System and method for sealing a fluid path

Abstract

The ring gasket has a main body and wing portions that deflect at least a part of the compressive stress from the axial center of the ring seal. When the wing portions are clamped between the seal faces, they are compressed in both the axial and radial directions. When the wing portions are further compressed, the portions of the wing portions that contact the seal face move radially from farther away from the center of the ring seal toward the center of the ring seal. The outer radial face of the ring seal has wing grooves and a central groove separated by peaks. The grooves may have a V-shape or a U-shape, or may have regularly arranged blind cavities protruding from one or both of the axial end faces.

Description

Technical Field

[0001] (Cross - Reference to Related Applications) This application claims the benefit of U.S. Provisional Application No. 63 / 340,102, filed May 10, 2022, entitled "System and Method for Sealing a Fluid Pathway", the entire disclosure of which is incorporated herein by reference.

Background Art

[0002] The present invention relates to a gasket, mainly made of metal, for sealing fluid joints.

[0003] Embodiments of the present invention relate to a malleable, mainly metal gasket for a seal joint between parts of a fluid pathway. Fluid pathways found in industrial equipment for manufacturing many products, including semiconductors, can be exposed to vacuum, pressure, or purity requirements. Fluid pathways between elements for manipulating processing materials within semiconductor manufacturing equipment typically require attention to maintaining the high purity of the reactants being delivered and generally have a very small cross - sectional area compared to other fluid pathways. The semiconductor manufacturing environment is part of the most severe environments where O - ring seals can be encountered, and the processing can be very diverse, such as high heat, aggressive plasmas, hot wet chemicals and amines, and remote NF3 cleaning. In many cases, metal gaskets have been found by those skilled in the art to provide excellent performance, particularly with respect to resistance to diffusion of processing fluids or contaminants through the gasket and the resulting unwanted leaks.

[0004] One known type of fluid path junction uses a generally annular ring gasket that defines axially aligned holes for fluid (liquid or gas) passage, two axially opposed end faces, a radially inner face, and a radially outer face. A simplified ring seal has flat end faces and smooth circular radially inner and outer faces that define the inner diameter (ID) and outer diameter (OD) of the ring seal. The metal seal causes plastic deformation and achieves a very low leakage rate between substantially parallel planes.

[0005] Generally used seal rings are circular and have a "C"-shaped radial cross-section. These "C-seals" are typically constructed with the open side of the C-structure facing away from the center of the ring. When two parallel faces are brought together with the C-seal in the middle, the C-seal is compressed with the open side of the C-cross-section closed. Due to the ductile properties of the seal, plastic deformation can occur without damaging the mating surfaces. There are also C-seals with retainer sleeves or retainer rings to enhance the elastic recovery of the seal or improve the placement and prevent unwanted movement of the seal.

[0006] Some seals have different radial cross-sections to obtain various seal capabilities for different fluid flow environments. Annular protrusions are axially biased against each other during compression, causing permanent plastic deformation in a ductile metal gasket and forming a seal that is resistant to leakage even with fluids that are difficult to contain. As an example, U.S. Patent No. 6,357,760 to Doyle provides a C-shaped seal that also includes a plurality of bores that project radially inward from the radially outer face toward the radially inner face. The protrusions of the bores through the ring seal form side walls that project radially from the radially outer face of the ring seal toward the radially inner face of the ring seal between the axially opposed end faces. Adding bores to the ring seal increases the deformation of the ring seal during seal compression, while the side walls provide elastic recovery of the ring seal during repeated cycles of compression and decompression.

[0007] Despite these advantages, many of these seals include angular seal edges and seal surfaces, as well as unprotected seal edges that can be scratched during handling and installation, and metal pieces can be seen in the cross-machining between the hole and the outer diameter groove. Excessively complex cross-sections require precision machining, and too much material can increase costs. Conventional seals are difficult to handle heat exceeding 150 degrees.

