Testing device

Abstract

To provide a testing device capable of radiating a measuring medium to both front and back surfaces of a test piece, while maintaining the test piece under a bending load.SOLUTION: The testing device includes a loading device for applying a bending load to a test piece, a first transmitter, and a receiver. The first transmitter radiates a measuring medium, which is an acoustic wave, an electromagnetic wave, or a particle, for measuring the physical properties of the test piece to a front surface of the test piece applied with the bending load. The receiver receives the measurement medium having passed through the test piece. The testing device includes either (1) or (2) below. (1) A second transmitter that radiates the measurement medium to a back surface of the test piece applied with the bending load. (2) An actuator that moves the first transmitter to a position capable of radiating the measurement medium to the back surface of the test piece applied with the bending load.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The technology disclosed in this specification relates to a testing device that measures the physical properties of a test piece to which a bending load is applied. [Background technology]

[0002] Patent Documents 1 and 2 disclose test devices that irradiate a test piece to which a bending load has been applied with electromagnetic waves or sound waves and measure the physical properties (internal stress, etc.) of the test piece. The test device in Patent Document 1 irradiates a test piece to which a bending load has been applied with ultrasonic waves and measures the residual stress of the test piece from the reflected waves. The test device in Patent Document 2 irradiates a test piece to which a bending load has been applied with X-rays and measures the internal structure of the test piece from the X-rays that have passed through the test piece. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-131206 [Patent Document 2] Japanese Patent Application Publication No. 2017-032325 Summary of the Invention [Problem to be solved by the invention]

[0004] There are cases where it is necessary to measure physical properties by irradiating ultrasonic waves from both the front and back of a test piece to which a bending load has been applied. For example, when a bending load is applied to a test piece, tensile stress (or compressive stress) occurs on the front side of the test piece, and compressive stress (or tensile stress) occurs on the back side. In some cases, both the tensile stress and compressive stress that occur in the test piece when a bending load is applied are measured.

[0005] When using the testing device of Patent Document 1, the following procedure is required to measure the physical properties of the front and back surfaces. After measuring the physical properties of the surface layer of the front surface of the test piece to which a bending load has been applied, the test piece is removed from the testing device, turned over, and reattached to the testing device. A reverse bending load is applied to the test piece, ultrasonic waves are irradiated to the back surface, and the physical properties of the surface layer of the back surface are measured. In this case, the state of the test piece when ultrasonic waves are irradiated to the front surface does not completely match the state of the test piece when ultrasonic waves are irradiated to the back surface. There is a need for a device that can irradiate ultrasonic waves (or other measurement media) to both the front and back surfaces of a test piece while maintaining the state in which a bending load is applied to the test piece. Note that in this specification, the terms "front" and "back" are used for convenience of understanding, and when one side of a test piece is defined as the "front," the opposite side corresponds to the "back." [Means for solving the problem]

[0006] The testing apparatus disclosed in this specification includes a loading device that applies a bending load to a test piece, a first transmitter that irradiates a measurement medium, which is sound waves, electromagnetic waves, or particles for measuring the physical properties of the test piece, onto the front surface of the test piece to which the bending load has been applied, a receiver that receives the measurement medium that has passed through the test piece, and one of the following (1) and (2): (1) a second transmitter that irradiates the measurement medium onto the back surface of the test piece to which the bending load has been applied, and (2) a transport actuator that moves the first transmitter to a position where the measurement medium can be irradiated onto the back surface of the test piece to which the bending load has been applied.

[0007] The testing device disclosed in this specification is equipped with a first transmitter and a second transmitter, or with a transport actuator that moves the first transmitter to the back side of the test piece, so that the measurement medium can be irradiated from both the front and back sides of the test piece while maintaining a bending load applied to the test piece.

[0008] When the measurement medium is an ultrasonic wave or the like that is reflected by the surface of the test piece, the testing device disclosed in this specification can measure the physical properties of the surfaces (surface layers) of both the front and back sides of the test piece while maintaining a bending load applied to the test piece.

[0009] When the measurement medium passes through the test piece, it may be possible to measure the physical properties of both the front and back surfaces by irradiating the measurement medium once. Even in such cases, it is advantageous to obtain measurement results when the measurement medium is irradiated from the front side and when it is irradiated from the back side. If the measurement results when the measurement medium is irradiated from both the front and back sides match, the accuracy of the measurement results can be verified. The test device disclosed in this specification is effective in meeting such requirements.

[0010] When the second transmitter is provided, the receiver includes a first receiver that receives the measurement medium irradiated from the first transmitter and a second receiver that receives the measurement medium irradiated from the second transmitter.When the transport actuator is provided, the transport actuator moves the receiver from a position where it can receive the measurement medium irradiated from the first transmitter before movement to a position where it can receive the measurement medium irradiated from the first transmitter after movement.

