Inspection device

Abstract

To provide an inspection device capable of adjusting a focus of a camera according to a height of a surface of a workpiece.SOLUTION: An inspection device 100 comprises: a conveyance mechanism 3 that intermittently conveys a line sensor 2 from an X1 direction of a conveyance path S to a Y-axis direction at a predetermined pitch; a detection section 4 that is disposed in a Z1 direction of the conveyance path S and detects a height of an imaging surface of the line sensor 2; a first inspection camera 5 that is disposed in an X2 direction from the detection section 4 and photographs the imaging surface of the line sensor 2 and acquires a bright field image; a first drive mechanism 6 that moves the first inspection camera 5 in a Z-axis direction; a second inspection camera 7 that is disposed in the X2 direction from the first inspection camera 5 and photographs the imaging surface of the line sensor 2 and acquires a dark field image; a second drive mechanism 8 that moves the second inspection camera 7 in the Z-axis direction; and a control section 9 that adjusts a focus of the first inspection camera 5 by driving the first drive mechanism 6, and adjusts a focus of the second inspection camera 7 by driving the second drive mechanism 8.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to an inspection device. [Background technology]

[0002] An inspection device used for visual inspection of defects, scratches, etc. on the surface of an object to be inspected is described in Patent Document 1. The inspection device in Patent Document 1 includes a transport means for transporting the object to be inspected, and a camera for capturing an inspection image by capturing an image of the surface of the transported object to be inspected. Based on the inspection image, the inspection device determines whether there are defects, scratches, etc. on the surface of the object to be inspected. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 11-264803 Summary of the Invention [Problem to be solved by the invention]

[0004] The inspection images used in the inspection device of Patent Document 1 include bright-field images and dark-field images. Since the information obtained from these inspection images differs, depending on the content of the appearance inspection of the object to be inspected, the inspection device may use multiple types of inspection images to determine whether there are defects or scratches on the surface of the object to be inspected. For example, when bright-field images and dark-field images are used as inspection images, two cameras for capturing the respective inspection images are arranged along the conveyance direction.

[0005] The object to be inspected may be elongated. When the inspection device inspects an elongated object, the object is placed on the conveying means so that its longitudinal direction is the conveying direction, and two cameras capture images of the surface of the object while it is being conveyed. The inspection device performs a visual inspection of the surface based on the inspection images captured by the two cameras.

[0006] Here, an example of an object to be inspected having a long and narrow shape is a line sensor. A line sensor has multiple imaging elements arranged in the longitudinal direction. The imaging surfaces of these imaging elements are visually inspected by an inspection device. The heights of the multiple imaging surfaces in a line sensor vary by approximately 0.1 to 0.3 mm. Meanwhile, the depth of field of a camera used in an inspection device is approximately 20 to 50 μm. Therefore, if the surface height of the object to be inspected varies greatly compared to the depth of field of the camera used, an inspection device using two cameras has the problem of difficulty in simultaneously adjusting the focus of the two cameras while transporting the object to be inspected.

[0007] In view of the above problems, the object of the present invention is to provide an inspection device that can adjust the focus of each camera according to the height of the workpiece surface, even when the surface of a workpiece that is long in the conveying direction is imaged using multiple cameras arranged along the conveying direction. [Means for solving the problem]

[0008] In order to solve the above problem, there is provided a conveying mechanism that intermittently conveys a workpiece that is long in a conveying direction along a conveying path from the upstream side to the downstream side of the conveying path at a predetermined pitch; a detection unit that is arranged above the conveying path and detects the height of the inspection surface of the workpiece; a first inspection camera that is arranged downstream of the detection unit and photographs the inspection surface of the workpiece to obtain a first inspection image; a first drive mechanism that moves the first inspection camera in a vertical direction perpendicular to the conveying direction; and a drive mechanism that is arranged downstream of the first inspection camera and photographs the inspection surface of the workpiece to obtain the first inspection image. a second inspection camera that acquires a second inspection image different from the first inspection image; a second drive mechanism that moves the second inspection camera in the up and down direction; and a control unit that drives the first drive mechanism to adjust the focus of the first inspection camera and drives the second drive mechanism to adjust the focus of the second inspection camera based on height information of the inspection surface at the inspection position of the workpiece for each predetermined pitch detected by the detection unit. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a perspective view of the appearance of an inspection device according to an embodiment. [Figure 2] FIG. 2 is a perspective view of the appearance of the line sensor. [Figure 3] FIG. 3 is a perspective view of the exterior of the transport mechanism. [Figure 4] FIG. 4 is a cross-sectional view of the inspection device as seen from the direction AA in FIG. [Figure 5] FIG. 5 is a block diagram of the inspection device. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The following description will focus on the case where the workpiece is a line sensor 2. FIG. 1 is an external perspective view of the inspection device of the embodiment. FIG. 2 is an external perspective view of the line sensor. FIG. 3 is an external perspective view of the transport mechanism. FIG. 4 is a cross-sectional view of the inspection device as seen from the direction AA in FIG. 1. FIG. 5 is a block diagram of the inspection device.

