Conveyance system

Abstract

To provide a conveyance system capable of improving an appearance, preventing falling-off of a cover body, and improving attachability / detachability of the cover body.SOLUTION: A body 16 of an automatic conveyance device 8 is provided with two first belts arranged on one side of a cassette and two second belts arranged on the other side, and taking-up means for lifting the cassette. The taking-up means includes a first guide roller 50 that supports the first belts, and a second guide roller 52 that supports the second belts. A ceiling wall 68 of a cover body 18 of the automatic conveyance device 8 is provided with a first recess 72 in which a first slit 72a fitting the first guide roller 50 is formed, and a second recess 74 in which a second slit 74a fitting the second guide roller 52 is formed. When the cover body 18 is fixed to the body 16, the first slit 72a is positioned on the first guide roller 50, and the second slit 74a is positioned on the second guide roller 52 to fit and fix the cover body.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a conveying system in which a traveling panel along which an automatic conveying device travels is arranged on the top plate of a processing device including multiple processing devices, and a traveling guide line for guiding the travel of the automatic conveying device is formed on the traveling panel. [Background technology]

[0002] A wafer has multiple devices such as ICs and LSIs formed on its surface, separated by planned dividing lines. The back side is ground using a grinding machine to form the wafer to the desired thickness, and then the wafer is divided into individual device chips using a cutting machine and laser processing machine. Each of the divided device chips is used in electrical equipment such as mobile phones and personal computers.

[0003] The present applicant has also developed a transport system in which a travel path is arranged using the top plate of a processing device including processing devices such as grinding devices, cutting devices, and laser processing devices, and a wafer management device that stores multiple wafers, and an automatic transport device travels between the devices to transport wafers from a wafer storage device to each processing device or to transport consumables (see, for example, Patent Document 1).

[0004] The travel path is formed with a travel guide line for guiding the travel of the automatic transport device, and the main body of the automatic transport device is equipped with drive wheels arranged on the left and right sides of the travel guide line, directional casters arranged in front and behind the drive wheels, a sensor for reading the travel guide line, and a lifting means for lifting a cassette containing articles such as wafers at the center of the bottom to the article loading / unloading table of each device. The main body of the automatic transport device is also covered with a cover body. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2020-013892 Summary of the Invention [Problem to be solved by the invention]

[0006] However, the main body and cover are fastened with multiple bolts, which not only looks unsightly, but also raises the risk of the bolts loosening and the cover coming off the main body while the vehicle is in motion.Furthermore, attaching and detaching the cover is not easy and troublesome.

[0007] An object of the present invention is to provide a conveyance system that can improve the appearance, prevent the cover body from coming off the main body, and improve the ease of attaching and detaching the cover body. [Means for solving the problem]

[0008] According to the present invention, there is provided the following transport system that solves the above-mentioned problems: "In a conveyance system in which a traveling panel on which an automatic conveyance device travels is arranged on the top plate of a processing device including a plurality of processing devices, and a traveling guide line for guiding the travel of the automatic conveyance device is formed on the traveling panel, The automatic transport device includes a main body and a cover body, The main body is a right tire driving unit and a left tire driving unit disposed on opposite sides of the travel guide line; front wheels disposed in front of the right tire driving unit and the left tire driving unit; rear wheels disposed behind the right tire driving unit and the left tire driving unit; an opening formed in a central region surrounded by the right tire driving portion, the left tire driving portion, the front wheels, and the rear wheels; two first belts spaced apart on one side of a cassette containing the articles; two second belts spaced apart on the other side of the cassette containing the articles; a first guide roller for supporting the first belt at the interval through the opening, a second guide roller for supporting the second belt at the interval through the opening, and a take-up drive unit having a take-up roller disposed between the first guide roller and the second guide roller and taking up the first belt and the second belt, and belt take-up means for raising and lowering the cassette; The cover body is a ceiling wall and a side wall; a first recessed portion protruding inward from the ceiling wall and having a first slit formed therein that fits into a central portion of the first guide roller; a second recessed portion formed with a second slit that protrudes inward from the ceiling wall and fits into a central portion of the second guide roller, When the cover body is fixed to the main body, The first slit is positioned at the center of the first guide roller, and the second slit is positioned at the center of the second guide roller, and the two guide rollers are fitted together and fixed.

[0009] Preferably, a central portion of the first guide roller is exposed from the first recess, and a central portion of the second guide roller is exposed from the second recess to form a handle.

