toward or outward from the smallest orifice ridge 1723 to create a first control gap (not shown) through which the first fluid portion can controllably flow. The controllable first fluid portion can transition directly to the third, intermediate valve chamber portion 1752, from which the first fluid portion can exit through the third inner fluid conduit opening 1718 that communicates with the second fluid conduit 1714. The second fluid portion can travel from the inner valve chest portion 1759 upward through the control plate counterbore 1842 and radial holes 1854-1, 1856-1, 1858-1, through the circumferential portion 1850 into the upper valve chest portion 1957, and from there downward through the axial through-holes 1846-1, 1847-1 into the second intermediate valve chest portion 1754. Moving at least a portion of the control plate 1800-1 toward or outward from the second smaller orifice ridge 1722 creates a second control gap (not shown) through which the second fluid portion can also controllably flow directly from the second intermediate valve chest portion 1754 into the third intermediate valve chest portion 1752 and then exit through the third inner fluid conduit opening 1718, which communicates with the second fluid conduit 1714. In this example valve 1900-1, an actuator (not shown) applies a force to control shaft 1982 to deflect diaphragm 1970, thereby moving affixed control plate 1800-1 and thereby varying the first control gap and the second control gap, thereby modulating the conductance through valve 1900-1.

[0059] Concurrent with the above-described flow of the first and second fluid portions, moving at least a portion of the control plate 1800-1 toward or outward from the largest orifice ridge 1720 similarly creates a third control gap (not shown) through which a third fluid portion can controllably flow. The controllable third fluid portion can migrate upward from the inner valve chamber portion 1759 through the control plate through-hole 1842 and radial holes 1854-1, 1856-1, 1858-1, past the circumferential portion 1850, and sweep through the upper valve chamber portion 1957 into the outer valve chamber portion 1758, from which the third fluid portion can exit through the third control gap into the first intermediate valve chamber portion 1756. Upon reaching the first intermediate valve chamber portion 1756, the controllable third fluid portion can exit through the second fluid conduit opening 1716, which is in communication with the second fluid conduit 1714. The fourth fluid portion can travel from the inner valve chest portion 1759 through the control plate counterbore 1742 and radial holes 1854-1, 1856-1, 1858-1 upward through the circumferential portion 1850 into the upper valve chest portion 1957, and from there downward through one or more axial through-holes 1846-1, 1847-1 into the second intermediate valve chest portion 1754. Moving at least a portion of the control plate 1800-1 toward or outward from the first smaller orifice ridge 1721 creates a fourth control gap (not shown) through which the fourth fluid portion can controllably flow directly into the first intermediate valve chest portion 1756, from which it can exit through the second inner fluid conduit opening 1716 in communication with the second fluid conduit 1714. Thus, in this example valve 1900-1, an actuator (not shown) that applies a force to control shaft 1982, thereby deflecting diaphragm 1970, further modulates the conductance through valve 1900-1 by varying the third and fourth control gaps. It should be appreciated that while valve 1900-1 is closed, fluid can pass through the radial and axial holes in control plate 1800-1 into upper valve chamber portion 1957, outer valve chamber portion 1758, and second middle valve chamber portion 1754, but cannot proceed further.Thus, when valve 1900-1 is closed, fluid cannot pass from first fluid conduit 1710 to second fluid conduit 1714.

[0060] The designer can recognize that the largest orifice ridge 1720 and the first smaller orifice ridge 1721 need not be strictly concentric, but only nested, and further, the nested pair of orifice ridges 1220, 1221 can be positioned asymmetrically with respect to the shape and dimensions of the lower valve chamber. The throughflow control plate 1800-1, of course, must primarily have a continuous, uninterrupted second surface area 1843 on the first lower side 1871 of the disk-shaped body 1840 that spans between contact with the largest orifice ridge 1720 and contact with the first smaller orifice ridge 1721 and is sufficient to cover the entire first intermediate valve chamber portion 1756. Similarly, the second smaller orifice ridge 1722 and the smallest orifice ridge 1723 need not be strictly concentric but can be nested, and further, the nested pair of orifice ridges 1722, 1723 can be asymmetrically positioned relative to the shape and dimensions of the lower valve chamber. The throughflow control plate 1800-1 should, of course, primarily have a continuous, uninterrupted first surface area 1841 on the first lower, flat side 1871 of the disk-shaped body 1840 spanning between contact with the second smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 and sufficient to cover the entire third, intermediate valve chamber portion 1752. The designer will also recognize that the described direction of fluid flow, traveling from the first fluid conduit 1710 to the second fluid conduit 1714, is used for convenience and clarity, but is not limiting. Fluid can flow in the opposite direction from the second fluid conduit 1714 to the first fluid conduit 1710, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve assembly design shown in Figures 19A-1 through 19D-1 also substantially eliminates any concerns regarding internal dead space versus swept volume and can also improve the dynamic response of the exemplary valve design. The flow-through control plate enables the use of nested orifice ridges 1720, 1721, 1722, 1723, which together create an overall control gap length approximately three times the circumference of a single large orifice, while significantly reducing the area that must be closed to achieve shutoff.This combination provides high conductance with low closing force.

[0061] Another exemplary valve assembly 2100-1 can have a topwork including a valve housing 2160 removably joined to a valve body 1790 by deforming a metal gasket 2165 into a leak-tight assembly further shown in FIGS. 21A-1 through 21D-1. The topwork can include an actuator (not shown) selected for a particular application. For example, a manual or solenoid actuator might be used for a simple on-off high-conductance valve, while a piezoelectric actuator might be used for a proportionally controlled high-conductance valve compatible with a mass flow controller electronic system. The open cavities 1752, 1754, 1756, 1758, 1759 formed in the upper surface of the valve body 1790 can be considered the lower portion of the valve chamber, while the upper portion 2157 of the valve chamber is formed in the lower surface of the valve housing 2160 above it.

