X-ray measurement system

Abstract

To provide an X-ray measurement system capable of easily moving a casing for measuring X rays to an appropriate position for a measured object.SOLUTION: An X-ray measurement system (1) comprises: a casing (11) capable of traveling to a position at a predetermined distance to a measurement surface of a measured object (2); a light-shielding section (21) that is formed cylindrically so as to surround a measurement point on a measurement surface and is provided on the measurement surface; a retroreflection section (22) that is connected to an outer periphery of the light shielding section and is formed in a ring shape so as to extend toward an outer direction of the light shielding section; a photoelectric sensor (112) that is provided in the casing, applies light toward the measurement surface, and detects light reflected by the retroreflection section; a control section (50) for moving the casing to a setting position on the basis of detection by the photoelectric sensor; an irradiation section (112) for radiating X rays toward the measurement surface; and a measurement section (111) for measuring X rays diffracted by a measured object.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to an X-ray measurement system. [Background technology]

[0002] 2. Description of the Related Art Conventionally, X-ray measurement systems have been known that utilize the diffraction phenomenon of X-rays to measure the residual stress, half-value width, amount of retained austenite, etc. of an object to be measured.

[0003] In this regard, Patent Document 1 discloses a housing having an X-ray emitter that emits X-rays toward an object to be measured, a diffraction ring forming means that receives the X-rays diffracted by the object to be measured and forms a diffraction ring, and a visible light emitter that emits visible light. Patent Document 1 also discloses an X-ray diffraction measurement device that includes an arm-type robot with the housing attached to its tip. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6600928 Summary of the Invention [Problem to be solved by the invention]

[0005] However, the technology described in Patent Document 1 has the problem that when teaching the robot to move the housing for X-ray measurement provided at the tip of the arm to an appropriate position relative to the object to be measured, an operator skilled in operating the robot is required, and the number of workers who can operate the robot is limited. Also, the technology described in Patent Document 1 has the problem that it takes time to teach the robot to determine the position of the arm relative to the object to be measured, and further, it is necessary to confirm the accuracy of the determined position.

[0006] The present invention has been made in view of the above problems, and its purpose is to provide an X-ray measurement system in which a housing for measuring X-rays can be easily moved to an appropriate position relative to an object to be measured. [Means for solving the problem]

[0007] In order to solve the above problem, the X-ray measurement system of the present invention includes a housing that can be moved to a position that is a predetermined distance from a measurement surface related to the object to be measured, a shading section that is formed cylindrically so as to surround the periphery of a measurement point on the measurement surface and is provided on the measurement surface, a retroreflecting section that is connected to the outer periphery of the shading section and is formed in a ring shape so as to extend outward from the shading section, a photoelectric sensor that is provided on the housing and irradiates light toward the measurement surface and detects light reflected by the retroreflecting section, a control section that moves the housing to a set position based on detection by the photoelectric sensor, an irradiation section that irradiates X-rays toward the measurement surface, and a measurement section that measures the X-rays diffracted by the object to be measured.

[0008] Furthermore, when the control unit moves the housing closer to the object to be measured along the normal direction of the measurement surface, it sets the position where the light reflected by the retroreflective portion is blocked by the shading portion and no longer enters the photoelectric sensor as the set position, and moves the housing to the set position.

[0009] Furthermore, the control unit controls the operation of the irradiation unit to irradiate X-rays and controls the operation of the measurement unit to measure X-rays when the housing is positioned at the set position.

[0010] In addition, the X-ray measurement system of the present invention further includes an imaging unit that images the object to be measured, the retroreflective portion, and the shading portion, and the control unit detects the distance between the measurement surface and the housing by performing image processing on the image captured by the imaging unit.