[0010] It is desirable that a limit switch is provided on the main body, and a pressing portion that turns the limit switch ON is provided on the cover body, and when the cover body is removed from the main body, the limit switch turns OFF to cut off the power supply to the right tire drive unit, the left tire drive unit and the winding drive unit. [Effects of the Invention]

[0011] The transport system of the present invention comprises: A conveyance system in which a travel panel on which an automatic conveyance device travels is arranged on a top plate of a processing device including a plurality of processing devices, and a travel guide line for guiding the travel of the automatic conveyance device is formed on the travel panel, The automatic transport device includes a main body and a cover body, The main body comprises: a right tire driving unit and a left tire driving unit disposed on opposite sides of the travel guide line; front wheels disposed in front of the right tire driving unit and the left tire driving unit; rear wheels disposed behind the right tire driving unit and the left tire driving unit; an opening formed in a central region surrounded by the right tire driving portion, the left tire driving portion, the front wheels, and the rear wheels; two first belts spaced apart on one side of a cassette containing the articles; two second belts spaced apart on the other side of the cassette containing the articles; a first guide roller for supporting the first belt at the interval through the opening, a second guide roller for supporting the second belt at the interval through the opening, and a take-up drive unit having a take-up roller disposed between the first guide roller and the second guide roller and taking up the first belt and the second belt, and belt take-up means for raising and lowering the cassette; The cover body is a ceiling wall and a side wall; a first recessed portion protruding inward from the ceiling wall and having a first slit formed therein that fits into a central portion of the first guide roller; a second recessed portion formed with a second slit that protrudes inward from the ceiling wall and fits into a central portion of the second guide roller, When the cover body is fixed to the main body, The first slit is positioned at the center of the first guide roller, and the second slit is positioned at the center of the second guide roller, and they are fitted and fixed together. This eliminates the need to fasten the main body and cover body with multiple bolts, eliminating the problem of poor appearance, and also the problem of the bolts loosening and the cover body coming off the main body while driving.In addition, the main body and cover body can be easily attached and detached, eliminating the problem of it being too hassle. [Brief explanation of the drawings]

[0012] [Figure 1]1 is a schematic diagram of a transport system according to the present invention. [Figure 2] FIG. 2 is a perspective view of the automatic transport device shown in FIG. [Figure 3] FIG. 3 is a perspective view of the main body shown in FIG. 2 (in a state where the first and second belts have been fed out). [Figure 4] FIG. 3 is a perspective view of the cover shown in FIG. 2. [Figure 5] Cross-sectional view taken along line AA in FIG. 4. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, preferred embodiments of a transport system according to the present invention will be described with reference to the drawings.

[0014] (Transport System 2) Referring to FIG. 1, the conveying system 2 has a traveling panel 10 on which an automatic conveying device 8 travels, which is disposed on the top plate 6 of a processing device 4 including a plurality of processing devices, and a traveling guide line 12 is formed on the traveling panel 10 to guide the travel of the automatic conveying device 8.

[0015] The processing equipment 4 includes a storage device 4a that stores items, and a processing device 4b to which the items in the storage device 4a are transported by an automatic transport device 8. Examples of items stored in the storage device 4a include workpieces such as semiconductor wafers that are processed in the processing device 4b, and processing tools used when processing in the processing device 4b. Examples of processing tools used when processing in the processing device 4b include cutting blades used when cutting the workpiece, and grinding wheels with grinding stones used when grinding the workpiece to thin it.

[0016] A traveling panel 10 is disposed on the top plate 6 of the processing equipment 4, and the plurality of processing equipment 4 are connected to one another by the traveling panel 10. A traveling guide line 12 that guides the travel of the automatic conveying device 8 is formed on the upper surface of the traveling panel 10. Therefore, the automatic conveying device 8 can travel on the traveling panel 10 and transport the article received from the storage device 4a to the processing device 4b. The traveling panel 10 is also provided with a fall prevention wall 14 to prevent the automatic conveying device 8 from falling off the traveling panel 10.

[0017] (Main body 16 of automatic conveying device 8) 2 and 3, the automatic transport device 8 includes a main body 16 and a cover body 18 (see FIG. 2). As shown in FIG. 3, the main body 16 includes a right tire drive unit 20 and a left tire drive unit 22 arranged on either side of the travel guide line 12, front wheels 24 arranged in front of the right tire drive unit 20 and the left tire drive unit 22, and rear wheels 26 arranged behind the right tire drive unit 20 and the left tire drive unit 22. The front-rear and left-right directions of the automatic transport device 8 are indicated by arrows in FIG. 3.

[0018] The right tire drive unit 20 includes a right tire 28 and a right motor (not shown) that drives the right tire 28, and the right motor is attached to the right side of the frame 30 of the main body 16. Similarly, the left tire drive unit 22 includes a left tire 32 and a left motor 34 that drives the left tire 32, and the left motor 34 is attached to the left side of the frame 30. In the automatic transport device 8, by adjusting the rotational speed and rotational direction of the right tire 28 and the left tire 32, it is possible to move forward, backward, turn right, turn left, or spin turn (turn on the spot around the vertical center axis of the automatic transport device 8).

