Magnetically guided material handling robot

Abstract

To provide a robot that does not pollute the environment with emitted gases, emitted particles, etc. in a vacuum.SOLUTION: A robot includes: a first device for supporting a substrate thereon; and a first transport mechanism to which the first device is connected. The first transport mechanism includes: rails or magnetic levitation guides; a magnetic system for vertically spacing the first device over the rails or magnetic levitation guide with a gap between the first device and the rails or magnetic levitation guides; and a linear actuator for moving the first device along the rails or magnetic levitation guides. The magnetic system includes: a first electromagnetic actuator at a first corner of a first side of the first device; a second electromagnetic actuator at a second corner on the first side of the first device; and a third electromagnetic actuator on an opposing second side of the first device where the third electromagnetic actuator is not positioned proximate a corner of three sides of the first device.SELECTED DRAWING: None

Description

[Technical Field]

[0001] The exemplary, non-limiting embodiments relate generally to a substrate transfer robot assembly.

[0002] Robots for transporting substrates are known. Linear drive systems for substrate transport robots are also known, such as those described in U.S. Patent Application Publication Nos. 2016 / 0229296, 2013 / 0071218, 2015 / 0214086, and 2017 / 0028546, which are incorporated herein by reference in their entireties.

[0003] The following summary is intended to be exemplary only and is not intended to limit the scope of the claims.

[0004] According to one aspect, an apparatus is provided, comprising: a first device configured to support a substrate thereon; and a first transport mechanism to which the first device is connected. The first transport mechanism is configured to support the first device for movement along a horizontal path. The first transport mechanism comprises at least two rails; a magnetic system configured to position the first device vertically above the at least two rails with a gap between the first device and the at least two rails; and a linear actuator configured to move the first device along a path along the at least two rails. The magnetic system comprises a first electromagnetic actuator at a first corner on a first side of the first device, a second electromagnetic actuator at a second corner on the first side of the first device, and a third electromagnetic actuator on an opposing second side of the first device that is not positioned proximate to a corner on the third side of the first device.

[0005] According to another aspect, a method is provided, comprising: connecting a first electromagnetic actuator proximate a first corner of a first side of a first device; connecting a second electromagnetic actuator proximate a second corner of the first side of the first device; and connecting a third electromagnetic actuator proximate an opposing second side of the first device; and positioning the first device above at least two rails. The first corners are on three sides of the first device, the first device is configured to support a substrate thereon, and the first electromagnetic actuator is part of a magnetic system of a first transport mechanism to which the first device is connected, the first transport mechanism being configured to support the first device for movement along a horizontal path. The second electromagnetic actuator is part of the magnetic system, and the second corners are on three sides of the first device. The third electromagnetic actuator is part of the magnetic system, and the third electromagnetic actuator is not positioned proximate a corner on one of the three sides of the first device. The first and second electromagnetic actuators are disposed on a first one of the rails, and the third electromagnetic actuator is disposed on a different second one of the rails.

[0006] According to another aspect, a method is provided, the method including controlling a first electromagnetic actuator of a magnetic system to vertically position a first corner of a first device above a first rail, controlling a second electromagnetic actuator of the magnetic system to vertically position a different second corner of the first device above the first rail, and controlling a third electromagnetic actuator of the magnetic system to vertically position the first device above a second rail. The first electromagnetic actuator is part of a first transport mechanism configured to magnetically position the first device vertically above the first and second rails with a gap between the first device and the rails, the first transport mechanism configured to support the first device for movement along a horizontal path, the first corners being on three sides of the first device, and the first device configured to support a substrate thereon. The second corners being on three sides of the first device, and the first and second corners being on a first side of the first device. The third electromagnetic actuator is disposed on an opposing second side of the first device, and the third electromagnetic actuator is not disposed near a corner of three sides of the first device. [Brief explanation of the drawings]

[0007] The foregoing aspects and other features are explained in the following description taken in conjunction with the accompanying drawings.

[0008] [Figure 1] 1 is a schematic top view of a substrate processing apparatus including features as described herein;

[0009] [Figure 2] 2 is a perspective view of a substrate transfer device of the substrate processing apparatus shown in FIG.

[0010] [Figure 3] FIG. 3 is a perspective view of the substrate transport device shown in FIG.

[0011] [Figure 4]4 is a perspective end view of the substrate transport apparatus shown in FIGS. 2 and 3 shown inside a transfer chamber of a substrate processing apparatus. FIG.

[0012] [Figure 5] FIG. 5 is a side view of the robot of the substrate transport apparatus shown in FIGS.

[0013] [Figure 6] FIG. 6 is a top view of the robot shown in FIG. 5.

[0014] [Figure 7] FIG. 7 is a schematic cross-sectional view of the robot shown in FIGS. 5 and 6.

[0015] [Figure 8] 1 is an end view of a substrate transport apparatus inside a transfer chamber of a substrate processing apparatus.

[0016] [Figure 9] 2A-2C illustrate various systems that may be used in conjunction with the device shown in FIG. 1.

[0017] [Figure 10] 2 is a schematic top view of a substrate transfer device inside a transfer chamber of the substrate processing apparatus shown in FIG. 1. FIG.

[0018] [Figure 10A] 11 is a cross-sectional end view of a substrate transport apparatus inside a transfer chamber of the substrate processing apparatus shown in FIG. 10.

[0019] [Figure 11] 11 is an end view of a substrate transport apparatus inside a transfer chamber such as that shown in FIG. 10.

[0020] [Figure 12] 12 is a perspective view showing one of the magnetic driving portion and the driven member of the linear motor shown in FIGS. 10 and 11. FIG.

[0021] [Figure 13]FIG. 13 is a perspective view of the magnetic drive unit shown in FIG.

[0022] [Figure 14] FIG. 12 is a perspective view of a power module for use with the apparatus shown in FIGS. 10 and 11.

[0023] [Figure 14A] FIG. 15 is a perspective view showing the relative layout of the power modules shown in FIG. 14.

[0024] [Figure 15] FIG. 14B illustrates power coupling using the power module shown in FIGS. 14 and 14A.

[0025] [Figure 16] FIG. 16 is an isometric view of one exemplary embodiment of the coupling shown in FIG. 15.

[0026] [Figure 17] FIG. 12 is a schematic diagram showing some components of the optical communication system shown in FIGS. 10 and 11.

[0027] [Figure 18] FIG. 1 is a perspective view of a substrate transport apparatus on a bottom wall of a transport chamber.

[0028] [Figure 18A] 10 is a perspective view of an alternative embodiment of a substrate transport apparatus on the bottom wall of the transport chamber.

[0029] [Figure 19] 1 is a schematic top view of a substrate processing apparatus including features as described herein;

[0030] [Figure 20] Schematic diagram of the housing of the robot drive in the guide of the magnetic support system and control system.

[0031] [Figure 20A]FIG. 2 is a schematic diagram of an electromagnetic actuator in a magnetic levitation guide. [Figure 20B] FIG. 2 is a schematic diagram of an electromagnetic actuator in a magnetic levitation guide. [Figure 20C] FIG. 2 is a schematic diagram of an electromagnetic actuator in a magnetic levitation guide.

[0032] [Figure 20D] FIG. 1 is a schematic diagram showing a triangular layout of an electromagnetic actuator relative to a housing.

[0033] [Figure 20E] 10A-10C are schematic diagrams showing triangular layouts of electromagnetic actuators for other shapes of housing. [Figure 20F] 10A-10C are schematic diagrams showing triangular layouts of electromagnetic actuators for other shapes of housing.

[0034] [Figure 20G] FIG. 21 is a schematic diagram of an alternative embodiment similar to FIG. 20, with the housing of the robot drive in the guide of the magnetic support system and control system.

[0035] [Figure 21] FIG. 21 is a schematic diagram of an alternative embodiment similar to FIG. 20, with the housing of the robot drive in the guide of the magnetic support system and control system.

[0036] [Figure 22] FIG. 21 is a schematic diagram of an alternative embodiment similar to FIG. 20, with the housing of the robot drive in the guide of the magnetic support system and control system.

[0037] [Figure 22A] FIG. 10 is a schematic top view of an alternative embodiment.

[0038] [Figure 23] FIG. 21 is a schematic diagram of an alternative embodiment similar to FIG. 20, with the housing of the robot drive in the guide of the magnetic support system and control system.

[0039] [Figure 24A] 24 is a schematic diagram of an example of an electromagnetic actuator utilized in the magnetic support system shown in FIGS. 20 to 23. FIG. [Figure 24B] 24 is a schematic diagram of an example of an electromagnetic actuator utilized in the magnetic support system shown in FIGS. 20 to 23. FIG.

[0040] [Figure 25A] 24 is a schematic diagram of an example of an electromagnetic actuator utilized in the magnetic support system shown in FIGS. 20 to 23. FIG. [Figure 25B] 24 is a schematic diagram of an example of an electromagnetic actuator utilized in the magnetic support system shown in FIGS. 20 to 23. FIG.

[0041] [Figure 26A] 24 is a schematic diagram of an example of an electromagnetic actuator utilized in the magnetic support system shown in FIGS. 20 to 23. FIG. [Figure 26B] 24 is a schematic diagram of an example of an electromagnetic actuator utilized in the magnetic support system shown in FIGS. 20 to 23. FIG.

[0042] [Figure 27] 24 is a schematic diagram of an example of an electromagnetic actuator utilized in the magnetic support system shown in FIGS. 20 to 23. FIG.

[0043] [Figure 28A] FIG. 10 is a schematic diagram of an example of generated vertical and horizontal forces. [Figure 28B] FIG. 10 is a schematic diagram of an example of generated vertical and horizontal forces.

[0044] [Figure 28C] FIG. 21 is a schematic diagram of an alternative embodiment similar to FIG. 20, with the housing of the robot drive in the guide of the magnetic support system and control system.

[0045] [Figure 29] FIG. 10 is a schematic diagram of an example of generated vertical and horizontal forces.

[0046] [Figure 30] FIG. 21 is a schematic diagram of an alternative embodiment similar to FIG. 20, with the housing of the robot drive in the guide of the magnetic support system and control system.

[0047] [Figure 31] FIG. 10 illustrates the use of multiple sensors to explain the transition between a linear magnetic levitation track / guide and a magnetic levitation gap sensor target.

[0048] [Figure 32] FIG. 1 illustrates an example of a linear robot control system. [Figure 33] FIG. 1 illustrates an example of a linear robot control system. [Figure 34] FIG. 1 illustrates an example of a linear robot control system. [Figure 35] FIG. 1 illustrates an example of a linear robot control system. [Figure 36] FIG. 1 illustrates an example of a linear robot control system. [Figure 37] FIG. 1 illustrates an example of a linear robot control system. [Figure 38] FIG. 1 illustrates an example of a linear robot control system. [Figure 39] FIG. 1 illustrates an example of a linear robot control system. [Figure 40] FIG. 1 illustrates an example of a linear robot control system. [Figure 41] FIG. 1 illustrates an example of a linear robot control system. Detailed Description of the Embodiments

[0049] Referring to Figure 1, a schematic top plan view of an apparatus 10 incorporating features of exemplary embodiments is shown. Features are described with reference to the exemplary embodiment shown in the drawings, but it will be understood that these features may be implemented in various alternative forms of embodiment. Furthermore, any suitable size, shape, or type of element or material may be used.

