Sensor device

Abstract

To prevent the detection accuracy from decreasing while preventing the manufacturing process from becoming complicated.SOLUTION: A sensor device 1 includes a circuit board 2, a moving part 3, a pair of drive electrodes 4A, 4B, multiple counter electrodes 5, and a control unit. The moving part 3 faces a main surface 21 of the circuit board 2 in a first direction D1. The drive electrodes 4A, 4B vibrate the moving part 3 along a second direction D2. The multiple counter electrodes 5 are arranged in an area of the main surface 21 facing the moving part 3. The control unit has a drive processing section, a detection processing section, and a correction processing section. The drive processing section generates the drive signals to be applied to the drive electrodes 4A and 4B. The detection processing section detects the capacitance between the detection electrode 51 and the moving part 3. The correction processing section generates a correction signal to be applied to an auxiliary electrode 52 based on the detection result of the detection processing section. The control unit also has a selection part. The selection part is configured to be capable of selectively switching the electrical connection between each of the multiple counter electrodes 5 and the detection processing unit and the correction processing unit.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE DISCLOSURE The present disclosure relates generally to sensor devices, and more particularly to sensor devices with moving parts. [Background technology]

[0002] Patent Document 1 discloses a vibrating mass gyroscope system that includes a vibrating mass and a plurality of electrodes arranged to apply one of a driving force and a force rebalance in the direction of each of three orthogonal axes. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-105631 Summary of the Invention [Problem to be solved by the invention]

[0004] However, a vibrating mass gyroscope system (sensor device) configured with multiple electrodes (opposing electrodes) arranged to sandwich a vibrating mass (movable part) in each of three mutually orthogonal directions has a complicated manufacturing process. One method for simplifying the manufacturing process is to arrange the electrodes so that they face only one surface of the vibrating mass in one of the three directions, but this may result in a decrease in the detection accuracy of the vibrating mass.

[0005] The present disclosure has been made in view of the above-mentioned circumstances, and aims to provide a sensor device that can suppress the complication of the manufacturing process and the deterioration of detection accuracy. [Means for solving the problem]

[0006] A sensor device according to one aspect of the present disclosure includes a substrate, a movable portion, a drive electrode, a plurality of counter electrodes, and a control unit. The substrate has a main surface. The movable portion faces the main surface in a first direction. The drive electrode vibrates the movable portion along a second direction perpendicular to the first direction. The plurality of counter electrodes are arranged in a region of the main surface facing the movable portion. The control unit is electrically connected to the plurality of counter electrodes and the drive electrode. The control unit includes a drive processing unit, a detection processing unit, and a correction processing unit. The drive processing unit generates a drive signal to be applied to the drive electrode. The detection processing unit detects the electrostatic capacitance between the movable portion and a detection electrode, which is one of the plurality of counter electrodes electrically connected to the detection processing unit. The correction processing unit generates a correction signal to be applied to an auxiliary electrode, which is one of the plurality of counter electrodes electrically connected to the correction processing unit, based on the detection result of the detection processing unit. The control unit further includes a selection unit. The selection section is configured to be able to selectively switch electrical connections between each of the plurality of counter electrodes and the detection processing section and the correction processing section.

[0007] A sensor device according to one aspect of the present disclosure includes a substrate, a first plate portion, a second plate portion, a movable portion, a first connecting portion, a second connecting portion, a first drive electrode, a second drive electrode, a plurality of opposing electrodes, and a control unit. The substrate has a main surface. The first plate portion has a first surface. The second plate portion has a second surface. The movable portion includes a first movable portion and a second movable portion. The first movable portion and the second movable portion face the main surface of the substrate in a first direction and face the first surface of the first plate portion and the second surface of the second plate portion in a second direction perpendicular to the first direction. The first movable portion and the second movable portion are aligned in a third direction perpendicular to the first and second directions. The first connecting portion is disposed between the first plate portion and the first movable portion and the second movable portion, and connects the first plate portion to the first movable portion and the second movable portion. The second connecting portion is disposed between the second plate portion and the first and second movable portions, and connects the second plate portion to the first and second movable portions. The first drive electrode vibrates the first movable portion along the second direction. The second drive electrode vibrates the second movable portion along the second direction. The plurality of opposing electrodes are disposed in an area of ​​the main surface facing the movable portion. The control portion is electrically connected to the plurality of opposing electrodes, the first drive electrode, and the second drive electrode. The plurality of opposing electrodes include a plurality of first opposing electrodes facing the first movable portion and a plurality of second opposing electrodes facing the second movable portion. The control portion includes a drive processing portion, a detection processing portion, and a correction processing portion. The plurality of first opposing electrodes and the plurality of second opposing electrodes include detection electrodes that are electrodes electrically connected to the detection processing portion. The plurality of first opposing electrodes and the plurality of second opposing electrodes include auxiliary electrodes that are electrodes electrically connected to the correction processing portion. The drive processing unit generates drive signals to be applied to the first drive electrodes and the second drive electrodes. The detection processing unit detects the electrostatic capacitance between the detection electrodes and the movable part. The correction processing unit generates a correction signal to be applied to the auxiliary electrodes based on the detection result of the detection processing unit. The control unit further includes a selection unit.The selection section is configured to be able to selectively switch electrical connections between each of the plurality of counter electrodes and the detection processing section and the correction processing section. [Effects of the Invention]

[0008] According to the present disclosure, it is possible to suppress the complication of the manufacturing process and the deterioration of detection accuracy. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a cross-sectional view of the sensor device according to the first embodiment. [Figure 2] FIG. 2 is a schematic diagram showing the configuration of the sensor device. [Figure 3] FIG. 3 is a schematic diagram showing the configuration of a sensor device according to the second embodiment. [Figure 4] FIG. 4 is another schematic diagram showing the configuration of the sensor device. [Figure 5] FIG. 5 is a cross-sectional view of the sensor device according to the third embodiment. [Figure 6] FIG. 6 is a plan view of the sensor device. [Figure 7] FIG. 7 is a plan view showing a substrate in the sensor device. [Figure 8] FIG. 8 is a cross-sectional view taken along line AA in FIG. [Figure 9] FIG. 9 is a plan view showing a movable part in the sensor device. [Figure 10] FIG. 10 is a cross-sectional view taken along line BB in FIG. [Figure 11] FIG. 11 is a plan view showing the movement of a movable part in the sensor device. [Figure 12] FIG. 12 is an end view taken along line CC in FIG. [Figure 13] FIG. 13 is an end view taken along line DD in FIG. [Figure 14] FIG. 14 is a schematic diagram showing an example of the arrangement of a plurality of counter electrodes in the sensor device of the same as above. [Figure 15]FIG. 15 is a schematic diagram showing another example of the arrangement of a plurality of counter electrodes in the sensor device. [Figure 16] FIG. 16 is a schematic diagram showing yet another example of the arrangement of a plurality of counter electrodes in the sensor device. DETAILED DESCRIPTION OF THE INVENTION

[0010] Preferred embodiments of the present disclosure will be described in detail below with reference to the drawings. Common elements in the embodiments described below are designated by the same reference numerals, and redundant descriptions of the common elements may be omitted. The following embodiments and modifications are merely a portion of the various embodiments of the present disclosure. Various modifications of the following embodiments and modifications can be made depending on the design, etc., as long as the object of the present disclosure can be achieved. The configurations of the modifications can also be combined as appropriate.