[0019] The front wheels 24 are mounted as a pair on the front side of the frame 30 of the main body 16, spaced apart in the left-right direction. However, only one of the front wheels 24 is shown in Figure 3. The rear wheels 26 are mounted as a pair on the rear side of the frame 30 of the main body 16, spaced apart in the left-right direction. Both the front wheels 24 and the rear wheels 26 are directional casters, and are mounted on the frame 30 so as to be swivel freely around an axis in the vertical direction.

[0020] Continuing the explanation with reference to Figure 3, the main body 16 of the automatic conveying device 8 is equipped with an opening 36 formed in a central area surrounded by the right tire drive unit 20, the left tire drive unit 22, the front wheels 24, and the rear wheels 26, two first belts 40 arranged at intervals on one side of a cassette 38 that stores articles, two second belts 42 arranged at intervals on the other side of the cassette 38 that stores articles, and a belt winding means 44.

[0021] The opening 36 is rectangular and formed in a central region of the frame 30 of the main body 16. The frame 30 is provided with a front support wall 46 extending upward from the front end of the opening 36, and a rear support wall 48 extending upward from the rear end of the opening 36.

[0022] The cassette 38 is formed in a box shape with a smaller vertical dimension (thickness) than its dimensions in the front-rear and left-right directions. The cassette 38 has a main portion 38a that stores articles and a flip-up cover portion 38b that opens and closes an opening (not shown) of the main portion 38a. Two first belts 40 extend upward from the upper left surface of the main portion 38a of the cassette 38, spaced apart in the front-rear direction. Two second belts 42 extend upward from the upper right surface of the main portion 38a of the cassette 38, spaced apart in the front-rear direction. In this embodiment, the distance between the first belts 40 in the front-rear direction is the same as the distance between the second belts 42 in the front-rear direction.

[0023] The belt winding means 44 includes a first guide roller 50 that supports the first belt 40 at a distance through the opening 36 of the frame 30, a second guide roller 52 that supports the second belt 42 at a distance through the opening 36, and a winding drive unit 56 that has a winding roller 54 disposed between the first guide roller 50 and the second guide roller 52 and that winds up the first belt 40 and the second belt 42.

[0024] The first and second guide rollers 50, 52 and the take-up roller 54 all extend in the front-to-rear direction and are rotatably supported by the front support wall 46 and the rear support wall 48 of the frame 30. The first guide roller 50 is located on the left side of the main body 16, the second guide roller 52 is located on the right side of the main body 16, and the take-up roller 54 is located between the first guide roller 50 and the second guide roller 52. The take-up roller 54 is driven by a take-up motor 58 mounted on the upper rear surface of the frame 30.

[0025] The drive current for the winding motor 58 is sent from a driver 60 disposed adjacent to the winding motor 58. The driver 60 also sends drive current to the right motor of the right tire drive unit 20 and the left motor 34 of the left tire drive unit 22. The drive current output by the driver 60 is controlled by a control means 62 mounted on the rear of the frame 30. The control means 62 may be composed of a computer having a processor and memory. Power is supplied to the control means 62 and the driver 60 from a battery 64 mounted on the front of the frame 30. However, a limit switch 66 is disposed on the top surface of the frame 30. When the limit switch 66 is turned ON, power supply from the battery 64 to the control means 62 and the like is permitted, but when the limit switch 66 is turned OFF, power supply from the battery 64 to the control means 62 and the like is blocked.

[0026] (Cover body 18 of automatic conveying device 8) 4 and 5, the cover body 18 has a ceiling wall 68 and side walls 70. The ceiling wall 68 has a rectangular shape with rounded corners. The side walls 70 have a rectangular cylindrical shape that extends downward from the periphery of the ceiling wall 68.

[0027] The ceiling wall 68 is formed with a first recess 72 and a second recess 74, each of which protrudes hemispherically on the inner side (lower side) of the ceiling wall 68. The first and second recesses 72, 74 are spaced apart in the left-right direction, with the first recess 72 located on the left side and the second recess 74 located on the right side. The first recess 72 is formed with a first slit 72a that fits into the center of the first guide roller 50. The upper end of the first slit 72a is provided with a locking portion 72b extending to the left. The second recess 74 is formed with a second slit 74a that fits into the center of the second guide roller 52. The upper end of the second slit 74a is provided with a locking portion 74b extending to the right.

[0028] The cover body 18 is provided with a pressing portion 76 that presses the limit switch 66 to turn it ON when the cover body 18 is attached to the main body 16. In this embodiment, the pressing portion 76 is provided on the inner surface of the side wall 70, as shown in FIG.

