Conveying system

Abstract

To provide a conveying system that can accurately locate a cassette at a delivery port even if a travel guide line is blocked by the delivery port and a reading sensor becomes unable to detect the travel guide line.SOLUTION: A conveying system is disposed with a traveling panel 10 in which automatic conveying devices 8 travel on a top plate 6 of a processing apparatus 4 including a plurality of processors. The traveling panel 10 is formed with travel guide lines 12 for guiding the travel of the automatic conveying devices 8. The automatic conveying device 8 includes a right tire driving unit 20 and a left tire driving unit 22 disposed to sandwich the travel guide line 12, a reading sensor 24 that reads the travel guide line 12, and control means. When the reading sensor 24 becomes unable to detect the travel guide line 12 during the travel, the control means moves by a predetermined length from a position where the reading sensor becomes unable to detect the travel guide line and stops the right tire driving unit 20 and the left tire driving unit 22.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a conveying system in which a traveling panel along which an automatic conveying device travels is arranged on the top plate of a processing device including multiple processing devices, and a traveling guide line for guiding the travel of the automatic conveying device is formed on the traveling panel. [Background technology]

[0002] A wafer has multiple devices such as ICs and LSIs formed on its surface, separated by planned dividing lines. The back side is ground using a grinding machine to form the wafer to the desired thickness, and then the wafer is divided into individual device chips using a cutting machine and laser processing machine. Each of the divided device chips is used in electrical equipment such as mobile phones and personal computers.

[0003] The present applicant has also developed a transport system in which a travel path is arranged using the top plate of a processing device including processing devices such as grinding devices, cutting devices, and laser processing devices, and a wafer storage device that stores multiple wafers, and an automatic transport device travels between the processing devices to transport wafers from the wafer storage device to each processing device or to transport consumables (see, for example, Patent Document 1).

[0004] The travel path is formed with a guide line for guiding the travel of the automatic transport device, and the automatic transport device is equipped with drive wheels on the left and right sides of the guide line, as well as directional casters on the front and rear, and a reading sensor for reading the guide line. Furthermore, a lifting means is provided at the center of the bottom of the automatic transport device for raising and lowering cassettes containing articles such as wafers to the article transfer tables of each processing device. The travel path is formed with a delivery port for raising and lowering the cassette to deliver the articles to the processing device. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2020-013892 Summary of the Invention [Problem to be solved by the invention]

[0006] However, if the guide line is blocked by the delivery port, the reading sensor for reading the guide line will not function, which will cause the cassette to be unable to be positioned accurately at the delivery port.

[0007] An object of the present invention is to provide a conveying system that can accurately position a cassette at a transfer opening even when the travel guide line is interrupted by the transfer opening and the reading sensor is no longer able to detect the travel guide line. [Means for solving the problem]

[0008] According to the present invention, there is provided the following transport system that solves the above-mentioned problems: "In a conveyance system in which a traveling panel on which an automatic conveyance device travels is arranged on the top plate of a processing device including a plurality of processing devices, and a traveling guide line for guiding the travel of the automatic conveyance device is formed on the traveling panel, The automatic conveying device a right tire driving unit and a left tire driving unit disposed on opposite sides of the travel guide line; a reading sensor that reads the travel guide line; a control means; The control means, when the reading sensor can no longer detect the travel guide line while the vehicle is traveling, moves a predetermined distance from the position where the reading sensor can no longer detect the travel guide line, and stops the right tire drive unit and the left tire drive unit.

[0009] Preferably, front wheels disposed in front of the right tire driving unit and the left tire driving unit; rear wheels disposed behind the right tire driving unit and the left tire driving unit; an opening formed in a central region surrounded by the right tire driving portion, the left tire driving portion, the front wheels, and the rear wheels; a belt winding means for winding a belt attached to a cassette containing articles through the opening to raise and lower the cassette, a transfer port is formed in the traveling panel for lifting and lowering the cassette to transfer the article to the processing device; The control means determines the predetermined length to be the length from the position where the reading sensor can no longer detect the travel guide line to the position where the delivery opening and the cassette coincide with each other. [Effects of the Invention]