[0011] The drawings described in this disclosure are schematic diagrams, and the ratios of the sizes and thicknesses of the components in the drawings do not necessarily reflect the actual dimensional ratios. Note that the arrows indicating the directions in the drawings are merely examples and are not intended to define the directions when using the sensor device 1. Furthermore, the arrows indicating the directions in the drawings are merely shown for the purpose of explanation and do not have any substance.

[0012] In this disclosure, "orthogonal (perpendicular)" refers not only to a state where the angle between two things is exactly 90 degrees, but also to a state where two things intersect within a certain range of difference. In other words, the angle between two orthogonal things is within a certain range of difference from 90 degrees (for example, 10 degrees or less). In other words, "orthogonal" in this disclosure includes a case where the angle between two things is between 80 degrees and 100 degrees. Similarly, "parallel" in this disclosure includes not only a case where two things do not strictly intersect, but also a case where two things are lined up within a certain range of difference. For example, "parallel" in this disclosure includes a case where one thing is inclined at an angle of 10 degrees or less relative to the other. In other words, "parallel" in this disclosure includes a case where the angle between one thing and the other is between -10 degrees and 10 degrees.

[0013] (Embodiment 1) The configuration of a sensor device 1 according to the first embodiment will be described with reference to FIGS.

[0014] The sensor device 1 is an angular velocity sensor that converts an angular velocity into an electrical signal.

[0015] As shown in Figures 1 and 2, the sensor device 1 of embodiment 1 includes a substrate 2, a movable part 3, a driving electrode 4A, a driving electrode 4B, a plurality of counter electrodes 5, and a control unit 10 (see Figure 2).

[0016] The substrate 2 has a main surface 21. The main surface 21 is perpendicular to the first direction. In other words, the normal direction of the main surface 21 is parallel to the first direction. The shapes of the substrate 2 and the main surface 21 in embodiment 1 are square when viewed from above in the first direction D1. However, the shapes of the substrate 2 and the main surface 21 may be rectangular (or oblong) when viewed from above in the first direction D1, or may be other shapes.

[0017] The movable part 3 faces the main surface 21 of the substrate 2 in the first direction D1. The movable part 3 is shaped like a rectangular parallelepiped having a pair of faces perpendicular to the first direction D1, a pair of faces perpendicular to the second direction D2, and a pair of faces perpendicular to the third direction. For example, the movable part 3 is supported by a first connecting part disposed between the first plate part 71 and the movable part 3, and a second connecting part disposed between the second plate part 72 and the movable part 3. For example, the first connecting part and the second connecting part are formed to have elasticity.

[0018] The driving electrodes 4A and 4B drive the movable part 3. "Driving the movable part 3" means vibrating the movable part 3 along a second direction D2 that is perpendicular to the first direction D1. In the following description, the vibration along the second direction D2 caused by the driving electrodes driving the movable part 3 may be referred to as "driving vibration."

[0019] The driving electrode 4A in the first embodiment is disposed on a first surface 711 of the first plate portion 71. The first surface 711 of the first plate portion 71 is perpendicular to the second direction D2. In the second direction D2, the driving electrode 4A faces the movable portion 3. The first plate portion 71 is, for example, a substrate.

[0020] The driving electrode 4B in the first embodiment is disposed on the second surface 721 of the second plate portion 72. The second surface 721 of the second plate portion 72 is perpendicular to the second direction D2. In the second direction D2, the driving electrode 4B faces the movable portion 3. The second plate portion 72 is, for example, a substrate.

[0021] The driving electrodes 4A and 4B are arranged to sandwich the movable portion 3 in the second direction D2. However, the arrangement of the driving electrodes 4A and 4B may be set as appropriate. For example, as in a sensor device 1 according to a third embodiment described below, the driving electrodes 4A and 4B may be arranged to be surrounded by the movable portion 3 (see FIG. 6). Furthermore, it is not essential that the driving electrode 4A be arranged on the first surface 711 of the first plate portion 71 and the driving electrode 4B be arranged on the second surface 721 of the second plate portion 72. The driving electrodes 4A and 4B may be arranged to protrude from the main surface 21 of the substrate 2 in the first direction D1.

[0022] The plurality of counter electrodes 5 are arranged in a region of the main surface 21 that faces the movable portion 3. That is, the plurality of counter electrodes 5 face the movable portion 3 in the first direction D1.

[0023] The control unit 10 is electrically connected to the plurality of counter electrodes 5 and the driving electrodes 4A and 4B. The control unit 10 includes a drive processing unit 11, a detection processing unit 12, a correction processing unit 13, and a selection unit 6.

[0024] The drive processing unit 11 generates drive signals to be applied (or output) to the drive electrodes 4A and 4B, and also applies the drive signals to the drive electrodes 4A and 4B.

[0025] The detection processing unit 12 detects the capacitance between the detection electrode 51 and the movable part 3. The detection electrode 51 is one of the multiple counter electrodes 5 that is electrically connected to the detection processing unit 12. The detection electrode 51 forms a capacitance between itself and the movable part 3. In the sensor device 1, the capacitance between the detection electrode 51 and the movable part 3 changes depending on the angular velocity acting on the sensor device 1.

[0026] The correction processing unit 13 generates a correction signal to be applied (or output) to the auxiliary electrode 52 based on the detection result of the detection processing unit 12. The auxiliary electrode 52 is one of the multiple counter electrodes 5 that is electrically connected to the correction processing unit 13. The correction processing unit 13 also applies the correction signal to the auxiliary electrode 52. For example, the auxiliary electrode 52 has a function of suppressing the detected vibration of the movable part 3 or suppressing unnecessary vibration of the movable part 3.

[0027] The selection unit 6 is configured to be able to selectively switch the electrical connection between each of the plurality of counter electrodes 5 and the detection processing unit 12 and the correction processing unit 13. Information regarding the combination of connections between each of the plurality of counter electrodes 5 and the detection processing unit 12 and the correction processing unit 13 is stored in a register of the control unit 10. This allows the combination of connections between each of the plurality of counter electrodes 5 and the detection processing unit 12 and the correction processing unit 13 to be stored in a storage unit with a relatively small capacity.