[0011] Details and further improvements of the technology disclosed in this specification are described in the following "Description of Embodiments of the Invention." [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a diagram showing the structure of a test apparatus 100 according to a first embodiment. [Figure 2] FIG. 10 is a diagram showing the structure of a test apparatus 200 according to a second embodiment. [Figure 3] FIG. 10 is a diagram showing the structure of a test apparatus 300 according to a third embodiment. [Figure 4] FIG. 10 is a diagram showing the structure of a test apparatus 400 according to a fourth embodiment. [Figure 5] FIG. 10 is a diagram showing the structure of a test apparatus 500 according to a fifth embodiment. [Figure 6] 7 is a view of the loading device 510 as seen along the arrow V in FIG. 6. [Figure 7] FIG. 10 is a diagram showing the structure of a test apparatus 100a according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0013] (First embodiment) Figure 1 shows the structure of a testing apparatus 100 of the first embodiment. The testing apparatus 100 applies a bending load to a plate-shaped test piece TP and irradiates a measurement medium onto each of the front surface TPa and the back surface TPb of the test piece TP, thereby measuring the internal stress in the surface layer of each of the front surface TPa and the back surface TPb. The measurement medium is ultrasonic waves reflected by the surface (surface layer) of the test piece TP. The method of measuring internal stress by irradiating ultrasonic waves is publicly known, so a description thereof will be omitted.

[0014] The test device 100 includes a load device 110 , a first transmitter 121 , a second transmitter 122 , a first receiver 123 , a second receiver 124 , and a controller 140 .

[0015] For convenience of explanation, the +Z direction of the coordinate system in the figure is defined as "up." Also, as mentioned above, "front" and "back" refer to one side and the opposite side of the test piece TP, and do not refer to a specific side.

[0016] The loading device 110 can apply a bending load to the test piece TP. The loading device 110 includes four indenters 111a, 111b, 112a, and 112b, an upper plate 113, a lower plate 114, and a load actuator 115.

[0017] Indenters 111a and 111b are fixed to the lower surface of upper plate 113, and indenters 112a and 112b are fixed to the upper surface of lower plate 114. Upper plate 113 and lower plate 114 face each other. An opening 113a is provided in upper plate 113, and an opening 114a is provided in lower plate 114. Openings 113a and 114a are arranged so as to overlap when viewed in the vertical direction.

[0018] Openings 119a and 119b are also provided in the base portion 119. The openings 119a and 119b are also provided so as to overlap with the openings 113a and 114a when viewed in the up-down direction.

[0019] When viewed in the vertical direction, the two indenters 111a and 111b are located on either side of the opening 113a, and the two indenters 112a and 112b are located on either side of the opening 114a. When viewed in the vertical direction, the two indenters 112a and 112b are located between the two indenters 111a and 111b. When viewed in the vertical direction, the two indenters 112a and 112b come into contact with the test piece TP at positions different from the positions at which the two indenters 111a and 111b come into contact with the test piece TP.

[0020] The upper plate 113 and the load actuator 115 are fixed to a base 119. The lower plate 114 is supported by the load actuator 115. The load actuator 115 moves the lower plate 114 closer to the upper plate 113. The load actuator 115 is controlled by a controller 140. The test piece TP is sandwiched between the indenters 111a and 111b and the indenters 112a and 112b, and the load actuator 115 moves the lower plate 114 closer to the upper plate 113. The indenters 112a and 112b press the test piece TP from below, and the indenters 111a and 111b press the test piece TP from above. As a result, a bending load is applied to the test piece TP from the loading device 110, and the test piece TP bends so that the front surface TPa side becomes convex. Tensile stress is generated in the surface layer of the front surface TPa, and compressive stress is generated in the surface layer of the back surface TPb.

[0021] Each of the indenters 111a, 111b, 112a, and 112b is equipped with a load sensor 116. Note that in the figure, only the load sensor in the indenter 111b is denoted by the reference numeral 116, and the reference numerals for the other load sensors are omitted. Each of the load sensors 116 measures the load applied to the test piece TP by the indenters 111a, 111b, 112a, and 112b. The positions at which the indenters 111a, 111b, 112a, and 112b contact the test piece TP are known. Therefore, the magnitude of the bending load applied to the test piece TP can be determined from the measurement values ​​of the four load sensors 116 and the positions at which the four indenters contact the test piece TP. The controller 140 controls the load actuator 115 so that a predetermined bending load is applied to the test piece TP, while referring to the measurement values ​​of the load sensors 116.

[0022] The first transmitter 121, the second transmitter 122, the first receiver 123, and the second receiver 124 are also fixed to the base part 119. The thick arrow lines in FIG. 1 indicate the propagation paths of the measurement medium irradiated from the first transmitter 121 and the second transmitter 122.

