Transfer hand and transfer robot

Abstract

To provide a transfer hand capable of aligning a posture of a tape frame.SOLUTION: A transfer hand 5 comprises: a hand body part 32 which supports a tape frame 2 in a Z1 direction; a pair of movable rollers 45 movable between a pinching position 45C in contact with a first linear outer peripheral edge portion 15 of the tape frame 2 mounted on the hand body part 32 and an outer side position 45A separated from the tape frame 2; a first roller 43 which can abut, from an outer peripheral side, on a first circular-arc outer peripheral edge portion 21 of the tape frame 2; and a second roller 44 which can abut, from the outer peripheral side, on a second circular-arc outer peripheral edge portion 22 of the tape frame 2. The transfer hand 5 moves the pair of movable rollers 45 to the pinching position 45C when the tape frame 2 is mounted between the pair of movable rollers 45 and the first and second rollers 43 and 44 in a state where the pair of movable rollers 45 is disposed at the outside position 45A.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] This example relates to a transport hand and a transport robot. [Background technology]

[0002] In the semiconductor manufacturing process, wafers are sometimes transported on a tape frame. The tape frame includes a ring member and an adhesive sheet attached to the underside of the ring member to seal the opening of the ring member. The wafer is attached to the upper surface of the adhesive sheet on the inner periphery of the ring member. In a plan view, the ring member includes, on its outer periphery, a first pair of straight outer periphery edge portions extending parallel to each other, a second pair of straight outer periphery edge portions extending in a direction perpendicular to the pair of straight outer periphery edge portions, and four arcuate outer periphery edge portions connecting adjacent straight outer periphery edge portions and the second straight outer periphery edge portion in the circumferential direction. Two of the four arcuate outer periphery edge portions have notches.

[0003] A transfer robot that removes a tape frame holding a wafer from a cassette and transfers it to a processing start position for the next process is described in Patent Document 1. The transfer robot in this document includes a transfer hand for holding the tape frame and a transfer hand movement mechanism for moving the transfer hand toward and away from the cassette. The transfer hand includes a mounting portion for placing the tape frame and a chuck for clamping the tape frame from above and below. The transfer robot in this document also includes a pair of centering members that are arranged on either side of the opening of the cassette and are movable toward and away from each other.

[0004] When removing a tape frame from a cassette, the transport hand is inserted into the cassette and placed on the placement section. The chuck is then driven to clamp the tape frame placed on the placement section from above and below. The transport hand is then moved away from the cassette to pull the tape frame out of the opening of the cassette to a position where the left and right linear outer peripheral edges are partially exposed. The pair of centering members are then moved closer to each other to a predetermined distance, and the chuck is driven to release the clamping of the tape frame by the transport hand. Then, while the centering members are brought into contact with the left and right linear outer peripheral edges of the tape frame, the transport hand is moved closer to the cassette to push the tape frame into the cassette. This centers the tape frame on the transport hand, and the tape frame is rotated to adjust its orientation. The pair of centering members are then moved away from each other. The chuck is then driven to grip the tape frame with the transport hand, and the transport hand is then moved away from the cassette. This allows the tape frame to be removed from the cassette through the opening. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-30703 Summary of the Invention [Problem to be solved by the invention]

[0006] In the technique of Patent Document 1, in order to set the attitude of the tape frame being transported to a predetermined attitude on the transport hand, it is necessary to provide a mechanism that is separate from the transport hand.

[0007] In view of the above problems, an object of this example is to provide a transport hand that can adjust the attitude of a tape frame to a predetermined attitude. [Means for solving the problem]

[0008] In order to solve the above-mentioned problems, the present invention provides a transport hand for holding a tape frame having, in a plan view, an outer periphery having a straight outer periphery portion extending linearly, a first arc outer periphery portion that is an arc on one side of a center line extending through the center of the straight outer periphery portion in a direction perpendicular to the straight outer periphery portion and that curves toward the center line in a direction away from the straight outer periphery portion in a center line direction along the center line, and a second arc outer periphery portion that is symmetrical to the first arc outer periphery portion with respect to the center line on the other side of the center line, the transport hand comprising: a hand main body portion that supports the tape frame from below; a first roller that is fixed to the hand main body portion and can come into contact from the outer periphery with the first arc outer periphery portion of the tape frame placed on the hand main body; a second roller that is fixed to the hand main body portion and can come into contact from the outer periphery with the second arc outer periphery portion of the tape frame placed on the hand main body; an outer position that is spaced outward from the straight outer periphery portion of the tape frame placed on the hand main body; the pair of moving rollers are arranged spaced apart in an orthogonal direction perpendicular to the moving direction in which the pair of moving rollers move, and are arranged symmetrically with respect to an imaginary line that passes through the centers of the two moving rollers and extends in the moving direction; the first roller and the second roller are arranged symmetrically with respect to the imaginary line; and when the tape frame is placed between the pair of moving rollers on the hand main body and the first and second rollers with the pair of moving rollers arranged at the outer position, the pair of moving rollers are moved to the clamping position.

[0009] The transport robot of this example is characterized by including the transport hand described above and a transport hand moving mechanism that moves the transport hand in the up and down direction and the movement direction. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is an explanatory diagram of a transfer robot according to an embodiment of the present invention. [Figure 2] FIG. 2 is a plan view of a tape frame housed in a cassette. [Figure 3] FIG. 3 is a plan view of the transport hand. [Figure 4] FIG. 4 is a cross-sectional view of the base and palm of the transport hand. [Figure 5] FIG. 5 is a cross-sectional view of the first finger portion of the transport hand. [Figure 6] FIG. 6 is an explanatory diagram showing a state in which the tape frame is placed on the transport hand. [Figure 7] FIG. 7 is an explanatory diagram of a state in which the tape frame is held by the transport hand. DETAILED DESCRIPTION OF THE INVENTION

[0011] The transfer robot and transfer hand to which this embodiment is applied will be described below with reference to the drawings.

