Measurement device and mobile body control method

Abstract

To provide a measurement device and a mobile body control method, which enable suppression of troubles associated with movement of a mobile vehicle.SOLUTION: A method of controlling a mobile body (10, 10C, 200, 500) is provided, the method comprising the steps of: detecting amounts of curvature of collision detection sensors (80, 80A, 82, 82A, 82B, 90, 202, 210, 512) that are less rigid than the mobile body and installed on the mobile body included in a measurement device (1, 1A, 1B, 1C); and controlling movement of the mobile body according to the amounts of curvature.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a measuring device and a method for controlling a moving object, and more particularly to a technique for preventing a moving object from colliding with another object. [Background technology]

[0002] When a device equipped with a moving body moves, the moving body may come into contact with (collide with) an obstacle within its range of movement. For example, measuring machines such as roughness measuring machines, contour measuring machines, roundness measuring machines, coordinate measuring machines, and optical shape measuring machines are equipped with a detector (probe head), carriage, column, or the like as a moving body. As such a moving body moves, an unintended part may collide with an obstacle (including, for example, the object to be measured), which may cause the measuring machine to malfunction or reduce its accuracy. Furthermore, when the moving body collides with the object to be measured, the object may be damaged.

[0003] Patent document 1 discloses a collision prevention device that uses a distortion detection sensor to detect distortion that occurs in a housing that covers a device to be moved, and stops the moving means when the distortion detected by the distortion detection sensor exceeds a predetermined value. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2008-122222 Summary of the Invention [Problem to be solved by the invention]

[0005] The collision prevention device described in Patent Document 1 is based on the premise that the housing covering the device to be moved will collide with an obstacle, causing distortion in the housing, and does not prevent collisions that could cause breakdowns or reduced accuracy of the measuring device as described above. Furthermore, collisions with the housing could damage the object to be measured.

[0006] The present invention has been made in view of the above circumstances, and has an object to provide a measuring device and a method for controlling a moving body that can suppress the occurrence of problems that accompany the movement of a moving body. [Means for solving the problem]

[0007] A measuring device according to a first aspect of the present invention comprises a moving body that moves relative to the moving body within the measuring device, a collision detection sensor attached to the moving body and having lower rigidity than the moving body, and a device control unit that detects the amount of bending of the collision detection sensor and controls the movement of the moving body in accordance with the amount of bending.

[0008] A second aspect of the present invention provides a measuring device according to the first aspect, wherein the collision detection sensor has lower rigidity than an obstacle or a measurement object in the moving direction of the moving body.

[0009] A measuring device according to a third aspect of the present invention is the measuring device of the first or second aspect, which includes a plurality of collision detection sensors, and the device control unit shares a circuit for reading out the amount of bending of the plurality of collision detection sensors.

[0010] A measuring device according to a fourth aspect of the present invention is the first or second aspect, in which a collision detection sensor is attached to each axis of movement of the moving body, and the device control unit is provided with a circuit for reading out the amount of bending of the collision detection sensor for each axis of movement.

[0011] A fifth aspect of the present invention relates to the measurement device of any one of the first to fourth aspects, wherein the collision detection sensor is attached in a direction in which the bending sensitivity direction of the collision detection sensor is approximately perpendicular to the direction of movement of the moving body.

[0012] A sixth aspect of the present invention is a measuring device in any one of the first to fifth aspects, wherein the collision detection sensor includes a support and a sensitivity member formed on the support, the sensitivity member having a rate of change in resistance value due to tensile stress that is greater than the rate of change in resistance value due to compressive stress, and the collision detection sensor is mounted at an angle so that the support is closer to the moving body.

[0013] A seventh aspect of the present invention relates to the measuring device of any one of the first to sixth aspects, wherein the collision detection sensor is formed in a planar shape and is attached so that the plane of the collision detection sensor is approximately parallel to the direction of gravity.

[0014] The measuring device according to an eighth aspect of the present invention is the measuring device according to any one of the first to seventh aspects, wherein a tip of the collision detection sensor is fixed to the moving body side.

[0015] The measurement device according to a ninth aspect of the present invention is the measurement device according to any one of the first to eighth aspects, further comprising an output section that notifies the result of detection of the amount of bending of the moving object.

[0016] A measuring device according to a tenth aspect of the present invention is any of the first to ninth aspects, and includes a plurality of collision detection sensors whose resistance value increases when bent, and the device control unit includes a readout circuit that connects the detection signals from the plurality of collision detection sensors in series and reads them out.

[0017] The measuring device according to an eleventh aspect of the present invention is any of the first to ninth aspects, and includes a plurality of collision detection sensors whose resistance value decreases when bent, and the device control unit includes a readout circuit that connects the detection signals from the plurality of collision detection sensors in parallel and reads them out.

[0018] The measurement device according to a twelfth aspect of the present invention is the measurement device according to any one of the first to eleventh aspects, and further comprises a contact portion attached to the tip of the collision detection sensor.

[0019] A thirteenth aspect of the present invention relates to the measurement device of the twelfth aspect, wherein the contact portion has a curved shape on the side opposite to the moving body.

[0020] A measuring device according to a fourteenth aspect of the present invention is the measuring device of the twelfth or thirteenth aspect, wherein the contact portion is formed of a material that is not slippery in relation to an obstacle on the moving body.

[0021] A fifteenth aspect of the present invention relates to the measurement device of any one of the twelfth to fourteenth aspects, wherein the contact portion is provided offset from the central axis of the collision detection sensor in the longitudinal direction.

[0022] A measurement device according to a sixteenth aspect of the present invention is the measurement device according to any one of the twelfth to fifteenth aspects, wherein the contact portion is flexible.

[0023] A measuring device according to a 17th aspect of the present invention is any of the first to sixteenth aspects, in which the movable body includes a contact detector that detects the amount of oscillation of the oscillating part and measures the object to be measured, and the collision detection sensor is attached to a part other than the oscillating part.

[0024] A measuring device according to an 18th aspect of the present invention is any of the first to sixteenth aspects, in which the moving body includes a non-contact detector, and the collision detection sensor is attached so that its tip is located closer to the proximal end of the measurable range of the non-contact detector.

