Measurement device and mobile body control method

Abstract

To provide a measurement device and a mobile body control method, which enable suppression of troubles associated with movement of a mobile vehicle.SOLUTION: A method of controlling a mobile body (10, 10C, 200, 500) is provided, the method comprising the steps of: detecting amounts of curvature of collision detection sensors (80, 80A, 82, 82A, 82B, 90, 202, 512) that are less rigid than the mobile body and installed on the mobile body included in a measurement device (1, 1A, 1B, 1C), each collision detection sensor having a sensor part (204) that is deformed and held in an arc shape; and controlling movement of the mobile body according to the amounts of curvature.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a measuring device and a method for controlling a moving object, and more particularly to a technique for preventing a moving object from colliding with another object. [Background technology]

[0002] When a device equipped with a moving body moves, the moving body may come into contact with (collide with) an obstacle within its range of movement. For example, measuring machines such as roughness measuring machines, contour measuring machines, roundness measuring machines, coordinate measuring machines, and optical shape measuring machines are equipped with a detector (probe head), carriage, column, or the like as a moving body. As such a moving body moves, an unintended part may collide with an obstacle (including, for example, the object to be measured), which may cause the measuring machine to malfunction or reduce its accuracy. Furthermore, when the moving body collides with the object to be measured, the object may be damaged.

[0003] Patent document 1 discloses a collision prevention device that uses a distortion detection sensor to detect distortion that occurs in a housing that covers a device to be moved, and stops the moving means when the distortion detected by the distortion detection sensor exceeds a predetermined value. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2008-122222 Summary of the Invention [Problem to be solved by the invention]

[0005] The collision prevention device described in Patent Document 1 is based on the premise that the housing covering the device to be moved will collide with an obstacle, causing distortion in the housing, and does not prevent collisions that could cause breakdowns or reduced accuracy of the measuring device as described above. Furthermore, collisions with the housing could damage the object to be measured.

[0006] The present invention has been made in view of the above circumstances, and has an object to provide a measuring device and a method for controlling a moving body that can suppress the occurrence of problems that accompany the movement of a moving body. [Means for solving the problem]

[0007] A measuring device according to a first aspect of the present invention comprises a moving body that moves relative to the moving body within the measuring device, a collision detection sensor attached to the moving body, the collision detection sensor having a sensor unit that is held by being deformed into an arc shape and has lower rigidity than the moving body, and a device control unit that detects the amount of bending of the collision detection sensor and controls the movement of the moving body in accordance with the amount of bending.

[0008] A second aspect of the present invention provides a measuring device according to the first aspect, wherein the collision detection sensor has lower rigidity than an obstacle or a measurement object in the moving direction of the moving body.

[0009] A third aspect of the present invention relates to the measurement device of the first or second aspect, wherein the collision detection sensor includes a chord member that holds the sensor portion in a state where the sensor portion is deformed into an arc shape.

[0010] A fourth aspect of the present invention relates to the measuring device of the first or second aspect, wherein the collision detection sensor includes a film member that is laminated on the sensor portion and holds the sensor portion in an arc-shaped deformed state.

[0011] A measuring device according to a fifth aspect of the present invention is the measuring device of any one of the first to fourth aspects, which includes a plurality of collision detection sensors, and the device control unit shares a circuit for reading out the amount of bending of the plurality of collision detection sensors.

[0012] A sixth aspect of the present invention is a measuring device according to any one of the first to fourth aspects, in which a collision detection sensor is attached to each axis of movement of the moving body, and the device control unit includes a circuit for reading out the amount of bending of the collision detection sensor for each axis of movement.

[0013] A seventh aspect of the present invention is a measuring device in any of the first to sixth aspects, wherein the sensor unit includes a support and a sensitivity member formed on the support, and the sensitivity member is formed so that the rate of change in resistance value due to tensile stress is greater than the rate of change in resistance value due to compressive stress, and so that tensile stress acts when bent.

[0014] The measurement device according to an eighth aspect of the present invention is the measurement device according to any one of the first to seventh aspects, further comprising an output section that notifies the result of detection of the amount of bending of the moving object.

[0015] A measuring device according to a ninth aspect of the present invention is any of the first to eighth aspects, and includes a plurality of collision detection sensors whose resistance value increases when bent, and the device control unit includes a readout circuit that connects the detection signals from the plurality of collision detection sensors in series and reads them out.

[0016] A measuring device according to a tenth aspect of the present invention is any of the first to eighth aspects, and includes a plurality of collision detection sensors whose resistance value decreases when bent, and the device control unit includes a readout circuit that connects the detection signals from the plurality of collision detection sensors in parallel and reads them out.

[0017] The measurement device according to an eleventh aspect of the present invention is the measurement device according to any one of the first to tenth aspects, further comprising a contact portion attached to the tip of the collision detection sensor.

[0018] A twelfth aspect of the present invention is the measurement device of the eleventh aspect, wherein the contact portion has a curved shape on the side opposite to the moving body.

[0019] A thirteenth aspect of the present invention relates to the measuring device of the eleventh or twelfth aspect, wherein the contact portion is formed of a material that is not slippery in relation to an obstacle to the moving body.

[0020] A measuring device according to a fourteenth aspect of the present invention is the measuring device according to any one of the eleventh to thirteenth aspects, wherein the contact portion is flexible.

[0021] A measuring device according to a 15th aspect of the present invention is any of the first to fourteenth aspects, in which the movable body includes a contact detector that detects the amount of oscillation of the oscillating part and measures the object to be measured, and the collision detection sensor is attached to a part other than the oscillating part.

[0022] A measuring device according to a 16th aspect of the present invention is any of the first to fourteenth aspects, in which the moving body includes a non-contact detector, and the collision detection sensor is attached so that its tip is located closer to the proximal end of the measurable range of the non-contact detector.