[0010] The transport system of the present invention comprises: A conveyance system in which a travel panel on which an automatic conveyance device travels is arranged on a top plate of a processing device including a plurality of processing devices, and a travel guide line for guiding the travel of the automatic conveyance device is formed on the travel panel, The automatic conveying device a right tire driving unit and a left tire driving unit disposed on opposite sides of the travel guide line; a reading sensor that reads the travel guide line; a control means; When the reading sensor is no longer able to detect the travel guide line during travel, the control means moves a predetermined length from the position where it is no longer able to detect the line and stops the right tire drive unit and the left tire drive unit, so that even if the travel guide line is blocked by the transfer opening and the reading sensor is no longer able to detect the travel guide line, the cassette can be accurately positioned at the transfer opening. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a schematic diagram of a transport system according to the present invention. [Figure 2] FIG. 2 is a perspective view of the automatic transport device shown in FIG. [Figure 3] FIG. 3 is a perspective view of the main body shown in FIG. 2 (with the belt unwound). [Figure 4] FIG. 2 is a control block diagram when the automatic transport device shown in FIG. 1 travels. [Figure 5] 4 is a flowchart showing the control executed by the control means shown in FIG. 3. [Figure 6] FIG. 2 is a schematic diagram showing a state in which the automatic transport device is traveling toward the delivery port shown in FIG. 1. [Figure 7] FIG. 2 is a schematic diagram showing the state in which the automatic transport device has stopped at the transfer port shown in FIG. 1. DETAILED DESCRIPTION OF THE INVENTION

[0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a transport system according to the present invention will now be described with reference to the drawings.

[0013] (Transport System 2) Referring to FIG. 1, in the conveying system 2, a traveling panel 10 along which the automatic conveying device 8 travels is disposed on the top plate 6 of the processing device 4 including a plurality of processing devices, and a traveling guide line 12 for guiding the travel of the automatic conveying device 8 is formed on the traveling panel 10.

[0014] The processing equipment 4 includes a storage device 4a for storing articles and first, second, and third processing devices 4b, 4c, and 4d to which the articles in the storage device 4a are transported by an automatic transport device 8. Examples of articles stored in the storage device 4a include workpieces such as semiconductor wafers to be processed in the first to third processing devices 4b to 4d, and processing tools used when processing in any of the first to third processing devices 4b to 4d. Examples of processing tools used when processing in any of the first to third processing devices 4b to 4d include cutting blades used when cutting the workpieces, and grinding wheels with grinding stones used when grinding the workpieces to thin them. In this embodiment, one storage device 4a and three processing devices 4b to 4d are provided as the processing equipment 4, but the number and combination of processing devices 4 can be set as desired.

[0015] A traveling panel 10 is disposed on the top plate 6 of the processing equipment 4, and a plurality of processing equipments 4 are connected to one another by the traveling panel 10. An article delivery opening 10a is formed in the traveling panel 10. Although not shown, a delivery opening corresponding in position and size to the delivery opening 10a of the traveling panel 10 is also formed in the top plate 6 of the processing equipment 4. Articles are delivered between the automatic conveying equipment 8 and the processing equipment 4 through the delivery opening 10a of the traveling panel 10 and the delivery opening in the top plate 6 of the processing equipment 4.

[0016] Furthermore, on the upper surface of the traveling panel 10, there are formed travel guide lines 12 that guide the travel of the automatic conveying device 8. Therefore, the automatic conveying device 8 travels on the traveling panel 10 along the travel guide lines 12, and is able to transport the article received from the storage device 4a to the first to third processing devices 4b to 4d. However, the travel guide lines 12 cannot be formed at the delivery opening 10a, which is an opening. In addition, a fall prevention wall 14 is attached to the traveling panel 10 to prevent the automatic conveying device 8 from falling off the traveling panel 10.

[0017] (Main body 16 of automatic conveying device 8) 2 and 3, the automatic conveying device 8 includes a main body 16 and a cover 18 (see FIG. 2) that covers the main body 16. As shown in FIG. 3, the main body 16 includes a right tire driving unit 20 and a left tire driving unit 22 that are arranged to sandwich the travel guide line 12, a reading sensor 24 that reads the travel guide line 12, and control means 26. The front-rear and left-right directions of the automatic conveying device 8 are indicated by arrows in FIGS. 2 and 3.

[0018] (Right tire drive unit 20, left tire drive unit 22) As shown in FIG. 3 , the right tire drive unit 20 has a right tire 28 and a right motor 30 that drives the right tire 28. The right motor 30 is attached to the right side of a frame 32 of the main body 16. Similarly, the left tire drive unit 22 has a left tire 34 and a left motor 36 that drives the left tire 34. The left motor 36 is attached to the left side of the frame 32. A pair of front wheels 38 (only one side is shown) are disposed in front of the right tire drive unit 20 and the left tire drive unit 22 and spaced apart in the left-right direction. Furthermore, a pair of rear wheels 40 are disposed behind the right tire drive unit 20 and the left tire drive unit 22 and spaced apart in the left-right direction. Both the front wheels 38 and the rear wheels 40 are directional casters that are attached to the frame 32 so as to be swivel freely about an axis in the vertical direction. In the automatic conveying device 8, the rotational speed and direction of the right tire 28 and the left tire 34 are adjusted by the right motor 30 and the left motor 36, so that the automatic conveying device 8 can move forward, backward, turn right, turn left, or spin turn (turn on the spot around the vertical center axis of the automatic conveying device 8).