[0011] The inspection device 100 of this embodiment shown in FIG. 1 is incorporated into a manufacturing line for a line sensor 2, which is a workpiece, and used. The inspection device 100 performs a visual inspection to determine whether there are any defects, such as cracks, on the imaging surface (inspection surface) of the line sensor 2. For convenience, in the following description, three mutually perpendicular axes are referred to as the X-axis, Y-axis, and Z-axis. The Z-axis direction is the vertical direction. In the Z-axis direction, the Z1 direction is the upward direction, and the Z2 direction is the downward direction. The X-axis direction is the conveying direction along the conveying path S of the inspection device 100. In the X-axis direction, the X1 direction is the upstream side of the conveying path S, and the X2 direction is the downstream side of the conveying path S. The Y-axis direction is the left-right direction of the inspection device 100.

[0012] As shown in FIG. 2, the line sensor 2 has an elongated shape in the X-axis direction. The line sensor 2 includes a substrate 21 that is elongated in the X-axis direction, multiple imaging elements 22 arranged on the substrate 21, and a case 25 that holds the substrate 21. The imaging elements 22 face in the Z1 direction. The imaging elements 22 include a first imaging element 23 and a second imaging element 24 arranged in the Y1 direction from the first imaging element 23. The first imaging elements 23 and the second imaging elements 24 are arranged alternately in the X-axis direction. The heights of the first imaging surface 231 of the first imaging element 23 and the second imaging surface 241 of the second imaging element 24 vary by approximately 0.1 to 0.3 mm. The size of the first imaging element 23 and the second imaging element 24 is, for example, 19 mm in the X-axis direction and 0.4 mm in the Y-axis direction. The inspection device 100 performs a visual inspection of the first imaging surface 231 of the first imaging element 23 as the first inspection surface, and performs a visual inspection of the second imaging surface 241 of the second imaging element 24 as the second inspection surface.

[0013] As shown in FIG. 1, the inspection device 100 includes a first inspection unit 100A, a second inspection unit 100B, and a third inspection unit 100C. The first inspection unit 100A, the second inspection unit 100B, and the third inspection unit 100C are arranged in the Y-axis direction, and each can independently inspect a line sensor 2. In other words, the inspection device 100 can simultaneously inspect three line sensors 2. The first inspection unit 100A, the second inspection unit 100B, and the third inspection unit 100C each include a conveying mechanism 3, a detecting unit 4, a first inspection camera 5, a first driving mechanism 6, a second inspection camera 7, a second driving mechanism 8, and a control unit 9.

[0014] The transport mechanism 3 intermittently transports the line sensor 2 from the upstream side to the downstream side of the transport path S at a predetermined pitch. Here, intermittent transport refers to transport that repeatedly starts and stops at predetermined time intervals. As shown in FIGS. 3 and 4 , the transport mechanism 3 includes a mounting unit 31 on which the line sensor 2 is placed and a drive mechanism 32 that moves the mounting unit 31 back and forth in the X-axis direction. The mounting unit 31 includes a stage 311 on which the line sensor 2 is placed and a chuck mechanism 312 that holds both ends of the line sensor 2 placed on the stage 311. The chuck mechanism 312 is formed of a cylinder mechanism or the like, and holds both ends of the line sensor 2 when the line sensor 2 is placed on the stage 311 by a robot mechanism or the like, and releases the hold on both ends of the line sensor 2 when inspection of the line sensor 2 is completed. The drive mechanism 32 includes a stage 321 to which the mounting unit 31 is fixed and a drive unit 322 that moves the stage 321 back and forth in the X-axis direction. The driving unit 322 is composed of an electric cylinder, etc. The driving unit 322 intermittently transports the placement unit 31 at a predetermined pitch.