[0008] To reduce the complexity and length of this specification and to fully establish the state of the art in a particular technical field, the applicant hereby expressly incorporates by reference into this specification all of the following materials identified by the respective paragraph numbers below. The incorporated materials are not necessarily "prior art", and the applicant expressly reserves any rights asserted behind the incorporated materials.

[0009] U.S. Patent No. 6,357,760 to Doyle

[0010] U.S. Patent No. 11,255,433 to Kim Ngoc Vu

[0011] The applicant believes that the materials incorporated above are "not essential" in accordance with 37 CFR § 1.57 because they are referenced to show the background of the invention or the state of the art. However, if the examiner determines that any of the materials incorporated above qualify as "essential material" within the meaning of 37 CFR § 1.57(c)(1)-(3), the applicant will amend the specification to expressly list the essential material incorporated by reference as permitted by the applicable rules. SUMMARY OF THE INVENTION

[0012] The present invention provides, inter alia, a ring seal for connecting devices for treating gases and fluids, preventing leakage of potentially toxic and corrosive gases, liquids, or other fluids.

[0013] Accordingly, an object of the present invention is to provide a ring seal that is highly reproducible, of high quality, inexpensive, and highly reliable for applying a seal between two planes.

[0014] A further object of the present invention is to provide a ring seal that provides a large ductility to achieve a substantially leak-free seal.

[0015] Another object of the present invention is to provide a ring seal that provides substantial elastic recovery so that the seal can withstand a significant number of cycles, compression, and decompression and still provide a substantially leak-free seal.

[0016] Yet another object of the present invention is to provide a ring seal that does not form concentric chambers when compressed to form a seal exhibiting virtually leak characteristics.

[0017] Another object of the present invention is to provide a ring seal that is easy to manufacture and can be configured in various sizes and dimensions.

[0018] Another object of the present invention is to provide a ring seal that can meet temperature requirements exceeding 250 degrees.

[0019] Another object of the present invention is to reduce the materials required for the ring seal by 20% to 30% by using a retainer as a centering device.

[0020] Another object of the present invention is to move the deflection of the ring seal from the axial outer periphery of the ring seal to the center of the seal where the retainer holds the seal in place.

[0021] Yet another object of the present invention is to disperse stress in the ring seal, reduce metal fatigue, and enhance the durability of the ring seal.

[0022] Yet another object of the present invention is that the ring seal is first compressed to act as a seal and further flex during intermittent thermal and vibration stress factors.

[0023] A further object of the present invention is to provide a ring seal with an increased seal area.

[0024] A further object of the present invention is to provide a ring seal with a protective lip.

[0025] A further object of the present invention is to provide a progressive compression method that gradually increases the seal area having a straight wall inner diameter (ID) bore.

[0026] A further object of the present invention is to provide a ring seal that uses less material.

[0027] A further object of the present invention is to provide a ring seal that is turned entirely using a simple standard tool without grooving or milling.

[0028] A further object of the present invention is to provide a ring seal with flexible compressibility.

[0029] A further object of the present invention is to provide a self-aligning ring seal.

[0030] The above and other objects can be achieved using an apparatus that includes a ring gasket for sealing opposing fluid conduit ports, such as those found in fluid delivery systems like semiconductor gas panels, petrochemical manufacturing or distribution systems. The gasket has a body penetrated by a hole that forms a fluid path and defines a radially inner surface, and a radially outer surface. The ring seal also includes first and second axial end faces intended to engage opposing parallel faces between which a seal joint is to be disposed. At least one of the first and second axial end faces has a stress concentration mechanism or wing adjacent radially to the gasket seal area, which is configured and arranged to contact the surface of the corresponding fluid conduit port. The wing deflects at least a portion of the compressive stress away from the axial center of the ring seal. The wing may be shaped such that compression of the wing by the seal face compresses the wing in both axial and radial directions. As the wing is further compressed, the portion of the wing contacting the seal face moves radially from farther away from the center of the ring seal toward the center of the ring seal.