[0019] (Reading sensor 24) 2, the reading sensor 24 of this embodiment includes a front reading sensor 24a disposed in front of the right tire driving unit 20 and the left tire driving unit 22, and a rear reading sensor 24b disposed behind the right tire driving unit 20 and the left tire driving unit 22. The front reading sensor 24a is attached to the left-right central portion of the front lower surface of the frame 32, and the rear reading sensor 24b is attached to the left-right central portion of the rear lower surface of the frame 32. Both the front reading sensor 24a and the rear reading sensor 24b read the travel guide lines 12 formed on the travel panel 10 and send the reading results to the control means 26.

[0020] (Control means 26) The control means 26 is composed of a computer having a processor and memory, and controls the traveling direction of the automatic transport device 8. As shown in FIG. 4, the control means 26 receives the reading results of the front reading sensor 24a and the rear reading sensor 24b. Based on the received reading results, the control means 26 controls the driver 42, causing the driver 42 to output required drive currents to the right motor 30 and the left motor 36. In this way, the control means 26 controls the traveling direction of the automatic transport device 8. The control means 26 and the driver 42 are supplied with power from a battery 44 shown in FIG. 3.

[0021] Furthermore, when the reading sensor 24 is no longer able to detect the travel guide line 12 while the automatic conveying device 8 is traveling, the control means 26 of this embodiment executes control to move a predetermined distance from the position where detection is no longer possible and stop the right tire drive unit 20 and the left tire drive unit 22. With this control, even if the travel guide line 12 is blocked by the transfer opening 10a and the reading sensor 24 is no longer able to detect the travel guide line 12, a cassette 48 (described later) of the automatic conveying device 8 can be accurately positioned at the transfer opening 10a.

[0022] The control means 26 can set the predetermined length to be the distance from the position where the reading sensor 24 can no longer detect the travel guide line 12 to the position where the transfer opening 10a and the cassette 48 are aligned. The "position where the transfer opening 10a and the cassette 48 are aligned" is a position where the cassette 48 can pass through the transfer opening 10a. The "predetermined length" can be set to the dimension L of the transfer opening 10a in the traveling direction of the automatic conveying device 8, for example, as shown in FIG. 6.

[0023] The above control is executed when the reading sensor 24 on the front side in the traveling direction becomes unable to detect the travel guide line 12. That is, when the automatic conveying device 8 is moving forward, the control is executed when the front reading sensor 24a becomes unable to detect the travel guide line 12, and when the automatic conveying device 8 is moving backward, the control is executed when the rear reading sensor 24b becomes unable to detect the travel guide line 12.

[0024] Continuing the explanation with reference to Figure 3, the main body 16 of the automatic conveying device 8 includes an opening 46 formed in a central area surrounded by the right tire drive unit 20, the left tire drive unit 22, the front wheels 38, and the rear wheels 40, and a belt winding means 52 that winds up a belt 50 attached to a cassette 48 that stores articles through the opening 46 and raises and lowers the cassette 48.

[0025] (Opening 46) The opening 46 is rectangular and formed in a central region of the frame 32 of the main body 16. A front support wall 54 extending upward is provided at the front end of the opening 46, and a rear support wall 56 extending upward is provided at the rear end of the opening 46.

[0026] (Cassette 48) The cassette 48 is formed in a box shape with a smaller vertical dimension (thickness) compared to its dimensions in the front-rear and left-right directions. The front-rear and left-right dimensions of the cassette 48 are slightly smaller than the front-rear and left-right dimensions of the delivery opening 10a of the traveling panel 10, allowing the cassette 48 to pass through the delivery opening 10a. The cassette 48 also has a storage section 48a that stores articles and a flip-up cover 48b that opens and closes an opening (not shown) of the storage section 48a.

[0027] (Belt 50) The belt 50 has two right-side belts 50a spaced apart in the front-to-rear direction and extending upward from the upper right surface of the storage section 48a of the cassette 48, and two left-side belts 50b spaced apart in the front-to-rear direction and extending upward from the upper left surface of the storage section 48a of the cassette 48.