[0023] A method for controlling a moving body according to a seventeenth aspect of the present invention includes a step of detecting the amount of bending of a collision detection sensor attached to a moving body included in a measuring device, the collision detection sensor having a sensor portion that is deformed and held in an arc shape and has lower rigidity than the moving body, and a step of controlling the movement of the moving body according to the amount of bending. [Effects of the Invention]

[0024] According to the present invention, by attaching a collision detection sensor having a sensor portion that is held while being deformed into an arc shape to a moving body, it is possible to suppress the occurrence of problems that occur when the moving body moves. [Brief explanation of the drawings]

[0025] [Figure 1] 1 is a diagram showing a measurement device according to a first embodiment of the present invention. [Figure 2] FIG. 2 is a diagram illustrating a collision detection sensor. [Figure 3] 10 is a graph showing the change over time in the amount of bending of the collision detection sensor. [Figure 4] FIG. 3 is a diagram illustrating a comparative example of the collision detection sensor illustrated in FIG. 2. [Figure 5] 10 is a graph showing the change over time in the amount of bending in a comparative example. [Figure 6] 1A and 1B are diagrams illustrating examples of string members. [Figure 7] 1A and 1B are diagrams illustrating examples of string members. [Figure 8] 10A and 10B are diagrams for explaining the relationship between the direction in which an obstacle collides and the bending direction of a collision detection sensor. [Figure 9] 10A and 10B are diagrams for explaining the relationship between the direction in which an obstacle collides and the bending direction of a collision detection sensor. [Figure 10] 10 is a graph showing the change in the amount of bending over time. [Figure 11] 10 is a graph showing the sensitivity of a bending sensor. [Figure 12] 10A and 10B are diagrams showing an example of processing of a sensor part according to Modification 1. FIG. [Figure 13] 10A and 10B are diagrams showing a processing example (another example) of the sensor part according to the first modification. [Figure 14] FIG. 10 is a diagram showing a measurement device according to a second modification. [Figure 15] FIG. 10 is a diagram showing an example in which collision detection sensors are arranged in accordance with the shape of a measurement object. [Figure 16] FIG. 10 is a diagram illustrating an example of a notification display. [Figure 17] FIG. 10 is a diagram illustrating an example in which detection signals from collision detection sensors are connected in series. [Figure 18] FIG. 10 is a diagram illustrating an example in which detection signals from collision detection sensors are connected in parallel. [Figure 19] FIG. 13 is a diagram showing a collision detection sensor according to a sixth modification. [Figure 20] 13 is a diagram showing an example of the shape of a collision detection sensor according to Modification 6. FIG. [Figure 21] 13 is a diagram showing a state in which a contact portion of a collision detection sensor according to Modification 6 comes into contact with an obstacle. FIG. [Figure 22] FIG. 4 is a diagram showing a measurement device according to a second embodiment of the present invention. [Figure 23] FIG. 1 is a perspective view showing a moving body according to an application example of the present invention. [Figure 24] FIG. 1 is a perspective view showing a collision detection sensor according to an application example of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0026] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

[0027] [First embodiment] In this embodiment, an example will be described in which a detector (probe head) of a contact-type measuring device is a moving body.

[0028] (Outline of the measuring device) 1 is a diagram showing a measurement device according to a first embodiment of the present invention. In the following description, a three-dimensional Cartesian coordinate system is used in which the XY plane is the horizontal plane and the Z direction is the vertical direction (perpendicular direction).

[0029] The measuring device 1 is a device for measuring the shape, roughness, contour, etc. of the surface of a measuring object W placed on a measuring object placement section (hereinafter referred to as a stage) 50 using a detector 10. As shown in FIG. 1, the measuring object W is placed on the surface of the stage 50.

[0030] As shown in FIG. 1, the stage 50 has a surface (a surface on which the measurement object W is placed) The stage 50 is arranged parallel to the XY plane. A column (Z-axis) 52 extending approximately perpendicular to the surface of the stage 50 is installed on the stage 50. A carriage (X-axis) 54 is attached to the column 52, and the carriage 54 can be moved in the Z direction along the column 52 by an actuator (for example, a motor) 52M. The column 52 may be provided with a scale for detecting the position of the carriage 54 in the Z direction.

[0031] The detector 10 is attached to the carriage 54, and the detector 10 is movable in the X direction relative to the carriage 54 by an actuator (e.g., a motor) 54M. A scale 56 for detecting the X-direction position of the detector 10 is attached to the carriage 54. The scale 56 is, for example, a linear scale (linear position scale) with scale graduations formed along its length.

[0032] In this embodiment, the detector 10 is movable relative to the column 52, but the present invention is not limited to this. For example, the column 52 may be movable along the X direction relative to the stage 50. Furthermore, the detector 10 may be movable relative to the measurement object W placed on the stage 50 not only in the X direction but also in the Y direction.

[0033] Furthermore, the stage 50 may be movable along the X, Y, or Z direction relative to the column 52. Therefore, the movable body according to this embodiment is not limited to an example in which the detector 10 as the movable body moves relative to the measurement object W. The movable body according to this embodiment also includes a case in which the measurement object W moves relative to the detector 10, that is, a detector 10 that moves relatively to the measurement object W.

[0034] As shown in FIG. 1, the detector 10 includes a stylus portion 14, an arm portion 16, a swing shaft 20, a scale 22, and a scale head 24.

[0035] The stylus part 14 is fixed so as to be approximately in line with the arm part 16, and the stylus part 14 and the arm part 16 are attached to the detector housing 26 so as to be able to swing integrally around the swing axis 20. The attachment angle of the detector 10 to the carriage 54 is adjusted so that the swing axis 20 is approximately parallel to the XY plane. Hereinafter, the stylus part 14 attached to the arm part 16 will also be referred to as the swing part 18.

[0036] The configuration of the oscillating portion 18 is not limited to the substantially linear example shown in FIG. 1, but may be such that, for example, the stylus portion 14 or the arm portion 16 has an L-shaped bent portion, and the stylus portion 14 and the arm portion 16 are attached so as to be substantially parallel to each other.

[0037] A stylus 12 is provided at the tip of the stylus unit 14. The stylus 12 extends downward (in the -Z direction) in the figure. When the stylus 12 is brought into contact with the surface of the measurement object W placed on the stage 50 with a predetermined pressure, the oscillating unit 18 oscillates around the oscillating axis 20 according to the height and unevenness of the surface of the measurement object W at the contact position.

[0038] The configuration of the stylus unit 14 is not limited to the example shown in Fig. 1. For example, the stylus unit 14 may be a T-shaped stylus with styluses provided in the vertical direction in the figure, or an L-shaped stylus with a stylus that protrudes downward in the figure longer than in the example shown in Fig. 1.

[0039] A scale 22 is fixed to the detector housing 26 so as to face the base end of the arm portion 16 .

[0040] The scale 22 is, for example, a linear scale (linear position scale). A scale graduation is formed along the length of the scale 22. The scale 22 is attached so that its length direction (displacement detection direction) is approximately perpendicular to the length direction of the swinging portion 18.

[0041] The scale head 24 is fixed to the base end of the arm portion 16 and is capable of swinging integrally with the swinging portion 18, and is a device that reads the scale (hereinafter referred to as the indicated value) at the opposite position of the scale 22 fixed to the detector housing 26. The type of the scale head 24 is not particularly limited, but the scale head 24 may be, for example, a photoelectric sensor for reading the scale 22 or a non-contact sensor equipped with an imaging element and an illumination light source (for example, an LED (Light-Emitting Diode)).

[0042] The reading of the scale 22 read by the scale head 24 is output to the device control unit 100 .