[0050] In this example, the apparatus 10 is a substrate processing apparatus. The substrate processing apparatus 10 generally includes a substrate transport apparatus 12 (also referred to as a linear vacuum robot), multiple substrate processing chambers 14, a transfer chamber 15, an equipment front-end module (EFEM) 16, and a substrate cassette elevator 18. The transfer chamber 15 may be maintained, for example, as a vacuum chamber or an inert gas chamber. The transport apparatus 12 is disposed within the chamber 15 and configured to transport substrates 20, such as semiconductor wafers or flat panel displays, between the chambers 14, 15 and a stationary transfer chamber or load lock 22. The EFEM 16 is configured to transport substrates 20 between the substrate cassette elevator 18 and the stationary transfer chamber 22. In this example, the EFEM includes a robot 24 having a SCARA arm. The robot 24 is configured to move linearly within the EFEM, as indicated by arrow A. However, any suitable type of EFEM may be provided. The apparatus 10 includes a controller 50. The controller 50 comprises at least one processor 52 and at least one memory 54 containing computer program code 56. The controller 50 is configured to control the operation of the various devices and robots of the apparatus 10.

[0051] 2-4, perspective and end views of the substrate transport apparatus 12 are shown. In this example, the substrate transport apparatus 12 includes a robot 26, a robot housing 28, and a linear drive system 30. FIGS. 2 and 3 show the substrate transport apparatus 12 on the bottom wall of the transfer chamber 15, with the sides and top wall of the transfer chamber 15 not shown. FIG. 4 shows the substrate transport apparatus 12 on the bottom wall or floor of the transfer chamber 15, with only the top wall of the transfer chamber 15 not shown. The robot 26 is connected to the robot housing 28, which is movable relative to the chamber 15 by a linear drive system 30. The linear drive system 30 includes guides 32 on the floor of the transfer chamber 15 and tracks or carriage portions 33 on the outer bottom side of the housing. For a magnetically levitated linear drive system, the tracks may be spaced apart from the guides 32 by a magnetic / electromagnetically maintained spacing. For a non-magnetically levitated linear drive system, the guides may include rails along which the tracks run. In one example, the tracks 33 may have wheels attached to the bottom of the housing that run on rails 32. A linear drive system 30 is configured to move the robot housing 28, and thereby the substrate transport apparatus 12, within the transport chamber 15 along the rails 32 in a linear path, as shown by arrow B in FIG. 1 . In an alternative embodiment, rather than a housing, the robot 26 may be mounted on a non-enclosed slide or platform that has tracks and runs on rails / guides 32. In another alternative example, the guides and tracks may be provided in the side walls of the chamber 15 in addition to, or instead of, the floor of the chamber 15.

[0052] 5-7, the robot 26 generally includes a robot drive 34 and a robot arm assembly 36 connected to the robot drive 34. The robot 26 shown in FIGS. 5-7 is merely an example of a robot having multiple end effectors for moving substrates and should not be construed as limiting. Any suitable type of robot, robot drive, and robot arm may be provided. In this example, the robot arm assembly 36 has a two-arm configuration. Each of the arms 36a, 36b of the robot arm assembly 36 includes an arm link, pulley, band, and substrate-supporting end effector 38 driven by coaxial drive shafts 40a, 40b, 40c of the robot drive 34. In an alternative example, the drive may include multiple drive shafts that are non-coaxially aligned with one another. The robot drive 34 includes a motor 42a, 42b, 42c for each drive shaft, a vertical drive system 44 including a motor 46, and various position encoders / sensors 48a, 48b, 48c for the motors 42 and / or drive shafts 40 and vertical drive system 44.

[0053] The robot 26 is mounted to the robot housing 28 such that substantially all of the robot 26, except for the robot arm assembly 36, is disposed within the robot housing 28. This is best shown in, for example, FIGS. 3 and 4. Specifically, the robot arm assembly 36 is disposed outside the robot housing 28 adjacent the top side thereof, and the drive shafts 40a, 40b, 40c extend from the remainder of the drive section 34, which is disposed within the housing 28, through openings 58 (see FIG. 3) within the top side of the robot housing 28. A seal 60 (see FIG. 3) is provided at the opening 58 to seal the opening 58 while allowing the drive shafts 40a, 40b, 40c to pivot and move vertically when moved by the vertical drive system 44. According to this type of embodiment, the region within the housing 28 may have a different environment than the region within the chamber 15. For example, the region within the housing 28 may simply be in an air environment at atmospheric pressure, while the region within the chamber 15 (outside the housing 28) may be in a vacuum or inert gas environment.

[0054] Nested Environments

[0055] FIG. 8 schematically illustrates a "nested" configuration that may be used in one example. The robot housing 28 may provide a sealed robot housing for the robot drive 34, except for a small portion of the drive shaft extending through the opening 58. More specifically, all of the motors 42, 44, all of the sensors 48, all of the electrical wiring, and most of the drive shaft 40 (see FIG. 7) are sealed within the robot housing 28. All of the active electrical hardware of the robot drive 34, including the sensors and motors, may be isolated from the environment outside the robot housing 28 in region 17 of the transfer chamber 15 and maintained within the sealed robot housing 28 in region 29, shown in FIG. 8. Region 17 may be maintained as an isolated environment within the transfer chamber 15, isolated from the external atmospheric environment 13. Thus, environment 29 is nested within environment 17, which in turn isolates environment 29 from the external atmospheric environment 13 (normal atmosphere 13 outside chamber 15). Environment 29 may be, but need not be, a vacuum environment, even if environment 17 is a vacuum environment. The fact that environment 29 within robot housing 28 need not be a vacuum environment can help prevent out-gassing of vapors from components within robot housing 28. This nesting of environments (region 29 nested within region 17) applies particularly to robot housing 28 that is movable within transfer chamber 15 without impeding or being interfered with relative linear movement along the length of transfer chamber 15.

[0056] 9 , in this example, apparatus 10 includes linear drive system 30, electrical power coupling system 62, data communications coupling system 64, and heat transfer coupling system 66. Power coupling system 62 may be used to provide electrical power to components within housing 28. Data communications coupling system 64 may be used to transmit data signals to components within housing 28 (and / or to components within the arm through the housing) and / or to transmit data signals from components within housing 28 to a data processor outside chamber 15 (and / or from components within the arm through the housing). Heat transfer coupling system 66 may be used to transfer heat from components within housing 28 to outside chamber 15. In alternative exemplary embodiments, power coupling system 62 and data communications coupling system 64 may be at least partially combined to reduce the number of components within region 17 of chamber 15. In some embodiments, an apparatus may be provided that does not include all of the above-described systems.

[0057] In the illustrated example, all of these systems 30, 62, 64, 66 may be configured so as not to obstruct or interfere with the nested environment shown in Figure 8. In other words, it is preferable that these systems 30, 62, 64, 66 be constructed such that when all four systems 30, 62, 64, 66 are operating, the environment within the enclosure 28 is isolated from the environment within the chamber 15.

[0058] Linear motor

[0059] 10 and 11, linear drive system 30 generally includes linear motor 70. Linear motor 70 is an electric motor whose stator and rotor are essentially "non-rotating." Therefore, instead of generating torque (rotation), it generates a linear force along its length. An example of this is disclosed in U.S. Patent Publication No. 2015 / 0214086, the entire contents of which are incorporated herein by reference. The figures show the linear motor positioned below housing 28. However, in alternative embodiments, one or more components of the linear drive may not be positioned below housing 28. For example, the linear motor and / or components of linear drive system 30 may be positioned on the sides of housing 28 and chamber 15.

[0060] In an exemplary embodiment, the linear drive system 30 may include a magnetic levitation system utilizing a non-contact magnetic support and guidance subsystem. Referring also to FIGS. 12 and 13 , the linear motor 70 in the illustrated example utilizes a modular design including a fixed magnetic drive section 72 and a driven member 76. The drive section 72 has a generally U-shape in this example. The U-shape defines a slot 73, with opposing electromagnets 74 provided on the top and bottom sides of the slot 73. As best shown in FIG. 10 , the drive section 72 is fixedly mounted in alignment on the bottom wall of the chamber 15, and the driven member 76 is attached to the exterior of the bottom side of the robot housing 28. In an alternative example, the drive section 72 may be attached to the robot housing 28, and the rail 76 may be fixedly attached to the transport chamber 15.

[0061] A shield may be provided around the linear rail. Referring also to FIG. 10A , the transfer chamber 15 houses a robot having a linear rail 32 and track 30. The linear rail and track may be partially or completely enclosed within a shield 31. The purpose of the shield is to reduce or eliminate the upward movement of undesirable particulate or contaminant material from the rail or track into the transfer chamber while still allowing movement of the robot along the rail. Additionally, the shield, which may be a single piece or an assembly of pieces, prevents the movement of material, particles, or wafer debris from the transfer chamber into the operating area of ​​the linear rail. This helps prevent contamination / jamming of the linear rail mechanism.

[0062] The transfer chamber may further include a vent port 16 and a pump port 17, with the vent port positioned generally toward the top of the chamber 15 and the pump port positioned below or within the shielded region of the shield 31. This arrangement further prevents the migration of contaminants from the shielded region into the transfer chamber. When the vent port is activated, molecules from the vent port move toward the pump port, carrying any airborne contaminants with them. Even if the vent port is closed, activating the pump will draw any contaminants from the chamber into the shielded region.

[0063] As best shown in FIG. 12 , the driven member 76 extends into a slot in the “U”-shaped drive 72. Therefore, the drive 72 can autonomously utilize the same rails 76 extending from the bottom side of the robot housing 28. In alternative embodiments, fewer or more guide rails can be provided and positioned in other locations, such as on the sidewalls of the chamber 15. As discussed above, the modular linear drive system can utilize a non-contact magnetic drive forcer subsystem. This subsystem can include one or more linear motor modules and one or more position feedback modules. Using the example discussed above, the housing 28 can move linearly within the chamber 15, as shown by arrow B in FIG. 1 , without the need to route any wiring within the housing 28. The linear motor 70 is completely outside the housing 28, and therefore does not increase the risk of interference between the two regions 17 and 29. Furthermore, because driven member 76 does not contact any of drive portions 72 and drive of the driven member is simply magnetically controlled, the risk of contaminants from driven member 76 and drive portions 72 in region 17 is reduced. Power supply to drive portion 72 may be controlled by controller 50 shown in Figure 1. Drive portion 72, or portions of drive portion 72, may be energized to generate a magnetic field to move (e.g., accelerate and decelerate) driven member 76 in linear direction B and also magnetically fix housing 28 in a fixed position in front of chambers 14 and 22, as appropriate.