[0062] The exemplary valve 2100-1 may further include a first fluid conduit 1710 (typically an inlet) and a second fluid conduit 1714 (typically an outlet), both of which communicate fluid with upper and lower portions of the valve chamber, a valve chamber sealing diaphragm 2170, and a control element that is movable by deflection of the valve chamber sealing diaphragm 2170. The movable control element may further comprise a control plate 2000-1 (described further below) affixed to the valve chamber sealing diaphragm 2170. In the illustration of FIGS. 21B-1 and 21D-1, the control plate 2000-1 may be attached to stubs 2183 that protrude from the diaphragm 2170 and thereby suspended within the upper valve chamber portion 2157. The distance between the control plate 2000-1 and the valve chamber sealing diaphragm 2170 is minimized to reduce or eliminate the swept volume. Any suitable attachment method can be used, such as press-fitting, swaging the head of the stub, threaded fasteners, welding, or similar design choices as desired by the practitioner, so long as the fluid passageways through the various control plate holes are not obstructed. It should be appreciated that rather than attaching the control plate to the stub 2183 using through-holes 2052 as shown in FIGS. 21B-1 and 21D-1, a blind-hole attachment similar to that shown in FIGS. 9A-9D can instead be used. In the design of the exemplary valve 2100-1, a first fluid conduit opening 1712 provides communication between the inner valve chamber portion 1759 and the first fluid conduit 1710. Similarly, a second fluid conduit opening 1716 formed as a curved slot provides communication between the first middle valve chamber portion 1756 and the second fluid conduit 1714. Similarly, there is provided a third inner fluid conduit opening 1718 formed as a curved slot that provides communication between the third intermediate valve chamber portion 1752 and the second fluid conduit 1714. In the present illustration of Figures 21A-1 through 21D-1, the valve 2100 is fully closed in a no-blocking, no-flow condition, so that the control plate 2000-1 is shown contacting all four orifice ridges: largest orifice ridge 1720, first smaller orifice ridge 1721, second smaller orifice ridge 1722, and smallest orifice ridge 1723.Designers will recognize that the first fluid conduit 1710 and the second fluid conduit 1714 can provide fluid passage to surface-mounted component interfaces rather than the illustrated tube stubs. K1S and W seals are examples of surface-mounted component interfaces known in semiconductor capital equipment design and therefore are not shown in the drawings of this disclosure. Components including the valve can be constructed from materials selected for their desired chemical inertness with respect to the fluids handled, including, for example, stainless steel, Monel™ metal, titanium alloy, Hastelloy™ alloy, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and combinations of metals and polymers, separately or together. For example, a Type 316L stainless steel valve body 1790 can be used with a Hastelloy™ nickel alloy control plate 1800-1 and an Elgiloy™ cobalt alloy sealing diaphragm 1970. Alternatively, the valve body, sealing diaphragm, and control plate body can all be made from the same stainless steel alloy.

[0063] 20A-1 through 20D-1, another example of a flow-through control plate 2000-1 includes a control plate body 2040 formed as a substantially circular disk having a first side 2071-1 and an opposing second side 2072 separated axially by a circumferential portion 2050 of the control plate body 2040, and a polymer insert. One or more holes or features are formed in the circumferential portion 2050 and the opposing side of the control plate body 2040. These holes may include a central mounting hole 2052 (blind or through) in the second side 2072, one or more axial pillar holes 2060-1, 2061 extending from the first side 2071-1 to the second side 2072, one or more radial locking holes 2057-1, 2059-1 extending from the circumferential portion 2050 into the corresponding pillar holes, a central counterbore 2042 in the first side, and one or more radial holes 2054-1, 2056-1, 2058-1 providing communication from the counterbore 2042 to the circumferential portion 2050.

[0064] 20A-1 through 20D-1 can have particular features formed as a result of being compression molded into openings in the control plate body 2040. For example, the insert can include a plurality of pillars 2030-1, 2031-1 that are received by the molding process into corresponding pillar holes 2060-1, 2061 in the control plate body 2040, respectively. A typical compression molding process begins with polychlorotrifluoroethene (PCTFE) powder filling the openings 2057-1, 2059-1, 2060-1, 2061 in the control plate body, followed by polymerizing the powder under the action of heat and pressure applied directly into the control plate body 2040 by known methods. The exemplary polymer insert has a plurality of polymer pillars 2030-1, 2031-1 formed in corresponding pillar holes 2060-1, 2061 and mating with plugs 2032-1, 2034-1 in corresponding locking holes 2057-1, 2059-1, while also being interconnected by an articulated, relatively thin polymer insert disk 2070 that covers a first side 2071-1 of the control plate body 2040. The polymer plugs 2032-1, 2034-1 securely lock the polymer insert within the control plate body 2040. The polymer insert disk 2070 is flat and has a first side 2073-1 that faces toward an orifice ridge in the valve body, as will be further described with respect to the exemplary valve 2100 shown in FIGS. 21A-1-21D-1 described below. One or more axial through-holes 2046-1, 2047-1 extend through corresponding polymer pillars 2030-1, 2031-1 and define a fluid passageway through which fluid can pass from a first side 2073-1 of the polymer insert disk 2070 to the opposing second side 2072 of the control plate body 2040 without having to pass through the circumferential portion 2050. The thin polymer insert disk 2070 is penetrated by a central hole 2044 of approximately the same diameter as and aligned with the central counterbore 2042.

[0065] 21B-1 and 21D-1 , the diameter of the central hole 2044 is selected to create a continuous, uninterrupted first surface region 2041-1 on the lower, flat first side 2073-1 of the polymer insert disk 2070, such that the first surface region 2041-1 has sufficient radial extent to span between contact with the second, smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 while covering the entire third, middle valve chamber portion 1752. The one or more axial through-holes 2046-1, 2047-1 are typically spaced at regular intervals around a circle of constant diameter that further surrounds the first surface region 2041-1. In some embodiments, the axial through-holes 2046-1, 2047-1 extend substantially straight through the one or more polymer pillars 2030-1, 2031-1 and the thin polymer insert disk 2070. The diameter of the constant diameter circle and the diameters of the axial through-holes 2046-1, 2047-1 are selected so that the axial through-holes cover only the second, middle valve chest portion 1754 and do not overlap the adjacent first smaller orifice ridge 1721 or second smaller orifice ridge 1722. More specifically, the axial through-holes 2046-1, 2047-1 fluidly connect the middle valve chest portion 1754 with the upper valve chest portion 2157. The solid material of the control plate body 2040 provides additional mechanical support for the polymer insert disk 2070 on the underside flat first side 2073-1 of the polymer insert disk 2070 spanning from the first surface area 2041-1 to a continuous, uninterrupted second surface area 2043-1 that has sufficient radial extent to span between contact with the largest orifice ridge 1720 and contact with the first smaller orifice ridge 1721 while covering the entire first intermediate valve chamber portion 1756.

[0066] The manner in which the exemplary valve 2100-1 controls fluid flow can be further understood by considering that the inner valve chamber portion 1759, surrounded by the smallest orifice ridge 1723, is supplied by the first fluid conduit opening 1712 that communicates with the first fluid conduit 1710, such that at least a portion of the control plate 2000-1 can move toward or outward from the smallest orifice ridge 1723 to create a first control gap (not shown) through which the first fluid portion can controllably flow. The controllable first fluid portion can transition directly to the third, intermediate valve chamber portion 1752, from which the first fluid portion can exit through the third inner fluid conduit opening 1718 that communicates with the second fluid conduit 1714. The second fluid portion can pass from the inner valve chest portion 1759 upward through the central bore 2044 into the control plate counterbore 2042 and into the radial holes 2054-1, 2056-1, 2058-1, pass through the circumferential portion 2050, and into the upper portion 2157 of the valve chest, and from there downward through the axial through-holes 2046-1, 2047-1 into the second intermediate valve chest portion 1754. Moving at least a portion of the control plate 2000-1 toward or outward from the second smaller orifice ridge 1722 creates a second control gap (not shown) through which the second fluid portion can also controllably flow directly from the second intermediate valve chest portion 1754 into the third intermediate valve chest portion 1752 and then exit through one or more third inner fluid conduit openings 1718 in communication with the second fluid conduit 1714. In this example valve 2100-1, an actuator (not shown) applies a force to control shaft 2182 to deflect diaphragm 2170, thereby moving attached control plate 2000-1 and thereby varying the first control gap and the second control gap, thereby modulating the conductance through valve 2100.