[0043] The device control unit 100 controls the actuators 52M and 54M provided on the column 52 and carriage 54 to move the measurement object W and the stylus 12 of the measuring device 1 relative to each other, while obtaining readings of the graduations on the scale 22 for each position on the surface of the measurement object W. This makes it possible to measure the shape, roughness, contour, etc. of the surface of the measurement object W.

[0044] In this embodiment, the scale 22 is fixed to the detector housing 26, and the scale head 24 is fixed to the base end of the arm section 16, but the present invention is not limited to this. For example, the scale head 24 may be fixed to the detector housing 26, and the scale 22 may be fixed to the base end of the arm section 16. Furthermore, the scale 22 is not limited to a linear scale, and may be, for example, an arc scale (angle scale) formed in an arc shape along the swing direction of the arm section 16.

[0045] As shown in FIG. 1, an input unit 110 and an output unit 112 are connected to the device control unit 100.

[0046] The device control unit 100 includes at least one processor (e.g., a central processing unit (CPU), a micro-processing unit (MPU), a field-programmable gate array (FPGA), or an application-specific circuit (ASIC)) for controlling each unit of the measuring device 1, and at least one memory (e.g., a read-only memory (ROM), a random access memory (RAM), a hard disk drive (HDD), or a solid-state drive (SSD)). The memory of the device control unit 100 stores computer program code, and the memory and the computer program code, in combination with the processor, enable the measuring device 1 to measure the shape, roughness, contour, etc. of the surface of the measurement object W. The memory and the computer program code, in combination with the processor, also enable the bending amount measurement unit 102, the determination unit 104, the bending amount storage unit 106, and the drive command unit 108 of the device control unit 100, thereby enabling movement control of the detector 10 in the measuring device 1.

[0047] The input unit 110 is a device for receiving operation input from a user, and includes, for example, a keyboard, a mouse, or a touch panel.

[0048] The output unit 112 is a device for outputting images, sounds, etc., and may be, for example, an LCD (Liquid Crystal Display). The output unit 112 displays, for example, a GUI (Graphical User Interface) for operating the measuring device 1, the device control unit 100, and the actuators 52M and 54M, as well as measurement results such as the shape, roughness, or contour of the surface of the measurement target W.

[0049] (Detector movement control) The detector 10 is equipped with collision detection sensors 80 and 82. In the example shown in FIG. In the example shown, collision detection sensor 80 is attached to the side of detector 10 and protrudes from the side of detector 10 in the -X direction alongside stylus part 14. On the other hand, collision detection sensor 82 is attached to the bottom surface of detector 10 and protrudes from the bottom surface of detector 10 in the -Z direction.

[0050] The bending amount measurement unit 102 detects the bending amount of the collision detection sensors 80 and 82 when measuring the measurement object W or when the detector 10 is moving. Here, the bending amount of the collision detection sensors 80 and 82 is detected as, for example, a resistance value or a change in the resistance value.

[0051] The determination unit 104 instructs the drive command unit 108 to continue or stop the movement of the detector 10 in response to a change in the amount of bending detected by the bending amount measurement unit 102. The bending amount storage unit 106 stores, for example, the amount of bending (initial bending amount) of each collision detection sensor 80 and 82 in a natural state when the collision detection sensors 80 and 82 are not colliding with another object, or a past measurement value (previous value) of the amount of bending, in the memory of the device control unit 100. The determination unit 104 then instructs the detector 10 to stop moving when the amount of bending of the collision detection sensor 80 or 82 detected by the bending amount measurement unit 102 has changed by a threshold or more from the initial bending amount or the previous value. Here, the determination unit 104 stops the movement of the detector 10 along all movement axes. It is also possible to stop movement only in the direction of movement corresponding to the collision detection sensor 80 or 82 whose change in the amount of bending has become equal to or greater than the threshold. On the other hand, if the amount of change in the amount of bending from the initial amount or the previous value is less than the threshold value, the movement of the detector 10 continues as is.

[0052] The drive command unit 108 controls the actuators 52M and 54M in accordance with an instruction from the determination unit 104 to continue or stop the movement of the detector 10.

[0053] In this embodiment, the collision detection sensors 80 and 82 are adjusted to have lower rigidity than each part of the measurement device 1 (for example, the housing of the detector 10, the stage 50, the column 52, and the carriage 54). Specifically, the material, size, thickness, length, etc. of each of the collision detection sensors 80 and 82 (for example, the material, size, thickness, length, etc. of the support 206, the sensitivity member 208, and the string member 210 described below) are adjusted so that the collision detection sensors 80 and 82 have lower rigidity than each part of the measurement device 1.

[0054] Specifically, the rigidity of the collision detection sensors 80 and 82 is made lower than that of the housing of the detector 10. As a result, when the collision detection sensor 80 or 82 collides with an obstacle, the stress caused by the collision is absorbed by the deformation of the collision detection sensor 80 or 82, so that the transmission of stress to the housing of the detector 10 can be suppressed.

[0055] Additionally, the rigidity of the collision detection sensors 80 and 82 is made lower than that of obstacles in their respective directions of movement. For example, the rigidity of the collision detection sensor 80 extending in the -X direction is made lower than that of the measurement object W, and the rigidity of the collision detection sensor 82 extending in the -Z direction is made lower than that of the stage 50 or the measurement object W. As a result, when the collision detection sensor 80 or 82 collides with an obstacle, the stress caused by the collision is absorbed by the deformation of the collision detection sensor 80 or 82, thereby suppressing the transmission of stress to the obstacle.

[0056] Here, the length and rigidity of the collision detection sensors 80 and 82 and the threshold value of the amount of change in the amount of bending may be set so that the movement of the detector 10 can be stopped while the stress caused by the collision is being absorbed by the deformation of the collision detection sensor 80 or 82. For example, the shorter the collision detection sensors 80 and 82 are, the shorter the time from the start of bending until the stress affects the housing of the detector 10 or an obstacle, so the threshold value of the amount of change in the amount of bending may be made smaller. Also, the higher the rigidity of the collision detection sensors 80 and 82 are, the shorter the time from the start of bending until the stress affects the housing of the detector 10 or an obstacle, so the threshold value of the amount of change in the amount of bending may be made smaller. The threshold value for the amount of change in bending may be reduced. Note that the relationship between the length and rigidity of the collision detection sensors 80 and 82 and the threshold value for the amount of change in bending is not limited to the example given above. This more reliably prevents stress caused by a collision from being transmitted to the housing of the detector 10 or an obstacle.

[0057] (Example of a collision detection sensor) 2 is a diagram (front view) showing the collision detection sensor. Note that since the collision detection sensors 80 and 82 attached to the detector 10 as a moving body can be made common, in the following explanation they are simply shown as a moving body 200 and a collision detection sensor 202.

