Robot and substrate transfer device

Abstract

To provide a robot and a substrate transfer device that are effective in achieving both the reduction of an opening for assembling robots into a chamber and the assembling workability of the robots into the chamber.SOLUTION: A robot 2 includes: a multi-joint arm 3 including a hand 20 that supports a substrate W, a base 10, an arm 4 that connects the hand 20 to the base 10, and a plurality of joints J10 that is arranged along the arm 4, each of which operates about a vertical axial line and changes the position and posture of the hand 20 to the base 10; and a flange 30 that spreads to section between the base 10 and the arm 4 and the hand 20 so as to close an opening OP1 of a chamber 90 where at least a part of the multi-joint arm 3 is accommodated. The flange 30 has a longitudinal direction, and the axial line of the joint J10 that exists closest to the base 10 among the joints J10 exists close to one end 31 of the flange 30 between the one end 31 and a center 32 of the flange 30 in the longitudinal direction of the flange 30.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present disclosure relates to a robot and a substrate transport apparatus. [Background technology]

[0002] Patent Document 1 discloses a chamber structure in which a transfer robot is attached to an opening provided at the bottom of a transfer chamber, which is the internal space of the transfer chamber. The chamber structure includes a robot base member provided below the opening and a transfer robot. The transfer robot has a base unit and an arm unit provided above the base unit. A robot flange member having the same shape as the opening hole of the robot base member is provided above the base unit. The arm unit can be inserted into the opening hole, and the robot flange member is detachably connected to the periphery of the opening hole. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2019 / 189883 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a robot and a substrate transport device that are effective in achieving both a reduction in the size of the opening for incorporating the robot into the chamber and ease of incorporating the robot into the chamber. [Means for solving the problem]

[0005] A robot according to one aspect of the present disclosure comprises a multi-joint arm having a hand that supports a substrate, a base, an arm that connects the hand to the base, and a plurality of joints that are aligned along the arm and each move around a vertical axis to change the position and orientation of the hand relative to the base, and a flange that extends to separate the base from the arm and hand and closes the opening of a chamber that houses at least a portion of the multi-joint arm, the flange having a longitudinal direction, and the axis of the joint that is closest to the base is located towards one end of the flange between one end and the center of the flange in the longitudinal direction of the flange. [Effects of the Invention]

[0006] According to the present disclosure, it is possible to provide a robot and a substrate transport device that are effective in achieving both a reduction in the opening for incorporating the robot into the chamber and ease of incorporating the robot into the chamber. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 2 is a plan view illustrating the inside of the substrate transport device. [Figure 2] FIG. 2 is a cross-sectional view taken along line II-II in FIG. [Figure 3] FIG. 3 is a bottom view of the robot in FIG. 2. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. [Figure 5] FIG. 5 is an enlarged view of the first arm motor in FIG. 4. [Figure 6] FIG. 5 is an enlarged view of the second arm motor in FIG. 4. [Figure 7] FIG. 5 is an enlarged view of the hand motor in FIG. 4. [Figure 8] FIG. 10 is a diagram showing a modified example of the hand motor. [Figure 9] FIG. 10 is a diagram showing a modified example of the second arm motor. [Figure 10] FIG. 10 is a diagram showing another modified example of the hand motor. [Figure 11] FIG. 10 is a diagram showing yet another modified example of the hand motor. [Figure 12] FIG. 1 illustrates an example of a tube and an air cooling channel. [Figure 13] FIG. 2 is a diagram illustrating an example of cable wiring. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, the embodiments will be described in detail with reference to the drawings. In the description, the same elements or elements having the same functions are denoted by the same reference numerals, and redundant description will be omitted.

[0009] [Substrate transport device] 1 and 2 is an apparatus that transfers substrates W between one or more stations ST10 in which the substrates W are stored and a plurality of processing modules PU10. Examples of the substrates W include semiconductor substrates, glass substrates, mask substrates, and FPD (Flat Panel Display) substrates. The substrate transfer apparatus 1 includes a chamber 90 and a robot 2. The chamber 90 has a longitudinal direction D11 and a lateral direction D12 perpendicular to the longitudinal direction D11. The chamber 90 is arranged so that the longitudinal direction D11 and the lateral direction D12 are aligned along a horizontal plane.

[0010] The chamber 90 has a top plate 91 and a bottom plate 92 aligned vertically, and further has a peripheral wall 93 surrounding the space between the bottom plates 92. Hereinafter, the space surrounded by the peripheral wall 93 will be referred to as a transfer space S01.

[0011] The peripheral wall 93 has end walls 94, 95 that face each other in the longitudinal direction D11 and extend along the short side direction D12, and side walls 96, 97 that face each other in the short side direction D12 and extend along the longitudinal direction D11. A distance L11 between the end walls 94 and 95 is the length of the chamber 90 in the longitudinal direction D11, and a distance W11 between the side walls 96 and 97 is the width of the chamber 90 in the short side direction D12. The distance L11 is greater than the distance W11.

[0012] The one or more stations ST10 and the plurality of processing modules PU10 described above are arranged around the periphery of the chamber 90. In the illustrated example, two stations ST10 are arranged along the end wall 95, three processing modules PU10 are arranged along the side wall 96, and three processing modules PU10 are arranged along the side wall 97, but the number and arrangement of the stations ST10 and the number and arrangement of the processing modules PU10 are not limited to this.

[0013] The robot 2 transports the substrate W between one or more stations ST10 and a plurality of processing modules PU10 within the transfer space S01. For example, the robot 2 unloads the substrate W from one of the one or more stations ST10 and loads it into one of the plurality of processing modules PU10. The robot 2 also unloads the substrate W from one of the plurality of processing modules PU10 and loads it into one of the one or more stations ST10.

[0014] As shown in FIG. 2, the robot 2 includes a multi-joint arm 3 and a plurality of actuators 40. The multi-joint arm 3 has a hand 20, a base 10, an arm 4, and a plurality of joints J10. The base 10 is fixed to the environment in which the multi-joint arm 3 is installed. The hand 20 supports the substrate W in a horizontal position. The arm 4 connects the base 10 to the hand 20. The multiple joints J10 are aligned along the arm 4, and each moves around a vertical axis to change the position and orientation of the hand 20 relative to the base 10. The multiple actuators 40 drive each of the multiple joints J10.

[0015] For example, the arm 4 has a first link 50 and a second link 60. The multiple joints J10 include a first joint J11, a second joint J12, and a third joint J13. The first joint J11 connects the first link 50 to the base 10 so as to rotate about a vertical first axis Ax1. The second joint J12 connects the second link 60 to an end of the first link 50 so as to rotate about a vertical second axis Ax2. The third joint J13 connects the hand 20 to an end of the second link 60 so as to rotate about a vertical third axis Ax3. The base 10, the first link 50, the second link 60, and the hand 20, which are connected by the joints J11, J12, and J13, are all "links of the articulated arm 3."

[0016] The actuator 40 includes arm actuators 41 and 42 and a hand actuator 43. The arm actuator 41 (base actuator) drives the first joint J11 to rotate the first link 50 about the first axis Ax1 relative to the base 10. The arm actuator 42 drives the second joint J12 to rotate the second link 60 about the second axis Ax2 relative to the first link 50, independently of the rotation of the first link 50 by the arm actuator 41. The hand actuator 43 drives the third joint J13 to rotate the hand 20 about the third axis Ax3 relative to the second link 60, independently of the rotation of the first link 50 by the arm actuator 41 and the rotation of the second link 60 by the arm actuator 42.

[0017] Along arm 4, arm actuator 41 is most proximal from base 10, arm actuator 42 is second most proximal from base 10, and hand actuator 43 is most distal from base 10. Most proximal from base 10 includes being within base 10.

[0018] At least a portion of the articulated arm 3 is disposed within the transfer space S01 so as to be able to transfer the substrate W. For example, at least a portion of the articulated arm 3 is disposed within the transfer space S01 through an opening OP1 provided in the bottom plate 92. This can prevent dust from entering the chamber, compared to providing the opening OP1 in the top plate 91 for loading the articulated arm 3 into the transfer space S01. The robot 2 may further include a flange 30. The flange 30 holds the base 10 and closes the opening OP1.

[0019] With the flange 30 closing the opening OP1, at least the arm 4 and the hand 20 are disposed within the transfer space S01. The base 10 may be disposed within the transfer space S01 or outside the transfer space S01. For example, the base 10 is disposed outside the transfer space S01. By disposing the base 10 outside the transfer space S01, the transfer space S01 can be reduced in size, and the energy required to evacuate the transfer space S01 can be reduced.

[0020] The flange 30 extends to separate the base 10 from the arm 4 and hand 20, and closes the opening OP1. The flange 30 has a longitudinal direction D1. For example, the flange 30 extends along a plane including the longitudinal direction D1 and a lateral direction D2 perpendicular to the longitudinal direction D1, and the length L1 of the flange 30 in the longitudinal direction D1 is greater than the width W1 of the flange 30 in the lateral direction D2.

[0021] Of the multiple joints J10, the first axis Ax1 of the first joint J11, which is the proximal one from the base 10, is located between one end 31 of the flange 30 and a center 32 of the flange 30 and closer to the one end 31 in the longitudinal direction D1 of the flange 30. For example, the first axis Ax1 is located between the one end 31 and the center 32 of the flange 30, and the distance from the first axis Ax1 to the one end 31 is shorter than the distance from the first axis Ax1 to the center 32.

[0022] The shape and layout of the flange 30 can be matched to the opening OP1 that is necessary and sufficient from the standpoint of ease of assembling the robot 2 into the chamber 90. This is therefore effective in achieving both a reduction in the opening OP1 for assembling the robot 2 into the chamber 90 and ease of assembling the robot 2 into the chamber 90.

[0023] The chamber 90 may further include a second opening OP2, smaller than the opening OP1, provided in the top plate 91, and a cover member 98 that closes the second opening OP2. By making the articulated arm 3 accessible from above into the transfer space S01 while preventing dust from entering the chamber 90, the maintainability of the robot 2 can be improved. When viewed from vertically above, at least a portion of the second opening OP2 may overlap with the articulated arm 3. This can further improve the maintainability of the robot 2.

[0024] As shown in FIG. 1 , the length L1 of the flange 30 in the longitudinal direction D1 may be greater than the length L2 of the first link 50. This allows the shape and layout of the flange 30 to be more closely matched to the opening OP1 of a necessary and sufficient size and shape. The width W1 of the flange 30 may be less than the length L2 of the first link 50. This allows the shape and layout of the flange 30 to be more closely matched to the opening OP1 of a necessary and sufficient size and shape.

[0025] The longitudinal direction D11 of the chamber 90 and the longitudinal direction D1 of the flange 30 may be aligned. This can prevent the chamber 90 from expanding to provide the opening OP1. Aligning includes, for example, being parallel to each other.

[0026] The first axis Ax1 may be located closer to the side wall 96 (first side wall) between the side wall 96 (first side wall) and the side wall 97 (second side wall). The first axis Ax1 may be located closer to the side wall 97 (first side wall) between the side wall 97 (first side wall) and the side wall 96 (second side wall). This allows for both a reduction in the size of the chamber 90 and an increase in the range of movement of the robot 2.