[0067] Concurrent with the above-described flow of the first and second fluid portions, moving at least a portion of the control plate 2000-1 toward or outward from the largest orifice ridge 1720 similarly creates a third control gap (not shown) through which a third fluid portion can controllably flow. The controllable third fluid portion can flow from the inner valve chamber portion 1759 upward through the central bore 2044, into the control plate counterbore 2042, and into the radial holes 2054-1, 2056-1, 2058-1, transition past the circumferential portion 2050, and sweep through the upper valve chamber portion 2157 into the outer valve chamber portion 1758, from which the third fluid portion can exit through the third control gap into the first middle valve chamber portion 1756. Upon reaching the first intermediate valve chest portion 1756, the third controllable fluid portion can exit through a second fluid conduit opening 1716 in communication with the second fluid conduit 1714. The fourth fluid portion can pass from the inner valve chest portion 1759 upward through the central bore 2044 into the control plate counterbore 2042 and into the radial holes 2054-1, 2056-1, 2058-1, through the circumferential portion 2050 into the upper valve chest portion 2157, and from there downward through one or more axial through-holes 2046-1, 2047-1 into the second intermediate valve chest portion 1754. Moving at least a portion of control plate 2000-1 toward or outward from first smaller orifice ridge 1721 creates a fourth control gap (not shown) through which the fourth fluid portion can controllably flow directly into first intermediate valve chamber portion 1756, from which it can exit through one or more second inner fluid conduit openings 1716 that communicate with second fluid conduit 1714. Thus, in this example valve 2100-1, an actuator (not shown) that applies a force to control shaft 2182, thereby deflecting diaphragm 2170, further modulates conductance through valve 2100 by varying the third control gap and the fourth control gap.It should be appreciated that while the valve 2100 is closed, fluid can pass through the axial and radial holes in the control plate 2000-1 into the upper portion 2157 of the valve chamber, the outer valve chamber portion 1758, and the second middle valve chamber portion 1754, but cannot proceed any further. Thus, when the valve 2100 is closed, fluid cannot pass from the first fluid conduit 1710 to the second fluid conduit 1714.

[0068] The designer can recognize that the largest orifice ridge 1720 and the first smaller orifice ridge 1721 need not be strictly concentric, but only nested, and further, the nested pair of orifice ridges 1220, 1221 can be positioned asymmetrically with respect to the shape and dimensions of the lower valve chamber. The throughflow control plate 2000-1, of course, must have a continuous, uninterrupted second surface area 2043-1 primarily on the lower first side 2073-1 of the polymer insert disk 2070 that spans between contact with the largest orifice ridge 1720 and contact with the first smaller orifice ridge 1721 and is sufficient to cover the entire first intermediate valve chamber portion 1756. Similarly, the second smaller orifice ridge 1722 and the smallest orifice ridge 1723 need not be strictly concentric, but merely nested, and further, the nested pair of orifice ridges 1722, 1723 may be asymmetrically positioned relative to the shape and dimensions of the lower valve chamber. The throughflow control plate 2000-1, of course, should primarily have a continuous, uninterrupted first surface area 2041-1 on the lower first side 2073-1 of the polymer insert disk 2070 spanning between contact with the second smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 and sufficient to cover the entire third, intermediate valve chamber portion 1752. The designer will also recognize that the described direction of fluid flow, traveling from the first fluid conduit 1710 to the second fluid conduit 1714, is used for convenience and clarity, but is not limiting. Fluid can flow in the opposite direction from the second fluid conduit 1714 to the first fluid conduit 1710, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve design shown in Figures 21A-1-21D-1 also substantially eliminates any concerns regarding internal dead space versus swept volume, and can also improve the dynamic response of the exemplary valve design.The flow-through control plate allows for the use of nested orifice ridges 1720, 1721, 1722, 1723, which together create an overall control gap length approximately three times the circumference of a single large orifice, while significantly reducing the area that must be closed to achieve shutoff. This combination provides high conductance with low closing force, and the inclusion of a relatively soft polymer insert further improves the sealing of valve 2100-1.

[0069] 18A-2-18D-2 includes a control plate body 1840 formed as a generally circular disk having a first side 1871 and an opposing second side 1872 separated axially by a circumferential portion 1850 of the control plate body 1840. One or more holes or features are formed in the circumferential portion 1850 and the opposing side of the disk. These holes may include a central mounting hole 1848 (blind or through) in the second side 1872, a counterbore 1842 in the first side, one or more radial holes 1854-2, 1856-2, 1858-2 that provide communication from the counterbore 1842 to the circumferential portion 1850, and one or more axial holes 1846-2, 1847-2 that provide communication from the first side 1871 to the respective radial holes. As shown in FIGS. 19A-2-19D-2, the control plate 1800-2 can be attached to stubs 1983 that protrude from the diaphragm 1970 and thereby suspended within the upper valve chamber portion 1957. Any suitable attachment method can be used, such as press fit, swaging the head of the stub, threaded fasteners, welding, or similar design choices as desired by the implementer, so long as the fluid passages formed by the axial holes 1846-2, 1847-2 are not obstructed. It should be appreciated that rather than attaching the control plate 1800-2 to the stubs 1983 using blind holes as shown in FIGS. 9A-9D, through-hole attachment can instead be used as shown in FIGS. 2A-2D, 3A-3D, and 7A-7F.

[0070] One or more axial holes 1846-2, 1847-2 are formed in the control plate body 1840 and are typically spaced apart around a first circle of constant diameter that surrounds the central mounting hole 1848. The diameter of the first circle and the diameters of the axial holes 1846-2, 1847-2 are selected so that the axial holes cover only the second intermediate valve chamber portion 1754 and do not overlap either the first smaller orifice ridge 1721 or the second smaller orifice ridge 1722. The axial holes 1846-2, 1847-2 define a fluid passageway through which fluid can pass from the first side 1871 of the control plate body 1840 to the radial holes 1854-2, 1856-2, 1858-2. More specifically, axial holes 1846-2, 1847-2, through respective radial holes, fluidly connect second, intermediate valve chamber portion 1754 with upper valve chamber portion 1957. The solid material of control plate body 1840 provides a mechanical connection from central mounting hole 1848 to a continuous, uninterrupted first surface area 1841 on a first side 1871 of disk-shaped control plate body 1840, which has sufficient radial extent to span between contact with second, smaller orifice ridge 1722 and contact with smallest orifice ridge 1723 while covering the entire third, intermediate valve chamber portion 1752. The solid portions 1861, 1862 of the control plate body 1840 between one or more adjacent axial holes 1846-2, 1847-2 provide a mechanical connection from the central mounting hole 1848 to a continuous, uninterrupted second surface area 1843 on the first side 1871 of the disk-shaped control plate body 1840, the second surface area 1843 having sufficient radial extent to span between contact with the largest orifice ridge 1720 and contact with the first, smaller orifice ridge 1721 while covering the entire first intermediate valve chamber portion 1756.