[0058] The collision detection sensor 202 includes a sensor unit 204 and a string member 210. The sensor unit 204 is deformed into an arc shape, and both ends of the string member 210, which is shorter than the sensor unit 204 in an extended state, are fixed (by, for example, adhesive or welding) to both ends of the sensor unit 204. In this way, the string member 210 restrains both ends of the sensor unit 204 and bears the stress acting on the sensor unit 204, thereby maintaining the collision detection sensor 202 in a generally D-shape (bow shape) as a whole.

[0059] 2, the string member 210 restrains both ends of the sensor unit 204, but this is not limiting. For example, the string member 210 may be attached so as to restrain the sensor unit 204 at at least two points.

[0060] The sensor unit 204 includes a flexible support (substrate) 206 and a sensitive member (resistor) 208 formed on the support 206. The electrical resistance of the sensitive member 208 changes when it is bent due to a collision with an obstacle or the like. The bending amount measuring unit 102 detects the amount of bending by detecting this change in electrical resistance.

[0061] As described above, in the collision detection sensor 202, the material, size, thickness or length of the support 206, the sensitivity member 208 and the string member 210 are adjusted so that the rigidity is lower than that of obstacles in the direction of movement of the moving body 200 (for example, each part of the measuring device 1 (for example, the housing of the detector 10, the stage 50, the column 52 and the carriage 54, etc.) and the object to be measured W, etc.).

[0062] 2, the sensitivity member 208 is formed on the outside relative to the support member 206 and the string member 210, and is configured so that a tensile stress acts on the sensitivity member 208 when it is bent, but this is not limiting. For example, the sensitivity member 208 may be formed on the inside relative to the string member 210, and is configured so that a compressive stress acts on the sensitivity member 208 when it is bent.

[0063] For example, a metal or semiconductor strain gauge can be used as the sensor unit 204. Alternatively, a bending sensor (for example, a bending sensor BS series manufactured by Sensia Technology Co., Ltd.) can also be used as the sensor unit 204.

[0064] Here, the metal strain gauge has a metal thin film or wire as the sensitivity member 208 formed on an insulating support 206. When the sensitivity member 208 receives a force (tensile force) in the direction in which it expands, the sensitivity member 208 expands, reducing its cross-sectional area and increasing its resistance value. On the other hand, when the sensitivity member 208 receives a force (compressive force) in the direction in which it contracts, the sensitivity member 208 contracts, increasing its cross-sectional area and decreasing its resistance value.

[0065] If the resistance value changes from R by ΔR when a strain ε is applied to the sensitivity member 208, the following equation (1) holds true.

[0066] Ks=(ΔR / R) / ε (1) Here, the gauge factor Ks is a coefficient that represents the sensitivity of the strain gauge, and (ΔR / R) is the rate of change in resistance. Note that the strain ε and the gauge factor Ks are dimensionless quantities.

[0067] From equation (1), in the case of a metal strain gauge, when the gauge factor Ks is a constant, the rate of resistance change (ΔR / R) changes linearly with the strain ε. In this embodiment, the movement of the detector 10 is controlled by detecting the rate of resistance change (ΔR / R) with respect to the strain ε that occurs when the sensor unit 204 collides with an obstacle.

[0068] On the other hand, semiconductor strain gauges use a semiconductor (e.g., germanium or silicon) as the sensitive member 208, and measure the strain state by utilizing the change in electrical resistance (piezoresistive effect) when strain is applied to the semiconductor. Semiconductor strain gauges have the property of having a higher gauge factor and rate of resistance change than metal strain gauges.

[0069] In the case of metallic and semiconductor strain gauges, the direction of change (increase or decrease) in resistance is fixed according to the tension or compression acting on the sensitive member 208. When metallic and semiconductor strain gauges are used as the sensor unit 204, by attaching the sensor unit 204 so that the direction of change in resistance is along the direction of movement of the mobile object 200, it is possible to detect a collision with an obstacle.

[0070] The bending sensor is made by applying a sensitive member 208 (paint) made by mixing conductive particles (e.g., carbon particles, carbon black, particle size approximately 30 nm) with a binder resin (e.g., polyimide varnish) to a support 206 (e.g., a flexible insulating layer, flexible substrate, etc.). Here, the volume ratio of the conductive particles to the binder resin is, for example, 6:4. The carbon black can be, for example, #3030B manufactured by Mitsubishi Chemical Corporation, and the polyimide varnish can be, for example, IRP-1200 manufactured by Sanwa Chemical Co., Ltd.

[0071] The bending sensor described above has the property of being more sensitive than a strain gauge because the carbon particles contained in the sensitive member 208 change between contact and non-contact as the sensor deforms. By using a highly sensitive bending sensor, the effects of collisions with obstacles can be more reliably suppressed.

[0072] Fig. 3 is a graph showing the change over time in the amount of bending of the collision detection sensor 202. Fig. 4 is a diagram showing a comparative example to the collision detection sensor 202 shown in Fig. 2, and Fig. 5 is a graph showing the change over time in the amount of bending in the comparative example. The horizontal axis in Figs. 3 and 5 represents time, and the vertical axis represents the radius of curvature R when the sensor unit 204 is approximated as an arc. As shown in Fig. 2, the amount of bending (initial value) of the sensor unit 204 in an initial state (natural state) that is not affected by a collision or the like is set to R0.

[0073] 4 is a comparative example in which the chord member 210 is not provided, and the base end of the sensor unit 204 in an extended state is attached to the moving body 200. When the sensor unit 204 is extended linearly, the radius of curvature R is ∞.

[0074] In the comparative example, it is considered that the sensor unit 204 may bend as indicated by the reference numeral 204-1 or 204-2 due to external disturbances such as vibrations of the moving body 200 or the sensor unit 204 itself, wind, or gravity. As shown in FIG. 5, if the amount of bending of the sensor unit 204 due to such vibrations, wind, or gravity becomes greater than the collision detection threshold, a false collision detection occurs. When there are many false detection signals, adopting a higher threshold to suppress the frequency of detection of false detection signals reduces the detection sensitivity for collisions. Conversely, lowering the threshold to increase the detection sensitivity for collisions increases the risk of false detection. Traffic lights cause excessive stopping of moving objects, resulting in a decrease in productivity.

[0075] 2, by providing a chord member 210 to hold the sensor unit 204 in a bow shape, the rigidity of the collision detection sensor 202 can be increased. This makes it possible to suppress changes in the amount of bending of the sensor unit 204 due to vibration, wind, gravity, etc., as shown in FIG. 3, and improve the stability of the sensor unit 204 against vibration, wind, gravity, etc. Therefore, excessive movement stops due to false detection can be suppressed, and the sensitivity of collision detection can be improved.