[0025] A method for controlling a moving body according to a 19th aspect of the present invention includes the steps of detecting the amount of bending of a collision detection sensor attached to a moving body included in a measuring device and having lower rigidity than the moving body, and controlling the movement of the moving body according to the amount of bending. [Effects of the Invention]

[0026] According to the present invention, by attaching a collision detection sensor to a moving body, it is possible to suppress the occurrence of problems that accompany the movement of the moving body. [Brief explanation of the drawings]

[0027] [Figure 1] 1 is a diagram showing a measurement device according to a first embodiment of the present invention. [Figure 2] 1 is a flowchart showing a first example of a method for controlling a moving object. [Figure 3] 10 is a flowchart showing a second example of a method for controlling a moving object. [Figure 4]FIG. 10 is a diagram showing a measurement device according to a first modified example. [Figure 5] FIG. 10 is a diagram showing an example in which collision detection sensors are arranged in accordance with the shape of a measurement object. [Figure 6] FIG. 10 is a diagram showing an example of the arrangement of collision detection sensors according to Modification 2. [Figure 7] 10 is a graph showing the sensitivity of a bending sensor. [Figure 8] FIG. 10 is a diagram showing an example of the arrangement of collision detection sensors according to Modification 3. [Figure 9] FIG. 10 is a diagram illustrating a comparative example to Modification 3. [Figure 10] FIG. 10 is a diagram showing an example of the arrangement of collision detection sensors according to Modification 4. [Figure 11] FIG. 13 is a diagram showing a comparative example to Modification 4. [Figure 12] FIG. 13 is a diagram showing an example of the arrangement of collision detection sensors according to Modification 5. [Figure 13] FIG. 13 is a diagram showing another example of the arrangement of collision detection sensors according to the fifth modification. [Figure 14] FIG. 10 is a diagram illustrating an example of a notification display. [Figure 15] FIG. 10 is a diagram illustrating an example in which detection signals from collision detection sensors are connected in series. [Figure 16] FIG. 10 is a diagram illustrating an example in which detection signals from collision detection sensors are connected in parallel. [Figure 17] FIG. 13 is a diagram showing a collision detection sensor according to a ninth modification. [Figure 18] 13 is a diagram showing an example of the shape of a collision detection sensor according to Modification 9. FIG. [Figure 19] 13 is a diagram showing a state in which a contact portion of a collision detection sensor according to Modification 9 comes into contact with an obstacle. FIG. [Figure 20] 13 is a diagram showing an example of the arrangement of contact portions of a collision detection sensor according to Modification 9. FIG. [Figure 21] 13 is a diagram showing an example of a substitute for the contact portion of the collision detection sensor according to Modification 9. FIG. [Figure 22] FIG. 4 is a diagram showing a measurement device according to a second embodiment of the present invention. [Figure 23] FIG. 1 is a perspective view showing a moving body according to an application example of the present invention. [Figure 24] FIG. 1 is a perspective view showing a collision detection sensor according to an application example of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0028] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

[0029] [First embodiment] In this embodiment, an example will be described in which a detector (probe head) of a contact-type measuring device is a moving body.

[0030] (Outline of the measuring device) 1 is a diagram showing a measurement device according to a first embodiment of the present invention. In the following description, a three-dimensional Cartesian coordinate system is used in which the XY plane is the horizontal plane and the Z direction is the vertical direction (perpendicular direction).

[0031] The measuring device 1 is a device for measuring the shape, roughness, contour, etc. of the surface of a measuring object W placed on a measuring object placement section (hereinafter referred to as a stage) 50 using a detector 10. As shown in FIG. 1, the measuring object W is placed on the surface of the stage 50.

[0032] 1, the stage 50 is disposed so that the surface of the stage 50 (the surface on which the measurement target W is placed) is parallel to the XY plane. A column (Z-axis) 52 extending substantially perpendicular to the surface of the stage 50 is disposed on the stage 50. A carriage (X-axis) 54 is attached to the column 52, and the carriage 54 is movable in the Z direction along the column 52 by an actuator (for example, a motor) 52M. The column 52 may be provided with a scale for detecting the position of the carriage 54 in the Z direction.

[0033] The detector 10 is attached to the carriage 54, and the detector 10 is movable in the X direction relative to the carriage 54 by an actuator (e.g., a motor) 54M. A scale 56 for detecting the X-direction position of the detector 10 is attached to the carriage 54. The scale 56 is, for example, a linear scale (linear position scale) with scale graduations formed along its length.

[0034] In this embodiment, the detector 10 is movable relative to the column 52, but the present invention is not limited to this. For example, the column 52 may be movable along the X direction relative to the stage 50. Furthermore, the detector 10 may be movable relative to the measurement object W placed on the stage 50 not only in the X direction but also in the Y direction.

[0035] Furthermore, the stage 50 may be movable along the X, Y, or Z direction relative to the column 52. Therefore, the movable body according to this embodiment is not limited to an example in which the detector 10 as the movable body moves relative to the measurement object W. The movable body according to this embodiment also includes a case in which the measurement object W moves relative to the detector 10, that is, a detector 10 that moves relatively to the measurement object W.

[0036] As shown in FIG. 1, the detector 10 includes a stylus portion 14, an arm portion 16, a swing shaft 20, a scale 22, and a scale head 24.

[0037] The stylus part 14 is fixed so as to be approximately in line with the arm part 16, and the stylus part 14 and the arm part 16 are attached to the detector housing 26 so as to be able to swing integrally around the swing axis 20. The attachment angle of the detector 10 to the carriage 54 is adjusted so that the swing axis 20 is approximately parallel to the XY plane. Hereinafter, the stylus part 14 attached to the arm part 16 will also be referred to as the swing part 18.

[0038] The configuration of the oscillating portion 18 is not limited to the substantially linear example shown in FIG. 1, but may be such that, for example, the stylus portion 14 or the arm portion 16 has an L-shaped bent portion, and the stylus portion 14 and the arm portion 16 are attached so as to be substantially parallel to each other.

[0039] A stylus 12 is provided at the tip of the stylus unit 14. The stylus 12 extends downward (in the -Z direction) in the figure. When the stylus 12 is brought into contact with the surface of the measurement object W placed on the stage 50 with a predetermined pressure, the oscillating unit 18 oscillates around the oscillating axis 20 according to the height and unevenness of the surface of the measurement object W at the contact position.

[0040] The configuration of the stylus unit 14 is not limited to the example shown in Fig. 1. For example, the stylus unit 14 may be a T-shaped stylus with styluses provided in the vertical direction in the figure, or an L-shaped stylus with a stylus that protrudes downward in the figure longer than in the example shown in Fig. 1.

[0041] A scale 22 is fixed to the detector housing 26 so as to face the base end of the arm portion 16 .

[0042] The scale 22 is, for example, a linear scale (linear position scale), and scale graduations are formed along the length direction of the scale 22. The scale 22 is attached so that its length direction (displacement detection direction) is approximately perpendicular to the length direction of the oscillating part 18.

[0043] The scale head 24 is fixed to the base end of the arm portion 16 and is capable of swinging integrally with the swinging portion 18, and is a device that reads the scale (hereinafter referred to as the indicated value) at the opposite position of the scale 22 fixed to the detector housing 26. The type of the scale head 24 is not particularly limited, but the scale head 24 may be, for example, a photoelectric sensor for reading the scale 22 or a non-contact sensor equipped with an imaging element and an illumination light source (for example, an LED (Light-Emitting Diode)).

[0044] The reading of the scale 22 read by the scale head 24 is output to the device control unit 100 .

[0045] The device control unit 100 controls the actuators 52M and 54M provided on the column 52 and carriage 54 to move the measurement object W and the stylus 12 of the measuring device 1 relative to each other, while obtaining readings of the graduations on the scale 22 for each position on the surface of the measurement object W. This makes it possible to measure the shape, roughness, contour, etc. of the surface of the measurement object W.

[0046] In this embodiment, the scale 22 is fixed to the detector housing 26, and the scale head 24 is fixed to the base end of the arm section 16, but the present invention is not limited to this. For example, the scale head 24 may be fixed to the detector housing 26, and the scale 22 may be fixed to the base end of the arm section 16. Furthermore, the scale 22 is not limited to a linear scale, and may be, for example, an arc scale (angle scale) formed in an arc shape along the swing direction of the arm section 16.