[0028] For example, in the sensor device 1 of embodiment 1, the first plate portion 71, the second plate portion 72, the movable portion 3, the driving electrode 4A, the driving electrode 4B, the first connecting portion, and the second connecting portion are formed by processing a silicon wafer using MEMS (Micro Electro Mechanical Systems) manufacturing technology, etc.

[0029] In the sensor device 1 of the first embodiment, the substrate 2 and the control unit 10 are part of an IC (Integrated Circuit) chip 100 (see FIG. 2).

[0030] The IC chip 100 is an ASIC (Application Specific Integrated Circuit) chip. The IC chip 200 is a Si-based IC chip. For example, the IC chip 100 has a silicon substrate, a multi-layer structure, and a plurality of external connection terminals (pad electrodes).

[0031] As described above, the sensor device 1 detects angular velocity. More specifically, the sensor device 1 detects angular velocity around a rotation axis along a third direction (i.e., a direction perpendicular to the plane of the paper in FIG. 1 ) orthogonal to the first direction D1 and the second direction D2 in FIG. 1 . The sensor device 1 is a vibration-type gyro sensor that detects angular velocity around the third direction using Coriolis force (a turning force). The sensor device 1 detects the angular velocity acting on the movable part 3 by detecting the Coriolis force generated by an external rotational force acting on the movable part 3 while the movable part 3 is vibrating. When an angular velocity around the rotation axis along the third direction is input while the movable part 3 is being driven to vibrate along the first direction D1 by an electrostatic force generated between the driving electrodes 4A and 4B, the sensor device 1 can detect the angular velocity using the detection electrode 51 arranged on the substrate 2.

[0032] In the sensor device 1 of the present disclosure, the only electrodes facing the movable part 3 in the first direction D1 are the multiple counter electrodes 5 arranged on the main surface 21 of the substrate 2. In other words, in the sensor device 1 of the present disclosure, only one of a pair of surfaces of the movable part 3 that are orthogonal to the first direction D1 faces the multiple counter electrodes 5. In the sensor device 1 of the present disclosure, detection electrodes and the like are not arranged so as to sandwich the movable part 3 in the first direction D1, which makes it possible to prevent the manufacturing process from becoming complicated.

[0033] Furthermore, by switching the electrical connection between each of the multiple counter electrodes 5 and the detection processing unit 12 and the correction processing unit 13 using the selection unit 6, it is possible to switch whether the counter electrode 5 functions as a detection electrode 51 or an auxiliary electrode 52. In other words, in the sensor device 1 of the present disclosure, the arrangement or number of the detection electrodes 51 and the auxiliary electrodes 52 is not fixed at the time of manufacturing the sensor device 1. In the sensor device 1 of the present disclosure, by switching the combination of connections of the multiple counter electrodes 5 after manufacturing the sensor device 1, tuning can be performed for each sensor device 1, and the effects of manufacturing variations can be reduced. This makes it possible to suppress a decrease in detection accuracy that may occur when the detection electrodes, etc. are not arranged so as to sandwich the movable part 3 in the first direction D1.

[0034] As described above, according to the sensor device 1 of the first embodiment, it is possible to prevent the manufacturing process from becoming complicated and to prevent a decrease in detection accuracy.

[0035] (Embodiment 2) The configuration of the sensor device 1 according to the second embodiment will be described with reference to FIGS.

[0036] As shown in Figures 3 and 4, the sensor device 1 of embodiment 2 differs from the sensor device 1 of embodiment 1 in that the correction processing unit 13 has a first processing unit 131 and a second processing unit 132.

[0037] The first processing unit 131 generates a first correction signal that suppresses the detected vibration of the movable unit 3. The first processing unit 131 also applies (or outputs) the first correction signal to a first auxiliary electrode 521, which will be described later. The first processing unit 131 is an FTR (Force to Rebalance) processing unit, and the first auxiliary electrode 521 is an FTR electrode. In this disclosure, "suppressing the detected vibration of the movable unit 3" means suppressing the vibration of the movable unit 3 along the first direction D1 caused by the Coriolis force. In other words, the "detected vibration" in this disclosure refers to the vibration of the movable unit 3 along the first direction D1 caused by the Coriolis force. This suppresses transient response, thereby increasing the response speed.

[0038] The second processing unit 132 generates a second correction signal that suppresses unnecessary vibrations of the movable unit 3. The second processing unit 132 also applies (or outputs) the second correction signal to a second auxiliary electrode 522, which will be described later. The second processing unit 132 is a QC (Quadrature Cancellation) processing unit, and the second auxiliary electrode 522 is a QC electrode. In the present disclosure, "suppressing unnecessary vibrations of the movable unit 3" means suppressing vibrations other than detection vibrations and drive vibrations. This suppression of unnecessary vibrations can further prevent a decrease in detection accuracy.

[0039] In the sensor device 1 according to the second embodiment, the plurality of auxiliary electrodes 52 among the plurality of counter electrodes 5 include a first auxiliary electrode 521 and a second auxiliary electrode 522. The first auxiliary electrode 521 is a counter electrode 5 electrically connected to the first processing unit 131. The second auxiliary electrode 522 is a counter electrode 5 electrically connected to the second processing unit 132.

[0040] As shown in Figure 4, the selection unit 6 of embodiment 2 is configured to be able to selectively switch the electrical connection between each of the multiple opposing electrodes 5 and the detection processing unit 12, the first processing unit 131, and the second processing unit 132.

[0041] 4, the control unit 10 of the second embodiment has a register 14. The register 14 stores information on the combination of connections between each of the plurality of counter electrodes 5 and the detection processing unit 12 and the correction processing unit 13 (first processing unit 131 and second processing unit 132).

[0042] As a result, the sensor device 1 of the second embodiment can improve the response speed and further suppress the decrease in detection accuracy.

[0043] (Embodiment 3) (1) Sensor device configuration The configuration of the sensor device 1 according to the third embodiment will be described with reference to Figures 3 to 10. Note that in Figures 6 to 13, illustration of a plate portion facing the substrate 2 in the first direction D1 is omitted.

[0044] 5 and 6, the sensor device 1 according to the third embodiment includes a substrate 2, a first plate portion 71, a second plate portion 72, a movable portion 3, a first connecting portion 91, a second connecting portion 92, a first driving electrode 41, a second driving electrode 42, a plurality of counter electrodes 5, and a control unit 10. In the third embodiment, a case where there are a plurality of first driving electrodes 41 and a plurality of second driving electrodes 42 (two in the example of FIG. 6) is illustrated.