[0076] 2, the chord member 210 is initially straight, but is not limited to this. For example, as shown by reference numeral 210A in FIG. 6, the chord member 210 may be bent toward the sensor unit 204, or as shown by reference numeral 210B, the chord member 210 may be bent away from the sensor unit 204. In the example shown by reference numeral 210A, the volume occupied by the collision detection sensor 202 can be reduced.

[0077] Furthermore, when the sensor section 204 has a planar shape, the chord member 210 may be linear (rod-shaped) as shown by reference numeral 210C in FIG. 7, or may be planar (sheet-shaped) as shown by reference numeral 210D.

[0078] In the example 210D, the sensor unit 204 and the string member 210 have the same width, but they may have different widths. Also, in the examples 210C and 210D in Fig. 7, the string member may have a curved shape, as in Fig. 6.

[0079] As described above, the shape of the string member 210 is not particularly limited as long as it can hold the sensor portion 204 with an appropriate radius of curvature.

[0080] 8 and 9 are diagrams for explaining the relationship between the direction in which an obstacle collides and the bending direction of the collision detection sensor 202. FIG.

[0081] Figure 8 shows an example in which the moving body 200 moves relative to the obstacle 300 along the longitudinal direction of the collision detection sensor 202 (direction A1), and an example in which the moving body 200 moves relative to the obstacle 300 approximately perpendicular to the longitudinal direction of the collision detection sensor 202 (directions A2 to A3).

[0082] As shown in Fig. 9, when an obstacle 300 collides with the collision detection sensor 202 in the longitudinal direction (direction A1), the sensor unit 204 is bent more than in its initial state (dashed line), resulting in a smaller radius of curvature. Furthermore, when the obstacle 300 collides perpendicularly to the longitudinal direction of the collision detection sensor 202 from the sensor unit 204 side (direction A2), the string member 210 bends, causing the sensor unit 204 to bend more than in its initial state (dashed line), resulting in a smaller radius of curvature. Furthermore, when the obstacle 300 collides perpendicularly to the longitudinal direction of the collision detection sensor 202 from the string member 210 side (direction A3), the string member 210 bends, causing the sensor unit 204 to bend more than in its initial state (dashed line), resulting in a smaller radius of curvature.

[0083] Therefore, as shown in FIG. 10, in the case of a collision from any of the directions A1 to A3, in the collision detection sensor 202 according to this embodiment, the sensor part 204 is likely to bend in the direction in which the radius of curvature R decreases, and is unlikely to bend in the direction in which it extends.

[0084] In this embodiment, the chord member 210 is provided to give the sensor unit 204 an initial bending amount, so that the bending direction due to a collision can be made constant. In this way, the direction of the stress change in the sensitivity member 208 can be made constant, regardless of the direction of the collision. Even if the sensitivity member 208 is constantly subjected to a tensile stress, the tensile stress acting on the sensitivity member 208 can be increased. This configuration in which a tensile stress is always applied to the sensitivity member 208 is particularly advantageous in the case of a bending sensor described below.

[0085] (Example of a bending sensor) An example in which a bending sensor is used as the sensor unit 204 of the collision detection sensor 202 will be described.

[0086] Fig. 11 is a graph showing the sensitivity of the bending sensor. The horizontal axis of Fig. 11 represents the radius of curvature (mm) and strain (%) when the shape of the bending sensor is approximated to an arc, and the vertical axis represents the resistance change rate (%), which indicates the ratio of the change in resistance value to the resistance value.

[0087] 11(a) and 11(b), when tensile stress is applied to the sensitivity member 208, the resistance value increases, and when compressive stress is applied, the resistance value decreases. In a bending sensor, the increase in resistance value due to tensile stress has a larger rate of change in resistance value for the same radius of curvature (higher sensitivity) than the decrease in resistance value due to compressive stress. In other words, the collision detection sensitivity differs depending on whether the stress acting on the sensitivity member 208 is tensile stress or compressive stress.

[0088] 2, by restraining the sensitivity member 208 with the string member 210 in a state where the sensitivity member 208 is subjected to tensile stress, the tensile stress acting on the sensitivity member 208 can be increased regardless of the direction of impact, thereby improving the sensitivity of collision detection.

[0089] [Variation 1] In the first embodiment, the sensor unit 204 deformed into an arc shape is restrained by the string member 210, but this is not limiting. For example, if the sensor unit 204 can be held in a state in which it has been deformed (bent) into an arc shape in advance while maintaining its flexibility, the string member 210 may be omitted.

[0090] Fig. 12 is a cross-sectional view showing a processing example of the sensor unit 204 according to Modification 1. In the example shown in Fig. 12, the sensor unit 204 is sandwiched between film members 220 and 222 having different thermal expansion coefficients. The film member 220 is made of a material that has a smaller volumetric shrinkage rate (for example, molding shrinkage rate (Japanese Industrial Standards JIS K 7152-4: 2005)) than the film member 222 when returning from a high temperature state (when heated) to a room temperature state (for example, about 0°C to 25°C).

[0091] When laminating the film members 220 and 222 onto the sensor unit 204, for example, by processing them so that they become flat when heated (at high temperature), the warped shape can be maintained at room temperature due to the difference in the shrinkage rates of the film members 220 and 222.

[0092] For example, polyethylene (molding shrinkage rate = 1.5 to 4.0%), methacrylic resin (molding shrinkage rate = 0.2 to 0.6%), polystyrene (molding shrinkage rate = 0.4 to 0.7%), etc. can be used as the film members 220 and 222. The film members 220 and 222 do not have to be made of different materials, and the difference in shrinkage rate may be achieved by adjusting, for example, the amount of impurities, the length, width, or thickness.

[0093] In the first modification, the support is also provided so that the overall rigidity of the collision detection sensor 202 is lower than that of obstacles in the direction of movement of the moving body 200 (for example, each part of the measuring device 1 (for example, the housing of the detector 10, the stage 50, the column 52, the carriage 54, etc.) and the measurement object W, etc.). The material, size, thickness, length, etc. of the sensitive member 206, the sensitive member 208, and the film members 220 and 222 are adjusted.

[0094] According to the example shown in FIG. 12, the bent shape of the sensor section 204 can be maintained without providing the chord member 210.

[0095] 12, one layer of each of the film members 220 and 222 is laminated on both sides of the sensor unit 204, but this is not limiting. For example, only one layer of a film member having a different shrinkage rate from that of the sensor unit 204 may be laminated on one side. Furthermore, one or more layers of each of the film members 220 and 222 may be laminated.