[0027] The length L2 of the first link 50 may be smaller than the distance W11 between the side walls 96 and 97, and may be larger than half the distance W11. This makes it possible to further reduce the size of the chamber 90 while maintaining the range of motion of the robot 2.

[0028] 2 and 3, the robot 2 may further include a plurality of legs 5. The plurality of legs 5 protrude downward from the base 10 at a plurality of locations on the flange 30 surrounding the base 10. In the illustrated example, the robot 2 includes four legs 5, but the number of legs 5 is not limited to this. As long as the plurality of legs 5 can stand on the floor surface and support the flange 30, the number and layout of the legs 5 can be changed as appropriate.

[0029] Before being installed in the chamber 90, the robot 2 can be supported by the legs 5 so that the base 10 does not touch the ground. Therefore, the maintainability of the robot 2 can be improved.

[0030] 4, each of the multiple actuators 40 may be disposed at the joint J10 that it drives. Disposed at the joint J10 means that it is disposed at a position through which an axis that is the center of movement of the joint J10 passes. For example, the arm actuator 41 is disposed at a position through which the first axis Ax1 of the first joint J11 passes, the arm actuator 42 is disposed at a position through which the second axis Ax2 of the second joint J12 passes, and the hand actuator 43 is disposed at a position through which the third axis Ax3 of the third joint J13 passes.

[0031] Each of the plurality of actuators 40 may include a motor such as an electric servo motor, etc. The motor included in each of the plurality of actuators 40 may be a direct drive motor.

[0032] The "direct drive motor" in the robot 2 is a motor in which a rotor, which rotates when directly affected by a rotating magnetic field, is fixed to the link of the articulated arm 3, which is the object to be driven. The rotor does not have to be fixed directly to the link, but may be fixed via another member. At the very least, it is sufficient that the link and rotor are fixed to each other so that they do not move relative to each other.

[0033] If the motor included in each of the multiple actuators 40 is a direct drive motor, each joint J10 is driven without the intervention of a movable transmission element such as a gear or belt, which is effective in improving the positioning accuracy of the substrate W.

[0034] For example, the arm actuator 41 includes an arm motor 101 (base motor, first arm motor) which is a direct drive motor, the arm actuator 42 includes an arm motor 201 (second arm motor) which is a direct drive motor, and the hand actuator 43 includes a hand motor 301 which is a direct drive motor.

[0035] The robot 2 may further include a wiring space S10 and a cable C10. The wiring space S10 is sealed inside the chamber 90 (inside the transfer space S01) and is formed inside the articulated arm 3 so as to communicate with the outside of the chamber 90. The cable C10 is wired from outside the transfer space S01 to an actuator 40 located inside the transfer space S01 among the multiple actuators 40 through the wiring space S10. Even when the transfer space S01 is evacuated, the inside of the wiring space S10 is maintained at the same air pressure as outside the transfer space S01, thereby suppressing gas generation from the cable C10 into the transfer space S01.

[0036] The wiring space S10 being sealed within the transport space S01 means that the wiring space S10 is airtightly isolated from the outside of the wiring space S10 within the transport space S01. For example, the wiring space S10 includes an internal space 11 of the base 10, an internal space 52 of the first link 50, and an internal space 62 of the second link 60. The internal space 11, the internal space 52, and the internal space 62 are in communication with one another, and the internal space 11 is in communication with the outside of the transport space S01. The robot 2 may include a plurality of cables C10 that are wired from a controller outside the transport space S01 to each of the plurality of actuators 40 via the wiring space S10.

[0037] Each of the multiple joints J10 connects a base-side link connected to the base 10 and a hand-side link connected to the hand 20 in the articulated arm 3. Connecting to the base 10 includes connecting to the base 10 via another link. Connecting to the hand 20 includes connecting to the hand 20 via another link. The base-side link connected to the base 10 includes the base 10 itself. The hand-side link connected to the hand 20 includes the hand 20 itself.

[0038] For example, the first joint J11 connects the base 10 (base-side link) and the first link 50 (hand-side link). The second joint J12 connects the first link 50 (base-side link) and the second link 60 (hand-side link). The third joint J13 connects the second link 60 (base-side link) and the hand 20 (hand-side link).

[0039] The motor included in each of the multiple actuators 40 has a stator fixed to the base side link and an output shaft fixed to the hand side link that rotates around the axis of the joint J10 by a rotating magnetic field generated by the stator.

[0040] For example, the arm motor 101 has a stator 115 fixed to the base 10 and an output shaft 120 fixed to the first link 50 that rotates around the first axis Ax1 of the first joint J11 due to the rotating magnetic field generated by the stator 115. The arm motor 201 has a stator 215 fixed to the first link 50 and an output shaft 220 fixed to the second link 60 that rotates around the second axis Ax2 of the second joint J12 due to the rotating magnetic field generated by the stator 215. The hand motor 301 has a stator 342 fixed to the second link 60 and an output shaft 350 fixed to the hand 20 that rotates around the third axis Ax3 of the third joint J13 due to the rotating magnetic field generated by the stator 342. Fixing the stators of each motor to the hand-side link shortens the wiring path to each motor. Shortening the wiring path to each motor also contributes to further suppressing gas generation from each cable C10.

[0041] The arm motor 101 may further have a through hole 123 that passes through the output shaft 120 and becomes part of the wiring space S10. The arm motor 201 may further have a through hole 223 that passes through the output shaft 220 and becomes part of the wiring space S10. By using the through holes 123 and 223 as part of the wiring space S10, the wiring space S10 can be formed while preventing the articulated arm 3 from becoming larger.

[0042] The articulated arm 3 may further include a second hand 70 that rotates around a third axis Ax3 (hand axis) that is common to the hand 20. Similar to the hand 20, the second hand 70 supports the substrate W in a horizontal position.

[0043] The hand motor 301 may be a two-axis direct drive motor that independently rotates the hand 20 and the second hand 70. This makes it possible to achieve both high positioning accuracy and compact size.

[0044] Further examples of the configurations of the arm motor 101 (first arm motor) and its periphery, the arm motor 201 (second arm motor) and its periphery, and the hand motor 301 and its periphery will be described below.

[0045] [First arm motor] As shown in FIG. 5 , the base 10 has a base housing 12 that includes an internal space 11 that is open upward. The flange 30 is attached to the base housing 12 so as to close the opening of the internal space 11 upward, and protrudes outward from the base housing 12 around its entire periphery. The arm motor 101 is provided in the internal space 11 of the base 10 below the flange 30. The arm motor 101 is provided in the internal space 11 below the flange 30. The arm motor 101 is a radial gap motor and includes a main body 110, an output shaft 120, bearings 124 and 125, a motor cover 116, and a rotation sensor 150. The output shaft 120 protrudes upward from the internal space 11, passes through the flange 30, and is fixed to the first link 50. For example, the flange 30 includes an opening 33 that opens upward and downward, and the output shaft 120 protrudes out of the internal space 11 through the opening 33 and is fixed to the first link 50. The main body 110 is fixed to the base 10 in the internal space 11, and rotates the output shaft 120 about the first axis Ax1 by a rotating magnetic field about the first axis Ax1.

[0046] The main body 110 has a motor housing 111, a fixed shaft 112, a through hole 114, and a stator 115. The motor housing 111 is open upward and downward, houses other components of the main body 110, and is fixed to the base 10. The fixed shaft 112 is disposed within the motor housing 111 and is fixed to the motor housing 111 so as to extend along a first axis Ax1. For example, the fixed shaft 112 includes a flange 113 located below the motor housing 111 and extending outward beyond the inner periphery of the motor housing 111 around its entire periphery, and the flange 113 is fixed to the motor housing 111 by bolting or the like.

[0047] The fixed shaft 112 may include a through hole 114 that opens upward and downward along the first axis Ax1. The stator 115 is cylindrical and is housed in the motor housing 111 so as to surround the fixed shaft 112. The stator 115 includes a yoke that is fixed to the inner circumferential surface of the motor housing 111 by, for example, shrink fitting, and a plurality of coils that are provided on the yoke so as to surround the fixed shaft 112 and generate a rotating magnetic field in response to the supply of electric power.

[0048] The output shaft 120 has a rotor 121 and a protruding shaft 122. The rotor 121 is cylindrical and is housed in the motor housing 111 so as to surround the fixed shaft 112 on the inside of the stator 115. The rotor 121 includes, for example, a core and a plurality of permanent magnets provided in the core so as to surround the fixed shaft 112. The rotor 121 and the stator 115 face each other in a radial direction perpendicular to the first axis Ax1 and are directly affected by the rotating magnetic field generated by the stator 115.

[0049] The protruding shaft 122 is fixed to the upper end of the rotor 121, protrudes upward, penetrates the flange 30, and is fixed to the first link 50. The arm motor 101 may have a through-hole 123 that penetrates the protruding shaft 122 along the first axis Ax1 and communicates between the internal space 11 of the base 10 and the internal space 52 of the first link 50.

[0050] For example, the first link 50 has an opening 53 that connects the through hole 123 to the internal space 52. The through hole 123 also connects to the internal space 11 of the base 10 via the through hole 114. As a result, the through hole 123 and the through hole 114 become part of the wiring space S10, and the internal space 52 of the first link 50 and the internal space 11 of the base 10 communicate with each other.

[0051] The bearings 124, 125 are, for example, ball-type radial bearings, and are arranged one above the other between the outer circumferential surface of the fixed shaft 112 and the inner circumferential surface of the rotor 121. Each of the bearings 124, 125 is held by the fixed shaft 112 and holds the rotor 121 so as to rotate about the first axis Ax1.

[0052] The motor cover 116 closes the upward opening of the motor housing 111 at the outer periphery of the protruding shaft 122. The motor cover 116 extends from the protruding shaft 122 over the entire periphery of the motor housing 111 to the outside beyond the inner periphery of the motor housing 111, and is fixed to the motor housing 111 from above by bolts or the like.

[0053] The rotation sensor 150 detects the rotation of the output shaft 120. For example, the rotation sensor 150 is a rotary encoder and includes a disk 151 and a sensor head 152 provided inside the motor housing 111. The disk 151 holds a pulse pattern arranged in the circumferential direction about the first axis Ax1, and is attached below the rotor 121. The sensor head 152 is an optical sensor that reads the pulse pattern on the disk 151 at a fixed position inside the motor housing 111. The sensor head 152 generates a pulse signal corresponding to the read pulse pattern. The sensor head 152 is attached to, for example, the flange 113 of the fixed shaft 112. For example, the rotation sensor 150 outputs detection data representing the rotation position (rotation angle) of the output shaft 120 as a detection result of the rotation of the output shaft 120, based on the count result of the pulse signal generated by the sensor head 152.

[0054] The robot 2 may further include a hand-side seal member 130 that seals between the first link 50 (hand-side link) and the protruding shaft 122, and a base-side seal member 140 that seals between the base 10 (base-side link) and the protruding shaft 122, corresponding to the arm motor 101. This makes it possible to easily seal the wiring space S10.