[0023] The testing apparatus 100 irradiates a measurement medium from the first transmitter 121 onto the front surface TPa of the test piece TP while maintaining a bending load applied to the test piece TP. The measurement medium reaches the front surface TPa through the opening 113a of the upper plate 113. The measurement medium reflected by the front surface TPa reaches the first receiver 123 through the opening 113a. The controller 140 analyzes the reflected wave received by the first receiver 123 to obtain the stress distribution in the surface layer of the front surface TPa.

[0024] At the same time (or with a time lag), while maintaining the bending load applied to the test piece TP, a measurement medium is irradiated from the second transmitter 122 onto the back surface TPb of the test piece TP. The measurement medium passes through the opening 114a in the lower plate 114 and reaches the back surface TPb. The measurement medium reflected by the back surface TPb reaches the second receiver 124 through the opening 114a. The controller 140 analyzes the reflected wave received by the second receiver 124 to obtain the stress distribution in the surface layer of the back surface TPb.

[0025] The testing apparatus 100 of the embodiment can measure the stress distribution in the surface layer of each of the front surface TPa and the back surface TPb while applying a bending load to the test piece TP. That is, the testing apparatus 100 can obtain the stress distribution in the surface layer of each of the front surface TPa and the back surface TPb when the test piece TP is in the same state.

[0026] Second Embodiment FIG. 2 shows the structure of a testing apparatus 200 of a second embodiment. The testing apparatus 200 can measure the internal stress distribution of a plate-shaped test piece TP by applying X-rays to the test piece while a bending load is applied to the test piece and analyzing the X-rays that have passed through the test piece TP. The testing apparatus 200 can measure the internal stress distribution when X-rays are applied from the front surface TPa side and the internal stress distribution when X-rays are applied from the back surface TPb side while maintaining the bending load applied. The X-rays irradiated onto the test piece TP are the measurement medium for measuring the physical properties of the test piece TP. The method of determining the internal stress of the test piece TP from the X-rays that have passed through the test piece TP is well known, so a description thereof will be omitted.

[0027] If the measurement results obtained when X-rays are irradiated from both the front and back sides match, it can be determined that the measurement results are correct. Alternatively, the difference between the measurement results obtained when X-rays are irradiated from the front side and the measurement results obtained when X-rays are irradiated from the back side corresponds to a measurement error. In other words, the testing apparatus 200 can irradiate X-rays from both the front and back sides while maintaining the applied bending load to measure the internal stress distribution, thereby clarifying the actual measurement error of the testing apparatus 200.

[0028] The test apparatus 200 includes a load device 110, a first transmitter 221, a second transmitter 222, a first receiver 223, a second receiver 224, and a controller 240. The load device 110 is the same as the load device of the test apparatus 100 of the first embodiment.

[0029] The first transmitter 221, the second transmitter 222, the first receiver 223, and the second receiver 224 are fixed to the base 119 of the load device 110. The thick solid arrow in Fig. 2 indicates the path of the X-rays irradiated from the first transmitter 121. The thick dotted arrow in Fig. 2 indicates the path of the X-rays irradiated from the second transmitter 122.

[0030] The first transmitter 221 and the second transmitter 222 can emit X-rays. The first transmitter 221 is disposed in a position where it can emit X-rays onto the front surface TPa of the test piece TP. The second transmitter 222 is disposed in a position where it can emit X-rays onto the back surface TPb of the test piece TP. The first transmitter 221 and the second transmitter 222 are disposed so that the X-rays they emit intersect inside the test piece TP.

[0031] The first receiver 223 and the second receiver 224 receive the X-rays that have passed through the test piece TP. The first receiver 223 is positioned so that it can receive the X-rays that have passed through the test piece TP and that have been emitted by the first transmitter 221. The X-rays emitted by the first transmitter 221 pass through the openings 119a and 113a of the loading device 110 and strike the front surface TPa of the test piece TP. The X-rays that have passed through the test piece TP pass through the openings 114a and 119b and reach the first receiver 223.

[0032] The second receiver 224 is positioned so as to receive the X-rays emitted by the second transmitter 222 and transmitted through the test piece TP. The X-rays emitted by the second transmitter 222 pass through the openings 119b and 114a of the loading device 110 and strike the back surface TPb of the test piece TP. The X-rays transmitted through the test piece TP pass through the openings 113a and 119a and reach the second receiver 224.

[0033] The X-rays received by the first receiver 223 and the second receiver 224 are analyzed by the controller 240 to obtain the internal stress of the test piece TP.

[0034] The testing apparatus 200 can irradiate each of the front surface TPa and the back surface TPb with X-rays while maintaining the state in which a bending load is applied to the test piece TP. Note that the X-ray irradiation to the front surface TPa and the X-ray irradiation to the back surface TPb may be performed simultaneously or with a time lag.