[0096] Fig. 13 is a diagram showing a processing example (another example) of the sensor unit 204 according to Modification 1. In the example shown in Fig. 13, when the sensor unit 204 is molded, it is molded along a cylindrical mold and heat-treated, and the bent state is maintained.

[0097] In example 400 of Fig. 13, a cylindrical mold 402 and a cylindrical roller 404 are rotated to apply heat treatment while pressing the sensor portion 204, thereby forming the sensor portion 204 into an arc shape. On the other hand, in example 410 of Fig. 13, the sensor portion 204 on a cylindrical mold 412 is applied heat treatment while being pressed by a mold 414 with an inner cylindrical surface, thereby forming the sensor portion 204 into an arc shape.

[0098] According to the example shown in FIG. 13, the bent shape of the sensor section 204 can be maintained without providing the chord member 210 or the film members 220 and 222.

[0099] [Variation 2] In the first embodiment, the collision detection sensors 80 and 82 are provided on different directions of movement (-X side and -Z side) of the detector 10, respectively, but the arrangement and number of collision detection sensors are not limited to this. For example, a collision detection sensor having lower rigidity than the housing of the detector 10 or the side of the column 52 may be provided on the side (+X side) of the detector 10 facing the column 52, or a collision detection sensor having lower rigidity than the side of the column 52, the housing of the detector 10, or the measurement object W may be provided on the side of the column 52 facing the detector 10. Furthermore, multiple collision detection sensors may be provided in the same direction of movement.

[0100] Fig. 14 is a diagram showing a measuring device according to Modification 2. As shown in Fig. 14, a measuring device 1A according to Modification 2 is provided with two collision detection sensors 80 and 80A in the same direction of movement (-X side). In Modification 2, when a collision with an obstacle is detected by either of the collision detection sensors 80 and 80A, the movement axis (X axis) of the detector 10 corresponding to the collision detection sensors 80 and 80A is stopped.

[0101] Here, multiple collision detection sensors may be attached to locations where there is a high risk of collision, such as the end of a moving body such as the detector 10. Furthermore, the attachment positions or number of sensors may be adjusted according to the measurement object W. Furthermore, the thresholds for the length, rigidity, or amount of change in bending of collision detection sensors arranged in the same direction of movement may be the same or different from each other.

[0102] According to the second modification, it is possible to identify the axis of movement on which a collision with an obstacle occurred, making it easier to identify the cause and to recover.

[0103] In Modification 2, when collision detection sensors are provided in motion directions other than the X direction, the bending amount measurement unit 102 measures the bending amount for each movement axis. That is, the bending amount measurement unit 102 according to Modification 2 includes a bending amount (resistance value) readout circuit for detecting the bending amount of the collision detection sensor for each movement axis.

[0104] On the other hand, in the first embodiment, when a collision with an obstacle is detected by either of the collision detection sensors 80 and 82 (when the change in the amount of bending becomes equal to or greater than the threshold), all of the moving axes are stopped. Therefore, the readout circuit in the bending amount measurement unit 102 can be shared, making it possible to realize collision detection at low cost.

[0105] The arrangement of the collision detection sensors is not limited to that shown in Fig. 1 and Fig. 14. For example, multiple collision detection sensors may be attached to locations where there is a high risk of collision with an obstacle, such as the end of the detector 10 as a moving part, or the attachment positions and number of sensors may be adjusted according to the shape of the measurement target W as an obstacle.

[0106] 15, two collision detection sensors (80, 80A) are provided in the X direction and three collision detection sensors (82, 82A, 82B) are provided in the Z direction according to the shape of the measurement object W. This makes it possible to realize collision detection according to the measurement object W.

[0107] [Variation 3] In the above embodiment, when the movement of the detector 10 is stopped following the detection of a collision with an obstacle, the user can be notified of the occurrence of an abnormality by outputting an image or sound via the output unit 112 (a user interface for notification). By providing such notification, the user can immediately know the reason for the stop of the measuring device 1, which allows the measuring device 1 to be quickly restored and the operating rate to be improved.

[0108] The notification to the user is not limited to the above, and the user may be notified of events other than the occurrence of an abnormality.

[0109] Fig. 16 is a diagram showing an example of a notification display. In the example shown in Fig. 16, when the determination unit 104 detects a change in the amount of bending in the collision detection sensors (80, 80A, 82, 82A, 82B, 202), it only notifies the user (changing the display from "no signal" to "signal present") and does not output a movement stop command until the amount of change in the amount of bending reaches a threshold. Then, when the threshold is reached, the determination unit 104 outputs a movement stop command and notifies the user accordingly ("collision detected").

[0110] According to the example shown in FIG. 16, when the detector 10 approaches an obstacle, it is possible to warn the user, thereby improving operability.

[0111] Furthermore, by changing the color, size, sound frequency or volume, etc. of the screen display depending on the amount of change in the bending of the collision detection sensor (80, 80A, 82, 82A, 82B, 202), it is possible to notify the user of information regarding the magnitude of the collision risk, thereby contributing to more efficient driving.

[0112] [Variation 4] In Modification 4, an example will be described in which detection signals from multiple collision detection sensors (80, 80A, 82, 82A, 82B, 202) are connected. In the collision detection sensors (80, 80A, 82, 82A, 82B, 202), the resistance value changes depending on the amount of bending, so by connecting them in series and parallel, it is possible to detect a change in the amount of bending in any of the collision detection sensors (80, 80A, 82, 82A, 82B, 202). According to Modification 4, in the bending amount measurement unit 102, a single readout circuit can read out changes in the amount of bending in multiple collision detection sensors (80, 80A, 82, 82A, 82B, 202), making it possible to perform collision detection at multiple locations at low cost.

[0113] Fig. 17 is a diagram showing an example in which the detection signals from the collision detection sensors are connected in series, and Fig. 18 is a diagram showing an example in which the detection signals from the collision detection sensors are connected in parallel. In Fig. 17 and Fig. 18, the detection signals indicating the amount of change in resistance value in the four collision detection sensors (80, 80A, 82, 82A, 82B, 202) are shown as R1 to R4.

[0114] For the sake of simplicity, let us assume that R1 = R2 = R3 = R4 = Rc. When R1 changes to 2Rc (doubles) and when R1 changes to Rc / 2 (halves), the change in the combined resistance is as shown in Table 1.

[0115] [Table 1] The values ​​in parentheses in Table 1 indicate the ratio (percentage) of the amount of change to the value (original value) before the change in the amount of bending occurred.

[0116] From Table 1, it can be seen that if the resistance value increases when the collision detection sensors (80, 80A, 82, 82A, 82B, 202) are bent, a series connection provides higher sensitivity. On the other hand, if the resistance value decreases when the collision detection sensors (80, 80A, 82, 82A, 82B, 202) are bent (for example, when compressive strain is applied to the bending sensors, see FIG. 7(b)), a parallel connection provides higher sensitivity.