[0047] As shown in FIG. 1, an input unit 110 and an output unit 112 are connected to the device control unit 100.

[0048] The device control unit 100 includes at least one processor (e.g., a central processing unit (CPU), a micro-processing unit (MPU), a field-programmable gate array (FPGA), or an application-specific circuit (ASIC)) for controlling each unit of the measuring device 1, and at least one memory (e.g., a read-only memory (ROM), a random access memory (RAM), a hard disk drive (HDD), or a solid-state drive (SSD)). The memory of the device control unit 100 stores computer program code, and the memory and the computer program code, in combination with the processor, enable the measuring device 1 to measure the shape, roughness, contour, etc. of the surface of the measurement object W. The memory and the computer program code, in combination with the processor, also enable the bending amount measurement unit 102, the determination unit 104, the bending amount storage unit 106, and the drive command unit 108 of the device control unit 100, thereby enabling movement control of the detector 10 in the measuring device 1.

[0049] The input unit 110 is a device for receiving operation input from a user, and includes, for example, a keyboard, a mouse, or a touch panel.

[0050] The output unit 112 is a device for outputting images, sounds, etc., and includes, for example, an LCD (Liquid Crystal Display). The output unit 112 displays, for example, a GUI (Graphical User Interface) for operating the measuring device 1, the device control unit 100, and the actuators 52M and 54M, as well as measurement results such as the shape, roughness, or contour of the surface of the measurement target W.

[0051] (Detector movement control) Collision detection sensors 80 and 82 are attached to the detector 10. In the example shown in Fig. 1, collision detection sensor 80 is attached to the side surface of the detector 10 and protrudes from the side surface of the detector 10 in the -X direction alongside the stylus portion 14. On the other hand, collision detection sensor 82 is attached to the bottom surface of the detector 10 and protrudes from the bottom surface of the detector 10 in the -Z direction.

[0052] The bending amount measurement unit 102 detects the bending amount of the collision detection sensors 80 and 82 when measuring the measurement object W or when the detector 10 is moving. Here, the bending amount of the collision detection sensors 80 and 82 is detected as, for example, a resistance value or a change in the resistance value.

[0053] The determination unit 104 instructs the drive command unit 108 to continue or stop the movement of the detector 10 in response to a change in the amount of bending detected by the bending amount measurement unit 102. The bending amount storage unit 106 stores, for example, the amount of bending (initial bending amount) of each collision detection sensor 80 and 82 in a natural state when the collision detection sensors 80 and 82 are not colliding with another object, or a past measurement value (previous value) of the amount of bending, in the memory of the device control unit 100. The determination unit 104 then instructs the detector 10 to stop moving when the amount of bending of the collision detection sensor 80 or 82 detected by the bending amount measurement unit 102 has changed by a threshold or more from the initial bending amount or the previous value. Here, the determination unit 104 stops the movement of the detector 10 along all movement axes. It is also possible to stop movement only in the direction of movement corresponding to the collision detection sensor 80 or 82 whose change in the amount of bending has become equal to or greater than the threshold. On the other hand, if the amount of change in the amount of bending from the initial amount or the previous value is less than the threshold value, the movement of the detector 10 continues as is.

[0054] The drive command unit 108 controls the actuators 52M and 54M in accordance with an instruction from the determination unit 104 to continue or stop the movement of the detector 10.

[0055] In this embodiment, the shapes of the collision detection sensors 80 and 82 are not particularly limited, but are formed in a substantially rectangular planar shape or a columnar shape (for example, a square pillar, a circular pillar, or an oval pillar). The collision detection sensors 80 and 82 are adjusted so that they have lower rigidity than the respective parts of the measurement device 1 (for example, the housing of the detector 10, the stage 50, the column 52, and the carriage 54). Specifically, the material, size, thickness, length, etc. of each of the collision detection sensors 80 and 82 (for example, the material, size, thickness, length, etc. of the support and sensitivity member described below) are adjusted so that the collision detection sensors 80 and 82 have lower rigidity than the respective parts of the measurement device 1.

[0056] Specifically, the rigidity of the collision detection sensors 80 and 82 is made lower than that of the housing of the detector 10. As a result, when the collision detection sensor 80 or 82 collides with an obstacle, the stress caused by the collision is absorbed by the deformation of the collision detection sensor 80 or 82, so that the transmission of stress to the housing of the detector 10 can be suppressed.

[0057] Additionally, the rigidity of the collision detection sensors 80 and 82 is made lower than that of obstacles in their respective directions of movement. For example, the rigidity of the collision detection sensor 80 extending in the -X direction is made lower than that of the measurement object W, and the rigidity of the collision detection sensor 82 extending in the -Z direction is made lower than that of the stage 50 or the measurement object W. As a result, when the collision detection sensor 80 or 82 collides with an obstacle, the stress caused by the collision is absorbed by the deformation of the collision detection sensor 80 or 82, thereby suppressing the transmission of stress to the obstacle.

[0058] The length and rigidity of the collision detection sensors 80 and 82 and the threshold value for the amount of change in bending may be set so that the movement of the detector 10 can be stopped while the stress caused by the collision is being absorbed by the deformation of the collision detection sensors 80 and 82. For example, the shorter the collision detection sensors 80 and 82, the shorter the time from the start of bending until the stress affects the housing of the detector 10 or an obstacle. Therefore, the threshold value for the amount of change in bending may be set smaller. Furthermore, the higher the rigidity of the collision detection sensors 80 and 82, the shorter the time from the start of bending until the stress affects the housing of the detector 10 or an obstacle. Therefore, the threshold value for the amount of change in bending may be set smaller. Note that the relationship between the length and rigidity of the collision detection sensors 80 and 82 and the threshold value for the amount of change in bending is not limited to the above example. This makes it possible to more reliably prevent the stress caused by the collision from being transmitted to the housing of the detector 10 or an obstacle.

[0059] (Example of a collision detection sensor) The collision detection sensors 80 and 82 detect a change in the electrical resistance of a sensitive member caused by bending due to a collision with an obstacle, and may be, for example, a metal or semiconductor strain gauge. Alternatively, the collision detection sensors 80 and 82 may be a bending sensor (for example, the BS series bending sensor manufactured by Sensia Technology Co., Ltd.).

[0060] Here, a metal strain gauge has a metal thin film or wire as a sensitive element (resistor) formed on an insulating support (substrate). When the sensitive element receives a force (tensile force) in the direction of extension, the sensitive element stretches, reducing its cross-sectional area and increasing its resistance. On the other hand, when the sensitive element receives a force (compressive force) in the direction of contraction, the sensitive element contracts, increasing its cross-sectional area and decreasing its resistance.

[0061] If the resistance value changes from R by ΔR when a strain ε is applied to the sensitive member, the following equation (1) holds true.

[0062] Ks=(ΔR / R) / ε (1) Here, the gauge factor Ks is a coefficient that represents the sensitivity of the strain gauge, and (ΔR / R) is the rate of change in resistance. Note that the strain ε and the gauge factor Ks are dimensionless quantities.