[0011] In addition, the X-ray measurement system of the present invention further includes a plate portion that is formed in a ring shape so that the measurement surface is exposed at the center, has the retroreflective portion and the light-shielding portion connected to its upper surface, and has a bottom surface that is detachably connected to the measurement surface with an adhesive. [Effects of the Invention]

[0012] According to the present invention, the X-ray measurement system can easily move the housing for measuring X-rays to an appropriate position relative to the object to be measured. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a diagram showing the overall configuration of an X-ray measurement system according to an embodiment of the present invention. [Figure 2] 2 is a cross-sectional view taken along line II of the X-ray measurement system shown in FIG. 1. [Figure 3] 3 is a diagram showing a state in which a housing of the X-ray measurement system shown in FIG. 2 is lowered. FIG. [Figure 4] 2 is a flowchart showing an example of a processing flow of the X-ray measurement system shown in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0014] Hereinafter, an embodiment of the present invention (hereinafter referred to as "the present embodiment") will be described with reference to the accompanying drawings. To facilitate understanding of the description, the same components and steps in each drawing will be designated by the same reference numerals as much as possible, and redundant description will be omitted.

[0015] FIG. 1 is a diagram showing the overall configuration of an X-ray measurement system 1 according to this embodiment. The X-ray measurement system 1 irradiates an object 2 under test with X-rays and measures the X-rays diffracted by the object 2 under test. The X-ray measurement system 1 measures, for example, the residual stress, half-width, and amount of retained austenite of the object 2 under test using X-rays. The object 2 under test is a metal object, such as steel. The X-ray measurement system 1 mainly includes a robot 10, a positioning module 20, a measurement table 30, an imaging unit 40, and a control unit 50. In FIG. 1, the direction from bottom to top of the X-ray measurement system 1 is defined as direction Z. In FIG. 1, the direction from left to right when the X-ray measurement system 1 is viewed from the front is defined as direction X. In FIG. 1, the direction from the front side to the rear side when the X-ray measurement system 1 is viewed from the front is defined as direction Y. The directions X, Y, and Z are perpendicular to each other.

[0016] The robot 10 is an industrial device having a movable part that can move within a space within a predetermined distance from the robot 10, such as a robot with an articulated arm, a machine tool, or a tester. The main part of the robot 10 includes, for example, a housing 11, an arm part 12, and a base part 13.

[0017] The housing 11 is connected to the tip of the arm unit 12, and can be moved to a position at a predetermined distance from a measurement surface S of the object to be measured 2 by moving the arm unit 12 and the joint at the connection point between the housing 11 and the arm unit 12. The housing 11 irradiates X-rays onto the object to be measured 2 using an irradiation unit provided on one surface, and measures the X-rays diffracted by the object to be measured 2 using a measurement unit provided on the other surface. The housing 11 also irradiates light towards the positioning module 20 using a photoelectric sensor provided on one surface, and detects the light reflected by the positioning module 20. Note that the details of the irradiation unit, measurement unit, and photoelectric sensor will be described later with reference to FIG. 2, so a description thereof will be omitted here.

[0018] The arm unit 12 is, for example, an articulated movable arm, and its main part is configured to include multiple arms and multiple drive units. One end of the arm unit 12 is connected to the base unit 13, and the other end of the arm unit 12 is connected to the housing 11.

[0019] The base unit 13 is a base for supporting the housing 11 and the arm unit 12, and is installed so as to be in contact with an installation surface (not shown) of the robot 10. The base unit 13 is connected to the arm unit 12. The base unit 13 is also connected to the control unit 50 so as to be able to communicate with it.

[0020] The positioning module 20 is a module used to determine the distance between the housing 11 and a measurement surface S on the upper surface of the object to be measured 2, and is formed in a cylindrical shape. The positioning module 20 is placed on the measurement surface S of the object to be measured 2 so that the measurement surface S is exposed at the center. Details of the configuration of the positioning module 20 will be explained later with reference to FIG. 2, so explanation thereof will be omitted here.

[0021] The measurement stage 30 is a stage on which the object to be measured 2 is placed. The object to be measured 2 is placed on the upper surface of the measurement stage 30.

[0022] The imaging unit 40 is, for example, a camera, and is provided above the space where the object to be measured 2, the positioning module 20, and the measurement table 30 are located, and captures images of the object to be measured 2 and the positioning module 20 from above in accordance with control commands from the control unit 50. The imaging unit 40 transmits the captured images to the control unit 50.