[0117] Therefore, when a bending sensor highly sensitive to tensile stress is used as the collision detection sensor (80, 80A, 82, 82A, 82B, 202) (see (a) of Figure 7), highly sensitive collision detection can be achieved by adopting an arrangement in which tensile stress acts on the sensitivity member 208 of the bending sensor and connecting them in series, as shown in Figure 8.

[0118] [Variation 5] In the first embodiment and the like, the collision detection sensors (80, 80A, 82, 82A, 82B, 202) are installed in the detector 10 of the contact-type measuring device (1, 1A, 1B), but this is not limiting. In the contact-type measuring device (1, 1A, 1B), for example, the collision detection sensors (80, 80A, 82, 82A, 82B, 202) can be installed in any location other than the part (oscillating part 18) that oscillates upon contact with the measurement object W.

[0119] In the contact-type measuring device (1, 1A, 1B), the swinging part 18 swings, and the shape is measured by detecting the amount of swing. Therefore, it is normal for an object to come into contact with the swinging part 18. Therefore, if a collision detection sensor (80, 80A, 82, 82A, 82B, 202) is installed on the swinging part 18, it will interfere with normal measurement due to overdetection of collisions, etc. Furthermore, installing the collision detection sensor (80, 80A, 82, 82A, 82B, 202) on the swinging part 18 will change the mass of the swinging part 18, and wiring for reading out signals from the collision detection sensor (80, 80A, 82, 82A, 82B, 202) will cause adverse effects on measurement accuracy due to factors such as a reaction force.

[0120] For this reason, the installation of collision detection sensors (80, 80A, 82, 82A, 82B, 202) By setting the location to any location other than the swinging portion 18, it is possible to prevent collisions while suppressing adverse effects on shape measurement accuracy.

[0121] [Variation 6] FIG. 19 is a diagram showing a collision detection sensor according to the sixth modification.

[0122] As shown in FIG. 19, the collision detection sensor 202 according to the sixth modification has a contact portion 212 attached to a tip portion 202E2.

[0123] The shape of the contact portion 212 is not particularly limited. The contact portion 212 may be a spherical shape as shown in Fig. 19, or may be any of a hemispherical shape (212A), a cylindrical or columnar shape (212B), or a rectangular parallelepiped shape (212C) as shown in Fig. 20. Note that the contact portion 212 may be shaped (for example, a sphere, hemisphere, curved surface, columnar or cylindrical shape, etc.) with a large radius of curvature on the obstacle 300 side (the side opposite to the moving body 200 side) in order to suppress stress concentration. This makes it possible to suppress damage to the obstacle 300.

[0124] Moreover, by adjusting (for example, increasing) the size of the contact portion 212, it is also possible to widen the detection range of the obstacle 300.

[0125] The material of the contact portion 212 is not particularly limited, but for example, a flexible buffer material (e.g., rubber) can be used. By using a buffer material as the contact portion 212, damage to the obstacle 300 can be suppressed.

[0126] It is preferable to select a material for the contact portion 212 that is not easily slippery in relation to the obstacle 300 (including the measurement object W), for example, a material whose coefficient of friction (static coefficient of friction) with the obstacle 300 is equal to or greater than a predetermined value. As shown in FIG. 21(b), if the coefficient of friction between the contact portion 212 and the obstacle 300 is small, the contact portion 212 may slip on the surface of the obstacle 300. In this case, the radius of curvature R slip is the radius of curvature R when there is no slippage as shown in Figure 21(a). fix Therefore, it is preferable to use a material with a large coefficient of friction for the contact portion 212.

[0127] [Second embodiment] In the first embodiment, the contact type measuring device (1, 1A, 1B) has been described, but the movement of a moving body can also be controlled in a non-contact type measuring device.

[0128] Fig. 22 is a diagram showing a non-contact type measuring device. Note that Fig. 22 omits some of the components such as the moving mechanism of the detector 10C and the stage on which the measurement target W is placed. The device control unit 100 is also omitted from the illustration because it is the same as in the first embodiment.

[0129] The non-contact measuring device 1C is a device (e.g., a white light interference microscope, see JP 2020-148894 A) that measures the shape, roughness, contour, etc. of the surface of the measurement object W by irradiating the surface of the measurement object W with measurement light LB and detecting the reflected light of the measurement light LB with a light receiving element (e.g., a CCD (Charge Coupled Device) or the like). Note that the measuring device 1C may be, for example, an interface detection device for detecting the interface of the measurement object W, or a crack detection device for detecting cracks formed in the measurement object W (e.g., see JP 2020-076651 A).

[0130] The detector 10C of the measuring device 1C includes, for example, a projection optical system for the measuring light LB, a light receiving optical system for the reflected light, and a light receiving element. In the detector 10C, the projection optical system and the light receiving optical system determine the range (measurable range) in which the measurement object W can be measured. In FIG. 22, The limit of the range of capability on the side closer to the detector 10C (near side end) is defined as NE, and the limit on the far side (far side end) is defined as FE.

[0131] The measuring device 1C is provided with a movement mechanism for adjusting the relative position between the detector 10C and the measurement object W so that the measurement object W falls within the measurable range of the detector 10C. The movement mechanism adjusts the relative position between the detector 10C and the measurement object W by moving at least one of the detector 10C and the measurement object W (stage).

[0132] In the case of a contact-type detector 10 (see FIG. 1), the movement of the detector 10 can be stopped by utilizing a detection signal obtained when the tip of the stylus 12 abuts against the measurement object W.

[0133] In contrast, in the case of the non-contact detector 10C, there are cases where the object to be measured W cannot be detected, for example, because the reflectance of the surface of the object to be measured W is extremely low. In such cases, the detector 10C and the object to be measured W may collide with each other.

[0134] In this embodiment, a collision detection sensor 90 is attached to the detector 10C, thereby making it possible to avoid collision between the detector 10C and the measurement object W. The rigidity, shape, arrangement, and material of the collision detection sensor 90, as well as the formation of the contact portion 212 or its substitute, are the same as those in the first embodiment and Modifications 2 to 9, and therefore description thereof will be omitted. Note that when the collision detection sensor 90 is tilted with respect to the movement direction of the detector 10C (see Modification 4), the collision detection sensor 90 is positioned so as not to overlap with the optical paths of the measurement light LB and the reflected light.

[0135] The collision detection sensor 90 according to this embodiment is adjusted so that its tip (-Z end) 90E is closer to the far end FE of the measurable range. Specifically, it is preferable that the tip 90E of the collision detection sensor 90 be located near the near end NE. Alternatively, the position of the tip 90E when the detection signal from the collision detection sensor 90 exceeds a threshold may be near the near end NE. This prevents the detector 10C from approaching the measurement object W beyond the near end NE of the measurable range.

