Measurement device and mobile body control method

Abstract

To provide a measurement device and a mobile body control method, which enable suppression of troubles associated with movement of a mobile vehicle.SOLUTION: A method of controlling a mobile body (10, 10C, 200, 500) is provided, the method comprising the steps of: detecting amounts of curvature of collision detection sensors (80, 80A, 82, 82A, 82B, 90, 202, 512) that are installed on the mobile body included in a measurement device (1, 1A, 1B, 1C), each collision detection sensor having a flexible support (204, 204A, 204B), a sensitivity member laminated on a surface of the support, and a low-rigidity portion (206) (206, 206A, 206B) formed in a partial region of the support in a longitudinal direction and having lower rigidity than region other than the partial region; and controlling movement of the mobile body according to the amounts of curvature.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a measuring device and a method for controlling a moving object, and more particularly to a technique for preventing a moving object from colliding with another object. [Background technology]

[0002] When a device equipped with a moving body moves, the moving body may come into contact with (collide with) an obstacle within its range of movement. For example, measuring machines such as roughness measuring machines, contour measuring machines, roundness measuring machines, coordinate measuring machines, and optical shape measuring machines are equipped with a detector (probe head), carriage, column, or the like as a moving body. As such a moving body moves, an unintended part may collide with an obstacle (including, for example, the object to be measured), which may cause the measuring machine to malfunction or reduce its accuracy. Furthermore, when the moving body collides with the object to be measured, the object may be damaged.

[0003] Patent document 1 discloses a collision prevention device that uses a distortion detection sensor to detect distortion that occurs in a housing that covers a device to be moved, and stops the moving means when the distortion detected by the distortion detection sensor exceeds a predetermined value. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2008-122222 Summary of the Invention [Problem to be solved by the invention]

[0005] The collision prevention device described in Patent Document 1 is based on the premise that the housing covering the device to be moved will collide with an obstacle, causing distortion in the housing, and does not prevent collisions that could cause breakdowns or reduced accuracy of the measuring device as described above. Furthermore, collisions with the housing could damage the object to be measured.

[0006] The present invention has been made in view of the above circumstances, and has an object to provide a measuring device and a method for controlling a moving body that can suppress the occurrence of problems that accompany the movement of a moving body. [Means for solving the problem]

[0007] A measuring device according to a first aspect of the present invention comprises a movable body that moves relative to the movable body within the measuring device, a collision detection sensor attached to the movable body and having lower rigidity than the movable body, and a device control unit that detects the amount of bending of the collision detection sensor and controls the movement of the movable body in accordance with the amount of bending, and the collision detection sensor comprises a flexible support, a sensitivity member laminated on the surface of the support, and a low-rigidity portion formed in a partial region of the longitudinal direction of the support, the low-rigidity portion having lower rigidity than the remaining regions.

[0008] A second aspect of the present invention provides a measuring device according to the first aspect, wherein the collision detection sensor has lower rigidity than an obstacle or a measurement object in the moving direction of the moving body.

[0009] In the measuring device according to the third aspect of the present invention, in the first or second aspect, the low rigidity portion is formed by reducing the thickness of a certain area, by cutting out, or by attaching a reinforcing member to an area other than the certain area on the back surface of the support.

[0010] A fourth aspect of the present invention provides a measurement device according to any one of the first to third aspects, A plurality of detection sensors are provided, and the device control unit shares a circuit for reading out the amount of bending of the plurality of collision detection sensors.

[0011] A measuring device according to a fifth aspect of the present invention is any of the first to third aspects, in which a collision detection sensor is attached to each axis of movement of the moving body, and the device control unit is provided with a circuit for reading out the amount of bending of the collision detection sensor for each axis of movement.

[0012] A measuring device according to a sixth aspect of the present invention is any of the first to fifth aspects, wherein the sensitivity member has a larger rate of change in resistance value due to tensile stress than the rate of change in resistance value due to compressive stress, and the low rigidity portion is formed so that tensile stress acts on the sensitivity member when the collision detection sensor is bent.

[0013] The measurement device according to a seventh aspect of the present invention is the measurement device according to any one of the first to sixth aspects, further comprising an output section that notifies the result of detection of the amount of bending of the moving object.

[0014] A measuring device according to an eighth aspect of the present invention is any of the first to seventh aspects, and includes a plurality of collision detection sensors whose resistance value increases when bent, and the device control unit includes a readout circuit that connects the detection signals from the plurality of collision detection sensors in series and reads them out.

[0015] A measuring device according to a ninth aspect of the present invention is any of the first to seventh aspects, and includes a plurality of collision detection sensors whose resistance value decreases when bent, and the device control unit includes a readout circuit that connects the detection signals from the plurality of collision detection sensors in parallel and reads them out.

[0016] The measuring device according to a tenth aspect of the present invention is the measuring device according to any one of the first to ninth aspects, and further comprises a contact portion attached to the tip of the collision detection sensor.

[0017] An eleventh aspect of the present invention is the measurement device of the tenth aspect, wherein the contact portion has a curved shape on the side opposite to the moving body.

[0018] A twelfth aspect of the present invention is the measuring device of the tenth or eleventh aspect, wherein the contact portion is formed of a material that is not slippery in relation to an obstacle to the moving body.

[0019] A thirteenth aspect of the present invention relates to the measurement device of any one of the tenth to twelfth aspects, wherein the contact portion is flexible.

[0020] A measuring device according to a 14th aspect of the present invention is any of the first to 13th aspects, in which the movable body includes a contact detector that detects the amount of oscillation of the oscillating part and measures the object to be measured, and the collision detection sensor is attached to a part other than the oscillating part.

[0021] A measuring device according to a 15th aspect of the present invention is any of the 13th to 15th aspects, in which the moving body includes a non-contact detector, and the collision detection sensor is attached so that its tip is located closer to the proximal end of the measurable range of the non-contact detector.