[0028] (Belt winding means 52) The belt winding means 52 includes a right guide roller 58 that guides the two right belts 50a, a left guide roller 60 that guides the two left belts 50b, a winding roller 62 that winds up the right belt 50a and the left belt 50b, and a winding motor 64 that rotates the winding roller 62. The right guide roller 58, the left guide roller 60, and the winding roller 62 are rotatably supported by the front support wall 54 and the rear support wall 56 of the frame 32. The right guide roller 58 is disposed on the right side of the main body 16, and the left guide roller 60 is disposed on the left side of the main body 16. The winding roller 62 is disposed between the right guide roller 58 and the left guide roller 60, and the winding motor 64 is mounted on the upper rear surface of the frame 32. The drive current for the winding motor 64 is output from the driver 42.

[0029] In the belt winding means 52, the winding motor 64 is operated in the winding direction to wind the right belt 50a and the left belt 50b onto the winding roller 62, thereby lifting the cassette 48. In addition, the belt winding means 52 is configured to operate the winding motor 64 in the unwinding direction to unwind the right belt 50a and the left belt 50b from the winding roller 62, thereby lowering the cassette 48.

[0030] (Cover 18 of automatic transport device 8) 2, the cover 18 of the automatic transfer device 8 has a top plate 66 and side walls 68. The top plate 66 is formed in a rectangular shape with rounded corners. The side walls 68 are formed in a rectangular cylindrical shape extending downward from the outer periphery of the top plate 66.

[0031] Next, an example in which a workpiece such as a semiconductor wafer is transported by the automatic transport device 8 in the transport system 2 will be described.

[0032] In the conveyance system 2, first, the automatic conveyance device 8 receives the workpiece from the storage device 4a. To this end, the control means 26 of the automatic conveyance device 8 executes the control shown in Fig. 5 to position the automatic conveyance device 8 at the delivery opening 10a of the traveling panel 10 installed above the storage device 4a.

[0033] (Step S1) Explaining with reference to Fig. 5, first, the control means 26 executes step S1 of causing the automatic conveying device 8 to travel while reading the travel guide line 12 with the reading sensor 24. While the automatic conveying device 8 is traveling, the control means 26 controls the right tire driving unit 20 and the left tire driving unit 22 based on the reading results of the front reading sensor 24a and the rear reading sensor 24b, thereby adjusting the automatic conveying device 8 so that the middle part in the left-right direction is positioned above the travel guide line 12 (see Fig. 6).

[0034] (Step S2) During the execution of step S1, the control means 26 also executes step S2, which determines whether the reading sensor 24 has detected the travel guide line 12. If the reading sensor 24 has detected the travel guide line 12 (if the determination in step S2 is Yes), the control means 26 continues to execute step S1. On the other hand, when the automatic conveying device 8 approaches the delivery opening 10a where the travel guide line 12 is missing, the reading sensor 24 on the front side in the traveling direction (usually the front reading sensor 24a) will no longer be able to detect the travel guide line 12. In this case, the determination in step S2 will be No, and the control means 26 executes step S3.

[0035] (Step S3) If the determination in step S2 is No, the control means 26 executes step S3, in which the automatic conveying device 8 is caused to travel a predetermined length from the position where the reading sensor 24 on the front side in the traveling direction can no longer detect the travel guide line 12. The predetermined length can be the dimension L of the delivery opening 10a in the traveling direction of the automatic conveying device 8, as shown in FIG.

[0036] (Step S4) During execution of step S3, the control means 26 also executes step S4, which determines whether a predetermined length has been reached from the position where the travel guide line 12 can no longer be detected by the reading sensor 24 on the front side in the traveling direction. In step S4, the control means 26 determines whether the predetermined length has been reached based on the drive amounts of the right tire drive unit 20 and the left tire drive unit 22. If the predetermined length has not been reached (if the determination in step S4 is No), the control means 26 continues to execute step S3. On the other hand, if the predetermined length has been reached (if the determination in step S4 is Yes), the control means 26 executes step S5.

[0037] (Step S5) If the determination in step S4 is Yes, the control means 26 executes step S5 to stop the operation of the right tire drive unit 20 and the left tire drive unit 22. By executing steps S1-S5 as described above, the control means 26 can accurately position the cassette 48 of the automatic conveying device 8 at the transfer opening 10a even if the travel guide line 12 is blocked by the transfer opening 10a and the reading sensor 24 cannot detect the travel guide line 12 (see FIG. 7).