[0063] From equation (1), in the case of a metal strain gauge, when the gauge factor Ks is a constant, the rate of resistance change (ΔR / R) changes linearly with the strain ε. In this embodiment, the movement of the detector 10 is controlled by detecting the rate of resistance change (ΔR / R) with respect to the strain ε that occurs when the collision detection sensor 80 or 82 collides with an obstacle.

[0064] On the other hand, semiconductor strain gauges use a semiconductor (e.g., germanium or silicon) as the sensitive element and measure the strain state by utilizing the change in electrical resistance (piezoresistive effect) when strain is applied to the semiconductor.Semiconductor strain gauges have the property of having a higher gauge factor and rate of resistance change than metal strain gauges.

[0065] In the case of metallic and semiconductor strain gauges, the direction of change (increase or decrease) in resistance is fixed according to the tension or compression acting on the sensitive member. When metallic and semiconductor strain gauges are used as the collision detection sensors 80 and 82, by installing the collision detection sensors 80 and 82 so that the direction of change in resistance is along the direction of movement of the detector 10, it is possible to detect a collision with an obstacle.

[0066] The bending sensor is made by applying a sensitive material (paint) made by mixing conductive particles (e.g., carbon particles, carbon black, particle size approximately 30 nm) with a binder resin (e.g., polyimide varnish) to a support (e.g., a flexible insulating layer, flexible substrate, etc.). Here, the volume ratio of the conductive particles to the binder resin is, for example, 6:4. The carbon black can be, for example, #3030B manufactured by Mitsubishi Chemical Corporation, and the polyimide varnish can be, for example, IRP-1200 manufactured by Sanwa Chemical Co., Ltd.

[0067] The bending sensor described above has the property of being more sensitive than a strain gauge because the carbon particles contained in the sensitive material change between contact and non-contact as the sensor deforms. By using a highly sensitive bending sensor, the effects of collisions with obstacles can be more reliably suppressed.

[0068] (First example of a method for controlling a moving object) FIG. 2 is a flowchart showing a first example of a method for controlling a moving object.

[0069] First, the bending amount measurement unit 102 measures the resistance value corresponding to the bending amount (initial bending amount) of the collision detection sensor 80 or 82 in its natural state (step S10), and the bending amount storage unit 106 stores the resistance value in the memory of the device control unit 100 (step S12).

[0070] Next, when the movement of the detector 10 (axial movement along the Z and X axes) begins (step S14), the bend amount measurement unit 102 measures (monitors) the amount of bend of the collision detection sensor 80 or 82 (step S16). The measurement of the amount of bend in step S16 may be performed at predetermined time intervals. Alternatively, the measurement of the amount of bend of the collision detection sensor 80 or 82 may be performed when the amount of movement of the carriage 54 along the Z axis or the amount of movement of the detector 10 along the X axis reaches or exceeds a predetermined distance. This predetermined distance may be adjusted, for example, according to the distance between the various components of the measurement device 1, the length of the collision detection sensors 80 and 82, or a threshold value for the amount of change in the amount of bend.

[0071] The determination unit 104 compares the amount of bending of the collision detection sensor 80 or 82 in step S16 with the initial amount of bending (step S18), and determines whether the amount of bending has changed from the initial amount of bending by a threshold or more (step S20). If the amount of change in the amount of bending of the collision detection sensor 80 or 82 is equal to or greater than the threshold (Yes in step S20), the determination unit 104 instructs the drive command unit 108 to stop the movement of the detector 10 (step S22). In accordance with the instruction from the determination unit 104, the drive command unit 108 controls the actuators 52M and 54M to stop the movement of the detector 10. The determination unit 104 may also notify the user of the occurrence of an abnormality by outputting an image or sound via the output unit 112 (step S24).

[0072] On the other hand, if the change in the amount of bending of the collision detection sensors 80 and 82 is less than the threshold value (No in step S20), the movement of the detector 10 continues as is. Then, the axial movement continues, and steps S16 to S26 are repeated until the detector 10 reaches the target position.

[0073] When the detector 10 reaches the target position (Yes in step S26), the determination unit 104 instructs the drive command unit 108 to stop the movement of the detector 10, and controls the actuators 52M and 54M to stop the movement of the detector 10 (step S28). Note that the determination of whether to stop the axial movement in step S26 may be made for each direction of movement (axis of movement) of the detector 10.

[0074] (Second example of a method for controlling a moving object) FIG. 3 is a flowchart showing a second example of a method for controlling a moving object.

[0075] When the movement of the detector 10 (axial movement along the ZX axis) starts (step S50), the bend amount measurement unit 102 measures (monitors) the bend amount of the collision detection sensor 80 or 82 (step S52). The timing of measuring the bend amount in step S52 can be set in the same way as in step S16.

[0076] Next, the determination unit 104 compares the amount of bending measured in step S52 with the previous value (step S54). If the difference between the amount of bending measured in step S52 and the previous value (for example, the absolute difference value) is equal to or greater than a threshold value (Yes in step S54), the determination unit 104 instructs the drive command unit 108 to stop the movement of the detector 10 (step S58). In accordance with the instruction from the determination unit 104, the drive command unit 108 controls the actuators 52M and 54M to stop the movement of the detector 10. In addition, the determination unit 104 may notify the user of the occurrence of an abnormality by outputting an image or sound via the output unit 112 (step S60).

[0077] On the other hand, if the difference between the amount of bending measured in step S52 and the previous value is less than the threshold value (No in step S54), the amount of bending measured by collision detection sensor 80 or 82 in step S52 is taken as the previous value and stored in the memory of device control unit 100 via bending amount storage unit 106 (step S56).Then, the movement of detector 10 continues as is, and steps S52 to S62 are repeated until axial movement is continued and detector 10 reaches the target position.

[0078] In the first loop of steps S52 to S62, for example, the initial bending amount of the collision detection sensor 80 or 82 may be used as the previous value, or step S54 may be skipped and only the previous value may be saved.

[0079] When the detector 10 reaches the target position (Yes in step S62), the determination unit 104 instructs the drive command unit 108 to stop the movement of the detector 10, and controls the actuators 52M and 54M to stop the movement of the detector 10 (step S64). Note that the determination of whether to stop the axial movement in step S62 may be made for each direction of movement (axis of movement) of the detector 10.

[0080] According to this embodiment, the movement of the detector 10 can be stopped at the time when the collision detection sensor 80 or 82, which has lower rigidity than the housing of the detector 10 or the obstacle, comes into contact with (collides with) the obstacle. This makes it possible to suppress the influence of stress on the housing of the detector 10 or the obstacle.

[0081] In the first embodiment, the collision detection sensors 80 and 82 are provided on different directions of movement (-X side and -Z side) of the detector 10, respectively, but the arrangement and number of collision detection sensors are not limited to this. For example, a collision detection sensor having lower rigidity than the housing of the detector 10 or the side of the column 52 may be provided on the side (+X side) of the detector 10 facing the column 52, or a collision detection sensor having lower rigidity than the side of the column 52, the housing of the detector 10, or the measurement object W may be provided on the side of the column 52 facing the detector 10. Furthermore, multiple collision detection sensors may be provided in the same direction of movement.