[0022] A method for controlling a moving body according to a 16th aspect of the present invention is a collision detection sensor attached to a moving body included in a measuring device, the collision detection sensor comprising a flexible support, a sensitivity member laminated on the surface of the support, and a low-rigidity portion formed in a partial region of the longitudinal direction of the support, the low-rigidity portion having lower rigidity than the remaining regions, and includes the steps of detecting the amount of bending of the collision detection sensor, which has lower rigidity than the moving body, and controlling the movement of the moving body in accordance with the amount of bending. [Effects of the Invention]

[0023] According to the present invention, by attaching a collision detection sensor to a moving body that is configured so that bending stress is concentrated in a low-rigidity portion, it is possible to achieve high sensitivity, early detection, and stabilization of collisions, thereby suppressing the occurrence of problems associated with the movement of the moving body. [Brief explanation of the drawings]

[0024] [Figure 1] 1 is a diagram showing a measurement device according to a first embodiment of the present invention. [Figure 2] FIG. 2 is a diagram illustrating a collision detection sensor. [Figure 3] 1A and 1B are diagrams illustrating a collision detection sensor according to an embodiment in comparison with a comparative example; [Figure 4] 10A and 10B are diagrams illustrating an example of how a collision detection sensor according to a comparative example bends. [Figure 5] 10 is a graph showing the sensitivity of a bending sensor. [Figure 6] FIG. 10 is a diagram showing a collision detection sensor according to a first modified example. [Figure 7] FIG. 10 is a diagram showing a measurement device according to a second modification. [Figure 8] FIG. 10 is a diagram showing an example in which collision detection sensors are arranged in accordance with the shape of a measurement object. [Figure 9] FIG. 10 is a diagram illustrating an example of a notification display. [Figure 10] FIG. 10 is a diagram illustrating an example in which detection signals from collision detection sensors are connected in series. [Figure 11] FIG. 10 is a diagram illustrating an example in which detection signals from collision detection sensors are connected in parallel. [Figure 12] FIG. 13 is a diagram showing a collision detection sensor according to a sixth modification. [Figure 13] 13 is a diagram showing an example of the shape of a collision detection sensor according to Modification 6. FIG. [Figure 14] 13 is a diagram showing a state in which a contact portion of a collision detection sensor according to Modification 6 comes into contact with an obstacle. FIG. [Figure 15] 13 is a diagram showing an example of a substitute for the contact portion of the collision detection sensor according to Modification 6. FIG. [Figure 16] FIG. 4 is a diagram showing a measurement device according to a second embodiment of the present invention. [Figure 17] FIG. 1 is a perspective view showing a moving body according to an application example of the present invention. [Figure 18] FIG. 1 is a perspective view showing a collision detection sensor according to an application example of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0025] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

[0026] [First embodiment] In this embodiment, an example will be described in which a detector (probe head) of a contact-type measuring device is a moving body.

[0027] (Outline of the measuring device) 1 is a diagram showing a measurement device according to a first embodiment of the present invention. In the following description, a three-dimensional Cartesian coordinate system is used in which the XY plane is the horizontal plane and the Z direction is the vertical direction (perpendicular direction).

[0028] The measuring device 1 is a device for measuring the shape, roughness, contour, etc. of the surface of a measuring object W placed on a measuring object placement section (hereinafter referred to as a stage) 50 using a detector 10. As shown in FIG. 1, the measuring object W is placed on the surface of the stage 50.

[0029] 1, the stage 50 is disposed so that the surface of the stage 50 (the surface on which the measurement target W is placed) is parallel to the XY plane. A column (Z-axis) 52 extending substantially perpendicular to the surface of the stage 50 is disposed on the stage 50. A carriage (X-axis) 54 is attached to the column 52, and the carriage 54 is movable in the Z direction along the column 52 by an actuator (for example, a motor) 52M. The column 52 may be provided with a scale for detecting the position of the carriage 54 in the Z direction.

[0030] The carriage 54 is fitted with a detector 10, which is The detector 10 is movable in the X direction relative to the carriage 54 by a motor (for example, a motor) 54M. A scale 56 for detecting the position of the detector 10 in the X direction is attached to the carriage 54. The scale 56 is, for example, a linear scale (linear position scale) with scale graduations formed along its length.

[0031] In this embodiment, the detector 10 is movable relative to the column 52, but the present invention is not limited to this. For example, the column 52 may be movable along the X direction relative to the stage 50. Furthermore, the detector 10 may be movable relative to the measurement object W placed on the stage 50 not only in the X direction but also in the Y direction.

[0032] Furthermore, the stage 50 may be movable along the X, Y, or Z direction relative to the column 52. Therefore, the movable body according to this embodiment is not limited to an example in which the detector 10 as the movable body moves relative to the measurement object W. The movable body according to this embodiment also includes a case in which the measurement object W moves relative to the detector 10, that is, a detector 10 that moves relatively to the measurement object W.

[0033] As shown in FIG. 1, the detector 10 includes a stylus portion 14, an arm portion 16, a swing shaft 20, a scale 22, and a scale head 24.

[0034] The stylus part 14 is fixed so as to be approximately in line with the arm part 16, and the stylus part 14 and the arm part 16 are attached to the detector housing 26 so as to be able to swing integrally around the swing axis 20. The attachment angle of the detector 10 to the carriage 54 is adjusted so that the swing axis 20 is approximately parallel to the XY plane. Hereinafter, the stylus part 14 attached to the arm part 16 will also be referred to as the swing part 18.

[0035] The configuration of the oscillating part 18 is not limited to the substantially linear example shown in FIG. 1, but for example, the stylus part 14 or the arm part 16 may have an L-shaped bent part, and the stylus part 14 and the arm part 16 may be attached so as to be substantially parallel to each other.

[0036] A stylus 12 is provided at the tip of the stylus unit 14. The stylus 12 extends downward (in the -Z direction) in the figure. When the stylus 12 is brought into contact with the surface of the measurement object W placed on the stage 50 with a predetermined pressure, the oscillating unit 18 oscillates around the oscillating axis 20 according to the height and unevenness of the surface of the measurement object W at the contact position.

[0037] The configuration of the stylus unit 14 is not limited to the example shown in Fig. 1. For example, the stylus unit 14 may be a T-shaped stylus with styluses provided in the vertical direction in the figure, or an L-shaped stylus with a stylus that protrudes downward in the figure longer than in the example shown in Fig. 1.

[0038] A scale 22 is fixed to the detector housing 26 so as to face the base end of the arm portion 16 .

[0039] The scale 22 is, for example, a linear scale (linear position scale), and scale graduations are formed along the length direction of the scale 22. The scale 22 is attached so that its length direction (displacement detection direction) is approximately perpendicular to the length direction of the oscillating part 18.