[0012] (Transport robot) Fig. 1 is a perspective view of a transfer robot according to an embodiment of the present invention. As shown in Fig. 1, the transfer robot 1 of the present invention takes out one tape frame 2 from a cassette 3 in which a plurality of tape frames 2 are stored stacked at a predetermined pitch, and transfers it to a processing start position for the next process. Each tape frame 2 holds a circular wafer (not shown).

[0013] The transport robot 1 has a transport hand 5 for holding the tape frame 2, a transport hand moving mechanism 6 for moving the transport hand 5, and a control unit 7. The transport hand moving mechanism 6 has an arm 8 with the transport hand 5 attached to its tip. The transport hand moving mechanism 6 moves the arm 8 up and down to move the transport hand 5 up and down. The transport hand moving mechanism 6 also drives the arm 8 to move the transport hand 5 in a direction perpendicular to the up-down direction. Furthermore, the transport hand moving mechanism 6 drives multiple joints provided on the arm 8 to rotate the transport hand 5.

[0014] The transport robot 1 of this example moves the transport hand 5 in the vertical direction (Z-axis direction) when removing the tape frame 2 from the cassette 3. Furthermore, the transport robot 1 of this example moves the transport hand 5 back and forth in a direction facing the opening 3a of the cassette 3 (X-axis direction) when removing the tape frame 2 from the cassette 3. The control unit 7 drives and controls the transport hand 5 and the transport hand moving mechanism 6.

[0015] (Tape Frame) 2 is a plan view of the tape frame 2 housed in the cassette 3. As shown in FIG. 2, the tape frame 2 includes an annular ring member 11 and an adhesive sheet 13 attached to the underside of the ring member 11 to close an opening 12 of the ring member 11. The opening 12 is circular. The wafer held by the tape frame 2 is circular and attached to a predetermined wafer-attaching area 14 on the upper surface of the adhesive sheet 13 on the inner periphery of the ring member 11. The wafer-attaching area 14 is a circular area located a predetermined distance inward from the edge of the opening 12 of the ring member 11.

[0016] In a plan view, the ring member 11 has, on its outer periphery, a first pair of straight outer periphery edge portions (first straight outer periphery edge portion 15 and second straight outer periphery edge portion 16) extending parallel to each other, a second pair of straight outer periphery edge portions (third straight outer periphery edge portion 17 and fourth straight outer periphery edge portion 18) extending parallel to a direction perpendicular to the first pair of straight outer periphery edge portions, and four arcuate outer periphery edge portions 21-24 connecting adjacent straight outer periphery edge portions in the circumferential direction. Two of the four arcuate outer periphery edge portions 21-24 (first arcuate outer periphery edge portion 21 and second arcuate outer periphery edge portion 22) are provided with notches 25, 26, respectively. The centers of the four arcuate outer periphery edge portions 21-24 are the center of the ring member 11. Here, if the notches 25, 26 are not formed in the first arcuate outer peripheral edge portion 21 and the second arcuate outer peripheral edge portion 22, respectively, the tape frame 2 has four-way rotational symmetry in plan view.

[0017] The tape frame 2 is housed in the cassette 3 in a position in which the first arcuate outer peripheral edge portion 21 and the second arcuate outer peripheral edge portion 22, which are provided with the notches 25, among the four arcuate outer peripheral edge portions 21 to 24, are positioned at the rear side of the cassette 3. Of the four straight line outer peripheral edge portions, the first straight line outer peripheral edge portion 15 is positioned on the side of the opening 3a of the cassette 3. The first straight line outer peripheral edge portion 15 is a straight line outer peripheral edge portion positioned opposite the first arcuate outer peripheral edge portion 21 and the second arcuate outer peripheral edge portion 22.

[0018] The first arcuate outer peripheral edge portion 21 is arcuate and curves toward the center line N on one side of a center line N that extends through the center of the first straight outer peripheral edge portion 15 in a direction perpendicular to the first straight outer peripheral edge portion 15, in the center line direction along the center line N (the X-axis direction in FIG. 2 ) away from the first straight outer peripheral edge portion 15. The second arcuate outer peripheral edge portion 22 is arcuate and curves toward the center line N on the other side of the center line N, in the center line direction away from the first straight outer peripheral edge portion 15. If the notches 25, 26 are not formed, the second arcuate outer peripheral edge portion 22 is symmetrical to the first arcuate outer peripheral edge portion 21 with the center line N as the line of symmetry.

[0019] In the following description, the three mutually orthogonal directions are referred to as the X-axis direction, the Y-axis direction, and the Z-axis direction. One of the X-axis directions is referred to as the X1 direction (first direction), the other as the X2 direction (second direction), one of the Y-axis directions is referred to as the Y1 direction and the other as the Y2 direction, and one of the Z-axis directions is referred to as the Z1 direction and the other as the Z2 direction. The X-axis direction is the direction directly facing the opening 3a of the cassette 3. The X-axis direction is the direction in which the center line N of the tape frame 2 housed in the cassette 3 extends. The X1 direction is the direction in which the cassette 3 extends. The X1 direction is the direction away from the cassette 3, and the X2 direction is the direction approaching the cassette 3. When the tape frame 2 is housed in the cassette 3, the first straight outer peripheral edge portion 15 is located at the end of the tape frame 2 in the X1 direction. The first arc-shaped outer peripheral edge portion 21 and the second arc-shaped outer peripheral edge portion 22 are located in the X2 direction of the first straight outer peripheral edge portion 15. The Y1 direction is the side on which the first arc-shaped outer peripheral edge portion 21 is located relative to the center line N of the tape frame 2, and the Y2 direction is the side on which the second arc-shaped outer peripheral edge portion 22 is located relative to the center line N of the tape frame 2. The Z-axis direction is the up-down direction. The Z1 direction is downward, and the Z2 direction is upward.