[0082] [Variation 1] FIG. 4 is a diagram showing a measurement device according to the first modification.

[0083] 4, two collision detection sensors 80 and 80A are provided in the same direction of movement (-X side). In Modification 1, when either of the collision detection sensors 80 and 80A detects a collision with an obstacle, the movement axis (X axis) of the detector 10 corresponding to the collision detection sensor 80 or 80A is stopped.

[0084] Here, multiple collision detection sensors may be attached to locations where there is a high risk of collision, such as the end of a moving body such as the detector 10. Furthermore, the attachment positions or number of sensors may be adjusted according to the measurement object W. Furthermore, the thresholds for the length, rigidity, or amount of change in bending of collision detection sensors arranged in the same direction of movement may be the same or different from each other.

[0085] According to the first modification, it is possible to identify the axis of movement on which a collision with an obstacle occurred, which makes it easier to identify the cause and to recover.

[0086] In Modification 1, when collision detection sensors are provided in motion directions other than the X direction, the bending amount measurement unit 102 measures the bending amount for each movement axis. That is, the bending amount measurement unit 102 according to Modification 1 includes a bending amount (resistance value) readout circuit for detecting the bending amount of the collision detection sensor for each movement axis.

[0087] On the other hand, in the first embodiment, when a collision with an obstacle is detected by either of the collision detection sensors 80 and 82 (when the change in the amount of bending becomes equal to or greater than the threshold), all of the moving axes are stopped. Therefore, the readout circuit in the bending amount measurement unit 102 can be shared, making it possible to realize collision detection at low cost.

[0088] The arrangement of the collision detection sensors is not limited to that shown in Figures 1 and 4. For example, multiple collision detection sensors may be attached to locations where there is a high risk of collision with obstacles, such as the end of the detector 10 as a moving part, or the attachment positions and number of sensors may be adjusted according to the shape of the measurement target W as an obstacle.

[0089] 5, two collision detection sensors (80, 80A) are provided in the X direction and three collision detection sensors (82, 82A, 82B) are provided in the Z direction according to the shape of the measurement object W. This makes it possible to realize collision detection according to the measurement object W.

[0090] [Variation 2] Fig. 6 is a diagram showing an example of the arrangement of collision detection sensors according to Modification 2. Note that Fig. 6 shows a simplified view of the moving body 200, collision detection sensor 202, and obstacle 300. In the following description, L denotes the length of the collision detection sensor 202 in its natural state (natural length), C denotes the amount of movement (amount of collision) of the moving body 200 and the obstacle 300 after the obstacle 300 collides with the collision detection sensor 202, and R denotes the radius of curvature when the collision detection sensor 202 at the time of the amount of collision C is approximated to an arc.

[0091] The strength of the signal output from the collision detection sensor 202, such as a strain gauge or bending sensor, depends on the strain caused by the collision with an obstacle. Specifically, the strength of the signal depends on the radius of curvature R when the collision detection sensor 202 is bent by the collision with an obstacle, as shown in FIG.

[0092] FIG. 6(a) shows an example in which an obstacle 300 collides with the collision detection sensor 202 in a direction substantially perpendicular to the bending direction (hereinafter referred to as the bending sensitivity direction). In the example shown in FIG. 6(a), for simplicity of explanation, it is assumed that the collision detection sensor 202 is deformed in an arc shape and line-symmetrically on the left and right due to the collision with the obstacle 300. In this case, the following equations (2a) and (2b) can be obtained from the geometric relationship shown in the lower diagram of FIG. 6(a). Note that the angle θ is an angle measured in radians.

[0093] 2θR=L (2a) L´=LC=2Rsinθ (2b) From equations (2a) and (2b), the following equation (3) is obtained.

[0094] C=L-2Rsin(L / 2R) (3) 6 exaggerates the deformation of the collision detection sensor 202, but in reality, the deformation of the collision detection sensor 202 is slight, so the angle θ can be treated as a small angle (≒ 0). The following equation (4) can be obtained by approximating the small angle of θ up to third order.

number

[0095] θR=L (5a) C=R-Rcosθ (5b) From equations (5a) and (5b), the following equation (6) is obtained.

[0096] C=R{1-cos(L / R)} (6) The following equation (7) is obtained by approximating the θ angle to the second order.

[0097] R=L 2 / 2C (7) For example, when L=25 mm and C=1 mm are set, R=25.5 mm in the example of FIG. 6(a), whereas R=212.5 mm in the example of FIG. 6(b).

[0098] Since the collision detection sensor 202 is a straight line (R=∞) in the natural state, it can be seen that higher sensitivity can be obtained in FIG. 6(a).

[0099] As shown in (a) of FIG. 6, when the collision detection sensor 202 is installed in a direction in which the bending sensitivity direction is approximately perpendicular to the direction of movement of the moving object 200, a large signal is obtained even if the sensor collision amount C is small, so collisions can be detected with higher sensitivity. This increases the reliability of avoiding a collision between the moving object 200 and the obstacle 300. In other words, even if the moving speed of the moving object 200 is high, there is a higher chance that the movement can be stopped before a collision occurs. In addition, the probability of missed or delayed collision detection can be reduced.

[0100] Depending on the shape of the moving body 200 and its positional relationship with the obstacle 300, it may be possible to install the collision detection sensor 202 in a direction such that the bending sensitivity direction is approximately perpendicular to the direction of movement of the moving body 200, as shown in (b) of Figure 6.

[0101] [Variation 3] In the third modification, an example in which a bending sensor 210 is used as the collision detection sensor 202 will be described.

[0102] Fig. 7 is a graph showing the sensitivity of the bending sensor. The horizontal axis of Fig. 7 represents the radius of curvature (mm) and strain (%) when the shape of bending sensor 210 is approximated to a circular arc, and the vertical axis represents the rate of resistance change (%).

[0103] The bending sensor 210 includes a support 210A and a layer of a sensitive member 210B formed on the support 210A, and detects the amount of bending by utilizing a change in the resistance value of the sensitive member 210B caused by bending. Note that although the support 210A and the sensitive member 210B may actually be different, for simplicity of illustration, the support 210A and the sensitive member 210B are shown to have the same size.

[0104] 7(a) and 7(b), when tensile stress is applied to the sensitivity member 210B, the resistance value increases, and when compressive stress is applied, the resistance value decreases. In the bending sensor 210, the increase in resistance value due to tensile stress has a larger rate of change in resistance value for the same radius of curvature (higher sensitivity) than the decrease in resistance value due to compressive stress. In other words, the collision detection sensitivity differs depending on whether the stress acting on the sensitivity member 210B is tensile stress or compressive stress.

[0105] FIG. 8 is a diagram showing an example of the arrangement of collision detection sensors according to the third modification, and FIG. 9 is a diagram showing an example for comparison with the third modification.

[0106] 9, when bending sensor 210 is attached substantially parallel to the direction of movement of moving object 200, it is difficult to determine in which direction bending sensor 210 will bend when it collides with obstacle 300. When bending in the direction of reference symbol 210-1, compressive stress acts on sensitivity member 210B, and when bending in the direction of reference symbol 210-2, tensile stress acts. This makes the sensitivity of bending sensor 210 unstable, making it difficult to set a threshold value for the amount of change in the amount of bending.