[0064] Each linear motor module may have a stationary passive magnetic stainless steel portion. The stationary passive magnetic stainless steel portion may have a toothed portion that interacts with a corresponding primary forcer. The passive portion may or may not have a magnet. Multiple supports may autonomously utilize the same secondary forcer. Each linear motor module may have a primary forcer coupled to a support, where the primary forcer may have three-phase wiring and a permanent magnet. In an alternative embodiment, the permanent magnet may be provided as part of the driven member to counteract gravity and dynamic loads. In an alternative embodiment, the permanent magnet may be provided as part of one or more of the magnetic bearings to counteract gravity and dynamic loads. An example of a possible primary and secondary forcer topology is the Siemens 1FN6 design. In an alternative embodiment, any suitable forcer may be provided. The permanent magnet of the forcer may be provided as a component that facilitates both efficient thrust (coupled to the wiring) generation and payload counteraction, such that the magnetic bearings minimize power usage during normal operation. Here, the attractive force between the forcer and the corresponding passive rail can be set to a nominal clearance so that this force counteracts the force of gravity, resulting in minimal power consumption. Furthermore, the clearance setpoint can be varied as the payload changes, adjusting the clearance so that the attractive force counteracts the force of gravity, resulting in minimal power consumption as the payload changes. For example, the clearance of the left forcer can be varied independently of that of the right forcer. To generate thrust on the support relative to the fixed passive magnetic stainless steel secondary forcers, the advanced control subsystem can selectively apply voltage to the magnetic coils of the primary forcers. Each fixed passive magnetic stainless steel secondary forcer can be mounted with its teeth pointing vertically downward. This allows the attractive force of the primary forcer's permanent magnet to counteract the weight of the support and payload, minimizing the DC component that needs to be applied by the vertical coils of the non-contact magnetic support guidance subsystem.

[0065] Power Combination System

[0066] 14 , in this exemplary embodiment, the power coupling system 62 is configured to use a magnetic induction resonance effect to transmit power to the substrate transport apparatus 12, such as for use with components within the housing 28. The power coupling system 62 generally includes a power coupling or module 78 on the interior bottom wall of the transport chamber 15 and a power coupling or module 80 on the exterior bottom side of the robot housing 28. As best shown in FIGS. 14A , 4 , 10 , and 11 , multiple primary modules 78 may be aligned and positioned on the bottom wall of the transport chamber 15, and the secondary module 80 may be positioned above a row of primary modules 78 attached to the exterior bottom side of the housing 28. Examples of inductive power transfer for substrate transport apparatuses are disclosed in U.S. Patent Publication No. US 2016 / 0229296, the entire contents of which are incorporated herein by reference. The power coupling may also be combined with a communication device.

[0067] Referring to FIG. 15 , a block diagram representation of an exemplary embodiment of the power coupling system 62 is shown. As shown, the power coupling system 62 may include an alternating current (AC) power source 82, a power coupling between at least one primary module 78 and at least one secondary module 80, and an optional rectifier circuit 84. AC power 86 is supplied to the primary module 78, which provides power to the secondary module 80 through a gap 88, which provides AC power 90 to the rectifier circuit 84. The secondary module 80 moves with the robot chassis 28 while the primary module 78 remains stationary. However, in alternative examples, the primary and secondary modules may be configured to move relative to one another, including translationally, rotationally, or a combination of the two. The primary and secondary modules may be primary or secondary cores or primary or secondary rails. In alternative embodiments, any suitable combination or shape may be provided. For example, electrical wire(s) from module 80 may extend through a sealed opening in housing 28 to, for example, supply electricity to the robot's motors 42 and / or controllers (e.g., servo motor controllers, etc.), and / or communications equipment and / or sensors within housing 28, or subsequently to devices in or on robot arm assembly 36. In alternative embodiments, two or more modules 80 may be provided, mounted on one or more sides of housing 28. Because modules 78, 80 do not contact each other, the risk of contamination within chamber 15 is reduced as module 80 moves relative to module 78.

[0068] 16, an isometric view of an alternative embodiment of one example of power coupling 62a is shown. As best shown in FIG. 14, primary module(s) 78 may comprise a primary core or rail 94 and a primary winding or coil 96, which may be configured, for example, to be supplied by AC power source 82 such that AC current through primary winding 96 generates AC magnetic flux in primary core or rail 94. Primary core or rail 94 may feature an extension 98 along the direction of relative motion B between primary module 78 and secondary module 80. Secondary module 80 may comprise a secondary core or rail 100 and a secondary winding or coil 102 configured such that AC magnetic flux in secondary core or rail 100 induces a voltage in secondary winding 102. The secondary core or rail 100 may travel along the extension 98 of the primary core or rail 94 as part of the secondary module and may be positioned so that magnetic flux may pass between the primary core or rail and the extension of the secondary core or rail at a shoe portion across an air gap 104 between the extension 98 of the primary core or rail and the secondary core or rail 100. The output of the secondary winding 102 may be used directly as an AC power source, or if DC power is required, the secondary winding may power a rectifier circuit 84 (e.g., inside the housing 28), which may function as the DC power source 92 as shown in FIG. 15. The primary winding 96 and the secondary winding 102 may feature substantially the same number of turns so that the amplitude of the output voltage of the secondary winding is substantially equal to the amplitude of the voltage supplied by the AC power source 82. If a higher output voltage is required, the number of turns of the secondary winding 102 may be greater than the number of turns of the primary winding 96. Conversely, if a lower output voltage is required, the number of turns in the secondary winding 102 may be fewer than the number of turns in the primary winding 96. The primary core 94 and secondary core 100 may be C-shaped, as shown diagrammatically in FIG. 16 , E-shaped, or may feature any suitable shape that enables inductive coupling between the primary module 78 and the secondary module 80. The extension 98 of the primary core 94 may be straight to accommodate linear movement between the primary module 78 and the secondary module 80, or may be curved to accommodate curved or rotational movement.The primary core 94, extension 98, and secondary core 100 may be fabricated from a soft magnetic material, such as silicon steel, a soft magnetic composite, another material suitable for conducting magnetic flux, or a combination of such materials. A laminated structure may be utilized. Here, the primary and secondary modules may be considered as an inductive section, with the windings being coils. All electrical wiring for the secondary module 80 may be located inside the robot housing 28 so that no wiring is located within region 17. All electrical wiring for the primary module 78 may be located outside the transfer chamber 15 so that no wiring is located within region 17.

[0069] Data communication coupling system

[0070] In this example, the data communication coupling system 64 comprises an optical communication system 106 including a first member 108 and a second member 110, as best shown in FIGS. 10, 11, and 17. The first member 108 is connected to the exterior bottom side of the robot housing 28. In an alternative example, the first member 108 may be inside a housing having an optical window therethrough, or may be located on a side of the housing other than the bottom. The second member 110 is connected to a sidewall of the transfer chamber 15. The second member 110 may be located outside of the region 17, and the transfer chamber 15 may still have a window through which the two members 108, 110 can optically communicate with each other. In another example, the second member 110 may be inside the chamber 15.

[0071] The two members 108, 110 may use one or more laser beams or other optical signals 112 to send and receive data signals over the varying distance between the housing 28 and the chamber 15 as the housing moves within the chamber 15. The data signals may then be sent to and received from components within the robot housing 28, such as to control the robot 26 and / or linear drive system 30, and to transmit data from sensors in the substrate transport apparatus 12 to the controller 50. All wiring (electrical and / or optical) from the first member 108 may be located within the robot housing 28 so that no wiring is located within the region 17. All wiring (electrical and / or optical) from the second member 110 may be located outside the transport chamber 15 so that no wiring is located within the region 17. This reduces the risk of contamination within the region 17, such as outgassing from these wiring. This communication system may be combined with a power supply.

[0072] Heat Transfer Coupling System

[0073] As described above, the apparatus 10 may further include a heat transfer coupling system 66. The heat transfer coupling system 66 may be used to provide thermal management for components of the substrate transport apparatus 12 within the robot housing 28 to transfer heat from within the robot housing 28 to outside the transfer chamber 15. This may be particularly important when the region 17 is a vacuum environment with poor heat transfer capabilities. The moving robot housing 28 serves to house all of the advanced control subsystems that move with the substrate transport apparatus 12. The moving robot housing 28 also serves to support a robot transport arm that cooperates with a moving support to transport one or more substrates between multiple locations. Because there are active components coupled to the moving robot housing 28, such as the motors 42, heat generated by the active components may be dissipated by the thermal management subsystem. In the case of a moving support in a vacuum, heat may be dissipated by radiation or by conduction through a medium, such as a gas or by coupling a bellows to the moving support and circulating a gas or liquid coolant through the coolant. For cooling by radiation alone (or a combination of radiation and convection), a tolerable temperature difference between all or a portion of the moving part and the chamber may be specified, such as 50 degrees Celsius. In the illustrated exemplary embodiment, non-contact interleaved fin structures 120, 122 (see FIGS. 2-4, 10, and 11) may be used to maximize the facing surface area. High-emissivity coatings may also be utilized to maximize heat transfer associated with the surface area. Examples of suitable coatings may include aluminum oxide, aluminum nitride, or any suitable high-emissivity coating. In alternative aspects, any suitable surface or coating may be provided. For moving supports in gas or inert environments, heat may be dissipated by radiation, convection, or both. Because there are active components coupled to the moving support 28, power and communications may be routed to the moving support subsystem with the power coupling system 62 and communications coupling system 64, as described in the examples above. Power and communications may be routed wirelessly to the moving support subsystem by inductive coupling, a service loop, or a combination of these approaches, as described in the examples above.

[0074] The active components coupled to the support may be potted with vacuum-compatible potting or epoxy, or encapsulated within a housing 28, or a combination of both. An example of a suitable moving support thermal sink subsystem is disclosed in Hosek M. and Hofmeister C. (U.S. Patent Application No. 13 / 618,117, filed September 14, 2012, U.S. Patent Publication No. 2013 / 0071218, entitled "Low Variability Robot"), which is incorporated herein by reference in its entirety. However, because a robot housing 28 is used, potting or epoxy may be used in reduced amounts or may not be used.

[0075] Alternative example

[0076] With further reference to FIG. 18 , an alternative exemplary embodiment is shown. This embodiment is similar to that shown in FIGS. 2 through 4 but has a reduced form factor. The linear motor is sealed, and there are shielded linear bearings and protected optical links. In some circumstances, heat transfer fins may not be necessary. With further reference to FIG. 18A , another alternative exemplary embodiment is shown. This embodiment is similar to that shown in FIG. 18 , but in this example, the housing 28 does not include heat transfer fins. In this type of embodiment, wall cooling, such as flowing coolant through the chamber wall in the absence of cooling fins, can be provided to the walls of the housing 28 and / or the vacuum chamber wall. However, such a cooling system can be used in combination with fins. FIG. 18A shows an example of cooling tubes 15a in the wall of the chamber 15′.

[0077] In some embodiments, cooling of the robot may be facilitated by cooling the vacuum chamber walls. Heat may be transferred from the robot drive to the vacuum chamber walls by radiation or convection, or a combination of the two. Regardless of the mechanism of heat transfer from the robot drive to the vacuum chamber, the amount and rate at which heat is transferred may be increased by cooling the chamber walls. Cooling the chamber walls may be achieved by several different methods, or a combination thereof. In one exemplary embodiment, cooling may be achieved by integrating vent cooling paths directly or indirectly on the vacuum chamber walls. Reduction of the vacuum chamber wall temperature may be achieved using continuous or intermittent flow of a working fluid, which may be a liquid, a gas, or a combination of the two, such that the working fluid has an initial inlet temperature lower than the vacuum chamber wall temperature. This facilitates cooling of the robot drive. In an alternative embodiment, thermoelectric cooling tiles may be used to cool the surface of the vacuum chamber, rejecting heat at a higher temperature on the hot side of the thermoelectric tiles, thus enabling more effective cooling.