[0035] 3 shows the structure of a testing apparatus 300 according to a third embodiment. The testing apparatus 300 applies ultrasonic waves to both the front surface TPa and the back surface TPb of a plate-shaped test piece TP while applying a bending load to the test piece TP, and can measure the internal stress in the surface layers of both the front surface TPa and the back surface TPb.

[0036] The test apparatus 300 includes a load device 310, a first transmitter 321, a first receiver 323, a transport actuator 330, and a controller 340. The load device 310 is the same as the load device 110 of the test apparatus 100 of the first embodiment, except for the shape of a base 319. The base 319 supports the transport actuator 330. The base 319 also includes openings 319a and 319b. The openings 319a and 319b are provided at positions that overlap with the openings 113a and 114a when viewed in the up-down direction.

[0037] The loading device 310 maintains a state in which a predetermined bending load is applied to the test piece TP. The bending load causes the test piece TP to bend so that the front surface TPa side becomes convex.

[0038] The first transmitter 321 emits ultrasonic waves, and the first receiver 323 receives the ultrasonic waves reflected by the test piece TP.

[0039] The transport actuator 330 includes a ring 332 that supports the first transmitter 321 and the first receiver 323, and a motor 331 that rotates the ring relative to the base 319. The first transmitter 321 and the first receiver 323 are supported on the base 319 via the transport actuator 330. When the transport actuator 330 (motor 331) is driven, the ring 332 rotates, and the first transmitter 321 and the first receiver 323 move. The thick arrow line in Figure 3 indicates the propagation path of the ultrasonic wave (measurement medium) radiated from the first transmitter 321.

[0040] 3A shows the positions of the first transmitter 321 and the first receiver 323 when ultrasonic waves are irradiated onto the front surface TPa of the test piece TP. The first transmitter 321 is positioned so that it can irradiate ultrasonic waves onto the front surface TPa of the test piece TP. The first receiver 323 is positioned so that it can receive ultrasonic waves reflected by the front surface TPa of the test piece TP. The ultrasonic waves irradiated by the first transmitter 321 pass through the openings 319a and 113a and reach the front surface TPa of the test piece TP. The ultrasonic waves reflected by the front surface TPa pass through the openings 113a and 319a and reach the first receiver 323. The ultrasonic waves that reach the first receiver 323 are analyzed by the controller 340, and the stress distribution in the surface layer of the front surface TPa is obtained.

[0041] After the stress distribution in the surface layer of the front surface TPa is obtained, the controller 340 drives the transport actuator 330 (motor 331). When the motor 331 rotates in the direction indicated by the thick arrow line Ra in FIG. 3(B), the ring 332 rotates in the direction indicated by the thick arrow line Rb, and the first transmitter 321 and the first receiver 323 move. The transport actuator 330 moves the first transmitter 321 to a position where ultrasonic waves can be irradiated onto the back surface TPb of the test piece TP. As shown in FIG. 3(B), initially, the first transmitter 321 is located at the point indicated by reference symbol 321a, and the first receiver 323 is located at the point indicated by reference symbol 323a. The transport actuator 330 moves the first transmitter 321 from the position indicated by reference symbol 321a to the position indicated by reference symbol 321b. The first receiver 323 moves from the position indicated by reference symbol 323a to the position indicated by reference symbol 323b.

[0042] After the movement of the first transmitter 321 and the first receiver 323 is completed, the controller 340 causes the first transmitter 321 to emit ultrasonic waves. The ultrasonic waves emitted from the first transmitter 321, which is located at point 323b, pass through the openings 114a and 319b and reach the back surface TPb of the test piece TP. The ultrasonic waves reflected by the back surface TPb pass through the openings 114a and 319b and reach the first receiver 323. The ultrasonic waves that reach the first receiver 323 are analyzed by the controller 340, and the stress distribution in the surface layer of the back surface TPb is obtained.

[0043] The testing apparatus 300 of the third embodiment can measure the stress distribution in the surface layer of each of the front surface TPa and the back surface TPb while applying a bending load to the test piece TP, similar to the testing apparatus 100 of the first embodiment. The testing apparatus 300 can obtain the stress distribution in the surface layer of each of the front surface TPa and the back surface TPb while the test piece TP is in the same state.

[0044] (Fourth Example) Figure 4 shows the structure of a testing apparatus 400 of a fourth example. The testing apparatus 400 can measure the internal stress distribution of a plate-shaped test piece TP by applying X-rays to the test piece while a bending load is applied to the test piece and analyzing the X-rays that have passed through the test piece TP. The testing apparatus 400 can measure the internal stress distribution when X-rays are applied from the front surface TPa side and the internal stress distribution when X-rays are applied from the back surface TPb side while maintaining the bending load applied.