[0071] A central counterbore 1842 is formed in a first side 1871 of the control plate body 1840 so as to protrude into the body toward an opposite second side 1872. One or more radial holes 1854-2, 1856-2, 1858-2 extend from the counterbore 1842 through the control plate body 1840 to create a fluid passageway leading to the circumferential portion 1850. The radial holes 1854-2, 1856-2, 1858-2 are typically formed at equal angles, thereby providing regular spacing around the circumferential portion 1850, alternating with solid regions 1855, 1857, 1859 between the holes. It should be appreciated that the depth of the central counterbore 1842 can vary, but should be greater than the depth penetrating the radial holes 1854-2, 1856-2, 1858-2. The diameter of the counterbore must be smaller than the inner diameter of the smallest orifice ridge 1723 to ensure a continuous, uninterrupted first surface area 1841 seals against the third, intermediate valve chamber portion 1752 when the valve 1900-2 is in the closed condition shown. The counterbore 1842 may or may not intersect with the central mounting hole 1848 (a blind mounting hole) and may be the same diameter or a different diameter.

[0072] The manner in which the exemplary valve 1900-2 controls fluid flow can be further understood by considering that the inner valve chamber portion 1759, surrounded by the smallest orifice ridge 1723, is supplied by the first fluid conduit opening 1712 that communicates with the first fluid conduit 1710, such that at least a portion of the control plate 1800-2 can move toward or outward from the smallest orifice ridge 1723 to create a first control gap (not shown) through which the first fluid portion can controllably flow. The controllable first fluid portion can transition directly to the third, intermediate valve chamber portion 1752, from which the first fluid portion can exit through the third inner fluid conduit opening 1718 that communicates with the second fluid conduit 1714. The second fluid portion can travel from the inner valve chest portion 1759 upward through the control plate counterbore 1842 and radial holes 1854-2, 1856-2, 1858-2, through the circumferential portion 1850 into the upper valve chest portion 1957, and from there downward through the axial holes 1846-2, 1847-2 into the second intermediate valve chest portion 1754. Moving at least a portion of the control plate 1800-2 toward or outward from the second smaller orifice ridge 1722 creates a second control gap (not shown) through which the second fluid portion can also controllably flow directly from the second intermediate valve chest portion 1754 into the third intermediate valve chest portion 1752 and then exit through one or more third inner fluid conduit openings 1718 in communication with the second fluid conduit 1714. In this example valve 1900-2, an actuator (not shown) applies a force to control shaft 1982 to deflect diaphragm 1970, thereby moving affixed control plate 1800-2 and thereby modulating the conductance through valve 1900 by varying the first control gap and the second control gap.

[0073] Concurrent with the above-described flow of the first and second fluid portions, moving at least a portion of the control plate 1800-2 toward or outward from the largest orifice ridge 1720 similarly creates a third control gap (not shown) through which a third fluid portion can controllably flow. The controllable third fluid portion can migrate upward from the inner valve chamber portion 1759 through the control plate counterbore 1842 and radial holes 1854-2, 1856-2, 1858-2, past the circumferential portion 1850, and sweep through the upper valve chamber portion 1957 into the outer valve chamber portion 1758, from which the third fluid portion can exit through the third control gap into the first intermediate valve chamber portion 1756. Upon reaching the first intermediate valve chamber portion 1756, the controllable third fluid portion can exit through a second fluid conduit opening 1716, which is in communication with the second fluid conduit 1714. The fourth fluid portion can travel from the inner valve chamber portion 1759 through the control plate counterbore 1742 and radial holes 1854-2, 1856-2, 1858-2 upward through the circumferential portion 1850 into the upper valve chamber portion 1957 of the valve chamber, and downward through one or more axial through-holes 1846-2, 1847-2 into the second intermediate valve chamber portion 1754. Moving at least a portion of the control plate 1800-2 toward or outward from the first smaller orifice ridge 1721 creates a fourth control gap (not shown) through which the fourth fluid portion can controllably flow directly into the first intermediate valve chamber portion 1756, from which it can exit through the second inner fluid conduit opening 1716 in communication with the second fluid conduit 1714. Thus, in this example valve 1900-2, an actuator (not shown) that applies a force to control shaft 1982, thereby deflecting diaphragm 1970, further modulates the conductance through valve 1900 by varying the third and fourth control gaps. It should be appreciated that while valve 1900 is closed, fluid can pass through the axial and radial holes in control plate 1800-2 into upper valve chamber portion 1957, outer valve chamber portion 1758, and second middle valve chamber portion 1754, but cannot proceed further.Thus, when the valve 1900 is closed, fluid cannot pass from the first fluid conduit 1710 to the second fluid conduit 1714 .

[0074] The designer can recognize that the largest orifice ridge 1720 and the first smaller orifice ridge 1721 need not be strictly concentric, but only nested, and further, the nested pair of orifice ridges 1220, 1221 can be positioned asymmetrically with respect to the shape and dimensions of the lower valve chamber. The throughflow control plate 1800-2, of course, must have a continuous, uninterrupted second surface area 1843 primarily on the lower first side 1871 of the disk-shaped body 1840 that spans between its contact with the largest orifice ridge 1720 and its contact with the first smaller orifice ridge 1721 and is sufficient to cover the entire first intermediate valve chamber portion 1756. Similarly, the second smaller orifice ridge 1722 and the smallest orifice ridge 1723 need not be strictly concentric but can be nested, and further, the nested pair of orifice ridges 1722, 1723 can be asymmetrically positioned relative to the shape and dimensions of the lower valve chamber. The throughflow control plate 1800-2 must, of course, have a continuous, uninterrupted first surface area 1841 primarily on the lower first side 1871 of the disk-shaped body 1840, spanning between contact with the second smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723, and sufficient to cover the entire third, intermediate valve chamber portion 1752. The designer will also recognize that the described direction of fluid flow, traveling from the first fluid conduit 1710 to the second fluid conduit 1714, is used for convenience and clarity, but is not limiting. Fluid can flow in the opposite direction from the second fluid conduit 1714 to the first fluid conduit 1710, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve design shown in Figures 19A-2-19D-2 also substantially eliminates any concerns regarding internal dead space versus swept volume and can also improve the dynamic response of the exemplary valve design. The flow-through control plate enables the use of nested orifice ridges 1720, 1721, 1722, 1723, which together create an overall control gap length approximately three times the circumference of a single large orifice, while significantly reducing the area that must be closed to achieve shutoff.This combination provides high conductance with low closing force.

[0075] Another exemplary valve assembly 2100-2 can have a topwork including a valve housing 2160 removably joined to a valve body 1790 by deforming a metal gasket 2165 into a leak-tight assembly further shown in FIGS. 21A-2 through 21D-2. The topwork can include an actuator (not shown) selected for a particular application. For example, a manual or solenoid actuator might be used for a simple on-off high-conductance valve, while a piezoelectric actuator might be used for a proportionally controlled high-conductance valve compatible with a mass flow controller electronic system. The open cavities 1752, 1754, 1756, 1758, and 1759 formed in the upper surface of the valve body 1790 can be considered the lower portion of the valve chamber, while the upper portion 2157 of the valve chamber is formed in the lower surface of the valve housing 2160 above it.