[0040] The scale head 24 is fixed to the base end of the arm portion 16 and is capable of swinging integrally with the swinging portion 18, and is a device that reads the scale (hereinafter referred to as the indicated value) at the opposite position of the scale 22 fixed to the detector housing 26. The type of the scale head 24 is not particularly limited, but the scale head 24 may be, for example, an optical scale for reading the scale 22. A contactless sensor including an electrical sensor or an imaging element and an illumination light source (for example, an LED (Light-Emitting Diode)) can be used.

[0041] The reading of the scale 22 read by the scale head 24 is output to the device control unit 100 .

[0042] The device control unit 100 controls the actuators 52M and 54M provided on the column 52 and carriage 54 to move the measurement object W and the stylus 12 of the measuring device 1 relative to each other, while obtaining readings of the graduations on the scale 22 for each position on the surface of the measurement object W. This makes it possible to measure the shape, roughness, contour, etc. of the surface of the measurement object W.

[0043] In this embodiment, the scale 22 is fixed to the detector housing 26, and the scale head 24 is fixed to the base end of the arm section 16, but the present invention is not limited to this. For example, the scale head 24 may be fixed to the detector housing 26, and the scale 22 may be fixed to the base end of the arm section 16. Furthermore, the scale 22 is not limited to a linear scale, and may be, for example, an arc scale (angle scale) formed in an arc shape along the swing direction of the arm section 16.

[0044] As shown in FIG. 1, an input unit 110 and an output unit 112 are connected to the device control unit 100.

[0045] The device control unit 100 includes at least one processor (e.g., a central processing unit (CPU), a micro-processing unit (MPU), a field-programmable gate array (FPGA), or an application-specific circuit (ASIC)) for controlling each unit of the measuring device 1, and at least one memory (e.g., a read-only memory (ROM), a random access memory (RAM), a hard disk drive (HDD), or a solid-state drive (SSD)). The memory of the device control unit 100 stores computer program code, and the memory and the computer program code, in combination with the processor, enable the measuring device 1 to measure the shape, roughness, contour, etc. of the surface of the measurement object W. The memory and the computer program code, in combination with the processor, also enable the bending amount measurement unit 102, the determination unit 104, the bending amount storage unit 106, and the drive command unit 108 of the device control unit 100, thereby enabling movement control of the detector 10 in the measuring device 1.

[0046] The input unit 110 is a device for receiving operation input from a user, and includes, for example, a keyboard, a mouse, or a touch panel.

[0047] The output unit 112 is a device for outputting images, sounds, etc., and may be, for example, an LCD (Liquid Crystal Display). The output unit 112 displays, for example, a GUI (Graphical User Interface) for operating the measuring device 1, the device control unit 100, and the actuators 52M and 54M, as well as measurement results such as the shape, roughness, or contour of the surface of the measurement target W.

[0048] (Detector movement control) Collision detection sensors 80 and 82 are attached to the detector 10. In the example shown in Fig. 1, collision detection sensor 80 is attached to the side surface of the detector 10 and protrudes from the side surface of the detector 10 in the -X direction alongside the stylus portion 14. On the other hand, collision detection sensor 82 is attached to the bottom surface of the detector 10 and protrudes from the bottom surface of the detector 10 in the -Z direction.

[0049] The bending amount measurement unit 102 detects the bending amount of the collision detection sensors 80 and 82 when measuring the measurement object W or when the detector 10 is moving. Here, the bending amount of the collision detection sensors 80 and 82 is detected as, for example, a resistance value or a change in the resistance value.

[0050] The determination unit 104 instructs the drive command unit 108 to continue or stop the movement of the detector 10 in response to a change in the amount of bending detected by the bending amount measurement unit 102. The bending amount storage unit 106 stores, for example, the amount of bending (initial bending amount) of each collision detection sensor 80 and 82 in a natural state when the collision detection sensors 80 and 82 are not colliding with another object, or a past measurement value (previous value) of the amount of bending, in the memory of the device control unit 100. The determination unit 104 then instructs the detector 10 to stop moving when the amount of bending of the collision detection sensor 80 or 82 detected by the bending amount measurement unit 102 has changed by a threshold or more from the initial bending amount or the previous value. Here, the determination unit 104 stops the movement of the detector 10 along all movement axes. It is also possible to stop movement only in the direction of movement corresponding to the collision detection sensor 80 or 82 whose change in the amount of bending has become equal to or greater than the threshold. On the other hand, if the amount of change in the amount of bending from the initial amount or the previous value is less than the threshold value, the movement of the detector 10 continues as is.

[0051] The drive command unit 108 controls the actuators 52M and 54M in accordance with an instruction from the determination unit 104 to continue or stop the movement of the detector 10.

[0052] In this embodiment, the collision detection sensors 80 and 82 are adjusted to have lower rigidity than each part of the measurement device 1 (for example, the housing of the detector 10, the stage 50, the column 52, and the carriage 54). Specifically, the material, size, thickness, length, etc. of each of the collision detection sensors 80 and 82 (for example, the material, size, thickness, length, etc. of the support 204 and the sensitivity member 210 described below) are adjusted so that the collision detection sensors 80 and 82 have lower rigidity than each part of the measurement device 1.

[0053] Specifically, the rigidity of the collision detection sensors 80 and 82 is made lower than that of the housing of the detector 10. As a result, when the collision detection sensor 80 or 82 collides with an obstacle, the stress caused by the collision is absorbed by the deformation of the collision detection sensor 80 or 82, so that the transmission of stress to the housing of the detector 10 can be suppressed.

[0054] Additionally, the rigidity of the collision detection sensors 80 and 82 is made lower than that of obstacles in their respective directions of movement. For example, the rigidity of the collision detection sensor 80 extending in the -X direction is made lower than that of the measurement object W, and the rigidity of the collision detection sensor 82 extending in the -Z direction is made lower than that of the stage 50 or the measurement object W. As a result, when the collision detection sensor 80 or 82 collides with an obstacle, the stress caused by the collision is absorbed by the deformation of the collision detection sensor 80 or 82, thereby suppressing the transmission of stress to the obstacle.

[0055] The length and rigidity of the collision detection sensors 80 and 82 and the threshold value for the amount of change in bending may be set so that the movement of the detector 10 can be stopped while the stress caused by the collision is being absorbed by the deformation of the collision detection sensors 80 and 82. For example, the shorter the collision detection sensors 80 and 82, the shorter the time from the start of bending until the stress affects the housing of the detector 10 or an obstacle. Therefore, the threshold value for the amount of change in bending may be set smaller. Furthermore, the higher the rigidity of the collision detection sensors 80 and 82, the shorter the time from the start of bending until the stress affects the housing of the detector 10 or an obstacle. Therefore, the threshold value for the amount of change in bending may be set smaller. Note that the relationship between the length and rigidity of the collision detection sensors 80 and 82 and the threshold value for the amount of change in bending is not limited to the above example. This makes it possible to more reliably prevent the stress caused by the collision from being transmitted to the housing of the detector 10 or an obstacle.