[0015] As shown in FIGS. 1 and 4 , the detection unit 4 is disposed in the Z1 direction of the conveying path S and detects the heights of the first and second imaging surfaces 231 and 241 of the line sensor 2. The detection unit 4 is an optical displacement sensor. In this embodiment, the detection unit 4 is a coaxial confocal displacement sensor using a white LED. The detection unit 4 may also be a reflective displacement sensor using laser light. The detection unit 4 includes a first detection unit 41 that detects the height of the first imaging surface 231 of the line sensor 2 and a second detection unit 42 that detects the height of the second imaging surface 241 of the line sensor 2. The second detection unit 42 is disposed in the X2 direction from the first detection unit 41. As shown in FIG. 4 , the first and second detection units 41 and 42 are fixed to the frame 11 via a position adjustment unit 14. The position adjustment unit 14 is capable of adjusting the positions of the first and second detection units 41 and 42 in the X-axis direction. That is, the position adjustment unit 14 can change the distance between the first detection unit 41 and the second detection unit 42. The position adjustment unit 14 can also change the distance between the detection unit 4 and the first inspection camera 5, and the distance between the detection unit 4 and the second inspection camera 7.

[0016] As shown in FIGS. 1 and 4, first inspection camera 5 is disposed in the X2 direction from detection unit 4 and captures first imaging plane 231 and second imaging plane 241 of line sensor 2 to acquire a first inspection image. The depth of field of first inspection camera 5 is small, for example, approximately 20 to 50 μm. As shown in FIG. 4, first inspection camera 5 is fixed to frame 11 via first drive mechanism 6. First inspection camera 5 acquires a bright-field image as the first inspection image. First inspection camera 5 includes a bright-field illumination unit 51 for acquiring the bright-field image. Bright-field illumination unit 51 is disposed inside first inspection camera 5. Bright-field illumination unit 51 illuminates first imaging plane 231 and second imaging plane 241 of line sensor 2 from inside first inspection camera 5.

[0017] 1 and 4, the first driving mechanism 6 moves the first inspection camera 5 in the Z-axis direction. As shown in FIG. 4, the first driving mechanism 6 is fixed to a frame 11. The first driving mechanism 6 includes a stage 61 to which the first inspection camera 5 is fixed, and a driving unit 62 that moves the stage 61 in the Z-axis direction. The driving unit 62 is formed by an electric cylinder or the like.

[0018] As shown in FIGS. 1 and 4, the second inspection camera 7 is disposed in the X2 direction from the first inspection camera 5. The second inspection camera 7 photographs the first imaging plane 231 and the second imaging plane 241 of the line sensor 2 to acquire a second inspection image different from the first inspection image. The depth of field of the second inspection camera 7 is small, for example, about 20 to 50 μm. As shown in FIG. 4, the second inspection camera 7 is fixed to the frame 11 via the second drive mechanism 8. The second inspection camera 7 acquires a dark-field image as the second inspection image. The second inspection camera 7 is equipped with a dark-field illuminator 71 for acquiring the dark-field image. The dark-field illuminator 71 is disposed in the Z2 direction from the second inspection camera 7. The dark-field illuminator 71 illuminates the first imaging plane 231 and the second imaging plane 241 of the line sensor 2 from an obliquely upward direction. Illuminate 241.

[0019] The field of view of the first inspection camera 5 and the second inspection camera 7 is the same size on the first imaging surface 231 and the second imaging surface 241 of the line sensor 2. In this embodiment, the field of view is, for example, 9.5 mm in the X-axis direction and 8.5 mm in the Y-axis direction.