[0045] The first plate portion 71 and the second plate portion 72 are parts of the frame portion 7 that protrude from the edge of the substrate 2 along the first direction D1. The first plate portion 71 and the second plate portion 72 face each other in the second direction D2. The first plate portion 71 has a first surface 711. The second plate portion 72 has a second surface 721. The first surface 711 of the first plate portion 71 and the second surface 721 of the second plate portion 72 are mutually perpendicular to the second direction D2.

[0046] The movable section 3 of the second embodiment has a first movable section 31 and a second movable section 32. The first movable section 31 and the second movable section 32 face the main surface 21 of the substrate 2 in the first direction D1. The first movable section 31 and the second movable section 32 face the first surface 711 of the first plate section 71 and the second surface 721 of the second plate section 72 in the second direction D2. The first movable section 31 and the second movable section 32 are aligned in a third direction D3 that is perpendicular to the first direction D1 and the second direction D2.

[0047] The first movable part 31 has a main body part 310 and a through hole 311. The main body part 310 has a rectangular parallelepiped shape having a pair of faces perpendicular to the first direction D1, a pair of faces perpendicular to the second direction D2, and a pair of faces perpendicular to the third direction D3. The first movable part 31 has a through hole 311 that is rectangular and elongated along the second direction D2. The through hole 311 is a hole that penetrates the main body part 310 along the first direction D1. In a plan view from the first direction D1, the through hole 311 is formed in the center of the main body part 310.

[0048] The second movable part 32 has a main body part 320 and a through hole 321. The main body part 320 has a rectangular parallelepiped shape having a pair of faces perpendicular to the first direction D1, a pair of faces perpendicular to the second direction D2, and a pair of faces perpendicular to the third direction D3. The second movable part 32 has a through hole 321 that is rectangular and elongated along the second direction D2. The through hole 321 is a hole that penetrates the main body part 320 along the first direction D1. In a plan view from the first direction D1, the through hole 321 is formed in the center of the main body part 320. The first movable part 31 and the second movable part 32 have approximately the same shape.

[0049] The first connecting portion 91 is disposed between the first plate portion 71 and the first and second movable portions 31 and 32. The first connecting portion 91 connects the first plate portion 71 to the first and second movable portions 31 and 32. The thickness of the first connecting portion 91 in the first direction D1 is the same as the thickness of the movable portion 3. As shown in FIG. 9 , the first connecting portion 91 has a first portion 910 and a second portion 914.

[0050] The first portion 910 connects a first central portion of the first movable portion 31 in the third direction D3 and a first central portion of the second movable portion 32 in the third direction D3. The first central portion of the first movable portion 31 is a central portion of a first surface of the first movable portion 31. The first surface of the first movable portion 31 is a surface facing the first plate portion 71. The first central portion of the second movable portion 32 is a central portion of a first surface of the second movable portion 32. The first surface of the second movable portion 32 is a surface facing the first plate portion 71. The first portion 910 has a main body portion 911, a protruding portion 912, and a protruding portion 913. The main body portion 911 is rod-shaped along the third direction D3 in a plan view from the first direction D1. The protruding portion 912 protrudes from a first end of the main body portion 911 in the third direction D3 toward the second movable portion 32. The protruding portion 912 is connected to the second movable portion 32. The protruding portion 913 protrudes from the second end of the main body portion 911 in the third direction D3 toward the first movable portion 31. The protruding portion 913 is connected to the first movable portion 31.

[0051] The second portion 914 connects the center of the first portion 910 of the first coupling portion 91 in the third direction D3 to the first plate portion 71. The second portion 914 protrudes from the center of the main body 911 of the first portion 910 in the third direction D3 toward the first plate portion 71. The second portion 914 is connected to the first plate portion 71.

[0052] The second connecting portion 92 is disposed between the second plate portion 72 and the first and second movable portions 31 and 32. The second connecting portion 92 connects the second plate portion 72 to the first and second movable portions 31 and 32. The thickness of the second connecting portion 92 in the first direction D1 is the same as the thickness of the movable portion 3. As shown in FIG. 9 , the second connecting portion 92 has a first portion 920 and a second portion 924.

[0053] The first portion 920 connects a second central portion of the first movable portion 31 in the third direction D3 to a second central portion of the second movable portion 32 in the third direction D3. The second central portion of the first movable portion 31 is a central portion of the second surface of the first movable portion 31. The second surface of the first movable portion 31 is a surface facing the second plate portion 72. The second central portion of the second movable portion 32 is a central portion of the second surface of the second movable portion 32. The second surface of the second movable portion 32 is a surface facing the second plate portion 72. The first portion 920 has a main body portion 921, a protruding portion 922, and a protruding portion 923. The main body portion 921 is rod-shaped along the third direction D3 in a plan view from the first direction D1. The protruding portion 922 protrudes from a first end of the main body portion 921 in the third direction D3 toward the second movable portion 32. The protruding portion 922 is connected to the second movable portion 32. The protruding portion 923 protrudes from the second end of the main body portion 921 in the third direction D3 toward the first movable portion 31. The protruding portion 923 is connected to the first movable portion 31.

[0054] The second portion 924 connects the center of the first portion 920 of the second connecting portion 92 in the third direction D3 to the second plate portion 72. The second portion 924 protrudes from the center of the main body 921 of the first portion 920 in the third direction D3 toward the second plate portion 72. The second portion 924 is connected to the second plate portion 72.

[0055] The multiple first drive electrodes 41 drive the first movable part 31. "Driving the first movable part 31" means vibrating the first movable part 31 along the second direction D2.

[0056] The multiple first drive electrodes 41 include a first drive electrode 41A and a first drive electrode 41B. The first drive electrode 41A and the first drive electrode 41B protrude from the main surface 21 of the substrate 2 along the first direction D1. The first drive electrode 41A and the first drive electrode 41B protrude from the main surface 21 of the substrate 2 so as to pass through the through-hole 311 of the first movable part 31. The first drive electrode 41A and the first drive electrode 41B are aligned in the second direction D2. The first drive electrode 41A is closer to the second plate portion 72 than the first drive electrode 41B. The first drive electrode 41A and a second drive electrode 42B, which will be described later, are aligned in the third direction D3.

[0057] The plurality of second drive electrodes 42 drive the second movable portion 32. "Driving the second movable portion 32" means vibrating the second movable portion 32 along the second direction D2.

[0058] The multiple second drive electrodes 42 include second drive electrodes 42A and second drive electrodes 42B. The second drive electrodes 42A and second drive electrodes 42B protrude from main surface 21 of substrate 2 along first direction D1. The second drive electrodes 42A and second drive electrodes 42B protrude from main surface 21 of substrate 2 so as to pass through through holes 321 of second movable part 32. The second drive electrodes 42A and second drive electrodes 42B are aligned in second direction D2. The second drive electrode 42A is closer to first plate portion 71 than the second drive electrode 42B. The second drive electrode 42A and first drive electrode 41B are aligned in third direction D3.