[0056] (Example of a collision detection sensor) 2 is a diagram (front view) showing the collision detection sensors. In the following description, the detector 10 and the collision detection sensors 80 and 82 are respectively referred to as the moving body 200 and the collision detection sensor 20. 2 is a simplified version.

[0057] The collision detection sensor 202 includes a flexible support (substrate) 204 and a sensitive member (resistor) 210 formed on the support 204. The electrical resistance of the sensitive member 210 changes when it is bent due to a collision with an obstacle or the like. The bending amount measuring unit 102 detects the amount of bending by detecting this change in electrical resistance.

[0058] 2, the support 204 is in the shape of a substantially rectangular plate, and a sensitivity member 210 is laminated (for example, coated) on its surface. A low-rigidity section 206 having a lower rigidity than the surrounding area is formed on the back surface of the support 204 opposite to the front surface (the surface on which the sensitivity member 210 is formed). In the following description, the portions of the support 204 other than the low-rigidity section 206 and having a higher rigidity than the low-rigidity section 206 are referred to as high-rigidity sections 208.

[0059] 2, the low-rigidity portion 206 is formed by changing the thickness of a portion of the longitudinal region of the support 204 (for example, by thinning the thickness of the portion or by cutting out the portion). Note that the method of providing the low-rigidity portion 206 is not limited to this.

[0060] Furthermore, the length occupied by the low-rigidity portions 206 in the longitudinal direction of the support 204 may be adjusted, for example, in accordance with the relationship between the longitudinal length of the support 204 and the thicknesses of the low-rigidity portions 206 and the high-rigidity portions 208, so that the thick high-rigidity portions 208 do not come into contact with each other (so as not to hinder bending) when bending. Furthermore, the length of the low-rigidity portions 206 may be adjusted in accordance with the relationship between the amount of bending of the sensitivity member 210 and the amount of change in resistance value (magnitude of the detection signal) or the sensitivity of the reading circuit of the bending amount measuring unit 102, so that the range of the detection signal falls within a predetermined range.

[0061] For example, a metal or semiconductor strain gauge can be used as the collision detection sensor 202. Alternatively, a bending sensor (for example, the BS series bending sensor manufactured by Sensia Technology Co., Ltd.) can also be used as the collision detection sensor 202.

[0062] Here, the metal strain gauge has a metal thin film or wire as the sensitivity member 210 formed on an insulating support 204. When the sensitivity member 210 receives a force (tensile force) in the direction in which it expands, the sensitivity member 210 expands, reducing its cross-sectional area and increasing its resistance value. On the other hand, when the sensitivity member 210 receives a force (compressive force) in the direction in which it contracts, the sensitivity member 210 contracts, increasing its cross-sectional area and decreasing its resistance value.

[0063] If the resistance value changes from R by ΔR when a strain ε is applied to the sensitivity member 210, the following equation (1) holds.

[0064] Ks=(ΔR / R) / ε (1) Here, the gauge factor Ks is a coefficient that represents the sensitivity of the strain gauge, and (ΔR / R) is the rate of change in resistance. Note that the strain ε and the gauge factor Ks are dimensionless quantities.

[0065] From equation (1), in the case of a metal strain gauge, when the gauge factor Ks is a constant, the resistance change rate (ΔR / R) changes linearly with the strain ε. In this embodiment, the movement of the detector 10 is controlled by detecting the resistance change rate (ΔR / R) with respect to the strain ε that occurs when the collision detection sensor 202 collides with an obstacle.

[0066] On the other hand, a semiconductor strain gauge uses a semiconductor (e.g., germanium or silicon) as the sensitive member 210, and measures the strain state by utilizing the change in electrical resistance (piezoresistive effect) when strain is applied to the semiconductor. It has the property of having a higher gauge factor and rate of resistance change than a wire gauge.

[0067] In the case of metal and semiconductor strain gauges, the direction of change (increase or decrease) in resistance is fixed according to tension or compression acting on the sensitivity member 210. When using metal and semiconductor strain gauges as the collision detection sensor 202, by attaching the collision detection sensor 202 so that the direction of change in resistance is along the direction of movement of the mobile object 200, it is possible to detect a collision with an obstacle.

[0068] The bending sensor is made by applying a sensitivity member 210 (paint) made by mixing conductive particles (e.g., carbon particles, carbon black, particle size approximately 30 nm) with a binder resin (e.g., polyimide varnish) to a support 204 (e.g., a flexible insulating layer, flexible substrate, etc.). Here, the volume ratio of the conductive particles to the binder resin is, for example, 6:4. The carbon black can be, for example, #3030B manufactured by Mitsubishi Chemical Corporation, and the polyimide varnish can be, for example, IRP-1200 manufactured by Sanwa Chemical Co., Ltd.

[0069] The bending sensor described above has the property of being more sensitive than a strain gauge because the carbon particles contained in the sensitive member 210 change between contact and non-contact as the sensor is deformed. By using a highly sensitive bending sensor, the effects of collisions with obstacles can be more reliably suppressed.

[0070] FIG. 3 is a diagram illustrating the collision detection sensor according to this embodiment in comparison with a comparative example. FIG. 3A is a diagram illustrating the bent shape of a collision detection sensor 250 according to the comparative example, and FIG. 3B is a diagram illustrating the bent shape of a collision detection sensor 202 according to this embodiment. Note that the base ends of the collision detection sensors (202, 250) are actually fixed to the moving body 200, but in FIGS. 3A and 3B, the fixing structure and the like are omitted to emphasize the bent shape of the collision detection sensors (202, 250). Also, FIG. 3C is a graph illustrating the change over time in the amount of bending of the collision detection sensors (202, 250). The horizontal axis of graph (C) represents time, and the vertical axis represents the radius of curvature R when the collision detection sensors (202, 250) are approximated as a circular arc. In a natural state (extended state) where there is no influence of a collision, R is infinite.

