Transport system

Abstract

To provide a transport system capable of preventing collision between automatic transport devices without making mistakes in timing for each automatic transport device to stop, even when each automatic transport device travels with speed changes including acceleration, deceleration and constant speed, under a condition where a plurality of automatic transport devices travel simultaneously on a travel path within a certain area.SOLUTION: A transport system 2 is provided with a travel panel 10 on which an automatic transport device travels, and control means 20, on the top plate 6 of a processing device 4 including a plurality of processing devices. The control means 20 includes a coordinate memory unit 22 that stores the position coordinates formed on the traveling panel 10, a path memory unit 24 that stores the coordinates of the path along which the automatic transport device moves, and a coordinate reservation unit 26 that reserves the coordinates of several positions ahead for the moving automatic transport device. The coordinates reserved by the coordinate reservation unit 26 are monopolized by the automatic transport device that reserved them first, and the automatic transport device that reserves later can reserve them after waiting for the automatic transport device that reserved earlier to pass, and the automatic transport device that reserves later waits until the automatic transport device that reserved earlier passes the coordinates.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a transport system in which a travel panel on which an automatic transport device travels is arranged on the top plate of a processing device including a plurality of processing devices, and which is also equipped with a control means. [Background technology]

[0002] A wafer has multiple devices such as ICs and LSIs formed on its surface, separated by planned dividing lines. The back side is ground using a grinding machine to form the wafer to the desired thickness, and then the wafer is divided into individual device chips using a cutting machine and laser processing machine. These chips are then used in electrical devices such as mobile phones and personal computers.

[0003] The applicant has also developed and filed a patent application for a transport system in which a travel path is arranged using the top plate of a processing device that includes multiple processing devices such as grinding devices, cutting devices, and laser processing devices, and an automatic transport device travels along the travel path to transport wafers to each processing device or to transport consumables (see Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2020-013892 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in a situation where multiple automatic guided vehicles are traveling simultaneously on a route within a certain area, each automatic guided vehicle travels while changing speeds, including acceleration, deceleration, and constant speed. This can lead to the AGVs misjudging the timing at which they should stop, making it impossible to avoid collisions between the automatic guided vehicles, resulting in accidents.

[0006] The present invention has been made in consideration of the above facts, and its main technical object is to provide a conveying system that can avoid collisions between automatic conveying devices without making mistakes in the timing at which each automatic conveying device should stop, even when multiple automatic conveying devices are traveling simultaneously on a traveling path within a certain area and each automatic conveying device is traveling while undergoing speed changes including acceleration, deceleration, and constant speed. [Means for solving the problem]

[0007] In order to solve the above-mentioned main technical problem, according to the present invention, there is provided a conveying system in which a traveling panel on which an automatic conveying device travels is arranged on the top plate of a processing device including a plurality of processing devices and which is equipped with a control means, the control means comprising a coordinate memory unit which stores position coordinates formed on the traveling panel, a path memory unit which stores the coordinates of the path along which the automatic conveying device moves, and a coordinate reservation unit which allows the moving automatic conveying device to reserve coordinates several positions ahead, the coordinates reserved in the coordinate reservation unit being monopolized by the automatic conveying device which made the reservation earlier, and an automatic conveying device which makes a reservation later becomes available after the automatic conveying device which made the reservation earlier has passed, and the automatic conveying device which makes the reservation later waits until the automatic conveying device which made the reservation earlier has passed the coordinates.

[0008] It is preferable that the coordinate reservation unit accepts reservations for each automatic transport device by prioritizing reservations made in the order of earliest receipt. [Effects of the Invention]

[0009] The conveying system of the present invention has a traveling panel on which an automatic conveying device travels, which is disposed on the top plate of a processing device including a plurality of processing devices, and is also equipped with a control means, wherein the control means comprises a coordinate memory unit which stores position coordinates formed on the traveling panel, a path memory unit which stores the coordinates of the path along which the automatic conveying device moves, and a coordinate reservation unit which allows the moving automatic conveying device to reserve coordinates several positions ahead, and the coordinates reserved in the coordinate reservation unit are monopolized by the automatic conveying device that made the reservation earlier, and a later-reserved automatic conveying device must wait for the earlier-reserved automatic conveying device to pass before it can make a reservation, and the later-reserved automatic conveying device waits until the earlier-reserved automatic conveying device has passed the coordinates.As a result, when the automatic conveying device travels on the traveling guide line on the traveling panel according to the path stored in the path memory unit, even if the automatic conveying device travels at changes including acceleration, deceleration and constant speed, the timing of stopping is managed, thereby preventing collisions between automatic conveying devices and eliminating the problem of accidents. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a schematic diagram of a transport system according to an embodiment of the present invention. [Figure 2] FIG. 2 is a perspective view of an automatic conveyance device of the conveyance system shown in FIG. [Figure 3] FIG. 2 is a conceptual diagram of a control means of the transport system shown in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0011] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a transport system configured based on the present invention will be described in detail with reference to the accompanying drawings.