[0023] The control unit 50 is configured to be able to communicate with the robot 10 and the imaging unit 40, and transmits control commands to the robot 10 and the imaging unit 40 to control their operations. The control unit 50 also acquires various information from the robot 10 and the imaging unit 40 and stores the acquired information. The control unit 50 reflects the stored information in controlling the operations of the casing 11 and the arm unit 12, and notifies the administrator or user of the robot 10 by displaying on a screen or outputting audio. The control of the operation of the X-ray measurement system 1 by the control unit 50 will be explained later, so its explanation will be omitted here.

[0024] The overall configuration of the X-ray measurement system 1 has been described above. Next, with reference to FIG. 2, the configurations of the housing 11, the irradiation unit, the measurement unit, the photoelectric sensor, and the positioning module 20 will be described in detail. FIG. 2 is a cross-sectional view taken along line II of the X-ray measurement system 1 shown in FIG. 1. As shown in FIG. 2, the irradiation unit 110 and the photoelectric sensor 112 are provided near the center of the surface of the housing 11 facing the measurement table 30. The measurement unit 111 is also provided on the surface of the housing 11 facing the measurement table 30. In FIG. 2, an imaginary axis extending from the irradiation unit 110 toward the measurement surface S along the Z direction is defined as axis A.

[0025] The irradiation unit 110 irradiates the object 2 under measurement with X-rays from an irradiation port under the control of the control unit 50.

[0026] The measurement unit 111 is, for example, an SOI (Silicon On Insulator) sensor, and detects X-rays that are diffracted by the object under test 2 and incident on the surface of the detector. The measurement unit 111 transmits the X-ray measurement results to the control unit 50.

[0027] The photoelectric sensor 112 is a reflective photoelectric sensor that detects whether or not an object is present in a detection target area by emitting light and detecting the light reflected by a light-reflecting member. Specifically, the photoelectric sensor 112 irradiates light from an emitting portion toward the measurement surface S at a light distribution angle θ centered on the axis A in accordance with a control command from the control unit 50. The photoelectric sensor 112 also detects light reflected by the retroreflecting portion 22 of the positioning module 20 with a light-receiving portion. The photoelectric sensor 112 transmits the presence or absence of light detection to the control unit 50.

[0028] The positioning module 20 is detachably mounted on the measurement surface S of the object to be measured 2 with an adhesive 24 so that the measurement surface S is exposed at the center. The positioning module 20 includes, for example, a light-shielding portion 21, a retroreflection portion 22, and a plate portion 23.

[0029] The light-shielding portion 21 is formed in a cylindrical shape from a light-shielding material so as to surround the periphery of the measurement point P on the measurement surface S, and is provided on the measurement surface S via the plate portion 23. The bottom surface of the light-shielding portion 21 is connected to the upper surface of the plate portion 23. The light-shielding material is, for example, an opaque synthetic resin.

[0030] The retroreflective portion 22 is connected to the outer periphery of the light-shielding portion 21 and is formed in a ring shape so as to extend outward from the light-shielding portion 21. The retroreflective portion 22 has an upper surface formed to retroreflect light, and when light is incident on the upper surface, it reflects the incident light back in the direction of incidence. Specifically, the retroreflective portion 22 has an upper surface formed, for example, such that a plurality of beads made of high-refractive-index glass are provided on a light-reflecting film, and a transparent synthetic resin is provided to cover the film and beads. The bottom surface of the retroreflective portion 22 is connected to the upper surface of the plate portion 23.

[0031] The plate portion 23 functions as a substrate of the positioning module 20. The plate portion 23 is formed in a ring shape so that the measurement surface S is exposed at the center, and the bottom surfaces of the light-shielding portion 21 and the retroreflection portion 22 are connected to the top surface. In addition, the bottom surface of the plate portion 23 is detachably connected to the measurement surface S with an adhesive 24.

