Inner Reticle Pod Cover and Baseplate Shipper

Abstract

A shipping container for a reticle pod cover or base plate includes a first shell including a first securing mechanism and a second shell including a second securing mechanism. When the first and second shells are coupled together, the shells define an interior space capable of receiving the reticle pod cover or base plate, and the securing mechanism engages with the cover or base plate to prevent movement of the cover or base plate in an in-plane direction with the first or second shell. The securing mechanism may be such that there are both rigid and resilient securing mechanisms in contact with the cover or base plate. A method of storing a cover or base plate may include placing the cover or base plate between the first and second shells and coupling the first and second shells together.

Description

[Technical field]

[0001] This disclosure is directed to a shipping container for a cover and / or base plate used as an inner pod for a reticle pod.

[0002] Priority This disclosure claims priority to U.S. Provisional Patent Application No. 63 / 294,463, which has a filing date of December 29, 2021, and is incorporated by reference herein. [Background technology]

[0003] For example, reticles to be processed through photolithography, such as extreme ultraviolet (EUV), may be stored and transported in a reticle pod that includes an outer pod and an inner pod. The inner pod can include a base plate and a cover. Summary of the Invention

[0004] This disclosure is directed to a shipping container for a cover and / or base plate used as an inner pod for a reticle pod.

[0005] The shipping receptacle according to the embodiment can protect the cover and / or base plate of the reticle inner pod during shipping of the cover and base plate to the user. This can reduce the occurrence of damage to the cover and / or base plate, thus reducing or preventing the loss of available covers and base plates during transportation. In the embodiment, the shipping receptacle can increase the number of covers and / or base plates that can be shipped in a given volume of shipping space. The shipping receptacle can use opposing firm and rigid retention points to firmly and securely fasten both the cover and / or base plate while reducing the effect of shock on the cover and / or base plate. The shipping receptacle according to the embodiment can be configured to interconnect with features already present in the design of the cover and / or base plate such that the cover and / or base plate can be securely fastened within the shipping receptacle without further modification of the cover and / or base plate.

[0006] A reticle pod cover or base plate container includes a first shell having a plurality of first fastening features and a second shell having a plurality of second fastening features. The first shell and the second shell are configured to be coupled together. When the first shell and the second shell are coupled together, the first shell and the second shell define an interior space. The interior space is sized to accommodate the cover or the base plate of the reticle pod. The first fastening feature is configured to mate with the cover or the base plate of the reticle pod at a first predetermined position corresponding to a first pod feature provided on a first side of the cover or the base plate of the reticle pod. The second fastening feature is configured to mate with the cover or the base plate of the reticle pod at a second predetermined position corresponding to a second pod feature provided on a second side of the cover or the base plate of the reticle pod. When the first fixing mechanism engages with the first pod mechanism and the second fixing mechanism engages with the second pod mechanism, the engagement limits movement of the cover or base plate of the reticle pod in a plane with at least one of the first shell or the second shell.

[0007] In some embodiments, at least one of the first fastening feature or the second fastening feature each includes a resilient material, hi some embodiments, the resilient material is a fluoroelastomer.

[0008] In some embodiments, at least one of the first fixation feature or the second fixation feature each includes a rigid material, hi some embodiments, the rigid material is the same material as a body of the first shell or the second shell.

[0009] In one embodiment, the container is for the cover of the reticle pod, and at least some of the first predetermined locations and the second predetermined locations correspond to through holes in the cover of the reticle pod.

[0010] In one embodiment, the container is for the base plate of the reticle pod, and at least one of the first predetermined position or the second predetermined position corresponds to a kinematic coupling groove of the base plate of the reticle pod.

[0011] In one embodiment, the first predetermined location and the second predetermined location correspond to non-functional locations on the cover or the base plate of the reticle pod.

[0012] In some embodiments, the first shell and the second shell each comprise a polycarbonate or a polyolefin.

[0013] In an embodiment, a method of storing a cover or base plate of a reticle pod includes placing the cover or base plate of the reticle pod into a first shell of a container, the first shell including a plurality of first fastening mechanisms. Placing the cover or base plate of the reticle pod into the first shell includes mating a first pod feature on a first side of the cover or base plate with the plurality of first fastening mechanisms. The method further includes coupling a second shell of the container to the first shell of the container, the second shell including a second mating mechanism. Coupling the second shell of the container to the first shell includes mating a second pod feature on a second side of the cover or base plate with the second fastening mechanism. The engagement of the first fixing mechanism with the first pod mechanism and the engagement of the second fixing mechanism with the second pod mechanism limits movement of the cover or base plate of the reticle pod in a plane with at least one of the first shell or the second shell.