[0078] 19, an alternative exemplary embodiment is shown. In this example, the system is used between two cluster tools 150a, 150b. The chamber 15 has load locks 152 at both ends coupled to the tools 150a, 150b. The robot housing 28 and attached robot 26 are movable, as shown by arrow B, to transfer substrates between the tool robots 154a, 154b. The robot may also be used in a vacuum EFEM, as in FIG. 1.

[0079] Features

[0080] One of the features described herein is the ability of the robot chassis 28 to function as a cart that moves linearly within the transfer chamber 15 carrying all of the components necessary for the substrate transport apparatus 12, with the only physical contact with the transfer chamber 15 being on the rails 32. However, if a magnetic levitation system is used, even that contact with the rails 32 may not be necessary.

[0081] Another feature described herein is that substantially all components of the substrate transport apparatus 12, except for the robot arm assembly 36 and the upper portion of the robot drive shaft, can be isolated within the robot housing 28 in region 29. Region 29 can have an atmosphere other than a vacuum, even if region 17 is a vacuum. This allows the robot 26 to be a non-vacuum-compatible robot. For non-vacuum-compatible robots, outgassing is not a significant factor in their design and manufacture. Therefore, non-vacuum-compatible robots do not need to provide low- or zero-outgassing designs and are less expensive than vacuum-compatible robots. The robot housing 28 can also have a window for optical communication so that the member 108 can be located entirely inside the robot housing 28. The power coupling 80 can also be located entirely inside the robot housing 28 by having a portion of the robot housing 28 have a magnetically transparent section that allows the two power couplings 78, 80 to function properly by induction. The transport chamber 15 can also include a linear encoder 156, as shown in FIG. 10, to detect the linear position of the robot housing 28 on the rails 32. All communication with components within and / or on the robot housing 28 may be optical or wireless, or via power coupling, so that no communication wires or optical wires need to cross the area 17.

[0082] Due to the features described herein, the robot drive 34 may be enclosed by the sealed robot housing 28. Thus, the transfer chamber 15 requires only the rails 32 along which the substrate transport apparatus 12 moves, and there is no other direct physical contact by the transfer chamber 15 with the robot housing 28 or the substrate transport apparatus 12. Even in non-magnetically levitated embodiments, there may always be a gap or spacing between the transfer chamber 15 and the substrate transport apparatus 12 everywhere except for the rails 32. This lack of contact reduces contamination of the region 17 by the substrate transport apparatus 12.

[0083] Magnetic Guidance System

[0084] While wheels on rails are described above as one type of exemplary embodiment, features such as those described herein can be used to provide a material handling robot for vacuum environment applications that can traverse along a track and eliminate the undesirable contamination and outgassing effects associated with the mechanical contact of rails and linear bearings used in conventional solutions. Thus, rather than using rails as part of the magnetic levitation system, linear guides can be used. Guides such as 32A' and 32B' shown in FIG. 20 can be located on the floor of chamber 15 or any suitable location on the interior chamber wall, similar to the rails in the above-described embodiments.

[0085] An exemplary embodiment is shown diagrammatically in Figure 20. As shown in Figure 20, a robot 200 may comprise a housing 28, a robot drive disposed inside the housing 28, a robot arm 202 located outside the top surface of the housing and connected to the robot drive and having an end effector 38 configured to support a substrate thereon, a linear actuation system 204, and a magnetic support and control system 206. The robot drive 200, linear actuation system 204, and magnetic support and control system 206 may be coupled to the controller 50 shown in Figure 1.

[0086] The linear actuation system 204 may comprise at least one linear actuator, a position sensor, and a position control system (which may conveniently be incorporated into a robot control system), which may be similar to the system comprising the linear motor 70 described above, for example.

[0087] The linear actuator of the linear actuation system may consist of a moving portion, which may be mounted to the housing 28, and a fixed portion. For example, the linear actuator may be a linear motor, such as a permanent magnet linear motor as shown in FIGS. 12 and 13. In this example, the moving portion may consist of a forcer comprising multiple coils, and the fixed portion may be formed by the magnet track 204. The linear actuator may be configured to generate a force between the moving portion of the linear actuator and the fixed portion of the linear actuator substantially along the direction of desired lateral movement of the robot (a direction along the x-axis in FIG. 20).

[0088] The position sensor(s) of the linear actuation system may be configured to measure the position of the robot drive 200 along the desired direction of lateral motion (along the x-axis in FIG. 20 ). By way of example, these sensors may include position encoders, such as optical, magnetic, inductive, or capacitive position encoders, laser interferometers, or any other suitable device capable of measuring the position of the robot drive along the desired direction of lateral motion, e.g., movement relative to the chamber 15. Measurements from these position sensors may be used to control the position of the robot drive along the desired direction of lateral motion of the robot (along the x-axis in FIG. 20 ) using forces generated by the linear actuators.

[0089] The magnetic support system may be configured to support and guide the robot drive along the desired direction of lateral movement of the robot (along the x-axis in FIG. 20 ). The magnetic support system may magnetically support the housing 28 at a vertically spaced position above the guides 32A′, 32B′. The magnetic support system may consist of one or more fixed guides 32A′, 32B′ substantially parallel to the desired lateral movement of the robot, and a plurality of electromagnetic actuators attached to the robot drive and configured to generate forces between the robot drive and the fixed guides. The guides may be a single component along the length of the chamber or an assembly of two or more guides connected end-to-end. The magnetic support system may further include a sensor capable of determining the position of the robot drive relative to the fixed guides and a control system capable of controlling the position of the robot drive relative to the fixed guides (conveniently, the control system for the magnetic support system may be incorporated into the robot control system).

[0090] In the exemplary embodiment of FIG. 20 , two substantially parallel fixed guides 32A′, 32B′ may be utilized. Still referring to FIG. 20A , a first pair of electromagnetic actuators 208A may be attached to the robot drive near its left front corner so as to generate opposing vertical forces between the robot drive and the fixed guide in a direction perpendicular to the surface of the guide (in FIG. 20 , the electromagnetic actuators 208 are represented by circles, each representing one or more actuators, and the forces generated by the actuators are represented by arrows). This first pair of actuators 208A will be referred to as the left front vertical actuators. Another pair of electromagnetic actuators 208B may also be attached to the robot drive near its left front corner so as to generate opposing horizontal forces between the robot drive and the left fixed guide in a direction perpendicular to the surface of the guide. This second pair of actuators will be referred to as the left front horizontal actuators. These two spaced pairs of actuators 208A, 208B (ie, a vertical pair and a horizontal pair for a total of four actuators in the left front corner) can function as a two-degree-of-freedom linear magnetic bearing.

[0091] Similarly, referring to FIG. 20B , a third pair of electromagnetic actuators 209A may be attached to the robot drive unit near its left rear corner so as to generate opposing vertical forces between the robot drive unit and the right fixed guide in a direction perpendicular to the guide's surface. This pair of actuators is referred to as the left rear vertical actuators. Similarly, a fourth pair of electromagnetic actuators 209B may be attached to the robot drive unit near its left rear corner so as to generate opposing horizontal forces between the robot drive unit and the left fixed guide in a direction perpendicular to the guide's surface. This pair of actuators is referred to as the left rear horizontal actuators. These two spaced-apart pairs of actuators 209A, 209B (i.e., the vertical and horizontal pairs of actuators at the left rear corner for a total of four actuators) may function as additional two-degree-of-freedom linear magnetic bearings.

[0092] 20C, a fifth pair of electromagnetic actuators 210 may be attached to the robot drive unit on its right-hand side so as to generate opposing vertical forces between the robot drive unit and the right fixed guide body in a direction perpendicular to the guide surface. This pair of actuators 210 is referred to as the right-hand vertical actuator. This actuator may function as a one-degree-of-freedom linear magnetic bearing. As can be seen in FIG. 20, the fifth pair of electromagnetic actuators 210 is not located at the front or rear corners of the right side. Instead, the fifth pair of electromagnetic actuators 210 is located away from these corners, approximately midway between the front and rear corners of the right side.

[0093] Referring further to FIG. 20D, as shown by the imaginary "U" shape superimposed on the top of the housing 28, a generally triangular arrangement of the actuators 208, 209, 210 (two groups 208, 209 near the bottom corners of one side and one group 210 between the corners of the opposite side) requires three sets of actuators. This reduces the number of actuators relative to a system in which actuators are provided at all four bottom corners of the transport slide. This reduces the cost of manufacturing the transport system and also reduces the number of components within the chamber 15, reducing potential contamination within the chamber 15. FIGS. 20E and 20F are schematic top views similar to FIG. 20D but illustrating differently shaped housings 28', 28''. These also use a triangular electromagnetic actuator pattern / arrangement. The housing need not be simply box- or rectangular-shaped.

[0094] A sensor 212 capable of measuring the generally vertical position of the robot drive relative to the left fixed guide or other equivalent geometric reference may be located at or near the left front vertical actuator. Similarly, a sensor 214 capable of measuring the generally vertical position of the robot drive relative to the left fixed guide or other equivalent geometric reference may be located at or near the left rear vertical actuator. And a sensor 216 capable of measuring the generally vertical position of the robot drive relative to the right fixed guide or other equivalent geometric reference may be located at or near the right vertical actuator.

[0095] A sensor 218 capable of measuring the generally horizontal position of the robot drive relative to the left fixed guide or other equivalent geometric reference may be located at or near the left front horizontal actuator. Similarly, a sensor capable of measuring the generally horizontal position of the drive relative to the left fixed guide 220 or other equivalent geometric reference may be located at or near the rear horizontal actuator. While it is mathematically convenient to locate the sensors at or near the actuators, the same functional purpose may be achieved with the same or a different number of sensors located at other locations on the robot drive.

[0096] As an example, the sensors described above capable of measuring the position of the robot drive relative to the guides in the vertical and horizontal directions may be gap sensors, such as optical, magnetic, inductive, or capacitive gap sensors. In alternative examples, more or fewer sensors may be provided and placed in any suitable locations. Data and information from other types of sensors, such as accelerometers or gyroscopes, may be used in combination with or instead of the gap sensors and mathematical models, achieving similar objectives and, when combined, tracking and performance. In embodiments involving gap sensors, the gap sensors may use ferromagnetic or non-ferrous materials as target surfaces. In either case, a thin layer of the material may be applied as a coating, or metal tape may suffice as a servo target.

[0097] The robot drive 202 may be considered as a single rigid body in space and therefore may have six degrees of freedom. Considering the exemplary embodiment of Figure 20, the six degrees of freedom may be represented, for example, by three Cartesian coordinates of a reference point on the robot drive (e.g., x, y, and z coordinates) and three angular coordinates (e.g., representing rotation about the x, y, and z axes). Advantageously, the angle representing rotation about the x-axis may be referred to as the roll angle of the robot drive, the angle representing rotation about the y-axis may be referred to as the pitch angle of the robot drive, and the angle representing rotation about the z-axis may be referred to as the yaw angle of the robot drive.