[0032] The detailed configurations of the housing 11, the irradiation unit 110, the measurement unit 111, the photoelectric sensor 112, and the positioning module 20 have been described above. Next, the operation of the X-ray measurement system 1 will be described with reference to Figs. 2 to 4. Fig. 3 is a diagram showing a state in which the housing 11 in the X-ray measurement system 1 shown in Fig. 2 has been lowered. Also, Fig. 4 is a flowchart showing an example of the processing flow of the X-ray measurement system 1 shown in Fig. 1.

[0033] (Step SP10) Referring to Fig. 4, the X-ray measurement system 1 controls the operation of the imaging unit 40 by the control unit 50 so as to image the space where the positioning module 20 is located. The X-ray measurement system 1 causes the control unit 50 to transmit an image captured by the imaging unit 40, which image shows the object to be measured 2, the retroreflecting unit 22, and the light-shielding unit 21, to the control unit 50. Then, the processing proceeds to the processing of step SP12.

[0034] (Step SP12) The X-ray measurement system 1 uses the control unit 50 to perform image processing on the image captured by the imaging unit 40. The X-ray measurement system 1 detects the distance between the measurement surface S and the housing 11 using the control unit 50. The distance between the measurement surface S and the housing 11 is, for example, the distance between a measurement point P on the measurement surface S and the irradiation unit 110 provided on the measurement table 30 side of the housing 11. Next, the X-ray measurement system 1 uses the control unit 50 to control the operation of the housing 11 so that it moves to an initial position L1 in the Z direction from the measurement point P and the measurement surface S, where the distance is an initial distance d1. The X-ray measurement system 1 also uses the control unit 50 to adjust the angle of the housing 11 so that the irradiation direction of the X-rays from the irradiation unit 110 is directed toward the measurement surface S along the axis A. As a result, the X-ray measurement system 1 positions the housing 11 at the initial position L1, and the irradiation direction is directed toward the measurement surface S along the axis A, as shown in FIG. 2. Returning to FIG. 4, the process proceeds to step SP14.

[0035] (Step SP14) The X-ray measurement system 1 controls the operation of the photoelectric sensor 112 by the control unit 50 so that light is emitted from the emission unit toward the measurement surface S at a light distribution angle θ centered on the axis A. Then, the processing proceeds to the processing of step SP16.

[0036] (Step SP16) The X-ray measurement system 1 acquires a signal transmitted from the photoelectric sensor 112 by the control unit 50. Next, the X-ray measurement system 1 determines, by the control unit 50, whether or not the acquired signal indicates that the light receiving unit of the photoelectric sensor 112 has detected light reflected by the retroreflector 22. If the determination is affirmative, the process proceeds to step SP18. On the other hand, if the determination is negative, the process proceeds to step SP20.

[0037] (Step SP18) The X-ray measurement system 1 controls the operation of the housing 11 by the control unit 50 so that the housing 11 moves in a direction approaching the measurement surface S by the reference distance d0 along the axis A. Then, the processing returns to the processing of step SP14.

[0038] (Step SP20) Referring to FIG. 3, in the processing of step SP20, the X-ray measurement system 1 positions the housing 11 at position L2 where the distance between the housing 11 and the measurement surface S is d2. In the X-ray measurement system 1, the light irradiated from the photoelectric sensor 112 is blocked by the light-shielding unit 21 and does not reach the retroreflector 22, so the light irradiated from the photoelectric sensor 112 is not reflected by the retroreflector 22. As a result, the X-ray measurement system 1 does not detect the light reflected from the retroreflector 22 by the photoelectric sensor 112. Returning to FIG. 4, the X-ray measurement system 1 sets the current position L2 of the housing 11 as the set position by the control unit 50. Furthermore, the X-ray measurement system 1 sets the current angle of the housing 11 as the set angle by the control unit 50. Then, the processing proceeds to the processing of step SP22.

[0039] (Step SP22) The X-ray measurement system 1 controls the operation of the irradiation unit 110 by the control unit 50 so as to irradiate X-rays toward the object to be measured 2. Then, the process proceeds to the process of step SP24.