[0014] In some embodiments, at least one of the first fastening feature or the second fastening feature each comprises a resilient material, hi some embodiments, the resilient material is a fluoroelastomer.

[0015] In some embodiments, at least one of the first fixation feature or the second fixation feature each includes a rigid material, hi some embodiments, the rigid material is the same material as a body of the first shell or the second shell.

[0016] In one embodiment, the cover or base plate being stored is the cover of the reticle pod, and at least some of the first fixing mechanism and the second fixing mechanism engage with through holes formed in the cover of the reticle pod.

[0017] In one embodiment, the cover or base plate being stored is the base plate of the reticle pod, and at least some of the first fixing mechanism and the second fixing mechanism engage with kinematic coupling grooves of the base plate of the reticle pod.

[0018] In one embodiment, the first and second securing mechanisms mate with non-functional locations on the cover or base plate of the reticle pod.

[0019] In some embodiments, the first shell and the second shell each comprise a polycarbonate or a polyolefin. [Brief description of the drawings]

[0020] [Figure 1] 1 illustrates a receptacle for a cover or base plate of a reticle pod according to an embodiment. [Figure 2A] 1 is a view of a first side of a base plate of a reticle pod stored in a container according to one embodiment. [Figure 2B] FIG. 2B is a diagram of a first shell configured for use on a first side of the base plate of FIG. 2A. [Figure 2C] FIG. 2B is a view of a second side of the base plate shown in FIG. 2A. [Figure 2D] FIG. 2D is a diagram of a second shell configured for use on a second side of the base plate of FIG. 2C. [Figure 3A] 1 is a view of a first side of a cover of a reticle pod stored in a container according to one embodiment. [Figure 3B] FIG. 3B is a diagram of a first shell configured for use on a first side of the cover of FIG. 3A. [Figure 3C] FIG. 3B is a view of the second side of the cover shown in FIG. 3A. [Figure 3D] FIG. 3D is a diagram of a second shell configured for use on a second side of the cover of FIG. 3C. [Figure 4]1 is a flowchart of a method according to an embodiment. [Diagram 5] 1 is a diagram of the interface of the container's contact portion with the reticle to be housed therein; [Figure 6] 13 is a diagram of another interface of the container's contact portion with the housed reticle. FIG. [Figure 7] 13 is a diagram of another interface of the container's contact portion with the housed reticle. FIG. [Figure 8] 13 is a diagram of another interface of the container's contact portion with the housed reticle. FIG. [Figure 9] 13 is a diagram of another interface of the container's contact portion with the housed reticle. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] This disclosure is directed to a shipping container for a cover and / or base plate used as an inner pod for a reticle pod.

[0022] 1 illustrates a container for a cover or base plate of a reticle pod according to one embodiment. The container 100 includes a first shell 102 with a plurality of first contacts 104 disposed on the first shell 102. The container 100 also includes a second shell 106 with a plurality of second contacts 108 disposed on the second shell 106. The container 100 may be used to house a cover or base plate 110 of a reticle pod.

[0023] The container 100 is configured to house a cover or base plate 110. The container 100 is configured to accommodate the cover or base plate 110 in an interior space defined by the container 100. The container 100 may be used for storage and / or transportation of the cover or base plate 110 stored therein. In one embodiment, the cover or base plate 110 to be stored in the container 100 is a cover for a reticle pod inner pod.

[0024] The first shell 102 and the second shell 106 each include a respective fastening feature. The fastening feature is a feature on each shell 102, 106 that is configured to mechanically mate with the cover or base plate 110 when the cover or base plate is inside the container 100. The mechanical engagement of the fastening feature with the cover or base plate 110 holds the cover or base plate in a particular position within the container 100 and limits or prevents movement of the cover or base plate 110. In an embodiment, the engagement of the fastening feature limits or prevents movement of the cover or base plate 110 relative to the first shell 102 and / or the second shell 106, including in-plane components with the first shell 102 and / or the second shell 106. In the embodiment shown in FIG. 1, the first contact portion 104 is a fastening feature of the first shell 102 and the second contact portion 108 is a fastening feature of the second shell 106. The securing mechanism may be any suitable mechanism on the first shell 102 and second shell 106 that can mate with the cover or base plate 110 to limit or prevent movement of the cover or base plate within the container 100. Non-limiting embodiments of securing mechanisms are shown in Figures 5-9 and described below.

