Magnetic sensor and method of manufacturing magnetic sensor

JP2025174866APending Publication Date: 2025-11-28TDK CORP
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Patent Information

Application Number
JP2025061179
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-05-15
Filing Date
2025-04-02
Publication Date
2025-11-28

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Abstract

To suppress the occurrence of problems due to the shape of a side face of a magnetoresistance effect element arranged on an inclined surface.SOLUTION: A magnetic sensor 1 comprises a substrate 301, a support member 310 having an inclined surface 310e, and an MR element 50 arranged on the inclined surface 310e. The MR element 50 has a bottom surface 50a, a top surface 50b, and a first side surface 50c and a second side surface 50d. The first side surface 50c is, as compared to the second side surface 50d, located in front in a first direction D1 that is along the inclined surface 310e and that gets close to the top surface 301a of the substrate 301. At least a part of the first side surface 50c is, as compared to a first virtual plane PL1, located close to the second side surface 50d, and the first virtual plane PL1 intersects with a first corner Ed1 present at a position where the top surface 50b and the first side surface 50c intersect and is perpendicular to the top surface 301a of the substrate 301.SELECTED DRAWING: Figure 13
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Citation Information

Patent Citations

  • Magnetic sensor and manufacturing method therefor

    US20080316654A1

  • Magnetic sensor and its manufacturing method

    US20210302511A1