[0031] In one embodiment, the outer radial surface of the ring seal has wing grooves and a central groove separated by peaks. In some embodiments, at least one of the grooves has a V-shape, and in other embodiments, one or more of the grooves have a U-shape.

[0032] In yet another embodiment, the wing includes regularly spaced blind cavities that project from one or both of the axial end faces. In another embodiment, regularly spaced stress concentration blind cavities undercut the wing. In another embodiment, the circumferential phase relationship of the blind cavities may be in phase or may be interposed with a reverse phase.

[0033] The ring gaskets of the various embodiments described herein may be formed from a malleable material. The malleable material can be a single metallic material selected from the group consisting of stainless steel alloys, chromium alloys, nickel alloys, commercially available pure nickel, copper alloys, and commercially available pure copper, a single metallic material substantially identical to a 316 series stainless steel alloy, a single polymeric material selected from the group consisting of polypropylene (PP), polyvinylidene fluoride (PVDF), perfluoroalkoxy polymer (PFA), polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), and polyimide, or a single polymeric material substantially identical to polyimide.

[0034] The above and other objects can be achieved using a method that includes forming a high-purity fluid joint in a fluid delivery system having a first system body with a first body surface and a second system body with a second body surface. The first and second system bodies each have a notch for forming a seal cavity that houses a ring gasket, and each notch has a flat surface that engages the ring gasket to act as a seal.

[0035] The ring gasket has an annular body with a central hole for allowing the passage of gas or fluid, a radially inner surface, a radially outer surface, a central groove, a seal surface, a top where the radially inner surface intersects the radially outer surface, and a wing portion on the radially outer surface of the wing portion separated from the central groove by a wing groove. The ring gasket is disposed within one of the notches so as to fit within the seal cavity when the bodies are bonded together.

[0036] The retainer is fixed to at least one of the first system body and the second system body such that the retainer is present within the central groove of the ring gasket when the bodies are sealed to each other. The first system body is fixed to the second system body such that the ring gasket is compressed between the first seal surface and the second seal surface.

[0037] The aspects and uses of the present invention presented herein are described below in the drawings and detailed description of the invention. Unless otherwise specified, words and phrases in this specification and the claims are intended to have the plain, ordinary, and customary meaning to those of ordinary skill in the applicable technical field. The inventors are fully aware that they can be their own lexicographers as needed. As their own lexicographers, the inventors explicitly choose to use only the plain and ordinary meaning of terms in the specification and claims, unless otherwise specified, and further explicitly indicate a "special" definition of that term and explain how it differs from the plain and ordinary meaning. In the absence of a clear indication of the intention to apply such a "special" definition, it is the intention and desire of the inventors that the simple, plain, and ordinary meaning of the terms be applied to the interpretation of the specification and claims.

[0038] The inventors are also aware of the ordinary principles of English grammar. Thus, when a noun, term, or phrase is intended to be further characterized, specified, or narrowed in any way, such noun, term, or phrase will explicitly include additional adjectives, descriptive terms, or other modifiers in accordance with the ordinary principles of English grammar. In the absence of the use of such adjectives, descriptive terms, or modifiers, such noun, term, or phrase is intended to have the plain and ordinary meaning of ordinary English to those of ordinary skill in the applicable technical field as described above.

[0039] Furthermore, the inventors are fully aware of the criteria and application of the special provisions of 35 U.S.C. § 112(f). Accordingly, the use of the words "function," "means," or "step" in the detailed description of the invention, or in the description of the drawings or the claims, is not intended to indicate in any way an intention to rely on the special provisions of 35 U.S.C. § 112(f) to define the present invention. On the contrary, when intending to apply the provisions of 35 U.S.C. § 112(f) to define the present invention, the claims specifically and expressly set forth the exact phrases "means for" or "step for," and also recite the word "function" (i.e., "means for performing the [insert function] function"). However, such phrases do not recite the structure, materials, or acts that support the function. Thus, even if the claims recite "means for performing the... function" or "step for performing the... function," if the claims also recite any structure, materials, or acts that support such means or steps or perform the recited function, it is the clear intention of the inventors not to apply the provisions of 35 U.S.C. § 112(f). Further, even if the provisions of 35 U.S.C. § 112(f) are applied to define the claimed invention, the present invention is not limited to only the specific structures, materials, or acts described in the preferred embodiments, but also includes any and all structures, materials, or acts that perform the claimed function as described in alternative embodiments or forms of the present invention, or that are known now or later developed equivalents that perform the claimed function.