[0025] The first shell 102 forms a portion of the container 100. The first shell 102 is configured to partially define an interior space such that the cover or base plate 110 may be retained within the interior space. The first shell 102 includes a plurality of first contact portions 104. In an embodiment, the first shell 102 is made of a polymeric material. In an embodiment, the first shell 102 is made of a polycarbonate, polyolefin, or acrylonitrile butadiene styrene (ABS) polymer. The first shell 102 may include first contact portions 104 formed on a side of the first shell 102 configured to face the cover or base plate 110 when the cover or base plate 110 is stored within the container 100 as a fastening mechanism. The first contact portions 104 are provided on the first shell 102 at locations corresponding to locations on the cover or base plate 110 that should be contacted to retain the cover or base plate 110 within the container 100. The first contacts 104 may be provided at locations corresponding to non-critical locations on the cover or base plate 110. Non-critical locations on the cover or base plate 110 are areas where accidental damage during storage or transportation will not materially adversely affect the functionality of the reticle pod that includes the cover or base plate 110. Critical areas of the cover or base plate 110 may include sealing surfaces, highly polished areas, areas of visible plating on the surface, areas within the interior space in which the cover or base plate 110 houses the reticle, etc. Non-critical areas of the cover or base plate 110 may include corners and sides of the cover or base plate 110, through holes formed in the cover or base plate 110, safety catch holes, kinematic coupling (KC) grooves, etc.

[0026] The first contact portion 104 may include the material of the first shell 102. In an embodiment, the first contact portion 104 may further include an elastic part, for example, by which the first contact portion 104 is to interconnect with the cover or base plate 110. The elastic part may then be any suitable elastic material, such as, for example, one or more elastomers. In an embodiment, the elastic part is a thermoplastic elastomer. In an embodiment, the elastic part is a fluoroelastomer. The elastic part may be made of a cross-linked polymer material. Non-limiting examples of materials that may be used in the elastic part include fluororubbers such as FKM or Viton™. In an embodiment, the first contact portion 104 is provided at a surface in contact with the cover or base plate 110 in one of an elastic material or a rigid material, and the second contact portion 108 is provided at a surface in contact with the cover or base plate 110 in the other of an elastic material or a rigid material. In this embodiment, the cover or base plate is contacted on one side by a rigid material and on the other side by a resilient material. The rigid material may be any suitable rigid material. In one embodiment, the rigid material is the same material used as the first shell 102 or the second shell 106. In one embodiment, the rigid material is polycarbonate, a polyolefin such as ultra-high molecular weight polyethylene, or ABS.

[0027] The second shell 106 forms another portion of the container 100. When the second shell 106 and the first shell 102 are joined together, the container 100 is configured to enclose a cover or base plate 110. The second shell 106 may be made of a rigid material, for example, polycarbonate, a polyolefin such as ultra-high molecular weight polyethylene, or ABS. In an embodiment, the second shell 106 is made of the same material as the first shell 102. The second shell 106 and the first shell 102 may be joined together by any suitable sealing mechanism or combination thereof, such as latches, tabs, hinges, snap-fit ​​mechanisms, magnetic surfaces, and the like. In the embodiment shown in FIG. 1, the container 100 includes a hinge 112 and a latch 114 to secure the first shell 102 and the second shell 106 to one another.

[0028] The second shell 106 includes a second contact portion 108 as a fastening mechanism. The second contact portion 108 is located on the shell 106 at a position configured to correspond to a predetermined contact point on a second side of the cover or base plate 110, opposite the first side contacted by the first contact portion 104. The second contact portion 108 may be located to correspond to a non-critical position on the second side of the cover or base plate 110. The second contact portion 108 may include a rigid material. The second contact portion 108 may include the material of the second shell 106. The second contact portion 108 may include an elastic component, such as any of the elastic components described above with respect to the first contact portion 104. In an embodiment, the first contact portion 104 and the second contact portion 108 are coupled to contact the rigid material on one side and the elastic material on the other side with the reticle or base plate 110. In one embodiment, the first contact portion 104 and the second contact portion 108 mate on each opposing side to provide contact between a rigid material and a reticle or base plate 110. In one embodiment, the first contact portion 104 and the second contact portion 108 mate on each opposing side to provide contact between a resilient material and a reticle or base plate.