[0012] 1 shows a conveyance system 2 of this embodiment. The conveyance system 2 shown in the figure has a traveling panel 10 disposed on a top plate 6 of a processing device 4 including a plurality of processing devices, and is equipped with automated conveyance vehicles (hereinafter referred to as "AGVs") I to V that travel on the traveling panel 10, and a control means 20 that controls the travel of each of the AGVs I to V.

[0013] The processing equipment 4 includes, for example, a storage device 4a that manages items and first, second, and third processing devices 4b, 4c, and 4d to which items in the storage device 4a are transported by AGVI to V. Examples of items stored in the storage device 4a include workpieces such as semiconductor wafers that are processed in the first to third processing devices 4b to 4d, and processing tools used when processing in the first to third processing devices 4b to 4d. Examples of processing tools used when processing in any of the first to third processing devices 4b to 4d include cutting blades used when cutting the workpieces, and grinding wheels with grinding stones used when grinding the workpieces to thin them. In the illustrated embodiment, the processing equipment 4 includes one storage device 4a and three processing devices 4b to 4d, but the number and combination of processing equipment 4 can be set as desired.

[0014] A traveling panel 10 is disposed on the top plate 6 of the processing device 4, and the plurality of processing devices 4 are connected to one another by the traveling panel 10. A transfer opening 10a is formed on the traveling panel 10 to transfer articles between the AGVI to V and the processing device 4. Although not shown, a transfer opening corresponding in position and size to the transfer opening 10a is also formed on the top plate 6 of the processing device 4. Workpieces and processing tools are transferred between the AGVI to V and the processing device 4 through the transfer opening 10a on the traveling panel 10 and the transfer opening formed on the top plate 6 of the processing device 4.

[0015] On the upper surface of the traveling panel 10, there are formed travel guide lines 12 for guiding the travel of the AGVIs to V. The AGVIs to V travel on the traveling panel 10 along the travel guide lines 12, and are able to transport workpieces and processing tools received from the storage device 4a to the first to third processing devices 4b to 4d, and to transport workpieces processed in the first to third processing devices 4b to 4d and processing tools removed for replacement to the storage device 4a. The traveling panel 10 is formed with fall prevention walls 14 to prevent the AGVIs to V from falling off the traveling panel 10 even if they deviate from the travel guide lines 12.

[0016] The AGVI will be outlined with reference to Figure 2. Note that since AGVII to AGVIV have the same configuration as AGVI, the description of AGVII to AGVIV will be omitted.

[0017] The AGVI includes a main body 82 and a cover 81 that covers the main body 82. The main body 82 is equipped with a frame (not shown), and servo motors 83 (the servo motor 83 on the right side is not visible) that exert driving force are arranged on the left and right sides of the frame. Each servo motor 83 drives a tire 84, and a front reading sensor 86 is arranged in the center of the front width direction of the main body 82, and a rear reading sensor 88 is arranged in the center of the rear width direction.

[0018] Rotational casters 85 are disposed in front of and behind left and right tires 84 driven by left and right servo motors 83 (the front right directional caster is not visible). A pair of directional casters 85 is provided on the left and right sides of the front of the frame, and another pair is provided on the left and right sides of the rear of the frame (a total of four). A travel control means (not shown) that controls the travel of the AGVI is disposed in the main body 82, and the travel control means disposed in the main body 82 receives a control signal sent by wireless communication from the above-mentioned control means 20. The control signal received by the travel control means drives the left and right servo motors 83, which actuates the left and right tires 84, allowing the AGVI to move forward, backward, turn right, turn left, turn on the spot, etc.

[0019] The front reading sensor 86 is disposed on the underside of the front of the main body 82 at the center in the width direction, and the rear reading sensor 88 is disposed on the underside of the rear of the main body 82 at the center in the width direction. The front reading sensor 86 and the rear reading sensor 88 both read the travel guide lines 12 formed on the travel panel 10 and send the reading results to the travel control means, and the signal sent to the travel control means is sent to the control means 20 by wireless communication. This enables the AGVI to V to travel along a specified route while reading the travel guide lines 12. The positions of the AGVI to V are determined by the rotation angle of the tires 84 rotated by the servo motors 83, and are determined by the control means 20.

[0020] In addition to the above-mentioned components, the AGVI is also equipped with a battery that supplies power to the electrical components that make up the AGVI, a cassette that stores workpieces (e.g., semiconductor wafers) to be transported from the storage device 4a, and a cassette lifting means for raising and lowering the cassette into the processing device 4 (all of which are not shown).