[0071] 3A is a comparative example in which the low-rigidity section 206 is not provided, and the base end of the collision detection sensor 250, in which a sensitivity member 254 is laminated on the surface of a substantially planar support body 252, is attached to the moving body 200. In the comparative example, when the collision detection sensor 250 collides with an obstacle 300, stress acts in a dispersed manner over the entire longitudinal direction of the collision detection sensor 250.

[0072] In contrast, in this embodiment, when the collision detection sensor 202 collides with the obstacle 300, stress acts intensively on the low-rigidity portion 206 and its surrounding area. Therefore, the range in which bending of the collision detection sensor 202 occurs can be limited to a narrow range, and the degree of change in the amount of bending can be increased.

[0073] For example, let us consider a case where the collision detection sensors 202 and 250 have the same length in their natural state (extended state) without the influence of a collision, and the moving body 200 and the obstacle 300 approach each other to the same distance, causing the collision detection sensors 202 and 250 to bend, as shown in (A) and (B) of FIG. 3. Let the curvature radius R of the collision detection sensors 202 and 250 be R. A and R B Then, R A >R B That is, when the moving body 200 and the obstacle 300 come within an equal distance of each other, the change in the bending amount (resistance value) is larger in the collision detection sensor 202 according to this embodiment than in the comparative example, and the collision detection sensitivity is increased.

[0074] When the moving body 200 and the obstacle 300 are moved relative to each other at a constant speed, from the start of the relative movement, The time required for the collision detection sensors 250 and 202 to come into contact with the obstacle 300 and for their respective curvature radii R to exceed the collision detection threshold is t A and t B As shown in FIG. 3C, the curve of the radius of curvature R of the collision detection sensor 202 rises faster than that of the comparative example, and it takes a shorter time to exceed the collision detection threshold (t B <t A ).

[0075] Therefore, according to this embodiment, by providing the low rigidity portion 206, it becomes possible to detect a collision with the obstacle 300 with high sensitivity and early detection.

[0076] FIG. 4 is a diagram showing an example of how the collision detection sensor 250 according to the comparative example bends (hereinafter referred to as the bending mode).

[0077] The example shown by reference numeral 250-1 in Figure 4 is an example similar to that shown in Figure 3(A), in which the stress generated when the collision detection sensor 250 collides with the obstacle 300 acts in a dispersed manner over the entire longitudinal direction of the collision detection sensor 250.

[0078] However, the degree of bending may differ depending on the manner in which the collision detection sensor 250 and the obstacle 300 collide (for example, the relative movement speed between the moving body 200 and the obstacle 300, the state of the collision points on the collision detection sensor 250 and the obstacle 300 (for example, processing accuracy, surface roughness, collision angle, etc.), the fixing structure of the collision detection sensor 250, the relationship between the rigidity of the support body 204 and the sensitivity member 210, etc.). For example, in the example shown by reference numeral 250-2, bending occurs near the tip of the collision detection sensor 250. Furthermore, in the example shown by reference numeral 250-3, the collision detection sensor 250 is deformed into a substantially S-shape.

[0079] As described above, it is difficult to predict in advance what bending mode the collision detection sensor 250 according to the comparative example will enter. Different bending modes result in different detection signals indicating changes in resistance value caused by a collision, making it difficult to determine the collision detection sensitivity and the time required for detection, resulting in unstable collision detection.

[0080] In contrast to this, according to this embodiment, by providing the low rigidity portion 206, the area where stress acts during a collision can be limited to the low rigidity portion 206 and its vicinity, and therefore the detection signal can be detected stably.

[0081] (Example of a bending sensor) Here, an example in which a bending sensor is used as the collision detection sensor 202 will be described.

[0082] Figure 5 is a graph showing the sensitivity of the bending sensor. The horizontal axis of Figure 5 represents the radius of curvature (mm) and strain (%) when the shape of the bending sensor is approximated to an arc, and the vertical axis represents the resistance change rate (%), which indicates the ratio of the change in resistance value to the resistance value.

[0083] 5(a) and 5(b), when tensile stress is applied to the sensitivity member 210, the resistance value increases, and when compressive stress is applied, the resistance value decreases. In a bending sensor, the increase in resistance value due to tensile stress has a larger rate of change in resistance value for the same radius of curvature (higher sensitivity) than the decrease in resistance value due to compressive stress. In other words, the collision detection sensitivity differs depending on whether the stress acting on the sensitivity member 210 is tensile stress or compressive stress.

[0084] According to this embodiment, as shown in FIG. 2, the provision of the low-rigidity portion 206 allows a tensile stress to act on the sensitivity member 210, thereby improving the detection sensitivity of a collision.

[0085] [Variation 1] Fig. 6 is a diagram showing a collision detection sensor according to Modification 1. Note that Fig. 6 shows collision detection sensors according to the above embodiments lined up.

[0086] In the above embodiment, the low-rigidity portion 206 is formed by varying the thickness of a portion of the support 204 in the longitudinal direction, but the present invention is not limited to this.

[0087] For example, as shown by the example of reference numeral 202A, a high-rigidity portion 208A may be formed by attaching a reinforcing member in the longitudinal direction to the rear surface of a support 204A, and a partial area where the reinforcing member is not attached may be made into a low-rigidity portion 206A.

[0088] As shown in the example of reference numeral 202B, a partial area of ​​a support 204B is cut out to form a low-rigidity portion 206B, and the portion without the cutout is a high-rigidity portion 208B.

[0089] In the first modification, it is also possible to realize high sensitivity and early collision detection by limiting the bending locations, and to limit the bending mode.

[0090] In the example indicated by the reference numeral 202B, the notch is formed line-symmetrically with respect to the sensitivity member 210, but this is not limiting. For example, even if the notch is formed on only one side, it is possible to achieve high sensitivity and early collision detection by limiting the bending location, and to limit the bending mode.

[0091] [Variation 2] In the first embodiment, the collision detection sensors 80 and 82 are provided on different directions of movement (-X side and -Z side) of the detector 10, respectively, but the arrangement and number of collision detection sensors are not limited to this. For example, a collision detection sensor having lower rigidity than the housing of the detector 10 or the side of the column 52 may be provided on the side (+X side) of the detector 10 facing the column 52, or a collision detection sensor having lower rigidity than the side of the column 52, the housing of the detector 10, or the measurement object W may be provided on the side of the column 52 facing the detector 10. Furthermore, multiple collision detection sensors may be provided in the same direction of movement.