[0055] Sealing the gap between the first link 50 and the protruding shaft 122 means substantially preventing communication between the inside of the transport space S01 and the inside of the wiring space S10 through the gap between the first link 50 and the protruding shaft 122. Sealing the gap between the base 10 and the protruding shaft 122 means substantially preventing communication between the inside of the transport space S01 and the inside of the wiring space S10 through the gap between the base 10 and the protruding shaft 122. Communication between the inside of the transport space S01 and the inside of the wiring space S10 includes communication between the inside of the transport space S01 and the inside of the wiring space S10 through the outside of the transport space S01.

[0056] The hand-side seal member 130 has a flange 131, an inner seal 132, and an outer seal 133. The flange 131 is attached to the end of the protruding shaft 122 by bolting or the like, extends outward beyond the inner circumference of the opening 53 of the first link 50 around its entire circumference, and is fixed to the first link 50 by bolting or the like. The flange 131 includes a through hole 134 that connects the opening 53 of the first link 50 and the through hole 123 of the protruding shaft 122.

[0057] The inner seal 132 provides a seal between the protruding shaft 122 and the flange 131. The inner seal 132 is, for example, an O-ring, and is disposed between the protruding shaft 122 and the flange 131 so as to surround the through-holes 123 and 134, and is in close contact with the protruding shaft 122 and the flange 131 over the entire circumference.

[0058] The outer seal 133 provides a seal between the first link 50 and the flange 131. The outer seal 133 is, for example, an O-ring, and is disposed between the flange 131 and the first link 50 so as to surround the opening 53 and the through-hole 134, and is in close contact with the flange 131 and the first link 50 over the entire circumference.

[0059] The base-side seal member 140 seals the gap between the flange 30 and the protruding shaft 122. Sealing the gap between the flange 30 and the protruding shaft 122 means that communication between the inside of the transfer space S01 and the inside of the wiring space S10 via the gap between the flange 30 and the protruding shaft 122 is substantially prevented.

[0060] The base-side seal member 140 may include a mechanical seal that tightly contacts the protruding shaft 122 while allowing rotation of the protruding shaft 122 relative to the base 10. The mechanical seal is a seal that seals between two members that rotate relative to each other. The mechanical seal has a stationary ring fixed to one member and a rotating ring fixed to the other member, and the contact surface between the stationary ring and the rotating ring seals between the one member and the other member while allowing rotation of the other member relative to the other member.

[0061] By employing a mechanical seal, the wiring space S10 can be sealed with small driving resistance, thereby achieving both high positioning accuracy and sealing of the wiring space S10.

[0062] The base-side seal member 140 may be attached to the base 10 in a removable state separate from the main body 110. The base-side seal member 140 may be worn due to friction with the protruding shaft 122, but the worn base-side seal member 140 can be removed separately from the main body 110 and easily replaced. Therefore, the robot 2 is effective in both suppressing gas generation within the chamber 90 and making it easy to maintain. A removable state means that it can be removed non-destructively by, for example, releasing the bolt fastening.

[0063] For example, the base-side seal member 140 has a cover 141, an outer seal 147, and an inner seal 148. The cover 141 is attached to the base 10 from the outside. For example, the cover 141 is attached to the flange 30. The outer seal 147 seals between the cover 141 and the base 10. The outer seal 147 seals between the cover 141 and the flange 30. The inner seal 148 seals between the cover 141 and the protruding shaft 122 while allowing rotation of the protruding shaft 122 relative to the cover 141. The inner seal 148 may be the above-mentioned mechanical seal. A configuration in which the base-side seal member 140 has the cover 141, the outer seal 147, and the inner seal 148 can achieve both reliable sealing and ease of maintenance of the base-side seal member 140.

[0064] Sealing the gap between the cover 141 and the flange 30 with the outer seal 147 is not necessarily limited to tightly contacting the outer seal 147 with both the cover 141 and the flange 30. For example, sealing the gap between the cover 141 and the flange 30 includes tightly contacting the outer seal 147 with a separate member airtightly connected to the cover 141 and the flange 30. Sealing the gap between the cover 141 and the protruding shaft 122 with the inner seal 148 is not necessarily limited to tightly contacting the inner seal 148 with both the cover 141 and the protruding shaft 122. For example, sealing the gap between the cover 141 and the protruding shaft 122 includes tightly contacting the inner seal 148 with a separate member airtightly connected to the cover 141 and the protruding shaft 122.

[0065] As an example, the cover 141 may be connected to the motor cover 116 in an airtight manner, and the inner seal 148 may be in close contact with the motor cover 116 and the protruding shaft 122, thereby sealing the gap between the cover 141 and the protruding shaft 122. For example, if the inner seal 148 is the above-mentioned mechanical seal, the fixed ring of the inner seal 148 may be held in close contact with the inner periphery of the motor cover 116, and the rotating ring of the inner seal 148 may be held in close contact with the outer periphery of the protruding shaft 122.

[0066] The base 10 may have a motor holder 13 and a lifting actuator 14. A main body 110 is fixed to the motor holder 13. For example, a motor housing 111 is fixed to the motor holder 13. The lifting actuator 14 is fixed to the flange 30 in the internal space 11 and lifts and lowers the motor holder 13. This causes the main body 110, including the stator 115, to lift and lower. An example of the lifting actuator 14 is a ball screw type linear actuator.

[0067] The lifting actuator 14 lifts and lowers the main body 110, thereby lifting and lowering the arm 4 and the hand 20 within the transfer space S01. This makes it possible to transfer the substrate W between a transfer source and a transfer destination that are at different heights.

[0068] When the base 10 has the lifting actuator 14, the cover 141 may be configured to expand and contract in response to the lifting and lowering of the main body 110 by the lifting actuator 14. This makes it possible to achieve both the mobility of the protruding shaft 122 in both the lifting and lowering directions and the rotational direction, and the sealing of the transfer space S01.

[0069] When the inner seal 148 is a mechanical seal, the cover 141 seals between the mechanical seal and the flange 30 and functions as an expandable seal that expands and contracts as the main body 110 rises and falls together with the mechanical seal. As described above, the mechanical seal has a fixed ring and a rotating ring, with the fixed ring fixed to the cover 141 and the rotating ring fixed to the protruding shaft 122. Because the fixed ring and the rotating ring must be kept in contact with each other, the rotating ring that is in close contact with the protruding shaft 122 cannot be raised and lowered relative to the fixed ring that is in close contact with the cover 141. When the cover 141 functions as an expandable seal, the fixed ring that is in close contact with the cover 141 and the rotating ring that is in close contact with the protruding shaft 122 can be raised and lowered together by the expansion and contraction of the cover 141.

[0070] In this way, by combining a mechanical seal and an expandable seal, it is possible to seal the wiring space S10 while keeping the drive resistance in both the lifting and rotation directions small, thereby achieving both high positioning accuracy and sealing the wiring space S10.

[0071] For example, the cover 141 includes a first cover 142, a second cover 144, a middle seal 149, and an expandable portion 146. The first cover 142 surrounds the protruding shaft 122, extends from the protruding shaft 122 to the outside of the inner circumference of the opening 33 along the entire circumference, and is attached to the flange 30 from above by fastening bolts or the like. Attaching the cover 142 to the flange 30 from above includes attaching the cover 142 to the base 10 from the outside of the base 10 (base-side link).

[0072] The second cover 144 surrounds the protruding shaft 122 below the first cover 142, extends from the protruding shaft 122 to the outside of the inner periphery of the motor cover 116 along its entire circumference, and is attached to the motor cover 116 from above by fastening bolts or the like. The outer diameter of the second cover 144 may be smaller than the inner diameter of the opening 33. This makes it possible to attach the entire cover 141 from above the flange 30 through the opening 33.

[0073] The outer seal 147 described above provides a seal between the first cover 142 and the flange 30. For example, the outer seal 147 is an O-ring that is disposed between the first cover 142 and the flange 30 so as to surround the protruding shaft 122 and is in close contact with the first cover 142 over the entire circumference. The middle seal 149 provides a seal between the second cover 144 and the motor cover 116. For example, the middle seal 149 is an O-ring that is disposed between the second cover 144 and the motor cover 116 so as to surround the protruding shaft 122 and is in close contact with the second cover 144 and the motor cover 116 over the entire circumference.

[0074] The extension / contraction part 146 is a bellows-shaped hose that surrounds the protruding shaft 122 between the first cover 142 and the second cover 144, and extends and contracts in response to the elevation of the main body 110 by the elevation actuator. The upper end of the extension / contraction part 146 is connected to the first cover 142 in an airtight state around the entire periphery, and the lower end of the extension / contraction part 146 is connected to the second cover 144 in an airtight state around the entire periphery.

[0075] The flange 30 may include a first flange 35, a second flange 36, an adjustment plate 37, and a plurality of fastening members 38. The first flange 35 faces the inside of the chamber 90 (transfer space S01). For example, the first flange 35 faces upward. The second flange 36 is overlapped below the first flange 35 and faces outside the chamber 90. For example, the second flange 36 faces downward. The adjustment plate 37 is inserted between the first flange 35 and the second flange 36 and adjusts the inclination of the second flange 36 relative to the first flange 35. The plurality of fastening members 38 fasten the second flange 36 to the first flange 35.

[0076] The lifting actuator 14 may be fixed to the second flange 36. The opening 33 may be formed to pass through both the first flange 35 and the second flange 36, and the protruding shaft 122 may pass through the second flange 36 and the first flange 35 and be fixed to the first link 50.

[0077] According to the configuration in which the second flange 36 is fastened to the first flange 35 via the adjustment plate 37, the adjustment plate 37 is partially disposed between the second flange 36 and the first flange 35, and the tilt of the second flange 36 relative to the first flange 35 can be adjusted by changing the position, shape, size, etc. of the adjustment plate 37. Since the lifting actuator 14 is fixed to the second flange 36, the installation posture of the robot 2 in the transfer space S01 can be adjusted by adjusting the tilt of the second flange 36 relative to the first flange 35. In this way, the flange 30 can be used to adjust the installation posture of the robot 2.

[0078] The base-side seal member 140 may seal between the inner seal 148 and the first flange 35. For example, the first cover 142 is attached to the first flange 35 from above. The outer seal 147 is disposed between the first cover 142 and the first flange 35 so as to surround the protruding shaft 122, and is in close contact with the first cover 142 and the first flange 35 around the entire periphery.

[0079] The change in the inclination of the second flange 36 relative to the first flange 35 can be easily absorbed by the expandable seal, and the sealability between the inside and outside of the transfer space S01 can be maintained.

[0080] The first flange 35 and the second flange 36 may each separate the base 10 from the arm 4 and the hand 20, and the first flange 35 may extend over the entire periphery of the second flange 36. By providing each of the first flange 35 and the second flange 36 with an extent that separates the base 10 from the arm 4 and the base 10, it is possible to ensure a space for arranging the adjustment plate 37. Furthermore, by not placing the second flange 36 inside the transfer space S01, it is possible to easily maintain a tight seal between the inside and outside of the transfer space S01.

[0081] [Second arm motor] 6, the second link 60 is positioned above the first link 50. The first link 50 includes an opening 54 that opens upward. At least a portion of the arm motor 201 is housed in the internal space 52 from above through the opening 54.