[0020] Here, the predetermined pitch is 75% to 98% of the length of the field of view in the X-axis direction. More preferably, the predetermined pitch is 85% to 95% of the length of the field of view in the X-axis direction. In this embodiment, the predetermined pitch is 8.5 mm, which is approximately 90% of the length of the field of view in the X-axis direction. Furthermore, the distance between the first detector 41 and the second detector 42 in the X-axis direction is an integer multiple of the predetermined pitch. In this embodiment, the distance L1 between the first detector 41 and the second detector 42 in the X-axis direction shown in FIG. 4 is 25.65 mm. The distance between the detector 4 and the first inspection camera 5 in the X-axis direction is an integer multiple of the predetermined pitch. In this embodiment, the distance L1 + L2 between the first detector 41 and the first inspection camera 5 in the X-axis direction shown in FIG. 4 is 51.30 mm. The distance L2 between the second detector 42 and the first inspection camera 5 in the X-axis direction shown in FIG. 4 is 25.65 mm. The distance between the detection unit 4 and the second inspection camera 7 in the X-axis direction is an integer multiple of a predetermined pitch. In this embodiment, the distance L1+L2+L3 between the first detection unit 41 and the second inspection camera 7 in the X-axis direction shown in Fig. 4 is 247.95 mm. The distance L2+L3 between the second detection unit 42 and the second inspection camera 7 in the X-axis direction shown in Fig. 4 is 222.30 mm.

[0021] As shown in FIGS. 1 and 4, the second drive mechanism 8 moves the second inspection camera 7 in the Z-axis direction. As shown in FIG. 4, the second drive mechanism 8 is fixed to the frame 11 via a position adjustment unit 15. The position adjustment unit 15 is capable of adjusting the position of the second drive mechanism 8 in the X-axis direction. In other words, the position adjustment unit 15 is capable of changing the distance between the first inspection camera 5 and the second inspection camera 7. The second drive mechanism 8 includes a stage 81 to which the second inspection camera 7 is fixed, and a drive unit 82 that moves the stage 81 in the Z-axis direction. The drive unit 82 is formed of an electric cylinder or the like.

[0022] 5, the control unit 9 includes a drive control unit 91 and a determination control unit 92. The drive control unit 91 controls the transport mechanism 3, the first inspection camera 5, the first drive mechanism 6, the second inspection camera 7, and the second drive mechanism 8. The determination control unit 92 determines whether or not there is a defect such as a crack on the imaging surface of the line sensor 2, based on the bright-field image acquired by the first inspection camera 5 and the dark-field image acquired by the second inspection camera 7.

[0023] Specifically, the drive control unit 91 controls the transport mechanism 3 to intermittently transport the line sensor 2 from the X1 direction to the X2 direction at a predetermined pitch. The first detection unit 41 detects the height of the first imaging surface 231 at the inspection position of the line sensor 2 transported below the first detection unit 41 at the timing when the line sensor 2 stops at each predetermined pitch. The second detection unit 42 detects the height of the second imaging surface 241 at the inspection position of the line sensor 2 transported below the second detection unit 42 at the timing when the line sensor 2 stops at each predetermined pitch.

[0024] At the timing when the line sensor 2 is transported below the first inspection camera 5 or at the timing immediately before it is transported, the drive control unit 91 drives the first drive mechanism 6 to adjust the focus of the first inspection camera 5 at predetermined intervals based on height information of the first imaging plane 231 and the second imaging plane 241 at the inspection position of the line sensor 2 detected by the first detection unit 41 and the second detection unit 42. Once the focus of the first inspection camera 5 has been adjusted, the drive control unit 91 drives the first inspection camera 5 at predetermined intervals while the line sensor 2 is stopped to acquire a bright field image. In other words, before driving the first inspection camera 5, the drive control unit 91 performs feedback control based on height information of the imaging plane of the line sensor 2 detected by the detection unit 4. The focus of the first inspection camera 5 is adjusted.

[0025] When the line sensor 2 is transported below the second inspection camera 7, or immediately before it is transported, the drive control unit 91 drives the second drive mechanism 8 to adjust the focus of the second inspection camera 7 at a predetermined pitch based on height information of the first imaging plane 231 and the second imaging plane 241 at the inspection position of the line sensor 2 detected by the first detection unit 41 and the second detection unit 42. Once the focus of the second inspection camera 7 has been adjusted, the drive control unit 91 drives the second inspection camera 7 at a predetermined pitch while the line sensor 2 is stopped to acquire a dark-field image. In other words, before driving the second inspection camera 7, the drive control unit 91 adjusts the focus of the second inspection camera 7 by performing feedback control based on height information of the imaging plane of the line sensor 2 detected by the detection unit 4.