[0040] (Step SP24) The X-ray measurement system 1 controls the operation of the measurement unit 111 by the control unit 50 so as to measure the X-rays diffracted by the object to be measured 2. The X-ray measurement system 1 acquires the measurement result from the measurement unit 111 by the control unit 50. Then, the series of processes shown in FIG. 4 ends.

[0041] <Effects> As described above, in this embodiment, the X-ray measurement system 1 includes a housing 11 that can be moved to a position at a predetermined distance from the measurement surface S of the object to be measured 2. The X-ray measurement system 1 also includes a cylindrical light-shielding unit 21 that is provided on the measurement surface S and surrounds the periphery of a measurement point P on the measurement surface S, and a ring-shaped retroreflecting unit 22 that is connected to the outer periphery of the light-shielding unit 21 and extends outward from the light-shielding unit 21. The X-ray measurement system 1 also includes a photoelectric sensor 112 that is provided in the housing 11 and irradiates light toward the measurement surface S and detects the light reflected by the retroreflecting unit 22, and a control unit 50 that moves the housing 11 to a set position based on the detection by the photoelectric sensor 112. The X-ray measurement system 1 also includes an irradiation unit 110 that irradiates X-rays toward the measurement surface S, and a measurement unit 111 that measures X-rays diffracted by the object to be measured 2. Therefore, the X-ray measurement system 1 can easily move the housing 11 for measuring X-rays to an appropriate position relative to the object to be measured 2.

[0042] Furthermore, in this embodiment, the control unit 50 sets, as the set position, a position where, when the housing 11 is moved so as to approach the object 2 along the normal direction of the measurement surface S, the light reflected by the retroreflector 22 is blocked by the light blocking unit 21 and does not enter the photoelectric sensor 112. Furthermore, the control unit 50 moves the housing 11 to the set position. Therefore, the X-ray measurement system 1 can set the position of the housing 11 by moving the housing 11 and the light detection operation by the photoelectric sensor 112, and therefore it is possible to move the housing 11 to an appropriate position with respect to the object 2 while suppressing the influence of the skill of the operator of the X-ray measurement system 1.

[0043] Furthermore, in this embodiment, the control unit 50 controls the operation of the irradiation unit 110 to irradiate X-rays and controls the operation of the measurement unit 111 to measure X-rays when the housing 11 is located at a set position. Therefore, the X-ray measurement system 1 can measure X-rays on the object 2 with high accuracy because the housing 11 is located at an appropriate position with respect to the object 2.

[0044] Moreover, in this embodiment, the X-ray measurement system 1 further includes an imaging unit 40 that captures images of the object to be measured 2, the retroreflecting unit 22, and the light-shielding unit 21. Furthermore, the control unit 50 detects the distance between the measurement surface S and the housing 11 by performing image processing on the image captured by the imaging unit 40. Therefore, the X-ray measurement system 1 can move the housing 11 to an appropriate position with respect to the object to be measured 2 while further suppressing the influence of the skill of the operator of the X-ray measurement system 1.

[0045] Moreover, in this embodiment, the X-ray measurement system 1 is formed in a ring shape so that the measurement surface S is exposed at the center, and further includes a plate portion 23 having a top surface to which a retroreflecting portion 22 and a light-shielding portion 21 are connected and a bottom surface to which the measurement surface S is detachably connected by an adhesive 24. Therefore, even when performing X-ray measurements on various objects 2 to be measured, the X-ray measurement system 1 can easily move the housing 11 to an appropriate position relative to the object 2 to be measured while easily preparing for X-ray measurement.

[0046] <Modification> The present invention is not limited to the above-described embodiments. In other words, variations of the above-described embodiments, which are appropriately modified by a person skilled in the art, are also included within the scope of the present invention as long as they include the features of the present invention. Furthermore, the elements of the above-described embodiments and the modifications described below can be combined to the extent technically possible, and such combinations are also included within the scope of the present invention as long as they include the features of the present invention.