[0029] In some embodiments, some or all of the second contact portions 108 and some or all of the first contact portions 104 can interconnect with a common feature formed on the cover or base plate 110, such as a through hole, a periphery of the cover or base plate 110, or the like. In some embodiments, the second contact portions 108 are opposite the first contact portions 104 when the container 100 is closed. In some embodiments, the first contact portions 104 and the second contact portions 108 can contact each other when the cover or base plate 110 is installed in the container 100. In some embodiments, some or all of the first contact portions 104 are contact portions of one set of features on a first side of the cover or base plate 110 and some or all of the second contact portions are configured to contact a different second set of features on a second side of the cover or base plate 110.

[0030] Contact between the first contact portion 104, the cover or base plate 110, and the second contact portion 108 is such that the cover or base plate 110 is held securely within the container 100 so that it does not move significantly in a direction in-plane with one or both of the first shell 102 and the second shell 106. Small temporary movements may occur depending on the use of resilient materials in the first contact portion 104 and / or second contact portion 108 or due to wear or variations in manufacturing tolerances of parts on one or both of the container 100 and the cover or base plate 110.

[0031] 2A illustrates a first side of a base plate of a reticle pod stored in a container according to an embodiment. The first side of the base plate 200 may be the side that faces outward when a reticle pod including the base plate 200 is assembled. The first side of the base plate 200 includes a safety catch hole 202, a weight reduction pocket 204, and a kinematic coupling feature 206, such as a kinematic coupling groove. Any, some, or all of the safety catch hole 202, the weight reduction pocket 204, and the kinematic coupling feature 206 may be used as a point on the first side of the base plate to be contacted by the first shell contact portion 214 as discussed below and shown in FIG. 2B. A reflector zone 208 may be provided on the first side of the base plate 200. The reflector zone 208 may be used to orient the base plate during handling of the reticle.

[0032] 2B shows a first shell configured to be used with the first side of the base plate of FIG. 2A. The first shell 210 includes a shell body 212 and a plurality of first shell contacts 214. The shell body 212 defines a portion of an interior space to house the base plate 200. The plurality of first shell contacts 214 are distributed on a surface of the shell body 210 configured to face the first side of the base plate 200 when a container including the first shell 210 and the second shell 230 is assembled. The first shell contacts 214 may be any suitable configuration of contacts for contacting the base plate 200, such as any of the contacts 502, 602, 702, 802, or 902 as shown in FIGS. 5-9 and discussed below. The first shell contact portion 214 may be located to correspond to the safety catch hole 202, the weight reduction pocket 204, or the kinematic coupling mechanism 206 on the first side of the base plate 200. The first shell contact portion may be located to avoid contact with the reflector zone 208 on the first side of the base plate 200.

[0033] FIG. 2C illustrates the second side of the base plate shown in FIG. 2A. The second side of the base plate 200 is the side of the base plate 200 that is configured to face a reticle when a reticle pod including the base plate 200 is used to store a reticle. The second side of the base plate 200 includes a gripper pocket 220. The second side of the base plate also includes a base plate sealing area 222. The base plate sealing area 222 is at a location where a cover, such as the cover 300 discussed below and shown in FIGS. 3A-3D, contacts the base plate 200 when the base plate 200 and a reticle pod including the cover 300 are assembled. The second side also includes an under-reticle space 224 that is located between the reticle contacts 226 on the second side of the base plate 200.

[0034] FIG. 2D illustrates a second shell configured to be used on the second side of the base plate of FIG. 2C. The second shell 230 includes a second shell body 232 and a second shell contact portion 234. The second shell body defines another portion of the interior space for housing the base plate 200. The second shell contact portion 234 may be any suitable configuration of contact portion for contacting the base plate 200, such as any of the contact portions 502, 602, 702, 802, or 902 as shown in FIGS. 5-9 and discussed below. The second shell contact portion 234 may be positioned to preferably correspond to the gripper pocket 220 on the second side of the base plate 200. The second shell contact portion 234 may be positioned such that the second shell contact portion does not contact the sealing area 222 or the under-reticle space 224 on the second side of the base plate 200. The sealed area 222 and the under-reticle space 224 may be considered critical areas of the base plate 200. The importance of these areas may be due, for example, to particles generated within such areas having a high potential to adversely affect the reticle, or the visibility of the finish of the surfaces within the sealed area 222 and the under-reticle space 224.