[0059] The polarity of the voltage applied to first drive electrode 41A is opposite to that of first drive electrode 41B. The polarity of the voltage applied to second drive electrode 42A is opposite to that of second drive electrode 42B. Furthermore, the polarity of the voltage applied to first drive electrode 41A is the same as that of second drive electrode 42A. Furthermore, the polarity of the voltage applied to first drive electrode 41B is the same as that of second drive electrode 42B.

[0060] 6, the plurality of counter electrodes 5 are arranged in a region (region A1 or region A2) facing the movable portion 3. The plurality of counter electrodes 5 includes a plurality of first counter electrodes 5A and a plurality of second counter electrodes 5B.

[0061] The multiple first opposing electrodes 5A are arranged in an area A1 facing the first movable portion 31 in the first direction D1. In Fig. 6, the outlines of the movable portion 3, the first connecting portion 91, and the second connecting portion 92 are illustrated by two-dot chain lines, and the area A1 is an area surrounded by the two-dot chain line that illustrates the outline of the first movable portion 31. Note that the area A1 may be an area of ​​the area facing the first movable portion 31 that is farther from the second driving electrodes 42A, 42B than the first driving electrodes 41A, 41B in the third direction D3.

[0062] The multiple first opposing electrodes 5A are arranged in a matrix of m rows and n columns so that the multiple first opposing electrodes 5A are aligned along the second direction D2 and the third direction D3. That is, the multiple first opposing electrodes 5A of embodiment 3 are m×n first opposing electrodes 5A. Note that both m and n are integers of 1 or greater, and at least one of m and n is an integer of 2 or greater.

[0063] The multiple second opposing electrodes 5B are arranged in an area A2 facing the second movable portion 32 in the first direction D1. The area A2 is an area surrounded by a two-dot chain line that illustrates the outline of the second movable portion 32. Note that the area A2 may be an area of ​​the area facing the second movable portion 32 that is farther from the first driving electrodes 41A, 41B in the third direction D3 than the second driving electrodes 42A, 42B.

[0064] The plurality of second opposing electrodes 5B are arranged in a matrix of m rows and n columns so that the plurality of second opposing electrodes 5B are aligned along the second direction D2 and the third direction D3. That is, the plurality of second opposing electrodes 5B of the third embodiment are m×n second opposing electrodes 5B.

[0065] The plurality of first opposing electrodes 5A and the plurality of second opposing electrodes 5B have detection electrodes 51 that are electrodes electrically connected to the detection processing unit 12. In addition, the plurality of first opposing electrodes 5A and the plurality of second opposing electrodes 5B have auxiliary electrodes 52 that are electrodes electrically connected to the correction processing unit 13. More specifically, the plurality of first opposing electrodes 5A and the plurality of second opposing electrodes 5B of embodiment 3 have the plurality of detection electrodes 51 and the plurality of auxiliary electrodes 52.

[0066] The control unit 10 is electrically connected to the plurality of opposing electrodes 5, the plurality of first drive electrodes 41, and the plurality of second drive electrodes 42. The control unit 10 has a drive processing unit 11, a detection processing unit 12, a correction processing unit 13, and a selection unit 6.

[0067] The drive processing unit 11 generates drive signals to be applied (or output) to the plurality of first drive electrodes 41 and the plurality of second drive electrodes 42. The drive processing unit 11 also applies the drive signals to the plurality of first drive electrodes 41 and the plurality of second drive electrodes 42.

[0068] The detection processing unit 12 detects the capacitance between the detection electrodes 51 and the movable part 3. More specifically, the detection processing unit 12 detects the capacitance between the detection electrodes 51 included in the plurality of first opposing electrodes 5A and the first movable part 31. The detection processing unit 12 also detects the capacitance between the detection electrodes 51 included in the plurality of second opposing electrodes 5B and the second movable part 32.

[0069] The correction processing unit 13 generates a correction signal to be applied (or output) to the auxiliary electrode 52 based on the detection result of the detection processing unit 12.

[0070] The selection unit 6 is configured to be able to selectively switch the electrical connection between each of the plurality of counter electrodes 5 and the detection processing unit 12 and the correction processing unit 13. More specifically, the selection unit 6 of the third embodiment is configured to be able to selectively switch the electrical connection between each of the plurality of counter electrodes 5 and the detection processing unit 12, the first processing unit 131, and the second processing unit 132.

[0071] That is, the plurality of auxiliary electrodes 52 included in the plurality of first opposing electrodes 5A and the plurality of auxiliary electrodes 52 included in the plurality of second opposing electrodes 5B include first auxiliary electrodes 521 and second auxiliary electrodes 522.

[0072] For example, in the sensor device 1 of embodiment 3, the first plate portion 71, the second plate portion 72, the movable portion 3, the plurality of first driving electrodes 41, the plurality of second driving electrodes 42, the first connecting portion 91, and the second connecting portion 92 are formed by processing a silicon wafer using MEMS manufacturing technology, etc.

[0073] According to the sensor device 1 of the third embodiment, it is possible to prevent the manufacturing process from becoming complicated and to prevent a decrease in detection accuracy.

[0074] (2) Movement of the moving parts The operation of the movable part 3 of the third embodiment will be described with reference to FIGS.

[0075] The multiple first drive electrodes 41 and the multiple second drive electrodes 42 drive the first movable portion 31 and the second movable portion 32 so that the first movable portion 31 and the second movable portion 32 move in opposite directions along the second direction D2. That is, as shown in Fig. 11, when the first movable portion 31 moves to the right on the paper surface of Fig. 11, the second movable portion 32 moves to the left on the paper surface of Fig. 11. Also, when the first movable portion 31 moves to the left on the paper surface of Fig. 11, the second movable portion 32 moves to the right on the paper surface of Fig. 11.

[0076] When an angular velocity about a rotation axis along the third direction D3 is input while the first movable part 31 and the second movable part 32 are being driven to vibrate along the second direction D2, a Coriolis force is generated along the first direction D1, as shown in FIG. 12. Here, because the first movable part 31 and the second movable part 32 are moving in opposite directions along the second direction D2, Coriolis forces in opposite directions are generated in the first movable part 31 and the second movable part 32. Therefore, as shown in FIG. 13, when the Coriolis force causes the first movable part 31 to move downward in the plane of the page in FIG. 13, the Coriolis force also causes the second movable part 32 to move upward in the plane of the page in FIG. 13. Furthermore, when the Coriolis force causes the first movable part 31 to move upward in the plane of the page in FIG. 13, the Coriolis force also causes the second movable part 32 to move downward in the plane of the page in FIG. 13.