[0082] The arm motor 201 is a radial gap motor and includes a main body 210, an output shaft 220, bearings 224 and 225, and a rotation sensor 260. The output shaft 220 protrudes upward from the internal space 52 and is fixed to the second link 60. The main body 210 is fixed to the first link 50, and the output shaft 220 is rotated about the second axis Ax2 by a rotating magnetic field about the second axis Ax2.

[0083] The main body 210 has a motor housing 211, a fixed shaft 212, a through hole 214, a stator 215, and a motor seal 216. The motor housing 211 is open upward and downward, houses other components of the main body 210, and is fixed to the first link 50. For example, the motor housing 211 is attached to the first link 50 from above around the opening 54 by bolting or the like. The fixed shaft 212 is disposed within the motor housing 211 and is fixed to the motor housing 211 so as to extend along the second axis Ax2. For example, the fixed shaft 212 includes a flange 213 below the motor housing 211 that extends outward beyond the inner circumference of the motor housing 211 around its entire circumference, and the flange 213 is fixed to the motor housing 211 by bolting or the like. The fixed shaft 212 may include a through hole 214 that is open upward and downward along the second axis Ax2.

[0084] Stator 215 is cylindrical and is housed in motor housing 211 so as to surround fixed shaft 212. Stator 215 includes a yoke fixed to the inner circumferential surface of motor housing 211 by, for example, shrink fitting, and a plurality of coils provided on the yoke so as to surround fixed shaft 212 and generate a rotating magnetic field in response to the supply of electric power.

[0085] The motor seal 216 provides a seal between the motor housing 211 and the first link 50. For example, the motor seal 216 is an O-ring that is disposed between the outer peripheral surface of the motor housing 211 and the inner peripheral surface of the opening 54, and is in close contact with the outer peripheral surface of the motor housing 211 and the inner peripheral surface of the opening 54 over the entire circumference.

[0086] The output shaft 220 has a rotor 221 and a protruding shaft 222. The rotor 221 is cylindrical and is housed in the motor housing 211 so as to surround the fixed shaft 212 on the inside of the stator 215. The rotor 221 includes, for example, a core and a plurality of permanent magnets provided in the core so as to surround the fixed shaft 212. The rotor 221 faces the stator 215 in a radial direction perpendicular to the second axis Ax2 and is directly affected by the rotating magnetic field generated by the stator 215.

[0087] The protruding shaft 222 is fixed to the upper end of the rotor 221, protrudes upward, and is fixed to the second link 60. The arm motor 201 may have a through-hole 223 that passes through the protruding shaft 222 along the second axis Ax2 and communicates between the internal space 52 of the first link 50 and the internal space 62 of the second link 60.

[0088] For example, the second link 60 has an opening 63 that connects the through hole 223 to the internal space 62. The through hole 223 also connects to the internal space 11 of the base 10 via the through hole 214. As a result, the through hole 223 and the through hole 214 become part of the wiring space S10, and the internal space 62 of the second link 60 and the internal space 52 of the first link 50 communicate with each other.

[0089] The bearings 224, 225 are, for example, ball-type radial bearings, and are arranged one above the other between the outer circumferential surface of the fixed shaft 212 and the inner circumferential surface of the rotor 221. Each of the bearings 224, 225 is held by the fixed shaft 212 and holds the rotor 221 so as to rotate about the second axis Ax2.

[0090] The rotation sensor 260 detects the rotation of the output shaft 220. For example, the rotation sensor 260 has a disk 261 and a sensor head 262 provided inside the motor housing 211. The disk 261 holds a pulse pattern arranged in the circumferential direction about the second axis Ax2, and is attached below the rotor 221. The sensor head 262 is an optical sensor that reads the pulse pattern of the disk 261 at a fixed position inside the motor housing 211. The sensor head 262 generates a pulse signal corresponding to the read pulse pattern. The sensor head 262 is attached to, for example, the flange 213 of the fixed shaft 212. For example, the rotation sensor 260 outputs detection data that indicates the rotation position (rotation angle) of the output shaft 220 as a detection result of the rotation of the output shaft 220, based on a count result of the pulse signal generated by the sensor head 262.

[0091] The robot 2 may further include a hand-side seal member 230 that seals between the second link 60 (hand-side link) and the protruding shaft 222, and a base-side seal member 240 that seals between the first link 50 (base-side link) and the protruding shaft 222, corresponding to the arm motor 201. This makes it possible to easily seal the wiring space S10.

[0092] Sealing the gap between the second link 60 and the protruding shaft 222 means substantially preventing communication between the inside of the conveying space S01 and the inside of the wiring space S10 through the gap between the second link 60 and the protruding shaft 222. Sealing the gap between the first link 50 and the protruding shaft 222 means substantially preventing communication between the inside of the conveying space S01 and the inside of the wiring space S10 through the gap between the first link 50 and the protruding shaft 222.

[0093] The hand-side seal member 230 has an edge seal 231. The edge seal 231 is, for example, an O-ring, and is disposed between the protruding shaft 222 and the second link 60 so as to surround the through-hole 223 and the opening 63, and is in close contact with the protruding shaft 222 and the second link 60 over the entire circumference.

[0094] The base-side seal member 240 seals the gap between the first link 50 and the protruding shaft 222. Sealing the gap between the first link 50 and the protruding shaft 222 means that communication between the inside of the conveying space S01 and the inside of the conveying space S01 via the gap between the first link 50 and the protruding shaft 222 is substantially prevented.

[0095] The base-side seal member 240 may include a mechanical seal that tightly contacts the protruding shaft 222 while allowing rotation of the protruding shaft 222 relative to the first link 50. The use of a mechanical seal allows the wiring space S10 to be sealed with small driving resistance. Therefore, high positioning accuracy and sealing of the wiring space S10 can be achieved at the same time. Sealing the gap between the first link 50 and the protruding shaft 222 is not necessarily limited to tightly contacting the base-side seal member 240 with both the first link 50 and the protruding shaft 222. For example, sealing the gap between the first link 50 and the protruding shaft 222 may include tightly contacting the base-side seal member 240 with the protruding shaft 222 and a separate member that is airtightly connected to the first link 50.

[0096] As described above, the motor housing 211 is airtightly connected to the first link 50 by the motor seal 216. Therefore, the base-side seal member 240 may seal the gap between the first link 50 and the protruding shaft 222 by being in close contact with the motor housing 211 and the protruding shaft 222.

[0097] The base-side seal member 240 may be attached to the first link 50 in a removable state separately from the main body 210. The base-side seal member 240 may be worn due to friction with the protruding shaft 122, but the worn base-side seal member 240 can be removed separately from the main body 210 and easily replaced. Therefore, the robot 2 is effective in both suppressing gas generation in the chamber 90 and facilitating maintenance.

[0098] For example, the base side seal member 240 has a cover 241, an outer seal 243, and an inner seal 244. The cover 241 is attached to the first link 50 from the outside.

[0099] The outer seal 243 provides a seal between the cover 241 and the first link 50. The inner seal 244 provides a seal between the cover 241 and the protruding shaft 222 while allowing rotation of the protruding shaft 222 relative to the cover 241. By configuring the base-side seal member 240 to include the cover 241, the outer seal 243, and the inner seal 244, it is possible to achieve both reliable sealing and ease of maintenance of the base-side seal member 240.

[0100] Attaching the cover 241 to the first link 50 is not necessarily limited to attaching the cover 241 directly to the first link 50. For example, attaching the cover 241 to the first link 50 includes attaching the cover 241 to a separate member fixed to the first link 50. For example, the cover 241 surrounds the protruding shaft 222, extends outward from the inner periphery of the motor housing 211 over the entire periphery, and is attached to the motor housing 211 from above by fastening bolts or the like.

[0101] Sealing the gap between the cover 241 and the first link 50 with the outer seal 243 is not necessarily limited to tightly contacting the outer seal 243 with both the cover 241 and the first link 50. For example, sealing the gap between the cover 241 and the first link 50 includes tightly contacting the outer seal 243 with the cover 241 and a separate member that is airtightly connected to the first link 50. For example, the outer seal 243 is an O-ring that is disposed between the motor housing 211 and the cover 241 so as to surround the protruding shaft 222 and is tightly contacted with the motor housing 211 and the cover 241 around the entire circumference.

[0102] The inner seal 244 is disposed between the outer peripheral surface and the inner peripheral surface of the protruding shaft 222, and is in close contact with the cover 241 and the protruding shaft 222 over the entire circumference. For example, the inner seal 244 is the above-mentioned mechanical seal, and the fixed ring of the inner seal 244 is held in close contact with the inner peripheral surface of the cover 241, and the rotating ring of the inner seal 244 is held in close contact with the outer peripheral surface of the protruding shaft 222.

[0103] The sealing between the cover 241 and the protruding shaft 222 by the inner seal 244 is not necessarily limited to the inner seal 244 being tightly attached to both the cover 241 and the protruding shaft 222. For example, the sealing between the cover 241 and the protruding shaft 222 includes the inner seal 244 being tightly attached to a separate member airtightly connected to the cover 241 and the protruding shaft 222.

[0104] The cover 241 bulges from the first link 50 (first link) toward the second link 60 (second link), and the position of the outer seal 243 may be farther from the first link 50 than the position of the inner seal 244 in the direction along the second axis Ax2. The sealing margin provided by the outer seal 243 and the sealing margin provided by the inner seal 244 can be ensured independently of each other. Therefore, it is possible to further achieve both reliable sealing and ease of maintenance of the base-side seal member 240.

[0105] The second link 60 may further include a recess 65. The recess 65 opens toward the first link 50 and receives the cover 241 protruding from the first link 50. This can prevent the robot 2 from becoming larger due to the sealing member.

[0106] The first link 50 may further have an opening 56. The opening 56 exposes the through hole 223 to the outside in the opposite (downward) direction from where the second link 60 is located. The articulated arm 3 may further have a back cover 251 that closes the opening 56. The articulated arm 3 may further have a back seal member 250 that closes the opening 56 so as to seal the through hole 223 within the internal space 52. By removing the back seal member 250, cables and the like can be easily routed from the through hole 223 into the first link 50.

[0107] The back seal member 250 has a back cover 251 and a cover seal 253. The back cover 251 extends outward beyond the inner periphery of the opening 56 around its entire periphery, closing the opening 56 from below, and is attached to the first link 50 by bolting or the like. The cover seal 253 seals the gap between the back cover 251 and the first link 50. The cover seal 253 is, for example, an O-ring, and is disposed between the first link 50 and the back cover 251 so as to surround the opening 56, and is in close contact with the first link 50 and the back cover 251 around its entire periphery.

[0108] The back cover 251 may have a recess 252 facing toward the inside of the first link 50. The recess 252 connects the through hole 223 with the internal space 52 of the first link 50. By configuring a part of the wiring space S10 in the back cover 251 as well, further space saving of the arm 4 can be achieved.