[0020] As shown in FIG. 2 , the second linear outer peripheral edge portion 16, which faces the first linear outer peripheral edge portion 15 in the X-axis direction, is located between the first arc-shaped outer peripheral edge portion 21 and the second arc-shaped outer peripheral edge portion 22. The third arc-shaped outer peripheral surface portion 23 is located adjacent to the first linear outer peripheral edge portion 15 in the Y1 direction. The third arc-shaped outer peripheral surface portion 23 connects the third linear outer peripheral edge portion 17, which extends in the X-axis direction, to the first linear outer peripheral edge portion 15. The fourth arc-shaped outer peripheral surface portion 24 is located adjacent to the first linear outer peripheral edge portion 15 in the Y2 direction. The fourth arc-shaped outer peripheral surface portion 24 connects the fourth linear outer peripheral edge portion 18, which extends in the X-axis direction, to the first linear outer peripheral edge portion 15. The fourth linear outer peripheral edge portion 18 faces the third linear outer peripheral edge portion 17 in the Y-axis direction.

[0021] (Transport hand) Fig. 3 is a plan view of the transport hand 5. As shown in Fig. 3, the transport hand 5 includes a base 31 connected to the arm 8, and a hand main body 32 attached to the end portion of the base 31 in the X2 direction. When transporting the tape frame 2, the hand main body 32 supports the ring member 11 of the tape frame 2 from the Z1 direction.

[0022] The hand main body 32 includes a palm portion 35 extending from the base portion 31 in both the X2 and Y directions, and a first finger portion 36 and a second finger portion 37 extending in the X2 direction from both ends of the palm portion 35 in the Y direction. The first finger portion 36 is positioned in the Y1 direction of the second finger portion 37. When the tape frame 2 is placed on the hand main body 32, the palm portion 35 supports a portion of the tape frame 2 that is continuous with the inner periphery of the first linear outer peripheral edge portion 15. The first finger portion 36 supports a portion of the tape frame 2 that is continuous with the inner periphery of the first arc-shaped outer peripheral edge portion 21. The second finger portion 37 supports a portion of the tape frame 2 that is continuous with the inner periphery of the second arc-shaped outer peripheral edge portion 22. The hand main body 32 also includes a pair of elongated holes 39 extending parallel to the X direction on the side of the palm portion 35 closer to the base portion 31. Furthermore, the hand body 32 includes a first protrusion 41 that protrudes in the X2 direction from the tip of the first finger 36, and a second protrusion 42 that protrudes in the second direction from the tip of the second finger 37.

[0023] The transport hand 5 also includes a first roller 43 fixed to the hand main body 32 and capable of contacting the first arc-shaped outer peripheral edge portion 21 of the tape frame 2 placed on the hand main body 32 from the outer periphery, and a second roller 44 fixed to the hand main body 32 and capable of contacting the second arc-shaped outer peripheral edge portion 22 of the tape frame 2 placed on the hand main body 32 from the outer periphery. The first roller 43 and the second roller 44 have rotation axes oriented in the Z-axis direction. The first roller 43 is attached to a first protrusion 41. The first protrusion 41 supports the first roller 43 from the Z1 direction. The second roller 44 is attached to a second protrusion 42. The second protrusion 42 supports the second roller 44 from the Z1 direction. The first roller 43 and the second roller 44 are made of resin or metal.

[0024] Furthermore, the transport hand 5 includes a pair of moving rollers 45 that move between an outer position 45A that is spaced from the first linear outer peripheral edge portion 15 of the tape frame 2 placed on the hand main body 32 toward the outer periphery, and an inner position 45B that is spaced from the outer position 45A in the X2 direction. A clamping position 45C is set between the outer position 45A and the inner position 45B (see FIG. 7, which will be described later). The clamping position 45C is set when the pair of moving rollers 45 are placed on the hand main body 32. This is the position where the rollers 45 come into contact with the first linear outer peripheral edge portion 15 of the tape frame 2 and clamp the tape frame 2 between the first roller 43 and the second roller 44. When the tape frame 2 is placed on the hand main body 32, the pair of movable rollers 45 move between the outer position 45A and the clamping position 45C.

[0025] Each of the pair of moving rollers 45 has a rotation axis facing the Z2 direction. The pair of moving rollers 45 are arranged spaced apart in an orthogonal direction (Y-axis direction) perpendicular to the movement direction (X-axis direction) in which the pair of moving rollers 45 move. The pair of moving rollers 45 are arranged symmetrically with respect to an imaginary line L that passes through the centers of the two moving rollers 45 and extends in the X-axis direction. Each moving roller 45 is made of resin or metal.

[0026] Here, the first roller 43 and the second roller 44 are arranged line-symmetrically with respect to the imaginary line L. The pair of elongated holes 39 are also arranged line-symmetrically with respect to the imaginary line L. The shape of the hand main body 32 when viewed from the Z-axis direction has line symmetry with the imaginary line L as the center. In other words, the imaginary line L is the center line of the hand main body 32.

[0027] The transport hand 5 also has a roller movement mechanism 47 that linearly moves the pair of movable rollers 45 in the X-axis direction between an outer position 45A and an inner position 45B. The roller movement mechanism 47 includes a roller support member 48 that supports each of the pair of movable rollers 45 from the Z1 direction, and a linear actuator 49 that moves the roller support member 48 back and forth in the X-axis direction. The roller support member 48 includes a shaft 51 that extends in the X-axis direction, and roller mounting portions 52 that extend from the X2-direction end of the shaft 51 to both sides in the Y-axis direction. The X1-direction end of the shaft 51 is connected to an output portion 49a of the actuator 49. A movable roller 45 is attached to each end portion of the roller mounting portion 52 in the Y-axis direction. The actuator 49 is driven and controlled by the control unit 7.