[0029] 2 to 5, in the automatic conveyance device 8 described above, when the cover body 18 is fixed to the main body 16, the first slit 72a of the cover body 18 is positioned at the center of the first guide roller 50 of the main body 16, and the second slit 74a of the cover body 18 is positioned at the center of the second guide roller 52 of the main body 16. Then, the center of the first guide roller 50 is fitted into the first slit 72a, and the center of the second guide roller 52 is fitted into the second slit 74a. Then, the center of the first guide roller 50 is fitted into the locking portion 72b of the first slit 72a, and the center of the second guide roller 52 is fitted into the locking portion 74b of the second slit 74a. This fixes the cover body 18 to the main body 16 (see FIG. 2).

[0030] As described above, in this embodiment, the main body 16 and the cover body 18 are fixed together by fitting the first and second guide rollers 50, 52 into the first and second slits 72a, 74a. Therefore, there is no need to fasten the main body 16 and the cover body 18 together with multiple bolts, which solves the problem of poor appearance and also solves the problem of the bolts loosening during travel and the cover body 18 coming off the main body 16. Furthermore, the main body 16 and the cover body 18 can be easily attached and detached, which also solves the problem of it being too troublesome.

[0031] 2, in this embodiment, when the cover body 18 is fixed to the main body 16, the center portion of the first guide roller 50 is exposed from the first recess 72, and the center portion of the second guide roller 52 is exposed from the second recess 74. Therefore, the exposed centers of the first and second guide rollers 50, 52 can be used as handles, making it easy to carry the automatic conveying device 8.

[0032] Furthermore, in this embodiment, when the cover body 18 is removed from the main body 16, the pressing portion 76 no longer presses the limit switch 66, causing the limit switch 66 to turn OFF. This cuts off the power to the right tire drive unit 20, the left tire drive unit 22, and the winding drive unit 56. Therefore, in this embodiment, when the cover body 18 is removed from the main body 16, the automatic conveyor device 8 is prevented from operating against the intention of the worker. [Explanation of symbols]

[0033] 2:Transport system 4: Processing equipment 4a: Storage device 4b: Processing equipment 6: Top plate 8: Automatic transport device 10: Travel panel 12: Driving guidance line 16: Main body 18: Cover body 20: Right tire drive unit 22: Left tire drive unit 24: Front wheel 26: Rear wheel 36: Opening 38: Cassette 38a: Main part 38b: Cover part 40: First Belt 42: Second Belt 44: Belt winding means 50: First guide roller 52: Second guide roller 54: Winding roller 56: Winding drive unit 66: Limit switch 68: Ceiling wall 70: Side wall 72: First recess 72a: First slit 74: Second recess 74a: Second slit 76: Pressing part

Claims

1. A conveyance system in which a travel panel on which an automatic conveyance device travels is arranged on a top plate of a processing device including a plurality of processing devices, and a travel guide line for guiding the travel of the automatic conveyance device is formed on the travel panel, The automatic transport device includes a main body and a cover body, The main body is a right tire driving unit and a left tire driving unit disposed on opposite sides of the travel guide line; front wheels disposed in front of the right tire driving unit and the left tire driving unit; rear wheels disposed behind the right tire driving unit and the left tire driving unit; an opening formed in a central region surrounded by the right tire driving portion, the left tire driving portion, the front wheels, and the rear wheels; two first belts spaced apart on one side of a cassette containing the articles; two second belts spaced apart on the other side of the cassette containing the articles; a first guide roller for supporting the first belt at the interval through the opening, a second guide roller for supporting the second belt at the interval through the opening, and a take-up drive unit having a take-up roller disposed between the first guide roller and the second guide roller and taking up the first belt and the second belt, and belt take-up means for raising and lowering the cassette; The cover body is a ceiling wall and a side wall; a first recessed portion protruding inward from the ceiling wall and having a first slit formed therein that fits into a central portion of the first guide roller; a second recessed portion formed with a second slit that protrudes inward from the ceiling wall and fits into a central portion of the second guide roller, When the cover body is fixed to the main body, A conveying system in which the first slit is positioned at the center of the first guide roller and the second slit is positioned at the center of the second guide roller, and the rollers are fitted and fixed.

2. 2. The conveying system according to claim 1, wherein a central portion of the first guide roller is exposed from the first recess, and a central portion of the second guide roller is exposed from the second recess to form a handle.

3. A limit switch is provided on the main body, and a pressing portion for turning on the limit switch is provided on the cover body.

2. The conveying system according to claim 1, wherein when the cover body is removed from the main body, the limit switch is turned off to cut off power to the right tire drive unit, the left tire drive unit and the winding drive unit.

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