Brief Description of the Drawings

[0040] A more complete understanding of the present invention can be derived by referring to the detailed description when considered in connection with the following exemplary drawings. In the drawings, like reference numerals refer to like elements or acts throughout the drawings.

[0041]

Figure 1

[0042]

Figure 2

[0043]

Figure 3

[0044]

Figure 4

[0045]

Figure 5

[0046] The elements and operations of the drawings are shown for simplicity and are not necessarily drawn according to a particular order or embodiment.

DETAILED DESCRIPTION OF THE INVENTION

[0047] In the following description, for the sake of convenience of explanation, a number of specific details are set forth in order to provide a thorough understanding of the various aspects of the present invention. However, it will be understood by those skilled in the relevant art that the present invention can be practiced without these specific details. In other instances, well-known structures and devices are shown or discussed more generally in order to avoid obscuring the present invention. In many cases, the description of the operations is sufficient to enable the practice of the various forms of the present invention, especially when the operations are implemented in software. Note that there are many different alternative configurations, devices, and techniques to which the disclosed invention can be applied. The full scope of the present invention is not limited to the examples described below.

[0048] In one application of the present invention, the ring seal 10 is provided to seal opposing fluid conduit ports within a fluid delivery system 500 that includes a first system body 520 having a first planar seal surface 512 that is joined to a second system body 510 having a second planar seal surface 522. As best shown in FIG. 3, the first system body 510 includes a first seal notch 514 that includes the first planar seal surface 512, and the second system body 520 includes a second seal notch 524 that includes the second planar seal surface 522, and may form a seal cavity 550 that houses the ring seal 10. The first system body 510 may have a first system body surface 515 that directly couples to a second system body surface 525 of the second system body 520, or alternatively, the first system body surface 515 may be spaced from the second system body surface 525 by a retainer 50.

[0049] The ring seal 10 includes an annular body element 12 having an axially aligned central bore 14 to permit the passage of gas or fluid. The ring seal 10 includes a radially inner surface 16, a radially outer surface 18, a first axial end face 20, and a second axial end face 22. These surfaces can each take on any number of configurations. They may be substantially flat planes or may be substantially curved. The ring seal 10 may be made of any sufficiently malleable material and can include a single metallic material selected from the group consisting of stainless steel alloys, chrome alloys, nickel alloys, commercially available pure nickel, copper alloys, and commercially available pure copper, a single metallic material substantially identical to a 316 series stainless steel alloy, a single polymeric material selected from the group consisting of polypropylene (PP), polyvinylidene fluoride (PVDF), perfluoroalkoxy polymer (PFA), polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), and polyimide, or a single polymeric material substantially identical to polyimide.

[0050] As shown in FIG. 1, the radial cross-section of the seal provides specific seal capabilities for different fluid flow environments. The radial inner surface 16 includes a flat region 24 for efficient fluid flow and a curved region 26. The curved region 26 serves to form a first wing portion 30a that contacts the first planar seal surface 512 and acts on the seal. The wing portion 30 includes a seal surface 34, a top 36 where the radial inner surface 16 and the radial outer surface 18 intersect, and a wing groove 38 on the radial outer surface 18 of the wing portion 30. The radial outer surface 18 also includes a central groove 40 that can also function as a retainer holding groove for accommodating a retainer 50. The wing groove 38 and the central groove 40 may be separated by a peak 44. In a particular embodiment, the radial outer surface 18 is symmetric about the center of the central groove 40 and forms a second wing portion 30b that contacts the second planar seal surface 522. Alternatively, the second axial end face 22 may include a chamfer on the outer side that is integrally formed with the radial outer surface 18 for convenience. The initially radially flat seal region, suitable for use with a fluid delivery element having an annular protrusion surrounding a circular conduit opening, is formed as a circumferential sector that is generally perpendicular to the central hole axis and parallel to the plane of the second axial end face 22.