[0028] FIG. 4 is a cross-sectional view of the base 31 and palm 35 of the transport hand 5. In FIG. 4, the transport hand 5 is cut along imaginary line L. FIG. 5 is a cross-sectional view of the first finger 36 and first protrusion 41 of the transport hand 5. In FIG. 5, the first finger 36 and the first protrusion 41 are cut along the X-axis direction. As shown in FIG. 3, the actuator 49 is attached to the base 31. More specifically, as shown in FIG. 4, the base 31 has a recess 55 on its upper surface. The actuator 49 is disposed inside the recess 55. The base 31 also has a groove 56 on its upper surface that extends from the recess 55 in the X2 direction and opens to the end of the base 31 in the X2 direction. The shaft 51 of the roller support member 48 is disposed in the groove 56. The X2 end of the shaft 51 is connected to the output portion 49a of the actuator 49 within the recess 55. The roller attachment portion 52 of the roller support member 48 is located further in the X2 direction than the X2-direction opening of the groove portion 56. In other words, the roller attachment portion 52 is located further in the X2 direction than the base portion 31.

[0029] The palm 35 of the transport hand 5 is placed on the base 31 from the Z2 direction so that its end in the X1 direction covers the groove 56. Therefore, the roller support member 48 is positioned in the Z1 direction of the hand main body 32. Furthermore, each of the pair of moving rollers 45 attached to the roller support member 48 passes through a pair of elongated holes 39 provided in the hand main body 32 in the Z2 direction from the Z1 direction, and protrudes in the Z2 direction from the top surface of the hand main body 32. When the roller moving mechanism 47 is driven, each moving roller 45 is movable along the corresponding elongated hole 39 between an outer position 45A and an inner position B.

[0030] Two plate members 57 arranged in the Y-axis direction are placed over the end portion of the palm portion 35 in the X1 direction that is placed on the base portion 31. As shown in FIG. 3, when viewed from the Z-axis direction, the two plate members 57 are positioned in the Y1 direction of the grooves 56 and the Y2 direction of the grooves 56, respectively. The hand body is fixed to the base part 31 by a plurality of screws that are screwed into each plate member 57 from the Z2 direction and pass through the hand body part 32 to reach the base part 31.

[0031] Here, the hand main body 32 has a ceramic frame 61. The frame 61 is plate-shaped and includes a palm 35, first finger portions 36, second finger portions 37, and a pair of elongated holes 39. The hand main body 32 also has a first plate member 62 and a second plate member 63 attached to the frame 61 and made of metal.

[0032] More specifically, the first protrusion 41 is made of a metal first plate member 62 fixed to the end of the first finger 36 in the X2 direction. As shown in FIG. 5 , the first plate member 62 includes a first fixing portion 62a fixed to the upper surface of the first finger 36, a first bent portion 62b bent in the Z1 direction along the tip of the first finger 36, and a first roller fixing portion 62c extending in the X2 direction from the lower end of the first bent portion 62b. The first roller fixing portion 62c is the first protrusion 41 and protrudes in the X2 direction from the lower end of the frame 61. The first roller fixing portion 62c supports the first roller 43 from the Z1 direction. The second protrusion 42 is made of a metal second plate member 63 fixed to the frame 61. The second plate member 63 has a configuration corresponding to that of the first plate member 62. Therefore, although not shown in the figures, the second plate member 63 includes a second fixing portion fixed to the upper surface of the second finger portion 37, a second bent portion bent in the Z1 direction along the tip of the second finger portion 37, and a second roller fixing portion extending in the X2 direction from the lower end of the second bent portion. The second roller fixing portion is the second protruding portion 42, which protrudes in the X2 direction from the lower end of the frame 61. The second roller fixing portion supports the second roller 44 from the Z1 direction.

[0033] 3, the hand main body 32 includes a plurality of pads 65-68 attached to the upper surface 61a of the frame 61. Each of the pads 65-68 is made of resin. In this example, the pads 65-68 are made of POM (polyacetal resin). The positions on the upper surface 61a of the frame 61 where each of the pads 65-68 is attached are overlapping regions that overlap with the ring member 11 of the tape frame 2 when the tape frame 2 is placed on the hand main body 32. In this example, the hand main body 32 includes four pads 65-68. Of the four pads 65-68, two pads 65 and 67 are arranged in the Y1 direction of the imaginary line L, and the remaining two pads 66 and 68 are arranged in the Y2 direction of the imaginary line L, symmetrically to the two pads 65 and 67 in the Y1 direction of the imaginary line L.

[0034] The first pad 65 is located on the Y1 side of the pair of elongated holes 39 provided in the hand main body 32. The second pad 66 is located on the Y2 side of the pair of elongated holes 39 provided in the hand main body 32. The first pad 65 and the second pad 67 have a shape that is long in the X-axis direction. The third pad 67 is located on the Y1 side of the first roller 43, at the tip of the first finger 36. The fourth pad 68 is located on the Y1 side of the second roller 44, at the tip of the second finger 37. The third pad 67 and the fourth pad 68 have a circular planar shape. The upper surface of each of the pads 65 to 68 is a support surface 70 that contacts the tape frame 2 from the Z1 direction and supports the tape frame 2 from the Z1 direction when the tape frame 2 is placed on the hand main body 32.