[0098] Based on measurements from the sensors, three pairs of vertical actuators, i.e., left front vertical actuator, left rear vertical actuator, and right hand side vertical actuator, may be utilized to control three degrees of freedom of the robot drive, i.e., vertical position, indicated by the z-axis coordinate, and pitch and roll angles of the robot drive. Two pairs of horizontal actuators, i.e., left front horizontal actuator and left rear horizontal actuator, may be used to control two more degrees of freedom of the drive, i.e., lateral position, indicated by the y-axis coordinate, and yaw angle of the robot drive. Finally, a linear actuator may be utilized to control the remaining degree of freedom, i.e., position of the robot drive along the desired lateral direction of movement, indicated by the x-axis coordinate.

[0099] Another exemplary embodiment is shown diagrammatically in Figure 20G. As shown in Figure 20G, a robot 200 may comprise a housing 28, a robot drive disposed within the housing 28, a robot arm 202 located on the top side of the housing and connected to the robot drive 201 and having an end effector 38 configured to support a substrate thereon, a linear actuation system, and a magnetic levitation support and control system 206. The robot drive 201, the linear actuation system 204, and the magnetic support and control system 206 may be coupled to the controller 50 shown in Figure 1.

[0100] The linear actuation system may comprise at least one linear actuator, a position sensor, and a position control system (which may be conveniently incorporated into a robotic control system), which may be similar to the system comprising linear motor 70 described above, for example.

[0101] The linear actuator of the linear actuation system may consist of a moving portion, which may be mounted to the housing 28, and a fixed portion. For example, the linear actuator may be a linear motor, such as the permanent magnet linear motor shown in FIGS. 12 and 13. In this example, the moving portion may consist of a forcer having multiple coils, and the fixed portion may be formed by the magnet track 204. The linear actuator may be configured to generate a force between the moving portion of the linear actuator and the fixed portion of the linear actuator substantially along the desired direction of lateral movement of the robot (along the x-axis in FIG. 20G).

[0102] The position sensor(s) of the linear actuation system may be configured to measure the position of the robot drive 201 along the desired direction of lateral motion (along the x-axis in FIG. 20G). By way of example, these sensors may include position encoders, such as optical, magnetic, inductive, or capacitive position encoders, laser interferometers, or any other suitable device capable of measuring the position of the robot drive along the desired direction of lateral motion, e.g., movement relative to the chamber 15. Using measurements from these position sensors, forces generated by the linear actuators can be used to control the position of the robot drive along the desired direction of lateral motion of the robot (along the x-axis in FIG. 20G).

[0103] The magnetic support system may be configured to support and guide the robot drive along the desired direction of lateral movement of the robot (along the x-axis in FIG. 20G). The magnetic support system may magnetically support the housing 28 at a vertically spaced position above the guides 220, 221. The magnetic support system may consist of one or more fixed guides 220, 221 substantially parallel to the desired lateral movement of the robot, and a plurality of electromagnetic actuators attached to the robot drive and configured to generate forces between the robot drive and the fixed guides. The guides may be a single component along the length of the chamber, or an assembly of two or more guides connected end-to-end. The magnetic support system may further include a sensor capable of determining the position of the robot drive relative to the fixed guides and a control system capable of controlling the position of the robot drive relative to the fixed guides (conveniently, the control system for the magnetic support system may be incorporated into the robot control system).

[0104] In the exemplary embodiment of FIG. 20G, two substantially parallel fixed magnetic levitation guides 220, 221 may be utilized. A pair of electromagnetic actuators 210 may be attached to the robot drive unit 201 near the front left corner of the robot drive unit 201 so as to generate opposing vertical forces between the robot drive unit and the left fixed guide 220 in a direction perpendicular to the surface of the guides (in FIG. 20G, the electromagnetic actuators 210, 211, 212, 213, 214 are represented by circles, each representing one or more actuators, and the forces they generate are indicated by arrows). This pair of actuators 210 is referred to as the left front vertical actuators. Another pair of electromagnetic actuators 213 may also be attached to the robot drive unit 201 near the front left corner of the drive unit so as to generate opposing horizontal forces between the robot drive unit 201 and the left fixed guide 220 in a direction perpendicular to the surface of the guides. This pair of actuators 213 is referred to as the left front horizontal actuators. Two pairs of these actuators, a vertical 210 pair and a horizontal 213 pair, can function as a two-degree-of-freedom linear magnetic bearing.

[0105] Similarly, a pair of electromagnetic actuators 211 may be attached to the robot drive unit near its left rear corner so as to generate opposing vertical forces between the robot drive unit 201 and the left fixed guide 220 in a direction perpendicular to the surface of the guide. This pair of actuators 211 is referred to as the left rear vertical actuators. Another pair of electromagnetic actuators 214 may be attached to the robot drive unit near its left rear corner so as to generate opposing horizontal forces between the robot drive unit 201 and the left fixed guide 220 in a direction perpendicular to the surface of the guide. This pair of actuators 214 is referred to as the left rear horizontal actuators. These two pairs of actuators, i.e., the vertical pair 211 and the horizontal pair 214, may function as another two-degree-of-freedom linear magnetic bearing.

[0106] Finally, a pair of electromagnetic actuators 212 may be attached to the robot drive 201 on the right hand side so as to generate opposing horizontal forces between the robot drive and the right fixed guide 221 in a direction perpendicular to the surface of the guide. This pair of actuators 212 is referred to as the right hand vertical actuators. The actuators may function as one degree of freedom linear magnetic bearings.

[0107] A sensor 241 capable of measuring the generally vertical position of the robot drive unit relative to the left fixed guide 220 may be located at or near the left front vertical actuator 210. Similarly, a sensor 242 capable of measuring the generally vertical position of the robot drive unit relative to the left fixed guide 220 may be located at or near the left rear vertical actuator 211. Also, a sensor 243 capable of measuring the generally vertical position of the robot drive unit relative to the right fixed guide 221 may be located at or near the right hand vertical actuator 212. In Figure 20G, the generally vertical sensors 241, 242, 243 are shown as downward pointing triangles.

[0108] A sensor 231 capable of measuring the generally horizontal position of the robot drive unit relative to the left fixed guide 220 may be located at or near the left front horizontal actuator 213. Similarly, a sensor 232 capable of measuring the generally horizontal position of the drive unit 201 relative to the left fixed guide 220 may be located at or near the rear horizontal actuator 214. In Figure 20G, the generally horizontal sensors 231, 232 are shown as sideways triangles.

[0109] As an example, the sensors described above capable of measuring the position of the robot drive relative to the guides in the vertical and horizontal directions may be gap sensors, such as optical, magnetic, inductive, or capacitive gap sensors. In alternative examples, more or fewer sensors may be provided and placed in any suitable locations. Data and information from other types of sensors, such as accelerometers or gyroscopes, may be used in combination with or instead of the gap sensors and mathematical models, achieving similar objectives and, when combined, tracking and performance. In embodiments involving gap sensors, the gap sensors may use ferromagnetic or non-ferrous materials as target surfaces. In either case, a thin layer of the material may be applied as a coating, or metal tape may suffice as a servo target.

[0110] The robot drive 201 may be considered as a single rigid body in space and therefore may have six degrees of freedom. Considering the exemplary embodiment of Figure 20G, the six degrees of freedom may be represented, for example, by three Cartesian coordinates of a reference point on the robot drive (e.g., x, y, and z coordinates) and three angular coordinates (e.g., representing rotation about the x, y, and z axes). Advantageously, the angle representing rotation about the x-axis may be referred to as the roll angle of the robot drive, the angle representing rotation about the y-axis may be referred to as the pitch angle of the robot drive, and the angle representing rotation about the z-axis may be referred to as the yaw angle of the robot drive.

[0111] Based on measurements from the sensors, three pairs of vertical actuators, namely, left front vertical actuator 210, left rear vertical actuator 211, and right hand side vertical actuator 212, may be utilized to control three degrees of freedom of the robot drive 201, namely, the vertical position indicated by the z-axis coordinate, and the pitch and roll angles of the robot drive. Two pairs of horizontal actuators, namely, left front horizontal actuator 213 and left rear horizontal actuator 214, may be used to control two more degrees of freedom of the drive, namely, the lateral position indicated by the y-axis coordinate, and the yaw angle of the robot drive. Finally, linear actuators may be utilized to control the remaining degree of freedom, namely, the position of the robot drive along the desired lateral direction of movement indicated by the x-axis coordinate.

[0112] Another exemplary embodiment of a robot according to the present invention is diagrammatically shown in Figure 21. In this exemplary embodiment, two substantially parallel fixed guides 32A', 32B', a pair of left front vertical actuators 208A, a pair of left rear vertical actuators 209A, a pair of right hand side vertical actuators 210, and vertical position sensors 212, 214, 216 may be utilized in a configuration substantially equivalent to the previously described exemplary embodiment.

[0113] An electromagnetic actuator 208B1 may be attached to the robot drive near the front left corner of the drive so that it can generate a horizontal force between the robot drive and the left fixed guide 32A' in a direction perpendicular to the surface of the guide. The electromagnetic actuator may be configured to generate an outward or inward force (i.e., away from or towards the right guide; due to the nature of the electromagnetic actuator, this force can only be generated in one of two directions). This actuator 208B1 is referred to as the left front horizontal actuator.

[0114] Another electromagnetic actuator 208B2 may be attached to the robot drive near its right front corner so as to generate a horizontal force between the robot drive and the right fixed guide 32B' in a direction perpendicular to the guide's surface. The electromagnetic actuator may be configured to generate a force in a direction substantially opposite to the direction of the force generated by the left front horizontal actuator. This actuator 208B2 is referred to as the right front horizontal actuator. In the exemplary embodiment of FIG. 21, the left and right front horizontal actuators 208B1, 208B2 may fulfill the role of the left front horizontal actuator pair 208B utilized in the exemplary embodiment of FIG. 20.

[0115] Another electromagnetic actuator 209B1 may be attached to the robot drive near its rear left corner so as to generate a horizontal force between the robot drive and the left fixed guide 32A' in a direction perpendicular to the surface of the guide. The electromagnetic actuator may be configured to generate an outward or inward force (i.e., away from or towards the right guide; due to the nature of the electromagnetic actuator, this force can only be generated in one of two directions). This actuator 209B1 is referred to as the left rear horizontal actuator.

[0116] Another electromagnetic actuator 209B2 may be attached to the robot drive unit near its right rear corner so as to generate a horizontal force between the robot drive unit and the right fixed guide 32B' in a direction perpendicular to the surface of the guide. The electromagnetic actuator may be configured to generate a force in a direction substantially opposite to the direction of the force generated by the left rear horizontal actuator. This actuator 209B2 is referred to as the right rear horizontal actuator. In the exemplary embodiment of FIG. 21, the left rear and right rear horizontal actuators 209B1, 209B2 may fulfill the role of the left rear horizontal actuator 209B pair utilized in the exemplary embodiment of FIG. 20.