[0092] Fig. 7 is a diagram showing a measuring device according to Modification 2. As shown in Fig. 7, a measuring device 1A according to Modification 2 is provided with two collision detection sensors 80 and 80A in the same direction of movement (-X side). In Modification 2, when a collision with an obstacle is detected by either of the collision detection sensors 80 and 80A, the movement axis (X axis) of the detector 10 corresponding to the collision detection sensors 80 and 80A is stopped.

[0093] Here, multiple collision detection sensors may be attached to locations where there is a high risk of collision, such as the end of a moving body such as the detector 10. Furthermore, the attachment positions or number of sensors may be adjusted according to the measurement object W. Furthermore, the thresholds for the length, rigidity, or amount of change in bending of collision detection sensors arranged in the same direction of movement may be the same or different from each other.

[0094] According to the second modification, it is possible to identify the axis of movement on which a collision with an obstacle occurred, making it easier to identify the cause and to recover.

[0095] In Modification 2, when collision detection sensors are provided in motion directions other than the X direction, the bending amount measurement unit 102 measures the bending amount for each movement axis. That is, the bending amount measurement unit 102 according to Modification 2 includes a bending amount (resistance value) readout circuit for detecting the bending amount of the collision detection sensor for each movement axis.

[0096] On the other hand, in the first embodiment, when a collision with an obstacle is detected by either of the collision detection sensors 80 and 82 (when the change in the amount of bending becomes equal to or greater than the threshold), all of the moving axes are stopped. Therefore, the readout circuit in the bending amount measurement unit 102 can be shared, making it possible to realize collision detection at low cost.

[0097] The arrangement of the collision detection sensors is not limited to that shown in Fig. 1 and Fig. 7. For example, multiple collision detection sensors may be attached to locations where there is a high risk of collision with obstacles, such as the end of the detector 10 as a moving part, or the attachment positions and number of sensors may be adjusted according to the shape of the measurement target W as an obstacle.

[0098] 8 is provided with two collision detection sensors (80, 80A) in the X direction and three (82, 82A, 82B) in the Z direction according to the shape of the measurement object W. This makes it possible to realize collision detection according to the measurement object W.

[0099] [Variation 3] In the above embodiment, when the movement of the detector 10 is stopped following the detection of a collision with an obstacle, the user can be notified of the occurrence of an abnormality by outputting an image or sound via the output unit 112 (a user interface for notification). By providing such notification, the user can immediately know the reason for the stop of the measuring device 1, which allows the measuring device 1 to be quickly restored and the operating rate to be improved.

[0100] The notification to the user is not limited to the above, and the user may be notified of events other than the occurrence of an abnormality.

[0101] Fig. 9 is a diagram showing an example of a notification display. In the example shown in Fig. 9, when the determination unit 104 detects a change in the amount of bending in the collision detection sensors (80, 80A, 82, 82A, 82B, 202), it only notifies the user (changing the display from "no signal" to "signal present") and does not output a movement stop command until the amount of change in the amount of bending reaches a threshold. Then, when the threshold is reached, the determination unit 104 outputs a movement stop command and notifies the user accordingly ("collision detected").

[0102] According to the example shown in FIG. 9, when the detector 10 approaches an obstacle, it is possible to warn the user, thereby improving operability.

[0103] Furthermore, by changing the color, size, sound frequency or volume, etc. of the screen display depending on the amount of change in the bending of the collision detection sensor (80, 80A, 82, 82A, 82B, 202), it is possible to notify the user of information regarding the magnitude of the collision risk, thereby contributing to more efficient driving.

[0104] [Variation 4] In Modification 4, an example will be described in which detection signals from multiple collision detection sensors (80, 80A, 82, 82A, 82B, 202) are connected. In the collision detection sensors (80, 80A, 82, 82A, 82B, 202), the resistance value changes depending on the amount of bending, so by connecting them in series and parallel, it is possible to detect a change in the amount of bending in any of the collision detection sensors (80, 80A, 82, 82A, 82B, 202). According to Modification 4, in the bending amount measurement unit 102, a single readout circuit can read out changes in the amount of bending in multiple collision detection sensors (80, 80A, 82, 82A, 82B, 202), making it possible to perform collision detection at multiple locations at low cost.

[0105] Fig. 10 is a diagram showing an example in which the detection signals from the collision detection sensors are connected in series, and Fig. 11 is a diagram showing an example in which the detection signals from the collision detection sensors are connected in parallel. In Fig. 10 and Fig. 11, the detection signals indicating the amount of change in resistance value in the four collision detection sensors (80, 80A, 82, 82A, 82B, 202) are shown as R1 to R4.

[0106] For the sake of simplicity, let us assume that R1 = R2 = R3 = R4 = Rc. When R1 changes to 2Rc (doubles) and when R1 changes to Rc / 2 (halves), the change in the combined resistance is as shown in Table 1.

[0107] [Table 1] The values ​​in parentheses in Table 1 indicate the ratio (percentage) of the amount of change to the value (original value) before the change in the amount of bending occurred.

[0108] From Table 1, it can be seen that if the resistance value increases when the collision detection sensors (80, 80A, 82, 82A, 82B, 202) are bent, a series connection provides higher sensitivity. On the other hand, if the resistance value decreases when the collision detection sensors (80, 80A, 82, 82A, 82B, 202) are bent (for example, when compressive strain is applied to the bending sensors, see FIG. 5(b)), a parallel connection provides higher sensitivity.

[0109] Therefore, when a bending sensor highly sensitive to tensile stress is used as the collision detection sensor (80, 80A, 82, 82A, 82B, 202) (see (a) of Figure 5), highly sensitive collision detection can be achieved by adopting an arrangement in which tensile stress acts on the sensitivity member 210 of the bending sensor and connecting them in series, as shown in Figure 2.

[0110] [Variation 5] In the first embodiment and the like, the collision detection sensors (80, 80A, 82, 82A, 82B, 202) are installed in the detector 10 of the contact-type measuring device (1, 1A, 1B), but this is not limiting. In the contact-type measuring device (1, 1A, 1B), for example, the collision detection sensors (80, 80A, 82, 82A, 82B, 202) can be installed in any location other than the part (oscillating part 18) that oscillates upon contact with the measurement object W.