[0109] [Hand motor] 7, the hand 20 is disposed above the second link 60, and the second hand 70 is disposed above the hand 20. The hand motor 301 may have an output shaft 350 (first output shaft), a stator 342 (first stator) that rotates the hand 20 about a third axis Ax3 (hand axis) by applying a rotating magnetic field to the output shaft 350, an output shaft 320 (second output shaft) that penetrates the output shaft 350 along the third axis Ax3, and a stator 315 (second stator) that rotates the second hand 70 about the third axis Ax3 by applying a rotating magnetic field to the output shaft 320.

[0110] By utilizing the space inside output shaft 350 as a space for arranging output shaft 320, hand motor 301 can be made even more compact.

[0111] The stator 342 and the stator 315 may be fixed to the second link 60 (base side link), the output shaft 350 may be fixed to the hand 20, the output shaft 320 may pass through the output shaft 350 and the hand 20 and be fixed to the second hand 70, and the stator 342 may be located between the hand 20 and the stator 315. This allows the hand motor 301 to be further miniaturized.

[0112] The hand motor 301 may have a first bearing that is held by the second link 60 and holds the output shaft 320 or the output shaft 350 so that it rotates around the third axis Ax3, and a second bearing that is held by the output shaft 320 between the outer periphery of the output shaft 320 and the inner periphery of the output shaft 350 and holds the output shaft 350 so that it rotates around the third axis Ax3.

[0113] For example, the hand motor 301 has bearings 323, 324 (first bearings) that are held by the second link 60 and hold the output shaft 320 so that it rotates around the third axis Ax3, and bearings 355, 356 (second bearings) that are held by the output shaft 320 and hold the output shaft 350 so that it rotates around the third axis Ax3.

[0114] By utilizing the space between the output shaft 350 and the output shaft 320 as a bearing arrangement space and holding the output shaft 350 and the output shaft 320 together, it is possible to achieve both miniaturization and rigidity of the drive system of the multi-stage hand 20 and the second hand 70.

[0115] The stator 342 may be attached to the second link 60 from the side where the hand 20 and the second hand 70 are arranged (e.g., from above), and the stator 315 may be attached to the second link 60 from the side opposite to the side where the hand 20 and the second hand 70 are arranged (e.g., from below). By making it possible to attach the stator 315 and the stator 342 from different directions, the ease of assembly of the robot 2 can be improved.

[0116] The hand motor 301 may further have a fixed shaft 312 fixed to the second link 60 and inserted into the output shaft 320 along the third axis Ax3, and bearings 323, 324 may be held by the fixed shaft 312 between the outer periphery of the fixed shaft 312 and the inner periphery of the output shaft 320 to hold the output shaft 320.

[0117] Hand motor 301 may be a radial gap motor. For example, output shaft 320 may face stator 315 in a radial direction perpendicular to third axis Ax3 and receive a rotating magnetic field from stator 315. Output shaft 350 may face stator 342 in the radial direction and receive a rotating magnetic field from stator 342.

[0118] As an example, hand motor 301 includes a main body 310, an output shaft 320, bearings 323 and 324, a rotation sensor 330, a main body 340, an output shaft 350, bearings 355 and 356, and a rotation sensor 360. Second link 60 includes an opening 68 that opens downward. At least a portion of main body 310 is housed in internal space 62 from below through opening 68.

[0119] The main body 310 includes a motor housing 311, a fixed shaft 312, a stator 315, and motor seals 316 and 317. The motor housing 311 is open upward and downward, houses other components of the main body 310, and is fixed to the second link 60. For example, the motor housing 311 is attached to the second link 60 from below around the periphery of the opening 68 by bolting or the like. The fixed shaft 312 is disposed within the motor housing 311 and is fixed to the motor housing 311 so as to extend along the third axis Ax3. For example, the fixed shaft 312 includes a flange 313 located below the motor housing 311 and extending outward beyond the inner circumference of the motor housing 311, and the flange 313 is fixed to the motor housing 311 by bolting or the like.

[0120] Stator 315 is cylindrical and is housed in motor housing 311 so as to surround fixed shaft 312. Stator 315 includes a yoke fixed to the inner circumferential surface of motor housing 311 by, for example, shrink fitting, and a plurality of coils provided on the yoke so as to surround fixed shaft 312 and generate a rotating magnetic field in response to the supply of electric power.

[0121] The motor seal 316 provides a seal between the motor housing 311 and the second link 60. For example, the motor seal 316 is an O-ring that is disposed between the second link 60 and the motor housing 311 so as to surround the opening 68, and is in close contact with the second link 60 and the motor housing 311 over the entire circumference. The motor seal 317 provides a seal between the motor housing 311 and the flange 313. For example, the motor seal 317 is an O-ring that is disposed between the motor housing 311 and the flange 313 so as to surround the fixed shaft 312, and is in close contact with the motor housing 311 and the flange 313 over the entire circumference.

[0122] The output shaft 320 has a rotor 321 and a protruding shaft 322. The rotor 321 is cylindrical and is housed in the motor housing 311 so as to surround the fixed shaft 312 inside the stator 315. The rotor 321 includes, for example, a core and a plurality of permanent magnets provided in the core so as to surround the fixed shaft 312. The rotor 321 faces the stator 315 in a radial direction perpendicular to the third axis Ax3 and is directly affected by the rotating magnetic field generated by the stator 315. The protruding shaft 322 is fixed to the upper end of the rotor 321, protrudes upward, and is fixed to the second hand 70.

[0123] The bearings 323 and 324 are, for example, ball-type radial bearings, and are arranged one above the other between the outer circumferential surface of the fixed shaft 312 and the inner circumferential surface of the rotor 321. Each of the bearings 323 and 324 is held by the fixed shaft 312 and holds the rotor 321 so as to rotate about the third axis Ax3.

[0124] The rotation sensor 330 detects the rotation of the output shaft 320. For example, the rotation sensor 330 is a rotary encoder and includes a disk 331 and a sensor head 332 provided inside the motor housing 311. The disk 331 holds a pulse pattern arranged in the circumferential direction about the third axis Ax3 and is attached below the rotor 321. The sensor head 332 is an optical sensor that reads the pulse pattern on the disk 331 at a fixed position inside the motor housing 311. The sensor head 332 generates a pulse signal corresponding to the read pulse pattern. The sensor head 332 is attached to, for example, the flange 313 of the fixed shaft 312. For example, the rotation sensor 330 outputs detection data representing the rotation position (rotation angle) of the output shaft 320 as a detection result of the rotation of the output shaft 320 based on the count result of the pulse signal generated by the sensor head 332.

[0125] The second link 60 further includes an opening 69 that opens upward. At least a portion of the main body 340 is accommodated in the internal space 62 from above through the opening 69.

[0126] The main body 340 has a motor housing 341, a stator 342, and a motor seal 343. The motor housing 341 is open upward and downward, accommodates other components of the main body 310 and the protruding shaft 322 of the output shaft 320, and is fixed to the second link 60. For example, the motor housing 341 is attached to the second link 60 from above around the opening 69 by bolting or the like.

[0127] The stator 342 is cylindrical and is housed in the motor housing 341 so as to surround the protruding shaft 322. The stator 342 includes a yoke fixed to the inner circumferential surface of the motor housing 341 by, for example, shrink fitting, and a plurality of coils provided on the yoke so as to surround the protruding shaft 322 and which generate a rotating magnetic field in response to the supply of electric power.

[0128] The motor seal 343 provides a seal between the motor housing 341 and the second link 60. For example, the motor seal 343 is an O-ring that is disposed between the second link 60 and the motor housing 341 so as to surround the opening 69, and is in close contact with the second link 60 and the motor housing 341 over the entire circumference.

[0129] The output shaft 350 has a rotor 351 and a protruding shaft 352. The rotor 351 is cylindrical and is housed in the motor housing 341 so as to surround the protruding shaft 322 on the inner side of the stator 342. The rotor 351 includes, for example, a core and a plurality of permanent magnets provided in the core so as to surround the protruding shaft 322. The rotor 351 faces the stator 342 in a radial direction perpendicular to the third axis Ax3 and is directly affected by the rotating magnetic field generated by the stator 342.

[0130] The protruding shaft 352 is cylindrical and surrounds the protruding shaft 322 between the hand 20 and the rotor 351. The protruding shaft 352 is fixed to the upper end of the rotor 351, protrudes upward, and is fixed to the hand 20.

[0131] The bearings 355 and 356 are, for example, ball-type radial bearings, and are arranged one above the other between the inner peripheral surface of the protruding shaft 352 and the outer peripheral surface of the protruding shaft 322. Each of the bearings 355 and 356 is held by the protruding shaft 322 and holds the rotor 351 so as to rotate about the third axis Ax3.

[0132] The rotation sensor 360 detects the rotation of the output shaft 350. For example, the rotation sensor 360 is a rotary encoder and includes a disk 361 and a sensor head 362. The disk 361 holds a pulse pattern arranged in the circumferential direction about the third axis Ax3 and is attached below the rotor 351. The sensor head 362 is an optical sensor that reads the pulse pattern on the disk 361 at a fixed position in the main body 340. The sensor head 362 generates a pulse signal corresponding to the read pulse pattern. The sensor head 362 is attached to, for example, the motor housing 311 of the main body 310. For example, the rotation sensor 360 outputs detection data representing the rotation position (rotation angle) of the output shaft 350 as a detection result of the rotation of the output shaft 350 based on a count result of the pulse signal generated by the sensor head 362.

[0133] Robot 2 may further include a first hand seal member 370 and a second hand seal member 380 corresponding to hand motor 301.

[0134] The first hand seal 370 seals the gap between the second link 60 and the protruding shaft 352 to seal the wiring space S10 in the transfer space S01. The first hand seal 370 may be attached to the second link 60 in a removable manner, separate from the main body 340. The first hand seal 370 may be worn due to friction with the protruding shaft 352. However, a worn first hand seal 370 can be easily removed and replaced separately from the main body 340. Therefore, the robot 2 is effective in both suppressing gas generation within the chamber 90 and ensuring ease of maintenance. Attaching the first hand seal 370 to the second link 60 does not necessarily mean attaching the first hand seal 370 directly to the second link 60. For example, attaching the first hand seal 370 to the second link 60 may include attaching the first hand seal 370 to a separate member fixed to the second link 60. For example, the first hand seal 370 may be attached to the motor housing 341 from above.

[0135] For example, the first hand seal member 370 has an inner seal 371 and a seal cover 372. The inner seal 371 provides a seal between the second link 60 and the protruding shaft 352. The sealing between the second link 60 and the protruding shaft 352 using the inner seal 371 does not necessarily mean that the inner seal 371 is in close contact with both the second link 60 and the protruding shaft 352. For example, the sealing between the second link 60 and the protruding shaft 352 includes the inner seal 371 being in close contact with a separate member airtightly connected to the second link 60 and the protruding shaft 352.

[0136] For example, the inner seal 371 is a mechanical seal, and a fixed ring of the inner seal 371 closely contacts the inner peripheral surface of the motor housing 341, which is airtightly connected to the second link 60, and a rotating ring of the inner seal 371 closely contacts the outer peripheral surface of the protruding shaft 352. The seal cover 372 covers the inner seal 371 from above around the protruding shaft 352, and is attached to the motor housing 341 by bolting or the like.