[0076] The exemplary valve 2100-2 may further include a first fluid conduit 1710 (typically an inlet) and a second fluid conduit 1714 (typically an outlet), both of which communicate fluid with upper and lower portions of the valve chamber, a valve chamber sealing diaphragm 2170, and a control element that is movable by deflection of the valve chamber sealing diaphragm 2170. The movable control element may further comprise a control plate 2000-2 (described further below) affixed to the valve chamber sealing diaphragm 2170. In the illustrations of FIGS. 21B-2 and 21D-2, the control plate 2000-2 may be attached to stubs 2183 that protrude from the diaphragm 2170, thereby being suspended within the upper valve chamber portion 2157. The distance between the control plate 2000-2 and the valve chamber sealing diaphragm 2170 is minimized to reduce or eliminate the swept volume. Any suitable attachment method can be used, such as press-fitting, swaging the head of the stub, threaded fasteners, welding, or similar design choices as desired by the practitioner, so long as the fluid passageways through the various control plate holes are not obstructed. It should be appreciated that rather than attaching the control plate to the stub 2183 using through-holes 2052 as shown in FIGS. 21B-2 and 21D-2, a blind-hole attachment similar to that shown in FIGS. 9A-9D can instead be used. In the design of the exemplary valve 2100-2, a first fluid conduit opening 1712 provides communication between the inner valve chamber portion 1759 and the first fluid conduit 1710. Similarly, a second fluid conduit opening 1716 formed as a curved slot provides communication between the first middle valve chamber portion 1756 and the second fluid conduit 1714. Similarly, there is provided a third inner fluid conduit opening 1718 formed as a curved slot that provides communication between the third intermediate valve chamber portion 1752 and the second fluid conduit 1714. In the present illustration of Figures 21A-2 through 21D-2, the valve 2100 is fully closed in a no-blocking, no-flow condition, so that the control plate 2000-2 is shown contacting all four orifice ridges: largest orifice ridge 1720, first smaller orifice ridge 1721, second smaller orifice ridge 1722, and smallest orifice ridge 1723.Designers will recognize that the first fluid conduit 1710 and the second fluid conduit 1714 can provide fluid passage to surface-mounted component interfaces rather than the illustrated tube stubs. K1S and W seals are examples of surface-mounted component interfaces known in semiconductor capital equipment design and therefore are not shown in the drawings of this disclosure. Components including the valve can be constructed from materials selected for their desired chemical inertness with respect to the fluids handled, including, for example, stainless steel, Monel™ metal, titanium alloy, Hastelloy™ alloy, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and combinations of metals and polymers, separately or together. For example, a Type 316L stainless steel valve body 1790 can be used with a Hastelloy™ nickel alloy control plate 1800-2 and an Elgiloy™ cobalt alloy sealing diaphragm 1970. Alternatively, the valve body, sealing diaphragm, and control plate body can all be made from the same stainless steel alloy.

[0077] 20A-2 through 20D-2, another example of a flow-through control plate 2000-2 includes a control plate body 2040 formed as a substantially circular disk having a first side 2071-2 and an opposing second side 2072 separated axially by a circumferential portion 2050 of the control plate body 2040, and a polymer insert. One or more holes or features are formed in the circumferential portion 2050 and the opposing side of the control plate body 2040. These holes may include a central mounting hole 2052 (blind or through) in the second side 2072, one or more axial pillar holes 2060-2, 2061 extending from the first side 2071-2 to the second side 2072, one or more radial locking holes 2057-2, 2059-2 extending from the circumferential portion 2050 into the corresponding pillar holes, a central counterbore 2042 in the first side, and one or more radial holes 2054-2, 2056-2, 2058-2 providing communication from the counterbore 2042 to the circumferential portion 2050.

[0078] 20A-2 through 20D-2 can have particular features formed as a result of being compression molded into openings in the control plate body 2040. For example, the insert can include a plurality of pillars 2030-2, 2031-2 that are received by the molding process into corresponding pillar holes 2060-2, 2061, respectively, in the control plate body 2040. A typical compression molding process begins with polychlorotrifluoroethene (PCTFE) powder filling the openings 2057-2, 2059-2, 2060-2, 2061 in the control plate body, followed by polymerizing the powder under the action of heat and pressure applied directly into the control plate body 2040 by known methods. The exemplary polymer insert has a plurality of polymer pillars 2030-2, 2031-2 formed in corresponding pillar holes 2060-2, 2061 and mating with plugs 2032-2, 2034-2 in corresponding locking holes 2057-2, 2059-2, while also being interconnected by an articulated, relatively thin polymer insert disk 2070 that covers a first side 2071-2 of the control plate body 2040. The polymer plugs 2032-2, 2034-2 securely lock the polymer insert within the control plate body 2040. The polymer insert disk 2070 is flat and has a first side 2073-2 that faces toward the orifice ridge in the valve body, as will be further described with respect to the exemplary valve 2100 shown in FIGS. 21A-2-21D-2 described below. One or more axial holes 2046-2 extend through a first side 2073-2 of the polymer insert disk 2070 and into one or more radial holes 2054-2, 2056-2, 2058-2, providing a fluid passageway by which fluid can pass from the first side 2073-2 of the polymer insert disk 2070 to the opposing second side 2072 of the control plate body 2040 without having to pass through the circumferential portion 2050. A central hole 2044 of approximately the same diameter as the central counterbore 2042 extends through the thin polymer insert disk 2070 and is aligned with the central counterbore 2042.

[0079] 21B-2 and 21D-2, the diameter of the central hole 2044 is selected to create a continuous, uninterrupted first surface region 2041-2 on the lower, flat first side 2073-2 of the polymer insert disk 2070, such that the first surface region 2041-2 has sufficient radial extent to span between contact with the second, smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 while covering the entire third, middle valve chamber portion 1752. The one or more axial holes 2046-2 are typically spaced around a constant diameter circle that further surrounds the first surface region 2041-2. In some embodiments, the axial hole 2046-2 extends substantially straight through the first side 2073-2 of the polymer insert disk 2070 and into one or more radial holes 2054-2, 2056-2, 2058-2. The diameter of the constant diameter circle and the diameter of the axial bore 2046-2 are selected so that the axial bores cover only the second, middle valve chest portion 1754 and do not overlap the adjacent first smaller orifice ridge 1721 or second smaller orifice ridge 1722. More specifically, one or more axial bores 2046-2, 2047 fluidly connect the middle valve chest portion 1754 with the upper valve chest portion 2157. The solid material of the control plate body 2040 provides additional mechanical support for the polymer insert disk 2070 on the underside flat first side 2073-2 of the polymer insert disk 2070 spanning from the first surface area 2041-2 to a continuous, uninterrupted second surface area 2043-2 that has sufficient radial extent to span between contact with the largest orifice ridge 1720 and contact with the first smaller orifice ridge 1721 while covering the entire first intermediate valve chamber portion 1756.