[0045] The test apparatus 400 includes a load device 310, a first transmitter 421, a first receiver 423, a transport actuator 330, and a controller 440. The load device 310 is the same as the load device 310 of the test apparatus 300 of the third embodiment. The load device 310 maintains a state in which a predetermined bending load is applied to the test piece TP. The bending load bends the test piece TP so that the front surface TPa side becomes convex.

[0046] The first transmitter 421 emits X-rays. The first receiver 423 receives the X-rays that have passed through the test piece TP.

[0047] The transport actuator 330 includes a ring 332 that supports the first transmitter 421 and the first receiver 423, and a motor 331 that rotates the ring. When the transport actuator 330 (motor 331) is driven, the ring 332 rotates, and the first transmitter 421 and the first receiver 423 move. The thick arrow line in Figure 4 indicates the propagation path of the X-rays (measurement medium) irradiated from the first transmitter 421.

[0048] 4(A) shows the positions of the first transmitter 421 and the first receiver 423 when X-rays are irradiated onto the front surface TPa of the test piece TP. The first transmitter 421 is positioned so that it can irradiate X-rays onto the front surface TPa of the test piece TP. The first receiver 423 is positioned so that it can receive X-rays that have passed through the test piece TP. The X-rays irradiated by the first transmitter 421 pass through the opening 113a of the upper plate 113, pass through the test piece TP, pass through the opening 114a of the lower plate 114, and reach the first receiver 423. The X-rays that have reached the first receiver 423 are analyzed by the controller 440, and the internal stress distribution of the test piece TP is obtained.

[0049] Next, the controller 440 drives the transport actuator 330 (motor 331). When the motor 331 rotates in the direction indicated by the thick arrow line Ra in FIG. 4(B), the ring 332 rotates in the direction indicated by the thick arrow line Rb, and the first transmitter 421 and the first receiver 423 move. The transport actuator 330 moves the first transmitter 421 to a position where X-rays can be irradiated onto the back surface TPb of the test piece TP. As shown in FIG. 4(B), initially, the first transmitter 421 is located at the point indicated by reference symbol 421a, and the first receiver 423 is located at the point indicated by reference symbol 423a. The transport actuator 330 moves the first transmitter 421 from the position indicated by reference symbol 421a to the position indicated by reference symbol 421b. The first receiver 423 moves from the position indicated by reference symbol 423a to the position indicated by reference symbol 423b.

[0050] After the movement of the first transmitter 421 and the first receiver 423 is completed, the controller 440 causes the first transmitter 421 to emit X-rays. The X-rays emitted from the first transmitter 421 located at point 423b pass through the opening 114a in the lower plate 114, penetrate the test piece TP, pass through the opening 113a in the upper plate 113, and reach the first receiver 423. The X-rays that reach the first receiver 423 are analyzed by the controller 440, and the internal stress distribution of the test piece TP is obtained.

[0051] The test apparatus 400 of the fourth embodiment has the same advantages as the test apparatus 200 of the second embodiment.

[0052] (Fifth Embodiment) Fig. 5 shows the structure of a test device 500 of a fifth embodiment. The test device 500 includes a load device 510, a first transmitter 121, a second transmitter 122, a first receiver 123, a second receiver 124, and a controller (not shown). Fig. 6 is a diagram of the load device 510 as viewed along the arrow V in Fig. 5.

[0053] The load device 510 includes two first indenters 511 a and 511 b , two second indenters 512 a and 512 b , an upper plate 513 , a lower plate 514 , a load sensor 516 , a load actuator 515 , and a base portion 519 .

[0054] The upper plate 513 has a frame shape and has an opening 513a. The first indenters 511a and 511b are supported on the edge of the opening 513a. Although not shown, the upper plate 513 is fixed to a base portion 519. The lower plate 514 has a frame shape and has an opening 514a. The second indenters 512a and 512b are supported on the edge of the opening 514a.

[0055] The lower plate 514 is supported by a load actuator 515 with a load sensor 516 sandwiched therebetween. The load actuator 515 is fixed to a base portion 519.

[0056] The test piece TP is sandwiched between the first indenters 511a, 511b and the second indenters 512a, 512b. The load actuator 515 lifts the lower plate 514. When the lower plate 514 lifts, the gap between the first indenters 511a, 511b and the second indenters 512a, 512b narrows, and a bending load is applied to the test piece TP, causing the test piece TP to bend. At this time, the load sensor 516 measures the bending load applied to the test piece TP.