[0111] In the contact-type measuring device (1, 1A, 1B), the swinging part 18 swings, and the shape is measured by detecting the amount of swing. Therefore, it is normal for an object to come into contact with the swinging part 18. Therefore, if a collision detection sensor (80, 80A, 82, 82A, 82B, 202) is installed on the swinging part 18, it will interfere with normal measurement due to overdetection of collisions, etc. Furthermore, installing the collision detection sensor (80, 80A, 82, 82A, 82B, 202) on the swinging part 18 will change the mass of the swinging part 18, and wiring for reading out signals from the collision detection sensor (80, 80A, 82, 82A, 82B, 202) will cause adverse effects on measurement accuracy due to factors such as a reaction force.

[0112] For this reason, the installation of collision detection sensors (80, 80A, 82, 82A, 82B, 202) By setting the location to any location other than the swinging portion 18, it is possible to prevent collisions while suppressing adverse effects on shape measurement accuracy.

[0113] [Variation 6] 12 is a diagram showing a collision detection sensor according to Modification 6. In Modification 6, the collision detection sensor 202 is simplified to include only a sensitivity member 210.

[0114] As shown in FIG. 12, the collision detection sensor 202 according to the sixth modification has a contact portion 212 attached to a tip portion 202E2.

[0115] The shape of the contact portion 212 is not particularly limited. The contact portion 212 may be a sphere as shown in Fig. 12, or may be any of a hemisphere (212A), a columnar or cylindrical shape (212B), or a rectangular parallelepiped shape (212C) as shown in Fig. 13. Note that the contact portion 212 may be shaped (for example, a sphere, hemisphere, curved surface, columnar or cylindrical shape, etc.) with a large radius of curvature on the obstacle 300 side (the side opposite to the moving body 200 side) in order to suppress stress concentration. This makes it possible to suppress damage to the obstacle 300.

[0116] Moreover, by adjusting (for example, increasing) the size of the contact portion 212, it is also possible to widen the detection range of the obstacle 300.

[0117] The material of the contact portion 212 is not particularly limited, but for example, a flexible buffer material (e.g., rubber) can be used. By using a buffer material as the contact portion 212, damage to the obstacle 300 can be suppressed.

[0118] It is preferable to select a material for the contact portion 212 that is not easily slippery in relation to the obstacle 300 (including the measurement object W), for example, a material whose coefficient of friction (static coefficient of friction) with the obstacle 300 is equal to or greater than a predetermined value. As shown in FIG. 14(b), if the coefficient of friction between the contact portion 212 and the obstacle 300 is small, the contact portion 212 may slip on the surface of the obstacle 300. In this case, the radius of curvature R slip is the radius of curvature R when there is no slippage as shown in Figure 14(a). fix Therefore, it is preferable to use a material with a large coefficient of friction for the contact portion 212.

[0119] The contact portion 212 is not limited to being a separate member from the support 204. For example, as shown in examples 202C and 202D in FIG. 15 , the tip 204E of the support 204 may be rounded toward the back surface of the support 204 and used as a substitute for the contact portion 212.

[0120] [Second embodiment] In the first embodiment, the contact type measuring device (1, 1A, 1B) has been described, but the movement of a moving body can also be controlled in a non-contact type measuring device.

[0121] Fig. 16 is a diagram showing a non-contact measuring device. Note that Fig. 16 omits some components such as a moving mechanism for a detector 10C and a stage on which a measurement target W is placed. Also, the device control unit 100 is similar to that of the first embodiment and is therefore not shown.

[0122] The non-contact measuring device 1C is a device (e.g., a white light interference microscope, see JP 2020-148894 A) that measures the shape, roughness, contour, etc. of the surface of the measurement object W by irradiating the surface of the measurement object W with measurement light LB and detecting the reflected light of the measurement light LB with a light receiving element (e.g., a CCD (Charge Coupled Device), etc.). Note that the measuring device 1C may be, for example, an interface detection device for detecting the interface of the measurement object W, or a crack detection device for detecting cracks formed in the measurement object W (e.g., see JP 2020-0766 A). (See Publication No. 51).

[0123] The detector 10C of the measurement device 1C includes, for example, a projection optical system for the measurement light LB, a light-receiving optical system for the reflected light, and a light-receiving element. In the detector 10C, the projection optical system and the light-receiving optical system determine the range (measurable range) in which the measurement object W can be measured. In Fig. 16, the limit of the measurable range that is closer to the detector 10C (near end) is denoted as NE, and the limit (far end) that is farther from the detector 10C is denoted as FE.

[0124] The measuring device 1C is provided with a movement mechanism for adjusting the relative position between the detector 10C and the measurement object W so that the measurement object W falls within the measurable range of the detector 10C. The movement mechanism adjusts the relative position between the detector 10C and the measurement object W by moving at least one of the detector 10C and the measurement object W (stage).

[0125] In the case of a contact-type detector 10 (see FIG. 1), the movement of the detector 10 can be stopped by utilizing a detection signal obtained when the tip of the stylus 12 abuts against the measurement object W.

[0126] In contrast, in the case of the non-contact detector 10C, there are cases where the object to be measured W cannot be detected, for example, because the reflectance of the surface of the object to be measured W is extremely low. In such cases, the detector 10C and the object to be measured W may collide with each other.

[0127] In this embodiment, a collision detection sensor 90 is attached to the detector 10C, thereby making it possible to avoid collision between the detector 10C and the measurement object W. The rigidity, shape, arrangement, and material of the collision detection sensor 90, as well as the formation of the contact portion 212 or its substitute, are the same as those in the first embodiment and Modifications 2 to 9, and therefore description thereof will be omitted. Note that when the collision detection sensor 90 is tilted with respect to the movement direction of the detector 10C (see Modification 4), the collision detection sensor 90 is positioned so as not to overlap with the optical paths of the measurement light LB and the reflected light.

[0128] The collision detection sensor 90 according to this embodiment is adjusted so that its tip (-Z end) 90E is closer to the far end FE of the measurable range. Specifically, it is preferable that the tip 90E of the collision detection sensor 90 be located near the near end NE. Alternatively, the position of the tip 90E when the detection signal from the collision detection sensor 90 exceeds a threshold may be near the near end NE. This prevents the detector 10C from approaching the measurement object W beyond the near end NE of the measurable range.

[0129] According to this embodiment, when adjusting the relative positions of the non-contact detector 10C and the measurement object W (such as when preparing for measurement), it is possible to avoid collision between the detector 10C and the measurement object W due to the detector 10C being too close.