[0021] When the AGVI is used to transport workpieces from storage device 4a, the AGVI is positioned directly above delivery opening 10a of storage device 4a, and the cassette lifting means is operated to lower the cassette from delivery opening 10a into storage device 4a. Once the workpiece or processing tool has been stored in the cassette, the cassette lifting means is operated to raise the cassette and store it in AGVI body 82. Once the workpiece or processing tool has been stored in the AGVI, it travels on travel guide line 12 on traveling panel 10 instructed by control means 20 to transport it to one of processing devices 4b to 4d, and the cassette is then lowered through delivery opening 10a of processing device 4b to 4d for delivery.

[0022] The control means 20 is configured by a computer and includes a central processing unit (CPU) that performs calculations according to a control program, a read-only memory (ROM) that stores the control program, etc., a readable and writable random access memory (RAM) that temporarily stores detected values, calculation results, etc., an input interface, and an output interface, and communicates wirelessly with the driving control means installed in each AGVI to V to control each AGVI to V.

[0023] As shown in Fig. 1, position coordinates A to T of intersections, for example, are formed on the travel guide line 12 along which the AGVIs to V travel on the travel panel 10. As shown in Fig. 3, the control means 20 includes a coordinate memory unit 22 that stores the position coordinates A to T formed on the travel panel 10, a path memory unit 23 that stores the coordinates of the path along which the AGVIs to V travel, and a coordinate reservation unit 24 that reserves the coordinates of several paths ahead (four paths ahead in this embodiment) for the moving AGVIs to V.

[0024] As shown in FIG. 1, the position coordinates A to T formed on the traveling panel 10 are set at appropriate intervals on a traveling guide line 12 along which the AGVI to V travel and connect to the delivery port 10a of the processing device 4, and as shown in FIG. 3, the coordinate memory unit 22 of the control means 20 stores the X and Y coordinates of each of the position coordinates A to T.

[0025] 3, the control means 20 is provided with a path memory unit 23 that stores the coordinates of the path along which the AGVIs to V move from their movement start positions to their target positions. The path memory unit 23 defines the path along which each of the AGVIs to V will travel to the delivery port 10a of the target processing device 4, based on the coordinates stored in the coordinate memory unit 22. The path is set by an operator in the control means 20 based on the transport work to be performed by each of the AGVIs to V, or is automatically generated by the control means 20 and stored in the path memory unit 23. As can be seen from Fig. 3, for example, AGVI is set to follow the path of coordinates A → B → C → D → F' → G' → H', AGVII is set to follow the path of coordinates E → F → G → H → I → J → K, AGVIII is set to follow the path of coordinates H → I → I' → L' → M' → N' → P, AGVIV is set to follow the path of coordinates M' → N' → Q' → R' → A' → S → T, and AGVV is set to follow the path of coordinates R' → A' → S → T. For convenience of explanation, the latter half of the path in the path storage unit 23 shown in Fig. 3 is omitted.

[0026] Furthermore, the control means 20 is provided with a coordinate reservation unit 24 that reserves up to several coordinates ahead (four coordinates ahead in this embodiment) that each of the moving AGVIs to Vs is scheduled to pass through. The coordinate reservation unit 24 will be described in more detail with reference to FIG.

[0027] As shown in FIG. 3, in the conveyance system 2 of this embodiment, the coordinates of up to four coordinates ahead that the moving AGVIs to V will pass are reserved in the coordinate reservation unit 24. For example, as can be seen from FIG. 1, the AGVI has just passed the first coordinate A according to the route stored in the route memory unit 23, and is scheduled to pass coordinates B, C, D, and F' after this. Therefore, the coordinate reservation unit 24 reserves the coordinates B, C, D, and F' up to four coordinates ahead with reservation orders 1, 2, 3, and 4. If the AGVI travels and passes coordinate B, coordinate B, which was reserved with reservation order 1, disappears, and coordinate CDF' moves up to reservation orders 1, 2, and 3. Coordinate G', which is stored in the route memory unit 23 as the coordinate to be passed after F', is newly accepted and reserved with reservation order 4 (the coordinate four ahead). Similarly, the coordinates of up to four coordinates ahead that the AGVIs to V will pass according to the route they are scheduled to pass are reserved with reservation orders 1 to 4 corresponding to each of the AGVIIs to V. The AGVV's final destination is coordinate T, and there are no reservations beyond coordinate T (four spaces ahead).