[0026] Here, the distance between the detection unit 4 and the first inspection camera 5 in the X-axis direction is an integer multiple of the predetermined pitch, and the distance between the detection unit 4 and the second inspection camera 7 in the X-axis direction is an integer multiple of the predetermined pitch. Therefore, the detected portions of the first imaging surface 231 and the second imaging surface 241 of the line sensor 2 detected by the first detection unit 41 and the second detection unit 42 are located directly below the first inspection camera 5 and the second inspection camera 7 when the line sensor 2 is transported at the predetermined pitch.

[0027] When all of the line sensors 2 have passed under the second inspection camera 7, the judgment control unit 92 judges whether there are any defects such as cracks on the imaging surface of the line sensors 2 based on all of the bright field images acquired by the first inspection camera 5 and all of the dark field images acquired by the second inspection camera 7.

[0028] If the line sensor 2 is determined to be defective, for example, the drive control unit 91 controls the transport mechanism 3 to position the line sensor 2 at the end in the X2 direction. Thereafter, the line sensor 2 is removed from the mounting unit 31 by a robot mechanism or the like. On the other hand, if the line sensor 2 is determined to be non-defective, for example, the drive control unit 91 controls the transport mechanism 3 to position the line sensor 2 at the end in the X1 direction. Thereafter, the line sensor 2 is removed from the mounting unit 31 by a robot mechanism or the like.

[0029] (Calibration of inspection equipment) The calibration of the inspection device will now be described. First, the jig workpiece is placed on the placement unit 31. Then, the drive mechanism 32 is driven to move the placement unit 31 to below the first inspection camera 5. While checking the image of the surface of the jig workpiece acquired by the first inspection camera 5, the first drive mechanism 6 is driven to adjust the focus of the first inspection camera 5.

[0030] Next, the drive mechanism 32 is driven to move the placement unit 31 below the second inspection camera 7. While checking the image of the surface of the jig workpiece acquired by the second inspection camera 7, the second drive mechanism 8 is driven to adjust the focus of the second inspection camera 7. Thereafter, the drive mechanism 32 is driven to move the placement unit 31 below the detection unit 4, and the detection unit 4 detects the height of the surface of the jig workpiece.

[0031] Once detection of the surface height of the jig workpiece is completed, the surface height information of the jig workpiece, the Z-axis position information of the first inspection camera 5 when the focus is adjusted, and the Z-axis position information of the second inspection camera 7 when the focus is adjusted are stored as reference values ​​in a memory unit (not shown) of the inspection device 100.

[0032] In addition, in the stage of visual inspection of the line sensor 2, the control unit 9 calculates the first imaging plane 231 and the second imaging plane 232 of the line sensor 2 detected by the detection unit 4 based on the reference value stored in the storage unit. Based on the height information of the image plane 241, the first driving mechanism 6 is driven to adjust the focus of the first inspection camera 5, and the second driving mechanism 8 is driven to adjust the focus of the second inspection camera .

[0033] (Action and effect) The inspection device 100 includes a conveying mechanism 3 that conveys the line sensor 2 intermittently at a predetermined pitch from the X1 direction toward the Y axis direction of the conveying path S; a detection unit 4 that is arranged in the Z1 direction of the conveying path S and detects the height of the imaging surface of the line sensor 2; a first inspection camera 5 that is arranged in the X2 direction from the detection unit 4 and photographs the imaging surface of the line sensor 2 to obtain a bright-field image; a first drive mechanism 6 that moves the first inspection camera 5 in the Z axis direction; a second inspection camera 7 that is arranged in the X2 direction from the first inspection camera 5 and photographs the imaging surface of the line sensor 2 to obtain a dark-field image; a second drive mechanism 8 that moves the second inspection camera 7 in the Z axis direction; and a control unit 9 that drives the first drive mechanism 6 to adjust the focus of the first inspection camera 5 and drives the second drive mechanism 8 to adjust the focus of the second inspection camera 7 based on height information of the imaging surface at the inspection position of the line sensor 2 at each predetermined pitch detected by the detection unit 4.