[0051] Referring now to FIG. 5, the ring seal 10 is shown as an uncompressed ring seal 110 and a compressed ring seal 210, and the shaded portions represent the stresses applied to the compressed ring seal 210 when the compressed ring seal 210 is compressed between the first planar seal surface 512 and the second plane 33. The uncompressed ring seal 110 shows an uncompressed wing portion 130 and an uncompressed contact surface 134. The compressed wing portion seal includes a compressed wing portion 230, a compressed contact surface 234, a compressed wing groove 238, and a compressed central groove 240.

[0052] As shown in FIG. 5, when the ring seal 10 is axially compressed between the opposing planar seal surfaces 512, 522, the wing portion 230 plastically deforms, and the seal surface 234 deflects slightly radially inwardly in cooperation with further axial compression by the grooves 238, 240. That is, due to the shape of the wing portion 230, the seal surface 234 can move radially inwardly along the wing portion 230, from near the top 236 to near the radially inner surface 216. The peak 244 between the groove 238 and the groove 240 enables effective stress sharing between the wing groove 238 and the central groove 240, and most of the stress is borne by the central groove 240 where the ring seal 210 is thickest and can be reinforced by the retainer 42.

[0053] The seal cavity 550 may be configured to limit the deformation of the ring seal 10 when compressed by configuring the walls of the seal cavity 550 to contact the top 236 when the ring seal 10 is compressed by a desired amount, or the seal cavity may be larger than the ring seal to allow for greater flexibility of the ring seal in different stress environments such as intermittent heat and / or vibration that the fluid delivery system 500 may be subject to. The retainer 50 may project into the seal cavity and contact the ring seal 10 in the central groove 240, or may be present in the central groove 240 without contacting the ring seal 10.

[0054] Finally, while aspects of this specification have been highlighted by reference to particular embodiments, those of ordinary skill in the art will readily recognize that these disclosed embodiments are merely examples of the principles of the subject matter disclosed herein. Accordingly, the disclosed subject matter is not to be limited in any way to the specific methods, protocols, and / or reagents, etc. described herein. Thus, various modifications or alterations or alternative configurations of the disclosed subject matter can be made without departing from the spirit of this specification, in accordance with the teachings herein. Finally, the terms used herein are for the purpose of describing particular embodiments only and are not intended to limit the scope of the disclosure, which is defined only by the claims. Accordingly, embodiments of the disclosure are not to be limited to what is precisely illustrated and described herein.

[0055] This specification describes particular embodiments, including the best mode known to the inventors for carrying out the methods and devices described herein. It will be apparent to those of ordinary skill in the art, upon reading the foregoing description, that variations of these described embodiments will be obvious. Accordingly, this disclosure includes all modifications and equivalents of the subject matter recited in the claims appended hereto as permitted by applicable law. The terms "including" and "such as" are not limiting and are to be construed as "including, but not limited to" and "for example, such as," respectively. Further, any combination of any possible variations of the above-described embodiments is included in this disclosure unless otherwise indicated herein or otherwise clearly contradicted by the context.

Description of the Reference Numerals

[0056] JPEG2025517214000002.jpg153170

Claims

1. A ring gasket system for joining opposing fluid conduit ports, the ring gasket system comprising an annular body, said annular body having, a central hole, a radial inner surface, and a radial outer surface for allowing the passage of gas or fluid, a sealing surface, a top where the radial inner surface intersects the radial outer surface, and a wing portion having wing grooves on the radial outer surface of the wing portion, a central groove separated from the wing groove by a peak, a ring gasket system comprising.

2. The ring gasket system according to claim 1, further comprising a retainer, wherein the central groove is configured to surround the retainer.