[0028] Here, AGVII has traveled along the route stored in the route memory unit 23 and has just passed coordinates E and F, and after coordinates G and H, coordinates I and J will be reserved. However, coordinate I, which is about to be reserved at reservation priority 3 as shown by P1 in the figure, is a coordinate that AGVIII has reserved before AGVII, as shown by P2 in the figure. As a result, the control means 20 treats coordinate I as being monopolized by AGVIII, and therefore, when AGVII attempts to reserve coordinate I later, it determines that there is a risk of collision with AGVIII if it continues traveling as is. Therefore, until AGVIII passes coordinate I and coordinate I disappears from AGVIII's reservation priorities 1 to 4 in the coordinate reservation unit 24, it determines that AGVII's reservation of coordinates I and beyond as "NG," and processes so that it cannot reserve coordinates I and beyond, including the next coordinate J. Therefore, even if AGVII passes coordinate G and continues traveling, it can only travel to coordinate H for which a reservation has been made, and will stop at coordinate H and wait until AGVIII passes coordinate I.

[0029] In this case, if the coordinate reservation unit 24 of the control means 20 determines that the reservation by AGVII for coordinates I and beyond is NG and there are no other AGVs for which the judgment is NG due to coordinate I, the reservation of coordinates I and J is registered as pending with the first priority of 1. If another AGV subsequently attempts to reserve coordinates I to pass through coordinate I, the reservation is also determined as NG, just like AGVII. However, since AGVII's reservation for coordinates I and J was previously reserved and registered with priority of 1, the reservation is registered with priority of 2 after AGVII. Then, when AGVIII passes coordinate I, the reservation of AGVII, which has a higher priority, is first cleared from the NG state, and the coordinate reservation unit 24 begins accepting coordinates I, J, and the subsequent coordinates, and AGVII begins traveling. If there is another AGV whose coordinate I was registered with priority of 2 after AGVII, the other AGV is promoted to priority 1 of the AGVs to pass through. When AGVII passes coordinate I, the reservation NG is cleared and coordinate I becomes available for acceptance. That is, the coordinate reservation unit 24 of the control means 20 accepts reservations for each AGV, prioritizing the reservations in order of earliest receipt.

[0030] 1 has just passed M', and the coordinate reservation unit 24 in FIG. 3 reserves coordinate A', which is the next coordinate to pass, as indicated by P3. However, because coordinate A' has already been reserved for reservation priority 1 for the AGV, as indicated by P4 in the figure, the control means 20 determines that coordinate A' is monopolized by the AGV and does not allow the AGV to reserve coordinate A' for reservation priority 4. As with the AGV described above, reservations for coordinates A' and beyond are denied. The AGV is then stopped and put into a standby state from coordinate R' onward to coordinate A', and after the AGV passes coordinate A', reservations for coordinates A' and beyond become possible for the AGV, and travel is permitted, allowing the AGV to reach its destination.

[0031] While the reservation of coordinate A' for reservation rank 4 in the AGVIV is determined to be NG, the reservation of coordinate A' is registered with priority 1, as in the case of the AGVII described above. As a result, even if another AGV subsequently attempts to reserve coordinate A', the reservation is determined to be NG, as in the case of the AGVIV, but since coordinate A' was previously registered with priority 1 in the AGVIV, it is registered with priority 2 after the AGVIV. Then, when the AGVIV passes coordinate A', the AGVIV becomes able to reserve coordinate A', which is registered with priority 1, and the coordinate reservation unit 24 reserves coordinate A' and the subsequent coordinates, making it possible for the AGVIV to travel along a route that passes coordinate A', and the AGVIV can reach its destination.

[0032] According to this embodiment, when the AGVs travel on the travel guidance line 12 on the travel panel 10 according to the route stored in the route memory unit 23, even if the AGVs travel at changes including acceleration, deceleration, and constant speed, the timing of stopping is managed, so collisions between AGVs are avoided, and the problem of accidents is solved. [Explanation of symbols]

[0033] 2:Transport system 4: Processing equipment 4a: Storage device 4b to 4d: First to third processing devices 6: Top plate 10: Travel panel 12: Driving guidance line 14: Fall prevention wall 20: Control means 22: Coordinate memory section 24: Route Memory Section 26: Coordinate reservation section 81: Cover 82: Main body 83: Servo motor 84: Tires 85: Free-direction caster 86: Front reading sensor 88: Rear reading sensor

Claims

1. A conveyance system including a control means and a traveling panel on which an automatic conveyance device travels is disposed on a top plate of a processing device including a plurality of processing devices, The control means comprises a coordinate storage unit for storing position coordinates formed on the traveling panel, a path storage unit for storing coordinates of paths along which the automatic transport device moves, a coordinate reservation unit for a moving automatic transport device to reserve coordinates several positions ahead, the coordinates reserved in the coordinate reservation unit are exclusively reserved by the automatic transport device that made the reservation earlier, and an automatic transport device making a reservation later can wait for the automatic transport device that made the reservation earlier to pass before it can make a reservation, A transportation system in which the later reserved automatic transportation device waits until the earlier reserved automatic transportation device passes the coordinates.

2. 2. The transportation system according to claim 1, wherein said coordinate reservation unit accepts reservations for each automatic transportation device by prioritizing reservations made in the order of earliest receipt.

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