[0035] The hand main body 32 (frame 61) also has a facing surface 71 that faces the wafer joining area 14 of the tape frame 2 when the pair of movable rollers 45 are disposed at the clamping position 45C and the tape frame 2 is clamped between the pair of movable rollers 45, the first roller 43, and the second roller 44. That is, as shown in FIG. 3, the upper surface 61a of the frame 61 is provided with a frame recess 72 recessed in the Z1 direction in a portion that faces the wafer joining area 14 of the tape frame 2 when the tape frame 2 is clamped between the pair of movable rollers 45, the first roller 43, and the second roller 44. The upper surface of the frame recess 72 is the facing surface 71. As shown in FIG. 4, the facing surface 71 is formed in the Z1 direction from the upper surface 61a of the frame 61. Therefore, the opposing surface 71 is spaced apart from the support surface 70 of the tape frame 2 in the transport hand 5 in the Z1 direction.

[0036] (Tape frame removal operation) FIG. 6 is an explanatory diagram of a state in which the tape frame 2 is placed on the transport hand 5. FIG. 7 is an explanatory diagram of a state in which the tape frame 2 is held by the transport hand 5. As shown in FIG. 2, in the initial state, the pair of moving rollers 45 are located at the outer position 45A. When removing the tape frame 2 from the cassette 3, the transport robot 1 drives the transport hand moving mechanism 6 to move the transport hand 5 in the X2 direction toward the cassette 3. As a result, the transport robot 1 inserts the transport hand 5 through the opening 3a of the cassette 3 and positions it in the Z1 direction of the tape frame 2 to be removed. Next, the transport robot 1 drives the transport hand moving mechanism 6 to move the transport hand 5 in the Z2 direction. As a result, the tape frame 2 to be removed is placed between the pair of moving rollers 45 and the first and second rollers 43 and 44 of the hand main body 32.

[0037] As shown in Fig. 6, when the tape frame 2 is placed on the transfer hand 5, the pads 65 to 68 contact the tape frame 2 from the Z1 direction and support the tape frame 2 from the Z1 direction. In the example shown in Fig. 6, the tape frame 2 is placed on the hand main body 32 with the center line N of the tape frame 2 and the imaginary line L, which is the center line of the hand main body 32, misaligned. In other words, the tape frame 2 is slightly rotating in the clockwise direction (CW) at a position displaced in the Y1 direction from the center of the hand main body 32. In addition, the tape frame 2 does not abut against the first roller 43 or the second roller 44.

[0038] When the tape frame 2 is placed between the pair of movable rollers 45 at the outer position 45A and the first roller 43 and second roller 44, the transport hand 5 drives the roller movement mechanism 47 to move the pair of movable rollers 45 to the clamping position 45C. As a result, as shown in Fig. 7, the tape frame 2 is clamped between the pair of movable rollers 45 and the first roller 43 and second roller 44 with the center line N of the tape frame 2 and the imaginary line L, which is the center line of the hand main body 32, aligned.

[0039] That is, in this example, the pair of movable rollers 45 are arranged at a distance from each other in an orthogonal direction (Y-axis direction) perpendicular to the movement direction (X-axis direction) in which the pair of movable rollers 45 move, and are arranged line-symmetrically with respect to an imaginary line L that passes through the centers of the two movable rollers 45 and extends in the movement direction. The first roller 43 and the second roller 44 are also arranged line-symmetrically with respect to the imaginary line L. Furthermore, the members that come into contact with the tape frame 2 placed on the hand main body 32 from the outer periphery and clamp the tape frame 2 from both sides in the direction along the imaginary line L are all rollers (the first roller 43, the second roller 44, and the pair of movable rollers 45). Therefore, when the tape frame 2 is placed on the hand main body 32 with the pair of moving rollers 45 at the outer position 45A and then the pair of moving rollers 45 are moved to the clamping position 45C, the tape frame 2 moves in a direction along the imaginary line L while the pair of moving rollers 45 move from the outer position 45A to the clamping position 45C, and the tape frame 2 is positioned at a predetermined position on the hand main body 32 in the X-axis direction.

[0040] Furthermore, while the pair of moving rollers 45 are moving from the outer position 45A to the clamping position 45C, the first curved outer peripheral edge portion abuts against the first roller 43 fixed to the hand main body 32, the second curved outer peripheral edge portion abuts against the second roller 44 fixed to the hand main body 32, and when the two moving rollers 45 are in contact with the linear outer peripheral edge portions of the tape frame 2, the tape frame 2 moves in the Y2 direction on the hand main body 32, the tape frame 2 is centered, and the tape frame 2 rotates counterclockwise CCW on the hand main body 32 to assume a predetermined posture. As a result, the center line N of the tape frame 2 and the center line N of the hand main body 32 are aligned. The imaginary line L, which is the center line, coincides with the imaginary line L.

[0041] When the tape frame 2 to be transported is held by the transport hand 5, the transport robot 1 drives the transport hand moving mechanism 6 to move the transport hand 5 in the X1 direction and remove the tape frame 2 from the cassette 3. The transport robot 1 then drives the transport hand moving mechanism 6 to rotate the transport hand 5, for example, to deliver the tape frame 2 to the processing start position for the next process. Here, the tape frame 2 is in a predetermined position on the transport hand 5. Therefore, the tape frame 2 is appropriately positioned at the processing start position for the next process.