[0117] Another exemplary embodiment of a robot according to the present invention is diagrammatically shown in Figure 22. In this exemplary embodiment, two substantially parallel fixed guides 32A', 32B', a pair of left front vertical actuators 208A, a pair of left rear vertical actuators 209A, a pair of right hand side vertical actuators 210, and vertical position sensors (see, e.g., 212, 214, 216 in Figure 20) may be utilized in a configuration substantially equivalent to the two previous exemplary embodiments.

[0118] As shown in Figure 22, an electromagnetic actuator 211 may be attached to the robot drive on its left-hand side so as to generate a horizontal force between the robot drive and the left fixed guide 32A' in a direction perpendicular to the surface of the guide. The electromagnetic actuator may be configured to generate an outward or inward force (i.e., away from or towards the right guide; due to the nature of the electromagnetic actuator, this force can only be generated in one of two directions). This actuator is referred to as the left-hand side horizontal actuator.

[0119] Another electromagnetic actuator 208B2 may be attached to the robot drive near the right front corner of the drive so as to generate a horizontal force between the robot drive and the right fixed guide 32B' in a direction perpendicular to the surface of the guide. The electromagnetic actuator 208B2 may be configured to generate a force in a direction substantially opposite (i.e., facing inward or outward) to the direction of the force generated by the left-hand horizontal actuator. This actuator 208B2 will be referred to as the right front horizontal actuator.

[0120] An electromagnetic actuator 209B2 may be attached to the robot drive near the right rear corner of the drive so as to generate a horizontal force between the robot drive and the right fixed guide 32B' in a direction perpendicular to the surface of the guide. This electromagnetic actuator may also be configured to generate a force in a direction substantially opposite (i.e., facing inward or outward) to the direction of the force generated by the left-hand horizontal actuator. This actuator 209B2 will be referred to as the right rear horizontal actuator.

[0121] In the exemplary embodiment of Figure 22, the left hand side, right front, and right rear horizontal actuators may take on the role of the left front and left rear horizontal actuators utilized in the exemplary embodiment of Figure 20, or the left front, right front, left rear, and right rear horizontal actuators of the exemplary embodiment of Figure 21. As further shown in Figure 22A, this can be used to provide two triangular layout patterns C and D of electromagnetic actuators relative to the robot drive or housing, "C" for vertical actuators and "D" for horizontal actuators.

[0122] Another exemplary embodiment of a robot according to the present invention is diagrammatically shown in Figure 23. In this exemplary embodiment, two substantially parallel fixed guides 32A', 32B', a left front vertical actuator 208A, a left rear vertical actuator 209A, a right hand side vertical actuator 210, and vertical position sensors (see, e.g., 212, 214, 216 in Figure 20) may be utilized in a configuration substantially equivalent to the previously described exemplary embodiment.

[0123] 23, the magnetic support system may include another guide 32C', referred to as the third fixed guide, which may also be substantially parallel to the desired direction of lateral movement of the robot. The third guide 32C' is shown in a central position between the left and right fixed guides 32A', 32B', but may be located in any other suitable position.

[0124] A pair of electromagnetic actuators 208B may be attached to the robot drive near its front end so as to generate opposing horizontal forces between the robot drive and the third fixed guide 32C' in a direction perpendicular to the surface of the guide. This pair of actuators 208B will be referred to as the front horizontal actuators.

[0125] Similarly, a pair of electromagnetic actuators 209B may be attached to the robot drive unit near its rear end so as to generate opposing horizontal forces between the robot drive unit and the third fixed guide 32C' in a direction perpendicular to the surface of the guide. This pair of actuators 209B will be referred to as the rear horizontal actuators.

[0126] In the exemplary embodiment of FIG. 23, the front horizontal actuator may take on the role of the left front horizontal actuator utilized in the exemplary embodiment of FIG. 20. The rear horizontal actuator may take on the role of the left rear horizontal actuator utilized in the exemplary embodiment of FIG. 20.

[0127] An example of an electromagnetic actuator that may be utilized in a robot magnetic support system according to the present invention is shown diagrammatically in Figures 24A and 24B. The electromagnetic actuator may comprise a U-shaped ferromagnetic core 222 made of laminated steel, soft magnetic composite material, or other suitable ferromagnetic material, and a winding 224 or combination of windings attached to the core that may generate a magnetic flux 226 through the core. The magnetic flux may generate an attractive force between the core and the guide 32 of the robot magnetic support system. In the figures, the path of the magnetic flux 226 is shown by a dotted line. Arrows 228 indicate the force generated by and applied to the actuator.

[0128] Another example of an electromagnetic actuator for a robot magnetic support system according to the present invention is shown diagrammatically in Figures 25A and 25B. In this embodiment, the actuator may utilize an E-shaped iron core 232. The core may be oriented in any manner relative to the guide. For example, in Figures 24 and 25, the core may move from left to right relative to the guide, or it may move in or out of the plane of the figure. In this embodiment, the guide extends in / out of the plane of the figure rather than left to right.

[0129] Yet another example of an electromagnetic actuator configuration that can be utilized in a robot magnetic support system according to the present invention is shown diagrammatically in FIGS. 26A and 26B. In this embodiment, two actuators can be combined into a single mechanical assembly having two windings 224a, 224b and a common iron core 242 configured to interface with a U-shaped guide 32″. This configuration can provide a smaller, lighter, and desirable actuator package because the two windings share a central portion of the iron core (the central portion of the iron core can be shared because the two windings are not simultaneously energized). The U-shaped guide 32″ can consist of two horizontal soft magnetic sections G, I connected by a non-magnetic vertical section H. While this guide configuration is more complex, it offers advantages in terms of construction and integration when the robot is installed in a vacuum chamber.

[0130] An exemplary arrangement combining the exemplary embodiment of FIGS. 26A, 26B in the role of a vertical actuator and the exemplary embodiment of FIGS. 25A, 25B in the role of a horizontal actuator is shown diagrammatically in FIG.

[0131] Although the description of various embodiments of the present invention assumes that the electromagnetic actuators are arranged to generate forces independently in the vertical and horizontal directions, the actuators may be oriented in any suitable manner. For example, the two-degree-of-freedom linear magnetic bearing of the example embodiment of FIG. 20 may utilize electromagnetic actuators that generate vertical and horizontal forces, as shown diagrammatically in FIG. 28A, or may utilize electromagnetic actuators that generate forces in other directions, preferably, but not limited to, orthogonal, as shown diagrammatically in FIG. 28B. Furthermore, while the actuators and sensors are described as separate entities, the two may conveniently be combined into a single, dual-function unit that both senses and acts. See, for example, U.S. Patent Publication No. 2018 / 0090253, which is incorporated herein by reference in its entirety. In the exemplary embodiment of FIG. 28B, the electromagnetic actuators may be controlled so that the sum of the vectors generated by the electromagnetic actuators is resolved into the desired vertical and horizontal components. In general, both the sensors and actuators may be positioned and oriented in a variety of locations. An example including a magnetic levitation rail or guide 220, a robot 200, a robot arm 202, a linear actuation system 204, actuators 210, 211, 212, 213, and sensors 231, 241, 242, 243, 244 is shown in FIG. 28C.

[0132] Although example locations of sensors are provided in the description of various embodiments of the present invention, any suitable sensor locations and any number of sensors may be used as long as measurements from those sensors can be used to uniquely determine the position of the robot drive relative to the fixed guide. An example of a non-orthogonal layout of actuators is shown in Figure 29, which shows a guide 220'' and two pairs of actuators 224, 226.

[0133] The actuators described in connection with various embodiments of the present invention may be individual actuators, may be formed by combining multiple actuators, and / or may be integrated to form an integrated magnetic bearing.

[0134] It should be noted that the control system of the linear actuation system and the control system of the magnetic support system may be combined and / or their functionality may be incorporated into the robot control system. Features as described herein may further include features described in U.S. Patent No. 10,269,604, which is incorporated herein by reference in its entirety.

[0135] It should be noted that the robot drive traveling on the magnetic levitation support system is completely isolated and not in physical contact with anything else. In this situation, static charge buildup can occur on the robot drive. Excessive static charge buildup can lead to interference with the robot's normal operation. A system for intermittently discharging static charge from the robot body is disclosed herein for the dual purposes of reducing static charge buildup and contamination issues. An example system is shown in FIG. 30. The discharge mechanism consists of one or more electrical ground connections 401, 402, 403 that contact the robot drive or robot arm, or any other component of the moving robot. In the illustrated exemplary embodiment, the ground connections 401, 402, 403 are shown on the magnetic levitation guides 220, 221. The contacts can be positioned so that contact occurs when the robot reaches the end of its travel on the X-axis. Alternatively, contact can occur midway through the X-axis range of motion. Alternatively, the contacts can be integrated into the guide. When contact occurs, static charge buildup on the robot is discharged to ground through the contact's provided ground path. To avoid arcing, the discharge current may be routed through an electrical resistor or other active or passive electrical component(s), as shown at 410.

[0136] The extremely wide X-axis motion range for a linear vacuum robot makes it difficult to construct position trajectories for the position sensors that are part of the aforementioned linear actuator system. To overcome this limitation, a two-position sensor split position trajectory approach is disclosed herein. Referring to FIG. 31 , as the robot drive traverses in the X direction, both position sensors RH1 and RH2 generate valid position data offset by a gap length F at all times except when one or the other of the sensors RH1 and RH2 targets a transition between the ends of two position trajectories E1 and E2. Note the gap or transition N. The disclosed solution resolves periods of invalid sensor data by switching to another sensor. Because the sensors RH1 and RH2 are physically offset from each other over the length of the guides / trajectories E1 and E2, at least one of the sensors RH1 and RH2 reports a valid position. The location of the transition N between the trajectories E1 and E2 is known in advance, since it is a design value, and the controller 206 makes a decision about switching between sensors RH1 and RH2 based on the known location of the transition N. In other embodiments, algorithms may be implemented to use, integrate, or combine data from sensors RH1, RH2 to achieve a gradual or smooth data transition when switching between active sensors. During periods when data from both sensors is active, data from both may be combined or integrated in various ways to improve accuracy, resolution, reliability, or noise rejection.

[0137] Note that the extremely wide range of X-axis motion for a magnetically levitated robot makes it difficult to construct a smooth, continuous surface for the gap sensors to cover. Referring to FIG. 31, there are two vertical sensors P and Q aimed at targets T1 and T2. At position L, there is an interruption / transition of targets T1 and T2. The gap measurement from either sensor is valid as long as the sensor is not moving through position L. Controller 206 makes a decision based on the X-axis motion position from sensors RH1 and RH2 as the gap sensor is transitioning through L. The algorithm described above is implemented on controller 206 to use the gap data from P or Q.

[0138] An exemplary embodiment may include an apparatus including a first device configured to support a substrate thereon and a first transport mechanism to which the first device is connected. The first transport mechanism is configured to support the first device for movement along a horizontal path. The first transport mechanism includes at least two guides, a magnetic system configured to position the first device vertically above the at least two guides with a gap between the first device and the at least two guides, and a linear actuator configured to move the first device along the path along the at least two guides. The magnetic system includes a first electromagnetic actuator at a first corner on a first side of the first device, a second electromagnetic actuator at a second corner on the first side of the first device, and a third electromagnetic actuator on an opposing second side of the first device that is not positioned proximate to a corner on the third side of the first device.