[0080] The manner in which the exemplary valve 2100-2 controls fluid flow can be further understood by considering that an inner valve chamber portion 1759, surrounded by a smallest orifice ridge 1723, is supplied by a first fluid conduit opening 1712 that communicates with a first fluid conduit 1710, such that at least a portion of the control plate 2000-2 can move toward or outward from the smallest orifice ridge 1723 to create a first control gap (not shown) through which the first fluid portion can controllably flow. The controllable first fluid portion can transition directly to a third, intermediate valve chamber portion 1752, from which the first fluid portion can exit through a third inner fluid conduit opening 1718 that communicates with a second fluid conduit 1714. The second fluid portion can pass from the inner valve chamber portion 1759 upward through the central hole 2044 into the control plate counterbore 2042 and into the radial holes 2054-2, 2056-2, 2058-2, pass through the circumferential portion 2050 into the upper portion 2157 of the valve chamber, and from there downward through at least one axial hole 2046-2 and from the radial holes 2054-2, 2056-2, 2058-2 into the second intermediate valve chamber portion 1754. Moving at least a portion of the control plate 2000-2 toward or outward from the second, smaller orifice ridge 1722 creates a second control gap (not shown) through which a second fluid portion can also controllably flow directly from the second intermediate valve chamber portion 1754 into the third intermediate valve chamber portion 1752 and then exit through one or more third inner fluid conduit openings 1718 that communicate with the second fluid conduit 1714. In this example valve 2100-2, an actuator (not shown) can apply a force to the control shaft 2182 to deflect the diaphragm 2170, thereby moving the affixed control plate 2000-2 and thereby modulating the conductance through the valve 2100 by varying the first control gap and the second control gap.

[0081] Concurrent with the above-described flow of the first and second fluid portions, moving at least a portion of the control plate 2000-2 toward or outward from the largest orifice ridge 1720 similarly creates a third control gap (not shown) through which a third fluid portion can controllably flow. The controllable third fluid portion can flow from the inner valve chamber portion 1759 upward through the central bore 2044, into the control plate counterbore 2042, and into the radial holes 2054-2, 2056-2, 2058-2, transition past the circumferential portion 2050, and sweep through the upper valve chamber portion 2157 into the outer valve chamber portion 1758, from which the third fluid portion can exit through the third control gap into the first middle valve chamber portion 1756. Upon reaching the first intermediate valve chest portion 1756, the third controllable fluid portion can exit through a second fluid conduit opening 1716 in communication with the second fluid conduit 1714. The fourth fluid portion can pass from the inner valve chest portion 1759 upward through the central bore 2044 into the control plate counterbore 2042 and into the radial holes 2054-2, 2056-2, 2058-2, pass through the circumferential portion 2050, and into the upper valve chest portion 2157, and from there downward through one or more axial holes 2046-2 and the radial holes 2054-2, 2056-2, 2058-2 into the second intermediate valve chest portion 1754. Moving at least a portion of control plate 2000-2 toward or outward from first smaller orifice ridge 1721 creates a fourth control gap (not shown) through which the fourth fluid portion can controllably flow directly into first intermediate valve chamber portion 1756, from which the fourth fluid portion can exit through one or more second inner fluid conduit openings 1716 that communicate with second fluid conduit 1714. Thus, in this example valve 2100-2, an actuator (not shown) that applies a force to control shaft 2182, thereby deflecting diaphragm 2170, further modulates conductance through valve 2100 by varying the third control gap and the fourth control gap.It should be appreciated that while the valve 2100 is closed, fluid can pass through the axial and radial holes in the control plate 2000-2 into the upper portion 2157 of the valve chamber, the outer valve chamber portion 1758, and the second middle valve chamber portion 1754, but cannot proceed any further. Thus, when the valve 2100 is closed, fluid cannot pass from the first fluid conduit 1710 to the second fluid conduit 1714.

[0082] The designer can recognize that the largest orifice ridge 1720 and the first smaller orifice ridge 1721 need not be strictly concentric, but only nested, and further, the nested pair of orifice ridges 1220, 1221 can be positioned asymmetrically with respect to the shape and dimensions of the lower valve chamber. The throughflow control plate 2000-2, of course, must have a continuous, uninterrupted second surface area 2043-2 primarily on the lower first side 2073-2 of the polymer insert disk 2070 that spans between contact with the largest orifice ridge 1720 and contact with the first smaller orifice ridge 1721 and is sufficient to cover the entire first intermediate valve chamber portion 1756. Similarly, the second smaller orifice ridge 1722 and the smallest orifice ridge 1723 need not be strictly concentric, but merely nested, and further, the nested pair of orifice ridges 1722, 1723 may be asymmetrically positioned relative to the shape and dimensions of the lower valve chamber. The throughflow control plate 2000-2, of course, should primarily have a continuous, uninterrupted first surface area 2041-2 on the lower first side 2073-2 of the polymer insert disk 2070 spanning between contact with the second smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 and sufficient to cover the entire third, intermediate valve chamber portion 1752. The designer will also recognize that the described direction of fluid flow, traveling from the first fluid conduit 1710 to the second fluid conduit 1714, is used for convenience and clarity, but is not limiting. Fluid can flow in the opposite direction from the second fluid conduit 1714 to the first fluid conduit 1710, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve design shown in Figures 21A-2-21D-2 also substantially eliminates any concerns regarding internal dead space versus swept volume, and can also improve the dynamic response of the exemplary valve design.The flow-through control plate allows for the use of nested orifice ridges 1720, 1721, 1722, 1723, which together create an overall control gap length approximately three times the circumference of a single large orifice, while significantly reducing the area that must be closed to achieve shutoff. This combination provides high conductance with low closing force, and the inclusion of a relatively soft polymer insert further improves the sealing of the valve 2100.