[0042] (Action and effect) In this example, the transport hand 5 includes a hand main body 32 that supports the tape frame 2 in the Z1 direction, a first roller 43 that can contact the first arcuate outer peripheral edge portion 21 of the tape frame 2 placed on the hand main body 32 from the outer periphery, and a second roller 44 that can contact the second arcuate outer peripheral edge portion 22 of the tape frame 2 placed on the hand main body 32 from the outer periphery. The transport hand 5 also includes a pair of movable rollers 45 that can move between an outer position 45A and a clamping position 45C, and a roller moving mechanism that linearly moves the pair of movable rollers 45. The outer position 45A of the pair of movable rollers 45 is a position that is spaced outward from the linear outer peripheral edge portion of the tape frame 2 placed on the hand main body 32. The clamping position 45C of the pair of movable rollers 45 is a position where the pair of movable rollers 45 contact the linear outer peripheral edge portion of the tape frame 2 placed on the hand main body 32 and clamp the tape frame 2 between the first roller 43 and the second roller 44. Furthermore, when the tape frame 2 is placed between the pair of movable rollers 45, the first roller 43, and the second roller 44 of the hand main body 32 with the pair of movable rollers 45 disposed at the outer position 45A, the transport hand 5 moves the pair of movable rollers 45 to the clamping position 45C. With this configuration, according to this example, the tape frame 2 can be adjusted to a predetermined posture on the transport hand 5 without providing a mechanism separate from the transport hand 5.

[0043] The hand main body 32 also has a pair of elongated holes 39 that are long in the X-axis direction along the imaginary line L. The pair of elongated holes 39 are arranged symmetrically with respect to the imaginary line L. The roller movement mechanism includes a roller support member 48 that supports the pair of movable rollers 45 from the Z1 direction, and a linear actuator 49. The roller support member 48 is disposed in the Z1 direction of the hand main body 32 and connected to an output portion 49a of the actuator 49. Each of the pair of movable rollers 45 passes through each of the pair of elongated holes 39 in the Z2 direction. Each movable roller 45 moves between an outer position 45A and a clamping position 45C along its corresponding elongated hole 39. With this configuration, the roller support member 48 driven by the actuator 49 is disposed in the Z1 direction of the hand main body 32. Therefore, for example, even if particles are generated due to friction between the roller support member 48 and the hand main body 32 when moving a pair of moving rollers 45, the generated particles can be prevented or suppressed from moving to the upper surface of the hand main body 32 and reaching the tape frame 2 placed on the hand main body 32.

[0044] In this example, the hand main body 32 includes a ceramic plate-shaped frame 61 and resin pads 65-68 attached to the upper surface of the frame 61 in an overlapping region that overlaps with the ring member 11 when the tape frame 2 is placed on the hand main body 32. The upper surfaces of the pads 65-68 form a support surface 70 that contacts the ring member 11 and supports the tape frame 2. In this configuration, the hand main body 32 is formed from the ceramic plate-shaped frame 61. This allows the thickness of the hand main body 32 to be thin. This makes it easy to insert the transport hand 5 between the tape frames 2 housed at a predetermined pitch in the cassette 3. In this configuration, the resin pads 65-68 are attached to the frame 61 in an overlapping region that overlaps with the ring member 11. This allows the ceramic frame 6 1. Therefore, it is easier to move the tape frame 2 along the support surface 70 compared to when the tape frame 2 is placed directly on the upper surface of the transport hand 5. Therefore, it is easier to position the tape frame 2 in a predetermined position on the transport hand 5.

[0045] The hand main body 32 further includes a frame 61 including: a palm 35 supporting a portion of the pair of moving rollers 45 that is continuous with the inner periphery of the linear outer peripheral edge portion of the tape frame 2 in the X2 direction; a first finger 36 supporting a portion of the first roller 43 that is continuous with the inner periphery of the first arc-shaped outer peripheral edge portion 21 of the tape frame 2 in the X1 direction; and a second finger 37 supporting a portion of the second roller 44 that is continuous with the inner periphery of the second arc-shaped outer peripheral edge portion 22 of the tape frame 2 in the X1 direction. The hand main body 32 also includes a first protrusion 41 that protrudes in the X2 direction from the lower end of the first finger 36; and a second protrusion 42 that protrudes in the X2 direction from the lower end of the second finger 37. The frame 61 is made of ceramic. The first protrusion 41 and the second protrusion 42 are each made of metal, and are thinner in the Z2 direction than the frame 61. The first protrusion 41 supports the first roller 43 from the Z1 direction, and the second protrusion 42 supports the second roller 44 from the Z1 direction. In this configuration, the amount of upward protrusion from the upper surface of the frame 61 can be reduced compared to when the first roller 43 and the second roller 44, whose rotation axes face the Z2 direction, are supported on the frame 61. This makes it easy to make the hand main body 32 thinner in the Z2 direction.

[0046] The hand main body 32 also has, on its upper surface, a support surface 70 that abuts against the ring member 11 of the tape frame 2 placed on the hand main body 32 from the Z1 direction, and an opposing surface 71 that faces the wafer joining area 14 located a predetermined distance inward from the edge of the opening 12 of the ring member 11 in the tape frame 2 when the tape frame 2 is clamped between the pair of movable rollers 45, the first roller 43, and the second roller 44. The opposing surface 71 is spaced apart from the support surface 70 in the Z1 direction. This prevents the wafer joined to the wafer joining area from above the tape frame 2 from coming into contact with the hand main body 32 of the transport hand 5 in the Z2 direction via the adhesive sheet 13.

[0047] The transport robot 1 of this example also includes the transport hand 5 and a transport hand moving mechanism 6 that moves the transport hand 5 in the Z-axis direction and the X-axis direction. This allows the transport robot 1 to remove the tape frame 2 stored in the cassette 3 using the transport hand 5. When the tape frame 2 is removed from the cassette 3, the tape frame 2 is placed in a predetermined position on the transport hand 5.

[0048] (Other embodiments) In this example, the hand main body 32 clamps the tape frame 2 by bringing the pair of movable rollers 45 into contact with the first linear outer peripheral edge portion 15, the first roller 43 into contact with the first arc-shaped outer peripheral edge portion 21, and the second roller 44 into contact with the second arc-shaped outer peripheral edge portion 22; however, the pair of movable rollers 45 may be brought into contact with any of the four linear outer peripheral edge portions 15 to 18. That is, the transport hand 5 of this example corrects the orientation of the tape frame 2 on the transport hand 5 without using the notches 25, 26 provided in the tape frame 2. Therefore, even when the tape frame 2 is held from four directions facing the linear outer peripheral edge portions 15 to 18, the orientation of the tape frame 2 on the transport hand 5 can be maintained as desired.