[0137] Second hand seal member 380 seals between protruding shaft 352 and protruding shaft 322 so as to seal wiring space S10 in transfer space S01. Second hand seal member 380 may be attached to protruding shaft 352 in a removable state, separately from main body 310 and main body 340. This allows for both reliable sealing and ease of maintenance of second hand seal member 380.

[0138] For example, second hand seal member 380 may have second cover 381, second outer seal 386, and second inner seal 387. Second cover 381 surrounds protruding shaft 322 and is attached to rotor 321. Second outer seal 386 provides a seal between second cover 381 and protruding shaft 322. Second inner seal 387 provides a seal between second cover 381 and protruding shaft 322 while allowing rotation of protruding shaft 322 relative to second cover 381. This further improves both sealing reliability and maintainability of second hand seal member 380.

[0139] The second cover 381 may hold the hand 20. By using the second cover 381 as a holding member for the hand, the number of parts can be reduced.

[0140] For example, second cover 381 has fitting portion 382, ​​flange 383, and fitting portion 384. Fitting portion 382 fits into protruding shaft 352 from above. Flange 383 projects outward from the outer peripheral surface of fitting portion 382 over the entire circumference above fitting portion 382. Fitting portion 384 has a smaller outer diameter than flange 383 and projects further upward from flange 383.

[0141] The flange 383 is attached to the protruding shaft 352 by fastening bolts or the like, on a position inside the outer periphery of the fitting portion 384. The hand 20 has an opening 21 that corresponds to the fitting portion 384. The fitting portion 384 fits into the opening 21 from below. The flange 383 is attached to the hand 20 by fastening bolts or the like, on a position outside the outer periphery of the fitting portion 384.

[0142] The second outer seal 386 provides a seal between the fitting portion 382 and the protruding shaft 352. The second outer seal 386 is, for example, an O-ring, and is disposed between the outer peripheral surface of the fitting portion 382 and the inner peripheral surface of the protruding shaft 352 over the entire circumference.

[0143] The second inner seal 387 is, for example, a mechanical seal, and the fixed ring of the second inner seal 387 is held in close contact with the inner surface of the second cover 381, and the rotating ring of the second inner seal 387 is held in close contact with the outer surface of the protruding shaft 322.

[0144] As illustrated above, by combining the first hand seal member 370 that seals between the second link 60 and the protruding shaft 352 and the second hand seal member 380 that seals between the protruding shaft 352 and the protruding shaft 322, it is possible to achieve both miniaturization of the drive system of the hand 20 and the second hand 70 and sealing of the wiring space S10.

[0145] [Modification] 7 shows an example in which motor housing 341 of main body 340 is attached to second link 60 from above together with stator 342, and motor housing 311 of main body 310 is attached to second link 60 from below together with stator 315, but main body 310 and main body 340 may be integrated and attached to second link 60 from the same side. For example, 301 shown in FIG. 8 has motor housing 302 and motor seal 306 instead of motor housings 341, 311 and motor seal 343.

[0146] The motor housing 302 houses and unitizes the stators 342, 315, the output shafts 350, 320, and the fixed shaft 312. The motor housing 302 is attached to the second link 60 from the side where the hand 20 and the second hand 70 are arranged. The motor housing 302 allows the drive system of the hand 20 and the drive system of the second hand 70 to be integrated and assembled to the second link 60, improving assembly ease.

[0147] The motor seal 306 provides a seal between the motor housing 302 and the second link 60. For example, the motor seal 306 is an O-ring that is disposed between the second link 60 and the motor housing 302 so as to surround the opening 69, and is in close contact with the second link 60 and the motor housing 302 over the entire circumference.

[0148] Motor housing 302 may have a first housing 303, a second housing 305, and a plurality of fastening members 304. First housing 303 houses stator 342. Second housing 305 houses stator 315. The plurality of fastening members 304 are, for example, bolts, and fasten second housing 305 to first housing 303. Since second housing 305 can be attached to first housing 303 after assembling stator 342 and the like to first housing 303 and stator 315 and the like to second housing 305 separately, assembling second housing 305 to first housing 303 is possible, further improving ease of assembly.

[0149] In at least one of the multiple actuators 40 that are direct drive motors, the stator may be embedded directly in the base-side link or the hand-side link. Fig. 9 illustrates a configuration in which the stator 215 in the arm motor 201 is embedded directly in the first link 50.

[0150] In place of the opening 54, the first link 50 has a receiving hole 57 that opens upward and downward. In addition, next to the receiving hole 57, an opening 58 is formed that connects the internal space 52 downward.

[0151] The stator 215 is accommodated in the accommodation hole 57 from above, and is fixed to the inner circumferential surface of the accommodation hole 57 by, for example, shrink fitting. The flange 213 of the fixed shaft 212 is attached to the first link 50 around the accommodation hole 57 by bolting or the like.

[0152] The cover 241 of the base-side seal member 240 is attached to the motor housing 211 by bolting or the like around the periphery of the accommodation hole 57. The outer seal 243 is in close contact with the first link 50 and the cover 241 around the entire circumference of the accommodation hole 57.

[0153] The back seal member 250 seals the entire periphery of the accommodation hole 57 and the opening 58. When the back seal member 250 is attached to the first link 50, the recess 252 of the back cover 251 allows the protruding shaft 222 and the internal space 52 to communicate with each other.

[0154] If the stator is embedded directly in the link, it is difficult to replace the motor itself. For this reason, it is further advantageous to be able to remove and replace the base-side seal member 240 separately from the main body 210.

[0155] 9, the fixed shaft 212 is attached to the first link 50 in a removable state. The fixed shaft 212 stabilizes the posture of the protruding shaft 222, thereby improving the reliability of sealing by the base-side seal member 240. Furthermore, because the fixed shaft 212 is removable, the maintainability of the arm motor 201 is improved.

[0156] The fixed shaft 212 is attached to the first link 50 from the side opposite to where the second link 60 is located, and the back seal member 250 is attached to the first link 50 so as to seal the gap between the fixed shaft 212 and the protruding shaft 222 within the first link 50. This makes it possible to achieve both ease of attachment and detachment of the fixed shaft 212 and a seal between the fixed shaft 212 and the protruding shaft 222.

[0157] 10 illustrates a hand motor 301 in which the stator 315 and the stator 342 are directly embedded in the second link 60. The second link 60 has a first accommodating hole 611 and a second accommodating hole 612 instead of the openings 68 and 69. The first accommodating hole 611 opens toward the side where the hand 20 and the second hand 70 are arranged (upward) and receives the stator 342. The second accommodating hole 612 opens toward the side opposite the side where the hand 20 and the second hand 70 are arranged (downward) and receives the stator 315. The second link 60 may further have an inward flange 613 that separates the first accommodating hole 611 from the second accommodating hole 612 and surrounds the protruding shaft 322.

[0158] An opening 614 that communicates with the internal space 62 downward is formed next to the second accommodating hole 612. The opening 614 and the second accommodating hole 612 may be connected to each other.

[0159] The stator 342 is accommodated in the first accommodating hole 611 from above and is directly fixed to the inner surface of the first accommodating hole 611 by, for example, shrink fitting. The stator 315 is accommodated in the second accommodating hole 612 from below and is directly fixed to the inner surface of the second accommodating hole 612 by, for example, shrink fitting. By eliminating the motor housing 311 and the motor housing 341, the periphery of the hand motor 301 can be further miniaturized.

[0160] The flange 313 of the fixed shaft 312 is attached to the second link 60 around the second receiving hole 612 by bolting or the like.

[0161] The first hand seal member 370 further includes a cover 373 and an outer seal 374. The cover 373 is attached to the second link 60 from the outside. The cover 373 surrounds the protruding shaft 322 and extends outward from the inner periphery of the first accommodating hole 611 over its entire circumference, and is attached to the second link 60 from above by fastening bolts or the like.

[0162] The outer seal 374 provides a seal between the cover 373 and the second link 60. The outer seal 374 is, for example, an O-ring, and is disposed between the cover 373 and the second link 60 so as to surround the protruding shaft 352, and is in close contact with the cover 373 and the second link 60 over the entire circumference. The inner seal 371 provides a seal between the cover 373 and the protruding shaft 352 while allowing the protruding shaft 352 to rotate relative to the cover 373. The seal cover 372 is attached to the cover 373 by bolting or the like.

[0163] The articulated arm 3 may further include a back seal member 390 that closes the second housing hole 612 and the opening 614. The back seal member 390 can easily seal the drive systems of the hand 20 and the second hand 70, which do not have motor housings 311, 341. Removing the back seal member 390 makes it easy to attach and detach the fixed shaft 312, and to connect wiring to the stators 315, 342 and the rotation sensors 330, 360.

[0164] The back seal member 390 has a back cover 391 and a cover seal 393. The back cover 391 extends outward beyond the inner periphery of the second accommodating hole 612 and the opening 614 over its entire periphery, closing the second accommodating hole 612 and the opening 614 from below, and is attached to the second link 60 by bolting or the like. The cover seal 393 seals the gap between the back cover 391 and the second link 60. The cover seal 393 is, for example, an O-ring, and is disposed between the second link 60 and the back cover 391 around the second accommodating hole 612 and the opening 614, and is in close contact with the second link 60 and the back cover 391 over its entire periphery.

[0165] The back cover 391 may have a recess 392 facing toward the inside of the second link 60. The recess 392 connects the bearing 323 with the internal space 62 of the second link 60. By configuring a part of the wiring space S10 in the back cover 391, further space saving of the arm 4 can be achieved.

[0166] Stator 342 (first stator) and stator 315 (second stator) may be disposed between rotation sensor 360 (first rotation sensor) and rotation sensor 330 (second rotation sensor). For example, rotation sensor 330 is provided below stator 315, and rotation sensor 360 is provided above stator 342. With stator 342 fixed to the inner surface of first accommodating hole 611 and stator 315 fixed to the inner surface of second accommodating hole 612, rotation sensors 360 and 330 can be easily assembled. This improves assembly efficiency.

[0167] For example, disk 361 of rotation sensor 360 is attached to protruding shaft 352 above rotor 351 and is located inside cover 373. Sensor head 362 is attached to cover 373. Disk 331 of rotation sensor 330 is attached below rotor 321. Sensor head 332 is attached to flange 313. This can further improve assembly efficiency.

[0168] A first recess 621 may be formed on the inner surface of the first accommodating hole 611, the first recess 621 being partially spaced apart from the stator 342, and a second recess 622 may be formed on the inner surface of the second accommodating hole 612, the second recess 622 being partially spaced apart from the stator 315. A first sensor cable C21 may be routed to the rotation sensor 360 via the first recess 621. A second sensor cable C22 may be routed to the rotation sensor 330 via the second recess 622. This makes it possible to ensure the routing paths for the first sensor cable C21 and the second sensor cable C22 while preventing the second link 60 from becoming larger.

[0169] 11, robot 2 may have an axial gap type hand motor 701 instead of radial gap type hand motor 301. By making arm motors 101 and 201, which are subjected to a larger moment than hand motor 701, radial gap type, and hand motor 701, which is not subjected to a larger moment than arm motors 101 and 201, axial gap type, it is possible to achieve both high positioning accuracy and compact size.