[0057] A first transmitter 121 emits ultrasonic waves onto the front surface of the test piece TP. The ultrasonic waves reflected by the front surface are received by a first receiver 123. A second transmitter 122 emits ultrasonic waves onto the back surface of the test piece TP. The ultrasonic waves reflected by the back surface are received by a second receiver 124. The received ultrasonic waves are analyzed by a controller (not shown), and the internal stresses of the surface layers on both the front and back surfaces of the test piece TP are measured simultaneously. The test apparatus 500 has the same advantages as the test apparatus 500.

[0058] Ultrasonic waves emitted by the first transmitter 121 and reflected by the test piece TP pass through an opening 513a in the upper plate 513. Ultrasonic waves emitted by the second transmitter 122 and reflected by the test piece TP pass through an opening 514a in the lower plate 514, an opening 515a in the load actuator 515, and an opening 519a in the base part 519. The openings 513a, 514a, 515a, and 519a are arranged so as to overlap when viewed along the Z direction in the figure.

[0059] 6, the opening 513a is large enough to allow the entire test piece TP, at least a portion of the first indenters 511a and 511b, and at least a portion of the second indenters 512a and 512b to be visible. The size of the opening 513a provides the following advantages.

[0060] Since the entire test piece TP is visible, the shape of the test piece TP can be directly measured. Furthermore, since at least a portion of the first indenters 511a and 511b is visible, the positions of the first indenters 511a and 511b can be directly measured. Similarly, since at least a portion of the second indenters 512a and 512b is visible, the positions of the second indenters 512a and 512b can be directly measured.

[0061] By measuring the positions of the first indenters 511a and 511b and the second indenters 512a and 512b, their relative positions can be determined. The relative positions of the first and second indenters determine the shape of the test piece TP. Through the opening 513a, the entire test piece TP, at least a portion of the first indenters 511a and 511b, and at least a portion of the second indenters 512a and 512b can be seen. This structural feature makes it possible to confirm whether the test piece TP has the intended curved shape. If the test piece TP does not have the intended curved shape, it can be confirmed whether this is due to the relative positions of the first and second indenters.

[0062] (Modification) Figure 7 shows the structure of a modification (test apparatus 100a) of the test apparatus 100 of the first embodiment. In Figure 7, the reference numerals of some of the same parts as those shown in Figure 1 are omitted.

[0063] The test apparatus 100a includes a load device 110a. In addition to the load device 110 of the test apparatus 100, the load device 110a includes an indenter adjustment actuator 717 and a displacement sensor 716. Furthermore, the load device 110a does not include the load sensor 116 that the load device 110 includes.

[0064] The indenter adjustment actuator 717 can move the first indenters 111a, 111b and the second indenters 112a, 112b in the horizontal direction. In other words, the indenter adjustment actuator 717 can change the relative positions of the first indenters 111a, 111b and the second indenters 112a, 112b in the horizontal direction. The up-down direction in the figure corresponds to the direction normal to the front surface of the test piece TP, and the horizontal direction in the figure corresponds to the direction perpendicular to the normal to the test piece TP. The indenter adjustment actuator 717 can change the relative positions of the first indenters 111a, 111b and the second indenters 112a, 112b in the direction intersecting the normal to the front surface.

[0065] The bending shape of the test piece TP can be changed by changing the relative positions of the first indenters 111a, 111b and the second indenters 112a, 112b using the indenter adjustment actuator 717. For example, in FIG. 7, when the indenters 111a, 111b, 112a, and 112b are positioned at the positions indicated by the imaginary lines, the test piece TP assumes the shape indicated by the dashed lines. When the indenters 111a, 111b, 112a, and 112b are positioned at the positions indicated by the solid lines, the test piece TP assumes the shape indicated by the solid lines. In this way, by including the indenter adjustment actuator 717, the loading device 110a can change the bending shape of the test piece TP.

[0066] Furthermore, the displacement sensor 716 of the loading device 110a can measure the displacement occurring in the test piece TP.

[0067] The indenter adjustment actuator 717 and the displacement sensor 716 of the test apparatus 100a may be applied to each of the test apparatuses 100-500.

[0068] The test apparatus 100-500 of the embodiment (and the modified example 100a) can irradiate the test piece with a measurement medium from both the front and back sides while maintaining a bending load applied to the test piece.

[0069] Some features of the test apparatus 100-500 (and variant 100a) of the embodiment are summarized below. The test apparatus 100-500 includes a loading device 110 (310, 510) that applies a bending load to the test piece TP, a first transmitter, and a first receiver. The first transmitter irradiates a measurement medium for measuring the physical properties of the test piece TP onto the front surface of the test piece TP to which the bending load has been applied. The first receiver receives the measurement medium that has passed through the test piece. In other words, the first receiver receives the measurement medium that has been reflected by the test piece or that has passed through the test piece.