[0049] In the above example, the hand main body 32 is provided with resin pads 65-68 in the overlapping portion of the frame 61 that overlaps with the ring member 11 when the tape frame 2 is placed on the hand main body 32, but the pads 65-68 can be omitted. In this case, the support surface 70 of the hand main body 32 that supports the tape frame 2 is the upper surface of the hand main body 32 (the upper surface of the frame 61). Here, even when the upper surface of the hand main body 32 (the upper surface of the frame 61) is used as the support surface 70, the opposing surface 71 is spaced apart from the support surface 70 in the Z1 direction.

[0050] Furthermore, the present invention can be embodied in the following ways.

[0051] (1) In a plan view, a transport hand for holding a tape frame having, on its outer periphery, a linear outer periphery portion extending linearly, a first arc outer periphery portion that is an arc curving toward the center line on one side of a center line extending through a center of the linear outer periphery portion in a direction perpendicular to the linear outer periphery portion, in a direction away from the linear outer periphery portion in a center line direction along the center line, and a second arc outer periphery portion that is symmetrical to the first arc outer periphery portion on the other side of the center line, with the center line as a line of symmetry. The transport hand includes a hand main body that supports the tape frame from below, a first roller fixed to the hand main body and capable of contacting the first arc outer periphery portion of the tape frame placed on the hand main body from the outer periphery, a second roller fixed to the hand main body and capable of contacting the second arc outer periphery portion of the tape frame placed on the hand main body from the outer periphery, an outer position spaced away from the linear outer periphery portion of the tape frame placed on the hand main body, and a second roller that is symmetrical to the linear outer periphery portion of the tape frame placed on the hand main body. a pair of movable rollers movable along the hand main body between an outer position and a clamping position where the tape frame is clamped between the first roller and the second roller by contacting an edge portion of the tape frame; and a roller moving mechanism that moves the pair of movable rollers linearly between the outer position and the clamping position, wherein the first roller, the second roller, and the pair of movable rollers each have a rotation axis facing up and down, the pair of movable rollers are arranged at a distance from each other in an orthogonal direction perpendicular to a movement direction in which the pair of movable rollers move, and are arranged line-symmetrically with respect to an imaginary line that passes through centers of the two movable rollers and extends in the movement direction, the first roller and the second roller are arranged line-symmetrically with respect to the imaginary line, and when the tape frame is placed between the pair of movable rollers on the hand main body and the first roller and the second roller with the pair of movable rollers arranged at the outer position, the pair of movable rollers are moved to the clamping position.

[0052] (2) In the transport hand of (1) above, the hand main body has a pair of elongated holes that are long in a direction along the imaginary line, and the pair of elongated holes are arranged symmetrically with respect to the imaginary line, the roller movement mechanism has a roller support member that supports the pair of moving rollers from below, and a linear actuator, the roller support member is arranged below the hand main body and connected to an output part of the actuator, each of the pair of moving rollers passes through each of the pair of elongated holes in the up-down direction, and each moving roller moves between the outer position and the clamping position along each elongated hole.

[0053] (3) In the above (1) or (2), the tape frame comprises an annular ring member having the outer periphery and an adhesive sheet sealing the opening of the ring member from below, and the hand main body comprises a ceramic plate-shaped frame and a resin pad attached to the upper surface of the frame in an overlapping area that overlaps with the ring member when the tape frame is placed on the hand main body, and the upper surface of the pad is a support surface that contacts the ring member and supports the tape frame.

[0054] (4) In any of (1) to (3) above, when the side along the virtual line where the pair of moving rollers are located is defined as a first direction and the side along the virtual line where the first roller and the second roller are located is defined as a second direction, the hand main body includes a palm portion supporting a portion of the pair of moving rollers that is continuous with the inner periphery of the linear outer periphery of the tape frame in the second direction, a first finger portion supporting a portion of the first roller that is continuous with the inner periphery of the first arc outer periphery of the tape frame in the first direction, and a second finger portion supporting a portion of the second roller that is continuous with the inner periphery of the second arc outer periphery of the tape frame in the first direction. a first protrusion protruding in the second direction from a lower end portion of the first finger portion, and a second protrusion protruding in the second direction from a lower end portion of the second finger portion, wherein the frame is made of ceramic, the first protrusion and the second protrusion are each made of metal and have a thickness in the up-down direction that is thinner than that of the frame, and the first protrusion supports the first roller from below, and the second protrusion supports the second roller from below.

[0055] (5) In any of (1) to (4) above, the tape frame comprises an annular ring member having the outer peripheral edge and an adhesive sheet sealing the opening of the ring member from below, and the hand main body comprises, on its upper surface, a support surface that abuts from below against the ring member of the tape frame placed on the hand main body, and an opposing surface that faces a wafer joining area located a predetermined distance inward from the edge of the opening of the ring member in the tape frame when the tape frame is clamped between the pair of moving rollers, the first roller and the second roller, and the opposing surface is spaced downward from the support surface.