[0083] Having thus described several aspects of at least one embodiment of this invention, it should be understood that various alterations, modifications, and improvements will readily occur to those skilled in the art. Such alterations, modifications, and improvements are intended to be part of this disclosure and are intended to be within the scope of the invention. Accordingly, the foregoing description and drawings are by way of example only. Some aspects of the invention are described below. [Aspect 1] In the control plate of a high conductance valve, a control plate body formed as an essentially circular disk having a flat side and an opposing side opposite the flat side, the control plate being configured to be moved within the valve by an actuator, the flat side having a continuous, uninterrupted flat portion for blocking fluid flow within the valve; a counterbore in the control plate body in communication with a fluid conduit; a plurality of radial fluid passages in the control plate body terminating in the counterbore; a plurality of axial fluid passages within the control plate body; a control plate wherein the radial fluid passages provide communication from the counterbore to a circumferential portion of the counterbore, and the axial fluid passages provide communication with an intermediate valve chamber portion, the intermediate valve chamber portion communicating with the fluid conduit. [Aspect 2] 2. The control plate of claim 1, wherein the axial fluid flow passage extends through the control plate body and creates a communication path between the middle valve chamber and an upper valve chamber portion of the high conductance valve. [Aspect 3] 2. The control plate of claim 1, wherein the axial fluid flow passage extends from the radial fluid flow passage through the control plate body to create a communication path between the radial fluid flow passage and the intermediate valve chamber. [Aspect 4] 2. The control plate of claim 1, wherein the intermediate valve chamber is the second intermediate valve chamber of the high conductance valve. [Aspect 5] further comprising a polymer insert disc; The polymer insert disc comprises: a plurality of pillars each extending through the control plate body; The control plate of embodiment 1 comprising a plurality of plugs each extending radially from the pillar. [Aspect 6] The control plate of embodiment 5, wherein an axial flow passage extends through at least one pillar to create a communication path between the middle valve chamber and upper valve chamber portions of the high conductance valve and at least one plug. [Aspect 7] The control plate of embodiment 5, wherein at least one axial fluid flow passage extends from the radial fluid flow passage through the polymer insert disk to create a communication path between the radial fluid flow passage and the intermediate valve chamber. [Aspect 8] 10. The control plate of claim 1, wherein the control plate is attached to a stub suspended below a diaphragm, and wherein the distance between the control plate and the diaphragm is minimized to reduce a swept volume. [Aspect 9] In the valve assembly: a valve body having a valve chamber, at least one first fluid conduit opening communicating with the valve chamber, at least one second fluid conduit opening communicating with the valve chamber, and at least one pair of adjacent orifice ridge segments extending from the valve body into the valve chamber, with an intermediate valve chamber segment being defined between the at least one pair of adjacent orifice ridge segments; a control plate body formed as an essentially circular disk having a flat side and an opposing side opposite the flat side, the control plate being configured to be moved within the valve by an actuator, the flat side having a continuous, uninterrupted flat portion for blocking fluid flow within the valve; a counterbore in the control plate body in communication with a fluid conduit; a plurality of radial fluid passages in the control plate body terminating in the counterbore; a plurality of axial fluid passages within the control plate body; the radial fluid flow passage provides communication from the counterbore to a circumferential portion of the counterbore, and the axial fluid flow passage provides communication with an intermediate valve chamber portion, the intermediate valve chamber portion communicating with the fluid conduit. [Aspect 10] 10. The valve assembly of claim 9, wherein the axial fluid flow passage extends through the control plate body and creates a communication path between the middle valve chamber portion and the upper valve chamber portion of the high conductance valve. [Aspect 11] 10. The valve assembly of claim 9, wherein the axial fluid flow passage extends from the radial fluid flow passage through the control plate body to create a communication path between the radial fluid flow passage and the intermediate valve chamber. [Aspect 12] 10. The valve assembly of claim 9, wherein the intermediate valve chamber portion is the second intermediate valve chamber of the high conductance valve. [Aspect 13] further comprising a polymer insert disc; The polymer insert disc comprises: a plurality of pillars each extending through the control plate body; 10. The valve assembly of embodiment 9, comprising: a plurality of plugs each extending radially from the pillar. [Aspect 14] 14. The valve assembly of claim 13, wherein an axial flow passage extends through at least one pillar to create a communication path between the middle and upper valve chamber portions of the high conductance valve and at least one plug. [Aspect 15] 14. The valve assembly of claim 13, wherein at least one axial fluid flow passage extends from the radial fluid flow passage through the polymer insert disk to create a communication path between the radial fluid flow passage and the intermediate valve chamber. [Aspect 16] 10. The valve assembly of claim 9, wherein the control plate is attached to a stub suspended below a diaphragm, and wherein the distance between the control plate and the diaphragm is minimized to reduce a swept volume. [Aspect 17] 1. A method for providing fluid flow through a high conductance valve using a control plate, comprising: pumping a fluid through a valve body having a valve chamber, at least one first fluid conduit opening in communication with the valve chamber, at least one second fluid conduit opening in communication with the valve chamber, and at least one pair of adjacent orifice ridge portions extending from the valve body into the valve chamber and defining an intermediate valve chamber portion between the at least one pair of adjacent orifice ridge portions; using a valve actuator to move a control plate body within the valve body, the control plate body being formed as a circular disk having a flat side and an opposing side opposite the flat side, the flat side having a continuous, uninterrupted flat portion for blocking fluid flow within the valve; channeling the fluid through a plurality of radial fluid passages formed within the control plate body and terminating in counterbores therein; channeling the fluid through a plurality of axial fluid passages, the axial fluid passages being formed within the control plate body; The radial fluid flow passage provides communication from the counterbore to a circumferential portion of the counterbore, and the axial fluid flow passage provides communication with an intermediate valve chamber portion, the intermediate valve chamber portion communicating with the fluid conduit. [Aspect 18] 18. The method of claim 17, wherein the axial fluid flow passage extends through the control plate body and creates a communication path between the middle valve chamber portion and the upper valve chamber portion of the high conductance valve. [Aspect 19] 18. The method of claim 17, wherein the axial fluid flow passage extends from the radial fluid flow passage through the control plate body to create a communication path between the radial fluid flow passage and the intermediate valve chamber. [Aspect 20] 18. The method of claim 17, wherein the intermediate valve chamber portion is the second intermediate valve chamber of the high conductance valve. [Explanation of symbols]

[0084] 100 valve assembly 110 first fluid conduit 112 first fluid conduit opening 114 Second fluid conduit 116 second fluid conduit opening 120 Orifice Ridge 121 Orifice Ridge 150 Valve chamber 154 Intermediate valve chamber part 157 Upper valve chamber part 158 Outer valve chamber part 159 Inner valve chamber part 160 Valve housing 164 Gasket seal area 165 Metal Gasket 170 diaphragm 182 Control Shaft 190 Valve body 200 Control Plate 240 Control plate body 242 Through hole 244 counterbore 246 Upper hole 248 Web 300 Control Plate 341 Control plate body 343 Through Hole 345 spherical pocket 347 Inclined upper hole 349 Web 400 Valve Assembly 414 Second fluid conduit 416 second fluid conduit opening 417 First fluid conduit 419 first fluid conduit opening 420 Orifice Ridge 421 Orifice Ridge 450 Valve chamber 454 Intermediate valve chamber part 457 Upper valve chamber part 458 Outer valve chamber part 459 Inner valve chamber part 460 Valve Housing 464 Gasket seal area 465 Metal Gasket 470 diaphragm 482 Control Shaft 490 Valve body 600 Control Plate 639 void passage 640 Control plate body 641 Amplifier Disc 642 Center through hole 643 Lifting hole 644 Ring-shaped groove 646 Upper Relief 647 Passive Part 648 Torsion Bar 649 Active part 810 first fluid conduit 814 Second fluid conduit 816 second fluid conduit opening 818 third fluid conduit opening 820 Orifice Ridge 821 Orifice Ridge 822 Orifice Ridge 823 Orifice Ridge 852 Third intermediate valve chamber 854 Second intermediate valve chamber portion 856 First intermediate valve chamber portion 857 Upper valve chamber part 858 Outer valve chamber part 859 Inner valve chamber part 860 Valve Housing 864 Gasket seal area 865 Metal Gasket 870 diaphragm 882 Control Shaft 890 Valve body 900 Control Plate 940 Control plate body 941 First Surface Area 943 Second Surface Region 944 First intermediate through hole 945 Web 946 Second intermediate through hole 946 Intermediate through hole 947 Web 1000 Valve Assembly 1212 first fluid conduit opening 1216 second fluid conduit opening 1218 third fluid conduit opening 1220 Orifice Ridge 1221 Orifice Ridge 1222 Orifice Ridge 1223 Orifice Ridge 1252 Third intermediate valve chamber 1254 Second intermediate valve chamber 1254 Intermediate valve chamber part 1256 First intermediate valve chamber 1258 Outer valve chamber part 1259 Inner valve chamber part 1264 Gasket seal area 1278 Open Cavity 1290 Valve body 1300 Control Plate 1340 Control plate body 1341 First Surface Region 1342 Control plate through hole 1343 Second Surface Region 1344 Counterbore 1346 Intermediate through hole 1347 Web 1348 Center insert mounting hole 1350 Center Insert 1352 Through hole 1353 Concave Insert Bottom Relief 1354 Insert through hole 1355 Web 1358 outer rim 1400 Valve Assembly 1457 Upper valve chamber part 1460 Valve Housing 1465 Metal Gasket 1470 diaphragm 1482 Control Shaft 1483 Stub 1500 Control Plate 1530 Polymer Insert 1531 Polymer Pillar 1532 Polymer Disc 1540 Control plate body 1541 First Surface Area 1542 Control plate through hole 1543 Second Surface Region 1544 Counterbore 1546 Intermediate through hole 1547 Web 1548 Center insert mounting hole 1549 Opening 1550 Center Insert 1552 through hole 1553 Concave Insert Bottom Relief 1554 Insert hole 1555 Web 1558 outer rim 1600 valves 1710 first fluid conduit 1712 first fluid conduit opening 1716 Second fluid conduit opening 1718 third inner fluid conduit opening 1720 Orifice Ridge 1721 Orifice Ridge 1722 Orifice Ridge 1723 Orifice Ridge 1742 Control Plate Counterbore 1752 Third intermediate valve chamber 1754 Second intermediate valve chamber 1754 Intermediate valve chamber part 1756 First intermediate valve chamber 1758 Outer valve chamber part 1759 Inner valve chamber part 1764 Gasket Seal Area 1765 Metal Gasket