[0038] When the cassette 48 of the automatic conveying device 8 is positioned at the transfer opening 10a, the workpieces are transferred from the storage device 4a to the automatic conveying device 8. Specifically, the belt winding means 52 lowers the cassette 48 from the automatic conveying device 8 through the transfer opening 10a of the traveling panel 10 and the transfer opening of the top plate 6 of the storage device 4a, and the cassette 48 is sent into the storage device 4a. When the cassette 48 is positioned at a predetermined position in the storage device 4a, the workpieces are stored in the cassette 48 by the transport means (e.g., a robot hand) of the storage device 4a. Then, the belt winding means 52 raises the cassette 48 containing the workpieces, and the cassette 48 is removed from the storage device 4a. In this manner, the workpieces are transferred from the storage device 4a to the automatic conveying device 8.

[0039] After the workpiece is transferred from the storage device 4a to the automatic transfer device 8, the workpiece is transferred to the first processing device 4b by the automatic transfer device 8. At this time, the control means 26 executes the above-mentioned steps S1-S5 to position the automatic transfer device 8 at the transfer opening 10a of the traveling panel 10 installed above the first processing device 4b.

[0040] When the automatic conveying device 8 arrives at a predetermined position above the first processing device 4b (the position where the transfer opening 10a of the traveling panel 10 is formed), the cassette 48 is lowered from the automatic conveying device 8 through the transfer opening 10a of the traveling panel 10 and the transfer opening of the top plate 6 of the first processing device 4b, and the cassette 48 is sent into the first processing device 4b.

[0041] After the workpiece is transported to the first processing device 4b, the first processing device 4b performs the required processing on the workpiece. When the cassette 48 is lowered and positioned at a predetermined position within the first processing device 4b, the workpiece is removed from the cassette 48 by the transport means (e.g., a robot hand) of the first processing device 4b. Then, the first processing device 4b performs the required processing on the workpiece. Thereafter, the transport means stores the processed workpiece in a cassette 48 of the same automatic transport device 8 or a different automatic transport device 8. Once the processed workpiece is stored in the cassette 48, the cassette 48 is raised and removed from the first processing device 4b.

[0042] After the required processing is performed on the workpiece in the first processing device 4b, the control means 26 executes the above-mentioned steps S1-S5, and the workpiece is transported to the second processing device 4c. Next, the required processing is performed on the workpiece in the second processing device 4c. Furthermore, after the required processing is performed on the workpiece in the second processing device 4c, the control means 26 executes the above-mentioned steps S1-S5, and the workpiece is transported to the third processing device 4d. Then, the required processing is performed on the workpiece in the third processing device 4d. Thereafter, the automatic transport device 8 transports the workpiece to the storage device 4a, and the processed workpiece is stored in the storage device 4a.

[0043] As described above, when the reading sensor 24 is no longer able to detect the travel guide line 12 while traveling, the control means 26 of the automatic conveying device 8 of this embodiment moves a predetermined distance from the position where detection is no longer possible and stops the right tire drive unit 20 and the left tire drive unit 22. Therefore, according to this embodiment, even if the travel guide line 12 is blocked by the delivery opening 10a and the reading sensor 24 is no longer able to detect the travel guide line 12, the cassette 48 can be accurately positioned at the delivery opening 10a. [Explanation of symbols]

[0044] 2:Transport system 4: Processing equipment 4a: Storage device 4b: First processing device 4c: Second processing equipment 4d: Third processing equipment 6: Top plate 8: Automatic transport device 10: Travel panel 10a: Delivery point 12: Driving guidance line 20: Right tire drive unit 22: Left tire drive unit 24: Reading sensor 24a: Front reading sensor 24b: Rear reading sensor 26: Control means 38: Front wheel 40: Rear wheel 46: Opening 48: Cassette 50: Belt 52: Belt winding means

Claims

1. A conveyance system in which a travel panel on which an automatic conveyance device travels is arranged on a top plate of a processing device including a plurality of processing devices, and a travel guide line for guiding the travel of the automatic conveyance device is formed on the travel panel, The automatic transport device a right tire driving unit and a left tire driving unit disposed on opposite sides of the travel guide line; a reading sensor that reads the travel guide line; a control means; When the reading sensor is no longer able to detect the travel guide line during travel, the control means moves a predetermined distance from the position where it can no longer detect the line and stops the right tire drive unit and the left tire drive unit.

2. front wheels disposed in front of the right tire driving unit and the left tire driving unit; rear wheels disposed behind the right tire driving unit and the left tire driving unit; an opening formed in a central region surrounded by the right tire driving portion, the left tire driving portion, the front wheels, and the rear wheels; a belt winding means for winding a belt attached to a cassette containing articles through the opening to raise and lower the cassette, a transfer port is formed in the traveling panel for lifting and lowering the cassette to transfer the article to the processing device; 2. The conveying system according to claim 1, wherein said control means determines said predetermined length to be the length from the position where said reading sensor can no longer detect said guide line to the position where said delivery opening and said cassette are aligned.

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