3. The ring gasket system according to claim 1, wherein the radial outer surface is symmetric with respect to the center of the central groove.

4. The ring gasket system according to claim 1, wherein the sealing surface moves radially inward when the ring gasket is axially compressed.

5. The annular body is composed of a single metallic material substantially the same as a 316 series stainless steel alloy, a chromium alloy, a nickel alloy, commercially available pure nickel, a copper alloy, and commercially available pure copper, a single polymer material selected from the group consisting of polypropylene (PP), polyvinylidene fluoride (PVDF), perfluoroalkoxy polymer (PFA), polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), and polyimide, or one or more compositions selected from a single polymer material substantially the same as polyimide, the ring gasket system according to claim 1.

6. The ring gasket system according to claim 1, wherein most of the stress during compression of the wing portion is on the material around the central groove.

7. The ring gasket system according to claim 6, further comprising a retainer for reinforcing the central groove.

8. The ring gasket system according to claim 1, further comprising a retainer configured to fit into the central groove and hold a seal in place.

9. The ring gasket system according to claim 1, wherein at least one of the wing groove and the central groove is substantially U-shaped.

10. The ring gasket system according to claim 1, wherein at least one of the wing groove and the central groove is substantially V-shaped.

11. The ring gasket system according to claim 4, wherein the seal surface enables complete seal surface contact from 20% to 100% of the compression range.

12. The opposing fluid conduit ports are coupled to a substantially planar surface having a cavity forming a seal cavity having a first side wall and a second side wall opposing the first side wall, and the radial seal size is smaller than the distance between the opposing seal cavity side walls. The ring gasket system according to claim 1.

13. A method of forming a high-purity fluid joint in a fluid delivery system having a first system body having a first body surface and a second system body having a second body surface, wherein the first body surface has a first notch with a first seal surface, the second body surface has a second notch with a second seal surface, and the first notch and the second notch together form a seal cavity, including disposing an annular body having a central hole for allowing passage of gas or fluid, a radial inner surface, a radial outer surface, a central groove, a seal surface, a top where the radial inner surface intersects the radial outer surface, and a wing portion having a wing groove on the radial outer surface of the wing portion within the first notch, wherein the wing groove is separated from the central groove by a peak including fixing a retainer to at least one of the first system body and the second system body, wherein the retainer is shaped to be present within the central groove of the annular body, including fixing the first system body to the second system body such that the annular body is compressed between the first seal surface and the second seal surface.

14. The method according to claim 13, wherein the annular body is compressed from about 20% to about 100% of the compression range.

15. The method according to claim 13, further including coupling a fluid conduit port to a substantially planar surface having a cavity forming a seal cavity having a first side wall and a second side wall opposing the first side wall, and the radial seal size is smaller than the distance between the opposing seal cavity side walls.

16. The method according to claim 13, wherein the radial outer surface is symmetric with respect to the center of the central groove.

17. The method according to claim 13, wherein the sealing surface moves radially inward when the ring gasket is axially compressed.

18. The method according to claim 13, further comprising selecting the material of the annular body from one or more compositions selected from the group consisting of stainless steel alloys, chromium alloys, nickel alloys, commercially available pure nickel, copper alloys, and commercially available pure copper, a single metallic material substantially the same as a 316 series stainless steel alloy, polypropylene (PP), polyvinylidene fluoride (PVDF), perfluoroalkoxy polymer (PFA), polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), and polyimide, or a single polymeric material substantially the same as polyimide.

19. The method according to claim 13, further comprising disposing most of the stress during compression of the wing portion in the material around the central groove.

20. The method according to claim 13, further comprising reinforcing the central groove with a retainer.

21. The method according to claim 13, further comprising holding the annular body at a predetermined position at the center of the fluid path by a retainer.

22. The method according to claim 13, further comprising fixing a retainer configured to be present in the central groove to the second system body.

23. The method according to claim 22, wherein the retainer is fixed with a pin or a bolt.

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