[0035] FIG. 3A illustrates a first side of a cover of a reticle pod stored in a container according to an embodiment. The first side of the cover 300 is the side of the cover 300 that faces a reticle when the cover 300 is assembled with a base plate, such as base plate 200, to form a reticle pod. The first side of the cover 300 includes a flange 302. The first side of the cover 300 further includes a reticle relief 304 that defines a portion of an interior space of a reticle pod that includes the cover 300. The flange 302 also includes a reflector region 306. The first side of the cover 300 further includes a sealing area 308. The cover sealing area 308 is an area configured to contact a base plate, such as base plate 200, when a reticle pod that includes the cover 300 is assembled. The cover sealing area 308 of the cover 300 may correspond to the base plate sealing area 222 shown in FIG. 2C and described above.

[0036] FIG. 3B shows a first shell configured to be used with the first side of the cover of FIG. 3A. The first shell 310 includes a first shell body 312 and a first shell contact portion 314. The first shell body 312 defines a portion of an interior space for receiving the cover 300. A plurality of first shell contact portions 314 are distributed on a surface of the shell body 310 configured to face the first side of the cover 300 when a container including the first shell 310 and the second shell 330 is assembled. The first shell contact portion 314 may be located to correspond to a location on the first side of the cover 300, such as a part of the flange 302 outside the reflector region 306. The first shell contact portion 314 may be located such that the first shell contact portion does not contact the reticle relief 304, the reflector region 306, or the cover sealing area 308 when the cover 300 is placed into the first shell 310.

[0037] 3C shows a second side of the cover shown in FIG. 3A. The second side of cover 300 faces outward when cover 300 is assembled into a reticle pod, for example, when coupled with base plate 200. The second side of cover 300 includes through holes 320. Through holes 320 may be insertion holes for mechanisms that are subsequently installed into cover 300. The second side of cover 300 further includes weight-saving cutouts 322.

[0038] 3D shows a second shell configured to be used on the second side of the cover of FIG. 3C. The second shell 330 includes a second shell body 332 and a second shell contact portion 334. The second shell body 332 defines another portion of the interior space for receiving the cover 300. The second shell contact portion 334 is provided on a side of the shell body 332 configured to face the second side of the cover 300 when the cover 300 is installed inside the container formed by the first shell 310 and the second shell 330. The second shell contact portion 334 may be located on the second side cover 300, for example, at a location corresponding to the location of the through hole 320 and / or the weight-reducing cutout 322.

[0039] 4 shows a flow chart of a method according to an embodiment. The method 400 includes placing 402 a cover or base plate of a reticle pod into a first shell of a container. The method 400 further includes coupling 404 a second shell of the container to the first shell. The method 400 also includes mating 406 fastening features of the first and second shells to limit movement of the cover or base plate.

[0040] A cover or base plate of the reticle pod is placed 402 into the first shell of the container. The cover or base plate may be any cover or base plate selected to correspond to the container containing the first shell. The cover or base plate may be placed 402 into the first shell of the container such that the side of the cover or base plate that corresponds to the first shell faces the interior of the first shell and such that a fastening feature of the first shell, such as first contact 104 described above and shown in FIG. 1 , interconnects with a corresponding feature on the cover or base plate.

[0041] Coupling 404 the second shell of the container to the first shell. The second shell may be coupled to the first shell at 404 by any suitable connection, for example, by latching the second shell to the first shell using, for example, latch 114 as described above and shown in FIG. 1. In an embodiment, the second shell may be pivoted about one or more hinges, such as hinge 112 as described above and shown in FIG. 1, to which the second shell is coupled to the first shell by a latch or other closure. Coupling the second shell to the first shell at 404 results in the first shell and the second shell forming an interior space housing the cover or base plate placed into the first shell at 402. The placement of the cover or base plate into the first shell at 402 followed by coupling of the second shell to the first shell at 404 causes a second fastening feature on the second shell, such as the second contact portion 108 described above and shown in FIG. 1, to mate with a second side of the reticle or base plate.