[0130] In this embodiment, for example, the detector 10C and the measurement object W may be moved closer to each other to cause the measurement object W to collide with the collision detection sensor 90, and the detector 10C and the measurement object W may be moved away from the positions at the time of collision detection. This can shorten the time required for measurement preparation.

[0131] By positioning the tip 90E of the collision detection sensor 90 near the near end NE, the limitations on the measurable range of the collision detection sensor 90 can be reduced, allowing the measurable range to be used effectively.

[0132] [Application example] The movement control according to each of the above embodiments can be applied to devices in general that include moving objects.

[0133] FIG. 17 is a perspective view showing a moving body according to an application example of the present invention, and FIG. 18 is a perspective view showing a collision detection sensor according to an application example of the present invention.

[0134] 17 includes a main body 502 of the moving body and wheels 504 as a moving mechanism. The moving body 500 may be moved by power (for example, electricity) or may be moved manually.

[0135] A sensor unit 510 is attached to a main body 502 of the moving body 500. The sensor unit 510 includes a collision detection sensor 512 and an attachment base 514.

[0136] The collision detection sensor 512 is similar to the collision detection sensors according to the above-described embodiment and modifications 2 to 9.

[0137] The mounting base 514 is a device for mounting the collision detection sensor 512 to the movable body 502, and includes, for example, a magnet. This allows the collision detection sensor 512 to be mounted at any position when the movable body 502 is made of a magnetic material. Note that the mounting base 514 is not limited to one that uses magnetic force, and may include, for example, a clamp mechanism or a suction cup.

[0138] 17, the bending sensitivity direction of the collision detection sensor 512 is approximately parallel to the direction of movement of the moving body 500, but this embodiment is not limited to this. The above-described embodiments and modified examples 2 to 9 can be applied to the rigidity, shape, arrangement, and material of the collision detection sensor 512, the formation of the contact portion 212 or a substitute therefor, and the like.

[0139] In this embodiment as well, the influence of the collision of the moving body 500 with the obstacle 600 can be suppressed. [Explanation of symbols]

[0140] 1, 1A, 1B, 1C... Measuring device, 10, 10C... Detector, 12... Stylus, 14... Stylus unit, 16... Arm unit, 18... Swing unit, 20... Swing axis, 22... Scale, 24... Scale head, 26... Detector housing, 50... Measurement object installation unit, 52... Column, 52M... Actuator (motor), 54... Carriage, 54M... Actuator (motor), 56... Scale, 80, 80A, 82, 82A, 82B, 90... Collision detection sensor, 100... Device control unit, 102... Bending amount measurement unit, 104... Determination unit, 106... Bending amount storage unit, 108 ...Drive command unit, 110...input unit, 112...output unit, W...measurement object, 200...moving body, 202...collision detection sensor, 202E2...tip portion, 204, 204A, 204B...support body, 204E...tip portion, 206, 206A, 206B...low rigidity portion, 208, 208A, 208B...high rigidity portion, 210...sensitivity member, 212, 212A, 212B, 212C...contact portion, 300...obstacle, 500...moving body, 502...moving body main body, 504...wheel, 510...sensor unit, 512...collision detection sensor, 514...mounting base, 600...obstacle

Claims

1. a moving body that moves relatively within the measuring device; a collision detection sensor attached to the moving body and having a lower rigidity than the moving body; a device control unit that detects the amount of bending of the collision detection sensor and controls the movement of the moving body in accordance with the amount of bending; The collision detection sensor a flexible support; a sensitivity member laminated on the surface of the support; a low-rigidity portion formed in a partial region in the longitudinal direction of the support body, the low-rigidity portion having lower rigidity than a region other than the partial region; A measuring device comprising:

2. The measuring device according to claim 1 , wherein the collision detection sensor has a lower rigidity than an obstacle or a measurement object in a direction of movement of the moving body.

3. The measuring device according to claim 1 , wherein the low-rigidity portion is formed by reducing the thickness of the partial region, by cutting out the partial region, or by attaching a reinforcing member to a region of the rear surface of the support body other than the partial region.

4. A plurality of the collision detection sensors are provided, 2. The measuring device according to claim 1, wherein said device control section shares a common circuit for reading out the amount of bending of said plurality of collision detection sensors.

5. The collision detection sensor is attached to each of the moving axes of the moving body, The measuring device according to claim 1 , wherein the device control unit includes a circuit for reading out the amount of bending of the collision detection sensor for each of the movement axes.

6. the sensitivity member has a resistance value change rate due to tensile stress greater than a resistance value change rate due to compressive stress, 2. The measuring device according to claim 1, wherein the low-rigidity portion is formed so that a tensile stress acts on the sensitivity member when the collision detection sensor is bent.

7. The measuring device according to claim 1 , further comprising an output unit that notifies a result of detection of the amount of bending of the moving body.

8. a plurality of collision detection sensors each having an increased resistance value when bent; 2. The measuring device according to claim 1, wherein the device control unit includes a readout circuit that connects detection signals from the plurality of collision detection sensors in series and reads them out.

9. a plurality of collision detection sensors each having a resistance value that decreases when bent; 2. The measuring device according to claim 1, wherein the device control unit includes a readout circuit that connects detection signals from the plurality of collision detection sensors in parallel and reads them out.

10. The measuring device according to claim 1 , further comprising a contact portion attached to a tip of the collision detection sensor.

11. The measuring device according to claim 10 , wherein the contact portion has a curved surface on a side opposite to the moving body.

12. The measuring device according to claim 10 , wherein the contact portion is formed of a material that is not slippery in relation to an obstacle to the moving body.

13. The measuring device according to claim 10 , wherein the contact portion is flexible.

14. the movable body includes a contact detector that detects the amount of swing of the swinging part to measure the object to be measured, The measuring device according to claim 1 , wherein the collision detection sensor is attached to a part other than the swinging part.

15. the moving body includes a non-contact detector, 14. The measuring device according to claim 1, wherein the collision detection sensor is attached so that a tip thereof is positioned closer to the proximal end of the measurable range of the non-contact detector than to a distal end of the measurable range of the non-contact detector.

16. a step of detecting a bending amount of a collision detection sensor attached to a moving body included in a measuring device, the collision detection sensor comprising a flexible support, a sensitivity member laminated on a surface of the support, and a low-rigidity portion formed in a partial region in the longitudinal direction of the support, the low-rigidity portion having lower rigidity than regions other than the partial region; controlling the movement of the moving body in accordance with the amount of bending; A method for controlling a moving object comprising:

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