[0077] (3) Arrangement pattern of multiple opposing electrodes The arrangement pattern of the plurality of counter electrodes 5 will be described with reference to FIGS.

[0078] 14 to 16, the detection electrode 51, the first auxiliary electrode 521, and the second auxiliary electrode 522 are distinguished by the presence or absence of dot hatching and the density of the dot hatching. In Figures 14 to 16, the detection electrode 51 is not dot hatched, the first auxiliary electrode 521 is hatched with relatively dark dots, and the second auxiliary electrode 522 is hatched with relatively light dots.

[0079] 14, the plurality of counter electrodes 5 includes a plurality of detection electrodes 51, a plurality of first auxiliary electrodes 521, and a plurality of second auxiliary electrodes 522. For example, in FIG. 14, among the plurality of counter electrodes 5, two adjacent counter electrodes 5 in the third direction D3 or the second direction D2 are different types of electrodes. Furthermore, in FIG. 14, one of the two adjacent counter electrodes 5 in the third direction D3 or the second direction D2 is a detection electrode 51. By arranging the plurality of counter electrodes 5 in this manner, the plurality of detection electrodes 51, the plurality of first auxiliary electrodes 521, and the plurality of second auxiliary electrodes 522 are evenly arranged, which can further suppress a decrease in detection accuracy.

[0080] For example, in FIG. 15, the plurality of detection electrodes 51, the plurality of first auxiliary electrodes 521, and the plurality of second auxiliary electrodes 522 are arranged side by side along the second direction D2 by type. That is, in FIG. 15, two adjacent counter electrodes 5 in the second direction D2 are electrodes of the same type. Furthermore, in FIG. 15, the plurality of first auxiliary electrodes 521 are arranged closer to the edge of the substrate 2 in the third direction D3 than the plurality of second auxiliary electrodes 522. In other words, the plurality of first auxiliary electrodes 521 are arranged farther from the center of the substrate 2 in the third direction D3 than the plurality of second auxiliary electrodes 522. For example, the first auxiliary electrode 521 included in the plurality of first counter electrodes 5A is arranged closer to the edge of the substrate 2 in the third direction D3 than the second auxiliary electrodes 522 included in the plurality of first counter electrodes 5A. Furthermore, the first auxiliary electrodes 521 included in the plurality of second opposing electrodes 5B are disposed in positions closer to the edge of the substrate 2 in the third direction D3 than the second auxiliary electrodes 522 included in the plurality of second opposing electrodes 5B. In other words, by disposing the FTR electrode in a position away from the center of the movable part 3 in the third direction D3 within region A1 or region A2, the effect of suppressing detection vibration is enhanced, and the response speed can be increased.

[0081] 14, the first auxiliary electrodes 521 may be arranged closer to the edge of the substrate 2 in the third direction D3 than the second auxiliary electrodes 522. Similar to the arrangement pattern shown in FIG. 15, the response speed can be increased.

[0082] (Variation) Modifications of the first to third embodiments are listed below.

[0083] In the above embodiment, the case where the plurality of counter electrodes 5 are arranged in a matrix of m rows and n columns has been exemplified. However, it is not necessary to arrange the plurality of counter electrodes 5 in a matrix of m rows and n columns. For example, as shown in FIG. 16, a plurality of rectangular counter electrodes 5 elongated in the second direction D2 may be arranged in a matrix of m rows and n columns in the third direction D3. In other words, the plurality of counter electrodes 5 may be arranged in m rows and 1 column. Also, in FIG. 16, the plurality of first auxiliary electrodes 521 are arranged closer to the edge of the substrate 2 in the third direction D3 than the plurality of second auxiliary electrodes 522. This can improve the response speed.

[0084] In the above embodiment, the sensor device 1 is a doubly supported beam type sensor device, but the sensor device 1 may be a cantilever beam type sensor device.

[0085] (summary) As is clear from the above-described embodiment and modified examples, the sensor device (1) according to the first aspect includes a substrate (2), a movable portion (3), drive electrodes (4A; 4B), a plurality of counter electrodes (5), and a control unit (10). The substrate (2) has a main surface (21). The movable portion (3) faces the main surface (21) in a first direction (D1). The drive electrodes (4A; 4B) vibrate the movable portion (3) along a second direction (D2) perpendicular to the first direction (D1). The plurality of counter electrodes (5) are arranged in a region of the main surface (21) facing the movable portion (3). The control unit (10) is electrically connected to the plurality of counter electrodes (5) and the drive electrodes (4A; 4B). The control unit (10) includes a drive processing unit (11), a detection processing unit (12), and a correction processing unit (13). The drive processing unit (11) generates a drive signal to be applied to the drive electrodes (4A; 4B). The detection processing unit (12) detects the electrostatic capacitance between the movable part (3) and a detection electrode (51), which is one of the plurality of counter electrodes (5) and is electrically connected to the detection processing unit (12). The correction processing unit (13), based on the detection result of the detection processing unit (12), generates a correction signal to be applied to an auxiliary electrode (52), which is one of the plurality of counter electrodes (5) and is electrically connected to the correction processing unit (13). The control unit (10) further includes a selection unit (6). The selection unit (6) is configured to selectively switch the electrical connection between each of the plurality of counter electrodes (5) and the detection processing unit (12) and the correction processing unit (13).

[0086] According to this aspect, it is possible to prevent the manufacturing process from becoming complicated and to prevent a decrease in detection accuracy.