[0107] Therefore, as shown in Fig. 8, the mounting angle of bending sensor 210 is tilted (offset) with respect to the direction of movement of moving body 200 so that support body 210A is closer to moving body 200 and sensitivity member 210B is closer to obstacle 300. By using the arrangement shown in Fig. 8, when bending sensor 210 collides with obstacle 300, a tensile stress can be applied to sensitivity member 210B, so that the sensitivity of bending sensor 210 to detect a collision can be fixed at a high level.

[0108] [Variation 4] FIG. 10 is a diagram showing an example of the arrangement of collision detection sensors according to the fourth modification, and FIG. 11 is a diagram showing an example for comparison with the fourth modification.

[0109] The collision detection sensor 202 according to the fourth modification is formed in a planar shape. In the example shown in Fig. 10, the collision detection sensor 202 has a substantially rectangular shape, but the shape is not limited to this.

[0110] As shown in Fig. 11(a), the flat collision detection sensor 202 described above is prone to deformation (deflection) due to gravity (its own weight) when the direction of gravity is approximately perpendicular to the plane of the collision detection sensor 202. Also, as shown in Fig. 11(b), when the collision detection sensor 202 is cylindrical (rod), deflection due to gravity can occur, similar to the example of Fig. 11(a). When such deflection due to gravity occurs, the sensitivity of the collision detection sensor 202 to detect bending decreases, and the accuracy of collision detection deteriorates.

[0111] Therefore, in the fourth modification, the collision detection sensor 202 is attached so that the direction of gravity is approximately parallel to the plane of the collision detection sensor 202. This makes it possible to suppress the occurrence of deflection due to gravity, and therefore maintain high sensitivity in collision detection.

[0112] [Variation 5] FIG. 12 is a diagram showing an example of the arrangement of collision detection sensors according to the fifth modification.

[0113] As shown in FIG. 12, a collision detection sensor 202 according to the fifth modification has a tip 202E2 fixed to a sensor base 202C of a moving body 200, and has a loop shape as a whole.

[0114] In the fifth modification, the tip portion 202E2 of the collision detection sensor 202 is fixed, so that the rigidity of the collision detection sensor 202 can be increased.

[0115] If the collision detection sensor 202 is bent due to the influence of wind from outside the measuring device 1 or wind generated by the movement of the moving object 200, a change in resistance occurs without a collision, and a false collision signal may be generated. According to the fifth modification, the generation of such false collision signals can be suppressed. Therefore, it is possible to suppress the occurrence of stoppages of the measuring device 1 due to false collision signals, thereby improving the operating rate of the measuring device 1.

[0116] 13, for example, the tip 202E2 of the collision detection sensor 202 may be fixed to a sensor fixing portion 202D protruding from the moving body 200. Here, the sensor fixing portion 202D may be formed of, for example, a member having rigidity equal to or greater than that of the collision detection sensor 202 (for example, a member made of the same material as the support body of the collision detection sensor 202 and having a thickness equal to or greater than that of the support body).

[0117] In the example shown in Figures 12 and 13, the position of the tip 202E2 of the collision detection sensor 202 in the Z direction (direction of gravity) is shifted downward relative to the base end 202E1, but the Z direction positions of the base end 202E1 and the tip 202E2 may be the same or may be reversed.

[0118] Also, a combination of Modifications 4 and 5 is conceivable. For example, the collision detection sensor 202 is attached so that both or one of the planar base end 202E1 and tip end 202E2 is approximately parallel to the direction of gravity. This makes it possible to suppress both deflection due to gravity (its own weight) and the generation of false collision signals.

[0119] [Variation 6] In the above embodiment, when the movement of the detector 10 is stopped following the detection of a collision with an obstacle, the user can be notified of the occurrence of an abnormality by image or audio output via the output unit 112 (user interface for notification) (step S24 in FIG. 2 and step S60 in FIG. 3). By notifying the user in this way, the user can immediately know the reason for the stop of the measuring device 1, which allows the measuring device 1 to be quickly restored and the operating rate to be improved.

[0120] The notification to the user is not limited to the above, and the user may be notified of events other than the occurrence of an abnormality.

[0121] Fig. 14 is a diagram showing an example of a notification display. In the example shown in Fig. 14, when the determination unit 104 detects a change in the amount of bending in the collision detection sensors (80, 80A, 82, 82A, 82B, 202), it only notifies the user (changing the display from "no traffic light" to "traffic light present") and does not output a movement stop command until the amount of change in the amount of bending reaches a threshold value (for example, the threshold value in step S20 of Fig. 2 and step S54 of Fig. 3). Then, when the threshold value is reached, the determination unit 104 outputs a movement stop command and notifies the user accordingly ("collision detected").

[0122] According to the example shown in FIG. 14, when the detector 10 approaches an obstacle, it is possible to warn the user, thereby improving operability.

[0123] Furthermore, by changing the color, size, sound frequency or volume, etc. of the screen display depending on the amount of change in the bending of the collision detection sensor (80, 80A, 82, 82A, 82B, 202), it is possible to notify the user of information regarding the magnitude of the collision risk, thereby contributing to more efficient driving.

[0124] [Variation 7] In Modification 7, an example will be described in which detection signals from multiple collision detection sensors (80, 80A, 82, 82A, 82B, 202) are connected. In the collision detection sensors (80, 80A, 82, 82A, 82B, 202), the resistance value changes depending on the amount of bending, so by connecting them in series and parallel, it is possible to detect a change in the amount of bending in any of the collision detection sensors (80, 80A, 82, 82A, 82B, 202). According to Modification 7, in the bending amount measurement unit 102, a single readout circuit can read out changes in the amount of bending in multiple collision detection sensors (80, 80A, 82, 82A, 82B, 202), making it possible to perform collision detection at multiple locations at low cost.

[0125] Fig. 15 is a diagram showing an example in which the detection signals from the collision detection sensors are connected in series, and Fig. 16 is a diagram showing an example in which the detection signals from the collision detection sensors are connected in parallel. In Fig. 15 and Fig. 16, the detection signals indicating the amount of change in resistance value in the four collision detection sensors (80, 80A, 82, 82A, 82B, 202) are shown as R1 to R4.

[0126] For the sake of simplicity, let us assume that R1 = R2 = R3 = R4 = Rc. When R1 changes to 2Rc (doubles) and when R1 changes to Rc / 2 (halves), the change in the combined resistance is as shown in Table 1.

[0127] [Table 1] The values ​​in parentheses in Table 1 indicate the ratio (percentage) of the amount of change to the value (original value) before the change in the amount of bending occurred.

[0128] From Table 1, it can be seen that if the resistance value increases when the collision detection sensors (80, 80A, 82, 82A, 82B, 202) are bent, then a series connection provides higher sensitivity. On the other hand, if the resistance value decreases when the collision detection sensors (80, 80A, 82, 82A, 82B, 202) are bent (for example, when compressive strain is applied to the bending sensor 210, see FIG. 7(b)), then a parallel connection provides higher sensitivity.