[0042] The engagement of the fastening features of the first and second shells limits 406 the movement of the cover or base plate. The movement limited at 406 is movement that is in the same plane as at least one of the first or second shells. The movement is limited by contact of the cover or base plate with the fastening features at a predetermined location of the cover or base plate. The resistance to movement by the engagement at 406 can limit movement due to impact, collision, etc., for example, if a container containing the cover or base plate is dropped. The limitation of movement at 406 can reduce vibration of the cover or base plate inside the container. The limitation of movement can be prevention or reduction of movement. In an embodiment, the movement of the cover or base plate can be limited to an extent permitted by the flexibility of the material used in the fastening features and the manufacturing tolerances of the cover or base plate and the respective fastening features. The fastening features can be engaged to the cover or base plate at a predetermined location, such as the locations identified above and shown in Figures 2A, 2C, 3A, and 3C.

[0043] FIG. 5 illustrates the interface of the container with a receiving cover or base plate. In the embodiment of FIG. 5, the shell 500 includes a protrusion 502. A resilient tip 504 is provided over the protrusion 502. The resilient tip 504 provides a surface for contacting a contact feature 506 formed in a cover or base plate 508. The resilient tip 504 may be connected to the protrusion 502 by any suitable method, for example, a press fit over the protrusion 502, an interface of a retention feature formed on the resilient tip 504 and / or the protrusion 502, overmolding, adhesive, combinations thereof, etc. The resilient tip 504 may be molded to correspond to the shape of the contact feature 506, for example, to mate with a particular area of ​​the contact feature 506.

[0044] FIG. 6 illustrates another interface of the container with a receiving cover or base plate. In the embodiment of FIG. 6, a shell 600 includes a protrusion 602 that extends to a rigid tip 604 with a shoulder 606 attached to the protrusion 602. In some embodiments, the protrusion 602 and rigid tip 604 are integrally formed with the shell 600 and are constructed from the same material as the shell 600. The rigid tip 604 provides a surface that contacts a contact feature 608 of a cover or base plate 610. The shoulder 606 can have a shape selected to correspond to the shape of the contact feature 608, for example, to mate with a particular area of ​​the contact feature 608.

[0045] 7 illustrates another interface of the container with the enclosed cover or base plate. In the embodiment illustrated in FIG. 7, a first shell 700 includes a first protrusion 702 covered by a first resilient tip 704. The resilient tip 704 extends into a through hole 706 formed in a cover or base plate 708. A second shell 710 includes a second protrusion 712 covered by a second resilient tip 714. The second resilient tip 714 also extends into the through hole 706. The first resilient tip 704 and the second resilient tip 714 can contact each other in the through hole 706.

[0046] FIG. 8 illustrates another interface of the container's contact with a received cover or base plate. In the embodiment illustrated in FIG. 8, the shell 800 includes a protrusion 802. The protrusion 802 includes a recess 804 formed therein. The recess 804 can have any suitable shape. In an embodiment, the recess 804 can be cylindrical. In an embodiment, the recess 804 is conical or frusto-conical in shape. A resilient insert 806 can be held within the recess 804. In an embodiment, the resilient insert 806 can be press-fit into the recess 804. In an embodiment, the resilient insert 806 can be coupled to the protrusion 802 by any suitable mechanism, such as a mating mechanism, an adhesive, or the like. The resilient insert 806 includes a resilient material. The resilient insert 806 is configured to contact a contact feature 808 of the cover or base plate 810. In an embodiment, a portion of the protrusion 802 can also contact the contact feature 808 of the cover or base plate 810.

[0047] FIG. 9 illustrates another interface of the container with the encased cover or base plate. In the embodiment illustrated in FIG. 9, the shell 900 provides a plurality of contacts 902. All of the plurality of contacts 902 interconnect with a single contact feature 904 of the cover or base plate 906. Some or all of the contacts 902 may include a resilient material at an end 908 of each of the contacts 902. The resilient material at the end 908 may be applied over a protrusion 902. The protrusion 902 may be integrally formed with the shell 900. In an embodiment, some or all of the protrusions 902 may extend to the end 908 without the resilient material, thus providing a rigid material at the surface that interconnects with the contact feature 904 of the cover or base plate 906.