[0136] According to this embodiment, when adjusting the relative positions of the non-contact detector 10C and the measurement object W (such as when preparing for measurement), it is possible to avoid collision between the detector 10C and the measurement object W due to the detector 10C being too close.

[0137] In this embodiment, for example, the detector 10C and the measurement object W may be moved closer to each other to cause the measurement object W to collide with the collision detection sensor 90, and the detector 10C and the measurement object W may be moved away from the positions at the time of collision detection. This can shorten the time required for measurement preparation.

[0138] By positioning the tip 90E of the collision detection sensor 90 near the near end NE, the limitations on the measurable range of the collision detection sensor 90 can be reduced, allowing the measurable range to be used effectively.

[0139] [Application example] The movement control according to each of the above embodiments can be applied to devices in general that include moving objects.

[0140] FIG. 23 is a perspective view showing a moving body according to an application example of the present invention, and FIG. 24 is a perspective view showing a collision detection sensor according to an application example of the present invention.

[0141] 23 includes a main body 502 and wheels 504 as a moving mechanism. The moving body 500 may be driven by power (for example, electricity). Alternatively, it may be moved manually.

[0142] A sensor unit 510 is attached to a main body 502 of the moving body 500. The sensor unit 510 includes a collision detection sensor 512 and an attachment base 514.

[0143] The collision detection sensor 512 is similar to the collision detection sensors according to the above-described embodiment and modifications 2 to 9.

[0144] The mounting base 514 is a device for mounting the collision detection sensor 512 to the movable body 502, and includes, for example, a magnet. This allows the collision detection sensor 512 to be mounted at any position when the movable body 502 is made of a magnetic material. Note that the mounting base 514 is not limited to one that uses magnetic force, and may include, for example, a clamp mechanism or a suction cup.

[0145] 23, the bending sensitivity direction of the collision detection sensor 512 is approximately parallel to the direction of movement of the moving body 500, but this embodiment is not limited to this. The above-described embodiments and modified examples 2 to 9 can be applied to the rigidity, shape, arrangement, and material of the collision detection sensor 512, the formation of the contact portion 212 or a substitute therefor, and the like.

[0146] In this embodiment as well, the influence of the collision of the moving body 500 with the obstacle 600 can be suppressed. [Explanation of symbols]

[0147] 1, 1A, 1B, 1C... Measuring device, 10, 10C... Detector, 12... Stylus, 14... Stylus unit, 16... Arm unit, 18... Swing unit, 20... Swing axis, 22... Scale, 24... Scale head, 26... Detector housing, 50... Measurement object installation unit, 52... Column, 52M... Actuator (motor), 54... Carriage, 54M... Actuator (motor), 56... Scale, 80, 80A, 82, 82A, 82B, 90... Collision detection sensor, 100... Device control unit, 102... Bending amount measurement unit, 104 ...Determination unit, 106...Bending amount storage unit, 108...Drive command unit, 110...Input unit, 112...Output unit, W...Measurement object, 200...Moving body, 202...Collision detection sensor, 202E2...Tip portion, 204...Sensor unit, 206...Support body, 208...Sensitivity member, 210...String member, 212, 212A, 212B, 212C...Contact portion, 300...Obstacle, 500...Moving body, 502...Moving body main body, 504...Wheel, 510...Sensor unit, 512...Collision detection sensor, 514...Mounting base, 600...Obstacle

Claims

1. a moving body that moves relatively within the measuring device; a collision detection sensor attached to the moving body, the collision detection sensor having a sensor portion that is held while being deformed into an arc shape and has lower rigidity than the moving body; a device control unit that detects the amount of bending of the collision detection sensor and controls the movement of the moving body in accordance with the amount of bending; A measuring device comprising:

2. The measuring device according to claim 1 , wherein the collision detection sensor has a lower rigidity than an obstacle or a measurement object in a direction of movement of the moving body.

3. The measuring device according to claim 1 , wherein the collision detection sensor includes a chord member that holds the sensor portion in an arc-shaped deformed state.

4. 2. The measuring device according to claim 1, wherein the collision detection sensor includes a film member laminated on the sensor portion and holding the sensor portion in an arc-shaped deformed state.

5. A plurality of the collision detection sensors are provided, 2. The measuring device according to claim 1, wherein said device control section shares a common circuit for reading out the amount of bending of said plurality of collision detection sensors.

6. The collision detection sensor is attached to each of the moving axes of the moving body, The measuring device according to claim 1 , wherein the device control unit includes a circuit for reading out the amount of bending of the collision detection sensor for each of the movement axes.

7. the sensor unit includes a support and a sensitive member formed on the support, 2. The measuring device according to claim 1, wherein the sensitivity member is formed so that a rate of change in resistance value due to tensile stress is greater than a rate of change in resistance value due to compressive stress, and so that a tensile stress acts on the sensitivity member when the sensitivity member is bent.

8. The measuring device according to claim 1 , further comprising an output unit that notifies a result of detection of the amount of bending of the moving body.

9. a plurality of collision detection sensors each having an increased resistance value when bent; 2. The measuring device according to claim 1, wherein the device control unit includes a readout circuit that connects detection signals from the plurality of collision detection sensors in series and reads them out.

10. a plurality of collision detection sensors each having a resistance value that decreases when bent; 2. The measuring device according to claim 1, wherein the device control unit includes a readout circuit that connects detection signals from the plurality of collision detection sensors in parallel and reads them out.

11. The measuring device according to claim 1 , further comprising a contact portion attached to a tip of the collision detection sensor.

12. The measuring device according to claim 11 , wherein the contact portion has a curved surface on a side opposite to the moving body.

13. The measuring device according to claim 11 , wherein the contact portion is formed of a material that is not slippery in relation to an obstacle to the moving body.

14. The measuring device according to claim 11 , wherein the contact portion is flexible.

15. the movable body includes a contact detector that detects the amount of swing of the swinging part to measure the object to be measured, The measuring device according to claim 1 , wherein the collision detection sensor is attached to a part other than the swinging part.

16. the moving body includes a non-contact detector, 15. The measuring device according to claim 1, wherein the collision detection sensor is attached so that a tip thereof is positioned closer to the proximal end of the measurable range of the non-contact detector than to a distal end of the measurable range of the non-contact detector.

17. a step of detecting a bending amount of a collision detection sensor attached to a moving body included in the measurement device, the collision detection sensor having a sensor portion that is held while being deformed into an arc shape and has lower rigidity than the moving body; controlling the movement of the moving body in accordance with the amount of bending; A method for controlling a moving object comprising:

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