[0056] (6) A transport robot comprising a transport hand according to any one of (1) to (5) above, and a transport hand moving mechanism that moves the transport hand in the vertical direction and the movement direction. [Explanation of symbols]

[0057] 1...transport robot, 2...tape frame, 3...cassette, 3a...opening, 5...transport hand, 6...transport hand moving mechanism, 7...control unit, 8...arm, 11...ring member, 12...opening, 13...adhesive sheet, 14...wafer bonding area, 15...first linear outer peripheral edge portion, 16...second linear outer peripheral edge portion, 17...third linear outer peripheral edge portion, 18...fourth linear outer peripheral edge portion, 21...first arc outer peripheral edge portion, 22...second arc outer peripheral edge portion, 23...third arc outer peripheral surface portion, 24...fourth arc outer peripheral surface portion, 25, 26...cutout portion, 31...base portion, 32...hand main body portion, 35...palm portion, 36...first finger portion, 37...second finger portion, 39...long hole, 41...first protrusion portion, 42...second protrusion portion, 43...first roller, 44...second Two rollers, 45...moving roller, 45A...outer position of moving roller, 45B...inner position of moving roller, 45C...clamping position of moving roller, 47...roller moving mechanism, 48...roller support member, 49...actuator, 49a...output portion of actuator, 51...shaft portion, 52...roller mounting portion, 55...recessed portion, 56...groove portion, 57...plate member, 61...frame, 62...first plate member, 62a...first fixed portion, 62b...first bent portion, 62c...first roller fixed portion, 63...second plate member, 63a...second fixed portion, 63b...second bent portion, 63c...second roller fixed portion, 65-68...pad, 70...support surface, 71...opposing surface, 72...recessed portion, L...imaginary line, N...center line of tape frame

Claims

1. a transport hand for holding a tape frame, the transport hand comprising, on an outer periphery in a plan view, a straight outer periphery portion extending in a straight line, a first arc outer periphery portion on one side of a center line extending through a center of the straight outer periphery portion in a direction perpendicular to the straight outer periphery portion, the first arc outer periphery portion being an arc that curves toward the center line in a direction away from the straight outer periphery portion in a center line direction along the center line, and a second arc outer periphery portion on the other side of the center line and being symmetrical to the first arc outer periphery portion with the center line as a line of symmetry; a first roller fixed to the hand main body and capable of contacting from the outer periphery thereof with the first arcuate outer periphery of the tape frame placed on the hand main body; a second roller fixed to the hand main body and capable of contacting from the outer periphery thereof with the second arcuate outer periphery of the tape frame placed on the hand main body; a pair of movable rollers movable along the hand main body between an outer position spaced away from the outer periphery of the linear outer periphery of the tape frame placed on the hand main body and a clamping position where the pair of movable rollers contact the linear outer periphery of the tape frame placed on the hand main body and clamp the tape frame between the first roller and the second roller; and a roller moving mechanism that linearly moves the pair of movable rollers between the outer position and the clamping position, the first roller, the second roller, and the pair of moving rollers each have a rotation axis oriented in a vertical direction; the pair of moving rollers are arranged apart in an orthogonal direction perpendicular to the moving direction in which the pair of moving rollers move, and are arranged symmetrically with respect to an imaginary line that passes through the centers of the two moving rollers and extends in the moving direction; the first roller and the second roller are arranged symmetrically with respect to the virtual line, A transport hand characterized in that when the tape frame is placed between the pair of movable rollers in the hand main body and the first roller and the second roller with the pair of movable rollers positioned at the outer position, the pair of movable rollers is moved to the clamping position.

2. the hand body includes a pair of elongated holes that are long in a direction along the imaginary line, the pair of elongated holes are provided symmetrically with respect to the virtual line, the roller moving mechanism includes a roller support member that supports the pair of moving rollers from below, and a linear actuator; the roller support member is disposed below the hand body and connected to an output portion of the actuator; Each of the pair of moving rollers passes through each of the pair of long holes in the up-down direction, 2. The transport hand according to claim 1, wherein each of the moving rollers moves along a corresponding slot between the outer position and the clamping position.

3. the tape frame includes an annular ring member having the outer circumferential edge, and an adhesive sheet that closes an opening of the ring member from below, the hand main body includes a ceramic plate-shaped frame and a resin pad attached to an overlapping region on an upper surface of the frame that overlaps with the ring member when the tape frame is placed on the hand main body, 2. The transport hand according to claim 1, wherein an upper surface of the pad is a support surface that contacts the ring member and supports the tape frame.

4. When the side where the pair of moving rollers are located in the direction along the virtual line is defined as a first direction, and the side where the first roller and the second roller are located is defined as a second direction, the hand main body comprises a frame including a palm portion supporting a portion of the tape frame that is continuous with the inner peripheral side of the linear outer peripheral edge portion in the second direction of the pair of moving rollers, a first finger portion supporting a portion of the tape frame that is continuous with the inner peripheral side of the first arc outer peripheral edge portion in the first direction of the first roller, and a second finger portion supporting a portion of the tape frame that is continuous with the inner peripheral side of the second arc outer peripheral edge portion in the first direction of the second roller, a first protrusion portion protruding in the second direction from a lower end portion of the first finger portion, and a second protrusion portion protruding in the second direction from a lower end portion of the second finger portion, the frame is made of ceramic; each of the first protrusion and the second protrusion is made of metal and has a thickness in the up-down direction that is thinner than that of the frame; the first protrusion supports the first roller from below, The transport hand according to claim 1 , wherein the second protrusion supports the second roller from below.

5. the tape frame includes an annular ring member having the outer circumferential edge, and an adhesive sheet that closes an opening of the ring member from below, the hand main body has, on its upper surface, a support surface that abuts from below against the ring member of the tape frame placed on the hand main body, and an opposing surface that faces a wafer joining area located a predetermined distance inward from an opening edge of the opening of the ring member in the tape frame when the tape frame is clamped between the pair of moving rollers, the first roller, and the second roller, 2. The transport hand according to claim 1, wherein the opposing surface is spaced downward from the support surface.

6. A transport robot comprising: the transport hand according to claim 1; and a transport hand moving mechanism that moves the transport hand in the vertical direction and the movement direction.

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