[0048] Aspects It is understood that any of the embodiments 1-9 may be combined with any of the embodiments 10-18.

[0049] Aspect 1. A container for a cover or base plate of a reticle pod, comprising: a first shell having a plurality of first fastening features; a second shell having a plurality of second fastening features; Equipped with the first shell and the second shell are configured to be coupled together; when the first shell and the second shell are coupled together, the first shell and the second shell define an interior space, the interior space being sized to accommodate the cover or the base plate of the reticle pod; the first securing mechanism is configured to mate with the cover or base plate of the reticle pod at a first predetermined location corresponding to a first pod mechanism provided on a first side of the cover or base plate of the reticle pod; the second securing mechanism is configured to mate with the cover or base plate of the reticle pod at a second predetermined location corresponding to a second pod mechanism provided on a second side of the cover or base plate of the reticle pod; when the first securing mechanism mates with the first pod mechanism and the second securing mechanism mates with the second pod mechanism, the engagement limits movement of the cover or the base plate of the reticle pod in a plane with at least one of the first shell or the second shell. container.

[0050] Aspect 2. The container of aspect 1, wherein at least one of the first fastening feature or the second fastening feature each comprises an elastic material.

[0051] Aspect 3. The container of aspect 2, wherein the elastic material is a fluoroelastomer.

[0052] Aspect 4. The container of any one of aspects 1 to 3, wherein at least one of the first fastening feature or the second fastening feature each comprises a rigid material.

[0053] Aspect 5. The container of aspect 4, wherein the rigid material is the same material as the body of the first shell or the second shell.

[0054] Aspect 6. A container as described in any one of aspects 1 to 5, wherein the container is for the cover of the reticle pod, and at least some of the first predetermined positions and the second predetermined positions correspond to through holes in the cover of the reticle pod.

[0055] Aspect 7. A container as described in any one of aspects 1 to 6, wherein the container is for the base plate of the reticle pod, and at least one of the first predetermined position or the second predetermined position corresponds to a kinematic coupling groove of the base plate of the reticle pod.

[0056] Aspect 8. A container as described in any one of aspects 1 to 7, wherein the first predetermined position and the second predetermined position correspond to non-functional locations on the cover or base plate of the reticle pod.

[0057] Aspect 9. The container of any one of aspects 1 to 8, wherein the first shell and the second shell each comprise a polycarbonate or a polyolefin.

[0058] A method of storing a cover or base plate of a reticle pod, comprising: placing the cover or base plate of the reticle pod into a first shell of a container, the first shell including a plurality of first fastening features, and placing the cover or base plate of the reticle pod into the first shell includes mating a first pod feature on a first side of the cover or base plate with the plurality of first fastening features; coupling a second shell of the container to the first shell of the container, the second shell including a second mating feature, and coupling the second shell of the container to the first shell includes mating a second pod feature on a second side of the cover or the base plate with the second fastening feature; Including, the engagement of the first securing mechanism with the first pod mechanism and the engagement of the second securing mechanism with the second pod mechanism limiting movement of the cover or the base plate of the reticle pod in a plane with at least one of the first shell or the second shell. method.

[0059] Aspect 11. The method of aspect 10, wherein at least one of the first fastening feature or the second fastening feature each comprises an elastic material.

[0060] Aspect 12. The method of aspect 11, wherein the elastic material is a fluoroelastomer.

[0061] Aspect 13. The method of any one of aspects 10 to 12, wherein at least one of the first fixation feature or the second fixation feature each comprises a rigid material.

[0062] Aspect 14. The method of aspect 13, wherein the rigid material is the same material as the body of the first shell or the second shell.

[0063] Aspect 15. A method according to any one of aspects 10 to 14, wherein the cover or base plate being stored is the cover of the reticle pod, and at least some of the first fixing mechanism and the second fixing mechanism engage with through holes formed in the cover of the reticle pod.

[0064] Aspect 16. A method according to any one of aspects 10 to 15, wherein the cover or base plate being stored is the base plate of the reticle pod, and at least some of the first fixing mechanism and the second fixing mechanism engage with a kinematic coupling groove of the base plate of the reticle pod.

[0065] Aspect 17. The method of any one of aspects 10 to 16, wherein the first fixing mechanism and the second fixing mechanism mate with non-functional locations of the cover or base plate of the reticle pod.