[0034] According to this embodiment, even when the inspection device 100 acquires inspection images using the first inspection camera 5 and the second inspection camera 7 while transporting the line sensor 2, it can simultaneously adjust the focus of the first inspection camera 5 and the second inspection camera 7 based on height information of the imaging surface at the inspection position of the line sensor 2 at each predetermined pitch, detected by the detection unit 4 arranged upstream of the first inspection camera 5 and the second inspection camera 7. Furthermore, compared to inspection devices that individually adjust the focus of the first inspection camera 5 and the second inspection camera 7 using autofocus, the inspection device 100 of this embodiment can simultaneously adjust the focus of the first inspection camera 5 and the second inspection camera 7, thereby reducing the inspection time for the appearance inspection of the line sensor 2.

[0035] The distance between the detection unit 4 and the first inspection camera 5 in the X-axis direction is an integer multiple of a predetermined pitch. The distance between the detection unit 4 and the second inspection camera 7 in the X-axis direction is an integer multiple of a predetermined pitch. As a result, when the line sensor 2 is transported, the detected portion of the imaging surface of the line sensor 2 detected by the detection unit 4 is located directly below the first inspection camera 5 and the second inspection camera 7, so the inspection device 100 can properly focus the first inspection camera 5 and the second inspection camera 7 based on the height information of the imaging surface of the line sensor 2 detected by the detection unit 4.

[0036] The imaging surface of line sensor 2 includes a first imaging surface 231 and a second imaging surface 241 arranged in the Y-axis direction relative to first imaging surface 231. Detection unit 4 includes a first detection unit 41 that detects the height of first imaging surface 231 of line sensor 2, and a second detection unit 42 that detects the height of second imaging surface 241 of line sensor 2. As a result, even if multiple imaging surfaces that serve as inspection surfaces are arranged in the Y direction, detection unit 4 can detect the heights of first imaging surface 231 and second imaging surface 241, respectively.

[0037] The field of view ranges of the first inspection camera 5 and the second inspection camera 7 on the imaging surface of the line sensor 2 are the same size. The predetermined pitch is 75% to 98% of the length of the field of view range in the X-axis direction. This allows the first inspection camera 5 and the second inspection camera 7 to capture the imaging surface of the transported line sensor 2 with a minimum overlapping area of ​​the captured imaging surfaces. If the predetermined pitch is less than 75% of the length of the field of view range in the X-axis direction, the overlapping area of ​​the captured imaging surfaces will be too large, which will increase the inspection time for the appearance inspection of the line sensor 2. If the predetermined pitch is more than 98% of the length of the field of view range in the X-axis direction, there may be no overlap of the captured imaging surfaces due to errors in the mounting positions of the first inspection camera 5 and the second inspection camera 7 or errors in the predetermined pitch during transport by the transport mechanism 3. In this case, the inspection images captured by the first inspection camera 5 and the second inspection camera 7 will be Since there is a possibility that an area of ​​the imaging surface that could not be imaged will occur in the inspection image, the inspection device 100 will not be able to perform an accurate appearance inspection.

[0038] More preferably, the predetermined pitch is 85% to 95% of the length of the field of view in the X-axis direction, which enables the inspection device 100 to shorten the inspection time for the appearance inspection of the line sensor 2 and to perform the appearance inspection more accurately.

[0039] (Variation) In the inspection device of the modified example, the first inspection camera 5 may acquire a dark-field image as the first inspection image, and the second inspection camera may acquire a bright-field image as the second inspection image.

[0040] In the above embodiment, the inspection device 100 is provided with three inspection units, but the number of inspection units is not limited to three. The number of inspection units may be one, or three or more.

[0041] The present technology can be configured as follows.

[0042] (1) a conveying mechanism that intermittently conveys a workpiece that is long in a conveying direction along a conveying path from an upstream side to a downstream side of the conveying path at a predetermined pitch; a detection unit that is disposed above the conveying path and detects the height of the inspection surface of the workpiece; a first inspection camera that is disposed downstream of the detection unit and captures an image of the inspection surface of the workpiece to obtain a first inspection image; a first drive mechanism that moves the first inspection camera in a vertical direction perpendicular to the conveying direction; a second inspection camera that is disposed downstream of the first inspection camera and captures an image of the inspection surface of the workpiece to obtain a second inspection image different from the first inspection image; a second drive mechanism that moves the second inspection camera in the up and down direction; a control unit that drives the first drive mechanism to adjust the focus of the first inspection camera and drives the second drive mechanism to adjust the focus of the second inspection camera based on height information of the inspection surface at the inspection position of the workpiece at each of the predetermined pitches detected by the detection unit; An inspection device comprising:

[0043] (2) The inspection device according to (1), wherein the distance between the detection unit and the first inspection camera in the conveying direction is an integer multiple of the predetermined pitch.