[0070] The test apparatus also includes a second transmitter that irradiates the measurement medium onto the back surface of the test piece to which a bending load has been applied (test apparatuses 100, 200, 500). Alternatively, the test apparatus includes a transport actuator 330 that moves the first transmitter to a position where the measurement medium can be irradiated onto the back surface of the test piece to which a bending load has been applied (test apparatuses 300, 400). The test apparatuses 100, 200, 500 that include the second transmitter and the test apparatuses 300, 400 that include the transport actuator 330 have the same advantages.

[0071] In the case of a test device having a first transmitter and a second transmitter, the test device also has a first receiver and a second receiver. The first receiver is positioned so that it can receive the measurement medium irradiated from the first transmitter and transmitted through the test piece. The second receiver is positioned so that it can receive the measurement medium irradiated from the second transmitter and transmitted through the test piece. As mentioned above, "measurement medium transmitted through the test piece" means the measurement medium reflected by the test piece or the measurement medium transmitted through the test piece.

[0072] In the case of a testing device equipped with a transport actuator, the transport actuator moves the first receiver from a position where it can receive the measurement medium irradiated from the first transmitter before the movement to a position where it can receive the measurement medium irradiated from the first transmitter after the movement. Both before and after the movement, the first receiver is positioned at a position where it can receive the measurement medium irradiated from the first transmitter and then passed through the test piece.

[0073] The measurement medium is sound waves, electromagnetic waves, or particles used to measure the physical properties of the test piece. The first and second transmitters 121 and 122 of the test devices 100 and 500, and the first transmitter 321 of the test device 300, radiate ultrasonic waves as the measurement medium. The first and second transmitters 221 and 222 of the test device 200, and the first transmitter 421 of the test device 400, radiate X-rays as the measurement medium.

[0074] The measurement medium is not limited to ultrasound and X-rays. The test equipment may be a device that uses laser light as the measurement medium and measures the energy level of the surface layer of the test piece using Raman spectroscopy. Alternatively, the test equipment may be a device that uses infrared light that passes through the test piece as the measurement medium and measures the band gap using the transmitted light. Measuring the energy level and band gap of the surface layer is useful for the development of semiconductor substrates, etc.

[0075] When X-rays that pass through a test piece are used as the measurement medium, the internal stress distribution of the test piece and the crystallinity of the semiconductor substrate can be measured.When ultrasonic waves reflected by the test piece are used as the measurement medium, the residual stress and crystallinity of the surface layer of the test piece can be measured by analyzing the reflected waves.

[0076] The measurement medium may be particle waves such as alpha rays, gamma rays, or beta rays, or may be visible light.

[0077] Other points to note regarding the test apparatus in the examples are as follows. In the examples, the loading device 110 applied a bending load to the test piece TP so that the front surface TPa side becomes convex. The loading device 110 may also apply a bending load to the test piece TP so that the back surface TPb side becomes convex. The loading device 110 applies a bending load to the test piece so that one of the front surface and the back surface is curved convex and the other is curved concave.

[0078] The transmitter irradiates the measurement medium onto the test piece TP from a direction intersecting the vector of the bending moment applied to the test piece TP.

[0079] In the case of test devices 100, 200, and 500 having a first transmitter and a second transmitter, the first transmitter and the second transmitter irradiate the measurement medium so that the irradiation points of the measurement medium on the test piece TP overlap when viewed from the normal direction of the front surface TPa (back surface TPb).

[0080] In the case of test equipment 300, 400 having a transport actuator 330 that moves the first transmitter, the transport actuator moves the first transmitter so that the irradiation point on the front surface TPa of the measurement medium and the irradiation point on the back surface TPb overlap when viewed from the normal direction.

[0081] The loading device of the testing apparatus of the embodiment includes two indenters 111a, 111b (511a, 511b) that contact the front surface of the test piece and two second indenters 112a, 112b (512a, 512b) that contact the back surface. When viewed along the normal to the test piece, each of the two second indenters 112a, 112b (512a, 512b) is positioned so that it contacts the test piece at a position different from the position at which the two first indenters 111a, 111b (511a, 511b) contact the test piece.

[0082] The loading device of the testing apparatus disclosed in this specification includes an upper plate 113 (513) that supports two first indenters 111a, 111b (511a, 511b) and a lower plate 114 (514) that supports two second indenters 112a, 112b (512a, 512b). The upper plate 113, 513 that supports the two first indenters may be referred to as a first indenter support portion. The lower plate 114, 514 that supports the two second indenters may be referred to as a second indenter support portion. As mentioned above, the terms "upper" and "lower" in the examples are used for convenience. The first indenter support portion only needs to face the front surface of the test piece, and does not need to be located above the second indenter support portion. The second indenter support portion only needs to face the back surface of the test piece, and does not need to be located below the first indenter support portion.