[0066] Embodiment 18 The method of any one of embodiments 10 to 17, wherein the first shell and the second shell each comprise a polycarbonate or a polyolefin.

[0067] The examples disclosed in this application are to be considered in all respects as illustrative and not restrictive. The scope of the invention is indicated by the appended claims rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced therein.

Claims

1. A container for a cover or base plate of a reticle pod, comprising: a first shell having a plurality of first fastening features; a second shell having a plurality of second fastening features; Equipped with the first shell and the second shell are configured to be coupled together; when the first shell and the second shell are coupled together, the first shell and the second shell define an interior space, the interior space being sized to accommodate the cover or the base plate of the reticle pod; the first securing mechanism is configured to mate with the cover or base plate of the reticle pod at a first predetermined location corresponding to a first pod mechanism provided on a first side of the cover or base plate of the reticle pod; the second securing mechanism is configured to mate with the cover or base plate of the reticle pod at a second predetermined location corresponding to a second pod mechanism provided on a second side of the cover or base plate of the reticle pod; when the first securing mechanism mates with the first pod mechanism and the second securing mechanism mates with the second pod mechanism, the engagement limits movement of the cover or the base plate of the reticle pod in a plane with at least one of the first shell or the second shell. container.

2. The container of claim 1 , wherein at least one of the first securing feature or the second securing feature each comprises a resilient material.

3. The container of claim 2 , wherein the resilient material is a fluoroelastomer.

4. 4. The container of claim 1, wherein at least one of the first securing feature or the second securing feature each comprises a rigid material.

5. The container of claim 4 , wherein the rigid material is the same material as the body of the first shell or the second shell.

6. A container as described in any one of claims 1 to 5, wherein the container is for the cover of the reticle pod, and at least some of the first predetermined positions and the second predetermined positions correspond to through holes in the cover of the reticle pod.

7. A container as described in any one of claims 1 to 6, wherein the container is for the base plate of the reticle pod, and at least one of the first predetermined position or the second predetermined position corresponds to a kinematic coupling groove of the base plate of the reticle pod.

8. The container of claim 1 , wherein the first predetermined location and the second predetermined location correspond to non-functional locations on the cover or base plate of the reticle pod.

9. 9. The container of claim 1, wherein the first shell and the second shell each comprise a polycarbonate or a polyolefin.

10. 1. A method for storing a cover or base plate of a reticle pod, comprising: placing the cover or base plate of the reticle pod into a first shell of a container, the first shell including a plurality of first fastening mechanisms, and placing the cover or base plate of the reticle pod into the first shell includes mating a first pod mechanism on a first side of the cover or base plate with the plurality of first fastening mechanisms; coupling a second shell of the container to the first shell of the container, the second shell including a second mating mechanism, and coupling the second shell of the container to the first shell includes mating a second pod mechanism on a second side of the cover or base plate with the second securing mechanism; Including, the engagement of the first securing mechanism with the first pod mechanism and the engagement of the second securing mechanism with the second pod mechanism limit movement of the cover or the base plate of the reticle pod in a plane with at least one of the first shell or the second shell. method.

11. The method of claim 10 , wherein at least one of the first fastening feature or the second fastening feature each comprises a resilient material.

12. The method of claim 11 , wherein the elastic material is a fluoroelastomer.

13. 13. The method of any one of claims 10 to 12, wherein at least one of the first fixation feature or the second fixation feature each comprises a rigid material.

14. The method of claim 13 , wherein the rigid material is the same material as a body of the first shell or the second shell.

15. A method according to any one of claims 10 to 14, wherein the cover or base plate being stored is the cover of the reticle pod, and at least some of the first fixing mechanism and the second fixing mechanism engage with through holes formed in the cover of the reticle pod.

16. A method according to any one of claims 10 to 15, wherein the cover or base plate being stored is the base plate of the reticle pod, and at least some of the first fixing mechanism and the second fixing mechanism engage with kinematic coupling grooves of the base plate of the reticle pod.

17. The method of claim 10 , wherein the first and second securing mechanisms mate with non-functional locations on the cover or base plate of the reticle pod.

18. 18. The method of any one of claims 10 to 17, wherein the first shell and the second shell each comprise a polycarbonate or a polyolefin.

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