[0129] Therefore, when a bending sensor 210 that is highly sensitive to tensile stress is used as the collision detection sensor (80, 80A, 82, 82A, 82B, 202) (see (a) of Figure 7), highly sensitive collision detection can be achieved by adopting an arrangement in which tensile stress acts on the sensitivity member 210B of the bending sensor 210 and connecting them in series, as shown in Figure 8.

[0130] [Variation 8] In the first embodiment and the like, the collision detection sensors (80, 80A, 82, 82A, 82B, 202) are installed in the detector 10 of the contact-type measuring device (1, 1A, 1B), but this is not limiting. In the contact-type measuring device (1, 1A, 1B), for example, the collision detection sensors (80, 80A, 82, 82A, 82B, 202) can be installed in any location other than the part (oscillating part 18) that oscillates upon contact with the measurement object W.

[0131] In the contact-type measuring device (1, 1A, 1B), the swinging part 18 swings, and the shape is measured by detecting the amount of swing. Therefore, it is normal for an object to come into contact with the swinging part 18. Therefore, if a collision detection sensor (80, 80A, 82, 82A, 82B, 202) is installed on the swinging part 18, it will interfere with normal measurement due to overdetection of collisions, etc. Furthermore, installing the collision detection sensor (80, 80A, 82, 82A, 82B, 202) on the swinging part 18 will change the mass of the swinging part 18, and wiring for reading out signals from the collision detection sensor (80, 80A, 82, 82A, 82B, 202) will cause adverse effects on measurement accuracy due to factors such as a reaction force.

[0132] Therefore, by installing the collision detection sensors (80, 80A, 82, 82A, 82B, 202) at any location other than the swinging part 18, it is possible to prevent collisions while minimizing adverse effects on shape measurement accuracy.

[0133] [Variation 9] FIG. 17 is a diagram showing a collision detection sensor according to the ninth modification.

[0134] As shown in FIG. 17, a collision detection sensor 202 according to the ninth modification has a contact portion 204 attached to a tip portion 202E2.

[0135] The shape of the contact portion 204 is not particularly limited. The contact portion 204 may be a spherical shape as shown in FIG. 17, or may be any of a hemispherical shape (204A), a cylindrical or cylindrical shape (204B), or a rectangular parallelepiped shape (204C) as shown in FIG. 18. Note that the contact portion 204 may be shaped (for example, a sphere, hemisphere, curved surface, cylindrical or cylindrical shape, etc.) with a large radius of curvature on the obstacle 300 side (the side opposite to the moving body 200 side) in order to suppress stress concentration. This makes it possible to suppress damage to the obstacle 300.

[0136] Moreover, by adjusting (for example, increasing) the size of the contact portion 204, it is also possible to widen the detection range of the obstacle 300.

[0137] The material of the contact portion 204 is not particularly limited, but for example, a flexible buffer material (e.g., rubber) can be used. By using a buffer material as the contact portion 204, damage to the obstacle 300 can be suppressed.

[0138] It is preferable to select a material for the contact portion 204 that is not easily slippery in relation to the obstacle 300 (including the measurement object W), for example, a material whose coefficient of friction (static coefficient of friction) with the obstacle 300 is equal to or greater than a predetermined value. As shown in FIG. 19(b), if the coefficient of friction between the contact portion 204 and the obstacle 300 is small, the contact portion 204 may slip on the surface of the obstacle 300. In this case, the radius of curvature R slip is the radius of curvature R when there is no slippage as shown in Figure 19(a). fix Therefore, it is preferable to use a material with a large coefficient of friction for the contact portion 204.

[0139] Next, the contact portion 204 may be provided offset from the central axis in the longitudinal direction of the collision detection sensor 202. This makes it possible to identify the direction in which the collision detection sensor 202 bends (see Modification 3).

[0140] For example, bending sensor 210 is more sensitive to tensile strain than to compressive strain. For this reason, as shown in Fig. 20, contact portion 204 is attached so that center 204o of contact portion 204 is located on the support 210A side with respect to longitudinal central axis 210AX. This allows tensile stress to act on sensitivity member 210B of bending sensor 210, thereby increasing the sensitivity of bending sensor 210.

[0141] It is also possible to tilt the bending sensor 210 as in the third modification without offsetting the contact portion 204, or to combine tilting the bending sensor 210 and offsetting the contact portion 204.

[0142] 20, contact portion 204 is offset, but this is not limiting. For example, as shown in FIG. 21, tip portion 210E of support 210A of bending sensor 210 may be rounded toward support 210A and used as a substitute for contact portion 204.

[0143] [Second embodiment] In the first embodiment, the contact type measuring device (1, 1A, 1B) has been described, but the movement of a moving body can also be controlled in a non-contact type measuring device.

[0144] Fig. 22 is a diagram showing a non-contact type measuring device. Note that Fig. 22 omits some of the components such as the moving mechanism of the detector 10C and the stage on which the measurement target W is placed. The device control unit 100 is also omitted from the illustration because it is the same as in the first embodiment.

[0145] The non-contact measuring device 1C is a device (e.g., a white light interference microscope, see JP 2020-148894 A) that measures the shape, roughness, contour, etc. of the surface of the measurement object W by irradiating the surface of the measurement object W with measurement light LB and detecting the reflected light of the measurement light LB with a light receiving element (e.g., a CCD (Charge Coupled Device) or the like). Note that the measuring device 1C may be, for example, an interface detection device for detecting the interface of the measurement object W, or a crack detection device for detecting cracks formed in the measurement object W (e.g., see JP 2020-076651 A).

[0146] The detector 10C of the measurement device 1C includes, for example, a projection optical system for the measurement light LB, a light-receiving optical system for the reflected light, and a light-receiving element. In the detector 10C, the projection optical system and the light-receiving optical system determine the range (measurable range) in which the measurement object W can be measured. In Fig. 22, the limit of the measurable range that is closer to the detector 10C (near end) is designated as NE, and the limit on the far side (far end) is designated as FE.

[0147] The measuring device 1C is provided with a movement mechanism for adjusting the relative position between the detector 10C and the measurement object W so that the measurement object W falls within the measurable range of the detector 10C. The movement mechanism adjusts the relative position between the detector 10C and the measurement object W by moving at least one of the detector 10C and the measurement object W (stage).

[0148] In the case of a contact-type detector 10 (see FIG. 1), the movement of the detector 10 can be stopped by utilizing a detection signal obtained when the tip of the stylus 12 abuts against the measurement object W.

[0149] In contrast, in the case of the non-contact detector 10C, there are cases where the object to be measured W cannot be detected, for example, because the reflectance of the surface of the object to be measured W is extremely low. In such cases, the detector 10C and the object to be measured W may collide with each other.

[0150] In this embodiment, a collision detection sensor 90 is attached to the detector 10C, thereby making it possible to avoid collision between the detector 10C and the measurement object W. The rigidity, shape, arrangement, and material of the collision detection sensor 90, as well as the formation of the contact portion 204 or its substitute, are the same as those in the first embodiment and Modifications 1 to 9, and therefore description thereof will be omitted. Note that when the collision detection sensor 90 is tilted with respect to the direction of movement of the detector 10C (see Modification 3), the collision detection sensor 90 is positioned so as not to overlap with the optical paths of the measurement light LB and the reflected light.