[0083] The loading device of the testing apparatus disclosed herein may include three or more first indenters, or may include three or more second indenters. By including multiple indenters, the test piece can be deformed into a complex shape. The loading device includes a first indenter support portion (upper plate 113, 513) that supports multiple first indenters, and a second indenter support portion (lower plate 114, 514) that supports multiple second indenters. The loading device includes a load actuator 115 (515) that applies a bending load to the test piece TP by moving the second indenter support portion (lower plate 114, 514) in a direction in which the second indenters 112a, 112b approach the first indenters 111a, 111b.

[0084] The loading device includes a load sensor 116 (516) that measures the load applied to the test piece TP, or a displacement sensor 716 that measures the displacement of the test piece TP.

[0085] The load device includes a first indenter support (upper plate 113, 513) and a base 119 (319, 519) that supports a load actuator 115 (515).

[0086] The first indenter support portion (upper plate 113, 513) has a first opening (opening 113a, 513a), and the second indenter support portion (lower plate 114, 514) has a second opening (opening 114a, 514a). The base portion 119 (319, 519) has a third opening (opening 119a, 119b (319a, 319b, 519a)). The first, second, and third openings are all through holes. The transmitter is positioned so that the measurement medium reaches the test piece through at least one of the first, second, and third openings. The receiver is positioned so that it can receive the measurement medium that has passed through the test piece and then through at least one of the first, second, and third openings.

[0087] The structure of the loading device is not limited to that of the embodiment. The loading device may be any device that can maintain a predetermined bending load on the test piece. For example, the loading device may be a device that applies a bending load to the test piece using hydraulic pressure.

[0088] The transport actuator 330 is an example of an actuator that moves the first transmitter to a position where the measurement medium can be irradiated onto the back surface of the test piece to which a bending load is applied. The structure of the transport actuator that moves the transmitter (and receiver) is not limited to the structure of the embodiment.

[0089] Although specific examples of the present invention have been described in detail above, these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and variations of the specific examples exemplified above. The technical elements described in this specification or drawings exhibit technical utility alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. Furthermore, the technology exemplified in this specification or drawings can achieve multiple objectives simultaneously, and achieving one of these objectives alone is technically useful. [Explanation of symbols]

[0090] 100, 100a, 200, 300, 400, 500: Testing device 110, 110a, 310, 510: Loading device 111a, 111b, 112a, 112b, 511a, 511b, 612a, 512b: Indenter 113, 513: Upper plate 113a, 114a, 513a, 514a, 515a, 519a: Opening 114, 514: Lower plate 115, 515: Load actuator 116, 516: Load sensor 119, 319, 519: Base part 121, 221, 321, 421: First transmitter 122, 222: Second transmitter 123, 223, 323, 423: First receiver 124, 224: Second receiver 140, 240, 340, 440: Controller 330: Conveying actuator 331: Motor 332: Ring 716: Displacement sensor 717: Indenter adjusting actuator

Claims

1. a loading device that applies a bending load to the test piece; a first transmitter that irradiates a measurement medium, which is a sound wave, an electromagnetic wave, or a particle, for measuring the physical properties of the test piece onto the front surface of the test piece to which a bending load is applied; (1) a second transmitter that irradiates a measurement medium onto the rear surface of the test piece to which a bending load has been applied, or (2) a transport actuator that moves the first transmitter to a position where the measurement medium can be irradiated onto the rear surface of the test piece to which a bending load has been applied; a receiver for receiving the measurement medium via the test piece; A test device comprising:

2. The loading device is a plurality of first indenters in contact with the front surface of the test piece; two second indenters that contact the back surface of the test piece at positions different from the first indenters when viewed along a normal to the front surface; a first indenter support portion that supports a plurality of the first indenters; a second indenter support portion that supports a plurality of the second indenters; a load actuator that applies a bending load to the test piece by moving the second indenter support part in a direction in which the second indenter approaches the first indenter; It is equipped with the first indenter support portion has an opening through which the measurement medium irradiated by the first transmitter passes, and the opening has a size that allows the entire test piece, the first indenter, and the second indenter to be visible. The test device of claim 1 .

3. The loading device is a plurality of first indenters in contact with the front surface of the test piece; two second indenters that contact the back surface of the test piece at positions different from the first indenters when viewed along a normal to the front surface; a first indenter support portion that supports a plurality of the first indenters; a second indenter support portion that supports a plurality of the second indenters; a load actuator that applies a bending load to the test piece by moving the second indenter support part in a direction in which the second indenter approaches the first indenter; a base portion supporting the first indenter support portion and the load actuator; It is equipped with the first indenter support portion has a first opening, the second indenter support portion has a second opening, the base portion has a third opening; The testing device of claim 1 , wherein the measurement medium passes through the first opening, the second opening, and the third opening.

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