[0087] A sensor device (1) according to a second aspect includes a substrate (2), a first plate (71), a second plate (72), a movable portion (3), a first connecting portion (91), a second connecting portion (92), first driving electrodes (41A; 41B), second driving electrodes (42A; 42B), a plurality of counter electrodes (5), and a control unit (10). The substrate (2) has a main surface (21). The first plate (71) has a first surface (711). The second plate (72) has a second surface (721). The movable portion (3) has a first movable portion (31) and a second movable portion (32). The first movable portion (31) and the second movable portion (32) face the main surface (21) of the substrate (2) in the first direction (D1) and face the first surface (711) of the first plate portion (71) and the second surface (721) of the second plate portion (72) in a second direction (D2) perpendicular to the first direction (D1). The first movable portion (31) and the second movable portion (32) are aligned in a third direction (D3) perpendicular to the first direction (D1) and the second direction (D2). The first connecting portion (91) is disposed between the first plate portion (71) and the first movable portion (31) and the second movable portion (32), and connects the first plate portion (71) to the first movable portion (31) and the second movable portion (32). The second connecting portion (92) is disposed between the second plate portion (72) and the first and second movable portions (31 and 32), and connects the second plate portion (72) to the first and second movable portions (31 and 32). The first driving electrodes (41A; 41B) vibrate the first movable portion (31) along the second direction (D2). The second driving electrodes (42A; 42B) vibrate the second movable portion (32) along the second direction (D2). The plurality of counter electrodes (5) are disposed in regions (A1; A2) of the main surface (21) that face the movable portion (3). The control portion (10) is electrically connected to the plurality of counter electrodes (5), the first driving electrode (41), and the second driving electrode (42). The plurality of counter electrodes (5) include a plurality of first counter electrodes (5A) facing the first movable part (31) and a plurality of second counter electrodes (5B) facing the second movable part (32). The control part (10) includes a drive processing part (11), a detection processing part (12), and a correction processing part (13). The plurality of first counter electrodes (5A) and the plurality of second counter electrodes (5B) include detection electrodes (51) that are electrically connected to the detection processing part (12).The plurality of first opposing electrodes (5A) and the plurality of second opposing electrodes (5B) have auxiliary electrodes (52) that are electrodes electrically connected to a correction processing unit (13). The drive processing unit (11) generates drive signals to be applied to the first driving electrodes (41A; 41B) and the second driving electrodes (42A; 42B). The detection processing unit (12) detects the electrostatic capacitance between the detection electrodes (51) and the movable part (3). The correction processing unit (13) generates a correction signal to be applied to the auxiliary electrodes (52) based on the detection result of the detection processing unit (12). The control unit (10) further has a selection unit (6). The selection unit (6) is configured to be able to selectively switch the electrical connection between each of the plurality of opposing electrodes (5) and the detection processing unit (12) and the correction processing unit (13).

[0088] According to this aspect, it is possible to prevent the manufacturing process from becoming complicated and to prevent a decrease in detection accuracy.

[0089] In the sensor device (1) according to the third aspect, in the second aspect, the first connecting portion (91) has a first portion (910) and a second portion (914). The first portion (910) connects a central portion of the first movable portion (31) in the third direction (D3) to a central portion of the second movable portion (32) in the third direction (D3). The second portion (914) connects a central portion of the first portion (910) of the first connecting portion (91) in the third direction (D3) to the first plate portion (71). The second connecting portion (92) has a first portion (920) and a second portion (924). The first portion (920) connects a central portion of the first movable portion (31) in the third direction (D3) to a central portion of the second movable portion (32) in the third direction (D3). The second portion (924) connects the center of the first portion (920) of the second connecting portion (92) in the third direction (D3) to the second plate portion (72).

[0090] In the sensor device (1) according to the fourth aspect, in the first aspect, the correction processing unit (13) has a first processing unit (131) and a second processing unit (132). The first processing unit (131) generates a first correction signal that suppresses detected vibration of the movable part (3). The second processing unit (132) generates a second correction signal that suppresses unwanted vibration of the movable part (3). The plurality of counter electrodes (5) include a first auxiliary electrode (521) and a second auxiliary electrode (522). The first auxiliary electrode (521) is an electrode electrically connected to the first processing unit (131). The second auxiliary electrode (522) is an electrode electrically connected to the second processing unit (132). The selection unit (6) is configured to selectively switch electrical connections between each of the plurality of counter electrodes (5) and the detection processing unit (12), the first processing unit (131), and the second processing unit (132).

[0091] According to this aspect, it is possible to increase the response speed and further suppress the deterioration of detection accuracy.

[0092] In the sensor device (1) according to the fifth aspect, in the second or third aspect, the correction processing unit (13) has a first processing unit (131) and a second processing unit (132). The first processing unit (131) generates a first correction signal that suppresses detected vibration of the movable part (3). The second processing unit (132) generates a second correction signal that suppresses unnecessary vibration of the movable part (3). The plurality of first opposing electrodes (5A) and the plurality of second opposing electrodes (5B) include a first auxiliary electrode (521) and a second auxiliary electrode (522). The first auxiliary electrode (521) is an electrode electrically connected to the first processing unit (131). The second auxiliary electrode (522) is an electrode electrically connected to the second processing unit (132). The selection unit (6) is configured to be able to selectively switch electrical connections between each of the plurality of counter electrodes (5) and the detection processing unit (12), the first processing unit (131), and the second processing unit (132).

[0093] According to this aspect, it is possible to increase the response speed and further suppress the deterioration of detection accuracy.

[0094] In the sensor device (1) according to the sixth aspect, in the fifth aspect, the first auxiliary electrodes (521) included in the plurality of first opposing electrodes (5A) are arranged closer to the edge of the substrate (2) in the third direction (D3) than the second auxiliary electrodes (522) included in the plurality of first opposing electrodes (5A). The first auxiliary electrodes (521) included in the plurality of second opposing electrodes (5B) are arranged closer to the edge of the substrate (2) in the third direction (D3) than the second auxiliary electrodes (522) included in the plurality of second opposing electrodes (5B).

[0095] According to this aspect, the response speed can be increased.

[0096] In the sensor device (1) according to the seventh aspect, in the fourth or fifth aspect, the plurality of counter electrodes (5) includes a plurality of detection electrodes (51), a plurality of first auxiliary electrodes (521), and a plurality of second auxiliary electrodes (522). The plurality of detection electrodes (51), the plurality of first auxiliary electrodes (521), and the plurality of second auxiliary electrodes (522) are arranged so as to be aligned along the second direction (D2) by type.

[0097] According to this aspect, the response speed can be increased.

[0098] In the sensor device (1) according to an eighth aspect, in the fourth or fifth aspect, the plurality of counter electrodes (5) include a plurality of detection electrodes (51), a plurality of first auxiliary electrodes (521), and a plurality of second auxiliary electrodes (522). Of the plurality of counter electrodes (5), two counter electrodes (5) adjacent to each other in a third direction (D3) perpendicular to the first direction (D1) and the second direction (D2) or in the second direction (D2) are electrodes of different types.

[0099] According to this aspect, it is possible to further suppress the deterioration of detection accuracy.

[0100] In the sensor device (1) according to a ninth aspect, in any one of the first to eighth aspects, the control unit (10) further includes a register (14). The register (14) stores a combination of connections between each of the plurality of counter electrodes (5) and the detection processing unit (12) and the correction processing unit (13).

[0101] According to this aspect, a memory unit with a relatively small capacity can store the combinations of connections between each of the plurality of counter electrodes (5) and the detection processing unit (12) and correction processing unit (13).

[0102] In the sensor device (1) according to a tenth aspect, in any one of the first to ninth aspects, the substrate (2) and the control unit (10) are part of an IC chip (100).