[0047] For example, in this embodiment, the control unit 50 moves the housing 11 closer to the object under test 2 and sets as the set position a position where light reflected by the retroreflector 22 is blocked by the light-shielding unit 21 and no longer enters the photoelectric sensor 112, but this is not limiting. The control unit 50 may also move the housing 11 away from the object under test 2 along the normal direction of the measurement surface S and set as the set position a position where light reflected by the retroreflector 22 begins to enter the photoelectric sensor 112 without being blocked by the light-shielding unit 21. In this configuration, the X-ray measurement system 1 determines in advance the initial position L1 so that the initial position L1 is a position where light reflected by the retroreflector 22 enters the photoelectric sensor 112. With this configuration, the X-ray measurement system 1 can suppress erroneous detection caused by dust or foreign matter in the surrounding environment blocking light from entering the photoelectric sensor 112, thereby enabling the housing 11 to be moved to an appropriate position relative to the object under test 2 easily and with high accuracy.

[0048] Furthermore, in this embodiment, the X-ray measurement system 1 may move the housing 11 closer to the object under test 2 and set, as the first set position, a position where the light reflected by the retroreflector 22 is blocked by the light-shielding portion 21 and does not enter the photoelectric sensor 112. Subsequently, the X-ray measurement system 1 may move the housing 11 away from the object under test 2 and set, as the second set position, a position where the light reflected by the retroreflector 22 begins to enter the photoelectric sensor 112 without being blocked by the light-shielding portion 21. Furthermore, the X-ray measurement system 1 may set a position intermediate between the first set position and the second set position. With this configuration, the X-ray measurement system 1 can easily move the housing 11 to an appropriate position with respect to the object under test 2 with even greater accuracy.

[0049] Furthermore, in this embodiment, the X-ray measurement system 1 may perform, multiple times, the step of moving the housing 11 closer to the object 2 to set a position where the light reflected by the retroreflector 22 is blocked by the light-shielding portion 21 and does not enter the photoelectric sensor 112. Furthermore, the X-ray measurement system 1 may set the center of gravity of a group of positions set multiple times as the set position. With this configuration, the X-ray measurement system 1 can easily move the housing 11 to an appropriate position with respect to the object 2 with even greater accuracy. [Explanation of symbols]

[0050] 1...X-ray measurement system, 11...housing, 21...light-shielding section, 22...retroreflection section, 50...control section, 112...photoelectric sensor, 110...irradiation section, 111...measurement section

Claims

1. a housing that can be moved to a position at a predetermined distance from a measurement surface of the object to be measured; a cylindrically shaped light-shielding portion provided on the measurement surface so as to surround a measurement point on the measurement surface; A retroreflective portion connected to the outer periphery of the light-shielding portion and formed in a ring shape so as to extend toward the outside of the light-shielding portion; a photoelectric sensor provided in the housing, irradiating light toward the measurement surface and detecting light reflected by the retroreflective portion; a control unit that moves the housing to a set position based on detection by the photoelectric sensor; an irradiation unit that irradiates X-rays toward the measurement surface; a measurement unit that measures X-rays diffracted by the object to be measured; An X-ray measurement system comprising:

2. 2. The X-ray measurement system according to claim 1, wherein the control unit sets a position where, when the housing is moved closer to the object to be measured along the normal direction of the measurement surface, light reflected by the retroreflecting portion is blocked by the light-shielding portion and does not enter the photoelectric sensor as the set position, and moves the housing to the set position.

3. 3. The X-ray measurement system according to claim 2, wherein the control unit controls the operation of the irradiation unit to irradiate X-rays and controls the operation of the measurement unit to measure X-rays when the housing is located at the set position.

4. an imaging unit that images the object to be measured, the retroreflecting unit, and the light-shielding unit; The X-ray measurement system according to claim 2 , wherein the control unit detects the distance between the measurement surface and the housing by performing image processing on the image captured by the imaging unit.

5. 2. The X-ray measurement system according to claim 1, further comprising a plate portion that is formed in a ring shape so that the measurement surface is exposed at the center, has an upper surface to which the retroreflective portion and the light-shielding portion are connected, and has a bottom surface that is detachably connected to the measurement surface by an adhesive.

Images