[0170] The hand motor 701 has an output shaft 740 (first output shaft), a stator 731 (first stator) that rotates the hand 20 around a third axis Ax3 (hand axis) by applying a rotating magnetic field to the output shaft 740, an output shaft 720 (second output shaft) that passes through the output shaft 740 along the third axis Ax3, and a stator 711 (second stator) that rotates the second hand 70 around the third axis Ax3 by applying a rotating magnetic field to the output shaft 720.

[0171] The output shaft 740 faces the stator 731 along the third axis Ax3 (axial direction) and has a rotor 742 (first rotor) that receives a rotating magnetic field from the stator 731, and the output shaft 720 faces the stator 711 along the third axis Ax3 (axial direction) and has a rotor 722 (second rotor) that receives a rotating magnetic field from the stator 711. The drive system of the multi-stage hands 20 and the second hand 70 can be made even lower in height.

[0172] The stator 731 and the stator 711 may be fixed to the second link 60 (base side link), the output shaft 740 may be fixed to the hand 20, the output shaft 720 may pass through the output shaft 740 and the hand 20 and be fixed to the second hand 70, and the stator 731 may be located between the hand 20 and the stator 711.

[0173] The hand motor 701 may have a first bearing that is held by the second link 60 and holds the output shaft 720 or the output shaft 740 so that it rotates around the third axis Ax3, and a second bearing that is held by the output shaft 720 between the outer periphery of the output shaft 720 and the inner periphery of the output shaft 740 and holds the output shaft 740 so that it rotates around the third axis Ax3.

[0174] For example, the hand motor 701 has a bearing 723 (first bearing) that is held by the second link 60 and holds the output shaft 720 so that it rotates around the third axis Ax3, and bearings 743, 744 (second bearings) that are held by the output shaft 720 and hold the output shaft 740 so that it rotates around the third axis Ax3.

[0175] By utilizing the space between the output shaft 740 and the output shaft 720 as a bearing arrangement space and holding the output shaft 740 and the output shaft 720 together, it is possible to achieve both miniaturization and rigidity of the drive system of the multi-stage hand 20 and the second hand 70.

[0176] The hand motor 701 may further include a bearing 745 (third bearing) that is held by the second link 60 and holds the output shaft 740 so that it rotates about the third axis Ax3, thereby further increasing rigidity.

[0177] In the direction along the third axis Ax3, the stator 731 may be located between the stator 711 and the hand 20, the rotor 742 and the rotor 722 may be located between the bearing 723 and the bearing 745, and the bearing 745 may be located between the bearing 723 and the bearings 743 and 744. This makes it possible to further achieve both compactness and rigidity.

[0178] The articulated arm 3 may further include a frame 750 located between the second link 60 and the hand 20 and second hand 70, and removably attached to the second link 60, and the stator 731 may be fixed to the second link 60 via the frame 750, and the stator 711 may be fixed directly to the second link 60. This can further achieve both compactness and ease of assembly.

[0179] Bearings 723 and 745 may be cross roller bearings, and bearings 743 and 744 may be radial bearings, thereby further achieving both compactness and rigidity.

[0180] As an example, hand motor 701 has a main body 710, an output shaft 720, a bearing 723, a main body 730, an output shaft 740, bearings 743 and 744, and a bearing 745. Main body 710 has a stator 711. Stator 711 has a yoke 712 and a plurality of coils 713. Yoke 712 is disk-shaped with an opening in the center, and is fixed directly to second link 60 by, for example, shrink fitting so as to surround third axis Ax3. The plurality of coils 713 are arranged so as to surround third axis Ax3, and are fixed onto yoke 712.

[0181] The output shaft 720 has a main shaft 721 and a rotor 722. The main shaft 721 protrudes upward along the third axis Ax3 and is fixed to the second hand 70 via the frame 750 and the hand 20. The rotor 722 has a core 724 and a plurality of permanent magnets 725. The core 724 protrudes in a flange-like shape from the main shaft 721 over the entire circumference on the stator 711. The plurality of permanent magnets 725 are arranged to surround the third axis Ax3 and are fixed below the core 724. The plurality of permanent magnets 725 face the plurality of coils 713 from above.

[0182] The bearing 723 is held by the second link 60 and holds the main shaft 721 so that it rotates about the third axis Ax3. The bearing 723 is, for example, a cross roller bearing. The cross roller bearing incorporates a roller that receives a radial load perpendicular to the third axis Ax3 and a roller that receives an axial load along the third axis Ax3. The bearing 723 may be disposed at a height that is surrounded by the rotor 722.

[0183] The main body 730 has a stator 731. The stator 731 has a yoke 732 and a plurality of coils 733. The yoke 732 is disk-shaped with an opening at the center, and is fixed to the first link 50 by, for example, shrink fitting so as to surround the third axis Ax3. The plurality of coils 733 are arranged so as to surround the third axis Ax3, and are fixed below the yoke 732. The stator 731 is located above the stator 711 and the rotor 722, and surrounds the main shaft 721.

[0184] The output shaft 740 has a main shaft 741 and a rotor 742. The main shaft 741 surrounds the main shaft 721 above the rotor 722. The rotor 742 has a core 746 and a plurality of permanent magnets 747. The core 746 protrudes in a flange-like shape from the main shaft 741 around its entire circumference, between the stator 731 and the rotor 722. The plurality of permanent magnets 747 are arranged to surround the third axis Ax3 and are fixed onto the core 746. The plurality of permanent magnets 747 face the plurality of coils 733 from below.

[0185] The bearings 743, 744 are, for example, ball-type radial bearings, and are arranged one above the other between the inner peripheral surface of the main shaft 741 and the outer peripheral surface of the main shaft 721. Each of the bearings 743, 744 is held by the main shaft 721 and holds the main shaft 741 so as to rotate about the third axis Ax3.

[0186] The bearing 745 is held by the frame 750 and holds the main shaft 741 so as to rotate about the third axis Ax3. Being held by the frame 750 is included in being held by the second link 60. The bearing 745 is, for example, a cross roller bearing.

[0187] The rotor 742 and the rotor 722 may be located between the bearing 723 and the bearing 745, and the bearing 745 may be located between the bearing 723 and the bearings 743 and 744. This makes it possible to further achieve both miniaturization and rigidity.

[0188] 11 illustrates a configuration in which a third bearing is provided in addition to the first and second bearings in an axial gap type hand motor 701. A radial gap type hand motor 301 may also be provided with a third bearing that is held by the second link 60 and holds the main shaft 741 so that it rotates about the third axis Ax3.

[0189] As shown in FIG. 12, the articulated arm 3 may further include a tube T10 and an air-cooling channel CR10 corresponding to a motor (e.g., at least one of the arm motor 201 and the hand motor 301) located inside the chamber 90. The tube T10 is piped inside the wiring space S10 and guides air-cooling gas from outside the chamber 90. The air-cooling channel CR10 receives the gas guided by the tube T10 and sends it out into the wiring space S10 through the periphery of the motor. For example, the air-cooling channel CR10 for the arm motor 201 is formed in the first link 50, and the air-cooling channel CR10 for the hand motor 301 is formed in the second link 60. By effectively utilizing the wiring space S10 as an exhaust path for the air-cooling gas, the motors can be cooled with a small number of tubes T10.

[0190] 13, the robot 2 may further include environmental sensors 810 and 820 that detect the environment within the wiring space S10. The environmental sensor 810 detects the environment of the internal space 52. The environmental sensor 820 detects the environment of the internal space 62. Examples of the environmental sensors 810 and 820 include a temperature sensor and a humidity sensor.

[0191] Each of the multiple sensors, including the rotation sensors 150, 260, 330, and 360 and the environmental sensors 810 and 820, may have an upper port UP and a lower port LP, and may be configured to transmit detection results by the sensor itself and information received at the lower port LP from the upper port UP. With this configuration, the rotation sensors 150, 260, 330, and 360 and the environmental sensors 810 and 820 may be daisy-chained by a series of cables C10 and connected to a robot controller 900 or the like located outside the chamber 90.

[0192] For example, cable C10 includes cable C11, cable C12, cable C13, cable C14, cable C15, and cable C16. Cable C11 connects the upper port UP of the environment sensor 820 to the lower port LP of the rotation sensor 360. Cable C12 connects the upper port UP of the rotation sensor 360 to the lower port LP of the rotation sensor 330. Cable C13 connects the upper port UP of the rotation sensor 330 to the lower port LP of the environment sensor 810. Cable C14 connects the upper port UP of the environment sensor 810 to the lower port LP of the rotation sensor 260. Cable C15 connects the upper port UP of the rotation sensor 260 to the lower port LP of the rotation sensor 150. Cable C16 connects the upper port UP of the rotation sensor 150 to the robot controller 900. The above connection order is merely an example and can be changed in any manner.

[0193] The environmental sensor 820 transmits the detection result of the environment of the internal space 62 from the upper port UP. The rotation sensor 360 receives the detection result of the environment by the environmental sensor 820 at the lower port LP via the cable C11 and transmits the detection result of the rotation of the output shaft 350 and the information received at the lower port LP from the upper port UP. The rotation sensor 330 receives the information transmitted from the rotation sensor 360 at the lower port LP via the cable C12 and transmits the detection result of the rotation of the output shaft 320 and the information received at the lower port LP from the upper port UP. The environmental sensor 810 receives the information transmitted from the rotation sensor 330 at the lower port LP via the cable C13 and transmits the detection result of the environment of the internal space 52 and the information received at the lower port LP from the upper port UP. The rotation sensor 260 receives the information transmitted from the environmental sensor 810 at the lower port LP via the cable C14 and transmits the detection result of the rotation of the output shaft 220 and the information received at the lower port LP from the upper port UP. The rotation sensor 150 receives information transmitted from the rotation sensor 260 at the lower port LP via the cable C15, and transmits the detection result of the rotation of the output shaft 120 and the information received at the lower port LP from the upper port UP. The robot controller 900 receives the information transmitted from the rotation sensor 150 via the cable C16.

[0194] In the above configuration, the environment sensor 820 is connected to the rotation sensor 360 via the cable C11 (sensor cable), and the rotation sensor 360 receives the detection result of the environment via the cable C11 and transmits both the detection result of the rotation and the detection result of the environment to the outside of the chamber 90 via the cables C12, C13, C14, C15, and C16. The environment sensor 810 is connected to the rotation sensor 260 via the cable C14 (sensor cable), and the rotation sensor 260 receives the detection result of the environment via the cable C14 and transmits both the detection result of the rotation and the detection result of the environment to the outside of the chamber 90 via the cables C15 and C16. Reducing the number of cables can further suppress gas generation from the cables.