[0139] The first, second, and third electromagnetic actuators may be a single actuator that positions the first device vertically above the at least two guides. The first and second electromagnetic actuators may each be configured to generate opposing horizontal forces between the first device and the first guide. The third electromagnetic actuator may be configured to not generate a horizontal force between the first device and the second guide. The first and second electromagnetic actuators may each be configured to generate a horizontal force in a first direction between the first device and the first guide, and the apparatus further includes fourth and fifth electromagnetic actuators proximate third and fourth corners, respectively, on three sides of the first device, the fourth and fifth electromagnetic actuators configured to generate a horizontal force in an opposite second direction between the first device and the second guide. The apparatus may further include a fourth electromagnetic actuator disposed proximate the first side of the first device and configured to generate a horizontal force in a first direction between the first device and the first guide, and fourth and fifth electromagnetic actuators proximate third and fourth corners of each of the three sides of the first device, the fourth and fifth electromagnetic actuators being configured to generate a horizontal force in an opposing second direction between the first device and the second guide. The at least two guides may include a third guide between the first guide and the second guide, and the apparatus further includes a fourth and fifth electromagnetic actuator in the third guide, the fourth and fifth electromagnetic actuators being configured to generate opposing horizontal forces between the first device and the third guide.The first device may include a robot housing having a robot motor therein and a robot arm connected to the robot motor, the robot arm being disposed outside the robot housing and including an end effector configured to support the substrate thereon, the first side being a first side of the robot housing and the second side being a second, opposing side of the robot housing. The apparatus may further include a first sensor on the first electromagnetic actuator, a second sensor on the second electromagnetic actuator, and a third sensor on the third electromagnetic actuator, configured to measure a position of the first device relative to the first and second guides.

[0140] According to another example, a method may be provided, comprising: connecting a first electromagnetic actuator proximate a first corner of a first side of a first device; connecting a second electromagnetic actuator proximate a second corner of the first side of the first device; and connecting a third electromagnetic actuator proximate an opposing second side of the first device; and disposing the first device above at least two rails or guides. The first corners are on three sides of the first device, the first device is configured to support a substrate thereon, and the first electromagnetic actuator is part of a magnetic system of a first transport mechanism to which the first device is connected, the first transport mechanism being configured to support the first device for movement along a horizontal path. The second electromagnetic actuator is part of the magnetic system, and the second corners are on three sides of the first device. The third electromagnetic actuator is part of the magnetic system, and the third electromagnetic actuator is not disposed proximate a corner on one of the three sides of the first device. The first and second electromagnetic actuators are disposed on a first one of the rails, and the third electromagnetic actuator is disposed on a different second one of the rails.

[0141] The first, second, and third electromagnetic actuators may be a single actuator that positions the first device vertically above the at least two rails. The first and second electromagnetic actuators may each be configured to generate opposing horizontal forces between the first device and the first rail. The third electromagnetic actuator may be configured to not generate a horizontal force between the first device and the second rail. The first and second electromagnetic actuators may each be configured to generate a horizontal force in a first direction between the first device and the first rail. The arrangement may further include fourth and fifth electromagnetic actuators proximate third and fourth corners, respectively, on three sides of the first device. The fourth and fifth electromagnetic actuators are each configured to generate a horizontal force in an opposite second direction between the first device and the second rail. The method may further include connecting a fourth electromagnetic actuator to the first device proximate the first side, the fourth electromagnetic actuator configured to generate a horizontal force in a first direction between the first device and the first rail, and connecting the fourth electromagnetic actuator and a fifth electromagnetic actuator proximate third and fourth corners of each of the three sides of the first device, the fourth and fifth electromagnetic actuators each configured to generate a horizontal force in an opposite second direction between the first device and the second rail. The method may further include connecting a fourth electromagnetic actuator and a fifth electromagnetic actuator to the first device, the fourth and fifth electromagnetic actuators each configured to generate an opposing horizontal force between the first device and a third rail, the third rail being disposed between the first rail and the second rail.The first device may include a robot housing having a robot motor therein and a robot arm connected to the robot motor, the robot arm being disposed outside the robot housing, the robot arm including an end effector configured to support the substrate thereon, the first side being a first side of the robot housing and the second side being a second, opposing side of the robot housing. The method may further include providing a first sensor on the first electromagnetic actuator, a second sensor on the second electromagnetic actuator, and a third sensor on the third electromagnetic actuator, the sensors configured to measure a position of the first device relative to the first and second rails.

[0142] In one example, a method is provided, the method including controlling a first electromagnetic actuator of a magnetic system to vertically position a first corner of a first device above a first rail or guide, controlling a second electromagnetic actuator of the magnetic system to vertically position a different second corner of the first device above the first rail, and controlling a third electromagnetic actuator of the magnetic system to vertically position the first device above a second rail. The first electromagnetic actuator is part of a first transport mechanism configured to magnetically position the first device vertically above the first rail and the second rail or guide with a gap between the first device and the rails, the first transport mechanism configured to support the first device for movement along a horizontal path, the first corners being on three sides of the first device, and the first device configured to support a substrate thereon. The second corners being on three sides of the first device, and the first and second corners being on a first side of the first device. The third electromagnetic actuator is disposed on an opposing second side of the first device, and the third electromagnetic actuator is not disposed near a corner of three sides of the first device.

[0143] According to an exemplary embodiment, an apparatus is provided, the apparatus comprising at least one processor and at least one non-transitory memory containing computer program code configured by the at least one processor to cause the apparatus to control a first electromagnetic actuator to vertically position a first corner of a first device above a first rail or guide, control a second electromagnetic actuator of the magnetic system to vertically position a different second corner of the first device above the first rail, and control a third electromagnetic actuator of the magnetic system to vertically position the first device above a second rail. The first electromagnetic actuator is part of a magnetic system of a first transport mechanism configured to magnetically position the first device vertically above the first rail and the second rail or guide with a gap between the first device and the rails, the first transport mechanism being configured to support the first device for movement along a horizontal path, the first corners being adjacent to three sides of the first device and the first device being configured to support a substrate thereon, the second corners being on three sides of the first device, and the first and second corners being on a first side of the first device, the third electromagnetic actuator being located on an opposing second side of the first device, and the third electromagnetic actuator not being located at a corner on the three sides of the first device.

[0144] According to an exemplary embodiment, an apparatus is provided, comprising: means for controlling a first electromagnetic actuator to vertically position a first corner of a first device above a first rail or guide; means for controlling a second electromagnetic actuator of the magnetic system to vertically position a different second corner of the first device above the first rail; and means for controlling a third electromagnetic actuator of the magnetic system to vertically position the first device above a second rail. The first electromagnetic actuator is part of a magnetic system of a first transport mechanism configured to magnetically position the first device vertically above the first rail and the second rail or guide with a gap between the first device and the rails. The first transport mechanism is configured to support the first device for movement along a horizontal path, with the first corner adjacent three sides of the first device and the first device configured to support a substrate thereon. The second corner is on three sides of the first device, and the first and second corners are on a first side of the first device. The third electromagnetic actuator is disposed on an opposing second side of the first device, and the third electromagnetic actuator is not disposed at a corner of three sides of the first device.

[0145] According to an exemplary embodiment, a machine-readable non-transitory program storage device may be provided, tangibly embodying a program of instructions executable by the machine to perform operations including controlling a first electromagnetic actuator to vertically position a first corner of a first device above a first rail or guide, controlling a second electromagnetic actuator of the magnetic system to vertically position a different second corner of the first device above the first rail, and controlling a third electromagnetic actuator of the magnetic system to vertically position the first device above a second rail, the first electromagnetic actuator being part of a magnetic system of a first transport mechanism configured to magnetically position the first device vertically above the first rail and the second rail or guide with a gap between the first device and the rails, the first transport mechanism configured to support the first device for movement along a horizontal path, the first corners adjacent three sides of the first device, and the first device configured to support a substrate thereon. The second corners are on three sides of the first device, the first and second corners are on a first side of the first device, the third electromagnetic actuator is disposed on an opposing second side of the first device, and the third electromagnetic actuator is not disposed at a corner on the three sides of the first device.

[0146] Linear Vacuum Robot Control System Architecture

[0147] A block diagram of an exemplary embodiment of a linear robot control system is shown in FIG.

[0148] The master controller may perform functions such as a user interface, communication with a host controller (e.g., utilizing serial or Ethernet communications), configuration data management, high-level motion planning (i.e., sequencing of robot movements), trajectory generation (calculating the motion profile of each movement for each axis of motion), position control for all axes of motion, and an Adaptive Placement System (APS). An example of an adaptive placement system is described in U.S. Patent No. 10,058,996, which is incorporated herein by reference in its entirety.

[0149] The master controller may receive various commands from the host controller, including configuration, request, and action commands (e.g., commands to perform pick or place operations), and may report command completion and other information back to the host controller.

[0150] The master controller may receive, via a high-speed network, the positions of all motion axes (periodically from the motor amplifiers), the status of digital and analog inputs (from the I / O modules and, if applicable, from the motor amplifiers), and the timing of digital input changes (from the I / O modules and, if applicable, from the motor amplifiers). The master controller may also send, via the high-speed network, information for setting command currents (periodically to the motor amplifiers) and digital and analog outputs (to the I / O modules and, if applicable, to the motor amplifiers) for each motion axis. Whether a rail-based linear system or a magnetically levitated linear system, the control system may involve the use of optical or other wireless communication links. For example, as shown in FIGS. 32 and 36, a system may include two optical communication modules with viewports on the vacuum chamber wall and the robot drive wall. Thus, an optical communication link may be provided between the external controller and the robot drive (which may include closed-loop control, as described above).

[0151] The I / O modules may read digital and analog inputs (which may include inputs from APS sensors) and may set digital and analog outputs. The I / O modules may read information to set digital and analog outputs (from the master controller) over a high-speed network, and may transmit the status of the digital and analog inputs (to the master controller) and the timing of digital input changes (further back to the master controller) over a high-speed network.

[0152] Each motor amplifier may perform functions such as running motor commutation algorithm(s), running current control loops, reading digital and analog inputs, and setting digital and analog outputs. Each motor amplifier may periodically read measured position(s) from position encoder(s) and set output voltages for control of motor(s). Each motor amplifier may (periodically) receive information for setting command current(s) and digital and analog outputs for supported motion axis(es) from the master controller over the high-speed network. Each motor amplifier may (periodically) transmit the measured position of supported motion axis(es), the status of digital and analog inputs, and the timing of digital input changes, if applicable, to the master controller over the high-speed network.

[0153] A high-speed network (e.g., EtherCAT) may facilitate communication between the master controller and the I / O modules and motor amplifiers. Outbound traffic (i.e., traffic from the master controller to the I / O modules and motor amplifiers) may include command currents (sent periodically from the master controller to the motor amplifiers) and information for setting digital and analog outputs (sent from the master controller to the I / O modules and, if applicable, to the motor amplifiers) for each motion axis. Inbound traffic (i.e., traffic from the I / O modules and motor amplifiers to the master controller) may include measured position (from the motor amplifiers), the status of digital and analog inputs (from the I / O modules and, if applicable, from the motor amplifiers), and the timing of digital input changes (from the I / O modules and, if applicable, from the motor amplifiers).