[0103] The configurations other than the first and second aspects are not essential for the sensor device (1) and can be omitted as appropriate. [Explanation of symbols]

[0104] 1. Sensor device 10 Control Unit 100 IC chips 11 Drive processing unit 12 Detection processing section 13 Correction processing section 131 First Processing Section 132 Second Processing Section 14 Registers 2 boards 21 Main surface 3 Moving parts 31 1st moving part 32 Second moving part 4A, 4B drive electrodes 41A, 41B First drive electrode 42A, 42B Second drive electrode 5. Counter electrode 5A First counter electrode 5B Second opposing electrode 51 Detection electrode 52 Auxiliary electrode 521 1st auxiliary electrode 522 Second auxiliary electrode 6. Selection Department 71 Plate 1 711 Page 1 72 Plate 2 721 Page 2 91 1st connection 910 Part 1 914 Part 2 92 Second connection 920 Part 1 924 Part 2 A1, A2 areas D1 1st direction D2 2nd direction D3 3rd direction

Claims

1. a substrate having a major surface; a movable portion facing the main surface in a first direction; a drive electrode for vibrating the movable portion along a second direction perpendicular to the first direction; a plurality of counter electrodes arranged in an area of ​​the main surface facing the movable portion; a control unit electrically connected to the plurality of opposing electrodes and the drive electrode; Equipped with the control unit includes a drive processing unit, a detection processing unit, and a correction processing unit; the drive processing unit generates a drive signal to be applied to the drive electrode; the detection processing unit detects a capacitance between the movable part and a detection electrode that is an electrode electrically connected to the detection processing unit among the plurality of opposing electrodes; the correction processing unit generates a correction signal to be applied to an auxiliary electrode, which is an electrode electrically connected to the correction processing unit among the plurality of counter electrodes, based on a detection result of the detection processing unit; the control unit further includes a selection unit configured to selectively switch electrical connections between each of the plurality of counter electrodes and the detection processing unit and the correction processing unit. Sensor device.

2. a substrate having a major surface; a first plate portion having a first surface; a second plate portion having a second surface; a movable portion having a first movable portion and a second movable portion that face the main surface of the substrate in a first direction, face the first surface of the first plate portion and the second surface of the second plate portion in a second direction perpendicular to the first direction, and are aligned in a third direction perpendicular to the first direction and the second direction; a first connecting portion that is disposed between the first plate portion and the first movable portion and the second movable portion, and that connects the first plate portion to the first movable portion and the second movable portion; a second connecting portion disposed between the second plate portion and the first movable portion and the second movable portion, and connecting the second plate portion to the first movable portion and the second movable portion; a first drive electrode for vibrating the first movable portion along the second direction; a second drive electrode for vibrating the second movable portion along the second direction; a plurality of counter electrodes arranged in an area of ​​the main surface facing the movable portion; a control unit electrically connected to the plurality of opposing electrodes, the first drive electrode, and the second drive electrode; Equipped with the plurality of opposing electrodes include a plurality of first opposing electrodes opposing the first movable portion and a plurality of second opposing electrodes opposing the second movable portion; the control unit includes a drive processing unit, a detection processing unit, and a correction processing unit; the plurality of first opposing electrodes and the plurality of second opposing electrodes each have a detection electrode that is an electrode electrically connected to the detection processing unit, the plurality of first opposing electrodes and the plurality of second opposing electrodes each have an auxiliary electrode that is an electrode electrically connected to the correction processing unit, the drive processing unit generates drive signals to be applied to the first drive electrodes and the second drive electrodes; the detection processing unit detects a capacitance between the detection electrode and the movable part, the correction processing unit generates a correction signal to be applied to the auxiliary electrode based on a detection result of the detection processing unit; the control unit further includes a selection unit configured to selectively switch electrical connections between each of the plurality of counter electrodes and the detection processing unit and the correction processing unit. Sensor device.

3. The first connecting portion is a first portion connecting a central portion of the first movable portion in the third direction and a central portion of the second movable portion in the third direction; a second portion connecting a central portion of the first portion of the first connecting portion in the third direction and the first plate portion; and The second connecting portion is a first portion connecting a central portion of the first movable portion in the third direction and a central portion of the second movable portion in the third direction; a second portion connecting a central portion of the first portion of the second connecting portion in the third direction and the second plate portion; having The sensor device according to claim 2 .

4. The correction processing unit a first processing unit that generates a first correction signal that suppresses the detected vibration of the movable part; a second processing unit that generates a second correction signal that suppresses unnecessary vibrations of the movable part; and The plurality of counter electrodes are a first auxiliary electrode electrically connected to the first processing section; a second auxiliary electrode electrically connected to the second processing section; Including, the selection unit is configured to be able to selectively switch electrical connections between each of the plurality of opposing electrodes and the detection processing unit, the first processing unit, and the second processing unit. The sensor device according to claim 1 .

5. The correction processing unit a first processing unit that generates a first correction signal that suppresses the detected vibration of the movable part; a second processing unit that generates a second correction signal that suppresses unnecessary vibrations of the movable part; and The plurality of first opposing electrodes and the plurality of second opposing electrodes are a first auxiliary electrode electrically connected to the first processing section; a second auxiliary electrode electrically connected to the second processing section; Including, the selection unit is configured to be able to selectively switch electrical connections between each of the plurality of opposing electrodes and the detection processing unit, the first processing unit, and the second processing unit. The sensor device according to claim 2 .

6. the first auxiliary electrodes included in the plurality of first opposing electrodes are disposed at positions closer to an edge of the substrate in the third direction than the second auxiliary electrodes included in the plurality of first opposing electrodes, the first auxiliary electrodes included in the plurality of second opposing electrodes are disposed at positions closer to an edge of the substrate in the third direction than the second auxiliary electrodes included in the plurality of second opposing electrodes; The sensor device according to claim 5 .

7. the plurality of opposing electrodes include a plurality of the detection electrodes, a plurality of the first auxiliary electrodes, and a plurality of the second auxiliary electrodes; the plurality of detection electrodes, the plurality of first auxiliary electrodes, and the plurality of second auxiliary electrodes are arranged in the second direction by type; The sensor device according to claim 4 or 5.

8. the plurality of opposing electrodes include a plurality of the detection electrodes, a plurality of the first auxiliary electrodes, and a plurality of the second auxiliary electrodes; Among the plurality of opposing electrodes, two opposing electrodes adjacent to each other in a third direction orthogonal to the first direction and the second direction or in the second direction are electrodes of different types. The sensor device according to claim 4 or 5.

9. the control unit further includes a register that stores a combination of connections between each of the plurality of opposing electrodes and the detection processing unit and the correction processing unit. The sensor device according to claim 1 or 2.

10. The substrate and the control unit are part of an IC chip. The sensor device according to claim 1 or 2.

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