[0044] (3) The inspection device according to (1) or (2), wherein the distance between the detection unit and the second inspection camera in the conveying direction is an integer multiple of the predetermined pitch.

[0045] (4) the first inspection camera acquires a bright-field image as the first inspection image; The inspection device according to any one of (1) to (3), wherein the second inspection camera acquires a dark-field image as the second inspection image.

[0046] (5) the inspection surface of the workpiece includes a first inspection surface and a second inspection surface disposed in a left-right direction perpendicular to the first inspection surface, the conveying direction, and the up-down direction; The detection unit includes a first detection unit that detects the height of the first inspection surface of the workpiece, and a second detection unit that detects the height of the first inspection surface of the workpiece. The inspection device according to any one of (1) to (4), further comprising a second detection unit that detects the height of the second inspection surface of the workpiece.

[0047] (6) The field of view of the first inspection camera and the second inspection camera on the inspection surface of the workpiece is the same size, The inspection device according to any one of (1) to (5), wherein the predetermined pitch is 75% or more and 98% or less of the length of the field of view in the conveying direction. [Explanation of symbols]

[0048] 100... inspection device, 100A... first inspection unit, 100B... second inspection unit, 100C... third inspection unit, 2... line sensor, 3... conveyance mechanism, 4... detection unit, 5... first inspection camera, 6... first drive mechanism, 7... second inspection camera, 8... second drive mechanism, 9... control unit, 11... frame, 14, 15... position adjustment unit, 21... substrate, 22... image pickup element, 23... first image pickup element, 24... second Image pickup element, 25...case, 31...mounting section, 32...driving mechanism, 41...first detection section, 42...second detection section, 51...bright field illumination section, 61...stage, 62...driving section, 71...dark field illumination, 81...stage, 82...driving section, 91...driving control section, 92...judgment control section, 231...first imaging surface, 241...second imaging surface, 311...stage, 312...chuck mechanism, 321...stage, S...transport path.

Claims

1. a conveying mechanism that intermittently conveys a workpiece that is long in a conveying direction along a conveying path from an upstream side to a downstream side of the conveying path at a predetermined pitch; a detection unit that is disposed above the conveying path and detects the height of the inspection surface of the workpiece; a first inspection camera that is disposed downstream of the detection unit and captures an image of the inspection surface of the workpiece to obtain a first inspection image; a first drive mechanism that moves the first inspection camera in an up-down direction perpendicular to the conveying direction; a second inspection camera that is disposed downstream of the first inspection camera and captures an image of the inspection surface of the workpiece to obtain a second inspection image different from the first inspection image; a second drive mechanism that moves the second inspection camera in the up and down direction; a control unit that drives the first drive mechanism to adjust the focus of the first inspection camera and drives the second drive mechanism to adjust the focus of the second inspection camera based on height information of the inspection surface at the inspection position of the workpiece at each predetermined pitch detected by the detection unit; An inspection device comprising:

2. 2. The inspection device according to claim 1, wherein the distance between the detection unit and the first inspection camera in the conveying direction is an integer multiple of the predetermined pitch.

3. 3. The inspection device according to claim 1, wherein the distance between the detection unit and the second inspection camera in the conveying direction is an integer multiple of the predetermined pitch.

4. the first inspection camera acquires a bright-field image as the first inspection image; 2. The inspection device according to claim 1, wherein the second inspection camera acquires a dark-field image as the second inspection image.

5. the inspection surface of the workpiece includes a first inspection surface and a second inspection surface disposed in a left-right direction perpendicular to the first inspection surface, the conveying direction, and the up-down direction; The inspection device according to claim 1, characterized in that the detection unit comprises a first detection unit that detects the height of the first inspection surface of the workpiece, and a second detection unit that detects the height of the second inspection surface of the workpiece.

6. The field of view of the first inspection camera and the second inspection camera on the inspection surface of the workpiece is the same size, 2. The inspection device according to claim 1, wherein the predetermined pitch is equal to or greater than 75% and equal to or less than 98% of the length of the field of view in the conveying direction.

Images