[0154] If APS (Adaptive Positioning System) functionality is required, the APS sensor(s) may be routed to one or more inputs of the I / O module, either directly or via an I / O connection board, the purpose of any I / O connection board being to reduce the number of inputs routed to the I / O module.

[0155] A block diagram of another exemplary embodiment of a linear robot control system is shown in Figure 33. In this exemplary embodiment, the master controller may be located within the robot drive, as opposed to being part of an external controller.

[0156] In the exemplary embodiment of FIG. 33, the master controller may communicate with the motor amplifiers via a high-speed network, substantially similar to the previously described embodiment. However, other means of communication may be used for communication between the master controller and the I / O modules. By way of example, a separate communication network (e.g., Ethernet) may be used. As shown diagrammatically in FIG. 33, the same communication network may also be utilized for communication with the host controller, in which case a network router may be conveniently incorporated into the external controller board. Alternatively, separate communication means may be used for communication between the host controller and the master controller, and for communication between the master controller and the I / O modules. These two communication channels may be implemented over the same physical medium (e.g., serial communication over Ethernet) or may use different physical media.

[0157] Communication between the master controller and the I / O module may enable synchronization of clocks running on the two devices, or may feature another mechanism for properly timing digital input changes on the I / O module for APS calculation purposes (e.g., the offset between the two clocks may be periodically determined and applied as digital input changes occur).

[0158] In yet another exemplary embodiment, high-speed communication via bidirectional optical beams may be routed through a power coupling. The power coupling may use the same set of coils for power transmission or an additional set of coils for data transmission. An exemplary embodiment equivalent to FIG. 32 is shown diagrammatically in FIG. 34, and an exemplary embodiment equivalent to FIG. 33 is shown diagrammatically in FIG. 35.

[0159] Block diagrams of additional exemplary embodiments of a linear robot control system with control of a magnetic support system (magnetic levitation) are shown in FIGS.

[0160] The magnetic levitation controller may perform position control of the robot drive (e.g., five degrees of freedom associated with the lateral position, vertical position, pitch angle, roll angle, and yaw angle of the robot drive) and operate current control loops for each actuator of the magnetic support system. In this process, the magnetic levitation controller may periodically read position measurements from the magnetic support system's position sensors (e.g., two horizontal sensors and three vertical sensors) and set output voltages for the magnetic support system's force actuators (e.g., two pairs of horizontal actuators and three pairs of vertical actuators). The magnetic levitation controller may receive various commands from the master controller over a high-speed network, including commands for liftoff, commands to maintain a given position (which may be conveniently represented as a gap between the robot drive and the magnetic support system guides), and commands to land the robot drive. Alternatively, the magnetic levitation controller may receive a stream of commanded positions (e.g., in the form of periodically transmitted data frames) from the master controller.

[0161] As another alternative, a master controller may perform position control of the robot drive via the magnetic support system. In this process, the master controller may periodically receive position measurements from sensors in the magnetic support system from the magnetic levitation controller via a high-speed network, and may periodically send command currents for each force actuator in the magnetic support system to the magnetic levitation controller via a high-speed network. In this arrangement, the magnetic levitation controller may still operate a current control loop for each actuator in the magnetic support system.

[0162] In the exemplary embodiments of Figures 37 and 39, an existing high-speed communication network is utilized to facilitate communication between the master controller and the magnetic levitation controllers. However, any other suitable means of communication, such as a separate network or point-to-point bus between the two devices, may be utilized. Additionally, although Figures 36-39 show a single magnetic levitation controller, any suitable number of magnetic levitation controllers may be utilized, each assigned to a subset of the position sensors and force actuators of the magnetic support system.

[0163] To support a modular design of the vacuum chamber (i.e., a multi-section vacuum chamber), additional encoder readheads on the linear actuation system and / or additional position sensors on the magnetic support system may be utilized to enable smooth transitions between the individual sections of the vacuum chamber. This is shown diagrammatically in Figures 40 and 41, which build on the exemplary embodiments of Figures 32 and 36, respectively.

[0164] All of the above-described embodiments may include additional features that are omitted from the drawings for simplicity. For example, an external controller may include support for a teach pendant, e-stops, interlocks, safety circuitry (including solid-state components and electromechanical contactor(s)), and energy storage (e.g., batteries and / or capacitors). Similarly, an on-board controller may feature safety circuitry (including solid-state components and electromechanical contactor(s), a back-EMF regeneration system, and power storage (e.g., batteries and / or capacitors).

[0165] Although three axes of rotational motion (T1, T2, and T3) are shown in the exemplary embodiments described above with respect to Figures 32-39, any number of axes of rotation, or no axes, may be used. Similarly, although one z-axis is shown in the exemplary embodiments described above with respect to Figures 32-39, any number of z-axes, or no z-axes, may be used. Although Figures 36-39 show control of a magnetic support system (magnetic levitation) with three horizontal sensor-actuator configurations and three vertical sensor-actuator configurations, any suitable number of individual or integrated sensors and actuators may be used.

[0166] It will be understood that the above description is merely illustrative. Various alternatives and modifications may be devised by those skilled in the art. For example, the features recited in the respective dependent claims may be combined with each other in any suitable combination(s). Furthermore, features of different embodiments described above may be selectively combined to form new embodiments. Accordingly, the above description is intended to cover all such alternatives, modifications, and variations that fall within the scope of the appended claims.

Claims

1. a first device configured to support a substrate thereon; a first transport mechanism to which the first device is connected; a wireless communication device configured to communicate with an external controller; An apparatus comprising: the first transport mechanism is configured to support the first device for movement along a horizontal path; The first transport mechanism includes: at least two guides including a first guide and a second guide; a magnetic system configured to position said first device vertically above said at least two guides with a gap between said first device and said at least two guides; a linear actuator configured to move the first device along the path along the at least two guides; Equipped with The magnetic system comprises: a first electromagnetic actuator at a first corner on a first side of the first device; a second electromagnetic actuator at a second corner of the first side of the first device; a third electromagnetic actuator on an opposing second side of the first device, the third electromagnetic actuator not being located adjacent to a corner of the three sides of the first device; Equipped with the wireless communication device comprises an optical communication link configured to communicate with a master controller within the controller to control the magnetic system; Device.

2. The apparatus of claim 1 , wherein the first, second, and third electromagnetic actuators are all actuators that space the first device vertically above the at least two guides.

3. 3. The apparatus of claim 1 or 2, wherein the first and second electromagnetic actuators are configured to generate opposing horizontal forces between the first device and the first guide, respectively.

4. The apparatus of claim 3 , wherein the third electromagnetic actuator is not configured to generate a horizontal force between the first device and the second guide.

5. the first and second electromagnetic actuators are each configured to generate a horizontal force in a first direction between the first device and the first guide; the apparatus further comprising a fourth electromagnetic actuator and a fifth electromagnetic actuator proximate third and fourth corners on three sides of the first device, respectively; The apparatus of claim 1 , wherein the fourth and fifth electromagnetic actuators are each configured to generate a horizontal force in an opposing second direction between the first device and the second guide.

6. a fourth electromagnetic actuator disposed proximate the first side of the first device, and fourth and fifth electromagnetic actuators proximate third and fourth corners of three sides of the first device, respectively, configured to generate a horizontal force in a first direction between the first device and the first guide; The apparatus of claim 1 , wherein the fourth and fifth electromagnetic actuators are each configured to generate a horizontal force in an opposing second direction between the first device and the second guide.

7. the at least two guides include a third guide between the first guide and the second guide; the apparatus further includes a fourth electromagnetic actuator and a fifth electromagnetic actuator in the third guide; The apparatus of claim 1 , wherein the fourth and fifth electromagnetic actuators are configured to generate opposing horizontal forces between the first device and the third guide, respectively.

8. the first device comprises a robot housing having a robot motor therein and a robot arm connected to the robot motor; the robot arm is disposed outside the robot housing; the robot arm includes an end effector configured to support the substrate thereon; The apparatus of claim 1 , wherein the first side is a first side of the robot housing and the second side is a second, opposing side of the robot housing.

9. further comprising a first sensor for the first electromagnetic actuator, a second sensor for the second electromagnetic actuator, and a third sensor for the third electromagnetic actuator; The apparatus of claim 1 , wherein the first to third sensors are configured to measure the position of the first device relative to the first and second guides.

10. 10. The apparatus of claim 1, wherein the wireless communication device is configured to periodically transmit to the controller the positions of all motion axes from the motor amplifiers of the apparatus, and to transmit to the controller the status of digital and analog inputs from the input / output modules of the apparatus and the timing of digital input changes from the input / output modules.

11. 11. The apparatus of claim 10, wherein the wireless communication device is configured to transmit to the controller the status of digital and analog inputs from the motor amplifier and / or the timing of digital input changes from the motor amplifier.

12. 12. The apparatus of claim 1, wherein the wireless communication device is configured to receive from the controller command currents for each axis of motion to motor amplifiers and information for setting digital and analog outputs to input / output modules.

13. The apparatus of claim 12 , wherein the wireless communication device is configured to receive information from the controller for configuring digital and analog outputs to the motor amplifier.

14. connecting a first electromagnetic actuator proximate a first corner of a first side of the first device; connecting a second electromagnetic actuator adjacent a second corner of the first side of the first device; connecting a third electromagnetic actuator adjacent to an opposing second side of the first device; placing the first device over at least two guides; A method comprising: the first corners are on three sides of the first device, the first device being configured to support a substrate thereon, the first electromagnetic actuator being part of a magnetic system of a first transport mechanism to which the first device is connected, the first transport mechanism being configured to support the first device for movement along a horizontal path; the second electromagnetic actuator is part of the magnetic system, and the second corners are on three sides of the first device; the third electromagnetic actuator is part of the magnetic system, and the third electromagnetic actuator is not disposed adjacent to a corner on three sides of the first device; the first and second electromagnetic actuators are disposed adjacent to a first guide of the at least two guides, and the third electromagnetic actuator is disposed adjacent to a second guide of the at least two guides that is different from the first guide; the method further includes transmitting information of the motor amplifier of the first transport mechanism to an external controller using a wireless communication device that communicates with the controller, the wireless communication device having an optical communication link that communicates with a master controller within the controller to control at least one of the first to third electromagnetic actuators. method.

15. 15. The method of claim 14, wherein the wireless communication device periodically transmits to the controller the positions of all motion axes from the motor amplifiers of the device, and transmits to the controller the status of digital and analog inputs from the input / output modules of the device and the timing of digital input changes from the input / output modules.

16. The method of claim 15 , wherein the wireless communication device transmits to the controller the status of digital and analog inputs from the motor amplifier and / or the timing of digital input changes from the motor amplifier.

17. 15. The method of claim 14, wherein the wireless communication device receives from the controller command currents for each axis of motion to motor amplifiers and information for setting digital and analog outputs to input / output modules.

18. The method of claim 17 , wherein the wireless communication device receives information from the controller to configure digital and analog outputs to the motor amplifier.

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