[0195] 〔summary〕 The above disclosure includes the following configurations. (1) A robot 2 comprising: a hand 20 for supporting a substrate W; a base 10; an arm 4 for connecting the hand 20 to the base 10; an articulated arm 3 having a plurality of joints J10 arranged along the arm 4, each of which moves around a vertical axis to change the position and posture of the hand 20 relative to the base 10; and a flange 30 extending to separate the base 10 from the arm 4 and the hand 20 and closing an opening OP1 of a chamber 90 in which at least a portion of the articulated arm 3 is housed, the flange 30 having a longitudinal direction, and the axis of the joint J10 that is closest to the base 10 among the plurality of joints J10 is located between one end 31 of the flange 30 and a center 32 of the flange 30, closer to the one end 31 in the longitudinal direction of the flange 30. The shape and layout of the flange 30 can be matched to the opening OP1 that is necessary and sufficient from the standpoint of ease of assembling the robot 2 into the chamber 90. This is therefore effective in achieving both a reduction in the opening OP1 for assembling the robot 2 into the chamber 90 and ease of assembling the robot 2 into the chamber 90.

[0196] (2) The robot 2 described in (1) above, wherein the plurality of joints J10 include a first joint J11 that connects the first link 50 to the base 10 so as to rotate about a vertical first axis Ax1, a second joint J12 that connects the second link 60 to an end of the first link 50 so as to rotate about a vertical second axis Ax2, and a third joint J13 that connects the hand 20 to an end of the second link 60 so as to rotate about a vertical third axis Ax3, and the first axis Ax1 is located between one end 31 of the flange 30 and a center 32 of the flange 30, closer to the one end 31, in the longitudinal direction of the flange 30. The position and orientation of the hand 20 in the horizontal plane can be freely adjusted while keeping the number of links to a minimum.

[0197] (3) The robot 2 according to (2), wherein the length of the flange 30 in the longitudinal direction is greater than the length of the first link 50. The necessary and sufficient opening OP1 can be further matched with the shape and layout of the flange 30.

[0198] (4) The robot 2 according to (3), wherein the width of the flange 30 in a direction perpendicular to the longitudinal direction is smaller than the length of the first link 50. The necessary and sufficient opening OP1 can be further matched with the shape and layout of the flange 30.

[0199] (5) The robot 2 described in any one of (2) to (4) further comprises a base actuator 41 having a main body 110 fixed to the base 10, an output shaft 120 protruding from the main body 110, passing through the flange 30 and fixed to the first link 50, and rotating around an axis, and a sealing member 140 sealing between the flange 30 and the output shaft 120. The inside of the chamber 90 can be easily sealed.

[0200] (6) The robot 2 described in (5) has a base 10 having a motor holder 13 to which the main body 110 is fixed and a lifting actuator 14 that raises and lowers the motor holder 13, and the sealing member 140 includes a mechanical seal 148 that fits tightly against the output shaft 120 while allowing rotation of the output shaft 120 relative to the flange 30, and an expandable seal 141 that seals between the mechanical seal 148 and the flange 30 and expands and contracts in response to the raising and lowering of the motor holder 13. This allows the output shaft 120 to move in both the up-down direction and the rotation direction, while also ensuring that the interior of the chamber 90 is sealed.

[0201] (7) The robot 2 described in (6) above, wherein the flange 30 includes a first flange 35 facing the inside of the chamber 90, a second flange 36 overlapping the first flange 35 and facing the outside of the chamber 90, an adjustment plate 37 inserted between the first flange 35 and the second flange 36 to adjust the inclination of the second flange 36 relative to the first flange 35, and a fastening member 38 fastening the second flange 36 to the first flange 35, and wherein the lifting actuator 14 is fixed to the second flange 36, and the output shaft 120 passes through the second flange 36 and the first flange 35 and is fixed to the first link 50. The flange 30 can be used to adjust the installation posture of the robot 2.

[0202] (8) The robot 2 according to (7), wherein the elastic seal 141 seals between the mechanical seal 148 and the first flange 35. The elastic seal 141 can easily absorb changes in the inclination of the second flange 36 relative to the first flange 35, thereby maintaining the airtightness within the chamber 90.

[0203] (9) A robot 2 described in (7) or (8), wherein the first flange 35 and the second flange 36 each separate the base 10 from the arm 4 and the hand 20, and the first flange 35 extends beyond the periphery of the second flange 36 around its entire circumference. By providing each of the first flange 35 and the second flange 36 with a width that separates the base 10 from the arm 4 and the hand 20, it is possible to ensure a space for arranging the adjustment plate 37. Furthermore, by not placing the second flange 36 inside the chamber 90, it is possible to easily maintain the airtightness inside the chamber 90.

[0204] (10) The robot (2) according to any one of (1) to (9), further comprising a plurality of legs (5) that protrude beyond the base (10) from the flange (30) and surround the base (10). The robot 2 can be supported by the legs 5 before being installed in the chamber 90. Therefore, the maintainability of the robot 2 can be improved.

[0205] (11) A substrate transport device 1 comprising a robot 2 described in any one of (2) to (10) and a chamber 90, wherein the chamber 90 has a longitudinal direction and the longitudinal direction of the chamber 90 is aligned with the longitudinal direction of the flange 30. It is possible to prevent the chamber 90 from being enlarged to provide the opening OP1.

[0206] (12) The substrate transport device 1 described in (11) includes a robot 2 that includes a base actuator 41 that rotates the first link 50 around a first axis Ax1, an arm actuator 42 that rotates the second link 60 around a second axis Ax2 independently of the rotation of the first link 50 by the first actuator, and a hand actuator 43 that rotates the hand 20 around a third axis Ax3 independently of the rotation of the first link 50 by the first actuator and the rotation of the second link 60 by the second actuator, and the chamber 90 has a first side wall 96 and a second side wall 97 that face each other in a direction perpendicular to the vertical direction and the longitudinal direction of the chamber 90, and the first axis Ax1 is located between the first side wall 96 and the second side wall 97 and closer to the first side wall 96. This allows both the reduction of the chamber 90 and the movement range of the robot 2 to be achieved.

[0207] (13) The substrate transport device 1 according to (12), wherein the length of the first link 50 is smaller than the distance between the first side wall 96 and the second side wall 97 and is greater than half the distance. This further enables both the reduction of the chamber 90 and the range of movement of the robot 2 to be achieved.

[0208] (14) The substrate transfer device 1 according to any one of (11) to (13), wherein the chamber 90 has a top plate 91 and a bottom plate 92 aligned vertically, and the flange 30 closes an opening OP1 provided in the bottom plate 92. In comparison with providing the opening OP1 in the top plate 91, the intrusion of dust into the chamber 90 can be suppressed.

[0209] (15) The substrate transfer apparatus 1 according to (14), wherein the chamber 90 further includes a second opening OP2 that is smaller than the opening OP1 and is provided in the top plate 91. This makes it possible to prevent dust from entering the chamber 90 and improve the ease of maintenance of the robot 2.

[0210] (16) The substrate transfer device 1 according to (15), wherein at least a portion of the second opening OP2 overlaps with the flange 30 when viewed vertically from above. The maintainability of the robot 2 can be further improved. [Explanation of symbols]

[0211] 1...substrate transfer device, W...substrate, 90...chamber, 91...top plate, 92...bottom plate, OP1...opening, 96...first side wall, 97...second side wall, 2...robot, 3...articulated arm, 20...hand, 10...base, 4...arm, J10...joint, 50...first link, 60...second link, J11...first joint, J12...second joint, J13...third joint, Ax1...first axis, Ax2...second axis, Ax3...third axis, 41...base Actuator, 42...arm actuator, 43...hand actuator, 30...flange, 31...one end, 32...center, OP2...second opening, 5...leg, 120...output shaft, 110...main body, 140...sealing member, 13...motor holder, 14...lifting actuator, 141...telescopic seal, 148...mechanical seal, 35...first flange, 36...second flange, 37...adjusting plate, 38...fastening member.

Claims

1. A robot for transporting substrates, a hand that supports the substrate; With the base, an articulated arm that connects the hand to the base; a flange that extends to separate the base from the articulated arm and the hand and closes an opening of a chamber in which at least a portion of the articulated arm is housed; Equipped with the flange has a longitudinal direction; The articulated arm includes: a first joint connecting a first link to the base so as to rotate about a vertical first axis; Including, a length of the flange in the longitudinal direction is greater than a length of the first link; a width of the flange in a direction perpendicular to the longitudinal direction of the flange is smaller than a length of the first link.

2. The articulated arm includes: a second joint connecting a second link to an end of the first link so as to rotate about a second vertical axis; a third joint connecting the hand to an end of the second link so as to rotate about a vertical third axis; Further comprising: The robot according to claim 1.

3. a main body fixed to the base; an output shaft that protrudes from the main body, passes through the flange, and is fixed to the first link, and rotates about the first axis; a base actuator having a seal member that seals between the flange and the output shaft; Further comprising: The robot according to claim 1.

4. The base is a motor holder to which the main body is fixed; a lifting actuator that lifts and lowers the motor holder; and The sealing member is a mechanical seal that is in close contact with the output shaft while allowing rotation of the output shaft relative to the flange; an expandable seal that seals between the mechanical seal and the flange and expands and contracts in response to the elevation and lowering of the motor holder; Including, The robot according to claim 3.

5. The flange is a first flange facing the interior of the chamber; a second flange overlapping the first flange and facing outside the chamber; an adjustment plate inserted between the first flange and the second flange to adjust the inclination of the second flange relative to the first flange; a fastening member that fastens the second flange to the first flange; Including, the lift actuator is fixed to the second flange; The output shaft protrudes from the main body, passes through the second flange and the first flange, and is fixed to the first link. The robot according to claim 4.

6. the elastic seal provides a seal between the mechanical seal and the first flange; The robot according to claim 5.

7. the first flange and the second flange extend between the base and the articulated arm and the hand, respectively; The first flange projects from the periphery of the second flange along the entire periphery. The robot according to claim 5.

8. a plurality of legs projecting from the flange and surrounding the base; a height of the plurality of legs from the flange being greater than a height of the base from the flange; The robot according to any one of claims 1 to 7.

9. The robot according to any one of claims 1 to 7, the chamber; Equipped with the chamber has a longitudinal direction; The longitudinal direction of the chamber is aligned with the longitudinal direction of the flange. Substrate transport device.

10. the robot includes: a base actuator that rotates the first link about the first axis; an arm actuator that rotates the second link about the second axis independently of rotation of the first link by the base actuator; a hand actuator that rotates the hand about the third axis independently of the rotation of the first link by the base actuator and the rotation of the second link by the arm actuator; Equipped with the chamber has a first side wall and a second side wall that face each other in a direction perpendicular to the vertical direction and the longitudinal direction of the chamber; a distance from the first axis to the first side wall is smaller than a distance from the first axis to the second side wall; The substrate transport apparatus of claim 9.

11. The length of the first link is smaller than the distance between the first side wall and the second side wall and is greater than half the distance. The substrate transport apparatus of claim 10.

12. The chamber has a top plate and a bottom plate aligned vertically, The flange closes the opening provided in the bottom plate. The substrate transport apparatus of claim 9 .

13. The chamber further includes a second opening formed in the top plate and having a size smaller than the first opening. The substrate transport apparatus of claim 12 .

14. When viewed vertically from above, at least a portion of the second opening overlaps with the flange. The substrate transport apparatus of claim 13 .

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