[0151] The collision detection sensor 90 according to this embodiment is adjusted so that its tip (-Z end) 90E is closer to the far end FE of the measurable range. Specifically, it is preferable that the tip 90E of the collision detection sensor 90 be located near the near end NE. Alternatively, the position of the tip 90E when the detection signal from the collision detection sensor 90 exceeds a threshold may be near the near end NE. This prevents the detector 10C from approaching the measurement object W beyond the near end NE of the measurable range.

[0152] According to this embodiment, when adjusting the relative positions of the non-contact detector 10C and the measurement object W (such as when preparing for measurement), it is possible to avoid collision between the detector 10C and the measurement object W due to the detector 10C being too close.

[0153] In this embodiment, for example, the detector 10C and the measurement object W may be moved closer to each other to cause the measurement object W to collide with the collision detection sensor 90, and the detector 10C and the measurement object W may be moved away from the positions at the time of collision detection. This can shorten the time required for measurement preparation.

[0154] By positioning the tip 90E of the collision detection sensor 90 near the near end NE, the limitations on the measurable range of the collision detection sensor 90 can be reduced, allowing the measurable range to be used effectively.

[0155] [Application example] The movement control according to each of the above embodiments can be applied to devices in general that include moving objects.

[0156] FIG. 23 is a perspective view showing a moving body according to an application example of the present invention, and FIG. 24 is a perspective view showing a collision detection sensor according to an application example of the present invention.

[0157] 23 includes a main body 502 and wheels 504 as a moving mechanism. The moving body 500 may be moved by power (for example, electricity) or may be moved manually.

[0158] A sensor unit 510 is attached to a main body 502 of the moving body 500. The sensor unit 510 includes a collision detection sensor 512 and an attachment base 514.

[0159] The collision detection sensor 512 is similar to the collision detection sensors according to the above-described embodiment and modifications 1 to 9.

[0160] The mounting base 514 is a device for mounting the collision detection sensor 512 to the movable body 502, and includes, for example, a magnet. This allows the collision detection sensor 512 to be mounted at any position when the movable body 502 is made of a magnetic material. Note that the mounting base 514 is not limited to one that uses magnetic force, and may include, for example, a clamp mechanism or a suction cup.

[0161] 23, the bending sensitivity direction of the collision detection sensor 512 is approximately parallel to the direction of movement of the moving body 500, but this embodiment is not limited to this. The above-described embodiments and modified examples 1 to 9 can be applied to the rigidity, shape, arrangement, and material of the collision detection sensor 512, the formation of the contact portion 204 or a substitute therefor, and the like.

[0162] In this embodiment as well, the influence of the collision of the moving body 500 with the obstacle 600 can be suppressed. [Explanation of symbols]

[0163] 1, 1A, 1B, 1C... Measuring device, 10, 10C... Detector, 12... Stylus, 14... Stylus unit, 16... Arm unit, 18... Swing unit, 20... Swing axis, 22... Scale, 24... Scale head, 26... Detector housing, 50... Measurement object installation unit, 52... Column, 52M... Actuator (motor), 54... Carriage, 54M... Actuator (motor), 56... Scale, 80, 80A, 82, 82A, 82B, 90... Collision detection sensor, 100... Device control unit, 102... Bending amount measurement unit, 104... Determination unit, 106... Bending amount storage unit, 108... drive command unit, 110... input unit, 112... output unit, W... measurement object, 200... moving body, 202... collision detection sensor, 202C... sensor base, 202D... sensor fixing portion, 202E1... base end portion, 202E2... tip end portion, 204, 204A, 204B, 204C... contact portion, 210... bending sensor, 210A... support, 210B... sensitivity member, 300... obstacle, 500... moving body, 502... moving body main body, 504... wheel, 510... sensor unit, 512... collision detection sensor, 514... mounting base, 600... obstacle

Claims

1. a moving body that moves relatively within the measuring device; a collision detection sensor attached to the moving body and having a lower rigidity than the moving body; a device control unit that detects the amount of bending of the collision detection sensor and controls the movement of the moving body in accordance with the amount of bending; A measuring device comprising:

2. The measuring device according to claim 1 , wherein the collision detection sensor has a lower rigidity than an obstacle or a measurement object in a direction of movement of the moving body.

3. A plurality of the collision detection sensors are provided, 2. The measuring device according to claim 1, wherein said device control section shares a common circuit for reading out the amount of bending of said plurality of collision detection sensors.

4. The collision detection sensor is attached to each of the moving axes of the moving body, The measuring device according to claim 1 , wherein the device control unit includes a circuit for reading out the amount of bending of the collision detection sensor for each of the movement axes.

5. 2. The measuring device according to claim 1, wherein the collision detection sensor is attached in a direction in which a bending sensitivity direction of the collision detection sensor is substantially perpendicular to a direction of movement of the moving body.

6. The collision detection sensor includes a support and a sensitive member formed on the support, the sensitivity member has a resistance value change rate due to tensile stress greater than a resistance value change rate due to compressive stress, 2. The measuring device according to claim 1, wherein the collision detection sensor is mounted at an angle such that the support is closer to the moving body.

7. 2. The measuring device according to claim 1, wherein the collision detection sensor is formed in a planar shape and is attached so that the plane of the collision detection sensor is approximately parallel to the direction of gravity.

8. The measuring device according to claim 1 , wherein a tip of the collision detection sensor is fixed to the moving body.

9. The measuring device according to claim 1 , further comprising an output unit that notifies a result of detection of the amount of bending of the moving body.

10. a plurality of collision detection sensors each having an increased resistance value when bent; 2. The measuring device according to claim 1, wherein the device control unit includes a readout circuit that connects detection signals from the plurality of collision detection sensors in series and reads them out.

11. a plurality of collision detection sensors each having a resistance value that decreases when bent; 2. The measuring device according to claim 1, wherein the device control unit includes a readout circuit that connects detection signals from the plurality of collision detection sensors in parallel and reads them out.

12. The measuring device according to claim 1 , further comprising a contact portion attached to a tip of the collision detection sensor.

13. The measuring device according to claim 12 , wherein the contact portion has a curved surface on a side opposite to the moving body.

14. The measuring device according to claim 12 , wherein the contact portion is formed of a material that is not slippery in relation to an obstacle to the moving body.

15. The measuring device according to claim 12 , wherein the contact portion is provided offset from a central axis of the collision detection sensor in a longitudinal direction.

16. The measuring device according to claim 12 , wherein the contact portion is flexible.

17. the movable body includes a contact detector that detects the amount of swing of the swinging part to measure the object to be measured, The measuring device according to claim 1 , wherein the collision detection sensor is attached to a part other than the swinging part.

18. the moving body includes a non-contact detector, 17. The measuring device according to claim 1, wherein the collision detection sensor is attached so that a tip thereof is located closer to the proximal end of the measurable range of the non-contact detector than to a far end of the measurable range of the non-contact detector.

19. a step of detecting a bending amount of a collision detection sensor attached to a moving body included in the measurement device and having a lower rigidity than the moving body; controlling the movement of the moving body in accordance with the amount of bending; A method for controlling a moving object comprising:

Images