Claims

1. In the control plate of a high conductance valve, a control plate body formed as an essentially circular disk having a flat side and an opposing side opposite the flat side, the control plate being configured to be moved within the valve by an actuator, the flat side having a continuous, uninterrupted flat portion for blocking fluid flow within the valve; a counterbore in the control plate body in communication with a fluid conduit; a plurality of radial fluid passages in the control plate body terminating in the counterbore; a plurality of axial fluid passages within the control plate body; a polymer insert disc; Equipped with the polymer insert disk includes a plurality of pillars each extending through the control plate body and a plurality of plugs each extending radially from the pillars; a control plate wherein the radial fluid passages provide communication from the counterbore to a circumferential portion of the counterbore, and the axial fluid passages provide communication with an intermediate valve chamber portion, the intermediate valve chamber portion communicating with the fluid conduit.

2. The control plate of claim 1 , wherein the axial fluid passage extends through the control plate body and creates a communication path between the middle valve chamber and an upper valve chamber portion of the high conductance valve.

3. The control plate of claim 1 , wherein the axial fluid flow passage extends from the radial fluid flow passage through the control plate body to create a communication path between the radial fluid flow passage and the intermediate valve chamber.

4. 2. The control plate of claim 1, wherein the intermediate valve chamber is a second intermediate valve chamber of the high conductance valve.

5. 2. The control plate of claim 1, wherein an axial passage extends through at least one pillar to create a communication path between the middle and upper valve chamber portions of the high conductance valve and at least one plug.

6. 2. The control plate of claim 1, wherein at least one axial fluid passage extends from the radial fluid passage through the polymer insert disk to create a communication path between the radial fluid passage and the intermediate valve chamber.

7. In the valve assembly: a valve body having a valve chamber, at least one first fluid conduit opening communicating with the valve chamber, at least one second fluid conduit opening communicating with the valve chamber, and at least one pair of adjacent orifice ridge portions extending from the valve body into the valve chamber, with an intermediate valve chamber portion being defined between the at least one pair of adjacent orifice ridge portions; a control plate body formed as an essentially circular disk having a flat side and an opposing side opposite the flat side, the control plate being configured to be moved within the valve by an actuator, the flat side having a continuous, uninterrupted flat portion for blocking fluid flow within the valve; a counterbore in the control plate body in communication with a fluid conduit; a plurality of radial fluid passages in the control plate body terminating in the counterbore; a plurality of axial fluid passages within the control plate body; a polymer insert disc; Equipped with the polymer insert disk includes a plurality of pillars each extending through the control plate body and a plurality of plugs each extending radially from the pillars; the radial fluid flow passage provides communication from the counterbore to a circumferential portion of the counterbore, and the axial fluid flow passage provides communication with an intermediate valve chamber portion, the intermediate valve chamber portion communicating with the fluid conduit.

8. 8. The valve assembly of claim 7, wherein the axial fluid passage extends through the control plate body to create a communication path between the middle valve chamber portion and the upper valve chamber portion of the valve assembly.

9. 8. The valve assembly of claim 7, wherein the axial fluid passage extends from the radial fluid passage through the control plate body to create a communication path between the radial fluid passage and the intermediate valve chamber.

10. 8. The valve assembly of claim 7, wherein the intermediate valve chamber portion is a second intermediate valve chamber of the valve assembly.

11. 8. The valve assembly of claim 7, wherein an axial flow passage extends through at least one pillar to create a communication path between the middle and upper valve chamber portions of the valve assembly and at least one plug.

12. 8. The valve assembly of claim 7, wherein at least one axial fluid passage extends from the radial fluid passage through the polymer insert disk to create a communication path between the radial fluid passage and the intermediate valve chamber.

13. 10. The method of flowing a fluid through a high conductance valve of claim 1, comprising: pumping a fluid through a valve body having a valve chamber, at least one first fluid conduit opening in communication with the valve chamber, at least one second fluid conduit opening in communication with the valve chamber, and at least one pair of adjacent orifice ridge portions extending from the valve body into the valve chamber and defining an intermediate valve chamber portion between the at least one pair of adjacent orifice ridge portions; using a valve actuator to move a control plate body within the valve body, the control plate body being formed as a circular disk having a flat side and an opposing side opposite the flat side, the flat side having a continuous, uninterrupted flat portion for blocking fluid flow within the valve; channeling the fluid through a plurality of radial fluid passages formed in the control plate body and terminating in a counterbore in the control plate body; channeling the fluid through a plurality of axial fluid passages, the axial fluid passages being formed within the control plate body; The radial fluid flow passage provides communication from the counterbore to a circumferential portion of the counterbore, and the axial fluid flow passage provides communication with an intermediate valve chamber portion, the intermediate valve chamber portion communicating with the fluid conduit.

14. 14. The method of claim 13, wherein the axial fluid flow passage extends through the control plate body and creates a communication path between the middle and upper valve chamber portions of the high conductance valve.

15. The method of claim 13 , wherein the axial fluid passage extends from a radial fluid passage through the control plate body to create a communication path between the radial fluid passage and the intermediate valve chamber.

16. 14. The method of claim 13, wherein the intermediate valve chamber portion is a second intermediate valve chamber of the high conductance valve.

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